JP6517275B2 - Method of manufacturing a probe - Google Patents

Description

  The present invention relates to a probe and a method of manufacturing the probe.

  For example, in a manufacturing process of a semiconductor integrated circuit or the like, a measuring instrument for measuring an electrical characteristic of the semiconductor integrated circuit or the like formed on a wafer is used. Such a measuring device measures the electrical characteristics of the measurement object by bringing the probe into contact with the measurement object such as an electrode terminal formed on a wafer, for example.

  The probe provided in the measuring device has, for example, a contact terminal which is connected to the measuring device at one end of the housing and contacts the object to be measured at the other end, and has a coil spring built in the housing . When the probe is pressed by the object to be measured, the contact terminal is displaced along with the expansion and contraction of the coil spring in the housing and pushes back the object to be measured, thereby ensuring the connection reliability between the object to be measured and the measuring device. .

  As such a probe, a probe that can be manufactured by bending or the like from a single plate-like member is disclosed (see, for example, Patent Document 1). According to such a probe, the manufacturing time is shortened and the productivity is improved by omitting the assembling process of assembling a plurality of parts in the manufacturing process.

Japanese Patent Publication No. 2010-532908

  However, if the probe according to Patent Document 1 is miniaturized so as to be compatible with the measurement of the densified electronic component, a coil spring having a sufficient length can not be provided, and the movable range of the contact terminal is reduced. there is a possibility. If the movable range of the contact terminal is small, the connection reliability between the object to be measured and the measuring instrument may be reduced.

  The present invention has been made in view of the above, and it is an object of the present invention to provide a probe which can be miniaturized and which is excellent in connection reliability.

According to one aspect of the present invention, a spring portion which expands and contracts in an axial direction, a first plunger portion which covers the spring portion and which has a first contact portion at an end portion, and a second contact portion which covers the spring portion and which end portion a method of manufacturing a probe having a second plunger portion having the one hand in order from the side, the first plunger region, the spring regions, to form a single plate-like member in which the second plunger area is connected, the A spring region is bent to form the spring portion, and a first connecting portion connecting the first plunger region and the spring region is bent so that the first plunger region overlaps the spring portion, and the spring portion is bent. The first plunger region is bent so as to cover, to form a first plunger portion, and a second connecting portion connecting the spring region and the second plunger region, wherein the second plunger region is the spring portion and Said first group And fold the second plunger region so as to cover the spring portion and the first plunger portion to form the second plunger portion, and the first connecting portion and the second connecting portion. Cutting .

  According to the embodiments of the present invention, it is possible to provide a probe that can be miniaturized and has excellent connection reliability.

It is a figure which illustrates the probe concerning an embodiment. It is the front view and the cross-sectional schematic which illustrate the probe which concerns on embodiment. It is the top view and the cross-sectional schematic which illustrate the probe which concerns on embodiment. It is a figure explaining the manufacturing method of the probe concerning an embodiment. It is a figure explaining the manufacturing method of the probe concerning an embodiment. It is a figure explaining the manufacturing method of the probe concerning an embodiment. It is a figure explaining the manufacturing method of the probe concerning an embodiment. It is a figure explaining the manufacturing method of the probe concerning an embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and redundant description may be omitted.

  The probe according to the embodiment described below is provided, for example, in a measuring device that measures electrical characteristics such as an electronic component or an electric circuit, and is a measurement target such as an electric pad or an electrode terminal formed on the electronic component or the electric circuit It is used for the connection between objects and measuring instruments.

  FIG. 1 is a diagram illustrating a probe 100 according to an embodiment. The X direction shown in the following drawings is the longitudinal direction of the probe 100 and is the axial direction of the probe 100. The Y direction is the short direction of the probe 100. The Z direction is a direction perpendicular to the X direction and the Y direction.

  The probe 100 is formed of a single conductive metal plate by a manufacturing method to be described later, and has a first plunger 10, a spring 30, and a second plunger 50 as shown in FIG. In the following description, in the X direction which is the axial direction of the probe 100, the first plunger 10 side is described as one side, and the second plunger 50 side is described as the other side.

  The first plunger portion 10 has a cylindrical shape, covers one side of the spring portion 30 that expands and contracts in the X direction, and is provided with a first contact portion 12 that contacts an object to be measured at one end. The first contact portion 12 protrudes from one end of the first plunger portion 10 toward the central axis of the probe 100 and locks the spring portion 30 so as not to drop out of the first plunger portion 10.

  The second plunger portion 50 has a cylindrical shape, covers the other side of the first plunger portion 10 and the spring portion 30, and is connected at the other end to, for example, an electrode terminal or the like provided in the measuring device. A two contact portion 52 is provided. The second contact portion 52 protrudes from the other end of the second plunger 50 toward the central axis of the probe 100 and locks the spring 30 so as not to fall off the second plunger 50. The first plunger portion 10 and the second plunger portion 50 are conducted when the side surfaces are in contact with each other.

  The spring portion 30 is formed so as to be extensible and contractible in the X direction, and one side is covered by the first plunger portion 10 and locked by the first contact portion 12 and the other side is covered by the second plunger portion 50 and the second contact portion It is locked by 52. For example, when the first contact portion 12 of the first plunger portion 10 contacts the object to be measured and is pressed toward the second plunger portion 50, the spring portion 30 contracts in the X direction, and the spring portion 30 contracts in the X direction. The first contact portion 12 is pushed back toward the object to be measured by the resultant restoring force. In addition, when the probe 100 is released from the pressed state against the measurement object, the spring portion 30 extends in the X direction, and the first plunger portion 10 and the second plunger portion 50 are pushed back to return to the original state.

  Thus, one of the first plunger 10 and the second plunger 50 is displaced relative to the other at the time of contact with the measurement object by the expanding and contracting spring 30. At the time of contact with the object to be measured, the first contact portion 12 of the first plunger portion 10 is pushed back to the object to be measured by the restoring force generated in the spring portion 30, so that the connection between the measuring instrument and the object to be measured is more reliable It becomes a thing.

  FIG. 2A is a side view of the probe 100 according to the embodiment. Moreover, FIG.2 (b) is the schematic of the AA cross section of Fig.2 (a).

  As shown in FIG. 2, in the first plunger portion 10, two first contact portions 12 that protrude outward in the X direction from one end and are bent toward the central axis face each other in the Y direction. It is provided. An inner surface of the first contact portion 12 is in contact with one end of the spring portion 30, and the spring portion 30 is locked so as not to come off the first plunger portion 10.

  Further, in the second plunger portion 50, two second contact portions 52 that protrude outward in the X direction from the other side end portion and are bent toward the central axis are provided to face each other in the Y direction. An inner surface of the second contact portion 52 is in contact with the other end of the spring portion 30 and the spring portion 30 is locked so as not to come off the second plunger portion 50.

  With such a configuration, the spring portion 30 is accommodated in the first plunger portion 10 and the second plunger portion 50, and is sandwiched between the first contact portion 12 and the second contact portion 52 in the X direction, thereby the probe 100 It is prevented from falling out. The number, the shape, and the like of the first contact portion 12 and the second contact portion 52 are not limited to the configuration exemplified in the present embodiment.

  Further, as shown in FIG. 2, in the probe 100 according to the present embodiment, the spring portion 30 can be provided substantially in the entire region from the first contact portion 12 to the second contact portion 52 in the X direction. Therefore, for example, in order to secure the movable range (stroke) of the first plunger unit 10 and the second plunger unit 50 even when the probe 100 is miniaturized (the length in the X direction is reduced). The spring portion 30 of the required length can be installed in the probe 100. Therefore, even when the probe 100 is miniaturized, the movable range of the first plunger unit 10 and the second plunger unit 50 is secured, and the probe 100 excellent in connection reliability between the object to be measured and the measuring instrument is obtained. Provided.

  FIG. 3A is a top view of the probe 100 according to the embodiment. Moreover, FIG.3 (b) is the schematic of the BB cross section of Fig.3 (a).

  As shown in FIG. 3, a guide hole 54, which is a rectangular through hole extending in the X direction, is provided on the side surface of the second plunger 50 and covering the first plunger 10. In addition, on the side surface of the first plunger portion 10, at a position corresponding to the guide hole 54 of the second plunger portion 50, an engagement claw 14 which protrudes to the outer peripheral side of the first plunger portion 10 and engages with the guide hole 54 It is provided.

  With the engagement claws 14 of the first plunger unit 10 engaged with the guide holes 54 of the second plunger unit 50, the first plunger unit 10 and the second plunger unit 50 receive the spring unit 30 therein. Combined. As illustrated in FIG. 3, the left end of the engaging claw 14 in the drawing contacts the left end surface of the guide hole 54 in the left direction in FIG. 3 of the first plunger 10 with respect to the second plunger 50. The movement of the first plunger portion 10 and the second plunger portion 50 can be prevented. For example, when the first plunger 10 and the second plunger 50 are pressed against the object to be measured, the engagement claws 14 are displaced along the guide holes 54.

  In the probe 100 according to the present embodiment, the engaging claws 14 and the guide holes 54 are provided at three different positions in the circumferential direction, but the number, shape, etc. of the engaging claws 14 and the guide holes 54 are the same. It is not limited to the configuration illustrated in the embodiment. Also, contrary to the embodiment of FIG. 3, a guide hole is provided in the side surface of the first plunger portion 10, and the side surface of the second plunger portion 50 protrudes toward the first plunger portion side to the guide hole of the first plunger portion 10. An engaging claw may be provided to engage.

  Next, a method of manufacturing the probe 100 according to the embodiment will be described based on the drawings illustrated in FIGS. 4 to 8. In each of FIGS. 4 to 7 shown below, a front view, a top view, a left side view and a right side view illustrating the plate-like member to be the original form of the probe 100 or the probe 100 in the manufacturing process are shown. ing.

  As shown in FIG. 4, the probe 100 according to this embodiment includes a first plunger area 11 to be the first plunger 10, a spring area 31 to be the spring 30, and a second plunger area 51 to be the second plunger 50. Are formed from a single plate member connected.

  The plate-like member to be the original form of the probe 100 is formed, for example, by punching from a conductive metal plate. In the first plunger region 11, a portion to be the first contact portion 12 on the side of the spring region 31 is formed, and a portion to be the engagement claw 14 on a portion to be the side surface of the first plunger portion 10. The spring region 31 is formed in a wave shape having a plurality of bends. In the second plunger region 51, a portion to be the second contact portion 52 on the spring region 31 side is a portion to be a side surface of the second plunger portion 50 and to be a guide hole 54 at a position corresponding to the engaging claws 14. The part is formed.

  The first plunger region 11 and the spring region 31 are connected by the first connecting portion 20, and the spring region 31 and the second plunger region 51 are connected by the second connecting portion 40.

  The probe 100 is formed by bending from a plate-like member illustrated in FIG. 4 and, as shown in FIG. 5, first, the spring region 31 is bent into a cylindrical shape, and a cylindrical spring portion 30 which can expand and contract in the axial direction. Is formed. Further, the first contact portion 12 and the second contact portion 52 are bent to the side opposite to the side where the spring portion 30 is bent.

  Next, as shown in FIG. 6, the first connection portion 20 is bent to the side on which the spring portion 30 is formed, and then the first plunger region 11 is bent into a cylindrical shape covering one side of the spring portion 30. One plunger portion 10 is formed.

  Subsequently, as shown in FIG. 7, the second connection portion 40 is bent to the side on which the spring portion 30 is formed, and the second plunger region 51 has a cylindrical shape covering the other side of the spring portion 30 and the first plunger portion 10. It is bent to

  Finally, as shown in FIG. 8, after the engaging claws 14 are bent inward so as to fit in the guide holes 54 of the second plunger portion 50, the first connecting portion 20 and the second connecting portion 40 are cut, The probe 100 according to the present embodiment is formed. As described above, since the probe 100 is formed by bending a single plate-like member, it is not necessary to assemble separate parts, and the manufacturing process is simplified and has excellent productivity. . Further, by cutting the first connecting portion 20 and the second connecting portion 40, further downsizing is possible.

  In addition, since the 1st connection part 20 and the 2nd connection part 40 are cut | disconnected, the 1st plunger part 10, the 2nd plunger part 50, and the spring part 30 are the states which are not connected, respectively. Therefore, the first contact portion 12 and the second contact portion 52 are bent inward in the axial direction of the probe 100 to prevent the spring portion 30 from coming off from the probe 100, and the engagement claw 14 formed in the first plunger portion 10 Is fitted in the guide holes 54 of the second plunger portion 50 to prevent the first plunger portion 10 from coming off from the second plunger portion 50.

  As described above, the probe 100 according to the present embodiment is formed by bending a single plate-like member, and is miniaturized by cutting the first connecting portion 20 and the second connecting portion 40. There is. Further, in the probe 100 according to the present embodiment, the spring portion 30 can be installed substantially in the entire axial direction, and the movement of the first plunger portion 10 and the second plunger portion 50 is possible even when the size is further reduced. The spring portion 30 capable of securing the range can be installed, and the connection reliability with the object to be measured is improved.

  As mentioned above, although the manufacturing method of the probe concerning an embodiment and a probe was explained, the present invention is not limited to the above-mentioned embodiment, and various modification and improvement are possible within the scope of the present invention.

DESCRIPTION OF SYMBOLS 10 1st plunger part 11 1st plunger area 12 1st contact part 14 engaging claw 20 1st connection part 30 spring part 31 spring area 40 2nd connection part 50 2nd plunger part 51 2nd plunger area 52 2nd contact part 54 Guide hole 100 probe

Claims (1)

It has a spring portion which expands and contracts in the axial direction, a first plunger portion which covers the spring portion and which has a first contact portion at an end portion, and a second plunger portion which covers the spring portion and which has a second contact portion at its end portion. A method of manufacturing a probe,
Forming a sheet-like member in which the first plunger region, the spring region, and the second plunger region are connected in order from one side,
Bending the spring region to form the spring portion;
Bending a first connecting portion connecting the first plunger region and the spring region such that the first plunger region overlaps the spring portion;
The first plunger region is bent to cover the spring portion to form the first plunger portion;
Bending a second connection portion connecting the spring region and the second plunger region such that the second plunger region overlaps the spring portion and the first plunger portion;
Forming a second plunger portion by bending the second plunger region so as to cover the spring portion and the first plunger portion;
A method of manufacturing a probe, comprising cutting the first connection portion and the second connection portion.

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