JP6345979B2 - Inspection table - Google Patents

Description

  The present invention relates to an inspection table for mounting and inspecting a metal mask used in a manufacturing process of an organic EL element or the like.

  Conventionally, a glass measurement table provided with a flatness adjusting mechanism for adjusting the flatness of a glass plate on which an inspection object is placed is known (for example, see Patent Document 1). According to this glass measurement table, it is possible to inspect the inspection object in a state where the flat surface of the glass plate is not bent.

Japanese Patent Laid-Open No. 9-033207

  However, this glass measurement table has a problem that the glass plate is easily damaged because the inspection object is directly placed on the glass plate during the inspection.

  Here, it is conceivable that the inspection object is not placed directly on the glass plate so as not to damage the glass plate, but in this case, it is difficult to support the inspection object without deforming it.

  The objective of this invention is providing the inspection table which can reduce a deformation | transformation of a test target object while reducing the possibility that a glass plate may be damaged in the case of a test | inspection.

The inspection table of the present invention is an inspection table in which a plurality of placement mechanisms for placing a rectangular flat plate-shaped metal mask are arranged on the rectangular plate member along the outer periphery of the rectangular plate member. The placement mechanism includes a placement portion having a placement surface on which the metal mask is placed, and a first pedestal that supports the placement portion and has a first curved surface with a predetermined curvature on the rectangular plate member side. And a second curved surface having a curvature corresponding to the predetermined curvature on the first pedestal portion side and movable in the normal direction of the rectangular plate member A second pedestal portion, wherein the second pedestal portion supports the first pedestal portion in a swingable manner by sliding the first curved surface on the second curved surface. And

  Further, in the inspection table of the present invention, the first pedestal portion includes a cylindrical hollow portion at the center, and the second pedestal portion includes a protruding portion that is inserted into the hollow cylindrical portion at the center. And a predetermined gap is formed between the inner wall surface of the cavity portion and the outer wall surface of the protrusion portion in a state where the protrusion portion is inserted into the cavity portion.

  In the inspection table of the present invention, the first curved surface is a convex curved surface that gradually increases as the distance from the center increases, and the second curved surface is a concave curved surface that gradually increases as the distance from the center increases. It is characterized by.

  In the inspection table of the present invention, the first curved surface is a concave curved surface that gradually decreases as the distance from the center increases, and the second curved surface is a convex curved surface that gradually decreases as the distance from the center increases. It is characterized by.

The inspection table of the present invention is characterized in that the rectangular plate-like member is formed by a pair of upper glass plate and lower glass plate stacked one above the other.

  According to the inspection table of the present invention, it is possible to reduce the possibility of the glass measurement table being damaged during the inspection and to reduce the deformation of the inspection object.

It is a perspective view which shows the test | inspection table which concerns on 1st Embodiment. It is sectional drawing of the piece arrange | positioned at the test | inspection table which concerns on 1st Embodiment. It is a figure which shows the case where the piece which cannot adjust the inclination of a mounting part is arrange | positioned in the test | inspection table which concerns on 1st Embodiment. It is a perspective view which shows the test | inspection table which concerns on 2nd Embodiment. It is a perspective view which shows the test | inspection table which concerns on embodiment.

  Hereinafter, the inspection table according to the first embodiment will be described with reference to the drawings, taking as an example an inspection table for inspecting a metal mask used in a manufacturing process of an organic EL element or the like. FIG. 1 is a perspective view showing an inspection table according to the first embodiment. As shown in FIG. 1, the inspection table 2 adjusts the inclination angle of a flat pair of transparent upper glass plate 4, lower glass plate 6, and upper glass plate 4 formed in a rectangular shape and stacked vertically. A plurality of flatness adjusting mechanisms 8 and a plurality of pieces 10 on which the metal mask 9 is placed are provided.

  Here, on the inspection table 2, the flatness adjusting mechanism 8 is arranged in a lattice shape, and the cylindrical piece 10 is arranged along the outer periphery of the upper glass plate 4.

  FIG. 2 is a cross-sectional view of the piece 10 arranged on the inspection table 2 according to the first embodiment. As shown in FIG. 2, an arrangement hole 11 for arranging the piece 10 is formed in the upper glass plate 4, and the piece 10 is arranged in the arrangement hole 11. In addition, an alignment hole 6 a used for alignment when fixing the piece 10 is provided at a position corresponding to the arrangement hole 11 of the lower glass plate 6.

  Further, the piece 10 includes a disk-shaped base bolt 12 having a head fixed to the lower glass plate 6, a second pedestal portion 16 disposed on the base bolt 12, and an upper portion of the second pedestal portion 16. The first pedestal 18 placed on the base, the removal prevention plate 23 for preventing the removal of the first pedestal 18, the base bolt 12, the removal prevention plate 23, and the second pedestal 16 are respectively placed at predetermined positions. A lock nut 20 for fixing the metal mask 9 and a mounting portion 22 for mounting the metal mask 9 are provided.

  Here, the mounting portion 22 is a disk-shaped member formed of acrylic resin or the like, and has a mounting surface 22a on which the metal mask 9 is mounted. In addition, the mounting portion 22 has a fixing surface 22 b that fixes the mounting portion 22 to the first pedestal portion 18 on the lower side.

  Further, a columnar protruding portion 12 a that is inserted into the alignment hole 6 a when the piece 10 is fixed is formed at the lower center portion of the head of the base bolt 12. In addition, the outer peripheral part of the protrusion part 12a functions as the annular contact surface 12b that contacts the lower glass plate 6 when the piece 10 is fixed. Here, the contact surface 12b is fixed to the lower glass plate 6 using an adhesive.

  Further, a screw portion 14 having a thread groove on the outer periphery is formed at the upper center portion of the base bolt 12.

  The second pedestal portion 16 is a disk-shaped member having a hollow portion 16a at the center, and a screw groove that is screwed with the screw groove of the screw portion 14 is formed on the inner peripheral surface of the hollow portion 16a. Yes. For this reason, by rotating the second pedestal portion 16 about the axis of the screw portion 14, the second pedestal portion 16 can be moved in the vertical direction along the axial direction of the screw portion 14. The height of the mounting portion 22 can be adjusted via the pedestal portion 18.

  Further, a cylindrical projecting portion 16b is formed at the upper center portion of the second pedestal portion 16, and an annular smooth second curved surface 16d is formed outside the outer peripheral wall 16c of the projecting portion 16b. Yes. Here, the second curved surface 16d has a predetermined curvature, and is formed in a concave shape that gradually increases as the distance from the center increases.

  The first pedestal portion 18 is an annular member that supports the placement portion 22, includes a fixed surface 18 a that fixes the placement portion 22 on the upper side, and contacts the second curved surface 16 d on the lower side. An annular smooth first curved surface 18b is provided. Here, the first curved surface 18b has a curvature corresponding to the curvature of the second curved surface 16d, and is formed in a convex shape that gradually increases as the distance from the center increases. Since the second curved surface 16d and the first curved surface 18b are smooth and the friction coefficient between the two curved surfaces is small, the first curved surface 18b abuts against the second curved surface 16d in a slidable state.

  Further, an inner peripheral wall 18c having a predetermined height is formed on the inner peripheral surface side of the annular portion below the first pedestal 18. In addition, a predetermined gap 24 is provided between the inner peripheral wall 18 c and the outer peripheral wall 16 c of the protruding portion 16 b of the second pedestal portion 16, and the first pedestal portion 18 is swung by the second pedestal portion 16. Supported as possible. Therefore, when the metal mask 9 is placed on the piece 10 during the inspection, the inclination angle of the placement portion 22 can be adjusted to the inclination angle of the placement portion 22 of the metal mask 9 via the first pedestal portion 18. In addition, the entire mounting surface 22 a of the mounting portion 22 can be brought into contact with the metal mask 9.

  In addition, when the 1st base part 18 inclines beyond a predetermined inclination angle, the inner peripheral wall 18c of the 1st base part 18 contact | abuts to the outer peripheral wall 16c of the protrusion part 16b, and the 1st base part 18 Is prevented from tilting further. Thereby, it can prevent that the 1st base part 18 inclines more than necessary, and can incline the mounting part 22 in the range of an appropriate inclination angle.

  According to the inspection table 2 according to the first embodiment, the metal mask 9 is not placed directly on the upper glass plate 4 but placed on the piece 10 for inspection, so that the upper glass plate 4 is inspected at the time of inspection. The risk of scratching can be reduced.

  Further, by bringing the entire mounting surface 22a into contact with the metal mask 9 at the time of inspection, it is possible to prevent measurement errors from occurring at each inspection. For example, as shown in FIG. 3, when a piece 29 for which the inclination of the placement unit 22 cannot be adjusted is arranged on the inspection table 2, the placement of each piece 29 is caused by an assembly error or the like when the piece 29 is assembled. There may be variations in the inclination of the portion 22. In this case, since the contact portion A between the metal mask 9 and the mounting surface 22a becomes a point, the metal mask 9 is deformed due to the point. When the placement position of the metal mask 9 is shifted for each inspection, the position of deformation that occurs in the metal mask 9 changes with the displacement of the placement position.

  However, when the piece 10 (see FIG. 2) according to the first embodiment is used, the entire surface of the mounting surface 22a contacts the metal mask 9, so that deformation due to spotting does not occur in the metal mask 9. Even when the placement position of the metal mask 9 is shifted for each inspection, the deformation position of the metal mask 9 does not change. For this reason, the measurement error for each inspection can be reduced, and the accuracy of the inspection can be improved.

  Even when the metal mask 9 is inspected using different inspection tables 2, the deformation position of the metal mask 9 does not change for each inspection table 2, and the measurement error for each inspection table 2 can be reduced. .

  Next, an inspection table according to the second embodiment will be described. The inspection table according to the second embodiment uses a metal mask placed on a ceramic plate having a rectangular opening at the center without using a piece as in the first embodiment. Is to do.

  FIG. 4 is a perspective view showing an inspection table according to the second embodiment. As shown in FIG. 4, the inspection table 200 includes a frame 32 on which a metal mask that is an inspection object is placed, and a plurality of height adjustment mechanisms 34 that adjust the inclination angle of the frame 32 by moving the frame 32 up and down. It has. Here, the frame 32 is a ceramic frame for placing a metal mask to be inspected, and a rectangular opening 32a is formed at the center. Further, the height adjusting mechanism 34 is arranged at a predetermined interval along the longitudinal direction on both sides of the frame 32.

  According to the inspection table 200 according to the second embodiment, by using a highly rigid ceramic member, it is possible to suppress the bending of the frame 32 on which the metal mask is placed, and to inspect the metal mask with high accuracy. can do. Further, since the opening 32a is provided at the center of the frame 32, the inspection can be performed while illuminating the metal mask with illumination light from the lower side of the inspection table 200 even if the frame 32 is formed of an opaque ceramic member. it can.

  As shown in FIG. 5, the piece 10 used for the inspection table 2 according to the first embodiment is arranged on the frame 32 of the inspection table 200 according to the second embodiment, and the metal mask is inspected. At this time, a metal mask may be placed on the piece 10. In this case, the metal mask can be inspected with high accuracy without damaging the frame 32.

  In the piece 10 of the above-described embodiment, the second curved surface 16d of the second pedestal portion 16 is formed in a convex shape that gradually decreases as the distance from the center increases, and the first curved surface 18b of the first pedestal portion 18 is formed. May be formed in a concave shape that gradually decreases as the distance from the center increases.

DESCRIPTION OF SYMBOLS 2 ... Inspection table, 4 ... Upper glass plate, 6 ... Lower glass plate, 8 ... Flatness adjustment mechanism, 10 ... Piece, 12 ... Base bolt, 16 ... 2nd base part, 16b ... Projection part, 16c ... Outer peripheral wall 16d: second curved surface, 18: first pedestal portion, 18b: first curved surface, 18c: inner peripheral wall, 22: mounting portion, 24: gap

Claims (5)

An inspection table in which a plurality of mounting mechanisms for mounting a rectangular flat metal mask are disposed on the rectangular plate member along the outer periphery of the rectangular plate member,
The previous placement mechanism is
A mounting portion having a mounting surface for mounting the metal mask;
A first pedestal that supports the mounting portion and has a first curved surface with a predetermined curvature on the rectangular plate-shaped member side;
A second curved surface supporting the first pedestal portion, having a second curved surface with a curvature corresponding to the predetermined curvature on the first pedestal portion side, and movable in a normal direction of the rectangular plate member; With a pedestal,
The second pedestal portion supports the first pedestal portion in a swingable manner by sliding the first curved surface on the second curved surface. The first pedestal portion includes a cylindrical hollow portion in the center,
The second pedestal portion includes a protrusion inserted into the hollow cylindrical portion at the center,
The inspection table according to claim 1, wherein a predetermined gap is formed between an inner wall surface of the cavity portion and an outer wall surface of the protrusion portion in a state where the protrusion portion is inserted into the cavity portion. . The first curved surface is a convex curved surface that gradually increases as the distance from the center increases.
The inspection table according to claim 1, wherein the second curved surface is a concave curved surface that gradually increases as the distance from the center increases. The first curved surface is a concave curved surface that gradually decreases as the distance from the center increases.
The inspection table according to claim 1, wherein the second curved surface is a convex curved surface that gradually decreases as the distance from the center increases. The inspection table according to any one of claims 1 to 4, wherein the rectangular plate-shaped member is formed by a pair of upper glass plate and lower glass plate stacked one above the other.

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