JP6355544B2 - Position measuring apparatus, data correcting apparatus, position measuring method and data correcting method - Google Patents

Description

  The present invention relates to a technique for measuring the position of a region of interest included in an image obtained by capturing an object.

  Conventionally, a pattern can be drawn by irradiating a photosensitive material formed on a semiconductor substrate, a printed circuit board, a glass substrate for a plasma display device or a liquid crystal display device (hereinafter referred to as “substrate”) with light. Has been done. 2. Description of the Related Art In recent years, drawing devices that directly draw a pattern by scanning a beam of light on a photosensitive material have been used with higher definition of the pattern.

  Further, the substrate may be distorted (deformed) by various processes on the substrate on which the pattern is drawn. When drawing an upper layer pattern on such a substrate, the design data is also corrected in accordance with the deformation of the substrate. For example, in Patent Document 1, a drawing area represented by raster-style drawing data is virtually divided into a plurality of mesh areas, and a plurality of meshes are determined based on the positions of alignment marks on the substrate specified from the captured image of the substrate. The arrangement position when the area is rearranged according to the shape of the substrate is specified. Then, drawing data is generated by synthesizing drawing contents associated with the plurality of mesh areas in a state where the plurality of mesh areas are rearranged at the arrangement positions.

  Patent Document 2 discloses a method of measuring shape information of a light source image. In this method, the position information of the estimated contour point of the light source image is extracted by obtaining the variance of the pixel data in the texture analysis window around each pixel in the image obtained by capturing the light source image, and based on the position information. Thus, an approximate ellipse of the contour of the light source image is calculated.

Japanese Patent No. 5209544 JP 2003-194529 A

  By the way, when the design data is corrected in accordance with the deformation of the substrate as in Patent Document 1, in order to measure the deformation amount of the substrate, the position of the alignment mark on the substrate in the captured image can be acquired by pattern matching. Conceivable. However, in pattern matching, measurement accuracy may be reduced or measurement may be disabled due to the brightness of the captured image and the influence of patterns other than the mark. Although it is conceivable to acquire the position of the mark on the substrate in the captured image using the method of Patent Document 2, the method of Patent Document 2 uses only the position information of the contour point. In some cases, it is impossible to obtain the position of.

  The present invention has been made in view of the above problems, and an object thereof is to measure the position of a region of interest in a captured image with high accuracy.

  The invention according to claim 1 is a position measurement device that measures the position of a region of interest included in an image obtained by imaging an object, and is obtained by imaging the object, and is substantially rectangular, circular, or An image storage unit that stores an image including an elliptical region of interest, and a cross-sectional profile of the region of interest in the image is a top hat shape, and the pixel value distribution of the region of interest is modeled with a model function that can be partially differentiated A calculation unit that acquires a plurality of coefficients included in the model function by determining with an optimization method, and a position acquisition that acquires a position of the attention area based on the model function from which the plurality of coefficients are acquired A part.

  A second aspect of the present invention is the position measurement apparatus according to the first aspect, wherein the optimization method is a Gauss-Newton method or a Levenberg-Marquardt method.

The invention according to claim 3 is the position measuring apparatus according to claim 1 or 2, wherein the pixel value distribution of the region of interest is expressed by a circular model function shown in Formula 1 in the calculation unit. ,
For a, b, c, d, e, and f in Equation 1, which are the plurality of coefficients, an initial value of the coefficient f is determined based on the brightness of the background of the region of interest in the image. An initial value is determined based on an inclination at an outer edge in the cross-sectional profile of the attention area, and an initial value of the coefficient a is determined based on a difference between the brightness of the attention area and the brightness of the background. An initial value of b is determined based on the initial value of the coefficient e and the size of the attention area, and an initial value of the coefficient c is determined based on the x coordinate of the approximate center of the attention area. An initial value of d is determined based on the y coordinate of the approximate center of the region of interest.

The invention according to claim 4 is the position measuring device according to claim 1 or 2, wherein in the calculation unit, the pixel value distribution of the region of interest is a substantially square model function (note that n is a real number greater than 1),
For a, b, c, d, e, and f in Equation 2, which are the plurality of coefficients, an initial value of the coefficient f is determined based on the background brightness of the region of interest in the image, and the coefficient e An initial value is determined based on an inclination at an outer edge in the cross-sectional profile of the attention area, and an initial value of the coefficient a is determined based on a difference between the brightness of the attention area and the brightness of the background. An initial value of b is determined based on the initial value of the coefficient e and the size of the attention area, and an initial value of the coefficient c is determined based on the x coordinate of the approximate center of the attention area. An initial value of d is determined based on the y coordinate of the approximate center of the region of interest.

  The invention according to claim 5 is the position measuring device according to any one of claims 1 to 4, wherein the object is a substrate on which a pattern is formed, and the region of interest is a part of the pattern. Or a hole formed in the substrate.

  The invention according to claim 6 is the position measurement apparatus according to claim 5, wherein the region of interest is a part of a pattern region indicating the pattern in the image, and the arithmetic unit is configured to perform the attention. When the region is connected to another part of the pattern region, the other part of the pattern region is masked, or the region on the substrate corresponding to the region of interest includes a hole. An image processing unit that replaces a pixel value of a region indicating a region with a pixel value of another region of the region of interest, and a coefficient acquisition unit that acquires the plurality of coefficients based on an image processed by the image processing unit. Prepare.

  According to a seventh aspect of the present invention, there is provided a data correction apparatus for correcting design data of a pattern drawn on a substrate, wherein the position of a region of interest included in an image obtained by imaging the substrate is measured. And a data correction unit that corrects design data of a pattern drawn on a substrate based on the position of the region of interest.

  The invention according to claim 8 is a position measuring method for measuring a position of a region of interest included in an image obtained by imaging an object, and is obtained by imaging an object, and is substantially rectangular and circular. A step of preparing an image including an attention area having a shape or an elliptical shape; and b) a model function capable of partial differentiation of a pixel value distribution of the attention area in which the cross-sectional profile of the attention area is a top hat shape in the image. Obtaining a plurality of coefficients included in the model function by determining with an optimization method; and c) obtaining the position of the region of interest based on the model function from which the plurality of coefficients are obtained. And a step of performing.

  The invention according to claim 9 is the position measuring method according to claim 8, wherein the optimization method is a Gauss-Newton method or a Levenberg-Marquardt method.

A tenth aspect of the present invention is the position measuring method according to the eighth or ninth aspect, wherein in the step b), the pixel value distribution of the region of interest is expressed by a circular model function expressed by Equation 3. And
For a, b, c, d, e, and f in Equation 3, which are the plurality of coefficients, an initial value of the coefficient f is determined based on the brightness of the background of the region of interest in the image. An initial value is determined based on an inclination at an outer edge in the cross-sectional profile of the attention area, and an initial value of the coefficient a is determined based on a difference between the brightness of the attention area and the brightness of the background. An initial value of b is determined based on the initial value of the coefficient e and the size of the attention area, and an initial value of the coefficient c is determined based on the x coordinate of the approximate center of the attention area. An initial value of d is determined based on the y coordinate of the approximate center of the region of interest.

The invention according to an eleventh aspect is the position measuring method according to the eighth or ninth aspect, wherein in the step b), the pixel value distribution of the region of interest is a substantially square model function represented by Formula 4 (however, , N is a real number greater than 1),
For a, b, c, d, e, and f in Equation 4, which are the plurality of coefficients, an initial value of the coefficient f is determined based on the brightness of the background of the region of interest in the image. An initial value is determined based on an inclination at an outer edge in the cross-sectional profile of the attention area, and an initial value of the coefficient a is determined based on a difference between the brightness of the attention area and the brightness of the background. An initial value of b is determined based on the initial value of the coefficient e and the size of the attention area, and an initial value of the coefficient c is determined based on the x coordinate of the approximate center of the attention area. An initial value of d is determined based on the y coordinate of the approximate center of the region of interest.

  The invention according to claim 12 is the position measuring method according to any one of claims 8 to 11, wherein the object is a substrate on which a pattern is formed, and the region of interest is a part of the pattern Or a hole formed in the substrate.

  The invention according to claim 13 is the position measuring method according to claim 12, wherein the region of interest is a part of a pattern region indicating the pattern in the image, and the step b) includes b1. ) When the attention area is connected to another part of the pattern area, the other part of the pattern area is masked, or the area on the substrate corresponding to the attention area includes a hole. Replacing a pixel value of a region indicating the hole with a pixel value of another region of the region of interest; b2) acquiring the plurality of coefficients based on an image processed by the b1) step; Is provided.

  The invention according to claim 14 is a data correction method for correcting design data of a pattern drawn on a substrate, and measures the position of a region of interest included in an image obtained by imaging the substrate. And a step of correcting design data of a pattern drawn on a substrate based on the position of the region of interest.

  According to the present invention, the position of a region of interest in an image can be measured with high accuracy.

It is a side view of a drawing apparatus. It is a top view of a drawing apparatus. It is a block diagram which shows the function of a data correction apparatus. It is a figure which shows the flow of the process which concerns on drawing of a pattern. It is a figure which shows a part of captured image. It is a figure which shows the change of the image by the change of the coefficients b and e in a model function. It is a figure which shows the flow of the process which acquires the some coefficient in a model function. It is a figure which shows pixel value distribution which the model function from which the some coefficient was acquired shows. It is a figure which shows an inclusion area image. It is a figure which shows a binary image. It is a figure which shows the shrinked binary image. It is a figure which shows an attention area image. It is a figure which shows the processed inclusion area image. It is a figure which shows the change of the image by the change of the coefficients b and e in a model function. It is a figure which shows an inclusion area image. It is a figure which shows the processed inclusion area image. It is a figure which shows pixel value distribution which the model function from which the some coefficient was acquired shows.

  FIG. 1 is a side view of a drawing apparatus 1 according to an embodiment of the present invention. FIG. 2 is a plan view of the drawing apparatus 1. The drawing device 1 is a device that performs direct drawing of a pattern by irradiating light onto an object. The object is, for example, a printed circuit board (a printed wiring board, hereinafter simply referred to as “substrate”) provided with a layer of a photosensitive material.

  As shown in FIGS. 1 and 2, the drawing apparatus 1 includes a holding unit moving mechanism 2, a substrate holding unit 3, and a drawing head 4. The substrate holding unit 3 holds a substrate 9 that is an object on which a layer of a photosensitive material is formed on a main surface 91 (hereinafter referred to as “upper surface 91”) on the (+ Z) side. The holding unit moving mechanism 2 is provided on the base 11 and moves the substrate holding unit 3 in the X direction and the Y direction perpendicular to the Z direction. The drawing head 4 is attached to the frame 12. The frame 12 is fixed to the base 11 so as to straddle the substrate holding unit 3 and the holding unit moving mechanism 2. The drawing head 4 irradiates the modulated light beam onto the photosensitive material on the substrate 9.

  The drawing apparatus 1 further includes a control unit 6 and a data correction device 8 as shown in FIG. The control unit 6 controls each component such as the holding unit moving mechanism 2 and the drawing head 4. The data correction device 8 corrects design data of a pattern to be drawn on the substrate 9. Details of the data correction device 8 will be described later.

  As shown in FIGS. 1 and 2, the substrate holding unit 3 includes a stage 31, a stage rotating mechanism 32, and a support plate 33. The substrate 9 is placed on the stage 31. The support plate 33 supports the stage 31 rotatably. The stage rotation mechanism 32 rotates the stage 31 about a rotation axis 321 perpendicular to the upper surface 91 of the substrate 9 on the support plate 33.

  The holding unit moving mechanism 2 includes a sub-scanning mechanism 23, a base plate 24, and a main scanning mechanism 25. The sub-scanning mechanism 23 moves the substrate holder 3 in the X direction (hereinafter referred to as “sub-scanning direction”) in FIGS. 1 and 2. The base plate 24 supports the support plate 33 via the sub scanning mechanism 23. The main scanning mechanism 25 moves the substrate holder 3 together with the base plate 24 in the Y direction perpendicular to the X direction (hereinafter referred to as “main scanning direction”). In the drawing apparatus 1, the holding unit moving mechanism 2 moves the substrate holding unit 3 in the main scanning direction and the sub-scanning direction parallel to the upper surface 91 of the substrate 9.

  The sub-scanning mechanism 23 includes a linear motor 231 and a pair of linear guides 232. The linear motor 231 extends in the sub-scanning direction parallel to the main surface of the stage 31 and perpendicular to the main scanning direction on the lower side (that is, the (−Z) side) of the support plate 33. The pair of linear guides 232 extends in the sub-scanning direction on the (+ Y) side and (−Y) side of the linear motor 231. The main scanning mechanism 25 includes a linear motor 251 and a pair of air sliders 252. The linear motor 251 extends in the main scanning direction parallel to the main surface of the stage 31 below the base plate 24. The pair of air sliders 252 extends in the main scanning direction on the (+ X) side and (−X) side of the linear motor 251.

  As shown in FIG. 2, the drawing head 4 includes a plurality (eight in the present embodiment) of optical heads 41 arranged at an equal pitch along the sub-scanning direction and attached to the frame 12. Further, as shown in FIG. 1, the drawing head 4 includes a light source optical system 42 connected to each optical head 41 and a light emitting unit 48 that emits beam light. The light emitting unit 48 includes a UV light source 43 that emits the light beam, which is ultraviolet light, and a light source driving unit 44. The UV light source 43 is, for example, a solid laser. By driving the light source driving unit 44, ultraviolet light is emitted from the UV light source 43 and guided to the optical head 41 via the light source optical system 42.

  Each optical head 41 includes a light guide unit 45, optical systems 451 and 47, and a spatial light modulation device 46. The light guide unit 45 guides light from the UV light source 43 downward. The optical system 451 reflects the light from the light guide 45 and guides it to the spatial light modulation device 46. The spatial light modulation device 46 reflects the beam light from the light emitting unit 48 irradiated through the optical system 451 while spatially modulating it. The optical system 47 guides the modulated light from the spatial light modulation device 46 onto the photosensitive material provided on the upper surface 91 of the substrate 9.

  The spatial light modulation device 46 includes, for example, a plurality of light modulation elements. For example, GLV (Grating Light Valve) (registered trademark of Silicon Light Machines (Sunnyvale, Calif.)) Is used as the light modulation element. Also, a DMD (digital mirror device) may be used as the light modulation element. These light modulation elements are controlled based on a signal from the control unit 6, and thereby spatially modulated to each of a plurality of irradiation positions arranged in the X direction (that is, the sub-scanning direction) on the upper surface 91 of the substrate 9. The light beam is irradiated.

  In the drawing apparatus 1 shown in FIGS. 1 and 2, the substrate 9 moved by the holding unit moving mechanism 2 is irradiated with the beam light modulated from the spatial light modulation device 46 of the drawing head 4. In other words, the holding unit moving mechanism 2 is an irradiation position moving mechanism that moves the irradiation position on the substrate 9 of the beam light guided from the spatial light modulation device 46 to the substrate 9 relative to the substrate 9. is there. Depending on the design of the drawing apparatus 1, the irradiation position of the beam light on the substrate 9 may be moved by moving the drawing head 4 without moving the substrate 9. In the drawing apparatus 1, a pattern is drawn on the substrate 9 by controlling the drawing head 4 and the holding unit moving mechanism 2 by the control unit 6 shown in FIG. 1.

  A data correction apparatus 8 shown in FIG. 1 is a general computer system including a CPU that performs various arithmetic processes, a ROM that stores basic programs, a RAM that stores various information, and the like. FIG. 3 is a block diagram showing functions of the data correction device 8. The data correction device 8 includes a position measurement unit 80, a data correction unit 84, and a design data storage unit 85. The position measuring unit 80 that is a position measuring device includes an image storage unit 81, a calculation unit 82, and a position acquisition unit 83. The image storage unit 81 stores a captured image (data) acquired by a predetermined imaging device 5. The imaging device 5 may be a device separated from the drawing device 1 or may be provided in the drawing device 1. The calculation unit 82 includes an image processing unit 821 and a coefficient acquisition unit 822, and acquires a pixel value distribution near a predetermined region of interest in the captured image. The position acquisition unit 83 acquires the position of the attention area based on the pixel value distribution acquired by the calculation unit 82. The design data storage unit 85 stores design data indicating a pattern to be drawn on the substrate 9. The design data is typically vector data, but may be raster data. The data correction unit 84 corrects the design data based on the positions of the plurality of attention areas. In the present embodiment, the function of the data correction device 8 is realized by executing a program in a computer. However, the function may be realized entirely or partially by a dedicated electric circuit.

  In the drawing device 1, after the design data is corrected by the data correction device 8, a pattern is drawn on the substrate 9 based on the corrected design data. Hereinafter, processing related to pattern drawing by the drawing apparatus 1 will be described with reference to FIG. Note that step S11a indicated by a broken-line rectangle in FIG. 4 is performed in a processing example described later.

  In the processing related to drawing, first, on the substrate 9 on which a pattern (upper layer pattern) is to be drawn by the drawing device 1, a pattern (lower layer pattern) already formed on the main surface 91 is imaged by the imaging device 5. Is done. A multi-tone image acquired by imaging the substrate 9 (that is, a captured image) is stored in the image storage unit 81 and is prepared for processing to be described later by the data correction device 8 (step S10). In the following description, it is assumed that the captured image is an image in which a plurality of pixels are arranged in the x direction and the y direction orthogonal to each other.

  FIG. 5 is a diagram illustrating a part of the captured image. In the substrate 9, a plurality of reference parts to be used for correction of design data on the main surface 91 are determined in advance. In the image processing unit 821 of the calculation unit 82, the attention area R <b> 1 that indicates each reference part in the captured image. Is included (step S11). For example, the image processing unit 821 stores the position of each reference portion indicated by the design data of the pattern (lower layer pattern) already formed on the substrate 9, and a predetermined center around the position in the captured image. By extracting the size range, the inclusion region is acquired. The inclusion area is a rectangular area having sides parallel to the x direction and the y direction. In FIG. 5, the inclusion area is indicated by a broken-line rectangle denoted by reference numeral A1. The acquisition of the inclusion area A1 may be performed based on an operator's input or the like. In the present embodiment, the attention area R <b> 1 indicates a via that is a specific hole formed in the substrate 9. The attention area R1 in the inclusion area A1 in FIG. 5 is darker than the background, which is the area around the attention area R1. That is, the pixel value of the attention area R1 is smaller than the background pixel value. Hereinafter, an image indicating an inclusion area is referred to as an “inclusion area image”.

  When a plurality of inclusion region images respectively indicating the plurality of attention regions R1 are acquired, the calculation unit 82 obtains a pixel value distribution (that is, two-dimensional pixel values around the attention region R1 and the attention region R1) in each inclusion region image. Distribution) is modeled by a model function capable of partial differentiation (step S12). Here, in the inclusion area A1 (inclusion area image) of the captured image, the pixel value profile (hereinafter referred to as “cross-sectional profile”) on the line including the approximate center of the attention area R1 has a pixel value at the center as the outer edge. This is a downward-facing top hat shape smaller than the pixel value. The top hat shape is a substantially trapezoidal shape or a shape obtained by flattening a peak of a (one-dimensional) Gaussian distribution. Moreover, in the example shown in FIG. 5, each attention area | region R1 is substantially circular shape. Therefore, the calculation unit 82 has a substantially truncated cone shape protruding from the xy plane in a direction perpendicular to the xy plane (the direction of the axis indicating the pixel value), or a model indicating a shape obtained by flattening the peak of the two-dimensional Gaussian distribution. Function is used. In such a model function, since the cross section parallel to the xy plane has a circular shape, the model function is also referred to as a “circular model function”. In the calculation unit 82, the pixel value of the pixel represented by the coordinates (x, y) in the inclusion region image is expressed by a circular model function of Formula 5.

  The circular model function of Formula 5 indicating the distribution of pixel values of the inclusion area image includes a plurality of coefficients a, b, c, d, e, and f. The model function is a function that can be partially differentiated by the unknown coefficients a, b, c, d, e, and f. Among the plurality of coefficients a, b, c, d, e, and f, the coefficient a corresponds to the amplitude in the Gaussian function and indicates the brightness at the center of the attention area R1 indicating the hole. The coefficient b indicates the extent of the pixel corresponding to the attention area R1, that is, the size of the attention area R1. The coefficient c and the coefficient d indicate the x coordinate and y coordinate of the center (center of gravity) of the attention area R1, that is, the positions of the center in the x direction and the y direction, respectively. The coefficient e indicates the inclination at the outer edge in the cross-sectional profile of the region of interest R1, and the larger the coefficient e, the steeper the inclination of the outer edge, and the cross-sectional profile approximates an ideal top hat shape. The coefficient f indicates the brightness of the background of the attention area R1 in the inclusion area image (that is, the background offset).

  FIG. 6 is a diagram illustrating changes in the image due to changes in the coefficients b and e in the circular model function of Formula 5. Here, the coefficient a in the model function of Equation 5 is a negative value. In FIG. 6, twelve images (pixel value distribution) are arranged in 3 rows and 4 columns, and the value of the coefficient e increases from the leftmost column to the right, and from the lowermost row to the upper side. The value of coefficient b is increasing. In FIG. 6, the black area increases as the value of the coefficient b increases. It can also be seen that as the value of the coefficient e increases, the edge of the black region becomes clear and the inclination at the outer edge in the cross-sectional profile of the region of interest R1 increases.

  When the modeling of the attention area R1 is completed, the coefficient acquisition unit 822 of the calculation unit 82 determines that the values of a plurality of coefficients included in the model function (that is, the coefficients a to f in Equation 5) are pixels of the inclusion area image. The value is determined by the optimization method (step S13). The optimization method used for determining the coefficients a to f in step S13 is, for example, the Gauss-Newton method (Gauss-Newton method) or the Levenberg-Marquardt method (Levenberg-Marquardt method). In the following, the case where the coefficients a to f are determined by the Gauss-Newton method will be described first, and then the case where the coefficients a to f are determined by the Levenberg-Marquardt method will be described.

  In the Gauss-Newton method, for each inclusion area image, the coefficient when the pixel value distribution modeled in Equation 5 fits the actual pixel value distribution (of the attention area R1) in the inclusion area image most accurately. a to f are obtained by iterative calculation. In the iterative calculation, the sum of the squares of the difference between the pixel value obtained in Equation 5 and the actual pixel value of the inclusion area image for all the pixels of the inclusion area image (that is, the sum of squares of the residuals) is the minimum. The residual sum of squares is repeatedly calculated while changing the coefficients a to f so as to converge to the value.

  In step S13, first, as shown in FIG. 7, initial values a0 to f0 of a plurality of coefficients a to f are determined (step S131). Specifically, first, the region of interest R1 and the background are specified provisionally (with low accuracy) by binarizing the inclusion region image with a predetermined threshold. Note that the threshold value is a pixel value between the brightness of the attention area R1 (a representative value of a pixel value described later) and the background brightness. In the inclusion area image, a value obtained by subtracting the representative value of the background pixel value from the representative value of the central pixel value of the provisional attention area R1 is obtained as the initial value a0 of the coefficient a. Here, the representative value of the pixel value of each region is a pixel value indicating the vicinity of the center in the histogram of pixel values in the region, and is, for example, an average value or a mode value. The initial values c0 and d0 of the coefficients c and d are the x-coordinate and y-coordinate of the temporary center of the attention area R1, that is, the approximate center of the (correct) attention area R1. The initial value f0 of the coefficient f is a representative value of the background pixel value.

In calculating the initial value e0 of the coefficient e, first, a cross-sectional profile on a line that passes through the center of the provisional attention area R1 and is parallel to the x direction in the inclusion area image (that is, a line indicating y = d0) is obtained. . Further, in the cross-sectional profile, the minimum value m1 of the pixel value in the provisional attention area R1 and the mode value m2 of the pixel value in the background are obtained. Subsequently, by subtracting m2 from each pixel value of the cross-sectional profile and further dividing by (m1-m2), a top-hat profile with an amplitude of 1 (normalized) is obtained. In the profile, the pixel positions arranged in the x direction are connected by a line segment, and half of the distance in the x direction between two positions where the value (of the axis indicating the pixel value) is 0.25 is w. determined as _1, half in the x direction the distance between the values 0.75 and becomes two positions is obtained as w _2.

Here, the profile is a normalized cross-sectional profile on a line that passes through the center of the provisional region of interest R1 (y = d0). Therefore, the profile is expressed by a function in which the coefficient a is set to 1 and the coefficient f is set to 0 and (y−d) is set to 0 in Formula 5, in which (x−c) is w _1. When F (x, y) is 0.25, Equation 6 is derived, and when (x−c) is w ₂ , F (x, y) is 0.75. Is guided.

  Then, Equation 8 is obtained by transforming Equation 6 and Equation 7 and deleting b.

By substituting the values of w ₁ and w ₂ obtained from the profile into Equation 8, the initial value e0 of the coefficient e is obtained. At this time, it can be said that (w ₂ / w ₁ ) in Equation 8 substantially indicates the inclination at the outer edge in the cross-sectional profile of the region of interest R1, and the initial value e0 of the coefficient e is the inclination at the outer edge. It depends on the value. Further, the number 9 which is a modification of the number 6, by substituting the value of the initial value e0 and w ₁ of the coefficient e, the initial value b0 of the coefficient b is determined. Since w ₁ indicates the radius of an area that is equal to or smaller than the predetermined brightness in the attention area R1, the initial value b0 of the coefficient b is substantially the initial value e0 of the coefficient e and the approximate size of the attention area R1. It is calculated using.

  As described above, the initial value a0 of the coefficient a is determined based on the difference between the brightness at the center of the attention area R1 and the brightness of the background of the attention area R1 in the inclusion area image. The initial value c0 of the coefficient c is determined based on the x coordinate of the approximate center of the attention area R1. The initial value d0 of the coefficient d is determined based on the y coordinate of the approximate center of the attention area R1. The initial value f0 of the coefficient f is determined based on the background brightness of the attention area R1. The initial value e0 of the coefficient e is determined based on the inclination at the outer edge in the cross-sectional profile of the region of interest R1. The initial value b0 of the coefficient b is determined based on the initial value e0 of the coefficient e and the approximate size of the attention area R1.

  Subsequently, by solving Formula 17 using Formula 10 to Formula 15 (where Z in Formula 10 to Formula 14 is expressed by Formula 16) obtained by partial differentiation of Formula 5 with coefficients a to f, respectively. The difference values Δa to Δf, which are the change amounts when the coefficients a to f are changed for the first time in the iterative calculation, are obtained (step S132).

  In Expression 17, x and y in the mathematical expression are treated as xi and yi, and the xi and yi indicate the x coordinate and the y coordinate of the “i” th pixel. In Equation 17, since “i = 1 to m”, in step S13, iterative calculation is performed so that the sum of squares of the residuals for m pixels becomes the minimum value. The left side of Equation 17 represents the product of a 6th-order square matrix composed of six partial derivatives of Equations 10 to 15 and a 6 × 1 matrix composed of six difference values Δa to Δf, m This is the sum of the pixels. The right side of Equation 17 is a 6-by-1 matrix indicating the product of the partial differentiation of Equation 5 by coefficients a to f and the value obtained by subtracting the actual pixel value Bi from Equation 5. This is the sum of m pixels.

  When the first difference values Δa to Δf are obtained, the difference values Δa to Δf are subtracted from the initial values a0 to f0 of the coefficients a to f to obtain the values of the next coefficients a to f (step S133, S133). S134), the process returns to step S132. And the next difference value (DELTA) a- (DELTA) f is calculated | required by solving number 17 using the coefficient af (value) calculated | required in step S134, and the said next difference value is calculated from the present coefficient a-f. Δa to Δf are subtracted to obtain new coefficients a to f (steps S132 to S134). In the coefficient acquisition unit 822, steps S132 to S134 are repeated until a predetermined end condition is satisfied. The termination condition is, for example, a state in which each value of the difference values Δa to Δf obtained in step S132 is equal to or smaller than a predetermined magnitude. Alternatively, the termination condition is, for example, a state where the number of repetitions of steps S132 to S134 described above has reached a predetermined number.

  When the end condition is satisfied, the current coefficients a to f (coefficients a to f when the end condition is satisfied) are substituted into Equation 5. In this way, a plurality of coefficients a to f of the circular model function shown in Formula 5 are acquired. FIG. 8 is a diagram illustrating the pixel value distribution in the inclusion region A1 indicated by the model function from which a plurality of coefficients a to f are obtained. In FIG. 8, the pixel value distribution in the inclusion region A1 is shown superimposed on the captured image. Yes.

  Even in the case where the coefficients a to f are determined by the Levenberg-Marquardt method in step S13, as in the Gauss-Newton method, for each of a plurality of inclusion region images, the model function (modeled inclusion region) The coefficients a to f in the case where the pixel value distribution of the image fits the actual pixel value distribution in the inclusion region image with the highest accuracy are obtained by iterative calculation. In the Levenberg-Marquardt method, when appropriate coefficients a to f cannot be obtained by the Gauss-Newton method, a rough convergence of the coefficients a to f is attempted by a gradient method such as the steepest descent method, and gradually as the degree of convergence increases. The appropriate coefficients a to f are obtained by shifting to the Gauss-Newton method.

  Specifically, when steps S132 to S134 are repeated, the difference values Δa to Δf are obtained by adding the weighting coefficients only to the diagonal components of the sixth-order square matrix on the left side of Equation 17, and are obtained. When the difference values Δa to Δf are smaller than the difference values Δa to Δf obtained one time before, the weighting factor is reduced and becomes larger than the difference values Δa to Δf obtained one time ago. If this happens, the weighting factor is increased. Thereby, compared with the case where the coefficients af are calculated | required by the Gauss-Newton method, the time required for the convergence of the coefficients af can be shortened. Further, even when the initial values a0 to f0 are relatively far from the finally obtained coefficients a to f, the coefficients a to f can be obtained appropriately.

  When step S13 ends, the position acquisition unit 83 acquires the position of the region of interest R1 in the captured image based on the model function (approximate function) for each region of interest R1 from which a plurality of coefficients have been acquired (step S14). ). For example, the center of the attention area R1 indicated by the model function is acquired as the position of the attention area R1.

  In the data correction unit 84, the deformation state of the substrate 9 is acquired based on the positions of the plurality of regions of interest R1, that is, the positions of the plurality of holes. And the design data memorize | stored in the design data memory | storage part 85 are correct | amended according to a deformation | transformation of the board | substrate 9 (step S15). In the correction of the design data, for example, the position set so as to overlap with the reference portion (the portion indicated by the attention area R1) on the substrate 9 in the pattern indicated by the design data is in the vicinity of the reference portion on the actual substrate 9. The pattern is deformed so as to be arranged, and corrected design data is acquired. The corrected design data is sent to the control unit 6. In the control unit 6, the holding unit moving mechanism 2 and the spatial light modulation device 46 are controlled based on the corrected design data, and a pattern is drawn on the substrate 9 placed on the stage 31 (step S16). ). In the control unit 6, the corrected design data may be converted into data of another format as necessary.

  As described above, the calculation unit 82 of the data correction device 8 models the pixel value distribution of the attention area R1 having a top-hat cross-sectional profile with a model function that can be partially differentiated. A plurality of included coefficients are obtained by being determined by an optimization method. And the position of attention area R1 is acquired based on the model function from which a plurality of coefficients were acquired. Thereby, the position of the attention area R1 in the captured image can be measured with high accuracy. As a result, the deformation of the substrate 9 can be accurately measured based on the positions of the plurality of attention regions R1, and the design data of the pattern drawn on the substrate 9 is corrected with high accuracy in accordance with the deformation of the substrate 9. It becomes possible to do.

  Also, when the captured image has a low resolution, for example, when the entire pixel group corresponding to the provisional attention region R1 obtained by binarizing the captured image is included in a square region with one side of 10 pixels or less Even in the case of the data correction device 8 using the model function, the function indicating the attention area R1 can be obtained with high accuracy, and the position of the attention area R1 can be obtained with high accuracy.

  In the data correction device 8, the optimization method for determining the plurality of coefficients a to f included in the model function in the calculation unit 82 is the Gauss-Newton method or the Levenberg-Marquardt method. Thereby, the influence of noise or the like in the captured image can be suppressed, and a plurality of coefficients in the model function can be obtained with high accuracy.

  In the calculation unit 82, the initial value f0 of the coefficient f is determined based on the background brightness of the attention area R1 in the captured image, and the initial value e0 of the coefficient e is the slope at the outer edge in the cross-sectional profile of the attention area R1. To be determined. The initial value a0 of the coefficient a is determined based on the difference between the brightness of the attention area R1 and the brightness of the background, and the initial value b0 of the coefficient b is approximately equal to the initial value e0 of the coefficient e and the attention area R1. Is determined based on the size of. Furthermore, initial values c0 and d0 of the coefficients c and d are determined based on the x coordinate and the y coordinate of the approximate center of the attention area R1, respectively. Thereby, the initial values a0 to f0 of the coefficients a to f can be determined easily and appropriately. As a result, the coefficients a to f can be determined with high accuracy, and a function indicating the attention area R1 can be obtained with high accuracy.

  Next, another example of processing in which step S11a indicated by a broken-line rectangle in FIG. 4 is performed will be described. In this processing example, a circular pad that is a part of the pattern on the substrate 9 is a reference part, and the image processing unit 821 of the calculation unit 82 includes an inclusion region image including each region of interest indicating a specific pad. Cut out from the captured image (step S11). The pad is usually used as an electrode.

  FIG. 9 is a diagram illustrating an inclusion area image. In the inclusion area image, the pattern area R0 indicating the pattern on the substrate 9 includes the attention area R1 and the wiring area R2. The attention area R1 indicates a pad on the substrate 9, and the wiring area R2 indicates a wiring portion formed of the same material as the pad. The attention area R1 is connected to the wiring area R2. Further, the attention area R1 and the wiring area R2 are brighter than the background. That is, the pixel values of the attention area R1 and the wiring area R2 are larger than the background pixel value. Furthermore, the background includes a relatively light first background region H1 and a relatively dark second background region H2. FIG. 9 shows the difference in brightness between the regions by changing the width of the parallel diagonal lines in each region, and the darker the parallel diagonal lines are, the darker the width is.

  In the image processing unit 821, the inclusion region image is binarized with a predetermined threshold value, so that the region of interest R1, the wiring region R2, and the background are provisionally divided (with low accuracy) as shown in FIG. A binary image shown separately is acquired. Subsequently, contraction processing is performed on the binary image. At this time, the contraction process is performed to such an extent that pixels of half or more of the width of the wiring region R2 (the width in the y direction in FIG. 10) contract at the edge of the white region, and as shown in FIG. The removed contracted binary image is acquired. Then, by performing an expansion process on the contracted binary image to the same extent as the contraction process, a binary target area image indicating only the temporary target area R1 is acquired as shown in FIG. . In the expansion process, the white area is expanded by the same number of pixels as the number of pixels contracted by the contraction process.

Subsequently, using the attention area image of FIG. 12, an edge is extracted from the inclusion area image while masking the attention area R1 in the inclusion area image of FIG. The extraction of the edge in the inclusion area image is performed by a plurality of binarization processes using a plurality of threshold values for the inclusion area image, a differential filter process for the inclusion area image, or the like. Thereby, the inclusion region image is divided into the provisional attention region R1, the wiring region R2, the first background region H1, and the second background region H2. The representative value _{D R1} of the pixel values of the provisional target region R1, the representative value _{D H1} of the pixel values of the first background region H1, and the representative value _{D H2} of the second pixel value of the background region H2 is obtained. Then, the pixel value V of each pixel included in the first background region H1 is converted into a new pixel value V ′ by Equation 18.

  As described above, the preprocessing by the image processing unit 821 is performed on the inclusion region image indicating the inclusion region of the captured image, and a new inclusion region whose background has approximately uniform brightness as illustrated in FIG. 13. An image (hereinafter referred to as “processed inclusion region image”) is generated (step S11a). In the processed inclusion region image, the wiring region R2 is masked and is not used in the processing after step S12 (is excluded from the calculation target). Therefore, the wiring region R2 does not become an error factor in determining the coefficient described later. FIG. 13 shows that the wiring region R2 is masked by cross-hatching the wiring region R2.

  When a plurality of processed inclusion area images indicating a plurality of attention areas R1 are acquired, in the same manner as in the above-described processing example, the calculation unit 82 uses a model function in which the pixel value distribution in each processed inclusion area image can be partially differentiated. (Step S12). In the processed inclusion area image, the attention area R1 has a substantially circular shape, and the cross-sectional profile of the attention area R1 has an upward top hat shape in which the pixel value at the center is larger than the pixel value at the outer edge. Therefore, as in the above processing example, a circular model function of Formula 5 is used. In other words, the model function of Formula 5 can be used by the preprocessing.

  FIG. 14 is a diagram illustrating changes in the image due to changes in the coefficients b and e in the model function. Here, the coefficient a in the model function of Equation 5 is a positive value. In FIG. 14, nine images (pixel value distribution) are arranged in 3 rows and 3 columns, the value of the coefficient e increases from the leftmost column to the right side, and from the lowermost row to the upper side. The value of coefficient b is increasing. In FIG. 14, the white area increases as the value of the coefficient b increases. It can also be seen that as the value of the coefficient e increases, the edge of the white region becomes clear and the inclination at the outer edge in the cross-sectional profile of the region of interest R1 increases.

  In the coefficient acquisition unit 822 of the calculation unit 82, as in the above processing example, a plurality of coefficients a to f included in the model function of Formula 5 are determined by the optimization method using the pixel values of the processed inclusion region image. Is acquired (step S13).

At this time, in the calculation of the initial value e0 of the coefficient e, first, on the processed inclusion region image, it passes through the center of the provisional attention region R1 and is parallel to the x direction (that is, a line indicating y = d0). A cross-sectional profile is determined. Further, in the cross-sectional profile, the maximum value m1 of the pixel value in the provisional attention area R1 and the mode value m2 of the pixel value in the background are obtained. Subsequently, by subtracting m2 from each pixel value of the cross-sectional profile and further dividing by (m1-m2), a top-hat profile with an amplitude of 1 (normalized) is obtained. In this profile, pixel positions arranged in the x direction are connected by line segments, and half of the distance in the x direction between two positions where the value (of the axis indicating the pixel value) is 0.25 is w _1. sought, half the value of the x-direction distance between the two positions of 0.75 is obtained as w _2. Then, the initial value e0 of the coefficient e is obtained by substituting the values of w ₁ and w ₂ into the above-described number 8, and the initial values e0 and w ₁ of the coefficient e are substituted into the above-described number 9 By doing so, the initial value b0 of the coefficient b is obtained. The calculation method of the initial values of the other coefficients a, c, d, and f is the same as the above processing example.

  When step S13 ends, the position acquisition unit 83 acquires the position of the region of interest R1 in the captured image based on the model function for each region of interest R1 from which a plurality of coefficients have been acquired (step S14). In the data correction unit 84, the deformation state of the substrate 9 is acquired based on the positions of the plurality of attention areas R1, and the design data is corrected in accordance with the deformation of the substrate 9 (step S15). Then, a pattern is drawn on the substrate 9 based on the corrected design data (corrected design data) (step S16).

  As described above, in this processing example, the attention area R1 is a part of the pattern area R0 in the captured image, and the attention area R1 is a part of the pattern area R0 (here, the wiring area R2). In the case of connection, the other part of the pattern region R0 is masked by the image processing unit 821 of the calculation unit 82. Then, based on the image processed by the image processing unit 821, the coefficient acquisition unit 822 acquires a plurality of coefficients of the model function representing the attention area R1. Thereby, even when the attention area R1 is connected to another part of the pattern area R0, the coefficient of the model function can be obtained appropriately, and the position of the attention area R1 in the captured image is measured with high accuracy. can do. Also, by making the background brightness uniform, the model function can be used appropriately.

  Next, still another processing example in the drawing apparatus 1 will be described. In this processing example, a substantially square pad on the substrate 9 is a reference portion, and the image processing unit 821 of the calculation unit 82 cuts out an inclusion region image including each region of interest indicating a specific pad from the captured image. (Step S11).

  FIG. 15 is a diagram illustrating an inclusion area image. The pad, which is a reference site on the substrate 9, has a hole (via) formed in the center, and a hole area R 3 indicating a hole is included in the attention area R 1 of the inclusion area image. In addition, the attention area R1 is brighter than the background and the hole area R3, which are areas around the attention area R1. That is, the pixel value of the attention area R1 is larger than the pixel value of the background and the hole area R3. Two orthogonal sides of the pad on the substrate 9 are approximately parallel to the x and y directions in the inclusion region image.

  The image processing unit 821 binarizes the inclusion region image with a predetermined threshold value, thereby obtaining a binary image indicating the temporary attention region R1 and the hole region R3. Subsequently, the representative value of the pixel value in the region excluding the hole region R3 in the provisional attention region R1 in the inclusion region image is acquired. In addition, an expansion process for expanding the hole region R3 is performed on the binary image, whereby the hole region R3 that has been subjected to the expansion process is acquired. Then, the pixel value in the hole region R3 that has been subjected to the expansion process in the inclusion region image is converted into a representative value of the pixel value. Thereby, as shown in FIG. 16, a processed inclusion region image in which the entire attention region R1 is bright is acquired (step S11a). In the processed inclusion area image, the cross-sectional profile of the attention area R1 has an upward top hat shape in which the pixel value at the center is larger than the pixel value at the outer edge.

  When a plurality of processed inclusion region images indicating a plurality of attention regions R1 are acquired, the calculation unit 82 models the pixel value distribution in each processed inclusion region image with a model function capable of partial differentiation ( Step S12). Here, in the processed inclusion area image, the attention area R1 has a substantially square shape. Therefore, the calculation unit 82 uses a model function indicating a substantially quadrangular frustum shape protruding from the xy plane in a direction perpendicular to the xy plane (the direction of the axis indicating the pixel value). In such a model function, since the cross section parallel to the xy plane has a substantially square shape, the model function is also referred to as a “substantially square model function”. In the calculation unit 82, the pixel value of the pixel represented by the coordinates (x, y) in the inclusion region image is expressed by a substantially square model function (where n is a natural number of 2 or more). . In this processing example, n is 2.

  The substantially square model function of Formula 19 indicating the distribution of pixel values of the inclusion area image includes a plurality of coefficients a, b, c, d, e, and f. The model function is a function that can be partially differentiated by the unknown coefficients a, b, c, d, e, and f. Among the plurality of coefficients a, b, c, d, e, and f, the coefficient a corresponds to the amplitude in the Gaussian function and indicates the brightness (swell) at the center of the attention area R1 in the processed inclusion area image. The coefficient b indicates the extent of the pixel corresponding to the attention area R1, that is, the size of the attention area R1. The coefficient c and the coefficient d indicate the x and y coordinates of the center of the attention area R1, that is, the positions of the center in the x direction and the y direction, respectively. The coefficient e indicates the inclination at the outer edge in the cross-sectional profile of the region of interest R1, and the larger the coefficient e, the steeper the inclination of the outer edge, and the cross-sectional profile approximates an ideal top hat shape. The coefficient f indicates the brightness of the background of the attention area R1 in the processed inclusion area image (that is, the background offset).

  When the modeling of the attention area R1 is completed, the calculation unit 82 optimizes the plurality of coefficients included in the model function (that is, the coefficients a to f in Equation 19) using the pixel values of the processed inclusion area image. It is determined by the conversion method (step S13). The optimization method used for determining the coefficients a to f in step S13 is, for example, the Gauss-Newton method or the Levenberg-Marquardt method described above. In step S13, in the same manner as described above, for each processed inclusion area image, the pixel value distribution modeled in Equation 19 fits the actual pixel value distribution in the processed inclusion area image most accurately. The coefficients a to f are obtained by iterative calculation.

  The determination of the coefficient of the model function by the Gauss-Newton method and the determination of the coefficient of the model function by the Levenberg-Marquardt method are substantially the same as the above-described steps S131 to S134 (see FIG. 7). In the determination of the initial values a0 to f0 of the plurality of coefficients a to f in step S131, as described above, in the processed inclusion region image (see FIG. 16), representative pixel values at the center of the temporary attention region R1 are represented. A value obtained by subtracting the representative value of the background pixel value from the value is obtained as the initial value a0 of the coefficient a. The initial values c0 and d0 of the coefficients c and d are the x-coordinate and y-coordinate of the temporary center of the attention area R1, that is, the approximate center of the (correct) attention area R1. The initial value f0 of the coefficient f is a representative value of the background pixel value.

In the calculation of the initial value e0 of the coefficient e, an integrated pixel value profile is obtained by integrating pixel values of a plurality of pixels arranged in the y direction at each position in the x direction in the processed inclusion region image. In the integrated pixel value profile, the maximum value m1 of the integrated pixel value at the position corresponding to the provisional attention area R1 and the mode m2 of the integrated pixel value at the position corresponding to the background are obtained. Subsequently, by subtracting m2 from each integrated pixel value of the integrated pixel value profile and further dividing by (m1-m2), a top-hat profile with an amplitude of 1 (normalized) is obtained. In the profile, pixel positions arranged in the x direction are connected by line segments, and half of the distance in the x direction between two positions where the value is 0.25 is obtained as w ₁ , and the value is 0.75. half the distance in the x direction between the two positions a is obtained as w _2. Then, by substituting the values of w ₁ and w ₂ into Equation 8, the initial value e0 of the coefficient e is obtained, and by substituting the values of the initial value e0 and w ₁ of the coefficient e into Equation 9, the coefficient b The initial value b0 is obtained. The accumulated pixel value profile is approximately equivalent to a cross-sectional profile on a line passing through the center of the provisional attention area R1. Of course, the initial values e0 and b0 of the coefficients e and b may be obtained from the cross-sectional profile.

  In step S132, Equation 17 is solved by using Equation 20 to Equation 25 (where Z in Equation 20 to Equation 24 is represented by Equation 26) obtained by partial differentiation of Equation 19 with coefficients a to f. Thus, the difference values Δa to Δf, which are the change amounts when the coefficients a to f are changed for the first time in the iterative calculation, are obtained (step S132).

  When the first difference values Δa to Δf are obtained, the difference values Δa to Δf are subtracted from the initial values a0 to f0 of the coefficients a to f to obtain the next coefficients a to f (steps S133 and S134). Return to step S132. Then, the next difference values Δa to Δf are obtained by solving the equation 17 using the coefficients a to f obtained in step S134, and the next difference values Δa to Δf are obtained from the current coefficients a to f. Subtraction is performed to obtain new coefficients a to f (steps S132 to S134). In the coefficient acquisition unit 822, steps S132 to S134 are repeated until a predetermined end condition is satisfied.

  When the end condition is satisfied, the current coefficients a to f (coefficients a to f when the end condition is satisfied) are substituted into Equation 19. In this manner, a plurality of coefficients a to f of the model function shown in Expression 19 (that is, a substantially square model function) are acquired. FIG. 17 is a diagram illustrating a pixel value distribution in an inclusion region indicated by a model function from which a plurality of coefficients a to f are acquired.

  When step S13 ends, the position acquisition unit 83 acquires the position of the region of interest R1 in the captured image based on the model function for each region of interest R1 from which a plurality of coefficients have been acquired (step S14). In the data correction unit 84, the deformation state of the substrate 9 is acquired based on the positions of the plurality of regions of interest R1, that is, the positions of the plurality of pads, and the design data is corrected in accordance with the deformation of the substrate 9 (step S15). ). Then, a pattern is drawn on the substrate 9 based on the corrected design data (corrected design data) (step S16).

  As described above, in this processing example, when the attention area R1 is a part of the pattern area R0 in the captured image and the area on the substrate 9 corresponding to the attention area R1 includes a hole, image processing is performed. The portion 821 replaces the pixel value of the hole region R3 indicating the hole with the pixel value of another region of the attention region R1. Then, based on the image processed by the image processing unit 821, the coefficient acquisition unit 822 acquires a plurality of coefficients of the model function representing the attention area R1. Thereby, even when the attention area R1 includes the hole area R3, the coefficient of the model function can be obtained appropriately, and the position of the attention area R1 in the captured image can be measured with high accuracy.

  Further, in the calculation unit 82, the initial value f0 of the coefficient f is determined based on the background brightness of the attention area R1 in the captured image, and the initial value e0 of the coefficient e is the outer edge portion in the cross-sectional profile of the attention area R1. It is determined based on the inclination of. The initial value a0 of the coefficient a is determined based on the difference between the brightness of the attention area R1 and the brightness of the background, and the initial value b0 of the coefficient b is approximately equal to the initial value e0 of the coefficient e and the attention area R1. Is determined based on the size of. Furthermore, initial values c0 and d0 of the coefficients c and d are determined based on the x coordinate and the y coordinate of the approximate center of the attention area R1, respectively. Thereby, the initial values a0 to f0 of the coefficients a to f can be determined easily and appropriately. As a result, the coefficients a to f can be determined with high accuracy, and a function indicating the attention area R1 can be obtained with high accuracy.

  The drawing apparatus 1 and the data correction apparatus 8 can be variously changed.

  The number 19 representing the approximately square model function can be partially differentiated if the value raised to the power of n is a positive value. In this case, n may be a real number larger than 1. That is, Equation 19 representing a substantially square model function can be modified as Equation 27, where n is a real number larger than 1.

  The plurality of coefficients a to f included in the model functions shown in the above equations 5, 19, and 27 may be obtained by various optimization methods other than the Gauss-Newton method and the Levenberg-Marquardt method. Even in this case, the function indicating the attention area R1 can be obtained with high accuracy in the same manner as described above.

  A partial differentiable function other than Expression 5 may be used as the circular model function, and a partial differentiable function other than Expressions 19 and 27 may be used as the substantially square model function. In addition to the circular shape and the substantially square shape, the shape of the attention area R1 may be an elliptical shape or a substantially rectangular shape in which the lengths of two substantially orthogonal sides are different. The elliptical model function and the substantially rectangular model function are prepared by appropriately modifying the circular model function and the substantially square model function. As described above, the data correction device 8 models the pixel value distribution of the attention area R1 in the captured image including the attention area R1 having a substantially rectangular shape, a circular shape, or an elliptical shape with a model function that can be partially differentiated. This makes it possible to measure the position of the substantially rectangular, circular, or elliptical attention area R1 in the captured image with high accuracy.

  In the calculation unit 82, for example, the entire image in FIG. 5 may be handled as an inclusion region image. In this case, the image processing unit 821 binarizes the image of FIG. 5 with a predetermined threshold value, so that a temporary pad region, a temporary hole region (attention region R1) in the pad region, and The pad surrounding area around the pad area is acquired. Then, the pixel value of the pixel in the pad peripheral area is replaced with the representative value of the pixel value in the area excluding the hole area in the pad area. Thereby, in the inclusion area image, the entire area excluding the attention area R1 can be handled as the background, and a plurality of coefficients of the model function indicating the pixel value distribution in the entire inclusion area image can be appropriately acquired. It becomes.

  The attention area R1 may indicate a portion on the substrate 9 other than the pad and the hole (via or through hole). Further, the correction of the design data of the pattern drawn on the substrate 9 may be performed based on the positions of the plurality of attention regions R1 that respectively indicate different types of reference parts.

  In the drawing apparatus 1, a pattern may be drawn on a glass substrate for a flat panel display device such as a liquid crystal display device, a glass substrate for a photomask, or another type of substrate such as a semiconductor substrate. The data correction device 8 in the drawing apparatus 1 can be used for correcting design data of patterns drawn on various types of substrates.

  The position measurement unit 80 in the data correction device 8 may be used alone as a position measurement device. In the position measurement device, the position of a region of interest included in an image obtained by imaging various objects other than the substrate is measured. Good. For example, in the position measurement device, the position of a region of interest indicating a cell may be measured in a cell image obtained by imaging a cell in a predetermined liquid such as blood or a culture solution.

  The configurations in the above-described embodiments and modifications may be combined as appropriate as long as they do not contradict each other.

DESCRIPTION OF SYMBOLS 8 Data correction apparatus 9 Board | substrate 80 Position measurement part 81 Image storage part 82 Calculation part 83 Position acquisition part 84 Data correction part 821 Image processing part 822 Coefficient acquisition part H1, H2 Background area R0 Pattern area R1 Attention area R2 Wiring area R3 Hole Steps S10 to S16, S11a, S131 to S134

Claims (14)

A position measurement device that measures the position of a region of interest included in an image obtained by imaging an object,
An image storage unit that captures an image of an object and stores an image including a substantially rectangular, circular, or elliptical region of interest;
The cross-sectional profile of the region of interest in the image is a top hat shape, and the pixel value distribution of the region of interest is modeled with a model function that can be partially differentiated, and a plurality of coefficients included in the model function are optimized by the optimization method. An arithmetic unit to be acquired by determining;
A position acquisition unit that acquires the position of the region of interest based on the model function from which the plurality of coefficients are acquired;
A position measuring device comprising: The position measuring device according to claim 1,
A position measuring apparatus, wherein the optimization method is a Gauss-Newton method or a Levenberg-Marquardt method. The position measuring device according to claim 1 or 2,
In the calculation unit, the pixel value distribution of the region of interest is represented by a circular model function shown in Equation 1,
For a, b, c, d, e, and f in Equation 1, which are the plurality of coefficients,
An initial value of the coefficient f is determined based on the background brightness of the region of interest in the image;
An initial value of the coefficient e is determined based on an inclination at an outer edge in the cross-sectional profile of the region of interest;
An initial value of the coefficient a is determined based on the difference between the brightness of the region of interest and the brightness of the background;
An initial value of the coefficient b is determined based on the initial value of the coefficient e and the size of the region of interest;
An initial value of the coefficient c is determined based on the x coordinate of the approximate center of the region of interest;
An initial value of the coefficient d is determined based on the y-coordinate of the approximate center of the region of interest. The position measuring device according to claim 1 or 2,
In the calculation unit, the pixel value distribution of the region of interest is expressed by a substantially square model function (where n is a real number greater than 1) represented by Equation 2,
Regarding a, b, c, d, e, and f in Equation 2, which are the plurality of coefficients,
An initial value of the coefficient f is determined based on the background brightness of the region of interest in the image;
An initial value of the coefficient e is determined based on an inclination at an outer edge in the cross-sectional profile of the region of interest;
An initial value of the coefficient a is determined based on the difference between the brightness of the region of interest and the brightness of the background;
An initial value of the coefficient b is determined based on the initial value of the coefficient e and the size of the region of interest;
An initial value of the coefficient c is determined based on the x coordinate of the approximate center of the region of interest;
An initial value of the coefficient d is determined based on the y-coordinate of the approximate center of the region of interest. The position measuring device according to any one of claims 1 to 4,
The object is a substrate on which a pattern is formed;
The position measuring device, wherein the region of interest indicates a part of the pattern or a hole formed in the substrate. The position measuring device according to claim 5,
The region of interest is a part of a pattern region indicating the pattern in the image;
The computing unit is
When the attention area is connected to another part of the pattern area, the other part of the pattern area is masked, or the area on the substrate corresponding to the attention area includes a hole. An image processing unit that replaces a pixel value of a region indicating the hole with a pixel value of another region of the region of interest;
A coefficient acquisition unit that acquires the plurality of coefficients based on an image processed by the image processing unit;
A position measuring device comprising: A data correction apparatus for correcting design data of a pattern drawn on a substrate,
The position measuring device according to any one of claims 1 to 6, which measures a position of a region of interest included in an image obtained by imaging a substrate;
A data correction unit that corrects design data of a pattern drawn on the substrate based on the position of the region of interest;
A data correction apparatus comprising: A position measurement method for measuring the position of a region of interest included in an image obtained by capturing an object,
a) obtaining an image of an object and preparing an image including a substantially rectangular, circular, or elliptical region of interest;
b) The cross-sectional profile of the region of interest in the image has a top hat shape, the pixel value distribution of the region of interest is modeled with a model function that can be partially differentiated, and a plurality of coefficients included in the model function are optimized Acquiring by deciding in
c) obtaining the position of the region of interest based on the model function from which the plurality of coefficients have been obtained;
A position measuring method comprising: The position measuring method according to claim 8,
The position measuring method, wherein the optimization method is a Gauss-Newton method or a Levenberg-Marquardt method. The position measurement method according to claim 8 or 9, wherein
In the step b), the pixel value distribution of the region of interest is expressed by a circular model function shown in Equation 3,
For a, b, c, d, e, and f in Equation 3, which are the plurality of coefficients,
An initial value of the coefficient f is determined based on the background brightness of the region of interest in the image;
An initial value of the coefficient e is determined based on an inclination at an outer edge in the cross-sectional profile of the region of interest;
An initial value of the coefficient a is determined based on the difference between the brightness of the region of interest and the brightness of the background;
An initial value of the coefficient b is determined based on the initial value of the coefficient e and the size of the region of interest;
An initial value of the coefficient c is determined based on the x coordinate of the approximate center of the region of interest;
An initial value of the coefficient d is determined based on the y-coordinate of the approximate center of the region of interest. The position measurement method according to claim 8 or 9, wherein
In the step b), the pixel value distribution of the region of interest is expressed by a substantially square model function (where n is a real number greater than 1) shown in Equation 4,
For a, b, c, d, e, and f in Equation 4, which are the plurality of coefficients,
An initial value of the coefficient f is determined based on the background brightness of the region of interest in the image;
An initial value of the coefficient e is determined based on an inclination at an outer edge in the cross-sectional profile of the region of interest;
An initial value of the coefficient a is determined based on the difference between the brightness of the region of interest and the brightness of the background;
An initial value of the coefficient b is determined based on the initial value of the coefficient e and the size of the region of interest;
An initial value of the coefficient c is determined based on the x coordinate of the approximate center of the region of interest;
An initial value of the coefficient d is determined based on the y-coordinate of the approximate center of the region of interest. The position measuring method according to any one of claims 8 to 11,
The object is a substrate on which a pattern is formed;
The position measurement method, wherein the region of interest indicates a part of the pattern or a hole formed in the substrate. The position measuring method according to claim 12, comprising:
The region of interest is a part of a pattern region indicating the pattern in the image;
Step b)
b1) Masking the other part of the pattern area when the attention area is connected to another part of the pattern area, or the area on the substrate corresponding to the attention area includes a hole Replacing the pixel value of the region indicating the hole with the pixel value of the other region of the region of interest;
b2) acquiring the plurality of coefficients based on the processed image in the step b1);
A position measuring method comprising: A data correction method for correcting design data of a pattern drawn on a substrate,
The position measurement method according to any one of claims 8 to 13, which measures the position of a region of interest included in an image obtained by imaging a substrate,
Correcting the design data of the pattern drawn on the substrate based on the position of the region of interest;
A data correction method comprising: