JP6473546B1 - Electromagnet, magnetic field application system - Google Patents

Abstract

An electromagnet capable of applying a magnetic field in an arbitrary direction without moving an electromagnet or an object.
An electromagnet includes a first yoke having a pair of first rod-like portions 31 spaced apart along the X axis, a first coil and a second coil wound around the first yoke, and a Y axis. A second yoke 40 having a pair of second rod-like portions 41 spaced apart along, a first coil 45 and a second coil 46 wound around the second yoke 40, and a first yoke 30 and a second yoke 40; And a third yoke 50 formed in a columnar shape coaxial with the central axis CL. The first rod-like portion 31 and the second rod-like portion 41 are arranged at positions that are axially symmetric with respect to a central axis CL that is parallel to the Z axis.
[Selection] Figure 5A

Description

  The present disclosure relates to an electromagnet and a magnetic field application system.

  Processing devices using electromagnets such as magnetoresistance measuring device, vibrating sample magnetometer, electromagnet for various magnetic property measuring devices including MRAM / evaluation device, heat treatment device in magnetic field, magnetization demagnetization processing device, saturation magnetostriction measuring device From the magnetic application industry to the semiconductor industry, and the medical and biotechnology fields, technologies using magnetic fields have been put into practical use in many fields.

  In the above-mentioned fields, the magnetic field is applied in a desired direction to measure the characteristics of the object to be measured in the magnetic field, or the object to be processed is disposed in the desired magnetic field and subjected to heat treatment or the like. In order to change the magnetic characteristics, an electromagnet is used to apply a magnetic field in a desired direction by current control, rotation of the electromagnet, or the like.

Japanese Patent No. 4761383

  Japanese Patent No. 4761483 discloses an electromagnet having a magnetic field application region only on one side of the apparatus and avoiding mechanical operation restrictions and apparatus enlargement. However, since a magnetic field is formed radially from the central first yoke to the surrounding second yoke, the position of the object must be changed according to the direction to be applied, such as the x-axis, y-axis, and z-axis. In order to move the electromagnet itself or a heavy object such as a measurement object, time is required, and time loss becomes a problem in order to sequentially apply magnetic fields of a plurality of conditions.

  The present disclosure has been made paying attention to such a problem, and an object of the present disclosure is to provide an electromagnet and a magnetic field application system capable of applying a magnetic field in an arbitrary direction without moving the electromagnet or the object. is there.

  In order to achieve the above object, the present disclosure takes the following measures.

That is, the electromagnet of the present disclosure is
A first yoke having a pair of first rod-like portions separated from each other along the X-axis with a magnetic pole at the front end sandwiching a gap; a first coil capable of forming a closed magnetic path together with the gap; and a first coil wound around the first yoke; An X-axis electromagnet having a second coil;
A magnetic pole at the tip has a pair of second rod-shaped portions that are separated along the Y axis with a gap interposed therebetween, a second yoke capable of forming a closed magnetic path with the gap, a first coil wound around the second yoke, A Y-axis electromagnet having a second coil;
A third yoke connected to the first yoke and the second yoke and formed in a columnar shape coaxial with the central axis,
The pair of first rod-shaped portions and the pair of second rod-shaped portions are disposed at positions that are axially symmetric with respect to a central axis parallel to the Z axis.

If the current is supplied in this way and magnetic fluxes whose directions are opposite to each other are developed in the gap, magnetic fluxes that repel each other and have a Z-axis component on the central axis can be developed. Therefore, a magnetic field in any direction including the X axis, the Y axis, and the Z axis can be applied without the Z axis electromagnet.
Since the first rod-shaped portion and the second rod-shaped portion are arranged at positions that are axially symmetric with respect to the central axis parallel to the Z axis, any direction including the X axis, the Y axis, and the Z axis on the central axis It is not necessary to change the relative positional relationship between the object and the electromagnet when the direction of the magnetic field is switched.
Further, since the third yoke is connected to the first yoke and the second yoke and is coaxial with the central axis, the Z-axis magnetic flux is generated by supplying a current that generates magnetic fluxes whose directions are opposite to each other. Can be strengthened.
Therefore, a magnetic field in an arbitrary direction can be applied without moving the electromagnet or the object. Time loss can be reduced when sequentially applying magnetic fields of multiple conditions.

1 is a schematic plan view showing an electromagnet and a magnetic field application system according to a first embodiment of the present disclosure. It is AA site | part sectional drawing of FIG. 1, and explanatory drawing regarding X direction magnetic field generation | occurrence | production. It is BB site | part sectional drawing of FIG. 1, and explanatory drawing regarding a Y direction magnetic field generation | occurrence | production. The typical bottom view showing an electromagnet. It is AA site | part sectional drawing of FIG. 1, and explanatory drawing regarding Z direction magnetic field generation | occurrence | production. It is BB site | part sectional drawing of FIG. 1, and explanatory drawing regarding Z direction magnetic field generation | occurrence | production. Explanatory drawing which shows the direction of the magnetic field to generate | occur | produce. Explanatory drawing which shows the direction of the magnetic field to generate | occur | produce. Explanatory drawing which shows the direction of the magnetic field to generate | occur | produce. Explanatory drawing which shows the direction of the magnetic field to generate | occur | produce. Explanatory drawing which shows the direction of the magnetic field to generate | occur | produce. Explanatory drawing which shows the direction of the magnetic field to generate | occur | produce. Explanatory drawing which shows the direction of the magnetic field to generate | occur | produce. Explanatory drawing which shows the direction of the magnetic field to generate | occur | produce. A typical sectional view showing an electromagnet of a 2nd embodiment. A typical sectional view showing an electromagnet of a 3rd embodiment.

[First Embodiment]
Hereinafter, a first embodiment of the present disclosure will be described with reference to the drawings.

<Magnetic field application system>
FIG. 1 is a schematic plan view showing an electromagnet 1 constituting a magnetic field application system. The magnetic field application system is configured to generate a magnetic field in an arbitrary direction including the X axis, the Y axis, and the Z axis and to apply the magnetic field to an application target. As shown in FIG. 1, the magnetic field application system includes an electromagnet 1 and a current supply unit 2 that supplies current to the electromagnet 1. The X axis, the Y axis, and the Z axis are directions orthogonal to each other.

<Electromagnet>
As shown in FIGS. 1 and 2, the electromagnet 1 includes an X-axis electromagnet 3 and a Y-axis electromagnet 4.

  The X-axis electromagnet 3 includes a first yoke 30 and a first coil 35 and a second coil 36 that are wound around the first yoke 30. The first yoke 30 is formed of a soft ferromagnet, and has a pair of first rod-like portions 31 that are separated from each other along the X-axis with a magnetic pole 31a at the tip sandwiching the gap Gp, and the closed magnetic circuit mp_X together with the gap Gp. Can be formed. In the present embodiment, the first yoke 30 is C-shaped in a side view, but is not limited to this. Moreover, although the 1st rod-shaped site | part 31 is a shape extended linearly, if it is elongate, it will not be limited to this. For example, a shape extending while bending or a shape extending in a curved shape may be used. In the present embodiment, as shown in FIG. 2, the first yoke 30 includes a first rod-shaped portion 31 and a first extending portion extending from the base end portion of the first rod-shaped portion 31 to one side (−Z) of the Z axis. 32 and a second extending portion 33 that connects ends of the first extending portion 32 on one side (−Z) of the Z-axis. With this structure, when a current is passed through the first coil 35 and the second coil 36, the first yoke 30 forms a closed magnetic circuit mp_X together with the gap Gp. Also, with this structure, a region Ar1 in which the yoke and the coil are not arranged is formed on the other side (+ Z) of the Z-axis than the first rod-shaped portion 31, and this region can be used as the magnetic field application region Ar1.

  As shown in FIGS. 1 and 3, the Y-axis electromagnet 4 includes a second yoke 40 and a first coil 45 and a second coil 46 that are wound around the second yoke 40. The second yoke 40 is formed of a soft ferromagnet, and has a pair of second rod-like portions 41 with the magnetic pole 41a at the tip spaced apart along the Y axis with the gap Gp interposed therebetween, and the closed magnetic circuit mp_Y together with the gap Gp. Can be formed. In the present embodiment, the second yoke 40 is C-shaped in a side view, but is not limited to this. In addition, the second rod-like portion 41 has a linearly extending shape like the first rod-like portion 31, but is not limited to this as long as it is long. In the present embodiment, as shown in FIG. 3, the second yoke 40 includes a second rod-shaped portion 41 and a first extending portion that extends from the proximal end portion of the second rod-shaped portion 41 to one side (−Z) of the Z axis. 42 and a second extending portion 43 that connects ends of the first extending portion 42 on one side (−Z) of the Z-axis. With this structure, when a current is passed through the first coil 45 and the second coil 46, the second yoke 40 forms a closed magnetic circuit mp_Y together with the gap Gp. Also, with this structure, a region Ar1 in which the yoke and the coil are not arranged is formed on the other side of the Z axis (+ Z) with respect to the second rod-shaped portion 41, and this region can be used as the magnetic field application region Ar1.

  FIG. 4 is a bottom view of the electromagnet 1. As shown in FIG. 4, the second extending portion 33 constituting the first yoke 30 of the X-axis electromagnet 3 and the second extending portion 43 constituting the second yoke 40 of the Y-axis electromagnet 4 are: It is connected. In this embodiment, the 2nd extension parts 33 and 43 are comprised by the cross-shaped one member by bottom view. Of course, the second extending portion 33 constituting the first yoke 30 and the second extending portion 43 constituting the second yoke 40 may be formed as separate members and fixed in a state in which both members are in contact with each other. Good.

  As shown in FIG. 1, the pair of first rod-shaped portions 31 are disposed at positions that are axially symmetric with respect to a central axis CL that is parallel to the Z axis. Thereby, a magnetic flux parallel to the XY plane can be generated on the central axis CL. Similarly, the pair of second rod-shaped portions 41 are disposed at positions that are axially symmetric with respect to a central axis CL that is parallel to the Z axis. Thereby, a magnetic flux parallel to the XY plane can be generated on the central axis CL. In the present embodiment, the two first rod-shaped portions 31 and the two second rod-shaped portions 41 are arranged so as to have a positional relationship of being rotated 90 degrees around the central axis CL. By arranging in this way, the magnetic flux generated on the central axis CL by the X-axis electromagnet 3 and the magnetic flux generated on the central axis CL by the Y-axis electromagnet 4 are orthogonal to each other on the XY plane. Current control for applying a magnetic field in the direction becomes easy.

  As shown in FIGS. 2 and 3, in the present embodiment, the first coils 35 and 45 and the second coils 36 and 46 are formed of a non-magnetic conductor such as an enamel conductor, and the second extension portion 33, 43. According to this configuration, the X-axis dimension and the Y-axis dimension of the electromagnet 1 can be suppressed, and the electromagnet 1 can be reduced in size in the XY direction. Of course, the winding position of the 1st coils 35 and 45 and the 2nd coils 36 and 46 is not limited to this. For example, the first coils 35 and 45 and the second coils 36 and 46 may be wound around the first extending portions 32 and 42. According to this configuration, the Z-axis dimension of the electromagnet 1 can be suppressed, and the electromagnet 1 can be downsized in the Z direction.

  As shown in FIGS. 1, 2, and 3, a third yoke 50 is provided to increase the Z-axis magnetic flux generated by the following current control. The third yoke 50 is formed in a columnar shape coaxial with the central axis CL, and is connected to the first yoke 30 and the second yoke 40. The third yoke 50 protrudes toward the gap Gp from the second extending portions 33 and 43 constituting the first yoke 30 and the second yoke 40. In the present embodiment, the shape is a conical column having a flat top surface, but the present invention is not limited to this. The third yoke 50 extends to a gap Gp formed between the magnetic pole 31a of the first yoke 30 and the magnetic pole 41a of the second yoke 40, and the upper ends of the first yoke 30 and the second yoke 40 and the third yoke. The tip of 50 is flush. Of course, if the third yoke 50 is provided, the protruding amount of the third yoke 50 can be set arbitrarily. Further, it is only necessary that the third yoke 50 overlaps the narrowest portion between the first rod-like portions 31 when viewed along a direction (X axis or Y axis) orthogonal to the Z axis.

<Current control>
As shown in FIG. 1, the current supply unit 2 includes four power sources 4a and a current control unit (not shown) that controls the power source 4a. The power source 4a is connected to the first coil 35 and the second coil 36 constituting the X-axis electromagnet 3 and to the first coil 45 and the second coil 46 constituting the Y-axis electromagnet 4, respectively. . With this configuration, the four coils 35, 36, 45, 46 are supplied with current from separate power sources 4 a, so that the current supply unit 2 is capable of The direction can be changed individually.

  As shown in FIG. 2, if an X excitation current Xi + is supplied to the first coil 35 and the second coil 36 of the X axis electromagnet 3 without supplying current to the Y axis electromagnet 4, the first direction ( The magnetic flux mf1 toward + X) appears on the central axis CL. As shown in FIG. 6A, the magnetic flux mf1 has only an X-axis component in a predetermined region P on the central axis CL. Although not shown, if an X excitation current Xi− in the direction opposite to the X excitation current Xi + is caused to flow through the first coil 35 and the second coil 36 constituting the X-axis electromagnet 3, the first direction (+ X) Shows a magnetic flux mf2 in the opposite second direction (−X) on the central axis CL. As shown in FIG. 6B, the magnetic flux mf2 has only an X-axis component in a predetermined region P on the central axis CL.

  As shown in FIG. 3, if the Y excitation current Yi + is passed through the first coil 45 and the second coil 46 constituting the Y axis electromagnet 4 without passing a current through the X axis electromagnet 3, the first direction ( The magnetic flux mf3 toward + Y) appears on the central axis CL. As shown in FIG. 6C, the magnetic flux mf3 has only a Y-axis component in a predetermined region P on the central axis CL. Although not shown, if a Y excitation current Yi− in the direction opposite to the Y excitation current Yi + is passed through the first coil 45 and the second coil 46 constituting the Y-axis electromagnet 4, the first direction (+ Y) Shows a magnetic flux mf4 in the opposite second direction (-Y) on the central axis CL. As shown in FIG. 6D, the magnetic flux mf4 has only a Y-axis component in a predetermined region P on the central axis CL.

  As shown in FIG. 5A, if the current supply unit 2 performs current supply in the reverse current mode, the magnetic flux mf5 along the Z-axis can be generated on the central axis CL by the X-axis electromagnet 3 alone. In the reverse current mode, with respect to the X-axis electromagnet 3, an X excitation current Xi + that generates a magnetic flux mf1 in the first direction (+ X) on the central axis CL is caused to flow through the first coil 35, and the first direction (+ X) Is a mode in which an X excitation current Xi− that generates a magnetic flux mf2 in the opposite second direction (−X) on the central axis CL is supplied to the second coil 36. When the current flows in this way, a magnetic flux mf5 along the Z axis is generated. As shown in FIG. 6F, the magnetic flux mf5 has only a Z-axis component in a predetermined region P on the central axis CL.

  Similarly, as shown in FIG. 5B, if the current supply unit 2 performs current supply in the reverse current mode, the magnetic flux mf5 along the Z-axis may be generated on the central axis CL by only the Y-axis electromagnet 4. it can. In the reverse current mode, for the Y-axis electromagnet 4, a Y excitation current Yi + that generates a magnetic flux mf3 in the first direction (+ Y) on the central axis CL is passed through the first coil 45, and the first direction (+ Y) Is a mode in which a Y excitation current Yi− that generates a magnetic flux mf4 in the opposite second direction (−Y) on the central axis CL is caused to flow through the second coil 46. When the current flows in this way, a magnetic flux mf5 along the Z axis is generated. As shown in FIG. 6F, the magnetic flux mf5 has only a Z-axis component in a predetermined region P on the central axis CL.

  In order to generate the magnetic flux along the Z-axis, a current in the reverse current mode may be executed in at least one of the X-axis electromagnet 3 and the Y-axis electromagnet 4. If executed by both the X-axis electromagnet 3 and the Y-axis electromagnet 4, the generated magnetic flux becomes stronger.

  In order to generate the magnetic flux mf6 having both the Y-axis and Z-axis components, the X excitation current Xi + and the X excitation current are applied to the first coil 35 and the second coil 36 constituting the X axis electromagnet 3, respectively. A current Xi− may be supplied, and a Y excitation current Yi + may be supplied to the first coil 45 and the second coil 46 constituting the Y-axis electromagnet 4. In this way, as shown in FIG. 6G, the magnetic flux mf6 faces the direction in which the Y-axis component and the Z-axis component are combined, and has no X-axis component. The same applies to a magnetic flux having both X-axis and Z-axis components.

  In order to generate the magnetic flux mf7 having both the X-axis and Y-axis components, the X excitation current Xi + is supplied to the first coil 35 and the second coil 36 constituting the X-axis electromagnet 3, and the Y-axis is generated. The Y excitation current Yi + may be supplied to the first coil 45 and the second coil 46 that constitute the electromagnet 4. In this way, as shown in FIG. 6H, the magnetic flux mf7 is directed in the direction in which the X-axis component and the Y-axis component are combined, and has no Z-axis component.

  In order to generate the magnetic flux mf8 having the three-axis components of the XYZ axes, both the X-axis electromagnet 3 and the Y-axis electromagnet 4 may be set in the reverse current mode, and the current values of the respective coils may be different. That is, an X excitation current Xi + and an X excitation current Xi− are supplied to the first coil 35 and the second coil 36 constituting the X-axis electromagnet 3, respectively, and the first coil 45 constituting the Y-axis electromagnet 4. The Y excitation current Yi + and the Y excitation current Yi− are supplied to the second coil 46, respectively. The X excitation current Xi + is larger than the X excitation current Xi−, and the Y excitation current Yi + is larger than the Y excitation current Yi−. In this way, as shown in FIG. 6I, the magnetic flux mf8 faces the direction in which the X-axis component, the Y-axis component, and the Z-axis component are combined.

  As described above, an arbitrary place of the central axis CL can be set in the magnetic field application region P, and the electromagnet can be moved relatively by changing the current flowing through the coils 35, 36, 45, 46. Even if not, a magnetic field in an arbitrary direction can be applied to the predetermined region P on the central axis CL.

[Second Embodiment]
As shown in FIG. 7, the second embodiment has a structure in which the third yoke 50 is not provided. Even in this structure, the magnetic flux mf5 having the Z-axis component can be generated by executing the reverse current mode for at least one of the X-axis electromagnet 3 and the Y-axis electromagnet 4. Of course, the magnetic flux of the Z-axis component becomes stronger when the third yoke 50 is provided.

[Third Embodiment]
In the third embodiment, as shown in FIG. 8, a third coil 51 is wound around a third yoke 50. In this way, the magnetic flux of the Z-axis component can be generated without using the reverse current mode for the X-axis electromagnet 3 or the Y-axis electromagnet 4. Further, the strength of the magnetic field generated in the reverse current mode with respect to the X-axis electromagnet 3 or the Y-axis electromagnet 4 can be reinforced.

As described above, the electromagnet of this embodiment has the pair of first rod-like portions 31 in which the magnetic pole 31a at the tip is separated along the X axis with the gap Gp interposed therebetween, and can form a closed magnetic circuit mp_X together with the gap Gp. An X-axis electromagnet 3 having a first yoke 30 and a first coil 35 and a second coil 36 wound around the first yoke 30;
The magnetic pole 41a at the front end has a pair of second rod-shaped portions 41 that are separated along the Y axis with the gap Gp interposed therebetween. The second yoke 40 that can form a closed magnetic path mp_Y together with the gap Gp is wound around the second yoke 40 A Y-axis electromagnet 4 having a first coil 45 and a second coil 46,
A third yoke 50 connected to the first yoke 30 and the second yoke 40 and formed in a columnar shape coaxial with the central axis CL.
The pair of first rod-shaped portions 31 and the pair of second rod-shaped portions 41 are disposed at positions that are axially symmetric with respect to a central axis CL parallel to the Z axis.

In this way, if current is supplied and magnetic fluxes whose directions are opposite to each other are to be expressed in the gap Gp, magnetic fluxes that repel each other and have a Z-axis component on the central axis CL can be expressed. Therefore, a magnetic field in any direction including the X axis, the Y axis, and the Z axis can be applied without the Z axis electromagnet.
Since the first rod-shaped portion 31 and the second rod-shaped portion 41 are disposed at positions that are axially symmetric with respect to the central axis CL parallel to the Z axis, the X axis, the Y axis, and the Z axis are located on the central axis CL. It is not necessary to change the relative positional relationship between the object and the electromagnet when the direction of the magnetic field is switched.
Furthermore, since the third yoke 50 is connected to the first yoke 30 and the second yoke 40 and is coaxial with the central axis CL, the third yoke 50 is supplied with a current that generates magnetic fluxes whose directions are opposite to each other. The generation of magnetic flux can be strengthened.
Therefore, a magnetic field in an arbitrary direction can be applied without moving the electromagnet or the object. Time loss can be reduced when sequentially applying magnetic fields of multiple conditions.

  In the present embodiment, a current (Xi +; Yi +) that generates a magnetic flux on the central axis CL in the first direction (+ X; + Y) with respect to at least one of the X-axis electromagnet 3 and the Y-axis electromagnet 4 A current (Xi−; which flows on one coil (35; 36) and generates a magnetic flux on the central axis CL in a second direction (−X; −Y) opposite to the first direction (+ X; + Y). By flowing Yi-) through the second coil (36; 46), a magnetic flux having a Z-axis component can be expressed on the central axis CL, and the current flowing through each coil 35, 36, 45, 46 is changed. Thus, a magnetic field in an arbitrary direction including the Z axis can be applied on the central axis CL.

  In the present embodiment, a third coil 51 wound around the third yoke 50 is provided.

  According to this configuration, the Z-axis magnetic flux can be further increased by energizing the third coil 51.

  In the present embodiment, the first yoke 30 and the second yoke 40 include first extending portions 32 and 42 extending from the base end portions of the respective rod-shaped portions 31 and 41 to one side (−Z) of the Z axis, Second extending portions 33 and 43 that connect ends of the extending portions 32 and 42 on one side (−Z) of the Z axis.

  According to this configuration, the region Ar1 in which the yoke and the coil are not arranged is formed on the other side of the Z axis (+ Z) from each of the rod-like portions 31 and 41, and this region is used as the magnetic field application region Ar1. Even if the object to be arranged in the magnetic field application region Ar1 becomes large, it is not necessary to enlarge the electromagnet itself, and the system can be miniaturized.

  In the present embodiment, the first coils 35 and 45 and the second coils 36 and 46 in the X-axis electromagnet 3 and the Y-axis electromagnet 4 are wound around the second extending portions 33 and 43.

  According to this configuration, the X-axis and Y-axis dimensions of the electromagnet can be suppressed, and the system can be downsized.

  The magnetic field application system of the present embodiment includes the electromagnet 1 and a current supply unit 2 that supplies current to the coils 35, 36, 45, and 46 of the electromagnet 1. The current supply unit 2 generates a current (Xi +; Yi +) that generates a magnetic flux on the central axis CL in the first direction (+ X; + Y) with respect to at least one of the X-axis electromagnet 3 and the Y-axis electromagnet 4. A second current is caused to flow on the central axis CL through the first coil (35; 45) and to generate a magnetic flux in the second direction (-X; -Y) opposite to the first direction (+ X; + Y). The current supply in the reverse current mode that flows through the coils (36; 46) is configured to be executable. By changing the current flowing through each of the coils 35, 36, 45, and 46, a magnetic field in an arbitrary direction including the Z axis can be applied on the central axis CL.

  In the above, for convenience of explanation, reference numerals are described by separating them with a semicolon (;) according to an embodiment and a control pattern, but this does not affect interpretation of rights.

  As mentioned above, although embodiment of this indication was described based on drawing, it should be thought that a specific structure is not limited to these embodiment. The scope of the present invention is shown not only by the above description of the embodiments but also by the scope of claims for patent, and further includes all modifications within the meaning and scope equivalent to the scope of claims for patent.

  The structure employed in each of the above embodiments can be employed in any other embodiment. The specific configuration of each unit is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Electromagnet 2 ... Current supply part 3 ... X-axis electromagnet 30 ... 1st yoke 31 ... 1st rod-shaped part 31a ... Magnetic pole 32 ... 1st extension part 33 ... 2nd extension part 35 ... 1st coil 36 ... 1st 2 coils 4 ... Y-axis electromagnet 41 ... 2nd rod-shaped part 41a ... Magnetic pole 42 ... 1st extension part 43 ... 2nd extension part 45 ... 1st coil 46 ... 2nd coil 50 ... 3rd yoke 51 ... 3rd Coil Gp ... Gap CL ... Center axis

Claims (6)

A magnetic pole at the tip has a pair of first rod-shaped portions that are spaced apart along the X axis with a gap therebetween and are symmetrically arranged with respect to a central axis parallel to the Z axis. An X-axis electromagnet having a first yoke capable of forming a closed magnetic path, and a first coil and a second coil wound around the first yoke;
The magnetic pole at the tip is separated along the Y axis with a gap, and has a pair of second rod-shaped parts arranged at positions symmetrical with respect to each other about the central axis, and forms a closed magnetic circuit together with the gap A Y-axis electromagnet having a possible second yoke, and a first coil and a second coil wound around the second yoke;
The first is connected to the yoke and the second yoke, and the third yoke which is formed in a columnar shape of said central axis coaxial, Ru provided with the electromagnet. With respect to at least one of the X-axis electromagnet and the Y-axis electromagnet, a current that generates a magnetic flux in the first direction on the central axis is passed through the first coil, and is opposite to the first direction. The magnetic flux having a Z-axis component on the central axis can be expressed by flowing a current that generates a magnetic flux in the second direction on the central axis through the second coil.
2. The electromagnet according to claim 1, configured to apply a magnetic field in an arbitrary direction including the Z axis on the central axis by changing a current flowing through each coil.   The electromagnet according to claim 1, further comprising a third coil wound around the third yoke.   The first yoke and the second yoke connect the first extending portion extending from the base end portion of each rod-shaped portion to one side of the Z axis and the end portions of the first extending portion on the one side of the Z axis. The electromagnet according to claim 1, further comprising: a second extending portion.   The electromagnet according to claim 4, wherein the first coil and the second coil in the X-axis electromagnet and the Y-axis electromagnet are wound around the second extending portion. The electromagnet according to any one of claims 1 to 5,
A current supply unit for supplying a current to each coil of the electromagnet,
The current supply unit causes the first coil to pass a current that generates a magnetic flux in the first direction on the central axis with respect to at least one of the X-axis electromagnet or the Y-axis electromagnet, and A current supply in a reverse current mode in which a current that generates a magnetic flux on the central axis in the second direction opposite to the first direction is caused to flow in the second coil is configured to be executable;
A magnetic field application system configured to apply a magnetic field in an arbitrary direction including the Z axis on the central axis by changing a current flowing through each coil.

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