JP4627374B2 - Click mechanism of microscope revolver - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a click mechanism employed in a revolver of a microscope.
[0002]
[Prior art]
The microscope includes an objective lens switching device called a revolver that rotates a revolver rotating body on which a plurality of objective lenses having different magnifications are mounted in accordance with the driving of a drive source to position the objective lens having a desired magnification on the optical path. ing. The revolver is provided with a click mechanism for mechanically positioning each objective lens so as to be accurately positioned on the optical path. The click mechanism is provided in the rotation direction of the revolver rotator and is in contact with the click groove formed corresponding to each lens by being urged against the revolver rotator and rotating according to the rotation of the revolver rotator. A click body that engages with the click groove, and the click body clicks on the click groove corresponding to each lens to accurately position the objective lens having a desired magnification on the optical path.
[0003]
Here, when inspecting a semiconductor device using a semiconductor inspection apparatus with respect to the microscope, the current is passed by applying an inspection needle to the electrode forming portion of the semiconductor device and measurement is performed. There is a demand for a method of changing the magnification.
[0004]
[Problems to be solved by the invention]
However, if the revolver rotating body is rotated so as to change the magnification of the objective lens during the measurement by the semiconductor inspection apparatus, vibration due to impact is generated at the time of click engagement. Here, vibrations from the outside can be isolated by the microscope's vibration isolation table, but vibrations generated from the microscope itself, such as vibration during click engagement, cannot be eliminated by the vibration isolation table. Therefore, due to the vibration that occurs during this click engagement, the contact resistance of the inspection needle to the semiconductor device changes and the current value fluctuates. In some cases, the measurement position of the inspection needle shifts, making accurate measurement difficult. Met.
[0005]
The present invention has been made to solve such a problem, and provides a click mechanism for a revolver of a microscope that prevents a malfunction due to vibration during click engagement while accurately positioning a lens. With the goal.
[0006]
[Means for Solving the Problems]
A click mechanism for a revolver of a microscope according to the present invention has a plurality of lenses and is rotatably supported, and includes a revolver rotating body having a positioning click groove corresponding to each lens in a rotating direction, and the revolver rotating body. A click body that is urged against and in contact with the click groove according to the rotation of the revolver rotating body, and is fitted into the click groove and attached to the click groove. On the other hand, there is provided an impact mitigating member whose depth and thickness are set so that the impact when the click body is engaged is mitigated to a predetermined level.
[0007]
According to the click mechanism of the revolver of the microscope configured as described above, the mechanical positioning with high accuracy of the click engagement between the click groove and the click body is performed, and an impact that is about to occur at the time of the click engagement is performed. Then, it is alleviated by the impact mitigating member fitted in the click groove and set to a predetermined depth and thickness, and the occurrence of vibration is suppressed.
[0008]
Here, when the click groove and the impact mitigating member have a depth portion with a rotation direction width larger than the rotation direction width on the groove opening side, the impact mitigation member is fitted into the click groove and bonded with an adhesive or the like, for example. It is possible to prevent the impact relaxation member from coming out of the click groove when the revolver rotating body rotates, particularly when the impact relaxation member is rubbed in the rotation direction by the click body.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EMBODIMENTS Hereinafter, a preferred embodiment of a click mechanism for a revolver of a microscope according to the present invention will be described with reference to the accompanying drawings. FIG. 1 is a front view showing a microscope in which a revolver click mechanism according to the present invention is adopted, FIG. 2 is a perspective view showing a state where an objective lens of the revolver in FIG. 1 is removed, and FIG. It is a top view which shows the outline | summary and effect | action of a revolver rotary body and click mechanism which comprise 2 revolvers, (a) is a top view which shows the state before a click body engages with a click groove | channel, (b) is click 4 is a plan view showing a state where the body is engaged with the click groove, FIG. 4 is a longitudinal sectional view showing each objective lens in FIG. 1, (a) is a longitudinal sectional view of a lens having a magnification of 100, and (b). Is a longitudinal sectional view of a lens with a magnification of 20, (c) is a longitudinal sectional view of a lens with a magnification of 5, and (d) is a longitudinal sectional view of a lens with a magnification of 2. FIG.
[0010]
As shown in FIG. 1, a revolver 2 as an objective lens switching device provided in the microscope 1 includes a revolver rotating body 3 on which a plurality of objective lenses are mounted. The revolver rotating body 3 is detachably equipped with four different types of objective lenses 4a, 4b, 4c, and 4d such that the magnification is 100 times, 20 times, 5 times, and 2 times. A drive belt 7 is stretched between the revolver rotating body 3 and a drive pulley 6 fixed to a drive shaft 5 of a revolver rotating body drive motor (not shown) as shown in FIG. The rotating body 3 is rotatable in accordance with the driving of the revolver rotating body drive motor.
[0011]
The revolver 2 also includes a click mechanism 8 that mechanically positions each objective lens of the rotating revolver rotating body 3 so as to be accurately positioned on the optical path. As shown in FIGS. 2 and 3, the click mechanism 8 includes click grooves 9 (see FIG. 3) formed on the outer peripheral surface of the revolver rotating body 3 corresponding to the objective lenses 4a to 4d. And a click body 10 that is urged and brought into contact with the outer peripheral surface of the revolver rotating body 3 and engages with each click groove 9 according to the rotation of the revolver rotating body 3.
[0012]
The click body 10 is a bearing (cylindrical body) rotatably supported on the support shaft 12, and the support shaft 12 is attached to a leaf spring 13. The leaf spring 13 is attached to a leaf spring mounting bracket 14 as a fixed side, and the click body 10 is always urged by the leaf spring 13 so as to contact the outer peripheral surface of the revolver rotating body 3. Then, the revolver rotating body 3 rotates in the direction of rotation by performing click engagement in which a part of the outer peripheral surface of the click body 10 is fitted between the open side edge portions of the click groove 9 as shown in FIG. The objective lens having a desired magnification is positioned on the optical path.
[0013]
The revolver rotating body 3 and the click body 10 are made of metal so that positioning by the click engagement can be performed with high accuracy. The entire revolver rotating body 3 and the click body 10 may not be made of metal, but only the outer peripheral surfaces of the click groove 9 and the click body 10 may be made of metal. Moreover, as long as positioning can be performed with high precision, you may comprise from hard materials other than a metal.
[0014]
Here, particularly in the present embodiment, as shown in FIG. 3, the click groove 9 has an axis that is parallel to the axis of the revolver rotating body 3 and a part of the periphery is opened outward. The click impact groove 9 is fitted with a cylindrical impact mitigating member 11 made of rubber.
[0015]
The depth thickness (the thickness in the radial direction) of the impact relaxation member 11 and the click groove 9 into which the impact relaxation member 11 is fitted is set to a thickness that allows the impact relaxation member 11 to moderate the impact at the time of click engagement. .
[0016]
Further, in the present embodiment, the objective lenses 4a to 4d are different in weight and centroid position from each other (see the centroid position of the objective lens alone indicated by a triangle mark in FIG. 4). In order to prevent rotational shake due to a difference in the weight of the objective lens alone and the position of the center of gravity, the weights and the positions of the center of gravity of the objective lenses 4a to 4d are matched to each other. That is, the objective lenses 4b, 4c, and 4d are respectively equipped with annular balance weights 14b, 14c, and 14d so as to match the weight and the center of gravity of the heaviest objective lens 4a. These balance weights 14b to 14d are detachably mounted by screws as shown in FIG. 4C, for example.
[0017]
According to the click mechanism 8 of the revolver 2 configured as described above, when the revolver rotating body 3 is rotated, the click body 10 rotates while contacting the outer peripheral surface of the revolver rotating body 3. At this time, the revolver rotating body 3 rotates while preventing rotational shake by the balance weights 14b to 14d.
[0018]
When the click groove 9 reaches the click body 10 in accordance with the rotation of the revolver rotating body 3, as shown in FIG. 3A, before the click body 10 fits between the open side edge portions of the click groove 9 ( Before the click body 10 collides with the opening side edge A on the far side in the rotation direction of the click groove 9), it contacts the shock relaxation member 11, and the opening side edge of the click groove 9 is crushed in the depth direction. It will fit between the parts. For this reason, the impact at the time of click engagement is relieved and generation | occurrence | production of a vibration is suppressed. At this time, since the click groove 9 and the click body 10 are both made of metal, positioning by click engagement with mechanical and high accuracy is achieved with higher accuracy.
[0019]
Here, if the click groove has the same depth thickness as that of the prior art (a depth thickness shorter than that of the present embodiment), the impact mitigation member to be fitted and attached thereto has less crushing allowance, so that the impact at the time of click engagement is sufficient. However, in this embodiment, the impact relaxation member 11 whose depth thickness is set so as to moderate the impact at the time of click engagement is fitted in the click groove 9. Since it is mounted, a highly accurate mechanical positioning called click engagement is carried out, while an impact that is about to occur at the time of click engagement is relaxed to a predetermined level, thereby suppressing the occurrence of vibration. For this reason, it is possible to prevent occurrence of problems due to vibration during click engagement while accurately positioning the objective lenses 4a to 4d of the revolver rotating body 3. Therefore, when the semiconductor device is inspected using the semiconductor inspection apparatus, accurate measurement can be performed even if the revolver rotating body 3 including the objective lenses 4a to 4d is rotated and click-engaged.
[0020]
In addition, since the click groove 9 and the impact relaxation member 11 have a substantially cylindrical shape, the revolver rotating body can be obtained simply by fitting the impact relaxation member 11 into the click groove 9 without adhering with an adhesive or the like. 3, especially when the shock absorbing member 11 is rubbed in the rotating direction by the click body 10, the shock reducing member 11 is prevented from coming out of the click groove 9. For this reason, the click mechanism 8 can be easily assembled, and the manufacturing cost can be reduced.
[0021]
The configuration for preventing the impact relaxation member from slipping out of the click groove is not limited to a substantially cylindrical shape, and the impact relaxation member and the click groove have a depth in the rotational width that is greater than the rotational width on the groove opening side. Any configuration having a portion may be used.
[0022]
Here, in order to confirm the effect of the click mechanism 8, the present inventors measured vibration during rotation of the revolver rotating body. FIG. 5 is a diagram showing measured values of vibration acceleration when the revolver rotating body is rotated using the click mechanism 8 of the revolver 2, and FIG. 6 shows a revolver click mechanism (without an impact reducing member) according to the prior art. It is a diagram which shows the measured value of the vibration acceleration at the time of rotating a revolver rotary body using.
[0023]
In the measurement shown in FIG. 5 and FIG. 6, a revolver rotating body in which four objective lenses with magnifications of 2, 5, 20, and 100 are sequentially mounted in the rotation direction is used as the revolving body. The revolver rotating body is rotated from the state where the double lens is located on the optical path so that the lens of 5 times, 20 times, and 100 times are sequentially located on the optical path, and reversely rotated from there. Three turns of one turn in which lenses of 20 times, 5 times, and 2 times are sequentially located on the optical path were measured, and the X direction (plane direction) vibration acceleration X and the Z direction (vertical direction) vibration acceleration Z at that time were measured. The solid line of the diagram shows the vibration acceleration X, the dotted line shows the vibration acceleration Z, the peak value of vibration acceleration is shown in the left half of the diagram, and the average value of vibration acceleration is shown in the right half of the diagram. ing.
[0024]
In the click mechanism of the prior art shown in FIG. 6, the vibration acceleration due to the shock at the time of click engagement is very large. However, in the click mechanism 8 of the present embodiment shown in FIG. Can be seen to be sufficiently deterred.
[0025]
FIG. 7 is a plan view showing a main part of a click mechanism of another revolver according to the present invention. The click mechanism 18 is different from the click mechanism 8 in that a substantially square-shaped click groove 19 and an impact reducing member 21 are used in place of the substantially cylindrical click groove 9 and the impact reducing member 11.
[0026]
The impact relaxation member 21 is made of rubber similarly to the impact relaxation member 11 and is fitted into the click groove 19 and attached. However, since the shape is a substantially quadrangular prism and may come off, it is fixed to the click groove 19 with, for example, an adhesive. Further, the depth and thickness of the impact relaxation member 21 and the click groove 19 are set to thicknesses that allow the impact relaxation member 21 to moderate the impact at the time of click engagement in the same manner as described above.
[0027]
It goes without saying that the same effect as that of the click mechanism 8 can be obtained even with this configuration.
[0028]
The present invention has been specifically described above based on the embodiment. However, the present invention is not limited to the above embodiment. For example, in the above embodiment, the impact relaxation members 11 and 21 are made of rubber. Resin or the like may be used as long as it has a cushioning effect.
[0029]
In the above embodiment, a plurality of click grooves 9 (19) are formed on the outer peripheral surface of the revolver rotating body 3, and the click body 10 is engaged with the click grooves 9 (19) from the side. However, a plurality of click grooves 9 (19) are formed concentrically on either one of both end faces of the revolver rotating body 3, and the click body 10 is engaged with the click grooves 9 (19) from above or below. The present invention can also be applied to matching configurations.
[0030]
【The invention's effect】
The click mechanism of the revolver of the microscope according to the present invention is configured such that an impact relaxation member is fitted into the click groove of the revolver rotating body, and the click body is click-engaged with the click groove with respect to the depth thickness of the impact relaxation member. Since the thickness is set so as to reduce the shock at a predetermined time, the mechanical positioning with high accuracy called click engagement is performed, and the shock that is about to occur at the time of this click engagement is relaxed to a predetermined level. Occurrence is suppressed. For this reason, it becomes possible to prevent the occurrence of problems due to vibration during click engagement while accurately positioning the lens of the revolver rotating body. Therefore, when the semiconductor device is inspected using the semiconductor inspection apparatus, accurate measurement can be performed even if the revolver rotating body including the lens is rotated and click-engaged.
[Brief description of the drawings]
FIG. 1 is a front view showing a microscope employing a revolver click mechanism according to the present invention;
FIG. 2 is a perspective view showing a state where an objective lens of the revolver in FIG. 1 is removed.
3 is a plan view showing an outline and an operation of a revolver rotating body and a click mechanism constituting the revolver of FIGS. 1 and 2, wherein (a) is a plane showing a state before the click body is engaged with a click groove. FIG. FIG. 4B is a plan view showing a state where the click body is engaged with the click groove.
4 is a longitudinal sectional view showing each objective lens in FIG. 1, wherein (a) is a longitudinal sectional view of a lens having a magnification of 100, (b) is a longitudinal sectional view of a lens having a magnification of 20, and (c) is a magnification. 5 is a longitudinal sectional view of the lens No. 5, and FIG.
FIG. 5 is a diagram showing measured values of vibration acceleration when the revolver rotating body is rotated by using the revolver click mechanism according to the present invention.
FIG. 6 is a diagram showing measured values of vibration acceleration when a revolver rotating body is rotated using a revolver click mechanism according to the prior art.
FIG. 7 is a plan view showing a main part of a click mechanism of another revolver according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Microscope, 2 ... Revolver, 3 ... Revolver rotating body, 4a-4d ... Objective lens, 8, 18 ... Click mechanism, 9, 19 ... Click groove, 10 ... Click body, 11, 21 ... Impact relaxation member, 13 ... Leaf spring.

Claims (2)

A revolver rotating body having a plurality of lenses that is rotatably supported and has a positioning click groove corresponding to each lens in the rotation direction, and is urged against and in contact with the revolver rotating body. In the click mechanism of the revolver of the microscope comprising: a click body that engages with the click groove according to the rotation of the rotary body,
A microscope comprising: an impact mitigating member that is fitted and fitted into the click groove, and has a depth thickness set so as to moderate an impact when the click body is engaged with the click groove. Revolver click mechanism. 2. The click mechanism for a revolver of a microscope according to claim 1, wherein the click groove and the impact relaxation member include a depth portion having a rotation direction width larger than the rotation direction width on the groove opening side.

Images