JP6477684B2 - Current detector - Google Patents

Description

  The present invention relates to a current amount detector that detects a current amount by detecting a magnetic field generated by a current using a magnetic sensor, and a current line with a current amount detector.

  A current amount detector using a magnetic sensor can measure current with high accuracy, and is used for high accuracy and low power consumption of vehicles, industrial machines, power devices and the like. Until now, magnetic sensors using cores and Hall elements, current transformers, shunt resistors, and the like have been used. For example, in the magnetic sensor using the core and the Hall element disclosed in Patent Document 1, the magnetic flux is collected by the ring-shaped core disposed around the current line, and the collected magnetic flux is detected by the Hall element. However, in such a magnetic sensor, when the measurement current is a large current, the core is saturated, and in order to prevent the saturation of the core, the core itself must be enlarged, and the cost is high. Therefore, it is difficult to measure a large amount of current with a small size and low cost. On the other hand, when a configuration without a core is used, a Hall element used in such a magnetic sensor cannot accurately detect a small magnetic field, and thus it is difficult to perform a good measurement even when the measurement current is small.

  For this reason, high-sensitivity elements represented by GMR elements, TMR elements, and the like that can detect small magnetic fields with high accuracy have been used instead of Hall elements. However, magnetic sensors using high-sensitivity GMR elements, TMR elements, and the like can measure changes in the induced magnetic field due to minute currents, but are easily affected by external magnetic fields due to geomagnetism, equipment, and the environment. Noise countermeasures are also necessary. It is possible to suppress the external magnetic field by covering the measurement magnetic field source, the measurement current line, and the magnetic sensor with a magnetic shield using a high permeability soft magnetic material. However, as with the core in a magnetic sensor using a core and a Hall element, when the measurement current is large, in order to prevent saturation of the measurement current due to the induced magnetic field, the volume of the soft magnetic material constituting the magnetic shield is increased. There is a need. Therefore, in measuring the amount of current with a large current, it is difficult to take measures against noise from an external magnetic field using only a magnetic shield, and there is a problem that it is difficult to measure current in a relatively wide range as described above.

In order to solve the above problem, Patent Documents 2 to 5 disclose devices that detect a magnetic field caused by a direct current using a plurality of magnetic sensors.
For example, Patent Document 2 discloses a current measuring device including a plurality of magnetic sensors and signal processing means for calculating a current value based on an output signal reflecting a difference in current sensitivity of the magnetic sensors. Various types of conductors that can be measured are disclosed. Further, it is described that the magnetic sensor is not particularly limited as long as it is a magnetic sensor such as a magnetoelectric conversion element that detects a magnetic field. In Patent Document 2, as shown in FIG. 18, the distance between the magnetic sensor 3a and the conductor to be measured 5 ′ and the distance between the magnetic sensor 3b and the conductor to be measured 5 ′ are different. And a measured conductor 5 '.
The current sensitivities of the magnetic sensors 3a and 3b are Sa and Sb [V / A], the current flowing through the conductor 5 'to be measured is I [A], and the magnetic field sensitivities of the magnetic sensors 3a and 3b are ma and mb [V / T, respectively. ], Assuming that the magnetic flux density of the disturbance magnetic field given from the outside to the magnetic sensors 3a and 3b is Ba and Bb [T], and the output voltages of the magnetic sensors 3a and 3b are Va and Vb [V], respectively.
About the magnetic sensor 3a,
Va = Sa × I + ma × Ba (1)
And
Regarding the magnetic sensor 3b,
Vb = Sb × I + mb × Bb (2)
Holds. It is approximated that ma = mb holds for the magnetic field sensitivities of the two magnetic sensors 3a, 3b, and Ba = Bb holds for the magnetic flux density of the disturbance magnetic field applied to the magnetic sensors 3a, 3b from the outside. )
Va-Vb = (Sa-Sb) I is obtained.
By obtaining the current sensitivities Sa and Sb and Va and Vb, the current I flowing through the measured conductor 5 ′ can be calculated.

  Moreover, in patent document 3, the electric current branched by the through-hole, the 1st magnetoelectric conversion element arrange | positioned in the said through-hole, and the 2nd arrange | positioned outside the said 1st branch path or the 2nd branch path. A current detector including a magnetoelectric conversion element is disclosed. Since the magnetic field generated by the current flowing through the first branch path and the magnetic field generated by the current flowing through the second branch path cancel each other at the position in the through hole, a disturbance magnetic field is generated by the first magnetoelectric transducer disposed in the through hole. An electrical signal corresponding to the intensity of the signal is output.

  Further, Patent Document 4 discloses a current sensor and a current detection method thereof capable of performing current detection (differential detection) based on a magnetic vector difference value with a simple configuration. More specifically, two parallel lines through which current in the same direction flows, and two magnets that detect magnetic vectors in opposite directions caused by current flowing through these two lines, respectively. And an integrated chip on which the detection elements are integrated. The integrated chip is sandwiched between the two parallel lines in a step space provided between the two parallel lines, with one of the two lines on the front side and the other on the back side. A configuration in which these are arranged is disclosed.

  Further, in Patent Document 5, the first and second magnetic sensors having parallel magnetosensitive axes are arranged, and the external magnetic field is canceled by acquiring the differential output, thereby improving the positional deviation tolerance of the sensor. In addition, a current sensor that can improve output sensitivity is disclosed. It is also described that a high-sensitivity multilayer giant magnetoresistive element (GMR) and tunnel magnetoresistive element (TMR) are used as the magnetic sensor.

JP-A-7-140180 JP 2005-195427 A Japanese Patent No. 3631925 Japanese Patent No. 4434111 JP 2012-63285 A

  A magnetic sensor using a core and a Hall element as in Patent Document 1 has a problem that it cannot detect a current amount in a relatively wide range. Another problem is how to eliminate the influence of an external magnetic field when using a Hall element that can be detected with high accuracy even with a small magnetic field so that only the Hall element can be detected without using a core. Techniques as described in 2-5 were devised.

  However, in the method described in Patent Document 2, since the magnetic sensors are arranged close to each other so as to detect a magnetic field in the same direction, an output difference between the two magnetic sensors becomes small, and high-precision detection becomes difficult. On the other hand, in order to increase the output difference, it is necessary to separate the sensor, which makes it difficult to reduce the size. In addition, there is a problem in that the difference between the current sensitivities Sa and Sb between the two magnetic sensors must be detected in advance, and calibration means for reflecting the output sensitivity in the output signal is required, which increases costs.

  Further, in the method described in Patent Document 3, it is necessary to dispose a disturbance magnetic field detecting element between the first branch path and the second branch path. However, the first branch path and the second branch path are accurately set. Therefore, the degree of freedom of element arrangement is small. There has been a problem that the accuracy of the arrangement cannot be sufficiently secured and the variation in output may become large.

  Further, in the method described in Patent Document 4, it is difficult to process a current path for forming a step space, and the processing accuracy tends to affect the detection accuracy, so that it is difficult to manufacture a magnetic sensor having high detection accuracy. was there.

  Further, in the method described in Patent Document 5, since the same current path is used, there is a possibility that the magnetic field received by the first magnetic sensor and the second magnetic sensor may change due to the influence of resistance variation such as temperature. . In addition, since differentials are taken with respect to outputs that have detected substantially the same magnetic field, there has been a problem that the signal-to-noise ratio (SN ratio) becomes small.

  The present invention has been made in view of the above problems, and its object is to provide a current detector with a wide measurement range, a very high signal-to-noise ratio (S / N ratio), and a low assembly cost. And providing a current line with a current amount detector.

In order to solve the above problems, the current detector according to the present invention is:
A current line through which the measurement current flows;
And at least two magnetic sensors for detecting and electrically outputting a magnetic field,
Each of the two magnetic sensors has a magnetosensitive axis with the highest electrical output when parallel to the magnetic field, and a dead magnetic axis with no electrical output when parallel to the magnetic field. A magnetoresistive effect element having
The magnetic sensitive axes of the two magnetic sensors are parallel to each other,
Of the two magnetic sensors, one of the first magnetic sensors has a magnetic field strength of a component parallel to the magnetic sensing axis, rather than a magnetic field strength of a component perpendicular to the magnetic sensing axis of the magnetic field generated by the measurement current. Is placed at a position where the
Of the two magnetic sensors, the other second magnetic sensor has a magnetosensitive axis perpendicular to the magnetic field generated by the measurement current, and the dead magnetic axis has a magnetic field generated by the measurement current. Placed in parallel,
The amount of measurement current is detected from the difference between the output of the first magnetic sensor and the output of the second magnetic sensor.

  In the current amount detector according to the present invention, the second magnetic sensor is disposed outside the current line when the current line is viewed from above, and the first magnetic sensor is viewed from the top of the current line. In such a case, it may be disposed at a position overlapping the current line.

  Moreover, in the current amount detector according to the present invention, in another aspect, the first magnetic sensor is disposed outside the current line when the current line is viewed from above, and the second magnetic sensor is When the current line is viewed from above, the current line may be disposed at a position overlapping with the current line.

Further, in the current amount detector according to the present invention, in one aspect, the current line has a first current path and a second current path that are branched into two and merged,
The second magnetic sensor is a position outside the current line when the current line is viewed from above, and the dead magnetic axis is generated by a measurement current flowing through the first current path or the second current path. It is arranged at a position parallel to the magnetic field to be
The first magnetic sensor is a position that overlaps one of the first current path and the second current path when the current line is viewed from the top, and the first magnetic sensor passes through the first current path or the second current path. The magnetic field generated by the flowing measurement current is arranged at a position where the magnetic field strength of the component parallel to the magnetic sensitive axis is larger than the magnetic field strength of the component perpendicular to the magnetic sensitive axis.

Moreover, in the current amount detector according to the present invention, in another aspect, the current line has a first current path and a second current path that are branched into two and merged,
The second magnetic sensor is a magnetic field generated by a measurement current flowing between the first current path and the second current path, the dead magnetic axis of which is between the first current path and the second current path. It is arranged at a position parallel to
The first magnetic sensor is a position that overlaps one of the first current path and the second current path when the current line is viewed from the top, and the first magnetic sensor passes through the first current path or the second current path. The magnetic field generated by the flowing measurement current is arranged at a position where the magnetic field strength of the component parallel to the magnetic sensitive axis is larger than the magnetic field strength of the component perpendicular to the magnetic sensitive axis.

Moreover, in the current amount detector according to the present invention, in yet another aspect, the current line has a first current path and a second current path that are branched into two and merged,
The first magnetic sensor is located between the first current path and the second current path, and serves as a magnetosensitive axis of a magnetic field generated by a measurement current flowing through the first current path and the second current path. It is arranged at a position where the magnetic field strength of the component parallel to the magnetic sensitive axis is larger than the magnetic field strength of the vertical component,
The second magnetic sensor is a position that overlaps one of the first current path and the second current path when the current line is viewed from above, and the insensitive magnetic axis is the first current path or It is arranged at a position parallel to the magnetic field generated by the measurement current flowing through the second current path.

Moreover, in the current amount detector according to the present invention, the current line has a first current path and a second current path that are branched into two and merged,
The specific resistance of the first current path or the second current path is larger than the specific resistance of the current line before branching or the current line after joining, and the temperature of the first current path or the second current path The coefficient is preferably substantially the same as the temperature coefficient of the current line before branching or the current line after merging.

Further, in the current amount detector according to the present invention, the current line has a substantially rectangular shape in which a cross section perpendicular to the direction in which the measurement current flows has a long side and a short side, and the second magnetic sensor Is located at the center of the short side of the current line,
The magnetosensitive axis of the first magnetic sensor may be located at the center of the long side of the current line.

Moreover, in the current amount detector according to the present invention, in another aspect, the current line has a substantially rectangular shape in which a cross section perpendicular to the direction in which the measurement current flows has a long side and a short side,
The magnetosensitive axis of the first magnetic sensor is located at the center of the short side of the current line,
The magnetosensitive axis of the second magnetic sensor may be located at the center of the long side of the current line.

  Further, in the current amount detector according to the present invention, the current line has a cross section perpendicular to the direction in which the measurement current flows, and both ends of the current line are bent in the same direction substantially perpendicular to the current line. The cross section may have a concave shape.

  In the current amount detector according to the present invention, the first magnetic sensor and the second magnetic sensor may be disposed on a front surface and a back surface of one substrate, respectively.

  A current line with a current amount detector according to the present invention is provided in a current line having a main current path, a bypass current path branched from the main current path and joined to the main current path, and the bypass current path. And the above-described current amount detector.

  According to the present invention, it is possible to provide a current amount detector and a current line with a current amount detector that have a wide measurement range, an extremely high signal-to-noise ratio (SN ratio), and low assembly costs.

1A to 1C are schematic views of a current amount detector according to Embodiment 1 of the present invention. FIG. 2 is a top view of the current amount detector according to Embodiment 1 of the present invention. FIG. 3 is a diagram showing a magnetic field generated around a current line whose cross-sectional shape is a perfect circle. FIG. 4 is a diagram showing a magnetic field generated around a current line having a substantially rectangular cross-sectional shape. FIG. 5 is a schematic cross-sectional view of a current amount detector according to Embodiment 2 of the present invention. 6 (a) and 6 (b) are a schematic cross-sectional view and a perspective view of a current amount detector according to Embodiment 3 of the present invention. FIGS. 7A and 7B are a schematic cross-sectional view and a perspective view of a current amount detector according to Embodiment 4 of the present invention. FIG. 8 is a schematic cross-sectional view of a current amount detector according to Embodiment 5 of the present invention. FIG. 9A is a cross-sectional view of a current amount detector according to Embodiment 6 of the present invention, and FIG. 9B is a perspective view thereof. FIG. 10 (a) is a cross-sectional view of a current amount detector according to Embodiment 7 of the present invention, and FIG. 10 (b) is a perspective view thereof. FIG. 11A is a cross-sectional view of a current amount detector according to Embodiment 8 of the present invention, and FIG. 11B is a perspective view thereof. FIG. 12A is a sectional view of a current amount detector according to Embodiment 9 of the present invention, and FIG. 12B is a perspective view thereof. FIG. 13 is a cross-sectional view of a current detector according to Embodiment 10 of the present invention. FIG. 14 is a cross-sectional view of a current detector according to Embodiment 11 of the present invention. FIG. 15 is a drawing for explaining the magnetosensitive axis and the insensitive axis. FIG. 16 is a graph showing the electrical output with respect to the magnetic field intensity in the direction of the magnetosensitive axis. FIG. 17 is a graph showing the electrical output with respect to the magnetic field intensity in the direction of the dead magnetic axis. FIG. 18 is a perspective view of a current measuring device according to the prior art.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following description, terms indicating specific directions and positions (for example, “up”, “down”, “right”, “left” and other terms including those terms) are used as necessary. These terms are used for easy understanding of the invention with reference to the drawings, and the technical scope of the present invention is not limited by the meaning of these terms. The same reference numerals appearing in a plurality of drawings indicate the same parts or members unless otherwise specified. The following embodiments merely illustrate the present invention, and the present invention is not limited to the following embodiments.

  FIG. 1A is a perspective view of a current amount detector 1 according to Embodiment 1 of the present invention, FIG. 1B is a top view thereof, and FIG. It is sectional drawing of the electric current amount detector 1 in the AA 'cross section of a).

  As shown in FIGS. 1A to 1C, the current amount detector 1 according to the first embodiment of the present invention detects the current line 5 through which the measurement current 25 flows and the magnetic field generated by the measurement current 25. And at least two magnetic sensors (first magnetic sensor 2 and second magnetic sensor 3) that electrically output the two magnetic sensors, each of which has an electrical output when parallel to the magnetic field. It consists of a magnetoresistive effect element having the highest magnetic sensitive axes 11 and 12 and the non-sensitive magnetic axes 13 and 14 in which electrical output is lost when parallel to the magnetic field, and the magnetic sensitive axes of the two magnetic sensors. 11 and 12 are parallel to each other, and one of the two magnetic sensors, the first magnetic sensor 2, has a measurement current 25 based on the magnetic field strength of a component perpendicular to the magnetosensitive axis 11 of the magnetic field generated by the measurement current 25. Of the magnetic field generated by the Among the two magnetic sensors, the other second magnetic sensor 3 has a magnetosensitive axis 12 perpendicular to the magnetic field generated by the measurement current 25. The dead magnetic axis 14 is arranged at a position parallel to the magnetic field generated by the measurement current 25. Here, the “magnetic axis” is defined as the direction in which the electrical output per unit magnetic field is highest with respect to the magnetic field applied to the magnetic sensor. The magnetic sensor has a magnetosensitive axis as will be described below, and when the magnetic field applied to the magnetic sensor is parallel to the direction of the magnetosensitive axis, the electrical output output from the magnetic sensor is the most. Get higher. Further, the “dead magnetic axis” is defined as a direction in which no electrical output is generated (including a case where there is substantially no electrical output) with respect to the magnetic field applied to the magnetic sensor. As described below, the magnetic sensor has a dead magnetic axis, and when the magnetic field applied to the magnetic sensor is parallel to the direction of the dead magnetic axis, there is no electrical output from the magnetic sensor. (Substantially disappear). For example, as shown in FIG. 15, when a single spin-valve giant magnetoresistive element a is configured as a layered structure including a fixed layer b and a free layer c, and an electrical output is obtained, the stacking direction of the layered structure Becomes the magnetosensitive axis d, and the direction parallel to the fixed layer (the direction perpendicular to the laminating direction of the layered structure) becomes the magnetosensitive axis e. At this time, the electrical output with respect to the magnetic field strength in the direction of the dead axis d is always 0 regardless of the value of the magnetic field strength, as shown in FIG. Further, the electrical output with respect to the magnetic field strength in the direction of the magnetic sensitive axis e becomes stronger as the magnetic field strength becomes stronger, and eventually becomes saturated. Thus, the relationship between the magnetic field intensity in the direction of the magnetosensitive axis e and the electrical output is a curve as shown in FIG.

  In the current amount detector 1 according to the first embodiment of the present invention, the first magnetic sensor 2 and the second magnetic sensor 3 have at least their respective magnetosensitive axes as shown in FIGS. 11 and 12 need to be parallel. Here, “the respective magnetic sensitive axes are parallel” of the first magnetic sensor 2 and the second magnetic sensor 3 means that the magnetic sensitive axis 11 of the first magnetic sensor 2 and the magnetic sensitive axis 12 of the second magnetic sensor 3 are the same. Not only when it is completely parallel, it does not have to be completely parallel as long as it does not affect the accuracy and resolution of the electrical output. That is, the magnetosensitive axis 11 may be inclined with respect to the magnetosensitive axis 12 within a range that does not affect the accuracy and resolution of electrical output. In this way, when the magnetosensitive axis 11 is inclined with respect to the magnetosensitive axis 12 within a range that does not affect the accuracy and resolution of the electrical output, the magnetosensitive axis 11 and the magnetosensitive axis 12 are “substantially. "Parallel to".

  Further, in the first magnetic sensor 2, the magnetic field intensity of the magnetic field generated by the measurement current 25 is higher than the magnetic field intensity of the component perpendicular to the magnetic sensitive axis 11, and the magnetic field intensity of the magnetic field is parallel to the magnetic sensitive axis 11. Placed in position. For example, as shown in FIG. 1, the first magnetic sensor 2 and the second magnetic sensor 3 are arranged on the front and back surfaces of the substrate 4 in parallel, and the current lines 5 are on the same substrate surface as the second magnetic sensor 3. Arrangement is preferable because the first magnetic sensor 2, the second magnetic sensor 3, and the current line 5 can be easily positioned by the parallelism between the front surface and the back surface of the substrate 4.

  The magnetic field generated by the measurement current 25 flowing in the current line 5 has the same shape as the cross-sectional shape of the current line 5 in the vicinity of the surface of the current line 5, and the center of the current line 5 becomes circular as the distance from the surface of the current line 5 increases. It approaches a perfect circle with the center of. Near the surface means that the current line 5 is approximated to a one-dimensional line, that is, approximated to a point in a cross section perpendicular to the direction in which the measurement current 25 of the current line 5 flows, and is generated by the measurement current 25 flowing through the current line 5 This means a range closer to the current line 5 than a range in which the magnetic field to be viewed cannot be approximated as a perfect circle when viewed from a direction perpendicular to the cross section.

  FIG. 3 illustrates a position (region) where the magnetic field strength of the component parallel to the magnetic sensitive axis 11 is larger than the magnetic field strength of the component perpendicular to the magnetic sensitive axis 11 of the magnetic field generated by the measurement current 25. It is a drawing of. Hereinafter, for the sake of simplicity, a case where a current line having a perfectly circular cross-sectional shape is used will be described.

When the current line 5 has a perfect circular cross section, the magnetic field generated by the measurement current 25 flowing in the current line 5 is a perfect circle having the center of the current line 5 as the center of the circle as shown in FIG. Become. Such a magnetic field has a perfect circular shape from a position near the surface of the current line 5 to a position away from the surface of the current line 5.
Here, in the cross section shown in FIG. 3 (cross section perpendicular to the longitudinal direction of the current line 5), a line extending horizontally through the center of the current line 5 is defined as the X axis, and passing through the center of the current line 5 with respect to the X axis. The line extending vertically is defined as the Y axis.

  First, for example, taking a position where the angle formed with the X axis is θ (here, such a position is referred to as a position A), a component perpendicular to the magnetosensitive axis 11 of the magnetic field generated by the measurement current 25, A component parallel to the magnetosensitive axis 11 will be described. At position A where the angle formed with the X axis is θ, the magnetic field is represented by an arrow along the circle, as shown in FIG. Let T be the intensity of this magnetic field. Here, the magnetic sensitive axis 11 of the first magnetic sensor 2 and the magnetic sensitive axis 12 of the second magnetic sensor 3 are set to be parallel to the X axis. Therefore, “perpendicular to the magnetic sensitive axis 11” means a direction parallel to the Y axis, and “parallel to the magnetic sensitive axis 11” means a direction parallel to the X axis. When the vector of length T extending in the tangential direction of the circle is decomposed into a component parallel to the Y axis and a component parallel to the X axis, “the magnetic field intensity of the magnetic field generated by the measurement current and perpendicular to the magnetosensitive axis” “Corresponds to T cos θ, and the absolute value of“ magnetic field strength of a component parallel to the magnetosensitive axis of the magnetic field generated by the measurement current ”corresponds to T sin θ.

  At a position B of 0 ° with respect to the X axis, as shown in FIG. 3, the magnetic field strength of the component parallel to the magnetosensitive axis 11 of the magnetic field generated by the measurement current 25 is 0 and is perpendicular to the magnetosensitive axis 11. The magnetic field strength of this component is T. Further, at a position C of 30 ° with respect to the X axis, as shown in FIG. 3, the magnetic field intensity of the magnetic field generated by the measurement current 25 and the component parallel to the magnetosensitive axis 11 is T / 2 (minus direction). The magnetic field strength of the component perpendicular to the magnetosensitive axis 11 is (√3 / 2) T. At these positions B and C, the magnetic field strength of the component perpendicular to the magnetic sensitive axis 11 of the magnetic field generated by the measurement current 25 is larger than the magnetic field strength of the component parallel to the magnetic sensitive axis 11.

  For example, at a position D of 45 ° with respect to the X axis, as shown in FIG. 3, the magnetic field strength of the component parallel to the magnetosensitive axis 11 of the magnetic field generated by the measurement current 25 is T / √2 ( The magnetic field intensity of the component perpendicular to the magnetosensitive axis 11 is also T / √2). At this position D, the magnetic field strength of the component perpendicular to the magnetic sensing axis 11 of the magnetic field generated by the measurement current 25 is the same as the magnetic field strength of the component parallel to the magnetic sensing axis 11.

  On the other hand, at a position E of 60 ° with respect to the X axis, as shown in FIG. 3, the magnetic field strength of the magnetic field generated by the measurement current 25 and the component parallel to the magnetosensitive axis 11 is (√3 / 2) T. (The negative direction is positive), and the magnetic field strength of the component perpendicular to the magnetosensitive axis 11 is T / 2. Further, at a position F of 90 ° with respect to the X axis, as shown in FIG. 3, the magnetic field intensity of the magnetic field generated by the measurement current 25 and the component parallel to the magnetosensitive axis 11 is T (a negative direction is positive). The magnetic field intensity of the component perpendicular to the magnetosensitive axis 11 is zero. At a position G of 120 ° with respect to the X axis, the magnetic field intensity of the magnetic field generated by the measurement current 25 and the component parallel to the magnetosensitive axis 11 is (√3 / 2) T (the negative direction is positive). ), The magnetic field intensity of the component perpendicular to the magnetosensitive axis 11 is T / 2 (the negative direction is positive). At such positions E, F, and G, the magnetic field strength of the component parallel to the magnetic sensitive axis 11 of the magnetic field generated by the measurement current 25 is larger than the magnetic field strength of the component perpendicular to the magnetic sensitive axis 11.

  Further, at a position H of 135 ° with respect to the X-axis, the magnetic field strength of a component perpendicular to the magnetic sensitive axis 11 of the magnetic field generated by the measurement current 25 is parallel to the magnetic sensitive axis 11 as in the case of the 45 ° position D. It is the same as the magnetic field strength of the various components.

  At positions I and J of 150 ° and 180 ° with respect to the X axis, similarly to the positions B and C of 0 ° and 30 °, the magnetic field intensity of the component perpendicular to the magnetosensitive axis 11 of the magnetic field generated by the measurement current 25 Is greater than the magnetic field strength of the component parallel to the magnetosensitive axis 11.

  Thus, in the region of 45 ° to 135 ° with respect to the X axis, the magnetic sensitive axis 11 of the magnetic field is greater than the magnetic field strength of the component perpendicular to the magnetic sensitive axis 11 of the magnetic field generated by the measurement current 25. The magnetic field strength of the component parallel to is large. The same applies to the region of 225 ° to 315 ° with respect to the X axis.

  As described above, when the cross-sectional shape of the current line 5 is a perfect circle, the magnetic field strength of the magnetic field generated by the measurement current 25 and the component parallel to the magnetosensitive axis 11 is applied to the magnetosensitive axis 11 of the magnetic field. The position (region) larger than the magnetic field intensity of the vertical component is a region of 45 ° to 135 °, 225 ° to 315 ° with respect to the X axis, that is, ± 45 with respect to the vertical direction from the center of the current line 5. This corresponds to a region sandwiched between two inclined straight lines and formed directly above and below the current line 5 (a region 42 shown by hatching in FIG. 3).

  On the other hand, when the cross-sectional shape of the current line 5 is a rectangular shape in which the vertical direction is the short side (the short side is indicated by 26) and the horizontal direction is the long side (the long side is indicated by 27), As shown in FIG. 4, the magnetic field generated by the measurement current 25 flowing through the short axis 26 is parallel to the short side 26 and the long side 27 of the current line 5 (the length of the short axis is referred to as the short diameter) and the long axis ( The length of the major axis is referred to as the major axis). The approximate elliptical shape is that the current density distribution changes over time due to various conditions such as the material and temperature distribution of the current line, the Lorentz force due to the generated magnetic field, and the current density due to the skin effect depending on the frequency of the flowing current. This is because the generated magnetic field is distorted from an accurate ellipse due to an influence such as a change in distribution. In addition, the change in the minor axis is large near the surface, and the change in the major axis increases as the distance from the surface increases. The difference between the minor axis and the major axis gradually decreases and approaches a perfect circle. For this reason, the magnetic field is strong in the vicinity of the short side 26, and the distance between the short side and the long side gradually approaches evenly. In the following description, FIG. 4 will be used to describe the case where a current is passed through the uniform current line 5 with a thickness of 3 mm, a width of 31 mm, a frequency of 10 Hz, and a current amount of 120 A from the back of the page.

  FIG. 4 shows a magnetic field generated around the current line 5. At an arbitrary position of the substantially elliptical magnetic field, the magnetic field is represented by an arrow along the substantially elliptical shape. At this time, it can be divided into a component parallel to the long side 27 of the current line 5 and a vertical component, and the range in which the difference between the absolute value of the parallel component and the absolute value of the vertical component is positive is indicated by hatching. (The hatched area is indicated by reference numeral 42, and the area outside the hatched area is indicated by reference numeral 43).

  As shown in FIG. 4, in the shaded area 42, the magnetic field strength of the component parallel to the magnetic sensitive axis 11 of the magnetic field generated by the measurement current 25 is larger than the magnetic field strength of the component perpendicular to the magnetic sensitive axis 11. On the other hand, in the region 43 outside the shaded area, the magnetic field strength of the component perpendicular to the magnetic sensitive axis 11 of the magnetic field generated by the measurement current 25 is larger than the magnetic field strength of the component parallel to the magnetic sensitive axis 11.

  Further, as will be described below, the magnetic field of the component parallel to the magnetosensitive axis 11 generated by the measurement current 25 is zero on the X axis. A magnetic sensor having a magnetosensitive axis 12 is arranged at an arbitrary position on the X axis so that the magnetic field generated by the measurement current becomes zero, while the magnetic field generated by the measurement current is parallel to the magnetosensitive axis 12. A magnetic sensor having a magnetosensitive axis 11 parallel to the magnetosensitive axis 12 is arranged in a hatched area 42 so that a large component is larger than a vertical component. Accordingly, since the magnetic sensor having the magnetosensitive axis 12 cannot detect the magnetic field in the direction perpendicular to the magnetosensitive axis 12 (insensitive magnetic axis direction), the measurement current is not affected by the magnetic field of the measurement current 25. External magnetic fields other than 25 can be measured. Based on the difference between the output of the magnetic sensor having the magnetosensitive axis 12 and the output of the magnetic sensor having the magnetosensitive axis 11, the output of the measurement current can be obtained with high accuracy.

  In the above, only the case where the cross-sectional shape is a circular shape or a rectangular shape has been described. However, a person skilled in the art can easily obtain the direction of the magnetic field formed around the current line if the cross-sectional shape of the current line is known. It is understood that the “position (region) where the magnetic field strength of the component parallel to the magnetosensitive axis of the magnetic field generated by the measurement current becomes larger than the magnetic field strength of the component perpendicular to the magnetic sensitive axis” can be derived. Let's be done.

  On the other hand, in the second magnetic sensor 3, the magnetosensitive axis 12 is perpendicular to the magnetic field generated by the measurement current 25, and the dead magnetic axis 14 is parallel to the magnetic field generated by the measurement current 25. Placed in. In FIG. 3, in order to simplify the description of the present invention, the magnetosensitive axis 12 of the second magnetic sensor 3 is parallel to the X axis, and the dead axis 14 of the second magnetic sensor 3 is parallel to the Y axis. “The position where the magnetosensitive axis of the second magnetic sensor is perpendicular to the magnetic field generated by the measurement current and the insensitive axis is parallel to the magnetic field generated by the measurement current”. Does not necessarily have to be a position where the magnetosensitive axis 12 of the second magnetic sensor 3 is parallel to the X axis and the insensitive axis 14 is parallel to the Y axis, as described above. As long as the angle of the magnetosensitive axis 12 with respect to the magnetic field generated by 25 is vertical and the angle of the magnetosensitive axis 14 is parallel, it may be arranged at any position around the current line 5.

  Similarly, when the cross-sectional shape is a rectangular shape as shown in FIG. 4, “the magnetosensitive axis 12 is perpendicular to the magnetic field generated by the measurement current, and the magnetosensitive axis 14 is The “position parallel to the generated magnetic field” means that if the angle of the magnetosensitive axis 12 with respect to the magnetic field generated by the measurement current 25 is perpendicular and the angle of the insensitive magnetic axis 14 is parallel, the entire circumference of the current line 5 is There is no problem even if it is arranged at any position of the circumference. However, if the cross section of the current line is exactly rectangular, it is possible to easily set the angle of the magnetosensitive axis by arranging the substrate along the current line and arranging the magnetic sensor on the substrate. This is preferable because it is possible.

  By arranging the first magnetic sensor 2 in the above-described region, as shown in FIGS. 1B and 1C, the first magnetic sensor 2 can be used as an external magnetic field in the direction of the magnetosensitive axis 11 of the first magnetic sensor. A combined magnetic field of the component Hex and the magnetic field component Hm1 in the direction of the magnetic sensitive axis of the magnetic field generated by the measurement current 25 and the component parallel to the magnetic sensitive axis 11 of the first magnetic sensor 2 is detected. On the other hand, by arranging the second magnetic sensor 3 in the above-described region, the second magnetic sensor 3 is arranged in the direction of the magnetosensitive axis 11 of the first magnetic sensor 2 as shown in FIGS. Only the external magnetic field component Hex is detected (that is, the second magnetic sensor 3 is arranged at a position where the magnetosensitive axis 12 of the second magnetic sensor 3 is perpendicular to the magnetic field generated by the measurement current 25, and the measurement current 25 The magnetic field generated by the measurement current 25 cannot be detected because the component parallel to the magnetic sensitive axis 12 of the second magnetic sensor 3 is not included. By taking the difference between the outputs of these magnetic sensors 2 and 3, only the magnetic field by the measurement current 25 excluding the external magnetic field can be detected. That is, since only the magnetic field generated by the measurement current 25 can be detected without being affected by the external magnetic field, an extremely accurate current amount detector can be provided.

  In the present invention, the magnetoresistive effect element having the magnetic sensitive axes 11 and 12 for detecting the magnetic field has the magnetic sensitive axes 11 and 12 parallel to each other and facing in the same direction, and one of the first magnetic sensors 2 is The magnetic field generated by the measurement current 25 is arranged at a position where the magnetic field strength of the component parallel to the magnetic sensing axis 11 is larger than the magnetic field strength of the component perpendicular to the magnetic sensing axis 11. However, if the magnetosensitive axis 12 is perpendicular to the magnetic field generated by the measurement current 25 and the dead axis 14 is arranged in a position parallel to the magnetic field generated by the measurement current 25, It will be understood that the specific positions are not limited to the embodiments described below, and that other arrangements are included in the technical scope of the present invention. However, in order to explain the present invention more clearly, a detailed description will be given below based on a specific arrangement.

(Embodiment 1)
As shown in FIGS. 1A to 1C, the current amount detector 1 according to Embodiment 1 of the present invention has a rectangular current line 5 and 2 arranged on the outer periphery of the current line 5. Two magnetic sensors (first magnetic sensor 2 and second magnetic sensor 3). These two magnetic sensors are each composed of a magnetoresistive effect element having magnetosensitive axes 11 and 12 for detecting a magnetic field. The two magnetic sensors 2 and 3 are arranged so that the magnetic sensitive axes 11 and 12 of the two magnetic sensors 2 and 3 are parallel to each other. Further, the second magnetic sensor 3 is disposed outside the current line 5 when the current line 5 is viewed from above, and the first magnetic sensor 2 is disposed at a position overlapping the current line 5 when the current line 5 is viewed from above. Has been. The current line 5 has a flat upper surface. In the present invention, a case where the current line 5 is viewed from a direction perpendicular to the upper surface is referred to as a “top view”. “When the current line 5 is viewed from above, the second magnetic sensor 3 is disposed outside” means that when the current line 5 is viewed from a certain point on a straight line perpendicular to the flat top surface of the current line 5, As shown in FIG. 2, the second magnetic sensor 3 has an inner range between the ends 53 and 54 in the width direction perpendicular to the direction in which the measurement current 25 of the current line 5 flows, as shown in FIG. Is indicated outside the range (the range is indicated by the reference number 51). In addition, “the first magnetic sensor 2 is disposed at a position overlapping the current line 5 when the current line 5 is viewed from above” means that the current is from a certain linear point perpendicular to the flat top surface of the current line 5. When the line 5 is viewed, the position where the first magnetic sensor 2 overlaps with the current line 5, that is, between the both ends 53 and 54 in the width direction perpendicular to the direction in which the measurement current 25 of the current line 5 flows is defined as the inner range , Within the range (the range is indicated by 52).

  As shown in FIG. 1, in the first embodiment, the first magnetic sensor 2 and the second magnetic sensor 3 have magnetic sensitive surfaces including their magnetic sensitive axes 11 and 12 parallel to the substrate 4. As described above, it may be provided on each of the front surface and the back surface of the substrate 4. Here, the magnetosensitive axis means the axis in the direction in which the electrical output of the magnetic sensor is highest with respect to the magnetic field, and the insensitive magnetic axis is the electrical output of the magnetic sensor is lost with respect to the magnetic field. Means the axis of direction. Further, the magnetosensitive surface means a surface including a magnetosensitive axis. As described above, when the second magnetic sensor 3 is disposed outside the current line 5 and the first magnetic sensor 2 is disposed at a position overlapping the current line 5 when viewed from above, the first magnetic sensor 2 is As shown in FIG. 1B, the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2 and the magnetic field generated by the measurement current 25 are parallel to the magnetic sensitive axis 11 of the first magnetic sensor 2. On the other hand, the second magnetic sensor 3 detects only the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2. By detecting the difference between the outputs of the first and second magnetic sensors 2 and 3, only the magnetic field generated by the measurement current 25 is detected except for the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2. And the signal-to-noise ratio (S / N ratio) can be improved.

  In the current amount detector 1 according to Embodiment 1 of the present invention, the material of the current line 5 is not particularly limited. For example, a metal such as copper or aluminum; or the metal and tin, silver, zirconium Examples thereof include an alloy of chromium, nickel, iron, zinc, silicon, phosphorus, magnesium, etc .; or bonding of aluminum and copper, a clad material, and the like. Particularly preferred is copper. Copper is preferably used because it is inexpensive and has low electrical resistance.

  In the current amount detector 1 according to the first embodiment of the present invention, magnetoresistive elements having magnetosensitive axes 11 and 12 are used as the first magnetic sensor 2 and the second magnetic sensor 3. As such a magnetoresistive effect element, an anisotropic magnetoresistive effect (hereinafter, the anisotropic magnetoresistive effect is sometimes referred to as AMR) element, a multilayer giant magnetoresistive effect (hereinafter, multilayer giant magnetoresistive effect is referred to as GMR). Element), spin valve magnetoresistive effect (hereinafter referred to as SVGMR) element, tunnel magnetoresistive effect (hereinafter also referred to as TMR) element , Hall elements, magneto-impedance elements, magnetic induction elements, fluxgate elements, and the like. Specifically, a magnetic sensor or the like packaged with a nonmagnetic case or the like using the above-described element can be used. In addition, in the first magnetic sensor and the second magnetic sensor used in the drawing, the shape of the magnetic sensor has a wide surface in the direction parallel to the magnetosensitive axis (hereinafter referred to as main surfaces 31 and 32) for easy understanding. It is shown that the dead axis is set in a direction perpendicular thereto. However, a preferable configuration of the magnetic sensor can be used depending on the shape of the substrate.

  In the current amount detector 1 according to the first embodiment of the present invention, the first magnetic sensor 2 and the second magnetic sensor 3 are made of one substrate 4 (for example, a resin such as glass epoxy that is widely used as a printed circuit board). Or a substrate including ceramics such as alumina or LTCC (low temperature co-fired ceramics). Further, the first magnetic sensor 2 and the second magnetic sensor 3 may be provided on two or more substrates 4, respectively. When the first magnetic sensor 2 and the second magnetic sensor 3 are provided on one substrate 4, as shown in FIG. 1, the current line 5 is provided on one main surface of the substrate 4, and the first magnetic sensor 2 is provided. The first magnetic sensor 2 is provided on the other main surface of the substrate 4 so as to overlap the current line 5 when viewed from above, and the second magnetic sensor 3 is disposed on the other main surface of the substrate 4. Thus, the second magnetic sensor 3 is provided at a position outside the current line 5 when viewed from above. In the following embodiments, the substrate 4 on which the first magnetic sensor 2 and the second magnetic sensor 3 are provided is not necessarily shown in the drawings, and the current line 5, the first magnetic sensor 2, and the second magnetic sensor Although only 3 is shown, it will be understood by those skilled in the art that the present invention relating to the current amount detector can be implemented by supplementing the substrate even if the substrate is not shown.

  As a preferable shape in which the influence of the heat generation of the current line due to the current density bias due to the skin effect and the large current is reduced, this example has been described using a flat plate example, but the first magnetic sensor 2 and / or the second magnetic The substrate 4 on which the sensor 3 is provided does not have to be flat, and the first magnetic sensor 2 and the second magnetic sensor 3, the first magnetic sensor 2 and the current line 5, and the second magnetic sensor 3 and the current line 5 are described above. Any shape is possible as long as it can be arranged at the predetermined position. As shown in FIG. 1C, the cross section of the current line 5 through which the measurement current 25 flows is a substantially rectangular cross section as viewed from the direction in which the measurement current 25 flows, that is, the long side and the long side. It may be a cross section provided vertically and having a short side shorter than the long side. In FIG. 1C, the long side of the substantially rectangular cross section of the current line 5 is indicated by 27 and the short side is indicated by 26. When the first magnetic sensor 2 is arranged on the long side 27 of the current line 5, that is, when the current line 5 is arranged at a position overlapping the current line 5 when viewed from the top, a magnetic field generated along the long side 27 when current flows. The strength is smaller than the magnetic field strength generated along the short side. Therefore, the magnetic field strength change with respect to the current change becomes small, and the magnetic sensor becomes difficult to be saturated. That is, even if a large current is passed through the current line 5, the first magnetic sensor 2 becomes difficult to be saturated. This is preferable because a wide range of current can be measured. Furthermore, if the magnetosensitive axis of the first magnetic sensor 2 is arranged at the center of the long side 27, the effect can be maximized. In other embodiments described below, this effect is also obtained when the first magnetic sensor 2 is placed on the long side 27 of a substantially rectangular cross section when viewed from the direction of current flow, that is, when the current line 5 is viewed from above. The same effect can be obtained when it is arranged at a position overlapping the line 5.

  According to the current amount detector according to the first embodiment of the present invention, it is possible to provide a current amount detector with the simplest configuration and good SN ratio.

The present invention has the following advantages over the technique disclosed in Patent Document 2.
In Patent Document 2, as shown in FIG. 18, the distance between the magnetic sensor 3a and the conductor to be measured 5 ′ and the distance between the magnetic sensor 3b and the conductor to be measured 5 ′ are different. And a measured conductor 5 '. In FIG. 18, the distance between the magnetic sensor 3a and the measured conductor 5 ′ is set to be smaller than the distance between the magnetic sensor 3b and the measured conductor 5 ′.
As described above, the current sensitivities of the magnetic sensors 3a and 3b are Sa and Sb [V / A], the current flowing through the conductor 5 ′ to be measured is I [A], and the magnetic field sensitivities of the magnetic sensors 3a and 3b are ma and When mb [V / T], the magnetic flux density of the disturbance magnetic field applied from the outside to the magnetic sensors 3a and 3b are Ba and Bb [T], and the output voltages of the magnetic sensors 3a and 3b are Va and Vb [V], respectively.
About the magnetic sensor 3a,
Va = Sa × I + ma × Ba (1)
And
Regarding the magnetic sensor 3b,
Vb = Sb × I + mb × Bb (2)
Holds. It is approximated that ma = mb holds for the magnetic field sensitivity of the two magnetic sensors 3a, 3b, and Ba = Bb holds for the magnetic flux density of the disturbance magnetic field applied to the magnetic sensors 3a, 3b from the outside. )
Va-Vb = (Sa-Sb) I is obtained.
By obtaining the current sensitivities Sa and Sb and Va and Vb, the current I flowing through the conductor to be measured 5 ′ can be calculated.
However, in the method described in Patent Document 2, the magnetic sensors 3a and 3b are connected to each other so as to detect a magnetic field in the same direction (a direction from the left to the right as viewed from the direction in which the current I flows as shown in FIG. 18). By arranging them close to each other, an output difference between the two magnetic sensors 3a and 3b becomes small, and high-precision detection becomes difficult. On the other hand, in order to increase the output difference, it is necessary to separate the magnetic sensors 3a and 3b from each other, which makes it difficult to reduce the size. In addition, the difference between the current sensitivities Sa and Sb between the two magnetic sensors 3a and 3b must be detected in advance, and a calibration means for reflecting the output signals in the output signal is required, which increases the cost. there were.
According to the present invention, as described above, the magnetosensitive axes 11 and 12 of the two magnetic sensors (the first magnetic sensor 2 and the second magnetic sensor 3) are parallel to each other, and one of the two magnetic sensors is The first magnetic sensor 2 has a magnetic field strength of a component parallel to the magnetic sensing axis 11 of a magnetic field generated by the measurement current 25 from a magnetic field strength of a magnetic field generated by the measurement current 25 perpendicular to the magnetic sensing axis 11. Of the two magnetic sensors, the other second magnetic sensor 3 has its magnetosensitive axis 12 perpendicular to the magnetic field generated by the measurement current 25, and its magnetosensitive axis 14 Are arranged in parallel with the magnetic field generated by the measurement current 25. Therefore, even if the measurement magnetic field increases, the output of the second magnetic sensor 3 does not fluctuate. Therefore, the output difference between the first magnetic sensor 2 and the second magnetic sensor 3 can be increased, and highly accurate detection is possible. . Further, in order to increase the output difference between the first magnetic sensor 2 and the second magnetic sensor 3, it is not necessary to separate the first magnetic sensor 2 and the second magnetic sensor 3, and the size can be reduced. In addition, according to the present invention, the first magnetic sensor 2 is disposed on the long side 27 of the current line 5, that is, at a position overlapping the current line 5 when the current line 5 is viewed from above, for the reason described above. Since the change in magnetic field strength with respect to the change in the value becomes small, the error due to the positional deviation also becomes small. Therefore, it is not necessary to detect a difference in current sensitivity between the first magnetic sensor 2 and the second magnetic sensor 3, no calibration means is required, and no cost is required.

(Embodiment 2)
FIG. 5 is a schematic cross-sectional view of the current amount detector 1 according to the second embodiment of the present invention. As shown in FIG. 5, the current amount detector 1 according to the second embodiment includes a current line 5 having a rectangular cross-sectional shape and two magnetic sensors (first magnetic sensor 2 and 1) arranged on the outer periphery of the current line 5. And the two magnetic sensors are each composed of a magnetoresistive effect element having magnetic sensitive axes 11 and 12 for detecting a magnetic field, and the magnetic sensitive axes 11 and 12 of the two magnetic sensors. Are parallel to each other, and the second magnetic sensor 3 is disposed at a position overlapping the current line 5 when viewed from above, and the first magnetic sensor 2 is positioned outside the current line 5 when viewed from above. Is arranged. As shown in FIG. 5, in the second embodiment, the first magnetic sensor 2 and the second magnetic sensor 3 have magnetic sensitive surfaces including the respective magnetic sensitive axes 11 and 12 perpendicular to the substrate 4. It is provided to become. In the second embodiment and other embodiments, the direction of the main surface 31 of the first magnetic sensor 2 and the direction of the magnetic sensitive surface including the magnetic sensitive axis 11 are parallel, and the main surface 32 of the second magnetic sensor 3 is Although the direction and the direction of the magnetosensitive surface including the magnetosensitive axis 12 are arranged in parallel, the direction of the main surface 31 of the first magnetic sensor 2 and the direction of the magnetosensitive surface including the magnetosensitive axis 11 are arranged. May not be parallel, and the direction of the main surface 32 of the second magnetic sensor 3 and the direction of the magnetic sensitive surface including the magnetic sensitive axis 12 may not be parallel. The direction of the main surface 31 of the first magnetic sensor 2 and the direction of the magnetic sensitive surface including the magnetic sensitive axis 11 do not have to be parallel, and the direction of the main surface 32 of the second magnetic sensor 3 and the magnetic sensitive axis 12 are The fact that the direction of the magnetic sensitive surface to be included does not have to be parallel applies to other embodiments as well.

  In the current amount detector 1 according to the second embodiment, the installation positions of the first magnetic sensor 2 and the second magnetic sensor 3 are opposite to those in the first embodiment. In contrast, the second embodiment is implemented in such a manner that these magnetosensitive surfaces are provided so as to be perpendicular to the substrate 4. This is different from the current amount detector 1 according to the first embodiment. In the following embodiment, the description of the same members as those in Embodiment 1 is omitted.

  According to the current amount detector 1 according to the second embodiment, the first magnetic sensor 2 includes the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2 and the measurement current 25 as shown in FIG. Of the magnetic field generated by the component Hm1 parallel to the magnetic sensitive axis 11 of the first magnetic sensor 2 is detected, while the second magnetic sensor 3 is in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2. Only the external magnetic field component Hex is detected. By taking the difference between the outputs of these magnetic sensors, it is possible to detect only the magnetic field generated by the measurement current 25 excluding the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2. Therefore, since only the magnetic field by the measurement current 25 can be detected without being affected by the external magnetic field, a very accurate current amount detector can be provided. As shown in FIG. 1C, the cross section of the current line 5 through which the measurement current 25 flows is a substantially rectangular cross section as viewed from the direction in which the measurement current 25 flows, that is, the long side and the long side. It may be a cross section provided vertically and having a short side shorter than the long side. In FIG. 1C, the long side of the substantially rectangular cross section of the current line 5 is indicated by 27 and the short side is indicated by 26. When the first magnetic sensor 2 is disposed on the short side 26 and the second magnetic sensor 3 is disposed on the long side 27, the magnetic field strength generated along the short side 26 when a current flows is a magnetic field generated along the long side 27. It becomes larger than strength. Therefore, the change in the magnetic field strength with respect to the change in current becomes large, and it is preferable because it can be measured with high sensitivity to a minute current. Furthermore, if the magnetosensitive axis of the first magnetic sensor 2 is arranged at the center of the short side 26, the effect can be maximized. In other embodiments described below, this effect is also obtained when the first magnetic sensor 2 is arranged on the short side 26 of a substantially rectangular cross section when viewed from the direction of current flow, that is, when the current line 5 is viewed from above. When arranged outside the line 5, the same effect can be obtained.

(Embodiment 3)
FIG. 6A is a schematic cross-sectional view of the current amount detector 1 according to Embodiment 3 of the present invention, and FIG. 6B is a perspective view thereof. As shown in FIGS. 6A and 6B, the current amount detector 1 according to the third embodiment has two current paths (a first current path 21 and a second current path) by providing the gap portion 30. 22) and two magnetic sensors (the first magnetic sensor 2 and the first magnetic sensor 2) for detecting a magnetic field generated by the current line 5 branched and further merged and the measurement current 25 flowing in the first current path 21 or the second current path 22. 2 magnetic sensors 3), and the two magnetic sensors are each composed of a magnetoresistive effect element having magnetic sensitive axes 11 and 12 for detecting a magnetic field, and the magnetic sensitive axes 11 and 12 of the two magnetic sensors are When the second magnetic sensor 3 is parallel to each other and the current line 5 is viewed from above, the first current path is outside the current line 5 (that is, when the first magnetic sensor 2 is provided in the first current path 21). 21, the second current path opposite to the second current path 22. 2 is provided on the opposite side of the first current path 21 with the second current path 22 as the center, and the first magnetic sensor 2 is the first when the current line 5 is viewed from above. At least one of the first current path 21 and the second current path 22 (when the second magnetic sensor 3 is disposed outside the first current path 21, the first current path 21 and the second magnetic sensor 3 are the second current When arranged outside the path 22, it is arranged at a position overlapping the second current path 22). As shown in FIG. 6, in the third embodiment, the first magnetic sensor 2 and the second magnetic sensor 3 are configured such that the magnetic sensitive surfaces including the magnetic sensitive axes 11 and 12 are parallel to the substrate 4. (That is, the first magnetic sensor 2 and the second magnetic sensor 3 are provided so that the normal lines of the first magnetic sensor 2 and the second magnetic sensor 3 are parallel to the normal line of the substrate 4). Is).

  The current amount detector 1 according to the third embodiment is different from the first embodiment in that the current line 5 is not branched, but the third embodiment is implemented in that the current line 5 is branched. Different from the current amount detector 1 according to the first embodiment.

  According to the current amount detector 1 according to the third embodiment, similarly to the first embodiment, it is possible to detect only the magnetic field by the measurement current 25 excluding the external magnetic field component Hex, and thereby the first magnetic field. Only the magnetic field generated by the measurement current 25 can be detected without being affected by the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the sensor 2, and the signal-to-noise ratio (SN ratio) can be improved. That is, an extremely accurate current amount detector can be provided. Further, since the current line 5 is branched into two current paths and the magnetic field generated by the branched current path is detected, the magnetic field generated from one of the current paths is reduced, and saturation of the magnetic sensor can be suppressed. . That is, the attenuation effect of the first magnetic sensor can be obtained by branching the current line 5.

In the current amount detector 1 according to the third embodiment, the specific resistance of the branched first current path 21 in FIG. 6 is changed to the specific resistance of the current path before and after branching and the other branched second current path 22. You may set so that it may become larger. With this configuration, it is possible to further reduce the amount of current flowing through the first current path 21 in which the first magnetic sensor 2 is disposed, and as a result, it is possible to obtain a large attenuation effect of the first magnetic sensor. . For example, the branched first current path 21 is made of phosphor bronze, the current lines before and after branching, and the other second current path 22 are made of oxygen-free copper and are electrically connected. Thereby, the above-described effect can be obtained. Furthermore, phosphor bronze and oxygen-free copper are preferable because the temperature coefficient of electrical resistance is substantially the same, and therefore the attenuation effect of the first magnetic sensor can be obtained with high accuracy without variation in the amount of branching.
Further, in the current amount detector 1 according to the third embodiment, as in the first embodiment, the first magnetic sensor 2 is placed on the long side 27 of the current line 5, that is, the current line 5 is viewed from above. It is preferable to arrange in a position that overlaps. In the case of such a configuration, as described above, the magnetic field intensity generated along the long side 27 due to the current flow is smaller than the magnetic field intensity generated along the short side 26. Therefore, the magnetic field strength change with respect to the current change becomes small, and the magnetic sensor becomes difficult to be saturated. That is, even if a large current is passed through the current line 5, the first magnetic sensor 2 becomes difficult to be saturated. Current can be measured. Furthermore, if the magnetosensitive axis of the first magnetic sensor 2 is arranged at the center of the long side 27, the effect can be maximized.

(Embodiment 4)
FIG. 7A is a schematic cross-sectional view of the current amount detector 1 according to Embodiment 4 of the present invention, and FIG. 7B is a perspective view thereof. As shown in FIGS. 7A and 7B, the current amount detector 1 according to the fourth embodiment includes a current line 5 similar to that of the third embodiment, and two magnetic sensors (first magnetic sensor 2 and And the second magnetic sensor 3 is disposed between two current paths (first current path 21 and second current path 22) branched when the current line 5 is viewed from above. The first magnetic sensor 2 is arranged in the same manner as in the third embodiment.

  In the current amount detector 1 according to the fourth embodiment, the second magnetic sensor 3 is provided outside the current line 5 in the top view in the third embodiment, whereas the second magnetic sensor 3 in the fourth embodiment is the second in the second embodiment. The magnetic sensor 3 is different from the current amount detector 1 according to the third embodiment in that the magnetic sensor 3 is provided between the first current path 21 and the second current path 22 branched into two.

In the fourth embodiment of the present invention, as in the first embodiment, it is possible to detect only the magnetic field by the measurement current 25 excluding the external magnetic field component Hex, and thereby the magnetosensitive axis of the first magnetic sensor 2. Only the magnetic field generated by the measurement current 25 can be detected without being affected by the 11-direction external magnetic field component Hex, and the signal-to-noise ratio (SN ratio) can be improved. Further, similarly to the third embodiment, the attenuation effect of the first magnetic sensor by the branched current path can be obtained. Similarly to the third embodiment, the specific resistance of the branched current line is set to be larger than the specific resistance of the current line before branching or the current line after joining. A large attenuation effect of the sensor can be obtained. Further, in the fourth embodiment, the attenuation effect of the second magnetic sensor due to the arrangement of the second magnetic sensor between the branched current lines (that is, generated by the measurement current 25 flowing through the first current path 21). The upward magnetic field and the downward magnetic field generated by the measurement current 25 flowing through the second current path 22 cancel each other, and the magnetic field in the second magnetic sensor 3 is attenuated.
Further, in the current amount detector 1 according to the fourth embodiment, as in the first embodiment, the first magnetic sensor 2 is placed on the long side 27 of the current line 5, that is, the current line 5 is viewed from the top. It is preferable to arrange in a position that overlaps. In the case of such a configuration, as described above, the magnetic field intensity generated along the long side 27 due to the current flow is smaller than the magnetic field intensity generated along the short side 26. Therefore, the magnetic field strength change with respect to the current change becomes small, and the magnetic sensor becomes difficult to be saturated. That is, even if a large current is passed through the current line 5, the first magnetic sensor 2 becomes difficult to be saturated. Current can be measured. Furthermore, if the magnetosensitive axis of the first magnetic sensor 2 is arranged at the center of the long side 27, the effect can be maximized.

(Embodiment 5)
FIG. 8 is a schematic cross-sectional view of the current amount detector 1 according to the fifth embodiment of the present invention. As shown in FIG. 8, the current amount detector 1 according to the fifth embodiment includes a current line 5 similar to that of the fourth embodiment, two magnetic sensors (first magnetic sensor 2 and second magnetic sensor 3), and The first magnetic sensor 2 is disposed between two current paths (first current path 21 and second current path 22) branched when viewed from above, and the second magnetic sensor 3 is viewed from above. In such a case, the first current path 21 and the second current path 22 are arranged at positions overlapping with each other. As shown in FIG. 8, in the fifth embodiment, the first magnetic sensor 2 and the second magnetic sensor 3 are provided so that the magnetic sensitive surface including the magnetic sensitive axis 11 is perpendicular to the substrate 4. It has been.

  In the current amount detector 1 according to the fifth embodiment, the installation positions of the first magnetic sensor 2 and the second magnetic sensor 3 are opposite to those in the fourth embodiment. In the fifth embodiment, the magnetic sensitive surfaces are provided so as to be perpendicular to the substrate 4, whereas the magnetic sensitive surfaces are provided so as to be parallel to each other. This is different from the current amount detector 1 according to the fourth embodiment.

According to the current amount detector 1 according to the fifth embodiment, similarly to the first embodiment, it is possible to detect only the magnetic field by the measurement current 25 excluding the external magnetic field component Hex, and thereby the first magnetic field. Only the magnetic field generated by the measurement current 25 can be detected without being affected by the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the sensor 2, and the signal-to-noise ratio (SN ratio) can be improved. Further, similarly to the fourth embodiment, the attenuation effect of the second magnetic sensor can be obtained by the branched current path. Further, as in the third embodiment, the large attenuation effect of the second magnetic sensor can be obtained by setting the specific resistance of the branched current line to be large. Furthermore, the fifth embodiment is preferable because, similarly to the fourth embodiment, there is an attenuation effect of the first magnetic sensor due to the arrangement of the first magnetic sensor between the branched current lines.
Further, in the current amount detector 1 according to the fifth embodiment, it is preferable to arrange the first magnetic sensor 2 on the short side 26 and the second magnetic sensor 3 on the long side 27 as in the second embodiment. In the case of such a configuration, as described above, the magnetic field strength generated along the short side 26 due to the current flowing is larger than the magnetic field strength generated along the long side 27. Therefore, the change in magnetic field strength with respect to the change in current becomes large, and high-sensitivity measurement can be performed for a minute current. Furthermore, if the magnetosensitive axis of the first magnetic sensor 2 is arranged at the center of the short side 26, the effect can be maximized.

(Embodiment 6)
FIG. 9A is a cross-sectional view of the current amount detector 1 according to Embodiment 6 of the present invention, and FIG. 9B is a perspective view thereof. As shown in FIG. 9B, the current amount detector 1 according to the sixth embodiment includes one main current path 15 and a bypass current path 17 that branches from the main current path 15 and merges with the main current path 15. And two magnetic sensors (first magnetic sensor 2 and second magnetic sensor 3) disposed on the outer periphery of the bypass current path 17, each of the two magnetic sensors detecting a magnetic field. The magnetic sensing axes 11 and 12 of the two magnetic sensors are parallel to each other, and the second magnetic sensor 3 is disposed outside the bypass current path 17 when viewed from above. The first magnetic sensor 2 is disposed at a position overlapping the bypass current path 17 when viewed from above. More specifically, the bypass current path 17 includes a current path 17A formed in a direction starting from the side surface of the main current path 15 and extending away from the side surface of the main current path 15 substantially perpendicularly to the main current path 15. The current path 17B is formed in parallel with the main current path 15 from 17A, and the current path 17C is directed from the current path 17B to the side of the main current path 15 substantially perpendicularly to the main current path 15. The first magnetic sensor 2 is disposed at a position overlapping the current path 17A when the bypass current path 17 is viewed from above. On the other hand, the second magnetic sensor 3 is arranged outside the current path 17A when the bypass current path 17 is viewed from the top, that is, on the opposite side of the current path 17C with the current path 17A as the center. The first magnetic sensor 2 may be disposed at a position overlapping the current path 17C when the bypass current path 17 is viewed from the top. In this case, the second magnetic sensor 3 is disposed outside the current path 17C when the bypass current path 17 is viewed from the top, that is, on the opposite side of the current path 17A with the current path 17C as the center. The “main current path 15” in the sixth embodiment and the following seventh to ninth embodiments corresponds to the “current line” of the “current line with current amount detector” according to the present invention.

  The current amount detector 1 according to the sixth embodiment is provided in the main current path in the first embodiment, whereas the detour current path 17 branched from the main current path 15 in the sixth embodiment. Is different from the current amount detector 1 according to the first embodiment.

According to the current amount detector 1 according to the sixth embodiment, the first magnetic sensor 2 includes an external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2, as shown in FIG. While the combined magnetic field of the magnetic field generated by the measurement current 25 flowing in the bypass current path 17 and the component Hm1 parallel to the magnetosensitive axis 11 of the first magnetic sensor 2 is detected, the second magnetic sensor 3 is shown in FIG. As shown in (a), since only the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2 is detected, the difference between the outputs of these magnetic sensors is taken to obtain the same as in the first embodiment. Only the magnetic field generated by the measurement current 25 excluding the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2 can be detected. Further, since the magnetic field due to the current flowing through the bypass current path 17 branched from the main current path 15 is detected, the magnetic field generated thereby becomes small, and the saturation of the magnetic sensor due to a large current is suppressed as in the third to fifth embodiments. And the attenuation effect can be obtained. Further, by setting the specific resistance of the bypass current path to be larger than that of the main current path, the large attenuation effect of the first and second magnetic sensors can be obtained as in the third embodiment. Further, in the sixth embodiment, since the first and second magnetic sensors have the magnetosensitive axis arranged in parallel to the main current path 15, the influence of the magnetic field generated by the main current path 15 is reduced. Can do. In the sixth embodiment, similarly to the third and fourth embodiments, the second magnetic sensor may be arranged between the branched current lines, and thereby the attenuation effect of the second magnetic sensor can be obtained. Therefore, it is preferable.
Further, in the current amount detector 1 according to the sixth embodiment, as in the first embodiment, the first magnetic sensor 2 is placed on the long side 27 of the current line 5, that is, the current line 5 is viewed from the top. It is preferable to arrange in a position that overlaps. In the case of such a configuration, as described above, the magnetic field intensity generated along the long side 27 due to the current flow is smaller than the magnetic field intensity generated along the short side 26. Therefore, the magnetic field strength change with respect to the current change becomes small, and the magnetic sensor becomes difficult to be saturated. That is, even if a large current is passed through the current line 5, the first magnetic sensor 2 becomes difficult to be saturated. Current can be measured. Furthermore, if the magnetosensitive axis of the first magnetic sensor 2 is arranged at the center of the long side 27, the effect can be maximized.

(Embodiment 7)
FIG. 10A is a cross-sectional view of the current amount detector 1 according to Embodiment 7 of the present invention, and FIG. 10B is a perspective view thereof. As shown in FIG. 10B, the current amount detector 1 according to the seventh embodiment includes one main current path 15 and a bypass current path 17 that branches from the main current path 15 and joins the main current path 15. And two magnetic sensors (first magnetic sensor 2 and second magnetic sensor 3) disposed on the outer periphery of the bypass current path 17, each of the two magnetic sensors detecting a magnetic field. 11 and 12, the magnetosensitive axes 11 and 12 of the two magnetic sensors are parallel to each other, and when the second magnetic sensor 3 is viewed from above the bypass current path 17, the bypass current path 17. The first magnetic sensor 2 is disposed at a position overlapping the detour current path 17 when the detour current path 17 is viewed from above. More specifically, the bypass current path 17 includes the above-described current paths 17A, 17B, and 17C, and the first magnetic sensor 2 is disposed at a position that overlaps the current path 17B when the bypass current path 17 is viewed from above. Yes. On the other hand, the second magnetic sensor 3 is arranged outside the current path 17B when the bypass current path 17 is viewed from the top, that is, on the opposite side of the main current path 15 with the current path 17B as the center.

  In the sixth embodiment, the first magnetic sensor 2 is provided in a portion (current path 17A) perpendicular to the main current path 15 of the bypass current path 17, whereas in the seventh embodiment, the bypass current path 17 is different from the current amount detector 1 according to the sixth embodiment in that the first magnetic sensor 2 is provided in a portion (current path 17 </ b> B) parallel to the main current path 15.

According to the current amount detector 1 according to the seventh embodiment, the first magnetic sensor 2 includes an external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2, as shown in FIG. While detecting the combined magnetic field of the magnetic field generated by the measurement current 25 flowing in the detour current path 17 and the component parallel to the magnetic sensitive surface of the first magnetic sensor 2, the second magnetic sensor 3 is shown in FIG. ), Only the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2 is detected. Therefore, by taking the difference between these magnetic sensors, the first magnetic sensor is the same as in the first embodiment. Since it is possible to detect only the magnetic field generated by the measurement current 25 excluding the external magnetic field component Hex in the direction 2 of the magnetic sensitive axis 11, it is possible to provide a very accurate current amount detector. Further, since the magnetic field due to the current flowing through the bypass current path 17 branched from the main current path 15 is detected, the magnetic field generated thereby becomes small, and the saturation of the magnetic sensor due to the large current is suppressed as in the third to sixth embodiments. And the attenuation effect can be obtained. Further, by setting the specific resistance of the bypass current path to be larger than that of the main current path, the large attenuation effect of the first and second magnetic sensors can be obtained as in the sixth embodiment. Furthermore, in the seventh embodiment, since the bypass current path can be configured to be small, the overall configuration can be reduced.
Further, in the current amount detector 1 according to the seventh embodiment, as in the first embodiment, the first magnetic sensor 2 is placed on the long side 27 of the current line 5, that is, the current line 5 is viewed from the top. It is preferable to arrange in a position that overlaps. In the case of such a configuration, as described above, the magnetic field intensity generated along the long side 27 due to the current flow is smaller than the magnetic field intensity generated along the short side 26. Therefore, the magnetic field strength change with respect to the current change becomes small, and the magnetic sensor becomes difficult to be saturated. That is, even if a large current is passed through the current line 5, the first magnetic sensor 2 becomes difficult to be saturated. Current can be measured. Furthermore, if the magnetosensitive axis of the first magnetic sensor 2 is arranged at the center of the long side 27, the effect can be maximized.

(Embodiment 8)
FIG. 11A is a cross-sectional view of the current amount detector 1 according to Embodiment 8 of the present invention, and FIG. 11B is a perspective view thereof. As shown in FIG. 11B, the current amount detector 1 according to the eighth embodiment includes one main current path 15, a bypass current path 17 branched from the main current path 15 and further joined, and a bypass current. Two magnetic sensors (the first magnetic sensor 2 and the second magnetic sensor 3) disposed on the outer periphery of the path 17, and the bypass current path 17 branches into two due to the provision of the gap 30. Further, the two magnetic sensors are each composed of a magnetoresistive effect element having magnetic sensitive axes 11 and 12 for detecting a magnetic field, and the magnetic sensitive axes 11 and 12 of the two magnetic sensors are parallel to each other. The magnetic sensor 3 is disposed outside the bypass current path 17 when viewed from above, and the first magnetic sensor 2 is disposed at a position overlapping at least one of the first current path 21 and the second current path 22 when viewed from above. Has been. Further, as shown in FIGS. 11A and 11B, in the eighth embodiment, the first magnetic sensor 2 and the second magnetic sensor 3 have a magnetosensitive surface including magnetosensitive axes 11 and 12 as a substrate. 4 so as to be parallel to 4. That is, the current amount detector 1 according to the eighth embodiment of the present invention is obtained by combining the configuration of the third embodiment with the current line of the sixth embodiment, as shown in FIG.

  In the current amount detector 1 according to the eighth embodiment and the current amount detector 1 according to the sixth embodiment, the bypass current path 17 is not branched in the sixth embodiment. The eighth embodiment is different in that the bypass current path 17 is branched.

According to the current amount detector 1 according to the eighth embodiment, the first magnetic sensor 2 includes an external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2, as shown in FIG. While the combined magnetic field of the magnetic field generated by the measurement current 25 flowing in the bypass current path 17 and the component parallel to the magnetosensitive axis 11 of the first magnetic sensor 2 is detected, the second magnetic sensor 3 is shown in FIG. As shown in a), since only the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2 is detected, the magnetic sensitive axis of the first magnetic sensor 2 is obtained by taking the difference between the outputs of these magnetic sensors. Only the magnetic field generated by the measurement current 25 excluding the 11-direction external magnetic field component Hex can be detected. Since only the magnetic field generated by the measurement current 25 can be detected without being affected by the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2, an extremely accurate current amount detector can be provided. In addition, since the bypass current path 17 that branches the main current path 15 is further branched, the magnetic field generated by the current flowing through the current path 15 becomes extremely small, so that saturation of the magnetic sensor due to a large current can be suppressed, and the attenuation effect Can be obtained. In the eighth embodiment, similarly to the third to fifth embodiments, the second magnetic sensor may be arranged between the branched current lines, thereby obtaining the attenuation effect of the second magnetic sensor. Therefore, it is preferable.
Further, in the current amount detector 1 according to the eighth embodiment, as in the first embodiment, the first magnetic sensor 2 is placed on the long side 27 of the current line 5, that is, the current line 5 is viewed from above. It is preferable to arrange in a position that overlaps. In the case of such a configuration, as described above, the magnetic field intensity generated along the long side 27 due to the current flow is smaller than the magnetic field intensity generated along the short side 26. Therefore, the magnetic field strength change with respect to the current change becomes small, and the magnetic sensor becomes difficult to be saturated. That is, even if a large current is passed through the current line 5, the first magnetic sensor 2 becomes difficult to be saturated. Current can be measured. Furthermore, if the magnetosensitive axis of the first magnetic sensor 2 is arranged at the center of the long side 27, the effect can be maximized.

(Embodiment 9)
FIG. 12A is a cross-sectional view of the current amount detector 1 according to Embodiment 9 of the present invention, and FIG. 12B is a perspective view thereof. As shown in FIG. 12B, the current amount detector 1 according to the ninth embodiment is obtained by combining the configuration of the fourth embodiment with the current line of the sixth embodiment.

  In the current amount detector 1 according to the ninth embodiment, the second magnetic sensor 3 is disposed outside the first current path 21 in the eighth embodiment, whereas in the ninth embodiment, The second magnetic sensor 3 is different from the current amount detector 1 according to the eighth embodiment in that the second magnetic sensor 3 is disposed between the first current path 21 and the second current path 22.

According to the current amount detector 1 according to the ninth embodiment, similarly to the first embodiment, only the magnetic field by the measurement current 25 excluding the external magnetic field component Hex can be detected. Only the magnetic field generated by the measurement current 25 can be detected without being affected by the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the sensor 2, and the signal-to-noise ratio (SN ratio) can be improved. Moreover, the attenuation effect of the 1st magnetic sensor by the branched current path can be acquired similarly to Embodiment 3-5. Further, similarly to the third embodiment, the large attenuation effect of the first magnetic sensor can be obtained by setting the specific resistance of the branched current line to be large. Furthermore, in the ninth embodiment, as in the fourth and fifth embodiments, it is preferable because the attenuation effect of the second magnetic sensor can be obtained by arranging the second magnetic sensor between the branched current lines. . In addition, since the bypass current path 17 that branches the main current path 15 is further branched, the magnetic field generated by the current flowing through the current path 15 becomes extremely small, so that saturation of the magnetic sensor due to a large current can be suppressed, and the attenuation effect Can be obtained.
Further, in the current amount detector 1 according to the ninth embodiment, as in the first embodiment, the first magnetic sensor 2 is placed on the long side 27 of the current line 5, that is, the current line 5 is viewed from the top. It is preferable to arrange in a position that overlaps. In the case of such a configuration, as described above, the magnetic field intensity generated along the long side 27 due to the current flow is smaller than the magnetic field intensity generated along the short side 26. Therefore, the magnetic field strength change with respect to the current change becomes small, and the magnetic sensor becomes difficult to be saturated. That is, even if a large current is passed through the current line 5, the first magnetic sensor 2 becomes difficult to be saturated. Current can be measured. Furthermore, if the magnetosensitive axis of the first magnetic sensor 2 is arranged at the center of the long side 27, the effect can be maximized.

(Embodiment 10)
FIG. 13 is a schematic cross-sectional view of the current amount detector 1 according to the tenth embodiment of the present invention. As illustrated in FIG. 13, the current amount detector 1 according to the tenth embodiment includes a current line 5 having a square U-shaped cross section and two magnetic sensors (first elements) disposed on the outer periphery of the current line 5. 1 magnetic sensor 2 and second magnetic sensor 3), and each of the two magnetic sensors includes a magnetoresistive effect element having magnetic sensitive axes 11 and 12 for detecting a magnetic field. The magnetic axes 11 and 12 are parallel to each other, and when the current line 5 is viewed from the top, the second magnetic sensor 3 is disposed outside the current line 5, and the first magnetic sensor 2 is viewed from the top of the current line 5. In such a case, the current line 5 overlaps with the substantially U-shaped ends.

  In the cross section perpendicular to the direction in which the measurement current 25 flows, the current line 5 has an angular U-shaped cross section, that is, both ends 18A and 18C are bent substantially perpendicularly in the same direction (upward direction). It has a concave shape extending in the upward direction. For the sake of convenience, when the substantially U-shaped current line 5 is arranged so that the open part is on the top and the closed part is on the bottom, the horizontal part is referred to as a horizontal part 18B. The portions extending in the vertically upward direction (that is, the direction substantially perpendicular to the horizontal portion 18B and upward) are referred to as a right end portion 18A and a left end portion 18C.

  The first magnetic sensor 2 is between the right end portion 18A and the left end portion 18C, and is in a position included in the right end portion 18A or the left end portion 18C when viewed from the side. On the other hand, the second magnetic sensor 3 has the right end portion when viewed from the top, when the current line 5 is viewed from above, outside the current line 5, that is, the right side of the right end portion 18A or the left side of the left end portion 18C. 18A or the position included in the left end portion 18C.

  The first magnetic sensor 2 and the second magnetic sensor 3 are arranged such that their magnetic sensitive axes 11 and 12 are parallel to each other and parallel to the horizontal portion 18B of the current line 5. .

  According to the current amount detector 1 according to the tenth embodiment, when the current flows through the current line at a uniform current density, the first magnetic sensor 2 is sensitive to the first magnetic sensor 2 as shown in FIG. While detecting the composite magnetic field of the external magnetic field component Hex in the direction of the axis 11 and the magnetic field generated by the measurement current 25 flowing in the bypass current path 17 and the component Hm1 parallel to the magnetosensitive axis 11 of the first magnetic sensor 2. Since the second magnetic sensor 3 detects only the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2 as shown in FIG. 13, the difference between the outputs of these magnetic sensors is taken. Only the magnetic field generated by the measurement current 25 excluding the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the magnetic sensor 2 can be detected. Since only the magnetic field generated by the measurement current 25 can be detected without being affected by the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2, an extremely accurate current amount detector can be provided. Further, in the case of this embodiment, since the conductor exists in the direction of the magnetic sensitive axis of the first magnetic sensor, the effect of shielding external electric field noise is high.

(Embodiment 11)
FIG. 14 is a schematic cross-sectional view of the current amount detector 1 according to the eleventh embodiment of the present invention. As shown in FIG. 14, the current amount detector 1 according to the eleventh embodiment includes a current line 5 having an angular U-shaped cross section and two magnetic sensors (the first magnetic sensor 2 and the first magnetic sensor 2). 2 magnetic sensors 3), and the two magnetic sensors are each composed of a magnetoresistive effect element having magnetic sensitive axes 11 and 12 for detecting a magnetic field, and the magnetic sensitive axes 11 and 12 of the two magnetic sensors are They are parallel to each other.
In the cross section perpendicular to the direction in which the measurement current 25 flows, the current line 5 has an angular U-shaped cross section, that is, both ends 18A and 18C are bent substantially perpendicularly in the same direction (upward direction). It has a concave shape extending in the upward direction. Similarly to the above, the horizontal portion is referred to as a horizontal portion 18B, and the portions extending vertically upward from both ends of the horizontal portion 18B (that is, the direction substantially perpendicular to the horizontal portion 18B and upward) are the right end portion 18A, This is referred to as a left end portion 18C.

  The first magnetic sensor 2 is located between the right end portion 18A and the left end portion 18C and at a portion other than the center line P that is equidistant from the right end portion 18A and the left end portion 18C. 18A or the position included in the left end portion 18C. On the other hand, the second magnetic sensor 3 is on the center line P between the right end portion 18A and the left end portion 18C and equidistant from the right end portion 18A and the left end portion 18C.

According to the current amount detector 1 according to the eleventh embodiment, when the current flows through the current line at a uniform current density, the first magnetic sensor 2 is sensitive to the first magnetic sensor 2 as shown in FIG. While detecting the combined magnetic field of the external magnetic field component Hex in the direction of the axis 11 and the component Hm1 of the magnetic field generated by the measurement current 25 flowing in the current line 5 and parallel to the magnetosensitive axis 11 of the first magnetic sensor 2, As shown in FIG. 14, the second magnetic sensor 3 detects only the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2, and therefore the first magnetic sensor 3 takes the difference between the outputs of these magnetic sensors. Only the magnetic field generated by the measurement current 25 excluding the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the magnetic sensor 2 can be detected. Since only the magnetic field generated by the measurement current 25 can be detected without being affected by the external magnetic field component Hex in the direction of the magnetic sensitive axis 11 of the first magnetic sensor 2, an extremely accurate current amount detector can be provided. Further, this embodiment also has a high effect of shielding external electric field noise since a conductor is present on one side of the first magnetic sensor in the direction of the magnetic sensitive axis as in the tenth embodiment. In addition, with this configuration, the first magnetic sensor and the second magnetic sensor are arranged on the front and back surfaces of one substrate, respectively, so that the number of parts can be reduced and the cost can be reduced.
The present application claims priority based on Japanese Patent Application No. 2014-45588 filed in Japan on March 7, 2014. The contents described in the specification of the application (Japanese Patent Application No. 2014-45588) are incorporated herein by reference.

DESCRIPTION OF SYMBOLS 1 Current amount detector 2 1st magnetic sensor 3 2nd magnetic sensor 4 Board | substrate 5 Current line 21 1st current path 22 2nd current path

Claims (11)

A current line through which the measurement current flows;
And at least two magnetic sensors for detecting and electrically outputting a magnetic field,
Each of the two magnetic sensors comprises a magnetoresistive effect element having a magnetosensitive axis where the electrical output is highest with respect to the magnetic field and a dead magnetic axis where there is no electrical output with respect to the magnetic field,
The magnetic sensitive axes of the two magnetic sensors are parallel to each other,
Of the two magnetic sensors, one of the first magnetic sensors has a magnetic field strength of a component parallel to the magnetic sensing axis, rather than a magnetic field strength of a component perpendicular to the magnetic sensing axis of the magnetic field generated by the measurement current. Is placed at a position where the
Of the two magnetic sensors, the other second magnetic sensor has a magnetosensitive axis perpendicular to the magnetic field generated by the measurement current, and the dead magnetic axis has a magnetic field generated by the measurement current. Placed in parallel,
A current amount detector for detecting a current amount of a measurement current based on a difference between an output of the first magnetic sensor and an output of the second magnetic sensor ;
The current line has a first current path and a second current path that are branched and merged into two,
The specific resistance of the first current path or the second current path is larger than the specific resistance of the current line before branching or the current line after joining, and
The temperature coefficient of the first current path or the second current path is substantially the same as the temperature coefficient of the current line before branching or the current line after merging .   The second magnetic sensor is disposed outside the current line when the current line is viewed from above, and the first magnetic sensor is disposed at a position overlapping the current line when the current line is viewed from above. The current amount detector according to claim 1, wherein:   The first magnetic sensor is disposed outside the current line when the current line is viewed from above, and the second magnetic sensor is disposed at a position overlapping the current line when the current line is viewed from above. The current amount detector according to claim 1, wherein: The second magnetic sensor is a position outside the current line when the current line is viewed from above, and the dead magnetic axis is generated by a measurement current flowing through the first current path or the second current path. It is arranged at a position parallel to the magnetic field to be
The first magnetic sensor is a position that overlaps one of the first current path and the second current path when the current line is viewed from the top, and the first magnetic sensor passes through the first current path or the second current path. 2. The magnetic field generated by the flowing measurement current is disposed at a position where the magnetic field strength of the component parallel to the magnetic sensitive axis is larger than the magnetic field strength of the component perpendicular to the magnetic sensitive axis. Current detector. The second magnetic sensor is a magnetic field generated by a measurement current flowing between the first current path and the second current path, the dead magnetic axis of which is between the first current path and the second current path. It is arranged at a position parallel to
The first magnetic sensor is a position that overlaps one of the first current path and the second current path when the current line is viewed from the top, and the first magnetic sensor passes through the first current path or the second current path. 2. The magnetic field generated by the flowing measurement current is disposed at a position where the magnetic field strength of the component parallel to the magnetic sensitive axis is larger than the magnetic field strength of the component perpendicular to the magnetic sensitive axis. Current detector. The first magnetic sensor is located between the first current path and the second current path, and serves as a magnetosensitive axis of a magnetic field generated by a measurement current flowing through the first current path and the second current path. It is arranged at a position where the magnetic field strength of the component parallel to the magnetic sensitive axis is larger than the magnetic field strength of the vertical component,
The second magnetic sensor is a position that overlaps one of the first current path and the second current path when the current line is viewed from above, and the insensitive magnetic axis is the first current path or The current amount detector according to claim 1, wherein the current amount detector is disposed at a position parallel to a magnetic field generated by a measurement current flowing through the second current path. The current line has a substantially rectangular shape in which a cross section perpendicular to the direction in which the measurement current flows has a long side and a short side,
The magnetosensitive axis of the second magnetic sensor is located at the center of the short side of the current line,
Magnetosensitive axis of the first magnetic sensor, the current amount detector according to any one of claims 1, 2, 4, 5, characterized in that located in the center of the long side of the current line. The current line has a substantially rectangular shape in which a cross section perpendicular to the direction in which the measurement current flows has a long side and a short side,
The magnetosensitive axis of the first magnetic sensor is located at the center of the short side of the current line,
The current amount detector according to claim 3 or 6, wherein a magnetic sensitive axis of the second magnetic sensor is located at a center of a long side of the current line.   2. The current amount detector according to claim 1, wherein the current line has a concave cross section in which both ends are bent substantially perpendicular to the same direction in a cross section perpendicular to the direction in which the measurement current flows. The first magnetic sensor and the second magnetic sensor, the current amount detector according to any one of claims 1 to 9, characterized in that it is arranged on the front surface and the back surface of one substrate. A main current path, a bypass current path is branched from said main current path merges with the main current path, a current line with a current according to any one of claims 1 to 10 provided in the bypass current path A current line with a current amount detector.

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