JP6461636B2 - Substrate processing equipment - Google Patents

Description

  The present invention relates to a substrate processing apparatus for processing a substrate. Examples of substrates to be processed include semiconductor wafers, liquid crystal display substrates, plasma display substrates, FED (Field Emission Display) substrates, optical disk substrates, magnetic disk substrates, magneto-optical disk substrates, and photomasks. Substrate, ceramic substrate, solar cell substrate and the like.

  Patent Document 1 discloses a single-wafer type substrate processing apparatus that processes substrates such as semiconductor wafers one by one. The substrate processing apparatus includes a spin chuck that rotates while holding the substrate horizontally, and a nozzle that discharges a processing solution having a temperature higher than room temperature toward the center of the upper surface of the substrate held by the spin chuck. . The high-temperature processing liquid discharged from the nozzle is deposited on the center of the upper surface of the substrate and then flows outward along the upper surface of the rotating substrate. Thereby, a high-temperature processing liquid is supplied to the entire upper surface of the substrate.

JP 2006-344907 A

  The processing liquid that has reached the center of the upper surface of the rotating substrate flows from the center to the peripheral edge along the upper surface of the substrate. In the process, the temperature of the treatment liquid gradually decreases. For this reason, the uniformity of temperature is lowered, and the uniformity of processing is deteriorated. If the flow rate of the processing liquid discharged from the nozzle is increased, the time until the processing liquid reaches the peripheral edge of the upper surface of the substrate is shortened, so that the temperature drop of the processing liquid is reduced. Consumption will increase.

  Accordingly, one of the objects of the present invention is to improve the processing uniformity while reducing the consumption of the processing liquid supplied to the substrate.

In order to achieve the above object, the invention according to claim 1, wherein the substrate is held by the substrate holding unit, the substrate holding unit rotating the substrate around the vertical rotation axis passing through the central portion of the substrate while holding the substrate horizontally. A substrate holding a substrate, a fluid box arranged in a horizontal direction with the chamber, and a processing liquid containing a first liquid and a second liquid that generate heat by being mixed with each other. And a processing liquid supply system for supplying the substrate.
The processing liquid supply system includes a supply flow path, a plurality of upstream flow paths, a plurality of component liquid flow paths, a plurality of discharge ports, and a mixing ratio changing unit. The supply channel guides the first liquid toward the plurality of upstream channels. The plurality of upstream channels are branched from the supply channel in the fluid box, and guide the first liquid supplied from the supply channel toward the plurality of discharge ports. The plurality of component liquid channels are respectively connected to the plurality of upstream channels in the fluid box, and supply a second liquid mixed with the first liquid to each of the plurality of upstream channels. The plurality of discharge ports are respectively connected to the plurality of upstream flow paths at positions downstream from the plurality of component liquid flow paths, and are respectively disposed at a plurality of positions having different distances from the rotation axis. Then, the processing liquid containing the first liquid and the second liquid mixed in the plurality of upstream flow paths is discharged toward a plurality of positions in the upper surface of the substrate including the central portion of the upper surface of the substrate. The mixing ratio changing unit independently changes the mixing ratio of the first liquid and the second liquid contained in the processing liquid discharged from the plurality of discharge ports for each upstream flow path. Specific examples of the first liquid and the second liquid are a combination of sulfuric acid and hydrogen peroxide water, and a combination of sulfuric acid and pure water.

  According to this invention, the supply flow path for guiding the liquid is branched into a plurality of upstream flow paths. Thereby, the number of discharge ports can be increased. The liquid flowing through the supply flow path is supplied to the discharge port via the upstream flow path, and is discharged toward the upper surface of the substrate that rotates about the rotation axis. The plurality of discharge ports are respectively arranged at a plurality of positions having different distances from the rotation axis. Accordingly, the uniformity of the temperature of the processing liquid on the substrate can be improved as compared with the case where the processing liquid is discharged to only one discharge port. Thereby, the processing uniformity can be improved while reducing the consumption of the processing liquid.

  When processing liquid is discharged to a plurality of discharge ports toward a plurality of positions separated in the radial direction, supplying processing liquid of the same quality to each part of the substrate is important for improving processing uniformity. When a tank, a filter, or the like is provided for each discharge port, a processing liquid having a quality different from that of a processing liquid supplied to a certain discharge port can be supplied to another discharge port. On the other hand, in this embodiment, a supply flow path is branched and the 1st liquid supplied from the same flow path (supply flow path) is discharged to each discharge port. Thereby, the 1st liquid of the same quality can be discharged to each discharge port. Furthermore, compared to a configuration in which a tank, a filter, and the like are provided for each discharge port, the number of parts can be reduced, and maintenance work can be simplified.

  When the processing liquid is hotter than the substrate, the heat of the processing liquid is taken away by the substrate. Further, since the processing liquid rotates together with the substrate, the processing liquid on the substrate flows outward along the upper surface of the substrate while being cooled by air. The peripheral speed of each part of the substrate increases with distance from the rotation axis. The processing liquid on the substrate is easily cooled as the peripheral speed increases. Further, assuming that the upper surface of the substrate can be divided into a plurality of annular regions at equal intervals in the radial direction, the area of each region increases as the distance from the rotation axis increases. When the surface area is large, heat easily moves from the treatment liquid to the annular region. For this reason, if the temperatures of the processing liquids discharged from the discharge ports are all the same, sufficient temperature uniformity may not be obtained.

  According to this invention, the 1st liquid supplied to the upstream flow path from the supply flow path is mixed with the 2nd liquid supplied to the upstream flow path from the component liquid flow path. The first liquid and the second liquid generate heat when mixed. Accordingly, the processing liquid is generated in the plurality of upstream flow paths, and the processing liquid is heated in the plurality of upstream flow paths. The mixing ratio changing unit independently adjusts the mixing ratio of the first liquid and the second liquid contained in the processing liquid discharged from the plurality of discharge ports for each upstream flow path. Therefore, the mixing ratio changing unit can increase the temperature of the processing liquid supplied to the upper surface of the substrate stepwise as it moves away from the rotation axis. Thereby, compared with the case where the process liquid of the same temperature is discharged to each discharge port, the uniformity of temperature can be improved and the uniformity of a process can be improved.

  According to a second aspect of the present invention, the downstream ends of the plurality of upstream flow paths are respectively disposed at a plurality of positions having different distances from the rotation axis, and the mixing ratio changing unit includes the plurality of upstream flows. The mixing ratio is independent for each upstream flow path so that the mixing ratio of the first liquid and the second liquid in the channel approaches the maximum mixing ratio at which the temperature of the processing liquid becomes maximum as the distance from the rotation axis increases. The substrate processing apparatus according to claim 1, wherein the substrate processing apparatus is changed.

  According to this invention, the mixing ratio of the first liquid and the second liquid in the plurality of upstream channels approaches the maximum mixing ratio as the distance from the rotation axis increases. The maximum mixing ratio is a mixing ratio of the first liquid and the second liquid when the temperature of the processing liquid is maximum. Therefore, the temperature of the processing liquid at the plurality of discharge ports increases stepwise as it moves away from the rotation axis. Thereby, compared with the case where the process liquid of the same temperature is discharged to each discharge port, the uniformity of temperature can be improved and the uniformity of a process can be improved.

  According to a third aspect of the present invention, the mixing ratio changing unit sets the mixing ratio to the upstream flow path so that the temperature of the processing liquid in the plurality of upstream flow paths increases with increasing distance from the rotation axis. The substrate processing apparatus according to claim 2, wherein the substrate processing apparatus is changed independently for each. According to the present invention, as described above, the uniformity of temperature can be increased and the uniformity of processing can be improved as compared with the case where the processing liquid having the same temperature is discharged to each discharge port.

  According to a fourth aspect of the present invention, the mixing ratio changing unit is connected to the plurality of upstream flow paths at a position upstream of the plurality of component liquid flow paths, and is mixed with the second liquid. A plurality of first flow rate adjusting valves that independently adjust the flow rate of one liquid for each of the upstream flow paths, and a second liquid that is connected to the plurality of component liquid flow paths and mixed with the first liquid. 4. The substrate processing apparatus according to claim 1, comprising at least one of a plurality of second flow rate adjustment valves that independently adjust a flow rate for each of the component liquid flow paths. 5. The mixing ratio changing unit may include both a plurality of first flow rate adjustment valves and a plurality of second flow rate adjustment valves, or only one of the plurality of first flow rate adjustment valves and the plurality of second flow rate adjustment valves. May be provided.

  According to a fifth aspect of the present invention, the processing liquid supply system further includes a plurality of downstream flow paths, and the plurality of discharge ports are a main discharge port that discharges the processing liquid toward the center of the upper surface of the substrate. A plurality of sub-ejection ports that eject the processing liquid toward a plurality of positions in the top surface of the substrate, which are separated from the central portion of the top surface and have different distances from the rotation axis, The upstream flow path includes a main upstream flow path connected to the main discharge port, and a plurality of sub upstream flow paths connected to the plurality of sub discharge ports via the plurality of downstream flow paths, The plurality of sub-upstream channels are all branched upstream channels that are branched into the plurality of downstream channels, and the sub-discharge port is provided for each of the downstream channels. The substrate processing apparatus according to claim 1.

  According to this invention, the flow path for supplying the treatment liquid to the plurality of discharge ports is branched in multiple stages. That is, the supply channel is branched into a plurality of upstream channels (first branch), and the branch upstream channel included in the plurality of upstream channels is branched into a plurality of downstream channels (second branch). . Therefore, the number of discharge ports can be increased as compared with the case where the branch upstream channel is not included in the plurality of upstream channels. Thereby, the uniformity of the temperature of the process liquid on a board | substrate can further be improved, and the uniformity of a process can further be improved.

The invention according to claim 6 is the substrate processing apparatus according to claim 5, wherein the branch upstream flow path is branched into the plurality of downstream flow paths in the chamber.
According to this invention, the upstream ends of the plurality of downstream flow paths are disposed in the chamber. The branch upstream flow path is branched into a plurality of downstream flow paths in the chamber. Therefore, the length of each downstream flow channel (the length in the direction in which the liquid flows) can be shortened as compared with the case where the branched upstream flow channel is branched outside the chamber. Thereby, the temperature fall of the process liquid by the heat transfer from a process liquid to a downstream flow path can be suppressed.

According to a seventh aspect of the present invention, the processing liquid supply system further includes a first nozzle and a second nozzle, and the plurality of discharge ports include a first discharge port provided in the first nozzle. And a second discharge port provided in the second nozzle, arranged in a plan view in a radial direction orthogonal to the rotation axis, and the first nozzle extends in a horizontal longitudinal direction. And a first tip portion extending downward from the tip of the first arm portion, and the second nozzle extends downward from the tip of the second arm portion and the second arm portion extending in the longitudinal direction. includes a second distal portion, said first arm portion and the second arm portion is arranged in a horizontal array direction perpendicular to the longitudinal direction, the tip and the second arm portion of the first arm portion The tip of the first arm is positioned on the rotation axis side. In so that, apart in the longitudinal direction in a plan view, a substrate processing apparatus according to any one of claims 1 to 7.
According to an eighth aspect of the present invention, the substrate holding unit that rotates around the vertical rotation axis passing through the central portion of the substrate while holding the substrate horizontally, and the first liquid and the second liquid that generate heat when mixed are mixed. And a processing liquid supply system that supplies the processing liquid to the substrate held by the substrate holding unit.
The processing liquid supply system includes a supply flow path, a plurality of upstream flow paths, a plurality of component liquid flow paths, a plurality of discharge ports, a mixing ratio changing unit, an upstream heater, and a plurality of downstream heaters. Including. The supply channel guides the first liquid toward the plurality of upstream channels. The plurality of upstream channels are branched from the supply channel, and guide the first liquid supplied from the supply channel toward the plurality of discharge ports. The plurality of component liquid channels are connected to the plurality of upstream channels, respectively, and supply a second liquid mixed with the first liquid to each of the plurality of upstream channels. The plurality of discharge ports are respectively connected to the plurality of upstream flow paths at positions downstream from the plurality of component liquid flow paths, and are respectively disposed at a plurality of positions having different distances from the rotation axis. Then, the processing liquid containing the first liquid and the second liquid mixed in the plurality of upstream flow paths is discharged toward a plurality of positions in the upper surface of the substrate including the central portion of the upper surface of the substrate. The mixing ratio changing unit independently changes the mixing ratio of the first liquid and the second liquid contained in the processing liquid discharged from the plurality of discharge ports for each upstream flow path. The upstream heater heats the first liquid supplied to the supply flow path at an upstream temperature. The plurality of discharge ports are separated from the main discharge port that discharges the processing liquid toward the upper surface center portion of the substrate, away from the upper surface center portion, and have different distances from the rotation axis. And a plurality of sub-discharge ports that discharge the processing liquid toward a plurality of positions, respectively. The plurality of upstream channels include a main upstream channel connected to the main discharge port and a plurality of sub-upstream channels connected to the plurality of sub-discharge ports. The plurality of downstream heaters are connected to the plurality of sub-upstream channels, respectively, and heat the first liquid flowing through the plurality of sub-upstream channels at a downstream temperature higher than the upstream temperature.
According to the present invention, the same effects as those of the substrate processing apparatus according to the first aspect can be obtained. Furthermore, according to the present invention, the processing liquid having a temperature higher than the upstream temperature, which is the heating temperature of the upstream heater, is supplied from the plurality of sub-upstream channels to the plurality of sub-discharge ports and discharged from these discharge ports. That is, while the processing liquid having the upstream temperature is discharged from the main discharge port, the processing liquid having a temperature higher than the upstream temperature is discharged from the plurality of sub discharge ports. Thus, since the temperature of the processing liquid supplied to the upper surface of the substrate increases stepwise as it moves away from the rotation axis, compared with the case where the processing liquid of the same temperature is discharged to each discharge port, The uniformity of the temperature of the processing liquid can be improved. Thereby, the processing uniformity can be improved while reducing the consumption of the processing liquid.
According to the ninth aspect of the present invention, the substrate holding unit that rotates around the vertical rotation axis passing through the central portion of the substrate while holding the substrate horizontally, and the first liquid and the second liquid that generate heat when mixed are mixed. And a processing liquid supply system that supplies the processing liquid to the substrate held by the substrate holding unit.
The processing liquid supply system includes a tank, a supply flow path, a plurality of upstream flow paths, a plurality of component liquid flow paths, a plurality of discharge ports, a mixing ratio changing unit, a plurality of downstream heaters, A return flow path. The tank stores the first liquid supplied to the supply flow path. The supply channel guides the first liquid supplied from the tank toward the plurality of upstream channels. The plurality of upstream channels are branched from the supply channel, and guide the first liquid supplied from the supply channel toward the plurality of discharge ports. The plurality of component liquid channels are connected to the plurality of upstream channels, respectively, and supply a second liquid mixed with the first liquid to each of the plurality of upstream channels. The plurality of discharge ports are respectively connected to the plurality of upstream flow paths at positions downstream from the plurality of component liquid flow paths, and are respectively disposed at a plurality of positions having different distances from the rotation axis. Then, the processing liquid containing the first liquid and the second liquid mixed in the plurality of upstream flow paths is discharged toward a plurality of positions in the upper surface of the substrate including the central portion of the upper surface of the substrate. The mixing ratio changing unit independently changes the mixing ratio of the first liquid and the second liquid contained in the processing liquid discharged from the plurality of discharge ports for each upstream flow path. The plurality of discharge ports are separated from the main discharge port that discharges the processing liquid toward the upper surface center portion of the substrate, away from the upper surface center portion, and have different distances from the rotation axis. And a plurality of sub-discharge ports that discharge the processing liquid toward a plurality of positions, respectively. The plurality of upstream channels include a main upstream channel connected to the main discharge port and a plurality of sub-upstream channels connected to the plurality of sub-discharge ports. The plurality of downstream heaters are connected to the plurality of sub-upstream channels, respectively, and heat the first liquid flowing through the plurality of sub-upstream channels at a downstream temperature. The plurality of return channels are respectively connected to the plurality of sub-upstream channels at positions upstream of the plurality of component liquid channels, and the first liquid heated by the plurality of downstream heaters is supplied to the tank. Guide you towards. According to the present invention, the same effects as those of the substrate processing apparatus according to the first aspect can be obtained.
The substrate processing according to claim 9, wherein the processing liquid supply system further includes an upstream heater that heats the first liquid supplied from the tank to the supply flow path at an upstream temperature. Device.

  According to the present invention, the plurality of discharge ports are arranged in the radial direction in plan view. When a plurality of nozzles having the same length are arranged in the horizontal direction orthogonal to the longitudinal direction so that the plurality of discharge ports are arranged in the radial direction in plan view, the width of the whole plurality of nozzles increases (see FIG. 9). When a plurality of nozzles having different lengths are arranged in the vertical direction so that the plurality of discharge ports are arranged in the radial direction in plan view, the height of the plurality of nozzles increases as a whole (see FIG. 10).

  In contrast, the first arm portion and the second arm portion are arranged in a horizontal arrangement direction orthogonal to the longitudinal direction, and the tip end of the first arm portion is positioned so that the tip end of the first arm portion is located on the rotation axis side. When the tip of the second arm portion is shifted in the longitudinal direction in plan view, the plurality of discharge ports can be arranged in the radial direction in plan view while suppressing both the width and height of the plurality of nozzles as a whole (see FIG. 4). ). Thereby, related members, such as a some nozzle and a standby pot, can be reduced in size.

It is a mimetic diagram showing a processing liquid supply system of a substrate processing apparatus concerning one embodiment of the present invention, and shows a processing liquid supply system in a discharge state. It is a mimetic diagram showing a processing liquid supply system of a substrate processing apparatus concerning one embodiment of the present invention, and shows a processing liquid supply system in a discharge stop state. It is a typical front view which shows the inside of the processing unit with which the substrate processing apparatus was equipped. It is a typical top view which shows the inside of the processing unit with which the substrate processing apparatus was equipped. It is a typical front view showing a plurality of nozzles. It is a typical top view showing a plurality of nozzles. It is process drawing for demonstrating an example of the process of the board | substrate performed with a substrate processing apparatus. It is a graph which shows distribution of the etching amount of a board | substrate. It is a typical top view showing a plurality of nozzles concerning the 1st modification of the embodiment. It is a mimetic diagram showing a plurality of nozzles concerning the 2nd modification of the embodiment. FIG. 10A is a schematic front view showing a plurality of nozzles, and FIG. 10B is a schematic plan view showing the plurality of nozzles. It is a graph which shows the image of the thickness of the thin film before and behind a process, and the temperature of the process liquid supplied to a board | substrate.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
1 and 2 are schematic views showing a processing liquid supply system of a substrate processing apparatus 1 according to an embodiment of the present invention. FIG. 1 shows a processing liquid supply system in a discharge state, and FIG. 2 shows a processing liquid supply system in a discharge stop state.
The substrate processing apparatus 1 is a single-wafer type apparatus that processes a disk-shaped substrate W such as a semiconductor wafer one by one. The substrate processing apparatus 1 includes a processing unit 2 that processes a substrate W with a processing liquid, a transfer robot (not shown) that transfers the substrate W to the processing unit 2, and a control device 3 that controls the substrate processing apparatus 1. . The control device 3 is a computer including a calculation unit and a storage unit.

  The substrate processing apparatus 1 includes a plurality of fluid boxes 5 that contain a fluid device such as a valve 51 that controls supply and stop of supply of the processing liquid to the processing unit 2, and processing supplied to the processing unit 2 via the fluid box 5. And a plurality of storage boxes 6 for storing tanks 41 for storing liquid. The processing unit 2 and the fluid box 5 are disposed in the frame 4 of the substrate processing apparatus 1. The chamber 7 and the fluid box 5 of the processing unit 2 are arranged in the horizontal direction. The storage box 6 is disposed outside the frame 4. The storage box 6 may be disposed in the frame 4.

FIG. 3 is a schematic front view showing the inside of the processing unit 2. FIG. 4 is a schematic plan view showing the inside of the processing unit 2.
As shown in FIG. 3, the processing unit 2 rotates the substrate W around a vertical rotation axis A <b> 1 passing through the central portion of the substrate W while holding the substrate W horizontally in the chamber 7 and the chamber 7. A spin chuck 11 and a cylindrical cup 15 that receives the processing liquid discharged from the substrate W are included.

  As shown in FIG. 4, the chamber 7 includes a box-shaped partition wall 8 provided with a loading / unloading port 8a through which the substrate W passes, and a shutter 9 for opening and closing the loading / unloading port 8a. The shutter 9 is movable with respect to the partition wall 8 between an open position where the carry-in / out port 8a is opened and a closed position (a position shown in FIG. 4) where the carry-in / out port 8a is closed. A transfer robot (not shown) loads the substrate W into the chamber 7 through the loading / unloading port 8a and unloads the substrate W from the chamber 7 through the loading / unloading port 8a.

  As shown in FIG. 3, the spin chuck 11 includes a disk-shaped spin base 12 held in a horizontal posture, a plurality of chuck pins 13 that hold the substrate W in a horizontal posture above the spin base 12, and And a spin motor 14 that rotates the substrate W around the rotation axis A1 by rotating the plurality of chuck pins 13. The spin chuck 11 is not limited to a clamping chuck in which a plurality of chuck pins 13 are brought into contact with the peripheral end surface of the substrate W, and the back surface (lower surface) of the substrate W, which is a non-device forming surface, is adsorbed to the upper surface of the spin base 12. Thus, a vacuum chuck that holds the substrate W horizontally may be used.

  As shown in FIG. 3, the cup 15 includes a cylindrical splash guard 17 that surrounds the spin chuck 11 around the rotation axis A <b> 1 and a cylindrical outer wall 16 that surrounds the splash guard 17 around the rotation axis A <b> 1. In the processing unit 2, the upper position of the splash guard 17 is positioned above the position where the spin chuck 11 holds the substrate W (the position shown in FIG. 3), and the upper end of the splash guard 17 is positioned on the substrate W by the spin chuck 11. A guard lifting / lowering unit 18 that vertically moves the splash guard 17 between a lower position and a lower position than the holding position is included.

  As shown in FIG. 3, the processing unit 2 includes a rinsing liquid nozzle 21 that discharges the rinsing liquid downward toward the upper surface of the substrate W held by the spin chuck 11. The rinse liquid nozzle 21 is connected to a rinse liquid pipe 22 in which a rinse liquid valve 23 is interposed. The processing unit 2 may include a nozzle moving unit that moves the rinse liquid nozzle 21 between the processing position and the standby position.

  When the rinse liquid valve 23 is opened, the rinse liquid is supplied from the rinse liquid pipe 22 to the rinse liquid nozzle 21 and discharged from the rinse liquid nozzle 21. The rinse liquid is, for example, pure water (deionized water). The rinse liquid is not limited to pure water, but may be any of carbonated water, electrolytic ion water, hydrogen water, ozone water, and hydrochloric acid water having a diluted concentration (for example, about 10 to 100 ppm).

  As shown in FIG. 4, the processing unit 2 includes a plurality of nozzles 26 (first nozzle 26 </ b> A, second nozzle 26 </ b> B, third nozzle 26 </ b> C, and fourth nozzle 26 </ b> D) that discharge a chemical solution downward, and a plurality of nozzles 26. And a plurality of nozzles 26 between a processing position (a position indicated by a two-dot chain line in FIG. 4) and a standby position (a position indicated by a solid line in FIG. 4) by moving the holder 25. And a nozzle moving unit 24 for moving the.

  Typical examples of the chemical solution are an etching solution such as TMAH (tetramethylammonium hydroxide) and a resist stripping solution such as SPM (mixed solution containing sulfuric acid and hydrogen peroxide solution). The chemical solution is not limited to TMAH and SPM, but sulfuric acid, acetic acid, nitric acid, hydrochloric acid, hydrofluoric acid, aqueous ammonia, aqueous hydrogen peroxide, organic acids (such as citric acid and oxalic acid), organic alkalis other than TMAH, surfactants, It may be a liquid containing at least one of the corrosion inhibitors.

As shown in FIG. 3, each nozzle 26 includes a nozzle body 27 that is cantilevered by a holder 25. The nozzle body 27 includes an arm portion 28 extending from the holder 25 in the horizontal longitudinal direction D1 and a tip portion 29 extending downward from the tip 28a of the arm portion 28. The tip 28a of the arm portion 28 means a portion farthest in the longitudinal direction D1 from the holder 25 in plan view.
As shown in FIG. 4, the plurality of arm portions 28 are arranged in a horizontal arrangement direction D2 orthogonal to the longitudinal direction D1 in the order of the first nozzle 26A to the fourth nozzle 26D. The plurality of arm portions 28 are arranged at the same height. The interval between the two arm portions 28 adjacent in the arrangement direction D2 may be the same as any other interval, or may be different from at least one of the other intervals. FIG. 4 shows an example in which a plurality of arm portions 28 are arranged at equal intervals.

The lengths of the plurality of arm portions 28 in the longitudinal direction D1 are shorter in the order of the first nozzle 26A to the fourth nozzle 26D. The tips of the plurality of nozzles 26 (tips 28a of the plurality of arm portions 28) are shifted in the longitudinal direction D1 so as to be arranged in the order of the first nozzle 26A to the fourth nozzle 26D in the longitudinal direction D1. The tips of the plurality of nozzles 26 are arranged linearly in plan view.
The nozzle moving unit 24 moves the plurality of nozzles 26 along an arcuate path passing through the substrate W in plan view by rotating the holder 25 about the nozzle rotation axis A2 extending vertically around the cup 15. Let As a result, the plurality of nozzles 26 move horizontally between the processing position and the standby position. The processing unit 2 includes a bottomed cylindrical standby pot 35 disposed below the standby positions of the plurality of nozzles 26. The standby pot 35 is disposed around the cup 15 in plan view.

  The processing position is a position where the chemical liquid discharged from the plurality of nozzles 26 is deposited on the upper surface of the substrate W. At the processing position, the plurality of nozzles 26 and the substrate W overlap in a plan view, and the tips of the plurality of nozzles 26 have a radial direction Dr in the order of the first nozzle 26A to the fourth nozzle 26D from the rotation axis A1 side in the plan view. Lined up. At this time, the tip of the first nozzle 26A overlaps the central portion of the substrate W in plan view, and the tip of the fourth nozzle 26D overlaps the peripheral portion of the substrate W in plan view.

  The standby position is a position where the plurality of nozzles 26 are retracted so that the plurality of nozzles 26 and the substrate W do not overlap in plan view. At the standby position, the tips of the plurality of nozzles 26 are positioned outside the cup 15 so as to be along the outer peripheral surface of the cup 15 (the outer peripheral surface of the outer wall 16) in plan view, and the order of the first nozzle 26A to the fourth nozzle 26D. Are arranged in the circumferential direction (direction around the rotation axis A1). The plurality of nozzles 26 are arranged in the order of the first nozzle 26A to the fourth nozzle 26D so as to be away from the rotation axis A1.

Next, the plurality of nozzles 26 will be described with reference to FIGS. 5 and 6. Thereafter, the processing liquid supply system will be described.
In the following description, “first” and “A” may be added to the beginning and the end of the configuration corresponding to the first nozzle 26A, respectively. For example, the upstream flow path 48 corresponding to the first nozzle 26A may be referred to as “first upstream flow path 48A”. The same applies to the configuration corresponding to the second nozzle 26B to the fourth nozzle 26D.

In the following description, the heating temperature of the processing liquid by the first upstream heater 43 may be referred to as upstream temperature, and the heating temperature of the processing liquid by the downstream heater 53 may be referred to as downstream temperature. The heating temperature of the processing liquid by the second downstream heater 53 to the fourth downstream heater 53 may be referred to as the second downstream temperature to the fourth heating temperature, respectively.
As shown in FIG. 5, the nozzle body 27 includes a resin tube 30 that guides the processing liquid, a cross-section cylindrical core metal 31 that surrounds the resin tube 30, and a cross-section cylindrical resin coating 32 that covers the outer surface of the core metal 31. Including. Each nozzle 26 other than the first nozzle 26 </ b> A further includes a nozzle head 33 attached to the tip end portion 29 of the nozzle body 27.

  The nozzle body 27 forms one flow path that extends along the nozzle body 27. The nozzle head 33 forms a plurality of flow paths for guiding the processing liquid supplied from the nozzle body 27. The flow path of the nozzle body 27 forms a discharge port 34 that opens on the outer surface of the nozzle body 27. The plurality of flow paths of the nozzle head 33 form a plurality of discharge ports 34 that open at the outer surface of the nozzle head 33. The flow path of the nozzle body 27 corresponds to a part of the upstream flow path 48 described later. Each flow path of the nozzle head 33 corresponds to a downstream flow path 52 described later. The downstream ends of the first upstream channel 48A to the fourth upstream channel 48D are respectively arranged at a plurality of positions having different distances from the rotation axis A1.

  5 and 6 show an example in which the total number of ejection ports 34 provided in the plurality of nozzles 26 is ten. The first nozzle 26 </ b> A includes one discharge port 34 provided in the nozzle body 27. Each nozzle 26 other than the first nozzle 26 </ b> A includes three discharge ports 34 provided in the nozzle head 33. The three discharge ports 34 provided in the same nozzle head 33 are the inner discharge port closest to the rotation axis A1 among the three discharge ports 34 and the outermost side of the three discharge ports 34 farthest from the rotation axis A1. The discharge port and an intermediate discharge port disposed between the inner discharge port and the outer discharge port are configured.

  As shown in FIG. 6, the plurality of discharge ports 34 are arranged in a straight line in a plan view. The distance between the two discharge ports 34 at both ends is equal to or less than the radius of the substrate W. The interval between two adjacent discharge ports 34 may be the same as any other interval, or may be different from at least one of the other intervals. Further, the plurality of discharge ports 34 may be arranged at the same height, or may be arranged at two or more different heights.

  When the plurality of nozzles 26 are disposed at the processing position, the plurality of discharge ports 34 are respectively disposed at a plurality of positions having different distances from the rotation axis A1 (shortest distance in plan view). At this time, the innermost discharge port (first discharge port 34 </ b> A) closest to the rotation axis A <b> 1 among the plurality of discharge ports 34 is disposed above the central portion of the substrate W and rotates among the plurality of discharge ports 34. The outermost discharge port (fourth discharge port 34 </ b> D) farthest from the axis A <b> 1 is disposed above the peripheral edge of the substrate W. The plurality of discharge ports 34 are arranged in the radial direction Dr in plan view.

  The first discharge port 34 </ b> A provided in the first nozzle 26 </ b> A is a main discharge port that discharges the processing liquid toward the center of the upper surface of the substrate W. The second discharge port 34B to the fourth discharge port 34D provided in each of the nozzles 26 other than the first nozzle 26A are a plurality of sub discharge ports that discharge the processing liquid toward a part of the upper surface of the substrate W other than the central portion. It is. The first upstream flow channel 48A connected to the first discharge port 34A is a main upstream flow channel, and the second upstream flow channel 48B to the fourth upstream flow connected to the second discharge port 34B to the fourth discharge port 34D. The channel 48D is a plurality of sub-upstream channels.

  As shown in FIG. 5, each discharge port 34 discharges a chemical solution in a discharge direction perpendicular to the upper surface of the substrate W. The plurality of discharge ports 34 discharge the chemical liquid toward a plurality of liquid landing positions in the upper surface of the substrate W. The plurality of liquid landing positions are different positions with different distances from the rotation axis A1. The liquid landing position closest to the rotation axis A1 among the plurality of liquid landing positions is referred to as a first liquid landing position, and the liquid landing position second closest to the rotation axis A1 among the plurality of liquid landing positions. In terms of the position, the chemical liquid discharged from the first discharge port 34A reaches the first landing position, and the chemical liquid discharged from the second discharge port 34B reaches the second landing position.

Next, the processing liquid supply system will be described in detail with reference to FIGS. 1 and 2.
The processing liquid supply system includes a first chemical liquid tank 41 that stores sulfuric acid as the first chemical liquid. The processing liquid supply system further includes a first chemical liquid flow path 42 that guides the sulfuric acid sent from the first chemical liquid tank 41, and sulfuric acid flowing in the first chemical liquid flow path 42 from room temperature (for example, 20 to 30 ° C.). A first upstream heater 43 that adjusts the temperature of sulfuric acid in the first chemical liquid tank 41 by heating at a high upstream temperature; a first pump 44 that sends sulfuric acid in the first chemical liquid tank 41 to the first chemical liquid flow path 42; And a first circulation channel 40 that returns the sulfuric acid in the first chemical solution channel 42 to the first chemical solution tank 41.

The treatment liquid supply system includes a first chemical liquid supply valve 45 that opens and closes the first chemical liquid flow path 42, a first circulation valve 46 that opens and closes the first circulation flow path 40, and a supply connected to the first chemical liquid flow path 42. And a flow path 47. The upstream switching unit includes a first chemical liquid supply valve 45.
The processing liquid supply system includes a plurality of upstream flow paths 48 that guide the liquid supplied from the supply flow path 47 toward the plurality of discharge ports 34, and a plurality of flow rates that detect the flow rates of the liquids that flow in the plurality of upstream flow paths 48. The flow meter 49, a plurality of first flow rate adjusting valves 50 for changing the flow rate of the liquid flowing in the plurality of upstream flow paths 48, and a plurality of discharge valves 51 for opening and closing the plurality of upstream flow paths 48, respectively. Although not shown, the first flow rate adjustment valve 50 includes a valve body that opens and closes the flow path and an actuator that changes the opening of the valve body. The actuator may be a pneumatic actuator or an electric actuator, or may be an actuator other than these.

The processing liquid supply system includes a plurality of downstream flow paths 52 that guide the liquid supplied from the upstream flow path 48 toward the plurality of discharge ports 34. The downstream ends of the upstream channels 48 other than the first upstream channel 48 </ b> A are branched into a plurality of downstream channels 52. That is, each upstream flow channel 48 other than the first upstream flow channel 48 </ b> A is a branched upstream flow channel branched into a plurality of downstream flow channels 52.
In FIG. 1 and FIG. 2, an example in which the branch upstream channel branches into two downstream channels 52 is shown. FIG. 5 shows an example in which the branch upstream channel branches into three downstream channels 52. The three downstream flow paths 52 branched from the second upstream flow path 48B are connected to three discharge ports 34 (an inner discharge port, an intermediate discharge port, and an outer discharge port) provided in the same nozzle head 33, respectively. Yes. The third upstream channel 48C and the fourth upstream channel 48D are the same as the second upstream channel 48B. The first upstream flow path 48A is connected to a first discharge port 34A provided in the first nozzle 26A.

  The processing liquid supply system includes a plurality of downstream heaters 53 that heat the liquid flowing in the plurality of upstream channels 48 other than the first upstream channel 48A at a downstream temperature higher than the upstream temperature. The processing liquid supply system further includes a plurality of return channels 54 respectively connected to a plurality of upstream channels 48 other than the first upstream channel 48A at a position downstream of the plurality of downstream heaters 53, and a plurality of return channels. And a plurality of return valves 55 for opening and closing the passages 54 respectively.

  The processing liquid supply system includes a cooler 56 that cools the chemical liquid supplied from the plurality of return flow paths 54, and a tank recovery flow path 57 that guides the chemical liquid from the cooler 56 to the first chemical liquid tank 41. The chemical liquid supplied to the cooler 56 from the plurality of return flow paths 54 is guided to the first chemical liquid tank 41 via the tank recovery flow path 57 after being brought close to the upstream temperature by the cooler 56. The cooler 56 may be a water cooling unit or an air cooling unit, or may be a cooling unit other than these.

  The treatment liquid supply system includes a second chemical liquid tank 61 that stores hydrogen peroxide water as a second chemical liquid, a second chemical liquid flow path 62 that guides the hydrogen peroxide water sent from the second chemical liquid tank 61, A second pump 63 that sends the hydrogen peroxide solution in the two chemical liquid tank 61 to the second chemical liquid flow path 62. The processing liquid supply system may further include a second upstream heater that heats the hydrogen peroxide solution flowing through the second chemical liquid flow path 62 at a temperature higher than room temperature.

  The treatment liquid supply system includes a plurality of component liquid flow paths 71 that guide the hydrogen peroxide solution supplied from the second chemical liquid flow path 62 toward the plurality of upstream flow paths 48, and a plurality of component liquid flow paths 71. A plurality of flow meters 72 for detecting the flow rate of the flowing liquid, a plurality of second flow rate adjusting valves 73 for changing the flow rate of the liquid flowing in the plurality of component liquid flow channels 71, and the plurality of component liquid flow channels 71 are opened and closed, respectively. And a plurality of component liquid valves 74. The structure of the second flow rate adjustment valve 73 is the same as that of the first flow rate adjustment valve 50.

  The four component liquid passages 71 (the first component liquid passage 71A, the second component liquid passage 71B, the third component liquid passage 71C, and the fourth component liquid passage 71D) are downstream of the discharge valve 51. In position, it is connected to four upstream channels 48. The first component liquid channel 71A to the fourth component liquid channel 71D are connected to the first upstream channel 48A to the fourth upstream channel 48D, respectively. The hydrogen peroxide solution in the component liquid channel 71 is supplied to the upstream channel 48 and mixed with sulfuric acid in the upstream channel 48. The treatment liquid supply system may include a plurality of mixers that mix sulfuric acid and hydrogen peroxide solution in the plurality of upstream flow paths 48.

  When sulfuric acid and hydrogen peroxide are mixed, an exothermic reaction occurs. The mixing ratio of sulfuric acid and hydrogen peroxide solution when the temperature of the mixed solution (SPM) of sulfuric acid and hydrogen peroxide solution is maximum is defined as the maximum mixing ratio. The maximum mixing ratio is approximately 2: 1 (sulfuric acid: hydrogen peroxide solution). The mixing ratio of sulfuric acid and hydrogen peroxide solution mixed in the upstream flow path 48 is changed by a mixing ratio changing unit including a plurality of first flow rate adjustment valves 50 and a plurality of second flow rate adjustment valves 73. The plurality of first flow rate adjustment valves 50 and the plurality of second flow rate adjustment valves 73 are individually controlled by the control device 3. The mixing ratio of sulfuric acid and hydrogen peroxide solution mixed in the first upstream channel 48A to the fourth upstream channel 48D approaches the maximum mixing ratio in the order of the first upstream channel 48A to the fourth upstream channel 48D. Is set to That is, the mixing ratio is set so that the temperature of the mixed liquid in the plurality of upstream channels 48 increases in the order of the first upstream channel 48A to the fourth upstream channel 48D.

Next, a treatment liquid supply system in a discharge state in which a plurality of discharge ports 34 discharge a chemical liquid will be described with reference to FIG. In FIG. 1, the open valve is shown in black and the closed valve is shown in white.
The sulfuric acid in the first chemical liquid tank 41 is heated by the first upstream heater 43, then flows from the first chemical liquid flow path 42 to the supply flow path 47, and flows from the supply flow path 47 to the plurality of upstream flow paths 48. The hydrogen peroxide solution in the second chemical liquid tank 61 flows from the second chemical liquid flow path 62 to the plurality of component liquid flow paths 71 and from the plurality of component liquid flow paths 71 to the plurality of upstream flow paths 48.

The sulfuric acid supplied to the first upstream flow path 48 </ b> A is mixed with the hydrogen peroxide solution without being heated by the downstream heater 53. The sulfuric acid supplied to the upstream channels 48 other than the first upstream channel 48A is heated by the downstream heater 53 and then mixed with the hydrogen peroxide solution. Thereby, a chemical solution (SPM) is generated in the plurality of upstream flow paths 48.
The chemical solution in the first upstream channel 48A is supplied to one first discharge port 34A provided in the first nozzle 26A. The chemical solution in the second upstream channel 48B is supplied to the plurality of second discharge ports 34B provided in the second nozzle 26B via the plurality of downstream channels 52. The third upstream channel 48C and the fourth upstream channel 48D are the same as the second upstream channel 48B. Thereby, the chemical liquid is discharged from all the discharge ports 34.

  The heating temperature (downstream temperature) of the processing liquid by the downstream heater 53 is higher than the heating temperature (upstream temperature) of the processing liquid by the first upstream heater 43. The second downstream temperature to the fourth downstream temperature are higher in the order of the second downstream temperature to the fourth downstream temperature. Furthermore, the mixing ratio of sulfuric acid and hydrogen peroxide solution mixed in the first upstream flow path 48A to the fourth upstream flow path 48D is the maximum mixing ratio in the order of the first upstream flow path 48A to the fourth upstream flow path 48D ( The mixing ratio when the liquid temperature is maximum is approaching. Therefore, the temperature of the chemical liquid discharged from the plurality of discharge ports 34 increases stepwise as the distance from the rotation axis A1 increases.

Next, with reference to FIG. 2, the processing liquid supply system in a discharge stopped state in which the discharge of the chemical liquid from the plurality of discharge ports 34 is stopped will be described. In FIG. 2, open valves are shown in black and closed valves are shown in white.
While the discharge is stopped, the supply of the hydrogen peroxide solution to the upstream flow path 48 is stopped. The sulfuric acid in the first chemical liquid tank 41 is sent to the first chemical liquid flow path 42 by the first pump 44. A part of the sulfuric acid sent by the first pump 44 is heated by the first upstream heater 43 and then returns to the first chemical tank 41 via the first circulation passage 40. The remaining sulfuric acid sent by the first pump 44 flows from the first chemical liquid channel 42 to the supply channel 47, and flows from the supply channel 47 to the plurality of upstream channels 48 other than the first upstream channel 48 </ b> A.

  The sulfuric acid in the second upstream channel 48B is heated by the downstream heater 53 corresponding to the second upstream channel 48B and then flows to the cooler 56 through the return channel 54. The third upstream channel 48C and the fourth upstream channel 48D are the same as the second upstream channel 48B. The sulfuric acid supplied to the cooler 56 is cooled by the cooler 56, and then returns to the first chemical liquid tank 41 via the tank recovery channel 57. As a result, all sulfuric acid sent to the first chemical liquid flow path 42 by the first pump 44 returns to the first chemical liquid tank 41.

The temperature of the processing liquid may greatly affect the processing of the substrate W. If the downstream heater 53 is stopped while the discharge is stopped, it takes time for the temperature of the processing liquid heated by the downstream heater 53 to stabilize at the intended temperature when the operation of the downstream heater 53 is resumed. Therefore, the discharge of the processing liquid cannot be resumed immediately, and the throughput is reduced.
As described above, even when the discharge is stopped, the sulfuric acid continues to flow through the downstream heater 53 and the downstream heater 53 is heated. Thereby, the temperature of the downstream heater 53 can be maintained in a stable state. Further, since the sulfuric acid heated by the downstream heater 53 is returned to the first chemical liquid tank 41, the consumption of sulfuric acid can be reduced. In addition, since the sulfuric acid cooled by the cooler 56 is returned to the first chemical liquid tank 41, fluctuations in the temperature of the sulfuric acid in the first chemical liquid tank 41 can be suppressed.

FIG. 7 is a process diagram for explaining an example of the processing of the substrate W performed by the substrate processing apparatus 1. The following operations are executed by the control device 3 controlling the substrate processing apparatus 1. In the following, reference is made to FIG. 3 and FIG. 7 will be referred to as appropriate.
When the substrate W is processed by the processing unit 2, a plurality of nozzles 26 are retracted from above the spin chuck 11 and the splash guard 17 is positioned at the lower position (not shown). ), The substrate W is carried into the chamber 7. As a result, the substrate W is placed on the plurality of chuck pins 13 with the surface facing upward. Thereafter, the hand of the transfer robot is retracted from the inside of the chamber 7, and the loading / unloading port 8 a of the chamber 7 is closed by the shutter 9.

  After the substrate W is placed on the plurality of chuck pins 13, the plurality of chuck pins 13 are pressed against the peripheral edge of the substrate W, and the substrate W is gripped by the plurality of chuck pins 13. Further, the guard lifting / lowering unit 18 moves the splash guard 17 from the lower position to the upper position. Thereby, the upper end of the splash guard 17 is disposed above the substrate W. Thereafter, the spin motor 14 is driven, and the rotation of the substrate W is started. Thereby, the substrate W is rotated at a predetermined liquid processing speed (for example, several hundred rpm).

  Next, the nozzle moving unit 24 moves the plurality of nozzles 26 from the standby position to the processing position. As a result, the plurality of ejection ports 34 overlap the substrate W in plan view. Thereafter, the plurality of discharge valves 51 and the like are controlled, and the chemical liquid is simultaneously discharged from the plurality of nozzles 26 (step S1 in FIG. 7). The plurality of nozzles 26 discharge the chemical liquid in a state where the nozzle moving unit 24 stops the plurality of nozzles 26. When a predetermined time elapses after the plurality of discharge valves 51 are opened, the discharge of the chemical solution from the plurality of nozzles 26 is stopped simultaneously (step S2 in FIG. 7). Thereafter, the nozzle moving unit 24 moves the plurality of nozzles 26 from the processing position to the standby position.

  The chemical liquid discharged from the plurality of nozzles 26 lands on the upper surface of the rotating substrate W, and then flows outward (in the direction away from the rotation axis A1) along the upper surface of the substrate W by centrifugal force. The chemical solution that has reached the peripheral edge of the upper surface of the substrate W scatters around the substrate W and is received by the inner peripheral surface of the splash guard 17. In this way, the chemical liquid is supplied to the entire upper surface of the substrate W, and a liquid film of the chemical liquid covering the entire upper surface of the substrate W is formed on the substrate W. Thereby, the entire upper surface of the substrate W is treated with the chemical solution.

  After the discharge of the chemical liquid from the plurality of nozzles 26 is stopped, the rinse liquid valve 23 is opened, and the discharge of the rinse liquid (pure water) from the rinse liquid nozzle 21 is started (step S3 in FIG. 7). Thereby, the chemical liquid on the substrate W is washed away by the rinse liquid, and a liquid film of the rinse liquid covering the entire upper surface of the substrate W is formed. When a predetermined time elapses after the rinsing liquid valve 23 is opened, the rinsing liquid valve 23 is closed and the discharge of the rinsing liquid from the rinsing liquid nozzle 21 is stopped (step S4 in FIG. 7).

  After the discharge of the rinsing liquid from the rinsing liquid nozzle 21 is stopped, the substrate W is accelerated in the rotation direction by the spin motor 14, and the substrate W rotates at a drying speed (for example, several thousand rpm) higher than the liquid processing speed. (Step S5 in FIG. 7). Thereby, the rinse liquid adhering to the substrate W is shaken off around the substrate W, and the substrate W is dried. When a predetermined time elapses after the high-speed rotation of the substrate W is started, the rotation of the spin motor 14 and the substrate W is stopped.

  After the rotation of the substrate W is stopped, the guard lifting / lowering unit 18 moves the splash guard 17 from the upper position to the lower position. Further, the holding of the substrate W by the plurality of chuck pins 13 is released. The transfer robot causes the hand to enter the chamber 7 with the plurality of nozzles 26 retracted from above the spin chuck 11 and the splash guard 17 is positioned at the lower position. Thereafter, the transfer robot takes the substrate W on the spin chuck 11 with the hand and carries the substrate W out of the chamber 7.

FIG. 8 is a graph showing the distribution of the etching amount of the substrate W.
The processing conditions of the substrate W in the measurement values A to C shown in FIG. 8 are the same except for the nozzle that discharges the chemical solution.
The measured value A indicates the distribution of the etching amount when the chemical solution is discharged to the plurality of discharge ports 34 (ten discharge ports 34) while the plurality of nozzles 26 are stationary, and the substrate W is etched.

  The measured value B is obtained when the substrate W is etched by discharging the chemical liquid to the plurality of discharge ports 34 (four discharge ports 34) while stopping the plurality of nozzles 26 from which all the nozzle heads 33 have been removed. The distribution of the etching amount is shown. That is, the measured value B indicates the distribution of the etching amount when the chemical solution is discharged to the four discharge ports 34 (corresponding to the first discharge ports 34A) provided in the four nozzle bodies 27, respectively. .

The measured value C indicates the distribution of the etching amount when the chemical liquid is discharged only to one discharge port 34 and the liquid solution landing position is fixed at the center of the upper surface of the substrate W.
In the measured value C, the etching amount decreases as the distance from the center of the substrate W increases, and the etching amount distribution shows a mountain-shaped curve. That is, the etching amount is greatest at the position where the chemical solution is deposited, and decreases as the chemical solution is separated from the position. On the other hand, in the measured value A and the measured value B, the etching amount at positions other than the central portion of the substrate W is increased as compared with the measured value C, and the etching uniformity is greatly improved. Yes.

  In the measurement value B, seven peaks are formed. The peak of the middle peak is a position corresponding to the innermost liquid landing position, and the peak of two outer peaks is a position corresponding to the second liquid landing position from the inside. Further, the positions of the two outer crests are positions corresponding to the third liquid landing position from the inner side, and the positions of the two outermost crests are positions corresponding to the fourth liquid landing position from the inner side.

  In the measurement value A, like the measurement value B, a plurality of peaks corresponding to a plurality of liquid landing positions are formed. In the measurement value B, the number of discharge ports 34 is four, whereas in the measurement value A, the number of discharge ports 34 is ten, so the number of peaks increases. Further, compared with the measurement value B, the line indicating the distribution of the etching amount approaches a straight line extending in the left-right direction (a straight line with a constant etching amount), and the etching uniformity is improved.

As described above, in the present embodiment, the supply flow path 47 that guides the processing liquid is branched into a plurality of upstream flow paths 48. Thereby, the number of the discharge ports 34 can be increased. Furthermore, since the branch upstream channels branched into the plurality of downstream channels 52 are included in the plurality of upstream channels 48, the number of discharge ports 34 can be further increased.
The processing liquid flowing through the supply flow path 47 is supplied from the upstream flow path 48 or the downstream flow path 52 to the discharge port 34 and discharged toward the upper surface of the substrate W rotating around the rotation axis A1. The plurality of discharge ports 34 are respectively disposed at a plurality of positions having different distances from the rotation axis A1. Therefore, the uniformity of the temperature of the processing liquid on the substrate W can be improved as compared with the case where the processing liquid is discharged only to one discharge port 34. Thereby, the processing uniformity can be improved while reducing the consumption of the processing liquid.

  In the present embodiment, hydrogen peroxide solution that is one of the components of the chemical solution (SPM) is supplied from the component liquid channel 71 to the upstream channel 48. The mixing ratio changing unit including the first flow rate adjusting valve 50 and the second flow rate adjusting valve 73 changes the mixing ratio of sulfuric acid and hydrogen peroxide contained in the chemical solution discharged from the plurality of discharge ports 34 for each upstream flow path 48. Adjust independently. Therefore, the mixing ratio changing unit can increase the temperature of the chemical solution supplied to the upper surface of the substrate W stepwise as it moves away from the rotation axis A1. Thereby, compared with the case where the chemical | medical solution of the same temperature is discharged to each discharge port 34, the uniformity of temperature can be improved and the uniformity of a process can be improved.

  When the processing liquid is discharged to the plurality of discharge ports 34 toward a plurality of positions separated in the radial direction, supplying the processing liquid of the same quality to each part of the substrate W is important for improving processing uniformity. is there. When a tank, a filter, or the like is provided for each discharge port 34, a processing liquid having a quality different from that of a processing liquid supplied to a certain discharge port 34 can be supplied to another discharge port 34. On the other hand, in this embodiment, sulfuric acid supplied from the same tank (first chemical liquid tank 41) and hydrogen peroxide solution supplied from the same tank (second chemical liquid tank 61) are all discharged from the outlet. 34 is discharged. Thereby, the process liquid of the same quality can be discharged to each discharge port 34. Furthermore, compared to a configuration in which a tank, a filter, and the like are provided for each discharge port 34, the number of parts can be reduced, and maintenance work can be simplified.

  In the present embodiment, the upstream ends of the plurality of downstream flow paths 52 are arranged in the chamber 7. The branch upstream flow path is branched into a plurality of downstream flow paths 52 in the chamber 7. Therefore, the length of each downstream flow path 52 (the length in the direction in which the liquid flows) can be shortened as compared with the case where the branch upstream flow path is branched outside the chamber 7. Thereby, the temperature fall of the process liquid by the heat transfer from the process liquid to the downstream flow path 52 can be suppressed.

  In the present embodiment, the upstream ends of the plurality of upstream flow paths 48 are arranged in the fluid box 5. The supply flow path 47 is branched into a plurality of upstream flow paths 48 in the fluid box 5. Therefore, compared with the case where the supply flow path 47 is branched into a plurality of upstream flow paths 48 at a position upstream of the fluid box 5, the length of each upstream flow path 48 (the length in the direction in which the liquid flows). Can be shortened. Thereby, the temperature fall of the process liquid by the heat transfer from the process liquid to the upstream flow path 48 can be suppressed.

  In the present embodiment, the processing liquid heated at the downstream temperature higher than the upstream temperature by the downstream heater 53 flows from the upstream flow channel 48 other than the innermost upstream flow channel (first upstream flow channel 48A) to the innermost discharge port. It is supplied to the discharge ports 34 other than the (first discharge port 34A) and discharged from this discharge port 34. That is, while the processing liquid having the upstream temperature is discharged from the innermost discharge port, the processing liquid having a temperature higher than the upstream temperature is discharged from the discharge port 34 positioned outside the innermost discharge port.

Thus, since the temperature of the processing liquid supplied to the upper surface of the substrate W increases stepwise as it moves away from the rotation axis A1, compared with the case where the processing liquid having the same temperature is discharged to each discharge port 34, Temperature uniformity can be improved. Thereby, the processing uniformity can be improved while reducing the consumption of the processing liquid.
In the present embodiment, the first discharge port 34A and the second discharge port 34B are arranged in the radial direction Dr in plan view. When the plurality of nozzles 26 having the same length are arranged in the horizontal direction orthogonal to the longitudinal direction D1 so that the plurality of discharge ports 34 are arranged in the radial direction Dr in a plan view, the width of the plurality of nozzles 26 as a whole increases (see FIG. 9). When the plurality of nozzles 26 having different lengths are arranged in the vertical direction so that the plurality of discharge ports 34 are arranged in the radial direction Dr in plan view, the overall height of the plurality of nozzles 26 increases (see FIG. 10).

  In contrast, in the present embodiment, the plurality of arm portions 28 are arranged in a horizontal arrangement direction D2 orthogonal to the longitudinal direction D1. Further, the distal ends 28a of the plurality of arm portions 28 are shifted in the longitudinal direction D1 so that the distal ends 28a of the plurality of arm portions 28 are arranged in the order of the first nozzle 26A to the fourth nozzle 26D from the rotation axis A1 side with respect to the longitudinal direction D1. (See FIG. 4). Thereby, the plurality of discharge ports 34 can be arranged in the radial direction Dr in a plan view while suppressing both the width and height of the plurality of nozzles 26 as a whole.

Although the description of the embodiment of the present invention has been described above, the present invention is not limited to the contents of the above-described embodiment, and various modifications can be made within the scope of the present invention.
For example, in the embodiment, the case where the number of the nozzles 26 is four has been described, but the number of the nozzles 26 may be two or three, or may be five or more.
In the above embodiment, the case where the downstream heater 53 is not provided in the first upstream flow path 48A and the downstream heaters 53 are provided in all the upstream flow paths 48 other than the first upstream flow path 48A has been described. The downstream heaters 53 may be provided in all the upstream channels 48 including the first upstream channel 48A. On the contrary, the downstream heaters 53 may not be provided in all the upstream flow paths 48. The same applies to the return flow path 54.

  In the above-described embodiment, the case where the nozzle head 33 is not provided in the first nozzle 26A and the nozzle head 33 is attached to all the nozzles 26 other than the first nozzle 26A has been described. The nozzle head 33 may be provided in all the nozzles 26 including. On the contrary, the nozzle heads 33 may not be provided for all the nozzles 26.

In the embodiment, the case where the three downstream flow paths 52 and the three discharge ports 34 are formed in one nozzle head 33 has been described, but the downstream flow path 52 formed in one nozzle head 33. The number of the discharge ports 34 may be two, or four or more.
In the above embodiment, the case where the branch upstream channel (the upstream channel 48 other than the first upstream channel 48A) branches into the plurality of downstream channels 52 in the chamber 7 has been described. May be branched outside the chamber 7.

In the embodiment, the case where the plurality of discharge ports 34 are arranged in the radial direction Dr in a plan view has been described, but the plurality of discharge ports 34 are respectively arranged at a plurality of positions having different distances from the rotation axis A1. If necessary, the plurality of discharge ports 34 may not be arranged in the radial direction Dr in a plan view.
In the above-described embodiment, the case has been described in which the plurality of nozzles 26 are stationary and the plurality of nozzles 26 discharge chemicals. However, the plurality of nozzles 26 is rotated while the plurality of nozzles 26 are rotated around the nozzle rotation axis A2. Alternatively, the chemical solution may be discharged.

In the above embodiment, the case where all the discharge valves 51 are opened at the same time and all the discharge valves 51 are closed at the same time has been described. However, the control device 3 determines that the time during which the outer discharge port 34 is discharging the processing liquid is The plurality of discharge valves 51 may be controlled so that the inner discharge port 34 is longer than the time during which the processing liquid is discharged.
In the above-described embodiment, the case where the chemical flow path 42 for supplying the chemical liquid is provided in the supply flow path 47 has been described. However, even if a plurality of processing liquid flow paths for supplying the liquid to the supply flow path 47 are provided. Good.

  For example, the first liquid may be supplied from the first liquid channel to the supply channel 47, and the second liquid may be supplied from the second liquid channel to the supply channel 47. In this case, since the first liquid and the second liquid are mixed in the supply flow path 47, the mixed liquid as the processing liquid containing the first liquid and the second liquid is transferred from the supply flow path 47 to the plurality of upstream flow paths 48. Supplied. The first liquid and the second liquid may be the same type of liquid or different types of liquid. Specific examples of the first liquid and the second liquid are a combination of sulfuric acid and hydrogen peroxide water, and a combination of TMAH and pure water.

The control device 3 may equalize the thickness of the thin film after processing by controlling the temperature of the processing liquid supplied to each part of the surface of the substrate W according to the thickness of the thin film before processing.
FIG. 11 is a graph showing an image of the thickness of the thin film and the temperature of the processing liquid supplied to the substrate W before and after the processing. A one-dot chain line in FIG. 11 indicates a film thickness before treatment, and a two-dot chain line in FIG. 11 indicates a film thickness after treatment. The solid line in FIG. 11 indicates the temperature of the processing liquid supplied to the substrate W. The horizontal axis in FIG. 11 indicates the radius of the substrate W. The film thickness before processing may be input to the substrate processing apparatus 1 from an apparatus (for example, a host computer) other than the substrate processing apparatus 1 or may be measured by a measuring machine provided in the substrate processing apparatus 1.

  In the case of the example shown in FIG. 11, the control device 3 may control the substrate processing device 1 so that the temperature of the processing liquid changes in the same manner as the film thickness before processing. Specifically, the control device 3 may control the plurality of downstream heaters 53 so that the temperature of the processing liquid in the plurality of upstream channels 48 becomes a temperature corresponding to the film thickness before processing. The mixing ratio changing unit including the plurality of first flow rate adjustment valves 50 and the plurality of second flow rate adjustment valves 73 may be controlled.

  In this case, a relatively high temperature processing liquid is supplied to a position where the film thickness before processing is relatively large, and a relatively low temperature processing liquid is supplied to a position where the film thickness before processing is relatively small. The etching amount of the thin film formed on the surface of the substrate W relatively increases at a position where a high temperature processing liquid is supplied, and relatively decreases at a position where a low temperature processing liquid is supplied. Therefore, the thickness of the thin film after processing is made uniform.

  Two or more of all the aforementioned configurations may be combined. Two or more of all the above steps may be combined.

1: substrate processing device 3: control device 5: fluid box 7: chamber 11: spin chuck (substrate holding unit)
24: Nozzle moving unit 25: Holders 26A to 26D: First to fourth nozzles 27: Nozzle body 28: Arm 28a: Tip 29: Tip 33: Nozzle head 34A: First discharge port (innermost discharge port, main Discharge port)
34B: Second discharge port (sub discharge port)
34C: 3rd discharge port (sub discharge port)
34D: 4th discharge port (sub discharge port)
41: 1st chemical | medical solution tank 42: 1st chemical | medical solution flow path 43: 1st upstream heater 45: 1st chemical | medical solution supply valve 47: Supply flow path 48A: 1st upstream flow path (innermost upstream flow path, main upstream flow path)
48B: 2nd upstream flow path (branch upstream flow path, sub upstream flow path)
48C: 3rd upstream flow path (branch upstream flow path, sub upstream flow path)
48D: 4th upstream flow path (branch upstream flow path, sub upstream flow path)
50: First flow rate adjusting valve (mixing ratio changing unit)
51: Discharge valve 52: Downstream flow path 53: Downstream heater 54: Return flow path 55: Return valve 61: Second chemical liquid tank 62: Second chemical liquid flow paths 71A to 71D: First to fourth component liquid flow paths 73: Second flow adjustment valve (mixing ratio changing unit)
A1: rotation axis D1: longitudinal direction D2: arrangement direction Dr: radial direction W: substrate

Claims (10)

A substrate holding unit that rotates around a vertical rotation axis passing through the center of the substrate while holding the substrate horizontally;
A chamber for accommodating a substrate held by the substrate holding unit;
A fluid box aligned horizontally with the chamber;
Including a supply channel, a plurality of upstream channels, a plurality of component liquid channels, a plurality of discharge ports, and a mixing ratio changing unit, and the first and second liquids that generate heat when mixed A processing liquid supply system for supplying a processing liquid containing the substrate to the substrate held by the substrate holding unit,
The supply channel guides the first liquid toward the plurality of upstream channels,
The plurality of upstream flow paths branch from the supply flow path in the fluid box, and guide the first liquid supplied from the supply flow path toward the plurality of discharge ports,
The plurality of component liquid channels are respectively connected to the plurality of upstream channels in the fluid box, and supply a second liquid mixed with the first liquid to each of the plurality of upstream channels,
The plurality of discharge ports are respectively connected to the plurality of upstream flow paths at positions downstream from the plurality of component liquid flow paths, and are respectively disposed at a plurality of positions having different distances from the rotation axis. , Each of the treatment liquid containing the first liquid and the second liquid mixed in the plurality of upstream flow paths is discharged toward a plurality of positions in the upper surface of the substrate including the central portion of the upper surface of the substrate,
The substrate processing apparatus, wherein the mixing ratio changing unit changes the mixing ratio of the first liquid and the second liquid contained in the processing liquid discharged from the plurality of discharge ports independently for each of the upstream flow paths. The downstream ends of the plurality of upstream flow paths are respectively disposed at a plurality of positions having different distances from the rotation axis,
The mixing ratio changing unit is configured such that the mixing ratio of the first liquid and the second liquid in the plurality of upstream flow paths approaches the maximum mixing ratio at which the temperature of the processing liquid becomes maximum as the distance from the rotation axis increases. The substrate processing apparatus according to claim 1, wherein the mixing ratio is independently changed for each upstream flow path.   The mixing ratio changing unit independently changes the mixing ratio for each of the upstream flow paths so that the temperature of the processing liquid in the plurality of upstream flow paths increases with increasing distance from the rotation axis. Item 3. The substrate processing apparatus according to Item 2. The mixing ratio changing unit is:
Connected to the plurality of upstream flow paths at positions upstream of the plurality of component liquid flow paths, and independently adjusts the flow rate of the first liquid mixed with the second liquid for each of the upstream flow paths. A plurality of first flow control valves;
At least one of a plurality of second flow rate adjustment valves that are respectively connected to the plurality of component liquid flow paths and independently adjust the flow rate of the second liquid mixed with the first liquid for each of the component liquid flow paths. The substrate processing apparatus as described in any one of Claims 1-3 containing one. The processing liquid supply system further includes a plurality of downstream channels,
The plurality of discharge ports are separated from the main discharge port that discharges the processing liquid toward the upper surface center portion of the substrate, away from the upper surface center portion, and have different distances from the rotation axis. A plurality of sub-discharge ports that discharge the processing liquid toward a plurality of positions,
The plurality of upstream channels include a main upstream channel connected to the main discharge port, and a plurality of sub-upstream channels connected to the plurality of sub-discharge ports via the plurality of downstream channels. Including
The plurality of sub-upstream channels are all branched upstream channels branched into the plurality of downstream channels, and the sub-discharge port is provided for each of the downstream channels. The substrate processing apparatus as described in any one of Claims. The substrate processing apparatus according to claim 5, wherein the branch upstream channel is branched into the plurality of downstream channels in the chamber. The processing liquid supply system further includes a first nozzle and a second nozzle,
The plurality of discharge ports include a first discharge port provided in the first nozzle and a second discharge port provided in the second nozzle, and is a plan view in a radial direction orthogonal to the rotation axis. Lined up
The first nozzle includes a first arm portion extending in a horizontal longitudinal direction, and a first tip portion extending downward from the tip of the first arm portion,
The second nozzle includes a second arm portion extending in the longitudinal direction, and a second tip portion extending downward from a tip of the second arm portion,
Said first arm portion and the second arm portion is arranged in a horizontal array direction perpendicular to the longitudinal direction,
The front end of the first arm part and the front end of the second arm part are separated in the longitudinal direction in plan view so that the front end of the first arm part is located on the rotation axis side. The substrate processing apparatus according to claim 7.   A substrate holding unit that rotates around a vertical rotation axis passing through the center of the substrate while holding the substrate horizontally;
  By including and mixing a supply flow path, a plurality of upstream flow paths, a plurality of component liquid flow paths, a plurality of discharge ports, a mixing ratio changing unit, an upstream heater, and a plurality of downstream heaters A processing liquid supply system that supplies a processing liquid containing the first liquid and the second liquid that generate heat to the substrate held by the substrate holding unit;
  The supply channel guides the first liquid toward the plurality of upstream channels,
  The plurality of upstream flow paths branch from the supply flow path, guide the first liquid supplied from the supply flow path toward the plurality of discharge ports,
  The plurality of component liquid channels are connected to the plurality of upstream channels, respectively, and supply a second liquid mixed with the first liquid to each of the plurality of upstream channels,
  The plurality of discharge ports are respectively connected to the plurality of upstream flow paths at positions downstream from the plurality of component liquid flow paths, and are respectively disposed at a plurality of positions having different distances from the rotation axis. , Each of the treatment liquid containing the first liquid and the second liquid mixed in the plurality of upstream flow paths is discharged toward a plurality of positions in the upper surface of the substrate including the central portion of the upper surface of the substrate,
  The mixing ratio changing unit independently changes the mixing ratio of the first liquid and the second liquid contained in the processing liquid discharged from the plurality of discharge ports for each upstream flow path,
  The upstream heater heats the first liquid supplied to the supply flow path at an upstream temperature,
  The plurality of discharge ports are separated from the main discharge port that discharges the processing liquid toward the upper surface center portion of the substrate, away from the upper surface center portion, and have different distances from the rotation axis. A plurality of sub-discharge ports that discharge the processing liquid toward a plurality of positions,
  The plurality of upstream channels include a main upstream channel connected to the main discharge port, and a plurality of sub-upstream channels connected to the plurality of sub-discharge ports,
  The plurality of downstream heaters are connected to the plurality of sub-upstream channels, respectively, and heat the first liquid flowing through the plurality of sub-upstream channels at a downstream temperature higher than the upstream temperature. .   A substrate holding unit that rotates around a vertical rotation axis passing through the center of the substrate while holding the substrate horizontally;
  A tank, a supply channel, a plurality of upstream channels, a plurality of component liquid channels, a plurality of discharge ports, a mixing ratio changing unit, a plurality of downstream heaters, and a plurality of return channels. A processing liquid supply system that supplies a processing liquid containing a first liquid and a second liquid that generate heat by being mixed to a substrate held by the substrate holding unit;
  The tank stores the first liquid supplied to the supply flow path,
  The supply channel guides the first liquid supplied from the tank toward the plurality of upstream channels,
  The plurality of upstream flow paths branch from the supply flow path, guide the first liquid supplied from the supply flow path toward the plurality of discharge ports,
  The plurality of component liquid channels are connected to the plurality of upstream channels, respectively, and supply a second liquid mixed with the first liquid to each of the plurality of upstream channels,
  The plurality of discharge ports are respectively connected to the plurality of upstream flow paths at positions downstream from the plurality of component liquid flow paths, and are respectively disposed at a plurality of positions having different distances from the rotation axis. , Each of the treatment liquid containing the first liquid and the second liquid mixed in the plurality of upstream flow paths is discharged toward a plurality of positions in the upper surface of the substrate including the central portion of the upper surface of the substrate,
  The mixing ratio changing unit independently changes the mixing ratio of the first liquid and the second liquid contained in the processing liquid discharged from the plurality of discharge ports for each upstream flow path,
  The plurality of discharge ports are separated from the main discharge port that discharges the processing liquid toward the upper surface center portion of the substrate, away from the upper surface center portion, and have different distances from the rotation axis. A plurality of sub-discharge ports that discharge the processing liquid toward a plurality of positions,
  The plurality of upstream channels include a main upstream channel connected to the main discharge port, and a plurality of sub-upstream channels connected to the plurality of sub-discharge ports,
  The plurality of downstream heaters are connected to the plurality of sub-upstream channels, respectively, and heat the first liquid flowing through the plurality of sub-upstream channels at a downstream temperature,
  The plurality of return channels are respectively connected to the plurality of sub-upstream channels at positions upstream of the plurality of component liquid channels, and the first liquid heated by the plurality of downstream heaters is supplied to the tank. Substrate processing equipment that guides you toward   The substrate processing apparatus according to claim 9, wherein the processing liquid supply system further includes an upstream heater that heats the first liquid supplied from the tank to the supply flow path at an upstream temperature.

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