JP6479517B2 - Method for forming protective member - Google Patents

Description

  The present invention relates to a method for forming a protective member for protecting a plate-like workpiece.

  In order to grind a plate-like workpiece having unevenness on the surface to a predetermined thickness, a method has been proposed in which a liquid resin is applied to the uneven surface to level the uneven surface flatly (for example, Patent Documents 1 and 2). reference). In Patent Documents 1 and 2, the liquid resin is dropped on the protective sheet placed on the stage, and the center of the liquid resin coincides with the center of the plate-shaped work with the circular plate-shaped work facing the stage. Thus, the plate-like workpiece is pressed against the liquid resin. As a result, the liquid resin is spread over the entire surface of the plate-shaped workpiece, and when the liquid resin is cured, a protective member is formed on the one surface of the plate-shaped workpiece by the cured resin layer and the protective sheet. The Since the surface on which the protective member is formed is flattened, it is possible to make the grinding thickness uniform by grinding the other surface of the plate-like workpiece while holding the protective member (protective sheet).

JP 2012-143723 A JP 2012-143724 A

  By the way, in patent documents 1 and 2, since the object to be processed is a circular plate-shaped workpiece, the liquid resin is spread over the entire surface from the center of the plate-shaped workpiece toward the outer periphery by pressing the plate-shaped workpiece against the liquid resin. Can do. However, when the plate-shaped workpiece has a special shape such as a rectangular shape, the distance from the center of the plate-shaped workpiece to the outer edge varies depending on the location. For this reason, when the liquid resin is spread outward from the center of the plate-like workpiece, the liquid resin protrudes from the outer edge of the plate-like workpiece at a portion where the distance from the center of the plate-like workpiece to the outer edge is short. There is a problem that the liquid resin cannot be spread over the entire surface.

  This invention is made | formed in view of this point, and it aims at providing the formation method of the protection member which can apply | coat liquid resin to the whole surface of a plate-shaped workpiece irrespective of the shape of a plate-shaped workpiece. .

Method of forming the protective member of the present invention, liquid distance from the center to the outer periphery is spread on the entire surface of another face is pressed by the pressing means a liquid resin for performing predetermined processing on one surface of the plate-shaped workpiece is not constant A method of forming a protective member that forms a resin layer that cures the resin and protects the entire other surface, holding the plate-like workpiece on one of the stage and the pressing means, and the center of the plate-like workpiece on the stage or A resin supply process that supplies a predetermined amount of liquid resin to the center of the stage, and after the resin supply process, when the liquid resin supplied in the resin supply process is spread by the pressing means, the liquid resin reaches the outer periphery of the plate-like workpiece Liquid resin supplied in the resin supply process by aligning the center of the plate-shaped workpiece and the center of the stage after the peripheral resin arrangement process of arranging the peripheral resin in the area not to be processed, the resin supply process and the peripheral resin arrangement process Push the peripheral resin disposed around the resin arrangement step by the pressing means, the peripheral resin support the spread of the liquid resin fed from a resin supplying step push the entire surface of another face to the liquid resin plate workpiece extension step When a curing step of curing the pressed broadened liquid resin extended process, Ri Tona, in the peripheral resin placement step, is more scattered the surrounding resin at a position apart from the outer periphery of the liquid resin supplied by the resin supplying step The peripheral resin has a smaller thickness than the liquid resin supplied in the resin supply process .

  According to this configuration, the liquid resin is supplied to the center of the plate-like workpiece by the resin supply step, and the peripheral resin is arranged at a position away from the center of the plate-like workpiece by the peripheral resin arrangement step. In the expansion process, the liquid resin and the peripheral resin are pushed and spread, and the spread of the liquid resin is supported by the peripheral resin. Thereby, liquid resin can be extended also to the area to the outer periphery of the plate-shaped workpiece | work which does not reach | attain by the liquid resin single-piece | unit supplied at the resin supply process. And a protective member can be formed in the whole surface of a plate-shaped workpiece | work by hardening liquid resin and peripheral resin by a hardening process. In this way, the protective member can be formed by applying the liquid resin to the entire surface of the plate-like workpiece regardless of the shape of the plate-like workpiece.

In another method for forming a protective member of the present invention, a liquid resin that is pressed by a pressing means and spreads over the entire other surface in order to perform a predetermined process on one surface of a rectangular plate-shaped workpiece. A method of forming a protective member that forms a resin layer that cures and protects the entire other surface, and holds the plate-like workpiece on one of the stage and the pressing means, and the center of the plate-like workpiece on the stage or the stage A resin supply step for supplying a predetermined amount of liquid resin to the center, and an area where the liquid resin does not reach the outer periphery of the plate-like workpiece when the liquid resin supplied in the resin supply step is spread by the pressing means after the resin supply step After the peripheral resin arranging step, the resin supplying step, and the peripheral resin arranging step, the center of the plate workpiece and the center of the stage are made to coincide with each other, and the liquid resin and the peripheral resin supplied in the resin supplying step An expansion step of spreading the peripheral resin arranged in the placing step with the pressing means and supporting the spread of the liquid resin supplied by the peripheral resin in the resin supply step to spread the liquid resin on the entire other surface of the plate-like workpiece; A curing process for curing the liquid resin spread in the expansion process, and in the peripheral resin placement process, the liquid resin supplied in the resin supply process is extended along the diagonal line of the plate-like workpiece at the extended portion. Is formed to incline downward from the liquid resin toward the outer periphery.

  According to the present invention, the protective member can be formed by applying the liquid resin to the entire surface of the plate-like workpiece regardless of the shape of the plate-like workpiece.

It is a schematic diagram of the protection member formation apparatus which concerns on this Embodiment. It is a schematic diagram which shows an example of the resin supply process which concerns on this Embodiment. It is a schematic diagram which shows an example of the peripheral resin arrangement | positioning process which concerns on this Embodiment. It is a schematic diagram which shows an example of the expansion process which concerns on this Embodiment. It is a schematic diagram which shows an example of the hardening process which concerns on this Embodiment. It is a top view which shows an example of the formation method of the protection member which concerns on this Embodiment. It is a schematic diagram which shows the formation method of the protection member which concerns on a 1st modification. It is a schematic diagram which shows the formation method of the protection member which concerns on a 2nd modification. It is a schematic diagram which shows the peripheral resin arrangement | positioning process which concerns on a 3rd modification. It is a schematic diagram which shows the peripheral resin arrangement | positioning process which concerns on a 3rd modification. It is a schematic diagram which shows the formation method of the protection member which concerns on a 4th modification. It is an upper surface schematic diagram which shows the periphery resin arrangement | positioning process which concerns on a 5th modification. It is a side surface schematic diagram which shows the periphery resin arrangement | positioning process which concerns on a 5th modification.

  Hereinafter, with reference to an accompanying drawing, a protection member formation device concerning this embodiment is explained. FIG. 1 is a schematic diagram of a protective member forming apparatus according to the present embodiment. The protective member forming apparatus according to the present embodiment is not limited to the configuration shown below, and can be changed as appropriate. Moreover, although this Embodiment demonstrates the structure which forms a protective member in the other surface in order to grind one surface of a plate-shaped workpiece, it is not limited to this structure. For example, a protective member may be formed to perform cutting instead of grinding.

  As shown in FIG. 1, the protective member forming apparatus 1 according to the present embodiment has a surface opposite to the surface to be ground (one surface) of the plate-like workpiece W (see FIG. It is comprised so that it may stick with respect to the other surface. The protective member forming apparatus 1 applies the liquid resin R on the protective sheet S placed on the stage 2, and the plate-like workpiece W held by the pressing means 3 above the stage 2 is applied to the protective sheet S. It works to press against it. As a result, the liquid resin R on the protective sheet S is spread and the protective sheet S is adhered to the entire other surface of the plate-like workpiece W.

  The plate-like workpiece W is configured by a package substrate obtained by applying a resin or the like on a metal substrate or the like, or a bump wafer in which a plurality of convex portions are formed on the surface of the substrate. In the present embodiment, the plate-like workpiece W has a rectangular shape in plan view instead of a circular shape in plan view (see FIG. 6). Specifically, in the present embodiment, the plate-shaped workpiece W whose distance from the center (center of gravity) to the outer periphery is not constant is the target for forming the protective member. The plate-like workpiece W is not limited to these configurations, and an ingot made of a material such as silicon, gallium arsenide, ceramic, glass, sapphire, or the like may be thinly sliced with a wire saw. Further, the plate-like workpiece W is not limited to a rectangular shape, and can be changed as appropriate.

  The protective sheet S is made of a plastic material such as PET (polyethylene terephthalate) and has translucency. The protective sheet S is formed in a rectangular shape that is slightly larger than the outer shape of the plate-like workpiece W. The liquid resin R is a photocurable resin and is cured by a photopolymerization reaction when irradiated with light such as ultraviolet rays.

  The protective member forming apparatus 1 sucks and holds a stage 2 for sucking and holding the protective sheet S, a resin supply means 4 for applying a liquid resin to the protective sheet S, and the plate-like workpiece W. And pressing means 3 for pressing toward the liquid resin R on the protective sheet S. The stage 2 has a rectangular shape larger than the outer shape of the protective sheet S or the plate-like workpiece W, and is formed of a light-transmitting material such as quartz glass. A suction source (not shown) is connected to the stage 2, and the protective sheet S is sucked and held on the stage 2 by the negative pressure generated on the upper surface of the stage 2. Inside the stage 2, a light emitting unit 5 that irradiates light such as ultraviolet rays toward the liquid resin R on the protective sheet S is provided.

  The resin supply means 4 includes a nozzle 40 that supplies liquid resin by dropping from above the stage 2 toward the protective sheet S on the stage 2, and a liquid resin supply source 41 that supplies liquid resin R to the nozzle 40. Yes. The liquid resin supply source 41 is connected to the nozzle 40 via a pipe (not shown). The nozzle 40 is configured to be movable to an arbitrary position above the stage 2 by a moving mechanism (not shown). Thereby, liquid resin R can be dripped at the arbitrary locations on the protection sheet S.

  The pressing means 3 is configured by fitting a plate-like porous member 31 on the lower surface side of a base member 30 that is rectangular when viewed from above. The porous member 31 has a rectangular shape with substantially the same outer shape as the plate-like workpiece W, and is connected to a suction source (not shown) via a flow path (not shown) in the base member 30. The pressing means 3 sucks and holds the plate-like workpiece W by the negative pressure generated on the exposed surface (lower surface) of the porous member 31. That is, the exposed surface of the porous member 31 constitutes a holding surface 32 that holds the plate-like workpiece W. The pressing means 3 is configured to be movable in the vertical direction by a ball screw type elevating means 33.

  In the protective member forming apparatus 1 configured as described above, after the protective sheet S is sucked and held on the stage 2, the liquid resin R is applied onto the protective sheet S from the nozzle 40. At this time, the liquid resin R is applied not only to the center of the stage 2 but also to a position away from the center of the stage 2. A plate-like workpiece W is sucked and held on the holding surface 32 of the pressing means 3. When the pressing means 3 is lowered and the plate-like workpiece W is pressed against the liquid resin R, the liquid resin R is spread over the entire surface of the plate-like workpiece W. Then, the liquid resin R is cured by irradiating the liquid resin R with ultraviolet rays from the light emitting portion 5, and the protective member P (see FIG. 5) is formed on the plate-like workpiece W.

  As described above, the plate-like workpiece W such as a package substrate has a rectangular shape in plan view, and has a shape in which the distance from the center to the outer periphery is not constant. For this reason, like the circular plate-shaped workpiece, when the liquid resin R is expanded by bringing the central portion of the plate-shaped workpiece W into contact with the liquid resin R on the protective sheet S, the longitudinal direction of the plate-shaped workpiece W is increased. Before the liquid resin R reaches the outer edge, the liquid resin R protrudes from the outer edge in the short direction. On the other hand, when the application amount of the liquid resin R is adjusted so that the liquid resin R does not protrude from the outer edge portion in the short direction, the liquid resin does not sufficiently spread in the longitudinal direction. Thus, there was a problem that the liquid resin R could not be spread over the entire surface of the plate-like workpiece W.

  Therefore, in the present invention, not only the center of the stage 2 but also the liquid resin R (second later described) cannot be reached only by the liquid resin R (first liquid resin R1 described later) applied to one place. The liquid resin R2) is applied. When the liquid resin R is pressed, the first liquid resin R1 and the second liquid resin R2 are combined with each other. As a result, the first liquid resin R1 cannot be reached only by the first liquid resin R1. The liquid resin R1 can be made to flow. Therefore, the liquid resin R can be applied to the entire surface of the plate-like workpiece W.

  Next, with reference to FIGS. 2 to 6, a method for forming a protective member according to the present embodiment will be described. FIG. 2 is a schematic diagram illustrating an example of a resin supply process according to the present embodiment. FIG. 3 is a schematic diagram showing an example of a peripheral resin arrangement process according to the present embodiment. FIG. 4 is a schematic diagram showing an example of the expansion process according to the present embodiment. 4A to 4D are transition diagrams of the flow state of the liquid resin in the expansion process. FIG. 5 is a schematic diagram illustrating an example of a curing process according to the present embodiment. FIG. 6 is a top view showing an example of a method for forming a protective member according to the present embodiment. 6A shows a resin supply process, FIG. 6B shows a peripheral resin arrangement process, and FIGS. 6C to 6E show an expansion process. 2 to 6, a part of the configuration is omitted for convenience of explanation, and in particular, in FIG. 6, the plate-like workpiece is indicated by a two-dot chain line.

  As shown in FIGS. 2 to 6, the protective member forming method according to the present embodiment (see FIG. 6) includes a resin supply step (see FIG. 2), a peripheral resin arrangement step (see FIG. 3), and an expansion. It comprises a process (see FIG. 4) and a curing process (see FIG. 5). In the resin supply process, a first liquid resin R1 (hereinafter referred to as liquid resin R1) is dropped and supplied to the center of the stage. In the peripheral resin arrangement step, a second liquid resin R2 (hereinafter referred to as liquid resin R2 (peripheral resin)) is arranged (supplied) at a position different from the liquid resin R1 around the liquid resin R1 on the stage 2. The In the expansion process, the liquid resins R1 and R2 on the stage 2 are expanded by the pressing means 3. In the curing step, the expanded liquid resins R1 and R2 are cured. Through the above steps, the protective member P composed of the resin layer L and the protective sheet S is formed on the plate-like workpiece W. Hereinafter, each process of the formation method of the protection member P is demonstrated.

  As shown in FIG. 2, the protective sheet S is placed on the upper surface of the stage 2 so that the center of the stage 2 and the center of the protective sheet S coincide with each other, and is sucked and held by the negative pressure generated on the upper surface of the stage 2. Has been. In the first liquid resin supply step, the nozzle 40 is positioned substantially above the center of the stage 2 (protective sheet S), and the tip of the nozzle 40 is directed to the center of the stage 2 (protective sheet S). Then, a predetermined amount of the liquid resin R1 is dropped from the nozzle 40.

  After the liquid resin R1 is dropped on the center of the protective sheet S, the liquid resin R1 flows outward in the radial direction by its own weight. As a result, as shown in FIG. 6A, the liquid resin R1 is diffused in a circular shape when viewed from above with a predetermined thickness. The dropping amount of the liquid resin R1 is adjusted so that the liquid resin R1 dropped on the protective sheet S spreads in a circular shape smaller than the width in the short direction of the protective sheet S (plate-like workpiece W). preferable.

  Next, a peripheral resin arrangement process is performed. In the peripheral resin arranging step, as shown in FIG. 3, the nozzle 40 is moved from the upper center of the stage 2 to the outside in the horizontal direction, and the tip of the nozzle 40 is shifted to the outside from the center of the stage 2 (protective sheet S). Positioned. Then, a predetermined amount of the liquid resin R2 is dropped from the nozzle 40. In the peripheral resin arrangement step, as shown in FIG. 6B, the liquid resin R2 (peripheral resin) is dropped at four positions at positions away from the outer periphery of the circular liquid resin R1.

  More specifically, the liquid resin is outside the outermost edge (diameter) of the liquid resin R1 in the longitudinal direction of the protective sheet S and inside the outermost edge (diameter) of the liquid resin R1 in the short direction. R2 is added dropwise. Further, the dropping amount of the liquid resin R2 is sufficiently smaller than the dropping amount of the liquid resin R1. For this reason, the liquid resin R2 spreads in a circular shape so that the thickness T2 of the liquid resin R2 is smaller than the thickness T1 of the liquid resin R1, and the outer diameter of the liquid resin R2 is smaller than the outer diameter of the liquid resin R1. (See FIGS. 3 and 6B). Thereby, in the expansion process described later, the liquid resin R1 at the center of the stage 2 is first pressed, and then the liquid resin R2 at the outer peripheral side is pressed, so that the liquid resin is gradually spread from the center toward the outer peripheral side. . For this reason, it is difficult for air bubbles to enter between the liquid resin R1 and the liquid resin R2.

  Further, the shortest distance X1 between the outer edge of the liquid resin R2 dropped on the protective sheet S and the center of the plate-like workpiece W may be smaller than the distance X2 from the center of the plate-like workpiece W to the outer edge portion in the short direction. preferable. This is because the liquid resin R1 and the liquid resin R2 can be combined before the liquid resin R1 protrudes from the outer edge portion (long side portion) of the plate-like workpiece W in the expansion step. Furthermore, the liquid resin is located at a position where the difference between the distance X3 between the corner of the plate-like workpiece W and the outer edge of the liquid resin R2 and the distance X4 from the long side portion of the plate-like workpiece W to the outer edge of the liquid resin R1 becomes smaller. R2 is preferably added dropwise. This is to make the flow distance as close as possible in the longitudinal direction and the lateral direction until the liquid resin R1 or the liquid resin R2 reaches the outer edge of the plate-like workpiece W. Thereby, in the expansion process, when the liquid resins R1 and R2 protrude from the outer edge portion in the short direction of the plate-like workpiece W, the liquid resins R1 and R2 can be spread in the longitudinal direction of the plate-like workpiece W.

  In the present embodiment, the peripheral resin (liquid resin R2) is arranged (dropped) around the liquid resin R1 separately from the liquid resin R1 supplied in the resin supply step. However, the present invention is limited to this structure. Not. The peripheral resin supports the spread of the liquid resin R1 in the longitudinal direction of the plate-like workpiece W in the expansion process, and a part of the liquid resin R1 is used as in a modification example described later (see FIGS. 9 to 13). Resin arranged around the liquid resin R1 by extending is also included in the peripheral resin.

  Next, an expansion process is performed. One surface (surface to be ground) of the plate-like workpiece W is sucked and held on the holding surface 32 of the pressing means 3, and the other surface is directed downward (on the stage 2 side) (see FIG. 1). Further, the center of the stage 2 (protective sheet S) and the center (center of gravity) of the plate-like workpiece W are matched. In the expansion process, as shown in FIG. 4, the pressing means 3 is lowered by the lifting means 33 (see FIG. 1), and the lower surface center of the plate-like workpiece W is a liquid resin R1 having a relatively large thickness relative to the liquid resin R2. (See FIG. 4A).

  The plate-like workpiece W comes into contact with the liquid resin R1 and the pressing means 3 is gradually lowered, and the plate-like workpiece W presses the liquid resin R1 uniformly. As a result, the liquid resin R1 is uniformly spread outward in the radial direction, and the outer diameter is increased. 4B and 6C, before the upper surface of the liquid resin R2 comes into contact with the plate-like workpiece W (see FIG. 4B), the outer edge of the liquid resin R1 is the protective sheet S (the plate-like workpiece W). ) (See FIG. 6C), the liquid resin R1 and the liquid resin R2 are joined (joined). At this time, since the liquid resin R1 in the central portion of the plate-like workpiece W is joined to the liquid resin R2 on the radially outer side while being spread out, bubbles are less likely to be mixed between the liquid resin R1 and the liquid resin R2. Yes.

  The liquid resin R1 was flowing so as to spread uniformly radially outward from the center of the protective sheet S (plate-like workpiece W) until it was bonded to the liquid resin R2. However, since the liquid resin R1 is bonded to the liquid resin R2, the flow of the liquid resin R1 in the short direction of the protective sheet S (plate workpiece W) is disrupted, and the liquid resin R1 is bonded to the liquid resin R2. It flows toward. That is, the liquid resin R1 that has flowed in the short direction until then flows in the longitudinal direction by being bonded to the liquid resin R2.

  When the pressing means 3 (plate-like workpiece W) is further lowered, as shown in FIGS. 4C and 6D, the liquid resin R1 flows in the longitudinal direction while joining the liquid resin R2, while the liquid resin R2 When the lower surface of the workpiece W is brought into contact with the upper surface of the liquid resin R2, it is spread outward in the radial direction. The liquid resins R1 and R2 flow together toward the outside in the longitudinal direction. 4D and 6E, the pressing means 3 is lowered until the liquid resins R1 and R2 slightly protrude from the outer periphery of the plate-like workpiece W, so that the liquid resin R1 is placed on the entire lower surface of the plate-like workpiece W. , R2 is expanded.

  As described above, when the liquid resin R1 is applied to the center of the stage 2 in the resin supply process, and only the liquid resin R1 is pressed and expanded in the peripheral resin arrangement process, the liquid resin R1 is formed on the plate-like workpiece W. Liquid resin R2 (peripheral resin) is applied to an area that does not reach the outer periphery (periphery of liquid resin R1). Then, the liquid resins R1 and R2 are expanded by the expansion process, and the liquid resin R2 supports the expansion of the liquid resin R1 in the longitudinal direction from the middle. As a result, even if it is a rectangular plate-shaped workpiece W, the liquid resins R1 and R2 can be spread over the entire lower surface of the plate-shaped workpiece W. Thus, the liquid resin R2 plays a role of guiding the spread of the liquid resin R1 in the expansion process.

  Next, a curing step is performed. In the curing step, as shown in FIG. 5, light is emitted from the light emitting unit 5 toward the liquid resins R <b> 1 and R <b> 2 (see FIG. 4D) spread over the entire lower surface of the plate-like workpiece W. The light passes through the translucent stage 2 and the protective sheet S and is absorbed by the liquid resins R1 and R2. And liquid resin R1, R2 is hardened | cured by photopolymerization reaction, and the resin layer L of uniform thickness is formed between the plate-shaped workpiece W and the protective sheet S. As a result, the protective member P composed of the resin layer L and the protective sheet S is formed on the entire lower surface of the plate-like workpiece W. As described above, the uneven surface of the plate-like workpiece W is leveled flat.

  As described above, according to the method for forming a protective member according to the present embodiment, the liquid resin R1 is supplied to the center (center of gravity) of the plate-like workpiece W by the resin supply step, and the plate-like workpiece W is supplied by the peripheral resin arrangement step. The liquid resin R2 (peripheral resin) is disposed (supplied) at a position away from the center of the substrate (around the liquid resin R1). In the expansion process, the liquid resin R1 is pushed and spread, and the liquid resin R1 and the liquid resin R2 are combined to support the spread of the liquid resin R1. Thereby, liquid resin R1 can be extended also to the area to the outer periphery of the plate-shaped workpiece W which cannot reach by liquid resin R1 single-piece | unit. And the protection member P can be formed in the whole surface of the plate-shaped workpiece | work W by hardening 1st liquid resin R and 2nd liquid resin R1 by a hardening process. Thus, the protective member P can be formed by applying the liquid resins R1 and R2 to the entire surface of the plate-like workpiece W regardless of the shape of the plate-like workpiece W.

  Next, with reference to FIG. 7, the formation method of the protection member which concerns on a 1st modification is demonstrated. FIG. 7 is a schematic diagram illustrating a method for forming a protective member according to a first modification. FIG. 7A shows a state immediately after the first and second liquid resins are supplied, and FIG. 7B shows a state in the middle of the expansion process. In FIG. 7, the second liquid resin supply method is different from the present embodiment. Hereinafter, the differences will be mainly described. In addition, about the structure of the same name as this Embodiment, it demonstrates with the same code | symbol.

  In the first modified example, as shown in FIG. 7A, the liquid resin R1 is dropped at the center (center of gravity) of the rectangular protective sheet S by the resin supply process, and the liquid resin R1 is diffused in a circular shape. . In the peripheral resin arrangement step, when only the liquid resin R1 is pressed to expand the diameter, the liquid resin R2 (peripheral resin) is applied to four areas in an area where the liquid resin R1 does not reach the outer periphery of the plate-like workpiece W. (Supplied). More specifically, the substantially elliptical liquid resin R2 is applied to the outside of the liquid resin R1 at four locations so as to extend along the diagonal line of the protective sheet S (plate-like workpiece W). Then, as shown in FIG. 7B, when the liquid resin R1 is expanded by the expansion process, the liquid resin R1 and the liquid resin R2 are combined, and the liquid resin R2 supports the spread of the liquid resin R1 in the longitudinal direction. . As a result, even if it is a rectangular plate-shaped workpiece W, the liquid resins R1 and R2 can be spread over the entire lower surface of the plate-shaped workpiece W.

  Next, with reference to FIG. 8, the formation method of the protection member which concerns on a 2nd modification is demonstrated. FIG. 8 is a schematic diagram illustrating a method for forming a protective member according to a second modification. FIG. 8A shows a state immediately after the first and second liquid resins are supplied, and FIG. 8B shows a state during the expansion process. In FIG. 8, it differs from this Embodiment by the point that the shape of a plate-shaped workpiece | work and a protection sheet is not rectangular shape but semicircle shape (fan shape). Hereinafter, the differences will be mainly described. In addition, about the structure of the same name as this Embodiment, it demonstrates with the same code | symbol.

  In the second modified example, as shown in FIG. 8A, the protective sheet S (plate-like workpiece W) is formed in a semicircular shape. In the resin supply step, the liquid resin R1 is dropped on the approximate center of the protective sheet S (plate-like workpiece W), and the liquid resin R1 is diffused in a circular shape. More specifically, the liquid resin R1 is dropped (supplied) to the position of the center of gravity of the semicircular protective sheet S (plate workpiece W). In the peripheral resin arrangement step, when the diameter of the liquid resin R1 is increased by pressing only the liquid resin R1, the liquid resin R2 (second liquid resin) is 2 in an area where the liquid resin R1 does not reach the outer periphery of the plate-like workpiece W. It is applied in place.

  In the second modification, a circular liquid resin R2 is applied to both sides of the longitudinal direction (diameter direction) outside the liquid resin R1. Then, as shown in FIG. 8B, when the liquid resin R1 is pushed and expanded by the expansion process, the liquid resin R1 and the liquid resin R2 are combined, and the liquid resin R2 spreads in the longitudinal direction (diameter direction). Supported. As a result, even if it is a semicircular plate-like workpiece W, the liquid resins R1 and R2 can be spread over the entire lower surface of the plate-like workpiece W.

  As described above, also in the first and second modified examples, the liquid resin R1 is supplied to the center of gravity (center) of the plate-like workpiece W by the resin supply step, and separated from the center of the plate-like workpiece W by the peripheral resin arrangement step. The liquid resin R2 (peripheral resin) is disposed (supplied) at the position. Therefore, in the expansion process, the liquid resins R1 and R2 can be expanded to the area up to the outer periphery of the plate-like workpiece W that cannot be reached by the liquid resin R1 alone. And the protection member P can be formed in the whole surface of the plate-shaped workpiece W by hardening | curing liquid resin R1, R2 by a hardening process.

  Next, with reference to FIG.9 and FIG.10, the formation method of the protection member which concerns on a 3rd modification is demonstrated. 9 and 10 are schematic views showing a peripheral resin arranging step according to the third modification. FIGS. 9A to 9C and FIGS. 10A to 10C show operation transition diagrams of the peripheral resin arrangement process as viewed from the side, and FIG. 10D shows a schematic top view when the peripheral resin arrangement process is completed. In the third modification shown in FIGS. 9 and 10, the liquid resin supplied in the resin supply step is extended by an extended portion (a plate 60 described later) in the peripheral resin arrangement step, so that the peripheral resin is formed. Different from the embodiment. Hereinafter, the differences will be mainly described. In addition, about the structure of the same name as this Embodiment, it demonstrates with the same code | symbol.

  As shown in FIG. 9A, after the liquid resin R1 is dropped (supplied) to the center of the protective sheet S on the stage 2 in the resin supply step, the peripheral resin arrangement step is performed as in the above-described embodiment. In the peripheral resin placement step, a plate 60 is provided above the stage 2 for extending the liquid resin R1 to a predetermined area. The plate 60 is formed of a rectangular plate-like body that extends in the vertical direction when viewed from the side, and is configured to be movable in the horizontal direction and the vertical direction by the horizontal moving means 61 and the elevating means 62. The stage 2 is configured to be rotatable about the center of the stage 2 by a rotating means (not shown).

  The plate 60 is positioned directly above (center) of the liquid resin R1 on the protective sheet S, and the short direction of the plate 60 is directed to the diagonal line of the plate-like workpiece W (protective sheet S) (see FIG. 10D). ). Then, as shown in FIG. 9B, the plate 60 is lowered by the elevating means 62, and the lower end of the plate 60 contacts (immerses) the liquid resin R1. Further, while the plate 60 is gradually lowered by the elevating means 62 and the height of the plate 60 is finely adjusted, the plate 60 is horizontally moved along the diagonal line of the plate-like workpiece W by the horizontal moving means 61 as shown in FIG. 9C. Moved. Thereby, the liquid reservoir of the liquid resin R1 on the protective sheet S is broken, and the liquid resin R1 is stretched toward the corners of the plate-like workpiece W by the plate 60. As a result, the peripheral resin R2 along the diagonal line of the plate-like workpiece W is formed (arranged) around the liquid resin R1.

  When the liquid resin R1 is stretched in one direction, the plate 60 is raised as shown in FIG. 10A, and the stage 2 is rotated by a predetermined angle. Then, the liquid resin R1 is stretched (arrangement of the peripheral resin R2) in a new direction. Similarly to FIG. 9, the plate 60 is lowered by the elevating means 62, and the lower end of the plate 60 comes into contact (immersion) with the liquid resin R <b> 1 (see FIG. 10B). Further, while the plate 60 is gradually lowered by the elevating means 62 and the height of the plate 60 is finely adjusted, the plate 60 is horizontally moved along the diagonal line of the plate-like workpiece W by the horizontal moving means 61 (see FIG. 10C). ). Thereby, also in the new direction, the peripheral resin R2 along the diagonal line of the plate-like workpiece W is formed (arranged) around the liquid resin R1.

  Then, the stage 2 is rotated again by a predetermined angle, and the plate 60 is moved from the center of the plate-like workpiece W toward the respective corners on the remaining diagonal lines to extend the liquid resin R1. As described above, as shown in FIG. 10D, the peripheral resin R2 along all the diagonal lines of the plate-like workpiece W is formed (arranged) around the liquid resin R1.

  As described above, in the third modified example, the liquid resin R1 is extended from the center of the stage 2 toward the outside of the plate-like workpiece W by the peripheral resin arrangement step, thereby pressing only the liquid resin R1 and expanding the diameter. In this case, the peripheral resin R2 can be formed (arranged) in an area where the liquid resin R1 does not reach the outer periphery of the plate-like workpiece W. Then, as in the above-described embodiment, as a result of the liquid resin R1 and the peripheral resin R2 being expanded by the expansion process, the expansion of the liquid resin R1 is supported in the longitudinal direction of the plate-like workpiece W by the peripheral resin R2. Therefore, even if it is a rectangular plate-shaped workpiece W, the liquid resin R1 and the peripheral resin R2 can be spread over the entire lower surface of the plate-shaped workpiece W (see FIG. 6E).

  Next, with reference to FIG. 11, the formation method of the protection member which concerns on a 4th modification is demonstrated. FIG. 11 is a schematic diagram illustrating a method for forming a protective member according to a fourth modification. 11A shows a resin supply process, FIG. 11B shows a perspective view of a partition plate (extension part) according to a fourth modification, FIG. 11C shows a schematic side view of the peripheral resin arrangement process, and FIG. 11D shows a peripheral resin. The upper surface schematic diagram of the arrangement | positioning process is shown. In the fourth modification shown in FIG. 11, the liquid resin supplied in the resin supply step is pressed by a partition plate formed in a cross shape and extended in the peripheral resin placement step, thereby forming the peripheral resin. Different from the embodiment (third modification). Hereinafter, the differences will be mainly described. In addition, about the structure of the same name as this Embodiment, it demonstrates with the same code | symbol.

  As shown in FIG. 11A, in the resin supply step, the liquid resin R1 is dropped (supplied) at the center of the protective sheet S on the stage 2. Then, a peripheral resin arrangement step is performed next. As shown in FIG. 11B, in the fourth modified example, the peripheral resin arranging step is performed by the partition plate 70 having a cross shape along the diagonal line of the rectangular plate-like workpiece W (see FIG. 11D). More specifically, the partition plate 70 has a cross shape in which two rectangular plates extending along a diagonal line of the plate-like workpiece W are crossed at the center of the plate-like workpiece W. The partition plate 70 is configured to be movable in the vertical direction by the lifting means 71.

  As shown in FIGS. 11C and 11D, a partition plate 70 is provided above the stage 2 to allow the liquid resin R1 to flow into a predetermined area, and the center of the stage 2 and the intersection of the partition plate 70 coincide with each other. It is positioned as such. In the peripheral resin arrangement step, the partition plate 70 is lowered by the lifting means 71, and the lower end of the partition plate 70 contacts the liquid resin R1. When the partition plate 70 is further lowered, the liquid resin R1 is pressed by the partition plate 70 so as to be partitioned into four areas in a top view (see FIG. 11D). The liquid resin R1 is pressed by the partition plate 70 and flows along the extending direction of the partition plate 70 (the diagonal direction of the plate-like workpiece W). Thereby, the liquid reservoir of the liquid resin R1 on the protective sheet S is broken, and the peripheral resin R2 along the diagonal line of the plate-like workpiece W is formed (arranged) around the liquid resin R1 as shown in FIG. 11D. .

  As described above, in the fourth modification, the liquid resin R1 flows and extends from the center of the stage 2 toward the outside of the plate-like workpiece W by the peripheral resin arrangement step, thereby pressing only the liquid resin R1. The peripheral resin R2 can be formed (arranged) in an area where the liquid resin R1 does not reach the outer periphery of the plate-like workpiece W when the diameter is increased. Then, as in the above-described embodiment, as a result of the liquid resin R1 and the peripheral resin R2 being expanded by the expansion process, the expansion of the liquid resin R1 is supported in the longitudinal direction of the plate-like workpiece W by the peripheral resin R2. Therefore, even if it is a rectangular plate-shaped workpiece W, the liquid resin R1 and the peripheral resin R2 can be spread over the entire lower surface of the plate-shaped workpiece W (see FIG. 6E).

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the above-described embodiment, the liquid resin is composed of a photo-curing resin, but is not limited to this configuration. The liquid resin may be a thermosetting resin. In this case, in the curing step, the liquid resin may be cured using a heater or the like instead of the light emitting unit 5.

  In the above-described embodiment, the liquid resins R1 and R2 are supplied onto the protective sheet S sucked and held on the stage 2, and the liquid resin is spread by the pressing means 3 that sucks and holds the plate-like workpiece W. However, it is not limited to this configuration. Either the stage 2 or the pressing means 3 holds the plate-like workpiece W, and the other faces the plate-like workpiece W, and a liquid resin is placed at the center of the plate-like workpiece W on the stage 2 or the center of the stage 2. Any configuration may be used as long as R1 and R2 can be supplied. For example, the liquid resins R1 and R2 may be supplied onto the plate-like workpiece W sucked and held on the stage 2, and after the protective sheet S is placed thereon, the liquid resins R1 and R2 may be spread by a pressing means. . Also in this case, as a result of the liquid resin R1 being spread and spread, the liquid resin R1 and the liquid resin R2 are combined, and the spread of the liquid resin R1 is supported in the longitudinal direction by the liquid resin R2. Therefore, even if it is a rectangular plate-like workpiece W, the liquid resins R1 and R2 can be spread over the entire surface of the plate-like workpiece W. Thus, the protective member P can be formed by applying the liquid resins R1 and R2 to the entire surface of the plate-like workpiece W regardless of the shape of the plate-like workpiece W.

  Further, in the above-described embodiment, the liquid resin is supplied onto the protective sheet S by the resin supply unit 4, but is not limited to this configuration. The operator may drop the liquid resins R1 and R2 directly on the protective sheet S.

  In the above-described embodiment, the liquid resins R1 and R2 are applied to the plate-like workpiece via the protective sheet S. However, the present invention is not limited to this configuration. The protective sheet S is not necessarily used.

  In the above-described embodiment, the liquid resin R1 is applied in a circular shape and the peripheral resin R2 is applied in a circular shape. However, the present invention is not limited to this configuration. The shapes of the applied liquid resins R1 and R2 can be changed as appropriate. For example, the peripheral resin R2 may be applied such that the area on the center side of the stage 2 (the protective sheet S or the plate-like workpiece W) is large, and the area decreases toward the outer periphery. Moreover, the dropping locations of the peripheral resin R2 are not limited to four locations, and may be scattered in two locations or five or more locations.

  In the third embodiment described above, the liquid resin R1 is extended diagonally by the single plate 60. However, the present invention is not limited to this configuration. The configuration shown in FIGS. 12 and 13 is also possible. Hereinafter, with reference to FIG.12 and FIG.13, the formation method of the protection member which concerns on a 5th modification is demonstrated. FIG. 12 is a schematic top view showing a peripheral resin arrangement step according to a fifth modification, and FIG. 13 is a schematic side view showing a peripheral resin arrangement step according to the fifth modification. The fifth modification is different from the third modification in that a pair of plates are opposed to each other in the thickness direction, and the liquid resin is extended by the pair of plates. Hereinafter, the differences will be mainly described. In addition, about the structure of the same name as above-mentioned embodiment, it demonstrates with the same code | symbol.

  As shown in FIGS. 12A and 13A, after the liquid resin R1 is dropped (supplied) to the center of the protective sheet S on the stage 2 in the resin supply process, the peripheral resin arrangement process is performed. In the peripheral resin arrangement step, a pair of plates 80 for extending the liquid resin R1 to a predetermined area is provided above the stage 2. The plate 80 is formed of a rectangular plate-like body extending in the vertical direction when viewed from the side, and as shown in FIG. 12B, the pair of plates 80 are arranged in the thickness direction with a predetermined gap D therebetween. In addition, the pair of plates 80 are configured to be movable in the horizontal direction and the vertical direction by a horizontal moving unit and a lifting unit (not shown), and are configured to be able to freely adjust the opposing distance (the above-described gap D). . The stage 2 is configured to be rotatable about the center of the stage 2 by a rotating means (not shown).

  As shown in FIGS. 12B and 13A, the pair of plates 80 is positioned above the liquid resin R1 on the protective sheet S, and the short direction of the pair of plates 80 is a diagonal line of the plate-like workpiece W (protective sheet S). It is pointed up. That is, the direction in which the pair of plates 80 face each other and the direction of the diagonal line are directed in a direction orthogonal to each other. Then, as shown in FIG. 13B, the plate 80 is lowered by the elevating means 62, and the lower end of the plate 80 comes into contact (immersion) with the liquid resin R1. At this time, the liquid resin R1 enters the space between the gaps D of the pair of plates 80 due to viscosity, and a predetermined amount of the liquid resin R1 is held in the gaps D.

  In this state, the pair of plates 80 are horizontally moved along the diagonal line of the plate-like workpiece W (in a direction orthogonal to the direction in which the pair of plates 80 face each other) (FIGS. 12C to 12E and 13C to 13C). 13E). Thereby, the liquid reservoir of the liquid resin R1 on the protective sheet S is broken, and the liquid resin R1 is stretched toward the corners of the plate-like workpiece W by the plate 60. At this time, the gap D is gradually widened as the pair of plates 80 approaches the corners of the plate-like workpiece W. Thereby, liquid resin R1 can be extended along a diagonal line, adjusting the quantity of liquid resin R1 hold | maintained at the clearance gap D. FIG.

  As described above, by holding the liquid resin R1 in the gap D between the pair of plates 80, more liquid resin R1 can be held as compared with the case of one plate 60. Therefore, by moving the two plates 60 diagonally while holding the liquid resin R1, more peripheral resin R2 can be formed by flowing more liquid resin R1 at a time. As a result, as shown in FIGS. 12E and 13E, the peripheral resin R2 along the diagonal line of the plate-like workpiece W is formed (arranged) around the liquid resin R1. As described above, as the pair of plates 80 approaches the corner of the plate-like workpiece W, the gap D is gradually widened to adjust the amount of the liquid resin R1 held in the gap D, so that the peripheral resin R2 is The liquid resin R1 is formed (arranged) so as to be slightly inclined downward toward the outer periphery of the protective sheet S.

  After the liquid resin R1 is stretched in one direction, the stage 2 is rotated by a predetermined angle, and the pair of plates 80 are moved from the center of the plate-like workpiece W toward the respective corners on the remaining diagonal lines. As described above, as a result of the liquid resin R1 being stretched, the peripheral resin R2 along all the diagonal lines of the plate-like workpiece W is formed (arranged) around the liquid resin R1.

  As described above, in the fifth modification, the liquid resin R1 is extended from the center of the stage 2 toward the outside of the plate-like workpiece W by the peripheral resin arrangement step, so that only the liquid resin R1 is pressed to expand the diameter. In this case, the peripheral resin R2 can be formed (arranged) in an area where the liquid resin R1 does not reach the outer periphery of the plate-like workpiece W. Then, as in the above-described embodiment, as a result of the liquid resin R1 and the peripheral resin R2 being expanded by the expansion process, the expansion of the liquid resin R1 is supported in the longitudinal direction of the plate-like workpiece W by the peripheral resin R2. Therefore, even if it is a rectangular plate-shaped workpiece W, the liquid resin R1 and the peripheral resin R2 can be spread over the entire lower surface of the plate-shaped workpiece W (see FIG. 6E).

  In the third and fifth modifications described above, the plate 60 or the pair of plates 80 having a rectangular shape in side view is used as the extending portion. However, the present invention is not limited to this configuration. The extending portion only needs to be able to extend the liquid resin R1, and as the extending portion, for example, a cylindrical rod or pipe may be used.

  In the fifth modified example, the gap D is gradually widened as the pair of plates 80 approaches the corners of the plate-like workpiece W. However, the present invention is not limited to this configuration. For example, instead of widening the gap D, the pair of plates 80 may be gradually raised as the pair of plates 80 approaches the corners of the plate-like workpiece W. Also by this, it can be extended while finely adjusting the amount of the liquid resin R1 held in the gap D. Similarly, when the liquid resin R1 is extended using a pipe, the pipe may be raised according to the movement of the pipe.

  As described above, the present invention has an effect that the liquid resin can be applied to the entire surface of the plate-like workpiece regardless of the shape of the plate-like workpiece, and in particular, the protective member for protecting the plate-like workpiece. Useful for forming method.

W plate-like workpiece R, R1 liquid resin R2 peripheral resin L resin layer P protective member 1 protective member forming apparatus 2 stage 3 pressing means 60 plate (extension part)
70 partition plate (extension part)
80 plate (extension part)

Claims (2)

In order to apply a predetermined process to one side of a plate-like workpiece whose distance from the center to the outer periphery is not constant, the liquid resin is pressed by pressing means and the liquid resin spread over the other surface is cured to protect the other surface. A protective member forming method for forming a resin layer,
A resin supply step of holding a plate-like workpiece on one of the stage and the pressing means and supplying a predetermined amount of liquid resin to the center of the plate-like workpiece on the stage or the center of the stage;
After the resin supply step, when the liquid resin supplied in the resin supply step is spread by the pressing means, a peripheral resin arrangement step of arranging the peripheral resin in an area where the liquid resin does not reach the outer periphery of the plate-like workpiece;
After the resin supplying step and the peripheral resin arranging step, the center of the plate workpiece and the center of the stage are made to coincide, and the liquid resin supplied in the resin supplying step and the peripheral resin arranged in the peripheral resin arranging step are and pressing spread by pressure means, extension step of the peripheral resin push the entire surface of another face to the liquid resin spread support plate workpiece the liquid resin fed in the resin supply step of,
A curing step of curing the push broadened liquid resin in said expanding step, Ri Tona,
In the peripheral resin placement step, a plurality of the peripheral resins are scattered at positions away from the outer periphery of the liquid resin supplied in the resin supply step, and the peripheral resin is thinner than the liquid resin supplied in the resin supply step Method for forming protective member. In order to perform predetermined processing on one surface of the rectangular plate-shaped workpiece, the liquid resin is pressed by pressing means to cure the liquid resin spread on the entire other surface, thereby forming a resin layer that protects the entire other surface. A method for forming a protective member, comprising:
A resin supply step of holding a plate-like workpiece on one of the stage and the pressing means and supplying a predetermined amount of liquid resin to the center of the plate-like workpiece on the stage or the center of the stage;
After the resin supply step, when the liquid resin supplied in the resin supply step is spread by the pressing means, a peripheral resin arrangement step of arranging the peripheral resin in an area where the liquid resin does not reach the outer periphery of the plate-like workpiece;
After the resin supplying step and the peripheral resin arranging step, the center of the plate workpiece and the center of the stage are made to coincide, and the liquid resin supplied in the resin supplying step and the peripheral resin arranged in the peripheral resin arranging step are An expansion step of spreading the liquid resin over the entire other surface of the plate-shaped workpiece by supporting the spread of the liquid resin supplied in the resin supply step by the peripheral resin,
A curing process for curing the liquid resin that has been spread in the expansion process,
In the peripheral resin arranging step, the liquid resin supplied in the resin supplying step is extended along the diagonal line of the plate-like workpiece at the extending portion so that the peripheral resin is inclined downward from the liquid resin toward the outer periphery. Method of forming a protective member.

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