JP6589764B2 - Gas injection device - Google Patents

Description

  The present invention relates to a gas jetting device that removes foreign matter adhering to a surface by blowing gas onto the surface of a substrate or the like.

  2. Description of the Related Art Conventionally, there is an apparatus (hereinafter referred to as a gas ejecting apparatus) that removes foreign matter or liquid adhering to a surface by blowing a gas such as air or nitrogen gas onto the surface of a substrate or the like. Patent Document 1 also discloses a gas injection device that discharges gas radially by providing a plurality of injection holes in a gas blowing nozzle. According to such a gas jetting device disclosed in Patent Document 1, it is possible to blow a gas over a relatively wide range with one nozzle without using a plurality of nozzles.

  In the following, for convenience, a member corresponding to a gas blowing nozzle is referred to as a blowing module. In addition, a range in which the blowing module can blow gas onto the surface of an object (for example, a substrate) is referred to as a blow range.

JP 2012-216624 A

  In the case where a blowout module provided with a plurality of injection holes is used as the blowout module, gas is simultaneously blown out from the plurality of injection holes provided in the blowout module. In other words, when a blowout module having a plurality of injection holes is used as the blowout module, it is difficult to perform control such as changing the timing of blowing gas for each place where the blow range is subdivided.

  If the timing of blowing the gas cannot be controlled according to the location in the blow range, there will be a place where the gas flowing out from each injection hole interferes with each other and the flow rate decreases, and foreign matter may stay in that portion Occurs. In addition, the air coming out of the respective injection holes interferes to generate a vortex in an unexpected place, and as a result, there is a possibility that the foreign matter may fly into the air.

  The present invention has been made based on this situation, and an object of the present invention is to respond to a position where an injection hole is provided in a gas injection device in which a blowout module includes a plurality of injection holes. Another object of the present invention is to provide a gas injection device capable of changing the timing of blowing gas.

In order to achieve the object, the present invention provides a blowing module (20) in which a plurality of chambers (Rm1, Rm2, Rm3) are formed on a plate-like member (21) that provides a surface on the gas blowing side. And a plurality of hoses (30A, 30B, 30C) for supplying the compressed gas to each of the plurality of rooms, and a timing control unit (50) for controlling the timing of supplying the compressed gas to each of the plurality of rooms. And at least one through hole is provided in a region corresponding to each of the plurality of rooms in the plate-like member, and the through hole has a surface of an object to which the gas is blown. It is characterized in that it is inclined with respect to the thickness direction of the plate-like member so that the foreign matter adhering to the surface is pushed out toward the edge of the surface .

  In the above configuration, since a through hole is provided in each room, when compressed gas is supplied into the room from a compressed gas source via a hose, gas is injected from the through hole. That is, the through hole provided in each room functions as an injection hole. In addition, there are a plurality of rooms in which through holes that function as injection holes are provided. Therefore, the entire blowing module has a configuration including a plurality of injection holes. And the gas injection apparatus mentioned above is provided with the timing control part which controls the timing which supplies compressed gas to each room.

  The timing at which the gas is ejected from the injection hole corresponds to the timing at which the compressed gas is supplied to the room in which the injection hole is provided. Therefore, the timing which a timing control part supplies compressed gas for every room can shift the timing which blows off gas according to the position in which the injection hole is provided.

  That is, according to the above configuration, in the gas injection device in which the blowing module includes a plurality of injection holes, the timing for blowing the gas can be changed according to the position where the injection holes are provided.

  In addition, the code | symbol in the parenthesis described in the claim shows the correspondence with the specific means as described in embodiment mentioned later as one aspect, Comprising: The technical scope of this invention is limited is not.

1 is a block diagram showing a schematic configuration of a gas injection device 100. FIG. It is a figure for demonstrating the structure of the module 20 for blowing out. It is a figure for demonstrating the shape of 1st chamber Rm1, 2nd chamber Rm2, and 3rd chamber Rm3. 6 is a diagram for explaining the operation of the timing control unit 50. FIG. It is a figure for demonstrating the action | operation of the gas injection apparatus. It is a figure for demonstrating the action | operation of the gas injection apparatus. It is a figure for demonstrating the action | operation of the gas injection apparatus. It is a figure which shows the structure of the module 20 for discharge disclosed as the modification 2. FIG. It is a figure which shows the structure of the module 20 for discharge disclosed as the modification 2. FIG. It is a figure for demonstrating the action | operation of the timing control part 50 in the modification 2. FIG. It is the figure which showed the modification of how to provide the injection hole. It is the figure which showed the modification of how to provide the injection hole. It is the figure which showed the example of arrangement | positioning of the room in the module 20 for blowing out. It is the figure which showed the example of arrangement | positioning of the room in the module 20 for blowing out.

  Hereinafter, one embodiment of the present invention will be described with reference to the drawings. As shown in FIG. 1, the gas injection device 100 according to the present embodiment blows air from above toward the substrate 300 disposed on the stage 200, so that foreign matter such as dust attached to the surface of the substrate 300. It is a device that removes. The board | substrate 300 used as a foreign material removal object is a printed circuit board, a semiconductor wafer, a flat panel display board | substrate, etc., for example.

  As shown in FIG. 1, the gas injection device 100 includes a compressed air source 10, a blowout module 20, a plurality of hoses 30 </ b> A to C, a plurality of valves 40 </ b> A to C, and a timing control unit 50. In addition, each figure including FIG. 1 is the figure which showed gas injection apparatus 100 grade | etc., And the magnitude | size and shape of each member are exaggerated suitably for easy understanding.

  The compressed air source 10 is a member that supplies compressed air. The compressed air source 10 may be configured by a known air supply device. For example, the compressed air source 10 may be a compressor or a tank filled with compressed air. The compressed air output from the compressed air source 10 is supplied to the blowing module 20 via the hoses 30A to 30C. The compressed air source 10 corresponds to the compressed gas source described in the claims, and the compressed air corresponds to the compressed gas described in the claims.

  The blowout module 20 is a module for blowing out air toward the substrate 300, and includes a bottom surface portion 21 and an air sealing portion 22 as finer constituent elements.

  The bottom surface portion 21 is a plate-like member and may be realized using, for example, a metal plate. The bottom surface portion 21 corresponds to the plate-like member described in the claims. In the present embodiment, as an example, the shape of the bottom surface portion 21 in plan view (hereinafter referred to as a planar shape) is a square shape, but is not limited thereto. As another aspect, the planar shape of the bottom surface portion 21 may be a rectangular shape or a circular shape including an ellipse. In other words, the surface on the gas blowing side described in the claims is a surface directed toward the substrate 300 as a foreign object removal target.

  In the present embodiment, as an example, it is assumed that the bottom surface portion 21 is formed in substantially the same shape as the substrate 300 so as to face the entire region of the substrate 300 to be removed of foreign matter. Furthermore, although the bottom face part 21 in this embodiment is made into a flat plate shape, it may be curved with a predetermined curvature.

  As shown in FIG. 1, the bottom surface portion 21 is provided with a plurality of through holes 211 that penetrate the bottom surface portion 21 in the thickness direction (in other words, the vertical direction). The through hole 211 functions as a hole for injecting air. Therefore, hereinafter, the through hole 211 provided in the bottom surface portion 21 is referred to as an injection hole 211. The white arrow in FIG. 1 schematically represents the direction of blowing air. In the present embodiment, as an example, it is assumed that the injection holes 211 are arranged in a 5 × 5 matrix on the bottom surface portion 21.

  The air sealing part 22 is a member for forming a space between the bottom part 21 and the lower end part is in close contact with the bottom part 21. That is, the air sealing portion 22 is joined to the bottom surface portion 21 to form a closed space. The air sealing portion 22 is formed in a so-called convex shape in which a central portion in a plan view protrudes from the peripheral region, and the inside thereof is hollow.

  Hereinafter, for the sake of convenience, the lower part of the ceiling part of the air sealing part 22 is referred to as a first level part 221, and the relatively higher part is referred to as a second level part 222, and the first level part 221 and the second level part. A wall surface portion connecting to 222 is referred to as a step portion 223 (see FIG. 2). Further, a wall surface portion standing from the bottom surface portion 21 in order to form the first level portion 221 is referred to as a side surface portion 224. The ceiling portion of the air sealing portion 22 corresponds to a portion facing the bottom surface portion 21. FIG. 2 shows a cross-sectional view of the blowing module 20 in a plane parallel to the vertical direction.

  In addition, as shown in FIG. 2, the air sealing portion 22 has two partition walls so as to form three chambers, a first chamber Rm1, a second chamber Rm2, and a third chamber Rm3, with the bottom surface portion 21. 225, 226. For convenience, the partition wall 225 is referred to as a first partition wall 225, and the partition wall 226 is referred to as a second partition wall 226.

  The first partition wall 225 is a wall that forms a rectangular parallelepiped space inside, and, as shown in FIG. 3, among the injection holes 211 arranged in a matrix, one injection hole 211 ( Thereafter, it is formed so as to surround the central hole 211A). Note that FIG. 3 is a view in which unnecessary portions for explaining the positions and shapes of the partition walls 225 and 226 with respect to the bottom surface portion 21 in the view of the blowing module 20 from above.

  The aforementioned first chamber Rm1 is a room surrounded by the first partition wall 225, the second level portion 222, and the bottom surface portion 21. The first chamber Rm1 corresponds to the central chamber described in the claims. A region surrounded by the first partition wall 225 in the bottom surface portion 21 corresponds to a region corresponding to the first chamber Rm1. Since the first partition wall 225 is formed so as to surround the central hole 221A, the first chamber Rm1 is connected to the central hole 211A.

  As shown in FIG. 2 and the like, a connection mechanism 23A for connecting to the hose 30A is provided in a portion corresponding to the ceiling of the first chamber Rm1 in the second level portion 222. The compressed air from the hose 30A is supplied to the first chamber Rm1 through the connection mechanism 23A.

  The second partition wall 226 is formed so as to surround the eight injection holes 211 arranged around the central hole 211A. That is, the second partition wall 226 is disposed outside the first partition wall 225 by one injection hole. The step 223 is formed so as to be continuous with the second partition wall 226 as shown in FIG.

  The aforementioned second chamber Rm2 is a room surrounded by the first partition wall 225, the second partition wall 226, the step portion 223, the second level portion 222, and the bottom surface portion 21. A region on the bottom surface 21 that is outside the first partition wall 225 and inside the second partition wall 226 corresponds to a region corresponding to the second chamber Rm2. The second chamber Rm2 is connected to the eight injection holes 211 arranged around the central hole 211A.

  As shown in FIG. 2 and the like, the step portion 223 is provided with a connection mechanism 23B for connecting to the hose 30B. The compressed air from the hose 30B is supplied to the second chamber Rm2 via the connection mechanism 23B. In the present embodiment, as an example, the connection mechanism 23B is provided in the vicinity of the corner of the step portion 223.

  The third chamber Rm3 is a room surrounded by the second partition wall 226, the side surface portion 224, the first level portion 221 and the bottom surface portion 21. A region on the bottom surface 21 that is outside the second partition wall 226 and that is inside the side surface 224 corresponds to a region corresponding to the third chamber Rm3. The side surface portion 224 is provided with a connection mechanism 23B for connecting to the hose 30C. The compressed air from the hose 30C is supplied to the third chamber Rm3 through the connection mechanism 23C.

  The hose 30A is a hose for supplying the air output from the compressed air source 10 to the first chamber Rm1. One end of the hose 30A is connected to the connection mechanism 23A of the first chamber Rm1, and the other end is connected to an air outlet (not shown) provided in the compressed air source 10 via the valve 40A.

  The valve 40A is a valve that adjusts the amount of compressed air supplied to the hose 30A. The opening / closing state of the valve 40 </ b> A is adjusted by the timing control unit 50. When the valve 40A is open, the compressed air is supplied to the first chamber Rm1 via the hose 30A. When compressed air is supplied to the first chamber Rm1, air is injected from the injection hole 211 provided in the first chamber Rm1.

  That is, the valve 40A corresponds to the first chamber Rm1 and functions as a valve for blowing air from the injection hole 211 connected to the first chamber Rm1. Hereinafter, the valve 40A is also referred to as a first chamber valve 40A.

  The hose 30B is a hose for supplying the air output from the compressed air source 10 to the second chamber Rm2. One end of the hose 30B is connected to the connection mechanism 23B of the second chamber Rm2, and the other end is connected to the air outlet of the compressed air source 10 via the valve 40B.

  The valve 40B is a valve that adjusts the amount of compressed air supplied to the hose 30B. The opening / closing state of the valve 40B is adjusted by the timing control unit 50. The valve 40B corresponds to the second chamber Rm2, and functions as a valve for blowing air from the injection hole 211 connected to the second chamber Rm2. Hereinafter, the valve 40B is also referred to as a second chamber valve 40B.

  The hose 30C is a hose for supplying the air output from the compressed air source 10 to the third chamber Rm3. One end of the hose 30C is connected to the connection mechanism 23C of the third chamber Rm3, and the other end is connected to the air outlet of the compressed air source 10 via the valve 40C.

  The valve 40C is a valve that adjusts the amount of compressed air supplied to the hose 30C. The opening / closing state of the valve 40 </ b> C is adjusted by the timing control unit 50. The valve 40C corresponds to the third chamber Rm3 and functions as a valve for blowing air from the injection hole 211 connected to the third chamber Rm3. Hereinafter, the valve 40C is also referred to as a third chamber valve 40C.

  For example, the valves 40A to 40C may be electromagnetic valves. Of course, the valves 40A to 40C may be other types of valves. Hereinafter, when the plurality of hoses 30 </ b> A to 30 </ b> C are not distinguished, they are simply referred to as hoses 30. Moreover, when not distinguishing the some valve | bulb 40A-C, it only describes as the valve | bulb 40. FIG.

  The timing control unit 50 controls the open / closed state of each valve 40. As an example, the timing control unit 50 in the present embodiment operates so as to close another valve 40 when a certain valve 40 is opened. Opening a certain valve 40 corresponds to blowing air from the injection hole 211 connected to the room corresponding to the valve 40. That is, the timing control unit 50 controls the timing at which air is blown out from the injection holes 211 in each room.

  The timing control unit 50 may be realized using a microcomputer including a CPU, a RAM, a ROM, and the like. The ROM stores a program for causing a normal computer to function as the timing control unit 50. As another aspect, the timing control unit 50 may be realized using an IC or an analog circuit element.

  FIG. 4 is a diagram for explaining the operation of the timing control unit 50 and represents the timing at which the valves 40A to 40C are opened (in other words, the timing at which compressed air is supplied to each room). . As shown in FIG. 4, the timing control unit 50 controls the open / close state of each valve 40 so that air is supplied to each room in the order of the first chamber Rm1, the second chamber Rm2, and the third chamber Rm3.

  Specifically, the valve 40A (that is, the first chamber valve 40A) connected to the first chamber Rm1 is first opened, and the other valves 40B and 40C are closed. The state in which the first chamber valve 40A is opened may be continued for a predetermined blow time Ta. The blow time Ta may be appropriately designed.

  By opening the first chamber valve 40A, air is blown out from the central hole 211A, and as shown in FIG. 5, the foreign matter existing immediately below the first chamber Rm1 on the surface of the substrate 300 is moved to the outside. And be driven out. In addition, the white arrow in FIG. 5 represents the flow of air.

  The pressure of the air supplied by the compressed air source 10 is sufficiently high so that the foreign matter present at the center of the substrate 300 is driven out to the outside of the second chamber Rm2 by the air blown out from the center hole 211A. A large value is preferable.

  When a predetermined blow time Ta has elapsed after opening the first chamber valve 40A, the timing controller 50 closes the first chamber valve 40A. Then, at a timing when a predetermined pause time Tb has elapsed from that point, the valve 40B connected to the second chamber Rm2 (that is, the second chamber valve 40B) is opened, and the other valves 40A, 40C are closed.

  The pause time Tb may be appropriately designed and can be set to a sufficiently small value with respect to the blow time Ta. Also, the pause time Tb may be zero. Furthermore, in this embodiment, while air is being injected from the injection hole 211 connected to a certain room, the open / close state of each valve 40 is controlled so as not to supply air to other rooms. Not limited to this. There may be a state where compressed air is supplied to a plurality of rooms. It is only necessary that the timing at which air starts to be blown out from a plurality of rooms is shifted.

  By opening the second chamber valve 40B, air is blown out from the injection holes 211 connected to the second chamber Rm2, and as shown in FIG. 6, below the second chamber Rm2 on the surface of the substrate 300 The foreign matter that was present in the is expelled to the outside. In addition, the possibility that the air blown out from the injection hole 211 provided in the second chamber Rm2 flows into the central portion of the substrate 300 (hereinafter, the substrate central portion) and interferes with each other is not zero. In addition, the air interference in this specification refers to an event in which the airflow is weakened by the collision of air that tries to flow in opposite directions.

  However, by supplying compressed air to the first chamber Rm1 before supplying compressed air to the second chamber Rm2 as in the present embodiment, air is blown out from the injection holes 211 provided in the second chamber Rm2. At the time, the foreign substance at the center of the substrate has already been removed. Therefore, even if the air blown out from the injection hole 211 connected to the second chamber Rm2 interferes in the vicinity of the center of the substrate, it is unlikely to cause a problem in removing foreign matter. That is, the airflow that is blown out from the injection hole 211 provided in the second chamber Rm2 toward the center of the substrate can be allowed.

  When a predetermined blow time Ta has elapsed since the opening of the second chamber valve 40B, the timing control unit 50 closes the second chamber valve 40B. Then, at a timing when a predetermined pause time Tb has elapsed from that point, the valve 40C connected to the third chamber Rm3 (that is, the third chamber valve 40C) is opened, and the other valves 40A, 40B are closed.

  By opening the third chamber valve 40C, air is blown out from the injection hole 211 connected to the third chamber Rm3, and the third chamber Rm3 is formed on the surface of the substrate 300 as shown in FIG. The foreign matter existing below is driven out of the substrate 300.

  As described above, when compressed air is supplied in the order of the first chamber Rm1, the second chamber Rm2, and the third chamber Rm3, the air is blown out simultaneously from all the injection holes 211 provided in the bottom surface portion 21. In comparison, the interference of the injected air can be suppressed. Therefore, the foreign matter on the substrate 300 can be efficiently repelled from the center of the substrate toward the outside.

  Further, in the above-described embodiment, the step portion 223 so that air flows into the room connected to the plurality of injection holes 211 like the second chamber Rm2 and the third chamber Rm3 from the side surface direction of the room. The structure which provided the connection mechanisms 23B and 23C in the side part 224 was adopted. According to such a configuration, air is easily blown out from the injection hole 211 after the atmospheric pressure in the room becomes uniform. As a result, it is possible to reduce the risk of variations in the momentum of the air blown out from the plurality of injection holes 211 connected to one room.

  Further, in the present embodiment, as a more preferable configuration, connection mechanisms 23B and 23C are provided in the vicinity of the corners of the step portion 223 and the side surface portion 224. According to such a configuration, air is more likely to be blown out from the injection hole 211 after the atmospheric pressure in the room becomes even.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to the above-mentioned embodiment, The various modifications described below are also contained in the technical scope of this invention, and also in addition to the following However, various modifications can be made without departing from the scope of the invention.

  In addition, about the member which has the same function as the member described in the above-mentioned embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted. In addition, when only a part of the configuration is mentioned, the configuration of the above-described embodiment can be applied to the other portions.

[Modification 1]
In the above-described embodiment, the blowout module 20 is configured to include two rooms having a ring shape on the outside with the room connected to the central hole 211A as the center, but the present invention is not limited thereto. Around the first chamber Rm1 as the central chamber, three or more rooms having a circular planar shape may be provided. In any aspect, the timing control unit 50 supplies compressed air in order from the room located at the center in the blowing module 20 so as to gradually expel foreign substances from the center of the substrate 300 to the outside. Go.

[Modification 2]
In the above, the configuration of the blowing module 20 has been disclosed in which a plurality of rooms having an annular shape are arranged around the room connected to the central hole 211A (that is, the central chamber). The configuration is not limited to the above-described configuration.

  For example, as shown in FIGS. 8 and 9, the blowout module 20 has four partition walls that divide the injection holes 211 arranged in a matrix for each row, thereby arranging the first chamber Rm1 to the fifth chamber. It is good also as a structure provided with five rooms to Rm5.

  The direction in which the rooms are arranged corresponds to the column direction described in the claims. A direction parallel to the bottom surface portion 21 and orthogonal to the column direction corresponds to the row direction. Each room provided in the blowing module 20 as the second modification is formed in a rectangular parallelepiped shape with the row direction as the longitudinal direction.

  The timing control unit 50 having such a configuration controls the valve 40 as shown in FIG. 10 so that the first chamber Rm1, the second chamber Rm2, the third chamber Rm3, the fourth chamber Rm4, and the fifth chamber Rm5. Supply compressed air in order. That is, compressed air is supplied in order from a room located at one end in the row direction to a room located at the other end.

  According to such a control mode, the foreign matter on the substrate 300 can be pushed out in one direction from one end to the other end. As a result, the foreign matter on the substrate 300 collects in one direction, so that the foreign matter expelled from the substrate 300 can be easily collected.

[Modification 3]
Although the aspect which formed the injection hole 211 along the thickness direction of the bottom face part 21 was disclosed above, it is not restricted to this. The injection hole 211 may be formed to have a predetermined angle with respect to the thickness direction.

  For example, when the air sealing part 22 is configured in the same manner as in the above-described embodiment, the injection hole 211 connected to the second chamber Rm2 is inclined by a predetermined angle θa with respect to the thickness direction as shown in FIG. May be given. Further, the injection hole 211 connected to the third chamber Rm3 may be inclined by a predetermined angle θa with respect to the thickness direction so that air is blown outward from the center. The inclination angles θa and θb may be appropriately designed in a range in which the direction of the air blown out from the injection hole 211 is in the direction from the center to the outside. θb is preferably equal to or greater than θa.

  Moreover, when the air enclosure part 22 is comprised similarly to the modification 2, as shown in FIG. 12, you may provide an inclination to the injection hole 211 of each room. The angle formed with respect to the thickness direction of the injection hole 211 may be appropriately designed within a range in which the direction of the air blown from the injection hole 211 is the direction in which the foreign matter is pushed out.

[Modification 4]
In the above, although the compressed air source 10 and the hose 30 are connected via the valve 40 and the open / closed state of the valve 40 is controlled, the aspect of adjusting the timing of supplying the compressed air to each room has been disclosed. The adjustment method of the timing which supplies compressed air to each room is not restricted to this.

  For example, a valve is provided at a connection portion between each room and the hose 30 (that is, the connection mechanisms 23A to 23C), and compressed air is supplied to each room by controlling opening and closing of the valves provided in the connection mechanisms 23A to 23C. The timing to perform may be shifted. Further, the valve may be provided in the middle of the hose 30.

  Moreover, the timing at which compressed air is supplied to each room may be adjusted by connecting a plurality of hoses 30 to different compressed air sources 10 and controlling the blowing state of each compressed air source 10. Note that shifting the timing of supplying compressed air to each room corresponds to shifting the timing of blowing air from the injection hole 211 according to the position where the injection hole 211 is provided, as described above.

  Moreover, the timing which blows off air from the injection hole 211 according to the area | region in which the injection hole 211 is provided may be changed by providing a shutter in each injection hole 211 and controlling the opening and closing of the shutter. That is, various objects can be adopted as the control target of the timing control unit 50.

[Other variations]
In the first embodiment described above, an aspect in which the outer shape of each room is a square shape is disclosed, but the present invention is not limited to this. As shown in FIG. 13, the planar shape of each room may be rectangular. Moreover, circular shape may be sufficient. Other polygonal shapes may be used. Moreover, as shown in FIG. 14, it may be L-shaped.

  Moreover, although the aspect which provided the 25 injection holes 211 in the bottom face part 21 at the matrix form above was disclosed, the number and arrangement | positioning aspect of the injection holes 211 are not limited to the example mentioned above.

  Furthermore, the object (hereinafter, the removal target) to which the gas injection device 100 blows air is not limited to the substrate 300. For example, a reticle mask (glass dry plate) may be used.

  Moreover, although the aspect which supplies compressed air to the blowing module 20 was disclosed above, it is not restricted to this. The gas supplied to the blowing module 20 may be an inert gas such as nitrogen gas. That is, the gas blown out by the blowing module 20 may be a gas other than air.

DESCRIPTION OF SYMBOLS 100 Gas injection apparatus, 200 stage, 300 board | substrate, 10 compressed air source (compressed gas source), 20 blowing module, 21 bottom face part (plate-shaped member), 22 air enclosure part, 23A-C connection mechanism, 30A-C hose , 40A-C valve, 50 timing control section, 211 injection hole (through hole), 221 first level section, 222 second level section, 223 step section, 224 side section, 225 first partition wall, 226 second partition wall , Rm1-5 rooms

Claims (6)

A blowout module (20) in which a plurality of chambers (Rm1, Rm2, Rm3) are formed on a plate-like member (21) that provides a surface on the gas blowout side,
A plurality of hoses (30A, 30B, 30C) for supplying compressed gas to each of the plurality of chambers;
A timing controller (50) for controlling the timing of supplying compressed gas to each of the plurality of rooms,
In the plate-like member, at least one through hole is provided in a region corresponding to each of the plurality of rooms ,
The through hole is formed in the thickness direction of the plate-like member so that the direction of the gas to be blown becomes a direction to push out foreign matter adhering to the surface of the object to which the gas is blown toward the end of the surface. A gas injection device characterized in that the gas injection device is inclined . In claim 1,
The timing control unit controls the timing of supplying compressed gas to the room by controlling the timing of supplying compressed gas to each of the plurality of hoses from a predetermined compressed gas source. . In claim 1,
A valve is provided in the middle of the connecting part of the room and the hose or the hose,
The gas injection device according to claim 1, wherein the timing control unit controls the timing of supplying compressed gas to the room by controlling opening and closing of the valve. In any one of Claims 1-3,
The blowing module is
With one room in the center of the plate member,
In order to surround the central chamber that is the room provided in the center of the plate-like member, the plurality of the chambers having a circular shape in plan view are provided,
The said timing control part supplies compressed gas in order from the said room arrange | positioned more inside, The gas injection apparatus characterized by the above-mentioned. In any one of Claims 1-3,
The plurality of rooms are formed side by side in one direction,
The timing control unit is configured to supply compressed gas in order from the room located at one end to the room located at the other end in a row direction in which the rooms are arranged. A gas injection device. In claim 5,
Each of the plurality of rooms is formed in a rectangular parallelepiped having a direction perpendicular to the row direction as a longitudinal direction,
Each of the rooms is provided with a plurality of through holes arranged in a row in a row direction that is a direction orthogonal to the column direction.

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