JP6419709B2 - Method, system and apparatus for controlling substance mixing concentration - Google Patents

Description

This application is a non-provisional application of US Provisional Patent Application No. 61 / 727,630, filed on November 16, 2012, and claims the benefit of its priority. The entire contents are expressly incorporated herein by reference.

  Embodiments of the present invention generally relate to high precision mixing of materials.

  Precise mixing of materials can lead to microelectronics (in the formation of semiconductors, flat panel displays, disk drives, solar cells, etc.), life sciences (especially pharmaceutical, biotechnology, and personal care), chemical engineering, and petrochemical engineering. It is important in a wide range of technical fields, including For example, manufacturing innovations such as single wafer processing in semiconductor manufacturing and continuous reaction processes in chemical manufacturing often require mixing chemicals in the correct proportions.

U.S. Pat.No. 7,319,523 US Patent Application Publication No. 2010/0296079

  Exemplary embodiments include a mixing method, a mixing system that allows for high precision mixing of two or more substances in a manner that controls the concentration of one or more substances in the resulting mixture. A mixing apparatus, a mixing device, and a mixing assembly are provided. The exemplary embodiment also includes a mixing assembly that includes two or more mixing devices each configured to allow mixing of two or more substances.

  According to one exemplary embodiment, a method is provided for mixing a plurality of substances. The method may include determining a target concentration for the first input material in the mixed material resulting from the first input material being mixed with the second input material. The method may include continuously determining a post-mixing concentration value of the first input substance in the post-mixing substance while the first input substance is being mixed with the second input substance. This method also monitors the concentration value after mixing to determine whether the concentration after mixing is out of a predetermined target concentration range or an allowable error range of the target concentration, and the concentration after mixing is equal to the predetermined target concentration. Adjusting a control valve configured to control the pre-mix flow rate of the first input material if it is determined that the range or target concentration is outside an acceptable error range.

  In some embodiments, the method may include adjusting the control valve, which may include adjusting the position of the control valve based on one or more control parameters. Further, the method may include adjusting at least one of at least one of the one or more control parameters after determining that the post-mixing concentration is out of a predetermined target concentration range or a target concentration tolerance range. Generating the control parameter and adjusting the control valve based on the adjusted control parameter may be included.

  In some embodiments, the method includes determining a difference value between the post-mixing concentration and the target concentration, determining a feedback control value based on the difference value and the adjusted control parameter, and feedback Adjusting the control valve based on the control value.

  In some embodiments, the method may further include generating an average post-mix concentration based on a predetermined number of determined post-mix concentration values. Further, the method may include monitoring the average post-mixing concentration to determine that the post-mixing concentration is outside a predetermined target concentration range or a target concentration tolerance range.

  In some embodiments, the method may further include determining a flow rate of the second input liquid and setting an initial position of the control valve based on the determined flow rate.

  In some embodiments, the method may further include increasing the accuracy of the post-mixing concentration value by passing the post-mixing material through a static mixer prior to measurement of the post-mixing material.

  In some embodiments, the second input material may be an output material that may be received from a different mixing device.

  In some embodiments, the method includes measuring the light reflectance and temperature of the mixed material, determining the refractive index of the mixed material based on the light reflectance and temperature, and mixing based on the refractive index. Determining a post-mixing concentration value of the first input substance in the after substance.

  In some embodiments, the adjustment of a control valve configured to control the pre-mix flow rate of the first input material is independent of the measured flow rate of the first input material.

  According to another exemplary embodiment, a method is provided for performing controlled mixing of a plurality of substances to produce a first mixture. The method includes receiving a first target concentration range of a first substance in a mixture of a plurality of substances and supplying a plurality of substances to the first mixing zone, wherein the plurality of substances are Feeding in a mixing zone to produce a first mixture. The method also includes determining a concentration value of the first substance in the first mixture while continuing to supply a plurality of substances to the first mixing zone, and a first target concentration range relative to the first target concentration range. Comparing the concentration values of one substance. Further, the method can include automatically adjusting the supply of the first substance to the first mixing zone based on the determination that the concentration value of the first substance is outside the first target concentration range. .

  In some embodiments, the method detects one or more characteristic physical properties of the first mixture and based on the one or more characteristic physical properties of the first mixture. By determining the concentration value of the first substance in the mixture, the concentration value of the first substance in the first mixture can be determined. The one or more characteristic physical properties may be selected from the group consisting of temperature, dew point, concentration, speed of sound in the first mixture, light reflectance, and refractive index.

  In some embodiments, the method detects the light reflectance of the first mixture, detects the temperature of the first mixture, and based on the light reflectance and temperature of the first mixture, By determining the refractive index and determining the concentration value of the first substance in the first mixture based on the refractive index, the concentration value of the first substance in the first mixture can be determined.

  In some embodiments, the supply of the first substance to the first mixing zone is a control valve provided in a first conduit that supplies the first substance to the first mixing zone, It can be adjusted by adjusting a control valve configured to control the flow rate of the first substance through the one conduit. In some embodiments, the control valve is based on the concentration value of the first substance in the first mixture and on the control valve based on at least one physical characteristic of the plurality of substances. It can be adjusted by controlling the aperture size. One or more physical characteristics of at least one of the plurality of materials may include viscosity, density, specific gravity, chemical composition, temperature, and pressure. In some embodiments, the control valve is based on the concentration value of the first substance in the first mixture and based on one or more physical characteristics of the mixing system from which the first mixture is generated. The one or more physical characteristics may be adjusted by controlling the size of the first conduit through which the first substance is fed to the mixing zone, the type of the mixing zone, and , Selected from the group consisting of control valve types.

  In some embodiments, the control valve includes a concentration value of the first substance in the first mixture, one or more physical characteristics of the mixing system in which the first mixture is generated, and a plurality of substances. It can be adjusted by controlling the opening size of the control valve based on at least one of the one or more physical characteristics.

  In some embodiments, the method includes determining a second concentration value of the first substance in the first mixture while continuing to supply a plurality of substances to the first mixing zone; When comparing the second concentration value of the first substance against the target concentration range of 1 and determining that the second concentration value of the first substance is out of the first target concentration range, Automatically adjusting the opening size of the control valve provided in the first conduit for supplying the first substance to the first mixing zone, the opening size of the control valve being in the first mixture; Adjusting automatically based on the second concentration value of the first substance.

  In some embodiments, the method receives a second target concentration range of the second substance in the first mixture of substances and supplies the plurality of substances to the first mixing zone. While continuing, determining the concentration value of the second substance in the first mixture, comparing the concentration value of the second substance against the second target concentration range, and Automatically adjusting the supply of the second substance to the first mixing zone based on the determination that the concentration value is outside the second target concentration range.

  In some embodiments, the method includes supplying a first mixture to the second mixing zone and supplying a third substance to the second mixing zone, the first mixture and Providing a third substance is mixed in a second mixing zone to produce a second mixture; receiving a third target concentration range of the third substance in the second mixture; Determining the concentration value of the third substance in the second mixture while continuing to supply the first mixture and the third substance to the second mixing zone, and against the third target concentration range Automatically supply the third substance to the second mixing zone based on comparing the concentration value of the third substance and determining that the concentration value of the third substance is outside the third target concentration range Adjusting.

  According to another exemplary embodiment, a method is provided for mixing a plurality of substances. The method includes receiving a first target concentration range of a first substance in a mixture of a plurality of substances and supplying a plurality of substances to the first mixing zone, wherein the plurality of substances are Feeding in a mixing zone to produce a first mixture. The method also includes determining a concentration value of the first substance in the first mixture while continuing to supply a plurality of substances to the first mixing zone, and for the first target concentration range. Comparing the concentration values of the first substance. Further, the method is provided in a first conduit for supplying the first substance to the first mixing zone when it is determined that the concentration value of the first substance is out of the first target concentration range. Automatically adjusting the flow rate of the first substance to the first mixing zone by adjusting the opening size of the control valve provided. The opening size of the control valve may be adjusted based on the concentration value of the first substance in the first mixture and based on one or more physical characteristics of at least one of the plurality of substances. One or more physical characteristics of at least one of the plurality of materials may be selected from the group consisting of viscosity, density, specific gravity, chemical composition, temperature, and pressure.

  According to another exemplary embodiment, a mixing system is provided. The mixing system includes a first mixing conduit and a first supply conduit coupled to and disposed upstream of the first mixing conduit for supplying the first substance to the first mixing conduit. A first supply conduit with a first bore and a first flow control device provided in the first supply conduit, the first supply conduit configured to selectively adjust the opening of the bore of the first supply conduit A first flow control device and a second supply conduit coupled to and disposed upstream of the first mixing conduit, the device comprising a bore for supplying a second substance to the first mixing conduit A second supply conduit. The mixing system also includes a first mixing conduit provided in the first mixing conduit for detecting one or more characteristics of the first mixture generated by the mixing of the first substance and the second substance. One or more sensors of the set may be provided. Further, the mixing system includes a first control circuit operably coupled to the first set of one or more sensors and to the first flow control device, the first control circuit in the first mixing conduit. A first control circuit programmed to automatically control the first flow control device to regulate the flow rate of the first substance based on one or more detected characteristics of the mixture of Can be prepared.

  In some embodiments, the one or more detected features of the first mixture are selected from the group consisting of temperature, dew point, concentration, speed of sound in the first mixture, light reflectance, and refractive index. obtain.

  The mixing conduit may comprise an intersecting region where the material is initially in contact for mixing. Preferably, the one or more microsensors are placed as close as possible to the intersection area, but separated from the intersection area by a distance sufficient to ensure mixing of the substance prior to concentration detection. In one exemplary non-limiting embodiment, the microsensor can be disposed about 1 inch to about 2 inches from the intersection region. This ensures a tight linkage between the mixing process and any adjustments made in the material supply, so that by adjusting the supply to the mixing process before a significant amount of the mixture flows over the crossing area. Effect is brought about. As a result, the concentration of substances in the mixture is tightly controlled throughout the mixing process, and in some embodiments, a mixing tank may be unnecessary.

  In some embodiments, the first control circuit determines a concentration value of the first substance in the first mixture based on one or more detected characteristics of the first mixture, Compare the concentration value of the first substance against the first target concentration range for the substance, and based on the determination that the concentration value of the first substance is outside the first target concentration range, the bore of the first supply conduit May be programmed to automatically control the first flow control device to adjust the opening of the first flow control device.

  In some embodiments, the first set of one or more sensors is configured to detect an optical system configured to detect the light reflectance of the first mixture and a temperature of the first mixture. A thermistor or thermometer. The first control circuit determines the refractive index of the first mixture based on the light reflectance and temperature of the first mixture, and the concentration value of the first substance in the first mixture based on the refractive index. Is programmed to determine

  In some embodiments, the first control circuit is based on the concentration value of the first substance in the first mixture and based on one or more physical characteristics of at least one of the plurality of substances. Programmed to control one flow control device, the one or more physical characteristics are selected from the group consisting of viscosity, density, specific gravity, chemical composition, temperature, and pressure.

  In some embodiments, the first control circuit includes a first flow control device based on a concentration value of the first substance in the first mixture and based on one or more physical characteristics of the mixing system. Can be programmed to control. The one or more physical characteristics are selected from the group consisting of a first supply conduit size, a first mixing conduit type, and a first flow control device type.

  In some embodiments, one or more of the sensors detect one or more characteristics of the first mixture upon mixing of the first substance and the second substance in the first mixing conduit. Can be operated at predetermined intervals.

  In some embodiments, the mixing system is a second flow control device provided in the second supply conduit and configured to selectively adjust a bore opening of the second supply conduit. A second flow control device may further be provided. The first control circuit may be operatively coupled to a second flow control device, the first control circuit including one or more detected features of the first mixture in the first mixing conduit. Is programmed to automatically control the second flow control device to regulate the flow rate of the second substance.

  In some embodiments, the first control circuit determines a concentration value of the second substance in the first mixture based on one or more detected characteristics of the first mixture, and the second Compare the concentration value of the second substance against the second target concentration range for the substance, and based on the determination that the concentration value of the second substance is out of the second target concentration range, It can be programmed to control automatically.

  In some embodiments, the mixing system includes a second mixing conduit coupled to the first mixing conduit and disposed downstream thereof, and a third mixing conduit coupled to the second mixing conduit and disposed upstream thereof. A third supply conduit comprising a bore for supplying a third substance to the second mixing conduit, and a third flow control device provided in the third supply conduit. A third flow control device configured to selectively control the opening of the bore of the third supply conduit, and a second mixture produced by mixing the first mixture and the third substance. A second set of one or more sensors provided in the second mixing conduit for detecting one or more features, a second set of one or more sensors and a third flow rate; A second control circuit operably coupled to the control device, the second mixture in the second mixing conduit It may further comprise a second control circuit which is programmed to automatically control the third flow control device to regulate the flow rate of the third material based on one or more detected features.

  In some embodiments, the mixing system may further comprise a mixing device disposed in the first mixing conduit, the mixing device configured to mix the first material and the second material. . In these embodiments, the first set of one or more sensors may be disposed downstream of the mixing device.

  In some embodiments, the mixing system is a flow control sensor provided in the second supply conduit, the flow control configured to detect a flow rate of the second substance in the second supply conduit. A sensor and a second flow control device provided in the second supply conduit configured to selectively adjust the bore opening of the second supply conduit based on the flow detected by the flow control sensor And a second flow control device to be provided.

  According to another exemplary embodiment, a mixing device for mixing a plurality of substances is provided. The mixing apparatus includes a first input port for introducing a first substance into the mixing apparatus, a second input port for introducing a second substance into the mixing apparatus, and a first from the mixing apparatus. And an output port for outputting a mixture of the second substance and the second substance. Further, the mixing device includes a first flow path having a first terminal end and a second terminal end coupled to the first input port, and is disposed in the first flow path. A control valve configured to control the bore of the first flow path and a second flow path comprising a first termination and a second termination coupled to the second input port may be provided . The mixing device is an intersecting region disposed downstream of the first flow path and the second flow path, and the second terminal portion of the first flow path and the second flow path of the second flow path. An intersection region formed by the intersection with the terminal portion of the substrate may be provided. The mixing device may also include a post-mixing passage disposed downstream of the intersection region and upstream of the output port of the mixing device. Further, the mixing device is a concentration sensor disposed in the post-mixing passage, the concentration sensor configured to periodically detect an indication of the concentration of the first substance in the post-mixing passage, Configured to receive a first substance concentration reading according to the program and automatically control a control valve to adjust the supply of the first substance to the crossing area based on the concentration reading And a control circuit.

  Some embodiments may comprise one or more machines such as devices and / or systems configured to perform the methods and / or other functions discussed herein. For example, the machine may include one or more configured to perform the functions discussed herein based on instructions and / or other data stored in memory and / or other non-transitory computer readable media. Of other processors, circuits, and / or other mechanical components.

  These features of the present invention as well as further properties, functions, and details are described below. Similarly, corresponding and further embodiments are also described below.

  The foregoing and other objects, aspects, features and advantages of the exemplary embodiments will become more apparent and better understood from the following description taken in conjunction with the accompanying drawings.

FIG. 2 shows an example of a mixing device configured in accordance with some embodiments. FIG. 2 shows an example of a mixing device configured in accordance with some embodiments. FIG. 2 shows an example of a mixing device configured in accordance with some embodiments. FIG. 3 illustrates an example photosensor configured in accordance with some embodiments. FIG. 2 illustrates the light reflection geometry and operating principle of an optical sensor according to some embodiments. FIG. 3 illustrates an example mixing device configured in accordance with some embodiments. FIG. 3 illustrates an example of two coupled mixing devices configured in accordance with some embodiments. FIG. 6 illustrates an example of a mixing device coupled to a liquid flow control device configured in accordance with some embodiments. FIG. 6 illustrates an example of a mixing device that includes a concentration sensor and a flow sensor configured in accordance with some embodiments. 6 is a flow diagram of an exemplary method of closed loop mixing control implemented in accordance with some embodiments. 6 is a flow diagram of an exemplary method for determining an average post-mixing concentration performed in accordance with some embodiments. FIG. 2 is a schematic block diagram of a circuit configured in accordance with some embodiments.

  The accompanying drawings are not intended to be drawn to scale.

  Embodiments include a mixing method, a mixing system, a mixing device, which enables high precision mixing of two or more substances in a manner that controls the concentration of one or more substances in the resulting mixture. A mixing device and a mixing assembly are provided. Exemplary mixing devices allow for the mixing of two or more substances in a mixing zone or mixing conduit. The mixing device may comprise one or more sensors for detecting one or more characteristics of the mixture during the mixing process. These sensors may detect the characteristics of the mixture continuously, intermittently or in response to user instructions. The characteristics of the mixture can be used in a sensor or control circuit to obtain an indication of the concentration of the first constituent in the mixture. Based on the detected concentration, the mixing device can automatically and in real time adjust the delivery of the first substance to the mixing zone or mixing conduit. For example, when the concentration of the first substance falls outside the desired concentration range, the mixing device adjusts the supply (e.g., flow rate) of the first substance, so that the concentration of the first substance in the mixture is accordingly adjusted. Can be adjusted. On the other hand, when the concentration of the first substance falls within the desired concentration range, the mixing device can be left without adjusting the supply (eg, flow rate) of the first substance.

  The exemplary embodiment allows for dynamic adjustment of the mixing device. In one exemplary embodiment, a control valve position that controls the flow rate of the input material may be set for a target concentration (or target concentration range) based on one or more control parameters. After mixing, the measured concentration can be compared with the target concentration (or target concentration range) for adjustment of the control parameter, thereby recalibrating the control valve. As such, some embodiments may provide integrated inspection, failure analysis, and / or automatic correction during mixing.

  In some embodiments, a mixing assembly may be provided that includes a plurality of modular mixing devices or mixing devices, each configured to controllably mix two or more substances. In one exemplary serial assembly, each mixing device may be coupled in series to another mixing device to supply the mixture to the other mixing device or receive the mixture from the other mixing device. Thus, this assembly allows a mixture produced in one device to be used to produce another mixture in a subsequent device. In one exemplary parallel assembly, the mixing devices in the assembly are coupled in parallel to one another so that the resulting mixture of the devices can be collected at a central location. Therefore, this assembly allows an increase in the amount of mixture produced. In some embodiments, each modular mixing device in the mixing assembly can be plugged into or otherwise coupled to other devices to increase the overall mix generation capability. You may have a structure.

  This exemplary closed loop system of concentration detection and component supply adjustment can be used to monitor and adjust the mixing process in real time, i.e. without intentional delay during the mixing process. This allows high precision mixing suitable for a number of advanced technical and manufacturing needs. This automatic closed-loop nature of monitoring and control allows the implementation of a mixing process with little or no human intervention, thereby providing consistent performance with the mixing process and precise control of the resulting mixture composition. Can be possible. In addition, by detecting and using physical characteristics or physical properties (including but not limited to light reflectance, refractive index, temperature, and concentration) of the mixture or post-mixing material in exemplary embodiments, only the flow rate of the input material. The mixing process can be performed with higher accuracy than the prior art that adjusts the mixing process based on the above.

  Some exemplary mixing devices can operate with a footprint that is smaller than that required for conventional mixing devices. The high accuracy and short response time of the exemplary mixing device eliminates the need for a mixing tank that serves as a temporary output material container while the mixture or output material is reaching its target concentration. Mixing is possible. As such, some embodiments can reduce space requirements when space is limited, such as in pharmaceutical and / or wafer manufacturing processes that require an aseptic environment.

  Other advantages that may be realized in some embodiments include low cost (e.g., through the use of high accuracy, low cost concentration sensors), integration of electronics, firmware, and software, speed of time to gradient, Speed of time to target concentration (e.g. by using dynamically updated control parameters that can change over time due to wear of the mixing device), signal analysis (e.g. time, cross-reference, averaging, background removal) , Normalization, and other operations on measurement data), enabling simultaneous duplication, real-time measurement, unification of electronics faults, firmware, parts reduction (e.g. mixing tanks and / or liquids) Less use of flow sensors), reduced physical connections for more convenient communication, reduced packaging, reduced leakage and / or contamination Less assembly and inspection, electronics can be placed remotely from the flow cell, complete integration of I / O for communication, data management and signal analysis, single bus architecture, single power supply An integrated mixing system is included that implements a master software program that can be integrated and stored in memory and executed by processing circuitry.

  Exemplary mixing methods, mixing systems, mixing devices, and mixing assemblies include 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, etc. Any desired number of materials, not limited to, can be used to controllably mix.

  Exemplary mixing methods, mixing systems, mixing devices, and mixing assemblies may be used to mix any suitable amount of material, including but not limited to about 1 mL to about 500 L, although the amounts are It is not limited to a specific range. Exemplary mixing regions (including, for example, the crossing region 112 of FIG. 1a and the post-mixing material passage 114) may contain amounts of material including, but not limited to, about 1 mL to about 500 L. Some exemplary mixing regions are about 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 20 , 30, 40, 50, 60, 70, 80, 90, 100, 110, 120, 130, 140, 150, 160, 170, 180, 190, 200, 210, 220, 230, 240, 250, 260, 270 280, 290, 300 L, and any intermediate amount, etc. may be accommodated.

  Those skilled in the art will appreciate that the above numerical values and ranges are examples and are not intended to limit the scope of the invention.

  In this section, a number of terms are defined to facilitate understanding of exemplary embodiments.

  As used herein, the term “substance” refers to any type of physical object or material. Examples of substances are measured by chemical substances (e.g. substances with a unique molecular structure), each element, chemical composition containing two or more different chemical elements, chemical solutions, non-chemical substances and / or concentration sensors. Others to obtain may be mentioned. Although many of the examples herein are based on materials in liquid form, embodiments may be applied to materials in any state (eg, liquid, solid, plasma, and / or gas, etc.).

  As used herein, the terms “mixture” and “post-mixed substance” refer interchangeably to those resulting from the mixing of two or more substances.

  As used herein, the terms “liquid flow controller” and “liquid flow control device” refer to a device configured to measure an input flow and control the input flow based on the measured input flow. Therefore, the liquid flow rate controller can include a flow rate control valve, a flow rate sensor, and a flow rate control device. The flow rate control device opens and closes the flow rate control valve based on the flow rate measurement value of the input liquid (for example, the measurement value before mixing) by the flow rate sensor, thereby controlling the rate at which the input liquid is added to the output. However, the flow rate of the input liquid is only a rough indication of the post-mixing concentration, and its use in substance mixing is mostly due to the availability of low cost flow sensors. In that sense, the embodiment corresponds to a mixing apparatus including a low-cost and high-precision concentration sensor.

  As used herein, the term “measurement data” refers to any property of a substance that can be measured (eg, by a concentration sensor 120 and / or other types of sensors that can be included in the mixing device 100).

  As used herein, the term `` concentration data '' refers to data (e.g., light concentration) of a first input substance in a mixed substance that is a mixture of the first substance and one or more other substances. Reflectivity and refractive index).

  As used herein, the term “control parameter” refers to one or more constants and / or functions that may suggest and / or define a relationship (eg, mapping) between control valve opening size and mixing concentration.

  As used herein, the term “mixing parameter” refers to a value corresponding to a factor that can affect the relationship between motor speed and mixing concentration.

  As used herein, the term “post-mixing concentration value” refers to a single post-mixing concentration value or an average of two or more single concentration values.

  As used herein, the term “set” refers to a collection of one or more items.

  As used herein, the term “plurality” refers to two or more items.

  As used herein, the terms “equivalent” and “substantially equivalent” interchangeably refer to exact equality or approximate equality within a certain tolerance in a broad and general sense.

  As used herein, the terms “similar” and “substantially similar” interchangeably refer to exact identity or approximate identity within certain tolerances in a broad and general sense.

  As used herein, the terms “coupled”, “coupled”, “coupled” refer to a direct or indirect connection between two or more components. For example, a first component can be coupled to a second component directly or via one or more intermediate components.

  As used herein, the term “module” includes hardware, software, and / or firmware configured to perform one or more specific functions.

  The term “computer-readable medium” as used herein refers to non-transitory storage hardware that can be accessed by a controller, microcontroller, computing system, or module of a computing system for the encoding of computer-executable instructions or software programs. Refers to a non-transitory storage device or non-transitory computer system memory. A “computer-readable medium” may be accessed by a computing system or a module of a computing system to retrieve and / or execute computer-executable instructions or software programs encoded on the medium. Non-transitory computer readable media include one or more types of hardware memory, non-transitory tangible media (e.g., one or more magnetic storage disks, one or more optical disks, one or more USB flashes). Drive), computer system memory or random access memory (DRAM, SRAM, EDO RAM, etc.) and the like.

  Hereinafter, exemplary embodiments will be described with reference to the drawings. Those skilled in the art will appreciate that the exemplary embodiments are not limited to the illustrated embodiments, and that components of the exemplary systems, devices, and methods are not limited to the illustrated embodiments described below. . Like numbers refer to like elements throughout.

  FIG. 1a shows an example of a mixing device 100 configured in accordance with some embodiments. The mixing device 100 may be configured to generate an output substance at a target concentration by combining a first input substance (“Substance A”) with a second input substance (“Substance B”). Thus, the mixing device 100 can include a substance A input 102, a substance B input 104, and a substance output 106. Substance A input 102 may be configured to receive substance A. Substance A may travel through substance A passage 108 after entering through substance A input 102. Substance B input 104 may be configured to receive substance B, which may travel through substance B passage 110. Substance A passage 108 and Substance B passage 110 merge at the intersection region 112, where substance A and substance B combine to form a mixed material, which after mixing passes through the material passage 114 after mixing. You can proceed. After mixing (or “mixed”) material may then be output at material output 106.

  In some embodiments, one of the input substances (e.g. substance A) is configured to flow at a constant rate while the other input substance (e.g. substance B) is controlled by the mixing device 100. May be configured to flow at a variable rate. As such, the mixing device 100 can further include a control circuit 118, one or more concentration sensors 120, and a control valve 122 to control the variable flow rate.

  The control circuit 118 may be provided within the housing of the concentration sensor 120 and / or the pre-mix control valve 122. Additionally or alternatively, at least a portion of the control circuit 118 is provided in a separate housing so that it is communicatively coupled to the concentration sensor 120 and the pre-mix control valve 122 (hereinafter “control valve”). It is possible to form an independent mixing controller. The control circuit 118 is further discussed in connection with FIG.

  One or more concentration sensors 120 monitor the output material at, near, and / or downstream at the intersection region 112 to determine measurement data (e.g., light reflectance of the output material, Measuring dew point, temperature, and / or any other suitable variable). Preferably, the one or more microsensors are placed as close as possible to the crossing area but at a sufficient distance from the crossing area to ensure mixing of the substance prior to concentration detection. In one exemplary non-limiting embodiment, the microsensor can be disposed about 1 inch or about 2 inches from the intersection region. This ensures a tight linkage between the mixing process and any adjustments made in the material supply, so that the adjustment of the supply affects the mixing process before a significant amount of the mixture flows over the crossing area. Is brought about. As a result, the concentration of substances in the mixture is tightly controlled throughout the mixing process, and in some embodiments, a mixing tank may be unnecessary.

  “Measurement data” herein refers to any property of a substance that can be measured (eg, by a concentration sensor 120 and / or other types of sensors that can be included in the mixing device 100). The control circuit 118 may be configured to determine the concentration of the input material in the mixed material that is output (eg, after mixing) based on the measurement data generated and transferred by the concentration sensor 120. Alternatively or additionally, the concentration sensor 120 may be configured to determine the concentration of the input substance in the mixture and send concentration data to the control circuit 118. As used herein, `` concentration data '' is data that suggests a concentration value of a first input substance in a mixed substance that is a mixture of the first substance and one or more other substances (e.g., light reflectance And refractive index). For example, the control circuit 118 can receive a plurality of density values as density data from the density sensor 120. As used herein, “concentration value” may refer to a single concentration value (eg, percentage or weight%) that can be utilized as a basis for post-mixing concentration, as discussed below with reference to FIGS. Alternatively and / or additionally, the concentration value may refer to the average of a single concentration value.

  The control circuit 118 may be communicatively connected to the concentration sensor 120 to receive concentration data and / or measurement data via the connection 124. Connection 124 is a direct connection (e.g., twisted pair, fiber optic cable, coaxial cable, Bluetooth connection, and / or any other type of connection that can be established directly between the two devices). And / or indirect connections (eg, any type of connection using routers and / or other types of separate communication devices, etc.). In some embodiments, the control circuit 118 and the concentration sensor 120 may communicate directly and / or indirectly via any type of wired or wireless communication means as well. As such, the components discussed herein may include any hardware, software, and / or firmware required to perform the functions discussed herein. For example, the components discussed herein may include directly and / or public networks such as the Internet, private networks such as intranets, or combinations thereof, and include but are not limited to TCP / IP-based network protocols. It may be connected using a network that may utilize various network protocols that are not currently available or later deployed. In some embodiments, the control circuit 118 and the concentration sensor 120 may communicate via a communication protocol such as serial data transfer and / or parallel data transfer. Other communication interfaces may include point-to-point protocols, on-demand protocols, fixed transmission protocols, or custom communication protocols. As such, the control circuit 118 may be separate from the housing in some embodiments and / or located remotely from the concentration sensor 120.

  As discussed above, the control circuit 118 may be configured to receive density data and / or measurement data from the density sensor 120 via the connection 124. Concentration data can be generated from measurement data, but all similar data discussed herein can be generated using any suitable protocol and / or connection for signals (e.g., concentration signals for concentration data and measurements for measurement data). Signal) or the like.

  The control valve 122 may be configured to form an adjustable “bottle” in the substance B passage 110 based on instructions from the control circuit 118. The size of this bottleneck affects the flow rate of substance B, the smaller the bottleneck, the lower the resulting flow rate, while the larger bottleneck results in the higher flow rate. In some embodiments, the control valve 122 may comprise an actuator and a needle. For example, the actuator may be a step motor (eg, using a worm gear and under the direction of the control circuit 118) configured to rotate by an accurate and controlled amount. With the rotation of the step motor, the needles controllably project into the substance B passage 110 (e.g. by rotation of the step motor in the first direction) and withdraw back from the substance B passage 110 (e.g. Can be configured to reduce and enlarge the opening size of the control valve, respectively, by rotation of the step motor in the opposite second direction). However, virtually any suitable technique that can controllably change the flow rate of substance B in substance B passage 110 may be utilized. For example, the control valve 122 may be pneumatically driven or piezoelectrically driven.

  Although the above examples are often referred to herein, the control valve 122 may comprise any suitable component that results in the substance being moved through the system 100. For example, the control valve 122 may include a valve that allows a specific amount of liquid under pressure to pass depending on the degree of opening and closing of the valve. Additionally or alternatively, the control valve 122 comprises a pump, fan, and / or any other device configured to cause movement of the substance and / or generate pressure of the substance. Is possible. For example, the control valve 122 may be a pump system that does not have any actual valve, but instead is configured to control the flow rate of substance A by how much it can be pumped at a given time interval. Good. As another example, control valve 122 is a valve configured to control the rate at which substance A flows as a result of gravity.

  In some embodiments, the control circuit 118, the concentration sensor 120, and the control valve 122 may be configured as a closed loop control system. As discussed in further detail below, the control circuit 118 may be configured to determine, store, and / or receive a target concentration of the mixed material. The concentration sensor 120 may be configured to measure the mixed material in real time as the mixed material flows through the mixed material passage 114. Based on the first measurement (or first measurement set) of the mixed substance, the control circuit 118 determines that the mixed concentration is not at the target concentration or not within the target concentration range (e.g., the mixed concentration is acceptable). The control valve 122 may be configured to adjust when it is out of error range). For example, the control circuit 118 may determine a feedback control value based on a difference between a mixed concentration that can be used to adjust the control valve 122 and a target concentration. Adjusting the control valve 122 can result in a change in the flow rate in the substance B passage 110. Furthermore, this changes the concentration of the mixed substance flowing through the mixed substance passage 114, which can be detected by the concentration sensor 120 via the second measurement (or measurement set). Therefore, the control circuit 118 determines a second feedback control value (e.g., a certain rotational speed of the step motor) and / or readjusts the control valve 122 when it is determined that the new concentration is not the target concentration. Can be configured to. This process can be repeated until the target concentration is achieved and / or a new target concentration is determined. This process may generate and update one or more control parameters (eg, constants and / or functions) that relate the concentration to the feedback control value of the mixing device 100.

  In some embodiments, each measurement and adjustment cycle is within any suitable time interval (e.g., less than about 100 milliseconds, less than about 10 milliseconds, less than about 1 millisecond, about every 1 second, and about 10 Comparison to achieve a target concentration or target concentration range (e.g., within about 0.001 wt%) (within one or more error ranges, this example is discussed below). Fast response times may be possible (eg compared to a once a day calibration protocol). As such, some embodiments include a post-mixing concentration sensor that is specifically configured to control the amount of at least one substance mixed with at least one other substance (processor). And other hardware) to generate an output signal that can be received as input.

In some embodiments, the concentration sensor 120 measures characteristic physical properties of the mixed material, such as concentration, temperature, dew point, and / or any other physical property (or takes measurements for determination). Can be configured as follows. As discussed above, the flow rate of the input material (e.g. as measured by a liquid flow controller and / or other type of flow measurement sensor) Only the amount is shown. Thus, the flow rate of two or more input substances can only give a rough indication of the output concentration after mixing. In that sense, even higher mixing accuracy can be achieved by using a concentration sensor 120 that measures the characteristic physical properties of the output after mixing rather than a flow sensor that measures the flow rate of the input material.

Some embodiments of the concentration sensor 120 may be configured to measure, for example, the light reflectivity (REF) and temperature of a mixed material, which may then be used for one or more materials in the mixed material. Can be used for concentration determination. As such, the concentration sensor 120 includes one or more optical sensors configured to determine the REF of the mixed material and one or more thermistors (and / or one or more) configured to measure temperature. A plurality of thermometers).

FIG. 2 illustrates an example of an optical sensor 200 that can be used in the concentration sensor 120 configured in accordance with some embodiments. In some embodiments, the concentration sensor 120 may further comprise a sensor control circuit configured to determine the refractive index (IoR) of the mixed material and thereby the concentration based on measurements by the optical sensor. Thus, the optical sensor 200 may be a miniaturized, highly accurate (about 0.001 wt%), fast response time (about 1 millisecond) IoR-based concentration sensor.

  Referring to FIGS. 2 and 3, light emitted from the light source 202 is incident on a window 204 (eg, a sapphire window) that may be in contact with the mixed material. According to various embodiments, the mixed material may be stationary or flowing. Light rays are reflected from the interface including the sensing surface of the window 204 and the window / material interface 206 to the multichannel photon detector 208. As discussed above, light reflectance data can be generated utilizing REF geometry. The reflectance data is sensitive to changes in optical density between the window / material interface 206. Thus, the optical density of the mixed material in contact with the window 204 is directly correlated to the measured reflectance. Since the optical density directly correlates to IoR, the concentration of the mixed material in contact with IoR and thus the window 204 can be determined from the light reflectance data.

  Referring to FIG. 2, the concentration sensor 200 includes a light source 202, a thermistor 210, a multi-channel photon detector 208 coupled to a substrate 212 (e.g., a printed circuit board (PCB)), and a second thermistor 214 on the window 204. Mirror 216, glass (or other suitable material) window 218 (optional), and window 204 (can be made from any suitable dielectric material such as sapphire, quartz, glass, and borosilicate glass). Can be prepared. In some embodiments, a memory chip 220 and a polarizer 222 may also (optionally) be included. The electro-optic components of the concentration sensor 200 including the light source 202, the multi-channel photon detector 208, and the thermistor 210 may be surrounded by a trapezoidal shaped optical housing 224 and coupled to the inner surface 226 of the substrate 212. A plurality of conductive leads 228 can be coupled to the outer surface 230 of the substrate 212.

  In some embodiments, the light source 202 may be a light emitting diode (LED) and the window 204 may be composed of sapphire. The second thermistor 214 may be attached to the front or back of the window 204 for convenience. The second thermistor 214 may also be placed in contact with the mixed material inside the window 204 or at or near the sensing surface 206.

  The window 204 can be placed in direct contact with the mixed material. In some embodiments, the window 204 is made of sapphire that provides mechanical strength, corrosion and scratch resistance to materials, durability, optical quality, strength under pressure, machinability, and accessibility. Can be done. The window 204 can be glued to the optical housing 224 or to the glass window 218 (eg, via optical epoxy or any other optically suitable material). Further, the window 204 can be covered with a thin layer of material (about 20-100 Å) having a density low enough to allow the light from the light source 202 to pass completely into the mixed material. This thin coating may further protect the surface of the window 204 from damage or degradation and thus extend the useful life of the concentration sensor 200.

As discussed above, the concentration sensor 120 may further comprise a sensor control circuit (eg, in addition to the light sensor 200). The sensor control circuit may be configured to operate the optical sensor 200 as acquisition and / or notification of good density data and / or measurement data. For example, the sensor control circuit may be configured to derive IoR and thus substance concentration from REF data and / or temperature data received from the optical sensor 200 using a numerical method. In addition, the sensor control circuit performs a numerical operation on the “raw” data signal received from the optical sensor 200 (eg, via the conductive lead 228) to pass the raw data signal to the control circuit 118. It can be changed to an appropriate form. These numerical operations can include, but are not limited to, background removal and normalization, and measurement data averaging. In some embodiments, at least some of the sensor control circuitry and / or its functionality may be implemented in firmware and / or integrated circuits. Alternatively and / or additionally, control circuit 118 may be configured to perform one or more functions discussed herein in connection with the sensor control circuit. Similarly, sensor control circuitry may be configured to perform one or more functions discussed herein in connection with control circuitry 118.

  Any suitable technique for determining the concentration of a substance in the mixture may be utilized. Some examples of structures and techniques for determining concentration include US Pat.No. 7,319,523 by the same applicant entitled “Apparatus for a Liquid Chemical Concentration Analysis System” issued on January 15, 2008, and Discussed in more detail in US Patent Application Publication No. 2010/0296079 by the same applicant entitled “Sensing System and Method” published November 25, 2010. The entire contents of both patent documents referenced above are expressly incorporated herein by reference. In addition, use REF and / or IoR technologies, including but not limited to conductivity spectroscopy, ultrasound spectroscopy, UV-visible spectroscopy, and near-infrared spectroscopy, electrochemical reactions, and surface plasmon resonance It will be appreciated that non-concentration sensors can also be used.

  Some integrated embodiments, such as the mixing device 100, use less liquid and consume less when compared to non-integrated systems for mixing, blending, adding, and other monitor control functions and applications Can bring For example, the liquid flow control device may require a mixing tank that functions as a container for receiving the mixed material. Because of the slow response time of the liquid flow controller (e.g., as can be caused by a slower flow measurement and the lack of a direct feedback loop between the measured post-mix output concentration and the input material flow) Larger amounts of mixed liquid can be temporarily stored in the mixing tank while the mixed liquid is reaching the target concentration. As such, the mixing device 100 may be able to reduce the amount of material for manufacturing and process applications where the smallest possible amount is required by providing a faster response time than the liquid flow control device. Further, by not using the mixing tank, the mixing device 100 can have a smaller installation area than the liquid flow rate control device. In that sense, some embodiments of the mixing device 100 may not include a mixing tank configured to store the output chemical after mixing until a target concentration is achieved.

  FIG. 1b illustrates an example mixing device 130 configured in accordance with some embodiments. What has been discussed above regarding the components of the mixing device 100 may also apply to the mixing device 130 and will not be repeated to avoid overly complicating the present disclosure. In this regard, like reference numerals are used throughout this discussion to refer to like components. The mixing device 130 may further include a control valve 132, which may be similar to the control valve 122. For example, the control valve 132 can be in communication with the control circuit 118 and used as part of a closed loop control system.

  In some embodiments, the control valve 132 may be configured to form an adjustable “bottle” in the substance A passage 108 based on instructions from the control circuit 118. As such, the control circuit 118 may be configured to control a plurality of control valves with one or more valves in each material passage (eg, the material A passage 108 and / or the material B passage 110). In some embodiments, the control circuit 118 may be configured to adjust the control valve 132 instead of and / or in addition to the control valve 122 when the mixed output material is not at the target concentration.

  FIG. 1c illustrates an example mixing device 140 configured in accordance with some embodiments. The mixing device 140 includes concentration control devices 142 and 144. Based on the concentration data and / or measurement data received from the concentration sensor 120, the concentration controller 142 may be configured to adjust the control valve 122 and the concentration controller 144 may be configured to adjust the control valve 132. In that sense, some embodiments may comprise two or more concentration control devices configured to control various control valve sets.

  FIG. 4 illustrates an example mixing device 400 configured in accordance with some embodiments. The mixing device 400 can further include a mixer 402. The mixer 402 may be configured to ensure proper substance mixing (eg, substance A and substance B) prior to measurement after mixing of the mixed substances. Therefore, the mixer 402 can be disposed between the intersection region 112 where the substance A and the substance B can be combined to form a mixed substance and the concentration sensor 120 where the mixed substance can be measured.

  In some embodiments, the mixer 402 may comprise a static mixer configured to perturb the mixed material as it flows through the mixer 402. For example, a static mixer may include one or more stationary baffles that partially obstruct and / or route the mixed material as it flows through the mixer 402. Alternatively or additionally, the mixer 402 comprises a non-static mixer such as one or more agitators that move within the mixer 402 (e.g., swirl and vibrate, etc.) to perturb the mixed material. obtain. As such, it is understood that any technique suitable for proper material mixing can be utilized with the mixer 402. Further, any of the example mixing devices disclosed herein, such as any device positioned in the intersection region 112, may comprise a mixer 402, which may be any other type of mixer. Or may be substituted for it.

  FIG. 5 illustrates a first input substance, a second input substance, and a third input substance (“Substance A”, “Substance B”, and “Substance C”, respectively) configured according to some embodiments. FIG. 2 shows example mixing devices 500 and 502 configured to mix As such, two or more mixing devices (eg, mixing devices 500 and 502) each configured to mix two materials can be coupled to mix three or more materials.

  For example, the substance A input 504 of the mixing device 500 may be configured to receive substance A, which may travel through the substance A passage 506. Material B input 508 is configured to receive material B, which may travel through material B passageway 510 and combine with material A at intersection region 512 to form a first mixed material. The first mixed material can be output from the mixing device 500 via the material output 514.

  In order to mix material C with the first mixed material, the material output 514 may be coupled to the first mixed material input 516 of the mixing device 502. When entering the first mixed material via the first mixed material input 516, the first mixed material may travel through the first mixed material passage 518. Substance C input 520 is configured to receive substance C, which passes through substance C passage 522 and is combined with a first mixed substance at intersection region 524 to form a second mixed substance (e.g., a desired substance). Concentration of substances A, B, and C). The second mixed material can be output from the mixing device 502 via the material output 526.

  Also, as shown in FIG. 5, the mixing devices 500 and 502 may include unique control circuits 528 and 530, respectively. Such a configuration may allow the mixing device to serve as an expandable module that can be added or reduced based on the number of input materials desired in the final mixed material. However, it will be appreciated that in some embodiments, two or more mixing devices may share a control circuit. For example, the shared control circuit may be located in one housing of the mixing device and / or located remotely from the mixing device.

  In some embodiments, the concentration sensor 532 generates concentration data and / or measurement data by measuring the first mixture material and transmits the concentration data and / or measurement data to the control circuit 528. Can be configured. The concentration sensor 534 may be configured to generate concentration data and / or measurement data by measuring the final mixed material and send the concentration data and / or measurement data to the control circuit 530. As such, the concentration sensors 532 and 534 can be configured to continuously supply concentration data and / or measurement data to the control circuit in real time while mixing is occurring between the materials.

  FIG. 6 illustrates an example mixing device 600 with a liquid flow control device 602 configured in accordance with some embodiments. As discussed above with reference to FIG. 1a, one of the input materials (eg, material A) may be configured to flow at a constant rate. The other input substance (eg substance B) may be configured to flow at a variable rate controlled by a mixing device (eg mixing device 600).

  In some embodiments, the liquid flow control device 602 can be configured to control the flow rate of the substance A before the substance A is input to the mixing device 600 at the substance A input 102. As such, the liquid flow control device 602 can include a flow output 610 coupled to the substance A input 102 of the mixing device 600. The liquid flow controller 602 may further comprise a flow input 606, a flow path 608, a flow sensor 612, a flow controller 614, and a flow control valve 616.

  The flow input 606 is configured to receive a substance A, which can flow through the liquid flow controller 602 via the flow path 608. The flow sensor 612 can be configured to measure the flow rate of the substance A in the flow path 608. The flow sensor 612 may be one of a plurality of types including a time-of-flight ultrasonic sensor and a differential pressure sensor. Based on the measured flow rate, the flow control device 614 can be configured to control the flow control valve 616 to form an adjustable bottleneck in the flow path 608. What has been discussed above regarding control valve 122 may also apply to flow control valve 616. For example, the flow control valve 616 can comprise an actuator and a needle. However, it will be appreciated that virtually any suitable technique that can controllably change the flow rate of substance A in flow path 608 can be utilized.

  The mixing device 600 may differ from the liquid flow control device 602 in at least some respects. For example, the control circuit 118 may be configured to control the flow rate of the input material before mixing based on the concentration of the output material after mixing as measured by the concentration sensor 120 (eg, via the control valve 122). On the other hand, the flow controller 614 is configured to control the flow rate of the input material before mixing based on the flow rate of the input material before mixing as measured by the flow sensor 612 (e.g., via the flow control valve 616, etc.). obtain.

  As discussed above, flow rates are not characteristic physical properties of materials (such as concentration and temperature), so controls based on input material flow rates are less accurate than controls based on output concentration after mixing. Can be (eg, less than 1% of full scale). In addition, the use of liquid flow control devices can cause drift (and therefore require periodic re-zeroing and recalibration), bubble susceptibility, blockage, water hammer (e.g. pressure rise and pressure release cycles, etc.) ), Low flow restriction (some embodiments cannot operate at less than about 25 mL / min), dynamic range restriction, and slow response time between flow measurement and adjustment (e.g., several minutes) Other constraints may be included, such as about a few seconds versus 1 second).

  Due to the limitations of the dynamic range, it may be necessary to use multiple liquid flow control devices to accommodate a given target concentration range. For example, in semiconductor (and related) manufacturing, the chemical SC1 (standard clean 1) is composed of a mixture of water, ammonia, and hydrogen peroxide and is used to remove organics and particles from the semiconductor wafer surface. For a given process application, the concentration can range from about 1: 1: 5 to about 1: 1: 500, but is not limited to this exemplary range. Liquid flow sensors cannot accommodate this full range, thus creating a need for multiple devices. This significantly increases the material mixing tool cost and equipment footprint and can impair product throughput. It is understood that the mixing device disclosed herein can be used to overcome these and other disadvantages of liquid flow control devices.

  In that sense, the liquid flow control device 602 (if it is included) is a constant percentage of substance A (in this specification, this is about 1% to about 2% flow rate of the liquid flow control device 602. It can be configured to achieve a coarse adjustment that is mainly involved in ensuring that the flow is within (including substantially constant within an error range). At the same time, the mixing device 600 has the AB mixed substance (e.g., the mixture of substance A and substance B as the output of the substance output 106) at a target concentration (in this specification, this is about 0.005% to about 0.01%). (Including mixed concentrations within an acceptable error range).

  In some embodiments, a liquid flow control device may additionally and / or alternatively be coupled to the substance B input 104 of the mixing device 600. In this case, the liquid flow rate control device may be configured to perform a coarse control of the substance B flow rate before the flow rate is further finely adjusted by the mixing device 600.

FIG. 7 illustrates an example of a mixing device 700 comprising a concentration sensor or concentration sensor 120 and a flow sensor or flow sensor 702 configured in accordance with some embodiments. The flow sensor 702 may be configured to measure, inter alia, the flow rate of an input material (e.g., input material B) as the input material travels through the material B passage 110, and the input material passes through the material B passage 110 Later, the crossing region 112 is reached, where two or more input materials may be combined to form a material in the future.

  In some embodiments, the flow sensor 702 can comprise an ultrasonic time-of-flight based flow sensor having piezoelectric transducers 704 and 706. Piezoelectric transducers 704 and 706 may be spaced so that a portion of material B flows between these pressure transducers within material B passage 110. Piezoelectric transducers 704 and 706 may each be configured to generate and propagate sound waves that are directed through material B passage 110 toward other piezoelectric transducers. The difference in arrival time between sound waves generated by each piezoelectric transducer can be used to determine the flow rate of substance B through substance B passage 110. It will be appreciated that the flow sensor 702 may be any other type of flow sensor, such as a differential pressure sensor.

  In some embodiments, the control circuit 118 can be communicatively connected to the flow sensor 702. As such, the flow sensor 702 can be used to control the valve 122 in addition to and / or alternatively to the concentration sensor 120. For example, if the flow sensor 702 is used in a closed loop control system, the concentration sensor 120 may be configured to notify a substance concentration value. Similarly, if the concentration sensor 120 is used in a closed loop control system, the flow sensor 702 can be configured to notify the flow rate. In this statement, flexibility, redundancy, and thoroughness can be achieved through the use of both flow sensors 702 and concentration sensor 120.

  It will be appreciated that the concentration sensor 120 can achieve higher mixing accuracy than the flow sensor 702 when used in a closed loop control system. For example, a flow measurement can include an uncertainty of about 1% to about 2% of the flow rate, so this translates to a concentration error of up to about 4% when inferring the concentration from the flow measurement. There can be certainty. On the other hand, the concentration sensor 120 can measure the concentration with an uncertainty of only about 0.005% to about 0.01%. This is because the concentration can be measured directly using the techniques disclosed herein instead of inferring from the flow rate.

  In some embodiments, the mixing device 700 (or any other mixing device disclosed herein) may include concentration (C), flow rate (υ), fluid flow rate, volume (V), to name a few. Provides simultaneous and real-time measurement of important physical properties of input materials and / or post-mixing output materials including, but not limited to, sound velocity in fluid (cs), temperature (T), and / or pressure (P) Can be further configured. The use of Doppler (instead of propagation time) ultrasonic measurements makes it possible to determine the velocity profile. When combined with concentration measurement, fluid velocity can be determined. These measurements can be further communicated, such as via a display device display, or data management for data analysis (e.g., to analyze exceptions, development procedures, optimizations, defects, and long-term trends) Can be sent to the system.

  FIG. 8 shows a flowchart of an exemplary method 800 for closed loop mixing control implemented in accordance with some embodiments. In some embodiments, the method 800 may be used to combine a first input substance (e.g., substance A) with a second input substance (e.g., substance B) to form an AB mixture at a desired target concentration. It can be implemented with a structure (eg, control circuit 118) shown in FIGS. Further, the method 800 may provide a technique that allows the measured concentration of the mixed material to be compared with the desired concentration to produce a feedback control value. The feedback control value can be utilized to control the premixed flow rate of substance B, such as by controlling the adjustment of the control valve in a direct feedback loop. Further, the method 800 will be described with reference to FIGS.

  Method 800 begins at step 802 and proceeds to step 804, where a target concentration of substance B within the mixed material (eg, after material B has been mixed with material A) can be determined. For example, the control circuit 118 of the mixing device 100 may be configured to receive a target concentration, such as via a user input device (eg, keyboard, keypad, touch screen, mouse, etc.). Alternatively and / or additionally, the target concentration may be programmed into the control circuit 118 and may be automatically determined by the circuit 118 (e.g., based on past mixture target concentrations, etc.) And / or may be determined based on any other information.

  At step 806, the control circuit may be configured to determine one or more control parameters to set an initial premix control valve opening size. As discussed above with reference to FIG. 1 a, the control valve 122 may be configured to form an adjustable “bottle” in the material B passage 110 based on commands from the control circuit 118. As such, the control valve can be set at step 808 to an initial position that can be expected to allow substance B to flow through substance B passage 110 at a flow rate that results in a target concentration of the mixed substance.

  “Control parameter” herein refers to one or more constants and / or functions that may suggest and / or define the relationship (eg, mapping) between control valve opening size and mixing concentration. For example, if the control valve comprises a stepper motor, the control parameter may include a function having a mixed parameter input that outputs a value having motor revolutions per concentration unit. In another example, the control parameter may include a constant having motor revolutions per concentration unit. Based on the desired target concentration, the control parameters can be used to obtain a motor speed that can be used to set the opening size of the control valve.

  The “mixing parameter” in the present specification may refer to a value corresponding to a factor that can influence the relationship between the motor rotation speed and the mixing concentration. In some embodiments, determining the control parameter at step 806 is for generating, determining, and / or selecting one or more control parameters (e.g., from a plurality of control parameters stored in memory, for example). May include receipt of mixing parameters (eg, substance flow rate, temperature, substance type and / or substance viscosity, and target concentration).

  In some embodiments, exemplary mixing parameters may include substance related mixing parameters and / or device related mixing parameters. The substance-related mixing parameters can indicate physical properties of the input substance (eg, substance A and / or substance B), such as viscosity, density, specific gravity, and chemical composition. For example, a material with high viscosity may indicate that for a given desired concentration, the control valve opening size should be greater than a material with low viscosity. In some embodiments, the substance-related mixing parameters may further include environmental or background mixing parameters that can affect the substance, such as temperature and / or pressure.

  In some embodiments, the flow rate of substance A can be a mixing parameter. For example, the flow controller 602 can be used to control the flow rate of the substance A before the substance A is input to the mixing device 600 at the substance A input 102. Therefore, the mixing device can receive the flow rate of the substance A from the flow control device. Alternatively and / or additionally, the mixing device may be configured to monitor and control the flow rate of substance A. For example, the flow rate can be controlled by the size of the material A passageway 108, such as by adjusting a control valve that forms an adjustable bottleneck in the material A passageway 108.

  Device-related mixing parameters include: passage size (e.g., substance A passage 108 and / or substance B passage 110), control valve type (e.g., stepper motor microstep size and microstep per all steps, etc.), mixing device type, and It may indicate characteristics of the mixing device that may affect the flow rate, such as other system component related elements. In some embodiments, the device related mixing parameters are in real time both during flow controller functionality and system calibration, i.e. during operation to correct variable changes (e.g. wear related accuracy issues, etc.). And during non-operational times (eg, based on experience with other systems and / or post-maintenance experience). For example, as the mixing device operates, the control valve can wear (eg, as a river flows through a canyon). It can take months or even years for the control valve to wear enough to require replacement, but the accuracy level and accuracy of the concentration sensor can vary by week or even daily wear. Can be affected. For example, a control valve that moves to open based on a specific motor speed may have accuracy for a specific target concentration for a day, but may be inaccurate after a week. These changes are not limited only to operational issues such as wear, but also to component replacement (e.g., different control valves that may have higher or lower durability than the component being replaced). It may also be influenced by non-operating events (such as a stepper motor may be installed).

  The mixing parameters can be determined by utilizing any suitable technique. For example, some mixing parameters can be stored in memory and retrieved from memory. Alternatively and / or additionally, one or more mixing parameters may be measured (eg, by concentration sensor 120 prior to mixing) and / or entered by a user.

  In step 810, the control circuit may be configured to facilitate mixing of substance B and substance A to form an output substance after mixing. For example, referring to FIG. 1 a, substance A may travel through substance A passage 108 and substance B may travel through substance B passage 110. The substance A passage 108 and the substance B passage 110 merge at the intersection region 112, where the substance A and the substance B can be combined to form a mixed substance. The mixed material may travel through the mixed material passage 114. In some embodiments, a mixer (e.g., such as mixer 402 shown in FIG. 4) includes an intersection region 112 in which substance A and substance B can be combined to form a mixed substance, and a concentration sensor 120 from which the mixed substance can be measured. Can be further positioned between. The mixer can be configured to ensure proper material mixing.

  In step 812, the control circuit may be configured to determine a post-mixing concentration value of substance B in the post-mixing output substance upon mixing of substance A and substance B. The control circuit may be configured to determine the post-mixing concentration value continuously, periodically, and / or upon receipt of a user command. In some embodiments, for each determination of the post-mixing concentration value, the light sensor 200 may be configured to measure the light reflectance (REF) and temperature of the mixed material. Based on these measurements, the concentration sensor 120 and / or the control circuit 118 may be configured to determine the refractive index (IoR). Based on IoR, concentration sensor 120 and / or control circuit 118 may be configured to determine a concentration value. Thus, the control circuit may be configured to receive a mixed concentration value of substance B (eg, as concentration data) from a concentration sensor in some embodiments. Some exemplary techniques that can be utilized in step 812 to determine concentration values based on post-mix output substance measurements are the “Apparatus for a Liquid Chemical Concentration Analysis Systems” published on January 15, 2008. This is discussed in detail in commonly assigned US Pat. No. 7,319,523. The entire contents of this patent are expressly incorporated herein by reference.

  In step 814, a determination may be made whether the post-mixing concentration value of substance B, as determined by monitoring the post-mixing concentration value, falls outside a predetermined target concentration range or an acceptable error range of the target concentration. For example, the concentration of substance B in the mixed output substance determined in step 814 can be compared with the target concentration of substance B determined in step 804. In some embodiments, the difference ε between the mixed concentration and the target concentration can be determined. In addition, post-mixing concentrations and other measured data (eg, measured REF, IoR, temperature, etc.) can be displayed on the display device.

  “Post-mixing concentration value” herein may refer to a single post-mixing concentration value or an average of two or more single concentration values. As discussed below with reference to FIG. 9, in some embodiments, in step 812, a predetermined number of post-mix concentration values may be averaged to determine an average post-mix concentration value. Then, at step 814, this average post-mix concentration value can be compared to the target concentration rather than a single post-mix concentration value. In some embodiments, the selected concentration value may be used from the post-mixing concentration value determined in step 812. For example, the control circuit may be configured to sample the mixed concentration value at a fixed time and / or intermittent time for determination at step 814.

  The determination at step 814 may include a determination as to whether the post-mixing concentration is within an acceptable amount from the target concentration. In some embodiments, the tolerance range can be determined by the accuracy of the density sensor. For example, if the concentration sensor can measure concentrations within about 0.001%, the determination in step 814 is performed to ensure that the post-mixing concentration and the target concentration do not differ by more than about 0.001%. obtain. Alternatively and / or additionally, the user may be able to set a tolerance range.

  In some embodiments, the determination in step 814 may utilize two or more different tolerance ranges. For example, an average tolerance range may be applied to the average post-mixing concentration, and a second tolerance range may be applied to each post-mixing concentration value. If the target concentration is 10.00%, the average tolerance is 0.09%, and an average post-mixing concentration outside of 10.09% or 9.91% can cause adjustment. In addition, if the second tolerance range is about 0.2%, each post-mix concentration value that deviates from 10.2% or 9.8% is adjusted, even if the average post-mix concentration is within the acceptable range of 9.91 to 10.09%. Can be produced. Such an embodiment may allow the mixing device to achieve faster response times for correction of large single deviations from the target concentration, such as may be caused by a sudden change in the concentration of the output substance after mixing. .

If the post-mixing concentration is not the target concentration or target concentration range (eg, within an acceptable error range), the method 800 may proceed to step 816. In step 816, the control parameters can be updated based on the post-mixing concentration. In some embodiments, the control circuit 118 may further comprise a proportional integral derivative (PID) controller (or may be configured with a PID function). Therefore, examples of control parameters may include a proportional value k _p , an integral value k _i , and / or a differential value k _d in PID control. Here, the difference between the expected effect of the previous control parameter on the concentration and the post-mixing concentration can be used to adjust the control parameter. For example, if the post-mixing concentration is less than the desired target concentration, k _p may increase, that is, a larger motor speed may be required to increase the control valve opening size.

  It will be appreciated that dynamic updating of the control parameters may correspond to increased response time as fewer feedback cycles may be required to achieve the target concentration. Furthermore, dynamic updates may allow for less or zero pre-mix recalibration (eg, as may be required for a liquid flow controller before each use). This is because the control circuit can adjust for changes to the mixing device (eg, of the control valve due to wear or replacement) at the same time as those changes occur over time.

  In step 818, a feedback control value can be determined. For example, the control circuit 118 may be configured to calculate the feedback control value q (t) using the proportional integral derivative shown in Equation 1 below.

Here, the value ε is a difference between the measured mixed concentration and the target concentration with respect to time, k _p is a proportional value, k _i is an integral value, and k _d is a differential value. In some embodiments, the feedback control value may utilize the control parameters updated at step 816 (eg, k _p , k _i , and k _d ). In some embodiments, the feedback value q (t) is in motor revolutions and may provide a value used for control of the pre-mix control valve.

  In step 820, the opening size of the pre-mix control valve can be adjusted based on the feedback control value. For example, the control circuit 118 causes the actuator of the control valve 122 to rotate in the appropriate direction (e.g., a specific motor speed as determined by the feedback control value) into the substance B passage 108. It may be configured to cause the needle to protrude and / or to withdraw the needle from the substance B passageway 108, thus increasing and decreasing the size of the adjustable bottleneck and thereby the substance B flow rate, respectively. Thus, the flow rate of substance B can be increased when the post-mixing concentration is less than the target concentration and decreased when the post-mixing concentration is above the target concentration.

  In some embodiments, the adjustment of the control valve may be independent of the measured flow rate of substance B in substance B passage 110, such as by a flow sensor. Therefore, unlike a liquid flow rate control device that can control the valve based on the measured flow rate, higher accuracy can be achieved by using the post-mixing concentration as a reference for adjusting the control valve.

  After step 820, method 800 returns to step 810 where mixing is continued and the concentration of substance B in the output substance after mixing can be determined again using the techniques described above.

  Returning to step 814, if the post-mixing concentration is a target concentration, the method 800 proceeds to step 822 where a determination may be made as to whether mixing is complete. If it is determined that the mixing is not complete (e.g., the concentration sensor detects that the output substance is still flowing after mixing), the method 800 returns to step 810 where mixing is continued and after mixing. The concentration of substance B in the output substance can be determined. In that sense, the concentration controller 118 continually monitors the post-mixing concentration to determine whether the post-mixing concentration is outside a predetermined target concentration range or a target concentration tolerance range, and It may be configured to adjust the control valve position accordingly in real time as it occurs. If it is determined at step 822 that the mixing is complete, the method 800 may end at step 824.

  FIG. 9 illustrates a flowchart of an exemplary method 900 for generating an average post-mix concentration value according to some embodiments. As discussed above, at step 812 of method 800, a predetermined number of post-mix concentration values may be averaged to determine an average post-mix concentration value. Then, at step 814, the average post-mix concentration value can be compared to the target concentration.

  The method 900 begins at step 902 and proceeds to step 904, where the control circuit may receive a mixed concentration value of the first input material in the mixed output material from the concentration sensor. At step 906, step 904 may be repeated a predetermined number of times. What was discussed above at step 812 of method 800 may also apply at step 904 and step 906. For example, based on the measurement by the concentration sensor 120 during mixing of substance A and substance B, the control circuit 118 is configured to continuously determine and / or receive the mixed concentration value of substance B in the output substance after mixing. Can be done. After the predetermined number of density values, the method 900 may proceed to step 908.

  In step 908, the control circuit may be configured to generate an average post-mixing concentration value for a predetermined number of concentration values. In some embodiments, the predetermined number of concentration values that are averaged may be determined by the response time of the control valve 122 and / or the response time of the concentration sensor 120. For example, the concentration sensor 120 generates a concentration value faster (e.g., every millisecond) than the time required by the control valve 122 to adjust the control valve opening size (e.g., due to rotation of the actuator and / or step motor, etc.) It will be appreciated from the disclosure presented herein that it may be possible. Additionally and / or alternatively, the predetermined number of concentration values to be averaged may be based on the reliability of the concentration sensor. For example, the average value can be determined to avoid problems caused by inaccurate concentration values, which can cause the post-mixing concentration to deviate from the target concentration. Method 900 may end at step 910.

  FIG. 10 shows a schematic block diagram of a circuit 1000, some or all of which may be included in, for example, a mixing device (eg, the control circuit 118 and / or concentration sensor 120 of the mixing device 100). As shown in FIG. 10, according to some example embodiments, the circuit 1000 includes one or more processors 1002, a memory 1004, one or more communication modules 1006, and / or one or more Various means such as an input / output module 1008 may be provided.

  As referred to herein, a “module” refers to hardware, software, and / or firmware configured to perform one or more specific functions as included in methods 800 and 900. Including. In this context, means of circuit 1000 as described herein include, for example, a circuit, a hardware element (e.g., a suitably programmed processor and / or combinational logic circuit), a suitably configured process. It may be embodied as a computer program product comprising computer readable program instructions stored in a non-transitory computer readable medium (eg, memory 1004) executable by a device (eg, processor 1002), or some combination thereof.

  For example, processor 1002 can include one or more microprocessors with associated digital signal processors, one or more processors without associated digital signal processors, one or more coprocessors, one or more Various other processing elements including multi-core processors, one or more controllers, processing circuits, one or more computers, for example integrated circuits such as ASICs (application specific integrated circuits) or FPGAs (field programmable gate arrays) , Or some combination thereof, may be embodied as various means. Thus, although illustrated in FIG. 10 as a single processor, in some embodiments the processor 1002 comprises multiple processors and / or processing circuitry. Multiple processors may be embodied on a single computing device or may be distributed among multiple computing devices that are collectively configured to function as circuit 1000. The plurality of processors are in operational communication with each other and may be collectively configured to perform one or more functions of circuit 1000 as described herein. In one example embodiment, processor 1002 is configured to execute instructions that are stored in memory 1004 or otherwise accessible to processor 1002. These instructions are executed by the processor 1002 so that the circuit 1000 may perform one or more of the functions of the circuit 1000 as described herein.

  Whether configured by a hardware method, a firmware / software method, or a combination thereof, the processor 1002 comprises elements capable of performing operations according to embodiments of the present invention while being configured accordingly. obtain. Thus, for example, if processor 1002 is embodied as an ASIC or FPGA, etc., processor 1002 is hardware that is specially configured to perform one or more operations described herein. Can be provided. As another example, if processor 1002 is embodied as executing instructions that may be stored in memory 1004, these instructions will be discussed in connection with FIGS. The processor 1002 may be specially configured to implement one or more algorithms and operations described herein.

  The memory 1004 may comprise, for example, volatile memory, non-volatile memory, or some combination thereof. Although illustrated as a single memory in FIG. 10, the memory 1004 may comprise a plurality of memory components. Multiple memory components may be embodied on a single computing device or distributed among multiple computing devices. In various embodiments, the memory 1004 includes, for example, a hard disk, random access memory, cache memory, flash memory, compact disc read only memory (CD-ROM), digital multipurpose disc read only memory (DVD-ROM), optical disc, information It may comprise a circuit configured to store, some combination thereof, or the like. Memory 1004 may cause circuit 1000 to perform various functions according to information, data (e.g., control parameters and / or constants for setting control valve position, etc.), applications, instructions, or example embodiments of the present invention. Can be configured to store the like and the like. For example, in at least some embodiments, memory 1004 is configured to buffer input data for processing by processor 1002. Additionally or alternatively, in at least some embodiments, memory 1004 is configured to store program instructions for execution by processor 1002. The memory 1004 may store information in the form of static information and / or dynamic information. This stored information may be stored and / or utilized by the circuit 1000 in performing the functions of the circuit 1000.

  The communication module 1006 may be a circuit, hardware, computer program product comprising computer readable program instructions stored in a computer readable medium (e.g., memory 1004) and executed by a processing device (e.g., processor 1002), or the second circuit 1000, for example. And / or can be embodied as any device or means embodied in a combination thereof configured to send and receive data to / from another device, such as the like. In some embodiments, the communication module 1006 may be at least partially embodied as the processor 1002 (as well as other components discussed herein) or may be controlled by the processor 1002 in other ways. . In this regard, the communication module 1006 can be in communication with the processor 1002, such as via a bus. In some embodiments, the communication module 1006 may be configured to enable communication with another computing device, such as an antenna, transmitter, receiver, transceiver, network interface card, and / or supporting hardware and / or firmware / software. And so on. The communication module 1006 may be configured to send and receive any data that can be stored by the memory 1004 utilizing any protocol that can be used for communication between computing devices. Additionally or alternatively, the communication module 1006 may be in communication with the memory 1004, the input / output module 1008, and / or any other component of the circuit 1000.

  The input / output module 1008 may be in communication with the processor 1002 to receive user input indications and / or provide an audible output, visual output, machine output, or other output to the user. Some examples of visual output that can be displayed on a visual display device by circuit 1000 are discussed in connection with methods 800 and 900. Such exemplary visible outputs include post-mixing concentration, target concentration, measured light reflectance (REF), refractive index (IOR), temperature control parameters and / or temperature control constants, and the like, It is not limited to. In that sense, the input / output module 1008 may further include support for, for example, a keyboard, keypad, mouse, joystick, display, touch screen display, and / or other input / output mechanism. The input / output module 1008 may be in communication with the memory 1004, the communication module 1006, and / or any other component, such as by a bus. Two or more input / output modules and / or other components may be included in the circuit 1000, but only one is shown in FIG. 10 to avoid unnecessarily complicating the figure (herein As well as other components discussed in).

  In some embodiments, a series of computer readable program code portions may be embodied in one or more computer program products and used with a computer device and / or other programmable apparatus to provide a machine execution process. As will be appreciated, any such computer program instructions and / or other types of code can be loaded into a computer, processor, or other programmable device circuit to create a machine, thereby A computer, processor, or other programmable circuit that executes the code forms the means for performing various functions, including those described herein.

  Embodiments of the present invention have been described above with reference to block diagrams and flowchart illustrations of methods, apparatus, and computer program products. It will be appreciated that each block of the circuit diagrams and process flowcharts, and combinations of blocks in the circuit diagrams and process flowcharts, can each be implemented by various means including computer program instructions. These computer program instructions can be loaded into a general purpose computer, special purpose computer, or other programmable data processing device such as processor 1002 discussed above with reference to FIG. 10 to create a machine, thereby making the computer program product Includes instructions that, when executed on a computer or other programmable data processing device, form means for performing the functions specified in the flowchart blocks.

  These computer program instructions may also be stored in one or more non-transitory computer readable storage media (e.g., memory 1004) that may cause a computer or other programmable data processing device to function in a particular fashion, The instructions stored on the computer readable storage medium thereby result in an article of manufacture that includes computer readable instructions for performing the functions discussed herein. Computer program instructions may also be loaded into a computer or other programmable data processing device to cause a computer-executed process by causing a series of operational steps to be performed on the computer or other programmable device, thereby causing the computer or Instructions executed on other programmable devices provide steps for performing the functions discussed herein. A non-transitory computer readable medium is a non-transitory storage hardware, non-transitory storage device that can be accessed by a controller, microcontroller, computing system, or module of a computing system to encode computer-executable instructions or software programs, Or it may comprise a non-transitory computer system memory. A non-transitory computer readable medium may be accessed by a computing system or a module of a computing system to retrieve and / or execute computer-executable instructions or software programs encoded on the medium. Non-transitory computer readable media includes hardware memory, non-transitory tangible media (e.g., one or more magnetic storage disks, one or more optical disks, one or more USB flash drives, etc.), computer system memory Or one or more types such as, but not limited to, random access memory (DRAM, SRAM, EDO RAM, etc.), and the like.

  In describing example embodiments, specific terminology is used for the sake of clarity. For purposes of explanation, each specific term is intended to include at least all technical and functional equivalents that operate in a similar manner to accomplish a similar purpose. Further, in some examples in which a particular exemplary embodiment includes multiple system elements or method steps, these elements or steps may be replaced with a single element or step. Similarly, a single element or step may be replaced with a plurality of elements or steps that serve a similar purpose. Furthermore, although parameters relating to various properties are specified herein for the exemplary embodiments, these parameters are 1/20, 1/10 unless otherwise specified. , 1/5, 1/3, 1/2, etc., or their rounded-off approximations may be adjusted up or down. Furthermore, while exemplary embodiments have been illustrated and described with reference to specific embodiments thereof, it is to be understood that various substitutions and changes in form or detail may be made herein without departing from the scope of the invention. It will be understood by the contractor. In addition, other aspects, features, and advantages are also included within the scope of the present invention.

  In this specification, exemplary flow charts are presented for illustrative purposes and are non-limiting examples of methods. The exemplary method may include more or fewer steps than those shown in the exemplary flowchart, and the steps of the exemplary flowchart may be performed in a different order than that shown. Those skilled in the art will appreciate.

  Block diagrams and flowchart blocks support a combination of means for performing a particular function, a combination of steps for performing a particular function, and a program instruction means for performing a particular function. Also, some or all of the blocks / steps in the circuit diagrams and process flow diagrams, and combinations of blocks / steps in the circuit diagrams and process flow diagrams, are dedicated to performing a specific function or step, or combination of dedicated hardware and computer instructions. It will be appreciated that it may be implemented by a hardware based computer system.

  Numerous modifications and other embodiments of the invention described herein will occur to those skilled in the art relating to these embodiments of the invention that benefit from the teachings presented in the foregoing description and the associated drawings. Accordingly, it is to be understood that embodiments of the invention are not limited to the specific embodiments disclosed, and that modifications and other embodiments are intended to be included within the scope of the appended claims. . Although specific terms are used herein, they are used in a generic and descriptive sense only and are not intended to be limiting.

100 mixing equipment
102 Substance A input
104 Substance B input
106 Substance output
108 Substance A passage
110 Substance B passage
112 Intersection area
114 Material passage after mixing
118 Control circuit
120 Concentration sensor
122 Control valve
124 connections
130 Mixing equipment
132 Control valve
140 Mixing equipment
142 Concentration controller
144 Concentration controller
200 Optical sensor
202 light source
204 windows
206 Window / material interface
208 Multi-channel photon detector
210 thermistor
212 substrate
214 second thermistor
216 mirror
218 windows
220 memory chips
222 Polarizer
224 Trapezoidal optical housing
226 inner surface
228 Conductive lead wire
230 outer surface
400 mixing equipment
402 mixer
500 mixing equipment
502 mixing equipment
504 Substance A input
506 Substance A passage
508 Substance B input
510 Substance B passage
512 intersection area
514 Substance output
516 First mixed substance input
518 1st mixed material passage
520 Substance C input
522 Substance C passage
524 Intersection area
526 substance output
528 control circuit
530 control circuit
532 Concentration sensor
534 Concentration sensor
600 mixing equipment
602 Liquid flow controller
606 Liquid flow controller
608 flow path
610 Flow output
612 Flow sensor
614 Flow control device
616 Flow control valve
700 mixing equipment
702 Flow sensor
704 Piezoelectric transducer
706 Piezoelectric transducer
1000 circuits
1002 processor
1004 memory
1006 Communication module
1008 I / O module

Claims (17)

A method for performing controlled mixing of a plurality of substances to produce a first mixture comprising:
Receiving a first target concentration range of a first substance of the plurality of substances;
Supplying the plurality of substances to the first mixing zone via a plurality of passages, comprising:
The first mixing zone includes an intersecting region where a first passage and a second passage of the plurality of passages meet, and the plurality of substances are mixed in the first mixing zone and the first mixture is mixed. Generating steps, and
While continuing to supply the plurality of substances to the first mixing zone, the concentration value of the first substance in the first mixture is determined via a concentration sensor disposed downstream from the intersection region. The step of determining the concentration value of the first substance in the first mixture comprises:
Detecting the light reflectance of the first mixture;
Detecting the temperature of the first mixture;
Determining a refractive index of the first mixture based on the light reflectance of the first mixture and the temperature;
Determining the concentration value of the first substance in the first mixture based on the refractive index, and
Comparing the concentration value of the first substance against the first target concentration range;
Provided in the first passage for supplying the first substance to the first mixing zone when it is determined that the concentration value of the first substance is out of the first target concentration range; Automatically adjusting a flow rate of the first substance to the first mixing zone by adjusting an opening size of the control valve, wherein the opening size of the control valve is the first size of the control valve. Is adjusted based on the concentration value of the first substance in the mixture and based on one or more physical characteristics of at least one of the plurality of substances, wherein the one or more physical characteristics are viscous Selected from the group consisting of: density, specific gravity, chemical composition, temperature, and pressure.   The opening size of the control valve is also adjusted based on one or more physical characteristics of a mixing system in which the first mixture is generated, wherein the one or more physical characteristics are determined by the first substance. The method of claim 1, wherein the method is selected from the group consisting of the size of the first passage through which it is fed to the mixing zone, the type of the mixing zone, and the type of the control valve. Determining a second concentration value of the first substance in the first mixture while continuing to supply the plurality of substances to the first mixing zone;
Comparing the second concentration value of the first substance against the first target concentration range;
The first concentration for supplying the first substance to the first mixing zone when it is determined that the second concentration value of the first substance is out of the first target concentration range. Automatically adjusting the opening size of the control valve provided in a passage, wherein the opening size of the control valve is the second concentration of the first substance in the first mixture. The method of claim 1, further comprising adjusting based on the value. Receiving a second target concentration range of a second substance in the first mixture of the plurality of substances;
Determining a concentration value of the second substance in the first mixture while continuing to supply the plurality of substances to the first mixing zone;
Comparing the concentration value of the second substance against the second target concentration range;
Automatically adjusting the supply of the second substance to the first mixing zone based on a determination that the concentration value of the second substance is out of the second target concentration range. The method of claim 1. Supplying the first mixture to a second mixing zone;
Supplying a third substance to the second mixing zone, wherein the first mixture and the third substance are mixed in the second mixing zone to produce a second mixture; Steps,
Receiving a third target concentration range of the third substance in the second mixture;
Determining a concentration value of the third substance in the second mixture while continuing to supply the first mixture and the third substance to the second mixing zone;
Comparing the concentration value of the third substance against the third target concentration range;
Automatically adjusting the supply of the third substance to the second mixing zone based on a determination that the concentration value of the third substance is outside the third target concentration range. The method of claim 1. A first mixing conduit with an intersection region where the first supply conduit and the second supply conduit meet;
A first supply conduit coupled to the first mixing conduit and disposed upstream thereof, the first supply conduit comprising a bore for supplying a first substance to the first mixing conduit When,
A first flow control device provided in the first supply conduit, the first flow control device configured to selectively adjust the opening of the bore of the first supply conduit;
A second supply conduit coupled to the first mixing conduit and disposed upstream thereof, the second supply conduit comprising a bore for supplying a second substance to the first mixing conduit When,
Provided at a position downstream from the intersecting region of the first mixing conduit for detecting one or more characteristics of the first mixture produced by the mixing of the first substance and the second substance. One or more sensors of the first set;
A first control circuit operatively coupled to the first set of one or more sensors and to the first flow control device, the first mixture of the first mixture in the first mixing conduit; A first control circuit programmed to automatically control the first flow control device to adjust the flow rate of the first substance based on the one or more detected features; A mixing system. Wherein said one or more features of the first mixture, the temperature, dew point, density, said first speed of sound in the mixture, light reflectance, and is selected from the group consisting of refractive index, according to claim 6 Mixing system. The first control circuit includes:
Determining a concentration value of the first substance in the first mixture based on the one or more detected characteristics of the first mixture;
Comparing the concentration value of the first substance against a first target concentration range for the first substance;
Based on the determination that the concentration value of the first substance is out of the first target concentration range, the first flow control device is automatically configured to adjust the opening of the bore of the first supply conduit. The mixing system of claim 6 , wherein the mixing system is programmed to control automatically. The one or more sensors of the first set are:
An optical system configured to detect light reflectance of the first mixture;
A thermistor or thermometer for detecting the temperature of the first mixture,
The first control circuit is configured to determine a refractive index of the first mixture based on the light reflectance of the first mixture and the temperature, and in the first mixture based on the refractive index. 9. A mixing system according to claim 8 , programmed to determine the concentration value of the first substance. The first control circuit is based on the concentration value of the first substance in the first mixture and based on at least one physical characteristic of at least one of the plurality of substances. 9. The mixing of claim 8 , programmed to control a flow control device, wherein the one or more physical characteristics are selected from the group consisting of viscosity, density, specific gravity, chemical composition, temperature, and pressure. system. The first control circuit controls the first flow control device based on the concentration value of the first substance in the first mixture and based on one or more physical characteristics of the mixing system And the one or more physical features are from the group consisting of the size of the first supply conduit, the type of the first mixing conduit, and the type of the first flow control device 9. A mixing system according to claim 8 , which is selected. One or more of the sensors detect the one or more characteristics of the first mixture upon mixing of the first substance and the second substance in the first mixing conduit; 7. The mixing system according to claim 6 , wherein the mixing system is operated at predetermined intervals. A second flow control device provided in the second supply conduit, further comprising a second flow control device configured to selectively adjust the opening of the bore of the second supply conduit. Prepared,
The first control circuit is operatively coupled to the second flow control device, and the first control circuit detects the one or more detections of the first mixture in the first mixing conduit. 7. The mixing system of claim 6 , wherein the mixing system is programmed to automatically control the second flow control device to adjust the flow rate of the second substance based on the characterized characteristics. The first control circuit includes:
Determining a concentration value of the second substance in the first mixture based on the one or more detected characteristics of the first mixture;
Comparing the concentration value of the second substance against a second target concentration range for the second substance;
14.The mixing of claim 13 , programmed to automatically control the second flow control device based on a determination that the concentration value of the second substance is outside the second target concentration range. system. A second mixing conduit coupled to and disposed downstream of the first mixing conduit;
A third supply conduit coupled to and disposed upstream of the second mixing conduit, the third supply conduit comprising a bore for supplying a third substance to the second mixing conduit When,
A third flow control device provided in the third supply conduit, wherein the third flow control device is configured to selectively control the opening of the bore of the third supply conduit;
One of a second set provided in the second mixing conduit for detecting one or more characteristics of the second mixture produced by the mixing of the first mixture and the third substance. Or multiple sensors,
A second control circuit operably coupled to the second set of one or more sensors and to the third flow control device, the second mixture of the second mixture in the second mixing conduit; A second control circuit programmed to automatically control the third flow control device to adjust the flow rate of the third substance based on the one or more detected features; 7. A mixing system according to claim 6 comprising . A flow control sensor provided in the second supply conduit, wherein the flow control sensor is configured to detect a flow rate of the second substance in the second supply conduit;
A second flow control device provided in the second supply conduit for selectively adjusting an opening of the bore of the second supply conduit based on the flow rate detected by the flow control sensor. 7. The mixing system according to claim 6 , further comprising a second flow control device configured as follows. A mixing device for mixing a plurality of substances,
A first input port for introducing a first substance into the mixing device;
A second input port for introducing a second substance into the mixing device;
An output port for outputting the mixture of the first substance and the second substance from the mixing device;
A first flow path comprising a first termination and a second termination coupled to the first input port;
A control valve disposed in the first flow path and configured to control a bore of the first flow path with a control valve;
A second flow path comprising a first termination and a second termination coupled to the second input port;
An intersecting region disposed downstream of the first flow path and the second flow path, the second end portion of the first flow path and the second flow path of the second flow path. An intersection region formed by the intersection with the end of
A post-mixing passage disposed downstream of the intersection region and upstream of the output port of the mixing device;
A concentration sensor disposed in the post-mixing passage, the concentration sensor configured to periodically detect an indication of the concentration of the first substance in the post-mixing passage;
Receiving the reading of the concentration of the first substance according to a program and automatically controlling the control valve to adjust the supply of the first substance to the intersection region based on the reading of the concentration And a control circuit configured to control the mixing device.

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