JP6440553B2 - Method for producing a film made of metal or alloy - Google Patents

Description

  The present invention relates to a method for producing a metal film made of a metal or an alloy and a metal film made of a metal or an alloy.

  Conventionally, metal foils, such as copper, are manufactured by the rolling method and the electrolytic method. In the electrolysis method, an electrolytic solution is passed between an anode made of insoluble metal and a cylindrical metal cathode drum whose surface is mirror-polished, and an electric potential is applied between the anode and the cathode drum. In this method, the metal is electrodeposited and the metal having a predetermined thickness is peeled off (see, for example, Patent Documents 1 and 2).

  Further, after forming a metal film on the polymer film support by sputtering, vacuum deposition, ion plating, plating, etc., the polymer film support is removed by dissolution or the like to form a metal foil. A technique is also disclosed (see, for example, Patent Document 3).

Japanese Unexamined Patent Publication No. 04-36489 Japanese Patent Laid-Open No. 03-126847 Japanese Patent Laid-Open No. 07-113175

  However, only a metal foil having a high malleability can be obtained by the rolling method. Further, although many types of metal foils are manufactured by the electrolysis methods described in Patent Documents 1 and 2, no system for manufacturing metal foils of all metals or alloy types has been established.

  Although the technique described in Patent Document 3 can form a metal foil of many types of metal by various methods, it has a problem that the process of removing the polymer film is long, and a metal film is formed by sputtering or vapor deposition. In this case, it takes a long time to form a metal film having a predetermined thickness.

  The present invention has been made in view of the above, and provides a method for producing a metal film made of a metal or an alloy and a metal film made of a metal or an alloy, which can easily produce metal foils of various metals or alloy types. The purpose is to do.

  In order to solve the above-described problems and achieve the object, the method for producing a metal film made of a metal or alloy according to the present invention comprises a surface of a base material made of a metal or alloy having a surface roughness of 0.1 to 30 μm. A metal film forming step of forming a metal film by accelerating a metal or alloy powder, which is a material of the metal film, together with a gas, and spraying and depositing the powder in a solid phase state; and And a peeling step for peeling.

  Moreover, the method for producing a metal film comprising a metal or alloy according to the present invention is characterized in that, in the above invention, the thickness of the metal film is 30 μm or more and 10 cm or less.

  Moreover, the method for producing a metal film comprising a metal or an alloy according to the present invention is the metal film or alloy powder according to the above invention, wherein the metal film forming step is a metal film material on the rotating cylindrical base material. The metal film is formed by accelerating the gas together with the gas, sprayed and deposited in the solid state, and continuously winding the metal film peeled off from the substrate with a winding roll.

  Further, in the method for producing a metal film or metal plate made of a metal or alloy according to the present invention, in the metal film forming step, a gas nozzle for injecting the gas and the metal or alloy powder is formed on the surface of the substrate. In contrast, the metal film is formed by spraying the metal or alloy powder in a state inclined by 45 ° from the vertical direction.

  A metal film made of a metal or an alloy according to the present invention is manufactured by the method for manufacturing a metal film made of a metal or an alloy according to any one of the above.

  The method for producing a metal film made of a metal or alloy according to the present invention is a cold spray method, that is, a metal or alloy powder used as a material of a metal film is accelerated together with a gas to be fixed on a substrate surface having a predetermined surface roughness. Since the metal film is formed by spraying and depositing in the phase state, the metal film can be easily peeled from the substrate in the subsequent peeling step. In addition, since the metal film is formed by a cold spray method, a metal film with a small crystal grain can be obtained with less segregation and deviation in crystal orientation. Furthermore, in the present invention, since the film formation rate is high, a metal film having a large film thickness can be manufactured in a short time.

FIG. 1 is a schematic diagram showing an outline of a cold spray apparatus used for manufacturing a metal film made of a metal or an alloy according to an embodiment of the present invention. FIG. 2 is a schematic diagram for explaining the production of a metal film made of a metal or an alloy according to Modification 1 of the embodiment of the present invention. FIG. 3 is a schematic diagram for explaining the manufacture of a metal film made of a metal or alloy according to Modification 2 of the embodiment of the present invention. FIG. 4 is a schematic diagram for explaining the manufacture of a metal film made of a metal or alloy according to Modification 3 of the embodiment of the present invention.

  Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited by the following embodiment. The drawings referred to in the following description only schematically show the shape, size, and positional relationship so that the contents of the present invention can be understood. That is, the present invention is not limited only to the shape, size, and positional relationship illustrated in each drawing.

(Embodiment)
In the method for producing a metal film made of a metal or alloy according to the present invention, a metal or alloy powder that is a material of the metal film is applied to the surface of a substrate made of a metal or alloy having a surface roughness of 0.1 to 30 μm. It includes a metal film forming step for forming a metal film by accelerating with gas and spraying and depositing in a solid state, and a peeling step for peeling the metal film from the substrate.

  First, the metal film forming process will be described. FIG. 1 is a schematic diagram showing an outline of a cold spray apparatus used for manufacturing a metal film made of a metal or an alloy according to an embodiment of the present invention.

  A cold spray device 10 shown in FIG. 1 contains a gas heater 11 that heats a compressed gas, a powder supply device 12 that contains a metal or alloy powder that is a material of a metal film, and supplies the powder to a spray gun 13. A gas nozzle 14 for injecting the compressed gas and the material powder supplied thereto onto the substrate is provided, and valves 15 and 16 for adjusting the supply amount of the compressed gas to the gas heater 11 and the powder supply device 12, respectively.

  In the cold spray apparatus 10 as shown in FIG. 1, the material powder of the metal film is sprayed and deposited on the surface of the base material 2 in the solid state together with the compressed gas heated by the gas heater 11 from the gas nozzle 14. A metal film 1 is formed. In FIG. 1, the gas nozzle 14 injects the material powder from a direction perpendicular to the surface of the substrate 2, but the gas nozzle 14 injects the material powder in a state inclined with respect to the surface of the substrate 2. You may inject it. The gas nozzle 14 can be injected in a state where the gas nozzle 14 is inclined by 45 ° from the vertical direction with respect to the substrate 2. The metal film 1 formed by the cold spray device 10 can reduce the deviation of crystal orientation from that produced by rolling, but the metal film 1 is sprayed onto the base material 2 while the gas nozzle 14 is inclined. When it is formed, it is possible to provide an inclination in the laminating direction and the subsequent reduction direction, so that the rollability can be further improved.

  In the cold spray apparatus 10 as shown in FIG. 1, helium, nitrogen, air or the like is used as the compressed gas. The compressed gas supplied to the gas heater 11 is, for example, 50 ° C. or higher, heated to a temperature in a range lower than the melting point of the metal or alloy that is the material powder of the metal film 1, and then supplied to the spray gun 13. Is done. The heating temperature of the compressed gas is preferably 300 to 900 ° C. On the other hand, the compressed gas supplied to the powder supply device 12 supplies the material powder in the powder supply device 12 to the spray gun 13 so that a predetermined discharge amount is obtained.

  The heated compressed gas is made a supersonic flow (about 340 m / s or more) by the gas nozzle 14 having a divergent shape. The gas pressure of the compressed gas at this time is preferably about 1 to 5 MPa. This is because the adhesion strength of the metal film 1 and the density of the metal film 1 can be improved by adjusting the pressure and temperature of the compressed gas to this extent. More preferably, the treatment is performed at a pressure of about 3 to 5 MPa. The powder material supplied to the spray gun 13 is accelerated by the injection of the compressed gas into the supersonic flow, and collides and deposits on the base material 2 at a high speed in the solid state, and the metal film 1 is deposited. Form. Note that the apparatus is not limited to the cold spray apparatus 10 shown in FIG. 1 as long as it can form the metal film 1 by causing the material powder to collide with the base material 2 in a solid phase state.

  The surface roughness (Ra) of the base material 2 on which the metal film 1 is formed by the cold spray device 10 is 0.1 to 30 μm. The metal film 1 can be easily peeled from the base material 2 by setting the surface roughness (Ra) of the base material 2 to 0.1 to 30 μm. For the base material 2 having a surface roughness of 0.1 to 30 μm, the surface of the base material 2 may be used as the surface roughness in the above range by blasting or polishing. Alternatively, a metal mesh or the like having a surface roughness of 0.1 to 30 μm can be used.

  Although the material which comprises the base material 2 is not limited, from the viewpoint of peelability, the base material 2 made of a material having a hardness equal to or higher than that of the metal or alloy which is the material powder of the metal film 1 is used. It is preferable.

  As the metal or alloy powder that is the material of the metal film 1, one having an average particle diameter of 10 μm to 150 μm can be preferably used. When the average particle size is 20 μm to 150 μm, the fluidity is good and the acquisition is easy. Moreover, although the material which comprises the metal film 1 is not limited, Magnesium or magnesium alloy, aluminum or aluminum alloy, copper or copper alloy can be used conveniently. In particular, a metal film made of magnesium or a magnesium alloy has segregation, and when it is produced by rolling a casting material that is coarse crystal grains, cracks and the like are likely to occur during molding, but according to the method of the present invention, A metal film made of magnesium or a magnesium alloy that can be easily molded can be obtained.

  After the metal film forming process, a peeling process for peeling the metal film 1 from the substrate 2 is performed. The metal film 1 can be peeled off from the base material 2 by holding the metal film 1 on the end of the base material 2 while the base material 2 is fixed. In the present embodiment, since the surface of the substrate 2 on which the metal film 1 is laminated has a surface roughness (Ra) of 0.1 to 30 μm, the metal film 1 can be easily peeled off from the substrate 2. . When the surface roughness of the substrate 2 is 0.1 μm or less, the metal film 1 may be peeled off during the film formation on the substrate 2, and when it is 30 μm or more, the peeling may not be smoothly performed after the film formation. . In addition, the surface roughness of the base material 2 on which the metal film 1 is not laminated is not limited to this.

  In the cold spray apparatus 10, the thickness of the metal film 1 can be adjusted to an arbitrary thickness, but the thickness of the metal film 1 is 30 μm from the viewpoint of the handleability of the metal film 1 and the peelability from the substrate 2. It is preferable that it is 10 cm or less. Moreover, the metal film 1 manufactured as described above may be rolled as necessary to adjust the thickness of the metal film 1. By rolling the metal film 1 peeled from the substrate 2, the thickness tolerance of the metal film 1 can be made uniform.

  Moreover, the metal film which consists of a metal or alloy concerning this invention can also be manufactured continuously. FIG. 2 is a schematic diagram for explaining the production of a metal film made of a metal or an alloy according to Modification 1 of the embodiment of the present invention.

  As shown in FIG. 2, the metal film 1B is formed by the cold spray device 10 on the side surface of the rotating cylindrical substrate 2B while rotating the cylindrical substrate roll 2B with the central axis of the cylinder as the rotation axis. The metal film 1B can be continuously manufactured by winding the obtained metal film 1B with the winding roll 5. Similarly to the embodiment, the metal film 1B can be easily peeled from the substrate 2B by setting the surface roughness of the side surface of the substrate 2B to 0.1 to 30 μm.

  Further, as shown in FIG. 3, an annealing furnace 6 may be provided between the base roll 2 </ b> B and the take-up roll 6. FIG. 3 is a schematic diagram for explaining the manufacture of a metal film made of a metal or alloy according to Modification 2 of the embodiment of the present invention. Metal film 1C from which processing distortion of metal film 1B has been removed by annealing in annealing furnace 6 while winding metal film 1B formed on the side surface of base roll 2B rotated by cold spray device 10 with take-up roll 5 And winding becomes easy.

  Moreover, a metal film can also be continuously manufactured by supplying a thin film-like base material on a rotating roll. FIG. 4 is a schematic diagram for explaining the manufacture of a metal film made of a metal or alloy according to Modification 3 of the embodiment of the present invention. As shown in FIG. 4, a film-like substrate 2D having a surface roughness (Ra) of 0.1 to 30 μm is supplied from the substrate supply roll 4 to the rotating roll 7, and the surface roughness (Ra ) Is formed on the substrate 2D having a thickness of 0.1 to 30 μm by the cold spray device 10. The base material 2D on which the metal film 1D is formed is conveyed to the base material take-up roll 8, and is wound after the metal film 1D is peeled off. The metal film 1 </ b> D peeled from the base material 2 </ b> D is taken up by the take-up roll 5. Also in FIG. 4, an annealing furnace 6 shown in FIG. 3 may be provided between the substrate winding roll 8 and the winding roll 5.

DESCRIPTION OF SYMBOLS 1, 1B, 1C Metal film 2, 2D base material 2B Base material roll 4 Base material supply roll 5 Winding roll 6 Annealing furnace 7 Rotating roll 8 Base material winding roll 10 Cold spray apparatus 11 Gas heater 12 Powder supply apparatus 13 Spray gun 14 Gas nozzle 15 Valve

Claims (4)

A method of manufacturing a skin layer made of a metal or alloy,
On the surface of the substrate on which the surface roughness is made of a metal or alloy is 0.1 to 3 0 .mu.m, a metal or alloy powder which is the material of the skin layer is accelerated together with the gas, is deposited by spraying remains in solid state skin and film forming step of forming a skin layer by,
A separation step of separating the skin layer from the substrate,
Only including,
The metal or alloy, a manufacturing method of the skin layer made of a metal or alloy which is a magnesium or magnesium alloy, aluminum or aluminum alloy, copper or a copper alloy. Method for producing a skin layer made of a metal or an alloy according to claim 1, wherein the thickness of the skin layer is 30μm or more 10cm or less. The skin layer forming step, a metal or alloy powder which is the material of the skin layer is accelerated together with the gas, a skin layer is formed by depositing by blowing while the solid state to the substrate of cylindrical rotating ,
Method for producing a skin layer made of a metal or an alloy according to claim 1 or 2, characterized in that taking continuously wound in exfoliated winding roll the skin layer from the substrate. The skin layer forming step, a gas nozzle for injecting the powder of the gas and the metal or alloy, in a state tilted 45 ° from the direction perpendicular to the surface of the substrate, by spraying powder of the metal or alloy method for producing a skin layer made of a metal or an alloy according to any one of claims 1 to 3, characterized by forming the skin layer.

Images