JP6511782B2 - Atomic oscillator and gas cell - Google Patents

Description

  The present invention relates to a magnetic measurement device, a gas cell, a method of manufacturing the magnetic measurement device, and a method of manufacturing the gas cell.

  There is known an optical pumping type magnetic measurement apparatus which irradiates linearly polarized light to a gas cell in which an alkali metal gas is sealed, and measures a magnetic field in accordance with the rotation angle of the polarization plane. In Patent Document 1, an ampoule in which an alkali metal is sealed is accommodated in a reservoir (ample storage chamber), and a laser beam is irradiated to the ampoule to form a through hole in the glass tube of the ampoule, and the alkali metal in the ampoule is removed. A magnetic measuring device is disclosed that includes a gas cell that is vaporized and fills the vapor (gas) from a reservoir into a main chamber through a communication hole.

JP, 2012-183290, A

  By the way, when the ampoule is irradiated with the laser beam, if the ampoule is not stabilized in the reservoir or the position of the ampoule varies depending on the individual, the irradiation position of the laser beam to the ampoule will be shifted, or the ampoule will not be stabilized. In some cases, the ampule may move due to the impact of laser light irradiation. Then, processing in the depth direction by laser light irradiation does not proceed and the glass tube of the ampoule can not be penetrated, resulting in a decrease in manufacturing yield and an increase in manufacturing man-hours due to rework. Also, for example, when the ampoule is inserted from the opening provided on the side surface of the reservoir and stored in the reservoir and the opening is closed by the sealing unit and sealed, the process from housing the ampoule to the sealing The ampule may come out of the reservoir through the opening when handling or sealing with a seal. Also in such a case, a reduction in manufacturing yield and an increase in manufacturing man-hours are caused. Therefore, there is a need for a gas cell and a magnetic measuring device capable of reliably forming a through hole by holding an ampoule stored in a reservoir in a stable state, and a method of manufacturing the same.

  The present invention has been made to solve at least a part of the above-described problems, and can be realized as the following modes or application examples.

  Application Example 1 The magnetic measurement device according to this application example is a magnetic measurement device that measures a magnetic field, and is a communication that connects the first chamber, the second chamber, the first chamber, and the second chamber. A cell portion having a hole and an opening portion provided in the second chamber, a sealing portion sealing the opening portion, an ampoule disposed in the second chamber, the first chamber, and the first chamber A gas cell comprising an alkali metal gas filled in a second chamber, the ampoule being disposed at a predetermined position in the second chamber, and the opening being spaced from the predetermined position It is characterized in that it is provided in

  According to the configuration of the present application example, in the gas cell of the magnetic measurement device, the ampoule is disposed at a predetermined position in the second chamber, so the ampoule is held in a stable state in the second chamber. Therefore, when the ampoule is irradiated with laser light to form a through hole, the displacement of the irradiation position of the laser light to the ampoule is suppressed, and the movement of the ampoule due to the impact of the laser irradiation is also suppressed. The through holes can be formed with certainty. In addition, since the opening is provided at a position away from the predetermined position in the second chamber, an ampoule for handling the opening until it is sealed by the sealing unit or sealing the opening by the sealing unit. Can be prevented from coming out of the opening to the second outdoor. As a result, it is possible to provide a gas cell and a magnetic measurement device capable of improving the productivity by suppressing the decrease in the production yield of the magnetic measurement device and the increase in the number of production steps.

  Application Example 2 In the magnetic measurement device according to the application example described above, an inclined surface is provided on the bottom side of the second chamber, the predetermined position is the lowest position on the inclined surface, and the opening is Is preferably provided at a position higher than the inclined surface.

  According to the configuration of this application example, since the ampoule is disposed at the lowest position on the inclined surface on the bottom side of the second chamber, the ampoule can be stably held in the second chamber. In addition, when arranging the ampoule in the second chamber, if the ampoule is inserted from the opening provided at a position higher than the inclined surface, the ampoule drops on the inclined surface and moves to the lower side along the inclined surface Because the ampoule can be easily put in place. And since the opening is provided at a position higher than the inclined surface, it is possible to effectively prevent the ampoule from coming out of the opening to the second outdoor.

  Application Example 3 In the magnetic measurement apparatus according to the application example described above, the first chamber and the second chamber are disposed to be aligned along a first direction, and the inclined surface is the first surface. The ampoule is longitudinal, the longitudinal direction being disposed along the first direction, the opening being It is preferable to be provided at a position away from the predetermined position in the two directions.

  According to the configuration of the present application example, the inclined surface is inclined along the second direction, and the ampoule is disposed along the first direction in which the longitudinal direction intersects with the inclination direction of the inclined surface. The ampoule can be held in a stable state in the second chamber. In addition, since the opening is provided at a position away from the predetermined position in the second direction along the inclination direction of the inclined surface, the ampoule from the opening so that the longitudinal direction of the ampoule is along the first direction. Can be inserted into the second chamber, and the ampoule can be prevented from coming out of the opening to the second outdoor.

  Application Example 4 In the magnetic measurement device according to the application example described above, the first chamber and the second chamber are arranged to be aligned along a first direction, and the inclined surface is the first surface. The ampoule has a longitudinal direction and the longitudinal direction is disposed along a second direction crossing the first direction, the opening being It is preferable to be provided at a position away from the predetermined position in the 1 direction.

  According to the configuration of this application example, the inclined surface is inclined along the first direction, and the ampule is disposed along the second direction in which the longitudinal direction intersects with the inclination direction of the inclined surface. The ampoule can be held in a stable state in the second chamber. In addition, since the opening is provided at a position away from the predetermined position in the first direction along the inclination direction of the inclined surface, the ampule is arranged such that the longitudinal direction of the ampoule extends from the opening along the second direction. Can be inserted into the second chamber, and the ampoule can be prevented from coming out of the opening to the second outdoor.

  Application Example 5 In the magnetic measurement apparatus according to the application example described above, the second chamber has a convex portion including two of the inclined surfaces that intersect with each other in the same direction and in opposite directions. Preferably, the opening is disposed between a position where the inclined surfaces intersect with the predetermined position in a direction in which the two inclined surfaces are inclined.

  According to the configuration of the application example, since the convex portion is configured by the two inclined surfaces that intersect with each other in the opposite directions, the bottom surface side of the second chamber has two inclined surfaces in a cross-sectional view. It has a mountain-like shape with the intersecting position as the apex. Since the lowest position on such a mountain-like inclined surface is the predetermined position where the ampoule is disposed, the ampoule can be stably held in the second chamber. Also, the opening is disposed between the predetermined position and the position of the apex of the mountain-like convex portion in the direction in which the inclined surface inclines, that is, at a position above the lowest predetermined position on the inclined surface. Therefore, by inserting the ampoule from the opening, the ampoule can be moved along the inclined surface and easily placed at a predetermined position.

  Application Example 6 In the magnetic measurement device according to the application example described above, the second chamber has a concave portion formed by the two inclined surfaces intersecting with each other in the same direction and inclined in opposite directions. Preferably, the opening is disposed at a position distant from a position where the inclined surfaces intersect with each other in a direction in which the two inclined surfaces are inclined.

  According to the configuration of this application example, since the concave portion is constituted by the two inclined surfaces which are inclined and intersect with each other in the opposite direction, in the bottom portion side of the second chamber, the two inclined surfaces cross each other in the cross sectional view It has a valley-like shape with the valley position as the valley position. Since the position of the lowest valley bottom in such a valley-like inclined surface is a predetermined position where the ampoule is disposed, the ampoule can be stably held in the second chamber. In addition, since the opening is disposed at a position away from the bottom position of the valley-shaped concave portion in the direction in which the inclined surface inclines, that is, above the lowest predetermined position on the inclined surface, the ampoule is opened. By inserting from the part, the ampoule can be moved along the inclined surface and easily placed at a predetermined position.

  Application Example 7 In the magnetic measurement apparatus according to the application example described above, preferably, the communication hole is provided at a position away from the predetermined position.

  According to the configuration of the application example, the communication hole communicating the second chamber in which the ampoule is disposed and the first chamber is provided at a position apart from the position where the ampoule is disposed. Therefore, when forming the through holes by irradiating the ampoule with laser light, the alkali metal gas may be filled into the first chamber while suppressing the intrusion of the fragments of the ampoule and the solid of the alkali metal into the first chamber. it can.

  Application Example 8 In the magnetic measurement device according to the application example described above, preferably, the communication hole is provided at a position higher than the predetermined position.

  According to the configuration of the application example, the communication hole communicating the second chamber in which the ampoule is disposed and the first chamber is provided at a position higher than the position in which the ampoule is disposed. Therefore, when forming the through holes by irradiating the ampoule with laser light, the alkali metal gas is filled in the first chamber while effectively suppressing the intrusion of the fragments of the ampoule and the solid of the alkali metal into the first chamber. can do.

  Application Example 9 The gas cell according to this application example includes a first chamber, a second chamber, a communication hole communicating the first chamber and the second chamber, and an opening provided in the second chamber. And a sealing portion for sealing the opening, an ampoule disposed in the second chamber, and a gas of an alkali metal filled in the first chamber and the second chamber. The ampoule is disposed at a predetermined position in the second chamber, and the opening is provided at a position separated from the predetermined position.

  According to the configuration of this application example, in the gas cell, since the ampoule is disposed at a predetermined position in the second chamber, the ampoule is held in a stable state in the second chamber. Therefore, when the ampoule is irradiated with laser light to form a through hole, the displacement of the irradiation position of the laser light to the ampoule is suppressed, and the movement of the ampoule due to the impact of the laser irradiation is also suppressed. Through holes can be formed stably and reliably. In addition, since the opening is provided at a position away from the predetermined position in the second chamber, an ampoule for handling the opening until it is sealed by the sealing unit or sealing the opening by the sealing unit. Can be prevented from coming out of the opening to the second outdoor. By these, the gas cell which can improve productivity can be provided.

  Application Example 10 In the method of manufacturing a magnetic measurement device according to this application example, the first chamber, the second chamber, the communication hole communicating the first chamber and the second chamber, and the second chamber are used. And disposing an ampoule having an alkali metal material filled therein and inserting the ampoule into the second chamber of the cell portion having the provided opening portion; And a step of forming a through hole in the ampoule by irradiating the ampoule with a laser beam, and the arranging step arranges the ampoule at a predetermined position in the second chamber, The opening may be provided at a position away from the predetermined position.

  According to the manufacturing method of this application example, since the ampoule is placed at the predetermined position in the second chamber in the arranging step, the ampoule is held in a stable state in the second chamber. Therefore, in the step of irradiating the ampoule with the laser beam to form the through hole, the displacement of the irradiation position of the laser beam to the ampoule is suppressed, and the movement of the ampoule due to the impact by the laser irradiation is also suppressed. Through holes can be formed stably and reliably. In addition, since the opening is provided at a position away from the predetermined position in the second chamber, handling up to the step of sealing the opening with the sealing portion and the step of sealing the opening with the sealing portion Can prevent the ampoule from coming out of the opening to the second outdoor. By these, the productivity of the magnetic measurement device can be improved.

  Application Example 11 A method of manufacturing a gas cell according to this application example includes a first chamber, a second chamber, a communication hole communicating the first chamber and the second chamber, and the second chamber. An arrangement step of inserting and arranging an ampoule filled with an alkali metal material from the opening in the second chamber of the cell unit having the opening, and sealing the opening with the sealing unit And a step of forming a through hole in the ampoule by irradiating the ampoule with a laser beam, and in the arranging step, the ampoule is disposed at a predetermined position in the second chamber, and the opening is formed. The part is provided at a position separated from the predetermined position.

  According to the manufacturing method of this application example, since the ampoule is placed at the predetermined position in the second chamber in the arranging step, the ampoule is held in a stable state in the second chamber. Therefore, in the step of irradiating the ampoule with the laser beam to form the through hole, the displacement of the irradiation position of the laser beam to the ampoule is suppressed, and the movement of the ampoule due to the impact by the laser irradiation is also suppressed. Through holes can be formed stably and reliably. In addition, since the opening is provided at a position away from the predetermined position in the second chamber, handling up to the step of sealing the opening with the sealing portion and the step of sealing the opening with the sealing portion Can prevent the ampoule from coming out of the opening to the second outdoor. By these, the productivity of the gas cell can be improved.

FIG. 1 is a block diagram showing the configuration of a magnetic measurement device according to the present embodiment. Schematic which shows a structure of the gas cell which concerns on 1st Embodiment. BRIEF DESCRIPTION OF THE DRAWINGS The schematic sectional drawing which shows the structure of the ampoule which concerns on 1st Embodiment. BRIEF DESCRIPTION OF THE DRAWINGS The schematic sectional drawing explaining the cross-sectional shape of the gas cell which concerns on 1st Embodiment, and arrangement | positioning of an ampule. FIG. 6 is a view for explaining the method of manufacturing a gas cell according to the first embodiment. FIG. 6 is a view for explaining the method of manufacturing a gas cell according to the first embodiment. Schematic which shows the structure of the gas cell which concerns on 2nd Embodiment. The schematic sectional drawing explaining the cross-sectional shape of the gas cell which concerns on 2nd Embodiment, and arrangement | positioning of an ampule. Schematic which shows the structure of the gas cell which concerns on 3rd Embodiment. The schematic sectional drawing explaining the cross-sectional shape of a gas cell and arrangement | positioning of an ampule which concern on 4th Embodiment. Schematic which shows the structure of the gas cell which concerns on the modification 1. FIG.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The drawings to be used are appropriately enlarged, reduced, or exaggerated so that the parts to be described become recognizable. Moreover, illustration may be abbreviate | omitted except the component required for description.

First Embodiment
<Configuration of Magnetic Measurement Device>
The configuration of the magnetic measurement device according to the first embodiment will be described with reference to FIG. FIG. 1 is a block diagram showing the configuration of the magnetic measurement device according to the present embodiment. The magnetic measurement device 100 according to the present embodiment is a magnetic measurement device using nonlinear optical rotation (NMOR). The magnetic measurement apparatus 100 is, for example, a biological condition measurement apparatus (such as a magnetocardiograph or magnetoencephalograph) that measures a minute magnetic field generated from a living body, such as a magnetic field from the heart (cardiac magnetism) or a magnetic field from the brain (brain magnetism). Used for The magnetic measurement device 100 can also be used as a metal detector or the like.

  As shown in FIG. 1, the magnetic measurement apparatus 100 includes a light source 1, an optical fiber 2, a connector 3, a polarizing plate 4, a gas cell 10, a polarization separator 5, and a photodetector (Photo Detector: PD) 6. , A light detector 7, a signal processing circuit 8, and a display device 9. In the gas cell 10, an alkali metal gas (alkali metal atoms in a gaseous state) is enclosed. As an alkali metal, cesium (Cs), rubidium (Rb), potassium (K), sodium (Na) etc. can be used, for example. Below, the case where cesium is used as an alkali metal is taken and demonstrated to an example.

  The light source 1 is a device that outputs a laser beam of a wavelength (for example, 894 nm corresponding to the D1 line) corresponding to the absorption line of cesium, for example, a tunable laser. The laser beam output from the light source 1 is so-called CW (Continuous Wave) light having a constant light quantity continuously.

  The polarizing plate 4 is an element that polarizes the laser beam in a specific direction to be linearly polarized. The optical fiber 2 is a member for guiding the laser beam output by the light source 1 to the gas cell 10 side. As the optical fiber 2, for example, a single mode optical fiber that propagates only the fundamental mode is used. The connector 3 is a member for connecting the optical fiber 2 to the polarizing plate 4. The connector 3 is screwed to connect the optical fiber 2 to the polarizing plate 4.

  The gas cell 10 is a box (cell) having a void inside, and the alkali metal vapor (alkali metal gas 13 shown in FIG. 2 (b)) is present in the void (main chamber 14 shown in FIG. 2 (b)). It is enclosed. The configuration of the gas cell 10 will be described later.

  The polarization splitter 5 is an element that splits the incident laser beam into beams of two polarization components orthogonal to each other. The polarization splitter 5 is, for example, a Wollaston prism or a polarization beam splitter. The photodetector 6 and the photodetector 7 are detectors having sensitivity to the wavelength of the laser beam, and output a current corresponding to the light amount of incident light to the signal processing circuit 8. The light detector 6 and the light detector 7 are desirably made of non-magnetic materials, as they may affect the measurement when they generate a magnetic field. The photodetector 6 and the photodetector 7 are disposed on the same side (downstream side) as the polarization splitter 5 with respect to the gas cell 10.

  The arrangement of each part in the magnetic measurement apparatus 100 will be described along the path of the laser beam. The light source 1 is positioned at the uppermost stream of the path of the laser beam, and from the upstream side, the optical fiber 2, connector 3, polarizing plate 4 , The gas cell 10, the polarization splitter 5, and the photodetectors 6, 7 in this order.

  The operation of each part in the magnetic measurement apparatus 100 will be described along the progress of the laser beam. The laser beam output from the light source 1 is guided to the optical fiber 2 and reaches the polarizing plate 4. The laser beam that has reached the polarizing plate 4 becomes linearly polarized light with a higher degree of polarization. The laser beam transmitted through the gas cell 10 excites (optically pumps) alkali metal atoms enclosed in the gas cell 10. At this time, the laser beam is rotated by its polarization plane rotating action according to the strength of the magnetic field. The laser beam transmitted through the gas cell 10 is split by the polarization splitter 5 into beams of two polarization components. The light amounts of the beams of the two polarization components are measured (probed) by the light detector 6 and the light detector 7.

  The signal processing circuit 8 receives a signal indicating the light amount of the beam measured by the light detector 6 and the light detector 7 from each. The signal processing circuit 8 measures the rotation angle of the polarization plane of the laser beam based on each of the received signals. The rotation angle of the polarization plane is expressed as a function based on the strength of the magnetic field in the propagation direction of the laser beam (for example, D. Budker, et al., "Resonant non-linear magneto-optical rotation effect of atoms", review of · See the equation (2) in Modern Physics, USA, American Physical Society, October 2002, Vol. 74, No. 4, pp. 1153-1201, which relates to linear optical rotation In the case of NMOR, almost similar expressions can be used). The signal processing circuit 8 measures the strength of the magnetic field in the propagation direction of the laser beam from the rotation angle of the polarization plane. The display device 9 displays the strength of the magnetic field measured by the signal processing circuit 8.

  Subsequently, the gas cell according to the first embodiment and an ampoule used for the gas cell will be described with reference to FIGS. 2, 3 and 4. FIG. 2 is a schematic view showing the configuration of the gas cell according to the first embodiment. More specifically, FIG. 2 (a) is a schematic plan view of the gas cell, FIG. 2 (b) is a schematic cross-sectional view along the line AA 'in FIG. 2 (a), and FIG. 2 (c) is a gas cell Side view of FIG.

  FIG. 3 is a schematic cross-sectional view showing the configuration of the ampoule according to the first embodiment. Specifically, FIG. 3 (a) is a schematic cross-sectional view along the longitudinal direction of the ampoule, and FIG. 3 (b) is a schematic cross-sectional view along the C-C 'line of FIG. 3 (a). FIG. 4 is a schematic cross-sectional view for explaining the cross-sectional shape of the gas cell and the arrangement of the ampoule according to the first embodiment. 4 (a) is a schematic cross-sectional view taken along the line B-B 'of FIG. 2 (a), and FIGS. 4 (b) and 4 (c) schematically show different examples in the first embodiment. FIG.

<Configuration of gas cell>
2 (a), (b) and (c) show a gas cell 10 according to the first embodiment. In FIGS. 2A, 2B, and 2C, the height direction of the gas cell 10 is taken as the Z axis, and the upper side is taken as the + Z direction. The longitudinal direction of the gas cell 10 is taken as the X axis as the first direction, and the right side in FIGS. 2A and 2B is taken as the + X direction. The width direction of the gas cell 10 is a Y-axis as a second direction in the direction intersecting the Z-axis and the X-axis, and the left side in the paper of FIG. 2C is a + Y-direction.

  2 (a) is a plan view of the gas cell 10 viewed from the + Z direction side, and FIG. 2 (b) is a cross-sectional view of the gas cell 10 taken along the line AA ', viewed from the -Y direction side. FIG.2 (c) is the side view which looked at the gas cell 10 from the-X direction side. In the present specification, viewing the gas cell 10 from the + Z direction side as shown in FIG. 2A is referred to as “plan view”. Further, viewing the cross section of the gas cell 10 in a direction intersecting with the cross section, for example, viewing the cross section along the X-axis from the -Y direction side as shown in FIG.

  As shown to Fig.2 (a), the gas cell 10 which concerns on this embodiment is comprised by the cell part 12 and the sealing part 19. As shown in FIG. The cell portion 12 is a box (cell) having an air gap inside, and is formed of, for example, quartz glass. The inner wall of the cell portion 12 may be coated with, for example, paraffin. The thickness of the cell portion 12 is 1 mm to 5 mm, for example, about 1.5 mm.

  The cell unit 12 has a main chamber 14 as a first chamber and a reservoir 16 as a second chamber as an internal space. The main chamber 14 and the reservoir 16 are arranged side by side along the X direction, and communicate with each other through the communication hole 15. An ampoule 20 is disposed in the reservoir 16. The configuration of the ampoule 20 will be described later. An opening 18 is provided on the −X direction side of the reservoir 16, that is, on the opposite side of the communication hole 15.

  The A-A 'line is a line passing the center of the opening 18, the center of the reservoir 16, the center of the communication hole 15, and the main chamber 14 along the X-axis direction. The B-B ′ line is a line passing through the reservoir 16 and the ampoule 20 along the Y-axis direction.

  As shown in FIG. 2 (b), the communication hole 15 is provided on the upper side (+ Z direction side) of the main chamber 14 and the reservoir 16. The opening 18 is provided on the upper side of the reservoir 16. The main chamber 14 and the reservoir 16 inside the cell portion 12 are filled with a gas 13 (hereinafter referred to as an alkali metal gas) in which an alkali metal is evaporated. In the main chamber 14 and the reservoir 16, in addition to the alkali metal gas 13, an inert gas such as a rare gas may be present.

  As shown in FIG. 2 (c), the communication hole 15 is circular. The inner diameter of the communication hole 15 is, for example, about 0.4 mm to 1 mm. The opening 18 is also circular. The inner diameter of the opening 18 is, for example, about 0.4 mm to 1.5 mm. The opening 18 is sealed by the sealing portion 19 so that the cell portion 12 (main chamber 14 and reservoir 16) is sealed. The sealing portion 19 has, for example, a rectangular shape, but may have another shape such as a circular shape. For example, quartz glass is used as a material of the sealing portion 19. The sealing portion 19 is fixed to the cell portion 12 via, for example, a low melting point glass frit (not shown) disposed around the opening 18.

<Ampoule Configuration>
As shown in FIG. 3 (a), the ampoule 20 has a longitudinal direction. FIG. 3A shows an X-Z cross section when the ampoule 20 is arranged such that the longitudinal direction thereof is along the X-axis direction. The ampoule 20 is constituted by a hollow glass tube 22. The glass tube 22 is made of, for example, borosilicate glass.

  The glass tube 22 extends along one direction (X-axis direction in FIG. 3A), and both ends thereof are welded. Thus, the hollow glass tube 22 is sealed. In addition, the shape of the both ends of the glass tube 22 is not limited to a round shape as shown to Fig.3 (a), The shape near a plane, the shape in which one part pointed, etc. may be sufficient. The hollow interior of the glass tube 22 is filled with an alkali metal solid (particulate or powdery alkali metal atoms) 24 as an alkali metal material. As the alkali metal solid 24, rubidium, potassium and sodium can be used in addition to cesium as described above.

  FIG. 3A shows a state in which the ampoule 20 (glass tube 22) is sealed. Although the glass tube 22 is in a sealed state when the ampoule 20 is manufactured, the through hole 21 is formed in the glass tube 22 when the gas cell 10 is completed (see FIG. 4A). . As a result, the alkali metal solid 24 in the ampoule 20 evaporates and flows out into the gas cell 10, and the space of the cell portion 12 is filled with the alkali metal gas 13 (see FIG. 2B). A gap of, for example, about 1.5 mm in the + Z direction is provided between the upper surface of the ampoule 20 and the inner surface of the cell portion 12 so that the alkali metal solid 24 easily evaporates and flows out from the inside of the ampoule 20. ing.

  FIG. 3 (b) shows a Y-Z cross section in a direction intersecting the longitudinal direction of the ampoule 20. As shown in FIG. 3B, the Y-Z cross-sectional shape of the glass tube 22 is, for example, substantially circular, but may be another shape. The outer diameter φ of the glass tube 22 is 0.2 mm ≦ φ ≦ 1.2 mm. The thickness t of the glass tube 22 is 0.1 mm ≦ t ≦ 0.5 mm, and preferably about 20% of the outer diameter φ. If the thickness t of the glass tube 22 is less than 0.1 mm, the glass tube 22 is easily broken. If the thickness t of the glass tube 22 exceeds 0.5 mm, the through hole 21 is formed in the glass tube 22 (Details will be described later) becomes difficult.

<Cross-sectional shape of gas cell and placement of ampoule>
As shown to Fig.4 (a), the reservoir | reserver 16 has the inclined surface 31a which inclines along the Y-axis direction, and the inclined surface 31b in the bottom part side (-Z direction side). The inclined surface 31a is inclined from the upper side to the bottom side in the + Y direction, and the inclined surface 31b is inclined from the upper side to the bottom in the -Y direction. The two inclined surfaces 31a and 31b which are inclined in the opposite directions and intersect with each other form a mountain-shaped convex portion in a cross-sectional view along the Y-axis direction. The cross | intersection part 32 which inclined surface 31a, 31b cross | intersects becomes the vertex of the mountain-like convex-shaped part by cross sectional view. In a plan view, the crossing portion 32 extends in a ridge line along the X-axis direction (see FIG. 2A).

  The ampoule 20 is disposed at the lowest position on the inclined surface 31 b as a predetermined position in the reservoir 16. Here, the lowest position refers to the lowest (most -Z direction side) position where the ampoule 20 can be disposed, and in the present embodiment, the ampoule 20 is provided on the inclined surface 31 b and the side wall 16 a of the reservoir 16. The contact position is the lowest position. The ampoule 20 is disposed such that its longitudinal direction is along the extending direction of the crossing portion 32, that is, the X-axis direction (see FIG. 2A). Thus, the ampoule 20 is held in the reservoir 16 in a stable state.

  The position which projected the opening part 18 arrange | positioned at the -X direction side of the reservoir | reserver 16 to the cross section which followed the B-B 'line | wire in FIG. 4 (a) is shown with a dashed-two dotted line. The opening 18 is provided at a position separated in the + Y direction from the above-described predetermined position where the ampoule 20 is disposed. More specifically, the opening 18 is a position between the predetermined position where the ampoule 20 is disposed and the intersection 32 in the Y-axis direction, that is, a position above the lowest predetermined position on the inclined surface 31 b. It is provided at a position higher than the inclined surface 31 b.

  The opening 18 is a hole for storing the ampoule 20 in the reservoir 16. Since the opening 18 is provided at the upper position of the inclined surface 31 b, the ampoule 20 inserted from the opening 18 moves to the predetermined position which is the lowest position along the inclined surface 31 b.

  The communication hole 15 is preferably provided at a position apart from the above-described predetermined position where the ampoule 20 is disposed. The communication hole 15 is a hole for causing the alkali metal gas 13 in which the alkali metal solid 24 has evaporated in the reservoir 16 to flow out to the main chamber 14. On the other hand, when fragments of the glass tube 22 generated when forming the through hole 21 in the ampoule 20 and the alkali metal solid 24 released from the inside of the ampoule 20 enter the main chamber 14 through the communication hole 15, magnetic measurement The measurement accuracy of the device 100 will be reduced. Therefore, the communication hole 15 is preferably provided at a high position in the reservoir 16. The relative position of the communication hole 15 with respect to the opening 18 is not particularly limited.

  Here, the diameter of the ampoule 20 is φ, the inner diameter of the opening 18 is D1, and the inner diameter of the communication hole 15 is D2. Further, the width of the chamber in the reservoir 16 is W, the height of the chamber is H1, and the height of the intersection 32 is H2. Since it is essential for the ampoule 20 to pass through the opening 18 and it is desirable not to pass through the communication hole 15, D2 <φ <D1. In order to easily store the ampoule 20 in the reservoir 16 and hold it in a stable position, φ / 2 <H2 <(H1−φ) and H2 ≦ (H1−D1). It is preferable that 4φ <W.

  For example, when the diameter φ of the ampoule 20 is 1.0 mm, the inner diameter D1 of the opening 18 can be about 1.2 mm, and the inner diameter D2 of the communication hole 15 can be about 0.4 mm. In addition, the width W of the chamber in the reservoir 16 can be about 5.0 mm, the height H1 of the room can be about 2.5 mm, and the height H2 of the intersection 32 can be about 1.2 mm.

  The cross-sectional shape of the reservoir 16 of the gas cell 10 according to the first embodiment is not limited to the shape shown in FIG. 4 (a). The cross-sectional shape of the reservoir 16 may be, for example, a shape having different inclined surfaces as shown in FIG. 4 (b) or 4 (c).

  In the gas cell 10A shown in FIG. 4B, the reservoir 16A of the cell portion 12A has the inclined surface 31a and the inclined surface 31b on the bottom side, but the lengths (widths in the Y-axis direction) are different from each other ing. In other words, the position of the intersection 32 where the two inclined surfaces 31a and 31b intersect with each other is shifted in the + Y direction from the center position in the Y-axis direction in the reservoir 16A.

  When the ampoule 20 is disposed on the longer inclined surface 31b, the opening 18 is provided to be offset from the central position in the Y-axis direction in the reservoir 16A in the + Y direction so as to be located on the upper side of the inclined surface 31b. It is done. Even with such a configuration, the same effect as that of the gas cell 10 shown in FIG. 4A can be obtained. In the example shown in FIG. 4B, the inclination angle of the inclined surface 31a and the inclination angle of the inclined surface 31b are different, but both may be the same.

  In the gas cell 10B shown in FIG. 4C, the reservoir 16B of the cell portion 12B has only the inclined surface 31b on the bottom side. Therefore, in the gas cell 10B, the intersection 32 does not exist, and the opening 18 is provided on the upper side of the inclined surface 31b, that is, at a position close to the communication hole 15. Even with such a configuration, the same effect as that of the gas cell 10 shown in FIG. 4A can be obtained.

<Method of manufacturing gas cell>
Next, a method of manufacturing the gas cell 10 will be described with reference to FIGS. 5 and 6. 5 and 6 are views for explaining the method of manufacturing the gas cell according to the first embodiment. Specifically, FIG. 5 (a) is a schematic cross-sectional view corresponding to FIG. 2 (b), and FIGS. 5 (b), 5 (c) and 6 (a) correspond to FIG. 2 (c). It is a side view, and FIG.6 (b) and FIG.6 (c) are sectional drawings corresponding to FIG. 4 (a).

First, the cell unit 12 shown in FIG. 5 (a) is prepared. Although illustration is omitted, for example, a glass plate made of quartz glass is cut to prepare glass plate members corresponding to the respective wall surfaces constituting the cell portion 12. Then, these glass plate members are assembled, and the glass plate members are joined together by an adhesive or welding to obtain a cell portion 12 having a main chamber 14 and a reservoir 16 as shown in FIG. 5 (a). At this stage, the opening 18 of the cell portion 12 is open. The inclined surfaces 31a and 31b (see FIG. 4A) in the reservoir 16 are formed by processing a glass plate member to form an inclined surface, or by arranging the glass plate members obliquely and joining them. Can be configured with

  Subsequently, the ampoule 20 is stored in the reservoir 16 of the cell unit 12 (arrangement step). As shown in FIG. 5 (b), the ampoule 20 is inserted from an opening 18 provided on the reservoir 16 side of the cell unit 12, and stored in the reservoir 16. As shown in FIG. 5C, since the opening 18 is at a position higher than the inclined surface 31b, the ampoule 20 inserted from the opening 18 falls onto the inclined surface 31b. In addition, by providing the opening 18 closer to the intersection 32, the drop when the ampoule 20 is inserted from the opening 18 and dropped onto the inclined surface 31b is reduced, and the ampoule 20 is accidentally damaged by an impact or the like. Reduce the risk of

  The opening 18 is disposed on the upper side of the inclined surface 31 b with respect to the predetermined position where the ampoule 20 is disposed. Therefore, the ampoule 20 moves along the inclined surface 31b toward the bottom indicated by the arrow so as to slide on the inclined surface 31b or to roll the inclined surface 31b with the longitudinal direction as the rotation axis. Then, the ampoule 20 stops at a position in contact with the side wall 16a, that is, at a predetermined position. At this time, the ampoule 20 is guided by the inclined surface 31 b and the side wall 16 a so that the longitudinal direction thereof is along the X-axis direction. Therefore, ampoule 20 can be easily placed at a predetermined position in reservoir 16.

  At this stage, as shown in FIG. 3A, the ampoule 20 is in a state where the hollow glass tube 22 is filled with the alkali metal solid 24 and sealed. The ampoule 20 is filled with the alkali metal solid 24 in the hollow interior of the tubular glass tube 22 under a low pressure environment (ideally under vacuum) close to vacuum, and the both ends of the glass tube 22 are welded and sealed respectively To form. Since alkali metals such as cesium used as the alkali metal solid 24 are rich in reactivity and can not be handled in the atmosphere, they are housed in the cell unit 12 in a sealed state in the ampoule 20 under a low pressure environment.

  Subsequently, as shown in FIG. 6 (a), degassing in the cell portion 12 is sufficiently performed, and the cell portion 12 (main chamber 14, communication hole 15, and reservoir) in a state in which there are very few impurities in the internal space. 16) Seal (sealing process). For example, a low melting point glass frit (not shown) is disposed around the opening 18 in at least one of the cell portion 12 and the sealing portion 19 under a low pressure environment (ideally under vacuum) near vacuum, and the cell portion The cell portion 12 is sealed by fixing and sealing the sealing portion 12 and the sealing portion 19.

  In the handling and sealing steps from the placement step of storing the ampoules 20 to the sealing step, it is necessary to be careful that the ampoules 20 stored in the reservoir 16 do not come out of the cell portion 12 from the opening 18 is there. The posture and the positional relationship between the cell portion 12 and the sealing portion 19 in the sealing step are not particularly limited. For example, the opening 18 is formed in the cell portion 12 with respect to the sealing portion 19 disposed on the lower side. In the case where the side is placed downward, the ampoule 20 stored in the reservoir 16 may come out of the cell section 12 from the opening 18 on the lower side. In the present embodiment, since the opening 18 is provided at a position apart from the predetermined position where the ampoule 20 is disposed and higher than the predetermined position, the ampoule 20 may come out of the cell portion 12 Risk can be kept small.

  Subsequently, as shown in FIG. 6B, the pulse laser beam 70 is condensed by the condenser lens 72, and the glass tube 22 of the ampoule 20 is irradiated with the pulse laser beam 70 interposed therebetween via the cell portion 12. As a result, as shown in FIG. 6C, the through holes 21 are formed in the glass tube 22, and the alkali metal solid 24 in the ampoule 20 is evaporated to flow out into the gaps of the gas cell 10. Since the laser beam is excellent in directivity and convergence, the through hole 21 can be easily formed in the glass tube 22 by irradiating the pulse laser beam 70.

  Here, it is necessary to form the through hole 21 in the glass tube 22 of the ampoule 20 without damaging the cell portion 12. Therefore, when the cell portion 12 is formed of quartz glass and the glass tube 22 is formed of borosilicate glass, for example, pulsed laser light 70 having a wavelength in the ultraviolet region is used. Light in the ultraviolet range transmits through quartz glass but is slightly absorbed by borosilicate glass. Thereby, the glass tube 22 of the ampoule 20 can be selectively processed to form the through hole 21 without damaging the cell portion 12.

  By forming the through holes 21 in the ampoule 20, the seal of the ampoule 20 is broken in the reservoir 16 of the cell portion 12, and the alkali metal solid 24 evaporates from the ampoule 20 and flows out as the alkali metal gas 13. As shown in FIG. 2 (b), the alkali metal gas 13 that has flowed out into the reservoir 16 flows into the main chamber 14 of the cell portion 12 through the communication hole 15 and is diffused. As a result, the void of the cell portion 12 is filled with the alkali metal gas 13.

  By the way, in the step shown in FIG. 6B, if the bottom of the reservoir 16 is a flat surface, the ampule 20 is not held in a stable state in the reservoir 16. For example, when handling the cell portion 12, The ampoule 20 may be deviated from the predetermined position due to inclination or impact. In addition, if the ampoule 20 is not held in a stable state, the ampoule 20 may move and deviate from a predetermined position due to an impact caused by the irradiation of the pulse laser beam 70.

  When the pulse laser beam 70 is irradiated, if the position of the ampoule 20 is shifted and varies depending on the individual or the ampoule 20 is moved, the irradiation position of the pulse laser beam 70 to the ampoule 20 is shifted. Then, processing in the depth direction does not proceed, and the glass tube 22 can not be penetrated, which results in a reduction in manufacturing yield in the process of manufacturing the gas cell 10 and an increase in manufacturing man-hours due to rework.

  In this embodiment, since the inclined surfaces 31a and 31b are provided on the bottom side of the reservoir 16, the ampoule 20 is disposed at a predetermined position in the reservoir 16 along the X-axis direction, and is stable at that position. Is held in the Therefore, it can be suppressed that the position of the ampoule 20 in the reservoir 16 varies, and that the ampoule 20 is moved due to an impact. As a result, the through holes 21 can be stably and reliably formed in the ampoule 20, so that the manufacturing yield of the gas cell 10 can be prevented from being reduced and the number of manufacturing steps can be suppressed, and the productivity can be improved.

  In the process of forming the through hole 21 in the ampoule 20, the alkali metal solid 24 may be evaporated and flowed out from the inside of the ampoule 20, and therefore, it is not limited to the formation of the through hole 21; It may be produced and the ampoule 20 may be divided, or the glass tube 22 may be broken. However, in such a case, when the fragments of the glass tube 22 and the alkali metal solid 24 released from the inside of the ampoule 20 intrude into the main chamber 14 through the communication hole 15, the measurement accuracy of the magnetic measuring device 100 is reduced. It will incur.

  In the present embodiment, since the communication hole 15 is provided at a position away from the predetermined position where the ampoule 20 is disposed and at a high position in the reservoir 16, the fragments of the glass tube 22 and the alkali metal solid 24 are Invasion into the main room 14 can be suppressed. As a result, the magnetic measurement device 100 having excellent measurement accuracy can be manufactured and provided.

  Note that the method of manufacturing the magnetic measurement device 100 according to the present embodiment includes the method of manufacturing the gas cell 10 described above. Since the well-known method can be used in processes other than the process of manufacturing the gas cell 10 in the process of manufacturing the magnetic measurement apparatus 100 according to the present embodiment, the description thereof is omitted.

Second Embodiment
The second embodiment is different from the first embodiment in that the cross-sectional shape of the reservoir 16 is different, and a concave portion having a valley shape in cross section is formed by the two inclined surfaces 31a and 31b. The configuration and sectional shape of the gas cell and the arrangement of the ampoule according to the second embodiment will be described with reference to FIGS. 7 and 8 as to differences from the first embodiment. In addition, about the component which is common in 1st Embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  FIG. 7 is a schematic view showing a configuration of a gas cell according to a second embodiment. Specifically, FIG. 7 (a) is a schematic plan view of the gas cell, FIG. 7 (b) is a schematic cross-sectional view along line AA 'of FIG. 7 (a), and FIG. 7 (c) is a gas cell Side view of FIG. FIG. 8 is a schematic cross-sectional view for explaining the cross-sectional shape of the gas cell and the arrangement of the ampoule according to the second embodiment. Fig.8 (a) is a schematic sectional drawing in alignment with the B-B 'line | wire of FIG. 7 (a), FIG.8 (b) is a schematic sectional drawing which shows the different example in 2nd Embodiment.

<Configuration of gas cell>
As shown to Fig.7 (a), the gas cell 40 which concerns on 2nd Embodiment is comprised by the cell part 42 and the sealing part 19. As shown in FIG. The cell portion 42 has a main chamber 14 and a reservoir 46 as an internal void. The arrangement of the main chamber 14, the communication hole 15, and the reservoir 46 in plan view is substantially the same as that of the first embodiment. However, the predetermined position where the ampoule 20 is disposed in the reservoir 46 and the position of the opening 18 in the plan view are different from those of the first embodiment.

  As shown in FIG. 7B, a cross section taken along the line A-A 'passing the center of the communication hole 15 and the center of the opening 18 along the X-axis direction of the gas cell 40 has two inclined surfaces described later The third embodiment is substantially the same as the first embodiment except that the positional relationship between 31a and 31b is different. As shown in FIG. 7C, the opening 18 is provided at a position away from the predetermined position where the ampoule 20 is disposed in the -Y direction. The sealing portion 19 is disposed at a position corresponding to the opening 18.

<Cross-sectional shape of gas cell and placement of ampoule>
As shown in FIG. 8A, the reservoir 46 has, on the bottom side, an inclined surface 31a and an inclined surface 31b inclined along the Y-axis direction, but the inclined surface 31a and the inclined surface 31b The positional relationship in the Y-axis direction is opposite to that in the first embodiment. Therefore, a valley-shaped concave portion is constituted by these two inclined surfaces 31a and 31b which incline and intersect in the opposite direction to each other in a cross-sectional view along the Y-axis direction. An intersection 33 where the inclined surfaces 31a and 31b intersect each other is a valley bottom of a valley-shaped concave portion in a sectional view. In a plan view, the intersection 33 extends along the X-axis direction, and the ampoule 20 is disposed at a position overlapping the intersection 33 (see FIG. 7A).

  The ampoules 20 are disposed at the lowest positions of the inclined surfaces 31a and 31b as predetermined positions in the reservoir 46, that is, at the intersections 33 serving as the valley bottoms of the concave portions. The opening 18 is provided on the −Y direction side with respect to the intersection 33. That is, the opening 18 is disposed on the upper side of the inclined surface 31 a with respect to the predetermined position where the ampoule 20 is disposed. Therefore, when the ampoule 20 is inserted into the reservoir 46 from the opening 18, the ampoule 20 moves the inclined surface 31a to the + Y direction side, and stops at the position of the lowest intersection 33, that is, at a predetermined position.

  At this time, the ampoule 20 is guided by the inclined surface 31a and the inclined surface 31b, and is disposed so that the longitudinal direction thereof is along the X-axis direction. Therefore, ampoule 20 can be easily placed at a predetermined position in reservoir 46. In addition, ampoule 20 is in contact with inclined surface 31a and inclined surface 31b at a predetermined position, and is held in a stable state such that the longitudinal direction thereof is along the X-axis direction. Therefore, also in the second embodiment, as in the first embodiment, the through holes 21 can be stably and reliably formed in the ampoule 20.

  Here, if the inclination angle of the inclined surface 31a and the inclination angle of the inclined surface 31b are the same, even if the diameter φ of the ampoule 20 (see FIG. 4A) varies, the center of the ampoule 20 is an intersection It is arranged at a position where it overlaps with 33 in plan view. Therefore, even if the diameter ア ン プ ル of the ampoule 20 is different or varies, in the process of forming the through hole 21 in the ampoule 20, the position to which the pulse laser beam 70 is irradiated may be easily aligned with the central position of the ampoule 20. it can.

  Therefore, according to the configuration of the reservoir 46 according to the second embodiment, compared to the first embodiment, even if the diameter φ of the ampoule 20 is different or varies, the ampoule 20 can be stably and surely Through holes 21 can be formed. Therefore, it is possible to more effectively suppress the reduction in the manufacturing yield of the gas cell 40 and the increase in the number of manufacturing processes, and to further improve the productivity.

  The cross-sectional shape of the reservoir 46 of the gas cell 40 according to the second embodiment is not limited to the shape shown in FIG. The cross-sectional shape of the reservoir 46 may be, for example, a shape having different inclined surfaces as shown in FIG. 8 (b).

  In the gas cell 40A shown in FIG. 8B, the reservoir 46A of the cell portion 42A has the inclined surface 31a and the inclined surface 31b on the bottom side, but the lengths (widths in the Y-axis direction) are different from each other ing. In other words, the position of the intersection 33 where the two inclined surfaces 31a and 31b intersect with each other is offset from the central position in the Y-axis direction in the reservoir 46A in the -Y direction. The opening 18 is provided in the + Y direction side from the center position in the Y-axis direction in the reservoir 46A so as to be located on the upper side of the longer inclined surface 31b. Even with such a configuration, the same effect as that of the gas cell 40 shown in FIG. 8A can be obtained.

Third Embodiment
The third embodiment differs from the first embodiment in the direction of inclination of the two inclined surfaces of the reservoir and the longitudinal direction of the arranged ampoule. With respect to the configuration and cross-sectional shape of the gas cell according to the third embodiment and the arrangement of ampoules, points different from the first embodiment will be described with reference to FIG. In addition, about the component which is common in 1st Embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  FIG. 9 is a schematic view showing a configuration of a gas cell according to a third embodiment. 9 (a) is a schematic plan view of the gas cell, and FIG. 9 (b) is a schematic cross-sectional view taken along the line DD 'of FIG. 9 (a), and FIG. 9 (c) and FIG. 9 (d) is a schematic cross-sectional view showing another example of the third embodiment.

<Configuration of gas cell>
As shown to Fig.9 (a), the gas cell 50 which concerns on 3rd Embodiment is comprised by the cell part 52 and the sealing part 19. As shown in FIG. The cell portion 52 has a main chamber 14 and a reservoir 56 as an internal gap. The arrangement of the main chamber 14, the communication hole 15, and the reservoir 56 in plan view is substantially the same as that of the first embodiment. However, the predetermined position where the ampoule 20 is disposed in the reservoir 56 and the direction thereof and the position of the opening 18 in the plan view are different from those in the first embodiment.

  The reservoir 56 has, on the bottom side, an inclined surface 35a and an inclined surface 35b inclined along the X-axis direction. Ampoule 20 is arranged such that its longitudinal direction is along the Y-axis direction. The opening 18 is provided on the + Y direction side of the reservoir 56. The sealing portion 19 is disposed at a position corresponding to the opening 18. The D-D 'line is a line passing through the reservoir 56, the ampoule 20 and the center of the communication hole 15 along the X-axis direction.

<Cross-sectional shape of gas cell and placement of ampoule>
As shown in FIG. 9B, the inclined surface 35a is inclined from the upper side to the bottom side in the -X direction, and the inclined surface 35b is inclined from the upper side to the bottom in the + X direction . The two inclined surfaces 35a and 35b which are inclined in the opposite directions and intersect with each other form a mountain-shaped convex portion in a cross-sectional view along the X-axis direction. An intersection portion 36 where the inclined surfaces 35a and 35b intersect each other is a vertex of a mountain-like convex portion in a cross-sectional view. In a plan view, the intersection 36 extends in a ridge line along the Y-axis direction (see FIG. 9A).

  The ampoule 20 is disposed at the lowest position on the inclined surface 35 a as a predetermined position in the reservoir 56. In the present embodiment, the position at which the ampoule 20 contacts the inclined surface 35 a and the side wall 56 a of the reservoir 56 is the lowest position. The ampoule 20 is disposed such that its longitudinal direction is along the extending direction of the intersection 36, that is, the Y-axis direction (see FIG. 9A).

  The opening 18 is provided at a position separated in the + X direction from the above-described predetermined position where the ampoule 20 is disposed. More specifically, the opening 18 is located between the predetermined position where the ampoule 20 is disposed and the intersection 36 in the X-axis direction, that is, a position above the lowest predetermined position on the inclined surface 35a. It is provided at a position higher than the inclined surface 35a.

  Therefore, the ampoule 20 inserted from the opening 18 moves to a predetermined position which is the lowest position so as to roll along the inclined surface 35a. Then, ampoule 20 is in contact with inclined surface 35a and side wall 56a of reservoir 56, and is held in a stable state so that the longitudinal direction thereof is along the Y-axis direction. Therefore, also in the third embodiment, as in the first embodiment, the through holes 21 can be stably and reliably formed in the ampoule 20.

  The communication hole 15 is provided at a position apart from the above-described predetermined position where the ampoule 20 is disposed and at a high position in the reservoir 56. Therefore, the alkali metal solid in the reservoir 56 while suppressing the intrusion of the fragments of the glass tube 22 generated when forming the through holes 21 in the ampoule 20 and the alkali metal solid 24 released from the inside of the ampoule 20 into the main chamber 14. The alkali metal gas 13 can be flowed out to the main chamber 14 after the evaporation 24.

  The cross-sectional shape of the reservoir 56 of the gas cell 50 according to the third embodiment is not limited to the shape shown in FIG. The cross-sectional shape of the reservoir 56 may be, for example, a shape having different inclined surfaces as shown in FIG. 9 (c) or 9 (d).

  In the gas cell 50A shown in FIG. 9C, the reservoir 56A of the cell portion 52A has the inclined surface 35a and the inclined surface 35b on the bottom side, but the lengths (widths in the X-axis direction) are different from each other ing. In other words, the position of the intersection 36 where the two inclined surfaces 35a and 35b intersect with each other is shifted in the + X direction from the central position in the X axis direction in the reservoir 56A.

  When the ampoule 20 is disposed on the longer inclined surface 35a, the opening 18 is provided on the upper side of the inclined surface 35a so as to be offset from the central position in the X-axis direction in the reservoir 56A in the + X direction. It is done. Even with such a configuration, an effect similar to that of the gas cell 50 shown in FIG. 9B can be obtained. In the example shown in FIG. 9C, the inclination angle of the inclined surface 35a and the inclination angle of the inclined surface 35b are different, but both may be the same.

In the gas cell 50B shown in FIG. 9 (d), the reservoir 56B of the cell portion 52B has only the inclined surface 35b on the bottom side. Therefore, in the gas cell 50B, the intersection 36 does not exist, and the opening 18 is provided on the upper side of the inclined surface 35b, that is, at a position close to the communication hole 15. Even with such a configuration, an effect similar to that of the gas cell 50 shown in FIG. 9B can be obtained.

Fourth Embodiment
The fourth embodiment is different from the third embodiment in that a concave portion having a valley shape is formed by two inclined surfaces 35a and 35b. With respect to the cross-sectional shape of the gas cell and the arrangement of the ampoule according to the fourth embodiment, points different from the third embodiment will be described with reference to FIG. In addition, about the component which is common in 3rd Embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  FIG. 10 is a schematic cross-sectional view for explaining the cross-sectional shape of the gas cell and the arrangement of ampoules according to the fourth embodiment. In detail, FIG. 10 (a) is a schematic cross-sectional view of a gas cell, and FIG. 10 (b) is a schematic cross-sectional view showing another example of the fourth embodiment.

<Configuration of gas cell>
As shown to Fig.10 (a), the gas cell 60 which concerns on 4th Embodiment is comprised by the cell part 62 and the sealing part 19. As shown in FIG. The cell portion 62 has a main chamber 14 (not shown) and a reservoir 66 as an internal gap. The arrangement of the main chamber 14, the communication hole 15, and the reservoir 66 in a plan view is substantially the same as that of the third embodiment shown in FIG. 9A. FIG. 10A corresponds to a schematic cross-sectional view taken along the line DD ′ of FIG. 9A.

<Cross-sectional shape of gas cell and placement of ampoule>
The reservoir 66 has the inclined surface 35a and the inclined surface 35b inclined along the X-axis direction on the bottom side, but the positional relationship between the inclined surface 35a and the inclined surface 35b in the X-axis direction is third. It is opposite to the embodiment. Therefore, as in the second embodiment, a valley-shaped concave portion is formed in the cross-sectional view along the X-axis direction by the two inclined surfaces 35a and 35b which are inclined and intersect in opposite directions, The cross | intersection part 37 which surface 35a, 35b cross | intersect becomes a valley bottom of a trough-shaped concave part by cross sectional view. Although not shown, the crossing portion 37 extends along the Y-axis direction, and the ampoule 20 is disposed at a position overlapping the crossing portion 37.

  The ampoules 20 are arranged at predetermined positions in the reservoir 66 at intersections 37 which are valleys of the concave portions. The opening 18 is disposed on the upper side of the inclined surface 35 b with respect to the predetermined position where the ampoule 20 is disposed. Therefore, when the ampoule 20 is inserted into the reservoir 66 through the opening 18, the ampoule 20 moves the inclined surface 35b to the + X direction side and stops at the position of the lowest intersection 37, ie, at a predetermined position.

  In the fourth embodiment, as in the second embodiment, since the ampoule 20 is guided by the inclined surface 35 a and the inclined surface 35 b and arranged so that the longitudinal direction thereof is along the Y-axis direction, It can be easily placed at a predetermined position in the reservoir 66. Further, since the ampoule 20 is held in a stable state in contact with the inclined surface 35a and the inclined surface 35b at a predetermined position, the through hole 21 can be formed stably and reliably in the ampoule 20.

  And, if the inclination angle of the inclined surface 35a and the inclination angle of the inclined surface 35b are the same, the center of the ampoule 20 is disposed at the position where it overlaps with the intersection portion 37 in plan view. Even in the case of unevenness, the position to which the pulse laser beam 70 is irradiated in the step of forming the through holes 21 can be easily aligned with the center position of the ampoule 20. Therefore, as in the second embodiment, it is possible to more effectively suppress the reduction in the manufacturing yield of the gas cell 60 and the increase in the number of manufacturing processes, and to further improve the productivity.

  The cross-sectional shape of the reservoir 66 of the gas cell 60 according to the fourth embodiment is not limited to the shape shown in FIG. The cross-sectional shape of the reservoir 66 may be, for example, a shape having different inclined surfaces as shown in FIG. 10 (b).

  In the gas cell 60A shown in FIG. 10B, the reservoir 66A of the cell portion 62A has the inclined surfaces 35a and 35b on the bottom side, but the lengths (widths in the X-axis direction) are different from each other. In other words, the position of the intersection 37 where the inclined surfaces 35a and 35b intersect with each other is shifted in the + X direction from the center position in the X-axis direction in the reservoir 66A. The opening 18 is offset from the center position in the X-axis direction in the reservoir 66A in the −X direction side so as to be located on the upper side of the longer inclined surface 35b. Even with such a configuration, the same effect as that of the gas cell 60 shown in FIG. 10A can be obtained.

  The embodiment described above is merely an aspect of the present invention, and arbitrary modifications and applications are possible within the scope of the present invention. As a modification, for example, the following can be considered.

(Modification 1)
Although the magnetic measurement device of the above embodiment is configured to have two inclined surfaces on the bottom side of the reservoir of the gas cell, the present invention is not limited to such a configuration. The configuration may have three or more slopes on the bottom side of the gas cell reservoir. FIG. 11 is a schematic view showing a configuration of a gas cell according to a first modification. Even if it is a structure as shown to FIG. 11 (a), (b), (c), the effect similar to the said embodiment is acquired.

  As shown in FIG. 11A, the reservoir 46B of the gas cell 40B has two inclined surfaces 31a and two inclined surfaces 31b on the bottom side. A pair of inclined surfaces 31a and 31b constitute a mountain-like convex portion having the intersection 32 at the top in a cross sectional view, and the pair of inclined surfaces 31a and 31b are arranged in pairs to form an intersection. A valley-shaped concave portion having a valley bottom 33 is formed. In FIG. 11A, the ampoule 20 is disposed at the position of the intersection 33. However, the ampoule 20 may be disposed at a position in contact with the inclined surface 31b and the side wall 46a.

  As shown in FIG. 11B, the reservoir 46C of the gas cell 40C has two inclined surfaces 31a and two inclined surfaces 31b on the bottom side. A pair of inclined surfaces 31a and 31b constitute a valley-shaped concave portion having the intersection 33 as a valley bottom in a cross sectional view, and by arranging two pairs of the inclined surfaces 31a and 31b, the intersection 32 is formed. A mountain-like convex portion is defined as the apex. The ampoules 20 are disposed at the intersections 33.

  As shown in FIG. 11C, the reservoir 46D of the gas cell 40D has, on the bottom side, two inclined surfaces 31a, two inclined surfaces 31b, and five flat surfaces 34a. A flat surface 34a is disposed between a pair of inclined surfaces 31a and 31b, and as a pair of the inclined surfaces 31a, 31b and the flat surface 34a, two sets are arranged with the flat surface 34a between them, Flat surfaces 34a are disposed on both sides. The ampoule 20 is disposed at a position in contact with the inclined surfaces 31a, 31b and the flat surface 34a therebetween.

  In the above embodiment and the first modification, in the configuration in which the ampoule 20 is disposed in the recess, the recess has a V-shaped cross section or a trapezoidal cross section in which two inclined surfaces intersect. However, it may have a cross-sectional shape other than V-shaped or trapezoidal, for example, a U-shaped cross-sectional shape.

(Modification 2)
The apparatus to which the gas cell 10 according to the above-described embodiment can be applied is not limited to the magnetic measurement apparatus 100. The gas cell 10 can also be applied to an atomic oscillator such as an atomic clock, for example. Although the gas cell used for the atomic oscillator is required to be miniaturized, according to the method for producing a gas cell of the above embodiment, the small gas cell 10 can be stably produced, so that it is suitably used for the compact atomic oscillator it can.

  10, 10A, 10B, 40, 40A, 40B, 40C, 40D, 50, 50A, 50B, 60, 60A ... gas cells, 12, 12A, 12B, 42, 42A, 52, 52A, 52B, 62, 62A ... cell portions (First glass), 13 ... alkali metal gas (gas of alkali metal), 14 ... main chamber (first chamber), 15 ... communication holes, 16, 16A, 16B, 46, 46A, 46B, 46C, 46D, 56 , 56A, 56B, 66, 66A ... Reservoir (second chamber), 18 ... Opening, 19 ... Sealing part, 20 ... Ampoule, 21 ... Through hole, 24 ... Solid alkali metal (alkali metal material), 31a, 31b , 35a, 35b ... inclined surfaces, 32, 33, 33, 36, 37 ... intersections (positions where the inclined surfaces cross each other), 70 ... pulse laser light (laser light), 100 ... magnetic measurement apparatus.

Claims (10)

A cell portion having a first chamber, a second chamber, a communication hole communicating the first chamber and the second chamber, and an opening provided in the second chamber;
A sealing portion sealing the opening;
An ampoule disposed in the second chamber;
A gas cell comprising an alkali metal gas filled in the first chamber and the second chamber,
The first chamber and the second chamber are arranged side by side in a first direction,
The ampoule has a longitudinal direction, and the longitudinal direction is disposed along the first direction,
When a direction orthogonal to the first direction is a second direction, and a direction orthogonal to the first direction and the second direction is a third direction, the third of the inner walls of the second chamber The inner wall located on one side in the three directions is provided with an inclined surface which is inclined with respect to a virtual plane including the first direction and the second direction and which is inclined in the second direction. ,
The ampoule is disposed at a first position located closest to the one side in the third direction on the inclined surface,
The opening is disposed on the other side opposite to the one side in the third direction than the inclined surface , and at a position separated from the first position in the second direction. Atomic oscillators. A cell portion having a first chamber, a second chamber, a communication hole communicating the first chamber and the second chamber, and an opening provided in the second chamber;
A sealing portion sealing the opening;
An ampoule disposed in the second chamber;
A gas cell comprising an alkali metal gas filled in the first chamber and the second chamber,
The first chamber and the second chamber are arranged side by side in a first direction,
When a direction orthogonal to the first direction is a second direction, and a direction orthogonal to the first direction and the second direction is a third direction, the third of the inner walls of the second chamber The inner wall located on one side of the three directions is inclined with respect to a virtual plane including the first direction and the second direction, and by two inclined planes intersecting obliquely with each other and facing each other. Having a convex portion configured
The ampoule is disposed at a first position located closest to the one side in the third direction on one of the two inclined surfaces.
The opening, said a position wherein said than one inclined surface 3 opposite the other side to the one side direction, the and the said inclined faces in the direction where two inclined surfaces are inclined to intersect the An atomic oscillator characterized in that it is disposed between one position . The atomic oscillator according to claim 1 , wherein
The second chamber has a convex portion constituted by the two inclined surfaces intersecting with each other in opposite directions.
The atomic oscillator is characterized in that the opening is disposed between a position where the inclined surfaces intersect with the first position in a direction in which the two inclined surfaces are inclined . A cell portion having a first chamber, a second chamber, a communication hole communicating the first chamber and the second chamber, and an opening provided in the second chamber;
A sealing portion sealing the opening;
An ampoule disposed in the second chamber;
A gas cell comprising an alkali metal gas filled in the first chamber and the second chamber,
The first chamber and the second chamber are arranged side by side in a first direction,
When a direction orthogonal to the first direction is a second direction, and a direction orthogonal to the first direction and the second direction is a third direction, the third of the inner walls of the second chamber The inner wall located on one side of the three directions is inclined with respect to a virtual plane including the first direction and the second direction, and by two inclined planes intersecting obliquely with each other and facing each other. Having a recess configured
The ampoule is disposed at a first position located on the most side of the third direction on the two inclined surfaces,
The opening is separated from a position at which the inclined surfaces intersect with each other on the other side opposite to the one side of the third direction than the two inclined surfaces and in a direction in which the two inclined surfaces are inclined . An atomic oscillator characterized in that it is disposed at a position. The atomic oscillator according to claim 2 or 4 , wherein
The inclined surface is inclined in the first direction,
The ampoule has a longitudinal direction, and the longitudinal direction is disposed along the second direction,
The atomic oscillator is characterized in that the opening portion is provided at a position separated from the first position in the first direction. The atomic oscillator according to any one of claims 1 to 5 , wherein
The atomic oscillator is characterized in that the communication hole is provided at a position separated from the first position. The atomic oscillator according to claim 6 , wherein
The atomic oscillator is characterized in that the communication hole is provided on the other side of the first position.   A cell portion having a first chamber, a second chamber, a communication hole communicating the first chamber and the second chamber, and an opening provided in the second chamber;
  A sealing portion sealing the opening;
  An ampoule disposed in the second chamber;
  A gas of an alkali metal filled in the first chamber and the second chamber;
  The first chamber and the second chamber are arranged side by side in a first direction,
  The ampoule has a longitudinal direction, and the longitudinal direction is disposed along the first direction,
  When a direction orthogonal to the first direction is a second direction, and a direction orthogonal to the first direction and the second direction is a third direction, the third of the inner walls of the second chamber The inner wall located on one side in the three directions is provided with an inclined surface which is inclined with respect to a virtual plane including the first direction and the second direction and which is inclined in the second direction. ,
  The ampoule is disposed at a first position located closest to the one side in the third direction on the inclined surface,
  The opening is disposed on the other side opposite to the one side in the third direction than the inclined surface, and at a position separated from the first position in the second direction. Gas cell.   A cell portion having a first chamber, a second chamber, a communication hole communicating the first chamber and the second chamber, and an opening provided in the second chamber;
  A sealing portion sealing the opening;
  An ampoule disposed in the second chamber;
  A gas of an alkali metal filled in the first chamber and the second chamber;
  The first chamber and the second chamber are arranged side by side in a first direction,
  When a direction orthogonal to the first direction is a second direction, and a direction orthogonal to the first direction and the second direction is a third direction, the third of the inner walls of the second chamber The inner wall located on one side of the three directions is inclined with respect to a virtual plane including the first direction and the second direction, and by two inclined planes intersecting obliquely with each other and facing each other. Having a convex portion configured
  The ampoule is disposed at a first position located closest to the one side in the third direction on one of the two inclined surfaces.
  In the opening portion, a position at which the inclined surfaces intersect with each other in the direction in which the two inclined surfaces are inclined and the other side opposite to the one side in the third direction with respect to the one inclined surface A gas cell characterized in that it is disposed between one position.   A cell portion having a first chamber, a second chamber, a communication hole communicating the first chamber and the second chamber, and an opening provided in the second chamber;
  A sealing portion sealing the opening;
  An ampoule disposed in the second chamber;
  A gas of an alkali metal filled in the first chamber and the second chamber;
  The first chamber and the second chamber are arranged side by side in a first direction,
  When a direction orthogonal to the first direction is a second direction, and a direction orthogonal to the first direction and the second direction is a third direction, the third of the inner walls of the second chamber The inner wall located on one side of the three directions is inclined with respect to a virtual plane including the first direction and the second direction, and by two inclined planes intersecting obliquely with each other and facing each other. Having a recess configured
  The ampoule is disposed at a first position located on the most side of the third direction on the two inclined surfaces,
  The opening is separated from a position at which the inclined surfaces intersect with each other on the other side opposite to the one side of the third direction than the two inclined surfaces and in a direction in which the two inclined surfaces are inclined. A gas cell characterized in that it is disposed at a position.

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