JP6463717B2 - Clogging removal device - Google Patents
Clogging removal device Download PDFInfo
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- JP6463717B2 JP6463717B2 JP2016220012A JP2016220012A JP6463717B2 JP 6463717 B2 JP6463717 B2 JP 6463717B2 JP 2016220012 A JP2016220012 A JP 2016220012A JP 2016220012 A JP2016220012 A JP 2016220012A JP 6463717 B2 JP6463717 B2 JP 6463717B2
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Description
本発明は研磨加工後の研磨テープの研磨面に生じた目詰まりを除去し、使用済みの研磨テープの再使用を図る目詰まり除去装置に関するものである。 The present invention relates to a clogging removing device that removes clogging generated on a polishing surface of a polishing tape after polishing and that reuses a used polishing tape.
従来、この種の目詰まり除去装置として、研磨加工後の使用済みの研磨テープが浸漬通過する超音波洗浄槽を備えてなる構造のものが知られている。 2. Description of the Related Art Conventionally, as this type of clogging removal device, a device having an ultrasonic cleaning tank through which used polishing tape after polishing is passed is known.
すなわち、研磨加工後の使用済みの研磨テープには不可避的に目詰まりが生じ、目詰まりにより研磨テープの研磨特性及び被加工物の被研磨面の加工面性状が低下することになり、このため、研磨加工後の使用済みの研磨テープの目詰まりを除去し、高価な研磨テープを一回の使用で廃棄することなく、数回再使用を可能としようとするものである。 That is, the used polishing tape after polishing is inevitably clogged, and the clogging reduces the polishing characteristics of the polishing tape and the processed surface properties of the surface to be polished of the workpiece. The present invention is intended to remove clogging of a used polishing tape after polishing and to allow reuse of the polishing tape several times without discarding the expensive polishing tape in one use.
しかしながら上記従来構造の場合、上記超音波洗浄槽の構築が必要となり、それだけ、装置の大型化並びに装置コストの高騰を余儀なくされることがあるという不都合を有している。 However, in the case of the conventional structure, it is necessary to construct the ultrasonic cleaning tank, and there is an inconvenience that the size of the apparatus and the cost of the apparatus may be increased.
本発明はこのような不都合を解決することを目的とするもので、本発明のうち、請求項１記載の発明は、研磨加工後の研磨テープを連続的又は間欠的に移送させるテープ移送機構と、該研磨テープの研磨面に洗浄液を供給する洗浄液供給機構を備えてなり、上記洗浄液供給機構に上記洗浄液に超音波振動を重畳する振動重畳ユニットが組み込まれ、該振動重畳ユニットは超音波振動する振動子及び、該振動子により振動され、該洗浄液に振動を重畳する振動重畳部材からなり、該振動重畳部材にスリットをもつ櫛歯部が形成され、該振動重畳部材に該櫛歯部のスリットに上記洗浄液を給送するノズル部が設けられ、上記研磨テープに上記櫛歯部を近接配置して該研磨テープを該櫛歯部のスリットに挿通配置してなることを特徴とする目詰まり除去装置にある。 SUMMARY OF THE INVENTION The present invention aims to solve such inconveniences. Among the present inventions, the invention according to claim 1 is a tape transport mechanism for transporting a polished polishing tape continuously or intermittently. A cleaning liquid supply mechanism for supplying a cleaning liquid to the polishing surface of the polishing tape, and a vibration superimposing unit for superimposing ultrasonic vibration on the cleaning liquid is incorporated in the cleaning liquid supply mechanism, and the vibration superimposing unit vibrates ultrasonically. Composed of a vibrator and a vibration superimposing member that is vibrated by the vibrator and superimposes vibration on the cleaning liquid, a comb tooth portion having a slit is formed on the vibration superimposing member, and a slit of the comb tooth portion is formed on the vibration superimposing member. the cleaning liquid nozzle unit for feeding is provided, and clogging, characterized in that disposed close to the comb teeth in the polishing tape made by inserting positioning the polishing tape into the slit of the comb teeth to In the removed by the device.
又、請求項２記載の発明は、上記研磨テープの移送方向と上記振動重畳部材の櫛歯部のスリットの長さ方向とが所定の交差角をもって交差配置して研磨テープの研磨面に櫛歯部の先端縁部がテープ幅方向に配置され、上記研磨テープを該櫛歯部のスリットに挿通配置してなることを特徴とするものであり、又、請求項３記載の発明は、上記櫛歯部のスリットは複数個形成されていることを特徴とするものである。 According to a second aspect of the present invention, the transfer direction of the polishing tape and the length direction of the slits of the comb teeth portion of the vibration superimposing member are arranged to intersect with each other at a predetermined crossing angle. The tip edge portion of the portion is arranged in the tape width direction, and the polishing tape is inserted into the slit of the comb tooth portion, and the invention according to claim 3 is characterized in that A plurality of slits in the tooth portion are formed.
本発明は上述の如く、請求項１記載の発明にあっては、洗浄液供給機構に組み込まれた振動重畳ユニットにより洗浄液に超音波振動が重畳され、振動重畳ユニットは超音波振動する振動子及び、振動子により振動され、洗浄液に振動を重畳する振動重畳部材からなり、振動重畳部材にスリットをもつ櫛歯部が形成され、振動重畳部材に櫛歯部のスリットに上記洗浄液を給送するノズル部が設けられ、研磨テープに上記櫛歯部が近接配置され、洗浄液に超音波振動が重畳されたことにより洗浄液にキャビテーション現象が生起され、洗浄液のキャビテーション現象により研磨テープの研磨面に局部的な衝撃力が付与され、キャビテーション効果により研磨テープの研磨面の目詰まりを除去することができ、研磨加工によって生じた研磨加工後のいわゆる使用済みの研磨テープの研磨面の目詰まりを除去することができ、使用済みの研磨テープを未使用の研磨テープに近い状態で再使用することができ、高価な研磨テープを一回の使用で廃棄することなく、数回再使用することが可能となり、高価な研磨テープの再使用により研磨テープの無駄を抑制することができ、それだけ、経済性を高めることができると共に研磨作業性を向上することができ、さらに、上記研磨テープは上記櫛歯部のスリットに挿通配置されているから、研磨テープの研磨面と櫛歯部のスリット内面とが近接し、超音波振動による洗浄液のキャビテーション現象が研磨面に良好に作用し、それだけ、目詰まり除去を良好に行うことができる。 As described above, according to the present invention, ultrasonic vibration is superimposed on the cleaning liquid by the vibration superimposing unit incorporated in the cleaning liquid supply mechanism, and the vibration superimposing unit is a vibrator that ultrasonically vibrates; A nozzle part that is composed of a vibration superimposing member that is vibrated by a vibrator and superimposes vibration on the cleaning liquid. The vibration superimposing member has a comb tooth portion having a slit, and the vibration superimposing member feeds the cleaning liquid to the slit of the comb tooth portion. The comb teeth are arranged close to the polishing tape, and ultrasonic vibration is superimposed on the cleaning liquid, causing cavitation phenomenon in the cleaning liquid, and local impact on the polishing surface of the polishing tape due to the cavitation phenomenon of the cleaning liquid. Force is applied, and the clogging of the polishing surface of the polishing tape can be removed by the cavitation effect. It is possible to remove clogging of the polished surface of the used polishing tape, and the used polishing tape can be reused in a state close to an unused polishing tape. It can be reused several times without being discarded in use, and the waste of the polishing tape can be suppressed by reusing the expensive polishing tape, so that the economy can be improved and the polishing workability can be improved. Furthermore, since the polishing tape is inserted through the slit of the comb tooth portion, the polishing surface of the polishing tape and the slit inner surface of the comb tooth portion are close to each other, and cavitation of the cleaning liquid by ultrasonic vibration is performed. The phenomenon works well on the polished surface, and accordingly, clogging can be removed well.
又、請求項２記載の発明にあっては、上記研磨テープの移送方向と上記振動重畳部材の櫛歯部のスリットの長さ方向とが所定の交差角をもって交差配置して研磨テープの研磨面に櫛歯部の先端縁部がテープ幅方向に配置され、上記研磨テープを櫛歯部のスリットに挿通配置してなるから、超音波振動の振幅が大きな櫛歯部の先端縁部が研磨テープのテープ幅方向に配置されることになり、超音波振動による洗浄液のキャビテーション現象が研磨面に良好に作用し、それだけ、目詰まり除去を良好に行うことができ、又、請求項３記載の発明にあっては、上記櫛歯部のスリットは複数個形成されているから、櫛歯部の超音波振動が良好になされ、超音波振動による洗浄液のキャビテーション現象が研磨面に良好に作用し、それだけ、目詰まり除去を良好に行うことができる。 Further, in the invention described in claim 2, the polishing of the polishing tape by the length direction of the slit of the comb teeth of the transfer direction and the vibration superposition member above Symbol abrasive tape is crossed configuration with a predetermined crossing angle The tip edge of the comb tooth portion is arranged in the tape width direction on the surface, and the above polishing tape is inserted through the slit of the comb tooth portion, so that the tip edge portion of the comb tooth portion having a large ultrasonic vibration amplitude is polished. The tape is disposed in the tape width direction of the tape, and the cavitation phenomenon of the cleaning liquid due to the ultrasonic vibration works well on the polished surface . In the invention, since the plurality of slits of the comb tooth portion are formed, the ultrasonic vibration of the comb tooth portion is made good, and the cavitation phenomenon of the cleaning liquid due to the ultrasonic vibration works well on the polished surface, That's it for clogging It is possible to perform well.
図１乃至図１２は本発明の実施の形態例を示し、図１乃至図５は第一形態例、図６、図７は第二形態例、図８は参考形態例、図９は別の参考形態例、図１０は第三形態例、図１１、図１２はさらに別の参考形態例である。 1 to 12 show an embodiment of the present invention, FIGS. 1 to 5 show a first embodiment, FIGS. 6 and 7 show a second embodiment, FIG. 8 shows a reference embodiment , and FIG. 9 shows another embodiment . reference embodiment, FIG. 10 is a third embodiment, FIG. 11, FIG. 12 is yet another reference embodiment.
図１乃至図５の第一形態例にあっては、大別すると、研磨加工後の研磨テープＴを連続的又は間欠的に移送させるテープ移送機構Ａと、研磨テープＴの研磨面Ｔ１に洗浄液Ｌを供給する洗浄液供給機構Ｂから構成されている。 In the first embodiment shown in FIGS. 1 to 5, when roughly classified, the tape transfer mechanism A that transfers the polishing tape T after polishing processing continuously or intermittently, and the polishing surface T 1 of the polishing tape T are provided. The cleaning liquid supply mechanism B supplies the cleaning liquid L.
この場合、上記研磨テープＴの研磨面Ｔ１となる一方の面の研磨面Ｔ１にポリエステルフィルム、メタル、クロス等の基材に酸化アルミニウム、酸化クロム、シリコンカーバイド、ダイヤモンド等の所定の研磨砥粒をコーティング又は結合してなる構造となっており、又、上記洗浄液Ｌの種類として、水溶性、エマルジョン系、鉱物油系の洗浄液Ｌが用いられる。 In this case, the polyester film on the polished surface T 1 of the polishing surface T 1 to become one surface of the polishing tape T, metal, base to aluminum oxide such as a cross, chromium oxide, silicon carbide, predetermined polishing abrasive such as diamond The structure is formed by coating or bonding grains, and as the type of the cleaning liquid L, a water-soluble, emulsion-based, or mineral oil-based cleaning liquid L is used.
この場合、上記テープ移送機構Ａにあっては、図１、図２の如く、機台１に配置され、上記研磨テープＴを巻回した実リール２から空リール３へと研磨テープＴを間欠的又は連続的に移送させる移送機構Ａ１からなり、移送機構Ａ１は実リール２から研磨テープＴを巻き解く巻解用モータ４、巻き解かれた研磨テープＴに逆張力を付与すると共に研磨テープＴに逆張力を付与しつつ研磨テープＴを繰り出す繰出ロール５及び繰出用モータ６、繰り出された研磨テープＴを入側案内ロール７から出側案内ロール８へ案内し、出側案内ロール８及び案内ロール９・１０を経て研磨テープＴを移送させる移送ロール１１及び移送用モータ１２、移送されてくる研磨テープＴを空リール３に巻き取る巻取用モータ１３を備えて構成している。 In this case, in the tape transfer mechanism A, as shown in FIGS. 1 and 2, the polishing tape T is intermittently disposed from the actual reel 2 around which the polishing tape T is wound to the empty reel 3. or continuously made from the transport mechanism a 1 for transferring, polishing with the transfer mechanism a 1 is wound solutions motor 4 unwinding the abrasive tape T from the actual reel 2, imparts back tension to the unwound abrasive tape T The feeding roll 5 and the feeding motor 6 for feeding the polishing tape T while applying reverse tension to the tape T, and the fed polishing tape T are guided from the entrance guide roll 7 to the exit guide roll 8, and the exit guide roll 8. And a transfer roll 11 and a transfer motor 12 for transferring the polishing tape T through the guide rolls 9 and 10, and a winding motor 13 for winding the transferred polishing tape T around the empty reel 3.
又、この場合、上記洗浄液供給機構Ｂにあっては、図３、図４、図５の如く、上記洗浄液Ｌに超音波振動を重畳する振動重畳ユニットＢ１が組み込まれ、振動重畳ユニットＢ１は超音波振動する振動子１４及び、振動子１４により振動され、洗浄液Ｌに振動を重畳する振動重畳部材１５からなり、この場合、振動子１４としてランジュバン振動子が用いられ、振動重畳部材１５は図外の保持手段により位置固定され、振動重畳部材１５に、この場合、三個のスリット１６ａ・１６ａ・１６ａをもつ櫛歯部１６が形成され、振動重畳部材１５に櫛歯部１６のスリット１６ａ・・に上記洗浄液Ｌを給送する対向一対の四個のノズル部１５ａ・・が設けられ、ノズル部１５ａ・・と各スリット１６ａ・・との間に二個の連通路１５ｂ・・及び三個ずつ計六個の吹き出し口１５ｃ・・を形成すると共にノズル部１５ａ・・を四個の継手１７・・及び四個の送出管１８を経て図外の洗浄液供給源に接続し、振動子１４には図示省略の電源、駆動周波数を発生させる信号発生器及び信号を増幅する増幅器が接続され、研磨テープＴの研磨面Ｔ１に上記櫛歯部１６を近接配置して構成している。 Further, in this case, in the above cleaning liquid supply mechanism B, fig. 3, 4, as shown in FIG. 5, the vibration superimposing unit B 1 to be superimposed ultrasonic vibration to the cleaning liquid L is incorporated, the vibration superimposing unit B 1 Is composed of a vibrator 14 that vibrates ultrasonically and a vibration superimposing member 15 that is vibrated by the vibrator 14 and superimposes the vibration on the cleaning liquid L. In this case, a Langevin vibrator is used as the vibrator 14, and the vibration superimposing member 15 is The position is fixed by a holding means (not shown), and in this case, the vibration superimposing member 15 is formed with a comb tooth portion 16 having three slits 16a, 16a, 16a. .. are provided with a pair of opposed four nozzle portions 15a for feeding the cleaning liquid L, and two communication passages 15b between the nozzle portion 15a and each slit 16a. Pieces A total of six outlets 15c are formed, and the nozzle portion 15a is connected to a cleaning liquid supply source (not shown) via four joints 17 and four delivery pipes 18 to the vibrator 14. the not shown power source, an amplifier for amplifying a signal generator and a signal to generate a driving frequency is connected, and constitutes the polishing surface T 1 of the polishing tape T placed close the comb teeth 16.
しかして、図外の洗浄液供給源からの洗浄液Ｌは、図４の如く、上記振動重畳部材１５のノズル部１５ａ、内部の連通路１５ｂ・・及び吹き出し口１５ｃ・・を介して櫛歯部１６のスリット１６ａ内に給送噴出され、振動重畳部材１５の超音波振動によりスリット１６ａ内に給送噴出された洗浄液Ｌに振動が重畳され、超音波振動が重畳された洗浄液Ｌは研磨テープＴの研磨面Ｔ１に流下し、又は、研磨テープＴを伝って供給されることになる。 Accordingly, as shown in FIG. 4, the cleaning liquid L from the cleaning liquid supply source (not shown) passes through the nozzle portion 15a of the vibration superimposing member 15, the internal communication passage 15b,. The cleaning liquid L fed into the slit 16a and superposed on the cleaning liquid L fed into the slit 16a by the ultrasonic vibration of the vibration superimposing member 15 is superposed on the polishing tape T. It flows down to the polishing surface T 1, or will be supplied along the polishing tape T.
この場合、図３、図４、図５の如く、上記研磨テープＴは上記櫛歯部１６の三個のスリット１６ａ・・の内の中央のスリット１６ａに挿通配置されている。 In this case, as shown in FIGS. 3, 4, and 5, the polishing tape T is inserted into the central slit 16 a among the three slits 16 a.
この実施の第一形態例は上記構成であるから、洗浄液供給機構Ｂに組み込まれた振動重畳ユニットＢ１により洗浄液Ｌに超音波振動が重畳され、振動重畳ユニットＢ１は超音波振動する振動子１４及び、振動子１４により振動され、洗浄液Ｌに振動を重畳する振動重畳部材１５からなり、振動重畳部材１５にスリット１６ａ・・をもつ櫛歯部１６が形成され、振動重畳部材１５に櫛歯部１６のスリット１６ａに上記洗浄液Ｌを給送するノズル部１５ａ・・が設けられ、研磨テープＴに上記櫛歯部１６が近接配置され、超音波振動が重畳された洗浄液Ｌは研磨テープＴの研磨面Ｔ１に供給され、洗浄液Ｌに超音波振動が重畳されたことにより洗浄液Ｌにキャビテーション現象が生起され、洗浄液Ｌのキャビテーション現象により研磨テープＴの研磨面Ｔ１に局部的な衝撃力が付与され、キャビテーション効果により研磨テープＴの研磨面Ｔ１の目詰まりを除去することができ、研磨加工によって生じた研磨加工後のいわゆる使用済みの研磨テープＴの研磨面Ｔ１の目詰まりを除去することができ、使用済みの研磨テープＴを未使用の研磨テープＴに近い状態で再使用することができ、高価な研磨テープＴを一回の使用で廃棄することなく、数回再使用することが可能となり、高価な研磨テープＴの再使用により研磨テープＴの無駄を抑制することができ、それだけ、経済性を高めることができると共に研磨作業性を向上することができる。 Since the first embodiment of the present embodiment has the above-described configuration, ultrasonic vibration is superimposed on the cleaning liquid L by the vibration superimposing unit B 1 incorporated in the cleaning liquid supply mechanism B, and the vibration superimposing unit B 1 is a vibrator that ultrasonically vibrates. 14 and a vibration superimposing member 15 that is vibrated by the vibrator 14 and superimposes the vibration on the cleaning liquid L. The vibration superimposing member 15 is formed with a comb tooth portion 16 having slits 16 a. A nozzle portion 15a for feeding the cleaning liquid L is provided in the slit 16a of the portion 16, the comb tooth portion 16 is disposed in proximity to the polishing tape T, and the cleaning liquid L on which ultrasonic vibration is superimposed is applied to the polishing tape T. is supplied to the polishing surface T 1, cavitation in the cleaning liquid L by ultrasonic vibrations to the cleaning liquid L is superimposed is occurring, the polishing tape T by cavitation of the cleaning liquid L Localized impact force is applied to the polishing surface T 1, cavitation effect makes it possible to eliminate the clogging of the polishing surface T 1 of the polishing tape T, so-called spent abrasive tape after polishing caused by grinding can be removed clogging of the polishing surface T 1 of the T, it is possible to re-use the used abrasive tape T in a state close to the abrasive tape T unused single use expensive abrasive tape T Can be reused several times without being discarded, and the waste of the polishing tape T can be suppressed by reusing the expensive polishing tape T, so that the economy can be improved and the polishing workability can be improved. Can be improved.
この場合、上記研磨テープＴは上記櫛歯部１６のスリット１６ａに挿通配置されているから、研磨テープＴの研磨面Ｔ１と櫛歯部１６のスリット１６ａ内面とが近接し、超音波振動による洗浄液Ｌのキャビテーション現象が研磨面Ｔ１に良好に作用し、それだけ、目詰まり除去を良好に行うことができる。 In this case, since the polishing tape T is inserted and arranged in the slit 16a of the comb teeth 16, and the slit 16a inner surface of the polished surface T 1 and the comb portion 16 of the abrasive tape T is close, by ultrasonic vibrations cavitation of the cleaning liquid L is favorably acts on the polishing surface T 1, it just can be carried out satisfactorily clogging removal.
又、この場合、上記櫛歯部１６のスリット１６ａは複数個形成されているから、櫛歯部１６の超音波振動が良好になされ、超音波振動による洗浄液Ｌのキャビテーション現象が研磨面Ｔ１に良好に作用し、それだけ、目詰まり除去を良好に行うことができる。 Further, in this case, since the slit 16a of the comb teeth 16 are formed in plural, ultrasonic vibration of the comb tooth portion 16 is made better, cavitation of the cleaning liquid L by the ultrasonic vibration to the polishing surface T 1 It works well, and it can remove clogging well.
図６、図７の第二形態例は別例構造を示し、この場合、研磨テープＴの移送方向Ｔ２と上記振動重畳部材１５の櫛歯部１６のスリット１６ａの長さ方向１６ｂとが所定の交差角θをもって交差配置して研磨テープＴの研磨面Ｔ１に櫛歯部１６の先端縁部１６ｄがテープ幅Ｔ３方向に配置され、研磨テープＴを櫛歯部１６のスリット１６ａに挿通配置し、その他は上記第一形態例と同様な構造となっている。 6, the second embodiment of FIG. 7 shows another example structure, in this case, the length direction 16b of the slit 16a of the comb-tooth portion 16 of the transport direction T 2 and the vibration superposition member 15 of the abrasive tape T is given leading edge 16d of the polishing surface T 1 in a tooth portion 16 of with a crossing angle θ crossed configuration to the polishing tape T is arranged in the tape width T 3 direction, through the abrasive tape T to the slit 16a of the comb teeth 16 The other structure is the same as that of the first embodiment.
この第二形態例にあっては、超音波振動の振幅が大きな櫛歯部１６の先端縁部１６ｄが研磨テープＴのテープ幅Ｔ３方向に配置され、研磨テープＴを櫛歯部１６のスリット１６ａに挿通配置しているから、超音波振動による洗浄液Ｌのキャビテーション現象が研磨面Ｔ１に良好に作用し、それだけ、目詰まり除去を良好に行うことができ、上記第一形態例と同様な作用効果を得ることができる。 The In the second embodiment, leading edge 16d of the amplitude of the ultrasonic vibration is large comb teeth 16 are arranged in the tape width T 3 direction of the polishing tape T, the abrasive tape T comb portion 16 slit because they placed through the 16a, cavitation of the cleaning liquid L by the ultrasonic vibration favorably acts on the polishing surface T 1, it just can be carried out satisfactorily clogging removal, similar to the first embodiment An effect can be obtained.
図８の参考形態例は別例構造を示し、この場合、上記櫛歯部１６の先端面１６ｃを上記研磨テープＴの研磨面Ｔ１に近接配置し、研磨テープＴの移送方向Ｔ２とスリット１６ａの幅方向とが直交する状態に配置され、その他は上記第一形態例と同様な構造となっている。 Reference embodiment of FIG. 8 shows another example structure, in this case, the front end face 16c of the comb teeth 16 disposed close to the polishing surface T 1 of the above abrasive tape T, the transport direction T 2 and the slit of the polishing tape T 16a is arranged in a state orthogonal to the width direction, and the other structure is the same as that of the first embodiment.
図９の別の参考形態例は別例構造を示し、この場合、上記櫛歯部１６の先端面１６ｃを上記研磨テープＴの研磨面Ｔ１に近接配置し、研磨テープＴの移送方向Ｔ２とスリット１６ａの幅方向とが同方向に配置され、その他は上記第一形態例と同様な構造となっている。 Another reference embodiment example of FIG. 9 shows another example structure, in this case, the front end face 16c of the comb teeth 16 disposed close to the polishing surface T 1 of the above abrasive tape T, the transport direction T 2 of the polishing tape T And the width direction of the slit 16a are arranged in the same direction, and the others have the same structure as the first embodiment.
これら参考形態例及び別の参考形態例にあっても、超音波振動の振幅が大きな櫛歯部１６の先端面１６ｃが研磨テープＴの研磨面Ｔ１に近接配置されているから、超音波振動による洗浄液Ｌのキャビテーション現象が研磨面Ｔ１に良好に作用し、それだけ、目詰まり除去を良好に行うことができ、上記第一形態例と同様な作用効果を得ることができる。 Even in these references embodiments and another reference embodiment, since the amplitude of the ultrasonic vibration distal end surface 16c of the large comb teeth 16 are arranged close to the polishing surface T 1 of the polishing tape T, the ultrasonic vibration cavitation in by the cleaning solution L is favorably acts on the polishing surface T 1, only that, it is possible to satisfactorily perform the clogging removal, it is possible to obtain the same effects as the first embodiment.
図１０の第三形態例は別例構造を示し、この場合、櫛歯部１６のスリット１６ａを五個形成し、研磨テープＴを二個の折返ロールＲ１・Ｒ１により折り返して三個のスリット１６ａ・・に挿通配置して構成している。 The third embodiment shown in FIG. 10 shows another structure. In this case, five slits 16a of the comb teeth portion 16 are formed, and the polishing tape T is folded by two folding rolls R 1 and R 1 to form three slits 16a. It is configured by being inserted into the slits 16a.
この第三形態例にあっても、超音波振動による洗浄液Ｌのキャビテーション現象が研磨面Ｔ１に良好に作用し、それだけ、目詰まり除去を良好に行うことができ、上記第一形態例と同様な作用効果を得ることができる。 Also in this third embodiment, cavitation of the cleaning liquid L by the ultrasonic vibration favorably acts on the polishing surface T 1, it just can be carried out satisfactorily clogging removal, as with the first embodiment Advantageous effects can be obtained.
図１１、図１２のさらに別の参考形態例は別例構造を示し、この場合、上記振動重畳部材１５の櫛歯部１６を折曲形成し、櫛歯部１６に三個のスリット１６ａ・１６ａ・１６ａを形成し、櫛歯部１６の折曲面１６ｅを研磨テープＴの研磨面Ｔ１に近接配置して構成している。 11, yet another reference embodiment example of FIG. 12 shows another example structure, in this case, the comb teeth 16 of the vibration superimposing member 15 is bent form, the comb teeth 16 three slits 16a · 16a · 16a is formed to constitute disposed close to bent surface 16e of the comb teeth 16 on the polishing surface T 1 of the polishing tape T.
このさらに別の参考形態例にあっても、上記第一形態例と同様な作用効果を得ることができる。 Even in this further reference embodiment , the same effects as the first embodiment can be obtained.
上記図６、図７の実施の第二形態例を参照し、振動重畳部材１５は、この場合、６ＡＬ−４Ｖ−Ｔｉ、いわゆる６４チタン合金製の２５ｍｍ×２５ｍｍ×８８ｍｍのほぼ四角柱状に形成され、スリット１６ａとして幅２ｍｍのスリットが六個形成され、スリット長さは４５ｍｍとされ、研磨時の実験条件として、テープ幅Ｔ３が２５ｍｍの研磨テープＴを用い、研磨テープＴの送り速度を３０ｍｍ／ｍｉｎ、被加工物の回転数７０ｍ／ｍｉｎ、図示省略の圧接ロールの偏心揺振回転数を１，０００ｒｐｍ、図示省略の圧接ロールによる研磨テープＴを経た被加工物への加圧力を０．１５ＭＰａとし、被加工物の材料には直径３０ｍｍのＳ４５Ｃ材を用いた。また、洗浄液Ｌには水溶性切削油（ユシロ科学製ユシローケンＦＧＳ６９０・ｓｙｎｔｈｅｔｉｃ ｔｙｐｅ）を用いて研磨を行った。また回転中の被加工物に未使用の研磨テープＴを２０秒間だけ押し付けることで目詰まりを発生させた。 With reference to the second embodiment shown in FIGS. 6 and 7, the vibration superimposing member 15 is, in this case, formed in a substantially square column shape of 25 mm × 25 mm × 88 mm made of 6AL-4V-Ti, so-called 64 titanium alloy. , slit width 2mm as the slit 16a is six formed, slit length is set to 45 mm, 30 mm as the experimental conditions during polishing, tape width T 3 is used abrasive tape T 25 mm, a feed speed of the polishing tape T / Min, the rotation speed of the workpiece 70 m / min, the eccentric vibration rotation speed of the pressure contact roll (not shown) is 1,000 rpm, and the pressure applied to the work piece through the polishing tape T by the pressure roll (not shown) is 0. The S45C material having a diameter of 30 mm was used as the workpiece material. Further, the cleaning liquid L was polished using a water-soluble cutting oil (Yushiroken FGS690 / synthetic type manufactured by Yushiro Kagaku). Moreover, clogging was generated by pressing the unused polishing tape T against the rotating workpiece for only 20 seconds.
この場合、洗浄液Ｌに超音波振動を重畳すると、洗浄液Ｌ中にキャビテーション現象が発生して局部的に大きな力が作用し、洗浄効果が発生する。この性質を用いて、研磨テープＴの目詰まりを除去する。ランジュバン振動子に振動重畳部材１５を組み合わせた振動重畳ユニットＢ１を採用した。 In this case, when the ultrasonic vibration is superimposed on the cleaning liquid L, a cavitation phenomenon occurs in the cleaning liquid L, and a large force acts locally to generate a cleaning effect. Using this property, clogging of the polishing tape T is removed. Langevin adopted the vibration superimposing unit B 1 which is a combination of vibration superimposed member 15 to the vibrator.
又、この場合、振動重畳部材１５の櫛歯部１６のスリット１６ａ内に目詰まりした研磨テープＴを挿通し、振動重畳ユニットＢ１を周波数２８．２ｋＨｚ、出力４０Ｗで駆動させる。振動重畳ユニットＢ１は櫛歯部１６の先端縁部１６ｄにかけて振幅が大きくなるため、超音波洗浄に偏りが出来ないように振動重畳ユニットＢ１を研磨テープＴに対してθ＝４５°傾けることで、超音波振動の振幅が大きな櫛歯部１６の先端縁部１６ｄを通過するように配置した。振動重畳ユニットＢ１には櫛歯部１６の根元から、先端縁部１６ｄへ洗浄液Ｌを供給する機能が備わっており、これを利用して、櫛歯部１６に６リットル／ｍｉｎの洗浄液Ｌを供給する。この結果、櫛歯部１６の先端縁部１６ｄでは洗浄液Ｌ中に継続的なキャビテーション現象が発生し、目詰まりを除去できる。テープユニットによってテープ研磨加工と同じ、即ち、３０ｍｍ／ｍｉｎで研磨テープＴを巻取移送させながら超音波洗浄を行った。 Further, in this case, the abrasive tape T which has been clogged in the slit 16a of the comb-tooth portion 16 of the vibration superimposing member 15 is inserted, the frequency 28.2kHz vibrations superimposing unit B 1, is driven by the output 40W. Since the vibration superimposing unit B 1 represents the amplitude increases to the tip end portion 16d of the comb tooth 16, the vibration superimposing unit B 1 so as not to bias the tilting theta = 45 ° relative to the polishing tape T in ultrasonic cleaning Thus, the ultrasonic vibration is arranged so as to pass through the tip edge portion 16d of the comb tooth portion 16 having a large amplitude. The vibration superimposing unit B 1 has a function of supplying the cleaning liquid L from the root of the comb tooth portion 16 to the tip edge portion 16d. By using this, the cleaning liquid L is supplied to the comb tooth portion 16 at 6 liters / min. Supply. As a result, a continuous cavitation phenomenon occurs in the cleaning liquid L at the tip edge portion 16d of the comb tooth portion 16, and clogging can be removed. Ultrasonic cleaning was performed while winding and transporting the polishing tape T at the same rate as the tape polishing processing, that is, 30 mm / min.
この実験の結果については、研磨テープＴの表面の観察はマイクロスコープ（ＫＥＹＥＮＣＥ製ＶＨＸ−１００）で撮影し、画像を二値化して目詰まり面積を求めた。二値化処理とは画像の濃淡を２５５段階で評価し、或る、しきい値で白と黒の二階調に変換する処理である。研磨による除去体積量の測定には電気マイクロメータ（Ｍａｈｒ製ｍｉｌｌｉｔｒｏｎ１２０２ＩＣ）を使用し、未研磨部に対する研磨部との段差を均等に５箇所測定し、平均値を求めた。被加工面の表面粗さは表面粗さ測定器（ミツトヨ製ＳＶ−３０００）で測定した。 As for the result of this experiment, the surface of the polishing tape T was observed with a microscope (VHX-100 manufactured by KEYENCE), and the image was binarized to obtain the clogging area. The binarization process is a process of evaluating the density of an image in 255 levels and converting it into a two-tone gray scale of white and black with a certain threshold value. For measurement of the volume removed by polishing, an electric micrometer (Millitron 1202IC manufactured by Mahr) was used, and five steps with respect to the unpolished portion were uniformly measured to obtain an average value. The surface roughness of the work surface was measured with a surface roughness meter (SV-3000 manufactured by Mitutoyo).
上記実験の結果、未使用の研磨テープＴ、使用済みの目詰まりした研磨テープＴ、目詰まり除去後の研磨テープＴでの単位時間あたりの除去体積量を比較した。未使用の研磨テープＴによる除去体積量が平均０．３５μｍ３／ｓｅｃに対して使用済みの目詰まりした研磨テープＴによる除去体積量が平均０．１３μｍ３／ｓｅｃ、目詰まり除去後の研磨テープＴが平均０．３μｍ３／ｓｅｃである。すなわち、目詰まりによって低下した研磨能率を、超音波洗浄の効果によって８６％まで復元できたことがわかる。また、被加工面の表面粗さを算術平均粗さを用いて評価した。未使用の研磨テープＴで加工した箇所では０．０７μｍ、使用済みの目詰まりした研磨テープＴで加工した箇所は０．０５μｍ、目詰まり除去後の研磨テープＴで加工した箇所では０．０６μｍとなった。超音波洗浄により目詰まりが除去されたことで、目詰まり除去後の研磨テープＴで加工した箇所の表面粗さが未使用の研磨テープＴで加工した箇所の表面粗さに近づいたものと考えられる。これは、目詰まりは、被削材の除去能力が低下する一方で、バニッシ効果によって表面粗さを向上させたのだと考えられる。よって、超音波洗浄によって目詰まりが除去されたことで加工能力が復元したと考えられる。 As a result of the above-mentioned experiment, the removal volume per unit time was compared between the unused polishing tape T, the used clogged polishing tape T, and the polishing tape T after clogging was removed. The removal volume by the used clogged polishing tape T is 0.13 μm 3 / sec on average while the removal volume by the unused polishing tape T is 0.35 μm 3 / sec on average, and the polishing tape after clogging is removed T is an average of 0.3 μm 3 / sec. That is, it can be seen that the polishing efficiency reduced by clogging can be restored to 86% by the effect of ultrasonic cleaning. Further, the surface roughness of the work surface was evaluated using the arithmetic average roughness. 0.07 μm at the place processed with the unused polishing tape T, 0.05 μm at the place processed with the used clogged polishing tape T, and 0.06 μm at the place processed with the polishing tape T after clogging was removed. became. It is considered that the surface roughness of the portion processed with the polishing tape T after removal of the clogging has approached the surface roughness of the portion processed with the unused polishing tape T by removing the clogging by ultrasonic cleaning. It is done. This is thought to be because the clogging improved the surface roughness due to the burnishing effect while reducing the ability to remove the work material. Therefore, it is considered that the processing capability was restored by removing the clogging by ultrasonic cleaning.
又、それぞれの研磨テープＴ表面を撮影した画像と、二値化した画像を比較した結果、しきい値は未使用の研磨テープＴがほぼ全て白（ＲＧＢ値ＦＦＦＦＦＦ）になる値を基準とし１００とし、撮影範囲２．７ｍｍ×２．７ｍｍにおいて、二値化後の黒い部分（ＲＧＢ値００００００）の割合はそれぞれ使用済みの目詰まりした研磨テープＴで９１％、目詰まり除去後の研磨テープＴで１８％となり、ある程度の目詰まりが除去され、研磨テープＴ表面の画像からも目詰まりが除去されていることが確認された。 Further, as a result of comparing the image obtained by photographing the surface of each polishing tape T with the binarized image, the threshold value is based on the value at which the unused polishing tape T is almost all white (RGB value FFFFFF). In the photographing range of 2.7 mm × 2.7 mm, the ratio of the black portion after binarization (RGB value 000000) is 91% for the used clogged polishing tape T, and the polishing tape T after clogging is removed. Thus, it was confirmed that clogging was removed to some extent, and clogging was also removed from the image on the surface of the polishing tape T.
したがって、上記実施例において、観察によって目詰まりが除去されていることが確認され、未使用の研磨テープＴ、使用済みの目詰まりした研磨テープＴ、目詰まり除去後の研磨テープＴをそれぞれ比較することで、目詰まり除去により研磨量、表面粗さが未使用のものに近づき、加工能力が復元したことがわかり、また、研磨テープＴ表面の画像からも目詰まりが除去されていることが確認され、研磨テープＴの目詰まり除去により加工能力の復元が確認された。 Therefore, in the above embodiment, it is confirmed that clogging is removed by observation, and the unused polishing tape T, the used clogged polishing tape T, and the polishing tape T after clogging are compared, respectively. By removing clogging, it can be seen that the polishing amount and surface roughness approached those of unused ones, and that the processing capacity has been restored, and that clogging has been removed from the image on the surface of the polishing tape T. The restoration of the processing capability was confirmed by removing the clogging of the polishing tape T.
尚、本発明は上記実施の形態例に限られるものではなく、テープ移送機構Ａ、洗浄液供給機構Ｂ、振動重畳ユニットＢ１、振動重畳部材１５、櫛歯部１６、スリット１６ａの数や形態、構造等は適宜変更して設計されるものである。 The present invention is not limited to the above embodiment, and the number and form of the tape transfer mechanism A, the cleaning liquid supply mechanism B, the vibration superimposing unit B 1 , the vibration superimposing member 15, the comb tooth portion 16, and the slit 16a, The structure and the like are designed with appropriate changes.
以上、所期の目的を充分達成することができる。 As described above, the intended purpose can be sufficiently achieved.
Ｔ 研磨テープ
Ｔ１ 研磨面
Ｔ２ 移送方向
Ｔ３ テープ幅
Ａ テープ移送機構
Ｂ 洗浄液供給機構
Ｂ１ 振動重畳ユニット
Ｌ 洗浄液
θ 交差角
１４ 振動子
１５ 振動重畳部材
１５ａ ノズル部
１６ 櫛歯部
１６ａ スリット
１６ｂ 長さ方向
１６ｃ 先端面
１６ｄ 先端縁部
T polishing tape T 1 polishing surface T 2 transfer direction T 3 tape width A tape transfer mechanism B cleaning liquid supply mechanism B 1 vibration superimposing unit L cleaning liquid θ crossing angle 14 vibrator 15 vibration superimposing member 15a nozzle part 16 comb tooth part 16a slit 16b Length direction 16c Tip surface 16d Tip edge
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| JPS6327256U (en) * | 1986-08-04 | 1988-02-23 | ||
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| JP2011177842A (en) * | 2010-03-02 | 2011-09-15 | Ebara Corp | Polishing apparatus and method |
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