JP2007021615A - Polishing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing device, adjusting the positional relationship between the material to be polished and the center of rocking depending upon the thickness of material to be polished and the shape of the surface to be polished, easily and with high accuracy. <P>SOLUTION: This polishing device includes: a pair of polishing members 2, 3 disposed opposite to each other through the material 1 to be polished; a first shaft body 4 connected to one of the paired polishing members; and a first rocking body 6 to which the first shaft body is fitted to freely rotate around a first axis Za, which is the axis of the first shaft body, and which is constructed to rock around a second axis Y intersecting the first axis. The device includes: moving structures 6s, 8s constructed to move the first shaft body in the direction of the first axis Za to the first rocking body 6; and a fixing means 9 constructed to fix the first shaft body to the first rocking body in an arbitrary position within a predetermined range in the direction of the first axis. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a polishing apparatus, and more particularly to a structure of a polishing apparatus suitable for polishing a lens.

  In general, as a polishing apparatus for polishing a lens, which is a material to be polished, a first polishing member that fixes a lens and a second polishing member that has a polishing surface that is in sliding contact with the surface to be polished of the lens face each other. Various structures for performing final polishing of the lens by driving the first shaft body connected and fixed to the first polishing member and the second shaft body fixed to the second polishing member in an appropriate manner. The one with is known.

For example, a first oscillating body that is rotatably supported around a first axis that is the axis of the first slidable body and that can oscillate around a second axis that intersects the first axis, And a second oscillator configured to be swingable about a third axis that intersects the first axis and the second axis, and is connected to the oscillator so as to be swingable about the second axis. Polishing apparatuses are known (see, for example, Patent Documents 1 and 2 below).
Japanese Patent Publication No.7-112667 JP 2004-25314 A

  However, in the above-described type of polishing apparatus, depending on the thickness of the lens fixed to the first polishing member, the curvature of the surface to be polished of the lens, and the like, at the intersection of the first axis, the second axis, and the third axis. On the other hand, since it is necessary to adjust the position of the first polishing member, the length of the first shaft connected to the first polishing member must be changed every time the thickness of the lens or the curvature of the surface to be polished changes. For this reason, there is a problem that the setup change is difficult and the initial setting work becomes complicated.

  Further, the positional relationship of the lens with respect to the intersections of the first axis, the second axis, and the third axis is very delicate, and even a slight deviation greatly affects the polishing state. Therefore, only the length of the first axis is required. In the method of setting the positional relationship of the lens with respect to the intersection point, there is a problem in that fine adjustment cannot be made and good and stable polishing quality cannot be obtained.

  Furthermore, the connecting portion between the first shaft body and the first rocking body, and the connecting portion between the first rocking body and the second rocking body have a high structural accuracy or support rigidity while enabling a rotating operation and a rocking operation. Therefore, there is a problem that the structure tends to be complicated and the manufacturing cost increases.

  Therefore, the present invention solves the above-mentioned problems, and the problem is that the positional relationship between the center of oscillation and the material to be polished according to the thickness of the material to be polished and the shape of the surface to be polished is easily and highly accurate. It is to realize a polishing apparatus that can be adjusted. Another object is to provide a polishing apparatus capable of simplifying the structure of a portion that requires a rotating operation and a swinging operation and reducing the manufacturing cost while ensuring high structural accuracy and support rigidity.

  In view of such a situation, the polishing apparatus of the present invention includes a pair of polishing members disposed to face each other via a material to be polished, a first shaft connected to one of the pair of polishing members, A polishing apparatus comprising: a first oscillating body that is rotatably attached around a first axis that is an axis of the uniaxial body, and is configured to be oscillatable around a second axis that intersects the first axis. A moving structure configured to move the first shaft body in the first axial direction relative to the first rocking body; and the first shaft body at the arbitrary position within a predetermined range in the first axial direction. Fixing means configured to be fixable to one rocking body.

  According to this invention, the first shaft body can be moved in the first axial direction with respect to the first rocking body by the moving structure, and the first shaft body can be moved within the predetermined range in the first axial direction by the fixing means. Since it can be fixed to the first rocking body at an arbitrary position, the first shaft body does not need to be replaced even when polishing materials having different thicknesses or shapes of surfaces to be polished. Since the work is simplified and the position of the material to be polished can be adjusted, a good and stable polishing state can be realized.

  In the present invention, it is preferable that the moving structure is a pair of screw structures in which the first shaft body is screwed to each other in such a manner that the first shaft body can move in the first axis direction with respect to the first rocking body. Since the moving structure is constituted by a pair of screw structures that are screwed together, it is possible to easily adjust the position of the material to be polished, so that a better and more stable polishing state can be realized.

  In the present invention, the fixing means is screwed into one screw structure of the pair of screw structures, and the first axial direction with respect to a member provided with the other screw structure or a member fixed thereto. It is preferable that it is a fixing screw member which contacts. According to this, the fixed screw member is screwed into one screw structure, and a pair of screws are brought into contact with the member provided with the other screw structure or the member fixed thereto with respect to the first axial direction. The screwing position of the structure can be held and fixed.

  In the present invention, the first shaft body is further rotatably supported around the first axis, and is further provided with a shaft support unit attached to the first rocking body, and the moving structure includes the shaft support unit. It is preferable that the first swing body is configured to be movable, and the fixing means is configured to be able to fix the shaft support unit and the first swing body. According to this, the shaft support unit that supports the first shaft body is configured to be movable with respect to the first rocking body by the moving structure, and the shaft support unit is fixed to the first rocking body by the fixing means. By being able to be configured, since the moving structure and the fixing means can be provided without affecting the shaft support structure of the shaft support unit, it is possible to suppress complication of the mounting structure. Further, since the bearing unit and the first rocking body can be relatively moved by the moving structure, the position of the bearing unit larger than the first shaft body can be adjusted with respect to the first rocking body. Adjustment work can be performed easily.

  In this case, it is preferable that the moving structure includes a male screw provided in the pivot support unit and a female screw provided in the first oscillator and screwed into the male screw.

  Further, it is preferable that the fixing means is a fixing nut configured to be screwed into the male screw of the shaft support unit and to be able to contact the first rocking body in the first axial direction.

  In each of the above inventions, the first rocking body is connected so as to be rockable about the second axis, and can be rocked about the third axis intersecting the first axis and the second axis. It is preferable to further include a second oscillator configured as described above.

  Each of the first rocking body and the second rocking body constitutes a link (for example, a U-shaped link) having a bent structure including a pair of legs, and the pair of legs of the first rocking body and the It is desirable that the pair of leg portions of the second oscillating body are pivotably connected to each other.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 3 is a schematic configuration diagram schematically showing the overall configuration of the polishing apparatus 10 of the present embodiment. The polishing apparatus 10 includes a first polishing member 2 and a second polishing member 3 that are disposed to face each other via a material 1 to be polished such as a lens. Here, usually, the material to be polished 1 is fixed to one of the first polishing member 2 and the second polishing member 3, and the other is provided with a polishing surface that is in sliding contact with the surface to be polished of the material 1 to be polished. In the present embodiment, the case where the material 1 is fixed to the first polishing member 2 will be described below.

  The first polishing member 2 is connected and fixed to the first shaft body 4, and the axis of the first shaft body 4 is a Za axis. The first shaft body 4 is connected to the first rocking body 6 so as to be rotatable around the Za axis. The first oscillating body 6 is configured to be able to oscillate around the Y axis that intersects the Za axis (orthogonal in the illustrated example). The first oscillating body 6 is connected to the second oscillating body 7 so as to be rotatable about the Y axis. The second oscillating body 7 is configured to be able to oscillate around the X axis that intersects the Za axis and the Y axis (in the illustrated example, both are orthogonal to the Za axis and the Y axis at the same point Q). Yes. Here, in the case of this embodiment, the X axis is a fixed shaft fixed to a frame or the like of a device (not shown), and the Y axis is a movable shaft that swings by swinging the second swing body 7 around the X axis. The Za axis is a movable shaft that oscillates by the oscillation of the first oscillating body 6 and the second oscillating body 7.

  The second polishing member 3 is connected and fixed to the second shaft body 5, and the axis of the second shaft body 5 is taken as the Zb axis. In this embodiment, the Zb axis is a fixed axis fixed to a frame or the like of a device (not shown), and the second shaft body 5 is rotationally driven around the Zb axis by a drive motor or the like (not shown).

  In the case of the illustrated example, the first oscillating body 6 has a bent structure such as a U-shape, an arc shape, a U-shape, a V-shape, and the like having a pair of leg portions 6a and 6b, and the pair of leg portions 6a and 6b. Is configured to pass through the Y axis and be rotatable about the Y axis. The second oscillator 7 also has a bent structure similar to that described above with a pair of legs 7a and 7b, and the pair of legs 7a and 7b passes through the X axis and is centered on the X axis. It is configured to be rotatable. The leg portion 6a of the first oscillating body 6 and the leg portion 7a of the second oscillating body 7 are connected in a structure that can rotate relatively around the Y axis, and the leg portion 6b of the first oscillating body 6 The leg portion 7b of the second rocking body 7 is also connected with a structure that is relatively rotatable around the Y axis.

  The second oscillating body 7 is configured to be expanded as shown by a dotted line in FIG. 3, and the first oscillating body 6 is configured to be supported by the second oscillating body 7 from both sides in the direction along the X axis. Also good.

  FIG. 1 is an enlarged partial longitudinal sectional view showing components of the first polishing member 2 and the second polishing member 3, the first shaft body 4, and the first rocking body 6 in the polishing apparatus 10. The material to be polished 1 made of optical glass or the like is fixed to the first polishing member 2 with a surface 1p to be polished exposed by wax or the like. Further, the polishing surface 3p of the second polishing member 3 has a surface shape that matches the final polishing shape of the surface 1p to be polished of the material 1 to be polished. When using abrasive grains or the like, the polishing surface 3p may be a mirror surface that matches the final polishing shape, and the diamond grindstone may be stuck so as to match the final polishing shape.

  The first polishing member 2 includes a polishing jig 2a to which the material to be polished 1 is fixed, and a holding jig 2b that is elastically held via an elastic member such as an O-ring with respect to the polishing jig 2a. 2b is coaxially connected and fixed to the first shaft body 4 by a screwing structure or the like. The first shaft body 4 has a step surface 4a facing upward (opposite to the first polishing member 2). The step surface 4a engages with the bearing unit 8 and is positioned in the Za axis direction. Yes.

  The bearing unit 8 includes an inner cylinder member 8a that receives the first shaft body 4, a bearing (for example, a ball bearing or a roller bearing) 8b that rotatably supports the inner cylinder member 8a around the Za axis, an inner cylinder And a fixing member (nut) 8c for fixing the member 8a to the inner ring of the bearing 8b in the Za axis direction. The inner cylinder member 8a has a stepped surface facing upward (opposite side to the first polishing member 2), which engages with the inner ring of the bearing 8b, and the fixing member 8c that engages with the inner cylinder member 8a. The inner cylinder member 8a is fixed in the Za axis direction with respect to the bearing 8b by contacting the inner ring of the bearing 8b downward (to the first polishing member 2 side).

  The outer ring of the bearing 8b is housed in an engaged state inside the outer peripheral case 8d, and a fixing member 8e that engages with a female screw formed inside the outer peripheral case 8d abuts on the outer ring of the bearing 8b, whereby the outer peripheral case 8d. And the outer ring of the bearing 8b are positioned and fixed in the Za axis direction. Here, the fixing member 8e also serves as an upper cover of the bearing unit 8 in the figure.

  A male screw 8 s is formed on the outer peripheral surface of the outer case 8 d, and this is screwed into a female screw 6 s formed on the inner peripheral surface of the first rocking body 6, whereby the bearing unit 8 is connected to the first rocking body 6. . Therefore, by rotating the bearing unit 8, the first rocking body 6 can be moved in the Za axis direction. That is, in the present embodiment, the moving structure that configures the first shaft body 4 so as to be movable in the Za direction with respect to the first rocking body 6 includes the male screw 8s and the female screw 6s.

  A fixing nut 9 is screwed onto the male screw 8s. The fixing nut 9 is configured such that a female screw 9a formed on an inner peripheral surface thereof is screwed with the male screw 8s, and a side end surface 9b of the fixing nut 9 can be brought into contact with the first rocking body 6 in the Za axis direction. . The bearing unit 8 can be held and fixed in the Za axis direction with respect to the first oscillating body 6 by screwing the fixing nut 9 into the male screw 8s and bringing the side end surface 9b into contact with the first oscillating body 6. . That is, in the present embodiment, the fixing means for fixing the first shaft body 4 to the first oscillating body 6 in the Za direction is constituted by the fixing nut 9. In the illustrated example, the fixing nut 9 is engaged with the male screw 8 s of the bearing unit 8 below the first oscillating body 6 and is in contact with the first oscillating body 6 from below.

  In the polishing apparatus 10 of the present embodiment described above, the first rocking body 6 is rocked about the Y axis while the second rocking body 7 is rocked about the X axis, and the second shaft body 5 is further moved to Zb. By rotating around the axis, the polishing object 1 can be polished. At this time, the center point of the rocking by the first rocking body 6 and the second rocking body 7 is the point Q in the illustrated example, so that it is possible to suppress tripping and fluttering of the material 1 to be polished at the time of polishing. A stable polishing state can be obtained.

The configuration of the polishing apparatus 10 will be described in more detail with reference to FIG. FIG. 2 is a schematic explanatory diagram showing the relationship between the center of curvature P of the polished surface 1p (or the polished surface 3p) of the material 1 to be polished having a diameter D and the above-mentioned rocking center Q. The rocking center Q exists on the axis L (optical axis in the case of a lens) L of the material 1 to be polished, and is from the polished surface 1p (or the polishing surface 3p) measured along the axis L to the rocking center Q. The distance is B, and the radius of curvature of the polished surface 1p (3p) is R. At this time, if the swing center Q is set to be the intersection of the axis L with the tangent line of the surface 1p (3p) to be polished at the outer peripheral edge T of the material 1 to be polished, the outer peripheral edge of the material 1 to be polished will be Since T moves in the tangential direction of the polished surface, the material to be polished 1 does not trip on the polished surface and deteriorate the polished state. The relationship (distance B) at this time is expressed by an equation:
^{B = R / {cos (sin} -1 [D / 2R])} ... (1)
It becomes. That is, an ideal polishing state can be obtained by setting the oscillation center Q at the distance B expressed by the above equation (1). However, in this embodiment, the above formula (1) does not need to be completely satisfied, and a good polishing state can be obtained if the conditions are close to the above conditions. For example, assuming an actual oscillation center Q ′ on the axis L, a good polishing state can be obtained if the polishing angle θ represented by the angle Q′TQ is set within 30 degrees. Can do.

  In the present embodiment, the first shaft body 4 can be rotated around the Za axis with respect to the first rocking body 6 so as to be rotated along with the rocking operation and the rotation of the second polishing member 3. However, the first shaft body 4 may be rotationally driven around the Za axis by a drive motor or the like (not shown).

  In this embodiment, the bearing unit 8 is screwed to the first rocking body 6 as described above, and is configured to be movable in the Za axis direction by the screwing position, and at any position by the fixing nut 9. The rocking center Q (distance B) can be easily adjusted so as to have an arbitrary value. In particular, since a very fine adjustment is possible by the screwed structure, the work of correcting the polishing state to the optimum polishing state while observing the polishing finish of the polishing object 1 according to the shape of the polishing object 1 is also possible. It becomes extremely easy.

  FIG. 4 is a schematic partial longitudinal sectional view showing a main part of an embodiment having a bearing unit 8 ′ having a structure different from the above. In this embodiment, since parts other than the connecting part of the first shaft body and the first rocking body are the same as those of the above-described embodiment, the same parts are denoted by the same reference numerals, and description thereof is omitted.

  In the present embodiment, the bearing unit 8 ′ includes a bearing 8 b ′ that directly supports the first shaft body 4 ′ and a first shaft body 4 ′ that is screwed into the first shaft body 4 ′ and an inner ring of the bearing 8 b ′. A fixing member 8c for fixing the outer ring of the bearing 8b 'to the outer peripheral case 8d', and an outer peripheral case 8d 'having a male screw 8s' screwed to the female screw 6s of the first oscillator 6; ′. Here, in this bearing unit 8 ′, the first shaft body 4 ′ is directly supported by the bearing 8b ′. However, the first shaft body 4 ′ is fixed in the Za axis direction, and around the Za axis. It is the same as the bearing unit 8 of the previous embodiment in that it is rotatably supported.

  In the present embodiment, the fixing nut 9 configured in the same manner as in the previous embodiment is in contact with the first rocking body 6 from above in the state of being screwed into the male screw 8s ′ of the bearing unit 8 ′. Yes. In both the previous embodiment and the present embodiment, the fixing nut 9 screwed to the male screws 8 s and 8 s ′ may be in contact with the first rocking body 6 from above or below. In this case, when the bearing units 8 and 8 ′ are in a state of protruding above the first rocking body 6, the fixing nut 9 may be configured to abut against the first rocking body 6 from above. In addition, when the bearing units 8 and 8 ′ are in a state of protruding downward from the first rocking body 6, the fixing nut 9 may be configured to abut against the first rocking body 6 from below. . In this way, the length of the male screws 8s and 8s 'of the bearing unit in the Za-axis direction can be reduced, so that the bearing units 8 and 8' can be thinned.

  According to each embodiment described above, the first shaft body 4 can be moved to an arbitrary position in the Za axis direction with respect to the first rocking body 6, and can be held and fixed at an arbitrary position. Therefore, even when the thickness of the material to be polished 1 or the curvature of the surface to be polished changes, it can be easily handled without replacing the first shaft body 4.

  Further, since the position of the first shaft body 4 in the Za axis direction can be adjusted with high accuracy and very easily, a good and stable polishing state can be obtained.

  Furthermore, the screw structure 6s, 8s is adopted as the moving structure, and the fixing nut 9 is used for fixing, so that an increase in the number of parts can be avoided and the structure is not complicated. As a result, it is possible to ensure a sufficient structural accuracy or support strength (rigidity), and to suppress the manufacturing cost.

  Note that the polishing apparatus of the present invention is not limited to the illustrated examples described above, and it is needless to say that various modifications can be made without departing from the scope of the present invention. For example, in the above-described embodiment, the first swinging body 6 and the first swinging body 7 both having a bent structure are configured to be swingable by a link mechanism that is rotatably connected. As described in Patent Document 2, the first oscillating body moves along a guide path provided in the second oscillating body, whereby the oscillating motion is realized, and the second oscillating body is moved to the first oscillating body. It is also possible to adopt a structure in which the moving body is further swung while being mounted.

The schematic partial longitudinal cross-sectional view which shows the principal part of embodiment. Schematic explanatory drawing which shows the ideal adjustment state of embodiment. The schematic perspective view which shows typically the whole structure of embodiment. The schematic partial longitudinal cross-sectional view which shows the principal part of different embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Polishing apparatus, 1 ... Abrasive material, 1p ... Surface to be polished, 2 ... 1st polishing member, 3 ... 2nd polishing member, 4 ... 1st shaft body, 5 ... 2nd shaft body, 6 ... 1st rock Moving body, 6s ... female screw, 7 ... second oscillator, 8 ... shaft support unit, 8s ... male screw, 9 ... fixing nut

Claims (8)

A pair of polishing members disposed opposite to each other through the material to be polished, a first shaft connected to one of the pair of polishing members, and a first axis around which the first shaft is its axis A polishing apparatus comprising: a first swinging body that is rotatably mounted and configured to swing around a second axis that intersects the first axis;
A moving structure configured to move the first shaft body in the first axial direction relative to the first rocking body; and the first shaft body at the arbitrary position within a predetermined range in the first axial direction. 1. A polishing apparatus comprising: a fixing unit configured to be fixable to one oscillator.   2. The moving structure according to claim 1, wherein the moving structure is a pair of screw structures in which the first shaft body is screwed to each other in such a manner that the first shaft body can move in the first axial direction with respect to the first rocking body. The polishing apparatus as described.   The fixing means is screwed into one screw structure of the pair of screw structures and fixed in contact with a member provided with the other screw structure or a member fixed thereto in the first axial direction. The polishing apparatus according to claim 2, wherein the polishing apparatus is a screw member. A shaft support unit that rotatably supports the first shaft body around the first axis and is attached to the first rocking body;
The moving structure is configured to allow the shaft support unit to move relative to the first rocking body, and the fixing means is configured to allow the shaft supporting unit and the first rocking body to be fixed. The polishing apparatus according to claim 1, wherein:   The polishing apparatus according to claim 4, wherein the moving structure includes a male screw provided in the shaft support unit and a female screw provided in the first rocking body and screwed into the male screw.   6. The fixing means is a fixing nut configured to be screwed into the male screw of the shaft support unit and to be able to contact the first rocking body in the first axial direction. The polishing apparatus according to 1.   The first rocking body is connected so as to be rockable about the second axis, and is configured to be rockable about a third axis intersecting the first axis and the second axis. The polishing apparatus according to claim 1, further comprising a rocking body. The first rocking body and the second rocking body each constitute a link having a bent structure having a pair of legs, and the pair of legs of the first rocking body and the pair of legs of the second rocking body, The polishing apparatus according to claim 7, wherein each of the two is rotatably connected.

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