JP6520299B2 - 電気光学装置、電気光学装置の製造方法、および電子機器 - Google Patents

電気光学装置、電気光学装置の製造方法、および電子機器 Download PDF

Info

Publication number
JP6520299B2
JP6520299B2 JP2015065935A JP2015065935A JP6520299B2 JP 6520299 B2 JP6520299 B2 JP 6520299B2 JP 2015065935 A JP2015065935 A JP 2015065935A JP 2015065935 A JP2015065935 A JP 2015065935A JP 6520299 B2 JP6520299 B2 JP 6520299B2
Authority
JP
Japan
Prior art keywords
substrate
element substrate
mirror
metal portion
electro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015065935A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016186528A (ja
JP2016186528A5 (https=
Inventor
花岡　輝直
輝直 花岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2015065935A priority Critical patent/JP6520299B2/ja
Priority to US15/017,746 priority patent/US9465210B1/en
Priority to CN201610162769.2A priority patent/CN106019579B/zh
Priority to US15/259,937 priority patent/US9885945B2/en
Publication of JP2016186528A publication Critical patent/JP2016186528A/ja
Priority to US15/856,675 priority patent/US10156779B2/en
Publication of JP2016186528A5 publication Critical patent/JP2016186528A5/ja
Application granted granted Critical
Publication of JP6520299B2 publication Critical patent/JP6520299B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/16—Cooling; Preventing overheating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0081—Thermal properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/005—Projectors using an electronic spatial light modulator but not peculiar thereto
    • G03B21/008—Projectors using an electronic spatial light modulator but not peculiar thereto using micromirror devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/20—Lamp housings
    • G03B21/2066—Reflectors in illumination beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Optics & Photonics (AREA)
  • Thermal Sciences (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Projection Apparatus (AREA)
JP2015065935A 2015-03-27 2015-03-27 電気光学装置、電気光学装置の製造方法、および電子機器 Active JP6520299B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2015065935A JP6520299B2 (ja) 2015-03-27 2015-03-27 電気光学装置、電気光学装置の製造方法、および電子機器
US15/017,746 US9465210B1 (en) 2015-03-27 2016-02-08 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
CN201610162769.2A CN106019579B (zh) 2015-03-27 2016-03-21 电光学装置、电光学装置的制造方法以及电子设备
US15/259,937 US9885945B2 (en) 2015-03-27 2016-09-08 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
US15/856,675 US10156779B2 (en) 2015-03-27 2017-12-28 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015065935A JP6520299B2 (ja) 2015-03-27 2015-03-27 電気光学装置、電気光学装置の製造方法、および電子機器

Publications (3)

Publication Number Publication Date
JP2016186528A JP2016186528A (ja) 2016-10-27
JP2016186528A5 JP2016186528A5 (https=) 2018-04-19
JP6520299B2 true JP6520299B2 (ja) 2019-05-29

Family

ID=56976168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015065935A Active JP6520299B2 (ja) 2015-03-27 2015-03-27 電気光学装置、電気光学装置の製造方法、および電子機器

Country Status (3)

Country Link
US (3) US9465210B1 (https=)
JP (1) JP6520299B2 (https=)
CN (1) CN106019579B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016184068A (ja) * 2015-03-26 2016-10-20 セイコーエプソン株式会社 電気光学装置、電気光学装置の製造方法、および電子機器
DE102015222508A1 (de) * 2015-11-16 2017-05-18 Robert Bosch Gmbh Mikromechanisches Bauteil, Beleuchtungsvorrichtung und entsprechendes Herstellungsverfahren

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09166790A (ja) * 1995-09-13 1997-06-24 Canon Inc 表示装置
KR100332967B1 (ko) * 2000-05-10 2002-04-19 윤종용 디지털 마이크로-미러 디바이스 패키지의 제조 방법
JP2003175500A (ja) * 2001-12-11 2003-06-24 Sony Corp マイクロパッケージ構造
US6639313B1 (en) * 2002-03-20 2003-10-28 Analog Devices, Inc. Hermetic seals for large optical packages and the like
US6894853B2 (en) * 2002-05-10 2005-05-17 Texas Instruments Incorporated Stress relieved frame
JP4342174B2 (ja) 2002-12-27 2009-10-14 新光電気工業株式会社 電子デバイス及びその製造方法
US7002727B2 (en) * 2003-03-31 2006-02-21 Reflectivity, Inc. Optical materials in packaging micromirror devices
WO2005086229A1 (ja) * 2004-03-05 2005-09-15 Neomax Materials Co., Ltd. 光透過用窓部材、光透過用窓部材を備えた半導体パッケージおよび光透過用窓部材の製造方法
KR20070007422A (ko) * 2005-07-11 2007-01-16 호서대학교 산학협력단 디지털 미세거울표시소자 패키지
JP4906496B2 (ja) * 2006-12-25 2012-03-28 新光電気工業株式会社 半導体パッケージ
JP5330697B2 (ja) * 2007-03-19 2013-10-30 株式会社リコー 機能素子のパッケージ及びその製造方法
CN101398601B (zh) * 2007-09-28 2010-11-10 鸿富锦精密工业（深圳）有限公司 散热装置
US7898724B2 (en) 2008-11-05 2011-03-01 Texas Instruments Incorporated Thermal conduction by encapsulation
EP3056467B1 (en) * 2013-02-20 2017-05-24 Harman Becker Automotive Systems GmbH Circuit board comprising spatial light modulator
JP6141684B2 (ja) * 2013-05-29 2017-06-07 真一 隣 半導体素子および半導体素子の製造方法
TWI777433B (zh) * 2013-09-06 2022-09-11 日商半導體能源研究所股份有限公司 發光裝置以及發光裝置的製造方法
CN203858412U (zh) * 2014-06-06 2014-10-01 台达电子工业股份有限公司 数字微镜装置及其遮光散热组件

Also Published As

Publication number Publication date
CN106019579B (zh) 2020-07-24
US10156779B2 (en) 2018-12-18
US20160377965A1 (en) 2016-12-29
US9465210B1 (en) 2016-10-11
JP2016186528A (ja) 2016-10-27
US9885945B2 (en) 2018-02-06
US20180120681A1 (en) 2018-05-03
CN106019579A (zh) 2016-10-12
US20160282610A1 (en) 2016-09-29

Similar Documents

Publication Publication Date Title
JP6507779B2 (ja) 電気光学装置、電気光学装置の製造方法、および電子機器
US10859814B2 (en) Electro-optical device, manufacturing method thereof, and electronic apparatus
US10054787B2 (en) Electro-optical device, manufacturing method thereof, and electronic apparatus
JP6520299B2 (ja) 電気光学装置、電気光学装置の製造方法、および電子機器
US10527841B2 (en) Electro-optic device, electronic apparatus, and method of manufacturing electro-optic device
CN107238925B (zh) 电光装置、电光单元及电子设备
JP6500551B2 (ja) 電気光学装置、電気光学装置の製造方法、電気光学ユニット、および電子機器
JP2016186526A (ja) 電気光学装置の製造方法、電気光学装置、および電子機器
US10261311B2 (en) Electro-optic device, electro-optic unit, and electronic apparatus

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180301

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180301

RD05 Notification of revocation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7425

Effective date: 20180906

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20181116

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20181219

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20181225

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190219

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20190402

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190415

R150 Certificate of patent or registration of utility model

Ref document number: 6520299

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150