JP6258011B2 - probe - Google Patents

Description

  The present invention relates to a probe and a method for manufacturing the probe.

  For example, in a manufacturing process of a semiconductor integrated circuit or the like, a measuring instrument that measures electrical characteristics of the semiconductor integrated circuit or the like formed on a wafer is used. Such a measuring device measures the electrical characteristics of the measurement object by bringing the probe into contact with the measurement object such as an electrode terminal formed on the wafer.

  The probe provided in the measuring device has, for example, one end of the housing connected to the measuring device, a contact terminal that contacts the measurement object at the other end, and a coil spring built in the housing. . When the probe is pressed against the measurement object, the contact terminal is displaced along with the expansion and contraction of the coil spring in the housing and pushes back the measurement object, thereby ensuring the connection reliability between the measurement object and the measurement device. .

  As such a probe, a probe that can be manufactured from one plate-like member by bending or the like is disclosed (for example, see Patent Document 1). According to such a probe, an assembling process for assembling a plurality of parts in the manufacturing process is omitted, so that the manufacturing time is shortened and the productivity is improved.

Special table 2010-532908 gazette

  However, if the probe according to Patent Document 1 is miniaturized so as to be compatible with measurement of high-density electronic components, a sufficiently long coil spring cannot be provided, and the movable range of the contact terminal becomes small. there is a possibility. If the movable range of the contact terminal is small, there is a possibility that the connection reliability between the measurement object and the measuring device is lowered.

  The present invention has been made in view of the above, and an object of the present invention is to provide a probe that can be miniaturized and has excellent connection reliability.

According to one aspect of the present invention, a spring part that expands and contracts in the axial direction, a first plunger part that covers one side of the spring part in the axial direction and includes a first contact part at the end of the one side; A second plunger portion that covers the other side of the spring portion in the axial direction and includes a second contact portion at an end of the other side, and one of the first plunger portion and the second plunger portion is: A guide hole extending in the axial direction is provided on a side surface, and the other of the first plunger portion and the second plunger portion protrudes to one side of the first plunger portion and the second plunger portion on the side surface, and the guide hole have a engaging claw which engages with the first plunger portion, the second plunger portion and the spring portion be those not been connected, said engagement claws in said guide hole are engaged By means of the first plunger part Serial omission of the second plunger portion that is prevented.

  According to the embodiment of the present invention, it is possible to provide a probe that can be miniaturized and has excellent connection reliability.

It is a figure which illustrates the probe which concerns on embodiment. It is the front view and cross-sectional schematic which illustrate the probe which concerns on embodiment. It is the top view and cross-sectional schematic which illustrate the probe which concerns on embodiment. It is a figure explaining the manufacturing method of the probe concerning an embodiment. It is a figure explaining the manufacturing method of the probe concerning an embodiment. It is a figure explaining the manufacturing method of the probe concerning an embodiment. It is a figure explaining the manufacturing method of the probe concerning an embodiment. It is a figure explaining the manufacturing method of the probe concerning an embodiment.

  Hereinafter, embodiments for carrying out the invention will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and redundant description may be omitted.

  The probe according to the embodiment described below is provided in a measuring device that measures electrical characteristics such as an electronic component or an electric circuit, and is an object to be measured such as an electric pad or an electrode terminal formed on the electronic component or electric circuit. Used to connect objects and measuring equipment.

  FIG. 1 is a diagram illustrating a probe 100 according to the embodiment. The X direction shown in the following drawings is the longitudinal direction of the probe 100 and the axial direction of the probe 100. The Y direction is the short direction of the probe 100. The Z direction is a direction perpendicular to the X direction and the Y direction.

  The probe 100 is formed from a single conductive metal plate by a manufacturing method described later, and includes a first plunger portion 10, a spring portion 30, and a second plunger portion 50 as shown in FIG. In the following description, in the X direction which is the axial direction of the probe 100, the first plunger portion 10 side is described as one side and the second plunger portion 50 side is described as the other side.

  The first plunger portion 10 has a cylindrical shape, covers one side of a spring portion 30 that expands and contracts in the X direction, and is provided with a first contact portion 12 that comes into contact with a measurement object at one end portion. The first contact portion 12 protrudes from the one end portion of the first plunger portion 10 toward the center axis of the probe 100 and locks the spring portion 30 so as not to drop off from the first plunger portion 10.

  The second plunger part 50 has a cylindrical shape, covers the other side of the first plunger part 10 and the spring part 30, and is connected to an electrode terminal or the like provided in the measuring instrument at the other side end part. Two contact portions 52 are provided. The second contact portion 52 protrudes from the other end portion of the second plunger portion 50 toward the center axis of the probe 100 and locks the spring portion 30 so as not to drop off from the second plunger portion 50. The first plunger unit 10 and the second plunger unit 50 are brought into conduction when the side surfaces are in contact with each other.

  The spring portion 30 is formed to be extendable and contractible in the X direction, one side is covered by the first plunger portion 10 and is locked by the first contact portion 12, and the other side is covered by the second plunger portion 50 and the second contact portion. It is locked by 52. For example, when the first contact portion 12 of the first plunger portion 10 contacts the measurement object and is pressed toward the second plunger portion 50, the spring portion 30 contracts in the X direction and the spring portion 30 contracts in the X direction. The first contact portion 12 is pushed back toward the measurement object by the restoring force generated. Further, when the probe 100 is released from the pressed state against the measurement object, the spring portion 30 extends in the X direction, and the first plunger portion 10 and the second plunger portion 50 are pushed back to return to the original state.

  In this manner, one of the first plunger portion 10 and the second plunger portion 50 is displaced relative to the other by the spring portion 30 that expands and contracts when in contact with the measurement object. At the time of contact with the measurement object, the first contact portion 12 of the first plunger unit 10 is pushed back to the measurement object by the restoring force generated in the spring part 30, so that the connection between the measurement device and the measurement object is more reliable. It will be a thing.

  FIG. 2A is a side view of the probe 100 according to the embodiment. Moreover, FIG.2 (b) is the schematic of the AA cross section of Fig.2 (a).

  As shown in FIG. 2, the first plunger portion 10 has two first contact portions 12 that protrude outward in the X direction from one end and are bent toward the central axis, facing the Y direction. Is provided. The first contact portion 12 has an inner surface that is in contact with one end portion of the spring portion 30 and locks the spring portion 30 so as not to drop off from the first plunger portion 10.

  In addition, the second plunger portion 50 is provided with two second contact portions 52 that protrude outward in the X direction from the other end portion and are bent toward the central axis, facing the Y direction. The second contact portion 52 has an inner surface that contacts the other end portion of the spring portion 30 and locks the spring portion 30 so as not to drop off from the second plunger portion 50.

  With such a configuration, the spring portion 30 is accommodated in the first plunger portion 10 and the second plunger portion 50 and is sandwiched between the first contact portion 12 and the second contact portion 52 in the X direction, thereby causing the probe 100 to be sandwiched. Dropping from is prevented. In addition, the number, shape, etc. of the 1st contact part 12 and the 2nd contact part 52 are not restricted to the structure illustrated in this embodiment.

  As shown in FIG. 2, in the probe 100 according to this embodiment, the spring portion 30 can be provided in almost the entire region from the first contact portion 12 to the second contact portion 52 in the X direction. Therefore, for example, in order to ensure the movable range (stroke) of the first plunger portion 10 and the second plunger portion 50 even when the probe 100 is miniaturized (configured to shorten the length in the X direction). It is possible to install the spring portion 30 having a necessary length in the probe 100. Therefore, even if the probe 100 is downsized, the movable range of the first plunger unit 10 and the second plunger unit 50 is ensured, and the probe 100 excellent in connection reliability between the measurement object and the measuring device is obtained. Provided.

  FIG. 3A is a top view of the probe 100 according to the embodiment. Moreover, FIG.3 (b) is the schematic of the BB cross section of Fig.3 (a).

  As shown in FIG. 3, a guide hole 54 that is a rectangular through hole extending in the X direction is provided on a side surface of the second plunger portion 50 and covering the first plunger portion 10. Further, on the side surface of the first plunger portion 10, there is an engaging claw 14 that protrudes to the outer peripheral side of the first plunger portion 10 and engages with the guide hole 54 at a position corresponding to the guide hole 54 of the second plunger portion 50. Is provided.

  When the engaging claw 14 of the first plunger portion 10 is engaged with the guide hole 54 of the second plunger portion 50, the first plunger portion 10 and the second plunger portion 50 are in a state in which the spring portion 30 is accommodated therein. Combined. As illustrated in FIG. 3, the illustrated left end portion of the engaging claw 14 contacts the illustrated left end surface of the guide hole 54, so that the first plunger portion 10 with respect to the second plunger portion 50 moves in the left direction in FIG. 3. The movement of the first plunger portion 10 and the second plunger portion 50 can be prevented from coming off. When the first plunger unit 10 and the second plunger unit 50 are pressed against the measurement object, for example, the engaging claw 14 is displaced along the guide hole 54.

  In the probe 100 according to the present embodiment, the engaging claws 14 and the guide holes 54 are provided at three positions at different positions in the circumferential direction, but the numbers, shapes, etc. of the engaging claws 14 and the guide holes 54 are as follows. It is not restricted to the structure illustrated in embodiment. Further, contrary to the mode of FIG. 3, a guide hole is provided on the side surface of the first plunger portion 10, and the side surface of the second plunger portion 50 protrudes toward the first plunger portion side so as to be a guide hole of the first plunger portion 10. You may provide the engaging claw to engage.

  Next, a method for manufacturing the probe 100 according to the embodiment will be described with reference to the drawings illustrated in FIGS. 4 to 7 are a front view, a top view, a left side view, and a right side view illustrating the plate member as the original shape of the probe 100 or the probe 100 in the manufacturing process. ing.

  As shown in FIG. 4, the probe 100 according to the present embodiment includes a first plunger region 11 that becomes the first plunger portion 10, a spring region 31 that becomes the spring portion 30, and a second plunger region 51 that becomes the second plunger portion 50. Are formed from a single plate-like member connected together.

  The plate-like member that is the original shape of the probe 100 is formed by punching from a conductive metal plate, for example. In the first plunger region 11, a portion that becomes the first contact portion 12 is formed on the spring region 31 side, and a portion that becomes the engaging claw 14 is formed on a portion that becomes the side surface of the first plunger portion 10. The spring region 31 is formed in a wave shape having a plurality of bent portions. In the second plunger region 51, the portion that becomes the second contact portion 52 on the spring region 31 side is the portion that becomes the side surface of the second plunger portion 50 and becomes the guide hole 54 at a position corresponding to the engaging claw 14. A part is formed.

  The first plunger region 11 and the spring region 31 are connected by the first connecting portion 20, and the spring region 31 and the second plunger region 51 are connected by the second connecting portion 40.

  The probe 100 is formed from a plate-like member illustrated in FIG. 4 by bending. First, as shown in FIG. 5, the spring region 31 is bent into a cylindrical shape, and a cylindrical spring portion 30 that can expand and contract in the axial direction. Is formed. Moreover, the 1st contact part 12 and the 2nd contact part 52 are bend | folded to the surface opposite to the side by which the spring part 30 was bend | folded.

  Next, as shown in FIG. 6, the first connecting portion 20 is bent to the side where the spring portion 30 is formed, and then the first plunger region 11 is bent into a cylindrical shape covering one side of the spring portion 30. 1 plunger portion 10 is formed.

  Subsequently, as shown in FIG. 7, the second connecting portion 40 is bent on the side where the spring portion 30 is formed, and the second plunger region 51 covers the other side of the spring portion 30 and the first plunger portion 10. Can be folded.

  Finally, as shown in FIG. 8, after the engaging claw 14 is bent inward so as to fit into the guide hole 54 of the second plunger portion 50, the first connecting portion 20 and the second connecting portion 40 are cut, The probe 100 according to the present embodiment is formed. Since the probe 100 is formed by bending a single plate-like member as described above, it is not necessary to assemble a separate part, and the manufacturing process is simplified and has excellent productivity. . Moreover, size reduction is attained by the 1st connection part 20 and the 2nd connection part 40 being cut | disconnected.

  In addition, since the 1st connection part 20 and the 2nd connection part 40 are cut | disconnected, the 1st plunger part 10, the 2nd plunger part 50, and the spring part 30 are the states which are not connected, respectively. For this reason, the first contact portion 12 and the second contact portion 52 are bent inward in the axial direction of the probe 100 to prevent the spring portion 30 from falling off the probe 100 and the engaging claw 14 formed in the first plunger portion 10. Is fitted into the guide hole 54 of the second plunger portion 50 to prevent the first plunger portion 10 from falling off from the second plunger portion 50.

  As described above, the probe 100 according to the present embodiment is formed by bending a single plate-like member, and is reduced in size by cutting the first connecting portion 20 and the second connecting portion 40. Yes. Further, the probe 100 according to the present embodiment can be provided with the spring portion 30 almost in the entire axial direction, and the first plunger portion 10 and the second plunger portion 50 can be moved even when the spring portion 30 is further downsized. The spring part 30 which can ensure a range can be installed, and the connection reliability with a measurement object improves.

  The probe and the method for manufacturing the probe according to the embodiment have been described above, but the present invention is not limited to the above-described embodiment, and various modifications and improvements can be made within the scope of the present invention.

DESCRIPTION OF SYMBOLS 10 1st plunger part 11 1st plunger area | region 12 1st contact part 14 Engagement claw 20 1st connection part
3 0 Spring
31 spring region 40 second connecting portion 50 second plunger portion 51 second plunger region 52 second contact portion 54 guide hole 100 probe

Claims (2)

A spring portion extending and contracting in the axial direction;
A first plunger portion that covers one side of the spring portion in the axial direction and includes a first contact portion at an end of the one side;
A second plunger portion that covers the other side of the spring portion in the axial direction and includes a second contact portion at an end of the other side;
One of the first plunger part and the second plunger part has a guide hole extending in the axial direction on a side surface,
It said first plunger portion and the other of said second plunger portion, and protrudes to one side of the first plunger portion and the second plunger portions on the side surfaces have a engaging claw which engages with the guide hole,
The first plunger part, the second plunger part and the spring part are not connected,
Wherein by the engagement pawl into the guide hole are engaged, the probe characterized that you have been prevented escapes between said first plunger portion and the second plunger part. The first contact portion protrudes from the one end portion of the first plunger portion toward the center axis side of the probe to lock the spring portion,
2. The probe according to claim 1, wherein the second contact portion protrudes from the other end portion of the second plunger portion toward the central axis to lock the spring portion.

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