JP6492257B2 - Force transducer and strain gauge used therefor - Google Patents
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- JP6492257B2 JP6492257B2 JP2015118606A JP2015118606A JP6492257B2 JP 6492257 B2 JP6492257 B2 JP 6492257B2 JP 2015118606 A JP2015118606 A JP 2015118606A JP 2015118606 A JP2015118606 A JP 2015118606A JP 6492257 B2 JP6492257 B2 JP 6492257B2
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- 230000002093 peripheral effect Effects 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
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- 230000035945 sensitivity Effects 0.000 description 5
- 239000011888 foil Substances 0.000 description 4
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- 229920001721 polyimide Polymers 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
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Description
本発明は、力を受けて弾性変形する起歪部に貼られる歪みゲージと、この歪みゲージからの出力信号によって力を検出する力変換器に関するものである。 The present invention relates to a strain gauge that is affixed to a strain generating portion that is elastically deformed by receiving a force, and a force transducer that detects a force based on an output signal from the strain gauge.
従来の二対の歪み検出用抵抗体を用いた力変換器の底面を開口した底面図を図１１に示す。また図１１の力変換器のＣＣ断面を図１２に、図１２の拡大詳細図を図１３に示す。この歪みゲージ５は図１に示す力変換器１に突出形成された力導入部２の周囲に位置する薄肉の起歪部９の反対面に貼り付けされている。歪みゲージ５には、複数の電極部６が設けられ、各電極部の中間には歪み検出用の抵抗体である折り返し往復の抵抗パターン部が計４箇所設けられている。この各抵抗パターン部と複数の電極部６によってホイートストンブリッジ回路（図６）を形成し、電源７により直流電圧が印加されると、力導入部２に加わる力によって生じる起歪部９の歪みに比例した電圧が出力される。 FIG. 11 shows a bottom view in which the bottom surface of a force transducer using two conventional pairs of strain detection resistors is opened. FIG. 12 shows a CC cross section of the force transducer of FIG. 11, and FIG. 13 shows an enlarged detailed view of FIG. This strain gauge 5 is affixed to the opposite surface of the thin strain-generating portion 9 located around the force introduction portion 2 formed to protrude from the force transducer 1 shown in FIG. The strain gauge 5 is provided with a plurality of electrode portions 6, and a total of four reciprocating resistance pattern portions, which are strain detection resistors, are provided between the electrode portions. Each of the resistance pattern portions and the plurality of electrode portions 6 form a Wheatstone bridge circuit (FIG. 6), and when a DC voltage is applied from the power source 7, the distortion of the strain generating portion 9 caused by the force applied to the force introducing portion 2 is caused. A proportional voltage is output.
各抵抗パターン部１１と複数の電極部６を有する歪みゲージ５内の回路形成は、絶縁体のベース材１０上に金属箔を積層し、フォトリソグラフィによって行われる。そのためにレジストでマスクし、エッチングにて形成するのが一般的である。その後、金型による打ち抜きやレーザカッティングによって外形を加工して歪みゲージ５を完成させ、これを力変換器１の起歪部９に接着剤にて貼り付けることになる。 A circuit in the strain gauge 5 having each resistance pattern portion 11 and a plurality of electrode portions 6 is formed by laminating a metal foil on an insulating base material 10 and performing photolithography. For this purpose, it is generally masked with a resist and formed by etching. Thereafter, the outer shape is processed by punching with a mold or laser cutting to complete the strain gauge 5, and this is attached to the strain-generating portion 9 of the force transducer 1 with an adhesive.
図１３に示すように、力変換器１の起歪部９の外周の力支持部３との境界部は力支持部３に対して徐々に厚みが増加する傾斜面Ｒを有して形成されることが多い。もしこの境界部を垂直な角部にすると、力導入部２に力が繰り返し加わることでこの角部にクラックが生じやすいため、これを防止する目的で角を丸めた傾斜面Ｒにて形成している。この境界部が垂直な角部であれば、歪みゲージの外形の直径寸法ｄ０を力支持部３の内径Ｄ１より極僅か小さくすることで比較的位置決めを容易にできる。しかしながら境界部に傾斜面Ｒがあることから位置が定まり難くなる。特に図１１に示すように抵抗パターン部１１を保護して覆うカバー材１２がある際には、総厚みが厚くなって傾斜面Ｒに沿わず、図１３に示すようにベース材１０が浮いてしまって接着されることが生じ、抵抗パターン部１１が起歪部９の弾性変形を正確に検出できず、力変換器の歪みの感度が低下してしまう恐れがあった。力変換器１の起歪部９と力支持部３の境界部は応力が最大となる領域であるため、可能な限り抵抗パターン部１１をこの境界部に近づけて配置するのが好ましい。 As shown in FIG. 13, the boundary portion between the outer periphery of the strain-generating portion 9 of the force transducer 1 and the force support portion 3 is formed with an inclined surface R whose thickness gradually increases with respect to the force support portion 3. Often. If this boundary portion is a vertical corner portion, cracks are likely to be generated in the corner portion due to repeated application of force to the force introducing portion 2, so that it is formed with an inclined surface R with rounded corners for the purpose of preventing this. ing. If this boundary portion is a vertical corner portion, positioning can be performed relatively easily by making the diameter dimension d0 of the outer shape of the strain gauge slightly smaller than the inner diameter D1 of the force support portion 3. However, since the inclined surface R is present at the boundary, it is difficult to determine the position. In particular, when there is a cover material 12 that protects and covers the resistance pattern portion 11 as shown in FIG. 11, the total thickness increases and does not follow the inclined surface R, and the base material 10 floats as shown in FIG. 13. As a result, the resistance pattern portion 11 cannot accurately detect the elastic deformation of the strain generating portion 9, and the sensitivity of the strain of the force transducer may be lowered. Since the boundary portion between the strain-generating portion 9 and the force support portion 3 of the force transducer 1 is a region where the stress is maximum, it is preferable to dispose the resistance pattern portion 11 as close to the boundary portion as possible.
これに加えて抵抗パターン部１１の起歪部９に対する半径方向の位置ずれは歪みの感度の差を生じさせてしまうので、力導入部２の中心と抵抗パターン部１１の中心を高精度で合致させることは同時に必要である。故に、ベース材１０の浮きを防止するため余裕を持って抵抗パターン部１１を内側に設けて歪みの検出感度を犠牲にしたり、歪みゲージ５の貼直しをしたり、ということを従来行っていた。 In addition to this, the displacement of the resistance pattern portion 11 in the radial direction with respect to the strain-generating portion 9 causes a difference in the sensitivity of the distortion, so that the center of the force introducing portion 2 and the center of the resistance pattern portion 11 are matched with high accuracy. It is necessary at the same time. Therefore, in order to prevent the base material 10 from being lifted, the resistance pattern portion 11 is provided on the inner side with a margin to sacrifice the detection sensitivity of the strain, or the strain gauge 5 is reattached. .
本発明は、力変換器の起歪部への歪みゲージの貼り付けの位置誤差を低減しつつ、貼り付けを容易にして、かつ力変換器の歪みの感度の改善を図ることを課題としている。 It is an object of the present invention to facilitate the pasting and improve the sensitivity of strain of the force transducer while reducing the positional error of the strain gauge pasting to the strain generating portion of the force transducer. .
本発明の力変換器は、
力が入力される略円柱状の力導入部と、
力導入部の外側に位置し、力導入部と同心円の円筒形状で力を支持する力支持部と、
力導入部と力支持部を繋いで環状にて形成され、力導入部の反対面側にて力支持部に向かって厚さが増すように形成された傾斜面を有する起歪部と、
略円形のベース材上にホイートストンブリッジ回路を構成する複数の抵抗パターン部が形成されて起歪部に貼り付けられる歪みゲージと、
を有する力変換器であって、
ベース材の外周部は、
力支持部の内壁面の直径と略同一寸法の円に接する突起部を備えた第１の区間と、
少なくともベース材の中心点を中心として抵抗パターン部が外周部の近傍に配置されている扇形の角度範囲を含み、起歪部側の傾斜面が始まる稜線の直径以下の領域を備えた第２の区間と、
を有することを特徴とする。
The force transducer of the present invention is
A substantially cylindrical force introducing portion to which force is input;
A force support portion that is located outside the force introduction portion and supports the force in a cylindrical shape concentric with the force introduction portion;
A strain generating part having an inclined surface formed so as to increase in thickness toward the force support part on the opposite side of the force introduction part, formed in an annular shape by connecting the force introduction part and the force support part,
A strain gauge in which a plurality of resistance pattern portions constituting a Wheatstone bridge circuit are formed on a substantially circular base material and is affixed to the strain generating portion,
A force transducer having
The outer periphery of the base material is
A first section having a protrusion that contacts a circle having substantially the same dimension as the diameter of the inner wall surface of the force support portion;
A second region including a sector-shaped angular range in which the resistance pattern portion is arranged in the vicinity of the outer peripheral portion around at least the center point of the base material, and having a region equal to or smaller than the diameter of the ridge line where the inclined surface on the strain generating portion side starts. Interval,
It is characterized by having.
本発明の歪みゲージは、
力が入力される略円柱状の力導入部と、
力導入部の外側に位置し、力導入部と同心円の円筒形状で力を支持する力支持部と、
力導入部と力支持部を繋いで環状にて形成され、力導入部の反対面側にて力支持部に向かって厚さが増すように形成された傾斜面を有する起歪部と、
を有する力変換器の起歪部に貼り付けられる歪みゲージであって、
略円形のベース材上に形成されたホイートストンブリッジ回路を構成する複数の抵抗パターン部を有し、
ベース材の外周部は、
力支持部の内壁面の直径と略同一寸法の円に接する突起部を備えた第１の区間と、
少なくともベース材の中心点を中心として抵抗パターン部が外周部の近傍に配置されている扇形の角度範囲を含み、起歪部側の傾斜面が始まる稜線の直径以下の領域を備えた第２の区間と、
を有することを特徴とする。
The strain gauge of the present invention is
A substantially cylindrical force introducing portion to which force is input;
A force support portion that is located outside the force introduction portion and supports the force in a cylindrical shape concentric with the force introduction portion;
A strain generating part having an inclined surface formed so as to increase in thickness toward the force support part on the opposite side of the force introduction part, formed in an annular shape by connecting the force introduction part and the force support part,
A strain gauge attached to the strain-generating portion of the force transducer having
Having a plurality of resistance pattern portions constituting a Wheatstone bridge circuit formed on a substantially circular base material;
The outer periphery of the base material is
A first section having a protrusion that contacts a circle having substantially the same dimension as the diameter of the inner wall surface of the force support portion;
A second region including a sector-shaped angular range in which the resistance pattern portion is arranged in the vicinity of the outer peripheral portion around at least the center point of the base material, and having a region equal to or smaller than the diameter of the ridge line where the inclined surface on the strain generating portion side starts. Interval,
It is characterized by having.
本発明によれば、起歪部と力支持部の境界部に傾斜面を設けた力変換器において、歪みゲージの抵抗パターン部が起歪部への密着を保つようにして起歪部に貼ることが容易となり、故に起歪部に生じる歪みを安定して検出できる。また力導入部と複数の抵抗パターン部の位置合わせを容易にできるので高精度な力変換器を実現できる。 According to the present invention, in a force transducer in which an inclined surface is provided at a boundary portion between a strain generating portion and a force support portion, the strain pattern is attached to the strain generating portion so that the resistance pattern portion of the strain gauge is kept in close contact with the strain generating portion. Therefore, the distortion generated in the strain generating portion can be detected stably. In addition, since the position of the force introducing portion and the plurality of resistance pattern portions can be easily aligned, a highly accurate force transducer can be realized.
以下、添付の図面を参照して、本発明の歪みゲージとこれを用いた力変換器について説明する。ただし、本発明が以下の実施形態に限定される訳ではない。 Hereinafter, a strain gauge of the present invention and a force transducer using the same will be described with reference to the accompanying drawings. However, the present invention is not limited to the following embodiments.
図１は、本発明の実施形態に係る力変換器１の外観斜視図であり、図２は本発明の実施形態に係る力変換器１を底面方向から見て底部を開口し、配線処理などを施す前の状態を表したものである。 FIG. 1 is an external perspective view of a force transducer 1 according to an embodiment of the present invention, and FIG. 2 shows an opening at the bottom when the force transducer 1 according to the embodiment of the present invention is viewed from the bottom direction, and wiring processing or the like. It represents the state before applying.
力導入部２は突起した略円柱状であってこの天面に力が入力されるようになっている。力支持部３は力導入部２の外側で周囲を取り囲み、力導入部２と同心円の円筒形状をしていて、剛性が高く、入力された力を支持するものである。起歪部９は力導入部２と力支持部３を繋いで環状で薄肉に形成され、力が印加された際には起歪部９が弾性変形して歪みが生じる。また図８、図１０に示すように起歪部９は、力導入部２の反対面側にて力支持部３に向かって厚みが増すように形成された傾斜面Ｒを有していて、力支持部３に結合する傾斜面Ｒの終わりの箇所が起歪部９の端部と定義する。 The force introduction part 2 has a substantially cylindrical shape protruding, and a force is input to the top surface. The force support portion 3 surrounds the outside of the force introduction portion 2, has a cylindrical shape concentric with the force introduction portion 2, has high rigidity, and supports input force. The strain generating portion 9 is formed in an annular thin shape by connecting the force introducing portion 2 and the force supporting portion 3, and when a force is applied, the strain generating portion 9 is elastically deformed to cause distortion. Further, as shown in FIGS. 8 and 10, the strain generating portion 9 has an inclined surface R formed so as to increase in thickness toward the force supporting portion 3 on the opposite surface side of the force introducing portion 2, An end portion of the inclined surface R coupled to the force support portion 3 is defined as an end portion of the strain generating portion 9.
歪みゲージ５は、力導入部２の反対側の起歪部９の薄肉部に接着剤にて貼り付けされるものである。したがって、力導入部２に力が入力された際には起歪部９は弾性変形して歪みが生じ、起歪部９に貼り付けられた歪みゲージ５の抵抗値変化から歪みを電気信号に変換することができる。ケーブル４は変換された電気信号を外部に取り出すと共に、歪みゲージ５を含むホイートストンブリッジ回路へ電源供給を行うためのものである。 The strain gauge 5 is attached to the thin portion of the strain generating portion 9 on the opposite side of the force introducing portion 2 with an adhesive. Therefore, when a force is input to the force introducing portion 2, the strain generating portion 9 is elastically deformed to generate strain, and the strain is converted into an electric signal from the change in resistance value of the strain gauge 5 attached to the strain generating portion 9. Can be converted. The cable 4 is for taking out the converted electric signal to the outside and supplying power to the Wheatstone bridge circuit including the strain gauge 5.
図３は歪みゲージ５を起歪部９に貼り付ける前の力変換器１を、底面方向から見て底部を開口して表したものである。力支持部３は剛性の高い厚肉でできておりその内壁の直径がＤ１である。起歪部９は力支持部３との接続する部分近傍において、傾斜面Ｒが直径Ｄ２から始まり、力支持部３の内壁面の直径Ｄ１で終わる。したがって傾斜面Ｒが始まる箇所の稜線は直径Ｄ２の円である。 FIG. 3 shows the force transducer 1 before the strain gauge 5 is attached to the strain generating portion 9 with the bottom portion opened as viewed from the bottom surface direction. The force support part 3 is made of a thick wall having high rigidity, and its inner wall diameter is D1. In the vicinity of the portion where the strain generating portion 9 is connected to the force support portion 3, the inclined surface R starts from the diameter D <b> 2 and ends with the diameter D <b> 1 of the inner wall surface of the force support portion 3. Therefore, the ridge line at the location where the inclined surface R starts is a circle having a diameter D2.
図４は、本発明の力変換器１に好適な歪みゲージ５の第１の実施形態の平面図である。歪みゲージ５は、積層構造になっていて、例えば電気的絶縁性能を有する厚み２５μｍのポリイミドフィルムの略円形の単一のベース材１０上に、銅５５％、ニッケル４５％合金で厚み２．５μｍの金属箔が貼られたものである。歪みゲージ５のベース材１０の外周には、外形が直径ｄ１の円弧の突起部１３を有する第１の区間Ｓ１と、直径ｄ２の円弧の第２の区間Ｓ２が存在する。 FIG. 4 is a plan view of a first embodiment of a strain gauge 5 suitable for the force transducer 1 of the present invention. The strain gauge 5 has a laminated structure, for example, a substantially circular single base material 10 of a polyimide film having a thickness of 25 μm having electrical insulation performance, and a thickness of 2.5 μm made of an alloy of 55% copper and 45% nickel. The metal foil is affixed. On the outer periphery of the base material 10 of the strain gauge 5, there are a first section S1 having an arc-shaped protrusion 13 having an outer diameter d1 and a second section S2 having an arc having a diameter d2.
第２の区間Ｓ２はベース材１０の外周部付近に抵抗パターン部１１が配置されている位相角を含んだ区間であり、第１の区間Ｓ１は第２の区間Ｓ２以外の位相角に設けられている。なおベース材１０の外周で第１の区間Ｓ１と第２の区間Ｓ２以外の位相角の区間は、直径ｄ２以下の領域であれば良い。この配置の理由の詳細は図７〜図１０を用いて後述する。 The second section S2 is a section including a phase angle in which the resistance pattern portion 11 is disposed near the outer periphery of the base material 10, and the first section S1 is provided at a phase angle other than the second section S2. ing. It should be noted that the section of the phase angle other than the first section S1 and the second section S2 on the outer periphery of the base material 10 may be an area having a diameter d2 or less. Details of the reason for this arrangement will be described later with reference to FIGS.
抵抗パターン部１１は、歪みを検出するための折り返し往復形状のパターンであって、本実施形態では４箇所設けられている。電極部６は抵抗パターン部１１をケーブル４と繋いで電気的接続を行うものである。また調整用パッド８はレーザトリミング等によってその一部を切断することでこの歪みゲージ５の抵抗値を調整するために設けられている。カバー材１２は抵抗パターン部１１を保護するために、電極部６や調整用パッド８がある箇所を避けて、幅寸法がＷの帯形状で積層されていて、ベース材１０同様に厚み２５μｍのポリイミドフィルムを使用している。もちろんベース材１０、カバー材１２はポリイミドフィルムに限らずポリエチレンテレフタレートフィルムや、また金属箔も銅・ニッケル系に限らずニッケル・クロム系合金などであってもよい。また金属箔に限らず、スパッタ等による金属膜形成でも良い。 The resistance pattern portion 11 is a folded reciprocating pattern for detecting distortion, and is provided at four locations in the present embodiment. The electrode part 6 connects the resistance pattern part 11 with the cable 4 to make an electrical connection. The adjustment pad 8 is provided for adjusting the resistance value of the strain gauge 5 by cutting a part thereof by laser trimming or the like. In order to protect the resistance pattern portion 11, the cover material 12 is laminated in a band shape with a width dimension of W, avoiding the location where the electrode portion 6 and the adjustment pad 8 are present, and has a thickness of 25 μm like the base material 10. A polyimide film is used. Of course, the base material 10 and the cover material 12 are not limited to polyimide films, and polyethylene terephthalate films, and metal foils are not limited to copper / nickel but may be nickel / chromium alloys. Moreover, not only metal foil but metal film formation by sputtering etc. may be used.
電極部６及び抵抗パターン部１１の配置は回転対称形である。なお、折り返し往復の形状をした各抵抗パターン部１１の最大感度方向は、それぞれこの歪みゲージ５の半径方向である。そしてこれら複数の抵抗パターン部は単一の基材であるベース材１０上に一体で形成されたものである。 The arrangement of the electrode part 6 and the resistance pattern part 11 is rotationally symmetric. The maximum sensitivity direction of each resistance pattern portion 11 having a reciprocating shape is the radial direction of the strain gauge 5. The plurality of resistance pattern portions are integrally formed on the base material 10 which is a single base material.
またベース材１０及びカバー材１２を含めた歪みゲージ５の外形の切断加工は、金型による打ち抜きや、レーザによるカッティングにて行うことができる。 Moreover, the cutting of the outer shape of the strain gauge 5 including the base material 10 and the cover material 12 can be performed by punching with a mold or cutting with a laser.
図５は、本発明の力変換器１に好適な歪みゲージ５の第２の実施形態の平面図である。第１の実施形態の歪みゲージ５とは外周の突起部１３ｂの形状が異なる。第１の実施形態では突起部１３の外周は直径ｄ１の円弧であったが、第２の実施形態の歪みゲージ５ｂでは直径ｄ１の円に接する円弧で構成されている。すなわち第１の実施形態同様に力支持部３の内壁面の円に接する寸法ｄ１で突起部１３ｂが設けられているため、位置決めを容易に行うことができる。またこの突起部の形状は、ベース材１０の材質、厚み、寸法ｄ１、外形加工方法などを考慮して種々変形が可能であり、最適なものが使用される。 FIG. 5 is a plan view of a second embodiment of a strain gauge 5 suitable for the force transducer 1 of the present invention. The shape of the outer peripheral protrusion 13b is different from that of the strain gauge 5 of the first embodiment. In the first embodiment, the outer periphery of the protruding portion 13 is an arc having a diameter d1, but the strain gauge 5b of the second embodiment is configured by an arc in contact with a circle having a diameter d1. That is, since the protrusion 13b is provided with the dimension d1 in contact with the circle of the inner wall surface of the force support portion 3 as in the first embodiment, positioning can be performed easily. The shape of the protrusion can be variously modified in consideration of the material, thickness, dimension d1, outer shape processing method, and the like of the base material 10, and an optimum one is used.
図６はこの結線回路含んだホイートストンブリッジ回路を示したものである。したがって図４、図５における各抵抗パターン部１１がそれぞれＲ１〜Ｒ４に該当して構成されている。電源７により直流電圧が印加され、電極部６から各抵抗パターン部に加わった歪みによって変化した抵抗値によって変化する電圧が電気信号として出力される。前述のように、ケーブル４は電極部６各々と接続されて、この電圧出力信号及び電源７の配線を行っている。 FIG. 6 shows a Wheatstone bridge circuit including this connection circuit. Therefore, each resistance pattern part 11 in FIG. 4, FIG. 5 corresponds to R1-R4, respectively. A DC voltage is applied by the power source 7 and a voltage that changes according to a resistance value that has changed due to the distortion applied to each resistance pattern portion from the electrode portion 6 is output as an electrical signal. As described above, the cable 4 is connected to each of the electrode portions 6 to perform wiring of the voltage output signal and the power source 7.
図７は図２のＡＡ断面図であって、図８は図７の部分拡大詳細図である。いずれもベース材１０を含む歪みゲージ５の部分は厚みを誇張して描いてある。起歪部９において、力導入部２が形成されているのと反対側に位置した面には、歪みゲージ５が貼り付けられていて、そのベース材１０が起歪部９に面して貼り付けられてある。厳密には抵抗パターン部１１と繋がっている歪みゲージ５内部の配線部やカバー材１２の一部もこの断面図には存在するが、ここでは省略している。 7 is a cross-sectional view taken along the line AA in FIG. 2, and FIG. 8 is a partially enlarged detail view of FIG. In either case, the portion of the strain gauge 5 including the base material 10 is drawn with exaggerated thickness. A strain gauge 5 is affixed to the surface of the strain generating portion 9 that is opposite to the side where the force introducing portion 2 is formed, and the base material 10 is affixed to face the strain generating portion 9. It is attached. Strictly speaking, the wiring part inside the strain gauge 5 connected to the resistance pattern part 11 and a part of the cover material 12 also exist in this sectional view, but are omitted here.
図８に示すように、このＡＡ断面は、ベース材１０の直径がｄ１の突起部１３が存在する第１の区間Ｓ１であり、ベース材１０の中心点を中心としたこの扇形の角度範囲の外周近傍には抵抗パターン部１１は位置していない。この突起部１３は、起歪部９の傾斜面Ｒに位置して貼り付けされている。貼り付け工程は、力支持部３の内壁寸法Ｄ１と突起部１３の直径ｄ１を略同一寸法とすること、及び突起部１３にはカバー材１２を積層しないことで、歪みゲージ５における突起部１３の可撓性の低下がなく、突起部１３が傾斜面Ｒに沿うように貼り付け可能であり、位置精度を確保しつつ容易に行うことができる。 As shown in FIG. 8, the AA cross section is a first section S <b> 1 in which a protrusion 13 having a diameter d <b> 1 of the base material 10 exists, and has an angular range of this sector centered on the center point of the base material 10. The resistance pattern portion 11 is not located near the outer periphery. The protrusion 13 is attached to the inclined surface R of the strain generating part 9. In the pasting step, the inner wall dimension D1 of the force support part 3 and the diameter d1 of the protrusion part 13 are set to be substantially the same dimension, and the cover member 12 is not laminated on the protrusion part 13, thereby the protrusion part 13 in the strain gauge 5. The protrusion 13 can be attached so as to follow the inclined surface R, and can be easily performed while ensuring the positional accuracy.
図９は図２のＢＢ断面図であって、図１０は図９の部分拡大詳細図である。ここでもベース材１０を含む歪みゲージ５の部分は厚みを誇張して描いてある。このＢＢ断面は、ベース材１０の直径がｄ２である第２の区間Ｓ２であり、この第２の区間Ｓ２は、抵抗パターン部１１がベース材１０の外周近傍に配置された領域の扇形の角度範囲を含んでいる。そしてこのベース材１０の直径ｄ２は傾斜面Ｒが始まる稜線の直径Ｄ２以下としている。そしてベース材１０に積層された抵抗パターン部１１は直径Ｄ２より小さな範囲に位置している。さらに抵抗パターン部１１を覆うカバー材１２はベース材１０と同じ直径ｄ２となっているが、抵抗パターン部１１を覆うのが目的であり、直径ｄ２以下でかつ抵抗パターン部１１を覆うことができれば良い。 9 is a cross-sectional view taken along the line BB of FIG. 2, and FIG. 10 is a partially enlarged detail view of FIG. Also here, the portion of the strain gauge 5 including the base material 10 is drawn with exaggerated thickness. This BB cross section is a second section S2 in which the diameter of the base material 10 is d2, and the second section S2 is a sector-shaped angle of a region where the resistance pattern portion 11 is disposed in the vicinity of the outer periphery of the base material 10. Includes a range. The diameter d2 of the base material 10 is not more than the diameter D2 of the ridgeline where the inclined surface R starts. And the resistance pattern part 11 laminated | stacked on the base material 10 is located in the range smaller than the diameter D2. Further, the cover material 12 covering the resistance pattern portion 11 has the same diameter d2 as the base material 10, but the purpose is to cover the resistance pattern portion 11, and if the resistance pattern portion 11 can be covered with the diameter d2 or less. good.
実際の組立工程においては、歪みゲージ５の貼り付けは突起部１３で位置が決まるため、傾斜面Ｒが始まる稜線の直径Ｄ２とベース材１０の外周部直径ｄ２の位置のずれは少ない。したがって図１３に示すようなベース材１０が傾斜面Ｒに沿わずに浮いてしまい、ベース材１０と起歪部９との密着が低下する不良を防止できる。 In the actual assembly process, since the position of the strain gauge 5 attached is determined by the protrusion 13, there is little displacement between the diameter D2 of the ridgeline where the inclined surface R starts and the outer peripheral diameter d2 of the base material 10. Therefore, the base material 10 as shown in FIG. 13 floats without being along the inclined surface R, and a defect in which the adhesion between the base material 10 and the strain-generating portion 9 is reduced can be prevented.
なお、なおベース材１０の外周で第１の区間Ｓ１と第２の区間Ｓ２以外の扇形角度区間は、傾斜面Ｒを覆わなければ良く、直径ｄ２以下の領域内にあれば良い。 It should be noted that the fan-shaped angle section other than the first section S1 and the second section S2 on the outer periphery of the base material 10 does not have to cover the inclined surface R and only needs to be in a region having a diameter d2 or less.
以上説明したように、本実施形態によれば、ベース材１０の突起部１３の外周を力支持部３の内壁に接するようにして直径方向の位置決めのガイドとして使い、抵抗パターン部１１が設けられている近傍のベース材１０は起歪部９の傾斜面Ｒの開始稜線より小さくすることで浮きを防止し、位置決め精度を確保しつつ組立て性を向上させる力変換器を実現できる。 As described above, according to the present embodiment, the resistance pattern portion 11 is provided by using the outer periphery of the protruding portion 13 of the base material 10 as a guide for positioning in the diametrical direction so as to contact the inner wall of the force support portion 3. The base material 10 in the vicinity is made smaller than the starting ridge line of the inclined surface R of the strain generating portion 9 to prevent floating, and a force transducer that improves assemblability while ensuring positioning accuracy can be realized.
なお、本発明は、上述及び図面に示した実施形態に限定されるものではなく、本発明の要旨の範囲内において種々の変形にて実施することが可能である。 Note that the present invention is not limited to the above-described embodiments shown in the drawings and can be implemented in various modifications within the scope of the gist of the present invention.
本発明は、歪みゲージを使用したロードセルや圧力測定器に適用することができる。 The present invention can be applied to a load cell or a pressure measuring device using a strain gauge.
１ 力変換器
２ 力導入部
３ 力支持部
４ ケーブル
５、５ｂ 歪みゲージ
６ 電極部
７ 電源
８ 調整用パッド
９ 起歪部
１０ ベース材
１１ 抵抗パターン部
１２ カバー材
１３、１３ｂ 突起部
Ｒ 傾斜面
Ｓ１ 第１の区間
Ｓ２ 第２の区間
DESCRIPTION OF SYMBOLS 1 Force converter 2 Force introduction part 3 Force support part 4 Cable 5, 5b Strain gauge 6 Electrode part 7 Power supply 8 Adjustment pad 9 Strain part 10 Base material 11 Resistance pattern part 12 Cover material 13, 13b Protrusion part R Inclined surface S1 1st section S2 2nd section
Claims (2)
前記力導入部の外側に位置し、前記力導入部と同心円の円筒形状で力を支持する力支持部と、
前記力導入部と前記力支持部を繋いで環状にて形成され、前記力導入部の反対面側にて前記力支持部に向かって厚さが増すように形成された傾斜面を有する起歪部と、
略円形のベース材上にホイートストンブリッジ回路を構成する複数の抵抗パターン部が形成されて前記起歪部に貼り付けられる歪みゲージと、
を有する力変換器であって、
前記ベース材の外周部は、
前記力支持部の内壁面の直径と略同一寸法の円に接する突起部を備えた第１の区間と、
少なくとも前記ベース材の中心点を中心として前記抵抗パターン部が前記外周部の近傍に配置されている扇形の角度範囲を含み、前記起歪部側の前記傾斜面が始まる稜線の直径以下の領域を備えた第２の区間と、
を有することを特徴とする力変換器。 A substantially cylindrical force introducing portion to which force is input;
A force support portion that is located outside the force introduction portion and supports the force in a cylindrical shape concentric with the force introduction portion;
Strain generation having an inclined surface formed by connecting the force introduction portion and the force support portion in an annular shape and increasing in thickness toward the force support portion on the opposite surface side of the force introduction portion. And
A strain gauge formed on a substantially circular base material and formed with a plurality of resistance pattern portions constituting a Wheatstone bridge circuit and attached to the strain-generating portion,
A force transducer having
The outer periphery of the base material is
A first section having a protrusion that contacts a circle of substantially the same size as the diameter of the inner wall surface of the force support portion;
A region having a sector-shaped angle range in which the resistance pattern portion is arranged in the vicinity of the outer peripheral portion at least around the center point of the base material, and having a region equal to or less than the diameter of the ridgeline where the inclined surface on the strain-generating portion side starts. A second section with;
A force transducer characterized by comprising:
前記力導入部の外側に位置し、前記力導入部と同心円の円筒形状で力を支持する力支持部と、
前記力導入部と前記力支持部を繋いで環状にて形成され、前記力導入部の反対面側にて前記力支持部に向かって厚さが増すように形成された傾斜面を有する起歪部と、
を有する力変換器の前記起歪部に貼り付けられる歪みゲージであって、
略円形のベース材上に形成されたホイートストンブリッジ回路を構成する複数の抵抗パターン部を有し、
前記ベース材の外周部は、
前記力支持部の内壁面の直径と略同一寸法の円に接する突起部を備えた第１の区間と、
少なくとも前記ベース材の中心点を中心として前記抵抗パターン部が前記外周部の近傍に配置されている扇形の角度範囲を含み、前記起歪部側の前記傾斜面が始まる稜線の直径以下の領域を備えた第２の区間と、
を有することを特徴とする歪みゲージ。 A substantially cylindrical force introducing portion to which force is input;
A force support portion that is located outside the force introduction portion and supports the force in a cylindrical shape concentric with the force introduction portion;
Strain generation having an inclined surface formed by connecting the force introduction portion and the force support portion in an annular shape and increasing in thickness toward the force support portion on the opposite surface side of the force introduction portion. And
A strain gauge affixed to the strain-generating portion of the force transducer having
Having a plurality of resistance pattern portions constituting a Wheatstone bridge circuit formed on a substantially circular base material;
The outer periphery of the base material is
A first section having a protrusion that contacts a circle of substantially the same size as the diameter of the inner wall surface of the force support portion;
A region having a sector-shaped angle range in which the resistance pattern portion is arranged in the vicinity of the outer peripheral portion at least around the center point of the base material, and having a region equal to or less than the diameter of the ridgeline where the inclined surface on the strain-generating portion side starts. A second section with;
A strain gauge characterized by comprising:
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