JP6484939B2 - Temperature measuring device - Google Patents

Description

  The present invention relates to a temperature measuring device for measuring temperature in a high temperature environment such as in a furnace.

  For temperature measurement in a high temperature environment such as the furnace temperature, contact type temperature measurement such as thermocouple is the mainstream, and some non-contact type temperature measurement using an optical type such as thermography or radiation thermometer is also part. It is done. In recent years, a technique has been developed in which a temperature distribution image is created using a two-color temperature measurement method and the like, and temperature measurement is performed based on the temperature distribution image.

  When measuring the temperature distribution in the furnace with an optical method, it is necessary to keep the widest possible range in the furnace in order to obtain an accurate temperature distribution. However, it is generally measured to maintain the furnace and maintain the temperature. The viewing hole is small and deep, and the viewing angle that can be observed through the measuring hole is, for example, about 6 °, which is extremely narrow.

  As an optical system that can be observed through a narrow and deep hole, for example, an optical system such as an endoscope is known. However, in the case of an endoscope, a split optical system or a filter for performing a two-color temperature measurement method is used. Is difficult to install, and it is also difficult to add a water cooling mechanism or a protection mechanism from dust.

  In Patent Document 1, an optical system member of an imaging system is provided at a long main body, an objective lens provided at a front end portion of the main body and having a front end surface formed in a concave shape, and a rear end portion of the main body. A casing in which the main body is inserted and disposed in a through hole in the furnace wall, and light from an observation image of the subject passes through the hole of the support portion from the objective lens through the main body. A temperature measurement in-furnace monitoring system that obtains a temperature distribution of a subject in a predetermined region by a two-color temperature measurement method based on a color image received and picked up by a CCD camera is disclosed.

JP 2003-344166 A

  In view of such circumstances, the present invention provides a temperature measuring device capable of measuring a temperature state in a furnace from a small observation window or the like of the furnace while preventing damage due to radiant heat from the inside of the furnace.

  The present invention provides an inner cylinder, an outer cylinder provided concentrically with the inner cylinder so that a gap is formed on the outer peripheral side of the inner cylinder, and an inner cylinder provided with air permeability over the entire length. An optical system for propagating light emitted from the measurement object, a filter plate having a plurality of filters having different transmission characteristics for transmitting a specific wavelength of the light transmitted through the optical system, and a filter for the filter plate. A filter switching unit for switching, an imaging unit for capturing an image of the measurement object via the filter switched by the filter switching unit, and the measurement target by a two-color temperature measurement method based on an image acquired by the imaging unit And a control device that calculates the temperature state of the object, and relates to a temperature measuring device that circulates cooling water through the gap and circulates cooling air through the inner cylinder.

  The present invention further includes a flow path dividing member that divides the gap in the circumferential direction, a supply flow path for flowing the cooling water toward the tip side by the flow path dividing member, and a flow through the supply flow path The present invention relates to a temperature measuring device in which a discharge flow path for inverting the cooling water to flow and flowing toward the base end side is formed.

  The present invention also relates to a temperature measuring device in which a plurality of the supply flow paths and the discharge flow paths are provided, and the cooling water is supplied to each supply flow path.

  According to the present invention, the optical system includes a plurality of lens units, and a cylindrical interval holding member is provided between the lens units. The present invention relates to a temperature measuring device in which an air cooling channel through which the cooling air flows is formed by a groove and an inner peripheral surface of the inner cylinder.

  Furthermore, the present invention relates to a temperature measuring device in which a communication hole for communicating the air cooling flow path and the inside of the spacing member is formed in the concave groove.

  According to the present invention, the inner cylinder, the outer cylinder provided concentrically with the inner cylinder so that a gap is formed on the outer peripheral side of the inner cylinder, and the interior of the inner cylinder so as to have air permeability over the entire length. An optical system for propagating light radiated from a measurement object, a filter plate having a plurality of filters having different transmission characteristics for transmitting a specific wavelength of light transmitted through the optical system, and A filter switching unit that switches a filter; an imaging unit that captures an image of the measurement object through the filter switched by the filter switching unit; and the two-color temperature measurement method based on an image acquired by the imaging unit. And a control device for calculating the temperature state of the measurement object, cooling water is circulated through the gap, and cooling air is circulated inside the inner cylinder, so that the inner cylinder and the outer cylinder are cooled with water. The optical system is empty Even when the inner cylinder and the outer cylinder are inserted into the furnace from a small observation window of the furnace, the inner cylinder, the outer cylinder, and the optical system are not damaged by the radiant heat from the furnace. An excellent effect that the temperature state can be measured is exhibited.

It is a schematic side view which shows the temperature measuring device which concerns on the Example of this invention. It is A enlarged view of FIG. It is a BB arrow line view of FIG. It is CC arrow line view of FIG. FIG. 3 is a DD arrow view of FIG. 2. It is an expanded view explaining the cooling flow path of the temperature measuring device which concerns on the Example of this invention. It is a space | interval holding member of the temperature measuring device which concerns on the Example of this invention, (A) shows the sectional side view of this space | interval holding member, (B) has shown the EE arrow line view of (A). . It is explanatory drawing explaining the filter part of the temperature measuring device which concerns on the Example of this invention.

  Embodiments of the present invention will be described below with reference to the drawings.

  First, referring to FIG. 1 and FIG. 2, an outline of a temperature measuring apparatus according to an embodiment of the present invention will be described.

  The temperature measuring device 1 has a configuration capable of two-color temperature measurement. In the two-color temperature measurement method, images of the same point are acquired using two lights having different wavelengths, and the temperature is measured from the light intensity and the thermal emissivity of the measurement object.

  The temperature measuring device 1 includes an optical unit 2, a camera 3 as an imaging device attached to an end of the optical unit 2, and the optical unit 2 and the camera 3 on the optical axis 4 of the camera 3. It has a filter switching unit 5 provided between them, and a control device 6 that performs temperature measurement by a two-color temperature measurement method based on an image captured by the camera 3. When measuring the temperature of a low-temperature furnace of 800 ° C. or lower, a commercially available near-infrared camera that can be observed from 250 ° C., for example, is used as the camera 3.

  The optical unit 2 has a lens barrel portion 9 including an inner cylinder 7 and an outer cylinder 8 provided concentrically with the inner cylinder 7 so that a gap is formed on the outer peripheral side of the inner cylinder 7. The lens barrel portion 9 is made of, for example, stainless steel, and some components may be made of aluminum if the temperature environment to be measured is 600 ° C. or less.

  A plurality of lens units 11 including a plurality of lenses are arranged on the optical axis 4 inside the inner cylinder 7. A cylindrical spacing member 12 is disposed between the lens units 11 and 11, and the lens unit 11 is positioned by the spacing member 12 and the spacing between the lens units 11 and 11 is maintained. It has become like that.

  The lens unit 11 functions as a relay lens and guides it to the camera 3. The wavelength is selected by the filter switching unit 5, and the camera 3 has light of the wavelength selected by the filter switching unit 5. Is imaged on the light receiving element of the camera 3.

  A flange portion 13 projecting in the outer peripheral direction is formed at the base end portion of the inner cylinder 7, and the base end of the outer tube 8 is fixed to the flange portion 13 in a liquid-tight manner by welding or the like. A ring-shaped lens pressing plate 14 is airtightly attached to the proximal end of the inner cylinder 7. The lens pressing plate 14 has an inner peripheral portion that protrudes and abuts against the lens unit 11 to fix the lens unit 11 and a step portion is formed outside the inner peripheral portion. The step portion forms a ring-shaped space 15 between the flange portion 13 and the step portion.

  A ring-shaped end plate 16 is fixed to the distal end portion of the lens barrel portion 9 with screws or the like (not shown). The end plate 16 has a hole 17 formed on the optical axis 4 for ensuring a wide field of view, and the end plate 16 closes the tips of the inner cylinder 7 and the outer cylinder 8 in a liquid-tight manner. A water-cooled flow path 18 that is a liquid-tight space is formed between the inner cylinder 7 and the outer cylinder 8.

  An air supply hole 19 communicating with the space 15 is formed in the flange portion 13. On the outer peripheral surface of the lens unit 11, a plurality of grooves parallel to the axial center are formed at predetermined intervals in the circumferential direction. A plurality of grooves parallel to the axial center are also formed on the outer peripheral surface of the spacing member 12 at a predetermined interval in the circumferential direction. Between the inner cylinder 7, the lens unit 11, and the interval holding member 12, an air cooling channel 21 extending over the entire length of the inner cylinder 7 is formed by the groove. The air cooling channel 21 communicates with the space 15, and the air supply hole 19 and the air cooling channel 21 communicate with each other via the space 15.

  A protective glass 22 is provided at the tip of the inner cylinder 7. The protective glass 22 is fixed by the end plate 16, and a plurality of radially extending grooves are formed on the contact surface of the protective plate 22 of the end plate 16, and the lens barrel portion 9 is formed through the grooves. The outside and the air cooling channel 21 are communicated with each other.

  In addition, a communication hole 23 is formed in the spacing member 12 so as to communicate the air cooling flow path 21 and the interior of the spacing member 12 at least at one location on the base end side and the distal end side.

  Next, the details of the water cooling channel 18 will be described with reference to FIGS. FIG. 6 is a development view of the water cooling channel 18.

  In the water cooling channel 18, for example, channel dividing members 24 a to 24 h made of linear members such as eight wires are arranged at equal intervals in the circumferential direction. The flow path dividing members 24 a to 24 h are welded to the inner cylinder 7, and the inner cylinder 7 to which the flow path dividing members 24 a to 24 h are welded is inserted into the outer cylinder 8. The water cooling channel 18 is divided into eight liquid-tight in the circumferential direction by the channel dividing members 24a to 24h.

  The front ends of the flow path dividing members 24a, 24c, 24e, and 24g in the rows of the flow path dividing members 24a to 24h are brought into liquid-tight contact with the end plate 16 by welding or the like, so Gaps 25a to 25d are formed between the end portions of the path dividing members 24b, 24d, 24f, and 24h and the end plate 16.

  A gap is formed between the flow path dividing members 24 a to 24 h and the flange portion 13, and the gap forms a merging flow path 26. Further, a blocking member 27a made of a linear member such as a wire is fixed to the base end portions of the flow path dividing members 24a and 24b in a liquid-tight manner by welding or the like. Similarly, the flow path dividing members 24c and 24d The blocking member 27b is fixed in a liquid-tight manner by welding or the like over the base end portion, and the blocking member 27c is fixed in a liquid-tight manner over the base end portions of the flow path dividing members 24e and 24f. A closing member 27d is fixed in a liquid-tight manner over the base ends of the members 24g and 24h.

The flow path dividing member 24a, the supply passage 28a between 24b are formed, the flow path dividing member 24c, the supply passage 28b is formed between the 24d, the flow path dividing member 24 e, the feed stream between 24 f road 28c is formed, the supply passage 28d is formed between the flow path dividing member 24 g, 24 h. Also, a discharge flow path 29a is formed between the flow path dividing members 24b and 24c, a discharge flow path 29b is formed between the flow path dividing members 24d and 24e, and a discharge flow is generated between the flow path dividing members 24f and 24g. A passage 29c is formed, and a discharge passage 29d is formed between the passage dividing members 24h and 24a. The supply flow path 28 and the discharge flow path 29 constitute a divided flow path.

  The outer cylinder 8 includes a cooling water supply pipe 31 communicating with the upstream end of the supply flow path 28, that is, a cooling water supply pipe 31a communicating with the supply flow path 28a, and a cooling water supply communicating with the supply flow path 28b. A pipe 31b, a cooling water supply pipe 31c communicating with the supply flow path 28c, and a cooling water supply pipe 31d communicating with the supply flow path 28d are provided in the vicinity of the blocking members 27a to 27d.

  Further, a cooling water discharge pipe 32 communicating with the merging channel 26 is provided on the base end side of the outer cylinder 8 with respect to the closing members 27a to 27d. The cooling water 33 supplied from the cooling water supply pipes 31a to 31d flows through the supply flow paths 28a to 28d, and is turned back at the tips of the flow path dividing members 24b, 24d, 24f, and 24h, and the discharge flow path 29a. Through 29d, and merged in the merge channel 26, and then discharged from the cooling water discharge pipe 32.

  The flow path dividing members 24 a to 24 h and the closing members 27 a to 27 d also have a function as a spacer for maintaining a space between the inner cylinder 7 and the outer cylinder 8.

  Next, referring to FIGS. 7A and 7B, the details of the spacing member 12 will be described.

  Concave grooves 34 are formed on the outer circumferential surface of the spacing member 12 in parallel with the axial center and at equal circumferential intervals, for example, 45 ° intervals, over the entire axial length. The spacing member 12 can be inserted into and removed from the inner cylinder 7. When the spacing member 12 is inserted into the inner cylinder 7, the air inside the inner cylinder 7 flows out through the concave groove 34. It is like.

  When the spacing member 12 is inserted, the air cooling channel 21 is formed by the concave groove 34 and the inner peripheral surface of the inner cylinder 7.

  The spacing member 12 is provided with the communication hole 23 that opens into the concave groove 34 and communicates the air-cooled flow path 21 with the interior of the spacing member 12. In this embodiment, the communication hole 23 is drilled at one location on each of the proximal end side and the distal end side, but it goes without saying that it may be drilled at two or more locations.

  Cooling air 35 (see FIG. 2) supplied from the air supply hole 19 (see FIG. 2) flows through the space 15 and the air-cooling flow path 21, and also through the communication hole 23, the spacing holding member 12. And flows through the surface of the protective glass 22 through a groove formed in the end plate 16. A hole may be formed around the protective glass 22 instead of the groove, and the cooling air 35 may be discharged to the outside through the hole.

  Next, the filter switching unit 5 will be described with reference to FIG.

  The filter switching unit 5 has a filter holding plate 36. The filter holding plate 36 is provided with two wavelength selection filters, a first wavelength selection filter 37 that transmits the wavelength of λ1 and a second wavelength selection filter 38 that transmits the wavelength of λ2, and the first wavelength selection filter 37. The second wavelength selection filter 38 is held perpendicular to the optical axis 4. The filter holding plate 36 is supported by a slider 39. The slider 39 is slidably provided on a guide shaft 41 and is movable in a direction orthogonal to the optical axis 4. The slider 39 is connected to the timing belt 43 through a joint 42.

  The timing belt 43 is provided around pulleys 44 and 44 and is connected to a motor 45 via a reduction gear (not shown). The motor 45 is electrically connected to the control device 6 (see FIG. 1), and is intermittently driven by the control device 6 every predetermined timing, for example, every 7 seconds, and is driven in the reverse direction after stopping for a predetermined time. It has become like that.

  When the motor 45 is driven, the pulley 44 is rotated via a speed reducer. The timing belt 43 circulates around the pulley 44 by the rotation of the pulleys 44 and 44. The timing belt 43 linearly moves between the pulleys 44 and 44, and the timing belt 43 reciprocates the slider 39 along the guide shaft 41 via the joint 42. The filter holding plate 36 stops moving integrally with the slider 39, and at the stopped position, the center of one of the first wavelength selection filter 37 and the second wavelength selection filter 38 is aligned with the optical axis 4. It has become.

  The slider 39, the timing belt 43, the pulley 44, and the motor 45 constitute a filter switching unit 5.

  The case where the temperature measuring device 1 measures the temperature of the measurement object in the furnace will be described. The temperature measuring device 1 is attached so that the optical unit 2 is inserted into the furnace wall and the tip is exposed in the furnace. Light rays (thermal radiation) from the measurement object pass through the first wavelength selection filter 37 through the plurality of lens units 11 arranged in the inner cylinder 7 and enter the camera 3. By passing through the first wavelength selection filter 37, the light is received by the light receiving element of the camera 3 limited to the wavelength of λ1. Based on the light reception signal from the light receiving element, an image of the measurement object image with a wavelength of λ1 is taken.

  Further, after a predetermined time has elapsed, the motor 45 is driven to move the filter holding plate 36, and the second wavelength selection filter 38 is positioned on the optical axis 4. The light beam from the measurement object passes through the second wavelength selection filter 38 and is received by the light receiving element of the camera 3 limited to the wavelength of λ2. Based on the light reception signal from the light receiving element, the wavelength of λ2 is received. An image of the measurement object image is captured.

  The image of the measurement object image with the wavelength of λ1 and the image of the measurement object image with the wavelength of λ2 obtained by the camera 3 are sent to the control device 6, and the control device 6 is based on the two images. In addition, the temperature state such as the temperature and temperature distribution of the measurement object is calculated by the two-color temperature measurement method. The temperature state is displayed as a numerical value corresponding to the measurement point on the object to be measured, or graphed, or displayed as an image in a color-coded display corresponding to the temperature level.

  During the processing, the cooling water 33 is supplied from the cooling water supply pipes 31 a to 31 d to the water cooling channel 18. The cooling water 33 circulates in the supply flow paths 28a to 28d toward the distal end, flows in the gaps 25a to 25d and reverses, and moves in the discharge flow paths 29a to 29d toward the proximal end. Then, after merging in the merging channel 26, it is discharged to the outside through the cooling water discharge pipe 32. In the process in which the cooling water 33 flows through the water cooling channel 18, the lens barrel portion 9 is water cooled.

  Further, the cooling air 35 is supplied from the air supply hole 19 to the air cooling channel 21 through the space 15. The cooling air 35 circulates in the air cooling flow path 21 toward the front end side, and is discharged to the outside through a groove formed in the protective glass 22.

  A part of the cooling air 35 flowing through the air cooling flow path 21 flows into the interval holding member 12 through the communication hole 23 on the base end side, and the communication hole 23 on the front end side. It flows out to the air cooling flow path 21 via. The optical system such as the lens unit 11 is air-cooled in the process in which the cooling air 35 flows through the air-cooling flow path 21 and the interval holding member 12.

  Since the lens barrel 9 is cooled with water and the optical system such as the lens unit 11 is air-cooled, even when the lens barrel 9 is inserted into the furnace through an observation window of the furnace, the radiant heat from the furnace Thus, the temperature state in the furnace can be measured without overheating the lens barrel portion 9 and the lens unit 11.

  In addition, a plurality of grooves are formed radially on the end plate 16 so that the cooling air 35 circulates on the surface of the protective glass 22 through the grooves. Adhesion to the surface of the glass 22 can be prevented.

  Further, since the plurality of lens units 11 are provided in the inner cylinder 7 and the radiation light from the measurement object is propagated by the plurality of lens units 11, the inner cylinder 7 is arranged in the axial direction. Even if it is long, the radiated light can be propagated to the camera 3. Further, by appropriately providing the lens unit 11 according to the length of the inner cylinder 7, it is possible to take an image at a position away from the measurement object and not affected by heat.

  Further, in the filter switching unit 5, the filter holding plate 36 is moved every predetermined time, and the wavelength selection filter located on the optical axis 4 is switched to perform two-color temperature measurement method 2. Since it captures images of wavelengths, it does not require an optical system to divide the emitted light from the measurement object, miniaturizing the optical system and preventing light attenuation in the optical system. It is possible to secure a sufficient amount of radiated light received by the camera 3.

  In the present embodiment, an infrared camera is used as the camera 3, but a visible light camera having a silicon element is used when measuring the temperature of a furnace having a high temperature of 800 ° C. or higher.

DESCRIPTION OF SYMBOLS 1 Temperature measuring device 2 Optical unit 3 Camera 4 Optical axis 5 Filter switching part 6 Control apparatus 7 Inner cylinder 8 Outer cylinder 11 Lens unit 12 Space | interval holding member 18 Water cooling flow path 19 Air supply hole 21 Air cooling flow path 22 Protective glass 23 Communication hole 24 flow dividing member 28 supply flow path 29 discharge flow path 31 cooling water supply pipe 32 cooling water discharge pipe 33 cooling water 34 concave groove 35 cooling air 36 filter holding plate

Claims (5)

An inner cylinder, an outer cylinder provided concentrically with the inner cylinder so that a gap is formed on the outer peripheral side of the inner cylinder, and a measurement object provided inside the inner cylinder so as to have air permeability over the entire length. An optical system for propagating light radiated from an object, a filter plate having a plurality of filters having different transmission characteristics for transmitting a specific wavelength of the light transmitted through the optical system, and a filter switching unit for switching the filter of the filter plate An imaging unit that captures an image of the measurement object via the filter switched by the filter switching unit, and a temperature state of the measurement object by a two-color temperature measurement method based on the image acquired by the imaging unit And a protective glass provided at the tip of the inner cylinder, and a ring-shaped end plate for fixing the protective glass, and a radial direction on the contact surface of the protective glass of the end plate Grooves extending radially Formed in plurality, is circulated cooling water in the gap, thereby circulating the cooling air in the interior of the inner tube, the temperature measuring device which is characterized that you released from the groove the cooling air.   A flow path dividing member that divides the gap in the circumferential direction; a supply flow path that circulates the cooling water toward the tip side by the flow path dividing member; and the cooling water that flows through the supply flow path. The temperature measurement device according to claim 1, wherein a discharge flow path is formed that is reversed and flows toward the base end side.   The temperature measuring device according to claim 2, wherein a plurality of the supply flow paths and the discharge flow paths are provided, and the cooling water is supplied for each supply flow path.   The optical system includes a plurality of lens units, and a cylindrical spacing member is provided between the lens units. The cylindrical spacing member is formed on the outer peripheral surface over the entire length in the axial direction. The temperature measuring device according to any one of claims 1 to 3, wherein an air-cooling flow path through which the cooling air flows is formed between the inner circumferential surface and the inner circumferential surface.   The temperature measurement device according to claim 4, wherein a communication hole is formed in the concave groove to communicate the air cooling flow path with the inside of the spacing member.

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