KR20190023905A - Gas supply apparatus, gas sensor chip testing apparatus including same and method for testing the gas sensor chip testing apparatus - Google Patents

Abstract

A gas supply apparatus according to an embodiment of the present invention includes a first gas tank in which a first gas is stored, a second gas tank in which a second gas is stored, a dilution chamber for mixing and diluting the first gas and the second gas, a first connection pipe connecting the first gas tank and the dilution chamber, a second connection pipe connecting the second gas tank and the dilution chamber, a first supply pipe connected to the dilution chamber and capable of supplying the gas diluted in the dilution chamber to a test object, a second supply pipe branching from the second connection pipe and capable of supplying the second gas to the test object, and a backflow prevention pipe branching from the first supply pipe and adjusting the internal pressure of the first supply pipe. The first and second supply pipes are capable of selectively supplying the test object with the first or second gas.

Description

TECHNICAL FIELD [0001] The present invention relates to a gas supply apparatus, a gas supply apparatus, a gas supply apparatus, a gas supply apparatus, a gas supply apparatus, a gas supply apparatus,

The present invention relates to a gas supply apparatus and a gas detection sensor chip testing apparatus, and more particularly, to a gas supply apparatus for gas detection sensor chip testing using surface plasmon resonance and a gas detection sensor chip testing apparatus including the same.

Currently known types of gas sensing systems include chemoresistive sensors, colorimetric sensors, and gas chromatography / mass spectrometry (GC / MS) (T. Chen et al., Sensors and Actuators B 131 (2008) 301-305).

These conventional gas sensing technologies, despite their advantages, have many parts to be improved. For example, a chemical resistance sensor using a metal oxide having semiconductor characteristics has a disadvantage in that a high temperature driving temperature is required because it exhibits a good sensitivity at a temperature higher than 100 캜. In addition, the GC / MS method has a problem that it is unsuitable for a simple device which is high in sensitivity as a sensor, but is portable due to its analysis characteristic.

On the other hand, in recent years, a sensing technology for detecting the gas emitted from the body and utilizing the gas for diagnosis of diseases has been spreading. This sensing technology is to diagnose human diseases by sensing various volatile organic compounds (VOC) such as H ₂ S released by metabolism of germs in the mouth through human exhalation.

The technique of analyzing human exhalation to diagnose the disease as described above is characterized by reliability and stability that can be analyzed at high humidity (more than 80%) of exhalation, sensitivity to ppb level of concentration, and a number of obstructive gas species A high degree of selectivity is required to eliminate the influence of the above-mentioned problems. For this reason, a gas detection sensor for selectively detecting the type or concentration of a biomolecule such as a chemical substance or a bacterium included in a person's exhalation has a higher degree of technological development than other sensor technologies and thus has not been commercialized as a medical device up to now .

 T. Chen et al., Sensors and Actuators B 131 (2008) 301-305.

It is an object of the present invention to provide a gas supply device for easily supplying gas for gas detection sensor chip test using surface plasmon resonance, a gas detection sensor chip test device and gas detection sensor chip test method including the same.

A gas supply apparatus according to an embodiment of the present invention includes a first gas tank in which a first gas is stored, a second gas tank in which a second gas is stored, a first gas tank in which the first gas and the second gas are mixed, A first connection pipe connecting the first gas tank and the dilution chamber, a second connection pipe connecting the second gas tank and the dilution chamber, a second connection pipe connecting the dilution chamber and the dilution chamber, A first supply pipe for supplying a mixed gas to a test object, a second supply pipe branched from the second connection pipe to supply the second gas to the test object, and a second supply pipe branched from the first supply pipe, And a backflow preventive pipe for regulating an internal pressure of the first supply pipe, wherein one of the first supply pipe and the second supply pipe is opened So that the mixed gas or the second gas can be supplied to the test object.

In a gas supply apparatus according to an embodiment of the present invention, the first gas may include a volatile organic compound (VOC), and the second gas may include nitrogen (N ₂ ). In an embodiment of the present invention The first gas may comprise at least one of formaldehyde (HCHO), toluene, xylene, acetone and nitrogen dioxide.

In the gas supply apparatus according to an embodiment of the present invention, the first connection pipe and the second connection pipe are provided with an on-off valve for controlling the amount of the first gas and the second gas flowing into the dilution chamber, And the concentration of the first gas can be adjusted by opening and closing operations of the opening and closing valve.

In the gas supply apparatus according to an embodiment of the present invention, the first supply pipe is provided with an opening / closing valve and a flow meter for adjusting the amount of gas passing through the first supply pipe, The gas which has not passed through the opening and closing valve provided in the pipe may be discharged to the outside so that the pressure inside the first supply pipe can be kept lower than the internal pressure of the dilution chamber.

The apparatus for testing a gas detection sensor chip according to another embodiment of the present invention comprises a gas supply device according to the embodiments of the present invention, a gas supply device connected to the first supply pipe and the second supply pipe, A gas detection sensor chip for sensing a gas emitted from one of the supply pipes, a prism disposed on one side of the gas detection sensor chip, a light source for emitting light reaching the gas detection sensor chip through the prism, And a detector for detecting light reflected from the sensor chip.

In the gas detection sensor chip testing apparatus according to another embodiment of the present invention, the gas detection sensor chip includes a substrate, a metal layer formed on the upper surface of the substrate, a metal oxide layer formed on the metal layer, Gt; ligand < / RTI > compounds.

In the apparatus for testing a gas detection sensor chip according to another embodiment of the present invention, the metal layer may include a metal causing surface plasmon resonance (SPR).

In the apparatus for testing a gas detection sensor chip according to another embodiment of the present invention, the metal may include at least one of gold (Au), platinum (Pt), and silver (Ag).

In the apparatus for testing a gas detection sensor chip according to another embodiment of the present invention, the metal oxide layer may include at least one metal oxide particle selected from the group consisting of TiO2, SiO2, ZnO, In2O3, WO3 and SnO2.

In the apparatus for testing a gas detection sensor chip according to another embodiment of the present invention, the ligand compound may be a compound containing at least one functional group selected from the group consisting of an amine group, a carboxyl group, a hydroxyl group, a methyl group and a thiol group.

A gas detection sensor chip test apparatus according to another embodiment of the present invention The ligand compound may be a compound derived from a phosphonitrile chloride trimer (PNCT).

According to another aspect of the present invention, there is provided a method for testing a gas detection sensor chip, comprising: a first step of opening a first gas tank containing a first gas and a second gas tank containing a second gas into a dilution chamber; A second step of adjusting the concentration of the first gas introduced into the dilution chamber to a predetermined concentration, a third step of discharging the first gas whose concentration is adjusted in the dilution chamber and supplying the first gas to the gas detection sensor chip, And a fourth step of emitting light to the detection sensor chip and detecting a reflected light to measure a refractive index change.

The method of testing a gas detection sensor chip according to still another embodiment of the present invention may further include a fifth step of supplying only the second gas to the gas detection sensor chip to obtain comparison data.

In the method of testing a gas detection sensor chip according to another embodiment of the present invention, the second to the fourth steps are repeatedly performed, and the concentration of the first gas controlled in the second step may be varied have.

The gas supply device for gas detection sensor chip test using surface plasmon resonance according to an embodiment of the present invention can easily produce various concentrations of gas and supply the gas to the test object sensor chip.

Also, the gas detection sensor chip testing apparatus according to an embodiment of the present invention can easily test gas detection sensor chips for various concentrations of test gas.

1 is a schematic structural view of a gas detection sensor chip testing apparatus according to an embodiment of the present invention.
FIG. 2 is a schematic view showing a configuration of a gas detection sensor chip included in a gas detection sensor chip testing apparatus according to an embodiment of the present invention and a detection method using the same.
3 is a structural view showing a schematic operation state of a gas detection sensor chip testing apparatus according to an embodiment of the present invention.
4 is a reference diagram for describing flow rates of formaldehyde gas and nitrogen gas used for controlling the concentration of formaldehyde gas in a gas supply apparatus according to an embodiment of the present invention.
6 is a schematic flowchart of a method of testing a gas detection sensor chip according to an embodiment of the present invention.

Prior to the detailed description of the present invention, the terms or words used in the present specification and claims should not be construed as limited to ordinary or preliminary meaning, and the inventor may designate his own invention in the best way It should be construed in accordance with the technical idea of the present invention based on the principle that it can be appropriately defined as a concept of a term to describe it. Therefore, the embodiments described in the present specification and the configurations shown in the drawings are merely the most preferred embodiments of the present invention, and are not intended to represent all of the technical ideas of the present invention. Therefore, various equivalents It should be understood that water and variations may be present.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Note that, in the drawings, the same components are denoted by the same reference symbols as possible. Further, the detailed description of known functions and configurations that may obscure the gist of the present invention will be omitted. For the same reason, some of the elements in the accompanying drawings are exaggerated, omitted, or schematically shown, and the size of each element does not entirely reflect the actual size.

It is to be noted that the expressions such as the upper side, the lower side, the side face, etc. in the present specification are described based on the drawings in the drawings and can be expressed differently when the direction of the corresponding object is changed.

FIG. 1 is a schematic structural view of a gas detection sensor chip testing apparatus 1 according to an embodiment of the present invention, and FIG. 2 is a schematic view of a gas detection sensor chip included in a gas detection sensor chip testing apparatus according to an embodiment of the present invention. And a detection method using the same.

1 and 2, a gas detection sensor chip testing apparatus 1 according to an embodiment of the present invention includes a gas supply device 100, a gas detection sensor chip 200, a prism 300, a light source 400, And a detector 500.

The gas supply device 100 can supply various types of gases required for testing to the gas detection sensor chip. For example, the gas supply device 100 can supply various concentrations of formaldehyde (HCHO) to the gas detection sensor chip 200.

The gas supply apparatus 100 includes a first gas tank 10, a second gas tank 20, a dilution chamber 30, a first connection pipe 40, a second connection pipe 50, (60), a second supply pipe (70), and a backflow prevention pipe (80).

The first gas tank 10 may store the first gas. The first gas may be composed of various kinds of gases to be detected in the gas detection sensor chip test. For example, the first gas may be a gas containing a volatile organic compound (VOC). More specifically, the first gas may be a gas comprising at least one of formaldehyde (HCHO), toluene, xylene and acetone. When the first gas is provided as formaldehyde (HCHO), the concentration of formaldehyde (HCHO) stored in the first gas tank 10 may correspond to 10.7 ppmv.

The first gas tank 10 may be connected to a dilution chamber 30 by a first connection pipe 40. In other words, the first connecting pipe 40 may serve as a passage for moving the first gas stored in the first gas tank 10 to the dilution chamber 30. [ The first connecting pipe 40 is connected to a flow meter F for measuring the flow rate of the first gas passing through the first connecting pipe 40, a pressure gauge P for measuring the internal pressure of the first connecting pipe 40, And an opening / closing valve (V) for controlling the opening and closing of the first connecting pipe (40). Various pipes to be described below may be equipped with a flow meter, a pressure gauge, and a valve, and the same reference numerals will be used for the same members for convenience of explanation.

The second gas tank 20 may store the second gas. The second gas is provided for adjusting the concentration of the first gas, and an inert gas may be used. For example, the second gas may be a gas containing nitrogen (N ₂ ).

The second gas tank 20 can be connected to the dilution chamber 30 by the second connection pipe 50. The second connection pipe 50 may serve as a passage for moving the second gas stored in the second gas tank 20 to the dilution chamber 30. [ The second connecting pipe 50 is connected to a flow meter F for measuring the flow rate of the second gas passing through the second connecting pipe 50, a pressure gauge P for measuring the internal pressure of the second connecting pipe 50, And a valve V for controlling the opening and closing of the second connecting pipe.

Meanwhile, the second connection pipe 50 may be connected to the second supply pipe 70 in a communicative manner. For example, the second supply pipe 70 may extend from one side of the second connection pipe 50. The second supply pipe 70 is provided for supplying a second gas to the test object, that is, the detection sensor chip 200. The data related to the second gas measured from the gas detection sensor chip 200 are compared with each other, Can be used as data.

The dilution chamber 30 is provided for adjusting the concentration of the first gas and is connected to the first gas tank 10 and the second gas tank 20 through the first connection pipe 40 and the second connection pipe 50. [ . The first connecting pipe 40 and the second connecting pipe 50 are provided with an on-off valve V for controlling the amount of the first gas and the second gas flowing into the dilution chamber 30, May be provided. Accordingly, the user can adjust the flow rate of the first gas and the second gas flowing into the dilution chamber 30 by adjusting the opening / closing time, opening / closing width, etc. of the opening / closing valve V. As a result, in the dilution chamber 30, the first gas is mixed with the second gas so that the concentration of the first gas can be adjusted to a predetermined concentration. Hereinafter, a mixed gas of the first gas and the second gas with the concentration of the first gas adjusted to a predetermined concentration in the dilution chamber 30 will be described as a 'mixed gas'.

The dilution chamber 30 may be connected to a first supply pipe 60. The first supply pipe 60 may be provided to supply the mixed gas, which has passed through the dilution chamber 30, to the test object, that is, the detection sensor chip 200. At this time, the first supply pipe 60 may be provided with a flow meter F and an on-off valve V for controlling the amount of the mixed gas supplied to the detection sensor chip 200.

On the other hand, when the internal pressure of the first supply pipe 60 becomes higher than the internal pressure of the dilution chamber 30, the mixed gas flows back to the dilution chamber 30 and flows through the first connection pipe 40 or the second connection pipe 30 50 may be caused to flow. Therefore, it is necessary to keep the internal pressure of the first supply pipe 60 lower than the internal pressure of the dilution chamber 30, and a backflow prevention pipe 80 may be provided for this purpose.

The backflow prevention pipe 80 is provided to keep the internal pressure of the first supply pipe 60 lower than the internal pressure of the dilution chamber 30 and is provided at one side of the first supply pipe 60 to the first supply pipe 60 As shown in FIG. The backflow prevention pipe 80 may be provided with a pressure gauge P and an on-off valve V. The backflow prevention pipe 80 opens the on-off valve V and is connected to the test object through the first supply pipe 60 The non-discharged mixed gas can be discharged to the outside.

The gas detection sensor chip 200 may include a substrate 210, a metal layer 220, a metal oxide layer 230, and a ligand compound 240 to detect gas using a surface plasmon resonance (SPR) phenomenon. have.

The substrate 210 may serve as a base layer of the metal layer 220 to support the metal layer. The substrate 210 may be a transparent substrate capable of transmitting light. For example, the substrate 210 may be formed of a glass plate, a transparent plastic, or the like.

The metal layer 220 may be formed on the upper surface of the substrate 210 and may include a metal capable of generating surface plasmon resonance (SPR). For example, the metal may include at least one of gold (Au), platinum (Pt), and silver (Ag).

Surface plasmon resonance (SPR) refers to the collective oscillation of electrons present on a metal surface at the interface between a metal and a dielectric such as gold or silver. When surface plasmon resonance (SPR) occurs, the metal and its adjacent dielectric material Surface electromagnetic waves are generated along the interface. Therefore, when a surface plasmon resonance (SPR) phenomenon occurs in the metal layer 220, it can be detected by an optical method.

The metal oxide layer 230 may be formed on the upper surface of the metal layer 220 to amplify the surface plasmon resonance (SPR) phenomenon. Accordingly, the metal oxide layer 230 can improve the sensitivity of the gas detection sensor chip 200.

The metal oxide layer 230 may include at least one metal oxide particle selected from the group consisting of TiO2, SiO2, ZnO, In2O3, WO3 and SnO2, and may be in the range of 10 to 1000 nm, 800 nm. ≪ / RTI > The ligand compound 240 can selectively bind to the surface of the metal oxide layer 230 with a gas molecule. The SPR signal can be changed according to the combination, and the target gas can be detected by analyzing the difference therebetween.

The kind of the ligand compound 240 may be selected depending on the gas to be detected. For example, the ligand compound 240 may have at least one functional group selected from the group consisting of an amine group, a carboxyl group, a hydroxyl group, a methyl group, and a thiol group. In addition, the ligand compound may be a polymer, a low molecular weight or a biomolecule compound having an amine group. For example, the ligand compound may be at least one member selected from the group consisting of polyethyleneimine (PEI), C1-C15 alkylamine, and collagen.

In addition, the ligand compound 240 may have a functional group specific to the gas to be detected. In other words, the configuration can be further diversified by forming a universal sensing layer on the metal oxide layer 230 and modifying the surface thereof with functional groups capable of selectively bonding with gas molecules. As an example, the ligand compound may be a compound derived from a phosphonitrilic chloride trimer (PNCT). Here, the compound derived from the PNCT may be a PNCT substituted with a functional group that selectively binds to a gas molecule.

The prism 300 may be disposed on one side of the gas detection sensor chip 200. For example, the prism 300 may be attached to the lower surface of the substrate 210 to provide an optical function of controlling the path of light. The light emitted from the light source 400 is incident on the prism 300 and can reach the lower surface of the metal layer 220. The light emitted from the prism 300 is reflected by the lower surface of the metal layer 220, Lt; / RTI >

Hereinafter, a schematic operation procedure of the gas detection sensor testing apparatus 1 according to an embodiment of the present invention will be described with reference to FIG.

3 is a structural view showing a schematic operation state of a gas detection sensor testing apparatus according to an embodiment of the present invention. Herein, for convenience of explanation, the first gas is provided as formaldehyde gas and the second gas is supplied as formaldehyde gas, although the gas supplied from the gas supply apparatus according to an embodiment of the present invention may be various gases as needed, And a nitrogen gas as an example.

 3, a predetermined formaldehyde gas is introduced into the dilution chamber 30 in the first gas tank 10 and a predetermined nitrogen gas is supplied to the dilution chamber 30 in the second gas tank 20, Lt; / RTI > In the dilution chamber 30, the concentration of the formaldehyde gas can be adjusted, for example, the concentration of the formaldehyde gas can be adjusted from 0.2 ppmv to 10.7 ppmv. The flow rates of the formaldehyde gas and the nitrogen gas flowing into the dilution chamber 30 for controlling the concentration of the formaldehyde gas are shown in FIG.

The concentration-regulated formaldehyde gas in the dilution chamber 30 can be supplied to the gas detection sensor chip 200 through the valve V and the flow meter F of the first supply pipe 60. At this time, for comparison with the comparison group, the flow rate of the formaldehyde gas supplied to the gas detection sensor chip 200 needs to be constant. Therefore, the valve V provided in the first supply pipe 60 can control the flow rate of the formaldehyde gas passing through the first supply pipe 60 to be constant. For example, the flow rate of formaldehyde supplied to the gas detection sensor chip 200 may correspond to 10 sccm.

At this time, the amount of formaldehyde gas passing through the first supply pipe (60) When the flow rate of the formaldehyde gas discharged from the dilution chamber 30 is large, the internal pressure between the valve V of the first supply pipe 60 and the dilution chamber 30 may increase, There may arise a problem that the formaldehyde gas flows back to the dilution chamber 30. In order to prevent the reverse flow phenomenon, a backflow preventing pipe 80 for discharging formaldehyde gas to the outside may be provided between the valve V of the first supply pipe 60 and the dilution chamber 30. [

When the gas detection sensor chip 200 is supplied with formaldehyde gas, the light source 400 can emit light. The light emitted from the light source 400 passes through the prism 300, The light reaching the gas detection sensor chip 200 can be reflected and reach the detector 500. [ At this time, when the formaldehyde gas flows into the gas detection sensor chip 200, the surface plasmon resonance occurs in the gas detection sensor chip 200, resulting in a change in the refractive index of light. The detector 500 can detect the change of the refractive index of the light and detect the formaldehyde gas.

On the other hand, comparative group data that can compare and confirm the refractive index changes discriminated as described above may be required. This comparison group data can be obtained as follows.

The nitrogen gas stored in the second gas tank 20 may be supplied to the gas detection sensor chip 200 through the second connection pipe 50 and the second supply pipe 70. Here, the nitrogen gas needs to be constantly supplied for comparison with the formaldehyde gas. Therefore, the valve V provided in the second supply pipe 70 can control the flow rate of the nitrogen gas passing through the second supply pipe 70 to be constant. For example, the flow rate of the nitrogen gas supplied to the gas detection sensor chip 200 may correspond to 10 sccm.

A method of detecting the refractive index of light in a state where nitrogen gas is supplied to the gas detection sensor chip 200 is the same as the method of detecting the refractive index of light when the above-mentioned formaldehyde gas is supplied.

As described above, in the apparatus for testing a gas detection sensor according to an embodiment of the present invention, nitrogen gas is supplied to the gas detection sensor chip 200, and comparison group data on the refractive index of light can be obtained.

Hereinafter, a method for testing a gas detection sensor chip according to an embodiment of the present invention will be described with reference to FIG.

6 is a schematic flowchart of a method of testing a gas detection sensor chip according to an embodiment of the present invention. 6, a method for testing a gas detection sensor chip according to an embodiment of the present invention includes opening a first gas tank containing a first gas and a second gas tank containing a second gas, A second step S20 of adjusting the concentration of the first gas introduced into the dilution chamber to a preset concentration, discharging the first gas whose concentration has been adjusted in the dilution chamber, A third step S30 of supplying the gas to the detection sensor chip, a fourth step S40 of emitting light to the gas detection sensor chip and detecting the reflected light to measure a refractive index change, And a fifth step (S50) of supplying the data to the sensor chip and obtaining the comparison data.

The may include a first gas of volatile organic compounds (VOC) entering the dilution chamber 30 in step 1 (S10), the second gas may include nitrogen (N _2). When the first gas and the second gas are introduced into the dilution chamber 30, a second step S20 of adjusting the concentration of the first gas to a predetermined concentration in the dilution chamber 30 may be performed. Next, if the concentration of the first gas is adjusted to a predetermined concentration, a third step (S30) of discharging the first gas and supplying the first gas to the gas detection sensor chip 200 may be performed. At this time, the first gas may be supplied to the gas detection sensor chip 200 through a separate channel. When the first gas is supplied to the gas detection sensor chip 200, the light source 400 detects the gas detection sensor chip 200 The detector 500 may detect light reflected from the gas detection sensor chip 200 and measure a refractive index in a fourth step S40. The first to fourth steps may be repeatedly performed, and the concentration of the first gas may be changed each time it is repeatedly performed.

Meanwhile, in the method of testing a gas detection sensor chip according to an embodiment of the present invention, only the second gas is supplied to the gas detection sensor chip 2000 to obtain the comparison data, and the fifth step S50 of measuring the refractive index data is performed Here, the fifth step S50 for the comparison data strokes may be performed after the first to fourth steps are performed first, but also before the first to fourth steps are performed.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It will be apparent to those of ordinary skill in the art that such changes or modifications are within the scope of the appended claims.

1: Gas detection sensor chip testing apparatus 10: First gas tank
20: second gas tank 30: dilution chamber
40: first connection pipe 50: second connection pipe
60: first supply pipe 70: second supply pipe
80: backflow prevention pipe 100: gas supply device
200: gas detection sensor chip 300: prism
400: light source 500: detector

Claims (15)

A first gas tank in which a first gas is stored;
A second gas tank in which a second gas is stored;
A dilution chamber for mixing the first gas and the second gas to dilute the concentration of the first gas;
A first connection pipe connecting the first gas tank and the dilution chamber;
A second connecting pipe connecting the second gas tank and the dilution chamber;
A first supply pipe connected to the dilution chamber to supply a mixed gas mixed in the dilution chamber to a test object;
A second supply pipe branched from the second connecting pipe to supply the second gas to the test object; And
And a backflow prevention pipe branched from the first supply pipe for regulating an internal pressure of the first supply pipe,
Wherein either the first supply pipe or the second supply pipe is controlled to be opened so that the mixed gas or the second gas is supplied to the test object. The method according to claim 1,
Gas supply to the second and first gas comprises a volatile organic compound (VOC), the second gas comprises nitrogen (N _2). 3. The method of claim 2,
Wherein the first gas comprises at least one of formaldehyde (HCHO), toluene, xylene, acetone, and nitrogen dioxide. The method according to claim 1,
Wherein the first connection pipe and the second connection pipe are provided with an on-off valve and a flow meter for adjusting the amount of the first gas and the second gas flowing into the dilution chamber,
Wherein the concentration of the first gas is adjusted by the opening / closing operation of the opening / closing valve. The method according to claim 1,
Wherein the first supply pipe is provided with an open / close valve and a flow meter for adjusting the amount of gas passing through the first supply pipe,
Wherein the backflow preventive pipe is configured such that a gas that has not passed through the opening and closing valve provided in the first supply pipe is discharged to the outside so that the pressure inside the first supply pipe is kept lower than the internal pressure of the dilution chamber. A gas supply apparatus according to any one of claims 1 to 5,
A gas detection sensor chip connected to the first supply pipe and the second supply pipe to sense a gas exhausted from either the first supply pipe or the second supply pipe;
A prism disposed on one side of the gas detection sensor chip;
A light source that emits light reaching the gas detection sensor chip through the prism; And
And a detector for detecting light reflected from the gas detection sensor chip. The method according to claim 6,
Wherein the gas detection sensor chip comprises:
materials;
A metal layer formed on the upper surface of the substrate;
A metal oxide layer formed on an upper surface of the metal layer; And
And a ligand compound bonded to the surface of the metal oxide layer. 8. The method of claim 7,
Wherein the metal layer comprises a metal causing surface plasmon resonance (SPR). 9. The method of claim 8,
Wherein the metal comprises at least one of gold (Au), platinum (Pt), and silver (Ag). 8. The method of claim 7,
Wherein the metal oxide layer comprises at least one metal oxide particle selected from the group consisting of TiO2, SiO2, ZnO, In2O3, WO3 and SnO2. 8. The method of claim 7,
Wherein the ligand compound comprises at least one functional group selected from the group consisting of an amine group, a carboxyl group, a hydroxyl group, a methyl group, and a thiol group. 8. The method of claim 7,
Wherein the ligand compound is a compound derived from a phosphonitrile chloride trimer (PNCT). A first step of opening a first gas tank containing a first gas and a second gas tank containing a second gas into a dilution chamber;
A second step of adjusting a concentration of the first gas introduced into the dilution chamber to a predetermined concentration;
A third step of discharging the first gas whose concentration is adjusted in the dilution chamber and supplying the first gas to the gas detection sensor chip; And
And a fourth step of emitting light to the gas detection sensor chip and detecting a reflected light to measure a refractive index change. 14. The method of claim 13,
And a fifth step of supplying only the second gas to the gas detection sensor chip to obtain comparison data. 14. The method of claim 13,
The second step to the fourth step are repeatedly performed,
Wherein the concentration of the first gas controlled in the second step varies in various ways.

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