JP6464608B2 - 物理量センサー、電子機器および移動体 - Google Patents

物理量センサー、電子機器および移動体 Download PDF

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Publication number
JP6464608B2
JP6464608B2 JP2014166926A JP2014166926A JP6464608B2 JP 6464608 B2 JP6464608 B2 JP 6464608B2 JP 2014166926 A JP2014166926 A JP 2014166926A JP 2014166926 A JP2014166926 A JP 2014166926A JP 6464608 B2 JP6464608 B2 JP 6464608B2
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electrode
fixed electrode
physical quantity
quantity sensor
counter electrode
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JP2014166926A
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Japanese (ja)
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JP2016044979A (ja
JP2016044979A5 (enExample
Inventor
田中　悟
悟 田中
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2014166926A priority Critical patent/JP6464608B2/ja
Priority to US14/822,041 priority patent/US9810712B2/en
Priority to CN201510494373.3A priority patent/CN105372451B/zh
Publication of JP2016044979A publication Critical patent/JP2016044979A/ja
Publication of JP2016044979A5 publication Critical patent/JP2016044979A5/ja
Priority to US15/723,726 priority patent/US10641789B2/en
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Publication of JP6464608B2 publication Critical patent/JP6464608B2/ja
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JP2014166926A 2014-08-15 2014-08-19 物理量センサー、電子機器および移動体 Expired - Fee Related JP6464608B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014166926A JP6464608B2 (ja) 2014-08-19 2014-08-19 物理量センサー、電子機器および移動体
US14/822,041 US9810712B2 (en) 2014-08-15 2015-08-10 Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body
CN201510494373.3A CN105372451B (zh) 2014-08-15 2015-08-12 物理量传感器、物理量传感器装置、电子设备以及移动体
US15/723,726 US10641789B2 (en) 2014-08-15 2017-10-03 Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body

Applications Claiming Priority (1)

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JP2014166926A JP6464608B2 (ja) 2014-08-19 2014-08-19 物理量センサー、電子機器および移動体

Related Child Applications (1)

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JP2019001879A Division JP6665950B2 (ja) 2019-01-09 2019-01-09 物理量センサー、電子機器および移動体

Publications (3)

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JP2016044979A JP2016044979A (ja) 2016-04-04
JP2016044979A5 JP2016044979A5 (enExample) 2017-09-28
JP6464608B2 true JP6464608B2 (ja) 2019-02-06

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JP2014166926A Expired - Fee Related JP6464608B2 (ja) 2014-08-15 2014-08-19 物理量センサー、電子機器および移動体

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6911444B2 (ja) 2017-03-27 2021-07-28 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP6897224B2 (ja) * 2017-03-27 2021-06-30 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP6816603B2 (ja) 2017-03-27 2021-01-20 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008043790B4 (de) * 2008-11-17 2017-04-06 Robert Bosch Gmbh Mikromechanisches Bauelement
JP5681408B2 (ja) * 2010-08-05 2015-03-11 旭化成エレクトロニクス株式会社 静電容量型加速度検出装置及びそのキャリブレーション方法
JP5811634B2 (ja) * 2011-06-30 2015-11-11 セイコーエプソン株式会社 物理量センサー、電子機器
JP5979344B2 (ja) * 2012-01-30 2016-08-24 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5930183B2 (ja) * 2012-04-09 2016-06-08 セイコーエプソン株式会社 物理量センサーおよび電子機器

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