JP6576724B2 - Analysis apparatus and analysis method - Google Patents

Description

  The present invention relates to an analysis apparatus and an analysis method.

  In an analyzer such as a scanning electron microscope (SEM) equipped with an energy dispersive X-ray spectrometer (EDS) or a scanning transmission electron microscope (STEM), the sample is scanned with an electron probe and X-rays from each point A technique for obtaining an element distribution image by imaging the difference in emission amount is known. At this time, as the scanning method, there are known a method of accumulating signal data by repeatedly scanning at a high scanning speed and a method of acquiring data by a single scanning at a low scanning speed. It has been.

  For example, Patent Document 1 discloses a technique for generating a single image by accumulating a plurality of images obtained by repeatedly scanning a sample while correcting misalignment due to drift between images.

JP 2007-299768 A

  Here, among samples to be analyzed, there is a sample whose element distribution and shape change when irradiated with an electron beam. Some samples to be analyzed change the element distribution and shape when the environment (temperature, etc.) of the sample changes.

  In the case of obtaining an element distribution image of such a sample using the above-described analyzer, the technique of Patent Document 1 described above, even if the element distribution changes during the measurement, the signal of the frame before the element distribution changes. Although the element distribution image can be drawn by extracting the data, the element distribution image cannot be drawn by extracting the signal data of the frame after the element distribution has changed.

  The present invention has been made in view of the above problems, and one of the objects according to some aspects of the present invention is to measure a sample in which the state of the sample changes during measurement. An object of the present invention is to provide an analysis apparatus and an analysis method capable of extracting data before and after a state change.

(1) The analyzer according to the present invention is:
An analyzer for analyzing a sample by repeatedly scanning the sample with a charged particle beam to detect a signal from the sample,
A data storage processing unit that stores signal data obtained by detecting the signal, together with position information data representing an irradiation position of the charged particle beam on the sample, in a storage unit,
A frame group extraction unit that detects a change in the signal between frames based on the signal data stored in the storage unit, and extracts a frame group including a plurality of consecutive frames based on the change in the signal between frames. When,
An image generation unit that extracts the signal data of a plurality of frames constituting the frame group from the signal data stored in the storage unit, and generates an image;
Only including,
The image generation unit generates the image for each frame group by extracting the signal data for each frame group when the frame group extraction unit extracts a plurality of the frame groups.
To do .

In such an analyzer, since the frame group extraction unit extracts a frame group consisting of a plurality of consecutive frames based on a change in signal between frames, in the measurement of a sample in which the state of the sample changes during measurement, Signal data before and after the signal from the sample changes can be extracted from the signal data obtained by repeatedly scanning the sample.

Moreover, in such an analyzer, images of before and after the signal from the sample change can be obtained in the measurement of the sample whose state changes during the measurement.

( 2 ) In the analyzer according to the present invention,
The frame group extraction unit may extract the frame group based on an intensity difference between the signals of two consecutive frames.

  In such an analyzer, in the measurement of a sample whose state changes during measurement, signal data before and after the change in signal intensity from the sample is extracted from signal data obtained by repeatedly scanning the sample. be able to.

( 3 ) In the analyzer according to the present invention,
The signal includes an X-ray signal generated from the sample by irradiation of the charged particle beam, and an electronic signal that is a secondary electron signal or a transmission electron signal,
The signal data includes X-ray signal data obtained by detecting the X-ray signal, and electronic signal data obtained by detecting the electronic signal,
The frame group extraction unit may detect a change in the electronic signal between frames based on the electronic signal data stored in the storage unit, and extract the frame group based on the change in the electronic signal. .

  In such an analyzer, in measurement of a sample whose state changes during measurement, signal data before and after the change of the electronic signal from the sample is extracted from signal data obtained by repeatedly scanning the sample. Can do.

( 4 ) In the analyzer according to the present invention,
The frame group extraction unit may extract the frame group based on a similarity between two electronic images generated from the electronic signal data of two consecutive frames.

  In such an analyzer, in measurement of a sample whose state changes during measurement, signal data before and after the change of the electronic image of the sample can be extracted from signal data obtained by repeatedly scanning the sample. it can.

( 5 ) The analysis method according to the present invention is:
An analysis method for analyzing a sample by repeatedly scanning a sample with a charged particle beam to detect a signal from the sample,
Storing the signal data obtained by detecting the signal in a storage unit together with position information data representing an irradiation position of the charged particle beam on the sample;
Extracting a frame group consisting of a plurality of consecutive frames based on the change in the signal between frames;
Extracting the signal data of a plurality of frames constituting the frame group from the signal data stored in the storage unit, and generating an image;
Only including,
In the step of generating the image, when a plurality of the frame groups are extracted, the signal data is extracted for each of the frame groups, and the image is generated for each of the frame groups .

  In such an analysis method, a group of frames consisting of a plurality of consecutive frames is extracted based on a change in signal between frames, so that the sample is repeatedly scanned in the measurement of the sample whose state changes during the measurement. From the signal data obtained in this way, signal data before and after the signal from the sample changes can be extracted.

( 6 ) In the analysis method according to the present invention,
In the step of extracting the frame group, the frame group may be extracted based on an intensity difference between the signals of two consecutive frames.

( 7 ) In the analysis method according to the present invention,
The signal includes an X-ray signal generated from the sample by irradiation of the charged particle beam, and an electronic signal that is a secondary electron signal or a transmission electron signal,
The signal data includes X-ray signal data obtained by detecting the X-ray signal, and electronic signal data obtained by detecting the electronic signal,
In the step of extracting the frame group, the frame group may be extracted based on a change in the electronic signal between frames.

( 8 ) In the analysis method according to the present invention,
In the step of extracting the frame group, the frame group may be extracted based on the similarity between two electronic images generated from the electronic signal data of two consecutive frames.

The figure which shows typically the analyzer which concerns on 1st Embodiment. The figure which shows typically the structure of the data stored in the memory | storage part. The figure for demonstrating position information data. The figure which shows an example of the X-ray spectrum produced | generated by extracting X-ray signal data. The flowchart which shows an example of the analysis method by the analyzer which concerns on 1st Embodiment. The figure which shows typically the main window displayed on the display part. The graph which shows the change of ROI count in the designated area | region. The graph which shows the change of the count of ROI_2. Graph showing the difference value g _n of each frame. The graph which shows the change of the count of ROI_2. The figure which shows typically the window for a comparison displayed on the display part. The figure for demonstrating the process when the addition of an element is performed. The figure for demonstrating the process when the addition of an element is performed. The figure for demonstrating the process which changes the range of the flame | frame which comprises each frame group. The figure for demonstrating the process which changes the range of the flame | frame which comprises each frame group. The graph which shows the change of the count of ROI_1 and the count of ROI_2. Graph showing the difference value g _n of each frame. The graph which shows the change of ROI count in the designated area | region. The graph which shows the similarity of each flame | frame. The figure which shows typically the window for a comparison displayed on the display part. The figure which shows typically the analyzer which concerns on 2nd Embodiment. The figure which shows typically the structure of the data stored in the memory | storage part. The graph which shows the change of the temperature of a sample. Graph showing the difference value Delta] t _n of each frame. The figure which shows typically the window for a comparison displayed on the display part. The graph which shows the change of the designated ROI count, and the change of the temperature of a sample. The figure which shows typically the analyzer which concerns on 4th Embodiment. The figure which shows typically the main window displayed on the display part. The figure for demonstrating the process which reduces saturation according to the intensity | strength of a X-ray signal. The figure which shows typically the analyzer which concerns on 5th Embodiment. The figure which shows an example of the GUI screen of the analyzer which concerns on 5th Embodiment.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential constituent requirements of the present invention.

1. 1. First embodiment 1.1. Analyzer First, the analyzer according to the first embodiment will be described with reference to the drawings. FIG. 1 is a diagram schematically illustrating an analyzer 100 according to the first embodiment. Here, the analysis apparatus 100 includes a scanning electron microscope (SEM) provided with an energy dispersive X-ray detector (EDS detector) 40.
An example will be described.

  As shown in FIG. 1, the analyzer 100 includes an optical system 10, an optical system control unit 19, a sample stage 20, a sample stage control unit 22, a secondary electron detector 30, and an electronic signal processing unit 32. The EDS detector 40, the X-ray signal processing unit 42, the processing unit 50, the operation unit 60, the display unit 62, and the storage unit 64 are included.

  In the analyzer 100, when the surface of the sample 1 is scanned with an electron probe (an example of a charged particle beam) formed by the optical system 10, secondary electron signals (signals from the sample) emitted from the irradiation point of the electron probe are scanned. An example) can be detected by the secondary electron detector 30 and imaged. In the analysis apparatus 100, an X-ray (characteristic X-ray) signal (an example of a signal from the sample) generated when the sample 1 is irradiated with the electron probe is detected by the EDS detector 40, and an EDS spectrum or element is detected. A distribution image can be obtained.

  The optical system 10 includes an electron beam source 12, a focusing lens 14, an objective lens 16, and a deflector 18. The electron beam source 12 generates an electron beam EB. The electron beam source 12 is, for example, a known electron gun. The focusing lens 14 focuses the electron beam EB emitted from the electron beam source 12. The objective lens 16 is a final stage electron probe forming lens disposed immediately before the sample 1. The deflector 18 deflects the electron beam EB (electron probe) focused by the focusing lens 14 and the objective lens 16. The deflector 18 deflects the electron beam EB (electron probe) focused by the focusing lens 14 and the objective lens 16, whereby the electron beam EB can be scanned on the sample 1. The position where the electron beam EB irradiates the sample 1 is determined by the applied voltage of the deflector 18. The optical system control unit 19 controls the acceleration voltage applied to the electron beam source 12, the excitation current of the focusing lens 14 and the objective lens 16, the applied voltage of the deflector 18, and the like.

  The sample stage 20 can support the sample 1 and move the sample 1. The sample stage control unit 22 controls the operation of the sample stage 20.

  The secondary electron detector 30 detects secondary electrons emitted from the sample 1 when irradiated with the electron beam EB. The secondary electron detector 30 includes, for example, a scintillator and a photomultiplier tube. The electronic signal processing unit 32 performs processing for sending the intensity of the secondary electrons detected by the secondary electron detector 30 to the processing unit 50 as a digital signal. Electronic signal data (an example of signal data) output from the electronic signal processing unit 32 is sent to the processing unit 50 in association with position information data of the electron beam EB determined by the applied voltage of the deflector 18.

  The EDS detector 40 detects characteristic X-rays generated from the sample 1 when irradiated with the electron beam EB. The EDS detector 40 is configured to include, for example, a silicon-drift detector (SDD). The X-ray signal processing unit 42 includes a multi-channel analyzer, analyzes the energy value by the multi-channel analyzer based on the pulse peak value of the X-ray signal detected by the EDS detector 40, and corresponds to the corresponding channel. Process to assign. X-ray signal data (an example of signal data) output from the X-ray signal processing unit 42 is sent to the processing unit 50 in association with position information data of the electron beam EB determined by the applied voltage of the deflector 18.

  The operation unit 60 performs a process of acquiring an operation signal corresponding to an operation by the user and sending the operation signal to the processing unit 50. The function of the operation unit 60 can be realized by buttons, keys, a touch panel display, a microphone, and the like, for example.

The display unit 62 displays the image generated by the processing unit 50, and its function can be realized by an LCD, a CRT, or the like. The display unit 62 includes, for example, a secondary electron image (SEM
Image) and element distribution images.

  The storage unit 64 stores programs, data, and the like for the processing unit 50 to perform various types of calculation processing and control processing. The storage unit 64 is used as a work area of the processing unit 50, and is also used for temporarily storing calculation results and the like executed by the processing unit 50 according to various programs. The function of the storage unit 64 can be realized by a hard disk, a RAM, or the like. As will be described later, the storage unit 64 stores electronic signal data, X-ray signal data, position information data of the electron beam EB, and elapsed time information data.

  The processing unit 50 is a process for generating an element distribution image, a process for generating a secondary electron image, a process for generating a control signal for controlling the optical system control unit 19, and a control for controlling the sample stage control unit 22. Processing such as processing for generating a control signal is performed. The functions of the processing unit 50 can be realized by hardware such as various processors (CPU, DSP, etc.) and programs. The processing unit 50 includes a data storage processing unit 52, a frame group extraction unit 54, an image generation unit 56, and a control unit 58.

  The data storage processing unit 52 stores (records) the electronic signal data and the X-ray signal data in the storage unit 64 together with the positional information data of the electron beam EB and the measurement elapsed time information data.

  Here, the structure of data stored in the storage unit 64 will be described.

  In the analyzer 100, the applied voltage of the deflector 18 corresponding to the irradiation position of the electron beam EB is controlled by the optical system control unit 19, and the electron beam EB is irradiated to a predetermined coordinate position of the sample 1. Then, the X-ray signal generated by the irradiation of the electron beam EB is detected by the EDS detector 40 and converted into X-ray signal data by the X-ray signal processing unit 42. Further, the secondary electron signal generated by the irradiation of the electron beam EB is detected by the secondary electron detector 30 and converted into electronic signal data by the electronic signal processing unit 32. The X-ray signal data and the electronic signal data are stored in the storage unit 64 as a data string (time-series data) combined in time series together with the position information data and elapsed time information data of the electron beam EB. In the analyzer 100, a predetermined region of the sample 1 is repeatedly scanned with the electron beam EB to detect a characteristic X-ray signal and a secondary electron signal, and the above-described various data are sequentially stored in the storage unit 64.

  FIG. 2 is a diagram schematically illustrating the structure of data stored in the storage unit 64. In FIG. 2, position information data is represented by “P”, X-ray signal data is represented by “D”, electronic signal data is represented by “S”, and elapsed time information data is represented by “T”. In FIG. 2, data from the first frame to the m-th frame (m is an integer of 3 or more) is shown.

  As shown in FIG. 2, the data (data string) stored in the storage unit 64 includes position information data P, X-ray signal data D, electronic signal data S, and elapsed time information data T along the measurement elapsed time axis. It is time-series data arranged. The data storage processing unit 52 accumulates the position information data P, the X-ray signal data D, the electronic signal data S, and the elapsed time information data T to form a data string having the data structure shown in FIG.

  The position information data P is data representing the irradiation position of the electron beam EB on the sample 1. The position information data P is, for example, coordinate values representing the irradiation position on the sample 1 and includes data of X-axis and Y-axis coordinate values representing the position in the horizontal direction. The position information data P may further include coordinate values such as a Z axis representing a position orthogonal to the X axis and the Y axis, a T axis representing the inclination of the sample 1, and an R axis representing the rotation of the sample 1. .

FIG. 3 is a diagram for explaining the position information data P. Here, referring to FIG.
A case where surface analysis is performed using a section set on the sample 1 as a unit of the position information data P will be described.

  As shown in FIG. 3, the start position of one scan (one frame) of the electron beam EB is represented by position information data “P1” (n = 1), and the end position of one scan is position information data. “Pe” (n = e (e is a positive integer)).

  For example, by extracting X-ray signal data D sandwiched between the position information data P1 and the next appearing position information data P1 from the data sequence stored in the storage unit 64 shown in FIG. Minute X-ray signal data D can be extracted. Further, for example, by specifying two pieces of position information data P in the data string stored in the storage unit 64 and extracting the X-ray signal data D sandwiched between the two pieces of position information data P, the two pieces of position information X-ray signal data D of the irradiation area represented by data P can be obtained. For example, X-ray signal data D between the position information data Pn (n is an integer satisfying 1 ≦ n ≦ e) and the position information data Pn + m + 1 (m is a positive integer) from the data string stored in the storage unit 64. , X-ray signal data D in a range from the region indicated by the position information data Pn shown in FIG. 3 to the region indicated by the position information data Pn + m can be extracted. In this way, by specifying the region (position information range) using the position information data P, the X-ray signal data D of an arbitrary irradiation position and arbitrary region is extracted from the data string stored in the storage unit 64. can do.

  The X-ray signal data D is data representing an X-ray signal (characteristic X-ray signal) detected by the EDS detector 40. The X-ray signal data D is data representing an energy value (or a channel assigned by a multichannel analyzer) obtained by analyzing the X-ray quanta incident on the EDS detector 40. The X-ray signal data D desirably has a depth of about 13 bits.

  The electronic signal data S is data obtained by detecting the secondary electron signal with the secondary electron detector 30. The electronic signal data S includes information on the intensity of the secondary electron signal.

  The electronic signal data S may be reflected electron signal data. That is, although not shown, the analyzer 100 includes a backscattered electron detector, and the electronic signal data S may be data obtained by detecting a backscattered electron signal with the backscattered electron detector. Moreover, the electronic signal data S may include both secondary electron signal data and reflected electron signal data.

The elapsed time information data T is data representing the elapsed time of measurement, and the actual elapsed time (Real
Data including at least one of (Time) and effective time (Live Time). Here, the actual elapsed time is the time actually elapsed from the start of measurement, and the effective time is the measurement time excluding the dead time of EDS.

  For example, from the data string stored in the storage unit 64, the elapsed time information data T having the data of the elapsed time a and the elapsed time information data T of the elapsed time a + b when the time b has elapsed from the elapsed time a are By extracting the X-ray signal data D included therebetween, the X-ray signal data D collected from time a to time a + b can be extracted.

  As described above, the data storage processing unit 52 accumulates various data individually and stores them in order to form the data string shown in FIG. 2, so that, for example, the signal data of the sample absorption current and the cathode luminescence Data other than the above, such as signal data, can also be added.

FIG. 4 is a diagram illustrating an example of an X-ray spectrum generated by extracting the X-ray signal data D from the data stored in the storage unit 64. In the graph shown in FIG. 4, the horizontal axis represents X-ray energy, and corresponds to each channel divided by a predetermined energy interval of the multichannel analyzer. The vertical axis represents a value obtained by integrating the number of X-ray signal data D for each channel (that is, X-ray intensity).

  ROI_1, ROI_2, and ROI_3 indicate energy ranges (ROI, Region Of Interest) for selecting only X-ray signals having desired energy. The energy range indicated by the ROI can be arbitrarily set by the user. The analysis apparatus 100 has a function of automatically setting an ROI corresponding to an element when the user designates the element. For example, ROI_1 corresponds to oxygen (O), ROI_2 corresponds to chromium (Cr), and ROI_3 corresponds to iron (Fe).

  For example, by integrating all the X-ray signal data D in the data string shown in FIG. 2, information on the X-ray intensity in the entire energy range can be obtained. Further, by integrating the number of X-ray signal data D (ROI count) included in the designated ROI, information on the X-ray intensity of the designated ROI can be obtained. For example, information on the X-ray intensity of oxygen can be obtained by integrating the number of X-ray signal data D included in the energy range indicated by ROI_1. Similarly, by integrating the number of X-ray signal data D included in the energy range indicated by ROI_2, information on the X-ray intensity of chromium can be obtained, and X-ray signal data D included in the energy range indicated by ROI_3. By accumulating the number of X, the information on the X-ray intensity of iron can be obtained.

  The frame group extraction unit 54 detects a change in the X-ray signal between frames based on the X-ray signal data stored in the storage unit 64, and based on the change in the X-ray signal between frames, from a plurality of consecutive frames. A frame group is extracted.

  The frame group extraction unit 54 extracts a frame group composed of a plurality of consecutive frames based on the intensity difference between the X-ray signals of two consecutive frames. For example, the frame group extraction unit 54 extracts, as a frame group, a range in which frames that are equal to or less than a threshold value in which the intensity difference between the X-ray signals of two consecutive frames is set. Thereby, a frame group composed of a plurality of continuous frames with small fluctuations in the intensity of the X-ray signal can be extracted from the frames stored in the storage unit 64.

The intensity of the X-ray signal to be detected is, for example, the intensity of the X-ray signal in the specified energy range (ROI) in the specified area (irradiation area, position information range). The intensity of the X-ray signal to be detected may be the intensity of the designated ROI X-ray signal in the entire area (entire irradiation area). When the intensity of the X-ray signal of two consecutive frames is expressed as f _n and f _n−1 , the intensity difference between the X-ray signals can be expressed as | f _n −f _n−1 |. The threshold value can be set arbitrarily.

  Here, an example has been described in which the frame group extraction unit 54 detects a change in the intensity of the X-ray signal between frames, and detects an intensity difference between the X-ray signals of two consecutive frames. The method for obtaining the change in the intensity of is not limited to this. For example, the change in the intensity of the X-ray signal may be detected from the difference between the intensity of the X-ray signal of the first frame and the intensity of the X-ray signal of the nth frame.

The image generation unit 56 extracts X-ray signal data of a plurality of frames constituting the frame group extracted by the frame group extraction unit 54 from the X-ray signal data recorded in the storage unit 64, and element distribution Generate an image. When a plurality of ROIs are designated, the image generation unit 56 selects X-rays included in each designated ROI from among the X-ray signal data of the plurality of frames constituting the extracted frame group. The number of signal data is counted for each irradiation position, and an element distribution image corresponding to each ROI is generated.

  When the frame group extraction unit 54 extracts a plurality of frame groups, the image generation unit 56 extracts X-ray signal data for each frame group from the X-ray signal data recorded in the storage unit 64, An element distribution image is generated for each frame group.

  The control unit 58 performs processing for generating a control signal for controlling the optical system control unit 19 and a control signal for controlling the sample stage control unit 22. For example, when the operation unit 60 accepts an operation for changing the condition of the user's optical system, the control unit 58 controls the control signal (control signal for controlling the optical system control unit 19) based on the operation signal from the operation unit 60. Is generated. As a result, the optical system can be set to the conditions specified by the user. For example, when the operation unit 60 receives an operation for moving the sample 1 to a desired position, the control unit 58 controls the control signal (control for controlling the sample stage control unit 22 based on the operation signal from the operation unit 60. Signal). Thereby, the position of the sample 1 can be moved to the position designated by the user.

1.2. Analysis Method Next, an analysis method using the analysis apparatus 100 will be described with reference to the drawings. FIG. 5 is a flowchart illustrating an example of an analysis method performed by the analysis apparatus 100.

  First, as shown in FIG. 2, the data storage processing unit 52 stores the X-ray signal data and the electronic signal data in the storage unit 64 together with the position information data and the elapsed time information data (step S100).

  Next, the frame group extraction unit 54 detects a change in the X-ray signal between frames based on the X-ray signal data stored in the storage unit 64, and selects a frame group based on the change in the X-ray signal between frames. Extract (step S102).

  FIG. 6 is a diagram schematically showing the main window 2 displayed on the display unit 62 of the analyzer 100. In the main window 2, as shown in FIG. 6, secondary electron images 4a and 4b and element distribution images 6a, 6b and 6c generated from data stored in the storage unit 64 (see FIG. 2) are displayed. ing. The secondary electron image 4a is, for example, the secondary electron image of the first frame, and the secondary electron image 4b is, for example, the secondary electron image of the frame currently being measured. Note that the secondary electron image 4b may be a secondary electron image obtained by integrating all the frames stored in the storage unit 64. The element distribution images 6a, 6b, and 6c are element distribution images of specified elements (for example, an oxygen element distribution image, a chromium element distribution image, and an iron element distribution image). The element distribution images 6a, 6b, and 6c are obtained by accumulating the number of X-ray signal data included in the ROI corresponding to the specified element from the X-ray signal data of all frames stored in the storage unit 64. It is the image that was made.

  For example, when the operation unit 60 receives an operation for designating an area (positional information range) on the user element distribution images 6a, 6b, and 6c and an ROI to be detected, the frame group extraction unit 54 extracts a frame group. Start processing for.

  Hereinafter, a process of extracting a frame group in the frame group extraction unit 54 will be described.

  FIG. 7 is a graph showing changes in the ROI count in the designated area. The graph shown in FIG. 7 is obtained by plotting the count (X-ray intensity) of ROI (ROI_1, ROI_2, ROI_3) in a specified region for each frame. In the graph shown in FIG. 7, the horizontal axis is a frame, which is arranged in order from frame 1 as the first scan to frame m as the final scan from the left side to the right side. The vertical axis represents the ROI count, which corresponds to the X-ray intensity of the element corresponding to each ROI.

  The graph shown in FIG. 7 extracts the X-ray signal data of the area specified based on the position information data for each frame from the data string stored in the storage unit 64, and specifies the specified X-ray signal data from the extracted X-ray signal data. It is created by counting the number of X-ray signal data included in the ROI.

  Here, a case where ROI_2 is designated will be described.

  FIG. 8 is a graph showing changes in the count of ROI_2. When ROI_2 is designated, the frame group extraction unit 54 extracts a frame group based on the count difference of ROI_2 between two consecutive frames.

  The frame group extraction unit 54 detects a change in the count of the ROI by applying a one-dimensional difference filter represented by the following equation (1) to the count of the ROI_2 of the frames 1 to m.

g _n = f _n −f _n−1 (1)

However, _{g n} is the value after filtering the n-th frame (the difference value), _{f n} is the ROI counts of the n-th _{frame, f n-1} in the ROI counts n-1 th frame is there.

Figure 9 is a graph showing a difference value g _n of each frame. As shown in FIG. 9, the threshold value + TS, -TS (except TS> 0) is set and the frame group and extracts the range frame are consecutive comprised between difference values _{g n} is the threshold + TS and the threshold -TS And That is, a range in which frames having a ROI count difference between two consecutive frames equal to or less than the set threshold TS are extracted is used as a frame group. In the example illustrated in FIG. 9, three ranges in which frames in which the ROI count difference between two consecutive frames is equal to or less than the threshold value TS are extracted are extracted.

  FIG. 10 is a graph showing changes in the count of ROI_2. As shown in FIG. 10, frame groups A, B, and C are extracted as a result of the above processing. In this way, the frame group extraction unit 54 can extract the frame groups A, B, and C.

  Next, the image generation unit 56 extracts the X-ray signal data of a plurality of frames constituting the frame group from the X-ray signal data stored in the storage unit 64, and specifies the specified ROI (element). An element distribution image is generated (step S104).

  For example, when it is specified that the element distribution images of ROI_1, ROI_2, and ROI_3 are generated, the image generation unit 56 includes a plurality of frames constituting the frame group A from the X-ray signal data stored in the storage unit 64. X-ray signal data of the frame is extracted, and an element distribution image of ROI_1, an element distribution image of ROI_2, and an element distribution image of ROI_3 are generated. Similarly, the image generation unit 56 extracts X-ray signal data of a plurality of frames constituting the frame group B from the X-ray signal data stored in the storage unit 64, and extracts an element distribution image of ROI_1, ROI_2. An element distribution image, an element distribution image of ROI_3 is generated. Similarly, the image generation unit 56 extracts X-ray signal data of a plurality of frames constituting the frame group C from the X-ray signal data stored in the storage unit 64, and extracts an element distribution image of ROI_1, ROI_2. An element distribution image, an element distribution image of ROI_3 is generated.

  The image generation unit 56 can perform a process of applying a two-dimensional filter to the generated element distribution image, a process of changing a color scale, and the like.

  FIG. 11 is a diagram schematically showing the comparison window 8 displayed on the display unit 62. The image generation unit 56 outputs the element distribution images 6a-A, 6a-B, 6a-C of the ROI_1 of the frame groups A, B, and C, and the element distribution images 6b-A, 6b- of the ROI_2 of the frame groups A, B, and C. The element distribution images 6c-A, 6c-B, 6c-C of ROI_3 of B, 6b-C and frame groups A, B, C are displayed on the comparison window 8.

  In addition, the image generation unit 56 extracts electronic signal data of a plurality of frames constituting the frame group A and integrates each frame to generate a secondary electron image 4-A. Similarly, the image generation unit 56 extracts the electronic signal data of a plurality of frames constituting the frame group B and integrates each frame to generate a secondary electron image 4-B. Similarly, the image generation unit 56 extracts the electronic signal data of a plurality of frames constituting the frame group C and integrates each frame to generate a secondary electron image 4-C. Then, the image generation unit 56 displays these secondary electron images 4-A, 4-B, 4-C on the comparison window 8.

  Further, the image generation unit 56 displays a frame bar 9 for displaying the range of frames constituting each frame group A, B, C on the comparison window 8.

  An element distribution image can be generated by the above steps.

  FIG. 12 and FIG. 13 are diagrams for explaining processing when an element is added. An element for displaying an element distribution image can be added by operating an element addition button 7 in the main window 2 shown in FIG. When an element (ROI_4) is added by operating the element addition button 7, the element distribution image 6d of the added ROI_4 in the main window 2 is displayed. The image generation unit 56 generates ROI_4 element distribution images 6d-A, 6d-B, and 6d-C for each of the frame groups A, B, and C, and displays them on the comparison window 8 as shown in FIG. To do.

  14 and 15 are diagrams for explaining processing for changing the range of frames constituting each frame group A, B, C (that is, processing for changing the range of signal data to be extracted).

  For example, the main window 2 and the comparison window 8 display a frame bar 9 for displaying and changing the range of frames constituting each frame group A, B, C. The frame bar 9 is operated. Thus, it is possible to change the range of frames constituting each frame group A, B, C. When an operation for changing the frame range is performed, the image generation unit 56 extracts X-ray signal data for the changed frame groups A, B, and C, and generates an element distribution image. In the illustrated example, the range of frames constituting the frame group B has been changed, and the image generation unit 56 stores the X-ray signal data of a plurality of frames included in the changed frame range of the frame group B. Extraction is performed to generate element distribution images 6a-B, 6b-B, 6c-B, and 6d-B. At this time, the secondary electron image 4-B of the changed frame group B is also generated in the same manner.

  In the above-described embodiment, the case where one ROI (ROI_2) is specified in the step of extracting a frame group (step S102) has been described, but a plurality of ROIs may be specified. Hereinafter, a process when a plurality of ROIs are designated in the step of extracting a frame group will be described.

  FIG. 16 is a graph showing changes in the count of ROI_1 and the count of ROI_2.

When the designated ROI is ROI_1 and ROI_2, the frame group extraction unit 54 extracts a frame group based on the count difference of ROI_1 between two consecutive frames and the count difference of ROI_2 between two consecutive frames. To do. Specifically, the frame group extraction unit 54 applies the above-described one-dimensional difference filter (g _n = f _n −f _n−1 ) to the count of ROI_1 and the count of ROI_2, thereby counting the ROI_1. Change and ROI_2 count change.

17, each frame is a graph showing the difference value _{g n} of the difference values _{g n} and ROI_2 of ROI_1. As shown in FIG. 17, threshold values + TS ₁ and −TS ₁ (where TS ₁ > 0) are set for ROI_1, and threshold values + TS ₂ and −TS ₂ (where TS ₂ > 0) are set for ROI_2. . Then, the difference value _{g n} is the threshold TS ₁ the following frame is consecutive ROI_1, and extracts a range difference values _{g n} of ROI_2 threshold TS ₂ the following frames are consecutive, a frame group. In the example shown in FIG. 17, the difference value _{g n} is the threshold TS ₁ the following frame is consecutive ROI_1, and range difference values _{g n} is the threshold TS ₂ the following frames are consecutive ROI_2 are four extraction .

  FIG. 18 is a graph showing changes in the ROI count in the designated area. As shown in FIG. 18, frame groups A, B, C, and D are extracted as a result of the above processing. In this way, the frame group extraction unit 54 can extract the frame groups A, B, C, and D even when a plurality of ROIs are designated.

  The analyzer 100 has the following features, for example.

  In the analysis apparatus 100, the frame group extraction unit 54 detects a change in the X-ray signal between frames based on the X-ray signal data stored in the storage unit 64, and continues based on the change in the X-ray signal between frames. A frame group consisting of a plurality of frames is extracted. Therefore, in the measurement of the sample 1 in which the state of the sample 1 changes during the measurement, the X-ray signal data before the X-ray signal is changed from the X-ray signal data obtained by repeatedly scanning the sample 1, and the X-ray The X-ray signal data after the signal change can be extracted. As described above, the analysis apparatus 100 can extract the X-ray signal data before and after the X-ray signal changes, so that the change in the state (element distribution) of the sample 1 can be easily confirmed. In addition, even when the number of frames becomes enormous due to long-term measurement, X-ray signal data before and after the state of the sample (element distribution) changes can be easily extracted and analyzed. Throughput is improved.

  In the analysis apparatus 100, the image generation unit 56 extracts X-ray signal data of a plurality of frames constituting a frame group from the X-ray signal data stored in the storage unit 64, and generates an element distribution image. Therefore, in the measurement of the sample 1 in which the state of the sample 1 changes during the measurement, an element distribution image before the X-ray signal changes and an element distribution image after the X-ray signal changes can be obtained.

  In the analysis apparatus 100, when the frame group extraction unit 54 extracts a plurality of frame groups, the image generation unit 56 extracts X-ray signal data for each frame group and generates an element distribution image for each frame group. Therefore, element distribution images before and after the X-ray signal changes can be obtained.

  In the analyzer 100, since the frame group extraction unit 54 extracts the frame group based on the intensity difference between the X-ray signals of two consecutive frames, in the measurement of the sample 1 in which the state of the sample 1 changes during the measurement, X-ray signal data before and after the intensity of the X-ray signal changes can be extracted from the X-ray signal data obtained by repeatedly scanning 1.

  In the analysis method according to the present embodiment, in order to extract a frame group composed of a plurality of continuous frames based on the change in the X-ray signal between frames, X-ray signal data before and after the X-ray signal changes are extracted. be able to.

1.3. Modified Example Next, a modified example of the analyzer according to the first embodiment will be described. Note that the configuration of the analyzer according to the present modification is the same as the configuration of the analyzer 100 shown in FIG. Hereinafter, differences from the above-described example of the analyzer 100 will be described, and description of similar points will be omitted.

  In the example of the analysis apparatus 100 described above, the frame group extraction unit 54 extracts a frame group based on a change in the X-ray signal.

  On the other hand, in the analysis apparatus according to this modification, the frame group extraction unit 54 extracts a frame group based on a change in the secondary electron signal.

  The frame group extraction unit 54 detects a change in the electronic signal between frames based on the electronic signal data stored in the storage unit 64, and extracts a frame group based on the change in the electronic signal. For example, the frame group extraction unit 54 extracts a frame group based on the similarity between two secondary electron images generated from electronic signal data of two consecutive frames. The frame group extraction unit 54 extracts electronic signal data of two consecutive frames from the data string stored in the storage unit 64, and generates a secondary electron image for each frame. Then, the similarity between the two generated secondary electron images is obtained. The frame group extraction unit 54 performs this process sequentially on each frame to monitor the similarity and detect a change.

  The similarity of the secondary electron images is, for example, SAD (Sum of Absolute Difference), SSD (Sum of Squared Difference), NCC (Normalized Cross-Correlation), ZNCC (Zero-means NormCorrelation Correlation). Is used.

Note that SAD (S _SAD ), SSD (S _SSD ), NCC (S _NCC ), and ZNCC (S _ZNCC ) are expressed by the following equations.

Where X is the number of pixels in the horizontal direction, Y is the number of pixels in the vertical direction, x is the coordinate in the horizontal direction, y is the coordinate in the vertical direction, and F _n is the luminance of the nth frame. Yes, F _n−1 is the luminance of the (n−1) th frame. Further, μ _n is the average value of the luminance of the nth frame, and μ _n−1 is the average value of the luminance of the n−1th frame.

  FIG. 19 is a graph showing the similarity of each frame. FIG. 19 shows a case where SAD is used as the similarity. Note that the smaller the SAD value, the more similar the two images are.

As shown in FIG. 19, a threshold TS _SAD (where TS _SAD is an arbitrary value) is set, and a range in which frames with _SAD equal to or less than the threshold TS _SAD are extracted is used as a frame group. In the example illustrated in FIG. 19, four ranges in which frames having a threshold value TS _SAD or less are continuous are extracted. In this way, the frame group extraction unit 54 can extract the frame groups A, B, C, and D.

  The image generation unit 56 extracts X-ray signal data “D” of a plurality of frames constituting the frame group from the X-ray signal data “D” stored in the storage unit 64 to generate an element distribution image. (Step S104).

  The image generation unit 56 extracts X-ray signal data of a plurality of frames constituting the frame group A from the X-ray signal data stored in the storage unit 64, and generates an element distribution image. When a plurality of ROIs are designated (when ROI_1, ROI_2, ROI_3, and ROI_4 are designated), the image generation unit 56 displays the element distribution image of each designated ROI (element distribution image of ROI_1, element of ROI_2 Distribution image, element distribution image of ROI_3, element distribution image of ROI_4).

  The image generation unit 56 performs the same processing for the frame groups B, C, and D, and generates an element distribution image for each frame group B, C, and D.

  FIG. 20 is a diagram schematically showing the comparison window 8 displayed on the display unit 62. The image generation unit 56 generates element distribution images 6a-A, 6a-B, 6a-C, 6a-D, and ROI_2 of element distribution images 6b-A and 6b- of ROI_1 of the generated frame groups A, B, C, and D. Element distribution images 6c-A, 6c-B, 6c-C, 6a-D of ROI_3 of B, 6b-C, 6b-D, frame groups A, B, C, D, frame groups A, B, C, D The element distribution images 6d-A, 6d-B, 6d-C, and 6d-D of ROI_4 are displayed on the comparison window 8. The image generation unit 56 generates secondary electron images 4-A, 4-B, 4-C, 4-D of the frame groups A, B, C, D and displays them on the comparison window 8.

  In the analysis apparatus according to this modification, the frame group extraction unit 54 detects a change in the electronic signal between frames based on the electronic signal data stored in the storage unit 64, and based on the change in the secondary electron signal between frames. To extract a frame group. Thereby, X-ray signal data before and after the change of the secondary electron signal from the X-ray signal data obtained by repeatedly scanning the sample 1 in measurement of the sample whose state (for example, shape) changes during measurement. Can be extracted. Therefore, element distribution images before and after the secondary electron signal of the sample 1 changes can be obtained.

  In the analysis apparatus according to this modification, the frame group extraction unit 54 extracts a frame group based on the similarity between two secondary electron images generated from the secondary electron signal data of two consecutive frames. Thereby, in the measurement of the sample 1 in which the state (for example, shape) of the sample 1 changes during the measurement, the similarity of the secondary electron image of the sample 1 is obtained from the X-ray signal data obtained by repeatedly scanning the sample 1. X-ray signal data before and after the change can be extracted. Therefore, element distribution images before and after the similarity of the secondary electron image of the sample 1 is changed can be obtained.

  In the present modification, an example in which the frame group extraction unit 54 extracts a frame group based on the similarity between two secondary electron images generated from the secondary electron signal data has been described. May extract a frame group based on the similarity between two element distribution images generated from X-ray signal data of two consecutive frames. Thereby, in the measurement of the sample whose state changes during the measurement, the X-ray signal data before and after the change in the element distribution of the sample is extracted from the X-ray signal data obtained by repeatedly scanning the sample 1. be able to. Therefore, element distribution images before and after the element distribution of the sample is changed can be obtained.

2. Second Embodiment 2.1. Analyzer Next, an analyzer according to a second embodiment will be described with reference to the drawings. FIG. 21 is a diagram schematically illustrating an analyzer 200 according to the second embodiment. Hereinafter, in the analyzer according to the second embodiment, members having the same functions as those of the components of the analyzer 100 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 21, the analyzer 200 includes a temperature variable holder 210 and a temperature controller 212 that controls the temperature of the temperature variable holder 210 in addition to the components of the analyzer 100. ing.

  The temperature variable holder 210 is a heating holder capable of holding the sample 1 on the sample stage 20 and heating the sample 1. The temperature variable holder 210 may be a cooling holder that cools the sample 1. The temperature of the temperature variable holder 210 is controlled by the temperature control unit 212. The temperature control unit 212 sends information on the temperature of the variable temperature holder 210 to the processing unit 50. Here, the temperature information of the temperature variable holder 210 output by the temperature control unit 212 may be temperature information based on control information for the temperature control unit 212 to control the temperature of the temperature variable holder 210, It may be information on a measurement result obtained by actually measuring the temperature of the temperature variable holder 210.

  The data storage processing unit 52 stores (records) the electronic signal data and the X-ray signal data in the storage unit 64 together with the position information data of the electron beam EB, the measurement elapsed time information data, and the temperature information data (an example of environmental information data). ) Is performed.

  FIG. 22 is a diagram schematically illustrating the structure of data stored in the storage unit 64. In FIG. 22, position information data is represented by “P”, X-ray signal data is represented by “D”, electronic signal data is represented by “S”, elapsed time information data is represented by “T”, and temperature information data is represented by “t”. In FIG. 22, data from the first frame to the m-th frame is shown.

  As shown in FIG. 22, the data storage processing unit 52 includes position information data “P”, X-ray signal data “D”, electronic signal data “S”, elapsed time information data “T”, and temperature information data “t”. Are stacked to form a data string having the data structure shown in FIG.

  The temperature information data “t” is information on the temperature of the sample 1. The temperature information data “t” may be information on the temperature at which the sample 1 is directly measured, or information on the temperature of the temperature variable holder 210 that controls the temperature of the sample 1 or the temperature control information on the temperature variable holder 210. Also good. The data storage processing unit 52 receives the temperature information of the temperature variable holder 210 output from the temperature control unit 212 and stores it in the storage unit 64 as temperature information data “t”. Although not shown, the analyzer 200 includes a sample temperature measuring device that measures the temperature of the sample 1, and the data storage processing unit 52 receives information on the measurement result of the temperature measuring device, and the temperature information data “t” May be stored in the storage unit 64. The temperature information data “t” is stored in the storage unit 64 at predetermined time intervals (for example, multiple times for one frame).

  The frame group extraction unit 54 detects a change in the temperature of the temperature variable holder 210 between frames based on the temperature information data stored in the storage unit 64, and based on the change in the temperature of the temperature variable holder 210, A frame group consisting of frames is extracted.

  The frame group extraction unit 54 extracts a frame group composed of a plurality of consecutive frames based on the temperature difference between the samples 1 of two consecutive frames. As a result, a frame group composed of a plurality of continuous frames in which the temperature variation of the sample 1 is small can be extracted from the frames stored in the storage unit 64.

  The image generation unit 56 extracts X-ray signal data of a plurality of frames constituting the frame group extracted by the frame group extraction unit 54 from the X-ray signal data recorded in the storage unit 64, and Generate a distribution image.

  The control unit 58 performs processing for generating a control signal for controlling the temperature control unit 212. For example, when the operation unit 60 receives an operation for setting the temperature of the user's sample 1 (temperature variable holder 210), the control unit 58 controls the control signal (the temperature control unit 212) based on the operation signal from the operation unit 60. Control signal). Thereby, the temperature of the sample 1 can be made the temperature designated by the user.

2.2. Analysis Method Next, an analysis method using the analysis apparatus 200 will be described with reference to the drawings. Note that the flow of the analysis method by the analyzer 200 is the same as the flowchart shown in FIG.

  First, as shown in FIG. 22, the data storage processing unit 52 converts the X-ray signal data “D” and the electronic signal data “S” into position information data “P”, elapsed time information data “T”, temperature information data. Together with “t”, it is stored in the storage unit 64 (step S100).

  Next, the frame group extraction unit 54 detects a change in the temperature of the sample 1 between frames based on the temperature information data stored in the storage unit 64, and extracts a frame group based on the change in the temperature of the sample 1. (Step S102).

  For example, when the operation unit 60 receives an operation for starting a process of generating a user element distribution image, the frame group extraction unit 54 starts a process for extracting a frame group including a plurality of consecutive frames.

  Hereinafter, a process of extracting a frame group in the frame group extraction unit 54 will be described.

  FIG. 23 is a graph showing a change in the temperature of the sample 1. The graph shown in FIG. 23 plots the temperature of the sample 1 for each frame. In the graph shown in FIG. 23, the horizontal axis is a frame, which is arranged in order from frame 1 as the first scan to frame m as the final scan from the left side to the right side. The vertical axis represents the temperature of the sample 1.

  Note that the temperature of the sample 1 in each frame is, for example, the temperature information “t” extracted between the position information data “P1” and the next position information data “P1” appearing in the data string shown in FIG. The average value.

  The frame group extraction unit 54 extracts a frame group based on the temperature difference of the sample 1 between two consecutive frames.

  Specifically, the frame group extraction unit 54 detects a change in the temperature of the sample 1 by applying a one-dimensional difference filter expressed by the following equation to the temperature of the sample 1 in the frames 1 to m.

Δt _n = t _n −t _n−1

However, the Delta] t _n is the difference value of the temperature of the n-th frame, t _n is the temperature of the sample 1 of the n th frame, t _n-1 is the temperature of the sample 1 of the (n-1) th frame .

FIG. 24 is a graph showing the difference value Δt _n of each frame. As shown in FIG. 24, a threshold value + TS _t , −TS _t (where TS _t > 0) is set, and the difference value Δt _n is a range in which frames included between the threshold value + TS _t and the threshold value −TS _t are continuous. Extract to make a frame group. That is, the frame group and extracts the range threshold TS _t following frame temperature difference is set in the sample 1 between two consecutive frames are continuous. In the example shown in FIG. 24, a range where two thresholds TS _t following frame the temperature difference of the sample 1 is set between consecutive frames are continuous is extracted three.

  Next, the image generation unit 56 extracts the X-ray signal data of a plurality of frames constituting the frame group from the X-ray signal data stored in the storage unit 64, and the specified element (ROI). An element distribution image is generated (step S104).

  The image generation unit 56 extracts the X-ray signal data of a plurality of frames constituting the frame group A from the X-ray signal data stored in the storage unit 64, and the element distribution image of ROI_1 and the element distribution image of ROI_2 , ROI_3 element distribution image is generated. Similarly, the image generation unit 56 extracts X-ray signal data of a plurality of frames constituting the frame group B from the X-ray signal data stored in the storage unit 64, and extracts an element distribution image of ROI_1, ROI_2. An element distribution image, an element distribution image of ROI_3 is generated. Similarly, the image generation unit 56 extracts X-ray signal data “D” of a plurality of frames constituting the frame group C from the X-ray signal data stored in the storage unit 64, and element distribution image of ROI_1 , ROI_2 element distribution image and ROI_3 element distribution image are generated.

FIG. 25 is a diagram schematically showing the comparison window 8 displayed on the display unit 62. The image generation unit 56 outputs the element distribution images 6a-A, 6a-B, 6a-C of the ROI_1 of the frame groups A, B, and C, and the element distribution images 6b-A, 6b- of the ROI_2 of the frame groups A, B, and C. The element distribution images 6c-A, 6c-B, 6c-C of ROI_3 of B, 6b-C and frame groups A, B, C are displayed on the comparison window 8. The image generation unit 56 generates secondary electron images 4-A, 4-B, 4-C of the frame groups A, B, C and displays them on the comparison window 8. At this time, the image generation unit 56 displays information on the average temperature of the sample 1 for each frame group. The average temperature of the sample 1 in the frame group is an average value of temperature information data included in a plurality of frames constituting the frame group.

  As shown in FIG. 25, in the comparison window 8, when the cursor C is moved to the frame bar 9, the temperature information of the sample 1 in the frame selected by the cursor C is displayed in the window W.

  The analyzer 200 has the following features, for example.

  In the analysis apparatus 200, the frame group extraction unit 54 detects a change in the temperature of the sample 1 between frames based on the temperature information data stored in the storage unit 64, and continuously based on the change in the temperature of the sample 1 between frames. A frame group consisting of a plurality of frames is extracted. Therefore, in measurement of a sample whose state changes during measurement, X-ray signal data before and after the temperature of the sample changes can be extracted from X-ray signal data obtained by repeatedly scanning the sample 1. it can. Thereby, when measuring a sample whose element distribution changes according to the temperature of the sample during measurement, the X-ray signal data obtained by repeatedly scanning the sample 1 before and after the element distribution of the sample 1 changes. X-ray signal data can be extracted.

  In the analysis apparatus 200, the frame group extraction unit 54 extracts the frame group based on the temperature difference of the sample 1 between the frames, so that the temperature of the sample is obtained from the X-ray signal data obtained by repeatedly scanning the sample 1. X-ray signal data before and after the change can be extracted.

  In the above-described embodiment, the example in which the analyzer 200 includes the temperature variable holder 210 for controlling the temperature of the sample 1 has been described. However, the analyzer 200 controls the environment of the sample 1 other than the temperature. An environmental control device may be provided. As such an environment control device, for example, a pressure control device for controlling the pressure of the space in which the sample 1 is accommodated, and a reaction gas control device for controlling the concentration of the reaction gas for reacting with the sample 1 Etc.

  In this case, the data storage processing unit 52 performs processing for storing environmental information data, which is information on the environment of the sample 1 other than the temperature, in the storage unit 64 instead of the temperature information data. Such information on the environment of the sample 1 includes information on the pressure of the space in which the sample 1 is accommodated, information on the concentration of the reaction gas, and the like. In such an analyzer, the data storage processing unit 52 stores the X-ray signal data and the like together with the environmental information data of the sample 1 in the storage unit 64, and the frame group extraction unit 54 based on the environmental information data It is possible to detect a change in one environment and extract a frame group based on the change in environment between frames. Therefore, in measurement of a sample whose state changes during measurement, X-ray signal data before and after the environment of the sample changes can be extracted from X-ray signal data obtained by repeatedly scanning the sample.

3. Third Embodiment Next, an analysis apparatus according to a third embodiment will be described. Note that the configuration of the analyzer according to the third embodiment is the same as the configuration of the analyzer 200 shown in FIG. Hereinafter, differences from the example of the analysis apparatus 200 according to the second embodiment described above will be described, and description of similar points will be omitted.

  In the analyzer according to the third embodiment, the control unit 58 detects a change in the X-ray signal between frames based on the X-ray signal data stored in the storage unit 64, and based on the change in the X-ray signal, the temperature The variable holder 210 (temperature control unit 212) is controlled.

  For example, when the control unit 58 performs control to change the temperature of the sample 1 at a constant rate, the temperature variable holder 210 keeps the temperature of the sample 1 constant when the intensity of the X-ray signal falls below a threshold value. Switch to control. The intensity of the X-ray signal is, for example, the intensity of the X-ray signal in a specified energy range (ROI) in a specified region.

  First, the control unit 58 performs control to change the temperature of the sample 1 at a constant rate. Then, the control unit 58 determines whether or not the X-ray signal between frames has changed based on the X-ray signal data stored in the storage unit 64. For example, the control unit 58 monitors the designated ROI count of each frame, and the X-ray signal changes when the ROI count of the subsequent frame becomes X% or less with respect to the ROI count of the first frame. It is determined that The control unit 58 substitutes the designated ROI count of each frame into the following equation (2), and determines whether or not the ROI count has become X% or less, that is, whether or not the ROI count has changed.

  Here, Cn is the ROI count of the nth frame, C1 is the ROI count of the first frame, and X is a specified percentage.

FIG. 26 is a graph showing the change in the designated ROI count and the change in the temperature of the sample 1. In the graph shown in FIG. 26, the horizontal axis is a frame, which is arranged in order from frame 1 as the first scan to frame m as the final scan from the left to the right on the page. The vertical axis represents the ROI count and corresponds to the X-ray intensity of the element. In addition, the right side of the threshold TS _C of Figure 26 _is a TS C = (100-X) / 100) × C1 ( the formula (2)).

Control unit 58, as shown in FIG. 26, when the difference between the ROI counts of the first ROI count and n-th frame of the frame is equal to or less than a threshold value TS _C (see arrows in FIG. 26), X-ray It is determined that the signal has changed. When it is determined that the X-ray signal has changed, the control unit 58 controls the temperature variable holder 210 (temperature control unit 212) so that the temperature of the sample 1 becomes constant.

  Here, the control unit 58 performs the determination based on the difference between the intensity of the X-ray signal of the first frame and the intensity of the X-ray signal of the nth frame. The determination may be performed based on the intensity difference between the line signals (see the above formula (1)).

  In the analysis apparatus according to the present embodiment, the frame group extraction unit 54 and the image generation unit 56 perform the same operation as that of the analysis apparatus 100 described above, for example. The frame group extraction unit 54 extracts the frame groups A and B shown in FIG. 26 based on the change in the X-ray signal between frames. Then, the image generation unit 56 extracts X-ray signal data of a plurality of frames constituting the frame group A from the X-ray signal data stored in the storage unit 64 to generate an element distribution image, and An element distribution image is generated by extracting X-ray signal data of a plurality of frames constituting the group B.

Although the example in which the control unit 58 controls the temperature variable holder 210 (temperature control unit 212) based on the change in the intensity of the X-ray signal has been described here, the control unit 58 is similar to an electronic image or an element distribution image. The temperature variable holder 210 (temperature control unit 212) may be controlled based on the degree (see "1.3. Modification" described above).

  In the analyzer according to the third embodiment, the control unit 58 detects a change in the X-ray signal between frames based on the X-ray signal data stored in the storage unit 64, and based on the change in the X-ray signal between frames. The temperature variable holder 210 (temperature control unit 212) is controlled. Therefore, for example, as shown in FIG. 26, when the sample causes a change in element distribution at a predetermined temperature, the temperature (predetermined temperature) can be maintained. Therefore, the X-ray signal from the sample 1 can be detected by repeatedly scanning the sample 1 with the electron beam at the temperature at which the signal of the sample has changed. Thereby, the X-ray signal data after the state of the sample 1 changes can be obtained.

  In the analyzer according to the third embodiment, the control unit 58 controls the temperature variable holder 210 (temperature control unit 212) to change the temperature of the sample 1 and the X-ray signal data stored in the storage unit 64. And determining whether or not the X-ray signal between frames has changed, and controlling to keep the temperature of the sample 1 constant when it is determined that the X-ray signal has changed. Accordingly, for example, as shown in FIG. 26, when the sample causes a change in element distribution at a predetermined temperature, the temperature (predetermined temperature) can be maintained. Therefore, X-ray signal data before and after the element distribution of the sample changes can be easily obtained.

  Also in this embodiment, as in the example of the analysis apparatus 200, the information on the environment of the sample 1 is not limited to the temperature. That is, in the present embodiment, the control unit 58 controls the environment control device based on a change in the X-ray signal between frames. Thereby, in the measurement of the sample whose state changes during the measurement, when the X-ray signal of the sample 1 changes under a predetermined environmental condition, the predetermined environmental condition can be maintained. Accordingly, the signal from the sample 1 can be detected by repeatedly scanning the sample 1 with the electron beam under the environmental conditions in which the X-ray signal of the sample 1 has changed. Thereby, the X-ray signal data after the state of the sample 1 changes can be obtained.

  The present embodiment can also be applied to a case where the control unit controls the processing apparatus when analyzing the sample 1 using the processing apparatus (FIB apparatus or the like) in the analysis apparatus.

4). Fourth Embodiment Next, an analyzer according to a fourth embodiment will be described with reference to the drawings. FIG. 27 is a diagram schematically illustrating an analyzer 300 according to the fourth embodiment. Hereinafter, in the analyzer according to the fourth embodiment, members having the same functions as those of the components of the analyzer according to the first to third embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the analyzer 300, as shown in FIG. 27, the processing unit 50 includes a signal change detection unit 55. The signal change detection unit 55 detects a change in the X-ray signal between frames based on the X-ray signal data stored in the storage unit 64. The intensity of the X-ray signal to be detected is, for example, the intensity of the designated ROI X-ray signal for each irradiation position.

  For example, the signal change detection unit 55 detects a change in the intensity of the X-ray signal from the difference between the intensity of the X-ray signal (ROI count) of the first frame and the intensity of the X-ray signal of the nth frame ( (See formula (2) above, FIG. 26, etc.) For example, the signal change detection unit 55 determines that the intensity of the X-ray signal has changed when the ROI count is 20% or less (X = 20 in Expression (2)).

  The image generation unit 56 generates an element distribution image of the designated ROI (element) based on the X-ray signal data recorded in the storage unit 64. The image generation unit 56 integrates all frames recorded in the storage unit 64 to generate an element distribution image of the designated ROI (element).

  FIG. 28 is a diagram schematically showing the main window 2 displayed on the display unit 62. The image generation unit 56 generates an element distribution image 6a of ROI_1, an element distribution image 6b of ROI_2, and an element distribution image 6c of ROI_3, and displays them on the main window 2. Here, the element distribution images 6a, 6b, and 6c count the number of X-ray signal data included in the ROI corresponding to the specified element for each region from all the X-ray signal data stored in the storage unit 64. It is an image obtained by this. That is, the element distribution images 6a, 6b, and 6c are images obtained by integrating all frames.

  In the element distribution images 6a, 6b, and 6c, the image generation unit 56 associates the element type (ROI) with the color, associates the intensity of the X-ray signal with the lightness, and colors the change in the X-ray signal. It corresponds to the degree. For example, the image generation unit 56 displays the element distribution image 6a of ROI_1 in red, the element distribution image 6a of ROI_1 in blue, and the element distribution image 6a of ROI_1 in green. Further, the image generation unit 56 increases the brightness on the element distribution image, for example, at a position where the intensity of the X-ray signal is strong (the ROI count number is large). When the signal change detection unit 55 determines that the intensity of the X-ray signal of ROI_1 has changed at a certain irradiation position, the image generation unit 56 calculates the saturation of the position on the element distribution image corresponding to the irradiation position. The initial value is reduced from 100% to 80%. For example, in the element distribution image 6a of ROI_1, when the X-ray intensity of the element corresponding to ROI_1 in the region under measurement SA decreases, the saturation of the region SA is displayed lower than in other regions.

  In the above description, the initial value of saturation is set to 100%, but the initial value of saturation may be set to 50%. Thereby, for example, the saturation can be increased when the X-ray intensity of the element is increased, and the saturation can be decreased when the X-ray intensity of the element is decreased.

  In the above description, the image generation unit 56 performs the process of reducing the saturation when the intensity of the X-ray signal changes. However, the image generation unit 56 may perform the process of decreasing the saturation according to the intensity of the X-ray signal.

FIG. 29 is a diagram for explaining a process of lowering the saturation according to the intensity of the X-ray signal. As shown in FIG. 29, a plurality of threshold values TS _C −1 (X = 20 in Expression (2)), TS _C −2 (X = 40 in Expression (2)), TS _C −3 (Expression (2)) X = 50) set the image generation unit _56, | if is below threshold _{TS C-1,} lowering the saturation to 80% to _{100%, | | C n -C} n-1 C n When −C _n−1 | is less than or equal to the threshold value TS _C-2 , the saturation is reduced from 80% to 60%, and | C _n −C _n−1 | is less than or equal to the threshold value TS _C-3. In addition, a process of reducing the saturation from 60% to 40% is performed.

  In the above description, the signal change detection unit 55 detects the intensity of the X-ray signal of the designated ROI for each irradiation position, but detects the intensity of the X-ray signal of the designated ROI in the designated area. May be.

  The analyzer 300 has the following features, for example.

  In the analysis apparatus 300, the signal change detection unit 55 detects a change in the X-ray signal between frames based on the X-ray signal data stored in the storage unit 64, and the image generation unit 56 detects the X-ray signal data and the X between frames. An element distribution image is generated based on the detection result of the line signal change. Then, the image generation unit 56 associates the intensity of the X-ray signal with the brightness of the element distribution image, associates the detection result of the change in the X-ray signal between frames with the saturation of the element distribution image, and converts the element distribution image into the element distribution image. Generate. Therefore, it can be easily determined whether or not the state of the sample 1 has changed during the measurement.

5). Fifth Embodiment Next, an analysis apparatus according to a fifth embodiment will be described with reference to the drawings. FIG.
It is a figure which shows typically the analyzer 400 which concerns on 5th Embodiment. Hereinafter, in the analyzer according to the fifth embodiment, members having the same functions as those of the components of the analyzer according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the analysis apparatus 300, as shown in FIG. 1, the processing unit 50 includes a frame group extraction unit 54, and the frame group extraction unit 54 extracts a frame group based on a change in the X-ray signal. We were processing.

  On the other hand, in the analysis apparatus 400, the processing unit 50 does not have the frame group extraction unit 54 as shown in FIG. In the analysis apparatus 400, the operation unit 60 receives an operation for designating a frame group including a plurality of continuous frames by the user, and the image generation unit 56 stores the operation unit 60 in the storage unit 64 based on operation information from the operation unit 60. The X-ray signal data of a plurality of frames constituting the designated frame group is extracted from the X-ray signal data thus generated, and an element distribution image is generated.

  FIG. 31 is a diagram illustrating an example of a GUI (Graphical User Interface) screen 402 of the analysis apparatus 300.

  As shown in FIG. 31, the GUI screen 402 displays a frame bar 9 for displaying and changing the range of frames constituting each frame group A, B, C. On this frame bar 9, a cursor is displayed. By specifying the frame range in 404, it is possible to specify the range of frames constituting each frame group A, B, C. When an operation for specifying a frame range is performed, the image generation unit 56 extracts X-ray signal data in the frame range constituting the specified frame group A, B, C, and generates an element distribution image.

  An analysis method using the analysis apparatus 400 will be described. In the analysis apparatus 400, in the analysis method by the analysis apparatus 100 shown in FIG. 5 and the step of extracting a frame group (step S102), the user is based on the change in the X-ray signal (or secondary electron signal) between frames. The difference is that a frame group consisting of a plurality of consecutive frames is extracted.

  Specifically, the user confirms the change of the X-ray signal by looking at the element distribution image generated for each frame, and uses the frame bar 9 of the GUI screen shown in FIG. Extract. At this time, the user can extract a plurality of frame groups (in the illustrated example, frame groups A, B, and C) as shown in FIG.

  According to the analyzer 400, the data storage processing unit 52 stores the X-ray signal data together with the position information data in the storage unit 64, and the operation unit 60 performs an operation for designating a frame group composed of a plurality of continuous frames. Based on the operation signal from the operation unit 60, the image generation unit 56 receives and extracts signal data of a plurality of frames constituting the designated frame group from the X-ray signal data stored in the storage unit 64. Then, an image is generated. Therefore, it is possible to extract data before and after the change of the X-ray signal of the sample in the measurement of the sample whose state changes during the measurement.

  The user confirms the change of the secondary electron image between the frames by looking at the secondary electron image generated for each frame, and selects the frame group based on the change (similarity) of the secondary electron image between the frames. It may be extracted.

  In addition, this invention is not limited to embodiment mentioned above, A various deformation | transformation implementation is possible within the range of the summary of this invention.

  In the above-described embodiment, the example in which the analyzers 100, 200, 300, and 400 are scanning electron microscopes (SEM) including the EDS detector 40 has been described. However, the analyzer according to the present invention uses a charged particle beam as a sample. Any device may be used as long as it can scan repeatedly to detect a signal from the sample and analyze the sample. As such an analyzer, at least one of a scanning electron microscope, an EDS detector, a WDS detector, and an electron energy loss spectrometer (EELS) equipped with a wavelength dispersive X-ray detector (WDS detector) is installed. Scanning transmission electron microscope (STEM) and the like. Here, when a scanning transmission electron microscope is used as the analyzer according to the present invention, the signal from the sample includes the transmitted electron signal transmitted through the sample 1, and the electronic signal data “S” (see FIG. 2) is the transmitted electron signal. Is a data obtained by detecting with a transmission electron detector.

  In addition, embodiment mentioned above and a modification are examples, Comprising: It is not necessarily limited to these. For example, each embodiment and each modification can be combined as appropriate.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

2 ... main window, 7 ... element addition button, 8 ... comparison window, 9 ... frame bar, 10 ... optical system, 12 ... electron beam source, 14 ... focusing lens, 16 ... objective lens, 18 ... deflector, 19 ... Optical system controller, 20 ... sample stage, 22 ... sample stage controller, 30 ... secondary electron detector, 32 ... electronic signal processor, 40 ... EDS detector, 42 ... X-ray signal processor, 50 ... processor 52 ... Data storage processing unit, 54 ... Frame group extraction unit, 55 ... Signal change detection unit, 56 ... Image generation unit, 58 ... Control unit, 60 ... Operation unit, 62 ... Display unit, 64 ... Storage unit, 100 ... Analyzing apparatus, 200 ... analyzing apparatus, 210 ... variable temperature holder, 212 ... temperature control unit, 300 ... analyzing apparatus, 400 ... analyzing apparatus, 402 ... GUI screen, 404 ... cursor

Claims (8)

An analyzer for analyzing a sample by repeatedly scanning the sample with a charged particle beam to detect a signal from the sample,
A data storage processing unit that stores signal data obtained by detecting the signal, together with position information data representing an irradiation position of the charged particle beam on the sample, in a storage unit,
A frame group extraction unit that detects a change in the signal between frames based on the signal data stored in the storage unit, and extracts a frame group including a plurality of consecutive frames based on the change in the signal between frames. When,
An image generation unit that extracts the signal data of a plurality of frames constituting the frame group from the signal data stored in the storage unit, and generates an image;
Only including,
The analysis apparatus , wherein the image generation unit extracts the signal data for each frame group and generates the image for each frame group when the frame group extraction unit extracts a plurality of the frame groups . In claim 1 ,
The frame group extraction unit is an analysis device that extracts the frame group based on a difference in intensity between the signals of two consecutive frames. In claim 1 ,
The signal includes an X-ray signal generated from the sample by irradiation of the charged particle beam, and an electronic signal that is a secondary electron signal or a transmission electron signal,
The signal data includes X-ray signal data obtained by detecting the X-ray signal, and electronic signal data obtained by detecting the electronic signal,
The frame group extraction unit detects a change in the electronic signal between frames based on the electronic signal data stored in the storage unit, and extracts the frame group based on the change in the electronic signal. . In claim 3 ,
The said frame group extraction part is an analyzer which extracts the said frame group based on the similarity degree of two electronic images produced | generated from the said electronic signal data of two continuous frames. An analysis method for analyzing a sample by repeatedly scanning a sample with a charged particle beam to detect a signal from the sample,
Storing the signal data obtained by detecting the signal in a storage unit together with position information data representing an irradiation position of the charged particle beam on the sample;
Extracting a frame group consisting of a plurality of consecutive frames based on the change in the signal between frames;
Extracting the signal data of a plurality of frames constituting the frame group from the signal data stored in the storage unit, and generating an image;
Only including,
In the step of generating the image, when a plurality of the frame groups are extracted, the signal data is extracted for each of the frame groups, and the image is generated for each of the frame groups . In claim 5 ,
In the step of extracting the frame group, the frame group is extracted based on an intensity difference between the signals of two consecutive frames. In claim 5 ,
The signal includes an X-ray signal generated from the sample by irradiation of the charged particle beam, and an electronic signal that is a secondary electron signal or a transmission electron signal,
The signal data includes X-ray signal data obtained by detecting the X-ray signal, and electronic signal data obtained by detecting the electronic signal,
The method for extracting the frame group includes extracting the frame group based on a change in the electronic signal between frames. In claim 7 ,
The analysis method of extracting the frame group in the step of extracting the frame group based on a similarity between two electronic images generated from the electronic signal data of two consecutive frames.

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