JP6616888B2 - オプトエレクトロニクスデバイスの製造方法 - Google Patents
オプトエレクトロニクスデバイスの製造方法 Download PDFInfo
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- JP6616888B2 JP6616888B2 JP2018512535A JP2018512535A JP6616888B2 JP 6616888 B2 JP6616888 B2 JP 6616888B2 JP 2018512535 A JP2018512535 A JP 2018512535A JP 2018512535 A JP2018512535 A JP 2018512535A JP 6616888 B2 JP6616888 B2 JP 6616888B2
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- 230000005693 optoelectronics Effects 0.000 title claims description 91
- 238000004519 manufacturing process Methods 0.000 title claims description 45
- 230000001939 inductive effect Effects 0.000 claims description 65
- 239000000463 material Substances 0.000 claims description 40
- 239000004065 semiconductor Substances 0.000 claims description 40
- 238000006243 chemical reaction Methods 0.000 claims description 35
- 230000006698 induction Effects 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 12
- 230000005284 excitation Effects 0.000 claims description 11
- 230000005670 electromagnetic radiation Effects 0.000 claims description 5
- 239000003566 sealing material Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 238000004382 potting Methods 0.000 claims description 4
- 230000005672 electromagnetic field Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 230000003595 spectral effect Effects 0.000 claims description 2
- 238000007689 inspection Methods 0.000 description 11
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 238000000926 separation method Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 4
- 238000002955 isolation Methods 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 150000002118 epoxides Chemical class 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000002096 quantum dot Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000012804 iterative process Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2632—Circuits therefor for testing diodes
- G01R31/2635—Testing light-emitting diodes, laser diodes or photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/645—Inductive arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/50—Wavelength conversion elements
- H01L33/501—Wavelength conversion elements characterised by the materials, e.g. binder
- H01L33/502—Wavelength conversion materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/647—Heat extraction or cooling elements the elements conducting electric current to or from the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0016—Processes relating to electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0041—Processes relating to semiconductor body packages relating to wavelength conversion elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0066—Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Led Device Packages (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Led Devices (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
Description
Claims (13)
- オプトエレクトロニクスデバイス(10)の製造方法であって、
前記オプトエレクトロニクスデバイス(10)が励起され電磁放射(2)を発するように、前記オプトエレクトロニクスデバイス(10)の誘導部品(4)によって電流を誘導励起する工程と、
前記オプトエレクトロニクスデバイス(10)の電気光学特性の少なくとも1つを測定する工程と、
前記オプトエレクトロニクスデバイス(10)の出射面(1)に変換材料(3)を載置する工程と、を含み、載置される前記変換材料(3)の量は、前記電気光学特性の測定から決定され、
前記オプトエレクトロニクスデバイス(10)は、第1の領域(30)と第2の領域(31)とを有する発光半導体ボディを含んでおり、前記第1の領域(30)および前記第2の領域(31)は出射面(1)を有しており、前記第1の領域(30)と前記第2の領域(31)とは電気的に相互接続されており、前記誘導部品(4)を介して時間と共に変化する交流電磁場を発生することで、交流電圧が前記オプトエレクトロニクスデバイス(10)に結合される、
製造方法。 - 前記変換材料(3)は、前記誘導部品(4)による前記電流の誘導励起前にも、前記オプトエレクトロニクスデバイス(10)の前記出射面(1)に載置される、請求項1に記載の製造方法。
- 前記電気光学特性は、発せられる前記電磁放射(2)の色位置であって、載置される前記変換材料(3)の量は、前記オプトエレクトロニクスデバイス(10)から発せられる前記電磁放射(2)の前記色位置が製造公差の範囲内において一定の設定値となるように選択される、請求項1または2に記載の製造方法。
- 前記第1の領域(30)と前記第2の領域(31)とは互いに逆並列に相互接続されており、前記誘導部品(4)は、前記第1の領域(30)および前記第2の領域(31)と並列に相互接続されている、請求項1から3の何れか1項に記載の製造方法。
- 前記誘導部品(4)は、1巻以上のコイルを含む、請求項1から4の何れか1項に記載の製造方法。
- 前記誘導部品(4)は、封止材で覆われている、請求項1から5の何れか1項に記載の製造方法。
- 前記オプトエレクトロニクスデバイス(10)は、複数のオプトエレクトロニクスデバイス(10)を含むウェハ集合体で製造される、請求項1から6の何れか1項に記載の製造方法。
- 前記ウェハ集合体は、複数のオプトエレクトロニクスデバイス(10)に個片化される、請求項7に記載の製造方法。
- 前記誘導部品(4)は、単一のオプトエレクトロニクスデバイス(10)に延在しており、前記ウェハ集合体の個片化後に元のままである、請求項7または8に記載の製造方法。
- 前記誘導部品(4)は、それぞれ前記オプトエレクトロニクスデバイス(10)を超えて延在しており、前記ウェハ集合体の個片化時に切断される、請求項7または8に記載の製造方法。
- 前記誘導部品(4)は、複数のオプトエレクトロニクスデバイス(10)と電気的に相互接続されており、複数のオプトエレクトロニクスデバイス(10)において電流が励起される、請求項10に記載の製造方法。
- 前記電気光学特性は、前記オプトエレクトロニクスデバイス(10)によって発せられる前記電磁放射(2)の輝度またはスペクトルである、請求項1から11の何れか1項に記載の製造方法。
- 前記オプトエレクトロニクスデバイス(10)は、ポッティング混合物の形態のキャリア(20)、又は、前記誘導部品(4)が埋め込まれる封止材を含む、請求項1から12の何れか1項に記載の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015115706.3 | 2015-09-17 | ||
DE102015115706.3A DE102015115706B4 (de) | 2015-09-17 | 2015-09-17 | Verfahren zur Herstellung eines optoelektronischen Bauelements |
PCT/EP2016/071855 WO2017046261A1 (de) | 2015-09-17 | 2016-09-15 | Verfahren zur herstellung eines optoelektronischen bauelements |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018533203A JP2018533203A (ja) | 2018-11-08 |
JP6616888B2 true JP6616888B2 (ja) | 2019-12-04 |
Family
ID=56926219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2018512535A Expired - Fee Related JP6616888B2 (ja) | 2015-09-17 | 2016-09-15 | オプトエレクトロニクスデバイスの製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10879136B2 (ja) |
JP (1) | JP6616888B2 (ja) |
CN (1) | CN108028295B (ja) |
DE (1) | DE102015115706B4 (ja) |
TW (1) | TW201717435A (ja) |
WO (1) | WO2017046261A1 (ja) |
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GB9714785D0 (en) * | 1997-07-14 | 1997-09-17 | Sheffield University | Discharge lamp |
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EP2833422A4 (en) * | 2012-03-30 | 2015-04-01 | Mitsubishi Chem Corp | LIGHT-EMITTING SEMICONDUCTOR DEVICE AND LIGHTING DEVICE |
KR101972049B1 (ko) | 2012-11-09 | 2019-04-24 | 엘지이노텍 주식회사 | 발광소자 및 이를 포함한 발광소자 모듈과, 발광소자 패키지 및 이를 포함한 발광소자 패키지 모듈 |
DE102013102322B4 (de) * | 2013-03-08 | 2018-05-30 | Osram Opto Semiconductors Gmbh | Verfahren und Vorrichtung zur Vermessung und Optimierung einer optoelektronischen Komponente |
WO2015180976A1 (en) * | 2014-05-27 | 2015-12-03 | Koninklijke Philips N.V. | Solid state illumination device based on non-radiative energy transfer |
DE102014215221A1 (de) * | 2014-08-01 | 2016-02-04 | Osram Gmbh | Beleuchtungsvorrichtung mit von einer Lichtquelle beabstandetem Leuchtstoffkörper |
DE102015101671A1 (de) | 2015-02-05 | 2016-08-11 | Osram Opto Semiconductors Gmbh | Verfahren und Vorrichtung zur Überprüfung einer optoelektronischen Komponente |
DE102015114010A1 (de) | 2015-08-24 | 2017-03-02 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement, Verfahren zur Herstellung eines optoelektronischen Bauelements und Verfahren zum Betrieb eines optoelektronischen Bauelements |
DE102015220838B4 (de) * | 2015-10-26 | 2021-12-23 | Osram Gmbh | Konvertervorrichtung und Bestrahlungsvorrichtung mit einer solchen Konvertervorrichtung |
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-
2015
- 2015-09-17 DE DE102015115706.3A patent/DE102015115706B4/de not_active Expired - Fee Related
-
2016
- 2016-09-09 TW TW105129296A patent/TW201717435A/zh unknown
- 2016-09-15 WO PCT/EP2016/071855 patent/WO2017046261A1/de active Application Filing
- 2016-09-15 US US15/761,048 patent/US10879136B2/en active Active
- 2016-09-15 CN CN201680054045.4A patent/CN108028295B/zh not_active Expired - Fee Related
- 2016-09-15 JP JP2018512535A patent/JP6616888B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE102015115706A1 (de) | 2017-03-23 |
CN108028295A (zh) | 2018-05-11 |
US10879136B2 (en) | 2020-12-29 |
DE102015115706B4 (de) | 2021-09-16 |
TW201717435A (zh) | 2017-05-16 |
US20180269117A1 (en) | 2018-09-20 |
WO2017046261A1 (de) | 2017-03-23 |
CN108028295B (zh) | 2020-01-21 |
JP2018533203A (ja) | 2018-11-08 |
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