JP6454199B2 - Pressure calibration jig and substrate processing apparatus - Google Patents

Description

  The present invention relates to a pressure calibration jig and a substrate processing apparatus.

  In recent years, a substrate processing apparatus has been used to perform various processes on a substrate such as a semiconductor wafer. As an example of the substrate processing apparatus, there is a CMP (Chemical Mechanical Polishing) apparatus for polishing a substrate.

  The CMP apparatus is a polishing unit for performing a polishing process on a substrate, a cleaning unit for performing a cleaning process and a drying process on a substrate, a substrate that is transferred to the polishing unit and receives a substrate that has been cleaned and dried by the cleaning unit. Equipped with a load / unload unit. In addition, the CMP apparatus includes a polishing unit, a cleaning unit, and a transfer unit that transfers the substrate in the load / unload unit. The CMP apparatus sequentially performs various processes of polishing, cleaning, and drying while transporting the substrate by the transport unit.

  The polishing unit includes a polishing table to which a polishing pad for polishing the substrate is attached, and a holding unit for holding the substrate and pressing it against the polishing pad. Here, a plurality of airbags are provided inside the holding unit to adsorb and hold the substrate to the holding unit or to press the substrate against the polishing pad. By using the airbag, a uniform pressure can be applied to the entire substrate, so that uniform and stable polishing characteristics can be obtained. For this reason, the pressurized pressure supplied to the airbag is calibrated in advance so that a specified value can be accurately obtained.

  In the conventional calibration method, the airbag piping near the membrane of the airbag is taken out and connected to a pressure gauge, and the D / A parameter for calibration is calibrated while reading the measured value. First, in the initial parameters, actual measurement values are recorded when pressure is applied at several designated pressures. A parameter after calibration is calculated from the actual measurement value using a calculation formula, and is reflected in the apparatus. After the reflection, the actual measurement value of the pressure is confirmed again. If the value does not fall within the required accuracy, the post-calibration parameter is recalculated and reflected. The above process is repeated until the specification accuracy is satisfied. Since the above process is an operation for an air bag alone, it is necessary to perform a series of operations on each polishing table and each air bag in the apparatus. In addition, since the calibration work involves two types of work, operation of the apparatus and change of parameters, and measurement and calculation of pressure, it is desirable that the work be performed by two persons from the viewpoint of efficiency.

JP 2011-143537 A

  The prior art does not consider simplifying the calibration work of the airbag.

In other words, the conventional calibration method does not consider reducing the time required for work by partially automating and simplifying various work in calibration. In the conventional method, the work of performing calibration by connecting a plurality of airbags mounted on each polishing table to the pressure gauge one area at a time must be repeated. Also, the parameter calculation must be performed outside the apparatus, and the calculated value must be manually reflected in the apparatus. For this reason, it takes a lot of time and labor to perform calibration.

  Therefore, an object of the present invention is to simplify the calibration work of an airbag.

  One form of the pressure calibration jig of the present invention is made in view of the above problems, and pressurizes a plurality of airbags provided inside a holding portion for holding a substrate and pressing it against a polishing tool. A pressure calibration jig for calibrating pressure, wherein a plurality of first flow paths communicating with each of the plurality of airbags and the plurality of first flow paths are merged into one for pressure calibration. The second flow path connected to the pressure sensor and the flow path corresponding to the airbag selected for pressure calibration among the plurality of first flow paths, in the direction from the airbag toward the second flow path. A flow control unit configured to allow fluid to flow and to prevent a fluid from flowing from the second flow path toward the airbag with respect to a flow path other than the selected one flow path, The flow control unit is electrically operated. .

  Further, in one embodiment of the pressure calibration jig, the flow control unit includes a plurality of first on-off valves provided in each of the plurality of first flow paths to open and close the plurality of first flow paths, The plurality of first on-off valves are synchronized with the second on-off valves respectively provided in the plurality of main flow paths connecting the pressure regulator provided in the substrate processing apparatus having the holding unit and the plurality of airbags. The plurality of first flow paths may be connected between the second on-off valve and the airbag in the main flow path.

  Further, in one embodiment of the pressure calibration jig, the flow control unit includes a plurality of first on-off valves provided in each of the plurality of first flow paths to open and close the plurality of first flow paths, The plurality of first on-off valves bypass the second on-off valves respectively provided in the plurality of main flow paths connecting the pressure regulator provided in the substrate processing apparatus having the holding portion and the plurality of airbags. Driven by an electrical signal so as to operate in synchronization with a third on-off valve provided in the plurality of bypass passages, the plurality of first passages include the second on-off valve and the airbag in the main passage. May be connected between.

  Further, in one embodiment of the pressure calibration jig, the flow control unit includes a plurality of first on-off valves provided in each of the plurality of first flow paths to open and close the plurality of first flow paths, The plurality of first on-off valves are the air of the second on-off valves respectively provided in the plurality of main flow paths connecting the pressure regulator provided in the substrate processing apparatus having the holding portion and the plurality of airbags. Driven by an electrical signal so as to operate in synchronization with a fourth on-off valve provided in a plurality of suction channels branched from the bag side, the plurality of first channels are connected to the second on-off in the main channel A valve may be connected between the pressure regulator.

  In one embodiment of the pressure calibration jig, the electrical signal can be generated by a control unit of the substrate processing apparatus.

  In one embodiment of the pressure calibration jig, the pressure calibration jig receives a multi-connector that can flow through the plurality of first flow paths and an electrical signal for operating the flow control unit. An electrical connector, and may be connected to the substrate processing apparatus having the holding portion via the multi-connector and the electrical connector.

One aspect of the substrate processing apparatus of the present invention is a polishing table to which a polishing pad for polishing a substrate is attached, a holding unit for holding the substrate and pressing it against the polishing pad, and an inside of the holding unit And a plurality of pressure calibration jigs for calibrating the pressure applied to the plurality of airbags.

  According to this invention of this application, the calibration work of an air bag can be simplified.

FIG. 1 is a plan view of the substrate processing apparatus. FIG. 2 is a perspective view of the first polishing unit. FIG. 3A is a plan view of the cleaning unit. FIG. 3B is a side view of the cleaning unit. FIG. 4 is a diagram illustrating a configuration of the pressure calibration jig and the CMP apparatus according to the first embodiment. FIG. 5 is a diagram illustrating a configuration of a pressure calibration jig and a CMP apparatus according to the second embodiment. FIG. 6 is a diagram illustrating a configuration of a pressure calibration jig and a CMP apparatus according to the third embodiment. FIG. 7 is a flowchart of calibration using a pressure calibration jig.

  A substrate processing apparatus according to an embodiment of the present invention will be described below with reference to the drawings.

<Substrate processing equipment>
FIG. 1 is a plan view of the substrate processing apparatus. As shown in FIG. 1, the substrate processing apparatus 1000 includes a load / unload unit 200, a polishing unit 300, and a cleaning unit 400. Further, the substrate processing apparatus 1000 includes a control unit 500 for controlling various operations of the load / unload unit 200, the polishing unit 300, and the cleaning unit 400. Hereinafter, the load / unload unit 200, the polishing unit 300, and the cleaning unit 400 will be described.

<Load / Unload unit>
The load / unload unit 200 is a unit for transferring a substrate before the processing such as polishing and cleaning to the polishing unit 300 and receiving the substrate after the processing such as polishing and cleaning from the cleaning unit 400. It is. The load / unload unit 200 includes a plurality (four in the present embodiment) of front load units 220. Each front load unit 220 has a cassette 222 for stocking substrates.

  The load / unload unit 200 includes a traveling mechanism 230 installed inside the housing 100 and a plurality (two in this embodiment) of the transfer robots 240 disposed on the traveling mechanism 230. The transfer robot 240 takes out the substrate before processing such as polishing and cleaning from the cassette 222 and passes it to the polishing unit 300. Further, the transfer robot 240 receives the substrate after the processing such as polishing and cleaning from the cleaning unit 400 and returns it to the cassette 222.

<Polishing unit>
The polishing unit 300 is a unit for polishing a substrate. The polishing unit 300 includes a first polishing unit 300A, a second polishing unit 300B, and a third polishing unit 300C.
And a fourth polishing unit 300D. The first polishing unit 300A, the second polishing unit 300B, the third polishing unit 300C, and the fourth polishing unit 300D have the same configuration. Therefore, only the first polishing unit 300A will be described below.

  The first polishing unit 300A includes a polishing table 320A and a top ring 330A. The polishing table 320A is rotationally driven by a drive source (not shown). A polishing pad 310A is attached to the polishing table 320A. The top ring 330A holds the substrate and presses it against the polishing pad 310A. The top ring 330A is rotationally driven by a drive source (not shown). The substrate is polished by being held by the top ring 330A and being pressed against the polishing pad 310A.

  Next, a transport mechanism for transporting the substrate will be described. The transport mechanism includes a lifter 370, a first linear transporter 372, a swing transporter 374, a second linear transporter 376, and a temporary placement table 378.

  The lifter 370 receives a substrate from the transfer robot 240. The first linear transporter 372 transports the substrate received from the lifter 370 between the first transport position TP1, the second transport position TP2, the third transport position TP3, and the fourth transport position TP4. The first polishing unit 300A and the second polishing unit 300B receive the substrate from the first linear transporter 372 and polish it. The first polishing unit 300A and the second polishing unit 300B pass the polished substrate to the first linear transporter 372.

  The swing transporter 374 transfers the substrate between the first linear transporter 372 and the second linear transporter 376. The second linear transporter 376 transports the substrate received from the swing transporter 374 between the fifth transport position TP5, the sixth transport position TP6, and the seventh transport position TP7. The third polishing unit 300C and the fourth polishing unit 300D receive the substrate from the second linear transporter 372 and polish it. The third polishing unit 300C and the fourth polishing unit 300D pass the polished substrate to the second linear transporter 376. The substrate that has been subjected to the polishing process by the polishing unit 300 is placed on the temporary placement table 378 by the swing transporter 374.

<Washing unit>
The cleaning unit 400 is a unit for performing a cleaning process and a drying process on the substrate subjected to the polishing process by the polishing unit 300. The cleaning unit 400 includes a first cleaning chamber 410, a first transfer chamber 420, a second cleaning chamber 430, a second transfer chamber 440, and a drying chamber 450.

  The substrate placed on the temporary placement table 378 is transferred to the first cleaning chamber 410 or the second cleaning chamber 430 through the first transfer chamber 420. The substrate is cleaned in the first cleaning chamber 410 or the second cleaning chamber 430. The substrate cleaned in the first cleaning chamber 410 or the second cleaning chamber 430 is transferred to the drying chamber 450 through the second transfer chamber 440. The substrate is dried in the drying chamber 450. The dried substrate is taken out from the drying chamber 450 by the transfer robot 240 and returned to the cassette 222.

<Detailed configuration of first polishing unit>
Next, details of the first polishing unit 300A will be described. FIG. 2 is a perspective view of the first polishing unit 300A. The first polishing unit 300A includes a polishing liquid supply nozzle 340A for supplying a polishing liquid or a dressing liquid to the polishing pad 310A. The polishing liquid is, for example, a slurry. The dressing liquid is pure water, for example. The first polishing unit 3
00A includes a dresser 350A for conditioning the polishing pad 310A. Further, the first polishing unit 300A includes an atomizer 360A for injecting a liquid or a mixed fluid of a liquid and a gas toward the polishing pad 310A. The liquid is, for example, pure water. The gas is, for example, nitrogen gas.

  The top ring 330A is supported by the top ring shaft 332A. The top ring 330A is rotated around the axis of the top ring shaft 332A by a drive unit (not shown) as indicated by an arrow AB. The polishing table 320A is supported by the table shaft 322A. The polishing table 320A is rotated around the axis of the table shaft 322A by a drive unit (not shown) as indicated by an arrow AC.

  The substrate WF is held by vacuum suction on the surface of the top ring 330A facing the polishing pad 310A. At the time of polishing, the polishing liquid is supplied from the polishing liquid supply nozzle 340A to the polishing surface of the polishing pad 310A. At the time of polishing, the polishing table 320A and the top ring 330A are driven to rotate. The substrate WF is polished by being pressed against the polishing surface of the polishing pad 310A by the top ring 330A.

<Detailed configuration of cleaning unit>
Next, details of the cleaning unit 400 will be described. FIG. 3A is a plan view of the cleaning unit 400. FIG. 3B is a side view of the cleaning unit 400. As shown in FIGS. 3A and 3B, the cleaning unit 400 includes a first cleaning chamber 410, a first transfer chamber 420, a second cleaning chamber 430, a second transfer chamber 440, and a drying chamber 450. .

  In the first transfer chamber 420, a support shaft 424 extending in the vertical direction and a first transfer robot 422 supported by the support shaft 424 so as to be movable are arranged. The first transfer robot 422 can be moved in the vertical direction along the support shaft 424 by a drive mechanism such as a motor. The first transfer robot 422 receives the substrate WF placed on the temporary placement table 378. The first transfer robot 422 transfers the substrate WF received from the temporary placement table 378 to the first cleaning chamber 410 or the second cleaning chamber 430.

  In the first cleaning chamber 410, an upper primary cleaning module 412A and a lower primary cleaning module 412B are arranged along the vertical direction. Similarly, an upper secondary cleaning module 432A and a lower secondary cleaning module 432B are disposed in the second cleaning chamber 430 along the vertical direction. The upper primary cleaning module 412A, the lower primary cleaning module 412B, the upper secondary cleaning module 432A, and the lower secondary cleaning module 432B are cleaning machines that clean the substrate using a cleaning liquid. Between the upper secondary cleaning module 432A and the lower secondary cleaning module 432B, a temporary substrate placement table 434 is provided.

  The first transfer robot 422 includes a temporary placing table 378, an upper primary cleaning module 412A, a lower primary cleaning module 412B, a temporary placing table 434, an upper secondary cleaning module 432A, and a lower secondary cleaning module 432B. The substrate WF can be transferred. The first transfer robot 422 has an upper hand and a lower hand. Since slurry adheres to the substrate before cleaning, the first transport robot 422 uses the lower hand when transporting the substrate before cleaning. On the other hand, the first transfer robot 422 uses the upper hand when transferring the cleaned substrate.

In the second transfer chamber 440, a support shaft 444 extending in the vertical direction and a second transfer robot 442 movably supported by the support shaft 444 are disposed. The second transfer robot 442 can move in the vertical direction along the support shaft 444 by a drive mechanism such as a motor. The second transfer robot 442 receives the substrate WF from the second cleaning chamber 430 and transfers it to the drying chamber 450.

  In the drying chamber 450, an upper drying module 452A and a lower drying module 452B are arranged along the vertical direction. The upper drying module 452A and the lower drying module 452B are provided with fan filter units 454A and 454B for supplying clean air into the upper drying module 452A and the lower drying module 452B.

  The second transfer robot 442 can transfer the substrate WF between the upper secondary cleaning module 432A, the lower secondary cleaning module 432B, the temporary placement table 434, the upper drying module 452A, and the lower drying module 452B. it can. Since the second transport robot 442 transports the cleaned substrate, it has only one hand.

  The substrate WF is dried by the upper drying module 452A or the lower drying module 452B, and then taken out from the drying chamber 450 by the upper hand of the transfer robot 240 shown in FIG. The transfer robot 240 returns the substrate WF taken out from the drying chamber 450 to the cassette 222.

<Airbag pressure calibration>
<First Embodiment>
Next, airbag pressure calibration will be described. FIG. 4 is a diagram illustrating a configuration of the pressure calibration jig and the CMP apparatus according to the first embodiment. FIG. 4 shows an example in which three airbags 310-1 to 310-3 are provided inside the top ring 330 </ b> A for the sake of simplicity. However, the present invention is not limited to this, and the number of airbags is arbitrary. It is.

  The pressure calibration jig 600 is a jig for calibrating the pressure applied to the plurality of airbags 310-1 to 310-3 provided inside the top ring 330 </ b> A. As shown in FIG. 4, the pressure calibration jig 600 is used by being connected to a CMP apparatus and a calibration pressure sensor 700. Specifically, the CMP apparatus includes a multi-connector 360 that can flow through a plurality of flow paths, and the pressure calibration jig 600 includes a multi-connector 620 that can flow through a plurality of flow paths. . The CMP apparatus and the pressure calibration jig 600 are connected to each other via multi-connectors 360 and 620. The pressure calibration jig 600 includes a connector 630 that can flow through the flow path, and is connected to the calibration pressure sensor 700 via the connector 630. The calibration pressure sensor 700 may be incorporated in the pressure calibration jig 600.

  The pressure calibration jig 600 includes a plurality of first flow paths 640-1 to 640-3 communicating with each of the plurality of airbags 310-1 to 310-3. Specifically, the CMP apparatus includes a pressure regulator 320 for applying pressure (for example, air pressure) to the plurality of airbags 310-1 to 310-3. The pressure regulator 320 and the plurality of airbags 310-1 to 310-3 are connected by a plurality of main flow paths 370-1 to 370-3. For simplification of explanation, FIG. 4 shows only the configuration of the main flow path 370-1. The main channel 370-1 is provided with an on-off valve (second on-off valve) 340 that opens and closes the main channel 370-1. The plurality of first flow paths 640-1 to 640-3 are connected between the on-off valve 340 and the airbag 310 in the plurality of main flow paths 370-1 to 370-3, whereby the airbags 310-1 to 310-1. It communicates with each of 310-3.

  Further, the pressure calibration jig 600 includes a second flow path 650 that joins the plurality of first flow paths 640-1 to 640-3 together and connects to the calibration pressure sensor 700. As shown in FIG. 4, the first flow paths 640-1 to 640-3 merge into one in the second flow path 650. The second flow path 650 is connected to the calibration pressure sensor 700 via the connector 630.

  In addition, the pressure calibration jig 600 includes a second flow path 650 from the airbag 310 for the flow path corresponding to the airbag selected for pressure calibration among the plurality of first flow paths 640-1 to 640-3. A flow control unit 610 that allows fluid to flow in the direction of, and prevents the fluid from flowing from the second flow path 650 toward the airbag 310 for a flow path other than the selected one flow path. Prepare.

  Specifically, the flow control unit 610 is provided with each of the plurality of first flow paths 640-1 to 640-3 to open and close the plurality of first flow paths 640-1 to 640-3 ( First open / close valve) 610-1 to 610-3. In the CMP apparatus, on / off valves 340 are respectively provided in the plurality of main flow paths 370-1 to 370-3 connecting the pressure regulator 320 and the plurality of airbags 310-1 to 310-3. The plurality of on-off valves 610-1 to 610-3 are driven by electrical signals so as to operate in synchronization with the on-off valve 340. For this reason, the pressure calibration jig 600 includes an electrical connector and is connected to the CMP apparatus via the electrical connector. In FIG. 4, only the electrical connector 660 is shown, and the electrical connector 660 is used to electrically operate the on-off valve 610-1. The pressure calibration jig 600 includes similar electrical connectors for the on-off valves 610-2 and 610-3.

  The on-off valve 340 opens and closes the main flow path 370-1 based on the control air pressure output from the electromagnetic valve (SV 1) 352. The electromagnetic valve 352 is opened and closed based on an electrical signal output from the control unit (PLC) 500. The control unit (PLC) 500 outputs an electrical signal for opening and closing the on-off valve 610-1 in synchronization with the on-off valve 340. The on-off valve 340 and the on-off valve 610-1 are both normally closed (NC) on-off valves that are normally closed and open when air is pressurized or energized. Thereby, when the on-off valve 340 is opened, the on-off valve 610-1 is also opened, and when the on-off valve 340 is closed, the on-off valve 610-1 is also closed. The same applies to the main flow paths 370-2 and 370-3. For example, the main channel 370-2 and the first channel 640-2 communicate with each other. The control unit (PLC) 5 is an electric signal for controlling opening / closing of the on-off valve 340 installed in the main flow path 370-2 and an electric signal for opening / closing the on-off valve 610-2 in synchronization with the on-off valve 340. And are output.

  Next, the calibration of the pressure of the airbag 310 will be described. Here, as an example, calibration of the airbag 310-1 will be described. First, the D / A value sent from the control unit (PLC) 5 to the pressure regulator 320 is calibrated. The control unit 500 sends a command value (D / A value) to the pressure regulator 320 so that the airbag 310-1 becomes a predetermined pressure (for example, 25 hPa), and the pressure regulator 320 based on the received command value. -1 is pressurized.

  At the time of calibration, the on-off valve 340 is controlled to open, and the on-off valve 610-1 is also controlled to open in synchronization with this. Accordingly, the pressure applied to the airbag 310-1 is supplied to the calibration pressure sensor 700 via the main flow path 370-1, the first flow path 640-1, and the second flow path 650.

  On the other hand, since the on-off valves 610-2 and 610-3 are controlled to be closed, the pressure applied to the second flow path 650 is not transmitted to the airbags 310-2 and 310-3. Therefore, the calibration pressure sensor 700 can measure only the pressure applied to the airbag 310-1. The pressure value measured by the calibration pressure sensor 700 is fed back to the control unit 500.

The control unit 500 performs the above processing similarly at different pressures (for example, 100 hPa, 200 hPa, etc.), and based on the pressure value fed back from the calibration pressure sensor 700,
The D / A value sent from the controller 500 to the pressure regulator 320 is calibrated. That is, if the measured pressure value is higher than the command value, the D / A value is corrected to be smaller, and if the measured pressure value is lower than the command value, the D / A value is corrected to be larger. If the measured pressure value is equal to the value, no correction is performed.

  When the calibration of the D / A value sent from the control unit 500 to the pressure regulator 320 is completed for the airbag 310-1, the control unit 500 similarly calibrates the other airbags 310-2 and 310-3. I do.

  When the calibration of the D / A value sent from the control unit 500 to the pressure regulator 320 is completed for all the airbags 310-1 to 310-3, the control unit 500 is then provided inside the CMP apparatus. The A / D value of the pressure sent from the received pressure sensor 322 to the control unit 500 is calibrated.

  Specifically, the control unit 500 sends a command value (D / A value) to the pressure regulator 320 so that a predetermined pressure (for example, 25 hPa) is obtained, and the pressure regulator 320 controls the pressure sensor 322 based on the received command value. Pressurize. The pressure value measured by the pressure sensor 322 is fed back to the control unit 500.

  The control unit 500 performs the above processing similarly at different pressures (eg, 100 hPa, 200 hPa, etc.), and based on the pressure value fed back from the pressure sensor 322, the pressure A sent from the pressure sensor 322 to the control unit 500 is displayed. / D value calibration is performed. That is, if the actually measured pressure value is higher than the command value, the A / D value is corrected to be small. If the actually measured pressure value is low to the command value, the A / D value is corrected to be large. If the measured pressure value is equal to the value, no correction is performed.

  When the calibration of the A / D value of the pressure sent from the pressure sensor 322 to the control unit 500 is completed, the control unit 500 next transfers the pressure sensor 324 provided in the CMP apparatus to the control unit 500. Calibrate the A / D value of the sent pressure.

  Specifically, the control unit 500 sends a command value (D / A value) to the pressure regulator 320 so that the airbag 310-1 becomes a predetermined pressure (for example, 25 hPa), and the pressure regulator 320 changes the received command value to the command value. Based on this, the airbag 310-1 is pressurized. The pressure applied to the airbag 310 is measured by the pressure sensor 324, and the pressure value measured by the pressure sensor 324 is fed back to the control unit 500.

  The control unit 500 performs the above processing similarly at different pressures (for example, 100 hPa, 200 hPa, etc.), and based on the pressure value fed back from the pressure sensor 324, the pressure A sent from the pressure sensor 324 to the control unit 500 is displayed. / D value calibration is performed. That is, if the actually measured pressure value is higher than the command value, the A / D value is corrected to be small. If the actually measured pressure value is low to the command value, the A / D value is corrected to be large. If the measured pressure value is equal to the value, no correction is performed.

  When the calibration of the A / D value of the pressure sent from the pressure sensor 324 to the control unit 500 is completed for the airbag 310-1, the control unit 500 also applies to the other airbags 310-2 and 310-3. Perform calibration.

As described above, according to the first embodiment, the calibration work of the airbag can be simplified. That is, in the prior art, calibration is performed by connecting a calibration pressure sensor to a target airbag, and after calibration is completed, calibration is performed by reconnecting the calibration pressure sensor to another target airbag. It is necessary to repeat this work according to the number of airbags. According to this, the number of workers for the calibration work increases and the calibration work takes a long time. On the other hand, according to the first embodiment, after connecting the pressure calibration jig 600 to the CMP apparatus and the calibration pressure sensor 700, it is possible to automatically calibrate a plurality of airbags. Therefore, according to the first embodiment, calibration of the pressures of a plurality of airbags can be performed in a short time and with little effort.

Second Embodiment
Next, pressure calibration of the airbag according to the second embodiment will be described. FIG. 5 is a diagram illustrating a configuration of a pressure calibration jig and a CMP apparatus according to the second embodiment. The second embodiment is different from the first embodiment in that the on-off valve inside the pressure calibration jig 600 is changed from a normally closed to a normally open on-off valve. Further, in the second embodiment, as compared with the first embodiment, the open / close valve in the pressure calibration jig 600 opens and closes the bypass flow path 380 provided in the main flow path (third open / close valve). ) It differs in that it operates in synchronization with 342. Since other configurations are the same as those of the first embodiment, only portions different from the first embodiment will be described.

  The flow control unit 610 is provided in each of the plurality of first flow paths 640-1 to 640-3, and a plurality of first on-off valves 612-1 to open and close the plurality of first flow paths 640-1 to 640-3. 612-3 included. The first on-off valves 612-1 to 612-3 are normally open (NO) on-off valves that are normally open and closed when energized.

  As for the main flow path 370-1, a flow meter 330 is provided between the on-off valve 340 and the pressure regulator 320 in the main flow path 370-1, and the main flow path 370-1 includes a flow meter 330 and an on-off valve 340. A bypass channel 380 is provided to bypass the. The bypass channel 380 is provided with an on-off valve (third on-off valve) 342 that opens and closes the bypass channel 380. In addition, the bypass flow path 380 accelerates the pressurization of the airbag 310-1, and in other words, when the pressurization of the airbag 310-1 is started, the start-up is delayed by the restriction of the flow meter 330. It is provided to suppress this. The main channels 370-2 and 370-3 are the same as the main channel 370-1.

  The plurality of first on-off valves 612-1 to 612-3 operate in synchronization with the third on-off valve. Specifically, for the main flow path 370-1, the open / close valve 342 opens and closes based on the control air pressure output from the electromagnetic valve (SV 2) 354. The electromagnetic valve 354 is opened and closed based on an electrical signal output from the control unit 500. Further, the controller 500 outputs an electrical signal for opening and closing the on-off valve 612-1 in synchronization with the third on-off valve. The on-off valve 342 is a normally-closed on-off valve, and the on-off valve 612-1 is a normally-open on-off valve. Therefore, when the on-off valve 342 is opened, the on-off valve 612-1 is closed and the on-off valve 342 is closed. When is closed, the on-off valve 612-1 is opened. The same applies to the main flow paths 370-2 and 370-3.

  As described above, according to the second embodiment, the calibration work of the airbag can be simplified as in the first embodiment. In the second embodiment, the on-off valve 612 in the pressure calibration jig 600 is synchronized with the on-off valve 342 (electromagnetic valve 354) of the bypass flow path 380. Leakage between the one flow paths 640 can be prevented. That is, the electromagnetic valve 352 may be set to ON when the airbag 310 is pressurized, OFF when the airbag 310 is adsorbed, and ON when it is free when neither pressurization nor adsorption is performed. In this case, since the operation of the solenoid valve 352 is the same in the pressurizing state and the free state, when the on-off valve 612 is synchronized with the solenoid valve 352, all the on-off valves 612 in the pressure calibration jig 600 are used. May open and leak between the first flow paths 640 may occur.

  On the other hand, the electromagnetic valve 354 is set to OFF when pressurizing the airbag 310, OFF when sucking the airbag 310, and ON when free and not pressurized. According to this, since the operation of the electromagnetic valve 354 is different between the pressurizing state and the free state, the first flow path corresponding to the pressure calibration target airbag is opened, and the other first flow paths are closed. Can be. As a result, for the first flow path corresponding to the airbag to be pressure calibrated, the fluid can flow from the airbag in the direction of the second flow path, and the second flow path for the other first flow paths. It is possible to prevent the fluid from flowing in the direction of the air bag.

<Third Embodiment>
Next, pressure calibration of the airbag according to the third embodiment will be described. FIG. 6 is a diagram illustrating a configuration of a pressure calibration jig and a CMP apparatus according to the third embodiment. The third embodiment is different from the first embodiment in that the connection destinations of the first flow paths 640-1 to 640-3 are changed. Further, in the third embodiment, as compared with the first embodiment, the on-off valve inside the pressure calibration jig 600 is branched from the airbag side of the on-off valve 340 in the main passage. The difference is that it operates in synchronism with an on-off valve (fourth on-off valve) 344 that opens and closes. Since other configurations are the same as those of the first embodiment, only portions different from the first embodiment will be described.

  The flow control unit 610 is provided in each of the plurality of first flow paths 640-1 to 640-3, and opens and closes the plurality of first flow paths 640-1 to 640-3. 3 is included. As for the main flow path 370-1, a suction flow path 390 is branched from the airbag 310-1 side of the on-off valve 340 in the main flow path 370-1. The suction channel 390 is provided with an on-off valve (fourth on-off valve) 344 that opens and closes the suction channel 390. The on-off valve 344 opens and closes based on the control air pressure output from the electromagnetic valve (SV3) 356. The main channels 370-2 and 370-3 are the same as the main channel 370-1.

  A plurality of suction flow paths 390 branched from the main flow paths 370-1 to 370-3 merge into a single suction flow path 392. When adsorbing the wafer WF to the top ring 330 </ b> A, the airbag 310 is evacuated via the suction flow path 392. The suction channel 392 is provided with an on-off valve (fifth on-off valve) 346 that opens and closes the suction channel 392. The on-off valve 346 opens and closes based on the control air pressure output from the electromagnetic valve (SV4) 358.

  The plurality of on-off valves 610-1 to 610-3 operate in synchronization with the on-off valve 344. Specifically, for the main flow path 370-1, the open / close valve 344 opens and closes based on the control air pressure output from the electromagnetic valve (SV 3) 356. The electromagnetic valve 356 is opened and closed based on an electric signal output from the control unit 500. In addition, the controller 500 outputs an electrical signal for opening and closing the on-off valve 610-1 in synchronization with the on-off valve 344. The on / off valve 344 is a normally open on / off valve, and the on / off valve 610-1 is a normally closed on / off valve. Therefore, when the on / off valve 344 is opened, the on / off valve 610-1 is closed and the on / off valve 344 is closed. When is closed, the on-off valve 610-1 is opened. When the air bag 310-1 is calibrated, the on-off valve 344 communicating with the main flow path 370-1 is closed and the on-off valve 610-1 is opened. When the air bag 310-1 is calibrated, the on-off valve 344 communicating with the main flow paths 370-2, 370-3 is opened, and the on-off valves 610-2, 610-3 are closed. The same applies to the main flow paths 370-2 and 370-3.

  The plurality of first flow paths 640-1 to 640-3 are connected between the on-off valve 340 and the pressure regulator 320 in the main flow paths 370-1 to 370-3. More specifically, the plurality of first flow paths 640-1 to 640-3 are connected between the on-off valve 340 and the flow meter 330 in the main flow paths 370-1 to 370-3.

  As described above, according to the third embodiment, the calibration work of the airbag can be simplified as in the first embodiment. In the third embodiment, it is possible to prevent the polishing pad 10 from being deformed by pressing the wafer WF against the polishing pad 10 in order to prevent air from leaking from the airbag 310 during the calibration of the airbag. it can. That is, when the wafer WF is not set in the airbag during air bag calibration, air leaks from the airbag. In order to solve this problem, it is conceivable to set the wafer WF and press the wafer WF against the polishing pad 10. In this case, however, it is necessary to prepare the wafer WF, and the pressing causes the shape of the polishing pad 10 to be lost. There is a fear.

  On the other hand, in the third embodiment, the first flow paths 640-1 to 640-3 are connected between the on-off valve 340 and the pressure regulator 320 in the main flow paths 370-1 to 370-3. For this reason, in the third embodiment, the on-off valves 610-1 to 610-3 operate in synchronization with the on-off valve 344. Therefore, according to the third embodiment, it is possible to prevent the wafer WF from being prepared or the polishing pad 10 from being deformed during the airbag calibration operation.

  In addition, in the third embodiment, it is possible to prevent the airbag from being unintentionally vacuum-adsorbed during calibration. That is, the open / close valve 346 is closed during calibration. Since the on-off valve 346 is an on-off valve such as a vacuum suction main plug, by closing the on-off valve 346, even if any of the suction flow paths 390 is open, an air bag is not intended. Therefore, it is possible to prevent vacuum adsorption.

  In the third embodiment, when the air bag is pressurized during normal operation without calibration, the on-off valve 340 is controlled to open and the on-off valves 342, 344, 346 are closed. Further, when the airbag is adsorbed during normal operation, the on-off valves 340 and 342 are controlled to be closed and the on-off valves 344 and 346 are controlled to be open. When the airbag is not pressurized or adsorbed during normal operation, the on-off valves 340 and 342 are controlled to open and the on-off valves 344 and 346 are closed.

  In the third embodiment, in the calibration mode, when actually calibrating the airbag 310-1, for example, the on-off valves 340 and 342 are closed and the on-off valves 344 and 346 are closed. The on-off valve 610-1 is controlled to be opened, and the on-off valves 610-2 and 610-3 are controlled to be closed. In the calibration mode, when the calibration is not performed, the on-off valves 340, 342, and 346 are closed, the on-off valve 344 is opened, and the on-off valves 610-1 to 610-3 are closed. The

<Flowchart>
Next, the flow of the calibration process using the pressure calibration jig of the first to third embodiments will be described. FIG. 7 is a flowchart of calibration using a pressure calibration jig.

  As shown in FIG. 7, the calibration method first selects a unit (step S101). Specifically, the calibration method selects a unit to be calibrated from the first polishing unit 300A, the second polishing unit 300B, the third polishing unit 300C, and the fourth polishing unit 300D of the CMP apparatus. .

  Subsequently, the calibration method removes the external connector closing socket (step S102). In the CMP apparatus, normally, an external connector closing socket is attached to the multi-connector 360 so that the terminals of the multi-connector 360 are not exposed. At the time of calibration, the external connector closing socket is removed.

  Subsequently, in the calibration method, the pressure calibration jig 600 is connected to the CMP apparatus via the multi-connector 360 and the electrical connector, and the calibration pressure sensor 700 is connected to the CMP apparatus (step S103). Subsequently, the calibration method selects an airbag (step S104). In the example of FIGS. 4 to 6, the airbag to be calibrated is selected from the airbags 310-1 to 310-3.

  Subsequently, the calibration method executes calibration (step S105). The calibration procedure is as described above.

  Subsequently, in the calibration method, it is determined whether or not the calibration of all airbags in the calibration target polishing unit has been completed (step S106).

  When it is determined that the calibration of all airbags has not been completed (No in step S106), the calibration method returns to step S104 and selects an airbag that has not been calibrated.

  On the other hand, in the calibration method, when it is determined that the calibration of all airbags has been completed (step S106, Yes), the pressure calibration jig 600 and the calibration pressure sensor 700 are removed (step S107). . Subsequently, in the calibration method, an external connector closing socket is attached (step S108).

  Subsequently, in the calibration method, it is determined whether or not calibration of all the polishing units has been completed (step S109). When it is determined that the calibration of all the polishing units has not been completed (No in Step S109), the calibration method returns to Step S101 and selects a polishing unit that has not been calibrated.

  On the other hand, in the calibration method, when it is determined that the calibration of all the polishing units is completed (step S109, Yes), the calibration process is terminated.

  As described above, according to the pressure calibration jig 600 of the first to third embodiments, all airbags in each polishing table can be collectively connected to the calibration pressure sensor 700 and only the airbag pressure to be measured is measured. Can be selected automatically.

  In other words, the pressure measurement and the CMP apparatus parameter changing operation can be semi-automated by using an auto calibration tool in the CMP apparatus. Work time can be shortened by automatically performing a series of manual operations in the CMP method, such as acquisition of actual pressure values, calculation of post-calibration parameters from actual values, and application of parameters in the conventional method. become. However, even if the calibration is automated, the connection between the target airbag and the calibration pressure sensor 700 must be switched manually, so that the operator must repeat the operation of the apparatus and the connection change alternately. By omitting this step, further work shortening is expected.

In this respect, a connector that allows the piping to be branched from the airbag to the outside of the polishing unit and connected externally in a lump in order to omit the work of disassembling the polishing unit and connecting each airbag and the calibration pressure sensor 700 every measurement. It is also possible to place By connecting the calibration pressure sensor 700 to the connector, all the airbags in the polishing table and the calibration pressure sensor 700 are connected.
Can be connected. However, if all the airbags are connected to the calibration pressure sensor 700, the pressurized fluid leaks between the airbags at the time of pressurization, so that the correct pressure cannot be measured. Therefore, by installing the pressure calibration jig 600 of the first to third embodiments between the connector and the calibration pressure sensor 700, only the airbag to be measured can be connected to the calibration pressure sensor 700.

  The pressure calibration jig 600 of the first to third embodiments is provided with a valve manifold in the pressure calibration jig 600. Prepare one valve per airbag area and open it when pressurized, and close it otherwise. The valve is operated so as to operate in synchronism with a specific valve on the CMP apparatus side by an electrical signal from a control unit 500 provided in the CMP apparatus. By this method, only the valve of the pressurized airbag is automatically opened and can be connected to the calibration pressure sensor 700. As a method for operating the pressure calibration jig 600 side valve to be used, either a normally closed (NC) or a normally open (NO) method can be used. When the NC valve is used, it is opened when energized and closed otherwise. Therefore, it can be operated by synchronizing with a valve that operates only when the airbag is pressurized among the valves in the CMP apparatus. On the other hand, when the NO valve is used, it closes when energized and opens in other cases, and operates in the opposite direction to the NC valve, so the target operation is possible by synchronizing with the valve that closes when the airbag is pressurized. is there. Thus, according to the first to third embodiments, the valve in the pressure calibration jig 600 is electrically operated. Thereby, for example, it is not necessary to consider pressure loss compared to valve driving by operating air through a pipe, and the valve can be opened and closed with high accuracy.

  According to any of the embodiments described above, it is possible to measure the pressure at the time of pressurization of the designated airbag without requiring pipe reconnection and independent operation other than the CMP apparatus. In the conventional calibration method, the work time required for each polishing table is about 3 hours for two persons. On the other hand, by using the means of this embodiment, it is possible to shorten the time to about 45 minutes by one person for each polishing table. Therefore, a significant improvement in work efficiency in starting up or maintaining the polishing apparatus is expected.

  Further, in the conventional method, since the airbag piping near the membrane of the airbag is removed and connected to the calibration pressure sensor 700, there is a risk of erroneous piping when connecting again after calibration. In the embodiment, since the pressure calibration jig 600 is collectively connected, an effect of preventing an operation error at the time of pipe connection is expected. Further, in the pressure calibration, since the operator himself / herself measures the value of the calibration pressure sensor 700, the measurement result varies depending on the operator. In the present embodiment, since pressure measurement and parameter calculation are automatically performed, it is possible to prevent variations in the results and to improve the stability of calibration.

330A Top ring 310-1 to 310-3 Air bag 320 Pressure regulator 340, 342, 344, 346 On-off valve 352, 354, 356 Solenoid valve 360, 620 Multi-connector 370-1 to 370-3 Main flow path 380 Bypass flow path 390 , 392 Suction channel 600 Pressure calibration jig 610 Flow control unit 610-1 to 610-3 On-off valve 612 On-off valve 614 Check valve 630 Connector 640-1 to 640-3 First channel 650 Second channel 660 Electrical Connector 700 Calibration Pressure Sensor WF Wafer

Claims (7)

A pressure calibration jig for calibrating the pressure applied to a plurality of airbags provided inside a holding unit for holding a substrate and pressing the polishing tool,
A plurality of first flow paths communicating with each of the plurality of airbags;
A second flow path that joins the plurality of first flow paths into one and connects to a pressure sensor for pressure calibration;
The flow path corresponding to the airbag selected for pressure calibration among the plurality of first flow paths allows fluid to flow from the airbag in the direction of the second flow path and the selected flow path. For a flow path other than one flow path, a flow control unit that prevents fluid from flowing from the second flow path toward the airbag; and
A pressure calibration jig, wherein the flow control unit is electrically operated. The pressure calibration jig according to claim 1,
The flow control unit includes a plurality of first open / close valves provided in each of the plurality of first flow paths to open and close the plurality of first flow paths,
The plurality of first on-off valves are synchronized with second on-off valves respectively provided in a plurality of main flow paths connecting the pressure regulator provided in the substrate processing apparatus having the holding portion and the plurality of airbags. Driven by electrical signals to operate as
The plurality of first flow paths are connected between the second on-off valve and the airbag in the main flow path.
A pressure calibration jig characterized by that. The pressure calibration jig according to claim 1,
The flow control unit includes a plurality of first open / close valves provided in each of the plurality of first flow paths to open and close the plurality of first flow paths,
The plurality of first on-off valves bypass the second on-off valves respectively provided in the plurality of main flow paths connecting the pressure regulator provided in the substrate processing apparatus having the holding portion and the plurality of airbags. Driven by an electrical signal so as to operate in synchronism with a third on-off valve provided in a plurality of bypass channels,
The plurality of first flow paths are connected between the second on-off valve and the airbag in the main flow path.
A pressure calibration jig characterized by that. The pressure calibration jig according to claim 1,
The flow control unit includes a plurality of first open / close valves provided in each of the plurality of first flow paths to open and close the plurality of first flow paths,
The plurality of first on-off valves are the second on-off valves provided respectively in a plurality of main flow paths connecting the pressure regulator provided in the substrate processing apparatus having the holding portion and the plurality of airbags. It is driven by an electrical signal so as to operate in synchronization with the fourth on-off valve provided in the plurality of suction flow paths branched from the airbag side,
The plurality of first flow paths are connected between the second on-off valve and the pressure regulator in the main flow path.
A pressure calibration jig characterized by that. In the pressure calibration jig according to any one of claims 2 to 4,
The pressure calibration jig, wherein the electrical signal is generated by a control unit of the substrate processing apparatus. In the pressure calibration jig according to any one of claims 1 to 5,
A multi-connector that can flow through the plurality of first flow paths; and an electrical connector that receives an electrical signal for operating the flow control unit;
Connected to the substrate processing apparatus having the holding portion via the multi-connector and the electrical connector.
A pressure calibration jig characterized by that. A polishing table to which a polishing pad for polishing a substrate is attached;
A holding unit for holding the substrate and pressing it against the polishing pad;
A plurality of airbags provided inside the holding portion;
The pressure calibration jig according to any one of claims 1 to 6 for calibrating the pressure applied to the plurality of airbags;
A substrate processing apparatus comprising:

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