JP6539927B2 - Optical element switching device - Google Patents

Description

  The present invention relates to an optical element switching device used in an image measurement apparatus including a microscope or the like, and more particularly to an optical element switching device capable of securing a stable function of an engagement mechanism for positioning an optical component.

  Conventionally, an optical element switching device as shown in Patent Document 1 is used. The optical element switching device includes a fixed member, a movable member holding the one or more optical components and supported movably by the fixed member, and one or more optical components supported by the fixed member and engaged with the movable member. And an engagement mechanism for positioning each on the optical axis. In this optical element switching device, a bearing member constituting the engagement mechanism is dropped into a positioning recess provided in the movable member to position each optical component.

JP 2002-228937 A

  However, in the optical element switching device having such a configuration, the shaft member that rotatably supports the bearing member is only disposed at the bending portion of the plate spring. For this reason, there is a possibility that the shaft member may come off from the bent portion of the plate spring due to the variation of the pressing force of the plate spring and the variation of the size of the bent portion of the plate spring.

  The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide an optical element switching device capable of securing a stable function of an engagement mechanism for positioning an optical component.

The invention according to claim 1 of the present application comprises a fixed member, a movable member holding one or more optical components and supported movably by the fixed member, supported by the fixed member and engaged with the movable member. An optical element switching device including an engagement mechanism for positioning each of the one or more optical components on the optical axis, the movable member has a detent for positioning each of the one or more optical components A leaf spring supported by the fixed member to apply a pressing force to the detent; a shaft member supported by the leaf spring; and the detent rotatably supported by the shaft member. And the shaft member is gripped by the plate spring, the engagement mechanism includes a pair of support portions, and the pair of support portions support the both ends of the plate spring The shaft member is in contact with the plate spring A up side, by abutting the portions of the leaf spring located between the the both ends of the leaf spring is obtained by solving the above problems.
In the invention according to claim 3 of the present application, a fixed member, a movable member holding one or more optical components and supported movably by the fixed member, supported by the fixed member and engaged with the movable member And an engagement mechanism for positioning each of the one or more optical components on the optical axis, in the optical element switching device, the movable member is configured to position each of the one or more optical components. A detent is provided, and the engagement mechanism is rotatably supported by a leaf spring supported by the fixed member to apply a pressing force to the detent, a shaft member supported by the leaf spring, and the shaft member. A bearing member engaged with the detent, wherein the shaft member is gripped by the plate spring, and the shaft member is disposed on both sides of the holding portion for supporting the bearing member and the holding portion. An abutment portion abutting on the plate spring Furthermore, it integrally comprises a locking portion that comes on both sides of the contact portion, and the locking portion is at a position opposite to the position of the portion of the leaf spring that contacts the contact portion. The problem is solved by gripping with the portion of the extending leaf spring.

In the invention according to claim 5 of the present application, the engagement mechanism is arranged to apply the pressing force to the detent from the side surface side of the optical component.

In the invention according to claim 4 of the present application, the engagement mechanism includes a pair of support portions, both ends of the plate spring are supported by the pair of support portions, and the shaft member is detented with respect to the plate spring. And a portion of the leaf spring between the ends of the leaf spring.

In the invention according to claim 2 of the present application, the shaft member is a holding portion for supporting the bearing member, an abutting portion which is disposed on both outer sides of the holding portion and which abuts on the plate spring, and further the abutment portion. A plate which integrally has a locking portion which is provided on both outer sides of the locking portion and which extends to a position opposite to the locking portion with respect to the position of the portion of the leaf spring in contact with the contact portion It is the one held by the spring part.

In the invention according to claim 6 of the present application, the movable member has a disk shape, and the one or more optical components are switched by rotating with respect to the fixed member.

The invention according to claim 7 of the present application is configured to electrically drive the movable member.

  According to the present invention, the stable function of the engagement mechanism for positioning the optical component can be secured.

The schematic diagram which shows an example of the image measuring apparatus which concerns on 1st Embodiment of this invention. Schematic view showing an image detection unit (front view with partial cover removed (A), side view (B)) Side view showing a cross section of a part of the image detection unit A schematic view showing an image detection unit (upper surface external view (A), upper surface schematic perspective view (B)) Schematic relationship diagram showing the relationship of the components of the optical element switching device Schematic view showing the engagement mechanism (left side view (A), front view (B)) Schematic diagram showing the engagement mechanism (bottom view (A), left side view (B), rear view (C)) Top view showing an optical element switching device according to a second embodiment of the present invention

  Hereinafter, an example of an embodiment of the present invention will be described in detail with reference to the drawings.

  A first embodiment according to the present invention will be described using FIGS. 1 to 7.

  First, a schematic configuration of an image measurement device in which an optical element switching device is used will be described with reference to FIG.

  As shown in FIG. 1, the image measurement apparatus 100 includes a base 102, a pair of columns 104 erected on the base 102, and a beam (not shown) passed between the pair of columns 104. Prepare. On the beam, an XZ moving mechanism (not shown) that moves in the X direction and the Z direction is disposed, and they are housed inside the upper cover 106. An image detection unit 110 is attached on the XZ moving mechanism. The image detection unit 110 is provided with an illumination system 108. The base 102 incorporates a Y movement mechanism (not shown) that allows the base surface 102A to move in the Y direction. Therefore, the image detection unit 110 can be moved three-dimensionally relative to the object to be measured placed on the base surface 102A, and the image measuring apparatus 100 measures the object in three dimensions. Is possible.

  Next, schematic configurations of the image detection unit 110 and the optical element switching device 120 will be described with reference to FIGS. 2 (A) and 2 (B) to 5.

  The image detection unit 110 is formed by the objective lens 112, the optical element 126 switched by the optical element switching device 120, and the objective lens 112 and the optical element 126 as shown in FIGS. And a CCD camera 114 for detecting an image. That is, the image detection unit 110 can detect various images (for example, images having different magnifications) by the optical element 126 switched by the optical element switching device 120.

  The optical element switching device 120 includes a casing (fixed member) 122, a turret (movable member) 130, a drive device 134, and an engagement mechanism 138, as shown in FIGS. And a position confirmation mechanism 142. As shown in FIG. 5, a driving device 134 such as a pulse motor is connected to a control board CU (for example, built in a controller not shown). Then, the drive device 134 is driven by the drive signal output from the control substrate CU. For this reason, the optical element switching device 120 functions as a power turret for electrically moving and switching the optical element 126 held by the turret 130 with respect to the optical axis O of the image detection unit 110. As shown in FIG. 5, the control board CU is provided with a storage unit MR, in which various initial values for drive control of the drive device 134 are stored.

  Each component of the optical element switching device 120 will be described below.

  As shown in FIGS. 2 (A) and 2 (B) to 4 (A) and 4 (B), the casing 122 has not only the turret 130 but also the drive device 134, the engagement mechanism 138, and the position confirmation mechanism 142. Support. The casing 122 also supports the objective lens 112 and the CCD camera 114, and also functions as a casing of the image detection unit 110.

  The turret 130 holds the four optical elements 126 and is movably supported by the casing 122 as shown in FIGS. 2 (A) and 2 (B) and FIGS. 3 and 5. Specifically, the turret 130 has a disk shape as shown in FIG. 4 (B) and FIG. The turret 130 holds the optical elements 126 at equal intervals (every 90 degrees) in the circumferential direction at radial positions equidistant from the center of rotation. A shaft 129 is connected to the center of the turret 130. Therefore, when the turret 130 rotates with respect to the casing 122 around the shaft 129, switching of the four optical elements 126 is performed. The shaft 129 is provided with a driven pulley 136 as shown in FIG. 3, FIG. 4 (B) and FIG.

  Further, as shown in FIGS. 3 and 4B, the turret 130 is provided with a detent 130A. The detent 130A is a member which is held at a predetermined position (a predetermined angle) by the engagement mechanism 138 with respect to the casing 122, and positions each of the four optical elements 126 on the turret 130. Specifically, the detent 130A is configured by the outer peripheral side surface of the turret 130 (that is, the detent 130A is provided substantially parallel to the optical axis O, in other words, substantially parallel to the side surface of the optical element 126). Then, the detent 130A is provided with a substantially V-shaped concave portion 130B for positioning corresponding to each of the four optical elements 126. In the present embodiment, since the four optical elements 126 are provided, the recesses 130B are provided on the turret 130 at an interval of 90 degrees. In the present embodiment, the optical element 126 is, for example, an intermediate lens having different magnifications, but may be a polarizing plate, a phase plate, or the like.

  The driving device 134 is a device supported by the casing 122 for moving (rotating) the turret 130 as shown in FIG. Specifically, it is an electric pulse motor or the like. The driving device 134 is provided with a driving pulley 135, and is configured to rotate a driven pulley 136 connected to the turret 130 via a timing belt 137. That is, the turret 130 is electrically driven by the drive device 134.

  The engagement mechanism 138 is supported by the casing 122 and engaged with the turret 130 to position each of the four optical elements 126 on the optical axis O, as shown in FIGS. 2A, 3 and 4B. It is a mechanism. Specifically, the engagement mechanism 138 includes a holding member 138A, a bearing member 138B, a shaft member 138BB, and a leaf spring 138C.

  As shown in FIG. 4 (B), FIG. 6 (B) and FIG. 7 (C), the holding member 138A is a U-shaped member provided with a pair of support portions 138AA, and is opposed to the detent 130A. It is fixed inside the casing 122. Both ends of a plate spring 138C are supported by recesses 138AAA provided on the turret 130 side (the detent 130A side) of the pair of support portions 138AA. The plate spring 138C is fixed to one of the support portions 138AA by a bolt BT.

  As shown in FIGS. 6 (B) and 7 (C), openings 138CA are provided in the central portions of the plate springs 138C, respectively, so that the bearing members 138B can be arranged without contact. Then, as shown in FIG. 6B, the plate spring 138C is provided with two bent portions 138CB bent so that the detent 130A has a concave shape so as to straddle the opening 138CA. The bent portion 138CB is in contact with the abutting portion 138BBB of the shaft member 138BB supporting the bearing member 138B at a concave portion thereof. That is, the bending portion 138CB is disposed radially outside the turret 130 with respect to the shaft member 138BB. That is, this bending portion 138CB is configured to press the shaft member 138BB toward the turret 130 side. Thus, leaf spring 138C can apply a pressing force to detent 130A (which is substantially parallel to the side surface of optical element 126) through bearing member 138B (supported by casing 122) (ie, engaged) The mechanism 138 is arranged to apply a pressing force to the detent 130A from the side of the optical element 126). Further, the portion of the plate spring 138C provided with the bent portion 138CB is supported by the pair of support portions 138AA at both ends. In other words, both ends of the plate spring 138C provided with the bending portion 138CB in the direction (X direction) orthogonal to the axial center direction of the shaft member 138BB are supported by the support portion 138AA. That is, the shaft member 138BB is configured to be in contact with a portion (bending portion 138CB) of the plate spring 138C that is on the detent 130A side with respect to the plate spring 138C and between both ends of the plate spring 138C.

  As shown in FIGS. 6 (B) and 7 (C), the leaf spring 138C is integrally provided with an expanded portion 138CC in such a manner as to project in the vertical direction (Z direction) of the drawing. That is, both end portions of the extension portion 138CC are portions which are not directly supported by the pair of support portions 138AA. In the extension portion 138CC, there is extended a grip portion 138CD which is bent so as to grip the engagement portion 138BBC of the shaft member 138BB. Thus, the shaft member 138BB is gripped by the plate spring 138C. The gripping portion 138CD extends from the expanded portion 138CC at a position opposite to the bending portion 138CB with respect to the shaft member 138BB, and is wound around the shaft member 138BB.

  Here, in the present embodiment, in the “gripped” state of the shaft member 138BB by the plate spring 138C, the distance between the contact start position on the outer periphery of the shaft member 138BB by the plate spring 138C and the contact end position is This is realized by being shorter than the diameter of the member 138BB. That is, in the "gripped" state of the shaft member 138BB by the plate spring 138C, the plate member 138BB is moved in a direction orthogonal to the axial center direction of the shaft member 138BB if the plate spring 138C is not deformed by an external force. It means that it can not be removed from 138C. Specifically, as shown in FIGS. 6 (B) and 7 (C), the gripping portion 138CD is bent so as to be wound around approximately 3/4 of the outer periphery of the shaft member 138BB. According to this aspect, the distance between the tip end of the grip portion 138CD and the contact start position of the shaft member 138BB by the grip portion 138CD is shorter than the diameter of the shaft member 138BB.

  As shown in FIGS. 6A, 6B, 7A, 7B, and 7C, the shaft member 138BB is supported by a plate spring 138C. A bearing member 138B is rotatably supported via a rolling element or the like on the holding portion 138BBA of the shaft member 138BB. That is, the shaft member 138BB has a holding portion 138BBA for supporting the bearing member 138B at its central portion, an abutment portion 138BBB which is disposed on the both outer sides and abuts against the plate spring 138C, and an engagement portion 138BBC further on the outer sides. And a unitary structure. Further, as shown in FIGS. 6B and 7C, the engagement portion 138BBC is different from the position of the portion (flexion portion 138CB) of the plate spring 138C in contact with the abutment portion 138BBB with respect to the engagement portion 138BBC. It is the structure currently gripped by the part (gripping part 138CD) of the leaf | plate spring 138C extended to the opposite position. The bearing member 138B has a cylindrical shape. Then, the bearing member 138B is pressed by the plate spring 138C through the shaft member 138BB, and is configured to be engaged with the detent 130A (a structure in which the bearing member 138B is in direct contact).

  The position confirmation mechanism 142 is a mechanism that enables confirmation of which optical element 126 is positioned on the optical axis O. That is, the position confirmation mechanism 142 enables confirmation (identification) of the optical element 126 positioned on the optical axis O when the engagement mechanism 138 is engaged with the recess 130B. The position confirmation mechanism 142 includes (three) sensors 144 and an index plate 146 as shown in FIGS. 3, 4A, and 5. The sensor 144 is, for example, a photocoupler or the like configured of a light emitting element and a light receiving element. The index plate 146 is disc-shaped and is fixed to a shaft 129 that supports the turret 130. Slits (not shown) corresponding to the position of the optical element 126 are provided at a plurality of circumferential locations (for example, three locations every 90 degrees) of the index plate 146. For example, when light from the light emitting element of the sensor 144 passes through the slit and the light is received by the light receiving element, the sensor 144 outputs an 'H' signal. When the light from the light emitting element of the sensor 144 is blocked by the index plate 146, the sensor 144 outputs an 'L' signal. These 'H' and 'L' signals are output to the control board CU as shown in FIG. As a result, the position (angle) at which the movement control of each optical element 126 can be confirmed by processing the output of the sensor 144 with the control substrate CU.

  Thus, in the present embodiment, the shaft member 138BB rotatably supporting the bearing member 138B is gripped by the plate spring 138C. Therefore, the strength of the plate spring 138C is not appropriate, and it is possible to prevent the shaft member 138BB from rattling up and falling off due to the collision (contact) of the detent 130A due to the movement of the turret 130. In addition, for fixing the shaft member 138BB, position / angle deviation of the shaft member 138BB, difficulty in removing it, observation by using adhesive, which occurs when the shaft member 138BB is fixed to the plate spring 138C with adhesive. And the generation of inappropriate gas can be prevented.

  Further, in the present embodiment, since the strength of the plate spring 138C can be made weaker than before, the downsizing and weight reduction of the shaft member 138BB and the bearing member 138B, and the downsizing and lowering of the driving device 134 for moving the turret 130. Power consumption can be easily realized. At the same time, wear of the detent 130A and the bearing member 138B can be reduced even if the bearing member 138B is constantly engaged with the detent 130A. Furthermore, combined with the ability to reduce the strength of the leaf spring 138C, the noise and vibration generated by the engagement of the bearing member 138B with the detent 130A can be further reduced.

  Further, in the present embodiment, the engagement mechanism 138 is arranged to apply a pressing force to the detent 130A from the side of the optical element 126. Therefore, the degree of freedom of the arrangement and shape of the optical element 126 of the turret 130 can be increased, and the length of the optical element switching device 120 in the direction of the optical axis O can be shortened. In addition, not only this but from the surface side by which an optical component is arrange | positioned, the engagement mechanism may become arrangement | positioning which gives pushing pressure to a detent.

  Further, in the present embodiment, both ends of the plate spring 138C are supported by the pair of support portions 138AA, and the shaft member 138BB is on the detent 130A side with respect to the plate spring 138C and between the both ends of the plate spring 138C. It abuts on a certain bending portion 138CB. That is, by the leaf spring 138C supported at both ends by the holding member 138A, a pressing force is applied to the shaft member 138BB from the outside to the detent 130A side. Therefore, the shaft member 138BB can be stably pressed by the plate spring 138C, and the pressing force can be stabilized for a long time. The present invention is not limited to this, and a pair of support portions supports both end portions of the plate spring, and the shaft member is in contact with a bent portion between the both ends of the plate spring on the detent side with respect to the plate spring. You do not have to. For example, the bends themselves may not be present, or the bends may not be present between the ends supported by the pair of supports. Alternatively, the shaft member may be disposed on the opposite detent side with respect to the bending portion.

  Further, in the present embodiment, the shaft member 138BB integrally includes the holding portion 138BBA, the contact portion 138BBB, and the engagement portion 138BBC, and the engagement portion 138BBC is the position of the bending portion 138CB in contact with the contact portion 138BBB It is gripped by a gripping part 138CD extending to a position opposite to the fastening part 138BBC. Therefore, as compared with the case where the abutting portion 138BBB and the engaging portion 138BBC have the reverse positional relationship, the arrangement error of the axial center of the shaft member 138BB due to the forming error of the plate spring 138C can be reduced. The shaft member 138BB can be disposed on the leaf spring 138C more accurately. Thereby, for example, the slip of the bearing member 138B in the detent 130A can be prevented, and the positioning of the optical element 126 can be performed with high accuracy. In addition, not only this but a contact part and an engaging part may be reverse positional relationship. Alternatively, the engagement portion may extend on the same side of the engagement portion as the position of the portion of the leaf spring that abuts on the contact portion. Alternatively, the shaft may not be gripped by the gripping portion, but may simply be pinched by the portion of the leaf spring that abuts the abutment portion and the portion of the leaf spring that abuts the engagement portion. The member may be held by a plate spring.

  Further, in the present embodiment, the turret 130 is formed into a disk shape, and the four optical elements 126 are switched by rotating with respect to the casing 122. Therefore, there is basically no difference in the arrangement position of the optical element 126 on the turret 130, and the positioning of the optical element 126 can be equally performed with high accuracy. At the same time, the size of the turret 130 can be made more compact than when it is rectangular.

  Further, in the present embodiment, the turret 130 is electrically driven. For this reason, the force for movement applied to the turret 130 can be constant, and the force of the plate spring 138C can be optimized accordingly. That is, accurate positioning of the optical element 126 can be realized, and at the same time, the life of the optical element switching device 120 can be extended. In addition, not only this but the structure to which a movable member is moved manually may be sufficient.

  Further, in the present embodiment, the bearing member 138B has a cylindrical shape. For this reason, compared with the case where a bearing member is spherical shape, the area which bearing member 138B contacts detent 130A can be enlarged. That is, the wear of the detent 130A and the bearing member 138B can be reduced, and the optical element 126 can be positioned with high accuracy for a long time. However, the present invention is not limited to this, and the bearing member may have a cylindrical shape and may have a spherical shape.

  That is, according to the present embodiment, the stable function of the engagement mechanism for positioning the optical component can be secured.

  Although the present invention has been described with the above embodiment, the present invention is not limited to the above embodiment. That is, it goes without saying that improvements and design changes can be made without departing from the scope of the present invention.

  For example, in the first embodiment, the turret 130 has a disk shape, but the present invention is not limited thereto. For example, the configuration shown in FIG. 8 may be used as the second embodiment.

  In this embodiment, as shown in FIG. 8, the optical element switching device 220 has a movable member 230 for holding one optical element 226 via a linear slider (not shown) on the fixed member 222. It is. The optical element 226 is a member that is moved in and out of the optical axis O. For example, a rack (not shown) is provided on the movable member 230, and is engaged with the rack by a pinion (not shown) provided on the drive device 234, and the movable member 230 moves linearly relative to the fixed member 222 Be done. The detent 230A is provided on the upper surface (of FIG. 8) of the movable member 230, and the engagement mechanism 238 is disposed on the fixed member 222 so as to face the detent 230A.

  In the second embodiment, the movable member 230 moves linearly. Therefore, the change in the positional relationship between the shaft member 238BB and the recess 230B due to the movement of the movable member 230 is different from the case of the first embodiment, and as a result, the shaft member 238BB is easily lifted by the recess 230B. Therefore, in the present embodiment, the effect of holding the shaft member 238BB can be more significantly exhibited than in the first embodiment. In the present embodiment, the number of optical elements 226 can be increased or decreased more easily than in the case of the disk shape.

  In the above embodiment, one or four optical elements are used, but the present invention is not limited to this. For example, the number of optical elements may be one or more.

  The present invention can be widely applied to an optical element switching device used for an image measurement device including a microscope and the like.

DESCRIPTION OF SYMBOLS 100 ... Image measuring apparatus 102 ... Base 102 A ... Base surface 104 ... Column 106 ... Top cover 108 ... Illumination system 110 ... Image detection unit 112 ... Objective lens 114 ... CCD camera 120, 220 ... Optical element switching device 122 ... Casing 126, 226 ... Optical element 129 ... Shaft 130 ... Turret 130 A, 230 A ... Detent 130 B, 138 AAA, 230 B ... Concave portion 134, 234 ... Drive device 135 ... Drive pulley 136 ... Followed pulley 137 ... Timing belt 138, 238 ... Engagement mechanism 138 A, 238 A ... Holding member 138AA ... Support portion 138B, 238B ... Bearing member 138BB, 238BB ... Shaft member 138BBA ... Holding portion 138BBB ... Contact portion 138BBC ... Engagement portion 138C ... Leaf spring 138CA ... Opening 38CB: bent portion 138CC: extended portion 138CD: grip portion 142: position confirmation mechanism 144: sensor 146: index plate 222: fixed member 230: movable member BT: bolt CU: control board MR: storage portion O: optical axis P: Direction of movement

Claims (7)

A fixed member, a movable member holding the one or more optical components and supported movably by the fixed member, and supported by the fixed member and engaged with the movable member to light each of the one or more optical components An optical element switching device comprising: an engagement mechanism for positioning on an axis;
The movable member is provided with a detent for positioning each of the one or more optical components;
The engagement mechanism is a plate spring supported by the fixed member to apply a pressing force to the detent, a shaft member supported by the plate spring, and rotatably supported by the shaft member and engaged with the detent And a bearing member
The shaft member is gripped by the plate spring ,
The engagement mechanism includes a pair of support portions, and the pair of support portions support both ends of the plate spring.
The shaft member is a detent side of the leaf spring, the optical element switching apparatus characterized that you have contact with the portion of the leaf spring located between the the both ends of the leaf spring. The shaft member includes a holding portion for supporting the bearing member, an abutting portion which is disposed on both outer sides of the holding portion and which abuts on the plate spring, and an engagement portion which further extends on both outer sides of the abutting portion. Be prepared together
The fastening portion is characterized in that the fastening portion is gripped by a portion of the leaf spring extending to a position opposite to the fastening portion from the position of the portion of the leaf spring contacting the abutment portion. The optical element switching device according to Item 1 . A fixed member, a movable member holding the one or more optical components and supported movably by the fixed member, and supported by the fixed member and engaged with the movable member to light each of the one or more optical components An optical element switching device comprising: an engagement mechanism for positioning on an axis;
The movable member is provided with a detent for positioning each of the one or more optical components;
The engagement mechanism is a plate spring supported by the fixed member to apply a pressing force to the detent, a shaft member supported by the plate spring, and rotatably supported by the shaft member and engaged with the detent And a bearing member
The shaft member is gripped by the plate spring,
The shaft member includes a holding portion for supporting the bearing member, an abutting portion which is disposed on both outer sides of the holding portion and which abuts on the plate spring, and an engagement portion which further extends on both outer sides of the abutting portion. Be prepared together
The optical system is characterized in that the engagement portion is gripped by a portion of the plate spring extending to a position opposite to the position of the portion in contact with the contact portion. Element switching device. The engagement mechanism includes a pair of support portions, and the pair of support portions support both ends of the plate spring.
4. The optical system according to claim 3 , wherein said shaft member is detent side with respect to said plate spring and is in contact with a portion of said plate spring located between said both ends of said plate spring. Element switching device. The optical element switching device according to any one of claims 1 to 4 , wherein the engagement mechanism is arranged to apply the pressing force to the detent from the side surface side of the optical component. The optical system according to any one of claims 1 to 5 , wherein the movable member has a disk shape, and the one or more optical components are switched by rotating with respect to the fixed member. Element switching device. The optical element switching device according to any one of claims 1 to 6 , wherein the movable member is electrically driven.

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