JP6487087B2 - 金属マグネシウムの製造方法とその製造装置 - Google Patents
金属マグネシウムの製造方法とその製造装置 Download PDFInfo
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- 239000011777 magnesium Substances 0.000 title claims description 80
- 229910052749 magnesium Inorganic materials 0.000 title claims description 79
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 title claims description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 35
- 238000006243 chemical reaction Methods 0.000 claims description 31
- -1 magnesium halide Chemical class 0.000 claims description 28
- 239000002994 raw material Substances 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical group [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 description 67
- 229910001629 magnesium chloride Inorganic materials 0.000 description 32
- 239000007789 gas Substances 0.000 description 25
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 15
- 239000001257 hydrogen Substances 0.000 description 14
- 229910052739 hydrogen Inorganic materials 0.000 description 14
- 150000002500 ions Chemical class 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 9
- 239000000460 chlorine Substances 0.000 description 7
- 229910052801 chlorine Inorganic materials 0.000 description 7
- 238000006722 reduction reaction Methods 0.000 description 7
- JLVVSXFLKOJNIY-UHFFFAOYSA-N Magnesium ion Chemical compound [Mg+2] JLVVSXFLKOJNIY-UHFFFAOYSA-N 0.000 description 6
- 229910001425 magnesium ion Inorganic materials 0.000 description 6
- 230000007935 neutral effect Effects 0.000 description 6
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000000859 sublimation Methods 0.000 description 4
- 230000008022 sublimation Effects 0.000 description 4
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000007670 refining Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004484 Briquette Substances 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 241000272201 Columbiformes Species 0.000 description 1
- 229910000519 Ferrosilicon Inorganic materials 0.000 description 1
- 229910000861 Mg alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- NJHPWOQALXDSNZ-UHFFFAOYSA-N [Mg].[Br] Chemical compound [Mg].[Br] NJHPWOQALXDSNZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 229910000514 dolomite Inorganic materials 0.000 description 1
- 239000010459 dolomite Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- HZZOEADXZLYIHG-UHFFFAOYSA-N magnesiomagnesium Chemical compound [Mg][Mg] HZZOEADXZLYIHG-UHFFFAOYSA-N 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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- Manufacture And Refinement Of Metals (AREA)
- Furnace Details (AREA)
Description
尚、前記マイクロ波表面波プラズマの場合においても、適切に反応速度を高める上で、前記加熱手段を使用するようにしても良い。
この還元反応は、
MgCl2+H2(活性種としての励起水素)→Mg+2HClである(発熱反応、マグネシウム,塩酸,マグネシウムイオン,塩酸イオン,塩素,塩素イオンなど)。
1.蒸着物の金属光沢を目視で確認、
2.テスターでの導通を確認(3cm離れた場所で5オーム以下)、
3.SEM(走査型電子顕微鏡)によるEDS(エネルギー分散形分光器)解析で製膜部でのマグネシウムの検出、
4.プラズマ分光分析にて約525nm近辺のマグネシウム発光(青)あり、
5.金属光沢部に水滴をたらして放置すると、水滴部は透明化する。
2 容器、
3 載置台、 3a 原料、
4 真空装置、 4a 真空ポンプ、
5 プラズマ装置、 5a 窓、
6 還元ガス供給装置、
7 真空圧計器、
8 原料取出し口、
9 電源、
10a 電極(タングステン等)、
10b ヒータ(フィラメント等)、
11 光源。
Claims (4)
- 容器と、
前記容器の中を減圧する真空装置と、
前記容器の中に還元ガスを供給するガス供給装置と、
前記容器の外部に設けられた直流バイアス電源と、
前記直流バイアス電源のプラス側が接続され、原料を置く電極と、
前記容器に設けられた窓にマイクロ波を導き、前記還元ガスをプラズマ化させたプラズマを発生させるプラズマ装置と、を備え、
前記プラズマ点灯中に前記電極にプラスの直流バイアスを印可して、前記電極に加速した電子を集めて前記電極を前記原料の反応が開始される温度まで加熱し、気体化させた前記原料を前記プラズマに晒すことで前記原料を還元させることを特徴とする製造装置。 - 前記容器が前記直流バイアス電源のマイナスを接続した金属製容器であり、
前記電極が、タングステン、モリブデン、タンタル、炭素、又は、これらの合金であることを特徴とする請求項1に記載の製造装置。 - 前記電極が試料容器の底に設置されることを特徴とする請求項1又は請求項2に記載の製造装置。
- 金属マグネシウムの製造方法であって、
請求項1から請求項3のいずれか1項に記載の製造装置の前記電極上に原料である無水ハロゲン化マグネシウムを配置し、前記プラズマ点灯中に前記電極にプラスの直流バイアスを印可して、気体化させた前記無水ハロゲン化マグネシウムを前記プラズマに晒すことで還元させて金属マグネシウムを得ることを特徴とする製造方法。
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JP7120544B2 (ja) * | 2018-08-23 | 2022-08-17 | 株式会社エスイー | 金属原子だけからなる金属材料の沸点よりも高い沸点を有した金属原子を含む化合物をプラズマで処理して化合物と異なる生成物を得る製造方法、及び、製造装置 |
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LU81469A1 (fr) * | 1979-07-05 | 1981-02-03 | Luniversite Libre Bruxelles | Procede et installation pour la production de metaux reactifs par reduction de leurs halogenures |
AT378539B (de) * | 1983-08-18 | 1985-08-26 | Voest Alpine Ag | Verfahren zur herstellung von metallen oder metallegierungen sowie vorrichtung zur durchfuehrung des verfahrens |
JPS6152304A (ja) * | 1984-08-20 | 1986-03-15 | Daido Steel Co Ltd | 金属微粉末製造用装置 |
US5782952A (en) * | 1996-08-30 | 1998-07-21 | Massachusetts Institute Of Technology | Method for production of magnesium |
JP5382444B2 (ja) * | 2009-11-09 | 2014-01-08 | 株式会社エスイー | 導電性パターンの形成方法とその形成装置 |
JP6100098B2 (ja) * | 2013-05-29 | 2017-03-22 | 住友重機械工業株式会社 | 還元装置及び還元方法 |
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