JP6408550B2 - 近距離無線通信及び／又はｕｓｂインターフェースを有する質量流量制御器 - Google Patents

近距離無線通信及び／又はｕｓｂインターフェースを有する質量流量制御器 Download PDF

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JP6408550B2
JP6408550B2 JP2016500888A JP2016500888A JP6408550B2 JP 6408550 B2 JP6408550 B2 JP 6408550B2 JP 2016500888 A JP2016500888 A JP 2016500888A JP 2016500888 A JP2016500888 A JP 2016500888A JP 6408550 B2 JP6408550 B2 JP 6408550B2
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mass flow
flow controller
fluid
external device
configuration parameter
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JP2016514331A (ja
JP2016514331A5 (enExample
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エレック クリストフ
エレック クリストフ
バナレス バーウィン
バナレス バーウィン
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イリノイ トゥール ワークス インコーポレイティド
イリノイ トゥール ワークス インコーポレイティド
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B15/00—Systems controlled by a computer
    • G05B15/02—Systems controlled by a computer electric
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04W—WIRELESS COMMUNICATION NETWORKS
    • H04W4/00—Services specially adapted for wireless communication networks; Facilities therefor
    • H04W4/80—Services using short range communication, e.g. near-field communication [NFC], radio-frequency identification [RFID] or low energy communication

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • General Engineering & Computer Science (AREA)
  • Flow Control (AREA)
JP2016500888A 2013-03-12 2014-03-07 近距離無線通信及び／又はｕｓｂインターフェースを有する質量流量制御器 Active JP6408550B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361777224P 2013-03-12 2013-03-12
US61/777,224 2013-03-12
PCT/US2014/021976 WO2014164336A1 (en) 2013-03-12 2014-03-07 Mass flow controller with near field communication and/or usb interface

Publications (3)

Publication Number Publication Date
JP2016514331A JP2016514331A (ja) 2016-05-19
JP2016514331A5 JP2016514331A5 (enExample) 2017-04-13
JP6408550B2 true JP6408550B2 (ja) 2018-10-17

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JP2016500888A Active JP6408550B2 (ja) 2013-03-12 2014-03-07 近距離無線通信及び／又はｕｓｂインターフェースを有する質量流量制御器

Country Status (4)

Country Link
US (1) US10114387B2 (enExample)
EP (1) EP2972630B1 (enExample)
JP (1) JP6408550B2 (enExample)
WO (1) WO2014164336A1 (enExample)

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US10783290B2 (en) * 2017-09-28 2020-09-22 Taiwan Semiconductor Manufacturing Company, Ltd. IC manufacturing recipe similarity evaluation methods and systems
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US10591934B2 (en) * 2018-03-09 2020-03-17 Lam Research Corporation Mass flow controller for substrate processing
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DE102018111547A1 (de) * 2018-05-15 2019-11-21 E. Zoller Gmbh & Co. Kg Verfahren zu einer Übermittlung zumindest eines auf einem Speichermedium abgespeicherten Werkzeugdatensatzes eines Zerspanungswerkzeugs an eine CNC-Werkzeugmaschine mit einer Datenkommunikationseinheit
US11733081B2 (en) * 2021-04-13 2023-08-22 Applied Materials, Inc. Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system
US20240219878A1 (en) * 2021-04-30 2024-07-04 Gea Tuchenhagen Gmbh Valve Control Device
CN116519098A (zh) * 2023-05-17 2023-08-01 上海一诺仪表有限公司 基于质量流量计的监控方法、设备及介质

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US9146563B2 (en) * 2013-03-01 2015-09-29 Hitachi Metals, Ltd. Mass flow controller and method for improved performance across fluid types

Also Published As

Publication number Publication date
US10114387B2 (en) 2018-10-30
US20160018829A1 (en) 2016-01-21
JP2016514331A (ja) 2016-05-19
EP2972630B1 (en) 2019-01-16
WO2014164336A1 (en) 2014-10-09
EP2972630A1 (en) 2016-01-20

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