JP6633365B2 - Ceramic members - Google Patents

Description

  The present invention relates to a ceramic member that can be connected to another member.

  Ceramics with excellent mechanical strength are used for structural members such as semiconductor manufacturing equipment and liquid crystal manufacturing equipment, including mounting members for products in the process of manufacturing electronic components, etc. In order to fix the mounting member, connection using a connecting member such as a screw is performed. Therefore, as a member made of ceramics (hereinafter, referred to as a ceramic member), there is known a structure in which a hole is provided so as to be connectable, and a bush is joined to the hole with an adhesive (Patent). Reference 1).

JP 2010-177503 A

  In such a structure, the bush is joined by an adhesive. When a screw serving as a connecting member is fitted into the bush, tightened or loosened, and when a large rotational torque is applied, a hole is formed. There was a problem that the adhesive was peeled off from the inner wall of the device and the connection was released. Therefore, it is required that a ceramic member having a structure including a bush joined by an adhesive is hardly disconnected even when a large rotational torque is applied.

  The present invention has been devised to satisfy the above-mentioned requirements, and it is an object of the present invention to provide a ceramic member that is hardly disconnected even when a large rotational torque is applied.

The ceramic member of the present invention is a ceramic member including a base body made of ceramics and having a hole on one main surface, and a cylindrical bush having no groove or unevenness on an outer peripheral portion via an adhesive. The opening shape of the hole has a first circle and a center within the first circle, and a second circle having a different center from the first circle forms a circumference of the first circle. And a part of the circumference of the second circle is overlapped so as to protrude from the second circle.

  The ceramic member of the present invention is hardly disconnected even when a large rotational torque is applied.

(A) is a perspective view, (b) is a schematic diagram when an A part in (a) is not provided with a bush, and (c) is (a) showing an example of the ceramic member of the first embodiment. (A) is an enlarged front view of a portion A, and (d) is a longitudinal sectional view taken along line BB in (c). (A) is a perspective view, (b) is an enlarged front view of A 'part in (a), and (c) is B' in (b) showing an example of the ceramic member of the second embodiment. It is a longitudinal cross-sectional view in the -B 'line. It is a longitudinal section showing the modification of the ceramic member of a 2nd embodiment. It is a longitudinal section showing a modification of the ceramic member of a 1st and 2nd embodiment. It is a longitudinal section showing a modification of the ceramic member of a 1st and 2nd embodiment. It is a longitudinal section showing a modification of the ceramic member of a 1st and 2nd embodiment.

  Hereinafter, embodiments of the ceramic member according to the present invention will be described.

  FIGS. 1A and 1B show an example of a ceramic member according to the first embodiment, in which FIG. 1A is a perspective view, FIG. 1B is a schematic diagram when a bush is not provided at a portion A in FIG. () Is an enlarged front view of a portion A in (a), and (d) is a longitudinal sectional view taken along line BB in (c).

  As shown in FIGS. 1 (a), 1 (c) and 1 (d), a ceramic member 1 according to the first embodiment is made of ceramics, has a base 2 having a hole 2 on one main surface, and an adhesive 3 The bush 4 is provided in the hole 2 through the hole. In FIG. 1C, the bush 4 is colored for identification.

Next, the opening shape of the hole 2 into which the bush 4 is inserted will be described with reference to FIG. 1B, which is a schematic diagram when the bush 4 is not provided in the portion A in FIG. The opening shape of the hole 2 into which the bush 4 is inserted includes a first circle 2a, a center 2b ₁ in the first circle 2a, and a second circle 2b having a different center from the first circle 2a. , A part of the circumference of the second circle 2b protrudes from the circumference of the first circle 2a. Incidentally, in FIG. 1 (b), the center of the first circle 2a, are indicated by reference numeral 2a _1.

  The bush 4 is inserted into the hole 2 having such an opening shape, and the bush 4 is joined in the hole 2 via the adhesive 3. Therefore, the ceramic member 1 of the first embodiment includes a fastening member ( For example, even if a screw is inserted and the screw is tightened or loosened by a large rotation torque, the thickness of the adhesive 3 existing around the bush 4 is different. Is hard to be peeled off, and the connection with the connected member is hard to be released. Further, since the bonding area is larger than that of a hole having a simple circular opening shape, for example, only the first circle 2a, the bonding strength is increased.

Incidentally, it is possible to obtain the effect described above and to reduce the amount of adhesive 3, the center 2a ₁ of the first circle distance t between the center 2b ₁ of the second circle, 50 [mu] m or more 1000μm or less It is preferred that

  Next, FIG. 2 shows an example of the ceramic member of the second embodiment, (a) is a perspective view, (b) is an enlarged front view of a portion A ′ in (a), and (c) FIG. 4 is a longitudinal sectional view taken along line B′-B ′ in FIG.

As shown in FIG. 2, the ceramic member 1 ′ of the second embodiment has a recess 5 on the inner wall of the hole 2. As described above, when the concave portion 5 is provided on the inner wall of the hole 2, it is possible to withstand a large rotational torque, and the adhesive 3 enters the concave portion 5 and is hard to be removed. Can be hardly disconnected.

  Next, the concave portion 5 will be described in detail with reference to FIG. The concave portion 5 is a concave portion in the cross section as shown in FIG. Further, in the cross section as shown in FIG. 3, the above-described effects can be obtained, and in order to reduce the amount of the adhesive 3, the height (H) is 200 μm or more and 1500 μm or less, and the depth (D) is It is preferable that the thickness be 50 μm or more and 1000 μm or less. The depth (D) is the distance between the vertical tangent (C) of the inner wall closest to the bush 4 side and the vertical tangent (E) of the inner wall of the recess 5 farthest from the bush 4.

  In the first embodiment, when the concave portion 5 is provided on the inner wall of the hole 2, it is possible to withstand a large rotational torque, and the adhesive 3 enters the concave portion 5 and is hard to come off. Further, the connection with the connected member can be made more difficult.

  Next, FIG. 4 is a longitudinal sectional view showing a modification of the ceramic member of the first and second embodiments. In the following drawings, the ceramic member is denoted by the reference numeral “1”.

  As shown in FIG. 4, when the inner wall of the hole 2 has a recess 6 whose height decreases in a direction away from the bush 4, the adhesive 3 enters the recess 6, and due to the anchor effect, Since the joining strength is increased, a large rotating torque can be endured, and it is hard to come off, the connection with the connected member can be hardly released.

  The recess 6 has a height of 100 μm or less and a depth of 10 μm or more and 3000 μm or less in a cross section as shown in FIG.

  In order to confirm the concave portion 5 and the concave portion 6, the ceramic member 1 is cut so that a cross section as shown in FIGS. 3 and 4 is obtained, and a known microscope (a metal microscope or a scanning electron microscope (SEM)) is used. ) May be observed at a magnification of 100 times or more and 2000 times or less.

  When the bush 4 is a screw bush, it is preferable that the bush 4 has a spiral projection or a spiral groove on the surface facing the bottom surface of the bush 4 in a direction opposite to the screw tightening direction of the screw bush. When such a configuration is satisfied, when the screw is tightened or the screw is loosened by the spiral protrusion or the spiral groove which is wound in the reverse direction to the screw tightening direction of the screw bush and the adhesive 3 existing around these. Can withstand a large rotational torque.

  Next, FIG. 5 is a longitudinal sectional view showing a modification of the ceramic member of the first and second embodiments. As shown in FIG. 5, it is preferable that a protrusion 7 having a surface facing the bush 4 is provided on the bottom side of the hole 2.

  When such a configuration is satisfied, the stability of the bush 4 at the time of joining is increased, and the contact area of the bottom of the hole 2 with the adhesive 3 is increased. It is difficult to disconnect the connection. Also, when processing for flattening the bottom surface of the hole 2 is required, the area for flattening can be reduced.

  Next, FIG. 6 is a longitudinal sectional view showing a modification of the ceramic member of the first and second embodiments. As shown in FIG. 6, it is preferable to have a maximum diameter portion 8 at the bottom of the hole 2.

When such a configuration is satisfied, the contact area of the bottom of the hole 2 with the adhesive 3 is larger than that of the configuration shown in FIG. It becomes difficult to disconnect. Further, when additional processing including finishing of the inner wall of the hole 2 is performed, the inner wall above the maximum diameter portion 8 does not contact the bottom surface during processing, so that the load on the processing tool can be reduced.

  Further, in the configuration shown in FIGS. 5 and 6, it is possible to reduce the external vibration force applied to the bush 4 and the screw (bolt) fitted into the bush 4 and the external force applied obliquely to the axis of the screw.

  Next, as a material of the base, alumina, zirconia, silicon nitride, aluminum nitride, silicon carbide, boron carbide, cordierite, mullite, or a ceramic mainly containing a composite thereof can be used. In selecting the material, the material may be selected according to the requirements such as characteristics and cost. Specifically, from the viewpoint of cost, an alumina ceramic containing alumina as a main component may be used. From the viewpoint of mechanical and thermal characteristics, a silicon carbide ceramic containing silicon carbide as a main component may be used. And it is sufficient. Here, the main component is a component that exceeds 70% by mass of 100% by mass of all components constituting the ceramics.

  In addition, the material of the bush 4 may be selected from metals, resins, ceramics, and the like according to the requirements of characteristics, cost, and the like. From the viewpoint of corrosion resistance and strength, stainless steel is preferable. In addition, a groove or unevenness may be provided on the outer peripheral portion of the bush 4 as necessary to enhance the bonding property between the adhesive 3 and the bush 4.

  The material of the adhesive 3 may be selected from an organic adhesive, an inorganic adhesive, a brazing material, and the like in consideration of the materials of the base 1 and the bush 4. For example, if the material of the bush 4 is a metal, an epoxy resin may be selected.

  In addition, in FIGS. 1 to 6, the hole 2 is shown as having a bottom but may be penetrating. The ceramic member 1 of the present embodiment can be used as a heat exchanger if a flow path is provided inside the ceramic member 1 and a surface not provided with the bush 4 is used as a mounting surface for products, and a coolant is allowed to flow.

  Hereinafter, an example of a method for manufacturing the ceramic member of the present embodiment will be described. As for the substrate, a method for producing a substrate made of a silicon carbide ceramic will be described.

  First, a powder of silicon carbide having a purity of 90% or more and an average particle size of 0.5 μm or more and 2 μm or less, and a powder of boron carbide and a carboxylate as a sintering aid are prepared. Then, for each powder, for example, based on 100% by mass of silicon carbide powder, 0.12% by mass or more and 1.4% by mass or less of boron carbide powder and 1% by mass or more and 3.4% by mass of carboxylate powder. It is weighed and mixed so as to be not more than mass%.

  Next, together with the mixed powder, a binder such as polyvinyl alcohol, polyethylene glycol, an acrylic resin or a butyral resin, water, and a dispersant are put into a ball mill, a rotary mill, a vibration mill, a bead mill, or the like, and mixed. Here, the amount of the binder added may be such that the strength and flexibility of the molded body are good and that the binder is not sufficiently degreased during firing. Then, the obtained slurry is spray-dried and granulated to obtain a granule raw material.

  Next, the granulated raw material obtained by spray drying is charged into a rubber mold having a predetermined shape. Then, it is molded by a hydrostatic press molding method (rubber press method), and then removed from the rubber mold. Then, it is formed into a molded product having a desired outer shape by cutting.

  Next, in the case of the ceramic member of the first embodiment, drilling is performed on the formed body using a milling machine or the like so that the first circle is confirmed on one main surface. Subsequently, drilling is performed so that the opening shape of the hole is overlapped so that a part of the circumference of the second circle protrudes from the circumference of the first circle. In the case of the ceramic member of the second embodiment, after performing drilling using a milling machine or the like, processing for forming a concave portion is performed on the inner wall.

  Further, if necessary, it may be processed so as to have a concave portion as shown in FIG. 4, a convex portion as shown in FIG. 5, and a maximum diameter portion 8 as shown in FIG. Also, in the drilling process, if a projection or a groove is formed by rotating the screw bush in the direction opposite to the screw tightening direction to form a protrusion or a groove, a spiral protrusion or a spiral groove opposite to the screw tightening direction of the screw bush is formed. be able to.

  Thereafter, the substrate is held at a temperature of 1800 ° C. or more and 2200 ° C. or less for 10 minutes to 10 hours, and is further held at a temperature of 2200 ° C. or more and 2350 ° C. or less for 10 minutes to 20 hours to obtain a substrate.

  Next, an example in which a molded body serving as a base is produced by lamination will be described.

  First, the above-mentioned granule raw material is prepared. Then, a green sheet is formed from the granular raw material by a dry pressing method or a powder rolling method, which is a general forming method of ceramics. Alternatively, a green sheet is formed by a doctor blade method using the above slurry.

  Next, a first circle (hole) is first formed in the obtained green sheet by laser processing or punching with a mold, and subsequently, the first circle and the center of the first circle are formed in the first circle. A different second circle (hole) is formed.

  Then, the obtained green sheets are laminated. Note that a slurry or the like used in the production of the green sheet is applied as a bonding agent to the green sheets to be laminated.

  Next, for example, a pressure of about 0.5 MPa is applied to the green sheet laminate using a flat pressing jig, and then dried at room temperature of about 50 to 70 ° C. for about 10 to 15 hours to form a laminate. You can get the body.

  In the case where the first and second circles are formed on the green sheet by laser processing or punching with a mold, a green sheet having a different center of the second circle is prepared. If the layers are stacked so that the circles are shifted, a concave portion can be formed on the inner wall of the hole. In addition, a recess can be formed by subjecting an edge portion of a hole having a shape in which the first circle and the second circle overlap each other to R-surface processing or C-surface processing. Furthermore, when laminating, the slurry serving as the bonding agent is not applied to a desired position on the edge of the hole, the depression can be formed.

  Further, if a green sheet corresponding to the bottom side of the hole is punched in an annular shape, the convex portion shown in FIG. 5 can be formed. Further, if the green sheet corresponding to the bottom of the hole is punched so as to have a larger diameter than the other green sheets, the maximum diameter portion shown in FIG. 6 can be formed.

  Further, another method will be described.

First, the above-mentioned granule raw material is prepared. Then, a green sheet is formed from the granular raw material by a dry pressing method or a powder rolling method, which is a general method of forming ceramics. Alternatively, a green sheet is formed by a doctor blade method using the above slurry.

  Next, a first circle (hole) is formed in the obtained green sheet by laser processing or punching with a mold.

  Then, the obtained green sheets are laminated. Note that a slurry or the like used in the production of the green sheet is applied as a bonding agent to the green sheets to be laminated.

  Next, for example, a pressure of about 0.5 MPa is applied to the green sheet laminate using a flat pressing jig, and then dried at room temperature of about 50 to 70 ° C. for about 10 to 15 hours to form a laminate. Get the body. And after baking by the above-mentioned method, while the opening shape of the hole has a first circle and a center within the first circle, and a second circle having a different center from the first circle, The additional processing may be performed using a drill so that a part of the circumference of the second circle is overlapped with the circumference of the second circle so as to protrude from the circumference of the first circle.

  Then, while the adhesive is poured into the hole of the obtained base, the adhesive is attached to the side surface of the bush, the bush is inserted into the hole, and then left to be fixed until a ceramic member can be obtained. .

  The ceramic member of the present embodiment obtained in this manner is hardly disconnected even when a large rotational torque is applied to the bush.

1, 1 ': ceramic member 2: hole 2a: first circle 2b: second circle 3: adhesive 4: bush 5: concave portion 6: concave portion 7: convex portion 8: maximum diameter portion

Claims (6)

Made of ceramic, a ceramic member comprising: a base having a hole in one main surface to said bore through an adhesive, and a bushing of cylindrical grooves or unevenness is not provided on the outer peripheral portion, of the hole The opening shape has a first circle and a center within the first circle, and a second circle having a different center from the first circle is formed from the circumference of the first circle by the second circle. A ceramic member characterized in that it has a shape in which a part of the circumference of the circle overlaps so as to protrude.   The ceramic member according to claim 1, wherein the inner wall of the hole has a concave portion.   3. The ceramic member according to claim 1, wherein the inner wall of the hole has a concave portion whose height decreases in a direction away from the bush. 4.   The said bush is a screw bush, and has the spiral-shaped protrusion or spiral-shaped groove of the reverse winding with respect to the screw fastening direction of the said screw bush in the surface facing the bottom surface of the said bush. Item 4. The ceramic member according to any one of Items 3 to 7.   The ceramic member according to any one of claims 1 to 4, wherein a protrusion having a surface facing the bottom surface of the bush is provided on a bottom side of the hole.   The ceramic member according to claim 1, further comprising a maximum diameter portion at a bottom of the hole.