JP6515543B2 - Touch panel integrated color filter substrate, display device using the same, and information input image display device using the same - Google Patents

Description

  The present invention relates to a color filter substrate having a touch sensing function, a liquid crystal display using the same, an organic electroluminescence display, and an information input image display using the same.

  Color liquid crystal display devices have formed a large market for liquid crystal color televisions and notebook computers integrated with liquid crystal display devices. Usually, in order to make a liquid crystal display device a full color display device, a method is adopted in which a color filter layer of each color of red, green and blue (RGB) is disposed opposite to the liquid crystal layer.

  On the other hand, a display device using an organic electroluminescent (EL) element having features such as thinness, low power consumption, and high luminance display as compared to a liquid crystal display device has attracted attention.

  Although there are several methods using organic EL as a full color display device, a method using color filter layers of each color of RGB is also effective. That is, the organic EL layer emitting white light is formed, and color filters of respective colors of RGB are disposed to face each other to extract the three primary colors, which is a “white EL + color filter method”. In this method, the white organic EL layer can be easily manufactured as compared with the method using a colored EL layer other than white directly, and the color filter necessary for full colorization has the advantage that the technology is established in liquid crystal display applications. There is.

  As described above, the color filter is an essential member for color display in both the liquid crystal display device and the organic EL display device, and improves the image quality of the display device and gives the color of each primary color to each pixel. It plays a role. In addition to the colored layers of RGB, there is a black matrix (BM) as an element constituting the color filter. BM is a thin light shielding pattern formed between each pixel to improve the contrast of the liquid crystal display device.

  By the way, in recent years, a configuration in which a touch panel is attached to a display surface side of a display device on a portable device such as a smartphone or a tablet is becoming general. The touch panel is used as an input unit by the touch of a pointer such as a finger. The method of detecting the pointer on the touch panel is mainly performed by a change in capacitance at the touch portion.

  However, the touch panel is an extra member of the display device in terms of thickness and weight increase. Recently, touch panels have been installed in portable devices such as smartphones and tablets, but it has been difficult to avoid an increase in thickness of the devices. In addition, when the resolution of the display device is increased to obtain high definition pixels, input on the touch panel may be difficult.

  For example, when the resolution of the display device is set to 300 ppi (pixel per inch), and further, to 500 ppi or more for high definition pixels, the pixel pitch is about 8 to 30 μm, and a fine input (for example, pen input) is required. Therefore, there is a demand for a touch panel that responds to the input pressure required by the pen pressure and the resolution required for the pen point, and that can cope with faster input and sufficiently meet high definition.

  Moreover, at the time of touch-panel type display device production, the technology which produces a touch-panel electrode and a color filter in a separate board | substrate, and bonds them when making it into a module was the mainstream. However, due to the occurrence of moiré (interference fringes) due to a slight shift of the electrode pattern (wiring pattern) of the touch panel and the pattern of the color filter electrode, BM, wiring, etc. There is a problem in display performance such as occurrence of parallax. Therefore, the same glass is used for the touch panel electrode and the color filter for the purpose of reducing the step of bonding the touch panel electrode and the color filter substrate and preventing the decrease in transmittance of the display panel due to the increase in reflectance caused by the gap formed when bonding. A technology to be formed integrally with a substrate has been considered.

  For example, as disclosed in Patent Document 1, a touch panel electrode layer and a color filter layer are sequentially laminated on the back surface side of the glass substrate as viewed from the viewing surface side (observer side), and the touch panel electrode layer is a transparent substrate A touch panel integrated color filter substrate having a structure provided inside a display cell sandwiched between transparent substrates for TFTs (thin film transistors) has been developed. However, in this structure, the shield layer is provided to avoid direct contact between the touch panel electrode layer and the color filter layer and to avoid the influence of the unevenness due to the touch panel electrode layer, and the process of forming the shield layer is increased. Further, there is a possibility that the transmittance of the display panel may be lowered due to the positional deviation between the touch panel electrode layer and the BM.

  Patent Document 2 discloses a stacked structure of a light absorbing layer having a low reflectance and a conductive layer as an electrode layer, and a touch panel including the stacked structure. However, Patent Document 2 does not suggest integration with a color filter. Further, Patent Document 2 exemplifies aluminum as a material of the wiring pattern. In the manufacturing process of red pixel, green pixel, blue pixel and BM, the method of photolithography using alkaline developer is used, but the metal wiring of aluminum is corroded by alkaline developer and it is difficult to form a color filter It is.

  Patent Document 2 also discloses that the metal of the electrode layer is copper (Cu). However, for example, when the substrate is a glass substrate such as non-alkali glass, copper, copper oxide or copper oxynitride does not have sufficient adhesion to the substrate, and it is easy to apply cellophane tape or the like and remove it. It is not practical because it peels off. Patent Document 2 does not disclose a specific technique for improving adhesion when the electrode layer is made of copper. In addition, copper tends to form an oxide of copper on the surface by aging or heat treatment, but since copper oxide is conductive, it tends to interfere with electrical mounting as a touch panel wiring. Patent Document 2 does not disclose measures for improving contact resistance in consideration of mounting, and techniques relating to means for forming a wiring pattern for a touch panel.

  Patent Document 3 discloses a transparent conductive film composed of oxides of indium (In), tin (Sn) and zinc (Zn). However, Patent Document 3 discloses a wiring structure for a touch panel for stable and reliable electrical connection, for example, a conductive metal oxide layer and a metal layer formed of a copper layer or a copper alloy layer on a transparent substrate. The technique which forms the structure which laminated | stacked as wiring for touch panels is not disclosed. That is, the technology disclosed in Patent Document 3 does not take into consideration the stability of electrical mounting necessary for the touch panel wiring and the visibility as a display device.

Patent No. 548 3143 Japanese Patent Application Publication No. 2013-540331 Unexamined-Japanese-Patent No. 2012-26039

The present invention has been made in view of the above situation, and the adhesion between the substrate made of alkali-free glass and the wiring pattern is high, high-resolution, high-speed touch input and stable electrical mounting are possible, and transmission is also possible. It is an object of the present invention to provide a touch panel integrated color filter substrate having a high rate and good visibility, a liquid crystal display device and an organic EL display device using the same, and an information input image display device using them.

In order to solve the above-mentioned problems, the present invention according to claim 1 is a black matrix having a plurality of first metal wires and a plurality of openings on the first surface of a transparent substrate which is alkali-free glass. Have in this order,
A plurality of second metal wires on the second surface of the transparent substrate;
The first metal wiring and the second metal wiring have a function as an electrode of a touch panel, and the line widths of the first metal wiring and the second metal wiring are in the range of 1 μm to 10 μm,
In each of the first metal wiring and the second metal wiring, the layer in contact with the transparent substrate is a composite metal oxide layer of zinc oxide, indium oxide and tin oxide, and copper or the above mentioned composite metal oxide layer It has a laminated structure of copper alloy layers,
A color filter substrate integrated with a touch panel, wherein a red coloring layer, a green coloring layer, and a blue coloring layer are provided in the openings of the black matrix, respectively.

The present invention according to claim 2 comprises, in this order, a plurality of first metal wires and a black matrix having a plurality of openings on the first surface of a transparent substrate which is non-alkali glass,
A plurality of second metal wires on the second surface of the transparent substrate;
The first metal wiring and the second metal wiring have a function as an electrode of a touch panel, and the line widths of the first metal wiring and the second metal wiring are in the range of 1 μm to 10 μm,
In each of the first metal wiring and the second metal wiring, the layer in contact with the transparent substrate is a composite metal oxide layer of zinc oxide, indium oxide and tin oxide, and copper or the above mentioned composite metal oxide layer On the structure in which layers made of copper alloy are laminated, a complex metal oxide layer of zinc oxide, indium oxide and tin oxide is further laminated ,
A color filter substrate integrated with a touch panel , wherein a red coloring layer, a green coloring layer, and a blue coloring layer are provided in the openings of the black matrix, respectively .

According to the present invention as set forth in claim 3 , in the composite metal oxide layer, the atomic ratio of the following metals in which zinc (Zn), indium (In), and tin (Sn) excluding oxygen are as parameters:
(Zn) / (Zn + In + Sn) is in the range of 0.1 to 0.6, and
(Sn) / (Zn + In + Sn) exists in the range of 0.005-0.1, It is set as the touch-panel integrated color filter board | substrate of Claim 1 or 2 characterized by the above-mentioned.

According to a fourth aspect of the present invention, there is provided a liquid crystal display device comprising the touch panel integrated color filter substrate according to any one of the first to third aspects.

According to a fifth aspect of the present invention, there is provided an organic electroluminescent display device comprising the touch panel integrated color filter substrate according to any one of the first to third aspects.

According to a sixth aspect of the present invention, the display device according to the fourth aspect or the fifth aspect is provided, and the second surface is changed by a capacitance change between the first metal wiring and the second metal wiring. According to another aspect of the present invention, there is provided an information input image display device characterized in that a position of a pointer contacting the surface on the side is detected.

  In the touch panel integrated color filter substrate according to the present invention, since the line width of the metal wiring for touch panel can be narrowed, high resolution and high speed touch input and stable electrical mounting can be achieved. Further, in the display device using the touch panel integrated color filter substrate according to the present invention, the decrease in transmittance due to the conventional metal wiring for touch panel is suppressed, and the visibility is improved.

It is a schematic sectional drawing which shows one step in the manufacturing process of the touchscreen integrated color filter board | substrate of this invention. It is the schematic plan view which looked at one step in the preparation process of the touchscreen integrated color filter substrate of this invention of FIG. 1 from the back surface side (2nd surface side). It is the schematic plan view which looked at one step in the manufacturing process of another touchscreen integrated color filter substrate of this invention of FIG. 1 from the back surface side (2nd surface side). It is a schematic sectional drawing of the touchscreen integrated color filter board of this invention. It is a schematic sectional drawing which shows one form using a liquid crystal among the information input image display apparatuses of this invention. It is a schematic sectional drawing which shows one form using organic EL among the information input image display apparatuses of this invention.

  Hereinafter, the present invention will be described in more detail by way of embodiments. In the description of the present invention, the viewing surface side and the back surface side are based on the state where the information input image display device is finally integrated, and the viewing surface side is the first surface side.

  FIG. 4 shows a schematic cross-sectional view of the touch panel integrated color filter substrate of the present invention. The material of the transparent substrate 3 of the color filter substrate 10 is an organic film-based touch panel with a large expansion and contraction (for example, due to the thermal expansion coefficient) of the substrate and an 8 to 30 μm pattern including red pixels, green pixels, blue pixels and BM It is difficult and not appropriate to align some fine pixels.

  The material of the transparent substrate 3 of the color filter substrate 10 of the present invention is, for example, non-alkali glass having a small coefficient of thermal expansion, and it is desirable to use a substrate made of glass. The alkali-free glass is represented by an aluminosilicate glass substantially free of an alkali component.

  In the touch panel integrated color filter substrate 10 of the present invention, the first metal wiring 1 is provided on the first surface of the transparent substrate 3, and the second metal wiring 2 is provided on the second surface. Furthermore, on the second surface, at least a red colored layer 4 (R), a green colored layer 4 (G), and a blue colored layer 4 (color filters BM 5 and BM 5) are formed to cover the openings formed by One of B) is arranged (FIG. 4 shows the case where all three colors are arranged). The colored layer may further be complementary to RGB, such as yellow. Alternatively, it may contain white (transparent). An overcoat layer 6 is further formed on the second metal wiring and the colored layer.

  Here, in the color filter substrate 10 of the present invention, the first metal wiring 1 and the second metal wiring 2 can be used as a detection electrode or a drive electrode of the capacitive touch panel, respectively. These electrodes can also be used by replacing the roles of the detection electrode and the drive electrode.

  The line width of each of the first metal wiring and the second metal wiring of the color filter substrate 10 of the present invention is in the range of 1 μm to 10 μm in order to correspond to a touch panel of 300 ppi and, further, 500 ppi or more. It is in.

  In each of the first metal wiring and the second metal wiring of the color filter substrate 10 of the present invention, the layer in contact with the transparent substrate is a composite metal oxide layer of zinc oxide, indium oxide and tin oxide, and the composite metal oxide It is preferable to have a structure in which a layer made of copper or a copper alloy is laminated on an object layer.

As a reason for setting it as the above laminated structures, it is mentioned that indium oxide has good adhesiveness with a glass substrate, copper, and a copper alloy, and can obtain ohmic contact with these metals. It is difficult to obtain ohmic contact between indium oxide or the above-mentioned composite metal oxide and aluminum. In addition, since copper has better conductivity than aluminum, the line widths of the first metal wiring and the second metal wiring can be reduced, so that the ratio of the pixel to the opening can be reduced. The reduction of the transmittance due to the metal wiring can be suppressed, and the visibility can be favorably maintained.

  Furthermore, the first metal wiring and the second metal wiring of the color filter substrate 10 of the present invention further comprise zinc oxide and indium oxide on a structure in which the composite metal oxide layer and a layer made of copper or copper alloy are stacked. It is preferable to have a structure in which a composite metal oxide layer of aluminum and tin oxide is laminated.

  The reason for the above is that, for example, by setting the surface to a composite metal oxide layer containing indium oxide, the decrease in conductivity due to the formation of copper oxide, such as metal wiring with copper or copper alloy as the surface layer, is eliminated , Because it can improve the reliability in the electrical implementation.

  In addition, since the composite metal oxide layer can be provided with visible light absorbability by forming a film in a state of insufficient oxygen, light reflection of metal wiring using copper or copper alloy is reduced, and as a result, the transmittance of the display panel , And the contrast of the image is increased to improve the visibility. In addition, in the color filter substrate 10 of the present invention, as described above, the layer in contact with the transparent substrate is a composite metal oxide layer of zinc oxide, indium oxide and tin oxide, so irregular reflection of panel light, back surface The same effect as that on the viewing surface side can also be obtained for reflection.

  Furthermore, in the first metal wiring and the second metal wiring of the color filter substrate 10 of the present invention, the amount of zinc oxide and tin oxide in the composite metal oxide layer of zinc oxide, indium oxide and tin oxide is adjusted to obtain photo It is possible to control the solubility of the first metal wiring and the second metal wiring in an etchant in the lithography process. Here, as an etchant, a boric acid-based etchant, a hydrochloric acid-based or nitric acid-based etchant, or an etchant obtained by adding a hydrofluoric acid thereto can be used.

  Specifically, the solubility to an etchant can be improved by setting the atomic ratio represented by (Zn) / (Zn + In + Sn) to 0.1 or more. If this atomic ratio is larger than 0.6, the etching rate will be too fast, and the chemical resistance of the composite metal oxide layer will be reduced, which is not practical.

  The conductivity of the composite metal oxide layer can be improved by setting the atomic ratio of (Sn) / (Zn + In + Sn) to 0.005 or more. However, if (Sn) / (Zn + In + Sn) is larger than 0.1, the solubility of the composite metal oxide layer is greatly reduced, and the composite metal oxide layer becomes difficult to etch. In this case, since the solubility of copper or copper alloy laminated on the composite metal oxide layer is high, the copper or copper alloy portion of the metal wiring is selectively etched to maintain the line width as the metal wiring. It becomes difficult.

  As described above, in the first metal wiring and the second metal wiring of the color filter substrate 10 of the present invention, the layer in contact with the transparent substrate is a composite metal oxide layer of zinc oxide, indium oxide and tin oxide, While making it the structure which laminated | stacked the layer which consists of copper or copper alloys on a composite metal oxide layer, Preferably the quantity of the zinc oxide and tin oxide in the composite metal oxide layer of zinc oxide, an indium oxide, and a tin oxide is adjusted. Since the solubility of the first metal wiring and the second metal wiring in the etchant can be controlled, a fine wiring pattern with a line width of 1 to 10 .mu.m is formed with high adhesion, high resolution, and high precision. be able to.

  Furthermore, the etching rate of the composite metal oxide layer can also be adjusted to a slight amount by adjusting the amount of oxygen atoms in the composite metal oxide layer.

  For film formation of the first and second metal wiring layers, physical film formation methods such as a sputtering method, a vacuum evaporation method, an ion plating method and a pulse laser deposition method are preferably used. In particular, sputtering is preferable because of high mass productivity. As the sputtering method, for example, DC sputtering method, RF sputtering method, AC sputtering method, ECR sputtering method, facing target sputtering method, etc. may be mentioned, but DC sputtering is high in mass productivity and easier to reduce carrier concentration than RF sputtering method. And AC sputtering is preferred. In addition, in order to suppress deterioration of the interface due to film formation, to suppress leakage current, or to improve characteristics such as the on-off ratio in a transparent semiconductor thin film, ECR sputtering, which is easy to control film quality, Target sputtering is preferred.

  As a method of forming the composite metal oxide layer by sputtering, one kind of sputtering target is used, which contains the same atomic species as the target film and the content ratio thereof is adjusted according to the sputtering rate ratio, or plural The composition ratio of the thin film can also be adjusted by attaching a sputtering target of the above and changing the power input to each target to adjust the film formation rate and simultaneously perform the sputtering. As a carrier gas, an inert gas such as Ar is used when forming a metal film, and when forming a metal oxide film, the amount of oxygen contained in the thin film is added by adding an appropriate amount of oxygen to the inert gas. It can be adjusted.

  The metal oxide added to the composite metal oxide is an oxide such as germanium, titanium, magnesium, aluminum, zirconium, hafnium, calcium, or antimony, which is added at a ratio of 0.02 or less in atomic ratio of metal. Also good. The addition of titanium oxide or zirconium oxide improves the sputter target density and leads to film formation with less defects.

  4 to 6 show the case where the position of the BM is made the same as the metal wiring pattern, but as described above, in the present invention, since the transmittance of the metal wiring pattern is high, the position of the BM is metal wiring It can also be formed offset with the pattern.

  In FIG. 1 showing one step in the process of manufacturing the color filter substrate 10 of the present invention prior to FIG. 4, the first metal wiring 1 on the first surface of the transparent substrate 3 and the second metal wiring on the second surface It shows a state in which two patterns are formed. As a method of forming a pattern, photolithography can be used. That is, after a resist is applied on the first metal wiring thin film and resist patterning is performed so as to have a predetermined pattern and line width, the first metal wiring can be manufactured by wet etching using the above-mentioned etchant. Thereafter, the pattern of the second metal wiring may be produced by the same method.

  2 and 3 are schematic plan views of one step in the process of manufacturing the touch panel integrated color filter substrate of the present invention of FIG. 1 as viewed from the back surface side (second surface side).

  2A and 2B, both the patterns of the first metal wiring and the pattern of the second metal wiring are linear wiring patterns, and the shape of the portion surrounded by the wirings is rectangular. In FIG. 3, the pattern of the first metal wiring is linear, the pattern of the second metal wiring is a zigzag broken line, and the shape of the portion surrounded by the wirings is a parallelogram. In the present invention, even if the shape of the portion surrounded by the wiring is a parallelogram or a polygon, the pattern of the first metal wiring or the second metal wiring corresponds to the shape, and the transparent substrate is viewed in plan view. It only needs to cross over.

In the case of a zigzag broken line as shown in FIG. 3, the pattern of the second metal wiring is straight, the pattern of the first metal wiring is broken in the zigzag, or the pattern of the first metal wiring, the second metal Both of the wiring patterns may have zigzag zigzag line shapes. Further, in FIGS. 2 and 3, the pitches Px1, Px2,..., Pxn, Py1, Py2,.
Pyn may be appropriately changed within a range that does not affect the detection accuracy as a touch panel or the image performance as a display device.

  As described above, a zigzag wiring pattern is introduced, and the regularity (periodicity) of the wiring pattern is alleviated by some means to form a wiring pattern of a touch panel, and a pattern of electrodes of a color filter, wiring, etc. It is possible to reduce the occurrence of moiré caused.

  Moreover, the pattern of 1st metal wiring and the pattern of 2nd metal wiring can improve the detection speed required for a touch detection by thinning the pattern of non-use and setting it as a dummy pattern.

  After the patterns of the first metal wiring 1 and the second metal wiring 2 are formed as shown in FIG. 1, the method of forming the BM 5 of the color filter and the colored layer 4 on the second surface as shown in FIG. Known methods can be used. That is, there is a method of forming the BM 5 by photolithography using a black photosensitive resin. As a black coloring material, carbon black or a plurality of organic pigments can be used. The colored layer 5 may be formed by applying a photolithography method to a photosensitive resin in which color pigments are dispersed, so as to cover red, green, and blue colored layers so as to cover the openings formed by the formed BM. it can. The formation of the overcoat layer 6 can also be performed by a known method.

  FIG. 5 is a schematic cross-sectional view showing one form of an information input image display device (liquid crystal type) 50 using a liquid crystal in the information input image display device of the present invention. The touch panel integrated color filter substrate 10 of the present invention, a TFT array substrate 20 (described later) provided with a TFT array portion 21 including at least a TFT array and pixel electrodes on one surface of the substrate 22 The electrodes are disposed to face each other, and the spacers are used to align the two substrates while keeping the distance between the two substrates constant, to seal and bond the liquid crystal composition, and further to combine the polarizing plates 26 and 28 with a touch panel integrated color filter substrate The information input image display device (liquid crystal type) 50 of the present invention is combined with a backlight unit (not shown) by bonding to the viewing surface 10 and the back surface of the TFT array substrate 20 via adhesive layers 25 and 27. And

  FIG. 6 is a schematic cross-sectional view showing one form of an information input image display device (organic EL type) 60 using an organic EL in the information input image display device of the present invention. A color filter substrate 10 according to the present invention, an organic EL device substrate 30 having an organic EL device 31 and a transparent conductive layer 36 on a TFT array substrate 40 (described later), a colored layer and the organic EL device 31 Are bonded to each other via an adhesive layer 37, and a cover glass 44 is attached to the viewing surface side of the touch panel integrated color filter substrate 10 via an adhesive layer 43, and the information input image display of the present invention is displayed. The apparatus (organic EL type) 60 is used.

  The method and material for producing the organic EL element 31 can use the method and material of Unexamined-Japanese-Patent No. 2012-177735, for example. The organic EL layer 35 emits light in three colors separately from a white organic EL layer containing dominant wavelength light of R, G and B, or an organic EL layer for R light, an organic EL layer for B light and an organic EL layer for G light An organic EL layer or the like may be used. As the back side electrode layer 34, metal films, such as aluminum, can be used.

  The TFT array substrate 20 will be described. Although not shown in FIG. 5, in the TFT array unit 21, TFTs for driving liquid crystal are disposed in the vicinity of the opening in a plan view of each pixel. In addition, a common electrode is provided below the pixel electrode via an insulating layer. The TFT array substrate 40 will be described. Although not shown in FIG. 6, in the TFT array portion 41, a TFT for driving the organic EL is disposed in the vicinity of the opening in a plan view of each pixel. The back side electrodes 34 are individually driven by the respective TFTs of the TFT array unit 41.

  As the electrode material, in the TFT array unit 21 of the transmission type information input image display device (liquid crystal type) 50 as shown in FIG. 5, a transparent conductive film such as ITO is used for both the pixel electrode and the common electrode. On the other hand, in the TFT array section 41 of the information input image display apparatus (organic EL type) 60 as shown in FIG. 6 which is a reflection type, both the pixel electrode and the common electrode use a metal film such as aluminum in addition to the transparent conductive film. be able to. Further, the TFT array substrate 40 of the information input image display device (organic EL type) 60 can be provided with a reflection plate made of aluminum or the like in order to enhance the light extraction efficiency.

  As the substrate 22 of the information input image display device (liquid crystal type) 50 and the substrate 42 of the information input image display device (organic EL type) 60, glass is preferable because the TFT array portions 21 and 41 are formed. If the substrate 42 of the image display device (organic EL type) 60 or the liquid crystal type is also a reflective type, a silicon wafer can also be used.

  As a method of using the information input image display apparatus of the present invention, the frequency of the drive voltage of the touch panel may be different from the frequency of the drive voltage of the liquid crystal or the organic EL. Further, since touch detection easily picks up noise of liquid crystal and EL driving, driving of the touch panel and driving of liquid crystal or organic EL may be time-division driving.

  In the information input image display apparatus (liquid crystal type) 50 and the information input image display apparatus (organic EL type) 60 of the present invention, the position of the pointer in contact with the surface on the viewing surface side, which is the top in FIGS. can do. Here, the pointer corresponds to, for example, a finger, a pen tip, and a brush tip.

  Examples of the present invention will be described below, but the present invention is not limited to these examples.

The non-alkali glass is used as a transparent substrate, and the atomic ratio after film formation is (Zn) / (Zn + In + Sn) = 0.3 on one side of the glass substrate.
(Sn) / (Zn + In + Sn) = 0.007
A composite metal oxide layer was formed (film thickness: 20 nm) by a sputtering method in which oxygen is added to Ar as a carrier gas using an alloy target of Zn, In, and Sn as described above. Furthermore, on the composite metal oxide layer, a metal layer made of Cu was deposited (film thickness: 150 nm) by a sputtering method using Cu as a target and Ar as a carrier gas. Furthermore, a second composite metal oxide layer is formed on the metal layer by the same method and material as the composite metal oxide layer (film thickness: 20 nm), and a three-layer laminated structure (three-layer total film) Thickness: 190 nm). The first composite metal oxide layer and the second composite metal oxide layer have an atomic ratio of Zn, for example, to adjust the side etching amounts (line widths) of the first and second layers. The film thickness may be different.

  Next, a positive resist is applied on the three-layered laminated structure (three-layered film), and patterning is performed so as to have a line width of 3 μm by photolithography, and then a first metal is formed using a hydrochloric acid etchant. Wiring patterns were made.

  Next, on the other surface of the non-alkali glass substrate on which the pattern of the first metal wiring is formed, using the same method and material as the pattern of the first metal wiring, the total film thickness of three layers 190 nm, line width 3 μm The pattern of the second metal wiring was formed to be a pattern in the direction orthogonal to the pattern of the first metal wiring (FIG. 1).

  As described above, the pattern of the first metal wiring and the pattern of the second metal wiring of the touch panel integrated color filter substrate were manufactured using the material and the structure of the present invention. Can be formed with high resolution and high accuracy, and the adhesion between the substrate and the layer is also good.

  After the pattern of the first metal wiring and the pattern of the second metal wiring are formed as shown in FIG. 1, the BM of the color filter is formed by photolithography using a black photosensitive resin on the second surface as shown in FIG. , And the second metal wiring pattern was formed at the same position. Carbon black was used as a black coloring material.

  Subsequently, on the same surface as the surface on which the BM is formed, the red, green, and blue colored layers are coated by a photolithographic method using a photosensitive resin in which color pigments are dispersed so as to cover the openings formed by the BM. It formed so that thickness might be set to 2.0 micrometers. Furthermore, the overcoat layer was formed in the outermost surface, and the touchscreen integrated color filter substrate of this invention was obtained (FIG. 4).

  The colored layer and the pixel electrode face each other with the obtained touch panel integrated color filter substrate and the TFT array substrate provided with a TFT array portion including at least a pixel array and a TFT array on one surface of another glass substrate And the liquid crystal composition was sealed and attached while keeping the distance between the two substrates constant by using a spacer. Furthermore, a polarizing plate was attached to the back surface side of the color filter and the back surface side of the TFT array substrate through an adhesive layer, and combined with the backlight unit to obtain a touch panel integrated information input image display device of the present invention (FIG. 5) .

1 ··· First metal wiring 2 ··· Second metal wiring 3 ··· Transparent substrate 4 (R) ··· Colored layer (red)
4 (G) ・ ・ ・ Colored layer (green)
4 (B) ... colored layer (blue)
5 black matrix 6 overcoat layer 10 touch panel integrated color filter substrate 13 alignment film 15 liquid crystal layer 20 TFT array substrate 21 TFT array Portion 22: Substrate 25, 27: Adhesive layer 26, 28: Polarizer 50: Information input image display device (liquid crystal type)
30 · · · organic EL element substrate 31 · · · organic EL element 33 · · · partition wall 34 · · · back side electrode layer 35 · · · organic EL layer 36 · · · transparent conductive layer 37 · · · adhesive layer 40 · · · · · TFT array substrate 41 · · · TFT array portion 42 · · · Substrate 43 · · · Bonding layer 44 · · · Cover glass 60 · · · Information input image display device (organic EL type)

Claims (6)

A plurality of first metal wires and a black matrix having a plurality of openings on the first surface of the transparent substrate which is alkali-free glass in this order,
A plurality of second metal wires on the second surface of the transparent substrate;
The first metal wiring and the second metal wiring have a function as an electrode of a touch panel, and the line widths of the first metal wiring and the second metal wiring are in the range of 1 μm to 10 μm,
In each of the first metal wiring and the second metal wiring, the layer in contact with the transparent substrate is a composite metal oxide layer of zinc oxide, indium oxide and tin oxide, and copper or the above mentioned composite metal oxide layer It has a laminated structure of copper alloy layers,
A touch panel integrated color filter substrate comprising a red coloring layer, a green coloring layer, and a blue coloring layer in the openings of the black matrix. A plurality of first metal wires and a black matrix having a plurality of openings on the first surface of the transparent substrate which is alkali-free glass in this order,
A plurality of second metal wires on the second surface of the transparent substrate;
The first metal wiring and the second metal wiring have a function as an electrode of a touch panel, and the line widths of the first metal wiring and the second metal wiring are in the range of 1 μm to 10 μm,
In each of the first metal wiring and the second metal wiring, the layer in contact with the transparent substrate is a composite metal oxide layer of zinc oxide, indium oxide and tin oxide, and copper or the above mentioned composite metal oxide layer On the structure in which layers made of copper alloy are laminated, a complex metal oxide layer of zinc oxide, indium oxide and tin oxide is further laminated,
A touch panel integrated color filter substrate comprising a red coloring layer, a green coloring layer, and a blue coloring layer in the openings of the black matrix. Before SL composite metal oxide layer, a zinc excluding oxygen (Zn) and indium (In) and tin (Sn)
In the atomic ratio of the following metals, where
(Zn) / (Zn + In + Sn) is in the range of 0.1 to 0.6, and
The touch panel integrated color filter substrate according to claim 1, wherein (Sn) / (Zn + In + Sn) is in the range of 0.005 to 0.1.   A liquid crystal display device comprising the touch panel integrated color filter substrate according to any one of claims 1 to 3.   The organic electroluminescent display apparatus which comprises the touchscreen integrated color filter board | substrate in any one of Claims 1-3.   The display device according to claim 4 or 5, further comprising: a position of the pointer contacting the surface on the second surface side by a capacitance change between the first metal wiring and the second metal wiring. An information input image display device characterized by detecting.

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