JP2016224279A - Optical element change-over device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce oscillation generated upon changing over optical elements, and enable a quick start of measurement.SOLUTION: An optical element change-over device 120 comprises:: a casing 122; a turret 130; and an engagement mechanism 138. In the turret 130, an auxiliary detent 132A is provided that includes a main detent 131A and convex part 132B including a concave part 131B for positioning, corresponding to each of four optical elements 126. The engagement mechanism 138 includes: a main bearing member 139B that engages with the main detent 131A; and an auxiliary bearing member 140B that engages with an auxiliary detent 132A. In a movement direction P of the turret 130, force Fm to be applied to the main bearing member 139B by the concave part 131B is made greater than force Fs to be applied to the auxiliary bearing member 140B by the convex part 132B.SELECTED DRAWING: Figure 7

Description

  The present invention relates to an optical element switching apparatus used in an image measuring apparatus including a microscope, and more particularly to an optical element switching apparatus capable of reducing vibrations generated when switching optical elements and starting measurement quickly. .

  Conventionally, an optical element switching device as shown in Patent Document 1 has been used. The optical element switching device includes a fixed member, a movable member that holds one or more optical elements and is movably supported by the fixed member, and one or more optical elements supported by the fixed member and engaged with the movable member. An engagement mechanism for positioning each on the optical axis. In this optical element switching device, a click ball constituting an engagement mechanism is dropped into a positioning recess provided on the movable member to position each optical element.

Japanese Patent Laid-Open No. 10-82946

  However, in the optical element switching device having such a configuration, vibration occurs when the click ball is dropped into the recess. For this reason, it has been necessary to wait for an appropriate time from the switching of the optical element to the start of the measurement so that the vibration is reduced to such an extent that the measurement (including simple observation) is not affected.

  The present invention has been made to solve the above-described problems, and it is an object of the present invention to provide an optical element switching device capable of reducing vibrations generated when switching optical elements and starting measurement quickly. To do.

  The invention according to claim 1 of the present application includes a fixed member, a movable member that holds one or more optical elements and is movably supported by the fixed member, and is supported by the fixed member and engages with the movable member. An engagement mechanism that positions each of the one or more optical elements on an optical axis. The movable member includes the positioning unit corresponding to each of the one or more optical elements. A main detent having a concave portion and an auxiliary detent having a convex portion, and the engagement mechanism includes a main bearing member that engages with the main detent, and an auxiliary bearing member that engages with the auxiliary detent. And in the moving direction of the movable member, the force applied to the main bearing member by the concave portion is larger than the force applied to the auxiliary bearing member by the convex portion, It is obtained by solving the problem.

  In the invention according to claim 2 of the present application, the engagement mechanism is arranged to apply a pressing force to the main detent and the auxiliary detent from the side surface side of the optical element.

  In the invention according to claim 3 of the present application, both the main bearing member and the auxiliary bearing member are formed in a cylindrical shape.

  In the invention according to claim 4 of the present application, the central portion of the convex portion is formed into a flat shape with a predetermined length.

  The invention according to claim 5 of the present application is such that the auxiliary bearing member is engaged with the convex portion only in a state where the main bearing member is engaged with the concave portion.

  The invention according to claim 6 of the present application is such that the auxiliary bearing member is engaged with the auxiliary detent only in a state where the main bearing member is engaged with the main detent.

  In the invention according to claim 7 of the present application, the one or more optical elements are switched by rotating the movable member with respect to the fixed member.

  The invention according to claim 8 of the present application is such that the movable member is electrically driven.

  According to the present invention, it is possible to reduce vibration generated when the optical element is switched and to start measurement quickly.

1 is a schematic diagram illustrating an example of an image measurement device according to a first embodiment of the present invention. Schematic diagram showing the image detection unit (front view (A), side view (B) with some covers removed) Schematic diagram showing the image detection unit (top view (A), schematic top view (B)) Schematic relationship diagram showing the relationship of the components of the optical element switching device Schematic view inside casing showing optical element switching device (top view (A), front view (B) of cross section of only engagement mechanism) Schematic diagram showing the optical element switching device (a top view in the casing (A), a side view in cross section of the casing only (B)) The schematic diagram which shows the relationship between the recessed part of a main detent, the convex part of an auxiliary detent, and a main bearing member and an auxiliary bearing member Schematic diagram (top view (A), left side view (B)) showing an optical element switching device according to a second embodiment of the present invention. Schematic diagram showing the optical element switching device of FIG. 8 (front view (A), right side view (B))

  Hereinafter, an example of an embodiment of the present invention will be described in detail with reference to the drawings.

  1st Embodiment which concerns on this invention is described using FIGS.

  First, a schematic configuration of an image measuring apparatus using the optical element switching device will be described with reference to FIG.

  As shown in FIG. 1, the image measuring apparatus 100 includes a base 102, a pair of columns 104 erected on the base 102, and a beam (not shown) passed between the pair of columns 104. Prepare. An XZ moving mechanism (not shown) that moves in the X direction and the Z direction is disposed on the beam, and these are housed inside the upper cover 106. An image detection unit 110 is attached on the XZ moving mechanism. The image detection unit 110 is provided with an illumination system 108. The base 102 incorporates a Y moving mechanism (not shown) that allows the base surface 102A to move in the Y direction. Therefore, the image detection unit 110 can be moved relatively three-dimensionally with respect to the measurement object placed on the base surface 102A, and the image measurement apparatus 100 measures the measurement object in three dimensions. It is possible.

  Next, schematic configurations of the image detection unit 110 and the optical element switching device 120 will be described with reference to FIGS.

  As shown in FIGS. 2A and 2B, the image detection unit 110 displays an image formed by the objective lens 112, the optical element 126 switched by the optical element switching device 120, and the objective lens 112 and the optical element 126. A CCD camera 114 for detection. That is, the image detection unit 110 can detect various images (for example, images with different magnifications) by the optical element 126 switched by the optical element switching device 120.

  As shown in FIGS. 2A and 2B, the optical element switching device 120 includes a casing (fixed member) 122, a turret (movable member) 130, a drive device 134, an engagement mechanism 138, A position confirmation mechanism 142. As shown in FIG. 4, a driving device 134 such as a pulse motor is connected to the control board CU. Then, the driving device 134 is driven by a driving signal output from the control board CU. For this reason, the optical element switching device 120 functions as a power turret that switches the optical element 126 held by the turret 130 electrically with respect to the optical axis O of the image detection unit 110. As shown in FIG. 4, the control board CU is provided with a storage unit MR, which stores various initial values for driving control of the driving device 134.

  Below, each component of the optical element switching apparatus 120 is demonstrated.

  As shown in FIGS. 2A, 2 </ b> B, 3 </ b> A and 3 </ b> B, the casing 122 includes not only the turret 130 but also a drive device 134, an engagement mechanism 138, a position confirmation mechanism 142, Support. The casing 122 also supports the objective lens 112 and the CCD camera 114 and functions as a casing of the image detection unit 110.

  The turret 130 holds four optical elements 126 and is movably supported on the casing 122 as shown in FIGS. 2A, 2B, 5A, and 5B. Specifically, as shown in FIGS. 5A, 5B, 6A, and 6B, the turret 130 includes a disk-shaped large-diameter portion 131 and a small-diameter portion 132 that are centered on each other. It is made into the form integrated in the state matched. In the large-diameter portion 131, the optical elements 126 are held by the optical element holding portion 131C at radial positions that are equidistant from the rotation center and at equal intervals in the circumferential direction (every 90 degrees). A shaft 129 is connected to the center of the turret 130. Therefore, the turret 130 rotates with respect to the casing 122 around the shaft 129 so that the four optical elements 126 are switched. The shaft 129 is provided with a driven pulley 136 as shown in FIGS.

  Further, the turret 130 is provided with a main detent 131A and an auxiliary detent 132A as shown in FIGS. 5 (A), (B), FIGS. 6 (A), (B). The main detent 131 </ b> A and the auxiliary detent 132 </ b> A are members that are held at predetermined positions (predetermined angles) by the engagement mechanism 138 with respect to the casing 122 and position each of the four optical elements 126 on the turret 130. Specifically, the main detent 131A and the auxiliary detent 132A are respectively configured by the outer peripheral side surface of the large-diameter portion 131 and the outer peripheral side surface of the small-diameter portion 132 (that is, the main detent 131A and the auxiliary detent 132A are And substantially parallel to the side surface of the optical element 126). Corresponding to each of the four optical elements 126, the main detent 131A is provided with a substantially V-shaped concave portion 131B for positioning, and the auxiliary detent 132A has a substantially trapezoidal convex portion 132B for positioning. Is provided. In the circumferential direction of the turret 130, as shown in FIG. 7, the center position of the recess 131B and the center position of the protrusion 132B coincide at the same angle. The central portion 132BB of the convex portion 132B has a predetermined length and a flat shape. In the present embodiment, since there are four optical elements 126, the recess 131B and the projection 132B are provided on the turret 130 at intervals of 90 degrees. In the present embodiment, the optical element 126 is, for example, an intermediate lens having different magnifications, but may be a polarizing plate, a phase plate, or the like.

  The drive device 134 is a device for moving (rotating) the turret 130 as shown in FIG. Specifically, it is an electric pulse motor or the like. The drive device 134 is provided with a drive pulley 135 and is configured to rotate a driven pulley 136 connected to the turret 130 via a timing belt 137. That is, the turret 130 is electrically driven by the driving device 134.

  As shown in FIGS. 5A, 5B, 6A, and 6B, the engaging mechanism 138 is supported by the casing 122 and engages with the turret 130, and each of the four optical elements 126 is placed on the optical axis O. It is a mechanism for positioning up. Specifically, the engagement mechanism 138 includes a main engagement mechanism 139 and an auxiliary engagement mechanism 140. The main engagement mechanism 139 includes a holding member 139A, a main bearing member 139B, a shaft member 139BB, and a leaf spring 139C. Similarly, the auxiliary engagement mechanism 140 includes a holding member 140A, an auxiliary bearing member 140B, a shaft member 140BB, and a leaf spring 140C.

  As shown in FIGS. 5A, 5B, 6A, and 6B, the holding members 139A and 140A are U-shaped members having a pair of support portions 139AA and 140AA, respectively. It is fixed inside the casing 122 so as to face the detent 131A and the auxiliary detent 132A. The ends of the leaf springs 139C and 140C are supported on the turret 130 side of the pair of support portions 139AA and 140AA, respectively.

  Openings 139CA and 140CA that allow the main bearing member 139B and the auxiliary bearing member 140B to be arranged in a non-contact manner are provided at the central portions of the leaf springs 139C and 140C, respectively (only the opening 139CA is shown in FIG. 5B). To show). As shown in FIG. 5B, the leaf springs 139C and 140C are provided with two bent portions 139CB and 140CB so as to straddle the openings 139CA and 140CA. The bent portions 139CB and 140CB can hold shaft members 139BB and 140BB that support the main bearing member 139B and the auxiliary bearing member 140B, respectively. The bent portions 139CB and 140CB are disposed on the outer side in the radial direction of the turret 130 with respect to the shaft members 139BB and 140BB. That is, the bent members 139CB and 140CB are configured to press the shaft members 139BB and 140BB toward the turret 130 side. That is, the leaf springs 139C and 140C can apply a pressing force to the main detent 131A and the auxiliary detent 132A (substantially parallel to the side surface of the optical element 126) via the main bearing member 139B and the auxiliary bearing member 140B, respectively. (That is, the engagement mechanism 138 is arranged to apply a pressing force to the main detent 131A and the auxiliary detent 132A from the side surface side of the optical element 126). The bent portions 139CB and 140CB are provided so as to have the same angle in the circumferential direction with respect to the rotation center of the turret 130 (the respective bent portions may have different angles in the circumferential direction). .

  As shown in FIGS. 5A, 5B, 6A, and 6B, the shaft members 139BB and 140BB are respectively rotated by the main bearing member 139B and the auxiliary bearing member 140B via rolling elements. Supported as possible. Both the main bearing member 139B and the auxiliary bearing member 140B have a cylindrical shape. And each is pressed by the leaf | plate springs 139C and 140C via shaft member 139BB and 140BB, and becomes the structure (structure which contacts directly) which engages with the main detent 131A and the auxiliary detent 132A.

  Here, as shown in FIG. 7, in this embodiment, the pressing force of the main bearing member 139B is made larger than the pressing force of the auxiliary bearing member 140B. For this reason, in the moving direction P of the turret 130, the force Fm applied to the main bearing member 139B by the concave portion 131B is made larger than the force Fs applied to the auxiliary bearing member 140B by the convex portion 132B (Fm> Fs). In the present embodiment, the angular range of the concave portion 131B is θ2, and the angular range of the convex portion 132B is θ1 (<θ2). That is, only when the main bearing member 139B is engaged with the concave portion 131B, the auxiliary bearing member 140B is engaged with the convex portion 132B. The main bearing member 139B is constantly engaged with the main detent 131A, and the auxiliary bearing member 140B is also constantly engaged with the auxiliary detent 132A.

  As shown in FIGS. 3A and 4, the position confirmation mechanism 142 includes (three) sensors 144 and an index plate 146. The sensor 144 is, for example, a photocoupler including a light emitting element and a light receiving element. The index plate 146 has a disk shape and is fixed to a shaft 129 that supports the turret 130. Slits (not shown) corresponding to the positions of the optical elements 126 are provided at a plurality of locations in the circumferential direction of the index plate 146 (for example, 3 locations every 90 degrees). For example, when light from the light emitting element of the sensor 144 passes through the slit and the light is received by the light receiving element, the sensor 144 outputs a 'H' signal. When the light from the light emitting element of the sensor 144 is blocked by the index plate 146, the sensor 144 outputs a 'L' signal. These ‘H’ and ‘L’ signals are output to the control board CU as shown in FIG. 4. As a result, the position (angle) where the movement of each optical element 126 is controlled can be confirmed by processing the output of the sensor 144 with the control board CU.

  Thus, in the present embodiment, the engagement mechanism 138 includes the main bearing member 139B that engages with the main detent 131A and the auxiliary bearing member 140B that engages with the auxiliary detent 132A. The force Fm applied to the main bearing member 139B by the concave portion 131B is made larger than the force Fs applied to the auxiliary bearing member 140B by the convex portion 132B (Fm> Fs). For this reason, when the main bearing member 139B is dropped into the concave portion 131B of the main detent 131A, the auxiliary bearing member 140B rides on the convex portion 132B of the auxiliary detent 132A. That is, when the main bearing member 139B is dropped, the auxiliary bearing member 140B can apply a reverse bias (brake), and the acceleration generated when the main bearing member 139B is dropped is somewhat affected by the auxiliary bearing member 140B. It becomes possible to reduce. In other words, since excessive impact generated during positioning by the main detent 131A can be reduced, vibration (including sound) can be reduced. At the same time, wear of the engaging mechanism 138, the main detent 131A, and the auxiliary detent 132A due to vibrations can be prevented, and the positioning accuracy can be kept high for a long period. Further, since the force Fm applied to the recess 131B of the main detent 131A is more dominant than the force Fs, the optical element 126 can be positioned reliably and stably by the engagement mechanism 138. At the same time, the role of positioning can be clearly separated from the main detent 131A, and the role of biasing for vibration reduction can be clearly separated from the auxiliary detent 132A. For this reason, it is possible to easily optimize the shapes of the main detent 131A and the auxiliary detent 132A. In addition, since there are two detents for positioning, the main detent 131A and the auxiliary detent 132A, the positioning is performed at two locations, so the stress applied to the main detent 131A compared to the case where the positioning is performed at one location. Can be correspondingly reduced, and wear caused by positioning can be reduced.

  The main detent 131A and the auxiliary detent 132A may be made of any material, but in the present embodiment, the main detent 131A and the auxiliary detent 132A can be made of the same metal as the turret 130. At this time, the main detent 131A and the auxiliary detent 132A have the same life with no variation in life and the like, and are easy to manage and easy to process and mold.

  In the present embodiment, the engagement mechanism 138 is arranged to apply a pressing force to the main detent 131A and the auxiliary detent 132A from the side surface side of the optical element 126. For this reason, the degree of freedom of the arrangement and shape of the optical element 126 of the turret 130 can be increased, and the length of the optical element switching device 120 in the direction of the optical axis O can be shortened. However, the present invention is not limited to this, and the engagement mechanism may be arranged to apply a pressing force to the main detent and the auxiliary detent from the surface side where the optical element is arranged.

  In the present embodiment, the main bearing member 139B and the auxiliary bearing member 140B are both cylindrical. For this reason, compared with the case where the main bearing member and the auxiliary bearing member are spherical, the area where the main bearing member 139B and the auxiliary bearing member 140B contact the main detent 131A and the auxiliary detent 132A can be widened. That is, wear of the main detent 131A and the auxiliary detent 132A, the main bearing member 139B, and the auxiliary bearing member 140B can be reduced, and high positioning accuracy can be maintained for a long time. Not limited to this, both the main bearing member and the auxiliary bearing member do not have to be cylindrical. For example, either one may be spherical, or both may be spherical.

  Moreover, in this embodiment, center part 132BB of convex part 132B is made into the flat shape by predetermined length. For this reason, when the main bearing member 139B is dropped into the recess 131B, it is possible to prevent excessive acceleration from occurring and a decrease in the positioning force. That is, the optical element 126 can be positioned more accurately. At the same time, the shape of the convex portion 132B can be easily processed, and the cost can be reduced. However, the present invention is not limited to this, and the central portion of the convex portion is not formed into a flat shape. For example, the central portion of the convex portion may be slightly convex or concave.

  In the present embodiment, the auxiliary bearing member 140B is engaged with the convex portion 132B only when the main bearing member 139B is engaged with the concave portion 131B. For this reason, the reverse biasing can be applied to the turret 130 after the main bearing member 139B starts to drop in the recess 131B. That is, the positioning process by the concave portion 131B is not obstructed by the convex portion 132B, and the main detent 131A can be quickly moved to the concave portion 131B. However, the present invention is not limited to this, and the auxiliary bearing member may be engaged with the convex portion before the main bearing member is engaged with the concave portion.

  In the present embodiment, the turret 130 has a disk shape, and the four optical elements 126 are switched by rotating with respect to the casing 122. For this reason, there is basically no difference in the arrangement position of the optical element 126 on the turret 130, and the optical element 126 can be equally performed with high positioning accuracy. At the same time, the size of the turret 130 can be made compact compared to the case where it is rectangular.

  In the present embodiment, the turret 130 is electrically driven. For this reason, the force for movement applied to the turret 130 can be made constant, and the force of the leaf springs 139C and 140C can be optimized accordingly. That is, the optical element 126 can be accurately positioned, and at the same time, the life of the optical element switching device 120 can be extended. However, the configuration is not limited to this, and the turret may be manually moved.

  That is, according to the present embodiment, it is possible to reduce the vibration generated when the optical element 126 is switched and to start measurement quickly.

  Although the present invention has been described with reference to the above embodiment, the present invention is not limited to the above embodiment. That is, it goes without saying that improvements and design changes can be made without departing from the scope of the present invention.

  For example, in the above embodiment, the turret 130 has a disk shape, but the present invention is not limited to this. For example, the second embodiment may be configured as shown in FIGS. 8A, 8B, 9A, and 9B.

  In the present embodiment, as shown in FIGS. 8A, 8 B, 9 A, and 9 B, the optical element switching device 220 has one linear slider 229 on the fixed member 222. The movable member 230 that holds the optical element 226 is arranged. The optical element 226 is a member that is put in and out of the optical axis O. For example, a rack 236 is provided on the movable member 230, and the rack 236 is engaged with a pinion 235 provided on the driving device 234, and the movable member 230 is linearly controlled with respect to the fixed member 222. The main detent 231A is provided on the upper side surface (in FIG. 8A) of the movable member 230, and the main engagement mechanism 239 of the engagement mechanism 238 is disposed on the fixed member 222 so as to face the main detent 231A. Further, the auxiliary detent 232A is provided on the lower surface (in FIG. 8A) of the movable member 230, and the auxiliary engagement mechanism 240 of the engagement mechanism 238 is disposed on the fixed member 222 so as to face the auxiliary detent 232A. Yes. In the present embodiment, the number of optical elements 226 arranged can be easily increased or decreased as compared with a disk shape.

  In the above embodiment, the main bearing member is constantly engaged (contacted) with the main detent, and the auxiliary bearing member is also constantly engaged (contacted) with the auxiliary detent. It is not limited. For example, the main bearing member may not be constantly engaged with the main detent, and the auxiliary bearing member may not be constantly engaged with the auxiliary detent. Alternatively, even if the main bearing member is not constantly engaged with the main detent, the auxiliary bearing member may be engaged with the auxiliary detent only when the main bearing member is engaged with the main detent. Good. In this case, since the load for positioning the movable member is almost applied only to the main detent, the load on the driving device can be reduced and the life can be extended. Alternatively, even when the main bearing member is not engaged with the main detent, the auxiliary bearing member may be engaged with the auxiliary detent.

  In the above embodiment, the number of optical elements is one or four, but the present invention is not limited to this. For example, the number of optical elements may be one or more.

  The present invention can be widely applied to an optical element switching device used in an image measuring device including a microscope.

DESCRIPTION OF SYMBOLS 100 ... Image measuring device 102 ... Base 102A ... Base surface 104 ... Column 106 ... Upper cover 108 ... Illumination system 110 ... Image detection unit 112 ... Objective lens 114 ... CCD camera 120, 220 ... Optical element switching device 122 ... Casing 126, 226 ... Optical element 129 ... Shaft 130 ... Turret 131 ... Large diameter part 131A, 231A ... Main detent 131B, 231B ... Concave part 131C ... Optical element holding part 132 ... Small diameter part 132A, 232A ... Auxiliary detent 132B, 232B ... Convex part 132BB ... Center Part 134, 234 ... Drive device 135 ... Drive pulley 136 ... Driven pulley 137 ... Timing belt 138, 238 ... Engagement mechanism 139, 239 ... Main engagement mechanism 139A, 140A, 239A, 240A ... Holding member 139AA, 14 AA: support part 139B, 239B ... main bearing member 139BB, 140BB ... shaft member 139C, 140C ... leaf spring 139CA, 140CA ... opening part 139CB, 140CB ... bent part 140, 240 ... auxiliary engagement mechanism 140B, 240B ... auxiliary bearing member 142 ... Position confirmation mechanism 144 ... Sensor 146 ... Index plate 222 ... Fixed member 229 ... Linear motion slider 230 ... Movable member 235 ... Pinion 236 ... Rack CU ... Control board Fm, Fs ... Force MR ... Storage part O ... Optical axis P ... Direction of movement

Claims (8)

A fixed member, a movable member that holds one or more optical elements and is movably supported by the fixed member, and is supported by the fixed member and engages with the movable member to light each of the one or more optical elements. In an optical element switching device comprising an engagement mechanism for positioning on an axis,
The movable member is provided with a main detent having a concave portion for positioning and an auxiliary detent having a convex portion corresponding to each of the one or more optical elements.
The engagement mechanism includes a main bearing member that engages with the main detent, and an auxiliary bearing member that engages with the auxiliary detent,
The optical element switching device, wherein a force applied to the main bearing member by the concave portion is greater than a force applied to the auxiliary bearing member by the convex portion in the moving direction of the movable member.   The optical element switching device according to claim 1, wherein the engagement mechanism is arranged to apply a pressing force to the main detent and the auxiliary detent from a side surface side of the optical element.   The optical element switching device according to claim 1, wherein both the main bearing member and the auxiliary bearing member have a cylindrical shape.   4. The optical element switching device according to claim 1, wherein a central portion of the convex portion has a predetermined length and a flat shape. 5.   5. The auxiliary bearing member is configured to engage with the convex portion only in a state where the main bearing member is engaged with the concave portion. 6. Optical element switching device.   6. The auxiliary bearing member according to claim 1, wherein the auxiliary bearing member is engaged with the auxiliary detent only in a state where the main bearing member is engaged with the main detent. Optical element switching device.   The optical device according to any one of claims 1 to 6, wherein the movable member has a disk shape, and the one or more optical elements are switched by rotating with respect to the fixed member. Element switching device.   The optical element switching device according to claim 1, wherein the movable member is electrically driven.

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