JP6426474B2 - 自己確認型質量流量制御器および自己確認型質量流量計を提供するためのシステムおよび方法 - Google Patents

自己確認型質量流量制御器および自己確認型質量流量計を提供するためのシステムおよび方法 Download PDF

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JP6426474B2
JP6426474B2 JP2014560999A JP2014560999A JP6426474B2 JP 6426474 B2 JP6426474 B2 JP 6426474B2 JP 2014560999 A JP2014560999 A JP 2014560999A JP 2014560999 A JP2014560999 A JP 2014560999A JP 6426474 B2 JP6426474 B2 JP 6426474B2
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mass flow
valve
decay rate
rate measurement
passage
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JP2015509641A5 (enExample
JP2015509641A (ja
Inventor
バレンタイン ビル
バレンタイン ビル
エレック クリス
エレック クリス
バナレス バーウィン
バナレス バーウィン
ルル ジョン
ルル ジョン
ケホー アンソニー
ケホー アンソニー
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イリノイ トゥール ワークス インコーポレイティド
イリノイ トゥール ワークス インコーポレイティド
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G01F1/88—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure with differential-pressure measurement to determine the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87571—Multiple inlet with single outlet
    • Y10T137/87676—With flow control
    • Y10T137/87684—Valve in each inlet

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
JP2014560999A 2012-03-07 2013-03-04 自己確認型質量流量制御器および自己確認型質量流量計を提供するためのシステムおよび方法 Active JP6426474B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261607963P 2012-03-07 2012-03-07
US61/607,963 2012-03-07
PCT/US2013/028910 WO2013134147A1 (en) 2012-03-07 2013-03-04 System and method for providing a self validating mass flow controller and mass flow meter

Publications (3)

Publication Number Publication Date
JP2015509641A JP2015509641A (ja) 2015-03-30
JP2015509641A5 JP2015509641A5 (enExample) 2016-04-28
JP6426474B2 true JP6426474B2 (ja) 2018-11-21

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JP2014560999A Active JP6426474B2 (ja) 2012-03-07 2013-03-04 自己確認型質量流量制御器および自己確認型質量流量計を提供するためのシステムおよび方法

Country Status (4)

Country Link
US (1) US10048105B2 (enExample)
JP (1) JP6426474B2 (enExample)
KR (1) KR102088498B1 (enExample)
WO (1) WO2013134147A1 (enExample)

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WO2013134144A1 (en) * 2012-03-07 2013-09-12 Illinois Tool Works Inc. System and method for providing a self validating mass flow controller or a mass flow meter utilizing a software protocol
US9506785B2 (en) 2013-03-15 2016-11-29 Rain Bird Corporation Remote flow rate measuring
CN107771258B (zh) * 2015-06-25 2019-11-12 伊利诺斯工具制品有限公司 压电致动器型阀
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10634538B2 (en) 2016-07-13 2020-04-28 Rain Bird Corporation Flow sensor
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
CN111417913B (zh) * 2017-09-29 2023-05-12 株式会社博迈立铖 质量流量控制系统、包括该系统的半导体制造装置以及气化器
US10473494B2 (en) 2017-10-24 2019-11-12 Rain Bird Corporation Flow sensor
US10649471B2 (en) * 2018-02-02 2020-05-12 Mks Instruments, Inc. Method and apparatus for pulse gas delivery with isolation valves
KR101969493B1 (ko) * 2018-12-07 2019-05-14 (주)서용엔지니어링 디지털 유량계의 무단변경 확인시스템 및 확인방법
US11662242B2 (en) 2018-12-31 2023-05-30 Rain Bird Corporation Flow sensor gauge
US10921827B1 (en) * 2019-07-25 2021-02-16 Applied Materials, Inc. Pressure regulated flow controller
US11041749B1 (en) * 2019-12-19 2021-06-22 Hitachi Metals, Ltd. Multi-gas mass flow controller and method
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly
US11435764B1 (en) * 2021-03-30 2022-09-06 Hitachi Metals, Ltd. Mass flow controller utilizing nonlinearity component functions
US12443208B2 (en) 2023-02-08 2025-10-14 Rain Bird Corporation Control zone devices, systems and methods
US12393209B2 (en) * 2024-01-19 2025-08-19 Mks, Inc. Methods and apparatus for reporting inlet pressure in mass flow controllers

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Also Published As

Publication number Publication date
KR20140136024A (ko) 2014-11-27
JP2015509641A (ja) 2015-03-30
WO2013134147A1 (en) 2013-09-12
US20150007897A1 (en) 2015-01-08
US10048105B2 (en) 2018-08-14
KR102088498B1 (ko) 2020-03-13

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