JP6627280B2 - Aid and traveling cart - Google Patents

Description

  The present invention relates to an assisting device and a traveling vehicle.

  If the overhead transport vehicle running on the track laid on the ceiling breaks down due to a trouble in the power supply system or drive system, etc., and it is difficult to run on its own, the overhead transport vehicle will not interfere with other overhead transport vehicles. To move the overhead carrier from the track. For example, Patent Literature 1 discloses that the overhead transport vehicle is moved by pushing the overhead transport vehicle using a push rod having a pressing member attached to the upper end of a rod-shaped push rod main body.

Japanese Patent No. 4465833

  2. Description of the Related Art In a clean room or the like in which an overhead carrier travels, processing devices, shelves, and the like are arranged on the floor. Therefore, for example, when the overhead transport vehicle stops above the processing device or the like, it is difficult to manually move the overhead transport vehicle from the ground while avoiding the processing device or the like, and the workability is not good. Therefore, it has been considered to move the broken overhead transport vehicle by pushing it by another self-propelled overhead transport vehicle. However, the overhead transport vehicle has a contact sensor including a tape switch or the like for detecting contact with an object or the like, and stops traveling when the contact sensor detects contact with the object.

  Therefore, it is conceivable to stop the operation of the contact sensor and push the stopped overhead transport vehicle by another overhead transport vehicle. However, a load is continuously applied to the contact sensor when pushing the overhead transport vehicle, and the contact sensor may be damaged and may not be used. Therefore, conventionally, it has been difficult to move the overhead transport vehicle stopped by another overhead transport vehicle. It is not practical to always prepare a ceiling transport vehicle without a contact sensor for the purpose of pushing the stopped overhead transport vehicle.

  An object of the present invention is to provide an auxiliary tool and a traveling vehicle that can efficiently move another traveling vehicle stopped on a track.

  The assisting device according to the present invention is a traveling unit that travels along a track, a main unit supported by the traveling unit, and is disposed on at least one of the traveling unit and the main unit, and is provided at least on the front side in the traveling direction. And a contact detection unit that is located outside the traveling unit and the main unit when viewed from above, detects contact with an obstacle, and travels when the contact detection unit detects contact with the obstacle. A control unit for stopping travel by the unit, and an assisting tool attached to the traveling vehicle, which is located outside the contact detection unit when viewed from above when pushing another traveling vehicle by the traveling vehicle. It has a contact part.

  This assisting tool includes a contact portion that is located outside the contact detection portion when viewed from above when another traveling vehicle is pushed by the traveling vehicle. As a result, the contact portion of the assisting tool comes into contact with another traveling vehicle, and the contact detection unit does not operate. Therefore, even when the vehicle is in contact with another traveling vehicle, the traveling vehicle can travel. As a result, the stopped traveling trolley can be moved by the self-propelled traveling trolley. Therefore, the other traveling vehicles stopped on the track can be moved efficiently.

  In one embodiment, the auxiliary tool may be provided detachably on the traveling section or the main body. Thus, the assisting device can be removed at normal times when there is no need to push another traveling vehicle.

  In one embodiment, the contact unit may be provided so as to be switchable between a first state located inside the contact detection unit and a second state located outside the contact detection unit. Accordingly, when another traveling vehicle is pushed by the traveling vehicle, the contact portion is brought into contact with the other traveling vehicle by setting the contact portion to the second state, so that the contact detection portion does not operate. Therefore, even when the vehicle is in contact with another traveling vehicle, the traveling vehicle can travel. Further, in this configuration, since the contact portion is located inside the contact detection portion in the first state, the auxiliary tool can be kept attached even in the normal state. Therefore, the work for attaching the auxiliary tool to the traveling vehicle can be omitted, so that the workability can be improved.

  The traveling vehicle according to the present invention is a traveling unit that travels along a track, a main unit supported by the traveling unit, and is disposed on at least one of the traveling unit and the main unit, and is provided at least on the front side in the traveling direction. And a contact detection unit that is located outside the traveling unit and the main unit when viewed from above, detects contact with an obstacle, and performs a detection when the contact detection unit detects contact with the obstacle. An auxiliary unit having a control unit for stopping traveling by the unit, and a contact unit movably provided in a first state located inside the contact detection unit and a second state located outside the contact detection unit. Tool.

  This traveling vehicle is provided with an auxiliary tool. The assisting tool has a contact portion provided to be switchable between a first state located inside the contact detection unit and a second state located outside the contact detection unit. Accordingly, when another traveling vehicle is pushed by the traveling vehicle, the contact portion is brought into contact with the other traveling vehicle by setting the contact portion to the second state, so that the contact detection portion does not operate. Therefore, even when the vehicle is in contact with another traveling vehicle, the traveling vehicle can travel. As a result, the stopped traveling trolley can be moved by the self-propelled traveling trolley. Therefore, the other traveling vehicles stopped on the track can be moved efficiently.

  According to the present invention, it is possible to efficiently move another traveling vehicle stopped on the track.

It is a side view of the ceiling conveyance vehicle concerning a 1st embodiment. It is the figure which looked at the main-body part of the ceiling conveyance vehicle from the upper part. It is a block diagram which shows the structure of a ceiling conveyance vehicle. It is the figure which looked at the main-body part to which the auxiliary | assistant tool was attached from the top. It is the figure which looked at the main-body part to which the auxiliary tool was attached from the front. FIG. 6 is a diagram showing a cross-sectional configuration along a line VI-VI in FIG. 4. It is a side view which shows the auxiliary tool which concerns on the modification of 1st Embodiment. It is a side view of a ceiling conveyance vehicle concerning a 2nd embodiment. FIG. 9 is a block diagram illustrating a configuration of a ceiling carrier illustrated in FIG. 8.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same or corresponding elements will be denoted by the same reference symbols, without redundant description.

[First Embodiment]
The overhead transport vehicle (traveling vehicle) 1 shown in FIG. 1 transports the transported object A along a traveling rail (track) R. The running rail R is installed via a support C on a ceiling of a clean room or the like for manufacturing semiconductor devices. The transferred object A is, for example, a cassette (so-called FOUP (Front Opening Unified Pod)) containing a plurality of semiconductor wafers. A flange portion F held by the overhead transport vehicle 1 is provided on the upper surface of the transported object A.

  As shown in FIGS. 1 and 2, the overhead transport vehicle 1 includes a traveling unit 3, a main body unit 5, an elevating mechanism 7, a contact sensor (contact detection unit) 9, and a control unit 11 (see FIG. 3). And In the following description, in the traveling direction D shown in FIG. 1, the right side in the drawing is “front”, and the left side in the drawing is “rear”.

  The traveling unit 3 travels on the traveling rail R. The traveling section 3 has drive wheels and guide wheels (not shown) that come into contact with the inner surface of the traveling rail R. The drive wheels are driven by a motor 4 (see FIG. 3). The traveling unit 3 has an electromagnetic coil unit located in the traveling rail R, and thereby receives power from a high-frequency current line laid in the traveling rail R in a contactless manner.

  The main body 5 is suspended from the traveling unit 3 (supported by the traveling unit 3). The main body 5 holds and holds the transported object A. The main unit 5 includes a base frame 5a to which the traveling unit 3 is attached, and a front frame 5b and a rear frame 5c provided on the front side and the rear side of the base frame 5a in the traveling direction D and extending downward. Have. The transferred object A is accommodated between the front frame 5b and the rear frame 5c. As shown in FIG. 2, the main body 5 has a substantially trapezoidal shape on each of the front side and the rear side when viewed from above. That is, the front face and the rear face of the base frame 5a include the end face 6a and the slopes 6b and 6c. As described above, since the front and rear sides of the ceiling transport vehicle 1 have a substantially trapezoidal shape in a plan view, compared with the case of having a substantially rectangular shape, when the vehicle passes through the curved section of the traveling rail R, The amount of protrusion to the side can be reduced, and the turning radius can be reduced.

  The base frame 5a is provided with a hole 5d opening upward. The holes 5d are provided in each of a front part and a rear part of the base frame 5a. The hole 5d is disposed substantially at the center in the width direction of the base frame 5a.

  The elevating mechanism 7 is attached to the base frame 5a. The lifting mechanism 7 includes a lifting unit 13 and a holding unit 15. The holding portion 15 holds the transported object A by gripping the flange portion F. The elevating unit 13 moves the holding unit 15 up and down with respect to a predetermined position P in which the transported object A is stored. More specifically, the elevating unit 13 lowers the holding unit 15 attached to the end of the belt 17 from the position P by synchronously feeding out the plurality of belts 17. On the other hand, the elevating unit 13 raises the holding unit 15 attached to the end of the belt 17 to the position P by winding the plurality of belts 17 in synchronization. The base frame 5a may be provided with a transverse feed unit that moves the elevating unit 13 in a lateral direction perpendicular to the traveling direction D, a θ drive that rotates the elevating unit 13 in a horizontal plane, and the like.

  The contact sensor 9 detects contact between the overhead transport vehicle 1 and an obstacle. Obstacles also include other overhead carriers. The contact sensor 9 is provided at a position of the ceiling transport vehicle 1 that comes into contact with an obstacle first. In the present embodiment, the contact sensor 9 is provided on the base frame 5a as shown in FIGS. The contact sensor 9 is arranged at least on the front side in the traveling direction D on the base frame 5a.

  The contact sensor 9 is, for example, a tape switch. The tape switch is formed in a tape shape by covering a sensor with a resin such as rubber. In the present embodiment, the contact sensor 9 is provided annularly over the entire circumference of the base frame 5a. The contact sensor 9 is a switch that is turned ON when pressed by contacting an obstacle. When turned on, the contact sensor 9 outputs a contact signal to the control unit 11.

  The control unit 11 controls the operation of each unit of the overhead carrier 1. The control unit 11 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), a communication device, and the like. When receiving the contact signal output from the contact sensor 9, the control unit 11 stops the operation of the motor 4. As a result, the traveling of the traveling unit 3 stops, and the overhead carrier 1 stops.

  In the transport system provided with the overhead transport vehicle 1 having the above-described configuration, the travel of another overhead transport vehicle on the traveling rail R may be stopped due to some problem (a trouble in the drive system or the like). When the other overhead transport vehicle stops running due to the inability to travel, it is required that the other overhead transport vehicle is separated from the travel rail R by pushing the other overhead transport vehicle from behind. I have. However, as described above, when the overhead transport vehicle 1 comes into contact with an obstacle (another overhead transport vehicle), its traveling stops.

  Therefore, when pushing another ceiling transport vehicle, the auxiliary tool 20 is attached to the ceiling transport vehicle 1 as shown in FIGS. The assisting device 20 prevents the contact sensor 9 from contacting with another ceiling carrier when the ceiling carrier 1 pushes another ceiling carrier, and enables the contact with another ceiling carrier. It is. That is, when pushing another ceiling transport vehicle, the ceiling transport vehicle 1 does not directly contact the other ceiling transport vehicle, and the pressing force of the ceiling transport vehicle 1 is applied to the other ceiling transport vehicle via this auxiliary tool 20. Is transmitted.

  The assisting tool 20 is arranged on at least one of the front side and the rear side of the main body 5 according to the direction in which another overhead carrier is pushed. The auxiliary tool 20 has a mounting part 22, a support part 24, and a contact part 26. 4 to 6 show the front frame 5b side, but the rear frame 5c also has the same configuration. The attachment of the auxiliary tool 20 to the ceiling transport vehicle 1 can be performed by, for example, an operator using a long bar-shaped member from the floor side.

  The attachment section 22 is attached to the main body section 5. The mounting portion 22 engages with a hole 5d provided in the base frame 5a of the main body 5. The mounting portion 22 is engaged with the hole 5d by being inserted into the hole 5d.

  The support part 24 connects the attachment part 22 and the contact part 26 and supports the contact part 26. The support 24 is, for example, a plate-shaped member. The support portion 24 is fixed to the attachment portion 22 and extends in the front-rear direction when attached to the ceiling transport vehicle 1, and a second portion extending downward from an end of the first portion 24a. 24b. The second portion 24b is fixed to the contact portion 26. Specifically, the second portion 24b is sandwiched between a first contact portion 28 and a second contact portion 29 described later.

  The contact portion 26 has a first contact portion 28 and a second contact portion 29. The first contact portion 28 and the second contact portion 29 are, for example, elastic members such as urethane. The contact portion 26 is located outside the contact sensor 9 when viewed from above when the auxiliary tool 20 is attached to the overhead transport vehicle 1, that is, when another traveling vehicle is pushed by the overhead transport vehicle 1.

  The first contact portion 28 is located on the front side or the rear side of the main body 5. The first contact portion 28 is arranged along the end face 6a and the slopes 6b, 6c of the main body 5 when attached to the main body 5. That is, the surface of the first contact portion 28 that contacts the main body 5 has a substantially trapezoidal shape. The outer surface of the first contact portion 28 has a generally rectangular shape including the main body 5 when viewed from above when attached to the main body 5. Specifically, the first contact portion 28 extends from the both ends of the end surface 28 a along the width direction of the main body portion 5, and extends perpendicularly to the end surface 28 a along the front-rear direction of the main body portion 5. Existing side surfaces 28b and 28c.

  The second contact portion 29 is disposed on an end surface 28a of the first contact portion 28. The second contact portion 29 is disposed substantially at the center of the first contact portion 28. The second contact portion 29 is joined to the end surface 28a of the first contact portion 28. For joining the first contact portion 28 and the second contact portion 29, for example, an adhesive may be used, or mechanical means (such as a connector) may be used.

  As described above, the assisting device 20 according to the present embodiment includes the contact portion 26 that is located outside the contact sensor 9 when viewed from above when another ceiling carrier is pushed by the ceiling carrier 1. ing. As a result, the contact portion 26 of the assisting tool 20 comes into contact with another overhead transport vehicle, and the contact sensor 9 does not operate. Therefore, even if it is in contact with another overhead transport vehicle, the overhead transport vehicle 1 can travel. As a result, the self-propelled overhead transport vehicle 1 can push and move another stopped overhead transport vehicle. Therefore, the other overhead transport vehicles stopped on the track can be moved efficiently.

  In the present embodiment, the auxiliary tool 20 is detachably provided on the main body 5. More specifically, the auxiliary tool 20 is attached to the main body 5 by inserting the mounting portion 22 into the hole 5d of the main body 5 so that the mounting portion 22 and the hole 5d engage. In other words, the auxiliary tool 20 can be removed from the main body 5 by pulling out the mounting portion 22 from the hole 5d. Thus, it is possible to prevent the auxiliary tool 20 from interfering with the transport operation during normal times when it is not necessary to push the other overhead transport vehicle.

  In the first embodiment, the mode in which the auxiliary tool 20 is attached to the main body 5 by the mounting section 22 has been described as an example, but the mode in which the auxiliary tool 20 is attached to the main body 5 is not limited to this. The means for attaching the auxiliary tool 20 to the main body 5 may be another means.

  In the first embodiment, an example in which the contact portion 26 has the first contact portion 28 and the second contact portion 29 has been described as an example, but the configuration of the contact portion is not limited to this. For example, the contact portion may be such that the first contact portion 28 and the second contact portion 29 are integrally formed. The shape of the contact portion 26 may be set as appropriate. The contact portion may have any configuration as long as it is located outside the contact sensor 9 when viewed from above when another traveling vehicle is pushed by the overhead transport vehicle 1.

  In the first embodiment, an example in which the contact portion 26 is located outside the contact sensor 9 when the auxiliary tool 20 is attached to the main body 5 has been described as an example, but the configuration of the auxiliary tool is not limited to this. . For example, the assisting tool may have a contact portion provided so as to be switchable between a first state located inside the contact sensor 9 and a second state located outside the contact sensor 9. Good.

  For example, as shown in FIG. 7, the auxiliary tool 20A includes a contact portion 26A. The contact portion 26 </ b> A is provided on the end face 6 a of the main body 5. The contact portion 26A is provided so as to be swingable about a shaft 26Aa. The contact portion 26A may be plate-shaped or rod-shaped. The contact portion 26 </ b> A is swingably (switchable) between a first state P <b> 1 located inside the contact sensor 9 and a second state P <b> 2 located outside the contact sensor 9. In the second state, the contact portion 26A swings about 90 ° with respect to the first state P1. In the second state, the tip of the contact portion 26A is located outside the contact sensor 9 when viewed from above. The switching of the contact portion 26A between the first state P1 and the second state P2 can be performed by, for example, an operator using a long bar-shaped member from the floor side.

  Thus, when another traveling vehicle is pushed by the overhead transport vehicle 1, the auxiliary tool 20A is brought into contact with the other overhead transport vehicle by setting the auxiliary tool 20A to the second state P2, so that the contact sensor 9 does not operate. . Therefore, even if it is in contact with another overhead transport vehicle, the overhead transport vehicle 1 can travel. Further, in this configuration, the contact portion 26A is located inside the contact sensor 9 in the first state P1, so that the auxiliary tool 20A can be kept attached even in the normal state. Therefore, the work for attaching the auxiliary tool 20A to the ceiling transport vehicle 1 can be omitted, and the workability can be improved.

[Second embodiment]
Subsequently, a second embodiment will be described. As shown in FIG. 8, the overhead transport vehicle 1A according to the second embodiment includes a traveling unit 3, a main body unit 5, an elevating mechanism 7, a contact sensor 9, a control unit 11, an auxiliary tool 30, It has. The assisting tool 30 is provided as a part of the configuration of the overhead carrier 1A.

  The auxiliary tool 30 is provided on each of the front frame 5b and the rear frame 5c. Hereinafter, the auxiliary tool 30 provided on the front frame 5b will be described as an example. In addition, the auxiliary tool 30 does not necessarily need to be installed in the rear frame 5c.

  The assisting tool 30 includes a contact part 32 and a drive part 34 (see FIG. 8). The contact portion 32 is, for example, a plate-shaped member. The contact portion 32 is swingably provided on the front frame 5b. The contact portion 32 swings about a shaft 32a. The shaft 32a extends along the width direction of the main body 5 (the vertical direction in FIG. 2).

  The contact section 32 swings by the operation of the drive section 34 (see FIG. 9). The drive unit 34 is, for example, a motor, a cylinder, or the like. The operation of the drive unit 34 is controlled by the control unit 11. The control of the drive unit 34 by the control unit 11 is performed, for example, by operating a wireless or wired remote controller (not shown) from the ground side. Note that the control of the driving unit 34 may be performed, for example, by operating a button provided on the main body unit 5.

  The contact portion 32 swings within a swing range between a first state P1 housed in the front frame 5b and a second state P2 protruding from the front frame 5b. In the first state P1, the contact portion 32 is housed in the front frame 5b so as to be flush with the front frame 5b, for example. In the first state P1, the contact portion 32 is located inside the contact sensor 9. In the second state P2, the contact portion 32 swings by about 90 ° with respect to the first state P1, and extends in a direction substantially orthogonal to the front frame 5b. In the second state P2, the tip of the contact portion 32 is located outside the contact sensor 9.

  As described above, in the overhead transport vehicle 1A according to the present embodiment, when another overhead transport vehicle is pushed and moved, the drive unit 34 is operated to bring the contact unit 32 into the second state P2. Thus, when another overhead transport vehicle is pushed by the overhead transport vehicle 1A, the contact portion 32 is brought into contact with another traveling vehicle by setting the contact portion 32 to the second state P2, so that the contact sensor 9 does not operate. . Therefore, even if it is in contact with another overhead transport vehicle, the overhead transport vehicle 1 can travel. As a result, the self-propelled overhead transport vehicle 1 can push and move another stopped overhead transport vehicle. Therefore, the other overhead transport vehicles stopped on the track can be moved efficiently.

  In the present embodiment, the control of the drive unit 34 that swings the contact unit 32 is performed by operating a remote controller from the ground side. Accordingly, when using the contact portion 32, it is not necessary to manually swing the contact portion 32, so that it is hardly affected by various obstacles existing on the ceiling side. Therefore, work efficiency can be improved.

  In the second embodiment, the form in which the auxiliary tool 30 swings has been described as an example, but the configuration of the auxiliary tool 30 is not limited to this. For example, the assisting tool may be configured to advance and retreat between a first state located inside the contact sensor 9 and a second state located outside the contact sensor 9. Further, the assisting tool may be configured to swing around an axis extending along the height direction.

  The present invention is not limited to the above embodiment. For example, in the above embodiment, the overhead transport vehicle 1 has been described as an example of the traveling vehicle, but the traveling vehicle may have another form. For example, the traveling cart may be configured to travel on a rail laid on the floor.

  In the above embodiment, the tape sensor has been described as an example of the contact sensor 9, but the contact sensor is not limited to this. The contact sensor may be in any form as long as it detects contact.

  In the above embodiment, the form in which the contact sensor 9 is provided in the main body 5 has been described as an example. However, the contact sensor 9 may be provided in the traveling unit 3.

  In the above-described embodiment, an example in which the transported object A is accommodated and transported is described as an example. However, the traveling vehicle need not be configured to transport the transported object A. Further, the transported object A is not limited to the FOUP.

  DESCRIPTION OF SYMBOLS 1 ... overhead conveyance vehicle, 3 ... travel part, 5 ... body part, 9 ... contact sensor (contact detection part), 11 ... control part, 20, 20A, 30 ... auxiliary tool, 26, 32 ... contact part, D ... travel Direction, R: running rail (track).

Claims (4)

A traveling unit that travels along a track;
A body portion supported by the traveling portion;
It is arranged on at least one of the traveling section and the main body, is provided at least on the front side in the traveling direction, and is located outside the traveling section and the main body when viewed from above, and is located between the traveling section and the main body. A contact detection unit for detecting contact;
When a contact with the obstacle is detected by the contact detection unit, a control unit that stops traveling by the traveling unit,
When the other traveling vehicle is pushed by the traveling vehicle, when viewed from above, it is located outside the contact detection unit , and comes into contact with the other traveling vehicle to apply the pressing force by the traveling vehicle to the other traveling vehicle. It has a contact part to transmit to the carriage ,
The auxiliary tool , wherein the contact unit does not allow the contact detection unit to contact the another traveling vehicle when the contact unit comes into contact with the another traveling vehicle .   The assisting device according to claim 1, wherein the assisting device is detachably provided on the traveling section or the main body.   The auxiliary according to claim 1, wherein the contact unit is provided so as to be switchable between a first state located inside the contact detection unit and a second state located outside the contact detection unit. Utensils. A traveling unit that travels along a track;
A body portion supported by the traveling portion;
It is arranged on at least one of the traveling section and the main body, is provided at least on the front side in the traveling direction, and is located outside the traveling section and the main body when viewed from above, and is located between the traveling section and the main body. A contact detection unit for detecting contact;
When a contact with the obstacle is detected by the contact detection unit, a control unit that stops traveling by the traveling unit,
A traveling bogie including: an auxiliary tool having a contact portion provided to be switchable between a first state located inside the contact detection unit and a second state located outside the contact detection unit. .

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