JP6379255B2 - Gas enclosure assembly and system - Google Patents

Description

(Cross-reference to related applications)
This application claims priority to US Application No. 61 / 579,233, filed December 22, 2011. This application claims priority to US application Ser. No. 12 / 652,040 filed Jan. 5, 2010 and published as Aug. 12, 2010 as U.S. Patent Application Publication No. 2010/0201749. And US application Ser. No. 12 / 652,040 was filed on Jun. 13, 2008 and published as U.S. Patent Application Publication No. 2008/0311307 on Dec. 18, 2008. Priority is claimed on 139,391, and further on US Application No. 61 / 142,575, filed January 5, 2009. All interrelated applications listed herein are incorporated by reference in their entirety.

(Field)
The present teachings provide a sealed gas enclosure assembly and system that can be easily transported and assembled, and that can provide a minimum inert gas volume and maintenance of maximum access to various devices and apparatus enclosed therein. To various embodiments.

(background)
The interest in the potential of OLED display technology is driven by OLED display technology attributes, including the demonstration of display panels that have highly saturated colors and are high contrast, ultra-thin, fast response, and energy efficient It has been. In addition, various substrate materials, including flexible polymer materials, can be used in the processing of OLED display technology. Small screen applications, primarily display demonstrations for mobile phones, have worked to highlight the potential of the technology, but challenges remain in expanding the processing to larger formats. For example, the processing of OLED displays on a substrate larger than a Gen 5.5 substrate having dimensions of about 130 cm × 150 cm has not yet been demonstrated.

  Organic light emitting diode (OLED) devices can be manufactured by printing various organic thin films, as well as other materials on a substrate using an OLED printing system. Such organic materials can be susceptible to damage by oxidation and other chemical processes. Housing an OLED printing system in a manner that can be scaled up for various substrate sizes and performed in an inert, substantially particle-free printing environment can present various challenges. . Equipment for printing large format panel substrates requires significant space and therefore requires continuous gas purification to remove reactive atmospheric species such as water vapor and oxygen and organic solvent vapors. Maintaining large equipment under an active atmosphere presents significant technical challenges. For example, providing a large facility to be sealed can present a technical challenge. In addition, various cable laying, wiring, and tubing that feeds into and out of the OLED printing system to operate the printing system can clog atmospheric components such as oxygen and water vapor. Can present challenges to effectively bring the gas enclosure to specifications for such reactive species levels. Furthermore, it is desirable that such equipment be kept in an inert environment for processing so as to provide immediate access for maintenance with minimal downtime. In addition to being substantially free of reactive species, the printing environment for OLED devices requires a substantially low particle environment. In that regard, providing and maintaining a substantially particle-free environment within the entire encapsulation system is for processes that can be performed at atmospheric conditions, such as under an open high fluid laminar flow hood. It provides additional challenges not presented by particle reduction.

  Thus, the OLED printing system can be housed in an inert, substantially particle-free environment, with immediate access to the OLED printing system from the outside during processing, and internal for maintenance with minimal downtime There is a need for various embodiments of gas enclosures that can be easily scaled to provide OLED panel processing on various substrate sizes and substrate materials, while also providing immediate access to.

  The present teachings are sealably constructed to form a gas enclosure assembly and system that can sustain an inert, substantially particle-free environment for processes that require such an environment. Various embodiments of a gas enclosure assembly that can be integrated with gas circulation, filtration, and purification components are disclosed. Such embodiments of gas enclosure assemblies and systems are made to various reactive atmospheric gases such as water vapor and oxygen, and organic to 100 ppm or less, such as 10 ppm or less, 1.0 ppm or less, or 0.1 ppm or less. Various levels of various reactive species can be maintained, including solvent vapor. Further, various embodiments of the gas enclosure assembly can provide a low particle environment that meets ISO 14644 Class 3 and 4 cleanroom standards.

A better understanding of the features and advantages of the present disclosure will be obtained by reference to the accompanying drawings that are intended to illustrate but not limit the present teachings.
For example, the present invention provides the following.
(Item 1)
A gas enclosure assembly comprising a plurality of frame member assemblies, wherein the frame member assembly is sealably joined to define an interior;
An inert gas atmosphere containing water and oxygen each contained at a level of 100 ppm or less;
A pressurized inert gas recirculation system, the pressurized inert gas recirculation system comprising a compressor loop, the compressor loop including an inlet in fluid communication with the interior, the interior and fluid An outlet in communication; a loop path including the inlet and the outlet; a compressor disposed along the loop path between the inlet and the outlet; and between the compressor and the outlet. An accumulator disposed along the loop path, the accumulator comprising a pressurized inert gas recirculation system configured to receive and accumulate compressed inert gas from the compressor , Gas enclosure assemblies and systems.
(Item 2)
A pressure controlled bypass loop, wherein the bypass loop inlet is in fluid communication with the compressor loop path via a bypass inlet valve, and the bypass outlet is located at a location between the inlet bypass valve and the compressor. The gas enclosure assembly and system of item 1, wherein the gas enclosure assembly is in fluid communication with a compressor loop path.
(Item 3)
A blower loop further comprising: an inlet in fluid communication with the interior; an outlet in fluid communication with the interior; a loop path including the inlet and the outlet; the blower and the outlet; The gas enclosure assembly and system of item 1 or item 2 comprising an adjustable valve disposed along the loop path between.
(Item 4)
The compressor loop is configured to recirculate pressurized inert gas via the pressure control bypass when the pressure of the inert gas atmosphere in the accumulator exceeds a preset threshold pressure. The gas enclosure assembly and system of item 3, wherein
(Item 5)
The compressor loop passes pressurized inert gas through the pressure control bypass when the pressure of the inert gas atmosphere in the accumulator exceeds a preset threshold pressure between about 25 psig and about 200 psig. 5. The gas enclosure assembly and system of item 4, wherein the gas enclosure assembly is configured to recirculate.
(Item 6)
The apparatus further comprises an apparatus disposed therein, wherein the apparatus operates by using a pressurized inert gas generated by the pressurized inert gas recirculation system, the apparatus comprising a pneumatic robot, a substrate floating 4. The gas enclosure assembly and system of item 3, which can be one or more of a formula table, an air bearing, an air bushing, a compressed gas tool, a pneumatic actuator, and combinations thereof.
(Item 7)
4. The gas enclosure assembly and system of item 3, wherein the seal formed for each of the sealably joined frame member assemblies is a gasket seal.
(Item 8)
8. The gas enclosure assembly and system of item 7, wherein the gasket used to seal each of the sealably joined frame member assemblies is fabricated from a closed cell polymer gasket material.
(Item 9)
4. The gas enclosure assembly and system of item 3, wherein each of said frame member assemblies comprises a frame member having a plurality of panel sections, each panel section having a panel hermetically installed within each panel section. .
(Item 10)
10. The gas enclosure assembly and system of item 9, wherein the seal formed for each panel sealably installed in each panel section of the frame member comprises a gasket seal.
(Item 11)
Item 11. The gas enclosure assembly and system of item 10, wherein the gasket used to seal each panel in each panel section of the frame member is fabricated from a closed cell polymer gasket material.
(Item 12)
4. The gas enclosure assembly and system of item 3, wherein the gas enclosure is sealed.
(Item 13)
A gas enclosure assembly comprising a plurality of frame member assemblies, wherein the frame member assembly is sealably joined to define an interior;
A gas circulation and filtration system disposed within the interior for providing inert gas circulation within the interior and for removing particulate matter from the interior;
A gas purification system external to the gas enclosure assembly, wherein the gas purification system enters the interior through the gas purification system to maintain respective levels of water and oxygen within the interior at 100 ppm or less. A gas purification system capable of circulating the contained inert gas;
A piping assembly disposed within the interior, wherein the piping assembly is in fluid communication with the gas circulation and filtration system within the interior and separately in fluid communication with the gas purification system outside the gas enclosure assembly. A plumbing assembly whereby substantially all inert gas circulated through the gas circulation and filtration system and the gas purification system is drawn through the plumbing;
A gas enclosure assembly comprising: a bundle comprising at least one of a cable, an electrical wire, a fluid-containing tube, and combinations thereof, wherein the bundle is substantially disposed within the piping. system.
(Item 14)
14. The gas enclosure assembly and system of item 13, wherein a plurality of atmospheric components that are occluded within the dead volume in the bundle can be cleared from the dead volume by the inert gas drawn through the tubing.
(Item 15)
14. The gas enclosure assembly and system of item 13, wherein the gas circulation and filtration system is configured to provide a substantially laminar flow of gas through the interior.

FIG. 1 is a schematic diagram of a gas enclosure assembly and system, according to various embodiments of the present teachings. FIG. 2 is a left front perspective view of a gas enclosure assembly and system according to various embodiments of the present teachings. FIG. 3 is a right front perspective view of a gas enclosure assembly in accordance with various embodiments of the present teachings. FIG. 4 is an exploded view of a gas enclosure assembly in accordance with various embodiments of the present teachings. FIG. 5 is an exploded front perspective view of a frame member assembly depicting various panel frame sections and section panels in accordance with various embodiments of the present teachings. 6A is a rear perspective view of the glove port cap, while FIG. 6B is an enlarged view of the shoulder screw of the glove port cap according to various embodiments of the gas enclosure assembly of the present teachings. FIG. 7A is an enlarged perspective view of the bayonet latch of the glove port capping assembly, while FIG. 7B shows the glove port capping assembly showing engagement of the shoulder screw head with a recess in the bayonet latch. It is sectional drawing. FIG. 7A is an enlarged perspective view of the bayonet latch of the glove port capping assembly, while FIG. 7B shows the glove port capping assembly showing engagement of the shoulder screw head with a recess in the bayonet latch. It is sectional drawing. 8A-8C are top schematic views of various embodiments of gasket seals for forming a joint. 9A and 9B are various perspective views depicting the sealing of a frame member according to various embodiments of the gas enclosure assembly of the present teachings. 9A and 9B are various perspective views depicting the sealing of a frame member according to various embodiments of the gas enclosure assembly of the present teachings. FIGS. 10A-10B are various views relating to the sealing of a section panel to receive a readily removable inspection window, according to various embodiments of the gas enclosure assembly of the present teachings. FIGS. 10A-10B are various views relating to the sealing of a section panel to receive a readily removable inspection window, according to various embodiments of the gas enclosure assembly of the present teachings. FIGS. 11A-11B are enlarged perspective cross-sectional views relating to the sealing of a section panel for receiving an inset panel or window panel, according to various embodiments of a gas enclosure assembly of the present teachings. FIG. 12A is a base that includes a pan and a plurality of spacer blocks resting thereon according to various embodiments of the present teachings. FIG. 12B is an enlarged perspective view of the spacer block as shown in FIG. 12A. FIG. 13 is an exploded view of a wall frame member and ceiling member associated with a pan, according to various embodiments of the present teachings. FIG. 14A is a perspective view of stages of construction of a gas enclosure assembly with a lifter assembly in the raised position, according to various embodiments of the present teachings. FIG. 14B is an exploded view of the lifter assembly as shown in FIG. 14A. FIG. 15 is a perspective front perspective view of a gas enclosure assembly depicting piping installed within the gas enclosure assembly in accordance with various embodiments of the present teachings. FIG. 16 is a perspective top perspective view of a gas enclosure assembly depicting piping installed within the gas enclosure assembly, according to various embodiments of the present teachings. FIG. 17 is a perspective bottom perspective view of a gas enclosure assembly depicting piping installed within the gas enclosure assembly in accordance with various embodiments of the present teachings. FIG. 18A is a schematic diagram showing a bundle of cables, wires, and tubing, and the like. FIG. 18B depicts gas blowing through such bundles delivered through various embodiments of piping according to the present teachings. FIG. 19 shows how reactive species (A) blocked in the dead space of a bundle of cables, wires, and tubing, and the like, pass through the duct through which the bundle is routed. It is the schematic which shows whether it is purged actively from active gas (B). FIG. 20A is a perspective perspective view of cables and tubing routed through ducts in accordance with various embodiments of the gas enclosure assembly and system of the present teachings. FIG. 20B is an enlarged view of the opening shown in FIG. 20A showing details of a cover for closure covering the opening, according to various embodiments of the gas enclosure assembly of the present teachings. FIG. 20A is a perspective perspective view of cables and tubing routed through ducts in accordance with various embodiments of the gas enclosure assembly and system of the present teachings. FIG. 20B is an enlarged view of the opening shown in FIG. 20A showing details of a cover for closure covering the opening, according to various embodiments of the gas enclosure assembly of the present teachings. FIG. 21 is an illustration of a ceiling including a lighting system for a gas enclosure assembly and system, according to various embodiments of the present teachings. FIG. 22 is a graph depicting the LED light spectrum of a lighting system for a gas enclosure assembly and system components, according to various embodiments of the present teachings. FIG. 23 is a front perspective view of a view of a gas enclosure assembly, according to various embodiments of the present teachings. FIG. 24 depicts an exploded view of various embodiments of a gas enclosure assembly and related system components as depicted in FIG. 23, according to various embodiments of the present teachings. FIG. 25 is a schematic diagram of various embodiments of a gas enclosure assembly and related system components of the present teachings. FIG. 26 is a schematic diagram of a gas enclosure assembly and system depicting an embodiment of gas circulation through a gas enclosure assembly, according to various embodiments of the present teachings. FIG. 27 is a schematic diagram of a gas enclosure assembly and system depicting an embodiment of gas circulation through a gas enclosure assembly, according to various embodiments of the present teachings. FIG. 28 is a cross-sectional schematic view of a gas enclosure assembly according to various embodiments of the present teachings. FIG. 29 is a schematic diagram of a gas enclosure assembly and system, according to various embodiments of the present teachings. FIG. 30 is a schematic diagram of a gas enclosure assembly and system, according to various embodiments of the present teachings. FIG. 31 is a table illustrating valve positions for various operating modes of a gas enclosure assembly and system that can utilize an external gas loop, according to various embodiments of the present teachings.

  One skilled in the art can recognize the utility of embodiments of the gas enclosure assembly to various technical fields. While a wide variety of different technologies such as chemistry, biotechnology, advanced technology, and pharmaceutical technology may benefit from the present teachings, to illustrate the utility of various embodiments of gas enclosure assemblies and systems according to the present teachings OLED printing is used. Various embodiments of a gas enclosure assembly system that can accommodate an OLED printing system include a sealed enclosure through a build and break cycle, miniaturization of the enclosure volume, and immediate out-to-in operation during processing and maintenance. Features that provide access, such as but not limited to sealing, can be provided. As discussed later, such features of various embodiments of the gas enclosure assembly include structural integrity that provides ease of maintaining low levels of reactive species during processing, as well as downtime during maintenance cycles. Such as, but not limited to, rapid enclosure volume turnover that can minimize performance. Thus, the various features and specifications that provide utility for OLED panel printing can also provide benefits to various technical fields.

  As mentioned above, the fabrication of OLED displays on substrates larger than Gen 5.5 substrates having dimensions of about 130 cm × 150 cm has not yet been demonstrated. Generations of mother glass substrate sizes have evolved since the early 1990s for flat panel displays processed by other than OLED printing. The first generation mother glass substrate, designated Gen 1, was approximately 30 cm × 40 cm, and therefore could produce a 15 inch panel. Around the mid-1990s, existing technology for producing flat panel displays evolved to a Gen 3.5 mother glass substrate size with dimensions of about 60 cm × 72 cm.

  As generations advance, Gen 7.5 and Gen 8.5 mother glass sizes are being produced outside of the OLED printing process. The Gen 7.5 mother glass size has dimensions of about 195 cm x 225 cm and can be cut into eight 42 inch or six 47 inch flat panels per substrate. The mother glass used in Gen 8.5 is approximately 220 x 250 cm and can be cut into six 55 inch or eight 46 inch flat panels per substrate. OLED manufacturing is practically limited to G3.5 and below, while OLEDs for quality such as more authentic colors, higher contrast, thinness, flexibility, transparency, and energy efficiency The promise of flat panel displays has been realized. Currently, OLED printing overcomes this limitation and manufactures OLED panels not only with mother glass sizes below Gen 3.5, but also with maximum mother glass sizes such as Gen 5.5, Gen 7.5, and Gen 8.5. It is thought that this is an optimal manufacturing technology that enables One skilled in the art can use one of the features of OLED panel printing, including but not limited to various substrate materials, such as various glass substrate materials, as well as various polymer substrate materials. You will understand. In that regard, the sizes described derived from the terms resulting from the use of glass-based substrates can be applied to substrates of any material suitable for use in OLED printing.

  With respect to OLED printing, according to the present teachings, maintaining substantially low levels of reactive species such as, but not limited to, atmospheric components such as oxygen and water vapor, and various organic solvent vapors used in OLED inks It has been found to correlate with providing OLED flat panel displays that meet the required life specification. This is particularly important for OLED panel technology because the lifetime specification, which is a product specification for all panel technologies that OLED panel technology is currently difficult to meet, directly correlates with the lifetime of the display product. In order to provide a panel that meets the required life specification, the respective levels of reactive species such as water vapor, oxygen, and organic solvent vapor can be reduced to 100 ppm or less using various embodiments of the gas enclosure assembly system of the present teachings. For example, it can be maintained at 10 ppm or less, 1.0 ppm or less, or 0.1 ppm or less. In addition, OLED printing requires an environment that is substantially free of particles. Maintaining a substantially particle-free environment for OLED printing is particularly important because even very small particles can lead to visible defects on the OLED panel. Currently, it is difficult for OLED displays to meet the low defect level required for commercialization. Maintaining a substantially particle-free environment within the entire encapsulation system is not presented by particle reduction for processes that can be performed at atmospheric conditions such as under an open high fluid laminar flow filter hood. Provide specific challenges. Thus, maintaining the required specifications for an environment that does not include inert particles in large facilities can present various challenges.

  Each level of reactive species such as water vapor, oxygen, and organic solvent vapor can be maintained at 100 ppm or lower, for example, 10 ppm or lower, 1.0 ppm or lower, or 0.1 ppm or lower in the facility. The need to print a panel can be illustrated by reviewing the information summarized in Table 1. The data summarized in Table 1 came from the inspection of each of the test coupons, including organic thin film compositions for each of red, green, and blue, processed in a large pixel spin-coated device format. is there. Such test coupons are substantially easier to manufacture and test for the purpose of rapid evaluation of various formulations and processes. The test coupon test should not be confused with the printed panel life test, but can show the effect of various formulations and processes on the service life. The results shown in the table below were processed in a nitrogen environment that was processed similarly but had less than 1 ppm reactive species compared to a test coupon processed in air instead of the nitrogen environment. It represents the process step variation in the processing of the test coupon where only the spin coating environment has changed for the test coupon.

Through an examination of the data in Table 1 of test coupons processed under different processing environments, particularly in the case of red and blue, printing in the environment that effectively reduces the exposure of the organic thin film composition to the reactive species is It is clear that the various ELs, and therefore lifespan, can have a significant impact.

  Accordingly, a robust enclosure system that can expand OLED printing from Gen 3.5 to Gen 8.5 and above, and at the same time contain an OLED printing system in an inert, substantially particle-free gas enclosure environment There are challenges in providing According to the present teachings, such a gas enclosure can be easily expanded to provide an optimized working space for an OLED printing system, for example, while providing a minimized amount of inert gas. In addition, it includes a gas enclosure that provides immediate access to the OLED printing system from the outside during processing, while providing access to the interior for maintenance with minimal downtime, It is contemplated that it will have attributes that are not limited.

  In accordance with various embodiments of the present teachings, a gas enclosure assembly is provided for various air sensitive processes requiring an inert environment that can include multiple wall and ceiling frame members that can be sealed together. Is done. In some embodiments, the plurality of wall frames and ceiling frame members can be fastened together using reusable fasteners, such as bolts and threaded holes. For various embodiments of gas enclosure assemblies according to the present teachings, a plurality of frame members, each frame member comprising a plurality of panel frame sections, can be constructed to define a gas enclosure frame assembly.

  The gas enclosure assembly of the present teachings can be designed to accommodate systems such as OLED printing systems in a manner that can minimize the volume of the enclosure surrounding the system. Various embodiments of the gas enclosure assembly are constructed in a manner that minimizes the internal volume of the gas enclosure assembly and at the same time optimizes the working space to accommodate different footprints of different OLED printing systems. Can do. Various embodiments of gas enclosure assemblies so constructed additionally provide immediate access to the interior of the gas enclosure assembly from the outside during processing and to the interior for maintenance while minimizing downtime. Provide immediate access. In that regard, various embodiments of a gas enclosure assembly according to the present teachings can be profiled for various footprints of various OLED printing systems. According to various embodiments, once the contour frame member is constructed to form the gas enclosure frame assembly, the various types of panels comprise a plurality of frame members so as to complete the installation of the gas enclosure assembly. It may be installed in the panel section so that it can be sealed. Various embodiments of the gas enclosure assembly include, for example, a plurality of frame members, and a plurality for installation in a panel frame section, including but not limited to a plurality of wall frame members and at least one ceiling frame member. Panels may be fabricated at one or more locations and then built at another location. Also, considering the transportable nature of the components used to construct the gas enclosure assembly of the present teachings, various embodiments of the gas enclosure assembly may be repeatedly installed and removed throughout the construction and destruction cycle. it can.

  In order to ensure that the gas enclosure is sealed, various embodiments of the gas enclosure assembly of the present teachings provide for joining each frame member to provide a frame seal. The interior can be sufficiently sealed, for example by tight fitting intersections between various frame members, including gaskets or other seals. Once fully constructed, the sealed gas enclosure assembly can include an interior and a plurality of interior corner edges, at least one interior corner edge being provided at the intersection of each frame member with an adjacent frame member. One or more of the frame members, e.g., at least half of the frame members, can comprise one or more compressible gaskets secured along one or more respective edges thereof. The one or more compressible gaskets can be configured to create a sealed gas enclosure assembly once the frame members are joined together and the hermetic panel is installed. A sealed gas enclosure assembly can be formed having an inner edge of the frame member that is sealed by a plurality of compressible gaskets. For each frame member, for example, but not limited to, one or more compressible gaskets can be provided on the inner wall frame surface, top wall frame surface, vertical sidewall frame surface, bottom wall frame surface, and combinations thereof. .

  For various embodiments of the gas enclosure assembly, each frame member receives any of a variety of panel types that can be hermetically installed within each section to provide a hermetic panel for each panel. A plurality of sections can be provided that are framed and machined. In various embodiments of the gas enclosure assembly of the present teachings, each segment frame is constructed using a selected fastener so that each panel installed in each segment frame is for each panel and is therefore fully constructed. A segmented frame gasket can be provided to ensure that a hermetic seal for the gas enclosure can be provided. In various embodiments, the gas enclosure assembly can have one or more of a window panel or inspection window in each of the wall panels, each window panel or inspection window having at least one globe port. be able to. Each glove port can be fitted with a glove so that the glove can extend into the interior during assembly of the gas enclosure assembly. According to various embodiments, each glove port can have hardware for mounting the glove, such hardware to minimize leakage or molecular diffusion through the glove port. Utilize a gasket seal around each glove port that provides a hermetic seal. For the various embodiments of the gas enclosure assembly of the present teachings, the hardware is further designed to provide the end user with ease of glove port cap attachment and removal.

  Various embodiments of gas enclosure assemblies and systems according to the present teachings can include a gas enclosure assembly formed from a plurality of frame members and panel sections, and gas circulation, filtration, and purification components. For various embodiments of the gas enclosure assembly and system, piping may be installed during the assembly process. According to various embodiments of the present teachings, the tubing can be installed in a gas enclosure frame assembly constructed from a plurality of frame members. In various embodiments, the tubing can be installed on multiple frame members before being joined to form a gas enclosure frame assembly. The piping for the various embodiments of the gas enclosure assembly and system removes particulate matter within the gas enclosure assembly and system, with substantially all gas drawn into the piping from one or more piping inlets. It can be configured to be moved through various embodiments of gas circulation and filtration loops. In addition, the piping of the various embodiments of the gas enclosure assembly and system is adapted to separate the inlet and outlet of the gas purification loop external to the gas enclosure assembly from the gas circulation and filtration loop internal to the gas enclosure assembly. Can be configured.

  For example, the gas enclosure assembly and system can have a gas circulation and filtration system within the gas enclosure assembly. Such an internal filtration system can have a plurality of fan filter units within the interior and can be configured to provide a laminar flow of gas within the interior. The laminar flow can be in the direction from the top of the interior to the bottom of the interior, or in any other direction. The gas flow produced by the circulation system need not be laminar, but laminar flow of gas can be used to ensure a thorough and complete gas turnover inside. A laminar flow of gas can also be used to minimize turbulence, which causes particles in the environment to collect in the region of such turbulence, and the filtration system This is undesirable because it can hinder the removal of these particles from the environment. Furthermore, in order to maintain the desired temperature internally, for example, a heat regulation system utilizing a plurality of heat exchangers operating with, adjacent to or in conjunction with a fan or another gas circulation device. Can be provided. The gas purification loop may be configured to circulate gas from within the interior of the gas enclosure assembly through at least one gas purification component external to the enclosure. In that regard, the internal circulation and filtration system of the gas enclosure assembly, in conjunction with the gas purification loop external to the gas enclosure assembly, has a substantially low level of reactive species throughout the gas enclosure assembly. A continuous circulation of the inert gas of the particles can be provided. The gas purification system can be configured to maintain very low levels of undesirable components, such as organic solvents and their vapors, as well as water, water vapor, oxygen, and the like.

  In addition to providing gas circulation, filtration, and purification components, piping can trap atmospheric components such as water, water vapor, oxygen, and the like when bundled and removed by a purification system. Can be sized and shaped to accommodate therein at least one of wires, wire bundles, and various fluid-containing tubing, which can be difficult, have a significant dead volume . In some embodiments, any combination of cables, wires and wire bundles, and fluid-containing tubing can be disposed substantially within the piping, each of which is disposed within the electrical It can be operatively associated with at least one of a system, a mechanical system, a fluid system, and a cooling system. Gas circulation, filtration, and purification components can be configured so that substantially all of the circulated inert gas is drawn through the piping, so atmospheric components confined to the dead volume of various bundled materials By effectively having such bundled material contained within the tubing, it can be effectively cleared from the considerable dead volume of such bundled material.

  Various embodiments of the gas enclosure assembly and system of the present teachings include a gas enclosure assembly formed from a plurality of frame members and panel sections, as well as gas circulation, filtration, and purification components, as well as pressurized inert gas regeneration. Various embodiments of the circulation system can be included. Such a pressurized inert gas recirculation system can be utilized in the operation of various pneumatic drive devices and OLED printing systems for devices, as will be discussed in more detail later.

  In accordance with the present teachings, several engineering challenges have been addressed to provide various embodiments of pressurized inert gas recirculation systems in gas enclosure assemblies and systems. First, under typical operation of a gas enclosure assembly and system without a pressurized inert gas recirculation system, if any leakage occurs in the gas enclosure assembly and system, the external gas or air is To protect against entering the interior, the gas enclosure assembly can be maintained at a slightly positive internal pressure relative to the external pressure. For example, for various embodiments of the gas enclosure assembly and system of the present teachings under typical operation, the interior of the gas enclosure assembly is, for example, at least at a pressure to the ambient atmosphere outside the enclosure system of at least 2 mbarg, for example, at least It can be maintained at a pressure of 4 mbarg, at a pressure of at least 6 mbarg, at a pressure of at least 8 mbarg, or at a higher pressure. Maintaining a pressurized inert gas recirculation system within the gas enclosure assembly system simultaneously introduces a slight positive interior of the gas enclosure assembly and system while continuously introducing pressurized gas into the gas enclosure assembly and system. With respect to maintaining pressure, it can be difficult to present a dynamic and continuous balancing effect. Further, the variable requirements of various devices and apparatuses can create irregular pressure profiles for various gas enclosure assemblies and systems of the present teachings. Maintaining the dynamic pressure balance of the gas enclosure assembly held at a slight positive pressure relative to the external environment under such conditions can provide the integrity of a continuous OLED printing process.

  For various embodiments of gas enclosure assemblies and systems, a pressurized inert gas recirculation system according to the present teachings can utilize at least one of a compressor, an accumulator, and a blower, and combinations thereof. Various embodiments of a pressurized inert gas loop can be included. Various embodiments of the pressurized inert gas recirculation system, including various embodiments of the pressurized inert gas loop, are capable of providing an internal pressure of the inert gas within the gas enclosure assembly and system of the present teachings at a stable specified value. Can have a specially designed pressure control bypass loop. In various embodiments of the gas enclosure assembly and system, the pressurized inert gas recirculation system provides pressure control when the pressure of the inert gas in the accumulator of the pressurized inert gas loop exceeds a preset threshold pressure. A pressurized inert gas can be recirculated through the bypass loop. The threshold pressure is, for example, in the range between about 25 psig to about 200 psig, or more specifically in the range between about 75 psig to about 125 psig, or more specifically, between about 90 psig to about 95 psig. Can be in range. In that regard, the gas enclosure assembly and system of the present teachings having a pressurized inert gas recirculation system with various embodiments of specially designed pressure control bypass loops are pressurized inert in an airtight gas enclosure. The equilibrium of having a gas recirculation system can be maintained.

  According to the present teachings, various devices and apparatuses can be disposed therein, and various pressurized gas sources such as at least one of a compressor, a blower, and combinations thereof can be utilized. Can be in fluid communication with various embodiments of a pressurized inert gas recirculation system having multiple pressurized inert gas loops. For various embodiments of the gas enclosure and system of the present teachings, the use of various pneumatically operated devices and apparatus can provide low particle generation performance and is less cumbersome to maintain. Exemplary devices and apparatuses that can be located within gas enclosure assemblies and systems and in fluid communication with various pressurized inert gas loops include, for example, pneumatic robots, substrate floating tables, air bearings, air bushings, It can include, but is not limited to, one or more of a compressed gas tool, a pneumatic actuator, and combinations thereof. Substrate floating tables, as well as air bearings, can be used on various aspects of operating an OLED printing system in accordance with various embodiments of the gas enclosure assembly of the present teachings. For example, a substrate floating table that utilizes air bearing technology can be used to transport the substrate to a fixed position in the printhead chamber as well as to support the substrate during the OLED printing process.

  As previously discussed, various embodiments of the substrate floating table, as well as air bearings, may be advantageous for operation of various embodiments of the OLED printing system housed in a gas enclosure assembly according to the present teachings. As schematically shown in FIG. 1 for the gas enclosure assembly and system 2000, a substrate floating table utilizing air bearing technology is used to transport the substrate to a fixed location in the printhead chamber and during the OLED printing process. Can be used to support the substrate. In FIG. 1, the gas enclosure assembly 1500 includes an inlet chamber 1510 for receiving a substrate through a first inlet gate 1512 and gate 1514 to move the substrate from the inlet chamber 1510 to the gas enclosure assembly 1500 for printing. It can be a load lock system. Various gates according to the present teachings can be used to isolate the chambers from each other and from the outside environment. According to the present teachings, various gates can be selected from physical gates and gas curtains.

  To prevent atmospheric gas from entering the gas enclosure assembly 1500 while the gate 1512 may be open during the substrate receiving process, the gate 1514 may be in a closed position. Once the substrate is received in the inlet chamber 1510, both gates 1512 and 1514 can be closed and the reactive atmospheric gas can be at a low level of 100 ppm or less, eg, 10 ppm or less, 1.0 ppm or less, or 0. The inlet chamber 1510 can be purged with an inert gas, such as nitrogen, any of noble gases, and any combination thereof, until .1 ppm or less. After atmospheric gas reaches a very low level, the gate 1514 can be opened while the substrate 1550 is transported from the inlet chamber 1510 to the gas enclosure assembly chamber 1500 as depicted in FIG. 1512 remains closed to allow. Transport of the substrate from the inlet chamber 1510 to the gas enclosure assembly chamber 1500 may be via, for example, but not limited to, a floating table provided in the chambers 1500 and 1510. Transport of the substrate from the inlet chamber 1510 to the gas enclosure assembly chamber 1500 is via, for example, but not limited to, a substrate transport robot that can place the substrate 1550 on a floating table provided in the chamber 1500. Can do. The substrate 1550 can remain supported on the substrate floating table during the printing process.

  Various embodiments of the gas enclosure assembly and system 2000 can have an outlet chamber 1520 in fluid communication with the gas enclosure assembly 1500 through a gate 1524. According to various embodiments of the gas enclosure assembly and system 2000, after the printing process is complete, the substrate 1550 can be transported from the gas enclosure assembly 1500 to the outlet chamber 1520 through the gate 1524. Transport of the substrate from the gas enclosure assembly chamber 1500 to the outlet chamber 1520 can be via, for example, but not limited to, a floating table provided in the chambers 1500 and 1520. Transport of the substrate from the gas enclosure assembly chamber 1500 to the outlet chamber 1520 is also, for example, without limitation, taking the substrate 1550 from a floating table provided in the chamber 1500 and transporting it into the chamber 1520. It can also be via a substrate transport robot. For various embodiments of the gas enclosure assembly and system 2000, the substrate 1550 passes through the gate 1522 when the gate 1524 is in the closed position to prevent reactive atmospheric gases from entering the gas enclosure assembly 1500. Can be removed from the outlet chamber 1520.

  In addition to a load lock system including an inlet chamber 1510 and an outlet chamber 1520 that are in fluid communication with the gas enclosure assembly 1500 via gates 1514 and 1524, respectively, the gas enclosure assembly and system 2000 includes a system controller 1600. Can do. The system controller 1600 can include one or more processor circuits (not shown) in communication with one or more memory circuits (not shown). The system controller 1600 can also communicate with a load lock system including an inlet chamber 1510 and an outlet chamber 1520 and ultimately with a print nozzle of the OLED printing system. In this way, the system controller 1600 can coordinate the opening and closing of the gates 1512, 1514, 1522, and 1524. The system controller 1600 can also control ink dispensing to the print nozzles of the OLED printing system. Substrate 1550 may be routed through gates 1514 and 1524, for example, but not limited to, through a substrate floating table utilizing air bearing technology, or a combination of a substrate floating table utilizing air bearing technology and a substrate transport robot, respectively. Can be transported through various embodiments of the load lock system of the present teachings, including an inlet chamber 1510 and an outlet chamber 1520 in fluid communication with the gas enclosure assembly 1500.

  Various embodiments of the load lock system of FIG. 1 can also include a vacuum source and an inert gas source, which can include any of nitrogen, noble gases, and any combination thereof. A pneumatic control system 1700 can also be included. The substrate floating system housed within the gas enclosure assembly and system 2000 can include a plurality of vacuum ports and gas bearing ports, typically arranged in a plane. The substrate 1550 can be lifted and kept away from the hard surface by the pressure of an inert gas, such as any of nitrogen, noble gases, and any combination thereof. Outflow from the bearing volume is achieved using multiple vacuum ports. The floating height of the substrate 1550 that covers the substrate floating table is typically a function of gas pressure and gas flow. The vacuum and pressure of the pneumatic control system 1700 can be used, for example, to support the substrate 1550 during printing and during handling inside the gas enclosure assembly 1500 in the load lock system of FIG. The control system 1700 includes the substrate 1550 during transport through the load lock system of FIG. It can also be used to support System controller 1600 communicates with inert gas source 1710 and vacuum 1720 through valves 1712 and 1722, respectively, to control transport of substrate 1550 through gas enclosure assembly and system 2000. Additional vacuum and inert gas supply lines and valve adjustments, not shown, are shown in FIG. 1 to further provide the various gas and vacuum facilities needed to control the enclosure environment. The gas enclosure assembly and system 2000 illustrated by FIG.

  To provide a dimensional perspective with various embodiments of gas enclosure assemblies and systems according to the present teachings, FIG. 2 is a left front perspective view of various embodiments of gas enclosure assemblies and systems 2000. FIG. 2 depicts a load lock system that includes a gas enclosure assembly 1500, an inlet chamber 1510, and a first gate 1512. The gas enclosure assembly and system 2000 of FIG. 2 provides a constant supply of inert gas with substantially lower levels of reactive atmospheric species such as water vapor and oxygen, and organic solvent vapor resulting from the OLED printing process. A gas purification system 2130 for providing to the assembly 1500 can be included. The gas enclosure assembly and system 2000 of FIG. 2 also has a controller system 1600 for system control functions, as previously discussed.

  FIG. 3 is a right front perspective view of a fully constructed gas enclosure assembly 100 in accordance with various embodiments of the present teachings. The gas enclosure assembly 100 can contain one or more gases to maintain an inert environment within the gas enclosure assembly. The gas enclosure assembly and system of the present teachings can be useful for maintaining an inert gas atmosphere within the interior. An inert gas may be any gas that does not undergo a chemical reaction under a defined set of conditions. Some commonly used examples of inert gases can include nitrogen, any of the noble gases, and any combination thereof. The gas enclosure assembly 100 is configured to include and protect an air sensitive process such as printing of organic light emitting diode (OLED) ink using a commercial printing system. Examples of atmospheric gases that react to OLED ink include water vapor and oxygen. As previously discussed, the gas enclosure assembly 100 maintains a sealed atmosphere, and allows components or printing systems to be effective while maintaining contamination, oxidation, and damage to otherwise reactive materials and substrates. Can be configured to be able to operate.

  As depicted in FIG. 3, various embodiments of the gas enclosure assembly include a front or first wall panel 210 ′, a left or second wall panel (not shown), a right or third wall panel 230. ′, A rear or fourth wall panel (not shown), and a component part including a ceiling panel 250 ′, the gas enclosure assembly of which can rest on a base (not shown). 204 can be attached. As discussed in further detail below, various embodiments of the gas enclosure assembly 100 of FIG. 1 may include a front or first wall frame 210, a left or second wall frame (not shown), a right or third. Wall frame 230, rear or fourth wall panel (not shown), and ceiling frame 250. Various embodiments of the ceiling frame 250 can include a fan filter unit cover 103, a first ceiling frame duct 105, and a first ceiling frame duct 107. According to embodiments of the present teachings, various types of section panels may be installed in any of a plurality of panel sections that include a frame member. In various embodiments of the gas enclosure assembly 100 of FIG. 1, the sheet metal panel section 109 can be welded into the frame member during frame construction. For various embodiments of the gas enclosure assembly 100, the types of section panels that can be repeatedly installed and removed throughout the construction and destruction cycle of the gas enclosure assembly are snap-in panels as shown for the wall panel 210 '. 110, as well as a window panel 120 and an easily removable inspection window 130 as shown for wall panel 230 '.

  The easily removable inspection window 130 can provide immediate access to the interior of the enclosure 100, but to provide access to the interior of the gas enclosure assembly and system for repair and routine inspection purposes. Any panel that is removable, can be used. Such access for inspection or repair can provide end-user glove access from outside the gas enclosure assembly to the inside of the gas enclosure assembly during use, and easily removable. Differentiated from access provided by a panel such as inspection window 130. For example, as shown in FIG. 3 for panel 230, any of the globes, such as globe 142 attached to globe port 140, may provide end user access to the interior during use of the gas enclosure assembly system. it can.

  FIG. 4 depicts an exploded view of various embodiments of the gas enclosure assembly depicted in FIG. Various embodiments of the gas enclosure assembly can be attached to a pan 204 that rests on the base 202, as shown in FIG. 3, an exterior perspective view of the front wall panel 210 ', an exterior of the left wall panel 220'. There can be multiple wall panels, including a perspective view, an internal perspective view of the right wall panel 230 ', an internal perspective view of the rear wall panel 240', and a top perspective view of the ceiling panel 250 '. The OLED printing system can be placed on the pan 204 and the printing process is known to be sensitive to atmospheric conditions. In accordance with the present teachings, the gas enclosure assembly includes frame members such as wall frame 210 of wall panel 210 ', wall frame 220 of wall panel 220', wall frame 230 of wall panel 230 ', wall frame 240 of wall panel 240'. , And the ceiling frame 250 of the ceiling panel 250 ', and then a plurality of section panels can be installed therein. In that regard, it may be desirable to streamline the design of the partition panel that can be repeatedly installed and removed through the cycle of construction and destruction of various embodiments of the gas enclosure assembly of the present teachings. Also, the gas enclosure assembly 100 can be contoured to accommodate the footprint of various embodiments of the OLED printing system to minimize the amount of inert gas required in the gas enclosure assembly. And provides immediate access to the end user both during use and maintenance of the gas enclosure assembly.

  Using the front wall panel 210 'and the left wall panel 220' by way of example, various embodiments of the frame member can have a sheet metal panel section 109 that is welded into the frame member during frame member construction. The snap-in panel 110, the window panel 120, and the easily removable inspection window 130 can be installed in each of the wall frame members and are repeated throughout the construction and disassembly cycle of the gas enclosure assembly 100 of FIG. Can be installed and removed. As shown, in the wall panel 210 ′ and wall panel 220 ′ embodiments, the wall panel can have a window panel 120 proximal to the easily removable inspection window 130. Similarly, as depicted by exemplary back wall panel 240 ′, the wall panel can have a window panel, such as window panel 125, having two adjacent glove ports 140. As seen with various embodiments of wall frame members in accordance with the present teachings, and with respect to the gas enclosure assembly 100 of FIG. Provide secure access. Thus, various embodiments of the gas enclosure may allow one or more items within the interior without the end user extending the left and right gloves into the interior and disturbing the composition of the gas atmosphere within the interior. More than one globe port can be provided so that can be operated. For example, either the window panel 120 or the inspection window 130 can be positioned to facilitate easy access from outside the gas enclosure assembly to adjustable components inside the gas enclosure assembly. According to various embodiments of window panels, such as window panel 120 and inspection window 130, such windows may not include the glove port and glove port assembly when no end-user access through the glove port glove is indicated. Good.

  Various embodiments of wall and ceiling panels as depicted in FIG. 4 can have multiple fit panels 110. As can be seen in FIG. 4, the inset panel can have various shapes and aspect ratios. In addition to the fitted panel, the ceiling panel 250 ′ is mounted on the fan filter unit cover 103 as well as the ceiling frame 250, and is bolted, screwed, fixed, or otherwise fixed first. There may be a ceiling frame duct 105 and a second ceiling frame duct 107. As will be discussed in more detail later, the piping in fluid communication with the duct 107 of the ceiling panel 250 ′ can be installed within the interior of the gas enclosure assembly. In accordance with the present teachings, such piping may be part of a gas circulation system internal to the gas enclosure assembly and gas for circulation through at least one gas purification component external to the gas enclosure assembly. Separating the flow exiting the enclosure assembly is provided.

  FIG. 5 is an exploded front perspective view of the frame member assembly 200 in which the wall frame 220 can be constructed to include a complete complement of the panel. While not limited to the design shown, as an illustration of various embodiments of a frame member assembly according to the present teachings, a frame member assembly 200 using a wall frame 220 can be used. Various embodiments of the frame member assembly may consist of various frame members and section panels installed in various frame panel sections of the various frame members in accordance with the present teachings.

  In accordance with various embodiments of various frame member assemblies of the present teachings, the frame member assembly 200 can comprise a frame member, such as a wall frame 220. For various embodiments of gas enclosure assemblies, such as gas enclosure assembly 100 of FIG. 3, processes that can utilize equipment contained in such gas enclosure assemblies include not only sealed enclosures that provide an inert environment, but also particles. An environment that is substantially free of particulate matter may also be required. In that regard, frame members according to the present teachings may utilize variously sized metal tube materials for the construction of various embodiments of the frame. Such metal tube materials address the desired material attributes, including, but not limited to, high integrity materials that will not decompose to produce particulate matter, and high strength as well as optimal Produces heavy weight frame members and provides for immediate transport, construction, and destruction of gas enclosure assemblies from one site to another with various frame members and panel sections. One of ordinary skill in the art will readily appreciate that any material that meets these requirements can be used to make the various frame members according to the present teachings.

  For example, various embodiments of frame members according to the present teachings, such as frame member assembly 200, can be constructed from extruded metal tubing. According to various embodiments of the frame member, aluminum, steel, and various metal composites may be utilized to construct the frame member. In various embodiments, for example, but not limited to, 2 inches wide × 2 inches high, 4 inches wide × 2 inches high, and 4 inches wide to construct various embodiments of the frame members of the present teachings. X Metal tubing having a height of 4 inches and a wall thickness of 1/8 inch to 1/4 inch can be used. In addition, producing frame members that have material attributes, including but not limited to high integrity materials that will not decompose to produce particulate matter, and that have high strength and optimal weight In addition, various tubes or other forms of various reinforcing fiber polymer composites are available that provide immediate transport, construction, and breakage from one site to another.

  With regard to the construction of various frame members from variously sized metal tube materials, it is contemplated that welding can be performed to create various embodiments of frame welds. In addition, the construction of various frame members from variously sized building materials can be performed using a suitable industrial adhesive. It is contemplated that the construction of the various frame members should take place in a manner that would essentially create no leakage path through the frame members. In that regard, the construction of the various frame members can be performed using any approach that essentially does not create a leak path through the frame members of the various embodiments of the gas enclosure assembly. Further, various embodiments of frame members according to the present teachings, such as the wall frame 220 of FIG. 4, may be painted or coated. A coating or coating that prevents the formation of particulate matter for various embodiments of a frame member made of a metal tubing material, for example, where the material formed on the surface can create particulate matter, which is susceptible to oxidation Or other surface treatments such as anodization can be performed.

  A frame member assembly, such as the frame member assembly 200 of FIG. 5, can have a frame member, such as a wall frame 220. The wall frame 220 can have a top 226 on which the top wall frame spacer plate 227 can be fastened, as well as a bottom 228 on which the bottom wall frame spacer plate 229 can be fastened. As will be discussed in more detail later, the spacer plate mounted on the surface of the frame member, together with the gasket seal of the panel mounted in the frame member section, can be used in a variety of gas enclosure assemblies according to the present teachings. 2 is a part of a gasket sealing system that provides the seal of the embodiment. A frame member, such as the wall frame 220 of the frame member assembly 200 of FIG. Various types of panels, such as sex inspection windows 130, may be processed. Various types of panel sections can be formed by construction of the frame members. The types of panel sections may be, for example, an inset panel section 10 for receiving an inset panel 110, a window panel section 20 for receiving a window panel 120, and an inspection for receiving an easily removable inspection window 130. A window panel section 30 can be included, but is not limited thereto.

  Each type of panel section can have a panel section frame that receives the panel, resulting in each panel being sealably fastened into each panel section in accordance with the present teachings to construct a sealed gas enclosure assembly. be able to. For example, in FIG. 5 depicting a frame assembly according to the present teachings, the inset panel section 10 is shown having a frame 12, the window panel section 20 is shown having a frame 22, and the inspection window panel section 30 is , Frame 32 is shown. For various embodiments of the wall frame assembly of the present teachings, the various panel section frames may be sheet metal material that is welded into the panel section with a continuous weld bead to provide a seal. For the various embodiments of the wall frame assembly, the various panel section frames are selected from reinforcing fiber polymer composites that can be mounted in the panel section using a suitable industrial adhesive. Can be made from a variety of sheet materials. As discussed in further detail in the subsequent teachings on sealing, each panel section frame is designed to ensure that an airtight seal can be formed for each panel installed and fastened in each panel section. It can have a compressible gasket disposed thereon. In addition to the panel section frame, each frame member section may have hardware related to positioning the panel and securing the panel within the panel section.

  Various embodiments of the panel frame 122 for the snap-in panel 110 and the window panel 120 can be constructed from sheet metal materials such as, but not limited to, various alloys of aluminum, aluminum and stainless steel. The attributes for the panel material may be the same as the attributes for the structural material making up the various embodiments of the frame member. In that regard, materials having attributes for various panel members include, but are not limited to, high integrity materials that will not decompose to produce particulate matter and from one site to another. Produce panels with high strength as well as optimal weight to provide immediate transport, construction, and breakage. For example, various embodiments of the honeycomb core sheet material may have the necessary attributes for use as a panel material for the construction of a panel frame 122 for an inset panel 110 and a window panel 120. The honeycomb core sheet material can be made of various materials, both metals, and metal composite materials and polymers, and polymer composite honeycomb core sheet materials. Various embodiments of the removable panel when fabricated from metal material have a ground connection included in the panel to ensure that the entire structure is grounded when the gas enclosure assembly is constructed. Can have.

  In view of the transportable nature of the gas enclosure assembly components used to construct the gas enclosure assembly of the present teachings, a variety of partition panels of the present teachings are provided to provide access to the interior of the gas enclosure assembly. Any of the embodiments can be repeatedly installed and removed during use of the gas enclosure assembly and system.

  For example, the panel section 30 for receiving an easily removable inspection window panel 130 can have a set of four spacers, one of which is shown as a window guide spacer 34. In addition, the panel section 30 constructed to receive the easily removable inspection window panel 130 was mounted on the inspection window frame 132 for each of the easily removable inspection windows 130. A set of four counteracting toggle clamps 136 can be used to have a set of four clamping cleats 36 that can be used to clamp the inspection window 130 into the inspection window panel section 30. Furthermore, each two of the window handles 138 can be easily mounted on a removable inspection window frame 132 to provide the end user with ease of removal and installation of the inspection window 130. The number, type, and arrangement of removable inspection window handles can be varied. In addition, inspection window panel sections 30 for receiving easily removable inspection window panels 130 have at least two window clamps 35 that are selectively installed within each inspection window panel section 30. Can do. Although depicted as being in the top and bottom of each of the inspection window panel sections 30, the at least two window clamps are in any manner that acts to secure the inspection window 130 within the panel section frame 32. Can be installed at. A tool can be used to remove and install the window clamp 35 to allow the inspection window 130 to be removed and reinstalled.

  The hardware installed on the panel section 30, including the counter-acting toggle clamp 136 of the inspection window 130, and the clamping cleat 36, the window guide spacer 34, and the window clamp 35, can be any suitable material and combination of materials. Can be built. For example, one or more such elements can include at least one metal, at least one ceramic, at least one plastic, and combinations thereof. The removable inspection window handle 138 can be constructed of any suitable material, as well as combinations of materials. For example, one or more such elements can include at least one metal, at least one ceramic, at least one plastic, at least one rubber, and combinations thereof. The enclosure window, such as window 124 of window panel 120 or window 134 of inspection window 130, can include any suitable material, as well as combinations of materials. According to various embodiments of the gas enclosure assembly of the present teachings, the enclosure window can include transparent and translucent materials. In various embodiments of the gas enclosure assembly, the enclosure window can be, for example, but not limited to, silica-based materials such as glass and quartz, and various types such as, but not limited to, various classes of polycarbonate, acrylic, and vinyl. Types of polymeric materials can be included. Those skilled in the art will appreciate that various composites of exemplary window materials and combinations thereof may also be useful as transparent and translucent materials in accordance with the present teachings.

  As can be seen in FIG. 5 for the frame member assembly 200, the easily removable inspection window panel 130 can have a glove port with a cap 150. Although FIG. 3 is shown with all glove ports having outwardly expanded gloves, as shown in FIG. 5, the glove port also provides end users with remote access to the interior of the gas enclosure assembly. A cap can also be attached as required. Various embodiments of the capping assembly as depicted in FIGS. 6A-7B provide for securely latching the cap over the glove when the glove is not in use by the end user, while at the same time the end Provide immediate access when the user wishes to use the glove.

  In FIG. 6A, a cap 150 is shown that can have an inner surface 151, an outer surface 153, and a side surface 152 that can be contoured for gripping. Three shoulder screws 156 extend from the periphery 154 of the cap 150. As shown in FIG. 6B, each shoulder screw is set within the periphery 154 such that the shank 155 extends a set distance from the periphery 154 such that the head 157 is not adjacent to the periphery 154. 7A-7B, the glove port hardware assembly 160 includes a locking mechanism for attaching a cap to the glove port when the enclosure is pressurized to have a positive pressure against the exterior of the enclosure. Can be modified to provide

  For the various embodiments of the glove port hardware assembly 160 of FIG. 6A, bayonet tightening can provide closure of the cap 150 covering the glove port hardware assembly 160, while at the same time providing immediate closure to the glove by the end user. Provide a quick link design for access. In the enlarged top view of the glove port hardware assembly 160 shown in FIG. 7A, the glove port assembly 160 includes a back plate 161 and a front plate 163 having a threaded screw head 162 for mounting the glove and flange 164. Can be provided. Above the flange 164 is shown a bayonet latch 166 having a slot 165 for receiving a shoulder screw head 157 of the shoulder screw 156 (FIG. 6B). Each of the shoulder screws 156 can be aligned and engaged with each of the bayonet latches 166 of the glove port hardware assembly 160. The slot 168 of the bayonet latch 166 has an opening 165 at one end and a locking recess 167 at the other end of the slot 168. Once each shoulder screw head 157 is inserted into each opening 165, the cap 150 is rotated until the shoulder screw head is adjacent at the end of the slot 168 proximal to the locking recess 167. be able to. The cross-sectional view shown in FIG. 7B depicts locking features for attaching a cap to the glove while the gas enclosure assembly system is in use. During use, the internal gas pressure of the inert gas within the enclosure is greater than the pressure external to the gas enclosure assembly by a set amount. The positive pressure causes the shoulder screw head 157 to move into the locking recess 167 when the glove is compressed under the cap 150 during use of the gas enclosure assembly of the present teachings and the glove port window is A glove (FIG. 3) can be filled to ensure that the cap will be securely attached. However, the end user can easily grip the cap 150 with the side 152 contoured for gripping and easily disengage the cap secured in the bayonet latch when not in use. . FIG. 7B additionally shows a back plate 161 on the inner surface 131 of the window 134 and a front plate 163 on the outer surface of the window 134, both plates having an O-ring seal 169.

  As discussed in the following teachings with respect to FIGS. 8A-9B, both wall and ceiling frame member seals in conjunction with hermetic section panel frame seals are used in sealed gas enclosure assemblies for air sensitive processes that require an inert environment. Various embodiments are provided. The gas enclosure assembly and system components that contribute to providing a substantially low concentration of reactive species, as well as a substantially low particle environment, are highly effective gases including hermetically sealed gas enclosure assembly and piping. Circulation and particle filtration systems can be included, but are not limited to them. Providing an effective seal for a gas enclosure assembly can be difficult, especially when the three frame members are mated together to form a three-sided joint. Thus, the three side joint seal presents a particularly difficult challenge with regard to providing an easily installable seal for a gas enclosure assembly that can be assembled and disassembled through a build and break cycle.

  In that regard, various embodiments of the gas enclosure assembly according to the present teachings provide a fully constructed gas enclosure assembly and system seal through an effective gasket seal of the joint and load bearing construction configuration. Provide an effective gasket seal around the element. Unlike conventional joint seals, joint seals according to the present teachings are: 1) Uniform of adjacent gasket sections from orthogonally oriented gasket lengths in top and bottom end frame joint connections where three frame members are joined. Includes parallel alignment, thereby avoiding angular seam alignment and sealing, 2) providing for forming adjacent lengths across the entire width of the joint, thereby reducing the sealing contact area in a three-sided joint connection 3) Designed with spacer plates that provide uniform compressive force across all vertical and horizontal, and top and bottom three side bonded gasket seals. In addition, the choice of gasket material can affect the effectiveness of providing a seal, which will be discussed later.

8A-8C are top schematic views depicting a comparison of a conventional three side bonded seal with a three side bonded seal according to the present teachings. According to various embodiments of the gas enclosure assembly of the present teachings, for example, but not limited to, a plurality of vertical, horizontal, and three side joints that can be joined to form a gas enclosure assembly and that require sealing. There may be at least four wall frame members, ceiling frame members, and pans that create In FIG. 8A, there is a top schematic view of a conventional three side gasket seal formed from a first gasket I that is orthogonally oriented with respect to gasket II in the XY plane. As shown in FIG. 8A, the seam formed from orthogonal orientations in the XY plane has a contact length W ₁ between the two compartments defined by the width dimension of the gasket. In addition, the end portion of gasket III, which is a gasket oriented perpendicular to both gasket I and gasket II in the vertical direction, can be adjacent to gasket I and gasket II, as indicated by the hatched lines. In FIG. 8B, a conventional three side bonded gasket seal formed from the first gasket length I having a seam that is perpendicular to the second gasket length II and joins the 45 ° faces of both lengths. There is schematic top view, seam has a contact length W ₂ between the width is greater than two sections of the gasket material. Similar to the configuration of FIG. 8A, the end portion of gasket III that is perpendicular to both gasket I and gasket II in the vertical direction can be adjacent to gasket I and gasket II, as indicated by the diagonal lines. . When the gasket width is assumed to be the same in FIGS. 8A and 8B, the contact length _{W 2} of FIG. 8B is larger than the contact length _{W 1} in FIG. 8A.

FIG. 8C is a top schematic view of a three side bonded gasket seal in accordance with the present teachings. The first gasket length I can have a gasket section I ′ formed perpendicular to the direction of the gasket length I, which includes the various wall frame members of the gas enclosure assembly of the present teachings. Having a length, which may be the size of the width of the substantially joined structural components, such as a metal tube 4 inches wide x 2 inches high or 4 inches wide x 4 inches high used to form . The gasket II has a gasket section II ′ that is perpendicular to the gasket I in the XY plane and has an overlap length with the gasket section I ′ that is the width of the structural components being joined together. The width of the gasket sections I 'and II' is the width of the compressible gasket material selected. Gasket III is orthogonally oriented with respect to both gasket I and gasket II in the vertical direction. Gasket section III 'is the end portion of gasket III. Gasket section III 'is formed from the orthogonal orientation of gasket section III' with respect to the vertical length of gasket III. Gasket section III 'can be formed to have a width that is approximately the same length as gasket sections I' and II 'and the thickness of the compressible gasket material selected. In that regard, the contact length W ₃ of the three matching section shown in FIG. 8C, respectively, have a contact length W ₁ and W _2, a conventional triangular joint seal shown in one of FIGS. 8A or FIG. 8B Bigger than.

  In that regard, a three-sided joint gasket seal according to the present teachings, as shown in FIG. 8A or FIG. 8B, would otherwise be an orthogonally aligned gasket, and a uniform parallel of the gasket sections at the end joint connection. Create alignment. Such a uniform parallel alignment of the three side bonded gasket sealed compartments promotes a uniform lateral sealing force across the compartments to promote a sealed three side bonded seal at the top and bottom corners of the joint formed from the wall frame member. Is provided. In addition, each section of the uniformly aligned gasket section for each three-sided joint seal is selected to be approximately the width of the structural component being joined, and the maximum contact length of the uniformly aligned section is maximized. provide. Also, joint seals according to the present teachings are designed with spacer plates that provide uniform compressive forces across all vertical, horizontal, and three side gasket seals of building joints. It can be argued that the width of the gasket material selected for the conventional three-sided seal given for the embodiment of FIG. 8A or FIG. 8B can be at least the width of the structural components being joined.

  The exploded perspective view of FIG. 9A depicts a hermetic assembly 300 according to the present teachings before all frame members are joined such that the gasket is depicted in an uncompressed state. In FIG. 9A, a plurality of wall frame members, such as wall frame 310, wall frame 350, and ceiling frame 370, are sealably joined in a first step of building a gas enclosure from various components of the gas enclosure assembly. be able to. A frame member seal according to the present teachings provides for a seal that can be implemented through a cycle of construction and destruction of the gas enclosure assembly, while providing a fully constructed gas enclosure assembly to be sealed. is there. The embodiments listed in the following teachings for FIGS. 9A-9B are for sealing a portion of a gas enclosure assembly, but those skilled in the art will recognize such teachings among the gas enclosure assemblies of the present teachings. Will be understood to apply to any of the above.

  The first wall frame 310 depicted in FIG. 9A has an inner side 311 on which the spacer plate 312 is placed, a vertical side surface 314, and a top surface 315 on which the spacer plate 316 is placed. Can have. The first wall frame 310 can have a first gasket 320 disposed in and bonded to the space formed from the spacer plate 312. The gap 302 remaining after the first gasket 320 is placed in and bonded to the space formed from the spacer plate 312 extends over the vertical length of the first gasket 320 as shown in FIG. 9A. Can do. As depicted in FIG. 9A, the flexible gasket 320 can be placed in and adhered to the space formed from the spacer plate 312, the vertical gasket length 321, the curved gasket length 323, and the inner frame member 311. There may be a gasket length 325 formed at 90 ° in-plane with respect to the vertical gasket length 321 above and terminating at the vertical side 314 of the wall frame 310. In FIG. 9A, the first wall frame 310 can have a top surface 315 on which the spacer plate 316 rests, whereby a second gasket 340 is disposed on the wall frame 310. Forming a space on the surface 315 that is bonded proximal to the inner edge 317 of the surface. The gap 304 that remains after the second gasket 340 is disposed in and bonded to the space formed from the spacer plate 316 spans the horizontal length of the second gasket 340 as shown in FIG. 9A. Can do. Further, as indicated by the diagonal lines, the length 345 of the gasket 340 is uniformly parallel to the length 325 of the gasket 320 and is aligned adjacently.

  The second wall frame 350 depicted in FIG. 9A can have an outer frame side 353, a vertical side 354, and a top surface 355 on which the spacer plate 356 rests. The second wall frame 350 can have a first gasket 360 disposed in and bonded to the first gasket space formed from the spacer plate 356. The gap 306 that remains after the first gasket 360 is placed in and bonded to the space formed from the spacer plate 356 spans the horizontal length of the first gasket 360, as shown in FIG. 9A. Can do. As depicted in FIG. 9A, the flexible gasket 360 has a vertical length 361, a curved length 363, and a length 365 that is formed at 90 ° in-plane on the top surface 355 and terminates at the outer frame member 353. be able to.

  As shown in the exploded perspective view of FIG. 9A, the inner frame member 311 of the wall frame 310 may be joined to the vertical side 354 of the wall frame 350 to form one architectural joint of the gas enclosure frame assembly. it can. With respect to the sealing of the building joint so formed, various embodiments of gasket sealing in the end-joining connection of wall frame members according to the present teachings depicted in FIG. 9A include gasket 320 length 325, gasket 360 length. 365 and length 345 of gasket 340 are all aligned adjacently and uniformly. In addition, as will be discussed in more detail later, various embodiments of the spacer plate of the present teachings may be used for compressible gasket materials used to seal various embodiments of the gas enclosure assembly of the present teachings. A uniform compression of between about 20% and about 40% deflection can be provided.

  FIG. 9B depicts a sealing assembly 300 according to the present teachings after all frame members have been joined such that the gasket is depicted in a compressed state. FIG. 9B shows details of a three-sided joint angular seal formed in a top end joint connection between the first wall frame 310, the second wall frame 350, and the ceiling frame 370, shown in perspective view. It is a perspective view shown. As shown in FIG. 9B, the gasket space defined by the spacer plate provides vertical, horizontal, and three side gasket seals when joining the wall frame 310, wall frame 350, and ceiling frame 370, shown in perspective. Uniform compression of deflection between about 20% and about 40% of the compressible gasket material to form ensures that the gasket seal at all surfaces sealed at the joints of the wall frame members can provide a seal. It can be determined that the width is as follows. In addition, gasket gaps 302, 304, and 306 (not shown) may be used when gaskets 340 and gaskets of FIG. 9B are each subjected to optimal compression with a deflection of between about 20% to about 40% of compressible gasket material. Dimensioned to be able to fill the gasket gap as shown for 360. Thus, in addition to providing uniform compression by defining a space in which each gasket is placed and bonded, various embodiments of spacer plates that are designed to provide a gap also include: Each compressed gasket can be matched within the space defined by the spacer plate without creating wrinkles or bumps, or otherwise irregularly forming in a compressed state, in a manner that can form a leak path Also make sure.

  According to various embodiments of the gas enclosure assembly of the present teachings, compressible gasket material disposed on each of the panel segment frames can be used to seal various types of segment panels. In conjunction with the frame member gasket seal, the location and material of the compressible gasket used to form a seal between the various segment panels and the panel segment frame can be used to seal gas with little or no gas leakage. An enclosure assembly can be provided. In addition, hermetic designs for all types of panels, such as the snap-in panel 110, the window panel 120, and the easily removable inspection window 130 of FIG. 5, can be used, for example, inside a gas enclosure assembly for maintenance. A durable panel seal can be provided after repeated removal and installation of such panels, which may be required with respect to access.

  For example, FIG. 10A is an exploded view depicting the inspection window panel section 30 and the easily removable inspection window 130. As previously discussed, the inspection window panel section 30 can be easily machined to accept a removable inspection window 130. For various embodiments of the gas enclosure assembly, a panel section, such as the removable inspection panel section 30, can have a panel section frame 32 and a compressible gasket 38 disposed on the panel section frame 32. In various embodiments, the hardware involved in fastening the removable inspection window 130 in the removable inspection window panel section 30 provides ease of installation and re-installation to the end user. At the same time, an airtight seal when the easily removable inspection window 130 is installed and reinstalled in the panel section 30 as required by the end user who requires direct access to the interior of the gas enclosure assembly. Can be ensured to be maintained. The easily removable inspection window 130 is a rigid window frame that can be constructed from, for example, but not limited to, a metal tube material as described to construct any of the frame members of the present teachings. 132 can be included. The inspection window 130 can utilize quick action fastening hardware, such as, but not limited to, a reverse action toggle clamp 136 to provide the end user with immediate removal and replacement of the inspection window 130. FIG. 10A shows the aforementioned glove port hardware assembly 160 of FIGS. 7A-7B showing a set of three bayonet latches 166.

  As shown in the front view of the removable inspection window panel section 30 of FIG. 10A, the easily removable inspection window 130 may have a set of four toggle clamps 136 secured on the window frame 132. it can. The inspection window 130 can be positioned in the panel section frame 30 at a specified distance to ensure proper compression force on the gasket 38. As shown in FIG. 10B, a set of four window guide spacers 34 can be used to position the inspection window 130 in the panel section 30 and install it at each corner of the panel section 30. Each of the set of tightening cleats 36 can be provided to receive a counteracting toggle clamp 136 of an easily removable inspection window 136. According to various embodiments for sealing the inspection window 130 through the installation and removal cycle, the inspection in conjunction with the defined position of the inspection window 130 provided by the set of window guide spacers 34 with respect to the compressible gasket 38. The combination of mechanical strength of the window frame 132 is, for example, without limitation, once the inspection window 130 is secured in place using a counter-acting toggle clamp 136 fastened in each fastening cleat 36. It can be ensured that the inspection window frame 132 can provide an even pressure across the panel section frame 32 by a defined compression as set by a set of window guide spacers 34. The set of window guide spacers 34 is positioned such that the compressive force of the window 130 on the gasket 38 deflects the compressible gasket 38 between about 20% and about 40%. In that regard, the construction of the inspection window 130 as well as the processing of the panel section 30 provides a hermetic seal of the inspection window 130 in the panel section 30. As previously discussed, the window clamp 35 is installed in the panel section 30 after the inspection window 130 is fastened into the panel section 30 and removed when the inspection window 130 needs to be removed. be able to.

  The counteracting toggle clamp 136 can be easily secured to the removable inspection window frame 132 using any suitable means, as well as a combination of means. Examples of suitable fastening means that can be used include at least one adhesive, such as but not limited to epoxy or cement, at least one bolt, at least one screw, at least one other fastener, at least one One slot, at least one path, at least one weld, and combinations thereof may be included. The counter-acting toggle clamp 136 can be connected directly to the removable inspection window frame 132 or indirectly through an adapter plate. The counter-acting toggle clamp 136, clamping cleat 36, window guide spacer 34, and window clamp 35 can be constructed of any suitable material and combination of materials. For example, one or more such elements can include at least one metal, at least one ceramic, at least one plastic, and combinations thereof.

  In addition to sealing easily removable inspection windows, a hermetic seal can also be provided for inset panels and window panels. Other types of section panels that can be repeatedly installed and removed within the panel section include, but are not limited to, a fit panel 110 and a window panel 120 as shown in FIG. 5, for example. As can be seen in FIG. 5, the panel frame 122 of the window panel 120 is constructed in the same manner as the fitted panel 110. As such, according to various embodiments of the gas enclosure assembly, the processing of the panel sections to receive the inset panel and the window panel may be the same. In that respect, the sealing of the fitting panel and the window panel can be implemented using the same principle.

  With reference to FIGS. 11A and 11B, according to various embodiments of the present teachings, any of the panels of the gas enclosure, such as the gas enclosure assembly 100 of FIG. 1, may receive a respective inset panel 110. One or more inset panel sections 10 can be included that can have a frame 12 configured. FIG. 11A is a perspective view showing an enlarged portion shown in FIG. 11B. In FIG. 11A, the fit panel 110 is depicted as being positioned with respect to the fit frame 12. As can be seen in FIG. 11B, the inset panel 110 is affixed to the frame 12, and the frame 12 can be constructed of metal, for example. In some embodiments, the metal can include aluminum, steel, copper, stainless steel, chromium, alloys, and combinations thereof, and the like. A plurality of blind screw holes 14 can be fitted into the panel section frame 12. The panel section frame 12 is constructed with a gasket 16 between the fitted panel 110 and the frame 12 in which a compressible gasket 18 can be placed. The blind screw hole 14 may be of the M5 variety. The screw 15 can be received by a blind screw hole 14 with a gasket 16 between the fitting panel 110 and the frame 12. Once fastened in place relative to the gasket 16, the fit panel 110 forms an air tight seal within the fit panel section 10. As previously discussed, such panel seals can be implemented for a variety of segmented panels, including but not limited to a snap-in panel 110 and a window panel 120 as shown in FIG. .

  According to various embodiments of compressible gaskets in accordance with the present teachings, compressible gasket materials for frame member sealing and panel sealing may be various compressible polymer materials, such as, but not limited to, expanded rubber materials or expanded. It can be selected from any of the classes of closed cell polymeric materials, also referred to in the art as polymeric materials. Briefly, closed cell polymers are prepared in a manner that gas is encapsulated in discrete cells, with each discrete cell encapsulated by a polymer material. The properties of compressible closed cell polymer gasket materials desirable for use in hermetic sealing of frame and panel components make them robust against chemical attack across a wide range of chemical species and possess excellent moisture barrier properties Including, but not limited to, being elastic over a wide temperature range and resistant to permanent compression strain. In general, closed cell polymeric materials have higher dimensional stability, lower moisture absorption coefficient, and higher strength compared to polymeric materials with open cell structures. Various types of polymeric materials that can make closed cell polymeric materials are made using, for example, silicone, neoprene, ethylene propylene diene terpolymer (EPT), ethylene propylene diene monomer (EPDM). Polymers and composites, vinyl nitriles, styrene butadiene rubber (SBR), and various copolymers and mixtures thereof.

  The desired material properties of the closed cell polymer are maintained only if the cell containing the bulk material remains intact during use. In that regard, by using such materials in a manner that exceeds the material specifications set for the closed cell polymer, eg, exceeding the specifications for use within a specified temperature or compression range, It may cause deterioration of. In various embodiments of the closed cell polymer gasket used to seal the frame members and section panels within the frame panel section, compression of such material causes a deflection of between about 50% and about 70%. It should not exceed and can be between about 20% and about 40% deflection for optimal performance.

  In addition to a closed cell compressible gasket material, another example of a class of compressible gasket materials having desirable attributes for use in constructing embodiments of gas enclosure assemblies according to the present teachings is: Includes a class of hollow extruded compressible gasket materials. Hollow extruded gasket materials as a class of materials, they are robust to chemical attack across a wide range of chemical species, possess excellent moisture barrier properties, are elastic over a wide temperature range, and are resistant to permanent compression strain It has desirable attributes, including but not limited to. Such hollow extruded compressible gasket materials include, but are not limited to, U-shaped cells, D-shaped cells, square cells, rectangular cells, and various custom form factor hollow extruded gasket materials. It can be supplied in a wide variety of form factors, such as any. Various hollow extruded gasket materials can be fabricated from polymeric materials used in closed cell compressible gasket processing. For example, without limitation, various embodiments of hollow extrusion gaskets include polymers and composites made using silicone, neoprene, ethylene propylene diene terpolymer (EPT), ethylene propylene diene monomer (EPDM). , Vinyl nitrile, styrene butadiene rubber (SBR), and various copolymers and mixtures thereof. The compression of such hollow cell gasket material should not exceed about 50% deflection in order to maintain the desired attributes.

  A person skilled in the art has given examples of a class of closed cell compressible gasket materials and a class of hollow extruded compressible gasket materials, but as defined by the present teachings, various walls And easily understand that any compressible gasket material with the desired attributes can be used to seal structural components such as and ceiling frame members, and to seal various panels within the panel section frame Would be able to.

  Construction of a gas enclosure assembly, such as, but not limited to, the gas enclosure assembly 100 of FIGS. 3 and 4 from a plurality of frame members, or the gas enclosure assembly 1000 of FIGS. It can be done to minimize the risk of damage to system components such as seals, frame members, ducts, and partition panels. A gasket seal is a component that can be susceptible to damage during construction of a gas enclosure from multiple frame members, for example. According to various embodiments of the present teachings, materials and methods are provided to minimize or eliminate the risk of damage to various components of a gas enclosure assembly during construction of a gas enclosure according to the present teachings. .

  12A is a perspective view of an initial stage of construction of a gas enclosure assembly, such as the gas enclosure assembly 100 of FIG. Although a gas enclosure assembly, such as gas enclosure assembly 100, is used to illustrate the construction of a gas enclosure assembly of the present teachings, one of ordinary skill in the art would apply such teachings to various embodiments of the gas enclosure assembly. You will recognize that As depicted in FIG. 12A, during the initial stages of construction of the gas enclosure assembly, a plurality of spacer blocks are first placed on a pan 204 supported by the base 202. The spacer block can be thicker than the compressible gasket material disposed on the various wall frame members that rest on the pan 204. A series of spacers during assembly, where the various wall frame members of the gas enclosure assembly can be placed on the series of spacer blocks and in place proximal to the pan 204 without contacting the pan 204. Blocks can be placed on the peripheral edge of pan 204. Assembling the various wall frame members on the pan 204 in a manner that can protect any damage to the compressible gasket material disposed on the various wall frame members for the purpose of sealing with the pan 204. Is desirable. Accordingly, various wall panel components can be placed in an initial position on the pan 204, and the use of a spacer block can be placed on various wall frame members in order to form a seal with the pan 204. Prevent such damage to the compressible gasket material being made. For example, but not limited to, as shown in FIG. 12A, the front perimeter edge 201 can have spacers 93, 95, and 97 on which the front wall frame member can rest, the right perimeter The edge 205 can have spacers 89 and 91 on which the right wall frame member can rest, and the rear peripheral edge 207 can rest on the rear wall frame spacer. There can be two spacers, of which a spacer 87 is shown. Any number, type, and combination of spacer blocks can be used. Those skilled in the art will appreciate that a spacer block can be positioned on the pan 204 in accordance with the present teachings even though a distinct spacer block is not shown in each of FIGS. 12A-14B.

  FIG. 9B is a perspective view of a third spacer block 91 shown in the circled portion of FIG. 9A, according to various embodiments of the present teachings for assembling a gas enclosure from a component frame member. It is shown in FIG. 12B. The exemplary spacer block 91 may include a spacer block strap 90 attached to the outer surface 92 of the spacer block. The spacer block can be made of any suitable material, as well as combinations of materials. For example, each spacer block can include ultra high molecular weight polyethylene. The spacer block strap 90 can be made of any suitable material, as well as combinations of materials. In some embodiments, the spacer block strap 90 includes a nylon material, a polyalkylene material, or the like. The spacer block 91 has a top surface 94 and a bottom surface 96. The spacer blocks 87, 89, 93, 95, 97, and any others used may be configured with the same or similar physical attributes and may include the same or similar materials. The spacer block can be set aside, clamped, or otherwise easily placed in a manner that allows for stable placement, as well as immediate removal to the peripheral upper edge of the pan 204.

  In the exploded perspective view represented in FIG. 13, the frame members can be attached to a pan 204 that rests on the base 202, a front wall frame 210, a left wall frame 220, a right wall frame 230, and a rear wall frame. A wall frame 240 and a ceiling or top frame 250 may be provided. The OLED printing system 50 can be placed on the pan 204.

  In accordance with various embodiments of the gas enclosure assembly and system of the present teachings, an OLED printing system 50 includes, for example, a granite base, a movable bridge capable of supporting an OLED printing device, a substrate floating table, an air bearing, a path, a rail. Inkjet for depositing OLED film forming material on a substrate, including one or more devices and apparatus ranging from various embodiments of pressurized inert gas recirculation systems such as, an OLED ink supply subsystem and an inkjet printhead A printer system, one or more robots, and the like can be provided. Given the variety of components that can comprise the OLED printing system 50, various embodiments of the OLED printing system 50 can have various footprints and form factors.

  An OLED inkjet printing system can consist of several devices and apparatuses that allow for the reliable placement of ink drops on a specific location on a substrate. These devices and apparatus can include, but are not limited to, printhead assemblies, ink delivery systems, motion systems, substrate loading and unloading systems, and printhead maintenance systems. The printhead assembly consists of at least one inkjet head with at least one opening capable of ejecting ink droplets at a controllable rate, speed, and size. The ink jet head is fed by an ink supply system that provides ink to the ink jet head. Printing requires relative movement between the printhead assembly and the substrate. This is accomplished using a motion system, typically a gantry or split axis XYZ system. Either the printhead assembly can move on a stationary substrate (gantry type) or, in the case of a split axis configuration, both the printhead and the substrate can move. In another embodiment, the print station can be fixed, the substrate can be moved in the X and Y axes relative to the print head, and the Z axis motion is provided on either the substrate or the print head. The As the printhead moves relative to the substrate, ink drops are ejected at the correct time so that they are deposited at the desired location on the substrate. The substrate is inserted and removed from the print using a substrate loading and unloading system. Depending on the printer configuration, this can be accomplished using a mechanical conveyor, a substrate floating table, or a robot with an end effector. The printhead maintenance system can consist of several subsystems that allow maintenance tasks such as drop volume calibration, wiping the inkjet nozzle surface, priming to eject ink into the waste bowl, and the like.

  According to various embodiments of the present teachings for assembly of a gas enclosure, the front or first wall frame 210, left or second wall frame 220, right or third wall frame 230 as shown in FIG. The rear or fourth wall frame 250 and the ceiling frame 250 may be built together in a systematic order and then attached to a pan 204 that rests on the base 202. Various embodiments of the frame member can be positioned on the spacer block using a gantry crane to prevent damage to the compressible gasket material, as previously discussed. For example, using a gantry crane, the front wall frame 210 rests on at least three spacer blocks, such as spacer blocks 93, 95, and 97 on the peripheral upper edge 201 of the pan 204 as shown in FIG. 12A. can do. Following placement of the front wall frame 210 on the spacer block, the wall frame 220 and wall frame 230 are placed in any order on the spacer block set on the peripheral edge 203 and peripheral edge 205 of the pan 204, respectively. May be arranged continuously or sequentially. According to various embodiments of the present teachings for assembling a gas enclosure from a component frame member, the front wall frame 210 can be placed on a spacer block and then bolted to the front wall frame 210. Or the placement of the left wall frame 220 and the right wall frame 230 on the spacer block continues so that it is in place to be fastened otherwise. In various embodiments, the rear wall frame 240 is positioned on the spacer block such that it is bolted to the left wall frame 220 and the right wall frame 230 or is in place to be fastened otherwise. Can do. For the various embodiments, once the wall frame members are secured together to form a continuous wall frame enclosure assembly, the top ceiling frame 250 is made to such a wall frame enclosure to form a complete gas enclosure frame assembly. Can be attached to the assembly. In various embodiments of the present teachings for the construction of a gas enclosure assembly, the complete gas enclosure frame assembly at this assembly stage is mounted on a plurality of spacer blocks to protect the integrity of the various frame member gaskets. Stand still.

  As shown in FIG. 14A, for various embodiments of the present teachings for the construction of a gas enclosure assembly, the spacers can then be removed in preparation for attaching the gas enclosure frame assembly 400 to the pan 204. The gas enclosure frame assembly 400 can be positioned at the same time. FIG. 14A depicts the gas enclosure frame assembly 400 lifted from the spacer block and raised to a position away therefrom using the lifter assembly 402, lifter assembly 404, and lifter assembly 406. In various embodiments of the present teachings, the lifter assemblies 402, 404, and 406 can be mounted around the gas enclosure frame assembly 400. After the lifter assemblies are installed, the fully constructed gas is activated by actuating each lifter assembly to raise or expand each of the lifter assemblies, thereby raising the gas enclosure frame assembly 400. The enclosure frame assembly can be lifted away from the spacer block. As shown in FIG. 14A, the gas enclosure frame assembly 400 is shown lifted over a plurality of spacer blocks that it has previously rested. The plurality of spacer blocks can then be removed from the rest position on the pan 204 so that the frame can be lowered onto the pan 204 and then attached to the pan 204.

  14B is an exploded view of the same lifter assembly 402 as depicted in FIG. 11A, according to various embodiments of the lifter assembly of the present teachings. As shown, the lifter assembly 402 includes a scuff pad 408, a mount plate 410, a first clamp mount 412, and a second clamp mount 413. The first clamp 414 and the second clamp 415 are shown in line with the respective clamp mounts 412 and 413. Jack crank 416 is attached to the top of jack shaft 418. Trailer jack 520 is shown perpendicular to jack shaft 418 and attached thereto. Jack base 422 is shown as part of the lower end of jack shaft 418. Below the jack base 422 is a leg mount 424 that is configured to receive and connect to the lower end of the jack shaft 418. A leveling leg 426 is also shown and is configured to be received by a leg mount 424. Those skilled in the art will be able to remove the spacer block and be suitable for lifting operations to raise the gas enclosure frame assembly from the spacer block so that the intact gas enclosure assembly can be lowered onto the pan. It will be readily appreciated that any means can be used. For example, hydraulic, pneumatic, or electric lifters can be used in place of one or more lifter assemblies such as 402, 404, and 406 described above.

  According to various embodiments of the present teachings for the construction of a gas enclosure assembly, a plurality of fasteners can be provided to fasten a plurality of frame members together and then fasten the gas enclosure frame assembly to a pan. Can be configured. The plurality of fasteners includes one or more fastener components disposed along each edge of each frame member where each frame member is configured to intersect an adjacent frame member of the plurality of frame members. Can be included. The plurality of fasteners and compressible gaskets are arranged so that the compressible gasket is proximal to the interior because the hardware does not provide multiple leakage paths for the hermetic enclosure assembly of the present teachings when the frame members are joined together. And the hardware can be configured to be located externally proximal.

  The plurality of fasteners comprises a plurality of bolts along one or more edges of the frame members and a plurality of threaded holes along the edges of one or more different frame members of the plurality of frame members. be able to. The plurality of fasteners can comprise a plurality of captured bolts. The bolt may include a bolt head that extends away from the outer surface of each panel. The bolt can be submerged in a recess in the frame member. Clamps, screws, rivets, adhesives, and other fasteners can be used to secure the frame members together. Bolts or other fasteners pass through one or more outer walls of the frame member, and are threaded holes or other complementary fastener features in the side wall or top wall of one or more adjacent frame members. Can be extended to.

  As depicted in FIGS. 15-17, for various embodiments of the method for construction of a gas enclosure, the piping can be placed in an interior formed by the joining of a wall frame and a ceiling frame member. For various embodiments of the gas enclosure assembly, the piping may be installed during the build process. According to various embodiments of the present teachings, the tubing may be installed in a gas enclosure frame assembly that is constructed from a plurality of frame members. In various embodiments, the tubing can be installed on multiple frame members before being joined to form a gas enclosure frame assembly. The piping for the various embodiments of the gas enclosure assembly and system is such that substantially all of the gas drawn into the piping from one or more piping inlets removes particulate matter within the gas enclosure assembly. And can be configured to be moved through various embodiments of gas circulation and filtration loops. In addition, the piping of the various embodiments of the gas enclosure assembly and system can be used to remove particulate matter inside the gas enclosure assembly from the gas circulation and filtration loops and to the inlet of the gas purification loop outside the gas enclosure assembly. And can be configured to separate the outlet. Various embodiments of piping according to the present teachings can be fabricated from metal sheets, such as, but not limited to, aluminum sheets having a thickness of about 80 mils.

  FIG. 15 depicts a right front perspective view of the piping assembly 500 of the gas enclosure assembly 100. The enclosure piping assembly 500 can have a front wall panel piping assembly 510. As shown, the front wall panel piping assembly 510 includes a front wall panel inlet duct 512 and a first front wall panel riser 514 and a second front wall, both in fluid communication with the front wall panel inlet duct 512. A panel riser 516. The first front wall panel riser 514 is shown having an outlet 515 that is sealingly engaged with the ceiling duct 505 of the fan filter unit cover 103. Similarly, the second front wall panel riser 516 is shown having an outlet 517 that is sealingly engaged with the ceiling duct 507 of the fan filter unit cover 103. In that regard, front wall panel piping assembly 510 circulates inert gas from the bottom using a gas enclosure assembly, utilizes front wall panel inlet duct 512 through each front wall panel riser 514 and 516, and, for example, , Providing air through outlets 505 and 507, respectively, so that air can be filtered by fan filter unit 752. As will be discussed in more detail later, the number, size, and shape of the fan filter units can be selected according to the physical location of the substrate within the printing system being processed. Proximal fan filter unit 752 is a heat exchanger 742 that can maintain an inert gas that circulates through gas enclosure assembly 100 at a desired temperature as part of a thermal conditioning system.

  The right wall panel piping assembly 530 has a right wall panel inlet duct 532 that is in fluid communication with the upper duct 538 of the right wall panel through the first riser 534 of the right wall panel and the second riser 536 of the right wall panel. be able to. The upper duct 538 of the right wall panel can have a first duct inlet end 535 and a second duct outlet end 537 that is connected to the rear wall piping assembly 540. In fluid communication with the upper duct 536 of the rear wall panel. The left wall panel piping assembly 520 can have the same components as described for the right wall panel assembly 530 and through the first left wall panel riser 524 and the first left wall panel riser 524 the left wall panel. Its left wall panel inlet duct 522, which is in fluid communication with the upper duct (not shown), is visible in FIG. The rear wall panel piping assembly 540 can have a rear wall panel inlet duct 542 in fluid communication with the left wall panel assembly 520 and the right wall panel assembly 530. In addition, the rear wall panel piping assembly 540 can have a rear wall panel bottom duct 544 that can have a rear wall panel first inlet 541 and a rear wall panel second inlet 543. The bottom duct 544 of the rear wall panel can be in fluid communication with the upper duct 536 of the rear wall panel via the first bulkhead 547 and the second bulkhead 549, the bulkhead structure being a gas enclosure assembly. It can be used to feed various bundles of cables, wires, and tubing, and the like from, but not limited to, the interior of 100. Duct opening 533 moves a bundle of cables, wires, and tubing, and the like, out of upper duct 536 in the rear wall panel, which can pass through upper duct 536 via bulkhead 549. I will provide a. Bulkhead 547 and bulkhead 549 can be sealed externally using a removable fit panel as previously described. The upper duct of the rear wall panel, for example, but not limited to, is in fluid communication with the fan filter unit 754 through the vent 545, the corners of which are shown in FIG. In that regard, the left wall panel piping assembly 520, the right wall panel piping assembly 530, and the rear wall panel piping assembly 540 can be as previously described, for example, to allow air to be filtered by the fan filter unit 754. In particular, utilizing wall panel inlet ducts 522, 532, and 542 and rear panel lower duct 544, which are in fluid communication with vent 545 through various risers, ducts, bulkhead passages, and the like, respectively. Circulating inert gas in the gas enclosure assembly from the bottom. Proximal fan filter unit 754 is a heat exchanger 744 as part of a thermal conditioning system that can maintain an inert gas that circulates through gas enclosure assembly 100 at a desired temperature.

  In FIG. 15, cable feeding through the opening 533 is shown. As discussed in further detail below, various embodiments of the gas enclosure assembly of the present teachings provide for carrying bundles of cables, wires, and tubing, and the like through piping. In order to eliminate leakage paths formed around such bundles, various materials are used to seal different sized cables, wires, and tubing in the bundle using compatible materials. be able to. Also shown in FIG. 15 of enclosure piping assembly 500 is conduit I and conduit II, shown as part of fan filter unit cover 103. Conduit I provides an inert gas outlet to an external gas purification system, while Conduit II provides gas circulation within the gas enclosure assembly 100 and return of purified inert gas to the particle filtration loop.

  In FIG. 16, a top perspective view of the enclosure piping assembly 500 is shown. The symmetry of the left wall panel piping assembly 520 and the right wall panel piping assembly 530 can be seen. For the right wall panel piping assembly 530, the right wall panel inlet duct 532 is in fluid communication with the upper duct 538 of the right wall panel through the first riser 534 of the right wall panel and the second riser 536 of the right wall panel. The upper duct 538 of the right wall panel can have a first duct inlet end 535 and a second duct outlet end 537, the second duct outlet end 537 being behind the rear wall piping assembly 540. It is in fluid communication with the upper duct 536 of the wall panel. Similarly, the left wall panel piping assembly 520 is in left wall panel inlet duct in fluid communication with the left wall panel upper duct 528 through the left wall panel first riser 524 and the left wall panel second riser 526. 522. The upper duct 528 of the left wall panel can have a first duct inlet end 525 and a second duct outlet end 527, which second duct outlet end 527 is located behind the rear wall piping assembly 540. It is in fluid communication with the upper duct 536 of the wall panel. In addition, the rear wall panel plumbing assembly can have a rear wall panel inlet duct 542 in fluid communication with the left wall panel assembly 520 and the right wall panel assembly 530. Additionally, the rear wall panel piping assembly 540 can have a rear wall panel bottom duct 544 that can have a rear wall panel first inlet 541 and a rear wall panel second inlet 543. The bottom duct 544 of the rear wall panel can be in fluid communication with the upper duct 536 of the rear wall panel via the first bulkhead 547 and the second bulkhead 549. The piping assembly 500 as shown in FIGS. 15 and 16 is routed from the front wall panel inlet duct 512 to the ceiling panel ducts 505 and 507 via the front wall panel outlets 515 and 517, respectively, and the inlet duct 522, respectively. From front wall panel plumbing assembly 510, which circulates inert gas from left wall panel assembly 520, right wall panel assembly 530, and rear wall panel plumbing assembly 540, which circulates air from vents 532 and 542 to vent 545 An effective circulation of inert gas can be provided. Once the inert gas is exhausted into the enclosure area under the fan filter unit cover 103 of the enclosure 100 via the ceiling panel ducts 505 and 507 and the vent 545, the exhaust gas so exhausted is , And can be filtered through fan filter units 752 and 754. In addition, the circulated inert gas can be maintained at a desired temperature by heat exchangers 742 and 744 that are part of the heat regulation system.

  FIG. 17 is a bottom perspective view of the enclosure piping assembly 500. Inlet piping assembly 502 includes a front wall panel inlet duct 512, a left wall panel inlet duct 522, a right wall panel inlet duct 532, and a rear wall panel inlet duct 542 in fluid communication with each other. For each inlet duct included in the inlet piping assembly 502, there are visible openings that are evenly distributed across the bottom of each duct, and for purposes of this teaching, a plurality of sets of front wall panel inlet ducts 512. The opening 511, the opening 521 of the left wall panel inlet duct 522, the opening 531 of the right wall panel inlet duct 532, and the opening 541 of the right wall panel inlet duct 542 are specifically highlighted. Such openings provide effective entrapment of inert gas within the enclosure 100 for continuous circulation and filtration, as is evident across the bottom of each inlet duct. Continuous circulation and filtration of inert gas in various embodiments of the gas enclosure assembly provides for maintaining a substantially particle-free environment within the various embodiments of the gas enclosure assembly system. Various embodiments of the gas enclosure assembly system can be maintained in ISO 14644 class 4 for particulate matter. Various embodiments of the gas enclosure assembly system can be maintained in ISO 14644 Class 3 specifications for processes that are particularly sensitive to particulate contamination. As previously discussed, conduit I provides an inert gas outlet to an external gas purification system, while conduit II provides purified inert gas to the internal filtration and circulation loop of gas enclosure assembly 100. Provide feedback.

  In various embodiments of the gas enclosure assembly and system according to the present teachings, bundles of cables, wires, and tubing, and the like, are placed within the interior of the gas enclosure assembly and system, for example, for operation of an OLED printing system. It can be operatively associated with deployed electrical, mechanical, fluidic and cooling systems. Such bundles may be routed through ducts to sweep out reactive atmospheric gases such as water vapor and oxygen that are occluded in the dead space of cables, wires, and tubing, and equivalent bundles. it can. According to the present teachings, the dead space formed in the bundle of cables, wires, and tubing can significantly extend the time that can be taken to provide a gas enclosure assembly within specifications for performing an air sensitive process. It has been found to create a reservoir of occluded reactive species. For various embodiments of the gas enclosure assembly and system of the present teachings useful for printing OLED devices, various reactive species, including various reactive atmospheric gases such as water vapor and oxygen, and organic solvent vapors are used. , 100 ppm or less, for example, 10 ppm or less, 1.0 ppm or less, or 0.1 ppm or less.

  How cable laying delivered through ducts reduces the time it takes to clear clogged reactive atmospheric gases from dead volume in bundled cables, wires, and tubing, and the like To understand what can result in reference to FIGS. 18A-19. 18A is a bundle I, which may be a bundle that may include tubing, such as tubing A, for delivering various inks, solvents, and the like to a printing system, such as printing system 50 of FIG. Depicts an enlarged view of The bundle 1 in FIG. 18A can additionally include electric wires B such as coaxial cables C or electrical wiring such as cable laying. Such tubing, wires, and cables can be bundled together and routed from the outside to the inside so that they can be connected to various devices and apparatuses that comprise an OLED printing system. As seen in the shaded area in FIG. 18A, such a bundle can create a perceivable dead space D. In the schematic perspective view of FIG. 18B, when the bundle I of cables, wires, and tubing is fed through the duct II, the inert gas III can continuously blow through the bundle. The enlarged cross-sectional view of FIG. 19 shows how effectively the inert gas that continuously blows through the bundled tubing, wires, and cables effectively shows the clogged reactive species from the dead volume formed in such a bundle. Describe whether the removal rate can be increased. The diffusion rate of the reactive species A from the dead volume, shown in FIG. 19 by the collecting area occupied by the species A, is outside the dead volume, shown in FIG. 19 by the collecting region occupied by the inert gas species B. It is inversely proportional to the concentration of the reactive species. That is, when the concentration of reactive species is high in the volume just outside the dead volume, the diffusion rate is reduced. If the reactive species concentration in such a region is continuously decreased from the volume immediately outside the dead volume by the flow of inert gas, the rate of diffusion of the reactive species from the dead volume by mass action is increased. Increased. In addition, by the same principle, inert gas can diffuse into these spaces as the occluded reactive species are effectively removed out of the dead volume.

  FIG. 20A is a rear-angle perspective view of various embodiments of the gas enclosure assembly 600 with a perspective view through the return duct 605 and into the interior of the gas enclosure assembly 600. For various embodiments of the gas enclosure assembly 600, the rear wall panel 640 can have a mating panel 610 that is configured to provide access to an electrical bulkhead, for example. A bundle of cables, wires, and tubing, and the like, is removable to reveal the bundle routed through the bulkhead into the first cable, wire, and tubing bundle duct inlet 636. It can be fed into a cable routing duct, such as duct 632 shown in right wall panel 630, with the fitting panel removed. From there, the bundle can be fed into the interior of the gas enclosure assembly 600 and is shown in a perspective view through a return duct 605 in the interior of the gas enclosure assembly 600. Various embodiments of a gas enclosure assembly for cable, wire, and tubing bundle routing depict a first bundle duct inlet 634 and a second bundle duct inlet 636 for yet another bundle, FIG. There can be more than one cable, wire, and tubing bundle inlet as shown in 20A. FIG. 20B depicts an enlarged view of the bundle duct inlet 634 for cables, wires, and tubing bundles. The bundle duct inlet 634 can have an opening 631 that is designed to form a seal with the sliding cover 633. In various embodiments, the opening 631 can be adapted to various diameters of cables, wires, and tubing, and the like in bundles, such as those provided by the Roxtec Company for cable entry seals, etc. It is possible to adapt to the flexible sealing module. Alternatively, the top portion 635 of the sliding cover 633 and the upper portion 637 of the opening 631 are cables, wires, and tubing in a bundle in which conformable material is fed through an inlet, such as the bundle duct inlet 634, and There may be a conformable material disposed on each surface so that a seal can be formed around the various sized diameters of the equivalent.

  FIG. 21 is a bottom view of various embodiments of a ceiling panel of the present teachings, such as, for example, the gas enclosure assembly of FIG. 3 and the ceiling panel 250 ′ of the system 100. According to various embodiments of the present teachings for gas enclosure assembly, lighting can be installed on the interior top surface of a ceiling panel, such as the gas enclosure assembly of FIG. As depicted in FIG. 21, a ceiling frame 250 having an interior 251 can have lighting installed on the interior of various frame members. For example, the ceiling frame 250 can have two ceiling frame sections 40 having two ceiling frame beams 42 and 44 in common. Each ceiling frame section 40 may have a first side surface 41 positioned toward the inside of the ceiling frame 250 and a second side surface 43 positioned toward the outside of the ceiling frame 250. For various embodiments in accordance with the present teachings of providing lighting for a gas enclosure, multiple pairs of lighting elements 46 can be installed. Each pair of lighting elements 46 may include a first lighting element 45 proximal to the first side 41 and a second lighting element 47 proximal to the second side 43 of the ceiling frame section 40. it can. The number, positioning, and grouping of lighting elements shown in FIG. 21 are exemplary. The number and grouping of lighting elements can be varied in any desired or suitable manner. In various embodiments, the lighting element can be mounted flat, while in other embodiments it can be mounted so that it can be moved to various positions and angles. The placement of the lighting elements is not limited to the top panel ceiling 433, but in addition or alternatively, is located over any other interior surface, exterior surface, and combination of the surface of the gas enclosure assembly and system 100 shown in FIG. can do.

  The various lighting elements can comprise any number, type, or combination of light, such as halogen lamps, white lamps, incandescent lamps, arc lamps, or light emitting diodes or devices (LEDs). For example, each lighting element can comprise from about 1 LED to about 100 LEDs, from about 10 LEDs to about 50 LEDs, or more than 100 LEDs. An LED or other lighting device can emit any color or color combination within the color spectrum, outside the color spectrum, or a combination thereof. According to various embodiments of the gas enclosure assembly used for inkjet printing of OLED material, the light of the lighting device installed in the gas enclosure assembly because some materials are sensitive to some light wavelengths The wavelength can be specifically selected to avoid material degradation during processing. For example, a 4X cold white LED can be used as a 4X yellow LED or any combination thereof. An example of a 4X cold white LED is LF1B-D4S-2THWW4 available from IDEC Corporation (Sunnyvale, Calif.). An example of a 4X yellow LED that can be used is LF1B-D4S-2SHY6, also available from IDEC Corporation. LEDs or other lighting elements can be positioned or suspended from any location on the interior 251 of the ceiling frame 250 or on another surface of the gas enclosure assembly. The lighting elements are not limited to LEDs. Any suitable lighting element or combination of lighting elements can be used. FIG. 22 is a graph of the IDEC LED light spectrum, showing the x-axis corresponding to the intensity when the peak intensity is 100% and the y-axis corresponding to the wavelength in nanometer units. The spectra of LF1B yellow type, yellow fluorescent lamp, LF1B white type LED, LF1B cold white type LED, and LF1B red type LED are shown. Other light spectra and combinations of light spectra can be used in accordance with various embodiments of the present teachings.

  Recall various embodiments of the gas enclosure assembly that is built in a manner that minimizes the internal volume of the gas enclosure assembly and at the same time optimizes the working space to accommodate different footprints of different OLED printing systems. I want to be. Various embodiments of gas enclosure assemblies so constructed additionally provide immediate access to the interior of the gas enclosure assembly from the outside during processing and to the interior for maintenance while minimizing downtime. Provide immediate access. In that regard, various embodiments of a gas enclosure assembly according to the present teachings can be profiled for various footprints of various OLED printing systems.

Those skilled in the art will appreciate the present teachings for frame member construction, panel construction, frame and panel sealing, and construction of gas enclosure assemblies, such as the gas enclosure assembly 100 of FIG. 3, in gas enclosure assemblies of various sizes and designs. Can understand that is applicable. For example, but not limited to, various embodiments of the contour gas enclosure assembly of the present teachings directed to Gen 3.5 to Gen 10 substrate sizes are not contoured and are approximately 30% of the volume of the enclosure with comparative total dimensions. percent can be a saving of between about 70% and can have an internal volume of between about 6 m ³ to about 95 m ^3. Various embodiments of the gas enclosure assembly adapt to the OLED printing system for its function, while at the same time optimizing the workspace to minimize inert gases and also from the outside to the OLED printing system during processing. In order to allow immediate access, various frame members may be constructed that provide a profile for the gas enclosure assembly. In that regard, various gas enclosure assemblies of the present teachings can vary in contour local structure and volume.

FIG. 23 provides an example of a gas enclosure assembly according to the present teachings. The gas enclosure assembly 1000 can include a front frame assembly 1100, an intermediate frame assembly 1200, and a rear frame assembly 1300. The front frame assembly 1100 can include a front frame base 1120, a front wall frame 1140 having an opening 1142 for receiving a substrate, and a front ceiling frame 1160. The intermediate frame assembly 1200 can include an intermediate frame base 1220, a right end wall frame 1240, an intermediate wall frame 1260, and a left end wall frame 1280. The rear frame assembly 1300 can include a rear frame base 1320, a rear wall frame 1340, and a rear ceiling frame 1360. The area shown with diagonal lines depicts the available working volume of the gas enclosure assembly 1000, which is the volume available to accommodate the OLED printing system. Various embodiments of the gas enclosure assembly 1000 minimize the amount of recirculated inert gas required to operate an air sensitive process, such as an OLED printing process, while at the same time remotely during operation, or Constructed to allow immediate access to the OLED printing system, either directly by easy access through an easily removable panel. Various embodiments of the contour gas enclosure assembly according to the present teachings, the Gen 3.5 for various embodiments of the contour gas enclosure assembly of the present teachings to target substrate size Gen 10 m, from about 6 m ³ to about 95 m ³ during, for example, but not limited to, for example, it may be useful in OLED print substrate size Gen 8.5 from Gen 5.5, can have a gas enclosure volume between about 15 m ³ to about 30 m ^3.

  The gas enclosure assembly 1000 can have all the features described in the present teachings for the exemplary gas enclosure assembly 100. For example, but not limited to, the gas enclosure assembly 1000 can utilize a seal according to the present teachings that provides a sealed enclosure throughout the build and break cycle. Various embodiments of gas enclosure systems based on gas enclosure assembly 1000 include various reactive atmospheric gases, such as water vapor and oxygen, of 100 ppm or less, such as 10 ppm or less, 1.0 ppm or less, or 0.1 ppm or less. As well as gas purification systems that can maintain various levels of various reactive species, including organic solvent vapors.

  Further, various embodiments of gas enclosure assembly systems based on gas enclosure assembly 1000 may have a circulation and filtration system that can provide a particle-free environment that meets ISO 14644 Class 3 and 4 cleanroom standards. it can. In addition, as will be discussed in more detail later, gas enclosure assembly systems based on gas enclosure assemblies of the present teachings, such as gas enclosure assembly 100 and gas enclosure assembly 1000, include, but are not limited to, pneumatic robots, substrate floating Various embodiments of a pressurized inert gas recirculation system that can be used to operate one or more of a table, air bearing, air bushing, compressed gas tool, pneumatic actuator, and combinations thereof. Can have. For various embodiments of the gas enclosure and system of the present teachings, the use of various pneumatically operated devices and apparatus can provide low particle generation performance and is less cumbersome to maintain.

  FIG. 24 is an exploded view of a gas enclosure assembly 1000 depicting various frame members that can be constructed to provide a sealed gas enclosure in accordance with the present teachings. As previously discussed for the various embodiments of the gas enclosure 100 of FIGS. 3 and 13, the OLED inkjet printing system 50 is identified on a substrate, such as the substrate 60, shown proximal to the substrate floating table 54. It can consist of several devices and devices that allow for the reliable placement of the ink drop on the location. Given the variety of components that can comprise the OLED printing system 50, various embodiments of the OLED printing system 50 can have various footprints and form factors. Various substrate materials, such as, but not limited to, various glass substrate materials, as well as various polymer substrate materials, can be used for the substrate 60 according to various embodiments of the OLED inkjet printing system.

  As previously described for the gas enclosure assembly 100, according to various embodiments of the gas enclosure assembly of the present teachings, the construction of the gas enclosure assembly minimizes the volume of the gas enclosure assembly and provides immediate access to the interior. Can be performed around the entire OLED printing system to provide access. In FIG. 24, an example of contouring can be given in view of the OLED printing system 50.

  As shown in FIG. 24, there may be six isolators above the OLED printing system 50, two of which are a first isolator 51 and a second isolator 51 that support the substrate floating table 54 of the OLED printing system 50. It can be found in the isolator 53. In addition to the two additional isolators, the first and second isolators 51 and 53, respectively, seen oppositely, there are two isolators that support the OLED printing system base 52. The front enclosure base 1120 can have a first front enclosure isolator mount 1121 that supports a first front enclosure isolator wall frame 1123. The second front enclosure isolator wall frame 1127 is supported by an isolator mount (not shown) of the second front enclosure. Similarly, the intermediate enclosure base 1220 can have a first intermediate enclosure isolator mount 1221 that supports a first intermediate enclosure isolator wall frame 1223. The second intermediate enclosure isolator wall frame 1127 is supported by an isolator mount (not shown) of the second intermediate enclosure. Finally, the rear enclosure base 1320 can have a first rear enclosure isolator mount 1321 that supports the rear intermediate enclosure isolator wall frame 1323. The second rear enclosure isolator wall frame 1127 is supported by an isolator mount (not shown) of the second rear enclosure. Various embodiments of the isolator wall frame members are contoured around each isolator, thereby minimizing the volume around each isolator support member. In addition, the shaded panel sections shown for each isolator wall frame for bases 1120, 1220, and 1320 are removable panels that can be removed, for example, to inspect the isolator. The front enclosure assembly base 1120 can have a pan 1122, while the intermediate enclosure assembly base 1220 can have a pan 1222 and the rear enclosure assembly base 1320 can have a pan 1322. When the base is fully constructed to form a continuous base, the OLED printing system is mounted on the continuous pan formed thereby, similar to the placement of the OLED printing system 50 on the pan 204 of FIG. Can be placed. As previously described, the wall frames 1140, 1260, and 1280 of the front frame assembly 1100, then the wall frames 1240, 1260, and 1280 of the intermediate frame assembly 1200, and the wall frames 1340, ceiling frame of the rear frame assembly 1300, then. Wall and ceiling frame members such as 1360 can be joined around the OLED printing system 50. Accordingly, various embodiments of the sealed contour wall frame member of the present teachings simultaneously reduce the amount of inert gas in the gas enclosure assembly 1000 while providing immediate access to the various devices and apparatus of the OLED printing system. Effectively reduce.

  A gas enclosure assembly and system according to the present teachings can have a gas circulation and filtration system within the gas enclosure assembly. Such an internal filtration system can have a plurality of fan filter units within the interior and can be configured to provide a laminar flow of gas within the interior. The laminar flow can be in the direction from the top of the interior to the bottom of the interior, or in any other direction. The gas flow produced by the circulation system need not be laminar, but laminar flow of gas can be used to ensure a thorough and complete gas turnover inside. A laminar flow of gas can also be used to minimize turbulence, which causes particles in the environment to collect in the region of such turbulence, and the filtration system This is undesirable because it can hinder the removal of these particles from the environment. Furthermore, in order to maintain the desired temperature internally, for example, a heat regulation system utilizing a plurality of heat exchangers operating with, adjacent to or in conjunction with a fan or another gas circulation device. Can be provided. The gas purification loop may be configured to circulate gas from within the interior of the gas enclosure assembly through at least one gas purification component external to the enclosure. In that regard, the internal filtration and circulation system of the gas enclosure assembly, in conjunction with the gas purification loop external to the gas enclosure assembly, has a substantially low level of reactive species throughout the gas enclosure assembly. A continuous circulation of the inert gas of the particles can be provided. The gas purification system can be configured to maintain very low levels of undesirable components, such as organic solvents and their vapors, as well as water, water vapor, oxygen, and the like.

  FIG. 25 is a schematic diagram illustrating a gas enclosure assembly and system 2100. Various embodiments of the gas enclosure assembly and system 2100 include a gas enclosure assembly 1500 according to the present teachings, a gas purification loop 2130 in fluid communication with the gas enclosure assembly 1500, and at least one thermal conditioning system 2140. it can. In addition, various embodiments of the gas enclosure assembly and system can provide a pressurized inert gas recycle that can supply an inert gas for operating various devices such as a substrate floating table for an OLED printing system. A circulation system 2169 can be included. Various embodiments of the pressurized inert gas recirculation system 2169, as will be discussed in more detail later, include compressors, blowers, and 2 as sources for the various embodiments of the inert gas recirculation system 2169. Two combinations can be used. In addition, the gas enclosure assembly and system 2100 can have a filtration and circulation system within the gas enclosure assembly and system 2100 (not shown).

  As depicted in FIG. 25, for various embodiments of the gas enclosure assembly according to the present teachings, the duct design is continuously filtered and circulated internally for the various embodiments of the gas enclosure assembly. From the inert gas, the inert gas circulated through the gas purification loop 2130 can be separated. The gas purification loop 2130 includes an outlet line 2131 from the gas enclosure assembly 1500 to the solvent removal component 2132 and then to the gas purification system 2134. The inert gas, purified from the solvent and other reactive gas species such as oxygen and water vapor, is then returned to the gas enclosure assembly 1500 through inlet line 2133. The gas purification loop 2130 may also include appropriate conduits and connections and sensors, such as oxygen, water vapor, and solvent vapor sensors. Gas circulation units such as fans, blowers, or motors, and the like can be provided separately or incorporated into the gas purification system 2134 to circulate gas through the gas purification loop 2130, for example. According to various embodiments of the gas enclosure assembly, the solvent removal system 2132 and the gas purification system 2134 are shown as separate units in the schematic diagram shown in FIG. Can be stored together as a single purification unit. The thermal conditioning system 2140 has at least one cooling device 2141 that can have a fluid outlet line 2143 for circulating coolant into the gas enclosure assembly and a fluid inlet line 2145 for returning the coolant to the cooling device. Can be included.

  The gas purification loop 2130 of FIG. 25 includes a solvent removal located upstream of the gas purification system 2134 so that inert gas circulated from the gas enclosure assembly 1500 passes through the solvent removal system 2132 via the outlet line 2131. A system 2132 can be included. According to various embodiments, the solvent removal system 2132 may be a solvent confinement system based on adsorbing solvent vapor from an inert gas passing through the solvent removal system 2132 of FIG. For example, but not limited to, one or more adsorbent layers such as activated carbon, molecular sieves, and the like may effectively remove a wide variety of organic solvent vapors. For various embodiments of the gas enclosure assembly, cold trap technology may be employed to remove solvent vapor in the solvent removal system 2132. As noted above, various embodiments of gas enclosure assemblies in accordance with the present teachings have been described with reference to such species from inert gases that circulate continuously through a gas enclosure assembly system, such as gas enclosure assembly system 2100 of FIG. Sensors such as oxygen, water vapor, and solvent vapor sensors may be used to monitor effective removal. Various embodiments of the solvent removal system may indicate when an adsorbent, such as activated carbon, molecular sieve, and the like, has reached capacity so that one or more adsorbent layers can be regenerated or replaced. it can. The regeneration of the molecular sieve can involve heating the molecular sieve, contacting the molecular sieve with a forming gas, combinations thereof, and the like. Molecular sieves configured to confine various species, including oxygen, water vapor, and solvents, are heated and exposed to a forming gas containing hydrogen, for example, a forming gas containing about 96% nitrogen and 4% hydrogen. Can be regenerated and the proportion is by volume or weight. Physical regeneration of the activated carbon can be performed using an analogous heating procedure in an inert environment.

Any suitable gas purification system can be used for the gas purification system 2134 of the gas purification loop 2130 of FIG. For example, MBRAUN Inc. Gas purification systems available from (Statham, New Hampshire) or Innovative Technology (Amesbury, Massachusetts) may be useful for incorporation into various embodiments of gas enclosure assemblies according to the present teachings. The gas purification system 2134 can be used to purify one or more inert gases within the gas enclosure assembly and system 2100, for example, to purify the entire gas atmosphere within the gas enclosure assembly. As described above, in order to circulate gas through the gas purification loop 2130, the gas purification system 2134 can include a gas circulation unit such as a fan, blower, or motor, and the like. In that regard, a gas purification system can be selected depending on the volume of the enclosure that can define a volume flow rate for moving the inert gas through the gas purification system. For various embodiments of gas enclosure assemblies and systems having a gas enclosure assembly with a volume of up to about 4 m ^3, a gas purification system that can travel at about 84 m ³ / hour can be used. For various embodiments of gas enclosure assemblies and systems having a gas enclosure assembly with a volume of up to about 10 m ^3, a gas purification system that can travel at about 155 m ³ / hour can be used. More than one gas purification system may be used for various embodiments of gas enclosure assemblies having a volume between about 52-114 m ³ .

  Any suitable gas filter or purification device can be included in the gas purification system 2134 of the present teachings. In some embodiments, the gas purification system can remove one of the devices from the line for maintenance and use the other device to continue system operation without interruption. Can be equipped with two parallel purification devices. In some embodiments, for example, the gas purification system can comprise one or more molecular sieves. In some embodiments, the gas purification system is saturated or inefficient when one of the molecular sieves is saturated with impurities or otherwise considered not operating sufficiently efficiently. At least a first molecular sieve and a second molecular sieve can be provided so that the system can switch to the other molecular sieve while regenerating the molecular sieve. A control unit can be provided to determine the operational efficiency of each molecular sieve, switch the operation of different molecular sieves, regenerate one or more molecular sieves, or a combination thereof. As previously mentioned, the molecular sieve may be regenerated or reused.

  With respect to the thermal conditioning system 2140 of FIG. 25, at least one fluid cooling device 2141 may be provided to cool the gas enclosure assembly and the gas atmosphere within the system 2100. For various embodiments of the gas enclosure assembly of the present teachings, the fluid cooling device 2141 delivers the cooled fluid to a heat exchanger within the enclosure where the inert gas is passed to a filtration system within the enclosure. At least one fluid cooling device may also be provided to the gas enclosure assembly and system 2100 to cool the heat generated from the device enclosed within the gas enclosure 2100. For example, but not limited to, at least one fluid cooling device can also be provided to the gas enclosure assembly and system 2100 to cool the heat generated from the OLED printing system. The thermal conditioning system 2140 can comprise a heat exchange or Peltier device and can have various cooling capabilities. For example, for various embodiments of the gas enclosure assembly and system, the cooling device can provide a cooling capacity between about 2 kW and about 20 kW. Fluid cooling devices 1136 and 1138 can cool one or more fluids. In some embodiments, the fluid cooling device may utilize some fluid as a coolant, such as, but not limited to, water, antifreeze, coolant, and combinations thereof as a heat exchange fluid. Appropriate non-leaking locking connections can be used in connecting associated conduits and system components.

  As depicted in FIGS. 26 and 27, one or more fan filter units may be configured to provide a substantially laminar gas flow through the interior. According to various embodiments of the gas enclosure assembly of the present teachings, one or more fan units are disposed adjacent to the first inner surface of the gas atmosphere enclosure, and the one or more piping inlets are connected to the first of the gas atmosphere enclosure. 2 is disposed adjacent to the inner surface of the opposite side. For example, the gas atmosphere enclosure can include an internal ceiling and a bottom internal periphery, one or more fan units can be positioned adjacent to the internal ceiling, and the one or more pipe inlets can be As shown at 15-17, a plurality of inlet openings may be provided that are located adjacent to the bottom interior perimeter that is part of the piping system.

  FIG. 26 is a cross-sectional view taken along the length of a gas enclosure assembly and system 2200, according to various embodiments of the present teachings. The gas enclosure assembly and system 2200 of FIG. 26 can house the OLED printing system 50, as well as a gas enclosure 1500, and a gas purification system 2130 (see also FIG. 25), a thermal conditioning system 2140, a filtration and circulation system 2150. And a piping system 2170. The thermal conditioning system 2140 can include a fluid cooling device 2141 in fluid communication with the cooling device outlet line 2143 and the cooling device inlet line 2145. The cooled fluid exits the fluid cooler 2141 and flows through the cooler outlet line 2143, and as shown in FIG. 26, a plurality of fan filter units for various embodiments of the gas enclosure assembly and system. Each of which can be delivered to a heat exchanger that can be located proximally. Fluid can be returned from the heat exchanger proximal to the fan filter unit through the cooling device inlet line 2145 to the cooling device 2141 so that it is maintained at a constant desired temperature. As described above, the chiller outlet line 2141 and the chiller inlet line 2143 include a plurality of heat exchangers including a first heat exchanger 2142, a second heat exchanger 2144, and a third heat exchanger 2146. In fluid communication. According to various embodiments of the gas enclosure assembly and system as shown in FIG. 26, the first heat exchanger 2142, the second heat exchanger 2144, and the third heat exchanger 2146 are each a filtration system. The first fan filter unit 2152, the second fan filter unit 2154, and the third fan filter unit 2156 of 2150 are in thermal communication.

  In FIG. 26, a number of arrows depict the flow to and from the various fan filter units and as depicted in the simplified diagram of FIG. 26, the first plumbing conduit 2173 and the second The flow within the piping system 2170 including the piping conduit 2174 is also depicted. The first plumbing conduit 2173 can receive gas through the first duct inlet 2171 and can exit through the first duct outlet 2175. Similarly, the second plumbing conduit 2174 can receive gas through the second duct inlet 2172 and exit through the second duct outlet 2176. In addition, as shown in FIG. 26, the piping system 2170 is internally passed through the filtration system 2150 by effectively defining a space 2180 that is in fluid communication with the gas purification system 2130 via the gas purification outlet line 2131. To separate the inert gas that is recycled. Such a circulation system, including various embodiments of the piping system described with respect to FIGS. 15-17, provides substantial laminar flow, minimizes turbulence, and gas atmosphere within the interior of the enclosure. Facilitates circulation, turnover, and filtration of particulate matter and provides circulation through a gas purification system external to the gas enclosure assembly.

  FIG. 27 is a cross-sectional view taken along the length of a gas enclosure assembly and system 23000 according to various embodiments of gas enclosure assemblies according to the present teachings. Like the gas enclosure assembly 2200 of FIG. 26, the gas enclosure assembly system 2300 of FIG. 27 includes a gas enclosure 1500 that can house the OLED printing system 50, as well as a gas purification system 2130 (see also FIG. 25), and thermal conditioning. A system 2140, a filtration and circulation system 2150, and a piping system 2170 can be included. A thermal conditioning system 2140 that can include a fluid cooling device 2141 in fluid communication with the cooling device outlet line 2143 and the cooling device inlet line 2145 for various embodiments of the gas enclosure assembly 2300 is depicted in FIG. As such, a plurality of heat exchangers, eg, first heat exchanger 2142 and second heat exchanger 2144 can be in fluid communication. According to various embodiments of the gas enclosure assembly and system as shown in FIG. 27, various heat exchangers, such as the first heat exchanger 2142 and the second heat exchanger 2144, may be connected to the first of the piping system 2170. By being positioned proximal to the duct outlets, such as the second duct outlet 2175 and the second duct outlet 2176, they can be in thermal communication with the circulating inert gas. In that regard, the inert gas returned for filtration from duct inlets, such as duct inlets, such as the first duct inlet 2171 and the second duct inlet 2172, of the piping system 2170, for example, is shown in FIG. Prior to being circulated through the first fan filter unit 2152, the second fan filter unit 2154, and the third fan filter unit 2156 of the filtration system 2150.

As can be seen from the arrows indicating the direction of inert gas circulation through the enclosure of FIGS. 26 and 27, the fan filter unit provides a substantially laminar flow downward from the top of the enclosure to the bottom. Configured to do. For example, Flanders Corporation (Washington, North Carolina), or Envirco Corporation (Sanford, North)
Fan filter units available from Carolina) may be useful for incorporation into various embodiments of gas enclosure assemblies according to the present teachings. Various embodiments of the fan filter unit can exchange between about 350 cubic feet per minute (CFM) to about 700 CFM of inert gas through each unit. As shown in FIGS. 26 and 27, since the fan filter units are in a parallel arrangement rather than in series, the amount of inert gas that can be exchanged in a system with multiple fan filter units depends on the units used. It is proportional to the number. Near the bottom of the enclosure, the gas flow is directed toward a plurality of pipe inlets, schematically shown in FIGS. 26 and 27 as first duct inlet 2171 and second duct inlet 2172. As previously discussed with respect to FIGS. 15-17, the duct inlet is positioned substantially at the bottom of the enclosure, causing a downward gas flow from the upper fan filter unit, thereby providing a good rate of rotation of the gas atmosphere within the enclosure. Promotes and facilitates thorough turnover and movement of the entire gas atmosphere through the gas purification system used in connection with the enclosure. The piping is circulated through the gas purification loop 2130 by circulating the gas atmosphere through the piping and using a filtration and circulation system 2150 to facilitate laminar flow and exhaustive rotation of the gas atmosphere within the enclosure. For each of the reactive species, such as water and oxygen, and the respective level of solvent in various embodiments of the gas enclosure assembly is 100 ppm or less, such as 1 ppm or less, such as 0 .1 ppm or less.

  According to various embodiments of the gas enclosure assembly system used in the OLED printing system, the number of fan filter units can be selected according to the physical location of the substrate in the printing system being processed. Thus, although three fan filter units are shown in FIGS. 26 and 27, the number of fan filter units can vary. For example, FIG. 28 is a cross-sectional view taken along the length of a gas enclosure assembly and system 2400, which is a gas enclosure assembly and system similar to that depicted in FIGS. The gas enclosure assembly and system 2400 can include a gas enclosure assembly 1500 that houses an OLED printing system 50 supported on the base 52. The substrate floating table 54 of the OLED printing system can define a progression through which the substrate can be moved through the system 2400 during OLED printing of the substrate. Accordingly, the filtration system 2150 of the gas enclosure assembly and system 2400 has an appropriate number of fan filter units, shown as 2151-2155, corresponding to the physical progression of the substrate through the OLED printing system 50 being processed. In addition, the schematic cutaway view of FIG. 28 effectively reduces the amount of inert gas required during the OLED printing process, while simultaneously using, for example, gloves installed in various glove ports. A variety of gas enclosures that can provide immediate access to the interior of the gas enclosure 1500 either remotely during processing or directly by various removable panels in the case of maintenance operations. Figure 2 depicts an embodiment contouring.

  Various embodiments of the gas enclosure and system may utilize a pressurized inert gas recirculation system for operation of various pneumatically operated devices and apparatuses. In addition, as previously discussed, embodiments of the gas enclosure assembly of the present teachings can be maintained at a slight positive pressure to the external environment, such as, but not limited to, between about 2 mbarg and about 8 mbarg. Maintaining a pressurized inert gas recirculation system within the gas enclosure assembly system simultaneously introduces a slight positive interior of the gas enclosure assembly and system while continuously introducing pressurized gas into the gas enclosure assembly and system. With respect to maintaining pressure, it can be difficult to present a dynamic and continuous balancing effect. Further, the variable requirements of various devices and apparatuses can create irregular pressure profiles for various gas enclosure assemblies and systems of the present teachings. Maintaining the dynamic pressure balance of the gas enclosure assembly held at a slight positive pressure relative to the external environment under such conditions can provide the integrity of a continuous OLED printing process.

  As shown in FIG. 29, various embodiments of the gas enclosure assembly and system 3000 may be used with an inert gas source 2509 and clean dry air (CDA) for use in various aspects of the operation of the gas enclosure assembly and system 3000. ) It may have an external gas loop 2500 for integrating and controlling the source 2512. Those skilled in the art will also understand that the gas enclosure assembly and system 3000 can also include various embodiments of internal particle filtration and gas circulation systems, as well as various embodiments of external gas purification systems, as previously described. You will understand that you can. In addition to the outer loop 2500 for integrating and controlling the inert gas source 2509 and the CDA source 2512, the gas enclosure assembly and system 3000 includes various devices that can be placed within the gas enclosure assembly and system 3000 and A compressor loop 2160 can be provided that can supply an inert gas for operating the apparatus.

  The compressor loop 2160 of FIG. 29 can include a compressor 2162, a first accumulator 2164, and a second accumulator 2168 configured to be in fluid communication. The compressor 2162 can be configured to compress the inert gas drawn from the gas enclosure assembly 1500 to a desired pressure. The inlet side of the compressor loop 2160 can be in fluid communication with the gas enclosure assembly 1500 via a gas enclosure assembly outlet 2501 through a line 2503 having a valve 2505 and a check valve 2507. The compressor loop 2160 can be in fluid communication with the gas enclosure assembly 1500 on the outlet side of the compressor loop 2160 via the outer gas loop 2500. The accumulator 2164 can be positioned between the compressor 2162 and the junction of the compressor loop 2160 with the external gas loop 2500 and can be configured to generate a pressure of 5 psig or greater. A second accumulator 2168 can be in the compressor loop 2160 to provide a decay variation due to compressor piston circulation at about 60 Hz. For various embodiments of the compressor loop 2160, the first accumulator 2164 can have a capacity between about 80 gallons and about 160 gallons, while the second accumulator is about 30 gallons to about 60 gallons. You can have a capacity between. According to various embodiments of the gas enclosure assembly and system 3000, the compressor 2162 may be a zero entry compressor. Various types of zero-entry compressors can operate without leaking atmospheric gas into the various embodiments of the gas enclosure assembly and system of the present teachings. Various embodiments of the zero entry compressor can be performed continuously during the OLED printing process, for example, utilizing the use of various devices and apparatus that require a compressed inert gas.

  Accumulator 2164 can be configured to receive and accumulate compressed inert gas from compressor 2162. The accumulator 2164 can supply compressed inert gas as needed in the gas enclosure assembly 1500. For example, the accumulator 2164 includes various types of gas enclosure assembly 1500 such as, but not limited to, one or more of a pneumatic robot, a substrate floating table, an air bearing, an air bushing, a compressed gas tool, a pneumatic actuator, and combinations thereof. Gas can be provided to maintain pressure for the component. As shown in FIG. 29 for the gas enclosure assembly and system 3000, the gas enclosure assembly 1500 can have an OLED printing system 50 encapsulated therein. As shown in FIG. 24, the OLED printing system 50 can be supported by a granite platform 52 to transport the substrate to a fixed position in the printhead chamber and to support the substrate during the OLED printing process. The substrate floating table 54 can be included. In addition, an air bearing 58 supported on the bridge 56 can be used instead of, for example, a linear mechanical bearing. For various embodiments of the gas enclosures and systems of the present teachings, the use of various air-operated devices and apparatus can provide low particle generation performance and is less cumbersome to maintain. The compressor loop 2160 can be configured to continuously supply pressurized inert gas to various devices and apparatuses of the gas enclosure apparatus 3000. In addition to supplying a pressurized inert gas, the substrate floating table 54 of the OLED printing system 50 utilizing air bearing technology is also in fluid communication with the gas enclosure assembly 1500 through line 2552 when the valve 2554 is in the open position. The vacuum system 2550 is also used.

  The pressurized inert gas recirculation system according to the present teachings operates to compensate for the variable demand for pressurized gas during use, thereby providing dynamic for various embodiments of the gas enclosure assembly and system of the present teachings. There may be a pressure control bypass loop 2165 as shown in FIG. 29 for the compressor loop 2160 that provides balance. For various embodiments of gas enclosure assemblies and systems according to the present teachings, a bypass loop can maintain a constant pressure in the accumulator 2164 without disturbing or changing the pressure in the enclosure 1500. The bypass loop 2165 can have a first bypass inlet valve 2161 on the inlet side of the bypass loop 2165 that is closed unless the bypass loop 2165 is used. The bypass loop 2165 can also have a back pressure regulator that can be used when the second valve 2163 is closed. The bypass loop 2165 can have a second accumulator 2168 disposed on the exit side of the bypass loop 2165. For an embodiment of a compressor loop 2160 that utilizes a zero entry compressor, the bypass loop 2165 can compensate for slight pressure deviations that may occur over time during use of the gas enclosure assembly and system. The bypass loop 2165 can be in fluid communication with the compressor loop 2160 on the inlet side of the bypass loop 2165 when the bypass inlet valve 2161 is in the open position. When the bypass inlet valve 2161 is opened, if the inert gas from the compressor loop 2160 is not required within the interior of the gas enclosure assembly 1500, the inert gas diverted through the bypass loop 2165 is recycled to the compressor. It can be circulated. The compressor loop 2160 is configured to divert the inert gas through the bypass loop 2165 when the pressure of the inert gas in the accumulator 2164 exceeds a preset threshold pressure. The preset threshold pressure of the accumulator 2164 is between about 25 psig to about 200 psig at a flow rate of at least about 1 cubic foot per minute (cfm), or from about 50 psig to about 200 psig at a flow rate of at least about 1 cubic foot per minute (cfm). Can be between 150 psig, or between about 75 psig to about 125 psig at a flow rate of at least about 1 cubic foot per minute (cfm), or between about 90 psig to about 95 psig at a flow rate of at least about 1 cubic foot per minute (cfm). .

  Various embodiments of the compressor loop 2160 utilize various compressors other than zero entry compressors such as variable speed compressors or compressors that can be controlled to be either on or off. can do. As previously discussed, the zero entry compressor ensures that no atmospheric reactive species can be introduced into the gas enclosure assembly and system. Thus, any compressor configuration that prevents atmospheric reactive species from being introduced into the gas enclosure assembly and system may be utilized for the compressor loop 2160. According to various embodiments, the compressor 2162 of the gas enclosure assembly and system 3000 can be housed in, for example, but not limited to, a sealed housing. The interior of the housing can be configured in fluid communication with an inert gas source, eg, the same inert gas that forms an inert gas atmosphere for the gas enclosure assembly 1500. For the various embodiments of the compressor loop 2160, the compressor 2162 can be controlled at a constant speed to maintain a constant pressure. In another embodiment of the compressor loop 2160 that does not utilize a zero entry compressor, the compressor 2162 can be turned off when the maximum threshold pressure is reached and turned on when the minimum threshold pressure is reached.

  In FIG. 30 of gas enclosure assembly and system 3100, blower loop 2170 and blower vacuum loop 2550 are shown for operation of OLED printing system 50 substrate floating table 54 housed in gas enclosure assembly 1500. Yes. As previously discussed for the compressor loop 2160, the blower loop 2170 can be configured to continuously supply pressurized inert gas to the substrate floating table 54.

  Various embodiments of gas enclosure assemblies and systems that can utilize a pressurized inert gas recirculation system provide various sources of pressurized gas, such as at least one of a compressor, a blower, and combinations thereof. Various loops can be used. In FIG. 30 of the gas enclosure assembly and system 3100, the compressor loop 2160 is in fluid communication with an external gas loop 2500 that can be used to supply inert gas for the high consumption manifold 2525 as well as the low consumption manifold 2513. Can do. Various embodiments of gas enclosure assemblies and systems according to the present teachings as shown in FIG. 29 for gas enclosure assembly and system 3000 include, but are not limited to, substrate floating tables, pneumatic robots, air bearings, air bushings, and compression A high consumption manifold 2525 can be used to supply inert gas to various devices and apparatuses such as one or more of gas tools and combinations thereof. For various embodiments of gas enclosure assemblies and systems according to the present teachings, low consumption 2513 is inert to various devices and devices such as, but not limited to, one or more of isolators and pneumatic actuators, and combinations thereof. Can be used to supply gas.

For various embodiments of the gas enclosure assembly and system 3100, while the blower loop 2170 can be utilized to supply pressurized inert gas to various embodiments of the substrate floating table 54, for example, without limitation Compressor loop in fluid communication with external gas loop 2500 to supply pressurized inert gas to one or more of a pneumatic robot, air bearing, air bushing, and compressed gas tool, and combinations thereof 2160 can be used. In addition to supplying pressurized inert gas, the floating substrate 54 of the OLED printing system 50, which utilizes air bearing technology, also communicates with the gas enclosure assembly 1500 through line 2552 when the valve 2554 is in the open position. A blower vacuum system 2550 is also utilized. The housing 2172 of the blower loop 2170 has a first blower 2174 for supplying a pressurized source of inert gas to the substrate floating table 54 in an inert gas environment, and a vacuum for the substrate floating table 54. A second blower 2550 can be maintained that serves as a source. Attributes that can make a blower suitable for use as either a pressurized inert gas or a vacuum source for various embodiments of a substrate floating table are, for example, that they are highly reliable, Various capable of providing a flow rate between about 100 m ³ / hour and about 2500 m ³ / hour, with a wide range of flow rates, with variable speed, making them less cumbersome to maintain Although not limited to these embodiments. Various embodiments of the blower loop 2170 additionally include a first isolation valve 2173 at the inlet end of the compressor loop 2170 and a check valve 2175 and a second isolation valve 2177 at the outlet end of the compressor loop 2170. Can have. Various embodiments of the blower loop 2170 may be, for example, without limitation, an adjustable valve 2176, which may be a gate, butterfly, needle, or ball valve, and the blower assembly 2170 to the substrate floating system 54 at a specified temperature. There may be a heat exchanger 2178 for maintaining the inert gas.

  30 illustrates an inert gas source 2509 and a clean dry air (CDA) source 2512 for use in various aspects of the operation of the gas enclosure assembly and system 3000 of FIG. 29 and the gas enclosure assembly and system 3100 of FIG. FIG. 30 depicts an external gas loop 2500 as also shown in FIG. 29 for integrated control. The outer gas loop 2500 of FIGS. 29 and 30 can include at least four mechanical valves. These valves include a first mechanical valve 2502, a second mechanical valve 2504, a third mechanical valve 2506, and a fourth mechanical valve 2508. These various valves allow control of both an inert gas such as, for example, nitrogen, a noble gas, and any combination thereof, and an air source such as clean dry air (CDA). , Located in various flow lines. A built-in inert gas line 2510 extends from the built-in inert gas source 2509. The built-in inert gas line 2510 continues to extend linearly as a low consumption manifold line 2512 that is in fluid communication with the low consumption manifold 2513. The first section 2514 of the intersection line extends from a first flow junction 2516 located at the intersection of the built-in inert gas line 2510, the low consumption manifold line 2512, and the first section 2514 of the intersection line. A first section 2514 of intersection lines extends from the second fluid junction 2518. A compressor inert gas line 2520 extends from the accumulator 2164 of the compressor loop 2160 and terminates at a second flow junction 2518. The CDA line 2522 continues as a high consumption manifold line 2524 that extends from the CDA source 2512 and is in fluid communication with the high consumption manifold 2525. Third flow junction 2526 is located at the intersection of second section 2528 of crossing line, clean dry air line 2522, and high consumption manifold line 2524. The second section 2528 of the intersecting line extends from the second fluid junction 2518 to the third fluid junction 2526.

  With reference to FIG. 31, which is a table of valve positions for various operating modes of the gas enclosure assembly and system, with respect to the description of the outer gas loop 2500, the following is an overview of several different operating modes.

  The table in FIG. 31 shows the process modes in which the valve state creates an operating mode of only an inert gas compressor. In the process mode shown in FIG. 30 and as indicated for the valve state of FIG. 31, the first mechanical valve 2502 and the third mechanical valve 2506 are in a closed configuration. Second mechanical valve 2504 and fourth mechanical valve 2508 are in an open configuration. As a result of these particular valve configurations, the compressed inert gas is flowed to both the low consumption manifold 2513 and the high consumption manifold 2525. Under normal operation, inert gas from the built-in inert gas source and clean dry air from the CDA source are prevented from flowing to either the low consumption manifold 2513 or the high consumption manifold 2525.

  As shown in FIG. 31, with reference to FIG. 30, there is a series of valve states for maintenance and restoration. Various embodiments of the gas enclosure assembly and system of the present teachings may require occasional maintenance, as well as recovery from system failure. In this particular mode, second mechanical valve 2504 and fourth mechanical valve 2508 are in a closed configuration. First mechanical valve 2502 and third mechanical valve 2506 are in an open configuration. The built-in inert gas source and CDA source are supplied by low consumption manifold 2513 to these components that are low consumption and in addition have a dead volume that would be difficult to clean effectively during restoration. Provide an inert gas. Examples of such components include pneumatic actuators. In contrast, those components that are consuming can use the high consuming manifold 2525 to supply CDA during maintenance. Isolating the compressor using valves 2504, 2508, 2530 prevents reactive species such as oxygen and water vapor from contaminating the inert gas in the compressor and accumulator.

  After maintenance or restoration is complete, the gas enclosure assembly may be filled with various reactive atmospheric species such as oxygen and water, such as 100 ppm or less, such as 10 ppm or less, 1.0 ppm or less, or 0.1 ppm or less. It must be purified through several cycles until a low level is reached. As shown in FIG. 31, with reference to FIG. 30, during the purge mode, the third mechanical valve 2506 is closed and the fifth mechanical valve 2530 is also in a closed configuration. First mechanical valve 2502, second mechanical valve 2504, and fourth mechanical valve 2508 are in an open configuration. As a result of this particular valve configuration, only the built-in inert gas is allowed to flow to both the low consumption manifold 2513 and the high consumption manifold 2525.

  Both the “no flow” mode and the leak test mode, as shown in FIG. 31, with reference to FIG. 30, are modes used as needed. The “no flow” mode is a mode having a valve state configuration in which the first mechanical valve 2502, the second mechanical valve 2504, the third mechanical valve 2506, and the fourth mechanical valve 2508 are all in a closed configuration. . This closed configuration is a “no flow” mode of the system in which gas from any of the inert gas, CDA, or compressor source cannot reach either the low consumption manifold 2513 or the high consumption manifold 2525. Bring. Such a “no flow mode” can be useful when the system is not in use and can remain idle for extended periods of time. The leak test mode can be used to detect leaks in the system. The leak test mode exclusively uses compressed gas to isolate the system from the high consumption manifold 2525 of FIG. 30 to check for leakage of low consumption components such as isolators and pneumatic actuators of the low consumption manifold 2513. In this leak test mode, the first mechanical valve 2502, the third mechanical valve 2506, and the fourth mechanical valve 2508 are all in a closed configuration. Only the second mechanical valve 2504 is in the open configuration. As a result, compressed nitrogen gas can flow from the compressor inert gas source 2519 to the low consumption manifold 2513 and there is no gas flow to the high consumption manifold 5525.

  All publications, patents, and patent applications described in this specification are the same as if each individual publication, patent, or patent application was specifically and individually indicated to be incorporated by reference. Incorporated herein by reference.

  While embodiments of the present disclosure have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Numerous variations, changes, and substitutions will now occur to those skilled in the art without departing from the disclosure. It should be understood that various alternatives to the embodiments of the disclosure described herein may be employed in practicing the disclosure. The following claims define the scope of the present disclosure, and methods and structures within the scope of these claims and their equivalents are intended to be covered thereby.

Claims (15)

A gas enclosure system,
A gas enclosure assembly comprising a plurality of frame member assemblies, wherein the frame member assembly is sealably joined to define an interior for housing a commercial printing system;
A gas circulation and filtration system disposed within the interior for circulating an inert gas within the interior and removing particulate matter from the interior;
A gas purification system configured to purify the inert gas contained within the interior;
A piping assembly disposed within the interior, wherein the piping assembly is in fluid communication with the gas circulation and filtration system and in fluid communication with the gas purification system;
A bundle operatively connected to the printing system housed in the gas enclosure assembly, the bundle comprising at least one of a cable, an electrical wire, fluid-containing tubing, and combinations thereof; The bundle is substantially disposed in the pipe, and the bundle
A gas enclosure system comprising: The gas enclosure system of claim 1, wherein a plurality of reactive species that are occluded within a dead volume in the bundle are cleared from the dead volume by the inert gas drawn through the tubing. The gas enclosure system of claim 2, wherein the reactive species are removed to prevent contamination, oxidation, and damage of materials and substrates processed in the printing system. The gas enclosure system of claim 2, wherein the reactive species that are cleared from the dead volume are purified by the gas purification system. The gas enclosure system of claim 4, wherein the reactive species cleared from the dead volume by the purification system are water vapor, oxygen, and organic solvent vapor. The gas enclosure system of claim 1, wherein the gas circulation and filtration system is configured to provide a substantially laminar flow of gas through the interior. The gas enclosure system according to claim 1, wherein the inert gas is selected from nitrogen, a rare gas, and combinations thereof. The gas enclosure system of claim 1, wherein the gas purification system is capable of maintaining each of the reactive species within the interior at 100 ppm or less. The gas enclosure system of claim 1, wherein the gas purification system is capable of maintaining each of the reactive species within the interior at 0.1 ppm or less. The gas enclosure system of claim 1, wherein the gas enclosure assembly is contoured around the commercial printing system to minimize the internal volume of the gas assembly enclosure. The gas enclosure system of claim 10, wherein the gas enclosure assembly is 30% to 70% smaller than a comparative total dimension of an uncontoured enclosure. The internal volume of the gas enclosure assembly is 6m ³ And 95m ³ The gas enclosure system of claim 1, between. The gas enclosure system of claim 1, wherein the commercial printing system is configured to process a substrate for OLED device manufacturing. The gas enclosure system of claim 13, wherein the substrate is sized from a Generation 3.5 size substrate to a Generation 10 size substrate. The gas enclosure system of claim 1, wherein the gas circulation and filtration system is configured to control particulate matter to meet ISO 14644 Class 3 cleanroom standards.