JP6528117B2

JP6528117B2 - Catalyst layer formation inspection device and its inspection method

Info

Publication number: JP6528117B2
Application number: JP2015046352A
Authority: JP
Inventors: 精一今倉; 田中　仁; 仁田中
Original assignee: Panasonic Intellectual Property Management Co Ltd
Current assignee: Panasonic Intellectual Property Management Co Ltd
Priority date: 2015-03-09
Filing date: 2015-03-09
Publication date: 2019-06-12
Anticipated expiration: 2035-03-09
Also published as: JP2016167381A

Description

本発明は、固体高分子型燃料電池の膜触媒層接合体の触媒層形成検査装置とその検査方法に関するものであり、さらに詳しくは電解質膜を間に挟んで対面するカソード触媒層層周縁部の境界線位置と、アノード触媒層周縁部の境界線位置とのズレ量を検査する触媒層形成検査装置とその検査方法に関するものである。 The present invention relates to an inspection apparatus for forming a catalyst layer of a membrane catalyst layer assembly of a polymer electrolyte fuel cell and an inspection method thereof. More specifically, the present invention relates to a peripheral portion of a cathode catalyst layer facing each other with an electrolyte membrane interposed therebetween. The present invention relates to a catalyst layer forming inspection apparatus and a method for inspecting a deviation amount between a boundary position and a boundary position of a peripheral portion of an anode catalyst layer.

従来の触媒層形成検査装置は、電解質膜を間に挟んで対面するカソード触媒層周縁部のとアノード触媒層周縁部のそれぞれの境界線位置のズレ量を検査するために、電解質膜の面に対して垂直の方向から認識される外観を撮影して、カソード触媒層が塗工された部位と、アノード触媒層が塗工され部位と、カソード触媒層とアノード触媒層がともに塗工された部位と、未塗工の部位のそれぞれの部位の色の濃淡から検査している。 In the conventional catalyst layer formation inspection apparatus, the surface of the electrolyte membrane is inspected to inspect the amount of deviation of the boundary line position of the cathode catalyst layer peripheral portion and the anode catalyst layer peripheral portion facing each other with the electrolyte membrane interposed therebetween. The appearance recognized from the perpendicular direction is photographed, and a portion coated with the cathode catalyst layer, a portion coated with the anode catalyst layer, and a portion coated together with the cathode catalyst layer and the anode catalyst layer And, it inspects from the shade of the color of each part of the uncoated part.

ここで、固体高分子形燃料電池で使用されている電解質膜は、一般的に、無色、有色に関わらず透明であり、電解質膜の両面に形成される触媒層は、カソード触媒層とアノード触媒層ともにカーボン材料を用いるため、一般的に黒色である。 Here, the electrolyte membrane used in the polymer electrolyte fuel cell is generally transparent regardless of whether it is colorless or colored, and the catalyst layer formed on both sides of the electrolyte membrane is a cathode catalyst layer and an anode catalyst. The layers are generally black because they use a carbon material.

電解質膜を間に挟んでカソード触媒層とアノード触媒層を形成した場合に、電解質膜の面に対して垂直方向の外観から認識される触媒層は、カソード触媒層とアノード触媒層を区別することが困難である。これはカソード触媒層側とアノード触媒層側のどちら側から見ても同様のことが言える。さらに、カソード触媒層とアノード触媒層のそれぞれの周縁部の境界線を、外観から認識することも困難である。 When the cathode catalyst layer and the anode catalyst layer are formed with the electrolyte membrane interposed therebetween, the catalyst layer recognized from the appearance in the direction perpendicular to the surface of the electrolyte membrane distinguishes the cathode catalyst layer from the anode catalyst layer. Is difficult. The same is true when viewed from either the cathode catalyst layer side or the anode catalyst layer side. Furthermore, it is also difficult to visually recognize the boundary between the peripheral portions of the cathode catalyst layer and the anode catalyst layer.

外観から認識される触媒層の周縁部の境界線位置情報は、カソード触媒層もしくはアノード触媒層の少なくともどちらか一方の周縁部の境界線で形成されるカソード触媒層とアノード触媒層のシルエットの境界線位置情報となるので、カソード触媒層とアノード触媒層のそれぞれの周縁部の境界線位置情報と、その位置ズレを外観から認識することが困難であった。 The boundary position information of the peripheral portion of the catalyst layer recognized from the appearance is the boundary between the silhouette of the cathode catalyst layer and the anode catalyst layer formed by the boundary of the peripheral portion of at least one of the cathode catalyst layer and the anode catalyst layer. Since the line position information is obtained, it is difficult to recognize from the appearance the boundary line position information of the peripheral portions of the cathode catalyst layer and the anode catalyst layer and the positional deviation thereof.

そこで、電解質膜を間に挟んで対面するカソード触媒層とアノード触媒層の位置ズレを検出するために、線を使用する手法が提案されている（例えば、特許文献１参照）。 Then, in order to detect the positional offset of the cathode catalyst layer and anode catalyst layer which face each other on both sides of an electrolyte membrane, the method of using a line is proposed (for example, refer to patent documents 1).

特許文献１で提案されたものは、Ｘ線装置から構成されており、外観を認識するのではなく、膜触媒層接合体に透過Ｘ線を照射し、透過するＸ線強度が相対的に強い場合は両面とも未塗工部と判定し、Ｘ線強度が相対的に弱い場合は両面とも塗工部と判定し、その中間の強度であるときは位置ズレが生じている部分であると判定することにより、位置ズレの部分を検出している。 The one proposed in Patent Document 1 is composed of an X-ray apparatus, and the membrane catalyst layer assembly is irradiated with transmitted X-rays and the transmitted X-ray intensity is relatively strong without recognizing the appearance. If X-ray intensity is relatively weak, both sides are determined to be coated portions, and if the intensity is in the middle, it is determined to be a portion where positional deviation occurs. By doing this, the part of the positional deviation is detected.

特開２０００−３５３５１４号公報JP 2000-353514 A

しかしながら、上記の特許文献１で提案されているＸ線を用いる構成では、連続撮像できるＸ線装置のモジュールは非常に高価である。また、Ｘ線の透過度を小中大に相対的に分類することによって、未塗工部とカソード触媒層塗工部、アノード触媒層塗工部を分類
する構成であるが、触媒層塗工部、特に周縁部において塗工厚みのムラが大きいと、検出閾値の設定が難しくなるので、触媒層周縁部の境界線位置情報の判定が困難になる。 However, in the configuration using X-rays proposed in the above-mentioned Patent Document 1, the module of the X-ray apparatus capable of continuous imaging is very expensive. Moreover, although it is the structure which classify | categorizes a non-coated part, a cathode catalyst layer coating part, and an anode catalyst layer coating part by classifying the permeability of X-ray into small, medium, large relatively, catalyst layer coating If the unevenness of the coating thickness is large in the portion, particularly in the peripheral portion, the setting of the detection threshold becomes difficult, and therefore, it becomes difficult to determine the boundary line position information of the catalyst layer peripheral portion.

また、カソード触媒層とアノード触媒層が薄くなると、Ｘ線透過強度の検出限界に近づき、検出閾値の設定が難しくなる。また、カソード触媒層アノード触媒層のＸ線透過強度が近似している場合、カソード触媒層とアノード触媒層の塗工部位の区別が困難になる。 In addition, when the cathode catalyst layer and the anode catalyst layer become thin, they approach the detection limit of the X-ray transmission intensity, which makes it difficult to set the detection threshold. In addition, when the X-ray transmission strengths of the cathode catalyst layer and the anode catalyst layer are similar to each other, it becomes difficult to distinguish the coated portions of the cathode catalyst layer and the anode catalyst layer.

このように、従来の媒層形成検査装置は、装置の低価格化、また塗工厚みのムラの影響を小さくし、塗工厚みの影響を小さくし、カソード触媒層とアノード触媒層の位置を区別することに課題を有していた。 As described above, the conventional medium layer formation inspection apparatus reduces the influence of the cost reduction of the apparatus and the unevenness of the coating thickness, reduces the influence of the coating thickness, and positions the cathode catalyst layer and the anode catalyst layer. It had a challenge to distinguish.

本発明は、上記従来の課題を解決するもので、電解質膜を間に挟んで対面する触媒層の周縁部の境界線位置情報を、外観によって検査することができ、低価格で、塗工厚みのムラの影響が小さく、塗工厚みが薄くなっても精度良く検査することができ、カソード触媒層とアノード触媒層の位置を区別することができる触媒層形成検査装置とその検査方法を提供することを目的とする。 The present invention solves the above-mentioned conventional problems, and it is possible to inspect the boundary position information of the peripheral portion of the catalyst layer facing each other with the electrolyte membrane in between by the appearance, and the coating thickness can be low. The present invention provides a catalyst layer forming inspection apparatus and an inspection method capable of discriminating the positions of a cathode catalyst layer and an anode catalyst layer, which are less affected by unevenness of the coating and can be inspected with high accuracy even if the coating thickness becomes thin. The purpose is

上記従来の課題を解決するために、本発明の触媒層形成検査装置は、一方の面のみに第１触媒層が塗布形成された電解質膜の第１触媒層を撮影した第１撮影画像データを取得する第１撮影部と、第１撮影画像データを基に、第１触媒層周縁部の境界線の位置情報を得
る第１撮影画像データに基づく第１触媒層周縁部の境界線位置情報取得部と、一方の面に第１触媒層が塗布形成された電解質膜の他方の面に、第２触媒層を、電解質膜を間に挟んで第２触媒層と第１触媒層とが対面するように塗布形成する第２触媒層塗工部と、第２触媒層と、第２触媒層周縁部の電解質膜とを照射する照明部と、第２触媒層で反射した光と第２触媒層周縁部の電解質膜で反射した光を撮影した第２撮影画像データを取得する第２撮影部と、第２撮影画像データを基に、第２触媒層周縁部の境界線の位置情報を得る第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部と、第１撮影画像データに基づく第１触媒層周縁部の境界線位置情報取得部で得られた第１触媒層周縁部の境界線の位置情報と、第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部で得られた第２触媒層周縁部の境界線の位置情報と、を基に、電解質膜を間に挟んで対面する第１触媒層周縁部の境界線と、第２触媒層周縁部の境界線との位置ズレの大きさを計算する触媒層位置ズレ計算部と、触媒層位置ズレ計算部で計算された位置ズレの大きさが所定値を超えていれば、異常と判定する、電解質膜を間に挟んで対面する第１触媒層周縁部の境界線と第２触媒層周縁部の境界線の状態もしくは異常を報知する、または運転を停止する、触媒層周縁部の境界線位置検査部を有する構成としたものである。 In order to solve the above-mentioned conventional problems, the catalyst layer formation inspection apparatus according to the present invention is configured to photograph a first photographed image data obtained by photographing a first catalyst layer of an electrolyte membrane in which the first catalyst layer is formed by coating on one side only. Boundary position information acquisition of the first catalyst layer peripheral portion based on the first photographed image data for obtaining position information of the boundary of the first catalyst layer peripheral portion based on the acquired first imaging unit and the first photographed image data The second catalyst layer and the first catalyst layer face each other with the second catalyst layer interposed between the second catalyst layer and the other surface of the electrolyte membrane on which the first catalyst layer is applied and formed on one side and the other side. A second catalyst layer coating portion to be coated and formed, a second catalyst layer, an illumination portion for irradiating the electrolyte membrane in the peripheral portion of the second catalyst layer, light reflected by the second catalyst layer, and the second catalyst layer a second imaging unit that acquires second captured image data obtained by photographing the light reflected by the electrolyte membrane of the peripheral portion, the second photographed image data A boundary line position information acquiring unit of a second catalyst layer peripheral edge portion based on second photographed image data for acquiring position information of a boundary line of the second catalyst layer peripheral edge based on the first catalyst layer based on the first photographed image data Positional information of the boundary of the first catalyst layer peripheral portion obtained by the boundary position information acquiring portion of the peripheral portion, and obtained by the boundary position information acquiring portion of the second catalyst layer peripheral portion based on the second captured image data Based on the positional information of the boundary of the second catalyst layer peripheral edge, the boundary between the first catalyst layer peripheral edge and the boundary of the second catalyst layer peripheral edge facing each other with the electrolyte membrane interposed therebetween If the size of the positional displacement calculated by the catalytic layer positional displacement calculation unit for calculating the magnitude of positional displacement and the catalytic layer positional displacement calculation unit exceeds a predetermined value, the electrolyte membrane is judged to be abnormal. State or abnormality of the boundary between the periphery of the first catalyst layer and the boundary between the periphery of the second catalyst layer, which face each other Notifying, or stopping the operation, in which a structure having a boundary line position checking portion of the catalyst layer periphery.

第２撮影部においては、第２撮影部と、第２撮影部によって撮影される第２撮影部の被写体とを結ぶ直線と、第２撮影部の被写体を照射する照明部と、第２撮影部の被写体を結ぶ直線とで成す角度の２分の１である入射角が、臨界角を超えるように、照明部と、第２撮影部と、第２撮影部の被写体と、を配置する。 In the second imaging unit, a straight line connecting the second imaging unit and the subject of the second imaging unit imaged by the second imaging unit, an illumination unit for illuminating the object of the second imaging unit, and a second imaging unit The illumination unit, the second imaging unit, and the object of the second imaging unit are arranged such that the incident angle which is a half of the angle formed by the straight line connecting the objects of the above exceeds the critical angle.

ここで、臨界角とは照明部から照射された膜への入射光が全反射する最小の角度のことであり、屈折光の屈折角が９０度となるときの最も小さな入射角であるので、スネルの法則に基づくと、屈折率ｎ１の媒質から屈折率ｎ２の媒質へ光が入射するとき、臨界角θは次式で示される。
θ＝ａｒｃ・ｓｉｎ（ｎ１／ｎ２）
電解質膜を間に挟んで対面する第１触媒層と第２触媒層の位置ズレを検査する場合、第１撮影部において、第１触媒層を撮影した第１触媒層撮影データから、第１触媒層の周縁部の境界線位置情報を取得し、第２撮影部において、第２触媒層の周縁部の電解質膜を照
射する光は全反射して第２撮影部に認識されるので、全反射した光を撮影することで、第１触媒層を撮影することなく、第２触媒層を撮影した第２触媒層撮影データから、第２触媒層の周縁部の境界線位置情報を取得し、第１触媒層の周縁部の境界線位置情報と、第２触媒層の周縁部の境界線位置情報と、を比較することになり、電解質膜を間に挟んで対面する第１触媒層と第２触媒層の位置ズレ情報を検査することとなる。 Here, the critical angle is the minimum angle at which the incident light to the film irradiated from the illumination unit is totally reflected, and is the smallest incident angle when the refraction angle of the refracted light is 90 degrees, Based on Snell's law, when light is incident from a medium of refractive index n1 to a medium of refractive index n2, the critical angle θ is expressed by the following equation.
θ = arc · sin (n1 / n2)
When inspecting the positional deviation of the first catalyst layer and the second catalyst layer facing each other with the electrolyte membrane interposed therebetween, the first imaging unit photographs the first catalyst layer from the first catalyst layer imaging data, the first catalyst The boundary line position information of the peripheral portion of the layer is acquired, and in the second imaging unit, the light irradiating the electrolyte membrane at the peripheral portion of the second catalyst layer is totally reflected and recognized by the second imaging unit, so that the total reflection is By capturing the projected light, the border line position information of the peripheral portion of the second catalyst layer is acquired from the second catalyst layer imaging data obtained by imaging the second catalyst layer without capturing the first catalyst layer, and (1) The boundary line position information of the peripheral portion of the catalyst layer and the boundary line position information of the peripheral portion of the second catalyst layer are compared, and the first catalyst layer and the second catalyst layer facing each other with the electrolyte membrane interposed therebetween The positional displacement information of the catalyst layer will be inspected.

本発明の触媒層形成検査装置は、第１触媒層の境界線位置情報を、第１撮影部で、第２触媒層の境界線位置情報を、照明部から照射した光の電解質膜での反射光を認識するように配置した第２撮影部で、それぞれ取得し、電解質膜を間に挟んで対面する第１触媒層と第２触媒層の位置ズレを検査する。 In the catalyst layer formation inspection apparatus of the present invention, the electrolyte film reflects the light irradiated from the illumination unit of the boundary line position information of the first catalyst layer in the first imaging unit and the boundary line position information of the second catalyst layer from the illumination unit. In the second imaging unit arranged to recognize light, positional deviations of the first catalyst layer and the second catalyst layer, which are obtained respectively and face each other across the electrolyte membrane, are inspected.

こうすることによって、第２撮影部においては、可視光を照射する安価な照明部と、可視光を認識する安価な撮影機を用い、触媒層形成検査装置を安価に構成することができ、また、触媒層の位置ズレ検査量が、触媒層内に厚みムラや、触媒層の薄層化に対応でき、第１触媒層と第２触媒層の境界線位置情報の位置を、それぞれ区別をすることができるので、塗工時の塗工位置の調整を行なうことが容易になる。 By doing this, in the second imaging unit, the catalyst layer forming inspection apparatus can be configured inexpensively using an inexpensive illumination unit that emits visible light and an inexpensive imaging device that recognizes visible light. The displacement inspection amount of the catalyst layer can correspond to thickness unevenness and thinning of the catalyst layer in the catalyst layer, and the position of boundary line position information of the first catalyst layer and the second catalyst layer can be distinguished, respectively. It becomes easy to adjust the coating position at the time of coating.

本発明の実施の形態１に係る触媒層形成検査装置を模式的に示す断面図Sectional view schematically showing a catalyst layer formation inspection apparatus according to Embodiment 1 of the present invention 本発明の実施の形態１に係る触媒層を電解質膜に対して垂直方向からみた上面図The top view which looked at the catalyst layer concerning Embodiment 1 of the present invention from the perpendicular direction to an electrolyte membrane 本発明の実施の形態１に係る触媒層形成検査装置の照明部と第２撮影部を中心として模式的に示す断面図Sectional drawing which shows typically the illumination part of the catalyst layer forming test | inspection apparatus which concerns on Embodiment 1 of this invention, and a 2nd imaging | photography part 本発明の実施の形態２に係る触媒層形成検査装置を模式的に示す断面図Sectional view schematically showing a catalyst layer formation inspection apparatus according to Embodiment 2 of the present invention 本発明の実施の形態３に係る触媒層形成検査装置を模式的に示す断面図Sectional view schematically showing a catalyst layer formation inspection apparatus according to Embodiment 3 of the present invention 本発明の実施の形態４に係る触媒層形成検査装置を模式的に示す断面図Sectional view schematically showing a catalyst layer formation inspection apparatus according to Embodiment 4 of the present invention

第１の発明は、一方の面のみに第１触媒層が塗布形成された電解質膜の第１触媒層を撮影した第１撮影画像データを取得する第１撮影部と、第１撮影画像データを基に、第１触媒層周縁部の境界線の位置情報を得る第１撮影画像データに基づく第１触媒層周縁部の境界線位置情報取得部と、一方の面に第１触媒層が塗布形成された電解質膜の他方の面に、第２触媒層を、電解質膜を間に挟んで第２触媒層と第１触媒層とが対面するように塗布形成する第２触媒層塗工部と、第２触媒層と、第２触媒層周縁部の電解質膜とを照射する照明部と、第２触媒層で反射した光と第２触媒層周縁部の電解質膜で反射した光を撮影した第２撮影画像データを取得する第２撮影部と、第２撮影画像データを基に、第２触媒層周縁部の境界線の位置情報を得る第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部と、第１撮影画像データに基づく第１触媒層周縁部の境界線位置情報取得部で得られた第１触媒層周縁部の境界線の位置情報と、第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部で得られた第２触媒層周縁部の境界線の位置情報とを基に、電解質膜を間に挟んで対面する第１触媒層周縁部の境界線と、第２触媒層周縁部の境界線との位置ズレの大きさを計算する触媒層位置ズレ計算部と、を有し、触媒層位置ズレ計算部で計算された位置ズレの大きさが所定値を超えていれば、異常と判定する、電解質膜を間に挟んで対面する第１触媒層周縁部の境界線と第２触媒層周縁部の境界線の状態もしくは異常を報知する、または運転を停止する、触媒層周縁部の境界線位置検査部を有する、触媒層形成検査装置である。 According to a first aspect of the present invention, there is provided a first imaging unit for acquiring first photographed image data obtained by photographing a first catalyst layer of an electrolyte membrane in which the first catalyst layer is formed on only one surface. Based on the first photographed image data for obtaining the position information of the boundary of the first catalyst layer peripheral portion The boundary line position information acquiring portion of the first catalyst layer peripheral portion based on the first photographed image data, and the first catalyst layer is formed on one surface A second catalyst layer coated portion coated and formed on the other surface of the electrolyte membrane so that the second catalyst layer and the first catalyst layer face each other with the electrolyte membrane interposed therebetween; a second catalyst layer, the photographed and illumination unit for irradiating an electrolyte membrane of the second catalyst layer peripheral portion, a light and reflected by the second catalyst layer light reflected by the electrolytic film of the second catalyst layer rim portion 2 Based on the second imaging unit for acquiring captured image data and the second captured image data, position information of the boundary of the second catalyst layer peripheral portion is obtained [2] The first catalyst layer periphery obtained by the boundary line position information acquiring unit of the second catalyst layer peripheral portion based on the photographed image data and the boundary line position information acquiring unit of the first catalyst layer peripheral portion based on the first photographed image data Based on the position information of the boundary of the part and the position information of the boundary of the second catalyst layer peripheral part obtained by the boundary line position information acquisition part of the second catalyst layer peripheral part based on the second captured image data, It has a catalyst layer positional deviation calculation unit for calculating the magnitude of positional deviation between the boundary of the first catalyst layer peripheral part facing the electrolyte membrane and the boundary of the second catalyst layer peripheral part. If the size of the positional deviation calculated by the catalyst layer positional deviation calculation unit exceeds a predetermined value, it is determined as abnormal, and the boundary between the first catalyst layer peripheral portion and the electrolyte membrane interposed therebetween and (2) The catalyst layer circumference to notify the condition or abnormality of the boundary of the catalyst layer peripheral portion or to stop the operation Having a boundary line position inspection unit parts, a catalyst layer forming inspection apparatus.

上記構成において、第１撮影部は第１触媒層の周縁部の境界線位置情報を取得し、照明部が、第２触媒層と、第２触媒層の周縁部の電解質膜に光を照射し、第２触媒層の周縁部の電解質膜からの反射光を認識し、電解質膜での屈折光を認識しなくなるので、第２撮影部は電解質膜を間に挟んで対面する第１触媒層の外観を認識することがなく、第２撮影部において、第２触媒層と第２触媒層の周縁部の電解質膜の境界線位置情報を取得する。 In the above configuration, the first imaging unit acquires boundary line position information of the peripheral portion of the first catalyst layer, and the lighting unit irradiates light on the second catalyst layer and the electrolyte membrane on the peripheral portion of the second catalyst layer. Since the reflected light from the electrolyte membrane at the peripheral portion of the second catalyst layer is recognized and the refracted light at the electrolyte membrane is not recognized, the second imaging unit is opposed to the first catalyst layer with the electrolyte membrane interposed therebetween. Without recognizing the appearance, the second imaging unit acquires boundary line position information of the second catalyst layer and the electrolyte membrane at the peripheral portion of the second catalyst layer.

こうすることによって、第１触媒層の周縁部の境界線位置情報と、第２触媒層周縁部の境界線位置情報とを比較することができ、電解質膜を間に挟んで対面する第１触媒層と第２触媒層の位置ズレ量を検査することができる。 By doing this, the boundary position information of the peripheral portion of the first catalyst layer and the boundary position information of the peripheral portion of the second catalyst layer can be compared, and the first catalyst facing with the electrolyte membrane interposed therebetween The amount of displacement between the bed and the second catalyst layer can be inspected.

第２の発明は、特に、第１の発明の触媒層形成検査装置において、電解質膜を間に挟んで対面する第１触媒層と第２触媒層が電解質膜の面に対して垂直方向から見て認識される第１触媒層と第２触媒層の少なくともどちらか一方の周縁部の境界線で形成される第１触媒層と第２触媒層のシルエットを撮影した第３撮影画像データを取得する第３撮影部と、第３撮影画像データを基に、シルエットのシルエット周縁部の境界線の位置情報を得る第３撮影画像データに基づくシルエット周縁部の境界線位置情報取得部と、第１撮影画像データに基づく第１触媒層周縁部の境界線位置情報取得部で得られた第１触媒層周縁部の境界線の位置情報と、第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部で得られた第２触媒層周縁部の境界線の位置情報とを基に、シルエット周縁部の境界線の位置情報を得る第１撮影画像データと第２撮影画像データに基づくシルエット周縁部の境界線位置情報取得部を、さらに有し、触媒層周縁部の境界線位置検査部は、第３撮影画像データに基づくシルエット周縁部の境界線位置情報取得部で得られた第３撮影画像データに基づくシルエット周縁部の境界線位置情報と、第１撮影画像データと第２撮影画像データに基づくシルエット周縁部の境界線位置情報とを基に、シルエット周縁部の境界線位置情報のズレの大きさを計算するシルエット周縁部の境界線位置情報のズレ計算部と、を有し、シルエット周縁部の境界線位置情報のズレ計算部で計算されたシルエット周縁部の境界線位置情報のズレの大きさが所定値を超えていれば、異常と判定する、シルエット周縁部の境界線の状態もしくは異常を報知する、または運転を停止する、触媒層形成検査装置である。 According to a second aspect of the present invention, in the inspection apparatus for forming a catalyst layer according to the first aspect of the present invention, in particular, the first catalyst layer and the second catalyst layer facing each other with the electrolyte membrane interposed therebetween are viewed perpendicularly to the surface of the electrolyte membrane. Obtaining a third photographed image data obtained by photographing the silhouette of the first catalyst layer and the second catalyst layer formed by the boundary between at least one of the first catalyst layer and the second catalyst layer recognized A third imaging unit, a boundary position information acquisition unit for a silhouette peripheral edge based on third imaging image data for obtaining position information of a boundary of a silhouette peripheral edge based on the third imaging image data, and a first imaging Position information of the boundary of the first catalyst layer peripheral edge obtained by the boundary line position information acquisition unit of the first catalyst layer peripheral edge based on the image data and the boundary of the second catalyst layer peripheral portion based on the second photographed image data Peripheral portion of the second catalyst layer obtained by the line position information obtaining unit The first captured image data for obtaining position information of the boundary of the silhouette peripheral portion based on the position information of the boundary and a boundary position information acquisition unit for the silhouette peripheral portion based on the second captured image data; The boundary position inspection unit of the catalyst layer peripheral portion is boundary position information of the silhouette peripheral portion based on the third photographed image data obtained by the boundary position information acquiring unit of the silhouette peripheral portion based on the third photographed image data; Boundary position information of the silhouette peripheral edge which calculates the size of deviation of boundary position information of the silhouette peripheral edge based on the first photographed image data and the boundary position information of the silhouette peripheral edge based on the second photographed image data If the size of the deviation of the boundary line position information of the silhouette peripheral edge calculated by the deviation calculation unit of the boundary line position information of the silhouette peripheral edge exceeds a predetermined value And determining, notifying the state or abnormal silhouette periphery border, or stopping the operation, a catalyst layer forming inspection apparatus.

上記構成において、第３撮影部は、電解質膜を間に挟んで対面する第１触媒層と第２触媒層の触媒層シルエットの周縁部の境界線位置情報を取得し、第１の発明で取得した第１触媒層の周縁部の境界線位置情報と、第２触媒層の周縁部の境界線位置情報とを比較することで計算される電解質膜を間に挟んで対面する第１触媒層と第２触媒層の触媒層シルエットの周縁部の境界線位置情報を取得する。 In the above configuration, the third imaging unit acquires boundary line position information of peripheral portions of the first catalyst layer and the catalyst layer silhouette of the second catalyst layer facing each other with the electrolyte membrane interposed therebetween, and is acquired in the first invention. The first catalyst layer facing with the electrolyte membrane interposed therebetween, which is calculated by comparing boundary position information of the peripheral portion of the first catalyst layer with boundary position information of the peripheral portion of the second catalyst layer Boundary position information of the peripheral portion of the catalyst layer silhouette of the second catalyst layer is acquired.

こうすることによって、第３撮影部で得られた電解質膜を間に挟んで対面する第１触媒層と第２触媒層のシルエットの周縁部の境界線位置情報と、計算された触媒層シルエットの位置情報と比較することができ、第３撮影部で撮影された触媒層シルエットの周縁部の境界線位置情報と、計算された触媒層シルエットとの整合性を検査することができる。 By doing this, boundary line position information of the peripheral portions of the silhouettes of the first catalyst layer and the second catalyst layer facing each other across the electrolyte membrane obtained by the third imaging unit, and the calculated catalyst layer silhouette It is possible to compare the positional information and to check the consistency between the boundary position information of the peripheral portion of the catalyst layer silhouette photographed by the third imaging unit and the calculated catalyst layer silhouette.

第３の発明は、一方の面のみに第１触媒層が塗布形成された電解質膜の第１触媒層を撮影した第１撮影画像データを取得する第１撮影部と、第１撮影画像データを基に、第１触媒層周縁部の境界線の位置情報を得る第１撮影画像データに基づく第１触媒層周縁部の境界線位置情報取得部と、一方の面に第１触媒層が塗布形成された電解質膜の他方の面に、第２触媒層を、電解質膜を間に挟んで第２触媒層と第１触媒層とが対面するように塗布形成する第２触媒層塗工部と、電解質膜を間に挟んで対面する第１触媒層と第２触媒層が電解質膜の面に対して垂直方向から見て認識される第１触媒層と第２触媒層の少なくともどちらか一方の周縁部の境界線で形成される第１触媒層と第２触媒層のシルエットを撮影した第３撮影画像データを取得する第３撮影部と、第３撮影画像データを基に、シルエットのシルエット周縁部の境界線の位置情報を得る第３撮影画像データに基づくシルエット周縁部の境界線位置情報取得部と、第１撮影画像データに基づく第１触媒層周縁部の境界線
位置情報取得部で得られた第１触媒層周縁部の境界線の位置情報と、第３撮影画像データに基づくシルエット周縁部の境界線位置情報取得部で得られた第３撮影画像データに基づくシルエット周縁部の境界線位置情報と、を基に、電解質膜を間に挟んで対面する第１触媒層周縁部の境界線と、シルエット周縁部の境界線との位置ズレの大きさを計算する触媒層位置ズレ計算部と、を有し、触媒層位置ズレ計算部で計算された位置ズレの大きさが所定値を超えていれば、異常と判定する、電解質膜を間に挟んで対面する第１触媒層周縁部の境界線とシルエット周縁部の境界線の状態もしくは異常を報知する、または運転を停止する、触媒層周縁部の境界線位置検査部を有する、触媒層形成検査装置である。 According to a third aspect of the present invention, there is provided a first photographing unit for acquiring first photographed image data obtained by photographing a first catalyst layer of an electrolyte membrane in which the first catalyst layer is formed on only one surface. Based on the first photographed image data for obtaining the position information of the boundary of the first catalyst layer peripheral portion The boundary line position information acquiring portion of the first catalyst layer peripheral portion based on the first photographed image data, and the first catalyst layer is formed on one surface A second catalyst layer coated portion coated and formed on the other surface of the electrolyte membrane so that the second catalyst layer and the first catalyst layer face each other with the electrolyte membrane interposed therebetween; The periphery of at least one of the first catalyst layer and the second catalyst layer in which the first catalyst layer and the second catalyst layer facing each other across the electrolyte membrane are recognized when viewed from the direction perpendicular to the surface of the electrolyte membrane Acquiring third photographed image data obtained by photographing the silhouettes of the first catalyst layer and the second catalyst layer formed by A third imaging unit, a boundary position information acquisition unit for a silhouette peripheral edge based on third imaging image data for obtaining position information of a boundary of a silhouette peripheral edge based on the third imaging image data, and a first imaging Position information of the boundary of the first catalyst layer peripheral edge obtained by the boundary line position information acquisition unit of the first catalyst layer peripheral portion based on the image data and boundary line positional information of the silhouette peripheral edge based on the third captured image data Based on the boundary position information of the silhouette peripheral edge based on the third captured image data obtained by the acquisition unit, the boundary of the first catalyst layer peripheral edge facing across the electrolyte membrane, and the silhouette peripheral edge And a catalyst layer positional deviation calculation unit for calculating the magnitude of positional deviation with the boundary line of the boundary, and the magnitude of the positional deviation calculated by the catalyst layer positional deviation calculation unit is abnormal if the magnitude of the positional deviation exceeds a predetermined value. It is determined that the electrolyte membrane is A catalyst layer formation inspection apparatus having a boundary position inspection unit for reporting the condition or abnormality of the boundary between the facing first catalyst layer peripheral edge and the boundary between silhouette peripheral edge or stopping operation It is.

上記構成において、第１撮影部は第１触媒層の周縁部の境界線位置情報を取得し、第３撮影部は電解質膜を間に挟んで対面する第１触媒層と第２触媒層の触媒層シルエットの周縁部の境界線位置情報を取得する。 In the above configuration, the first imaging unit acquires boundary position information of the peripheral portion of the first catalyst layer, and the third imaging unit is a catalyst of the first catalyst layer and the second catalyst layer facing each other with the electrolyte membrane interposed therebetween. Acquire the boundary position information of the periphery of the layer silhouette.

こうすることによって、第１触媒層周縁部の境界線位置情報と、電解質膜を間に挟んで対面する第１触媒層と第２触媒層の触媒層シルエットの周縁部の境界線位置情報を比較することができ、電解質膜を間に挟んで対面する第１触媒層と第２触媒層の位置ズレ量を検査することができる。 By doing this, the boundary position information of the peripheral portion of the first catalyst layer and the boundary position information of the peripheral portion of the catalyst layer silhouette of the first and second catalyst layers facing each other across the electrolyte membrane are compared It is possible to check the amount of positional deviation between the first catalyst layer and the second catalyst layer facing each other with the electrolyte membrane interposed therebetween.

第４の発明は、電解質膜を間に挟んで、一方の面に第１触媒層が、他方の面に第２触媒層が塗布形成された電解質膜の第２触媒層と、第２触媒層の周縁部の電解質膜と、を照射する照明部と、第２触媒層と、第２触媒層で反射した光と第２触媒層周縁部の電解質膜で反射した光を撮影した第２撮影画像データを取得する第２撮影部と、第２撮影画像データを基に、第２触媒層周縁部の境界線の位置情報を得る第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部と、電解質膜を間に挟んで対面する第１触媒層と第２触媒層が電解質膜の面に対して垂直方向から見て認識される第１触媒層と第２触媒層の少なくともどちらか一方の周縁部の境界線で形成される第１触媒層と第２触媒層のシルエットを撮影した第３撮影画像データを取得する第３撮影部と、第３撮影画像データを基に、シルエットのシルエット周縁部の境界線の位置情報を得る第３撮影画像データに基づくシルエット周縁部の境界線位置情報取得部と、第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部で得られた第２触媒層周縁部の境界線の位置情報と、第３撮影画像データに基づくシルエット周縁部の境界線位置情報取得部で得られた第３撮影画像データに基づくシルエット周縁部の境界線位置情報と、を基に、電解質膜を間に挟んで対面する第１触媒層周縁部の境界線と、シルエット周縁部の境界線との位置ズレの大きさを計算する触媒層位置ズレ計算部と、を有し、触媒層位置ズレ計算部で計算された位置ズレの大きさが所定値を超えていれば、異常と判定する、電解質膜を間に挟んで対面する第２触媒層周縁部の境界線とシルエット周縁部の境界線の状態もしくは異常を報知する、または運転を停止する、触媒層周縁部の境界線位置検査部を有する、触媒層形成検査装置である。 According to a fourth aspect of the present invention, there is provided a second catalyst layer of an electrolyte membrane in which a first catalyst layer is coated on one side and a second catalyst layer is formed on the other side, with the electrolyte membrane interposed therebetween, and a second catalyst layer. an electrolyte membrane of the periphery of an illumination unit that irradiates a second catalyst layer, a second imaged image obtained by imaging light and reflected by the second catalyst layer light reflected by the electrolytic film of the second catalyst layer periphery The boundary position of the second catalyst layer peripheral portion based on the second photographed image data for obtaining the position information of the boundary of the second catalyst layer peripheral portion based on the second imaging unit for acquiring data and the second photographed image data At least at least the first catalyst layer and the second catalyst layer in which the information acquiring unit and the first catalyst layer and the second catalyst layer facing each other with the electrolyte membrane interposed therebetween are recognized when viewed from the direction perpendicular to the surface of the electrolyte membrane. Third photographed image data obtained by photographing the silhouette of the first catalyst layer and the second catalyst layer formed by the border line of one of the peripheral portions A boundary position information acquisition unit of a silhouette peripheral portion based on third photographed image data for obtaining position information of a boundary of a silhouette peripheral portion of a silhouette based on third photographed image data for acquiring Position information of the boundary of the second catalyst layer peripheral edge obtained by the boundary line position information acquisition unit of the second catalyst layer peripheral edge based on the second photographed image data and boundary of the silhouette peripheral edge based on the third photographed image data And a boundary line of the first catalyst layer peripheral edge facing each other across the electrolyte membrane based on boundary line position information of the silhouette peripheral edge based on the third captured image data obtained by the line position information acquiring unit; And a catalyst layer displacement calculation unit for calculating the displacement of the silhouette peripheral portion with respect to the boundary line, and the magnitude of the displacement calculated by the catalyst displacement calculation unit exceeds a predetermined value. For example, the electrolyte membrane A catalyst having a boundary position inspection unit of the catalyst layer peripheral edge for reporting the state or abnormality of the boundary between the second catalyst layer peripheral edge and the silhouette peripheral edge facing each other, or stopping operation It is a layer formation inspection device.

上記構成において、第２撮影部は第２触媒層の周縁部の境界線位置情報を取得し、第３撮影部は電解質膜を間に挟んで対面する第１触媒層と第２触媒層の触媒層シルエットの周縁部の境界線位置情報を取得する。 In the above configuration, the second imaging unit acquires boundary line position information of the peripheral portion of the second catalyst layer, and the third imaging unit is a catalyst of the first catalyst layer and the second catalyst layer facing each other with the electrolyte membrane interposed therebetween. Acquire the boundary position information of the periphery of the layer silhouette.

第５の発明は、特に、第１から第４のいずれか１つの発明の触媒層形成検査装置において、電解質膜を間に挟んで第２触媒層塗工部と対面する位置に塗工ローラが配置され、塗
工ローラの外周面に沿って、第１触媒層が塗布形成された電解質膜が搬送される、触媒層形成検査装置である。 In the fifth invention, in particular, in the catalyst layer forming inspection device according to any one of the first to fourth inventions, the coating roller is disposed at a position facing the second catalyst layer coating portion with the electrolyte membrane interposed therebetween. It is a catalyst layer formation inspection apparatus which is arrange | positioned and the electrolyte membrane by which the 1st catalyst layer was apply-formed is conveyed along the outer peripheral surface of a coating roller.

上記構成において、電解質膜が塗工ローラに接触し、電解質膜の位置が安定する。こうすることによって、塗工部において電解質膜へ均一な塗工を行なうことができる。 In the above configuration, the electrolyte membrane contacts the coating roller, and the position of the electrolyte membrane is stabilized. By doing this, it is possible to perform uniform coating on the electrolyte membrane in the coating section.

第６の発明は、一方の面のみに第１触媒層が塗布形成された電解質膜の第１触媒層を撮影した第１撮影画像データを取得する第１撮影部と、第１撮影画像データを基に、第１触媒層周縁部の境界線の位置情報を得る第１撮影画像データに基づく第１触媒層周縁部の境界線位置情報取得部と、一方の面に第１触媒層が塗布形成された電解質膜の他方の面に、第２触媒層を、電解質膜を間に挟んで第２触媒層と第１触媒層とが対面するように塗布形成する第２触媒層塗工部と、第２触媒層と、第２触媒層周縁部の電解質膜とを照射する照明部と、第２触媒層で反射した光と第２触媒層周縁部の電解質膜で反射した光を撮影した第２撮影画像データを取得する第２撮影部と、第２撮影画像データを基に、第２触媒層周
縁部の境界線の位置情報を得る第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部と、第１撮影画像データに基づく第１触媒層周縁部の境界線位置情報取得部で得られた第１触媒層周縁部の境界線の位置情報と、第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部で得られた第２触媒層周縁部の境界線の位置情報とを基に、電解質膜を間に挟んで対面する第１触媒層周縁部の境界線と、第２触媒層周縁部の境界線との位置ズレの大きさを計算する触媒層位置ズレ計算部と、を有し、触媒層位置ズレ計算部で計算された位置ズレの大きさが所定値を超えていれば、異常と判定する、電解質膜を間に挟んで対面する第１触媒層周縁部の境界線と第２触媒層周縁部の境界線の状態もしくは異常を報知する、または運転を停止する、触媒層周縁部の境界線位置の検査方法である。 In a sixth aspect of the present invention, there is provided a first photographing unit for acquiring first photographed image data obtained by photographing a first catalyst layer of an electrolyte membrane in which the first catalyst layer is formed on only one surface. Based on the first photographed image data for obtaining the position information of the boundary of the first catalyst layer peripheral portion The boundary line position information acquiring portion of the first catalyst layer peripheral portion based on the first photographed image data, and the first catalyst layer is formed on one surface A second catalyst layer coated portion coated and formed on the other surface of the electrolyte membrane so that the second catalyst layer and the first catalyst layer face each other with the electrolyte membrane interposed therebetween; a second catalyst layer, the photographed and illumination unit for irradiating an electrolyte membrane of the second catalyst layer peripheral portion, a light and reflected by the second catalyst layer light reflected by the electrolytic film of the second catalyst layer rim portion 2 Based on the second imaging unit for acquiring captured image data and the second captured image data, position information of the boundary of the second catalyst layer peripheral portion is obtained [2] The first catalyst layer periphery obtained by the boundary line position information acquiring unit of the second catalyst layer peripheral portion based on the photographed image data and the boundary line position information acquiring unit of the first catalyst layer peripheral portion based on the first photographed image data Based on the position information of the boundary of the part and the position information of the boundary of the second catalyst layer peripheral part obtained by the boundary line position information acquisition part of the second catalyst layer peripheral part based on the second captured image data, It has a catalyst layer positional deviation calculation unit for calculating the magnitude of positional deviation between the boundary of the first catalyst layer peripheral part facing the electrolyte membrane and the boundary of the second catalyst layer peripheral part. If the size of the positional deviation calculated by the catalyst layer positional deviation calculation unit exceeds a predetermined value, it is determined as abnormal, and the boundary between the first catalyst layer peripheral portion and the electrolyte membrane interposed therebetween and (2) The catalyst layer circumference to notify the condition or abnormality of the boundary of the catalyst layer peripheral portion or to stop the operation Parts is a method of inspecting the boundary line position.

以下、本発明の実施の形態について、図面を参照しながら説明する。なお、本発明の実施の形態によって本発明が限定されるものではない。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. The present invention is not limited by the embodiments of the present invention.

（実施の形態１）
図１は、本発明の実施の形態１に係る触媒層形成検査装置Ａ１０１を模式的に示す断面図である。 Embodiment 1
FIG. 1 is a cross-sectional view schematically showing a catalyst layer formation inspection apparatus A101 according to Embodiment 1 of the present invention.

図１に示す触媒層形成検査装置Ａ１０１は、第１触媒層２が間欠塗工された電解質膜１を搬送し、電解質膜１に対して第１触媒層２および第２触媒層を間欠塗工し、一方の面のみに第１触媒層２が塗布形成された電解質膜１の第１触媒層２を撮影した第１撮影画像データを取得する第１撮影部９と、第１撮影画像データを基に、第１触媒層周縁部の境界線の位置情報を得る第１撮影画像データに基づく第１触媒層周縁部の境界線位置情報取得部（図示せず）と、一方の面に第１触媒層が塗布形成された電解質膜１の他方の面に、第２触媒層３を、電解質膜１を間に挟んで第２触媒層３と第１触媒層２とが対面するように塗布形成する塗工部７と、第２触媒層３と、第２触媒層周縁部の電解質膜１とを波長４１０から７１０ｎｍの可視光が照射する照明部８と、第２触媒層からの反射光１５と第２触媒層周縁部の電解質膜からの反射光１７を撮影した第２撮影画像データを取得する波長４１０から７１０ｎｍの可視光を認識する第２撮影部１０と、第２撮影画像データを基に、第２触媒層周縁部の境界線の位置情報を得る第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部（図示せず）と、第１撮影画像データに基づく第１触媒層周縁部の境界線位置情報取得部で得られた第１触媒層周縁部の境界線の位置情報と、第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部で得られた第２触媒層周縁部の境界線の位置情報とを基に、電解質膜１を間に挟んで対面する第１触媒層周縁部の境界線と、第２触媒層周縁部の境界線との位置ズレの大きさを計算する触媒層位置ズレ計算部（図示せず）と、を有し、触媒層位置ズレ計算部で計算された位置ズレの大きさが所定値を超えていれば、異常と判定する、電解質膜１を間に挟んで対面する第１触媒層周縁部の境界線と第２触媒層周縁部の境界線の状態もしくは異常を報知する、または運転を停止する、触媒層周縁部の境界線位置検査部を有し、図２に示すように、電解質膜１を間に挟んで対面する第１触媒層２と第２触媒層３が電解質膜１の面に対して垂直方向から見て認識される第１触媒層２と第２触媒層３の少なくともどちらか一方の周縁部の境界線で形成さ
れる第１触媒層２と第２触媒層３の触媒層シルエット５を撮影した第３撮影画像データを取得する第３撮影部１１と、第３撮影画像データを基に、シルエットのシルエット周縁部の境界線の位置情報を得る第３撮影画像データに基づくシルエット周縁部の境界線位置情報取得部と、第１撮影画像データに基づく第１触媒層周縁部の境界線位置情報取得部で得られた第１触媒層周縁部の境界線の位置情報と、第２撮影画像データに基づく第２触媒層周縁部の境界線位置情報取得部で得られた第２触媒層周縁部の境界線の位置情報とを基に、シルエット周縁部の境界線の位置情報を得る第１撮影画像データと第２撮影画像データに基づくシルエット周縁部の境界線位置情報取得部（図示せず）を、さらに有し、触媒層周縁部の境界線位置検査部は、第３撮影画像データに基づくシルエット周縁部の境界線位置情報取得部で得られた第３撮影画像データに基づくシルエット周縁部の境界線位置情報と、第１撮影画像データと第２撮影画像データに基づくシルエット周縁部の境界線位置情報とを基に、シルエット周縁部の境界線位置情報のズレの大きさを計算するシルエット周縁部の境界線位置情報のズレ計算部と、を有し、シルエット周縁部の境界線位置情報のズレ計算部で計算されたシルエット周縁部の境界線位置情報のズレの大きさが所定値を超えていれば、異常と判定する、シルエット周縁部の境界線の状態もしくは異常を報知する、または運転を停止する、触媒層形成検査装置である。 A catalyst layer formation inspection apparatus A101 shown in FIG. 1 conveys the electrolyte membrane 1 to which the first catalyst layer 2 is intermittently applied, and intermittently applies the first catalyst layer 2 and the second catalyst layer to the electrolyte membrane 1. A first imaging unit 9 for acquiring first photographed image data obtained by photographing the first catalyst layer 2 of the electrolyte membrane 1 having the first catalyst layer 2 coated and formed only on one side, and the first photographed image data A boundary line position information acquiring unit (not shown) of the first catalyst layer peripheral edge portion based on first photographed image data for obtaining position information of the boundary line of the first catalyst layer peripheral edge; The second catalyst layer 3 is coated on the other surface of the electrolyte membrane 1 on which the catalyst layer is applied and formed so that the second catalyst layer 3 and the first catalyst layer 2 face each other with the electrolyte membrane 1 interposed therebetween. Of visible light with a wavelength of 410 to 710 nm are applied to the coated portion 7, the second catalyst layer 3, and the electrolyte membrane 1 at the peripheral portion of the second catalyst layer Recognizing an illumination unit 8, the visible light 710nm wavelength 410 to obtain a second photographic image data obtained by photographing the reflected light 17 and reflected light 15 from the electrolyte membrane of the second catalyst layer peripheral portion of the second catalyst layer that Boundary position information of the second catalyst layer peripheral portion based on the second photographed image data for obtaining position information of the boundary of the second catalyst layer peripheral portion based on the second imaging unit 10 and the second photographed image data Position information of the boundary of the first catalyst layer peripheral portion obtained by the boundary position information acquiring unit of the first catalyst layer peripheral portion based on the first photographed image data, and the second photographed image First catalyst facing the electrolyte membrane 1 on the basis of the position information of the boundary of the second catalyst layer peripheral edge obtained by the boundary line position information acquisition unit of the second catalyst layer peripheral edge based on the data Measure the size of the positional deviation between the boundary of the layer peripheral edge and the boundary of the second catalyst layer peripheral edge The electrolyte membrane 1 has a catalyst layer positional deviation calculation unit (not shown), and if the magnitude of positional deviation calculated by the catalyst layer positional deviation calculation unit exceeds a predetermined value, the electrolyte membrane 1 is judged to be abnormal. The boundary position inspection unit of the catalyst layer peripheral portion reporting the state or abnormality of the boundary between the first catalyst layer peripheral portion facing the second catalyst layer peripheral portion and the second catalyst layer peripheral portion, or stopping the operation And the first catalyst layer 2 and the second catalyst layer 3 facing each other across the electrolyte membrane 1 as shown in FIG. Third photographed image data obtained by photographing the catalyst layer silhouette 5 of the first catalyst layer 2 and the second catalyst layer 3 formed by the boundary between the peripheral portions of at least one of the first catalyst layer 2 and the second catalyst layer 3 Based on the third imaging unit 11 to acquire and the third imaging image data, the peripheral portion of the silhouette of the silhouette The boundary position information acquisition unit of the silhouette peripheral portion based on the third captured image data for acquiring the position information of the boundary, and the boundary position information acquisition unit of the first catalyst peripheral portion based on the first captured image data Position information of the boundary of the first catalyst layer peripheral portion and position information of the boundary of the second catalyst layer peripheral portion obtained by the boundary line position information acquisition unit of the second catalyst layer peripheral portion based on the second captured image data And a boundary position information acquisition unit (not shown) for the silhouette peripheral edge based on the first captured image data and the second captured image data for obtaining position information of the boundary of the silhouette peripheral edge, The boundary position inspection unit of the catalyst layer peripheral portion is boundary position information of the silhouette peripheral portion based on the third photographed image data obtained by the boundary position information acquiring unit of the silhouette peripheral portion based on the third photographed image data; First captured image data and second A deviation calculation unit for boundary line position information of the silhouette peripheral edge, which calculates the size of the deviation of the boundary position information of the silhouette peripheral edge based on the boundary position information of the silhouette peripheral edge based on the shadow image data And if the size of the deviation of the boundary position information of the silhouette peripheral edge calculated by the deviation calculation unit of the boundary position information of the silhouette peripheral edge exceeds the predetermined value, the boundary of the silhouette peripheral edge is determined to be abnormal. It is a catalyst layer formation inspection device which reports the state or abnormality of a line or stops operation.

以上のように構成された本実施の形態の触媒層形成検査装置について、以下その動作、作用を説明する。 The operation and action of the catalyst layer formation inspection apparatus of the present embodiment configured as described above will be described below.

第１に、第１撮影部９に関する説明を述べる。第１撮影部９は第１触媒層２を認識し、第１触媒層２と、第１触媒層の周縁部の境界線位置情報を取得する。 First, the description regarding the first imaging unit 9 will be described. The first imaging unit 9 recognizes the first catalyst layer 2 and acquires boundary line position information of the first catalyst layer 2 and the peripheral portion of the first catalyst layer.

第２に、第２撮影部１０に関する説明を述べる。第２撮影部１０においては、第２撮影部１０と、第２撮影部１０によって撮影される第２撮影部の被写体とを結ぶ直線と、第２撮影部の被写体を照射する照明部８と、第２撮影部の被写体を結ぶ直線と、で成す角度の２分の１である入射角が、臨界角（たとえばフッ素系高分子電解質の場合３０度）を超えて、４５度となるように、照明部８と、第２撮影部１０と、第２撮影部の被写体と、を配置する。 Second, the description regarding the second imaging unit 10 will be described. In the second imaging unit 10, a straight line connecting the second imaging unit 10 and an object of the second imaging unit imaged by the second imaging unit 10, and an illumination unit 8 for irradiating the object of the second imaging unit. The incident angle, which is a half of the angle formed by the straight line connecting the subject in the second imaging unit, is 45 degrees beyond the critical angle (for example, 30 degrees in the case of fluorinated polymer electrolyte), The illumination unit 8, the second imaging unit 10, and the subject of the second imaging unit are arranged.

また、第２撮影部１０は、照明部８が、第２触媒層３と、第２触媒層の周縁部の電解質膜に光を照射し、第２触媒層３と、第２触媒層の周縁部の電解質膜の外観を認識し、このとき、図３に示すように、第２触媒層の周縁部の電解質膜からの反射光１７を認識し、電解質膜での屈折光１８を認識しなくなるので、第２撮影部１０は電解質膜１を間に挟んで対面する第１触媒層２の外観を認識することなく、第２触媒層３と、第２触媒層の周縁部の電解質膜１を認識し、第２触媒層３と、第２触媒層の周縁部の境界線位置情報を取得する。 In the second imaging unit 10, the illumination unit 8 applies light to the second catalyst layer 3 and the electrolyte membrane at the periphery of the second catalyst layer, and the second catalyst layer 3 and the periphery of the second catalyst layer The external appearance of the electrolyte membrane of the part is recognized, and at this time, as shown in FIG. 3, the reflected light 17 from the electrolyte membrane at the peripheral portion of the second catalyst layer is recognized and the refracted light 18 at the electrolyte membrane is not recognized. Therefore, without recognizing the appearance of the first catalyst layer 2 facing the second imaging unit 10 with the electrolyte membrane 1 interposed therebetween, the second imaging layer 10 and the electrolyte membrane 1 at the peripheral portion of the second catalyst layer are used. It recognizes and obtains boundary line position information of the second catalyst layer 3 and the peripheral portion of the second catalyst layer.

第３に、第３撮影部１１に関する説明を述べる。第３撮影部１１は電解質膜１を間に挟んで対面する第１触媒層２と第２触媒層３の触媒層シルエット５を認識し、その周縁部の境界線位置情報を取得する。 Third, the description regarding the third imaging unit 11 will be described. The third imaging unit 11 recognizes the catalyst layer silhouette 5 of the first catalyst layer 2 and the second catalyst layer 3 facing each other with the electrolyte membrane 1 interposed therebetween, and acquires boundary line position information of the peripheral portion thereof.

こうすることによって、第１撮影部９で取得した第１触媒層周縁部の境界線位置情報と、第２撮影部１０で取得した第２触媒層周縁部の境界線位置情報とを比較することができ、電解質膜１を間に挟んで対面する第１触媒層２と第２触媒層３の位置ズレ量を計算することができる。 By doing this, the boundary position information of the first catalyst layer peripheral portion acquired by the first imaging unit 9 is compared with the boundary position information of the second catalyst layer peripheral portion acquired by the second imaging unit 10. It is possible to calculate the amount of positional deviation between the first catalyst layer 2 and the second catalyst layer 3 facing each other with the electrolyte membrane 1 interposed therebetween.

また、第１撮影部９で取得した第１触媒層の周縁部の境界線位置情報と、第２撮影部１０で取得した第２触媒層の周縁部の境界線位置情報とを基に、電解質膜１を間に挟んで対面する第１触媒層と第２触媒層の触媒層シルエットの境界線位置情報を計算し、計算された触媒層シルエットの境界線位置情報と、第３撮影部１１で取得した電解質膜を間に挟んで対面する第１触媒層と第２触媒層の触媒層シルエット周縁部の境界線位置情報とを比較することができ、計算された触媒層シルエット周縁部の境界線位置情報と、第３撮影部１１で撮影された触媒層シルエット周縁部の境界線位置情報との整合性を検査することができる。 Further, based on the boundary position information of the peripheral portion of the first catalyst layer acquired by the first imaging unit 9 and the boundary position information of the peripheral portion of the second catalyst layer acquired by the second imaging unit 10, an electrolyte The boundary line position information of the catalyst layer silhouette of the first catalyst layer and the second catalyst layer facing each other across the membrane 1 is calculated, and the calculated boundary line position information of the catalyst layer silhouette and the third imaging unit 11 The boundary line position information of the periphery of the catalyst layer silhouette of the first catalyst layer and the second catalyst layer facing each other with the obtained electrolyte membrane interposed therebetween can be compared, and the calculated boundary line of the catalyst layer silhouette periphery The consistency between the position information and the boundary position information of the catalyst layer silhouette peripheral edge photographed by the third photographing unit 11 can be inspected.

なお、第２撮影部１０の撮影対象となる第２触媒層３および電解質膜１は、電解質膜１の搬送が安定している塗工ローラ上であってもよい。また、第２撮影部１０と第３撮影部１１の順序は逆であってもよい。また、第３撮影部１１は、第１触媒層２側からでも、第２触媒層３側からのどちらか一方でよいし、第４撮影部を設けて、両側から撮影してもよい。 The second catalyst layer 3 and the electrolyte membrane 1 to be photographed by the second photographing unit 10 may be on a coating roller in which the transport of the electrolyte membrane 1 is stable. In addition, the order of the second imaging unit 10 and the third imaging unit 11 may be reversed. Further, the third imaging unit 11 may be either from the first catalyst layer 2 side or from the second catalyst layer 3 side, or may be provided with a fourth imaging unit and may be photographed from both sides.

（実施の形態２）
本発明の実施の形態２に係る触媒層形成検査装置は、実施の形態１の触媒層形成検査装置に対して、第３撮影部１１を取り除いた触媒層形成検査装置である。 Second Embodiment
The catalyst layer formation inspection apparatus according to the second embodiment of the present invention is a catalyst layer formation inspection apparatus in which the third imaging unit 11 is removed from the catalyst layer formation inspection apparatus according to the first embodiment.

図４は、本発明の実施の形態２に係る触媒層形成検査装置Ｂ１０２を模式的に示す断面図である。図４に記載の触媒層形成検査装置Ｂ１０２は、第１触媒層の周縁部の境界線位置情報と、第２触媒層の周縁部の境界線位置情報を取得する。 FIG. 4 is a cross-sectional view schematically showing a catalyst layer formation inspection apparatus B102 according to a second embodiment of the present invention. The catalyst layer formation inspection apparatus B 102 described in FIG. 4 obtains boundary position information of the peripheral portion of the first catalyst layer and boundary position information of the peripheral portion of the second catalyst layer.

こうすることによって、電解質膜１を間に挟んで対面する第１触媒層の周縁部の境界線位置情報と、第２触媒層の周縁部の境界線の位置情報とを比較することができ、第１触媒層２と第２触媒層３の位置ズレ情報を計算することができる。 By doing this, it is possible to compare the boundary position information of the peripheral portion of the first catalyst layer facing each other across the electrolyte membrane 1 with the position information of the boundary of the peripheral portion of the second catalyst layer, The positional deviation information of the first catalyst layer 2 and the second catalyst layer 3 can be calculated.

（実施の形態３）
本発明の実施の形態３に係る触媒層形成検査装置は、実施の形態１の触媒層形成検査装置に対して、第２撮影部１０を取り除いた触媒層形成検査装置である。 Third Embodiment
The catalyst layer formation inspection apparatus according to the third embodiment of the present invention is a catalyst layer formation inspection apparatus in which the second imaging unit 10 is removed from the catalyst layer formation inspection apparatus according to the first embodiment.

図５は、本発明の実施の形態３に係る触媒層形成検査装置Ｃ１０３を模式的に示す断面図である。図５に記載の触媒層形成検査装置Ｃ１０３は、第１触媒層の周縁部の境界線位置情報と、電解質膜１を間に挟んで対面する第１触媒層２と第２触媒層３の触媒層シルエットの周縁部の境界線位置情報を取得する。 FIG. 5 is a cross-sectional view schematically showing a catalyst layer formation inspection apparatus C103 according to Embodiment 3 of the present invention. The catalyst layer formation inspection apparatus C103 described in FIG. 5 includes boundary line position information of the peripheral portion of the first catalyst layer, and catalysts of the first catalyst layer 2 and the second catalyst layer 3 facing each other with the electrolyte membrane 1 interposed therebetween. Acquire the boundary position information of the periphery of the layer silhouette.

こうすることによって、第１触媒層の周縁部の境界線位置情報と、電解質膜１を間に挟んで対面する第１触媒層２と第２触媒層３の触媒層シルエットの周縁部の境界線位置情報
とを比較することができ、第２触媒層３が第１触媒層２に包含されていない部分の、電解質膜を間に挟んで対面する第１触媒層２と第２触媒層３の位置ズレ情報を計算することができる。 By doing this, boundary line position information of the peripheral portion of the first catalyst layer, and a boundary line of the peripheral portion of the catalyst layer silhouette of the first catalyst layer 2 and the second catalyst layer 3 facing each other with the electrolyte membrane 1 interposed therebetween. The position information can be compared, and in the portion where the second catalyst layer 3 is not included in the first catalyst layer 2, the first catalyst layer 2 and the second catalyst layer 3 facing each other with the electrolyte membrane interposed therebetween. Position shift information can be calculated.

（実施の形態４）
実施の形態４に係る触媒層形成検査装置は、実施の形態１の触媒層形成検査装置に対して、第１撮影部９を取り除いた触媒層形成検査装置である。 Embodiment 4
The catalyst layer formation inspection apparatus according to the fourth embodiment is a catalyst layer formation inspection apparatus in which the first imaging unit 9 is removed from the catalyst layer formation inspection apparatus according to the first embodiment.

図６は、本発明の実施の形態４に係る触媒層形成検査装置Ｄ１０４を模式的に示す断面図である。図６に記載の触媒層形成検査装置Ｄ１０４は、第２触媒層の周縁部の境界線位置情報と、電解質膜１を間に挟んで対面する第１触媒層２と第２触媒層３の触媒層シルエットの周縁部の境界線位置情報を取得する。 FIG. 6 is a cross-sectional view schematically showing a catalyst layer formation inspection apparatus D104 according to Embodiment 4 of the present invention. The catalyst layer formation inspection apparatus D104 described in FIG. 6 includes boundary line position information of the peripheral portion of the second catalyst layer, and catalysts of the first catalyst layer 2 and the second catalyst layer 3 facing each other with the electrolyte membrane 1 interposed therebetween. Acquire the boundary position information of the periphery of the layer silhouette.

こうすることによって、第２触媒層３の周縁部の境界線位置情報と、電解質膜を間に挟んで対面する第１触媒層と第２触媒層の触媒層シルエットの周縁部の境界線位置情報とを比較することができ、第１触媒層２が第２触媒層３に包含されていない部分の、電解質膜を間に挟んで対面する第１触媒層２と第２触媒層３の位置ズレ情報を計算することができる。 By doing this, the boundary position information of the peripheral portion of the second catalyst layer 3 and the boundary position information of the peripheral portion of the catalyst layer silhouette of the first catalyst layer and the second catalyst layer facing each other with the electrolyte membrane interposed therebetween And the positional deviation of the first catalyst layer 2 and the second catalyst layer 3 facing each other across the electrolyte membrane in a portion where the first catalyst layer 2 is not included in the second catalyst layer 3. Information can be calculated.

なお、第２撮影部１０と第３撮影部１１の順序は逆であってもよい。 The order of the second imaging unit 10 and the third imaging unit 11 may be reversed.

以上のように、本発明に係る触媒層形成検査装置とその検査方法は、電解質膜を間に挟んで対面する触媒層を形成するにあたって、その触媒層の位置ズレ量を検査できる検査装置とその検査方法等に広く適用できる。 As described above, when the catalyst layer forming inspection apparatus and the inspection method according to the present invention form the catalyst layer facing each other with the electrolyte membrane in between, the inspection apparatus capable of inspecting the displacement amount of the catalyst layer and the same It can be widely applied to inspection methods and the like.

１電解質膜
２第１触媒層
３第２触媒層
５触媒層シルエット
７塗工部
８照明部
９第１撮影部
１０第２撮影部
１１第３撮影部
１５第２触媒層からの反射光
１７電解質膜からの反射光
１８電解質膜での屈折光
１０１触媒層形成検査装置Ａ
１０２触媒層形成検査装置Ｂ
１０３触媒層形成検査装置Ｃ
１０４触媒層形成検査装置Ｄ DESCRIPTION OF SYMBOLS 1 Electrolyte film 2 1st catalyst layer 3 2nd catalyst layer 5 catalyst layer silhouette 7 Coating part 8 Lighting part 9 1st imaging | photography part 10 2nd imaging | photography part 11 3rd imaging | photography part 15 Reflected light from a 2nd catalyst layer 17 Electrolyte Reflected light from membrane 18 Refracted light at electrolyte membrane 101 Catalyst layer formation inspection device A
102 Catalyst layer formation inspection device B
103 Catalyst layer formation inspection device C
104 Catalyst layer formation inspection device D

Claims

A first imaging unit for acquiring first photographed image data obtained by photographing the first catalyst layer of the electrolyte membrane in which the first catalyst layer is coated and formed only on one side;
A boundary line position information acquisition unit of a first catalyst layer peripheral edge portion based on first photographed image data for obtaining position information of a boundary line of the first catalyst layer peripheral edge based on the first photographed image data;
The second catalyst layer and the first catalyst layer are interposed between the second catalyst layer and the electrolyte membrane on the other surface of the electrolyte membrane on which the first catalyst layer is applied and formed on the one side. A second catalyst layer coated portion coated and formed so as to face each other;
An illumination unit configured to illuminate the second catalyst layer and an electrolyte membrane at a peripheral portion of the second catalyst layer;
A second imaging unit that acquires second photographed image data obtained by photographing the light reflected by the second catalyst layer and the light reflected by the electrolyte film at the peripheral portion of the second catalyst layer;
A boundary position information acquisition unit of a second catalyst layer peripheral edge based on second photographed image data for obtaining position information of a boundary of the second catalyst layer peripheral edge based on the second photographed image data;
Position information of the boundary of the first catalyst layer peripheral portion obtained by the boundary line position information acquisition unit of the first catalyst layer peripheral portion based on the first photographed image data; [2] Based on the position information of the boundary of the second catalyst layer peripheral edge obtained by the boundary line position information acquisition unit of the catalyst layer peripheral edge, the first catalyst layer peripheral edge facing with the electrolyte membrane interposed therebetween A catalyst layer positional deviation calculation unit for calculating the magnitude of positional deviation between the boundary of the portion and the boundary of the peripheral portion of the second catalyst layer;
If the magnitude of the positional deviation calculated by the catalyst layer positional deviation calculation unit exceeds a predetermined value,
Informing the state or abnormality of the boundary between the first catalyst layer peripheral edge facing the electrolyte membrane and the boundary between the second catalyst layer peripheral edge, which is determined to be abnormal, or stopping the operation The catalyst layer formation inspection apparatus which has a boundary position inspection part of a catalyst layer peripheral part.

In the first catalyst layer and the second catalyst layer, the first catalyst layer and the second catalyst layer facing each other with the electrolyte membrane interposed therebetween are recognized when viewed from the direction perpendicular to the surface of the electrolyte membrane A third imaging unit configured to acquire third imaging image data obtained by imaging a silhouette of the first catalyst layer and the second catalyst layer formed by a boundary of at least one of the peripheral portions;
A boundary position information acquisition unit of a silhouette peripheral portion based on the third photographed image data for obtaining position information of a boundary of the silhouette peripheral portion of the silhouette based on the third photographed image data;
The position information of the boundary of the first catalyst layer peripheral portion obtained by the boundary line position information acquisition unit of the first catalyst layer peripheral portion based on the first photographed image data, and the second based on the second photographed image data First photographed image data for obtaining position information of the boundary of the silhouette peripheral portion based on the position information of the boundary of the second catalyst layer peripheral edge obtained by the boundary position information acquisition unit of the catalyst layer peripheral portion; The image processing apparatus further includes a boundary position information acquisition unit of a silhouette peripheral portion based on the second captured image data,
The boundary position inspection unit of the catalyst layer peripheral portion is a boundary position of the silhouette peripheral portion based on the third photographed image data obtained by the boundary position information acquiring unit of the silhouette peripheral portion based on the third photographed image data The silhouette edge is calculated based on the information, the boundary position information of the silhouette edge based on the first captured image data and the second captured image data, and calculating a deviation of the boundary position information of the silhouette edge. A deviation calculation unit of boundary line position information of the unit;
If the size of the deviation of the boundary line position information of the silhouette peripheral part calculated by the deviation calculation unit of the boundary line position information of the silhouette peripheral part exceeds a predetermined value,
Determine the abnormality, notify the state or abnormality of the boundary of the silhouette peripheral portion, or stop the operation
The catalyst layer formation inspection apparatus according to claim 1.

A first imaging unit for acquiring first photographed image data obtained by photographing the first catalyst layer of the electrolyte membrane in which the first catalyst layer is coated and formed only on one side;
A boundary line position information acquisition unit of a first catalyst layer peripheral edge portion based on first photographed image data for obtaining position information of a boundary line of the first catalyst layer peripheral edge based on the first photographed image data;
The second catalyst layer and the first catalyst layer are interposed between the second catalyst layer and the electrolyte membrane on the other surface of the electrolyte membrane on which the first catalyst layer is applied and formed on the one side. A second catalyst layer coated portion coated and formed so as to face each other;
In the first catalyst layer and the second catalyst layer, the first catalyst layer and the second catalyst layer facing each other with the electrolyte membrane interposed therebetween are recognized when viewed from the direction perpendicular to the surface of the electrolyte membrane A third imaging unit configured to acquire third imaging image data obtained by imaging a silhouette of the first catalyst layer and the second catalyst layer formed by a boundary of at least one of the peripheral portions;
A boundary position information acquisition unit of a silhouette peripheral portion based on the third photographed image data for obtaining position information of a boundary of the silhouette peripheral portion of the silhouette based on the third photographed image data;
Position information of the boundary of the first catalyst layer peripheral portion obtained by the boundary line position information acquisition unit of the first catalyst layer peripheral portion based on the first photographed image data, and silhouette peripheral edge based on the third photographed image data The first catalyst layer peripheral portion facing with the electrolyte membrane interposed based on the boundary position information of the silhouette peripheral portion based on the third captured image data obtained by the boundary position information acquisition unit of the unit A catalyst layer positional deviation calculation unit for calculating the size of positional deviation between the boundary line of the silhouette and the boundary line of the silhouette peripheral portion;
If the magnitude of the positional deviation calculated by the catalyst layer positional deviation calculation unit exceeds a predetermined value,
Informing the state or abnormality of the boundary between the periphery of the first catalyst layer and the boundary of the periphery of the silhouette facing each other with the electrolyte membrane interposed therebetween, or stopping the operation Catalyst layer formation inspection apparatus which has a boundary line position inspection part of a part.

The second catalyst layer of the electrolyte membrane having the first catalyst layer coated on one side and the second catalyst layer formed on the other side of the electrolyte membrane, and the peripheral portion of the second catalyst layer An illumination unit for irradiating the electrolyte membrane of
Said second catalyst layer, and a second imaging unit that acquires second captured image data obtained by photographing the light reflected by the membrane of the reflected light and the second catalyst layer periphery in the second catalyst layer,
A boundary position information acquisition unit of a second catalyst layer peripheral edge based on second photographed image data for obtaining position information of a boundary of the second catalyst layer peripheral edge based on the second photographed image data;
In the first catalyst layer and the second catalyst layer, the first catalyst layer and the second catalyst layer facing each other with the electrolyte membrane interposed therebetween are recognized when viewed from the direction perpendicular to the surface of the electrolyte membrane A third imaging unit configured to acquire third imaging image data obtained by imaging a silhouette of the first catalyst layer and the second catalyst layer formed by a boundary of at least one of the peripheral portions;
A boundary position information acquisition unit of a silhouette peripheral portion based on the third photographed image data for obtaining position information of a boundary of the silhouette peripheral portion of the silhouette based on the third photographed image data;
Position information of the boundary of the second catalyst layer peripheral portion obtained by the boundary line position information acquisition unit of the second catalyst layer peripheral portion based on the second photographed image data, and silhouette peripheral edge based on the third photographed image data The first catalyst layer peripheral portion facing with the electrolyte membrane interposed based on the boundary position information of the silhouette peripheral portion based on the third captured image data obtained by the boundary position information acquisition unit of the unit A catalyst layer positional deviation calculation unit for calculating the size of positional deviation between the boundary line of the silhouette and the boundary line of the silhouette peripheral portion;
If the magnitude of the positional deviation calculated by the catalyst layer positional deviation calculation unit exceeds a predetermined value,
Informing the state or abnormality of the boundary between the periphery of the second catalyst layer and the boundary of the periphery of the silhouette facing each other across the electrolyte membrane, which is determined to be abnormal, or stopping the operation, the periphery of the catalyst layer Catalyst layer formation inspection apparatus which has a boundary line position inspection part of a part.

A coating roller is disposed at a position facing the second catalyst layer coating portion with the electrolyte membrane interposed therebetween, and an electrolyte having the first catalyst layer coated and formed along the outer peripheral surface of the coating roller Membrane is transported,
The catalyst layer formation inspection apparatus according to any one of claims 1 to 4.

A first imaging unit for acquiring first photographed image data obtained by photographing the first catalyst layer of the electrolyte membrane in which the first catalyst layer is coated and formed only on one side;
A boundary line position information acquisition unit of a first catalyst layer peripheral edge portion based on first photographed image data for obtaining position information of a boundary line of the first catalyst layer peripheral edge based on the first photographed image data;
The second catalyst layer and the first catalyst layer are interposed between the second catalyst layer and the electrolyte membrane on the other surface of the electrolyte membrane on which the first catalyst layer is applied and formed on the one side. A second catalyst layer coated portion coated and formed so as to face each other;
An illumination unit configured to illuminate the second catalyst layer and an electrolyte membrane at a peripheral portion of the second catalyst layer;
A second imaging unit that acquires second photographed image data obtained by photographing the light reflected by the second catalyst layer and the light reflected by the electrolyte film at the peripheral portion of the second catalyst layer;
A boundary position information acquisition unit of a second catalyst layer peripheral edge based on second photographed image data for obtaining position information of a boundary of the second catalyst layer peripheral edge based on the second photographed image data;
Position information of the boundary of the first catalyst layer peripheral portion obtained by the boundary line position information acquisition unit of the first catalyst layer peripheral portion based on the first photographed image data; [2] Based on the position information of the boundary of the second catalyst layer peripheral edge obtained by the boundary line position information acquisition unit of the catalyst layer peripheral edge, the first catalyst layer peripheral edge facing with the electrolyte membrane interposed therebetween A catalyst layer positional deviation calculation unit for calculating the magnitude of positional deviation between the boundary of the portion and the boundary of the peripheral portion of the second catalyst layer;
If the magnitude of the positional deviation calculated by the catalyst layer positional deviation calculation unit exceeds a predetermined value,
Informing the state or abnormality of the boundary between the first catalyst layer peripheral edge facing the electrolyte membrane and the boundary between the second catalyst layer peripheral edge, which is determined to be abnormal, or stopping the operation Inspection method of boundary position of catalyst layer peripheral part.