JP6330673B2 - X-ray detector sensitivity correction coefficient calculation system and X-ray analyzer - Google Patents

Description

  The present invention relates to a sensitivity correction coefficient calculation system for an X-ray detector used in an X-ray analyzer such as an X-ray diffractometer, a fluorescent X-ray analyzer, or an X-ray absorption spectrum measuring device, and in particular, a characteristic X-ray is applied to a sample. The present invention relates to an X-ray diffractometer for performing qualitative and quantitative analysis of sample components by detecting X-rays irradiated and diffracted by a sample.

  An X-ray diffractometer irradiates a powder sample or the like with characteristic X-rays from an X-ray source, and detects diffracted X-rays emitted from the powder sample or the like at every diffraction angle by an X-ray detector mounted on a goniometer. Yes (see, for example, Patent Document 1). Thereby, the qualitative and quantitative analysis of the crystal component contained in a powder sample etc. is performed.

  FIG. 8 is a schematic configuration diagram illustrating an example of a conventional X-ray diffraction apparatus. The X-ray diffraction apparatus 101 includes an X-ray source unit 10, a detection unit 120, a goniometer 30, and a computer 140 that controls the entire X-ray diffraction apparatus 101. Here, as the sample S, a powder sample molded into a flat plate having a size of about 20 mm square using a sample holder or the like is used.

  The X-ray source unit 10 includes an X-ray tube 11 and a diverging slit 12 having a predetermined installation position and a predetermined slit width. The X-ray tube 11 is, for example, a point-focus X-ray tube, and has a housing, and a target that is an anode and a filament that is a cathode are arranged inside the housing. Thereby, by applying a high voltage between the target and the filament, the thermoelectrons emitted from the filament collide with the target and emit characteristic X-rays generated at the target. The characteristic X-rays are emitted by the spread of the diverging slit 12 being restricted to about 1 ° to 3 °.

The detection unit 120 includes a detection slit 121 and an X-ray detector 122 composed of one (1ch) detection element. The measured X-ray intensity (read data) I is output from the detection element to the computer 140.
The detection unit 120 is mounted on the 2θ axis of the goniometer 30 and the powder sample S is mounted on the θ axis of the goniometer 30. By rotating about the axis, the measured X-ray intensity I is output for each diffraction angle, so that an X-ray diffraction pattern can be obtained.

  The computer 140 includes a CPU 141, an input device 42, a display device 43, and a memory 144. The function processed by the CPU 141 will be described as a block. An X-ray source control unit 41a that emits characteristic X-rays from the X-ray tube 11, an acquisition unit 141b that acquires the measured X-ray intensity I from the X-ray detector 122, An X-ray intensity distribution image creation unit 141c that creates an X-ray intensity distribution image and an operation control unit 41e that rotationally drives the goniometer 30 are included.

  When analyzing the powder sample S using such an X-ray diffractometer 101, the user (customer) places the powder sample S on the center of the goniometer 30 on the θ axis and emits it from the X-ray tube 11. The characteristic X-rays are irradiated on the surface of the powder sample S through the diverging slit 12. At this time, the 2θ axis of the goniometer 30 is rotationally driven while maintaining a double relationship with the θ axis, and the diffracted X-rays radiated from the powder sample S are detected with the detection slits 121 and X mounted on the 2θ axis. It is detected by the line detector 122.

In addition, in order to analyze the powder sample S in a short time, the detection unit includes a line sensor having a detection surface in which N (for example, 1280) detection elements for detecting X-ray intensity are arranged one-dimensionally. A line diffractometer has been developed.
By the way, the measured X-ray intensity data output from the line sensor includes intensity unevenness instead of a true (accurate) X-ray intensity distribution due to variations in sensitivity characteristics among detection elements (see FIG. 6).

Therefore, in an X-ray diffractometer equipped with a line sensor, the sensitivity correction coefficient α _n (detection element number n = 1, 2,..., N) of each detection element is stored in the memory in advance, and the user can control the powder. When the sample S is measured, the CPU (X-ray intensity distribution image creation unit) uses the sensitivity correction coefficient α _n and the following equation (1) to detect the actual measured X-ray intensity (read data) I _n detected by the detection element. And a corrected X-ray intensity distribution image showing the relationship between the corrected X-ray intensity I _n ′ and the detection element number n is generated and displayed on the display device (see FIG. 7).

Corrected X-ray intensity (measurement data) I _n ′ = measured X-ray intensity I _n × sensitivity correction coefficient α _n (1)

Here, a sensitivity correction coefficient calculation method for calculating the sensitivity correction coefficient α _n (detection element number n = 1, 2,..., N) stored in the memory will be described.
That is, in order to remove the influence of uneven X-ray light distribution from an X-ray source or the like, a uniform X-ray source (special X-ray source) capable of emitting a uniform X-ray intensity distribution is prepared. source preparation steps (a ') and the irradiation step of irradiating X-rays from the uniform X-ray source to the detection surface of the line sensor (B' with), the average of the measured X-ray intensity I _n detected by all detection elements mean X-ray intensity calculating step of calculating the X-ray intensity I _ave and (C '), the sensitivity correction calculating a sensitivity correction coefficient alpha _n by using the actually measured X-ray intensity I _n the following formula (2) for each detector element A coefficient calculation step (D ′).

Sensitivity correction coefficient α _n = average X-ray intensity I _ave / measured X-ray intensity I _n (2)
Note that I _ave = (I ₁ + I ₂ +... + I _n +... + I _(N−1) + I _N ) / N

Japanese Patent Laid-Open No. 10-185844

However, in the sensitivity correction coefficient calculation method as described above, it is necessary to prepare an expensive and large-scale uniform X-ray source (special X-ray source) in the X-ray source preparation step (A ′). Such a uniform X-ray source can be deployed in a line sensor production factory or the like, but is difficult to deploy in the field under the user's usage environment. Therefore, when it is necessary to readjust the sensitivity correction coefficient α _{n in} the field under the user's usage environment, it is necessary to remove the line sensor from the X-ray diffractometer and send it back to the production factory or the like. there were. There is also a problem that it is difficult to confirm the necessity of readjustment of the sensitivity correction coefficient α _{n in} the state of the X-ray diffractometer.

Therefore, the present invention is an X-ray detector sensitivity correction capable of calculating the sensitivity correction coefficient α _n using a general-purpose X-ray source that can be easily prepared without using a uniform X-ray source (special X-ray source). An object is to provide a coefficient calculation system. It is another object of the present invention to provide an X-ray diffractometer that can readjust the sensitivity correction coefficient α _n .

The system for calculating the sensitivity correction coefficient of the X-ray detector of the present invention, which has been made to solve the above problem, detects the X-ray intensity emitted from the sample by irradiating the sample with the characteristic X-rays emitted from the X-ray source. A sensitivity correction coefficient calculation system for an X-ray detector having a detection surface in which N detection elements are arranged one-dimensionally or two-dimensionally. When calculating a sensitivity correction coefficient, a steep intensity is used as the sample. A standard sample that emits X-rays having a region having no difference is arranged at the irradiation position of the characteristic X-ray, and the X-ray detector is fixed, and the X-rays from the standard sample are N detection elements. The X-ray detector is scanned with a detector fixed acquisition step for acquiring fixed measured X-ray intensities at N locations by detecting the X-ray from the standard sample and A detector elements that are fewer than N X-rays. By detecting while Detector scanning acquisition step for acquiring the actual scanning X-ray intensity at the location, the fixed actual X-ray intensity at the n-th location acquired in the detector fixed acquisition step, and the n-th acquired in the detector scanning acquisition step. Sensitivity correction coefficient calculation for calculating the sensitivity correction coefficient α _n for each of the N detection elements so as to calculate the sensitivity correction coefficient α _n of the nth detection element from the ratio to the actually measured scanning X-ray intensity of the part. Steps.

According to the X-ray detector sensitivity correction coefficient calculation system of the present invention, for example, first, a user, a serviceman, or the like irradiates the detection surface with X-rays having no steep intensity difference. At this time, instead of preparing a special X-ray source, for example, the sensitivity correction coefficient α _n is calculated with a general-purpose X-ray source provided in an apparatus used by the user. Then, in the detector fixing acquisition step, with the X-ray detector fixed, the X-rays irradiated to the predetermined range are detected by 1280 (all) detection elements, thereby 1280 locations within the predetermined range. acquires fixed measured X-ray intensity of the (X-ray intensity distribution) I _n.

Next, in the detector scanning acquisition step, the X-rays irradiated to the first range within the predetermined range are detected by the 635th to 644th detection elements, whereby the first location to the tenth range that are the first range. By scanning the X-ray detector after acquiring the measured X-ray intensity of the spot, and finally detecting the X-rays irradiated to the second range within the predetermined range by the 635th to 644th detection elements as will acquire the scan actually measured X-ray intensity of the 11 positions to 20th places a second range, scanning the measured X-ray intensity of 1280 places a predetermined range (X-ray intensity distribution) acquires i _n To do. This is equivalent to data acquisition by a zero-dimensional detector, and this data represents an accurate X-ray intensity distribution.

Then, the sensitivity correction coefficient calculating step, using a fixed measured X-ray intensity I _n of the n points, scanning the measured X-ray intensity i _n the following formula of the n points and (3), the detection device of the n The sensitivity correction coefficient α _n is calculated.
Sensitivity correction coefficient α _n = scanning actual measurement X-ray intensity i _n / fixed actual measurement X-ray intensity I _n (3)
In this way, the sensitivity correction coefficient α _n is calculated for each detection element.

As described above, according to the sensitivity correction coefficient calculation system of the X-ray detector of the present invention, X-ray detectors are irradiated with X-rays having no steep intensity difference depending on the location even without a special X-ray source. If possible, the sensitivity correction coefficient α _n can be calculated.

(Means and effects for solving other problems)
Further, the above invention may include a scanning actual X-ray intensity storage step of storing the N scanning actual X-ray intensities acquired in the detector scanning acquisition step.
According to the sensitivity correction coefficient calculation system of the X-ray detector of the present invention, may be stored once acquired 1280 places scan measured X-ray intensity (X-ray intensity distribution) i _n, sensitivity correction coefficient for the second time α when calculating the _n may be used scanning the measured X-ray intensity (X-ray intensity distribution) i _n the 1280 points already acquired, it is possible to shorten the calculation time. Incidentally, from this time, the acquired fixed measured X-ray intensity of the 1280 points (X-ray intensity distribution) I _n, by fitting the scanning measured X-ray intensity of 1280 points stored the (X-ray intensity distribution) i _n The sensitivity correction coefficient α _n is preferably calculated.

  In the above invention, the A detection elements may be arranged at the center of the detection surface.

Furthermore, the X-ray analyzer of the present invention has an X-ray source that emits characteristic X-rays on a sample and N detection elements that detect the intensity of X-rays emitted from the sample arranged one-dimensionally or two-dimensionally. An X-ray detector having a detection surface, an X-ray detector moving mechanism for moving the X-ray detector, and a sensitivity correction coefficient memory for storing sensitivity correction coefficients α _n for each of N detection elements And an X-ray intensity distribution image creation unit that creates a corrected X-ray intensity distribution image by correcting and calculating a fixed measured X-ray intensity detected by the nth detection element using the sensitivity correction coefficient α _n. An X-ray analyzer comprising a sensitivity correction coefficient calculation mode for storing the sensitivity correction coefficient α _n in the sensitivity correction coefficient storage unit, and when the sensitivity correction coefficient calculation mode is set, As the sample, X having a region having no steep intensity difference There is disposed at the irradiation position of the standard sample to be radiated the characteristic X-ray, while fixing the X-ray detector, by detecting the X-rays from the standard sample of N detector elements, N locations Detector fixed acquisition step for acquiring fixed actual measured X-ray intensity, and detecting X-rays from the standard sample while scanning the X-ray detector with A detector elements less than N , A detector scan acquisition step of acquiring N scanning actual X-ray intensities, an n-th fixed actual X-ray intensity acquired in the detector fixed acquisition step, and acquired in the detector scan acquisition step Sensitivity correction for calculating the sensitivity correction coefficient α _n for each of the N detection elements so as to calculate the sensitivity correction coefficient α _n of the nth detection element from the ratio to the scanning actual measurement X-ray intensity at the n-th place. The coefficient calculation step It is to comprise a coefficient calculation unit.

According to the X-ray analysis apparatus of the present invention, for example, first, a user, a serviceman, or the like sets the “sensitivity correction coefficient calculation mode”. That is, the “sample analysis mode” for calculating the corrected X-ray intensity I _n ′ is set to “OFF”. Next, a user, a serviceman, or the like places a standard sample (a sample that emits X-rays having a region having no steep intensity difference) S ′ or the like. That is, the sensitivity correction coefficient α _n is calculated in the state of the X-ray analyzer.

Next, a user, a serviceman, etc. irradiate the detection surface with X-rays from the prepared standard sample S ′. Next, in the detector fixing acquisition step, with the X-ray detector fixed, the X-rays radiated to a predetermined range are detected by 1280 (all) detection elements, so that 1280 fixed actual measurement X to obtain the line intensity _{I n.}

Next, in the detector scanning acquisition step, the X-rays irradiated to the first range within the predetermined range are detected by the 635th to 644th detection elements, so that the scanning actual measurement X from the first place to the tenth place is performed. after obtaining the line strength i _n, by scanning the X-ray detector detects the X-rays emitted in the second range within a predetermined range in the detection device of the 635 # 644, second location - as it will acquire the scan actually measured X-ray intensity _{i n} of the 11 locations, to obtain a scanning measured X-ray intensity _{i n} of 1280 points. At this time, X-ray intensity of the n points are to be acquired, respectively ten detector elements of the first 635 to # 644, to create a scan measured X-ray intensity i _n the 1280 locations in which the average of them.

Then, the sensitivity correction coefficient calculating step, a fixed measured X-ray intensity I _n of the n points, scanning the measured X-ray intensity i _n the equation (3) of the n points and by using a detection device of the n A sensitivity correction coefficient α _n is calculated. In this way, the sensitivity correction coefficient α _n is calculated for each detection element.

As described above, according to the X-ray analysis apparatus of the present invention, the standard sample S ′ or the like is simply placed in the “sensitivity correction coefficient calculation mode” as appropriate not only before shipment to the user etc. but also after shipment. The sensitivity correction coefficient α _n can be calculated.

1 is a schematic configuration diagram showing an example of an X-ray diffraction apparatus according to an embodiment of the present invention. The flowchart explaining the usage method of the X-ray-diffraction apparatus of this invention. The graph which shows the measurement X-ray intensity distribution acquired by the detector fixed acquisition step (A). The graph which shows the fixed measurement X-ray intensity distribution acquired by the detector scanning acquisition step (B). The graph which shows the sensitivity correction coefficient of each detection element. The graph which shows the measurement X-ray intensity distribution from the measurement object sample detected by the line sensor. The graph which shows a correction | amendment X-ray intensity distribution image. The schematic block diagram which shows an example of the conventional X-ray-diffraction apparatus.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments described below, and it goes without saying that various aspects are included without departing from the spirit of the present invention.

FIG. 1 is a schematic configuration diagram illustrating an example of an X-ray diffraction apparatus according to an embodiment of the present invention. In addition, the same code | symbol is attached | subjected about the thing similar to the X-ray-diffraction apparatus 101. FIG.
The X-ray diffraction apparatus 1 includes an X-ray source unit 10, a detection unit 20, a goniometer 30, and a computer 40 that controls the entire X-ray diffraction apparatus 1.

The detection unit 20 includes a line sensor (X-ray detector) 21 having a detection surface in which N (for example, 1280) detection elements (semiconductor elements) are arranged in the X direction (one dimension). A fixed measured X-ray intensity (read data) I _n (detection element numbers n = 1, 2,..., N) is output from the detection elements to the computer 40, respectively.
The detection unit 20 is mounted on the 2θ axis of the goniometer 30, and the powder sample S is mounted on the θ axis of the goniometer 30, and the center of the goniometer 30 is driven by a θ-2θ interlocking driving method. It is designed to rotate around the axis.

The computer 40 includes a CPU 41, an input device 42, a display device 43, and a memory 44. When CPU41 is described by blocking the function of processing the X-ray source control unit 41a for emitting the characteristic X-rays from the X-ray tube 11, the acquisition unit from the line sensor 21 to obtain the N fixed measured X-ray intensity I _n 41b, an X-ray intensity distribution image creation unit 41c that creates a corrected X-ray intensity distribution image, a correction coefficient calculation unit 41d that calculates N sensitivity correction coefficients α _{n and t} , and an operation control that rotationally drives the goniometer 30 Part 41e.

Further, the memory 44, N pieces of the sensitivity correction coefficient storage unit 44a for storing the correction coefficient alpha _{n, t,} scanning the measured X-ray intensity (X-ray intensity distribution) scan measured X-ray for storing i _n And an intensity storage unit 44b. If the N sensitivity correction coefficients α _{n, t} are calculated in a “sensitivity correction coefficient calculation mode” to be described later, the N sensitivity correction coefficients currently stored (before (t−1) before calculation) are stored. The coefficient α _{n, (t−1)} is stored in the correction coefficient storage unit 44a so as to be updated.

When the “sample analysis mode” is set to “ON” based on the input signal from the input device 42, the X-ray intensity distribution image creation unit 41 c stores the sensitivity correction coefficient α stored in the correction coefficient storage unit 44 a. _n, and a fixed measured X-ray intensity I _n acquired in _t acquiring unit 41b into equation (1) _'is calculated, and corrected X-ray intensity I _n' corrected X-ray intensity I _n and the detecting element number Control for creating a corrected X-ray intensity distribution image showing the relationship with n and displaying it on the display device 43 is performed.
Note that when the “sample analysis mode” is set to “ON”, the user or the like places the measurement target sample S at the center of the goniometer 30 on the θ axis. Examples thereof include a powder sample formed into a flat plate having a size of about 20 mm square using a sample holder or the like.

Based on the input signal from the input device 42, the correction coefficient calculation unit 41d fixes the detector when the “sample analysis mode” is set to “OFF”, that is, when the “sensitivity correction coefficient calculation mode” is set. Control for executing the acquisition step (A), the detector scan acquisition step (B), and the sensitivity correction coefficient calculation step (C) is performed.
When the user, service person, or the like sets the “correction coefficient calculation mode”, the standard sample S ′ that emits X-rays having a region having no steep intensity difference is placed at the center of the goniometer 30 on the θ axis. The standard sample S ′ is, for example, a copper plate formed into a flat plate having a size of about 20 mm square.

In the detector fixing acquisition step (A), by detecting X-rays from the standard sample S ′ with 1280 (N) detection elements in a state where the line sensor 21 is fixed at a predetermined position (635th position). , N measured fixed X-ray intensities I _n (n = 1, 2,..., N) are acquired.
In the detector scanning acquisition step (B), first, in a state where the line sensor 21 is arranged at the first position, the X-rays from the standard sample S ′ are positioned at the 635th to 644th (10, by detecting the detection elements of the a-number), scan the measured X-ray intensity in the first place to tenth place _{i n (n = 635,636, ···} , 644) acquires. Next, in a state where the line sensor 21 is disposed at the second position, X-rays from the standard sample S ′ are detected by the 635th to 644th detection elements in the X direction from the first place to the tenth place. Scanned X-ray intensities i _n (n = 635, 636,..., 644) of the shifted second to eleventh positions are acquired. Thus the line sensor 21 by scanning from the first position to the 1271 position, and acquires the scan actually measured X-ray intensity _{i n} of 1280 points.

In the sensitivity correction coefficient calculation step (C), using a fixed measured X-ray intensity I _n of the n points, scanning the measured X-ray intensity i _n the equation of the n points and (3), the detection device of the n The sensitivity correction coefficient α _n is calculated for each of the N detection elements so that the sensitivity correction coefficient α _n is calculated. In this case, for example, scanning the measured X-ray intensity i _n of the 644 points is in a state where the line sensor 21 is disposed in the first position, is obtained by the detection element of the 644, the line sensor 21 is disposed in the second position in a state of being, as acquired by the detector elements of the 643, for scanning the measured X-ray intensity i _n of the n points are acquired, respectively ten detector elements of the first 635 to # 644, they to those mean and scanning the measured X-ray intensity i _n. Then, the sensitivity correction coefficient α _n (n = 1, 2,..., N) is stored in the correction coefficient storage unit 44a.

Next, an example of how to use the X-ray diffraction apparatus 1 will be described. FIG. 2 is a flowchart for explaining the usage method.
First, in the process of step S101, the update count parameter t = 0.

Next, in the process of step S102, the CPU 41 determines whether or not the “sample analysis mode” is set to “OFF”.
When it is determined that the “sample analysis mode” is set to “OFF”, that is, the “sensitivity correction coefficient calculation mode” is set, t = t + 1 is set in the process of step S103. The sensitivity correction coefficients α _{n, t} may be calculated as appropriate when the user feels necessary.

Next, in the process of step S104, the user places the standard sample S ′ at the center of the goniometer 30 on the θ axis, and the line sensor 21 is placed at a predetermined position (635th position).
Next, in the process of step S105, the characteristic X-rays emitted from the X-ray tube 11 are irradiated on the surface of the standard sample S ′ through the diverging slit 12, and the diffracted X-rays emitted from the standard sample S ′ are 1280. N fixed measurement X-ray intensities I _n (n = 1, 2,..., N) are acquired by detection by N (N) detection elements (detector fixed acquisition step (A)). ). FIG. 3 is a graph showing the measured X-ray intensity distribution acquired in the detector fixing acquisition step (A).

Next, in the process of step S106, the characteristic X-rays emitted from the X-ray tube 11 are irradiated onto the surface of the standard sample S ′ through the diverging slit 12, and the line sensor 21 is scanned while being scanned from the standard sample S ′. The diffracted X-rays radiated are detected by the 635th to 644th (10) detection elements, whereby the fixed measured X-ray intensity I _n (n = 1, 2,..., N) at N locations. It is acquired and stored in the scanning actual measurement X-ray intensity storage unit 44b (detector scanning acquisition step (B)). FIG. 4 is a graph showing the fixed measured X-ray intensity distribution acquired in the detector scanning acquisition step (B). In the process of step S106 of t = 1, since the fixed measured X-ray intensity I _n (n = 1, 2,..., N) is stored once in the scanning measured X-ray intensity storage unit 44b, t = 2. The processing of the subsequent step S106 may be omitted, and the fixed measured X-ray intensity I _n (n = 1, 2,..., N) stored in the scanning measured X-ray intensity storage unit 44b may be used.

Next, in the process of step S107, a fixed measured X-ray intensity I _n of the n points, scanning the measured X-ray intensity i _n the equation (3) of the n points and with the sensitivity of the detection device of the n In _order to calculate the correction coefficient α _n , the sensitivity correction coefficient α _n (n = 1, 2,..., N) is calculated for each of the N detection elements and stored in the correction coefficient storage unit 44a ( Correction coefficient calculation step (C)). FIG. 5 is a graph showing the sensitivity correction coefficient α _n for each detection element. And if the process of step S107 is complete | finished, it will return to the process of step S102. That is, when the “sensitivity correction coefficient calculation mode” is set, the process from step S102 to the process from step S107 is executed, and the current N sensitivity correction coefficients α _{n, (} stored in the correction coefficient storage unit 44a) _{( t−1)} is updated to N sensitivity correction coefficients α _{n, t} .

On the other hand, when it is determined in step S102 that the “sample analysis mode” is set to “ON”, in step S108, the user places the measurement target sample S at the center of the goniometer 30 on the θ axis. Place.
Next, in the process of step S109, the characteristic X-ray emitted from the X-ray tube 11 is irradiated onto the surface of the measurement target sample S through the diverging slit 12, and the diffracted X-ray radiated from the measurement target sample S is 2θ. It is detected by a line sensor 21 mounted on the shaft. FIG. 6 is a graph showing the measured X-ray intensity distribution from the measurement target sample S detected by the line sensor 21.

Next, in the processing of step S110, the X-ray intensity distribution image creation unit 41c has the sensitivity correction coefficient α _{n, t} stored in the correction coefficient storage unit 44a and the fixed measured X-ray intensity I acquired by the acquisition unit 41b. Substituting _n into equation (1), the corrected X-ray intensity I _n ′ is calculated.
Next, in the process of step S111, the X-ray intensity distribution image creation unit 41c creates a corrected X-ray intensity distribution image indicating the relationship between the corrected X-ray intensity I _n ′ and the detection element number n, and displays it on the display device 43. indicate. FIG. 7 is a graph showing a corrected X-ray intensity distribution image.

  Next, in the process of step S112, it is determined whether or not to analyze a new measurement target sample S. When it is determined that a new measurement target sample S is to be analyzed, the process returns to step S102. On the other hand, when it is determined that analysis of a new measurement target sample S is not performed, this flowchart is ended.

As described above, according to the X-ray diffraction apparatus 1 of the present invention, the sensitivity correction coefficient α can be obtained simply by placing the standard sample S ′ or the like in the “sensitivity correction coefficient calculation mode” as appropriate after shipment to the user. _{n and t} can be calculated.

<Other embodiments>
(1) In the X-ray diffraction apparatus 1 described above, a configuration including the line sensor 21 having a detection surface in which N detection elements are arranged one-dimensionally is shown. However, (N × M) detection elements are included. It is good also as a structure provided with the X-ray detector which has the detection surface arranged in two dimensions.

(2) In the X-ray diffraction apparatus 1 described above, in the detector scanning acquisition step (B), the configuration in which detection is performed by the 635th to 644th (10) detection elements is shown. It is good also as a structure which makes it detect with an element, or make it detect with the 20th 630th-649th detection element.

(3) Although the configuration of the X-ray diffractometer 1 has been described in the above-described embodiment, a fluorescent X-ray analyzer or an X-ray absorption spectrum measurement device may be used.
Further, the description has been given of the case of calculating the X-ray diffractometer 1 in sensitivity correction coefficient alpha _{n, t,} a sensitivity correction coefficient alpha _{n, t} using a general-purpose X-ray source in the line sensor state in the line sensor manufacturing plants etc. It may be calculated. In this case, it is preferable to move the X-ray detector linearly in the X direction instead of rotating it.

  The present invention can be used for an X-ray detector used in an X-ray diffractometer, a fluorescent X-ray analyzer, an X-ray absorption spectrum measuring device, and the like.

1 X-ray diffractometer 21 Line sensor (X-ray detector)

Claims (4)

X-ray detector having a detection surface in which characteristic X-rays emitted from an X-ray source are irradiated onto a sample, and N detection elements for detecting the intensity of X-rays emitted from the sample are arranged one-dimensionally or two-dimensionally The sensitivity correction coefficient calculation system of
When calculating the sensitivity correction coefficient, as the sample, a standard sample that emits X-rays having a region having no steep intensity difference is disposed at the irradiation position of the characteristic X-ray,
In a state where the X-ray detector is fixed, a detector fixed acquisition step of acquiring fixed measured X-ray intensities at N locations by detecting X-rays from the standard sample with N detection elements;
Detector scan acquisition that acquires X-ray scanning intensities at N locations by detecting X-rays from the standard sample while scanning the X-ray detector with fewer A detector elements than N detectors. Steps,
From the ratio of the fixed measured X-ray intensity at the nth location acquired in the detector fixed acquisition step and the scanned actual X-ray intensity at the nth location acquired in the detector scan acquisition step, the nth detection element sensitivity correction coefficient to calculate the alpha _n, sensitivity correction coefficient of the X-ray detector which comprises a sensitivity correction coefficient calculating step of calculating respectively the sensitivity correction coefficient alpha _n for n detecting elements Calculation system.   2. The X-ray detector sensitivity correction coefficient calculation according to claim 1, further comprising a scanning actual X-ray intensity storage step for storing N scanning actual X-ray intensities acquired in the detector scanning acquisition step. system.   3. The X-ray detector sensitivity correction coefficient calculation system according to claim 1, wherein the A detection elements are arranged in the center of the detection surface. An X-ray source that emits characteristic X-rays to the sample;
An X-ray detector having a detection surface in which N detection elements for detecting the X-ray intensity emitted from the sample are arranged one-dimensionally or two-dimensionally;
An X-ray detector moving mechanism for moving the X-ray detector;
A sensitivity correction coefficient storage unit for storing the sensitivity correction coefficient α _n for each of the N detection elements;
An X-ray including an X-ray intensity distribution image creating unit that corrects and calculates a fixed actual X-ray intensity detected by the nth detection element using the sensitivity correction coefficient α _n and creates a corrected X-ray intensity distribution image. An analyzer,
A sensitivity correction coefficient calculation mode for storing the sensitivity correction coefficient α _n in the sensitivity correction coefficient storage unit;
When the sensitivity correction coefficient calculation mode is set, as the sample, a standard sample that emits X-rays having a region having no steep intensity difference is arranged at the irradiation position of the characteristic X-ray,
In a state where the X-ray detector is fixed, a detector fixed acquisition step of acquiring fixed measured X-ray intensities at N locations by detecting X-rays from the standard sample with N detection elements;
Detector scan acquisition that acquires X-ray scanning intensities at N locations by detecting X-rays from the standard sample while scanning the X-ray detector with fewer A detector elements than N detectors. Steps,
From the ratio of the fixed measured X-ray intensity at the nth location acquired in the detector fixed acquisition step and the scanned actual X-ray intensity at the nth location acquired in the detector scan acquisition step, the nth detection element to calculate the sensitivity correction coefficient alpha _n, X, characterized in that it comprises a correction coefficient calculation unit for performing the sensitivity correction coefficient calculating step of calculating respectively the sensitivity correction coefficient alpha _n for n detecting elements Line analyzer.