JP6652037B2 - Emission analyzer - Google Patents

Description

  The present invention relates to an emission spectrometer for performing analysis by discharging a sample.

  The emission analyzer is provided with, for example, an electrode, and a sample is arranged so as to face the electrode. When the sample is analyzed, a discharge is generated between the sample and the electrode, and light generated by the discharge is dispersed in a spectroscope. Then, the spectroscopic light of each wavelength is received by the detector, and the sample is analyzed based on the received light intensity of each wavelength (for example, see Patent Document 1 below).

  The spectroscope and the detector are provided in the measurement chamber, and light generated by discharging the sample enters the measurement chamber. That is, the light that has entered the measurement chamber is split by the spectroscope in the measurement chamber and detected by the detector. During the analysis, the measurement chamber is filled with gas or kept in a vacuum. Thereby, it is possible to prevent light of a specific wavelength from being affected by oxygen in the measurement chamber, and to improve the analysis accuracy.

  In the case of a configuration in which the measurement chamber is filled with gas, an introduction path for introducing gas into the measurement chamber and an extraction path for extracting gas from the measurement chamber communicate with the measurement chamber. An introduction valve is provided in the introduction path, and the amount of gas introduced from the introduction path into the measurement chamber can be controlled by opening and closing the introduction valve. In addition, an outlet valve is provided in the outlet path, and by opening and closing the outlet valve, it is possible to control the amount of gas discharged from the measurement chamber to the outlet path.

  In this type of emission spectrometer, when the power is switched from the off state to the on state, for example, the gas is introduced into the measurement chamber with both the introduction valve and the discharge valve open. . As a result, the oxygen in the measurement chamber is expelled via the lead-out path, and after the measurement chamber is filled with gas, the analysis is started.

JP 2011-75376 A

  As a gas introduced into the measurement chamber, for example, an inert gas heavier than oxygen is used. Since such an inert gas is expensive, it is preferable to reduce the consumption as much as possible. However, in the emission analyzer having the above-described configuration, the introduction valve and the extraction valve are opened each time the power is switched from the off state to the on state, and the gas in the measurement chamber is exchanged. There is a problem that the amount increases and the running cost increases.

  The present invention has been made in view of the above circumstances, and has as its object to provide an emission spectrometer capable of reducing the amount of gas introduced into a measurement chamber.

  An emission spectrometer according to the present invention is an emission spectrometer for discharging a sample to perform analysis, and includes a measuring unit, a spectroscope, a gas introducing unit, a gas deriving unit, a power switching unit, and a timing unit. And a gas flow controller. The measurement section has a measurement chamber into which light generated by discharging the sample is incident. The spectroscope is provided in the measurement chamber and splits light incident on the measurement chamber. The gas introduction unit introduces a gas into the measurement chamber. The gas derivation unit derives gas from the measurement chamber. The power switching unit switches the power of the emission analyzer to an on state or an off state. The timer measures a time during which the power of the emission analyzer is turned off by the power switching unit. The gas flow control unit, when the power of the emission analyzer is switched from the off state to the on state by the power supply switching unit, based on the time measured by the timer unit, the gas from the gas introduction unit And the amount of gas derived from the gas deriving unit are controlled.

  According to such a configuration, when the power of the emission analyzer is switched from the off state to the on state, the amount of gas introduced and the amount of gas introduced into the measurement chamber are determined based on the time during which the power is off. Controlled. Therefore, for example, when the amount of oxygen flowing into the measurement chamber is small, such as when the power supply is turned off for a short time, and when the power supply is off for a long time, the measurement is performed. The amount of gas introduced and the amount of gas introduced into the measurement chamber after the power is switched on can be made different when the amount of oxygen flowing into the room is large. Thus, it is possible to prevent the gas in the measurement chamber from being replaced more than necessary, and it is possible to reduce the consumption of gas introduced into the measurement chamber.

  The gas introduction unit may be formed with an introduction path for introducing gas into the measurement chamber, and may be provided with an introduction valve for opening and closing the introduction path. Further, the gas outlet may be provided with a lead-out path for leading out gas from the measurement chamber, and may be provided with a lead-out valve for opening and closing the lead-out path. In this case, when the power of the emission analyzer is switched from an on state to an off state by the power supply switching unit, the gas flow control unit closes the introduction valve and the derivation valve, and the power supply switching unit When the power of the emission analyzer is switched from an off state to an on state by a unit, the open / close state of the inlet valve and the outlet valve may be controlled based on the time measured by the timer unit.

  According to such a configuration, when the power of the emission analyzer is switched from the ON state to the OFF state, the introduction valve and the discharge valve are closed, and the measurement chamber is maintained in a gas-filled state. Can be. Even in such a case, since oxygen may flow into the measurement chamber after a long time, when the power of the emission analyzer is switched from the off state to the on state, the power is turned off. By controlling the amount of gas to be introduced into and out of the measurement chamber based on the time spent, gas can be introduced into the measurement chamber by the minimum necessary amount.

  The emission spectrometer may further include a leak valve for discharging gas from the measurement chamber when the pressure in the measurement chamber becomes equal to or higher than a predetermined value. In this case, during the analysis, the gas flow control unit may open the introduction valve in a state where the outlet valve is closed, and introduce the gas at the first flow rate into the measurement chamber.

  According to such a configuration, the gas is discharged from the leak valve while introducing the gas at the first flow rate into the measurement chamber by opening the introduction valve while the discharge valve is closed during the analysis, and the gas is supplied into the measurement chamber. It can be kept filled. In such an emission analyzer, if a long time elapses after the power is switched from the on state to the off state, oxygen may flow from the leak valve into the measurement chamber. Even in such a case, when the power of the emission analyzer is switched from the off state to the on state, the amount of gas introduced into and taken out from the measurement chamber based on the time the power was off. , It is possible to introduce the minimum necessary gas in accordance with the inflow amount of oxygen from the leak valve into the measurement chamber.

  When the power of the emission analyzer is switched from the off state to the on state by the power supply switching unit, and the time measured by the timer unit is less than a threshold, the gas flow control unit controls the derivation valve. The gas may be introduced into the measurement chamber at the first flow rate by opening the introduction valve in a state where is closed.

  According to such a configuration, when the power of the emission analyzer is in the off state for a short time less than the threshold, when the power is switched to the on state, the outlet valve is closed. In this state, the introduction valve is opened, and the gas is introduced into the measurement chamber at the same first flow rate as during the analysis. As described above, when the time during which the power of the emission analyzer is turned off is relatively short, since the amount of oxygen flowing into the measurement chamber is small, the operation of replacing the gas in the measurement chamber is omitted. The consumption of gas introduced into the measurement chamber can be reduced.

  When the power of the emission analyzer is switched from an off state to an on state by the power supply switching unit, and the time measured by the timer unit is equal to or greater than a threshold, the gas flow control unit controls the introduction valve. Opening the outlet valve, introducing gas at a second flow rate greater than the first flow rate into the measurement chamber, closing the outlet valve after a lapse of a predetermined time, and introducing gas at the first flow rate into the measurement chamber. May be.

  According to such a configuration, when the power of the emission analyzer is in the off state for a long time equal to or longer than the threshold, when the power is switched to the on state, the introduction valve and the discharge valve are turned off. Open and gas is introduced into the measurement chamber at a second flow rate greater than the first flow rate. As described above, when the power of the emission analyzer is turned off for a relatively long time, the amount of oxygen flowing into the measurement chamber is large, so that the gas is introduced into the measurement chamber at the second flow rate. The gas in the measurement chamber can be replaced to expel oxygen in the measurement chamber. After a predetermined period of time has elapsed and the oxygen in the measurement chamber has been expelled, the outlet valve is switched to a closed state, and gas is introduced into the measurement chamber at a first flow rate similar to that at the time of analysis. This prevents the gas in the measurement chamber from being replaced.

1 is a schematic diagram illustrating a configuration example of an emission spectrometer according to an embodiment of the present invention. FIG. 2 is a block diagram illustrating an example of an electrical configuration of the emission analyzer of FIG. 1. 9 is a flowchart illustrating an example of a process performed by a control unit when the power of the emission analyzer is switched from an on state to an off state. 9 is a flowchart illustrating an example of a process performed by a control unit when the power of the emission analyzer is switched from an on state to an off state. It is a timing chart showing an example of the control mode of the flow rate of the gas introduced into the measurement chamber, the opening and closing state of the introduction valve and the derivation valve, the control mode when the time measured by the timer is less than the threshold. Is shown. It is a timing chart showing an example of a control mode of the flow rate of the gas introduced into the measurement chamber, the opening and closing state of the introduction valve and the derivation valve, the control mode when the time measured by the timer is equal to or more than the threshold value. Is shown.

  FIG. 1 is a schematic diagram illustrating a configuration example of an emission spectrometer according to an embodiment of the present invention. This emission analyzer includes a sample mounting table 1 and electrodes 2. A discharge chamber 11 is formed inside the sample mounting table 1, and the tip of the electrode 2 faces the discharge chamber 11. An opening 12 is formed in a wall surface of the discharge chamber 11 at a position facing the tip of the electrode 2. The solid sample 3 to be analyzed is mounted on the sample mounting table 1 so as to cover the opening 12, and the surface thereof is opposed to the tip of the electrode 2 at an interval.

  At the time of analysis, a voltage is applied to the electrode 2, so that discharge occurs between the surface of the sample 3 and the tip of the electrode 2. Light generated in the discharge chamber 11 during discharge is transmitted through the condenser lens 13 and guided to the measurement unit 4. The measurement section 4 is formed in a hollow shape by forming a measurement chamber 41 therein, and a spectroscope 42 and a detector 43 are provided in the measurement chamber 41.

  Light generated by discharging the sample enters the measurement chamber 41 and is separated by the spectroscope 42. The detector 43 includes a plurality of light receiving elements 431, and the light of each wavelength separated by the spectroscope 42 is received by each light receiving element 431, so that the analysis of the sample 3 can be performed based on the light receiving intensity of each wavelength. Done.

  The sample mounting table 1 is formed with a gas supply path 14 and a gas discharge path 15 for communicating the inside and the outside of the discharge chamber 11 with each other. At the time of analysis, the inert gas supplied from the gas supply path 14 into the discharge chamber 11 overflows from the gas discharge path 15 so that the discharge chamber 11 is filled with the inert gas. In this manner, by expelling the air in the discharge chamber 11 with the inert gas, it is possible to prevent components in the air from adversely affecting the analysis result. As the inert gas introduced into the discharge chamber 11, for example, argon gas or the like is used, but a gas other than argon gas can also be used.

  An inert gas is introduced into the measurement chamber 41 of the measurement unit 4 in the same manner as in the discharge chamber 11. At the time of analysis, the inside of the discharge chamber 11 is filled with an inert gas (for example, an oxygen concentration of 10 ppm or less), thereby preventing light of a specific wavelength from being affected by oxygen in the air and improving analysis accuracy. Can be improved. As the inert gas introduced into the measuring chamber 41 of the measuring section 4, for example, argon gas or the like is used, but a gas other than argon gas can also be used. Further, a configuration in which a gas other than the inert gas is introduced into the measurement chamber 41 may be employed.

  In the measurement chamber 41, an introduction path 44, an extraction path 45, and a leak path 46 communicate with each other. The introduction path 44 has one end communicating with the inside of the measurement chamber 41 and the other end connected to a gas supply source 441 composed of, for example, a gas cylinder. The supply amount of the gas (inert gas) from the gas supply source 441 can be arbitrarily adjusted.

  The gas supplied from the gas supply source 441 is introduced into the measurement chamber 41 via the introduction path 44. An introduction valve 442 is provided in the introduction path 44, and the introduction path 44 can be opened and closed by the introduction valve 442. The introduction path 44, the gas supply source 441, and the introduction valve 442 constitute a gas introduction unit that introduces gas into the measurement chamber 41.

  One end of the lead-out path 45 communicates with the inside of the measurement chamber 41, and the other end is open to the outside of the measurement chamber 41. The outlet path 45 is provided with an outlet valve 451, and the outlet valve 45 can be used to open and close the outlet path 45. The outlet path 45 and the outlet valve 451 constitute a gas outlet that draws gas from the measurement chamber 41.

  One end of the leak path 46 communicates with the inside of the measurement chamber 41, and the other end is open to the outside of the measurement chamber 41. A leak valve 461 is provided in the leak path 46, and when the pressure in the measurement chamber 41 becomes a certain value or more, the gas in the measurement chamber 41 is discharged from the leak path 46 via the leak valve 461. It has become.

  At the time of analysis, gas is introduced from the gas supply source 441 into the measurement chamber 41 via the introduction path 44 in a state where the introduction valve 442 is opened and the extraction valve 451 is closed. Thereby, the inside of the measurement chamber 41 is maintained in a state of being filled with the gas, and a part of the gas overflows from the leak path 46, thereby preventing oxygen (air) from flowing into the measurement chamber 41. be able to.

  FIG. 2 is a block diagram showing an example of an electrical configuration of the emission analyzer of FIG. This emission spectrometer is provided with, for example, a control unit 5, a power supply device 6, and a power supply switching unit 7 in addition to the above-described configuration. The control unit 5 includes, for example, a CPU (Central Processing Unit), and functions as a timer unit 51, a gas flow control unit 52, and the like when the CPU executes a program.

  The power supply device 6 is a device for supplying power to each part of the emission analyzer. The power supply switching unit 7 has a configuration including, for example, a switch, and switches the power supply of the emission analyzer to an on state or an off state by switching the power supply from the power supply device 6. Here, the “off state” means a state in which the power supplied from the power supply device 6 is smaller than that in the “on state”. In addition to the state in which no power is supplied, for example, the amount of supplied power is extremely small. A small state (such as a power saving state) is included.

  The timer 51 measures the time during which the power of the emission analyzer is turned off by the power switching unit 7. That is, the timer 51 starts measuring the time when the power of the emission analyzer is switched from the ON state to the OFF state by the power supply switching unit 7, and thereafter, measures the time until the power is switched from the OFF state to the ON state. Measure the time.

  The gas flow controller 52 controls the amount of gas introduced from the gas supply source 441 into the measurement chamber 41, and the open / close state of the introduction valve 442 and the derivation valve 451. Specifically, the amount of gas introduced from the gas supply source 441 is adjusted based on the switching operation of the power supply of the emission analyzer by the power supply switching unit 7 and the time measured by the timer unit 51, and The valve 442 and the outlet valve 451 are opened and closed.

  FIGS. 3 and 4 are flowcharts illustrating an example of processing by the control unit 5 when the power of the emission analyzer is switched from the on state to the off state. When the power of the emission analyzer is on (normal time), gas is introduced into the measurement chamber 41 with the introduction valve 442 opened and the extraction valve 451 closed as in the case of analysis, Since a part of the gas is discharged from the leak path 46, the measurement chamber 41 is in a state of being filled with a gas of a constant pressure.

  When the power of the emission analyzer is switched from the on state to the off state (Yes in step S101), first, the introduction valve 442 is closed (step S102), and time measurement by the timer 51 is started (step S102). Step S103). At this time, since both the introduction valve 442 and the discharge valve 451 are closed, the measurement chamber 41 is almost closed. However, for example, a small amount of Air (oxygen) will gradually enter.

  Thereafter, when the power of the emission analyzer is switched from the off state to the on state (Yes in step S104), it is determined whether the time measured by the timer 51 is less than a predetermined threshold (step S104). Step S105). As the threshold value, a value set in advance as a relatively short time, such as one minute to several minutes, or a fixed time less than one hour (eg, 30 minutes) is used.

  If the time measured by the timer 51 is less than the threshold (Yes in Step S105), the introduction valve 442 is opened with the derivation valve 451 closed (Step S106). Thereby, the gas is introduced into the measurement chamber 41 through the introduction path 44, and the flow rate of the gas is controlled so as to be the same as the normal flow rate (first flow rate) (step S107). The first flow rate is set in advance to a value of, for example, about 0.1 to 1 L / min, but is not limited thereto, and may be set to another flow rate, for example, an operation unit (not shown). The configuration may be such that an arbitrary flow rate can be set by operating.

  On the other hand, when the time measured by the timer 51 is equal to or greater than the threshold (No in Step S105), the introduction valve 442 and the derivation valve 451 are opened (Steps S108 and S109). Thereby, the gas is introduced into the measurement chamber 41 through the introduction path 44, and the gas is extracted from the inside of the measurement chamber 41 through the extraction path 45. At this time, the flow rate of the gas introduced into the measurement chamber 41 is controlled to be higher than the first flow rate (second flow rate) (step S110).

  The second flow rate is set in advance to a value of, for example, about 5 to 10 L / min, but is not limited thereto, and may be set to another flow rate, for example, by operating an operation unit (not shown). By doing so, the configuration may be such that the flow rate can be set to an arbitrary value. Further, the second flow rate can be set to a different value depending on the time measured by the timer 51. For example, the second flow rate may be set stepwise so that the longer the time measured by the timer 51 is, the larger the second flow rate is.

  Thereafter, when a predetermined time has elapsed (Yes in step S111), the outlet valve 451 is closed (step S112). At this time, the flow rate of the gas introduced into the measurement chamber 41 is controlled to be the first flow rate (Step S113). As a result, a state similar to the normal state is obtained, and a part of the gas introduced into the measurement chamber 41 is exhausted from the leak path 46, and the measurement chamber 41 is filled with a gas of a constant pressure.

  The above-mentioned predetermined time can be variably set to any value by operating an operation unit (not shown), for example, as a value sufficient to expel oxygen in the measurement chamber 41. Further, the predetermined time can be set to a different value according to the time measured by the timer 51. For example, the longer the time measured by the timer 51 is, the longer the predetermined time is, such as 30 seconds if the time measured by the timer 51 is within one to several hours, and two to three minutes if it is about one day. The predetermined time may be set in a stepwise manner so that is longer. However, the predetermined time is not limited to being variable, and may be set to a fixed time.

  FIGS. 5 and 6 are timing charts showing an example of the open / closed state of the introduction valve 442 and the derivation valve 451 and a control mode of the flow rate of the gas introduced into the measurement chamber 41. FIG. 5 shows a control mode when the time measured by the timer 51 is less than the threshold (Yes in step S105 of FIG. 3). FIG. 6 shows the time measured by the timer 51 equal to or more than the threshold. (No in step S105).

  As shown in FIGS. 5 and 6, normally, the introduction valve 442 is opened and the discharge valve 451 is closed, so that the gas is introduced into the measurement chamber 41 at the first flow rate. Is controlled. In this state, when the power of the emission analyzer is switched from the on state to the off state (timing T1), the introduction valve 442 is closed, so that both the introduction valve 442 and the discharge valve 451 are closed. Become. At this time, time measurement by the timer 51 is started.

  Thereafter, when the power of the emission analyzer is switched from the off state to the on state (timing T2), if the time measured by the timer 51 is less than the threshold, as shown in FIG. The introduction valve 442 is opened with the 451 closed. Thus, the gas is introduced from the introduction path 44 into the measurement chamber 41, and the gas in the measurement chamber 41 is not extracted from the extraction path 45. Then, by controlling the gas to be introduced into the measurement chamber 41 at the first flow rate, the state returns to a state similar to the normal state.

  On the other hand, when the power of the emission analyzer is switched from the off state to the on state (timing T2), if the time measured by the timer 51 is equal to or greater than the threshold value, as shown in FIG. Both 442 and the outlet valve 451 are opened. As a result, the gas is introduced into the measurement chamber 41 from the introduction path 44 and the gas in the measurement chamber 41 is extracted from the extraction path 45. Then, by controlling the gas to be introduced into the measurement chamber 41 at the second flow rate larger than the first flow rate, the gas in the measurement chamber 41 is replaced.

  When a predetermined time has elapsed in this state (timing T3), the outlet valve 451 is closed while the inlet valve 442 is open. As a result, the gas in the measurement chamber 41 is not led out from the lead-out path 45 while the gas is introduced from the lead-in path 44 into the measurement chamber 41. Then, by controlling the gas to be introduced into the measurement chamber 41 at the first flow rate, the state returns to a state similar to the normal state.

  As described above, in the present embodiment, when the power of the emission analyzer is switched from the off state to the on state, the amount of gas introduced from the introduction path 44 based on the time measured by the timer 51, and , The amount of gas to be led out from the lead-out path 45 is controlled. Therefore, for example, when the amount of oxygen flowing into the measurement chamber 41 is small, such as when the power supply is turned off for a short time (see FIG. 5), for example, when the power supply is off. When the amount of oxygen flowing into the measurement chamber 41 is large, as in the case of a long time (see FIG. 6), the amount of gas introduced into and deducted from the measurement chamber 41 after the power is switched on is determined. Can be different. This can prevent the gas in the measurement chamber 41 from being replaced more than necessary, so that the consumption of gas introduced into the measurement chamber 41 can be reduced.

  More specifically, when the power of the emission analyzer is switched from the on state to the off state (timing T1), the introduction valve 442 and the discharge valve 451 are closed, and the measurement chamber 41 is filled with gas. State can be maintained. Even in such a case, since oxygen may flow into the measurement chamber 41 from a gap such as the leak path 46 after a long time, the power of the emission analyzer is switched from the off state to the on state. Sometimes, the gas is introduced into the measurement chamber 41 by the minimum necessary amount by controlling the amount of gas introduced into and out of the measurement chamber 41 based on the time when the power is off. Can be.

  That is, when the time during which the power of the emission analyzer is off is relatively short (see FIG. 5), the gas in the measurement chamber 41 is exchanged because the amount of oxygen flowing into the measurement chamber 41 is small. By omitting the operation, the consumption of gas introduced into the measurement chamber 41 can be reduced. On the other hand, when the power of the emission analyzer is turned off for a relatively long time (see FIG. 6), the amount of oxygen flowing into the measurement chamber 41 is large, so The gas in the measurement chamber 41 can be exchanged by introducing the gas into the chamber, and the oxygen in the measurement chamber 41 can be expelled. After a predetermined time has elapsed and the oxygen in the measurement chamber 41 has been expelled, the outlet valve 451 is switched to a closed state, and gas is introduced into the measurement chamber 41 at the same first flow rate as in the analysis. This can prevent the gas in the measurement chamber 41 from being replaced more than necessary.

  In the above embodiment, when the time during which the power of the spectroscopic analyzer is turned off is less than the threshold value (Yes in step S105 of FIG. 3), the gas is supplied into the measurement chamber 41 at the same first flow rate as at the time of analysis. The configuration to be introduced has been described. However, the present invention is not limited to such a configuration, and if the configuration is such that the amount of gas introduced into the measurement chamber 41 and the amount of gas derived from the measurement chamber 41 are controlled, for example, the first flow rate may be different. The configuration may be such that gas is introduced into the measurement chamber 41 at a flow rate, or the flow rate may be switched to a plurality of stages.

  Further, in the above embodiment, when the time during which the power of the spectroscopic analyzer is turned off is equal to or longer than the threshold (No in step S105 of FIG. 3), the gas flows into the measurement chamber 41 at the second flow rate for a predetermined time. The configuration in which the gas is introduced at the same first flow rate as that at the time of analysis after the introduction is described. However, the present invention is not limited to such a configuration. For example, the first flow rate or the second flow rate may be used if the amount of gas introduced into the measurement chamber 41 and the amount of gas derived from the measurement chamber 41 are controlled. The gas may be introduced into the measurement chamber 41 at a flow rate different from the flow rate, or the flow rate may be switched to three or more steps.

  The threshold value is not limited to one, and may be set, for example, in plural. That is, the time during which the power of the spectrometer is turned off is compared with a plurality of thresholds, and the amount of gas introduced into the measurement chamber 41 and the amount of gas May be controlled in a different manner.

  In the above embodiment, the configuration in which the gas in the measurement chamber 41 is exhausted via the leak valve 461 has been described, but a configuration in which the leak valve 461 is not provided may be employed. Further, a configuration in which at least one of the introduction valve 442, the derivation valve 451, and the leak valve 461 is not provided, or a configuration in which another valve is provided may be employed. Further, the amount of gas introduced into the measurement chamber 41 and the amount of gas derived from the measurement chamber 41 are not limited to the configuration controlled by the open / closed state of the valve. It may be configured to be controlled.

  In the above embodiment, the configuration in which the spectroscope 42 and the detector 43 are provided in the measurement chamber 41 has been described. However, as long as the spectroscope 42 is provided in the measurement chamber 41, the configuration is not limited to the above-described configuration. For example, the detector 43 is provided outside the measurement chamber 41. Is also good.

  The configuration for generating light by discharging the sample is not limited to the configuration shown in FIG. 1, and any other configuration can be adopted. In this case, any mode such as a spark discharge, an arc discharge, and an inductively coupled plasma (ICP) discharge can be adopted as a mode of the discharge.

DESCRIPTION OF SYMBOLS 1 Sample mounting table 2 Electrode 3 Sample 4 Measurement part 5 Control part 6 Power supply 7 Power supply switching part 11 Discharge chamber 12 Opening 13 Condensing lens 14 Gas supply path 15 Gas discharge path 41 Measurement chamber 42 Spectroscope 43 Detector 44 Introducing path 45 Outgoing path 46 Leak path 51 Timing section 52 Gas flow control section 431 Light receiving element 441 Gas supply source 442 Introducing valve 451 Deriving valve 461 Leak valve

Claims (5)

An emission spectrometer for discharging a sample to perform analysis.
A measurement unit in which a measurement chamber into which light generated by discharging the sample is incident,
A spectroscope that is provided in the measurement chamber and splits light incident on the measurement chamber;
A gas introduction unit for introducing gas into the measurement chamber,
A gas deriving unit that derives gas from the measurement chamber,
A power switching unit that switches the power of the emission analyzer to an on state or an off state,
A timer that measures the time that the power of the emission analyzer is turned off by the power supply switching unit,
When the power of the emission analyzer is switched from the off state to the on state by the power supply switching unit, based on the time measured by the timer unit, the amount of gas introduced from the gas introduction unit, and An emission spectrometer comprising a gas flow controller for controlling the amount of gas derived from the gas deriving unit. In the gas introduction unit, an introduction path for introducing gas into the measurement chamber is formed, and an introduction valve for opening and closing the introduction path is provided.
In the gas lead-out section, a lead-out path for leading out gas from the measurement chamber is formed, and a lead-out valve that opens and closes the lead-out path is provided,
The gas flow control unit, when the power of the emission analyzer is switched from an on state to an off state by the power supply switching unit, the inlet valve and the outlet valve are closed, and the power supply switching unit When the power of the emission analyzer is switched from the off state to the on state, the open / close state of the introduction valve and the derivation valve is controlled based on the time measured by the timer unit. 2. The emission spectrometer according to 1. When the pressure in the measurement chamber is equal to or higher than a certain value, the apparatus further includes a leak valve that discharges gas from the measurement chamber,
The emission analysis according to claim 2, wherein, during the analysis, the gas flow control unit opens the introduction valve in a state where the outlet valve is closed, and introduces the gas at the first flow rate into the measurement chamber. apparatus.   When the power of the emission analyzer is switched from the off state to the on state by the power supply switching unit, and the time measured by the timer unit is less than a threshold, the gas flow control unit controls the derivation valve. The emission analyzer according to claim 3, wherein the introduction valve is opened in a state where the gas is closed, and the gas is introduced into the measurement chamber at the first flow rate.   When the power of the emission analyzer is switched from an off state to an on state by the power supply switching unit, and the time measured by the timer unit is equal to or greater than a threshold, the gas flow control unit controls the introduction valve. Opening the outlet valve, introducing gas at a second flow rate greater than the first flow rate into the measurement chamber, closing the outlet valve after a lapse of a predetermined time, and introducing gas at the first flow rate into the measurement chamber. The emission analyzer according to claim 3 or 4, wherein the emission analysis is performed.

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