JP6661393B2 - レーザ加工装置 - Google Patents

レーザ加工装置 Download PDF

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Publication number
JP6661393B2
JP6661393B2 JP2016014504A JP2016014504A JP6661393B2 JP 6661393 B2 JP6661393 B2 JP 6661393B2 JP 2016014504 A JP2016014504 A JP 2016014504A JP 2016014504 A JP2016014504 A JP 2016014504A JP 6661393 B2 JP6661393 B2 JP 6661393B2
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Japan
Prior art keywords
laser
unit
laser light
light
mirror
Prior art date
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Application number
JP2016014504A
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English (en)
Japanese (ja)
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JP2017131943A (ja
Inventor
惇治 奥間
惇治 奥間
光洋 長尾
光洋 長尾
泰則 伊ケ崎
泰則 伊ケ崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
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Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to JP2016014504A priority Critical patent/JP6661393B2/ja
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to KR1020187022486A priority patent/KR20180104643A/ko
Priority to US16/072,626 priority patent/US20190030644A1/en
Priority to CN201780008410.2A priority patent/CN108602159B/zh
Priority to DE112017000576.0T priority patent/DE112017000576T5/de
Priority to PCT/JP2017/002315 priority patent/WO2017130953A1/ja
Priority to CN201720101992.6U priority patent/CN206598016U/zh
Priority to TW106103322A priority patent/TWI723127B/zh
Publication of JP2017131943A publication Critical patent/JP2017131943A/ja
Application granted granted Critical
Publication of JP6661393B2 publication Critical patent/JP6661393B2/ja
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  • Laser Beam Processing (AREA)
  • Optical Elements Other Than Lenses (AREA)
JP2016014504A 2016-01-28 2016-01-28 レーザ加工装置 Active JP6661393B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2016014504A JP6661393B2 (ja) 2016-01-28 2016-01-28 レーザ加工装置
US16/072,626 US20190030644A1 (en) 2016-01-28 2017-01-24 Laser machining device and laser output device
CN201780008410.2A CN108602159B (zh) 2016-01-28 2017-01-24 激光加工装置及激光输出装置
DE112017000576.0T DE112017000576T5 (de) 2016-01-28 2017-01-24 Laserbearbeitungsvorrichtung und laserausgabevorrichtung
KR1020187022486A KR20180104643A (ko) 2016-01-28 2017-01-24 레이저 가공 장치 및 레이저 출력 장치
PCT/JP2017/002315 WO2017130953A1 (ja) 2016-01-28 2017-01-24 レーザ加工装置及びレーザ出力装置
CN201720101992.6U CN206598016U (zh) 2016-01-28 2017-01-26 激光加工装置
TW106103322A TWI723127B (zh) 2016-01-28 2017-01-26 雷射加工裝置及雷射輸出裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016014504A JP6661393B2 (ja) 2016-01-28 2016-01-28 レーザ加工装置

Publications (2)

Publication Number Publication Date
JP2017131943A JP2017131943A (ja) 2017-08-03
JP6661393B2 true JP6661393B2 (ja) 2020-03-11

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ID=59504116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016014504A Active JP6661393B2 (ja) 2016-01-28 2016-01-28 レーザ加工装置

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JP (1) JP6661393B2 (zh)
CN (1) CN206598016U (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7278178B2 (ja) * 2019-09-05 2023-05-19 株式会社ディスコ レーザー加工装置の光軸確認方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010155258A (ja) * 2008-12-26 2010-07-15 Toray Eng Co Ltd 基板処理装置
JP4651731B2 (ja) * 2009-07-29 2011-03-16 西進商事株式会社 レーザースクライブ加工方法
JP6121733B2 (ja) * 2013-01-31 2017-04-26 浜松ホトニクス株式会社 レーザ加工装置及びレーザ加工方法
JP6258787B2 (ja) * 2014-05-29 2018-01-10 浜松ホトニクス株式会社 レーザ加工装置及びレーザ加工方法

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Publication number Publication date
JP2017131943A (ja) 2017-08-03
CN206598016U (zh) 2017-10-31

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