JP6298343B2 - Wiring board manufacturing method - Google Patents

Wiring board manufacturing method Download PDF

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JP6298343B2
JP6298343B2 JP2014075106A JP2014075106A JP6298343B2 JP 6298343 B2 JP6298343 B2 JP 6298343B2 JP 2014075106 A JP2014075106 A JP 2014075106A JP 2014075106 A JP2014075106 A JP 2014075106A JP 6298343 B2 JP6298343 B2 JP 6298343B2
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conductor
substrate body
outer peripheral
double
base substrate
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JP2015198153A (en
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平野 聡
聡 平野
宗之 岩田
宗之 岩田
奈緒子 森
奈緒子 森
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NGK Spark Plug Co Ltd
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Description

本発明は、例えば、高周波信号を伝送するための2重導体を備えた配線基板の製造方法に関する。 The present invention may, for example, a method of manufacturing a wiring board having a double conductor for transmitting a high frequency signal.

高周波信号を伝送する際において、隣接する配線同士間の相互作用やノイズに起因する遅延や誤動作を防ぐため、複数のセラミック層を積層してなる絶縁基体内の前記セラミック層間に、断面が長方形(四角形)のメタライズ中心線路と、該中心線路を取り囲み且つ該中心線路と断面が相似形のセラミック線路と、該セラミック線路を取り囲み且つ該セラミック線路と断面が相似形のメタライズ外周線路とからなる2重構造の線路導体を形成してなる配線基板が提案されている(例えば、特許文献1参照)。   When transmitting a high-frequency signal, in order to prevent delay and malfunction due to interaction between adjacent wirings and noise, a cross section is rectangular between the ceramic layers in the insulating substrate formed by laminating a plurality of ceramic layers ( A quadrilateral metallized central line, a ceramic line surrounding the central line and having a cross section similar to the central line, and a double metallizing peripheral line surrounding the ceramic line and similar to the ceramic line in cross section. A wiring board formed by forming a line conductor having a structure has been proposed (for example, see Patent Document 1).

しかし、前記配線基板のように、線路導体の前記中心線路を伝送された高周波信号を前記絶縁基体の表面および裏面に形成したパッドに送信する場合、該パッド間を接続するビア導体と上記中心線路との端部とが直角に接続されている。かかる直角の接続部を伝送経路内に有すると、該直角の接続部に電流が集中するため、上記中心線路を伝送されて来た高周波信号の伝送損失が大きくなるので、該高周波信号の伝送信頼性が損なわれる、という問題点があった。   However, when the high-frequency signal transmitted through the central line of the line conductor is transmitted to the pads formed on the front surface and the back surface of the insulating base, like the wiring board, the via conductor connecting the pads and the central line Are connected at right angles to the ends. If such a right-angled connection portion is provided in the transmission path, current concentrates on the right-angled connection portion, so that transmission loss of the high-frequency signal transmitted through the center line is increased. There was a problem that the property was impaired.

特開2004−96056号公報(第1〜9頁、図1)JP 2004-96056 A (pages 1 to 9, FIG. 1)

本発明は、背景技術で説明した問題点を解決し、絶縁材からなる基板本体の内部に、例えば、高周波信号を伝送する中心導体と、該中心導体の周囲を絶縁部を介して囲む外周導体とからなる2重導体を配設し、該2重導体の中心導体に伝送される高周波信号を上記基板本体の表面や裏面などに形成したパッドなどに伝送損失を生じることなく正確に伝送できる配線基板の製造方法を提供する、ことを課題とする。 The present invention solves the problems described in the background art, and includes, for example, a central conductor that transmits a high-frequency signal, and an outer peripheral conductor that surrounds the periphery of the central conductor via an insulating portion inside a substrate body made of an insulating material. A wiring that can accurately transmit a high-frequency signal transmitted to the center conductor of the double conductor without causing transmission loss on a pad formed on the front surface or the back surface of the substrate body. to provide a method of manufacturing a board, it is an object.

課題を解決するための手段および発明の効果Means for Solving the Problems and Effects of the Invention

本発明は、前記課題を解決するため、中心導体と、該中心導体の周囲を絶縁部を介して囲む外周導体とからなる2重導体を、基板本体の表面と裏面との間、あるいは表面と側面との間において、少なくとも一部が連続した曲線形状にして配設する、ことに着想して成されたものである。
即ち、本発明の配線基板の製造方法(請求項1)は、絶縁材からなり、表面および裏面と、該表面と裏面との間に位置する側面とを有する基板本体と、該基板本体の表面と裏面との間、あるいは該基板本体の表面と側面との間に連続して配設され、中心導体および該中心導体を絶縁部を介して囲む外周導体からなる2重導体と、を備えた配線基板であって、前記2重導体は、上記基板本体の表面および裏面、あるいは該基板本体の表面および側面に両端面が露出すると共に、上記基板本体の表面と裏面との間、あるいは該基板本体の表面と側面との間において、少なくとも一部に曲がった曲がり部を有し、該曲がり部は、2次元方向あるいは3次元方向において曲線状に曲がった曲線部のみからなる配線基板の製造方法であって、
中心軸部と、該中心軸部を隙間を介して囲む外周筒部とを備え、かかる中心軸部および外周筒部の軸方向における一部に曲がった曲がり部を有し、該曲がり部が2次元方向あるいは3次元方向において曲線状に曲がった曲線部のみからなり、上記中心軸部および外周筒部の両端付近に、該中心軸部と外周筒部との間を接続し、且つ互いの間に上記隙間と外部との間を連通する複数の開口孔を画定する複数の接続部と、上記外周筒部に形成され且つ該外周筒部の内周面と外周面との間を連通する複数の溝または貫通孔とを備えた2重導体形成用の立体模型を準備する工程と、上記立体模型を、少なくとも該模型の両端面を除いて、粉末状、スラリー状、あるいは液状の絶縁材によって包囲することにより、表面および裏面と、該表面と裏面との間に位置する側面とを有し、上記模型の両端面が表面と裏面とに露出するか、表面と側面とに露出する素基板本体を形成する工程と、
上記素基板本体を加熱して、該素基板本体を構成している上記絶縁材を焼成あるいは硬化して空洞を内設する素基板本体を得ると共に、上記加熱過程で該素基板本体の内部から上記立体模型を除去する工程と、上記素基板本体の内部に位置し且つ上記立体模型が除去された跡に形成された上記空洞内に金属粉末を含む導電性ペーストを充填する工程と、上記空洞内に充填された導電性ペーストを加熱して硬化させることで、上記曲線部を含む前記2重導体が形成された素基板本体を得る工程と、上記素基板本体の表面と裏面と、あるいは表面と側面とを研磨して、少なくとも上記2重導体の両端付近に位置する上記複数の接続部が除去された跡に充填されていた上記導電性ペーストの硬化物を除去し且つ基板本体を形成する工程と、を含む、ことを特徴とする。
In order to solve the above-mentioned problem, the present invention provides a double conductor comprising a central conductor and an outer peripheral conductor surrounding the central conductor with an insulating part interposed between the front surface and the back surface of the substrate body, or the front surface. It is conceived that at least a part is arranged in a continuous curved shape between the side surfaces.
That is, the method for manufacturing a wiring board according to the present invention (Claim 1) comprises a substrate body made of an insulating material, having a front surface and a back surface, and a side surface located between the front surface and the back surface, and a surface of the substrate body. And a double conductor comprising a central conductor and an outer peripheral conductor that surrounds the central conductor with an insulating portion disposed between the rear surface and the back surface or between the front surface and the side surface of the substrate body. In the wiring board, the double conductor has both end surfaces exposed on the front and back surfaces of the substrate body, or the front and side surfaces of the substrate body, and between the front and back surfaces of the substrate body or the substrate. A method of manufacturing a wiring board having a bent portion bent at least in part between a surface and a side surface of the main body, and the bent portion only includes a curved portion bent in a two-dimensional direction or a three-dimensional direction. Because
A central shaft portion, and an outer peripheral cylindrical portion surrounding the central shaft portion with a gap between the central shaft portion and the outer peripheral cylindrical portion. It consists only of curved parts curved in a dimensional direction or a three-dimensional direction, and connects the central shaft part and the outer peripheral cylinder part in the vicinity of both ends of the central axial part and the outer peripheral cylindrical part, and between them. A plurality of connecting portions defining a plurality of opening holes communicating between the gap and the outside, and a plurality of connecting portions formed in the outer peripheral cylindrical portion and communicating between the inner peripheral surface and the outer peripheral surface of the outer peripheral cylindrical portion. A step of preparing a three-dimensional model for forming a double conductor having a groove or a through hole, and the three-dimensional model is made of a powder, slurry, or liquid insulating material except at least both end faces of the model. By enclosing, the front and back surfaces, and the front and back surfaces And a side surface located on the steps of both end faces of the model are either exposed to the front and rear surfaces, forming a arsenide substrate body exposed to the surface and side,
The base substrate body is heated, and the insulating material constituting the base substrate body is baked or cured to obtain a base substrate body in which a cavity is provided, and from the inside of the base substrate body in the heating process. Removing the solid model, filling a conductive paste containing metal powder into the cavity formed in the trace of the solid model located inside the base substrate body, and the cavity A step of obtaining a base substrate body on which the double conductor including the curved portion is formed by heating and curing the conductive paste filled therein; and a front surface and a back surface of the base substrate body; And the side surfaces are polished to remove the cured product of the conductive paste filled in the traces from which the plurality of connecting portions located at least near both ends of the double conductor are removed, and form a substrate body. and a step, the, And wherein the door.

これによれば、前記基板本体の表面および裏面、あるいは該基板本体の表面および側面に両端面が露出し、上記基板本体の表面と裏面との間、あるいは該基板本体の表面と側面との間において、少なくとも軸方向の一部に曲がった曲がり部を有し、該曲がり部は、2次元方向あるいは3次元方向において曲線状に曲かった曲線部のみからなる2重導体を上記基板本体の内部に有する配線基板を、確実に製造することが可能となるAccording to this, both end surfaces are exposed on the front and back surfaces of the substrate body, or the front and side surfaces of the substrate body, and between the front and back surfaces of the substrate body or between the front and side surfaces of the substrate body. And having a bent portion bent at least in a part in the axial direction, and the bent portion includes a double conductor composed only of a curved portion bent in a two-dimensional direction or a three-dimensional direction in the interior of the substrate body. It is possible to reliably manufacture the wiring board included in the above .

尚、前記基板本体を構成する絶縁材は、セラミックあるいは樹脂であり、該セラミックには、例えば、アルミナなどの高温焼成セラミックやガラス−セラミックなどの低温焼成セラミックが含まれ、上記樹脂には、熱硬化性で且つ耐熱性の合成樹脂(例えば、エポキシ、ポリエステル、ポリイミド樹脂など)が含まれる。
また、前記2重導体は、主に熱伝導性に優れた金属からなり、該金属には、W、Mo、Ag、Cuなどやこれらの何れかを主成分とする合金が含まれる。
更に、前記2重導体は、例えば、高周波信号が流される中心導体と、その周囲を絶縁材からなる絶縁部を介して包囲し且つ外部からのノイズなどの影響を阻止する外周導体とからなる所謂シールドパターンとしても用いられる。
また、前記2次元方向とは、互いに直交するX(左右)方向、Y(前後)方向、およびZ(垂直)方向の何れか2つであり、前記3次元方向は、上記X方向、Y方向、およびZ方向の全てを指す。
更に、前記2重導体は、前記曲がり部のみからなる形態のほか、該曲がり部と、2次元または3次元方向において直線状の直線部とからなる形態でも良い。
加えて、前記基板本体の内部には、前記2重導体との間に所定の距離を置いたグランド(接地層)などの配線層と、該配線層を外部に導通するためのビア導体と、該ビア導体の両端に接続されたパッドとが別個に配設されている。
The insulating material constituting the substrate body is a ceramic or a resin, and the ceramic includes, for example, a high-temperature fired ceramic such as alumina and a low-temperature fired ceramic such as glass-ceramic. A curable and heat-resistant synthetic resin (for example, epoxy, polyester, polyimide resin, etc.) is included.
The double conductor is mainly made of a metal having excellent thermal conductivity, and the metal includes W, Mo, Ag, Cu, or an alloy containing any one of them as a main component.
Further, the double conductor is, for example, a so-called center conductor through which a high-frequency signal flows, and a so-called outer conductor that surrounds the periphery with an insulating portion made of an insulating material and prevents the influence of external noise and the like. Also used as a shield pattern.
Further, the two-dimensional direction is any two of an X (left / right) direction, a Y (front / rear) direction, and a Z (vertical) direction orthogonal to each other, and the three-dimensional direction is the X direction or the Y direction. , And all in the Z direction.
Further, the double conductor may be formed not only from the bent portion but also from the bent portion and a straight linear portion in a two-dimensional or three-dimensional direction.
In addition, in the inside of the substrate body, a wiring layer such as a ground (grounding layer) with a predetermined distance between the double conductor, and a via conductor for conducting the wiring layer to the outside, Pads connected to both ends of the via conductor are separately provided.

尚、前記立体模型は、前記隙間を含む立体的な前記2重導体を専用に形成するものであり、例えば、3次元(3D)プリンタを用いて、樹脂粉末、ロウ、低融点金属の粉末、あるいは低融点合金の粉末の何れかを、該模型の一端側から他端側に向かって順次供給しつつ積層して行くことで形成される In addition, the three-dimensional model is formed exclusively for the three-dimensional double conductor including the gap. For example, using a three-dimensional (3D) printer, resin powder, wax, low melting point metal powder, Or it forms by laminating | stacking one of the powders of a low melting-point alloy, supplying in order toward the other end side from the one end side of this model .

また、前記導電性ペーストに含まれる金属粉末は、前記素基板本体の空洞内への充填し易さの観点から、平均粒径で1μm以下とすることが望ましい In addition, it is desirable that the metal powder contained in the conductive paste has an average particle diameter of 1 μm or less from the viewpoint of easy filling into the cavity of the base substrate body .

更に、前記素基板本体を加熱することにより前記模型を除去する工程は、前記絶縁材がセラミックからなる場合、当該セラミックを焼成すると共に、その加熱過程で前記模型を形成していた前記樹脂やロウを素基板本体の外部に蒸発ないし昇華させることで行われる Further, in the step of removing the model by heating the base substrate body, in the case where the insulating material is made of ceramic, the ceramic or the ceramic or the brazing material that has formed the model in the heating process is fired. Is performed by evaporating or sublimating the substrate to the outside of the base substrate body .

加えて、前記素基板本体を加熱して得られる空洞を含む素基板本体から前記模型を除去する工程は、前記絶縁材が熱硬化性樹脂からなる場合、当該熱硬化性樹脂を形成している熱硬化性樹脂を硬化温度以上に加熱すると共に、その過程で前記模型を形成していた前記ロウ、金属粉末、あるいは合金粉末を液状化して、素基板本体の外部に流出させることで行われる In addition, the step of removing the model from the base substrate body including a cavity obtained by heating the base substrate body forms the thermosetting resin when the insulating material is made of a thermosetting resin. This is performed by heating the thermosetting resin to a temperature equal to or higher than the curing temperature, and liquefying the wax, metal powder, or alloy powder that formed the model in the process and letting it flow out of the base substrate body .

また、本発明には、前記導電性ペーストの硬化物を除去し且つ基板本体を形成する工程の後に、該2重導体の両端面が露出する上記基板本体の表面および裏面、あるいは表面および側面において、前記中心導体の端面および外周導体の端面と個別に接続する内外2重のパッドあるいは内外2重の側面導体を形成する工程を更に有する、配線基板の製造方法(請求項)も含まれる。
これによれば、内側のパッドあるいは内側の側面導体を介して、前記2重導体の中心導体の一端側に高周波信号などを送信でき、且つ該中心導体の他端側から上記とは別の内側のパッドあるいは内側の側面導体を介して、上記高周波信号などを外部に伝送できると共に、これらの周囲全体を2重導体の外周導体および外側のパッドあるいは外側の側面導体によって、電気的にシールドできる配線基板を確実に提供することができる。
Further, the present invention provides a method for removing the cured product of the conductive paste and forming the substrate body on the front and back surfaces, or the front and side surfaces of the substrate body where both end faces of the double conductor are exposed. Also included is a method of manufacturing a wiring board (Claim 2 ), further comprising a step of forming inner and outer double pads or inner and outer double side conductors individually connected to the end face of the central conductor and the end face of the outer peripheral conductor.
According to this, a high-frequency signal or the like can be transmitted to one end side of the central conductor of the double conductor via the inner pad or the inner side conductor, and the inner side different from the above from the other end side of the central conductor. The above-mentioned high-frequency signal can be transmitted to the outside via the inner pad or the inner side conductor, and the entire periphery can be electrically shielded by the outer conductor of the double conductor and the outer pad or the outer side conductor. A substrate can be reliably provided.

本発明により得られる一形態の配線基板を示す垂直断面図。Vertical cross-sectional view illustrating a wiring board of an embodiment that obtained Ri by the present invention. 上記配線基板の平面図。The top view of the said wiring board. (A)は本発明による上記配線基板を得るため製造方法に用いる立体模型の垂直断面図、(B)は該模型の上端部を示す平面図、(C)は該上端部付近の斜視図。(A) is a vertical sectional view of a three-dimensional model used in the manufacturing method for obtaining the wiring board according to the present invention , (B) is a plan view showing an upper end portion of the model, and (C) is a perspective view near the upper end portion. 前記配線基板の製造方法にける一工程を示す概略図。Schematic which shows 1 process in the manufacturing method of the said wiring board. 図4の工程に続く工程を示す概略図。Schematic which shows the process following the process of FIG. 図5の工程に続く工程を示す概略図。FIG. 6 is a schematic view showing a step that follows the step of FIG. 5. 図6の工程に続く工程を示す概略図。Schematic which shows the process following the process of FIG. 図7の工程に続く工程および前記配線基板の要部を示す概略図。Schematic which shows the process following the process of FIG. 7, and the principal part of the said wiring board. 本発明により得られる異なる形態の配線基板を示す垂直断面図。 The vertical sectional view which shows the wiring board of a different form obtained by this invention . 本発明により得られる更に異なる形態の配線基板を示す垂直断面図。 The vertical sectional view which shows the wiring board of the further different form obtained by this invention . 本発明により得られる更に別異な形態の配線基板を示す垂直断面図。 The vertical sectional view which shows the wiring board of another different form obtained by this invention .

以下において、本発明を実施するための形態について説明する。
図1は、本発明により得られる一形態の配線基板1aを示す垂直断面図、図2は、かかる配線基板1aの平面図である。
上記配線基板1aは、図1,図2に示すように、セラミック(絶縁材)からなり、表面3および裏面4と、該表面3と裏面4との周辺間に位置する四辺の側面5とを有する全体が直方体状の基板本体2と、該基板本体2の表面3と裏面4との間に連続して形成され、断面の中心部に位置する中心導体11、および該中心導体11の周囲を上記と同じセラミックからなる絶縁部12を介して囲む外周導体13からなる2重導体10aと、を備えている。
尚、上記基板本体2および絶縁部12を構成するセラミックは、例えば、ガラス−セラミックからなる。
Hereinafter, modes for carrying out the present invention will be described.
Figure 1 is a vertical sectional view showing a wiring substrate 1a of a form that obtained Ri by the present invention, FIG. 2 is a plan view of a wiring substrate 1a.
As shown in FIGS. 1 and 2, the wiring board 1 a is made of ceramic (insulating material), and includes a front surface 3 and a back surface 4, and four side surfaces 5 positioned between the front surface 3 and the back surface 4. A substrate body 2 having a rectangular parallelepiped shape as a whole, a central conductor 11 formed continuously between the front surface 3 and the back surface 4 of the substrate main body 2 and positioned at the center of the cross section, and the periphery of the central conductor 11 A double conductor 10a made of an outer peripheral conductor 13 surrounded by an insulating portion 12 made of the same ceramic as described above.
In addition, the ceramic which comprises the said board | substrate main body 2 and the insulation part 12 consists of glass-ceramics, for example.

前記2重導体10aは、断面が円形の中心導体11と、該中心導体11と内形および外形が相似形(円環形)状の絶縁部12および外周導体13とからなり、かかる中心導体11、絶縁部12、および外周導体13は、互いに同心状である。図1,図2において、該2重導体10aの軸方向に沿った上部と下部とには、3次元方向において曲線状に曲がった上下一対の曲がり部cpを有している。尚、かかる一対の曲がり部cp同士の間には、3次元方向において直線状を呈する直線部が位置している。
図1,図2に示すように、前記2重導体10aにおける中心導体11および外周導体13の前記表面3および裏面4に個別に露出する上端面および下端面には、それぞれ平面視が円形の内側パッド14,16および平面視がリング形状の外側パッド15,17がそれぞれ同心円状にして個別に接続されている。
The double conductor 10a includes a central conductor 11 having a circular cross section, an insulating portion 12 and an outer peripheral conductor 13 having an inner shape and an outer shape similar to the central conductor 11, and an outer peripheral conductor 13. The insulating part 12 and the outer peripheral conductor 13 are concentric with each other. 1 and 2, the upper and lower portions along the axial direction of the double conductor 10a have a pair of upper and lower bent portions cp bent in a curved shape in the three-dimensional direction. Note that a straight line portion that is linear in the three-dimensional direction is located between the pair of bent portions cp.
As shown in FIG. 1 and FIG. 2, the upper and lower end surfaces of the double conductor 10a that are individually exposed on the front surface 3 and the back surface 4 of the center conductor 11 and the outer conductor 13 are respectively circular inside in a plan view. The pads 14 and 16 and the outer pads 15 and 17 having a ring shape in plan view are concentrically connected to each other and are individually connected.

また、前記基板本体2内には、その表面3と裏面4との間を貫通するビア導体6a,6bが別に配設されている。該ビア導体6a,6bは、上記表面3と裏面4とに対して垂直な上下一対の直線部7とこれらの間を接続する傾斜部8とからなる。尚、図1中の破線で示すように、上記ビア導体6a,6bには、基板本体2の表面3および裏面4と平行な配線層(例えば、接地層)7gを更に接続していても良い。上記ビア導体6a,6bの前記表面3および裏面4に個別に露出する上端面および下端面には、円盤状の表面パッド18および裏面パッド19が個別に接続されている。
また、上記傾斜部8には、図1の前後方向に張り出した配線層を併設しても良い。
更に、前記中心導体11、外周導体13、およびビア導体6a,6bは、例えば、AgあるいはCuからなる。
In the substrate body 2, via conductors 6a and 6b penetrating between the front surface 3 and the back surface 4 are separately provided. The via conductors 6a and 6b are composed of a pair of upper and lower straight portions 7 perpendicular to the front surface 3 and the back surface 4 and an inclined portion 8 connecting between them. As indicated by broken lines in FIG. 1, a wiring layer (for example, a ground layer) 7g parallel to the front surface 3 and the back surface 4 of the substrate body 2 may be further connected to the via conductors 6a and 6b. . Disc-shaped surface pads 18 and back surface pads 19 are individually connected to the upper and lower surfaces of the via conductors 6a and 6b that are individually exposed on the front surface 3 and the back surface 4.
The inclined portion 8 may be provided with a wiring layer extending in the front-rear direction of FIG.
Further, the central conductor 11, the outer peripheral conductor 13, and the via conductors 6a and 6b are made of Ag or Cu, for example.

前記のような配線基板1aによれば、前記基板本体2の表面3および裏面4に両端面が露出し、且つこれらの間に連続して配設される2重導体10aは、上部および下部に曲がった二つの曲がり部cpを有し、該曲がり部cpは、3次元方向において曲線状に曲がった曲線部のみからなっている。その結果、該2重導体10aの中心導体11を伝送される高周波信号を基板本体2の表面3や裏面4などに形成されたパッド14,16に伝送損失を生じることなく伝送することができる。更に、前記2重導体10aは、従来の中心線路とビア導体とを兼ねているので、該中心線路とビア導体との間での接続不良や断線のおそれが皆無となる。   According to the wiring board 1a as described above, the double conductors 10a having both end surfaces exposed on the front surface 3 and the back surface 4 of the substrate body 2 and continuously disposed between them are formed on the upper and lower portions. The bent portion cp has two bent portions cp, and the bent portion cp includes only a curved portion that is curved in a three-dimensional direction. As a result, a high frequency signal transmitted through the central conductor 11 of the double conductor 10a can be transmitted to the pads 14 and 16 formed on the front surface 3 and the back surface 4 of the substrate body 2 without causing transmission loss. Furthermore, since the double conductor 10a serves as both a conventional center line and a via conductor, there is no possibility of poor connection or disconnection between the center line and the via conductor.

更に、前記中心導体11の断面が円形であるため、背景技術で説明した断面四角形の前記メタライズ中心線路のように、四隅の角部への表皮効果による電流集中を確実に抑制できる。しかも、接地層である前記配線層7gと2重導体10aとの距離が一定でなく、常に両者間の最接近部よりも互いの距離が広くなり、両者間に生じる寄生容量を従来の形態よりも小さくできるので、上記2重導体10aの中心導体11における高周波特性を向上させることも可能となる。従って、高周波信号などの伝送特性に優れた配線基板1aを確実に提供することができる。
尚、前記中心導体11の断面は、楕円形あるいは長円形にすると共に、これらを囲む絶縁部12および外周導体13の内形および外形も、上記と相似形の楕円形あるいは長円形とした形態としても良い。
また、前記2重導体10aの曲がり部cpは、X、Y、Z方向のうち、何れか二つの2次元方向において曲線状に曲がった曲線部からなるものとしても良い。
Furthermore, since the cross section of the central conductor 11 is circular, current concentration due to the skin effect on the corners of the four corners can be reliably suppressed as in the metallized central line having a quadrangular cross section described in the background art. In addition, the distance between the wiring layer 7g, which is the ground layer, and the double conductor 10a is not constant, and the mutual distance is always wider than the closest part between the two, and the parasitic capacitance generated between the two is larger than that of the conventional form. Therefore, it is possible to improve the high frequency characteristics of the central conductor 11 of the double conductor 10a. Therefore, it is possible to reliably provide the wiring board 1a having excellent transmission characteristics such as high-frequency signals.
The cross-section of the central conductor 11 is elliptical or oval, and the inner shape and outer shape of the insulating portion 12 and the outer peripheral conductor 13 surrounding these are also oval or oval similar to the above. Also good.
The bent portion cp of the double conductor 10a may be a curved portion bent in a curved shape in any two two-dimensional directions among the X, Y, and Z directions.

以下において、本発明による前記配線基板1aの製造方法を、前記2重導体10a付近に限定して説明する。
予め、図3(A)の垂直断面図で示すように、前記2重導体10aを形成するための立体模型20を準備した。かかる立体模型20は、平均粒径が1〜50μmであるアクリル樹脂の粉末および接着剤などからなる液状の原料を、図示しない3次元プリンタを用いて、図3(A)に示すように、軸方向の中心線に沿った中心軸部21と、該中心軸部21の周囲を円筒形状の隙間22を介して囲む円筒形状の外周筒部23とを備え、該中心軸部21、隙間22、および外周筒部23の軸方向における上部と下部とに3次元方向において曲線状に曲がった上下一対の曲がり部cpを有するように、図示において垂直方向に沿って順次積み重ねて行くことにより成形した(立体模型を準備する工程)。
Hereinafter, the method for manufacturing the wiring board 1a according to the present invention will be described by limiting it to the vicinity of the double conductor 10a.
As shown in the vertical cross-sectional view of FIG. 3A, a three-dimensional model 20 for forming the double conductor 10a was prepared in advance. As shown in FIG. 3 (A), the three-dimensional model 20 uses a three-dimensional printer (not shown) as a liquid raw material made of an acrylic resin powder and an adhesive having an average particle diameter of 1 to 50 μm. A central shaft portion 21 along the center line of the direction, and a cylindrical outer peripheral cylindrical portion 23 surrounding the central shaft portion 21 via a cylindrical gap 22, the central shaft portion 21, the gap 22, In addition, the upper and lower portions in the axial direction of the outer peripheral cylindrical portion 23 are formed by sequentially stacking along the vertical direction in the drawing so as to have a pair of upper and lower bent portions cp curved in a three-dimensional direction ( Step of preparing a three-dimensional model).

また、前記立体模型20は、図3(B)の上端面の平面図、および図3(C)の上端部付近の斜視図で例示するように、その両端付近には、中心軸部21と外周筒部23との間を接続し、上記隙間22と外部との間を連通する4個(複数)の開口孔26を画定する4個(複数)の接続部25が形成されている。
更に、図3(C)に示すように、外周筒部23の両端部の内側ごとには、前記中心軸部21および接続部25のない凹部27が位置し、該凹部27と外部とは、外周筒部23の上端面(端面)24付近の内周面と外周面との間を連通する4個(複数)の凹溝28を介して連通されている。該凹溝28、凹部27、および上記開口孔26内に追って充填されるセラミック部は、上記隙間22内に追って充填されるパイプ状のセラミック部をその両端で支持するための支持部となる。
Further, as illustrated in the plan view of the upper end surface of FIG. 3B and the perspective view of the vicinity of the upper end portion of FIG. Four (a plurality of) connecting portions 25 are formed that connect the outer peripheral cylindrical portion 23 and define four (a plurality of) opening holes 26 that communicate between the gap 22 and the outside.
Further, as shown in FIG. 3 (C), a concave portion 27 without the central shaft portion 21 and the connecting portion 25 is located inside each end portion of the outer peripheral cylindrical portion 23. The outer peripheral cylindrical portion 23 is communicated via four (a plurality of) concave grooves 28 communicating between the inner peripheral surface near the upper end surface (end surface) 24 and the outer peripheral surface. The ceramic portion that is filled in the concave groove 28, the concave portion 27, and the opening hole 26 becomes a support portion for supporting the pipe-shaped ceramic portion that is filled in the gap 22 at both ends thereof.

次いで、図示しない型内に配設された直方体状のキャビティ内に、前記立体模型20をその上・下端面のみを該キャビティの天井面および床面に接触させて拘束した状態として、上記キャビティ内にガラス−セラミック(絶縁材)のスラリをゲルキャスト法によって充填した。尚、上記キャビティ内には、前記ビア導体6a,6bを形成するための二つの立体模型(図示せず)を併せて配置した。
その結果、図4(A)に示すように、前記ガラス−セラミックのスラリが乾燥した生のセラミック体からなり、表面33、裏面34、およびこれらの四辺間に位置する側面35を有し、上記立体模型20の上下の両端面24が表面33と裏面34とに個別に露出している素基板本体30が得られた(素基板本体を形成する工程)。
図4(A)中の一点鎖線部分Bを拡大した図4(B)で例示するように、前記隙間22内に充填されたパイプ状で未焼成のセラミック部36は、複数の開口孔26内に充填された未焼成のセラミック部(45)、前記凹部27内に充填された未焼成のセラミック部37、および複数の凹溝28内に充填された未焼成のセラミック部38を介して、これらの周囲に位置する素基板本体30の未焼成のセラミック部分と接続されていた。
Next, in the rectangular parallelepiped cavity disposed in a mold (not shown), the solid model 20 is constrained by contacting only the upper and lower end surfaces thereof with the ceiling surface and floor surface of the cavity. A glass-ceramic (insulating material) slurry was filled in by gel casting. In the cavity, two three-dimensional models (not shown) for forming the via conductors 6a and 6b were disposed together.
As a result, as shown in FIG. 4 (A), the glass-ceramic slurry is made of a dried raw ceramic body, and has a front surface 33, a back surface 34, and a side surface 35 located between these four sides, The base substrate body 30 was obtained in which the upper and lower end faces 24 of the three-dimensional model 20 were individually exposed on the front surface 33 and the back surface 34 (step of forming the base substrate body).
As illustrated in FIG. 4B in which the one-dot chain line portion B in FIG. 4A is enlarged, the pipe-shaped unfired ceramic portion 36 filled in the gap 22 is formed in the plurality of opening holes 26. Through the unfired ceramic part (45) filled in the recess 27, the unfired ceramic part 37 filled in the recess 27, and the unfired ceramic part 38 filled in the plurality of grooves 28. Connected to the unfired ceramic portion of the base substrate body 30 located around the substrate.

更に、前記素基板本体30を所定の温度帯に加熱して、該素基板本体30を構成している前記各セラミック部を焼成した。かかる加熱過程において、前記立体模型20を構成していた前記アクリル樹脂の粉末や接着剤などは、当該立体模型20の上端面から順次外部に蒸発していった。
その結果、図5(A)に示すように、ガラス−セラミックからなり、表面33、裏面34、およびこれらの四辺間に位置する側面35を有し、上記立体模型20が蒸発して除去された跡には、該立体模型20と相似形の空洞部40が内部に形成された素基板本体31が得られた(立体模型を除去する工程)。
Further, the base substrate body 30 was heated to a predetermined temperature range, and the ceramic parts constituting the base substrate body 30 were fired. In this heating process, the acrylic resin powder, adhesive, and the like constituting the three-dimensional model 20 were sequentially evaporated from the upper end surface of the three-dimensional model 20 to the outside.
As a result, as shown in FIG. 5A, the solid model 20 is made of glass-ceramic, has a front surface 33, a back surface 34, and a side surface 35 positioned between these four sides, and the three-dimensional model 20 is removed by evaporation. As a result, a base substrate body 31 having a cavity 40 similar to the three-dimensional model 20 formed therein was obtained (step of removing the three-dimensional model).

前記空洞部40は、前記中心軸部21と外周筒部23とが除去された跡に位置する中心空洞部41および外周空洞部43を備え、これらの軸方向の上部および下部に前記中心軸部21や外周筒部23と同様の曲がり部cpを有していた。尚、図5(A)中の符号44は、外周空洞部43の両端における開口部である。
更に、図5(A)中の一点鎖線部分Bを拡大した図5(B)で例示するように、前記隙間22内に充填された後に焼成されたパイプ状のセラミック部36は、複数の開口孔26内に充填された焼成済みのセラミック部45、前記凹部27内に充填された焼成済みのセラミック部37、および複数の凹溝28内ごとに充填された焼成済みのセラミック部38を介して、周囲の素基板本体31のセラミック部分と接続されることで、該セラミック部分に支持されていた。
The hollow portion 40 includes a central cavity portion 41 and an outer peripheral cavity portion 43 that are located at the trace where the central shaft portion 21 and the outer peripheral cylindrical portion 23 are removed, and the central shaft portion is located above and below in the axial direction. 21 and the outer peripheral cylinder part 23 had the same bending part cp. Note that reference numeral 44 in FIG. 5A denotes openings at both ends of the outer peripheral cavity 43.
Furthermore, as illustrated in FIG. 5B in which the one-dot chain line portion B in FIG. 5A is enlarged, the pipe-shaped ceramic portion 36 that is fired after being filled in the gap 22 has a plurality of openings. Via the fired ceramic part 45 filled in the hole 26, the fired ceramic part 37 filled in the recess 27, and the fired ceramic part 38 filled in each of the plurality of concave grooves 28 By being connected to the ceramic portion of the surrounding base substrate body 31, it was supported by the ceramic portion.

次に、前記空洞40内にAg粉末あるいはCu粉末(金属粉末)を含む導電性ペーストを前記表面33側から充填した(導電性ペーストを充填する工程)。
その結果、図6に示すように、前記空洞40内に上記導電性ペーストからなる中心導体11、隙間12、および外周導体13を備えた未硬化の2重導体10aが形成された素基板本体32が得られると共に、前記2重導体10aの両端付近における前記接続部25の跡には、未硬化で複数の接続片29が形成されていた。
更に、未硬化の2重導体10aを内設する素基板本体32を、所定の温度帯に加熱して、上記2重導体10aを硬化(キュア)させた。その結果、硬化した2重導体10aを内設している素基板本体32が得られた(2重導体が形成された素基板本体を得る工程)。
Next, a conductive paste containing Ag powder or Cu powder (metal powder) was filled into the cavity 40 from the surface 33 side (step of filling the conductive paste).
As a result, as shown in FIG. 6, the base substrate body 32 in which the uncured double conductor 10 a including the central conductor 11, the gap 12, and the outer peripheral conductor 13 made of the conductive paste is formed in the cavity 40. In addition, a plurality of connection pieces 29 are formed on the trace of the connection portion 25 in the vicinity of both ends of the double conductor 10a.
Further, the base substrate body 32 in which the uncured double conductor 10a is provided was heated to a predetermined temperature range to cure (cure) the double conductor 10a. As a result, the base substrate main body 32 in which the cured double conductor 10a was provided was obtained (step of obtaining the base substrate main body on which the double conductor was formed).

次いで、前記素基板本体32の表面33および裏面34を所要の厚みで研磨した。その結果、図7に示すように、前記表面3、裏面4、および側面5を有すると共に、硬化後の前記2重導体10aにおける両端部付近に位置していた複数の前記接続片(硬化物)29、セラミック部37,38,45が除去された基板本体2を得ることができた(硬化物の除去および基板本体を形成する工程)。
そして、上記基板本体2の表面3および裏面4に露出する2重導体10aの中心導体11および外周導体13の両端面ごとに、Ti合金をスパッタリングして、互いに同心の円形およびリング形状を呈する一対の下地金属層を形成し、該下地金属層ごとの表面にCuをスパッタリングして表層金属層を積層してパッド本体を形成し、その表面にNiメッキおよびAuメッキを順次施した。
尚、前記ビア導体6a,6bの両端面に接続する表・裏面パッド18,19も上記と同様の方法によって形成した。
Next, the front surface 33 and the back surface 34 of the base substrate body 32 were polished to a required thickness. As a result, as shown in FIG. 7, the plurality of connection pieces (cured products) that have the front surface 3, the back surface 4, and the side surface 5 and are located near both end portions of the double conductor 10 a after curing. 29. The substrate body 2 from which the ceramic portions 37, 38, 45 were removed was obtained (step of removing the cured product and forming the substrate body).
Then, a Ti alloy is sputtered on both end surfaces of the central conductor 11 and the outer peripheral conductor 13 of the double conductor 10a exposed on the front surface 3 and the back surface 4 of the substrate body 2 to form a pair of concentric circles and rings. The base metal layer was formed, Cu was sputtered on the surface of each base metal layer, and the surface metal layer was laminated to form a pad body, and Ni plating and Au plating were sequentially applied to the surface.
The front and back pads 18 and 19 connected to both end faces of the via conductors 6a and 6b were also formed by the same method as described above.

その結果、図8に示すように、上記中心導体11の両端面に内側パッド14,16が形成されると共に、上記外周導体13の両端面に外側パッド15,17が形成された前記配線基板1aを得ることができた。
尚、前記パッド14〜17は、導電性ペーストを所定の形状でスクリーン印刷した後、これらの硬化処理を行うことにより形成しても良い。
以上のような配線基板1aの製造方法によれば、前記基板本体2の表面3および裏面4に両端面が露出し、該基板本体2の表面3と裏面4との間において、少なくとも軸方向の一部に曲がった曲がり部cpを有し、該曲がり部cpは、3次元方向において曲線状に曲がった曲線部のみからなる2重導体10aを内部に有する前記配線基板1aを、確実に製造することができた。
As a result, as shown in FIG. 8, the wiring board 1a has inner pads 14 and 16 formed on both end faces of the central conductor 11 and outer pads 15 and 17 formed on both end faces of the outer conductor 13. Could get.
The pads 14 to 17 may be formed by screen-printing a conductive paste in a predetermined shape and then performing these curing processes.
According to the manufacturing method of the wiring board 1a as described above, both end surfaces are exposed on the front surface 3 and the back surface 4 of the substrate body 2, and at least the axial direction is provided between the front surface 3 and the back surface 4 of the substrate body 2. The wiring board 1a having the bent portion cp bent in part and having the double conductor 10a including only the curved portion bent in a curved shape in the three-dimensional direction is reliably manufactured. I was able to.

図9は、本発明により得られる異なる形態の配線基板1bを示す垂直断面図である。
上記配線基板1bは、図9に示すように、基板本体2と、ビア導体6a,6bと、基板本体2の表面3と裏面4との間に連続して配設された2重導体10bとを備えている。該2重導体10bは、断面において前記同様の中心導体11、絶縁部12、および外周導体13を有すると共に、基板本体2の表面3と裏面4との間の軸方向における上側と下側とに、図9に示すように、二つの曲がり部cpが互いに逆向き(線対称)に接続されている。
FIG. 9 is a vertical sectional view showing a wiring board 1b of a different form obtained by the present invention .
As shown in FIG. 9, the wiring substrate 1b includes a substrate body 2, via conductors 6a and 6b, and a double conductor 10b continuously disposed between the front surface 3 and the back surface 4 of the substrate body 2. It has. The double conductor 10b has a central conductor 11, an insulating portion 12, and an outer peripheral conductor 13 similar to those described above in cross section, and an upper side and a lower side in the axial direction between the front surface 3 and the rear surface 4 of the substrate body 2. As shown in FIG. 9, the two bent portions cp are connected in opposite directions (line symmetry).

図10は、本発明により得られる更に異なる形態の配線基板1cを示す垂直断面図である。
上記配線基板1cは、図10に示すように、基板本体2と、ビア導体6aと、基板本体2の表面3と図示で右側の側面5との間に連続して配設された2重導体10cとを備えている。該2重導体10cは、基板本体2の表面3の中央付近からほぼJ字形の曲線状に垂下した下向きの曲がり部cpと、基板本体2の側面5に一端面が露出し且つ該側面から基板本体2の中心側に向かって緩やかに上向いて曲がる曲がり部cpとを、互いに連続して曲がりつつ接続させたものである。尚、上記基板本体2の側面5に露出する中心導体11および外周導体13の端面ごとには、前記内側パッド16および外側パッド17と同様の形状を呈する側面導体16,17が形成されている。
FIG. 10 is a vertical sectional view showing a wiring board 1c of still another embodiment obtained by the present invention .
As shown in FIG. 10, the wiring board 1c has a double conductor disposed continuously between the board body 2, the via conductor 6a, the surface 3 of the board body 2, and the right side surface 5 in the drawing. 10c. The double conductor 10c has a bent portion cp that hangs down in a substantially J-shaped curve from the vicinity of the center of the surface 3 of the substrate body 2 and one end surface exposed on the side surface 5 of the substrate body 2 and from the side surface to the substrate. A bent portion cp that gently bends upward toward the center side of the main body 2 is connected while continuously bending. Side conductors 16 and 17 having the same shape as the inner pad 16 and the outer pad 17 are formed for each end face of the central conductor 11 and the outer conductor 13 exposed on the side face 5 of the substrate body 2.

図11は、本発明により得られる更に別異な形態の配線基板1dを示す垂直断面図である。
上記配線基板1dは、図11に示すように、基板本体2と、ビア導体6a,6bと、該基板本体2の表面3および裏面4の間において連続し且つ一部で分岐した2重導体10dとを備えている。該2重導体10dは、側面視で全体がほぼy字形状を呈し、基板本体2の表面3に両端面が露出し且つ側面視の全体がほぼU字形状を呈する左右一対からなる上側の曲がり部cpと、該曲がり部cpの底部付近からほぼ下向きに分岐した下側の曲がり部cpとを連続して接続している。該2重導体10dの中心導体11、絶縁部12、および外周導体13は、ほぼU字形状である上側に位置する一対の曲がり部cpの底部付近で、連続する曲線部による分岐部11y,12y,13yから下側の曲がり部cpに向かって、それぞれ二つに分かれている。
以上のような配線基板1b〜1dによっても、前記配線基板1aと同様な効果を奏することが可能である。
尚、前記配線基板1b〜1dも、前記配線基板1aと同様の方法で製造される。
FIG. 11 is a vertical cross-sectional view showing yet another form of the wiring board 1d obtained by the present invention .
As shown in FIG. 11, the wiring substrate 1d includes a substrate body 2, via conductors 6a and 6b, and a double conductor 10d that is continuous and partially branched between the front surface 3 and the back surface 4 of the substrate body 2. And. The double conductor 10d has an approximately y-shape as a whole when viewed from the side, both ends are exposed on the surface 3 of the substrate body 2, and the upper side is formed of a pair of left and right that is generally U-shaped when viewed from the side. The portion cp and the lower bent portion cp branched substantially downward from the vicinity of the bottom of the bent portion cp are continuously connected. The central conductor 11, the insulating portion 12, and the outer conductor 13 of the double conductor 10d are branched portions 11y, 12y by continuous curved portions near the bottom of the pair of bent portions cp located on the upper side that is substantially U-shaped. , 13y toward the lower bent portion cp, each of which is divided into two.
The same effects as those of the wiring board 1a can be obtained by the wiring boards 1b to 1d as described above.
The wiring boards 1b to 1d are also manufactured by the same method as the wiring board 1a.

本発明は、以上において説明した各形態に限定されるものではない。
例えば、前記基板本体を構成する絶縁材は、ガラス−セラミック以外の低温焼成セラミックや、アルミナなどの高温焼成セラミックとしても良い。後者の場合、前記2重導体の中心導体や外周導体などの導体からなる要素には、WまたはMoなどが適用される。更に、上記絶縁材には、熱硬化性で且つ耐熱性の合成樹脂(例えば、エポキシ樹脂など)を適用しても良い。
また、前記基板本体は、その表面の中央部に開口するキャビティを有する形態とし、該キャビティの底面に前記2重導体の一端面あるいは両端面が露出し、これらの端面に前記内外2重のパッドを形成しても良い。
更に、前記2重導体10a〜10dは、単一の基板本体内において、同種または異種の形態のものを複数組併設させた形態としても良い。
また、前記2重導体10a〜10dの中心導体11の断面を楕円形または長円形とし、該中心導体11を囲む絶縁部12および外周導体の内形および外形も上記楕円形あるいは長円形と相似形としても良い。
The present invention is not limited to the embodiments described above.
For example, the insulating material constituting the substrate body may be a low-temperature fired ceramic other than glass-ceramic or a high-temperature fired ceramic such as alumina. In the latter case, W or Mo or the like is applied to an element made of a conductor such as a central conductor or an outer peripheral conductor of the double conductor. Further, a thermosetting and heat resistant synthetic resin (for example, an epoxy resin) may be applied to the insulating material.
The substrate body has a cavity having an opening at the center of the surface thereof, and one end surface or both end surfaces of the double conductor are exposed on the bottom surface of the cavity, and the inner and outer double pads are exposed on these end surfaces. May be formed.
Further, the double conductors 10a to 10d may have a configuration in which a plurality of sets of the same type or different types are provided in a single substrate body.
The cross section of the central conductor 11 of the double conductors 10a to 10d is elliptical or oval, and the inner shape and outer shape of the insulating portion 12 and the outer conductor surrounding the central conductor 11 are similar to the elliptical or oval shape. It is also good.

更に、前記2重導体は、三つ以上の端面を有し、かかる端面が基板本体2の表面3、裏面4、および側面5ずつに一つ以上の端面が露出する形態としても良い。
また、前記2重導体は、その軸方向において少なくとも一つの曲がり部を有しておれば良い
更に、前記2重導体の中心導体11は、高周波信号の伝送以外の信号の伝送に活用しても良い。
また、前記2重導体を形成するための前記立体模型20において、その両端付近には、前記複数の溝28に替えて、外周筒部23の内周面と外周面との間を連通する複数の貫通孔を形成しても良い。
更に、前記素基板本体30を形成する工程では、セラミック粉末などを所定の型内でプレスする粉体プレス法を用いても良い。
加えて、前記立体模型20は、ロウや低融点金属によって形成しても良く、例えば、セラミックスラリからなる前記素基板本体30内に埋設した後では、該素基板本体30を焼成した際に、液状となった上記ロウや低融点金属を、前記空洞40の下端面側から外部に流下させて除去するようにしても良い。
Further, the double conductor may have three or more end surfaces, and one or more end surfaces may be exposed on each of the front surface 3, the back surface 4, and the side surface 5 of the substrate body 2.
Further, the double conductor may have at least one bent portion in the axial direction .
Furthermore, the center conductor 11 of the double conductor may be used for signal transmission other than the transmission of a high-frequency signal.
Further, in the three-dimensional model 20 for forming the double conductor, a plurality of communicating between the inner peripheral surface and the outer peripheral surface of the outer peripheral cylindrical portion 23 are provided in the vicinity of both ends in place of the plurality of grooves 28. A through hole may be formed.
Furthermore, in the step of forming the base substrate body 30, a powder pressing method of pressing ceramic powder or the like in a predetermined mold may be used.
In addition, the three-dimensional model 20 may be formed of brazing or a low melting point metal. For example, after being embedded in the base substrate body 30 made of ceramic slurry, when the base substrate body 30 is fired, The wax or low melting point metal that has become liquid may be removed by flowing down from the lower end surface of the cavity 40.

本発明によれば、絶縁材からなる基板本体の内部に、高周波信号を伝送する中心導体と、該中心導体の周囲を絶縁部を介して囲むシールド用の外周導体とからなる2重導体を配設し、該2重導体の中心導体を伝送される高周波信号を上記基板本体の表面や裏面などの形成したパッドなどに伝送損失を生じることなく正確に伝送できる配線基板の製造方法を確実に提供できる。 According to the present invention, a double conductor composed of a central conductor for transmitting a high-frequency signal and an outer peripheral conductor for shielding that surrounds the periphery of the central conductor via an insulating portion is disposed inside the substrate body made of an insulating material. was set, the high-frequency signals transmitted by the center conductor of the double conductor securely method to manufacture a wiring board can be accurately transmitted without causing the transmission loss such as pad formed such as surface and back surface of the substrate body Can be provided.

1a〜1d………配線基板
2…………………基板本体
3,33…………表面
4,34…………裏面
5,35…………側面
10a〜10d…2重導体
11………………中心導体
12………………絶縁部
13………………外周導体
14〜17………パッド/側面導体
20………………立体模型
21………………中心軸部
22………………隙間
23………………外周筒部
25………………接続部
28………………溝
29………………導電性ペーストの硬化物
30〜32………素基板本体
cp………………曲がり部
1a to 1d .... wiring board 2 ........... main body 3,33 ........ front surface 4,34 .... back surface 5.35 ........ side surface 10a.about.10d .. double conductor 11 ……………… Center conductor 12 ……………… Insulation part 13 ……………… Outer peripheral conductor 14 to 17 ……… Pad / side conductor 20 ……………… Solid model
21 ……………… Center shaft 22 ……………… Gap 23 ……………… Outer cylindrical part 25 ……………… Connecting part 28 ……………… Groove 29 ………… ... Cured material of conductive paste 30 to 32 ... ... Substrate body cp ... ... ... Bending part

Claims (2)

絶縁材からなり、表面および裏面と、該表面と裏面との間に位置する側面とを有する基板本体と、該基板本体の表面と裏面との間、あるいは該基板本体の表面と側面との間に連続して配設され、中心導体および該中心導体を絶縁部を介して囲む外周導体からなる2重導体と、を備え、該2重導体は、上記基板本体の表面および裏面、あるいは該基板本体の表面および側面に両端面が露出すると共に、上記基板本体の表面と裏面との間、あるいは該基板本体の表面と側面との間において、少なくとも一部に曲がった曲がり部を有し、該曲がり部は、2次元方向あるいは3次元方向において曲線状に曲がった曲線部のみからなる配線基板の製造方法であって、
中心軸部と、該中心軸部を隙間を介して囲む外周筒部とを備え、かかる中心軸部および外周筒部の軸方向における一部に曲がった曲がり部を有し、該曲がり部が2次元方向あるいは3次元方向において曲線状に曲がった曲線部のみからなり、上記中心軸部および外周筒部の両端付近に、該中心軸部と外周筒部との間を接続し、且つ互いの間に上記隙間と外部との間を連通する複数の開口孔を画定する複数の接続部と、上記外周筒部に形成され且つ該外周筒部の内周面と外周面との間を連通する複数の溝または貫通孔とを備えた2重導体形成用の立体模型を準備する工程と、
上記立体模型を、少なくとも該模型の両端面を除いて、粉末状、スラリー状、あるいは液状の絶縁材によって包囲することにより、表面および裏面と、該表面と裏面との間に位置する側面とを有し、上記模型の両端面が表面と裏面とに露出するか、表面と側面とに露出する素基板本体を形成する工程と、
上記素基板本体を加熱して、該素基板本体を構成している上記絶縁材を焼成あるいは硬化して空洞を内設する素基板本体を得ると共に、上記加熱過程で該素基板本体の内部から上記立体模型を除去する工程と、
上記素基板本体の内部に位置し且つ上記立体模型が除去された跡に形成された上記空洞内に金属粉末を含む導電性ペーストを充填する工程と、
上記空洞内に充填された導電性ペーストを加熱して硬化させることで、上記曲線部を含む前記2重導体が形成された素基板本体を得る工程と、
上記素基板本体の表面と裏面と、あるいは表面と側面とを研磨して、少なくとも上記2重導体の両端付近に位置する上記複数の接続部が除去された跡に充填されていた上記導電性ペーストの硬化物を除去し且つ基板本体を形成する工程と、を含む、
ことを特徴とする配線基板の製造方法。
A substrate body made of an insulating material and having a front surface and a back surface and a side surface located between the front surface and the back surface, between the front surface and the back surface of the substrate body, or between the front surface and the side surface of the substrate body And a double conductor composed of a central conductor and an outer peripheral conductor surrounding the central conductor with an insulating part interposed therebetween, wherein the double conductor is a surface and a back surface of the substrate body or the substrate. Both end surfaces are exposed on the front and side surfaces of the main body, and have a bent portion bent at least partially between the front and back surfaces of the substrate main body or between the front and side surfaces of the substrate main body, The bent portion is a method of manufacturing a wiring board consisting only of a curved portion bent in a two-dimensional direction or a three-dimensional direction,
A central shaft portion, and an outer peripheral cylindrical portion surrounding the central shaft portion with a gap between the central shaft portion and the outer peripheral cylindrical portion. It consists only of curved parts curved in a dimensional direction or a three-dimensional direction, and connects the central shaft part and the outer peripheral cylinder part in the vicinity of both ends of the central axial part and the outer peripheral cylindrical part, and between them. A plurality of connecting portions defining a plurality of opening holes communicating between the gap and the outside, and a plurality of connecting portions formed in the outer peripheral cylindrical portion and communicating between the inner peripheral surface and the outer peripheral surface of the outer peripheral cylindrical portion. Preparing a three-dimensional model for forming a double conductor having a groove or a through hole;
By enclosing the above three-dimensional model with a powdery, slurry-like or liquid insulating material except at least both end faces of the model, a front surface and a back surface, and a side surface positioned between the front surface and the back surface Having both ends of the model exposed on the front and back, or forming a base substrate body exposed on the front and side;
The base substrate body is heated, and the insulating material constituting the base substrate body is baked or cured to obtain a base substrate body in which a cavity is provided, and from the inside of the base substrate body in the heating process. Removing the three-dimensional model;
A step of filling a conductive paste containing a metal powder into the cavity formed in a mark located inside the base substrate body and the solid model is removed;
A step of obtaining a base substrate body on which the double conductor including the curved portion is formed by heating and curing the conductive paste filled in the cavity;
The conductive paste filled in the trace from which the plurality of connecting portions located at both ends of the double conductor are removed by polishing the front and back surfaces or the front and side surfaces of the base substrate body. Removing the cured product and forming a substrate body.
A method for manufacturing a wiring board.
前記導電性ペーストの硬化物を除去且つ基板本体を形成する工程の後に、該2重導体の両端面が露出する上記基板本体の表面および裏面、あるいは表面および側面において、前記中心導体の端面および外周導体の端面と個別に接続する内外2重のパッドあるいは内外2重の側面導体を形成する工程を更に有する、
ことを特徴とする請求項に記載の配線基板の製造方法。
After the step of removing the cured product of the conductive paste and forming the substrate body, the end surface and the outer periphery of the center conductor on the front and back surfaces, or the front and side surfaces of the substrate body where both end surfaces of the double conductor are exposed Forming a double pad inside or outside, or a double side conductor inside and outside that is individually connected to the end face of the conductor;
The method for manufacturing a wiring board according to claim 1 .
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