JP6555098B2 - Transport device - Google Patents

Description

  The present invention relates to a transport apparatus.

  In a manufacturing apparatus or the like, a workpiece (hereinafter referred to as a workpiece) that passes through a plurality of machining steps is conveyed to a position of the next machining machine after machining by a certain machining machine. 2. Description of the Related Art Conventionally, a transport device including a table on which a work is placed and a driving device that moves the table is used to transport the work. In the transfer device, it is preferable that the position where the workpiece is received from the processing machine and the position where the workpiece is transferred to the next processing device are constant. On the other hand, when a workpiece is conveyed by reciprocation of one table, there is a limit to improving the conveyance efficiency. On the other hand, Patent Document 1 describes a transport device that includes two tables and changes the trajectory of the tables so as to avoid mutual interference between the two tables. Thereby, although a material supply position and a material removal position are common in two tables, conveyance efficiency improves compared with the case where a workpiece | work is conveyed by one table.

JP 2008-30867 A

  In the transport device described in Patent Document 1, the table is moved in the vertical direction by the roller rolling on the cam surface. Since the roller rolls on the cam surface, some vibration occurs. Further, since the cam surface is provided from the material supply position to the material removal position, the roller is always in contact with the cam surface. Since the roller is in contact with the cam surface for a long time, vibration may be easily generated.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a transport apparatus that can improve transport efficiency and suppress the occurrence of vibration.

  In order to achieve the above object, a transport apparatus according to the present invention includes a frame, a first rail and a second rail attached to the frame, a first movable member that can move along the first rail, and an elastic member. A first movable member connected to the first movable member and movable in the vertical direction, a cam follower attached to the second movable member, and a first table movable in the vertical direction together with the second movable member. A slider unit; a second slider unit including a second table movable along the second rail; and the first slider unit and the second slider unit are reciprocated between a first stop position and a second stop position. A drive unit, and a first planar cam provided with the first cam surface attached to the frame and being an inclined surface that forms an angle with respect to a horizontal plane; A second planar cam that is attached to the frame at a distance from the first planar cam and includes a second cam surface that is an inclined surface that forms an angle with respect to a horizontal plane, and the elastic member Is a natural length when the cam follower is positioned between the first flat cam and the second flat cam, and is deformed when the cam follower is in contact with the first cam surface or the second cam surface.

  Accordingly, the height of the first table in the vertical direction (Z direction) varies depending on whether the cam follower is in contact with the first cam surface or the second cam surface or not. For this reason, the 1st table and the 2nd table can carry a work alternately without interfering with each other by carrying out a three-dimensional intersection. Further, when the cam follower is positioned between the first planar cam and the second planar cam, the cam follower does not contact the first cam surface or the second cam surface. That is, there is a section where friction does not occur on the outer peripheral surface of the cam follower. Therefore, the transport device can improve the transport efficiency and suppress the occurrence of vibration.

  As a desirable mode of the present invention, the first cam surface is an inclined surface in which an end portion close to the second flat cam is positioned above an end portion far from the second flat cam, and the second cam surface is It is preferable that the end portion close to the first flat cam is an inclined surface positioned above the end portion far from the first flat cam.

  If the first table is raised when the cam follower is in contact with the first cam surface or the second cam surface, the vertical position of the second table is the vertical position at the first stop position or the second stop position of the first table. A member for adjusting to this is required. On the other hand, in this mode, the first table is lowered when the cam follower contacts the first cam surface or the second cam surface. For this reason, it is easy to match the vertical position at the first stop position or the second stop position of the first table with the vertical position of the second table. Therefore, since a member for alignment is not necessary, the second slider unit can be reduced in weight.

  ADVANTAGE OF THE INVENTION According to this invention, the conveying apparatus which can improve conveyance efficiency and can suppress generation | occurrence | production of a vibration can be provided.

FIG. 1 is a perspective view showing a transport apparatus according to the present embodiment. FIG. 2 is a front view showing the transport apparatus according to the present embodiment. FIG. 3 is a plan view showing the transport apparatus according to the present embodiment. FIG. 4 is a right side view showing the transport apparatus according to the present embodiment. FIG. 5 is an enlarged perspective view showing the first rail and the first movable member according to this embodiment. FIG. 6 is an enlarged perspective view showing the periphery of the second movable member according to the present embodiment. FIG. 7 is a perspective view showing the transfer device according to the present embodiment while the work is being transferred. FIG. 8 is a right side view showing the transfer apparatus according to the present embodiment while the work is being transferred. FIG. 9 is a perspective view showing the transfer device according to the present embodiment after the workpiece is transferred. FIG. 10 is a right side view illustrating the transfer device according to the present embodiment after the workpiece is transferred.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the constituent elements described below can be appropriately combined.

(Embodiment)
FIG. 1 is a perspective view showing a transport apparatus according to the present embodiment. FIG. 2 is a front view showing the transport apparatus according to the present embodiment. FIG. 3 is a plan view showing the transport apparatus according to the present embodiment. FIG. 4 is a right side view showing the transport apparatus according to the present embodiment. FIG. 5 is an enlarged perspective view showing the first rail and the first movable member according to this embodiment. FIG. 6 is an enlarged perspective view showing the periphery of the second movable member according to the present embodiment.

  The transport apparatus 1 according to the present embodiment is used in a manufacturing apparatus such as a semiconductor, for example. After receiving the workpiece 10 from a certain processing machine, the transport device 1 transports the workpiece 10 to the position of the next processing machine. The workpiece 10 conveyed by the conveying device 1 is taken up by the next processing machine.

  As shown in FIGS. 1 to 4, the transport device 1 includes a frame 2, a first rail 3 a, a second rail 3 b, a drive unit 9, a first slider unit 4 a, a second slider unit 4 b, A first flat cam 5 and a second flat cam 6 are provided. In the transport device 1, the workpiece 10 is transported, for example, in the horizontal direction by the first slider unit 4a and the second slider unit 4b. The first slider unit 4a and the second slider unit 4b reciprocate between the first stop position P1 and the second stop position P2, respectively. 1 to 4, the first slider unit 4a is located at the first stop position P1, and the second slider unit 4b is located at the second stop position P2.

  In the following description, the direction parallel to the straight line connecting the first stop position P1 and the second stop position P2 in the horizontal direction is described as the X direction, and the direction orthogonal to the X direction in the horizontal direction is described as the Y direction. The orthogonal direction to both the X direction and the Y direction is referred to as the Z direction. That is, the Z direction is the vertical direction (up and down direction). In addition, a direction from the first stop position P1 to the second stop position P2 in the X direction is described as a + X direction, and a direction opposite to the + X direction is described as a −X direction. The left direction when facing the + X direction on the horizontal plane is described as the + Y direction, and the direction opposite to the + Y direction is described as the −Y direction. The upward direction of the Z direction is described as the + Z direction, and the direction opposite to the + Z direction is described as the −Z direction.

  The frame 2 is a member for supporting the first rail 3a, the second rail 3b, the first flat cam 5, the second flat cam 6, and the drive unit 9. As shown in FIGS. 1 to 3, the frame 2 includes an upper plate 21, a lower plate 22, a horizontal plate 23, a horizontal plate 24, legs 25, and legs 26. The upper plate 21 is a plate-like member having a surface parallel to the horizontal plane, for example. The lower plate 22 is a plate-like member parallel to the upper plate 21 and is disposed with a gap with respect to the upper plate 21. The horizontal plate 23 and the horizontal plate 24 are plate-like members that connect the end portions of the upper plate 21 and the lower plate 22, and regulate the distance from the upper plate 21 to the lower plate 22. The legs 25 and 26 are plate-like members attached to the lower plate 22 and regulate the height of the lower plate 22 in the Z direction.

  As shown in FIGS. 1 to 3, the first rail 3 a is a long member along the X direction, and is attached to the surface of the frame 2 on the + Z direction side. The second rail 3b is a long member along the X direction, and is attached to the surface of the frame 2 on the + Z direction side. The second rail 3b is disposed in parallel to the first rail 3a and is located in the −Y direction with respect to the first rail 3a.

  The drive unit 9 is a device that transmits power to the first slider unit 4a and the second slider unit 4b. The drive unit 9 includes a motor 91, a drive pulley 92, a driven pulley 94, and a belt 93.

  The motor 91 is, for example, a servo motor. As shown in FIG. 2, the motor 91 is supported by the lower plate 22 of the frame 2, for example. Specifically, the motor 91 is disposed at the end of the lower plate 22 in the −X direction. The motor 91 includes a shaft 911 positioned between the upper plate 21 and the lower plate 22. The drive pulley 92 is attached to the shaft 911 and rotates integrally with the shaft 911. The driven pulley 94 is attached to a bearing 941 provided at the end of the lower plate 22 in the + X direction. The belt 93 is an annular member, and is attached to the driving pulley 92 and the driven pulley 94 as shown in FIG. The belt 93 is connected to the first slider unit 4a and the second slider unit 4b. Thereby, the power generated by the motor 91 is transmitted to the first slider unit 4a and the second slider unit 4b via the belt 93. That is, the drive unit 9 constitutes a belt drive as a power transmission mechanism. Since the drive unit 9 can move the first slider unit 4a and the second slider unit 4b by one motor 91, the drive unit 9 is more than the case where the first slider unit 4a and the second slider unit 4b are moved independently. Transport efficiency can be improved while reducing the number of parts.

  The first slider unit 4a is supported by the first rail 3a and can move along the first rail 3a. As shown in FIGS. 1 to 4, the first slider unit 4a includes a first slider 41a, a first movable member 42, a second movable member 43, a cam follower 44, an elastic member 45, and a first belt connection. A member 48a and a first table 49a are provided.

  The first slider 41a is a member attached to the first rail 3a so as to be slidable in the X direction. That is, the first rail 3a guides the first slider 41a in the X direction. As shown in FIG. 5, the first slider 41a includes a first facing surface 411 that can face the surface 31 of the first rail 3a, a second facing surface 412 that can face the side surface 32 of the first rail 3a, Two claw portions 413 projecting from the two opposing surfaces 412 and a rolling element 414 at least partially in contact with the recess 33 of the first rail 3a are provided. The two claw portions 413 are fitted in the recesses 33, respectively. That is, the first slider 41a sandwiches the first rail 3a from both sides in the Y direction. Accordingly, the first slider 41a can slide in the X direction along the first rail 3a. The rolling element 414 is, for example, a ball. The rolling element 414 rolls while contacting the inner wall of the recess 33. That is, the first rail 3a and the first slider 41a constitute a linear ball bearing. When the rolling element 414 rolls along the recess 33, the first slider 41a can smoothly move on the first rail 3a. More specifically, the plurality of rolling elements 414 are arranged in an annular shape and form two rows along the X direction. The rolling elements 414 located in one of the two rows contact the inner wall of the recess 33. The rolling elements 414 located in the other of the two rows are guided by, for example, guide grooves provided on the second facing surface 412. Further, the rolling elements 414 move while rolling. That is, the plurality of rolling elements 414 form an infinite circulation path. The rolling element 414 may be a roller.

  The first movable member 42 is a member that is attached to the first slider 41a and slides in the X direction together with the first slider 41a. As shown in FIG. 4, the first movable member 42 is a substantially L-shaped member when viewed from the X direction, and has a surface orthogonal to the Y direction. For example, the first movable member 42 includes a third slider 421 on the surface in the −Y direction side as shown in FIGS. 4 and 6. The first movable member 42 includes two first fixing portions 425 that are pins protruding in the −Y direction, for example. For example, the two first fixing portions 425 are disposed on both sides of the third slider 421.

  The second movable member 43 is a member that slides in the X direction together with the first movable member 42 and slides in the Z direction with respect to the first movable member 42. As shown in FIG. 2, the second movable member 43 is a substantially rectangular plate-like member when viewed from the Y direction, and has a surface orthogonal to the Y direction. For example, the second movable member 43 includes a third rail 431 on the surface in the + Y direction side as shown in FIG. The second movable member 43 includes two second fixing portions 435 that are pins protruding in the X direction, for example. For example, the two second fixing portions 435 are disposed on both sides of the third rail 431 and protrude in opposite directions. The second fixing portion 435 is located in the −Z direction with respect to the first fixing portion 425.

  As shown in FIG. 6, the third slider 421 includes a first facing surface 4211 that can face the surface 4311 of the third rail 431, a second facing surface 4212 that can face the side surface 4312 of the third rail 431, Two claw portions 4213 projecting from the two opposing surfaces 4212, and rolling elements 4214 at least partially in contact with the concave portions 4313 of the third rail 431. The two claw portions 4213 are fitted in the recesses 4313, respectively. That is, the third slider 421 sandwiches the third rail 431 from both sides in the X direction. The rolling element 4214 is, for example, a ball. The rolling element 4214 rolls while contacting the inner wall of the recess 4313. That is, the third rail 431 and the third slider 421 constitute a direct acting ball bearing. When the rolling element 4214 rolls along the recess 4313, the third slider 421 can smoothly move on the third rail 431. More specifically, the plurality of rolling elements 4214 are arranged in an annular shape and form two rows along the Z direction. The rolling elements 4214 located in one of the two rows contact the inner wall of the recess 4313. The rolling elements 4214 located in the other of the two rows are guided by, for example, guide grooves provided on the second facing surface 4212. Further, the rolling elements 4214 move while rolling. That is, the plurality of rolling elements 4214 form an infinite circulation path. The rolling element 4214 may be a roller.

  The cam follower 44 is a bearing including, for example, a shaft, a needle bearing attached to the outer peripheral surface of the shaft, and an outer ring that rotates on the outer peripheral surface of the needle bearing. As shown in FIG. 2, the cam follower 44 is attached to the surface of the second movable member 43 on the −Y direction side. For example, the shaft of the cam follower 44 is fixed to the second movable member 43, and the outer ring of the cam follower 44 can rotate around a rotation axis parallel to the Y direction.

  The elastic member 45 is, for example, a tension coil spring, and two elastic members 45 are provided. For example, the two elastic members 45 are arranged on both sides in the X direction with respect to the cam follower 44. One end of the elastic member 45 is attached to the first fixing portion 425. The other end of the elastic member 45 is attached to the second fixing portion 435. Since the second fixing portion 435 is located in the −Z direction of the first fixing portion 425, the longitudinal direction of the elastic member 45 is along the Z direction.

  The first table 49a is a member on which the workpiece 10 is placed. The first table 49a is a plate-like member parallel to the horizontal plane, for example. The first table 49 a is attached to the second movable member 43 and is located in the + Z direction of the first movable member 42.

  The first belt connecting member 48a is a member for transmitting the power of the belt 93 to the first slider unit 4a. The first belt connecting member 48 a is formed integrally with the first movable member 42, for example, and is connected to the belt 93. Specifically, the first belt connecting member 48a holds (clamps) the belt 93. The first belt connecting member 48 a moves together with the belt 93 due to the frictional force between the first belt connecting member 48 a and the belt 93. Thereby, the first slider unit 4 a can move together with the belt 93.

  The second slider unit 4b is supported by the second rail 3b and can move along the second rail 3b. As shown in FIGS. 1 to 4, the second slider unit 4b includes a second slider 41b, a second table 49b, and a second belt connecting member 48b.

  The second slider 41b is a member attached to the second rail 3b so that it can slide in the X direction. That is, the second rail 3b guides the second slider 41b in the X direction. Similarly to the first rail 3a and the first slider 41a described above, the second rail 3b and the second slider 41b constitute a direct acting ball bearing.

  The second table 49b is a member on which the workpiece 10 is placed. The second table 49b is, for example, a plate member parallel to the horizontal plane. The second table 49b is attached to the second slider 41b.

  The second belt connecting member 48b is a member for transmitting the power of the belt 93 to the second slider unit 4b. For example, one end of the second belt connecting member 48b is connected to the second table 49b, and the other end of the second belt connecting member 48b is connected to the belt 93. Specifically, the second belt connecting member 48b holds (clamps) the belt 93. Due to the frictional force between the second belt connecting member 48 b and the belt 93, the second belt connecting member 48 b moves together with the belt 93. Accordingly, the second slider unit 4b can move together with the belt 93.

  The first planar cam 5 is a member for guiding the cam follower 44. As shown in FIG. 2, the first planar cam 5 is a plate-like member having a trapezoidal shape when viewed from the Y direction, for example, and includes a first cam surface 51. The first flat cam 5 is supported by the frame 2 at a position corresponding to the first stop position P1, for example. Specifically, the frame 2 is fixed to the side surfaces of the upper plate 21 and the lower plate 22 on the −Y direction side. The first cam surface 51 is an inclined surface that draws a line segment as viewed from the Y direction. As shown in FIG. 2, the first cam surface 51 is inclined so that the end portion 511 on the + X direction side is positioned in the + Z direction with respect to the end portion 512 on the −X direction side. In other words, the first cam surface 51 is inclined such that the end portion 511 near the second stop position P2 is located above the end portion 512 far from the second stop position P2.

  The second planar cam 6 is a member for guiding the cam follower 44. As shown in FIG. 2, the second planar cam 6 is a plate-like member having a trapezoidal shape when viewed from the Y direction, for example, and includes a second cam surface 61. The second flat cam 6 is supported by the frame 2 at a position corresponding to the first stop position P1, for example. Specifically, the frame 2 is fixed to the side surfaces of the upper plate 21 and the lower plate 22 on the −Y direction side. The second planar cam 6 is arranged at a distance from the first planar cam 5. The second cam surface 61 is an inclined surface that draws a line segment that is symmetric with respect to the line segment drawn by the first cam surface 51 when viewed from the Y direction. As shown in FIG. 2, the second cam surface 61 is inclined such that the end 611 on the −X direction side is positioned in the + Z direction with respect to the end 612 on the + X direction side. In other words, the second cam surface 61 is inclined such that the end 611 near the first stop position P1 is positioned above the end 612 far from the first stop position P1.

  As shown in FIGS. 1 to 4, when the first slider unit 4 a is at the first stop position P <b> 1, the cam follower 44 is in contact with the first cam surface 51 of the first flat cam 5. When the first slider unit 4a is at the first stop position P1, the elastic member 45 extends in the Z direction, and the position of the first table 49a in the Z direction is the same as the position of the second table 49b in the Z direction.

  When the first slider unit 4a starts moving in the + X direction, the cam follower 44 rolls on the first cam surface 51. Accordingly, since the cam follower 44 moves in the + Z direction, the second movable member 43 also moves in the + Z direction. When the cam follower 44 passes the end 511 of the first cam surface 51 on the second stop position P2 side, the elastic member 45 becomes a natural length. That is, when the cam follower 44 is positioned between the first cam surface 51 and the second cam surface 61 (when the cam follower 44 is not in contact with both the first cam surface 51 and the second cam surface 61), the elastic member 45 is used. Is a natural length. The spring constant of the elastic member 45 is so large that the second movable member 43, the cam follower 44, the first table 49a, and the workpiece 10 are not substantially stretched. For this reason, the position of the table 49a in the Z direction is kept constant.

  FIG. 7 is a perspective view showing the transfer device according to the present embodiment while the work is being transferred. FIG. 8 is a right side view showing the transfer apparatus according to the present embodiment while the work is being transferred. As shown in FIG. 7, when the cam follower 44 is positioned between the first cam surface 51 and the second cam surface 61, the first table 49a is positioned in the + Z direction with respect to the second table 49b. For this reason, the 1st table 49a can carry out a three-dimensional intersection with the 2nd table 49b.

  When the first slider unit 4 a moves in the + X direction from the state shown in FIG. 7, the cam follower 44 reaches the second cam surface 61 and rolls on the second cam surface 61. Thereby, since the cam follower 44 moves in the −Z direction together with the second movable member 43, the second fixed portion 435 also moves in the −Z direction. On the other hand, since the first movable member 42 is fixed to the first slider 41a, the position of the first fixed portion 425 in the Z direction is maintained. For this reason, the distance from the 1st fixing | fixed part 425 to the 2nd fixing | fixed part 435 compared with the state (state shown in FIG. 7) where the cam follower 44 is located between the 1st cam surface 51 and the 2nd cam surface 61. Becomes larger. Therefore, as the first slider unit 4a moves in the + X direction, the distance from one end of the elastic member 45 to the other end increases, so that the elastic member 45 extends.

  FIG. 9 is a perspective view showing the transfer device according to the present embodiment after the workpiece is transferred. FIG. 10 is a right side view illustrating the transfer device according to the present embodiment after the workpiece is transferred. As shown in FIG. 9, when the first slider unit 4 a is in the second stop position P <b> 2, the cam follower 44 is in contact with the second cam surface 61 of the second flat cam 6. When the cam follower 44 is in contact with the second cam surface 61, the elastic member 45 extends in the Z direction, and the position of the first table 49a in the Z direction is the same as the position of the second table 49b in the Z direction.

  Note that the first cam surface 51 does not necessarily have an inclination as shown in FIG. 2, and may be inclined so that, for example, the end 511 is positioned below the end 512. Further, the second cam surface 61 does not necessarily have an inclination as shown in FIG. 2, and may be inclined so that, for example, the end 611 is positioned below the end 612. That is, the inclinations of the first cam surface 51 and the second cam surface 61 may be opposite to the inclinations shown in FIG. In such a case, the first table 49 a is raised when the cam follower 44 contacts the first cam surface 51 or the second cam surface 61. For example, the second fixing portion 435 may be disposed in the + Z direction of the first fixing portion 425. Accordingly, the elastic member 45 has a natural length when the cam follower 44 is positioned between the first flat cam 5 and the second flat cam 6, and the cam follower 44 contacts the first cam surface 51 or the second cam surface 61. Sometimes grows.

  The elastic member 45 is not necessarily a tension coil spring, and may be a compression coil spring. In such a case, for example, the second fixing portion 435 may be arranged in the + Z direction of the first fixing portion 425. As a result, the elastic member 45, which is a compression coil spring, has a natural length when the cam follower 44 is positioned between the first flat cam 5 and the second flat cam 6, and the cam follower 44 has the first cam surface 51 or the second flat cam. Shrink when contacting the cam surface 61. Alternatively, the inclination of each of the first cam surface 51 and the second cam surface 61 may be opposite to the inclination shown in FIG. 2 with the second fixing portion 435 disposed in the −Z direction of the first fixing portion 425. That's fine. The number of elastic members 45 is not necessarily two, and may be one or three or more. Further, the elastic member 45 is not necessarily a coil spring, and may be, for example, rubber.

  The drive unit 9 is not necessarily a belt drive. For example, the drive unit 9 may be a chain drive including a roller chain and a sprocket. Moreover, the motor 91 with which the drive unit 9 is provided does not necessarily need to be one, for example, the two motors 91 may be provided. For example, the drive unit 9 may move the first slider unit 4 a on one side of the two motors 91 and move the second slider unit 4 b on the other side of the two motors 91. Thereby, conveyance efficiency improves.

  The motor 91 is not limited to a servo motor, and may be a stepping motor or a direct drive motor, for example. Moreover, the drive source with which the drive unit 9 is provided does not necessarily need to be the motor 91, For example, an air cylinder etc. can be used suitably according to a use.

  As described above, the transport apparatus 1 includes the frame 2, the first rail 3 a and the second rail 3 b attached to the frame 2, the first slider unit 4 a, the second slider unit 4 b, and the drive unit 9. A first planar cam 5 and a second planar cam 6. The first slider unit 4a includes a first movable member 42 that can move along the first rail 3a, a second movable member 43 that is connected to the first movable member 42 by an elastic member 45 and can move in the vertical direction, and a second movable member. The cam follower 44 attached to 43 and the 2nd movable member 43 are provided with the 1st table 49a which can move to an up-down direction. The drive unit 9 reciprocates the first slider unit 4a and the second slider unit 4b between the first stop position P1 and the second stop position P2. The first planar cam 5 includes a first cam surface 51 that is attached to the frame 2 and is an inclined surface that forms an angle with respect to a horizontal plane. The second planar cam 6 is attached to the frame 2 at a position spaced from the first planar cam 5 and includes a second cam surface 61 that is an inclined surface that forms an angle with respect to the horizontal plane. The elastic member 45 has a natural length when the cam follower 44 is positioned between the first flat cam 5 and the second flat cam 6, and deforms when the cam follower 44 contacts the first cam surface 51 or the second cam surface 61. To do.

  Accordingly, the height of the first table 49a in the vertical direction (Z direction) varies depending on whether the cam follower 44 is in contact with the first cam surface 51 or the second cam surface 61. For this reason, the 1st table 49a and the 2nd table 49b can convey a workpiece | work alternately, without mutually interfering by carrying out a three-dimensional intersection. Further, when the cam follower 44 is positioned between the first planar cam 5 and the second planar cam 6, the cam follower 44 does not contact the first cam surface 51 and the second cam surface 61. That is, there is a section where friction does not occur on the outer peripheral surface of the cam follower 44. Therefore, the transport device 1 can improve the transport efficiency and suppress the occurrence of vibration.

  Further, in the transport device 1 according to the present embodiment, the first cam surface 51 is an inclined surface in which the end portion 511 near the second planar cam 6 is positioned above the end portion 512 far from the second planar cam 6. . The second cam surface 61 is an inclined surface in which an end portion 611 close to the first planar cam 5 is positioned above an end portion 612 far from the first planar cam 5.

  If the first table 49a is raised when the cam follower 44 is in contact with the first cam surface 51 or the second cam surface 61, the vertical position of the second table 49b is set to the first stop position P1 or second of the first table 49a. A member for adjusting the vertical position at the stop position P2 is required. In contrast, in the present embodiment, when the cam follower 44 contacts the first cam surface 51 or the second cam surface 61, the first table 49a is lowered. For this reason, it is easy to match the vertical position at the first stop position P1 or the second stop position P2 of the first table 49a with the vertical position of the second table 49b. Therefore, since the member for alignment becomes unnecessary, the weight reduction of the 2nd slider unit 4b is attained.

DESCRIPTION OF SYMBOLS 1 Transfer apparatus 10 Work 2 Frame 3a 1st rail 3b 2nd rail 4a 1st slider unit 41a 1st slider 42 1st movable member 421 3rd slider 425 1st fixed part 43 2nd movable member 431 3rd rail 435 2nd Fixed portion 44 Cam follower 45 Elastic member 48a First belt connecting member 49a First table 4b Second slider unit 41b Second slider 48b Second belt connecting member 49b Second table 5 First flat cam 51 First cam surface 511, 512 End Part 6 Second plane cam 61 Second cam surfaces 611 and 612 End 9 Drive unit 91 Motor 911 Shaft 92 Drive pulley 93 Belt 94 Driven pulley P1 First stop position P2 Second stop position

Claims (2)

Frame,
A first rail and a second rail attached to the frame;
A first movable member movable along the first rail, a second movable member connected to the first movable member by an elastic member and movable in the vertical direction, a cam follower attached to the second movable member, and the first A first slider unit comprising a first table that can move up and down with two movable members;
A second slider unit comprising a second table movable along the second rail;
A drive unit for reciprocating the first slider unit and the second slider unit between a first stop position and a second stop position;
A first planar cam comprising a first cam surface attached to the frame and being an inclined surface that is angled with respect to a horizontal plane;
A second planar cam provided with a second cam surface, which is an inclined surface attached to the frame at a distance from the first planar cam and making an angle with respect to a horizontal plane;
With
The elastic member has a natural length when the cam follower is positioned between the first flat cam and the second flat cam, and is deformed when the cam follower is in contact with the first cam surface or the second cam surface. Conveying device to do. The first cam surface is an inclined surface in which an end portion close to the second planar cam is positioned above an end portion far from the second planar cam,
2. The transport device according to claim 1, wherein the second cam surface is an inclined surface in which an end portion close to the first flat cam is positioned above an end portion far from the first flat cam.

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