JP6613168B2 - Polarizer unit, polarized light irradiation device, and gas filling method for polarizer unit - Google Patents

Description

  The present invention relates to a polarizer unit, a polarized light irradiation device, and a gas filling method for a polarizer unit.

  Patent Document 1 discloses a non-reflective grid polarizing element in which a net-like grid provided on a transparent substrate has a main layer formed of titanium nitride or titanium oxynitride.

  In Patent Document 2, in a polarized light irradiation apparatus using a polarizing element unit in which a plurality of polarizing plates are arranged side by side, a gas (clean dry air, nitrogen or the like) is placed in a space between a mirror in the lamp house and the polarizing element unit. It is disclosed that an inert gas or the like is supplied to make this space positive.

Japanese Patent Laying-Open No. 2015-125280 JP 2013-161082 A

  Light that irradiates a photosensitive resin film with polarized light of a specific wavelength (for example, ultraviolet light) to form an alignment layer of a liquid crystal element or an alignment layer of an optical film using ultraviolet curable liquid crystal (hereinafter referred to as an alignment film). An alignment process is used. The polarized light is obtained, for example, by polarizing short wavelength ultraviolet light (for example, 254 nm wavelength light) irradiated from a light source using a polarizer.

  For the polarizer, a grid pattern of a conductor grid is formed on a transparent substrate such as quartz glass and the pitch of the conductor grid is set to be equal to or less than the wavelength of the incident light, so that a polarization component parallel to the longitudinal direction of the grid can be obtained. A wire grid polarizer that reflects and passes a polarization component orthogonal thereto is used.

  However, since the conductor grid is formed of a metal such as aluminum, when the conductor grid is in contact with oxygen, the conductor grid receives ultraviolet light to cause oxidation or the like, and the performance of the wire grid polarizer is reduced. There is a problem that it deteriorates (the extinction ratio decreases).

  In the invention described in Patent Document 1, titanium nitride or titanium oxynitride is used for the grid in order to prevent the performance of the wire grid polarizer from deteriorating. However, a grid using titanium nitride or titanium oxynitride has a problem that it has more manufacturing steps and is expensive than a normal grid such as aluminum.

  The invention described in Patent Document 2 has a structure in which gas flows out from the lamp house. And in invention of patent document 2, since a lot of gas is supplied to the wide space in a lamp house, there exists a possibility that a lot of gas may flow out of a lamp house, and safety | security becomes a problem.

  The present invention has been made in view of such circumstances, and provides a polarizer unit, a polarized light irradiation device, and a gas filling method for a polarizer unit that can prevent the deterioration of a wire grid polarizer with a small amount of gas. The purpose is to provide.

  In order to solve the above problems, a polarizer unit according to the present invention includes, for example, a plate-like wire grid polarizer having a conductor grid for polarizing light formed on the surface, a plate-like glass, and a thickness. A thick plate-like polarizer holding frame having a through hole penetrating in the vertical direction, the polarizer holding frame provided with the polarizer and the glass so as to cover the through hole, and the polarizer and the glass A gas supply unit that supplies an inert gas to an internal space formed inside the polarizer holding frame by covering the through-hole, the gas supply unit having an injection tube that communicates with the internal space; The polarizer is provided on a first surface which is the largest surface of the polarizer holding frame so that the conductor grid is exposed to the internal space, and the glass is provided on the first surface. Provided on the second surface parallel to The third surface orthogonal to the first surface and the second surface of the polarizer holding frame is formed with a discharge hole that penetrates the third surface and communicates with the internal space. The injection tube is provided adjacent to the hole.

  According to the polarizer unit according to the present invention, the polarizer and the glass are provided so as to cover the through hole in the thick plate-like polarizer holding frame having the through hole penetrating in the thickness direction. An internal space is formed inside the frame, and a conductor grid of the polarizer is exposed in the internal space. The inert gas is injected into the interior space from the injection tube, and is discharged to the outside of the interior space through a discharge hole adjacent to the injection tube. Thereby, the interior space can be made into an inert gas atmosphere with a small amount of inert gas without previously evacuating the interior space S. Therefore, the conductor grid does not come into contact with oxygen or the like, and the deterioration of the wire grid polarizer can be prevented.

  Here, the injection tube may be provided in a central portion in the longitudinal direction of the third surface. As a result, the inert gas can be efficiently diffused in the internal space, and the interior space can be reliably in an inert gas atmosphere.

  Here, the outer diameter of the injection tube is smaller than the inner diameter of the discharge hole, and the injection tube and the discharge hole may be adjacent to each other by inserting the injection tube into the discharge hole. As a result, the inert gas can be efficiently diffused in the internal space, and the interior space can be reliably in an inert gas atmosphere.

  Here, the injection tube has a diameter of about 0.5 mm, and the gas supply unit supplies the inert gas so that a flow rate when flowing out of the injection tube is about 25 m or more per second. Good. As a result, the inert gas is stirred in the internal space, and the internal space is filled with the inert gas without evacuating the internal space before supplying the inert gas.

  Here, the polarized light irradiation apparatus according to the present invention may include, for example, a light source and these polarizer units. Thereby, deterioration of a wire grid type polarizer can be prevented with a small amount of gas.

  In order to solve the above-described problems, the gas filling method of the polarizer unit according to the present invention includes, for example, a plate-like polarizer in which a conductor grid for polarizing light is formed on a surface, and a plate-like glass is polarized. An inner space formed in the polarizer holding frame by covering a through-hole formed in the child holding frame, the inner space exposing the conductor grid, and an inert gas in the inner space The inert gas is continuously injected from the side surface of the polarizer holding frame so as to be stirred, and the inert gas is discharged from the side surface to the outside of the internal space. Thereby, the inside space can be made into an inert gas atmosphere with a small amount of inert gas. Therefore, the conductor grid does not come into contact with oxygen or the like, and the deterioration of the wire grid polarizer can be prevented.

  Here, the flow rate of the inert gas may be approximately 25 m or more per second, and the flow rate of the inert gas per minute may be approximately 5 times or more the volume of the internal space. Thereby, the inert gas is stirred in the internal space, and the inert gas is filled in the internal space without evacuating the internal space before supplying the inert gas. Moreover, even if the inert gas flows out from the internal space, the interior space can be always filled with the inert gas.

  According to the present invention, it is possible to prevent deterioration of a wire grid type polarizer with a small amount of gas.

It is a front view which shows the outline of the polarized light irradiation apparatus 1 which concerns on 1st Embodiment. 2 is a plan view illustrating an outline of a polarized light irradiation unit 10. FIG. 2 is a side view illustrating an outline of a polarized light irradiation unit 10. FIG. It is the perspective view which shows an example of the polarizer unit 12, and is the figure which looked at the polarizer unit 12 from diagonally upward. It is the perspective view which shows an example of the polarizer unit 12, and is the figure which looked at the polarizer unit 12 from diagonally downward. 3 is a plan view of a polarizer holding frame 15. FIG. 3 is a side view of a polarizer holding frame 15. FIG. It is AA sectional drawing of FIG. It is the elements on larger scale of the surface 15d. It is a figure which shows how the inert gas inject | poured from the injection tube 17a behaves within the internal space S in a comparative example (polarizer unit 12 '). FIG. 6 is a diagram showing how an inert gas injected from an injection tube 17a behaves in an internal space S in a comparative example (polarizer unit 12 ″). It is a figure which shows how the inert gas inject | poured from the injection tube 17a behaves within the internal space S in the polarizer unit 12 concerning 1st Embodiment. It is a side view which shows the outline of the polarizer unit 12A in the polarized light irradiation apparatus 2 of 2nd Embodiment, and is the elements on larger scale of the surface 15d of 15 A of polarizer holding frames.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<First Embodiment>
FIG. 1 is a front view showing an outline of a polarized light irradiation apparatus 1 according to the first embodiment. For example, the polarized light irradiation apparatus 1 obtains polarized light by passing light from a light source through a polarizing film, and irradiates the exposed surface of a glass substrate or the like to generate an alignment film or the like for a liquid crystal panel. It is.

  Hereinafter, the conveyance direction of the object to be exposed W is defined as the y direction, the direction orthogonal to the conveyance direction is defined as the x direction, and the vertical direction is defined as the z direction.

  The polarized light irradiation apparatus 1 mainly includes a polarized light irradiation unit 10, a drive unit 20, and an imaging unit 30.

  The polarized light irradiation unit 10 irradiates the object to be exposed W with polarized light. FIG. 2 is a plan view showing an outline of the polarized light irradiation unit 10. FIG. 3 is a side view showing an outline of the polarized light irradiation unit 10. Note that the two-dot chain line in FIG. 3 indicates a range in which light is irradiated.

  The polarized light irradiation unit 10 mainly includes a light source 11 and a polarizer unit 12.

  The light source 11 is a rod-shaped lamp and emits unpolarized light (for example, ultraviolet light). A plurality of light sources are arranged side by side in the x direction so that the longitudinal direction is along the y direction. As the light source 11, a long arc lamp that efficiently emits short-wavelength ultraviolet light (for example, light having a wavelength of 254 nm) necessary for the photo-alignment process can be used. Note that the form of the light source 11 is not limited to this, and may be, for example, a single lamp that is long along the x direction.

  The polarizer unit 12 polarizes non-polarized light emitted from the light source 11 and is provided below the light source 11 (−z side). The polarizer unit 12 mainly includes a specific wavelength transmission filter 13 and a polarizer 14 (see FIG. 3).

  One polarizer unit 12 may be provided for each light source 11, or two or more polarizer units 12 may be provided for each light source 11. The polarizer unit 12 will be described in detail later.

  Returning to the description of FIG. The drive unit 20 mainly includes a stage 21 and a stage guide rail 22.

  The stage 21 is provided so as to be movable along the stage guide rail 22 by driving means (not shown) (see the thick arrow in FIG. 1). An object to be exposed W is placed on the upper surface of the stage 21.

  The imaging unit 30 is a camera used for alignment of the object to be exposed W placed on the stage 21.

  The operation of the polarized light irradiation apparatus 1 configured as described above will be described. The polarized light irradiation apparatus 1 irradiates the exposure surface of the object to be exposed W with the light irradiated from the polarization irradiation unit 10 while moving the object to be exposed W in the y direction that is the scanning direction. Is generated. Since the operation of this polarized light irradiation apparatus 1 is already known, detailed description thereof is omitted. In the scanning, the polarized light irradiation unit 10 may be moved, the object to be exposed W (stage 21) may be moved, or both of them may be relatively moved.

  At the time of exposure, the polarizer 14 is deteriorated by being irradiated with light from the light source 11. The present invention is characterized by preventing deterioration of the polarizer 14. Hereinafter, the polarizer unit 12 will be described in detail.

  4 and 5 are perspective views showing an example of the polarizer unit 12. FIG. 4 is a diagram of the polarizer unit 12 viewed from obliquely above, and FIG. 5 is a diagram of the polarizer unit 12 viewed from obliquely below. 4 and 5, two polarizer units 12 are provided for one light source 11.

  The polarizer unit 12 includes a specific wavelength transmission filter 13, a polarizer 14, a polarizer holding frame 15 that holds the specific wavelength transmission filter 13 and the polarizer 14, a pressing plate 16, and a gas supply unit 17. .

  The specific wavelength transmission filter 13 is a filter that transmits only light in a specific wavelength range and absorbs light of other wavelengths. In the specific wavelength transmission filter 13, a filter layer of a bandpass filter that transmits only light in a specific wavelength range is formed on a transparent substrate made of plate-like glass (quartz glass or the like). However, the filter formed on the transparent substrate is not limited to the band pass filter, and may be a low cut filter or a reflection filter, for example.

  The polarizer 14 is a wire grid type polarizer with little incident angle dependency, and is provided on the lower side (−z side) of the specific wavelength transmission filter 13. The wire grid polarizer forms a grid pattern of the conductor grid 14b (see FIG. 8) on the transparent substrate 14a (see FIG. 8), and the pitch of the conductor grid is made equal to or less than the wavelength of incident light. The polarized light component parallel to the longitudinal direction of the light is reflected and the polarized light component orthogonal thereto is passed. The conductor grid is formed of a metal such as aluminum.

  The polarizer holding frame 15 is a thick plate-like member, and is made of, for example, metal. The polarizer holding frame 15 has a through hole 15a penetrating in the thickness direction (z direction).

  The through hole 15 a is covered with the specific wavelength transmission filter 13 and the polarizer 14. The specific wavelength transmission filter 13 is provided on the upper surface (+ z side) 15 b of the polarizer holding frame 15. The polarizer 14 is provided on the lower surface (−z side) 15 c of the polarizer holding frame 15.

  FIG. 6 is a plan view of the polarizer holding frame 15. FIG. 7 is a side view of the polarizer holding frame 15, and the internal structure is indicated by a dotted line.

  The polarizer holding frame 15 is formed with a through hole 15a penetrating in the thickness direction. The through hole 15a opens on the surfaces 15b and 15c which are the largest surfaces of the polarizer holding frame 15.

  Concave portions 15e and 15f are formed on the surfaces 15b and 15c, respectively, around the through hole 15a. Around the recesses 15e and 15f, a recess 15h on which the pressing plate 16 is placed is formed.

  A discharge hole 15g, which is a through-hole penetrating the surface 15d, is formed in a surface 15d (corresponding to the side surface of the polarizer holding frame 15) orthogonal to the surfaces 15b and 15c. The discharge hole 15g allows the outside of the polarizer holding frame 15 to communicate with the internal space S (detailed later) that is inside the polarizer holding frame 15. The discharge hole 15g is provided at the center in the longitudinal direction of the surface 15d.

  Returning to the description of FIGS. The specific wavelength transmission filter 13 and the polarizer 14 are provided in the polarizer holding frame 15 so as to cover the through hole 15a. The specific wavelength transmission filter 13 is placed on the bottom surface of the recess 15e (see FIGS. 6, 7, and 8), the polarizer 14 is placed on the bottom surface of the recess 15f (see FIGS. 7 and 8), and the specific wavelength transmission filter 13 and A specific wavelength transmission filter 13 is provided on the surface 15b by placing the pressing plate 16 on the bottom surface of the recess 15h so as to cover the polarizer 14, and fixing the pressing plate 16 to the polarizer holding frame 15, and the polarizer 14 is provided on the surface 15c. As a result, both ends of the through hole 15 a are covered, and an internal space S is formed inside the polarizer holding frame 15. The polarizer 14 is provided on the surface 15c so that the conductor grid 14b is exposed to the internal space S (see FIG. 8).

  The gas supply unit 17 supplies an inert gas to the internal space S. The inert gas is, for example, nitrogen, argon or the like, and nitrogen is used in this embodiment. The gas supply unit 17 includes an injection pipe 17 a that communicates with the internal space S.

  8 is a cross-sectional view taken along the line AA in FIG. FIG. 9 is a partially enlarged view of the surface 15d, and only the injection tube 17a is cut at the position of the surface 15d.

  An injection tube 17 a is provided on the surface 15 d of the polarizer holding frame 15. The injection tube 17a is a cylindrical tube and is inserted into the discharge hole 15g. Thereby, the discharge hole 15g and the injection tube 17a are adjacent to each other.

  The injection tube 17a has an inner diameter of approximately 0.5 mm, and the discharge hole 15g has an inner diameter of approximately 3.0 mm. Therefore, in the cross section substantially parallel to the surface 15d, the area inside the discharge hole 15g and outside the injection pipe 17a (the area where the inert gas or the like is discharged from the internal space S) is the area inside the injection pipe 17a. It is larger than the area of the portion where the inert gas or the like is injected into the internal space S.

  The injection tube 17a is provided so that the tip of the injection tube 17a is located inside the discharge hole 15g. However, the tip position of the injection tube 17a is not limited to this, and the tip of the injection tube 17a may slightly protrude into the internal space S.

  The gas supply unit 17 continuously supplies an inert gas to the internal space S. In other words, the inert gas is continuously injected into the internal space S from the injection tube 17a. The flow rate of the inert gas when injected into the internal space S from the injection pipe 17a is approximately 25 m per second. Therefore, the inert gas is stirred in the internal space S. The inert gas stirred in the internal space S is discharged from the discharge hole 15g communicating with the internal space S.

  From the injection tube 17a, 300 milliliters (mL) of inert gas per minute is supplied. 300 mL is approximately 5 times the capacity of the internal space S (approximately 50 mL). Therefore, even if the inert gas flows out from the internal space S, the interior space S is always filled with the inert gas. Therefore, an inert gas is always in contact with the conductor grid 14b, and deterioration due to oxidation or the like is prevented.

  10 to 12 are diagrams showing how the inert gas injected from the injection tube 17a behaves in the internal space S. FIG. FIG. 10 shows a polarizer unit 12 'according to a comparative example, in which the injection tube 17a and the discharge hole 15g are at different positions. FIG. 11 shows a polarizer unit 12 ″ according to a comparative example, in which the discharge hole 15 g is not formed. FIG. 12 shows a polarizer unit 12 according to the present embodiment. 10-12, the flow of an inert gas is shown with a dashed-two dotted line. 10-12, conditions (flow velocity, flow rate, etc.) other than the positions of the injection tube 17a and the discharge hole 15g are the same.

  As shown in FIG. 10, when the injection pipe 17a and the discharge hole 15g are at different positions, the inert gas flows from the injection pipe 17a toward the discharge hole 15g, and the inert gas does not diffuse in the internal space S. .

  Further, as shown in FIG. 11, even when the discharge hole 15g is not formed, the inert gas flows linearly from the injection pipe 17a, and the inert gas does not diffuse in the internal space S.

  On the other hand, as shown in FIG. 12, when the discharge hole 15g is adjacent to the injection pipe 17a, the flow path of the inert gas (distance from the tip of the injection pipe 17a to the discharge hole 15g) becomes long. The inert gas injected from the pipe 17a diffuses throughout the interior space S. Therefore, the interior space S is surely an inert gas atmosphere, and the residual oxygen concentration in the interior space S is reduced.

  According to the present embodiment, the exhaust hole 15g and the injection tube 17a are provided adjacent to each other, so that the interior space S is inertly filled with a small amount of inert gas without previously evacuating the interior space S. Can be. And by exposing the conductor grid 14b to the internal space S, the conductor grid does not come into contact with oxygen or the like. Therefore, deterioration of the wire grid polarizer can be prevented with a small amount of inert gas. Further, it is possible to prevent deterioration of the wire grid type polarizer without providing an antioxidant film or the like on the conductor grid 14b. In particular, when the injection tube 17a is inserted into the discharge hole 15g, the flow path of the inert gas becomes the longest, so that the inert gas can be efficiently diffused in the internal space S.

  Moreover, in this Embodiment, the inert gas atmosphere can be reliably made into the inside space S by supplying inert gas to the interior space S continuously. In the polarized light irradiation apparatus 1, since it becomes high temperature at the time of use, the sealing material made from rubber or resin cannot be used. In addition, since gas is generated, a heat-resistant silicon sealing material cannot be used. Therefore, a gap exists between the specific wavelength transmission filter 13 and the polarizer 14 and the polarizer holding frame 15 (the inner space S cannot be sealed), and the inert gas continues to leak. However, by continuously supplying the inert gas to the internal space S, the interior space S can be maintained in an inert gas atmosphere, and deterioration of the wire grid polarizer can be prevented. However, the inert gas can be intermittently supplied to the internal space S.

  Further, according to the present embodiment, the internal space S can be filled with the inert gas by increasing the flow velocity and injecting the inert gas into the internal space S. For example, even when the discharge hole 15g is adjacent to the injection tube 17a, if the inner diameter of the injection tube 17a is increased (for example, approximately 1.0 mm) and the flow rate is decreased, the inert gas is supplied even when the same amount of inert gas is supplied. The gas may not diffuse throughout the interior space S, and air other than the inert gas may partially remain in the interior space S. Therefore, it is desirable that the flow rate of the inert gas when flowing out of the injection pipe 17a is as fast as about 25 m / second or more.

  In the present embodiment, the discharge hole 15g and the injection tube 17a are provided at the center in the longitudinal direction of the surface 15d, but the positions of the discharge hole 15g and the injection tube 17a are not limited thereto. For example, the discharge hole 15g and the injection tube 17a may be provided near the end of the surface 15d. However, in order to diffuse the inert gas efficiently in the internal space S, it is desirable to provide the discharge hole 15g and the injection tube 17a at the center in the longitudinal direction of the surface 15d.

<Second Embodiment>
In the first embodiment of the present invention, the discharge hole 15g and the injection pipe 17a are adjacent to each other by inserting the injection pipe 17a into the discharge hole 15g. However, the positions of the discharge hole 15g and the injection pipe 17a are the same. The relationship is not limited to this.

  In the second embodiment, the injection tube 17a is not inserted into the discharge hole 15g. The polarized light irradiation apparatus according to the second embodiment will be described below. Since the difference between the polarized light irradiation apparatus 1 of the first embodiment and the polarized light irradiation apparatus 2 of the second embodiment is only the position of the discharge hole in the polarizer unit, only the polarizer unit is described below. explain. Further, the same parts as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  FIG. 13 is a side view showing an outline of the polarizer unit 12A in the polarized light irradiation device 2 (entire view omitted) of the second embodiment, and is a partially enlarged view of the surface 15d of the polarizer holding frame 15A. In FIG. 13, only the injection tube 17a is cut at the position of the surface 15d.

  The injection tube 17a is provided at the center in the longitudinal direction of the surface 15d. However, as in the first embodiment, the position of the injection tube 17a is not limited to this.

  The discharge holes 15g are provided adjacent to both sides of the injection tube 17a. In this embodiment, the discharge holes 15g are provided on both sides of the injection tube 17a. However, the discharge holes 15g may be provided only on one side of the injection tube 17a.

  Thus, even when the injection tube 17a is not inserted into the discharge hole 15g and the discharge hole 15g is formed adjacent to the injection tube 17a, the flow of the inert gas is the same as in the first embodiment. Since the path becomes longer, the inert gas injected from the injection pipe 17a diffuses throughout the interior space S, and the interior space S can be made an inert gas atmosphere with a small amount of inert gas. Then, by exposing the conductor grid 14b to the internal space S, the conductor grid does not come into contact with oxygen or the like, so that the deterioration of the wire grid polarizer can be prevented with a small amount of inert gas.

  Note that the position, number, and shape of the discharge holes 15g are not limited to those shown in FIG. Although two discharge holes 15g are provided in FIG. 13, the number of the discharge holes 15g may be one or three or more. Further, the position of the discharge hole 15g is not limited to the position shown in FIG. 13 as long as it is adjacent to the injection tube 17a, and the shape is not limited to the cylindrical shape. For example, the position where the discharge hole is formed is not limited to the left or right of the injection tube 17a, and may be above or below the discharge hole. Further, the shape of the surface 15d of the discharge hole is not limited to a circle but may be an ellipse or the like. However, the area inside the discharge hole (the area where the inert gas or the like is discharged from the internal space S) in the cross section substantially parallel to the surface 15d is the area inside the injection pipe 17a (inactive to the internal space S). It is desirable to make it larger than the area of the portion into which gas or the like is injected.

  The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and design changes and the like within a scope not departing from the gist of the present invention are included. .

  Further, in the present invention, “substantially” is a concept including not only a case where they are exactly the same but also errors and deformations that do not lose the identity. For example, the approximate center is not limited to the exact center. Further, for example, when simply expressing as parallel, orthogonal, etc., not only strictly parallel, orthogonal, etc. but also cases of substantially parallel, substantially orthogonal, etc. are included. Further, in the present invention, the “neighborhood” is a concept indicating that when it is in the vicinity of A, for example, it is near A and may or may not include A.

1: Polarized light irradiation device 2: Polarized light irradiation device 10: Polarized light irradiation unit 11: Light source 12, 12A: Polarizer unit 13: Specific wavelength transmission filter 14: Polarizer 14a: Transparent substrate 14b: Conductor grids 15, 15A: Polarizer holding frame 15a: through hole 15b: surface 15c: surface 15d: surface 15e: recess 15f: recess 15g: discharge hole 15h: recess 16: presser plate 17: gas supply part 17a: injection tube 20: drive part 21: stage 22: Stage guide rail 30: Imaging unit

Claims (7)

A plate-shaped wire grid type polarizer having a conductor grid for polarizing light formed on the surface;
Plate-like glass,
A thick plate-like polarizer holding frame having a through hole penetrating in the thickness direction, the polarizer holding frame provided with the polarizer and the glass so as to cover the through hole,
A gas supply unit configured to supply an inert gas to an internal space formed inside the polarizer holding frame by covering the through-hole with the polarizer and the glass, and an injection tube communicating with the internal space Having a gas supply,
With
The polarizer is provided on a first surface which is the largest surface of the polarizer holding frame so that the conductor grid is exposed to the internal space.
The glass is provided on a second surface parallel to the first surface;
The third surface orthogonal to the first surface and the second surface of the polarizer holding frame is formed with a discharge hole penetrating the third surface and communicating with the internal space.
The polarizer unit, wherein the injection tube is provided adjacent to the discharge hole.   2. The polarizer unit according to claim 1, wherein the injection tube is provided at a central portion in a longitudinal direction of the third surface. The outer diameter of the injection tube is smaller than the inner diameter of the discharge hole,
The polarizer unit according to claim 1 or 2, wherein the injection tube and the discharge hole are adjacent to each other by inserting the injection tube into the discharge hole. The injection tube has a diameter of approximately 0.5 mm,
4. The polarized light according to claim 1, wherein the gas supply unit supplies the inert gas so that a flow rate when the gas flows out from the injection tube is approximately 25 m or more per second. 5. Child unit. A light source;
A polarizer unit that polarizes light from the light source, the polarizer unit according to any one of claims 1 to 3,
A polarized light irradiation apparatus comprising: A plate-like polarizer having a conductive grid for polarizing light formed on the surface and a plate-like glass covering the through-hole formed in the polarizer holding frame to form inside the polarizer holding frame The inert gas is continuously injected from the side surface of the polarizer holding frame into the inner space where the conductive grid is exposed so that the inert gas is stirred in the inner space. And
A gas filling method for a polarizer unit, wherein the inert gas is discharged from the side surface to the outside of the internal space. The flow rate of the inert gas is approximately 25 m or more per second,
7. The gas filling method for a polarizer unit according to claim 6, wherein the flow rate of the inert gas per minute is approximately five times or more the volume of the internal space.

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