JP6362908B2 - Method for processing laminated circular plate - Google Patents

Description

  The present invention relates to a processing method for processing a laminated circular plate.

  In a laminated circular plate formed by forming a laminated portion such as a sealing resin having a size smaller than the circular plate on a circular plate such as a wafer, the side surface of the laminated portion is a circular plate. Since it may incline so that a diameter may become large as it approaches a thing, the process which cuts along the outer periphery of a lamination | stacking part and trims a lamination | stacking part is performed (for example, patent document 1 and patent document 2) reference).

  If the center of the circular plate and the center of the laminated portion coincide with each other, at the time of trimming, the center of the holding table that holds the laminated circular plate and the center of the circular plate are made coincident, Rotate the holding table and position the cutting blade at a predetermined distance from the center of the holding table and cut it into the laminated part to cut a position away from the center along the outer peripheral edge of the laminated part Can do. In order to align the center of the circular plate and the rotation axis of the holding table, for example, the circular plate is temporarily placed on a temporary table and the center of the circular plate is positioned at a predetermined position and then held. It is carried to the table.

JP 2003-273053 A Japanese Patent Laid-Open No. 2004-207459

  However, in a laminated circular plate in which a laminated portion such as a sealing resin having a size smaller than that of the circular plate is formed on the circular plate, there is a variation in the lamination position of the laminated portion with respect to the circular plate. In some cases, the center of the circular plate does not coincide with the center of the laminated portion. In this case, even if the laminated circular plate is held on the holding table so that the rotation axis of the holding table and the center of the circular plate are coincident, the rotation axis of the holding table and the center of the laminated portion are coincident. Therefore, there is a problem that a desired position that is a predetermined distance away from the center of the laminated portion cannot be trimmed. For this reason, even if an attempt is made to trim the outer peripheral portion of the laminated portion to remove the inclined portion existing in the outer peripheral portion of the laminated portion, the inclined portion cannot be completely removed or the flat portion is removed too much. There was a problem of getting stuck.

  The present invention has been considered in view of such a problem. In processing a laminated circular plate in which a laminated portion is formed on a circular plate, a desired position of the laminated portion can be processed. For the purpose.

A processing method according to the present invention includes a circular flat portion having a size smaller than a predetermined size on a circular plate-like object having a predetermined size, and an inclined portion that inclines from the circular flat portion toward the outer peripheral side and surrounds the circular flat portion. A method for processing a laminated circular plate having a laminated portion formed thereon, wherein the laminated circular plate-like object is formed on the holding surface of a rotatable chuck table having a holding surface for holding the laminated circular plate-like object. A holding step for holding the circular plate-like object side to expose the laminated portion, a detecting step for detecting a boundary position between the circular flat portion and the inclined portion after the holding step, and a detecting step A cutting step for removing the inclined portion by rotating the holding table holding the laminated circular plate-like material while cutting a cutting blade rotating in the laminated portion based on the detected boundary position. , the detection In the step, the stacking unit is imaged from an angle at which the optical axis is tilted with respect to the rotation axis of the holding table so that the inclined portion of the stacking unit is not captured, and the stacking unit is imaged based on the captured image. Detect the boundary position .

  According to the processing method according to the present invention, based on the boundary position between the circular flat portion and the inclined portion detected in the detection step, the laminated circular plate-like object is held while the rotating blade is cut into the laminated portion. Since the inclined part is removed by rotating the table, the desired position of the laminated part can be cut even if the center of the circular plate and the center of the laminated part are slipped, and the inclined part is completely removed. It is not possible to remove or remove the flat portion.

Further, by using the imaging means, the optical axis images the laminated portion at an angle inclined to the rotational axis of the holding table as the inclined portion of the laminate is not reflected, that to detect the boundary position based on the captured image Thus , the position of the boundary between the circular flat portion and the inclined portion can be accurately detected.

The side view which shows a holding | maintenance step. The side view which shows a detection step. The side view which shows another example of a detection step. The top view which shows a calculation step. The side view which shows a cutting step. The top view which shows a cutting step.

  A laminated circular plate 10 shown in FIG. 1 includes a disk-like circular plate 11 such as a wafer, and a laminated portion 12 formed of a resin or the like sealed on the surface of the circular plate 11. ing. The laminated portion 12 molds, for example, a pattern formed on the surface of the circular plate-like object 11, is formed in a truncated cone shape, and has a circular circular flat portion 122 parallel to the surface of the circular plate-like object 11. In addition, an inclined portion 123 that surrounds the periphery of the circular flat portion 122 and is inclined toward the outer peripheral side as the circular plate-like object 11 is approached. The diameter of the circular flat portion 122 is smaller than the diameter of the circular plate-like object 11.

  The central axis of the circular plate-like object 11 and the central axis of the laminated portion 12 substantially coincide with each other, but may not completely coincide with each other due to the influence of lamination processing accuracy. The laminated circular plate 10 is cut along the outer peripheral edge of the laminated portion 12 to remove the inclined portion 123.

(1) Holding Step First, the laminated circular plate 10 is held by the holding table 20. The holding table 20 includes a holding surface 21 parallel to the XY plane, and is rotatable about a rotation axis 29 parallel to the ± Z direction perpendicular to the holding surface 21. The rotating shaft 29 passes through the center of the holding surface 21. In the holding step, the laminated circular plate 10 is placed on the holding surface 21 of the holding table 20 with the back surface of the circular plate 11 facing down (−Z direction). The mounted laminated circular plate 10 is sucked and held. The laminated circular plate-like object 10 held by the holding table 20 is held with the back surface of the circular plate-like object 11 coming into contact with the holding surface 21 of the holding table 20, and the circular flat portion 122 of the laminated portion 12 is upward (+ Z direction). ) Side exposed.

(2) Detection Step After the holding step, the circular flat plate 122 and the inclined portion 123 are used, for example, with the imaging means 30 shown in FIG. The horizontal position of the boundary 124 (the position in the XY plane) is detected. The imaging means 30 is arranged above the circular flat portion 122 (on the + Z direction side) and at a position closer to the rotation axis 29 of the holding table 20 than the boundary 124 between the circular flat portion 122 and the inclined portion 123, and the optical axis. 39 has a predetermined angle α with respect to the ± Z directions, and the vicinity of the boundary 124 between the circular flat portion 122 and the inclined portion 123 is photographed obliquely from the inside.

  The angle α is set so that the inclined portion 123 is hidden behind the circular flat portion 122 and is not reflected in the image captured by the imaging unit 30. For example, when the inclination angle of the inclined portion 123 with respect to the rotation axis 29 of the holding table 20 is β, the angle α may be set so that α> β. Then, the edge of the stacked unit 12 is detected as the boundary 124 by analyzing the image captured by the imaging unit 30. Since the inclined portion 123 is not shown in the image captured by the imaging unit 30, the boundary 124 that is the outer peripheral edge of the circular flat portion 122 can be detected clearly. In the detection step, even if the inclined portion 123 is captured in the image, if the inclined portion 123 can be removed by light amount adjustment, image processing, or the like, it is not necessary to take an image at an angle at which the inclined portion 123 is completely hidden. .

  As shown in FIG. 3, the back pressure sensor 40 may be used to detect the position of the boundary 124 between the circular flat portion 122 and the inclined portion 123. The back pressure sensor 40 ejects a fluid 48 such as air from the nozzle 41 in the −Z direction, and measures the pressure of the fluid 48 in the nozzle 41. When the nozzle 41 is moved in the −Z direction and the distance between the nozzle 41 and the measurement object approaches, the pressure of the fluid 48 in the nozzle 41 increases, and the surface height of the measurement object is increased. The height (position in the ± Z direction) is measured without contacting the measurement object. The back pressure sensor 40 is an example of a non-contact type height position detection unit.

  In this way, while measuring the height of the circular flat portion 122, the back pressure sensor 40 is moved from the side close to the rotation shaft 29 of the holding table 20 toward the radially outer side of the holding table 20. Then, initially, the height measured by the back pressure sensor 40 is substantially constant, but when the measurement position of the back pressure sensor 40 exceeds the boundary 124 between the circular flat portion 122 and the inclined portion 123, the back pressure is measured. The height measured by the sensor 40 changes in the −Z direction. Therefore, based on the measurement position of the back pressure sensor 40 when the height measured by the back pressure sensor 40 starts to change, the boundary between the rotating shaft 29 of the holding table 20, the circular flat portion 122 and the inclined portion 123. The distance in the XY plane with respect to 124 is calculated. Since the position of the boundary 124 is detected based on the measurement position when the height starts to change, the position of the boundary 124 between the circular flat portion 122 and the inclined portion 123 is accurately detected without being affected by the inclined portion 123. can do.

  The non-contact type height position detecting means is not limited to the back pressure sensor 40, and may be a laser height meter, for example. The laser height meter measures the distance to the measurement object by irradiating the measurement object with laser light and receiving the reflected light that is reflected by the measurement object.

  Thus, by measuring the height of the circular flat portion 122 in a non-contact manner, it is possible to prevent the occurrence of measurement errors due to the influence of the inclined portion 123. The non-contact type height position detecting means may be any means that can be moved relative to the holding table 20 in the radial direction. As described above, the non-contact type height position detecting means itself is moved. Alternatively, only the measurement position may be moved. Alternatively, the holding table 20 may be moved without moving the non-contact type height position detecting means.

  In the detection step, after measuring the distance between the rotating shaft 29 of the holding table 20 and the boundary 124 between the circular flat portion 122 and the inclined portion 123, the holding table 20 is rotated. When the holding table 20 rotates by a predetermined angle, the rotation is stopped, and the distance between the rotating shaft 29 of the holding table 20 and the boundary 124 between the circular flat portion 122 and the inclined portion 123 is measured again. After completion of the measurement, the holding table 20 is further rotated, and when it is rotated by a predetermined angle, the rotation is stopped, and the distance between the rotating shaft 29 of the holding table 20 and the boundary 124 between the circular flat portion 122 and the inclined portion 123 is further increased. Measure again. In this way, the distance between the rotating shaft 29 of the holding table 20 and the boundary 124 between the circular flat portion 122 and the inclined portion 123 is measured at least three times. In addition, it is good also as a structure which the measurement means 30 and a non-contact-type height detection means move along the outer periphery of the flat part 122, without the holding table 20 rotating.

(3) Calculation Step Next, the distance between the boundary 124 between the circular flat portion 122 and the inclined portion 123 measured in the detection step and the rotating shaft 29 of the holding table 20, and the rotation angle of the holding table 20 at the time of measurement. Based on this, the position of the boundary 124 between the detected circular flat portion 122 and the inclined portion 123 is calculated. For example, the XY coordinates of the boundary 124 are calculated with the intersection point between the rotation axis 29 of the holding table 20 and the circular flat portion 122 as the origin. Since measurement is performed at least three times, at least three coordinates are calculated.

  Next, in the calculation step, as shown in FIG. 4, based on the position of the boundary 124 between the circular flat portion 122 and the inclined portion 123 calculated in the detection step, the rotation axis 29 of the holding table 20 and the circular flat portion 122 The deviation from the center is calculated.

  Based on the three boundary positions, the center position of the circular flat portion 122 can be calculated. For example, the following three positions A (X1, Y1), B (X2, Y2), C () of the boundary 124 of the stacked portion 12 calculated in the detection step by the following formula (1), formula (2), and formula (3). A center point O ′ (XC, YC) and a radius R of a circle passing through X3, Y3) are calculated.

  Next, the distance d between the origin O and the center point O ′ and the angle φ formed by the line segment OO ′ and the X axis are calculated by the following formulas (4) and (5).

  The distance d represents the distance (displacement) between the rotating shaft 29 of the holding table 20 and the center of the circular flat portion 122, and the angle φ is a predetermined direction of the holding table 20 as viewed from the rotating shaft 29 of the holding table 20 ( The direction of the center of the circular flat portion 122 with respect to the (X-axis direction) is represented.

(4) Cutting Step Next, as shown in FIG. 5, the holding table 20 is rotated while the laminated circular plate 10 is held on the holding table 20, and the outer periphery of the laminated portion 12 is cut using the cutting means 50. Cut the part. The cutting means 50 is configured by attaching a cutting blade 51 to the tip of a spindle 52, and the spindle 52 rotates around a rotation axis 59 that is parallel to the ± Y direction and intersects the rotation axis 29 of the holding table 20. As a result, the cutting blade 51 is rotated.

  Then, based on the position of the outer peripheral edge of the boundary 124 of the stacked portion 12 second circular plate 12 detected in the detection step, in the ± Y direction that is the radial direction of the holding table 20 according to the rotation angle of the holding table 20 The cutting blade 51 is moved to adjust the cutting position, and the cutting blade 51 is moved in the −Z direction to cut the laminated table 12 and rotate the holding table 20. It cuts along, and the inclined part 123 is removed. The cutting depth of the cutting blade 51 at this time is a depth at which the laminated portion 12 can be completely cut, and is a depth at which the lower end of the cutting blade 51 does not cut into the surface of the circular plate-like object 11.

  For example, when it is desired to cut and remove a predetermined width from the position inside the distance 124 from the boundary 124 between the circular flat portion 122 and the inclined portion 123 to the outermost end portion 125 of the inclined portion 123, the circular flat portion calculated in the calculation step The difference (R−e) obtained by subtracting the distance e from the radius R of the boundary 124 between the boundary 122 and the inclined portion 123 is defined as the radius r, and is removed from the center point O ′ of the circular flat portion 122 calculated in the calculation step to the position of the radius r. A side surface of the cutting blade having a thickness greater than a predetermined width to be cut is positioned and cut. Can be cut. Assuming that the rotation angle of the holding table 20 is θ, as shown in FIG. 6, the angle formed by the direction of the center of the stacked portion 12 viewed from the rotation shaft 29 of the holding table 20 with the + X direction is (θ + φ). Therefore, the distance y between the rotary shaft 29 of the holding table 20 and the cutting position of the cutting blade 51 is calculated by, for example, Equation 6 below. When using a cutting blade having a blade thickness that cannot be removed by one rotation of the laminated portion 12, that is, using a cutting blade having a thickness smaller than a predetermined width from a position e inside the boundary 124 to a tip portion 125 of the inclined portion 123. When cutting, the cutting blade is cut at a position of radius r from the boundary 124 or the center point O ′ of the boundary 124, and then the holding table 20 is rotated as many times as necessary and cutting is performed while moving the cutting blade in the outer circumferential direction. This is repeated to perform trimming with a predetermined width.

  Since the angle θ changes as the holding table 20 rotates, the distance y also changes. By cutting while moving the cutting blade 51 in the ± Y direction so as to follow the change in the distance y, the outer peripheral portion of the laminated portion 12 is cut into a circumferential shape. As described above, the cutting blade 51 and the holding table 20 are cut while being relatively moved in a direction parallel to the surface direction of the holding surface 21 so as to correct the deviation calculated in the calculation step, thereby obtaining the center of the stacked portion 12. Even when it is deviated from the center of the entire laminated circular plate 10, the desired position of the laminated portion 12 can be cut and the inclined portion 123 can be completely removed.

  In the cutting step, the position of the cutting blade 51 in the ± Y direction is not changed depending on the rotation angle of the holding table 20, but the position of the cutting blade 51 in the ± Y direction regardless of the rotation angle of the holding table 20. May be kept constant.

  For example, the distance between the origin O and the rotation axis 29 of the center point O ′ holding table 20 and the center of the circular flat portion 122 from the radius R of the boundary 124 between the circular flat portion 122 and the inclined portion 123 calculated in the calculation step. A difference (R−d) obtained by subtracting d is calculated, and the cutting blade 51 is positioned at a position away from the rotation shaft 29 of the holding table 20 by a distance (R−d). Since the distance (Rd) is the minimum value of the distance between the rotation axis 29 of the holding table 20 and the boundary 124 between the circular flat portion 122 and the inclined portion 123, the holding table 20 is rotated in this state. If the outer peripheral side is cut, the inclined portion 123 can be completely removed without moving the cutting blade 51. In this case, the cutting is performed while using a cutting blade with a thick blade thickness or rotating the holding table 20 a plurality of times to move the cutting blade 51 to the outer peripheral side. Since it is not necessary to change the position of the cutting blade 51 by complicated control according to the rotation angle of the holding table 20, the control becomes easy.

  Further, the calculation step is omitted, and the smallest one is selected from the distances between the rotation axis 29 of the holding table 20 and the boundary 124 between the circular flat portion 122 and the inclined portion 123 detected in the detection step. The cutting blade 51 may be positioned at the boundary position, assuming that the distance between the 20 rotation shafts 29 and the boundary 124 between the circular flat portion 122 and the inclined portion 123 is the minimum value. By doing so, it is not necessary to perform complicated calculations for obtaining the center point and radius of the circular flat portion 122.

  In this case, since the actual minimum value is considered to be smaller than the minimum value of the actually measured values, the cutting blade 51 is positioned and held at a position closer to the rotating shaft 29 of the holding table 20 than the minimum value of the actually measured values. If cutting is performed while rotating the table 20 a plurality of times and moving the cutting blade 51 to the outer peripheral side, or cutting is performed using a cutting blade having a thick blade thickness, the inclined portion 123 can be completely removed.

  Further, the cutting blade 51 may be positioned based on the average value of the actually measured values or the maximum value of the actually measured values instead of the minimum value of the actually measured values. In that case, the difference between the rotation shaft 29 of the holding table 20 and the minimum value of the distance between the boundary 124 between the circular flat portion 122 and the inclined portion 123 is larger than in the case of using the minimum value. In consideration of this, the cutting blade 51 is positioned near the rotation axis 29 of the holding table 20, and the cutting blade 51 is moved to the outer peripheral side while rotating the holding table 20 a plurality of times. Cutting may be performed using

10 ... laminated circular plate, 11 ... circular plate,
12 ... Laminated portion, 122 ... Circular flat portion, 123 ... Inclined portion, 124 ... Boundary, 125 ... Tip portion,
13 ... Adhesive, 17 ... Outer rim,
20 ... holding table, 21 ... holding surface, 29 ... rotating shaft,
30 ... Imaging means, 39 ... Optical axis,
40 ... back pressure sensor, 41 ... nozzle, 48 ... fluid,
50 ... Cutting means, 51 ... Cutting blade, 52 ... Spindle, 59 ... Rotating shaft

Claims (1)

A laminated portion having a circular flat portion having a size smaller than the predetermined size and an inclined portion inclined from the circular flat portion toward the outer peripheral side and surrounding the circular flat portion is formed on a circular plate-like object having a predetermined size. A method for processing a laminated circular plate,
A holding step of holding the circular plate side of the laminated circular plate on the holding surface of the rotatable chuck table having a holding surface for holding the laminated circular plate, and exposing the laminated portion;
A detection step of detecting a boundary position between the circular flat portion and the inclined portion after performing the holding step;
Cutting that removes the inclined portion by rotating the holding table holding the laminated circular plate while cutting a rotating blade that rotates into the laminated portion based on the boundary position detected in the detecting step. Steps,
With
In the detection step, the stacking unit is imaged from an angle at which the optical axis is tilted with respect to the rotation axis of the holding table so that the inclined unit of the stacking unit is not captured using an imaging unit, and based on the captured image processing how to detect the boundary position Te.

Images