JP6464608B2 - 物理量センサー、電子機器および移動体 - Google Patents
物理量センサー、電子機器および移動体 Download PDFInfo
- Publication number
- JP6464608B2 JP6464608B2 JP2014166926A JP2014166926A JP6464608B2 JP 6464608 B2 JP6464608 B2 JP 6464608B2 JP 2014166926 A JP2014166926 A JP 2014166926A JP 2014166926 A JP2014166926 A JP 2014166926A JP 6464608 B2 JP6464608 B2 JP 6464608B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- fixed electrode
- physical quantity
- quantity sensor
- counter electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 80
- 239000011521 glass Substances 0.000 claims description 12
- 238000000926 separation method Methods 0.000 claims description 12
- 239000011261 inert gas Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 229910052710 silicon Inorganic materials 0.000 description 20
- 239000010703 silicon Substances 0.000 description 20
- 230000001133 acceleration Effects 0.000 description 19
- 239000000463 material Substances 0.000 description 18
- 230000006870 function Effects 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 230000000994 depressogenic effect Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000001413 cellular effect Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 235000015842 Hesperis Nutrition 0.000 description 1
- 235000012633 Iberis amara Nutrition 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 230000036772 blood pressure Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- -1 silver halide Chemical class 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Landscapes
- Pressure Sensors (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014166926A JP6464608B2 (ja) | 2014-08-19 | 2014-08-19 | 物理量センサー、電子機器および移動体 |
| US14/822,041 US9810712B2 (en) | 2014-08-15 | 2015-08-10 | Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body |
| CN201510494373.3A CN105372451B (zh) | 2014-08-15 | 2015-08-12 | 物理量传感器、物理量传感器装置、电子设备以及移动体 |
| US15/723,726 US10641789B2 (en) | 2014-08-15 | 2017-10-03 | Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014166926A JP6464608B2 (ja) | 2014-08-19 | 2014-08-19 | 物理量センサー、電子機器および移動体 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019001879A Division JP6665950B2 (ja) | 2019-01-09 | 2019-01-09 | 物理量センサー、電子機器および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016044979A JP2016044979A (ja) | 2016-04-04 |
| JP2016044979A5 JP2016044979A5 (enrdf_load_stackoverflow) | 2017-09-28 |
| JP6464608B2 true JP6464608B2 (ja) | 2019-02-06 |
Family
ID=55635689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014166926A Expired - Fee Related JP6464608B2 (ja) | 2014-08-15 | 2014-08-19 | 物理量センサー、電子機器および移動体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6464608B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6816603B2 (ja) | 2017-03-27 | 2021-01-20 | セイコーエプソン株式会社 | 物理量センサー、電子機器、および移動体 |
| JP6897224B2 (ja) | 2017-03-27 | 2021-06-30 | セイコーエプソン株式会社 | 物理量センサー、電子機器、および移動体 |
| JP6911444B2 (ja) | 2017-03-27 | 2021-07-28 | セイコーエプソン株式会社 | 物理量センサー、電子機器、および移動体 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008043790B4 (de) * | 2008-11-17 | 2017-04-06 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| JP5681408B2 (ja) * | 2010-08-05 | 2015-03-11 | 旭化成エレクトロニクス株式会社 | 静電容量型加速度検出装置及びそのキャリブレーション方法 |
| JP5811634B2 (ja) * | 2011-06-30 | 2015-11-11 | セイコーエプソン株式会社 | 物理量センサー、電子機器 |
| JP5979344B2 (ja) * | 2012-01-30 | 2016-08-24 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
| JP5930183B2 (ja) * | 2012-04-09 | 2016-06-08 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
-
2014
- 2014-08-19 JP JP2014166926A patent/JP6464608B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016044979A (ja) | 2016-04-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6146565B2 (ja) | 物理量センサー、電子機器、および移動体 | |
| JP6206650B2 (ja) | 機能素子、電子機器、および移動体 | |
| CN103364592B (zh) | 物理量传感器及其制造方法、以及电子设备 | |
| US9470703B2 (en) | Physical quantity sensor and electronic apparatus | |
| US10317425B2 (en) | Functional element, electronic apparatus, and moving object | |
| JP6897663B2 (ja) | センサーデバイス、電子機器、および移動体 | |
| JP6655281B2 (ja) | 物理量センサー、電子機器および移動体 | |
| US9429589B2 (en) | Physical quantity sensor and electronic apparatus | |
| JP6380737B2 (ja) | 電子デバイス、電子機器、および移動体 | |
| JP6146566B2 (ja) | 物理量センサー、電子機器、および移動体 | |
| CN105372451A (zh) | 物理量传感器、物理量传感器装置、电子设备以及移动体 | |
| JP6327384B2 (ja) | 物理量センサー、電子機器、および移動体 | |
| JP6464608B2 (ja) | 物理量センサー、電子機器および移動体 | |
| JP2015001459A (ja) | 機能素子、電子機器、および移動体 | |
| JP6766861B2 (ja) | 物理量センサー、電子機器および移動体 | |
| JP6544058B2 (ja) | 物理量センサー、電子機器および移動体 | |
| JP6665950B2 (ja) | 物理量センサー、電子機器および移動体 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170817 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170817 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180531 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180605 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180731 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180911 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181109 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20181211 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20181224 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6464608 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| LAPS | Cancellation because of no payment of annual fees |