JP6329882B2 - Antifuse memory and semiconductor memory device - Google Patents

Description

  The present invention relates to an antifuse memory and a semiconductor memory device.

  Conventionally, as an antifuse memory capable of writing data only once by destroying an insulating film, an antifuse memory shown in US Pat. No. 7,402,855 (Patent Document 1) is known. The antifuse memory shown in Patent Document 1 is described in detail in the “Background Art” of Japanese Patent Application No. 2014-015352 with reference to the drawings. For example, the element isolation layer and the impurity diffusion region are arranged at a predetermined interval on the well surface. A gate electrode is formed on the well between the element isolation layer and the impurity diffusion region via a switch gate insulating film and a memory gate insulating film. Further, in the antifuse memory, a step portion is formed on the gate electrode, and the film thickness of the switch gate insulating film is formed to be larger than the film thickness of the memory gate insulating film.

  As a result, in the antifuse memory, at the time of data writing, one of the thin memory gate insulating films is insulated by the voltage difference between the breakdown word voltage applied to the impurity diffusion region and the breakdown bit voltage applied to the gate electrode. Although it is destroyed and data is written, the insulation state of the other thick switch gate insulating film can be maintained. In addition, when reading data, the antifuse memory determines the electrical connection between the gate electrode and the well in the thin memory gate insulating film based on the voltage change of the bit line connected to the impurity diffusion region. Then, it can be determined whether or not data is written.

  As another antifuse memory, an antifuse memory (see FIGURE 27 in Patent Document 2) such as US Pat. No. 6,940,751 (Patent Document 2) is also considered. Here, in the antifuse memory shown in FIG. 27 of Patent Document 2, the switch gate insulating film and the memory gate insulating film formed between the gate electrode and the well are formed in the same film thickness, but the manufacturing process In FIG. 1, the impurity is ion-implanted into one of the memory gate insulating films, so that the memory gate insulating film is easier to break down than the switch gate insulating film. The lifetime of the insulating film is deteriorated by ion implantation so that the memory gate insulating film is actively destroyed.

  As a result, in the antifuse memory, when data is written, one memory gate insulating film into which impurities are ion-implanted breaks down to be in a state in which data is written, but the other switch gate insulation without impurities being ion-implanted The insulating state of the film can be maintained.

U.S. Patent No. 7,402,855 U.S. Patent 6,940,751

  However, in the antifuse memory in the former Patent Document 1, even when a voltage difference between the breakdown word voltage and the breakdown bit voltage occurs at the time of data writing, the switch gate insulating film does not break down. Since it is necessary to form the film sufficiently thick, there is a problem that it is difficult to realize a high-speed operation of on / off operation at the time of data reading as much as the film thickness of the switch gate insulating film is increased.

  In this regard, in the antifuse in the latter Patent Document 2, the film thickness of the switch gate insulating film and the film thickness of the memory gate insulating film are formed to the same film thickness. Unlike the above, a high-speed on / off operation at the time of data reading can be realized.

  However, in the antifuse in Patent Document 2, since the memory gate insulating film is easily broken, if a read gate voltage is repeatedly applied to the gate electrode in order to read data, a burden on the memory gate insulating film is accumulated. As a result, the memory gate insulating film may be destroyed at the time of data reading. For this reason, in the antifuse disclosed in Patent Document 2, there is a possibility that the memory gate insulating film may be destroyed during data reading even though the memory gate insulating film is not destroyed during data writing. There has been a problem that the reliability of read information at the time is reduced.

  Therefore, the present invention has been made in consideration of the above points, and an object thereof is to propose an antifuse memory and a semiconductor memory device capable of realizing high-speed operation while improving the reliability of read information.

  In order to solve such a problem, an antifuse memory according to the present invention includes a well in which an impurity diffusion region to which a bit line is connected is formed on a surface, a memory gate insulating film formed on the well, and the memory gate insulating film Formed on the well between the impurity diffusion region and the memory gate insulating film; and a first conductivity type memory gate electrode to which a breakdown memory voltage is applied to break down the memory gate insulating film. And the switch gate insulating film integrally formed with the memory gate insulating film, and the memory gate electrode is formed of a second conductivity type of a reverse conductivity type, and is formed on the switch gate insulating film, A switch gate electrode joined to the memory gate electrode, and the breakdown memory voltage applied to the memory gate electrode And characterized by comprising a reverse bias voltage between said switch gate electrode.

  In the semiconductor memory device of the present invention, an antifuse memory is disposed at each intersection where a plurality of bit lines intersect with a plurality of switch word lines and a plurality of memory word lines. The fuse memory is the antifuse memory described above.

  According to the present invention, the breakdown memory voltage that breaks down the memory gate insulating film becomes a reverse bias voltage between the memory gate electrode and the switch gate electrode, so that the switch gate insulation is not restricted by the breakdown memory voltage. The film thickness can be reduced, and accordingly, a high-speed on / off operation in the channel region of the switch gate electrode can be realized during data reading.

  In addition, the antifuse memory and the semiconductor memory device are the same as the switch gate insulating film without performing special processing such as ion implantation of impurities into the memory gate insulating film so that the memory gate insulating film is easily destroyed. In addition, since the memory gate insulating film can be formed with a film quality that is difficult to destroy when reading data, even if a read memory voltage is repeatedly applied to the memory gate electrode, the memory gate insulating film is not easily broken down. The reliability of the read information in can be improved.

1 is a schematic diagram illustrating a circuit configuration of a semiconductor memory device including an antifuse memory according to the present invention and voltages at various parts during a data write operation. 1 is a schematic diagram showing a cross-sectional configuration of an antifuse memory according to the present invention. It is the schematic which showed the voltage of each site | part at the time of data read-out operation | movement. It is the schematic which shows the circuit structure of the semiconductor memory device by other embodiment, and the voltage of each site | part at the time of data write operation. FIG. 5 is a schematic diagram for explanation when preventing dielectric breakdown in the antifuse memory shown in FIG. 4. It is the schematic which shows the cross-sectional structure of the antifuse memory by other embodiment.

Hereinafter, modes for carrying out the present invention will be described. The description will be in the following order.
1. 1. Configuration of semiconductor memory device and antifuse memory 2. Data write operation 3. Data read operation 4. Action and effect Other Embodiments 5-1. Semiconductor memory device according to another embodiment 5-2. Detailed Configuration of Antifuse Memory According to Other Embodiment 5-3. Other

(1) Configuration of Semiconductor Memory Device and Antifuse Memory In FIG. 1, reference numeral 1 denotes a semiconductor memory device, which has a configuration in which antifuse memories 2a, 2b, 2c, 2d of the present invention are arranged in a matrix, for example, A plurality of switch word lines PWL1, PWL2 and a plurality of memory word lines NWL1, NWL2 paired with the switch word lines PWL1, PWL2 are arranged in one direction (the row direction in FIG. 1). In the semiconductor memory device 1, a plurality of bit lines BL1, BL2 are arranged so as to be orthogonal to the switch word lines PWL1, PWL2 and the memory word lines NWL1, NWL2. In the semiconductor memory device 1, anti-fuse memories 2a, 2b, 2c, 2d are arranged at intersections of the switch word lines PWL1, PWL2 and the memory word lines NWL1, NWL2 and the bit lines BL1, BL2, respectively. The antifuse memories 2a, 2b, 2c, and 2d are connected to the word lines PWL1 and PWL2, the memory word lines NWL1 and NWL2, and the bit lines BL1 and BL2, respectively.

  In this case, the semiconductor memory device 1 uniformly applies a predetermined bit voltage from the bit line BL1 (BL2) to the plurality of antifuse memories 2a and 2c (2b and 2d) arranged along the bit line BL1 (BL2). Can be applied. In addition, a plurality of antifuse memories 2a and 2b (2c and 2d) arranged along the switch word line PWL1 (PWL2) and the memory word line NWL1 (NWL2) have a predetermined switch from the switch word line PWL1 (PWL2). A voltage is applied uniformly, and a predetermined memory voltage can be applied uniformly from the memory word line NWL1 (NWL2).

  Thereby, the semiconductor memory device 1 selects the voltage value applied to each bit line BL1, BL2, the voltage value applied to each switch word line PWL1, PWL2, and the voltage value applied to each memory word line NWL1, NWL2. As a result, among the plurality of antifuse memories 2a, 2b, 2c, 2d, for example, data is written only to the antifuse memory 2a in the first row and first column, or the data in the antifuse memory 2a in the first row and first column Only read is possible.

  Here, since the antifuse memories 2a, 2b, 2c, and 2d all have the same configuration, the following description focuses on the antifuse memory 2a in the first row and the first column. The anti-fuse memory 2a includes a switch transistor S and a memory capacitor M. A switch word line PWL1 is connected to a switch gate electrode PG provided in the switch transistor S, and is provided in the memory capacitor M. A memory word line NWL1 is connected to the memory gate electrode NG.

  In addition to such a configuration, in the antifuse memory 2a of the present invention, the memory gate electrode NG of the memory capacitor M is formed of the N-type first conductivity type, while the switch gate electrode PG of the switch transistor S is the P-type first type. The P-type switch gate electrode PG and the N-type memory gate electrode NG are joined together to form a PN junction diode with the switch gate electrode PG and the memory gate electrode NG. .

  In practice, the switch transistor S has a configuration in which the switch gate electrode PG is disposed on the well via the switch gate insulating film 7 made of an insulating member, and the voltage difference between the switch gate electrode PG and the bit line BL1. As a result, the channel region of the well facing the switch gate electrode PG is turned on (conductive state), and the bit voltage of the bit line BL1 can be applied to the channel region of the memory capacitor M.

  On the other hand, the memory capacitor M has a memory gate insulating film 8 integrally formed with the switch gate insulating film 7 on the well and disposed in the same layer as the switch gate insulating film 7, and the memory gate insulating film 8 The memory gate electrode NG is arranged on the top. In this case, the memory capacitor M is formed so that the memory gate insulating film 8 can break down due to a voltage difference generated between the memory gate electrode NG and the channel region of the well. Data can be written by being broken down.

  In practice, as shown in FIG. 2, the antifuse memory 2a according to the present invention has, for example, a P-type well W formed on a semiconductor substrate DW, and impurity diffusion is performed at a predetermined interval on the surface of the well W. Region 5 and element isolation layer 4 are formed. The impurity diffusion region 5 is a P-type opposite to the conductivity type of the well W, and has a configuration in which the bit line BL1 is connected to the surface. A destructive bit voltage, a non-destructive bit voltage, a read selection bit voltage, or the like can be applied to the impurity diffusion region 5 from the bit line BL1.

  The well W has a channel region on the surface between the impurity diffusion region 5 and the element isolation layer 4, and a switch gate insulating film 7 and a memory gate insulating film 8 are formed along the channel region. A gate electrode MG is formed on the switch gate insulating film 7 and the memory gate insulating film 8.

Note that sidewalls 9 made of SiO ₂ or the like are formed on both sides of the gate electrode MG, respectively, and a part of the impurity diffusion region 5 is formed in a lower region of the sidewall 9. Incidentally, in the case of this embodiment, the impurity diffusion region 5 is formed in the lower region of the sidewall 9 up to just below the side surface of the gate electrode MG.

  Here, in the gate electrode MG, the switch gate electrode PG is disposed on the impurity diffusion region 5 side to which the bit line BL1 is connected, and the memory gate electrode NG is disposed on the other element isolation layer 4 side, A part of the other side of the memory gate electrode NG is formed so as to be opposed to the element isolation layer 4 as well.

  In the case of this embodiment, the gate electrode MG has a PN junction diode formed by bonding one side surface of the P-type switch gate electrode PG and one side surface of the N-type memory gate electrode NG. When the memory voltage applied to the memory gate electrode NG is higher than the switch voltage applied to the switch gate electrode PG, the voltage application from the memory gate electrode NG to the switch gate electrode PG becomes a reverse bias voltage, and the memory gate The voltage application from the electrode NG to the switch gate electrode PG can be cut off.

  In the case of this embodiment, the antifuse memory 2a has a work function of the switch gate electrode PG and a work function of the memory gate electrode NG different from each other, and is applied to the switch gate insulating film 7 from the switch gate electrode PG. The effective switch voltage (effective voltage) is changed so that the work function difference changes and can be reduced.

  For example, when the well W is formed in a P-type, the work function of the switch gate electrode PG arranged on the impurity diffusion region 5 side to which the bit line BL1 is connected is greater than the work function of the memory gate electrode NG. Is also selected to be larger. Here, the relationship between the work functions of the switch gate electrode PG and the memory gate electrode NG can be considered as follows. In the antifuse memory 2a, the difference in work function between the memory gate electrode NG and the well W is selected to be larger than the difference in work function between the switch gate electrode PG and the well W. The voltage applied to the insulating film 7 can be relaxed, and a larger effective voltage can be applied to the memory gate insulating film 8.

  Note that the gate electrode MG is formed so that the switch gate electrode PG and the memory gate electrode NG have the same film thickness, and there is no step between the bottom of the switch gate electrode PG and the bottom of the memory gate electrode NG. ing. As a result, the gate electrode MG includes a film thickness of the switch gate insulating film 7 formed between the well W and the switch gate electrode PG and a memory gate insulating film formed between the well W and the memory gate electrode NG in the channel region. The film thickness of 8 is selected to be approximately the same.

  Incidentally, the semiconductor memory device 1 having such antifuse memories 2a, 2b, 2c, and 2d uses a photolithography technique and an ion implantation method when forming the gate electrode MG in addition to a general semiconductor manufacturing process. As a result, N-type impurities or P-type impurities are ion-implanted in the polysilicon gate region, and a P-type switch gate electrode PG is formed in one region of the gate electrode MG, and the other region of the gate electrode MG is formed. In addition, an N-type memory gate electrode NG having a work function and a conductivity type different from that of the switch gate electrode PG can be formed.

(2) Data Write Operation Next, in the semiconductor memory device 1 shown in FIG. Here, the antifuse memory 2a that writes data is also referred to as a write selection memory 2W, while the antifuse memories 2b, 2c, and 2d that do not write data are also referred to as write non-selection memories 2N. In this case, 0 [V] breakdown bit voltage is applied to the bit line BL1 to which the write selection memory 2W is connected, and 3 [V] write selection to the switch word line PWL1 to which the write selection memory 2W is also connected. A switch voltage can be applied. Similarly, a destructive memory voltage of 5 [V] can be applied to the memory word line NWL1 connected to the write selection memory 2W.

  On the other hand, a non-destructive bit voltage of 3 [V] can be applied to the other bit line BL2 to which only the antifuse memories 2b and 2d (write non-selection memory 2N) not writing data are connected. In addition, the write unselected switch voltage of 0 [V] is applied to the switch word line PWL2 to which only the antifuse memories 2c and 2d (write unselected memory 2N) to which data is not written is connected. A non-destructive memory voltage of 0 [V] can be applied to the memory word line NWL2 to which only 2N is connected. In this case, a substrate voltage of 0 [V] can be applied to the well in which the antifuse memories 2a, 2b, 2c, and 2d are formed.

  In the write selection memory 2W, the channel region of the well W facing the switch gate electrode PG is turned on by the 3 [V] write selection switch voltage applied from the switch word line PWL1 to the switch gate electrode PG. In the write selection memory 2W, the channel region of the well W facing the memory gate electrode NG is also turned on by the destructive memory voltage of 5 [V] applied from the memory word line NWL1 to the memory gate electrode NG.

  At this time, the write selection memory 2W is applied with a breakdown bit voltage of 0 [V] from the bit line BL1 to the impurity diffusion region 5, so that the ON state facing the switch gate electrode PG and the memory gate electrode NG As a result, each channel region becomes a breakdown bit voltage of 0 [V], and as a result, a breakdown word voltage and a breakdown bit voltage between the memory gate electrode NG and the channel region opposed to the memory gate electrode NG 5 [ A voltage difference of V] can occur.

  At this time, in the write selection memory 2W, the N-type memory gate electrode NG and the P-type switch gate electrode PG are joined to form a PN junction diode, so that the memory gate insulating film 8 is dielectrically broken down. Therefore, the high breakdown voltage applied to the memory gate electrode NG becomes a reverse bias voltage between the memory gate electrode NG and the switch gate electrode PG, and is not applied from the memory gate electrode NG to the switch gate electrode PG.

  As a result, the write selection memory 2W causes a voltage difference due to the breakdown bit voltage and the breakdown word voltage only in the arrangement region of the memory gate electrode NG, and causes only the memory gate insulating film 8 below the memory gate electrode NG to break down. The gate electrode NG and the impurity diffusion region 5 are in a conductive state with a low resistance, so that data can be written.

  As described above, the write selection memory 2W is not restricted by the high breakdown memory voltage applied to the memory gate electrode NG, and the write selection switch voltage of the minimum voltage necessary to turn on the channel region is set. Since it can be applied to the switch gate electrode PG, even if the switch gate insulating film 7 is formed thin, the insulating state is maintained as it is without being broken down by the breakdown memory voltage. obtain.

  In the case of this embodiment, in the write selection memory 2W, the work functions of the switch gate electrode PG and the memory gate electrode NG are different, and the effective voltage applied to the switch gate insulating film 7 from the switch gate electrode PG is reduced. Since it can be further reduced, it is possible to suppress the burden accumulation due to the voltage on the switch gate insulating film 7.

  For example, in this embodiment, in the write selection memory 2W, the breakdown memory voltage applied to the memory gate electrode NG is selected to 5 [V], and the write selection switch voltage applied to the switch gate electrode PG is 3 [ V] is selected, the voltage value applied to the switch gate electrode PG can be reduced by 2 [V] from the voltage value of the memory gate electrode NG. The effective voltage value applied to the gate insulating film 8 can be lowered by about 1 [V]. Thus, in the write selection memory 2W, the voltage value applied to the switch gate insulating film 7 is 2 [V], which is about 3 [V] lower than the voltage difference of 5 [V] generated in the memory gate insulating film 8 in total. Can be. Thus, in the write selection memory 2W, during the data write operation, the voltage applied to the switch gate insulating film 7 can be relaxed while the memory gate insulating film 8 is broken down, and accordingly, the film thickness of the switch gate insulating film 7 is reduced. Can be thinned.

  Incidentally, the non-destructive bit voltage of 3 [V] with a high voltage value is applied from the bit line BL2 in the anti-fuse memory 2b that shares the write selection memory 2W, the switch word line PWL1 and the memory word line NWL1 and does not write data. Therefore, even when a breakdown word voltage of 5 [V] is applied to the memory gate electrode NG, the voltage difference between the memory gate electrode NG and the bit line BL2 becomes small, so the memory gate insulating film below the memory gate electrode NG 8 remains in an insulated state without being broken down, and a state in which no data is written can be maintained.

  On the other hand, in the other antifuse memories 2c and 2d to which the non-destructive memory voltage of 0 [V] is applied, since 0 [V] is applied to the memory word line NWL2, the memory gate electrode NG and the 0 [ The voltage difference from the well to which the substrate voltage of [V] is applied does not occur, the memory gate insulating film 8 below the memory gate electrode NG remains in an insulating state without being broken down, and no data is written. Can be done. Thus, in the semiconductor memory device 1, data can be written only to the desired antifuse memory 2a among the antifuse memories 2a, 2b, 2c, and 2d arranged in a matrix.

(3) Data read operation Next, in this semiconductor memory device 1, for example, the antifuse memory 2a arranged in the first row and the first column as shown in FIG. A case will be described in which the above data is read and the data of the other antifuse memories 2b, 2c, and 2d is not read. Hereinafter, the antifuse memory 2a that reads data is referred to as a read selection memory 2R, and the antifuse memories 2b, 2c, and 2d that do not read data are referred to as a read non-selection memory 2NR.

  In the case of this embodiment, the semiconductor memory device 1 first charges all bit lines to 1.2 [V], and then reads the read selection bit of 0 [V] on the bit line BL1 connected to the read selection memory 2R. On the other hand, the read unselected bit voltage of 1.2 [V] can be applied to the other bit line BL2 to which only the read unselected memory 2NR is connected.

  At this time, in the semiconductor memory device 1, a read selection switch voltage of 1.2 [V] is applied to the switch word line PWL1 to which the read selection memory 2R is connected, and the memory word line NWL1 to which the read selection memory 2R is also connected. A read selection memory voltage of 1.2 [V] may be applied to the gate. Thereby, in the read selection memory 2R, since the read selection switch voltage of 1.2 [V] is applied from the switch word line PWL1 to the switch gate electrode PG, the channel region facing the switch gate electrode PG can be turned on. .

  At this time, for example, when the memory gate insulating film 8 of the read selection memory 2R is broken down (data is written), the channel region facing the memory gate electrode NG has the same potential ( In this case, the read selection memory voltage is 1.2 [V]), and the read selection memory voltage can be applied to the bit line BL1 through the channel region in the on state facing the switch gate electrode PG. Thus, in the bit line BL1, the read selection bit voltage can change from low to high (for example, from 0 [V] to 0.7 [V]).

  On the other hand, when the memory gate insulating film 8 of the read selection memory 2R is not broken down (data is not written), the memory gate electrode NG and the channel region are in a non-conductive state, so that the switch gate electrode PG Even if the channel region opposite to is turned on, the read selection memory voltage from the memory word line NWL1 is not applied to the bit line BL1, and the read selection bit voltage of the bit line BL1 remains 0 [V] do not do. Thus, in the semiconductor memory device 1, it can be determined whether or not data is written in the read selection memory 2R based on the change in the voltage value of the bit line BL1.

  At this time, in the anti-fuse memory 2c that shares the read selection memory 2R and the bit line BL1 and does not read data, a read non-selection switch voltage of 0 [V] is applied to the switch word line PWL2. The channel region facing the switch gate electrode PG is in an off state (non-conducting state). Thereby, in the antifuse memory 2c, the electrical connection between the memory capacitor M and the bit line BL1 is cut off by the switch transistor S, and the read selection bit voltage of the bit line BL1 shared with the read selection memory 2R is not affected.

  On the other hand, a read unselected bit voltage of 1.2 [V] (here, 1.2 [V], but a voltage value can be arbitrarily selected within the range of 0 to 1.2 [V]) is applied to the bit line BL2 In the connected antifuse memories 2b and 2d that do not read data, the read unselected memory voltage of 1.2 [V], which is the same as the read unselected bit voltage, is applied from the memory word lines NWL1 and NWL2 to the memory gate electrode NG. Therefore, even if the memory gate insulating film 8 is broken down, the read / unselected bit voltage of the bit line BL2 does not fluctuate, and it cannot be determined whether or not data is written. Thus, the semiconductor memory device 1 can read only the desired data of the antifuse memory 2a.

  In the case of this embodiment, when the memory gate insulating film 8 of the antifuse memory 2b is broken down and a conduction path is formed between the memory gate electrode NG and the channel region during the data read operation, the data is If 0 [V] is applied to the bit line BL2 (non-selected column) to which only the anti-fuse memories 2b and 2d not to be read are connected, the voltage of 1.2 [V] of the memory word line NWL1 is changed to the anti-fuse memory 2b. As a result, the bit line BL2 is charged through, and a surplus current unrelated to reading is generated.

  Therefore, in the present invention, after both the bit lines BL1 and BL2 are initially charged to 1.2 [V], the bit line to which only the read unselected memory 2NR is connected remains 1.2 [V], and the read selected memory 2R Only the bit line BL1 connected to is discharged to 0 [V] so that the data in the read selection memory 2R can be read. As a result, the voltage of 1.2 [V] of the memory word line NWL1 does not charge the bit line BL2 through the antifuse memory 2b, and the generation of surplus current as described above can be prevented.

(4) Operation and Effect In the above configuration, for example, in the antifuse memory 2a, an N-type memory gate electrode NG formed on the memory gate insulating film 8 and a P-type switch gate formed on the switch gate insulating film 7 A PN junction diode is formed by joining the electrode PG, and the breakdown memory voltage applied to the memory gate electrode NG becomes a reverse bias voltage between the memory gate electrode NG and the switch gate electrode PG during the data write operation. I did it.

  As described above, in the antifuse memory 2a, the breakdown memory voltage that causes the breakdown of the memory gate insulating film 8 becomes a reverse bias voltage between the memory gate electrode NG and the switch gate electrode PG. The film thickness of the switch gate insulating film 7 can be reduced without being restricted by the voltage, and accordingly, a high-speed operation of the on / off operation in the channel region at the switch gate electrode PG can be realized at the time of data reading.

  Further, in this antifuse memory 2a, the data is the same as that of the switch gate insulating film 7 without performing special processing such as ion implantation of impurities into the memory gate insulating film to make it easy to break. Since the memory gate insulating film 8 can be formed with a film quality that is not easily destroyed during reading, even if the read selection memory voltage is repeatedly applied to the memory gate electrode NG, the memory gate insulating film 8 is not easily broken down, and the data The reliability with respect to the read information at the time of reading can be improved.

  Further, in this antifuse memory 2a, the memory gate electrode NG and the switch gate electrode PG have different work functions, so that the voltage at which the write selection switch voltage of the switch gate electrode PG is lowered by several [V] during the data write operation. Thus, the switch gate insulating film 7 can be formed thin as much as the voltage value to the switch gate insulating film 7 can be reduced.

  Note that the work functions of the switch gate electrode PG and the memory gate electrode NG are constant regardless of miniaturization (scaling) when compared with the same material. Therefore, as the film thickness of the switch gate insulating film 7 and the memory gate insulating film 8 between the gate electrode MG and the well W becomes thinner, the insulating state is maintained from the memory gate insulating film 8 in which dielectric breakdown occurs during the data write operation ( The difference in applied electric field between the switch gate insulating film 7 and the dielectric breakdown does not occur can be significant. At this time, in the antifuse memory 2a, the switch gate insulating film 7 and the memory gate insulating film 8 between the gate electrode MG and the well W can be thinned to reduce the size.

  Further, in the antifuse memory 2a, the switch gate electrode PG and the memory gate electrode NG are integrally formed so as to be adjacent to each other, so that there is no gap between the switch gate electrode PG and the memory gate electrode NG. Thus, it is possible to reduce the size in the width direction.

  Further, in the antifuse memory 2a, the switch gate insulating film 7 and the memory gate insulating film 8 can be formed to have the same film thickness. The manufacturing process can be simplified as compared with the antifuse memory (Patent Document 1) that needs to be formed.

  For example, if the gate insulating film of a transistor provided in the control circuit for controlling the antifuse memory 2a is 4 [nm] or less, the antifuse memory 2a includes a switch gate insulating film 7 and a memory gate insulating film. The film thickness of 8 can be formed as thin as the gate insulating film of the control circuit (4 [nm] or less), and for example, data writing can be realized with a low voltage of 5 [V] or less.

  In this case, in the semiconductor memory device 1 in which the antifuse memories 2a, 2b, 2c, and 2d are mounted, if the input / output voltage is, for example, a transistor of 2.5 [V], writing can be realized, and a high voltage element higher than that Do not need. Furthermore, when the film thickness of the memory gate insulating film 8 and the switch gate insulating film 7 is 2.5 [nm] or less, for example, data can be written at a low voltage of 3.5 [V] or less. Data can be written with only transistors from [V] to 1.8 [V].

  Further, in the antifuse memories 2a, 2b, 2c, and 2d, as described above, the gate insulating film of the transistor provided in the control circuit that controls the antifuse memories 2a, 2b, 2c, and 2d, the switch gate insulating film 7 and Since all the film thicknesses of the memory gate insulating film 8 can be formed to be the same, without providing a dedicated process for manufacturing the antifuse memories 2a, 2b, 2c, and 2d, the semiconductor manufacturing process for manufacturing the control circuit can simultaneously Thus, a semiconductor memory device in which both the control circuit and the antifuse memories 2a, 2b, 2c, and 2d are mounted can be easily manufactured.

(5) Other Embodiments (5-1) Semiconductor Memory Device According to Other Embodiments FIG. 4 showing the same reference numerals as those in FIG. This is different from the semiconductor memory device 1 according to the above-described embodiment in that one anti-fuse memory 2a, 2b, 2c, 2d shares one memory word line NWL1. In such a semiconductor memory device 21, when data is written only to the anti-fuse memory 2a in the first row and first column and no data is written to other anti-fuse memories, all the anti-fuse memories 2a, 2b, 2c , 2d, a destructive memory voltage of 5 [V] can be applied to the memory word line NWL1 shared by 2d.

  In this case, the principle of writing data to the write selection memory 2W and the principle of not writing data to the anti-fuse memory 2b sharing the switch word line PWL1 with the write selection memory 2W in the semiconductor memory device 21 are as described above. This is the same as the embodiment, and the effect obtained by the write selection memory 2W is also the same, so the description thereof is omitted here. Here, the antifuse memories 2c and 2d to which no data is written will be described below based on a principle different from the above-described embodiment.

  In this case, the bit line BL1 to which the write selection memory 2W is connected is applied with a destructive bit voltage of 0 [V], and only the antifuse memories 2b and 2d (write non-selection memory 2N) that do not write data are connected. A non-destructive bit voltage of 3 [V] can be applied to the other bit line BL2. Further, a write non-selection switch voltage of 0 [V] can be applied to the switch word line PWL1 to which only the antifuse memories 2c and 2d (write non-selection memory 2N) not writing data are connected.

  As a result, the antifuse memories 2c and 2d to which no data is written are connected to the channel of the well facing the switch gate electrode PG by the 0 [V] write non-select switch voltage applied from the switch word line PWL2 to the switch gate electrode PG. The region is turned off, and the electrical connection between the memory capacitor M and the bit lines BL1 and BL2 is cut off.

  Thereby, as shown in FIG. 5 in which the same reference numerals are assigned to the corresponding parts to FIG. 2, for example, in the antifuse memory 2c, a destructive memory voltage of 5 [V] is applied from the memory word line NWL1 to the memory gate electrode NG. Therefore, the breakdown memory voltage is transmitted to the well W, and the channel layer CH having a predetermined channel potential can be formed along the periphery of the well surface facing the memory gate electrode NG.

  At this time, in the anti-fuse memory 2c that does not write data, since the electrical connection between the memory capacitor M and the bit line BL1 is cut off, the channel layer CH formed on the surface of the well W is depleted around the channel layer CH. The layer D is formed, and the channel layer CH can be insulated from the switch transistor S and the bit line BL1.

  Here, a capacitance (hereinafter referred to as a gate insulating film capacitance) C2 obtained by the memory gate electrode NG and the memory gate insulating film 8 is formed in the well W and the capacitance of the depletion layer D surrounding the channel layer CH ( Assuming that the channel potential V of the channel layer CH is 3 times C1 (hereinafter referred to as depletion layer capacitance) (ie, C2 = 3 × C1), the channel potential V = (memory voltage MV−substrate voltage of the memory gate electrode) CN) × (gate insulating film capacitance C2 / (depletion layer capacitance C1 + gate insulating film capacitance C2)).

  Therefore, in this embodiment, since the substrate voltage CV is 0 [V] and the memory voltage MV of the memory gate electrode NG is 5 [V], the channel potential V is about 3.5 to 4 [V]. To rise. As a result, in the anti-fuse memory 2c that does not write data, the channel potential of the channel layer CH surrounded by the depletion layer D on the surface of the well W is applied even if a breakdown memory voltage of 5 [V] is applied to the memory gate electrode NG. Since V becomes a high potential, the voltage difference between the memory gate electrode NG and the channel layer CH becomes small, and the dielectric breakdown of the memory gate insulating film 8 can be prevented. Further, the antifuse memory 2d to which no data is written can also prevent the dielectric breakdown of the memory gate insulating film 8 based on the same principle as the antifuse memory 2c described above.

  However, when data is not written to the antifuse memories 2c and 2d based on this principle, the channel potential of the channel layer CH formed in the antifuse memories 2c and 2d is indefinite at the start of the data write operation, so There is a possibility that the voltage applied to the memory gate insulating film 8 in the data write operation varies depending on the voltages of the bit lines BL1 and BL2.

  Therefore, as shown in FIG. 4, first, after applying a reset voltage of, for example, 3 [V] to each bit line BL1, BL2 and each switch word line PWL1, PWL2, the antifuse memories 2c, 2d It is desirable to turn on the switch transistor S and raise the channel potential of the memory capacitor M to about 2.5 [V], and then turn off the switch word line PWL2 and set the bit line BL1 to 0 [V]. As a result, in the antifuse memories 2c and 2d to which no data is written, the channel layer CH of the memory capacitor M is disconnected from the outside by the voltage application from the switch word line PWL2, but the channel potential is fixed corresponding to 3 [V]. . Here, since the breakdown memory voltage of 5 [V] is applied to the memory word line NWL1, the channel potential can be further increased by capacitive coupling from the state where the channel potential is fixed.

(5-2) Detailed Configuration of Antifuse Memory According to Other Embodiment FIG. 6 is a cross-sectional view of an antifuse memory 22 according to another embodiment. It is the schematic which shows a structure. The antifuse memory 22 is different from the antifuse memories 2a, 2b, 2c, and 2d shown in FIG. 2 in that the memory gate electrode NG is placed on the switch gate electrode PG. Yes.

  As in the above-described embodiment, the antifuse memory 22 has a switch gate insulating film 7 and a memory gate insulating film 8 formed on the surface of the well W. The switch gate insulating film 7 and the memory gate insulating film 8 And a gate electrode MG1 is formed. The gate electrode MG1 has a configuration in which the memory gate electrode NG1 that forms the memory capacitor M1 is formed on the memory gate insulating film 8, and the switch gate electrode PG that forms the switch transistor S1 is formed on the switch gate insulating film 7. It has the structure made.

  In this embodiment, the gate electrode MG1 is formed with an N-type memory gate electrode NG so as to run from one side surface of the P-type switch gate electrode PG to a part of the upper surface. The switch gate electrode NG1 is joined to form a PN junction diode. Thus, even in the gate electrode MG1, when the memory voltage applied to the memory gate electrode NG1 is higher than the switch voltage applied to the switch gate electrode PG, the voltage application from the memory gate electrode NG1 to the switch gate electrode PG is reversed. The voltage is a directional bias, and the voltage application from the memory gate electrode NG1 to the switch gate electrode PG can be cut off.

  Even in this embodiment, the antifuse memory 22 has a switch gate electrode PG having a work function different from that of the memory gate electrode NG1, as in the above-described embodiment. The voltage value of the switch voltage applied from PG to the switch gate insulating film 7 can be reduced.

  In the above configuration, in the anti-fuse memory 22 shown in FIG. 6, the breakdown memory voltage that causes the dielectric breakdown of the memory gate insulating film 8 becomes a reverse bias voltage between the memory gate electrode NG1 and the switch gate electrode PG. The film thickness of the switch gate insulating film 7 can be reduced without being restricted by the high voltage breakdown memory voltage, and the high speed operation of the on / off operation in the channel region at the switch gate electrode PG can be realized correspondingly. .

  The antifuse memory 22 also has the same data as the switch gate insulating film 7 without performing special processing such as ion implantation of impurities into the memory gate insulating film to make it easy to break. Since the memory gate insulating film 8 can be formed with a film quality that is difficult to destroy when reading data, even if the read selection memory voltage is repeatedly applied to the memory gate electrode NG1, the memory gate insulating film 8 is not easily broken down, The reliability with respect to the read information at the time of reading can be improved.

  Furthermore, in this anti-fuse memory 22, the memory gate electrode NG1 and the switch gate electrode PG have different work functions, so that the voltage at which the write selection switch voltage of the switch gate electrode PG is lowered by several [V] during the data write operation. Thus, the switch gate insulating film 7 can be formed thin as much as the voltage value to the switch gate insulating film 7 can be reduced.

(5-3) Others The present invention is not limited to the present embodiment, and various modifications can be made within the scope of the gist of the present invention. For example, as shown in FIGS. The voltage values shown are examples, and various other voltage values may be applied.

  Further, in the above-described embodiment, all of the plurality of antifuse memories provided in the semiconductor memory devices 1 and 21 are the antifuses of the present invention in which PN junction diodes are formed by the memory gate electrodes NG and NG1 and the switch gate electrode PG. Although the case where the memories 2a, 2b, 2c, 2d, and 22 are described, the present invention is not limited to this, and at least one antifuse memory among the plurality of antifuse memories provided in the semiconductor memory device 1 is used. The semiconductor memory device may be an antifuse memory 2a, 2b, 2c, 2d, or 22 according to the present invention.

  In the above-described embodiment, the case where the film thickness of the switch gate insulating film 7 is formed to be the same as the film thickness of the memory gate insulating film 8 has been described. However, the present invention is not limited to this, and the switch gate insulating film As long as the thickness of the film is less than or equal to the thickness of the memory gate insulating film, the thickness of the switch gate insulating film and the memory gate insulating film may be various. However, the film thickness of each of the switch gate insulating film and the memory gate insulating film is preferably 4 [nm] or less, and more preferably 2.5 [nm] or less.

  Further, in the above-described embodiment, the N-type impurity diffusion region 5 is provided in the P-type well W, and the N-type memory gate electrode NG (NG1) is provided as the first conductivity type. The antifuse memories 2a, 2b, 2c and 2d (22) provided with the P-type switch gate electrode PG have been described. However, the present invention is not limited to this, and a P-type impurity diffusion region is provided in the N-type well. Further, an antifuse memory provided with a P-type memory gate electrode as the first conductivity type and an N-type switch gate electrode as the second conductivity type may be applied.

  In this case, when the well W is formed of the N type, the work function of the N type switch gate electrode PG arranged on the side of the impurity diffusion region 5 connected to the bit line BL1 is P type. Is selected to be smaller than the work function of the memory gate electrode NG. As a result, even in such an anti-fuse memory, the effective switch voltage (effective voltage) applied from the switch gate electrode to the switch gate insulating film changes the work function difference, thereby reducing the effective voltage with respect to the switch gate insulating film. obtain.

1,21 Semiconductor memory device
2a, 2b, 2c, 2d, 22 Antifuse memory
5 Impurity diffusion region
7 Switch gate insulation film
8 Memory gate insulating film
W Well
PG switch gate electrode
NG, NG1 Memory gate electrode
BL1, BL2 bit line
PWL1, PWL2 Switch word line
NWL1, NWL2 Memory word line

Claims (6)

A well having an impurity diffusion region connected to the bit line formed on the surface;
A memory gate insulating film formed on the well;
A memory gate electrode of a first conductivity type formed on the memory gate insulating film and applied with a destructive memory voltage that breaks down the memory gate insulating film;
A switch gate insulating film formed on the well between the impurity diffusion region and the memory gate insulating film and integrally formed with the memory gate insulating film;
The memory gate electrode is formed of a second conductivity type opposite to the conductivity type, and is formed on the switch gate insulating film, and includes a switch gate electrode joined to the memory gate electrode,
The antifuse memory, wherein the breakdown memory voltage applied to the memory gate electrode is a reverse bias voltage between the memory gate electrode and the switch gate electrode. The channel region of the well facing the switch gate electrode is switched to a conductive state, and a breakdown bit voltage from the bit line is applied to the channel region of the well facing the memory gate electrode, 2. The antifuse memory according to claim 1, wherein the memory gate insulating film is broken down by a voltage difference between a voltage and a breakdown memory voltage of the memory gate electrode. 3. The antifuse memory according to claim 1, wherein the film thickness of the switch gate insulating film is less than or equal to the film thickness of the memory gate insulating film. The work function difference and the effective voltage applied from the switch gate electrode to the switch gate insulating film are reduced by the work function of the memory gate electrode and the work function of the switch gate electrode being different. The antifuse memory according to claim 1, wherein the antifuse memory is characterized in that Antifuse memories are arranged at each intersection where a plurality of bit lines intersect with a plurality of switch word lines and a plurality of memory word lines,
The semiconductor memory device, wherein the antifuse memory is the antifuse memory according to any one of claims 1 to 4. And wherein a plurality of said anti-fuse memory shared one of said switch word line, at the other of the plurality of the antifuse memory shared with other said switch word lines, that they share the memory word line 6. The semiconductor memory device according to claim 5, wherein:

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