JP6556236B2 - 走査型プローブ顕微鏡ヘッドの設計 - Google Patents

走査型プローブ顕微鏡ヘッドの設計 Download PDF

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Publication number
JP6556236B2
JP6556236B2 JP2017525303A JP2017525303A JP6556236B2 JP 6556236 B2 JP6556236 B2 JP 6556236B2 JP 2017525303 A JP2017525303 A JP 2017525303A JP 2017525303 A JP2017525303 A JP 2017525303A JP 6556236 B2 JP6556236 B2 JP 6556236B2
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Japan
Prior art keywords
cantilever
fiber
optical fiber
mode optical
single mode
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JP2017525303A
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Japanese (ja)
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JP2017523440A5 (https=
JP2017523440A (ja
Inventor
ノーマン エリクソン アンドリュー
ノーマン エリクソン アンドリュー
ブラッドリー イッポリート スティーブン
ブラッドリー イッポリート スティーブン
アルフレッド ホフスタッター カイル
アルフレッド ホフスタッター カイル
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Angstrom Sciences Inc
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Angstrom Sciences Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/255—Splicing of light guides, e.g. by fusion or bonding
    • G02B6/2551—Splicing of light guides, e.g. by fusion or bonding using thermal methods, e.g. fusion welding by arc discharge, laser beam, plasma torch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP2017525303A 2014-07-22 2015-07-22 走査型プローブ顕微鏡ヘッドの設計 Expired - Fee Related JP6556236B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462027385P 2014-07-22 2014-07-22
US62/027,385 2014-07-22
PCT/US2015/041467 WO2016014623A1 (en) 2014-07-22 2015-07-22 Scanning probe microscope head design

Publications (3)

Publication Number Publication Date
JP2017523440A JP2017523440A (ja) 2017-08-17
JP2017523440A5 JP2017523440A5 (https=) 2018-08-30
JP6556236B2 true JP6556236B2 (ja) 2019-08-07

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Family Applications (1)

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JP2017525303A Expired - Fee Related JP6556236B2 (ja) 2014-07-22 2015-07-22 走査型プローブ顕微鏡ヘッドの設計

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Country Link
US (1) US9366695B2 (https=)
EP (1) EP3172579A4 (https=)
JP (1) JP6556236B2 (https=)
WO (1) WO2016014623A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230071417A (ko) * 2021-11-16 2023-05-23 안동대학교 산학협력단 원자 현미경

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9797922B2 (en) * 2014-07-22 2017-10-24 Angstrom Science, Inc. Scanning probe microscope head design
US10670807B2 (en) * 2016-12-15 2020-06-02 Ayar Labs, Inc. Lens assembly for optical fiber coupling to target and associated methods
EP3404424A1 (en) 2017-05-15 2018-11-21 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Scanning probe microscopy system for and method of mapping nanostructures on the surface of a sample
DE102018210098B4 (de) * 2018-06-21 2022-02-03 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zum Untersuchen und/oder zum Bearbeiten einer Probe
CN109099845B (zh) * 2018-07-06 2020-07-10 江西洪都航空工业集团有限责任公司 一种高速摄影测量三维位移的方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4679946A (en) * 1984-05-21 1987-07-14 Therma-Wave, Inc. Evaluating both thickness and compositional variables in a thin film sample
JP2900552B2 (ja) * 1990-07-26 1999-06-02 株式会社ニコン 微小力検出器
US6564087B1 (en) * 1991-04-29 2003-05-13 Massachusetts Institute Of Technology Fiber optic needle probes for optical coherence tomography imaging
RU2148378C1 (ru) * 1998-03-06 2000-05-10 Геликонов Валентин Михайлович Устройство для оптической когерентной томографии, оптоволоконное сканирующее устройство и способ диагностики биоткани in vivo
US6882429B1 (en) * 1999-07-20 2005-04-19 California Institute Of Technology Transverse optical fiber devices for optical sensing
KR100486937B1 (ko) * 2002-06-11 2005-05-03 한국표준과학연구원 광섬유에 의해 구현된 패브리 페로 공진기와 이를 이용한 원자간력 현미경에서의 외팔보 탐침의 변위 측정 및 보정시스템
JP2005049219A (ja) * 2003-07-29 2005-02-24 Toudai Tlo Ltd 走査型プローブ顕微鏡
JP2005147979A (ja) * 2003-11-19 2005-06-09 Jeol Ltd 走査形プローブ顕微鏡
JP2008051555A (ja) * 2006-08-22 2008-03-06 Sii Nanotechnology Inc 光学式変位検出機構及びそれを用いたプローブ顕微鏡
JP2009061525A (ja) * 2007-09-05 2009-03-26 Jtekt Corp 硬脆材料の研削方法、光ファイバアレイの製造方法、及び硬脆材料の加工装置
JP5226481B2 (ja) * 2008-11-27 2013-07-03 株式会社日立ハイテクサイエンス 自己変位検出型カンチレバーおよび走査型プローブ顕微鏡
JP5369046B2 (ja) * 2010-04-28 2013-12-18 株式会社フジクラ 光ファイバアレイ、光スイッチ、光ファイバ及び端面加工方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230071417A (ko) * 2021-11-16 2023-05-23 안동대학교 산학협력단 원자 현미경
KR102642140B1 (ko) 2021-11-16 2024-02-28 국립안동대학교 산학협력단 원자 현미경

Also Published As

Publication number Publication date
US9366695B2 (en) 2016-06-14
JP2017523440A (ja) 2017-08-17
EP3172579A1 (en) 2017-05-31
US20160025771A1 (en) 2016-01-28
WO2016014623A1 (en) 2016-01-28
EP3172579A4 (en) 2018-03-14

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