JP6429669B2 - Sheet resistance measuring device and sheet resistance measuring method - Google Patents

Description

  The present invention relates to a sheet resistance measuring device and a sheet resistance measuring method for measuring a sheet resistance of a measurement target.

  As this type of sheet resistance measuring apparatus, a sheet resistance measuring apparatus disclosed by the applicant in Patent Document 1 below is known. This sheet resistance measurement apparatus includes a probe unit, a measurement unit, and a control unit, and is configured to be able to measure the sheet resistance of the measurement object. In this sheet resistance measuring apparatus, in a state in which the measurement current is supplied through the probes of the probe unit respectively brought into contact with the first contact and the second contact defined on one surface of the measurement object, The first measurement process for measuring the potentials of the three third contact points defined on the first virtual circle centered on the first contact point is different from the first virtual circle concentric with the first virtual circle. A second measurement process for measuring the potentials of the third contact points at the three locations defined on the second virtual circle is executed. In addition, the control unit calculates a potential (average potential) on the first virtual circle based on the plurality of potentials measured by the first measurement processing, and a plurality of times measured by the second measurement processing. A second calculation process for calculating a potential (average potential) on the second virtual circle based on the potential is executed, and the sheet resistance is measured based on each potential calculated in each calculation process.

Japanese Patent No. 5350063 (page 5-11, Fig. 2)

  However, the conventional sheet resistance measuring apparatus has the following problems to be improved. That is, in the conventional sheet resistance measuring device, the potential on the first virtual circle calculated based on the potentials of the third contact points at the three locations defined on the first virtual circle and the potential on the second virtual circle are defined. The sheet resistance is measured based on the potential on the second virtual circle calculated based on the potentials of the third contact points at the three locations. Here, in order to improve the measurement accuracy of the sheet resistance, it is necessary to improve the accuracy of the potential on the first virtual circle and the potential on the second virtual circle, which are the basis of the calculation of the sheet resistance. In this case, as a method for improving the accuracy of the potential on the first virtual circle and the potential on the second virtual circle, a method of increasing the number of third contacts defined on the first virtual circle and the second virtual circle is considered. It is done. However, as the number of third contacts is increased, the interval between the probes brought into contact with each third contact becomes narrower. However, the interval is limited by the structure of the probe unit, the probe diameter, etc., so the number of third contacts is sufficient. It can be difficult to increase. For this reason, in the conventional sheet resistance measuring device, it is sometimes difficult to improve the measurement accuracy of the sheet resistance, and improvement of this point is desired.

  The present invention has been made in view of such a problem to be improved, and it is a main object of the present invention to provide a sheet resistance measuring device and a sheet resistance measuring method capable of sufficiently improving sheet resistance measurement accuracy.

  In order to achieve the above object, a sheet resistance measuring apparatus according to claim 1 is provided with a first supply probe disposed at a first supply position defined on one surface of a base portion and a second supply position defined on the one surface. A plurality of first supply probes disposed respectively at a plurality of first detection positions defined on a first virtual circle centered on the first supply position on the one surface; and A probe unit having a plurality of second detection probes respectively disposed at a plurality of second detection positions defined on a second virtual circle that is concentric with the first virtual circle and has a radius different from that of the first virtual circle. And a plurality of the measurement objects in contact with each of the first detection probes in a state in which a measurement signal is supplied between two points of the measurement object via the first supply probe and the second supply probe. First detection point and A detection unit that executes a detection process for detecting a detection amount for a plurality of second detection points of the measurement target in contact with each of the second detection probes; and each of the detection amounts detected by the detection process And a measurement unit that executes a measurement process for measuring the sheet resistance of the measurement object, wherein the second supply probe is centered on the first supply position on the one surface. The number of the second supply probes arranged at each of the plurality of second supply positions defined on the third virtual circle is set to the number of the first detection probes and the number of the first detection probes. The number is different from the number of the second detection probes, and the detection unit changes the second supply probe that supplies the measurement signal and executes the detection process a plurality of times. For measurement processing There are, for measuring the sheet resistance on the basis of the each of the detection amount detected by said detection process of said plurality of times.

  The sheet resistance measuring device according to claim 2 is the sheet resistance measuring device according to claim 1, wherein the number of the second supply probes and the number of the first detection probes are defined to be relatively prime numbers. . It should be noted that “a relatively prime number (a sparse number)” means that there is no common prime factor in two numbers (the number of second supply probes and the number of first detection probes).

  The sheet resistance measuring device according to claim 3 is the sheet resistance measuring device according to claim 1 or 2, wherein the number of the second supply probes and the number of the second detection probes are defined to be relatively prime numbers. ing. Note that “a relatively prime number (a sparse number)” means that there is no common prime factor in two numbers (the number of second supply probes and the number of second detection probes).

  Moreover, the sheet resistance measuring apparatus according to claim 4 is the sheet resistance measuring apparatus according to any one of claims 1 to 3, wherein the detection unit is configured to detect the detected amount as the plurality of detection processes. The first detection process for detecting each potential at each first detection point, and the second detection process for detecting each potential at each second detection point as the detected amount are the first detection process for supplying the measurement signal. 2 The supply probe is changed and executed each time a plurality of times, and the measurement unit, in the measurement process, from the potentials of the first detection points detected by the first detection process a plurality of times, An average potential of the first circular portion corresponding to the first virtual circle is calculated, and the second temporary point in the measurement target is calculated from each potential at each second detection point detected by the plurality of second detection processes. Calculating the average potential of the second circular portion corresponding to a circle, measuring the sheet resistance on the basis of the average potential of the average potential and the second circular portion of said first circular portion.

  Furthermore, the sheet resistance measuring device according to claim 5 is the sheet resistance measuring device according to any one of claims 1 to 3, wherein the number of the first detection positions and the number of the second detection positions are defined to be the same number. The detection unit detects, as the detected amount, each potential difference at a plurality of detection point pairs in which each of the first detection points and each of the second detection points is paired as the plurality of detection processes. The third detection process is performed a plurality of times by changing the second supply probe that supplies the measurement signal, and the measurement unit is detected by the plurality of third detection processes in the measurement process. An average potential difference between a first circular portion corresponding to the first virtual circle in the measurement object and a second circular portion corresponding to the second virtual circle in the measurement object is calculated from each potential difference, and the average potential Measuring the sheet resistance based on.

  The sheet resistance measuring device according to claim 6 is the sheet resistance measuring device according to any one of claims 1 to 5, wherein the first detection positions are defined at equal intervals on the first virtual circle. ing.

  The sheet resistance measuring device according to claim 7 is the sheet resistance measuring device according to any one of claims 1 to 6, wherein the second detection positions are defined at equal intervals on the second virtual circle. ing.

  The sheet resistance measuring device according to claim 8 is the sheet resistance measuring device according to any one of claims 1 to 7, wherein the second supply positions are defined at equal intervals on the third virtual circle. ing.

  Further, in the sheet resistance measuring method according to claim 9, the first supply probe is disposed at the first supply position defined on one surface, and the second supply probe is disposed at the second supply position defined on the one surface. A first detection probe is disposed at a plurality of first detection positions defined on a first virtual circle centered on the first supply position on the one surface, and the first detection probe is concentric with the first virtual circle. A second detection probe is disposed at a plurality of second detection positions defined on a second virtual circle having a radius different from that of the virtual circle, and a measurement object is provided via the first supply probe and the second supply probe. In a state in which a measurement signal is supplied between the two points, the plurality of first detection points of the measurement target that is in contact with the first detection probe and the measurement target that is in contact with the second detection probe Detects detected amount for multiple second detection points A sheet resistance measurement method for performing a measurement process for measuring a sheet resistance of the measurement target based on the detected amount detected by the detection process, wherein the first supply in the one surface The second supply probes are arranged at a plurality of the second supply positions defined on a third virtual circle centered on the position, and the number of the second supply positions is set to the number of the first detection positions and The detection process is performed a plurality of times by changing the second supply probe that supplies the measurement signal by defining the number different from the number of the respective second detection positions, and in the measurement process, the plurality of times The sheet resistance is measured based on each detected amount detected by the detection process.

  The sheet resistance measurement method according to claim 10 is the sheet resistance measurement method according to claim 9, wherein a plurality of second supply probes corresponding to the second supply position and a plurality of the detection positions corresponding to the first detection position are provided. The detection process using a jig-type probe unit in which a plurality of the second detection probes corresponding to the first detection probe and the second detection position are arranged on the arrangement surface of the base portion as the one surface. Execute.

  The sheet resistance measuring device according to claim 1 and the sheet resistance measuring method according to claim 9, wherein the number of second supply probes (number of second supply positions) is equal to the number of first detection probes (number of first detection positions). ) And the number of second detection probes (number of second detection positions), and the second supply probe that supplies the measurement signal is changed, and the detection process is executed a plurality of times. For this reason, in this sheet resistance measuring apparatus and sheet resistance measuring method, the number of second supply probes (number of second supply positions) is equal to the number of first detection probes (number of first detection positions) or second detection probes. A conventional configuration which is defined as the same number as the (number of second detection positions) and can only obtain detection results corresponding to a number (for example, the number of second supply probes) smaller than the number of detections of the detected detection amount executed Unlike the method and the method, the number of detections of the detected amount executed (that is, the number of second supply probes (second supply positions) × the number of first detection probes (first detection positions)) and the second supply The detection result of the detection amount of the number of probes × the number of second detection probes (second detection positions)) can be obtained. Therefore, according to the sheet resistance measuring apparatus and the sheet resistance measuring method, even if it is difficult to sufficiently increase the number of probes that can contact the measurement object, the detection is performed using a relatively small number of probes. Since many detection results for the quantity can be obtained, the measurement accuracy can be sufficiently improved by measuring the sheet resistance of the measurement object using the many detection results for the quantity to be detected.

  According to the sheet resistance measuring apparatus of the second aspect, the number of the second supply probes and the number of the first detection probes are regulated to be relatively prime numbers. Since the detection result of the detected amount corresponding to the number of times of detection (the number of second supply probes (second supply positions) x the number of first detection probes (first detection positions)) can be reliably obtained, the measurement target The sheet resistance measurement accuracy can be improved with certainty.

  According to the sheet resistance measuring apparatus of the third aspect of the present invention, the number of second supply probes and the number of second detection probes are regulated to be relatively prime numbers. Since the detection result of the detected amount corresponding to the number of times of detection (the number of second supply probes (second supply positions) x the number of second detection probes (second detection positions)) can be reliably obtained, the measurement target The sheet resistance measurement accuracy can be improved with certainty.

  In the sheet resistance measuring apparatus according to claim 4, the detection unit performs a first detection process for detecting each potential at each first detection point and a second detection process for detecting each potential at each second detection point. The second supply probe that supplies the measurement signal is changed and executed multiple times, and the measurement unit calculates the average potential of the first circular portion to be measured from each potential at each first detection point, and The average potential of the second circular portion to be measured is calculated from each potential at the second detection point, and the sheet resistance is measured based on each average potential. For this reason, according to this sheet resistance measuring apparatus, the average potential of the first circular portion and the average potential of the second circular portion are sufficiently obtained from the numerous detection results of the potential at each first detection point and each second detection point. As a result of being able to calculate accurately, the measurement accuracy of the sheet resistance of the measurement object based on each average potential of each circular portion can be sufficiently improved.

  In the sheet resistance measuring apparatus according to claim 5, the number of the first detection positions and the number of the second detection positions are defined to be the same number, and the detection unit pairs each first detection point and each second detection point. The third detection process for detecting each potential difference at the plurality of detection point pairs is performed a plurality of times by changing the second supply probe that supplies the measurement signal, and the measurement unit determines the first of the objects to be measured from each potential difference. An average potential difference between the first circular portion and the second circular portion is calculated, and the sheet resistance is measured based on the average potential difference. For this reason, according to this sheet resistance measuring apparatus, the average potential difference between the first circular portion and the second circular portion can be calculated sufficiently accurately from a large number of detection results regarding the potential difference between each pair of detection points. As a result, the measurement accuracy of the sheet resistance to be measured based on the average potential difference can be sufficiently improved. Further, according to the sheet resistance measuring apparatus, for example, the sheet resistance is compared with a configuration in which the potential at each first detection point and the potential at each second detection point are separately detected and the sheet resistance is measured based on the detection result. Thus, the efficiency of the measurement process can be increased as the number of detection processes is reduced.

  According to the sheet resistance measuring apparatus of the sixth aspect, by defining the first detection positions at equal intervals on the first virtual circle, in the first circular portion of the measurement object corresponding to the first virtual circle Since it is possible to detect the detection amount for each first detection point located at equal intervals, for example, the detection amount for the first circular portion can be accurately calculated from each potential. As a result, the sheet to be measured Resistance measurement accuracy can be further improved.

  According to the sheet resistance measuring apparatus of claim 7, by defining the second detection positions at equal intervals on the second virtual circle, the second circular position of the measurement object corresponding to the second virtual circle is determined. Since it is possible to detect the detection amount for each second detection point located at equal intervals, it is possible to accurately calculate, for example, the average value of the detection amount in the second circular portion from each potential. The sheet resistance measurement accuracy can be further improved.

  Furthermore, according to the sheet resistance measuring apparatus according to claim 8, by defining the second supply positions at equal intervals on the third virtual circle, the circular portions of the measurement target corresponding to the third virtual circle are equally spaced. Since the measurement signal can be supplied from the first supply point to each of the second supply points located in the position, the measurement accuracy of the sheet resistance of the measurement object based on each detected amount detected in each detection process can be further improved Can do.

  According to the sheet resistance measuring method of claim 10, the second supply probe corresponding to the second supply position, the plurality of first detection probes corresponding to the first detection position, and the plurality corresponding to the second detection position. By performing the first detection process and the second detection process using a jig-type probe unit in which the second detection probe is disposed on the surface of the base portion as one surface, for example, a plurality of flying probes The processing efficiency can be sufficiently improved as compared with a method in which the detection process is executed a plurality of times while the probe is moved individually and probing is performed.

1 is a configuration diagram illustrating a configuration of a sheet resistance measuring apparatus 1. 2 is a plan view of a conductive sheet 100. FIG. FIG. 6 is a perspective view of the probe unit 2 as seen through the top surface 10b. It is explanatory drawing explaining the position of 1st supply point Bs1, 2nd supply points Bs2a-Bs2h, 1st detection points Bd1a-Bd1g, and 2nd detection points Bd2a-Bd2i in the conductive sheet 100. It is the 1st explanatory view explaining a sheet resistance measuring method. It is the 2nd explanatory view explaining a sheet resistance measuring method. It is the 3rd explanatory view explaining a sheet resistance measuring method. It is the 4th explanatory view explaining a sheet resistance measuring method. It is the 5th explanatory view explaining the sheet resistance measuring method. It is a 6th explanatory view explaining a sheet resistance measuring method. It is a 7th explanatory view explaining a sheet resistance measuring method.

  Hereinafter, embodiments of a sheet resistance measuring device and a sheet resistance measuring method will be described with reference to the accompanying drawings.

  First, the configuration of the sheet resistance measuring apparatus 1 shown in FIG. 1 as an example of the sheet resistance measuring apparatus will be described. As shown in the figure, the sheet resistance measuring device 1 includes a probe unit 2, a moving mechanism 3, a detection unit 4, a storage unit 5, and a control unit 6, and the measurement shown in FIG. It is comprised so that measurement of the sheet resistance of the electroconductive sheet 100 (sheet body which has electroconductivity) as an example of object is possible.

  The probe unit 2 is a jig-type probe unit. As shown in FIG. 3, as an example, the probe unit 2 is disposed (planted) on a base portion 10 formed in a rectangular plate shape and a lower surface 10 a of the base portion 10. And a plurality of probes P. In this probe unit 2, as the probe P, one first supply probe Ps1, eight second supply probes Ps2a to Ps2h (hereinafter also referred to as “second supply probe Ps2” when not distinguished), seven First detection probes Pd1a to Pd1g (hereinafter also referred to as "first detection probe Pd1" when not distinguished) and nine second detection probes Pd2a to Pd2i (hereinafter referred to as "second detection probe Pd2" when not distinguished) Say).

  In this probe unit 2, the first supply probe Ps1 is arranged at a first supply position As1 defined at the center of the lower surface 10a (corresponding to the arrangement surface and one surface) of the base portion 10, as shown in FIG. It is installed. Further, the second supply probes Ps2a to Ps2h are eight second supply positions As2a to As2h (hereinafter, distinguished from each other) defined on a third virtual circle C3 having a radius r3 centered on the first supply position As1 on the lower surface 10a. When not, they are also arranged at “second supply position As2”). In this case, the second supply positions As2 are equally spaced on the third virtual circle C3 and correspond to the third virtual circle C3 on the upper surface 101 of the conductive sheet 100 (when the probing process described later by the moving mechanism 3 is performed). It is defined to be equidistant on the third circular portion D3 (see FIG. 4) facing the three virtual circles C3.

  Further, as shown in FIG. 3, the first detection probes Pd1a to Pd1g have seven first detection positions defined on a first virtual circle C1 having a radius r1 centered on the first supply position As1 on the lower surface 10a. Ad1a to Ad1g (hereinafter also referred to as “first detection position Ad1” when not distinguished) are arranged. In this case, the first detection positions Ad1 are equally spaced on the first virtual circle C1, and correspond to the first virtual circle C1 on the upper surface 101 of the conductive sheet 100 (facing the first virtual circle C1 during the probing process). It is defined to be equally spaced on the first circular portion D1 (see FIG. 4).

  Further, as shown in FIG. 3, the second detection probes Pd2a to Pd2i include nine second detection positions defined on a second virtual circle C2 having a radius r2 centered on the first supply position As1 on the lower surface 10a. Ad2a to Ad2i (hereinafter also referred to as “second detection position Ad2” when not distinguished) are provided. In this case, the second detection positions Ad2 are equally spaced on the second virtual circle C2, and correspond to the second virtual circle C2 on the upper surface 101 of the conductive sheet 100 (facing the second virtual circle C2 during the probing process). It is defined to be equally spaced on the second circular portion D2 (see FIG. 4).

  As described above, in this probe unit 2, the number of second supply positions As2a to As2h (second supply probes Ps2 disposed at each second supply position As2) (eight in this example) is the first detection. The number of positions Ad1a to Ad1g (first detection probes Pd1 disposed at each first detection position Ad1) (seven in this example) and the second detection positions Ad2a to Ad2i (arranged at each second detection position Ad2) The number of second detection probes Pd2) (9 in this example) is different from the number of second detection probes Pd2). In the probe unit 2, the number of the second supply probes Ps2 and the number of the first detection probes Pd1 are 8 and 7, respectively, and the numbers of the probes Ps2 and Pd1 are relatively prime. In the probe unit 2, the number of the second supply probes Ps2 and the number of the second detection probes Pd2 are 8 and 9, respectively, and the numbers of the probes Ps2 and Ps2 are also relatively prime. Further, in the probe unit 2, the radii r1 to r3 of the first virtual circle C1, the second virtual circle C2, and the third virtual circle C3 are defined to be different from each other (for example, to increase in this order). ing.

  The moving mechanism 3 moves the probe unit 2 in a direction (XY direction) parallel to the upper surface 101 (see FIGS. 1 and 2) of the conductive sheet 100 and a direction orthogonal to the upper surface 101 (Z direction) according to the control of the control unit 6. Thus, each of the probe units 2 is arranged such that the first supply probe Ps1 of the probe unit 2 is positioned at the measurement points X1 to X8 of the conductive sheet 100 (see FIG. 2; hereinafter, also referred to as “measurement point X” when not distinguished). A probing process in which the probe P is brought into contact with the upper surface 101 of the conductive sheet 100 (hereinafter also referred to as “probing process in which the measurement point X is a probing position”) is executed. As shown in FIG. 4, during the probing process, the position of the upper surface 101 where the first supply probe Ps1 contacts is the first supply point Bs1, and each position of the upper surface 101 where the second supply probes Ps2a to Ps2h contact each other. Are the second supply points Bs2a to Bs2h (hereinafter also referred to as “second supply point Bs2” when not distinguished). In addition, the positions of the upper surface 101 where the first detection probes Pd1a to Pd1g contact are first detection points Bd1a to Bd1g (hereinafter, also referred to as “first detection points Bd1” when not distinguished), and the second detection probes Pd2a to Pd2i. The positions of the upper surface 101 in contact with each other are defined as second detection points Bd2a to Bd2i (hereinafter also referred to as “second detection points Bd2” when not distinguished).

  The detection unit 4 executes a first detection process and a second detection process as detection processes according to the control of the control unit 6. In the first detection process, the detection unit 4 has two points (the first supply point Bs1 and the second supply point Bs2) on the upper surface 101 of the conductive sheet 100 via the first supply probe Ps1 and the second supply probe Ps2. In the state in which a direct current as a measurement signal is supplied during one of the above, a potential (as a detected amount) at each first detection point Bd1 of the upper surface 101 in contact with each first detection probe Pd1 A potential difference from the first supply point Bs1 is detected. In the second detection process, the detection unit 4 supplies the second current on the upper surface 101 in contact with each second detection probe Pd2 in a state where a direct current is supplied between the two points on the upper surface 101. A potential (potential difference from the first supply point Bs1) as a detected amount at the detection point Bd2 is detected. Further, in the sheet resistance measuring apparatus 1, the detection unit 4 changes the second supply probes Ps2a to Ps2h that supply the measurement signals, and each of the first detection process and the second detection process described above a plurality of times (this In the example, the number of second supply probes Ps2 is 8).

  The storage unit 5 stores the results of the first detection process and the second detection process detected by the detection unit 4 (potentials at the first detection points Bd1 and the second detection points Bd2). The storage unit 5 stores the resistance value of the sheet resistance measured by the control unit 6.

  The control unit 6 controls the moving mechanism 3 and the detection unit 4. In addition, the control unit 6 functions as a measurement unit and executes a measurement process for measuring the sheet resistance (specifically, the resistance value of the sheet resistance) of the conductive sheet 100. In this measurement process, the control unit 6 uses the first circular portion D1 (in the conductive sheet 100 facing the first virtual circle C1 from each potential of each first detection point Bd1 detected in the first detection process by the detection unit 4 ( In the conductive sheet 100 facing the second virtual circle C2 of the probe unit 2 from each potential of each second detection point Bd2 detected in the second detection process by the detection unit 4 is calculated. The average potential of the second circular portion D2 (see the same figure) is calculated, and the sheet resistance of the conductive sheet 100 is measured based on the average potential of the first circular portion D1 and each average potential of the second circular portion D2.

  Next, a sheet resistance measuring method for measuring the sheet resistance of the conductive sheet 100 using the sheet resistance measuring apparatus 1 will be described with reference to the accompanying drawings.

  First, the conductive sheet 100 with the upper surface 101 facing upward is held by a holding mechanism (not shown). Next, as shown in FIG. 1, the probe unit 2 in a state where each probe P is faced down is attached to an attachment portion outside the figure in the moving mechanism 3. Subsequently, an operation unit (not shown) is operated to instruct the start of processing. In response to this, the control unit 6 starts processing. Specifically, the control unit 6 controls the moving mechanism 3 to execute a probing process in which one of the measurement points X of the conductive sheet 100 (for example, the measurement point X1) is set as the probing position. In this probing process, the moving mechanism 3 moves the probe unit 2 in the XY directions parallel to the upper surface 101 of the conductive sheet 100 so that the first supply probe Ps1 of the probe unit 2 is positioned above the measurement point X1. The probe unit 2 is positioned. Next, the moving mechanism 3 moves the probe unit 2 in the Z direction orthogonal to the upper surface 101. At this time, each probe P of the probe unit 2 comes into contact with the upper surface 101.

  Subsequently, the control unit 6 controls the detection unit 4 to execute the first detection process. In the first detection process, the detection unit 4 firstly includes a first supply probe Ps1 (see FIG. 3) and a second supply probe Ps2a (see FIG. 3) as one of the second supply probes Ps2. Is connected to a power supply unit that is not shown, and the first supply point Bs1 (see FIG. 4) of the conductive sheet 100 with which the first supply probe Ps1 is in contact with the second supply probe Ps2a is in contact. A direct current is supplied in a direction toward the second supply point Bs2a (see the figure).

  Next, the detection unit 4 supplies a direct current through the first supply probe Ps1 and the first detection probe Pd1a (see FIG. 3) as one of the first detection probes Pd1. Thus, the potential (the potential difference between the first supply point Bs1 and the first detection point Bd1a) of the first detection point Bd1a (see FIG. 4) of the conductive sheet 100 in contact with the first detection probe Pd1a is detected. At this time, the control unit 6 stores the detected potential in the storage unit 5.

  Subsequently, the detection unit 4 supplies a direct current, and the first supply probe Ps1 and the first detection probe Pd1b as another one of the first detection probes Pd1 (see FIG. 3). And the potential of the first detection point Bd1b (see FIG. 4) of the conductive sheet 100 in contact with the first detection probe Pd1b is detected, and the control unit 6 stores the detected potential in the storage unit 5. Let Similarly, the detection unit 4 detects the potential of each first detection point Bd1 of the conductive sheet 100 while changing the first detection probe Pd1, and the control unit 6 stores the detected potentials in the storage unit. 5 is memorized.

  Next, the detection unit 4 detects the potential of each of the first detection points Bd1a to Bd1g in a state where a direct current is supplied via the first supply probe Ps1 and the second supply probe Ps2a (first first probe When the detection process is completed, the second supply probe Ps2 that supplies the direct current is changed to the second supply probe Ps2b (see FIG. 3), and the second first detection process is executed. Hereinafter, the detection unit 4 performs the first detection process while changing the second supply probe Ps2.

  Subsequently, the control unit 6 performs the first detection process for all the second supply probes Ps2 by the detection unit 4 (the number of times corresponding to the number of the second supply probes Ps2 and in this example, eight first detection processes). ) Is completed, the detection unit 4 is controlled to execute the second detection process. In the second detection process, the detection unit 4 performs the first operation from the first supply point Bs1 of the conductive sheet 100 via the first supply probe Ps1 and the second supply probe Ps2a in the same manner as the first detection process described above. 2. Direct current is supplied in the direction toward the supply point Bs2a. Next, the detection unit 4 supplies the second detection point Bd2a (see FIG. 4) of the conductive sheet 100 via the first supply probe Ps1 and the second detection probe Pd2a (see FIG. 3) while supplying a direct current. ) (Potential difference between the first supply point Bs1 and the second detection point Bd2a). At this time, the control unit 6 stores the detected potential in the storage unit 5.

  Subsequently, the detection unit 4 supplies the second detection point Bd2b (FIG. 4) of the conductive sheet 100 via the first supply probe Ps1 and the second detection probe Pd2b (see FIG. 3) while supplying a direct current. The control unit 6 causes the storage unit 5 to store the detected potential. Similarly, the detection unit 4 detects the potential of each second detection point Bd2 of the conductive sheet 100 while changing the second detection probe Pd2, and the control unit 6 stores the detected potentials in the storage unit. 5 is memorized.

  Next, the detection unit 4 detects the potential of each of the second detection points Bd2a to Bd2i in a state where a direct current is supplied via the first supply probe Ps1 and the second supply probe Ps2a (the first first time When the detection process is completed, the second supply probe Ps2 that supplies the direct current is changed to the second supply probe Ps2b, and the second detection process for the second time is executed. Hereinafter, the detection unit 4 executes the second detection process eight times, which is the number of the second supply probes Ps2, while changing the second supply probe Ps2. Thus, the sheet resistance measurement at the measurement point X1 is completed.

  Subsequently, the control unit 6 controls the moving mechanism 3 to execute a probing process in which the measurement point X2 is set as the probing position, and then controls the detection unit 4 to perform the above-described first detection for a plurality of times (eight times). The process and a plurality of (eight times) second detection processes are executed. Hereinafter, the control unit 6 controls the moving mechanism 3 and the detection unit 4 to detect the potentials of the first detection points Bd1 and the second detection points Bd2 at the measurement points X1 to X8.

  Subsequently, the control unit 6 executes a measurement process. In this measurement process, the control unit 6 reads the potential of each first detection point Bd1 at the measurement point X1 from the storage unit 5, and the first circular portion D1 of the conductive sheet 100 (see FIG. 4: first probe unit 2 first). The average potential of the part facing the virtual circle C1 is calculated. Next, the control unit 6 reads the potential of each second detection point Bd2 at the measurement point X1 from the storage unit 5, and the second circular portion D2 of the conductive sheet 100 (see the figure: second virtual circle C2 of the probe unit 2). The average potential of the part facing the surface is calculated.

  Here, in the sheet resistance measuring apparatus 1, the number of second supply positions As2 (second supply probes Ps2) is the same as the number of first detection positions Ad1 (first detection probes Pd1) and second detection positions Ad2 (first The number of the two detection probes Pd2) is different from the number of the two detection probes Pd2), and the detection unit 4 changes the second supply probe Ps2 that supplies the measurement signal and executes the first detection process and the second detection process a plurality of times. Thus, it is possible to increase the measurement accuracy for the average potential of the first virtual circle C1 and the average potential of the second virtual circle C2. This point will be described below.

  As shown in FIG. 5, the number of second supply positions As2 (As2a to As2h) and the number of first detection positions Ad1 (Ad1a to Ad1h) (that is, the number of first detection points Bd1 (Bd1a to Bd1g)), Assuming that the number of second detection positions Ad2 (Ad2a to Ad2h) (that is, the number of second detection points Bd2 (Bd2a to Bd2g)) is the same (for example, 8 each), as described above, When the second detection probe Ps2 that supplies a signal is changed and the first detection process is performed for the number of the second supply positions As2 (eight times), the potential of the first detection point Bd1 is detected a total of 64 times ( The number of first detection points Bd1 (8) × the number of second supply positions As2 (8)) is performed. Similarly, when the second detection process corresponding to the second supply position As2 is performed (eight times), the potential of the second detection point Bd2 is detected 64 times in total.

  In this case, the potential v of each first detection point Bd1 generally connects the first supply point Bs1 (that is, the first supply position As1) and the second supply point Bs2 (that is, the second supply position As2). The angle differs between the line segment and the line segment connecting the first supply point Bs1 and the first detection point Bd1 (that is, the first detection position Ad1) (see FIGS. 6 to 11). When the relationship between the angle θ and the potential v is the relationship of the curve W1 shown in FIG. 6, each first detection is performed while a direct current is supplied via the first supply probe Ps1 and the second supply probe Ps2a. When a point indicating the potential to be measured at the point Bd1 is plotted on the “θv plane”, 360 ° is divided into eight equally between 0 ° and 360 ° on the curve W1, as shown in FIG. Points are plotted at intervals. Next, when a point indicating a potential to be measured at each first detection point Bd1 in a state in which a direct current is supplied via the first supply probe Ps1 and the second supply probe Ps2b is plotted, 0 on the curve W1. The points are plotted at intervals of 45 ° between ° and 360 °, that is, at the same positions as the points in the state where the direct current is supplied via the second supply probe Ps2a. Similarly, each point indicating a potential to be measured at each first detection point Bd1 in a state where a direct current is supplied via the first supply probe Ps1 and the second supply probe Ps (Ps2c to Ps2h). , Plotted at 45 ° intervals (equal intervals) between 0 ° and 360 ° on the curve W1, that is, at the same position as the point in the state where the direct current is being supplied via the second supply probe Ps2a. .

  In addition, points indicating potentials to be measured at the respective second detection points Bd2 in a state where a direct current is supplied via the first supply probe Ps1 and the second supply probes Ps2a to Ps2h are also shown in FIG. Are plotted at 45 ° intervals (equal intervals) between 0 ° and 360 ° on the curve W2. As described above, in the case where the number of the second supply positions As2, the number of the first detection positions Ad1, and the number of the second detection positions Ad2 are both eight, the potential detection of the first detection point Bd1 is performed. Even if the potential detection at the second detection point Bd2 is performed 64 times, the detection result is substantially the same as when the potential detection is performed eight times, the same number as the second supply position As2. I can only do it.

  On the other hand, in the sheet resistance measuring apparatus 1 in which the number of the second supply positions As2, the number of the first detection positions Ad1, and the number of the second detection positions Ad2 are respectively defined as 8, 7, and 9. A point indicating a potential to be measured at each first detection point Bd1 in a state where a direct current is supplied via the first supply probe Ps1 and the second supply probe Ps2a is plotted on the “θv plane” shown in FIG. (Plot the first round). In this case, as shown in FIG. 3, a line segment L0a connecting the first supply position As1 (that is, the first supply point Bs1) and the second supply position As2a (that is, the second supply point Bs2a) and the first supply position The angles θ formed by the line segments L1 to L7 connecting As1 and the first detection positions Ad1 (that is, the first detection points Bd1) are 0 °, about 51.4 °, about 102.9 °, respectively. ..About 308.6 degrees (about 51.4 degrees intervals obtained by dividing 360 degrees into seven equal parts). Therefore, as shown in FIG. 7, each point is plotted at seven positions corresponding to each angle θ described above on the curve W1.

  Next, a point indicating a potential to be measured at each first detection point Bd1 in a state where a direct current is supplied via the first supply probe Ps1 and the second supply probe Ps2b is plotted (plot of the second round) I do). In this case, as shown in FIG. 3, the line segment L0b connecting the first supply position As1 and the second supply position As2b is inclined clockwise by 45 ° from the line segment L0a. For this reason, the angle θ formed by L0b and the line segments L2 to L7, L1 is about 51.4 ° −45 ° = about 6.4 ° as the angle θ in the plot of the first round described above. The added angle θ, that is, about 6.4 °, about 57.9, about 109.3 ° to about 315 °. Therefore, as shown in FIG. 8, each point is plotted at seven positions corresponding to each angle θ described above on the curve W1.

  Next, a point indicating a potential to be measured at each first detection point Bd1 in a state where a direct current is supplied via the first supply probe Ps1 and the second supply probe Ps2c is plotted (plot in the third round) I do). In this case, as shown in FIG. 3, the line segment L0c connecting the first supply position As1 and the second supply position As2c is inclined clockwise by 90 ° from the line segment L0a. Therefore, the angle θ formed by the line segment L0c and the line segments L3 to L7, L1, and L2 is approximately 51.4 ° × 2-90 ° = approximately equal to each angle θ in the plot of the first round described above. An angle θ obtained by adding 12.9 °, that is, about 12.9 °, about 64.3, about 115.7 °, and so on to about 321.4 °. Therefore, as shown in FIG. 9, each point is plotted at seven positions corresponding to each angle θ described above on the curve W1.

  Similarly, when the fourth round plot is performed, an angle obtained by adding about 19.3 ° (about 51.4 ° × 3-135 °) to each angle θ in the first round plot When plotted at seven positions on the curve W1 corresponding to θ and plotted on the fifth round, each angle θ at the time of plotting the first round is about 25.7 ° (about 51.4 ° × 4 -180 [deg.]) Are plotted at seven positions on the curve W1 corresponding to the angle [theta]. Further, when plotting on the sixth round, it corresponds to an angle θ obtained by adding about 32.1 ° (about 51.4 ° × 5-225 °) to each angle θ at the time of plotting the first round. Plotted at seven positions on the curve W1, and when plotting the seventh lap, each angle θ at the time of plotting the first lap is about 38.6 ° (about 51.4 ° × 6-270 °) Are plotted at seven positions on the curve W1 corresponding to the angle θ, and when the eighth round is plotted, each angle θ at the time of the first round plot is about 45.0 ° (about 51 .4 ° × 7-315 °) are plotted at seven positions on the curve W1 corresponding to the angle θ.

  Thus, when the plot of the first to eighth rounds (for the number of the second supply probes Ps2) is performed, as shown in FIG. 10, between 0 ° and 360 ° on the curve W1, 56 (second supply position As2 (second supply probe Ps2) number (8) × first detection position Ad (first detection probe Pd1)) at intervals of about 6.4 ° (360 ° / 7-45 °). The number (7)) of points is plotted.

  Next, measurement is performed at each second detection point Bd2 in a state in which the direct current is supplied via the first supply probe Ps1 and the second supply probes Ps2 while changing the second supply probe Ps2 that supplies the direct current. When plotting the first to eighth laps of points indicating potentials to be performed, as shown in FIG. 11, 72 points (second supply position As) at 5 ° (45 ° -360 ° / 9) intervals. The number of (second supply probe Ps2) (8) × second detection position Ad2 (second detection probe Pd2) (9) is plotted on the curve W2.

  As described above, when the number of the second supply positions As2, the number of the first detection positions Ad1, and the number of the second detection positions Ad2 are eight, the potential detection of the first detection point Bd1; Even if the potential detection at the second detection point Bd2 is performed 64 times, the detection result is substantially the same as when the potential detection is performed 8 times. On the other hand, in the sheet resistance measuring apparatus 1 in which the number of the second supply positions As2 is defined as a number different from the number of the first detection positions Ad1 and the number of the second detection positions Ad2, the number of potential detections ( The detection result can be obtained 56 times for the first detection position Ad1 and 72 times for the second detection position Ad2. For this reason, in this sheet resistance measuring apparatus 1, the average potential of the first circular portion D1 in the conductive sheet 100 from these many detection results (the potential at each first detection position Ad1 and the potential at each second detection position Ad2). And the average potential of the second circular portion D2 can be accurately calculated.

  Subsequently, the control unit 6 determines the average potential of the first circular portion D1, the average potential of the second circular portion D2, and the distance from the first supply point Bs1 to the first circular portion D1 (that is, the measurement points X1 to X8). The radius r1 that is the distance from the first supply position As1 to the first virtual circle C1) and the distance from the first supply point Bs1 to the second circular portion D2 (that is, from the first supply position As1 to the second virtual circle C2). The sheet resistance at each of the measurement points X1 to X8 of the conductive sheet 100 is measured on the basis of the radius r2) that is the distance.

Here, the current value of the direct current supplied between the first supply point Bs1 and the second supply point Bs2 of the conductive sheet 100 via the first supply probe Ps1 and the second supply probe Ps2 is defined as “I”. When the average potential of the first circular portion D1 is “v1” and the average potential of the second circular portion D2 is “v2”, the combined resistance “R0” between the first circular portion D1 and the second circular portion D2 is It is represented by the following formula (1).
R0 = (v1-v2) / I Expression (1)

In this case, the resistance “f (r)” of a conductor such as the conductive sheet 100 has a volume resistivity “ρ”, a current flowing distance “dr”, and a cross-sectional area of the current flowing portion “S”. Is represented by the following formula (2).
f (r) = ρ · dr / s (2)
Furthermore, when the thickness of the portion where current flows is “t”, the resistance “f (r)” is expressed by the following equation (3).
f (r) = ρ · dr / (2πr · t) (3)
Further, since the sheet resistance (surface resistance) “Rs” of the conductor is a value obtained by dividing the volume resistivity “ρ” by the thickness “t” of the portion through which the current flows, “f (r)” It is represented by Formula (4).
f (r) = Rs · dr / (2πr) Equation (4)

For this reason, the combined resistance “R0” between the first circular portion D1 and the second circular portion D2 in the conductive sheet 100 is expressed by the following equation (5).
R0 = ∫ [r1, r2] f (r) dr = ∫ [r1, r2] (Rs / 2πr) dr = (Rs / 2π) / (ln (r2) -ln (r1)) (5) )
From the above formulas (1) and (5), the sheet resistance “Rs” of the conductive sheet 100 is expressed by the following formula (6).
Rs = (v1-v2) / I · 2π / (ln (r2) -ln (r1)) (6)

  Therefore, the control unit 6 adds the average potential (v1) of the first circular portion D1 at the measurement point X1, the average potential (v2) of the second circular portion D2, and the first supply point Bs1 to the equation (6). The sheet resistance Rs of the conductive sheet 100 is calculated by substituting the distance (radius r1) to the first circular portion D1 and the distance (radius r2) from the first supply point Bs1 to the second circular portion D2. Next, the control unit 6 stores the calculated sheet resistance Rs in the storage unit 5 as a measurement value at the measurement point X1. Similarly, the control unit 6 calculates each sheet resistance Rs at the measurement points X2 to X8, and stores the calculated sheet resistance Rs in the storage unit 5 as a measurement value at the measurement points X2 to X8. Thereby, a series of processes for measuring the sheet resistance of the conductive sheet 100 is completed.

  Thus, in the sheet resistance measuring apparatus 1 and the sheet resistance measuring method, the number of second supply probes Ps2 (number of second supply positions As2) is the number of first detection probes Pd1 (number of first detection positions Ad1). The second detection probe Pd2 is defined as a number different from the number of second detection probes Pd2 (the number of second detection positions Ad2), and the second detection probe Ps2 that supplies a direct current is changed to detect the first detection process and the second detection process. Each process is executed multiple times. Therefore, in the sheet resistance measuring apparatus 1 and the sheet resistance measuring method, the number of second supply probes Ps2 (number of second supply positions As2) is equal to the number of first detection probes Pd1 (number of first detection positions Ad1). Or the number of second detection probes Pd2 (the number of second detection positions Ad2), which is less than the number of times of potential detection (detection of the detected amount) (for example, the number of second supply probes Ps2). Unlike the conventional configuration and method that can only obtain the result of the potential detection of the minute, the number of times of the potential detection performed (that is, the number of second supply probes Ps2 (second supply position As2) × first detection probe Pd1) It is possible to obtain the result of potential detection of (the number of first detection positions Ad1) and the number of second supply probes Ps2 × the number of second detection probes Pd2 (second detection positions Ad2)). Therefore, according to the sheet resistance measuring apparatus 1 and the sheet resistance measuring method, even if it is difficult to sufficiently increase the number of probes P that can contact the conductive sheet 100, a relatively small number of probes P are provided. As a result, a large number of detection results can be obtained, and the average potential of the first circular portion D1 and the average potential of the second circular portion D2 in the conductive sheet 100 can be calculated sufficiently accurately from the large number of detection results. The measurement accuracy of the sheet resistance Rs of the conductive sheet 100 can be sufficiently improved.

  Further, according to the sheet resistance measuring apparatus 1 and the sheet resistance measuring method, the number of second supply probes Ps2 (the number of second supply positions As2) and the number of first detection probes Pd1 (the number of first detection positions Ad1). Is defined to be a relatively prime number, the number of times of potential detection performed for the first detection point Bd1 (the number of second supply probes Ps2 (second supply position As2) × first detection probe Pd1 (first detection position) Since the result of potential detection of several minutes Ad1) can be obtained with certainty, the measurement accuracy of the sheet resistance Rs of the conductive sheet 100 can be reliably improved.

  Further, according to the sheet resistance measuring apparatus 1 and the sheet resistance measuring method, the number of second supply probes Ps2 (number of second supply positions As2) and number of second detection probes Pd2 (number of second detection positions Ad2). Is defined to be a relatively prime number, the number of times of potential detection executed for the second detection point Bd2 (the number of second supply probes Ps2 (second supply position As2) × second detection probe Pd2 (second detection position) Since the result of potential detection of several minutes Ad2) can be obtained with certainty, the measurement accuracy of the sheet resistance Rs of the conductive sheet 100 can be reliably improved.

  Further, according to the sheet resistance measuring device 1 and the sheet resistance measuring method, the first detection positions Ad1 are defined at equal intervals on the first virtual circle C1, so that they are positioned at equal intervals in the first circular portion D1. Since the potential of each first detection point Bd1 can be detected, the average potential of the first circular portion D1 can be calculated more accurately from each potential. As a result, the measurement accuracy of the sheet resistance Rs of the conductive sheet 100 can be further increased. Can be improved.

  Further, according to the sheet resistance measuring apparatus 1 and the sheet resistance measuring method, the second detection positions Ad2 are defined at equal intervals on the second virtual circle C2, so that they are positioned at equal intervals in the second circular portion D2. Since the potential of each second detection point Bd2 can be detected, the average potential of the second circular portion D2 can be calculated more accurately from each potential. As a result, the measurement accuracy of the sheet resistance Rs of the conductive sheet 100 can be further increased. Can be improved.

  Further, according to the sheet resistance measuring device 1 and the sheet resistance measuring method, the conductive sheet 100 facing the third virtual circle C3 is defined by setting the second supply positions As2 at equal intervals on the third virtual circle C3. Since a direct current can be supplied from the first supply point Bs1 to the second supply points Bs2 located at equal intervals in the third circular portion D3 of the first circular portion D3, each detected in each first detection process and each second detection process As a result of calculating the average potential of the first circular portion D1 and the second circular portion D2 more accurately from the potential, the measurement accuracy of the sheet resistance Rs of the conductive sheet 100 can be further improved.

  Further, according to the sheet resistance measuring device 1 and the sheet resistance measuring method, the second supply probe Ps2 corresponding to the second supply position As2, the plurality of first detection probes Pd1 corresponding to the first detection position Ad1, and the second By performing the first detection process and the second detection process using the jig-type probe unit 2 in which a plurality of second detection probes Pd2 corresponding to the detection position Ad2 are disposed on the lower surface 10a of the base body portion 10 For example, the processing efficiency can be sufficiently improved as compared with a method in which the first detection process and the second detection process are performed a plurality of times while performing probing by individually moving a plurality of flying probes.

  The sheet resistance measuring device 1 and the sheet resistance measuring method are not limited to the above configuration and method. For example, the number of second supply positions As2 (second supply probe Ps2) (eight), the number of first detection positions Ad1 (first detection probe Pd1) (seven), and the second detection position Ad2 (second detection) The example in which the number (9) of the probes Pd2) is regulated to be different from each other has been described above. However, the number of the second supply positions As2, the number of the first detection positions Ad1, and the number of the second detection positions Ad2 are described above. As long as is different from the above, it is also possible to adopt a configuration and a method in which the number of first detection positions Ad1 and the number of second detection positions Ad2 are defined to be the same number and measured.

  In the above probe unit 2, the number of second supply probes Ps2 and the number of first detection probes Pd1 are relatively prime, and the number of second supply probes Ps2 and the number of second detection probes Pd2 are relatively prime. However, it is also possible to adopt a configuration and method in which only the number of probes Ps2 and Pd1 is relatively prime, or only the number of probes Ps2 and Pd2 is relatively prime. In addition, as long as the number of the second supply positions As2 is different from the number of the first detection positions Ad1 and the number of the second detection positions Ad2, the numbers of the probes Ps2 and Pd1 do not have to be relatively prime. The numbers of the probes Ps2 and Pd2 do not need to be relatively prime.

  In this case, in the configuration and method in which the number of first detection positions Ad1 and the number of second detection positions Ad2 are defined to be the same number, for example, the first detection point Bd1 and the second detection point Bd2 that are closest to each other are used. Are detected one by one (one to one) (hereinafter also referred to as “detection point pair”), and the potential difference (detected amount) of each detection point pair is detected, and the sheet resistance Rs is determined using the detected value. Can be calculated. Specifically, the process of detecting the potential difference between each pair of detection points (third detection process) is executed a plurality of times while changing the second supply probe Ps2 that supplies the direct current, and the average value of each detected potential difference ( The average potential difference between the first circular portion D1 and the second circular portion D2) is calculated, and the average value is substituted into “(v1-v2)” in the above equation (6) to obtain the sheet resistance of the conductive sheet 100. Rs can be calculated. As described above, in this configuration and method, the number of first detection positions Ad1 and the number of second detection positions Ad2 are defined to be the same number, and the potential difference between each pair of detection points is detected. Since the same effect as that of executing the process and the second detection process at a time can be realized, the efficiency of the measurement process for measuring the sheet resistance Rs can be sufficiently increased.

  Further, the example in which the direct current as the measurement signal is supplied from the first supply point Bs1 to the second supply point Bs2 to measure the potential has been described above. However, the second supply point Bs2 is directed to the first supply point Bs1. It is also possible to adopt a configuration and method for measuring a potential by supplying a direct current. Further, a configuration and a method for measuring each potential by supplying an alternating current as a measurement current instead of the direct current may be employed.

  Moreover, although the structure and method which perform the 1st detection process and the 2nd detection process were demonstrated for the jig | tool type probe unit 2, it is not limited to this. For example, the first supply probe Ps1, the second supply probe Ps2, the first detection probe Pd1, and the second detection probe Pd2 are individually set in the XY direction parallel to the upper surface 101 of the conductive sheet 100 and the Z direction orthogonal to the upper surface 101. A first supply probe Ps1, a second supply probe Ps2, which are configured by so-called flying probes, which can be moved and moved individually in the XY direction parallel to the upper surface 101 of the conductive sheet 100 and in the Z direction orthogonal to the upper surface 101; The first detection process and the second detection process are performed by bringing the first detection probe Pd1 and the second detection probe Pd2 into contact with the first supply point Bs1, the second supply point Bs2, the first detection point Bd1, and the second supply point Bs2, respectively. It is also possible to employ a configuration and method for performing

DESCRIPTION OF SYMBOLS 1 Sheet resistance measuring apparatus 2 Probe unit 4 Detection part 6 Control part 10 Base | substrate part 10a Lower surface Ad1a-Ad1g 1st detection position Ad2a-Ad2i 2nd detection position As1 1st supply position As2a-As2h 2nd supply position Bd1a-Bd1g 1st Detection points Bs2a to Bs2h Second supply point C1 first virtual circle C2 second virtual circle D1 first circular portion D2 second circular portion r1 to r3 radius Rs sheet resistance Pd1a to Pd1g first detection probe Pd2a to Pd2i second detection probe Ps1 first supply probe Ps2a to Ps2h second supply probe v1 potential v2 potential

Claims (10)

A first supply probe disposed at a first supply position defined on one surface of the base portion; a second supply probe disposed at a second supply position defined on the one surface; and the first supply position on the one surface. A plurality of first detection probes respectively disposed at a plurality of first detection positions defined on a first virtual circle centered on the first virtual circle, and a radius of the first virtual circle concentric with the first virtual circle A probe unit having a plurality of second detection probes respectively disposed at a plurality of second detection positions defined on different second virtual circles;
In a state in which a measurement signal is supplied between two points of the measurement object via the first supply probe and the second supply probe, a plurality of measurement objects of the measurement object in contact with the first detection probes are in contact. A detection unit that executes a detection process for detecting a detection amount for a plurality of second detection points of the measurement target that is in contact with one detection point and each of the second detection probes;
A sheet resistance measuring device including a measurement unit that executes a measurement process for measuring the sheet resistance of the measurement target based on each detected amount detected by the detection process,
The second supply probes are respectively disposed at a plurality of the second supply positions defined on a third virtual circle centered on the first supply position on the one surface;
The number of the second supply probes disposed at each of the second supply positions is defined as a number different from the number of the first detection probes and the number of the second detection probes,
The detection unit changes the second supply probe that supplies the measurement signal and executes the detection process a plurality of times,
The measurement unit is a sheet resistance measurement device that measures the sheet resistance based on the detected amounts detected by the plurality of detection processes in the measurement process.   The sheet resistance measuring apparatus according to claim 1, wherein the number of the second supply probes and the number of the first detection probes are defined to be relatively prime numbers.   The sheet resistance measuring apparatus according to claim 1 or 2, wherein the number of the second supply probes and the number of the second detection probes are defined to be relatively prime numbers. The detection unit includes, as the plurality of detection processes, a first detection process for detecting each potential at each first detection point as the detected amount, and at each second detection point as the detected amount. A second detection process for detecting each potential is performed a plurality of times by changing the second supply probe for supplying the measurement signal,
In the measurement process, the measurement unit calculates an average of first circular portions corresponding to the first virtual circle in the measurement target from each potential of the first detection points detected by the first detection processes a plurality of times. In addition to calculating a potential, an average potential of a second circular portion corresponding to the second virtual circle in the measurement target is calculated from each potential at each second detection point detected by the plurality of second detection processes. The sheet resistance measuring device according to claim 1, wherein the sheet resistance is measured based on an average potential of the first circular portion and an average potential of the second circular portion. The number of the first detection positions and the number of the second detection positions are defined to be the same number,
The detection unit detects, as the detected amount, each potential difference in a plurality of detection point pairs in which each of the first detection points and each of the second detection points is paired as the plurality of detection processes. 3 detection processing is performed a plurality of times by changing the second supply probe for supplying the measurement signal,
In the measurement process, the measurement unit includes a first circular portion corresponding to the first virtual circle in the measurement object from the potential differences detected by the plurality of third detection processes, and the second circle in the measurement object. The sheet resistance measuring device according to claim 1, wherein an average potential difference between the second circular portion corresponding to the virtual circle is calculated, and the sheet resistance is measured based on the average potential difference.   The sheet resistance measuring device according to claim 1, wherein the first detection positions are defined at equal intervals on the first virtual circle.   The sheet resistance measuring device according to claim 1, wherein the second detection positions are defined at equal intervals on the second virtual circle.   The sheet resistance measuring apparatus according to claim 1, wherein the second supply positions are defined at equal intervals on the third virtual circle. A first supply probe is disposed at a first supply position defined on one surface, a second supply probe is disposed at a second supply position defined on the one surface, and the first supply position on the one surface is the center. A first detection probe is disposed at a plurality of first detection positions defined on the first virtual circle, and the second virtual circle is concentric with the first virtual circle and has a radius different from that of the first virtual circle. A second detection probe is disposed at a plurality of second detection positions defined in
In a state where a measurement signal is being supplied between two points of the measurement object via the first supply probe and the second supply probe, a plurality of first objects of the measurement object in contact with the first detection probe Performing a detection process for detecting a detection amount for a plurality of second detection points of the measurement object in contact with the detection point and the second detection probe;
A sheet resistance measurement method for executing a measurement process for measuring the sheet resistance of the measurement object based on the detected amount detected by the detection process,
The second supply probes are disposed at a plurality of the second supply positions defined on a third virtual circle centered on the first supply position on the one surface, and the number of the second supply positions is set to the number of the second supply positions. The number of first detection positions and a number different from the number of each second detection position are defined,
Changing the second supply probe for supplying the measurement signal, and executing the detection process a plurality of times;
In the measurement process, a sheet resistance measurement method for measuring the sheet resistance based on the detected amounts detected by the plurality of detection processes.   The plurality of second supply probes corresponding to the second supply position, the plurality of first detection probes corresponding to the first detection position, and the plurality of second detection probes corresponding to the second detection position are the one surface. The sheet resistance measuring method according to claim 9, wherein the detection process is performed using a jig-type probe unit disposed on a surface on which the base portion is disposed.

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