JP6327641B2 - レーザ走査型干渉計を用いた表面形状の計測方法 - Google Patents
レーザ走査型干渉計を用いた表面形状の計測方法 Download PDFInfo
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- JP6327641B2 JP6327641B2 JP2014109489A JP2014109489A JP6327641B2 JP 6327641 B2 JP6327641 B2 JP 6327641B2 JP 2014109489 A JP2014109489 A JP 2014109489A JP 2014109489 A JP2014109489 A JP 2014109489A JP 6327641 B2 JP6327641 B2 JP 6327641B2
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- light
- thin film
- measured
- scanning
- laser
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- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
実施例1のレーザ走査型干渉計において、金属薄膜の種類、特にその屈折率の相違により、異なるパターンの非正弦波状の干渉縞が得られることを実験により確認した。
4 ビームスプリッタ
7 走査ミラー
8 テレセントリックfθレンズ
9a 参照平面
10 被測定物
10a 被観察面
11 結像レンズ
12a ピンホール
13 受光素子
16 表示手段
Claims (1)
- 近接配置した参照板の参照平面及び被測定物の被観察面にレーザ光の走査光を照射し、前記参照平面及び前記被観察面からの反射光の光量を受光素子で計測し、反射光の干渉により生じる干渉縞の画像を得るレーザ走査干渉計を用いた表面形状の計測方法において、
前記参照平面を、透明材料基板に単層の金属薄膜を成膜した参照板により構成し、
前記透明材料基板の屈折率と前記金属薄膜の屈折率の関係と、測定された干渉縞の輝度分布の傾きの緩急の方向から、前記被観測面の形状の高低関係を判別する表面形状の計測方法。
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JP2014109489A JP6327641B2 (ja) | 2013-06-13 | 2014-05-27 | レーザ走査型干渉計を用いた表面形状の計測方法 |
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JP2013124938 | 2013-06-13 | ||
JP2013124938 | 2013-06-13 | ||
JP2014109489A JP6327641B2 (ja) | 2013-06-13 | 2014-05-27 | レーザ走査型干渉計を用いた表面形状の計測方法 |
Publications (2)
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JP2015017968A JP2015017968A (ja) | 2015-01-29 |
JP6327641B2 true JP6327641B2 (ja) | 2018-05-23 |
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JP2014109489A Expired - Fee Related JP6327641B2 (ja) | 2013-06-13 | 2014-05-27 | レーザ走査型干渉計を用いた表面形状の計測方法 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105628080B (zh) * | 2016-02-05 | 2017-09-22 | 中国科学院西安光学精密机械研究所 | 大光学动态范围探测器动态范围的标定装置和标定方法 |
CN107179575B (zh) | 2016-03-09 | 2022-05-24 | 松下知识产权经营株式会社 | 光检测装置及光检测系统 |
EP4220127A1 (en) * | 2020-09-23 | 2023-08-02 | Daikin Industries, Ltd. | Optical coherence tomography device and optical coherence tomography method |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58184902A (ja) * | 1982-04-23 | 1983-10-28 | Hitachi Ltd | 反射鏡 |
JPS59222711A (ja) * | 1983-06-02 | 1984-12-14 | Brother Ind Ltd | 平面形状表示装置 |
JPH08153405A (ja) * | 1994-06-21 | 1996-06-11 | Nakaya:Kk | 面状光源 |
JPH08122012A (ja) * | 1994-10-19 | 1996-05-17 | Fuji Photo Optical Co Ltd | 干渉計用基準板装置 |
US6847458B2 (en) * | 2003-03-20 | 2005-01-25 | Phase Shift Technology, Inc. | Method and apparatus for measuring the shape and thickness variation of polished opaque plates |
JP4494438B2 (ja) * | 2007-06-15 | 2010-06-30 | 株式会社オプセル | レーザ走査干渉計 |
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