JP6287249B2 - Appearance inspection apparatus, appearance inspection method, and program - Google Patents

Description

  The present invention relates to an appearance inspection apparatus that performs an appearance inspection of an electronic component.

  In recent years, IC chip mounting methods for IC chip modules include mounting an IC chip on a metal substrate (metal substrate) obtained by half-etching a conductive die pad and connecting it to the terminal part of the metal substrate with a bonding wire. The form to do is proposed. With this mounting method, the mounting thickness can be reduced and the mass production can be accommodated.

  In such an IC chip module, the metal substrate is generally divided into an area for mounting an IC chip (die pad portion), an area for connection with an antenna circuit, and an area for input / output terminals.

  Usually, a metal substrate is produced by an etching method using a thin copper material or the like. Then, after the metal substrate is impositioned and etched, the processes such as silver plating, IC chip mounting, wire bonding, and individual resin sealing are sequentially performed in a reel manner while the imposition state is maintained. A chip module is produced.

  However, an IC chip module to be manufactured may have a defective etching process or a defective silver plating process.

Therefore, for example, Patent Document 1 discloses that the image to be inspected is subjected to an expansion / contraction process by sequentially performing a binarization process, an expansion process, and a contraction process more times than the number of expansions in the expansion process. A technique has been proposed in which chipped image data is compared with binarized image data before expansion and contraction to detect a chip generated in a lead corresponding to the binarized image data.
Further, in Patent Document 1, an image subjected to contraction / expansion processing is performed by sequentially performing binarization processing, contraction processing, and expansion processing more times than the number of contractions in the contraction processing on the inspection target image. There has also been proposed a technique for comparing a data and binarized image data before contraction and expansion to detect a protrusion generated on a lead corresponding to the binarized image data.

JP-A-11-224892

  However, the technique described in Patent Document 1 has a problem in that small outlines and protrusions in the contour portion cannot be detected because the product contour portion remains in the expansion / contraction processing and the expansion / contraction processing.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide an appearance inspection apparatus and the like that can perform the quality determination of an electronic component with high accuracy.

A first invention for achieving the above-described object is an appearance inspection apparatus for inspecting the appearance of an electronic component, and the first surface irradiates the surface of the electronic component with a blue LED dome illumination and a blue LED coaxial incident illumination. The second irradiating means for irradiating the surface of the electronic component with the white LED dome illumination and the white LED coaxial incident illumination, and imaging the electronic component irradiated by the first irradiating means, A first imaging unit that obtains one inspection target image; a second imaging unit that captures the electronic component irradiated by the second irradiation unit and obtains a second inspection target image ; A bright part of the first inspection target image obtained by the imaging unit is extracted, the bright part of the extracted first bright part extraction image is expanded, the expanded image is contracted, and the first expansion / contraction image is obtained. First expansion and contraction means to obtain; Extract the bright portion of the resulting second inspected image by the second imaging means, the extracted second light portion extracted image bright portion expands and expanded image contract and second A second expansion / contraction means for obtaining an expansion / contraction image, a first difference means for calculating a difference between the first bright portion extraction image and the first expansion / contraction image, and obtaining a first difference image; The difference between the second bright portion extraction image and the second expansion / contraction image is calculated, the second difference means for obtaining a third difference image, and the first difference means obtained by the first difference means. First determination means for determining pass / fail based on the difference image, and second determination means for determining pass / fail based on the third difference image obtained by the second difference means. It is the external appearance inspection apparatus characterized by providing.
2nd invention is an external appearance inspection apparatus which inspects the external appearance of an electronic component, Comprising: The 1st irradiation means which irradiates the surface of the said electronic component by blue LED dome illumination and blue LED coaxial epi-illumination, and a white LED dome The third irradiating means for irradiating the back surface of the electronic component with illumination, white LED coaxial epi-illumination, and transmitted illumination, and imaging the electronic component irradiated by the first irradiating means, and the first inspection object Obtained by a first imaging means for obtaining an image, a third imaging means for obtaining an image to be inspected by imaging the electronic component irradiated by the third irradiation means, and the first imaging means. The first bright portion of the first image to be inspected is extracted, the bright portion of the extracted first bright portion extraction image is expanded, and the expanded image is contracted to obtain a first expansion / contraction image Expansion / contraction means and the third imaging The bright part of the third inspection target image obtained by the stage is extracted, the bright part of the extracted third bright part extraction image is expanded, and the expanded image is contracted to obtain a third expansion / contraction image. And a third expansion / contraction means for extracting a dark part of the third inspection target image, expanding a bright part of the extracted dark part extraction image, and contracting the expanded image to obtain a fourth expansion / contraction image; A first difference unit that calculates a difference between the first bright part extracted image and the first expansion / contraction image and obtains a first difference image; the third bright part extracted image; and the third Third difference means for calculating a difference from the expansion / contraction image and obtaining a fifth difference image and calculating a difference between the dark portion extraction image and the fourth expansion / contraction image to obtain a sixth difference image And a first determination unit for determining pass / fail based on the first difference image obtained by the first difference unit. And a third determination means for determining pass / fail based on the fifth difference image and the sixth difference image obtained by the third difference means. It is an appearance inspection device.
According to the first and second inventions, it is possible to detect small chips, protrusions, and the like present in the product contour portion on the surface of the electronic component with high accuracy. By using the blue LED, it is possible to inspect for contamination on the silver plating of the product and defective plating defects. By providing dome illumination and coaxial illumination, relatively light defects such as unevenness and dirt on the product can be detected with high accuracy.

The first difference unit calculates a difference between the first inspection target image and a first reference image that is a reference for a non-defective product, further obtains a second difference image, and the first determination unit includes: It is desirable to further determine pass / fail based on the second difference image obtained by the first difference means.
Thereby, a relatively large defect on the surface of the electronic component can also be detected.

In the first invention, by using the white LED, dirt on the surface material portion of the product and chipping defects in the material portion can be inspected, and these can be detected with high accuracy.

The second difference unit calculates a difference between the second inspection target image and a second reference image serving as a reference for a non-defective product, further obtains a fourth difference image, and the second determination unit It is desirable to further determine pass / fail based on the fourth difference image obtained by the second difference means.
Thereby, a relatively large defect on the surface of the electronic component can also be detected.

In the second invention, dirt on the back surface material part of the product, chipping of the material part, plating, and defective projections on the material part can be inspected, and these can be detected with high accuracy.

The third difference means calculates a difference between the third inspection target image and a third reference image serving as a reference for a non-defective product, further obtains a seventh difference image, and the third determination means includes It is desirable that the quality is further determined based on the seventh difference image obtained by the third difference means.
Thereby, a relatively large defect on the surface of the electronic component can also be detected.

According to a third aspect of the invention, there is provided a first irradiating means for irradiating the surface of the electronic component with blue LED dome illumination and blue LED coaxial incident illumination, and a surface of the electronic component with white LED dome illumination and white LED coaxial incident illumination. The second irradiating means for irradiating, the first imaging means for imaging the electronic component irradiated by the first irradiating means and obtaining the first inspection object image, and the second irradiating means for irradiating And a second imaging unit that obtains a second inspection object image, and is an appearance inspection method in an appearance inspection apparatus that inspects the appearance of the electronic component, the first imaging The bright part of the first inspection target image obtained by the means is extracted, the bright part of the extracted first bright part extraction image is expanded, and the expanded image is contracted to obtain a first expansion / contraction image. First expansion / contraction step And flop, said second extracting bright portion of the resulting second inspection target image by the imaging means, the extracted expands the light portion of the second light portion extracted image, to contract the expanded image A second expansion / contraction step for obtaining a second expansion / contraction image, a difference between the first bright portion extraction image and the first expansion / contraction image, and a first difference for obtaining a first difference image Obtained by the step , a second difference step for calculating a difference between the second bright portion extraction image and the second expansion / contraction image, and obtaining a third difference image, and the first difference step. A first determination step for determining pass / fail based on the first difference image, and a second determination step for determining pass / fail based on the third difference image obtained by the second difference step. And an appearance inspection method characterized by including:
According to a fourth aspect of the present invention, there is provided a first irradiation unit that irradiates the surface of the electronic component with a blue LED dome illumination and a blue LED coaxial incident illumination, a white LED dome illumination, a white LED coaxial incident illumination, and a transmission illumination. A third irradiating unit that irradiates the back surface of the electronic component; a first imaging unit that captures an image of the electronic component irradiated by the first irradiating unit to obtain a first inspection target image; A third imaging unit that images the electronic component irradiated by the irradiation unit and obtains a third inspection target image; and an appearance inspection method in an appearance inspection apparatus that inspects the appearance of the electronic component, A bright portion of the first image to be inspected obtained by the first imaging means is extracted, a bright portion of the extracted first bright portion extracted image is expanded, and the expanded image is contracted to perform a first expansion. First to obtain a contraction image A tension / shrinkage step, a bright part of the third inspection object image obtained by the third imaging means is extracted, a bright part of the extracted third bright part extraction image is expanded, and the expanded image is contracted Thus, the third expansion / contraction image is obtained, the dark part of the third inspection object image is extracted, the bright part of the extracted dark part extraction image is expanded, the expanded image is contracted, and the fourth expansion / contraction image is acquired. A first expansion step to obtain a first difference image by calculating a difference between the first bright portion extraction image and the first expansion / contraction image, A difference between the bright portion extraction image and the third expansion / contraction image is obtained to obtain a fifth difference image, and a difference between the dark portion extraction image and the fourth expansion / contraction image is calculated; Obtained by the third difference step for obtaining the difference image and the first difference step. On the basis of the first determination step for determining pass / fail based on the first difference image and the fifth difference image and the sixth difference image obtained by the third difference step. And a third determination step for determining the visual inspection method.
According to the third and fourth inventions, it is possible to detect small chips, protrusions, and the like existing in the product contour portion on the surface of the electronic component with high accuracy. By using the blue LED, it is possible to inspect for contamination on the silver plating of the product and defective plating defects. By providing dome illumination and coaxial illumination, relatively light defects such as unevenness and dirt on the product can be detected with high accuracy.

5th invention is the surface of the said electronic component by 1st irradiation means to irradiate the surface of the said electronic component by blue LED dome illumination and blue LED coaxial epi-illumination, and white LED dome illumination and white LED coaxial epi-illumination The second irradiating means for irradiating, the first imaging means for imaging the electronic component irradiated by the first irradiating means and obtaining the first inspection object image, and the second irradiating means for irradiating And a second imaging unit that captures the electronic component and obtains a second inspection target image, the program of the appearance inspection apparatus for inspecting the appearance of the electronic component, wherein the computer is the first A bright part of the first inspection target image obtained by the imaging unit is extracted, the bright part of the extracted first bright part extraction image is expanded, the expanded image is contracted, and the first expansion / contraction image is obtained. Obtaining first expansion Contraction means extracts a bright portion of the resulting second inspected image by the second imaging means, extracting the second expands the light portion of the light portion extracted image, to contract the expanded image Second expansion / contraction means for obtaining a second expansion / contraction image, first difference means for calculating a difference between the first bright portion extraction image and the first expansion / contraction image and obtaining a first difference image The second difference means for calculating the difference between the second bright portion extraction image and the second expansion / contraction image and obtaining a third difference image, the first difference means obtained by the first difference means Based on the first difference image, and functioning as second determination means for determining the quality based on the third difference image obtained by the second difference means . It is a program for.
According to a sixth aspect of the present invention, there is provided the first irradiation means for irradiating the surface of the electronic component with the blue LED dome illumination and the blue LED coaxial incident illumination, the white LED dome illumination, the white LED coaxial incident illumination, and the transmission illumination. A third irradiating unit that irradiates the back surface of the electronic component; a first imaging unit that captures an image of the electronic component irradiated by the first irradiating unit to obtain a first inspection target image; A program of an appearance inspection apparatus for inspecting the appearance of an electronic component, comprising: a third imaging unit that images the electronic component irradiated by the irradiation unit and obtains a third inspection target image; The bright part of the first inspection object image obtained by the first imaging means is extracted, the bright part of the extracted first bright part extraction image is expanded, the expanded image is contracted, and the first part is extracted. Obtain expansion and contraction images A bright part of the third inspection object image obtained by the first expansion / contraction means and the third imaging means is extracted, and the bright part of the extracted third bright part extraction image is expanded and expanded. To obtain a third expansion / contraction image, extract a dark portion of the third inspection target image, expand a bright portion of the extracted dark portion extraction image, and contract the expanded image to form a fourth expansion. A third expansion / contraction means for obtaining a contracted image; a first difference means for calculating a difference between the first bright portion extraction image and the first expansion / contraction image; and obtaining a first difference image; A difference between the bright portion extraction image and the third expansion / contraction image is obtained to obtain a fifth difference image, and a difference between the dark portion extraction image and the fourth expansion / contraction image is calculated; Third difference means for obtaining a difference image of the first difference image obtained by the first difference means. First determination means for determining pass / fail based on the third difference means, third determination means for determining pass / fail based on the fifth difference image and the sixth difference image obtained by the third difference means It is a program to make it function as.
By installing the programs of the fifth and sixth inventions in the computer, the visual inspection apparatus of the first and second inventions can be obtained.

  According to the present invention, relatively light defects such as unevenness and dirt on a product can be detected with high accuracy. Further, it is possible to detect defects such as chips and protrusions existing in the contour portion of the product with high accuracy. In addition, large defects can be detected.

It is a schematic diagram explaining the outline | summary of the electronic component used for the external appearance inspection of embodiment of this invention. It is a figure which shows the structural example of the external appearance inspection apparatus which concerns on embodiment of this invention. It is a figure explaining the mode of loading of electronic parts. It is a flowchart explaining the basic operation | movement process of an external appearance inspection apparatus. 6 is a flowchart for explaining quality determination processing in an inspection stage 1. It is an example of an image for demonstrating the specific processing content in the quality determination processing of FIG. It is a flowchart explaining the quality determination process in the test | inspection stage 2. FIG. It is an example of an image for demonstrating the specific processing content in the quality determination processing of FIG. 6 is a flowchart for explaining quality determination processing in an inspection stage 3; FIG. 10 is an image example for explaining specific processing contents in the pass / fail determination processing of FIG. 9. FIG. It is a flowchart explaining the comprehensive quality determination processing in the main processing PC.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[Embodiments of the present invention]
FIG. 1 is a schematic diagram for explaining an outline of an electronic component 1 used for appearance inspection according to an embodiment of the present invention.

  The electronic component 1 is a state in which ten metal substrates 1b are vertically attached on a copper plate 1a.

As shown in the partial enlarged view of the region A, the metal substrate 1b is partially silver-plated on a copper material.
The purpose of the present embodiment is to inspect defects such as chipping, omission, and protrusion of these copper materials and silver plating.

  FIG. 2 is a diagram illustrating a configuration example of the appearance inspection and adjustment device 11 according to the embodiment of the present invention. Note that the hardware configuration in FIG. 2 is an example, and various configurations can be adopted depending on the application and purpose.

The magazine changer 21 is set in advance with a plurality of magazines (boxes) in which hundreds of electronic components 1 shown in FIG. 1 are stacked, and is supplied to the L / F supply magazine 22 for each set. To do.
When the electronic component 1 is loaded, as shown in FIG. 3, a slip sheet 31-1 is inserted between the electronic component 1-1 and the electronic component 1-2, and the electronic component 1-2 and the electronic component 1- 3 is inserted. That is, the interleaving sheets 31-1 and 31-2 play a role for preventing the parts from being damaged by rubbing between the parts.

  The L / F (Lead / Frame) supply magazine 22 sets the magazine supplied from the magazine changer 21.

The supply unit 23 controls a suction unit (not shown), sucks (picks up) the electronic component 1 in the L / F supply magazine 22, and transports it to the transport base 24.
The supply unit 23 controls a suction unit (not shown) to suck the slip sheet 31 in the L / F supply magazine 22 and carry it out to the slip sheet storage BOX 25.

  The transport table 24 transports the electronic component 1 at a predetermined speed in the direction of arrow B in the figure under the control of the supply unit 23. In the example of FIG. 2, the electronic components 1-1 to 1-5 are illustrated on the transport table 24.

  The slip sheet storage BOX 25 stores the slip sheet 31 carried out from the L / F supply magazine 22.

  The line sensor cameras 26 to 28 respectively image the electronic components 1 that have been transported by the transport base 24.

The illumination unit 29 includes a dome illumination 29A and a coaxial incident illumination 29B.
The dome illumination 29A is a shadowless illumination that irradiates the inner surface of the dome with a white LED and irradiates the electronic component 1 with diffused light, and uniformly irradiates the electronic component 1 with light from all directions.
The coaxial epi-illumination 29B is an illumination that causes the diffused light from the white LED to fall on the same axis with respect to the camera axis using a half mirror, and uniformly irradiates the electronic component 1 having a high mirror surface and high reflectivity.

By combining these two types of lighting, the shadow of the material part of the electronic component 1 is prevented from being reflected, and the product surface material part is soiled or the material part is not defective (for example, a metal substrate material). Copper surface and shape) can be detected with high accuracy.
By adjusting the illumination volume so that the material part has 128 gradations, the background is about 0 to 5 gradations, and the plating part is equivalent to the material parts and has about 128 gradations.

The illumination unit 30 includes a dome illumination 30A and a coaxial incident illumination 30B.
The dome illumination 30A irradiates the inner surface of the dome with a blue LED and uniformly irradiates the electronic component 1 using diffused light.
The coaxial epi-illumination 30B irradiates the electronic component 1 uniformly by causing the diffused light from the blue LED to fall on the same axis with respect to the camera axis using a half mirror.

Combining these two types of lighting prevents shadows from appearing due to the rolling stripes in the material part of the electronic component 1, and provides a contrast between the copper surface part of the product surface and the silver plating part. It is possible to detect defective plating defects (for example, Ag surface or Ag shape) with high accuracy.
By adjusting the illumination volume so that the plated portion has 128 gradations, the background has about 0 to 5 gradations and the material portion has about 50 gradations.

  The illumination unit 31 includes a dome illumination 31A, a coaxial incident illumination 31B, and a transmission illumination 31C.

The dome illumination 31A irradiates a white LED on the inner surface of the dome and uniformly irradiates the electronic component 1 using diffused light.
The coaxial epi-illumination 31B irradiates the electronic component 1 uniformly by causing the diffused light from the white LED to fall on the same axis with respect to the camera axis using a half mirror.
The transmitted illumination 31C provides illumination from behind the electronic component 1, and observes the transmitted light from the electronic component 1 or the shadow of the electronic component 1.

By combining these three types of lighting, the shadow of the material part of the electronic component 1 is prevented from being reflected, and the back surface of the product is contaminated, the material part is chipped, the plating part or the material part has a defective projection, etc. For example, it is possible to detect a copper surface or transmission shape, which is a material of a metal substrate, with high accuracy.
In addition, the transmitted illumination 31C is set so that the brightness of the product portion and the etching portion is different by setting the etching portion to have a gradation of 255. The material portion is adjusted to have 128 gradations.

The carry-out unit 32 controls a suction unit (not shown) under the control of the main processing PC 41 to suck (pick up) the electronic component 1 that has been transported on the transport base 24 and is determined to be an OK product (good product). The product is carried out to the OK product carry-out magazine 33.
The carry-out unit 32 controls a suction unit (not shown) under the control of the main processing PC 41 to suck the electronic component 1 that has been transported on the transport base 24 and is determined to be an NG product (defective product). The product is unloaded to the product unloading magazine 34.
Further, the carry-out unit 32 controls a suction unit (not shown) under the control of the main processing PC 41, and includes a slip sheet (not shown) stored in the slip sheet storage BOX 35 (the slip sheet 31 stored in the slip sheet storage BOX 25). Are inserted, and the slip sheet is inserted into the electronic component 1 carried out to the OK product carrying magazine 33 and the NG product carrying magazine 34.

The OK product carry-out magazine 33 loads the electronic components 1 determined to be OK products (good products) on a magazine set in advance.
The NG product carry-out magazine 34 loads the electronic components 1 determined to be NG products (defective products) on a magazine set in advance.
The slip sheet storage BOX 35 stores slip sheets (not shown) (not the slip sheet 31 stored in the slip sheet storage BOX 25).
When a predetermined number of electronic components 1 are loaded in the magazine set in the OK product carry-out magazine 33 or the NG product carry-out magazine 34, the magazine changer 36 transports the magazine to the next process and creates a new (empty) magazine. Set the magazine.

The image processing units 37 and 38 are computer systems including a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), an HDD (Hard Disk Drive), and the like.
The image processing units 37 and 38 input images captured by the line sensor cameras 26 and 27, respectively, and perform bright part extraction processing, white expansion processing, white contraction processing, difference processing, labeling processing, area determination processing, and the like. The pass / fail judgment result is output to the main processing PC 41 via the sequencer 40.

The bright part extraction process binarizes the captured image, for example, in order to extract the product part from the image to be inspected.
In the white expansion process, the white region is expanded by an expansion filter, and an image is generated in which the material portion that appears black is removed.
The white contraction process generates an image in which the white area is contracted with respect to the white expanded image by the same filter size and number of times as the white expansion process.
The difference process generates a difference image between the captured image and the image subjected to the white shrinkage process.
In the labeling process, coordinate values and areas (number of pixels) of defect candidates included in the difference image are calculated, and numbering is performed.
In the area determination process, it is determined whether or not the area of the defect candidate subjected to the labeling process is larger than a predetermined threshold, and the determination result is output to the main PC 41 together with the assigned number.

The image processing unit 39 is a computer system that includes a CPU, ROM, RAM, HDD, and the like.
The image processing unit 39 inputs an image captured by the line sensor camera 28, and performs bright portion extraction processing, white expansion processing, white contraction processing, dark portion extraction processing, black expansion processing, black contraction processing, difference processing, labeling processing, An area determination process or the like is performed, and the pass / fail determination result is output to the main process PC 41 via the sequencer 40.

The dark part extraction process binarizes the captured image, for example, in order to extract the etching part from the image to be inspected.
In the black expansion process, the black region is expanded by the expansion filter, and an image from which the protrusions of the plated portion and the material portion are removed is generated.
The black contraction process generates an image in which the white area is contracted with respect to the expanded image by the same filter size and number of times as the expansion process.

The main processing PC 41 is a computer system that includes a CPU, ROM, RAM, HDD, and the like.
The main processing PC 41 receives the pass / fail determination results from the image processing units 37 to 39, determines pass / fail of each electronic component 1, and outputs the determination result to the inspection result confirmation PC 42 via the sequencer 40.
The main processing PC 41 controls the carry-out unit 32 based on the determination result.

  The inspection result confirmation PC 42 inputs the determination result from the main processing PC 41 and displays a pass / fail determination result based on a display instruction from the operation unit 44.

  The operation unit 43 includes a touch panel 43A and a main switch 43B, receives an instruction input from the user, and outputs input information to the main processing PC 41 or the inspection result confirmation PC.

  Hereinafter, in the present embodiment, the illumination unit 29, the line sensor camera 26, and the image processing unit 37 are referred to as “inspection stage 1”, and the illumination unit 30, the line sensor camera 27, and the image processing unit 38 are referred to as “inspection”. The illumination unit 31, the line sensor camera 28, and the image processing unit 39 are referred to as "inspection stage 3".

(Basic operation processing)
Next, basic operation processing of the appearance inspection apparatus 11 will be described with reference to the flowchart of FIG.

  In step S1, a CPU (not shown) of the main processing PC 41 of the appearance inspection apparatus 11 determines whether an inspection start is instructed by the operator via the operation unit 43 and the sequencer 40, and the inspection start is instructed. Wait until. Then, when the CPU of the main processing PC 41 is instructed to start inspection, the CPU proceeds to step S2.

In step S <b> 2, the supply unit 23 of the appearance inspection apparatus 11 controls a suction unit (not shown) to suck (pick up) the electronic component 1 in the L / F supply magazine 22.
In step S <b> 3, the supply unit 23 of the appearance inspection apparatus 11 transports the electronic component 1 picked up in the process of step S <b> 2 to the transport base 24.
In step S <b> 4, the supply unit 23 of the appearance inspection apparatus 11 controls a suction unit (not shown) to suck the slip sheet 31 in the L / F supply magazine 22 and carry it out to the slip sheet storage BOX 25.

  In step S5, the supply unit 23 of the appearance inspection apparatus 11 controls the transport table 24, and starts transporting the electronic component 1 transported to the transport table 24 in the process of step S3 in the direction of arrow B in FIG.

In step S <b> 6, the inspection stages 1 to 3 of the appearance inspection apparatus 11 start the quality inspection of the electronic component 1, respectively.
Specifically, the line sensor cameras 26 to 28 capture images of the conveyed electronic components 1, and the image processing units 37 to 39 input images captured by the line sensor cameras 26 to 28, respectively. Judge the quality.
The pass / fail determination process in the inspection stages 1 to 3 will be described later.

  In step S <b> 7, the CPU (not shown) of the image processing units 37 to 39 of the appearance inspection apparatus 11 outputs a quality determination result (inspection result) to the main processing PC 41 via the sequencer 40.

  In step S <b> 8, the CPU of the main processing PC 41 of the appearance inspection apparatus 11 inputs the quality determination result from the image processing units 37 to 39 output in the processing of step S <b> 7, and determines the quality of each electronic component 1. .

  In step S <b> 9, the CPU of the main processing PC 41 of the appearance inspection apparatus 11 controls the carry-out unit 32 via the sequencer 40 based on the quality determination result obtained in the process of step S <b> 8.

  In step S10, the carry-out unit 32 of the appearance inspection apparatus 11 controls a suction unit (not shown) to suck (pick up) the electronic component 1 determined to be an OK product (good product) or an NG product (defective product).

  In step S11, the carry-out unit 32 of the appearance inspection apparatus 11 carries out the OK product (good product) adsorbed in the process of step S10 to the OK product carry-out magazine 33 under the control of the main processing PC 41, and the NG product (defective product). ) To the NG product carry-out magazine 34.

  In step S <b> 12, the carry-out unit 32 of the appearance inspection apparatus 11 controls a suction unit (not shown), and includes a slip sheet (not shown) stored in the slip sheet storage BOX 35 (a slip sheet 31 stored in the slip sheet storage BOX 25). Are sucked and inserted into the electronic component 1 carried out to the OK product carrying magazine 33 and the NG product carrying magazine 34.

  In step S13, the CPU of the main processing PC 41 determines whether or not the inspection end is instructed by the operator via the operation unit 43 and the sequencer 40, and if it is determined that the inspection end is not instructed, step S2 Returning to the above, the above-described inspection process is repeatedly executed. In step S13, if the CPU of the main processing PC 41 determines that the end of inspection has been instructed, the process proceeds to step S14.

  In step S <b> 14, the CPU of the main processing PC 41 of the appearance inspection apparatus 11 outputs the determination result to the inspection result confirmation PC 42.

(Inspection stage 1 pass / fail judgment processing)
FIG. 5 is a flowchart for explaining quality determination processing in the inspection stage 1. In the description of FIG. 5, specific processing contents will also be described with reference to FIG. 6.

In steps S21 and S22, a CPU (not shown) of the image processing unit 37 inputs an image captured by the line sensor camera 26 and inputs a reference image that has been determined to be non-defective in advance.
Thereby, for example, a captured image 101 and a reference image 102 as shown in FIG. 6 are input. In the captured image 101, it is possible to confirm the lacking parts 101A and 101B, the missing part 101C, and the protrusions 101D and 101E.

In step S23, the CPU of the image processing unit 37 extracts a product part from the captured image 101 input in the process of step S21 by using, for example, a bright part extraction process (material part surface extraction) using a binarization process. Process).
Thereby, for example, as illustrated in FIG. 6, a bright portion extraction image 103 is generated. In the bright portion extracted image 103, it is possible to confirm the missing portions 103A and 103B, the missing portion 103C, and the protrusions 103D and 103E.

In step S24, the CPU of the image processing unit 37 performs a process of expanding the white area in the bright part extracted image 103 generated by the bright part extraction process of step S23.
In the expansion process, for example, an expansion filter of 3 pixels × 3 pixels is used, and a white area of 1 pixel is expanded to 3 pixels × 3 pixels.
As a result, for example, as shown in FIG. 6, an expanded image 104 is generated in which the stain on the material portion and the lack of the material portion appearing black are removed. Although the missing image 104C and the protrusions 104D and 104E can be confirmed in the expanded image 104, the chips 103A and 103B confirmed in the bright portion extracted image 103 have disappeared.

In step S25, the CPU of the image processing unit 37 performs a process of contracting the white area in the expanded image 104 generated by the white area expansion process of step S24.
For the contraction process, for example, a contraction filter of 3 pixels × 3 pixels having the same size as the expansion filter is used, and a white area of 1 pixel is contracted to 3 pixels × 3 pixels.
Thereby, for example, as shown in FIG. 6, a contracted image 105 is generated. In the contracted image 105, the missing portion 105C and the protrusions 105D and 105E can be confirmed.

In step S26, the CPU of the image processing unit 37 performs a difference process between the bright part extracted image 103 generated by the bright part extraction process of step S23 and the contracted image 105 generated by the white area contraction process of step S25. .
Thereby, for example, as shown in FIG. 6, a difference image 106 is generated. In the difference image 106, it is possible to confirm the chips 106A and 106B removed by the white region expansion processing.

  In step S27, the CPU of the image processing unit 37 extracts the chips 106A and 106B from the difference image 106 generated by the difference processing in step S26, and performs labeling (numbering) as defect candidates.

  In step S28, the CPU of the image processing unit 37 calculates the coordinates and area (number of pixels) of the defect candidate labeled in the process of step S27, and determines whether the calculated area is larger than a predetermined threshold.

In step S29, the CPU of the image processing unit 37 performs difference processing between the captured image 101 input in step S21 and the reference image 102 input in step S22.
Thereby, for example, as shown in FIG. 6, a difference image 107 is generated. In the difference image 107, it is possible to confirm a chip 107B, a drop 107D, a protrusion 107E, and product contour portions 107F and 107G.

That is, when there is a minute deformation due to the etching process as in the electronic component 1, the product contour portions 107F and 107G remain after the difference processing. Accordingly, the image processing unit 37 further performs contraction / expansion processing for removing the product contour portions 107F and 107G in the difference image 107 and extracting only the defect.
Thereby, for example, as shown in FIG. 6, a contraction / expansion image 108 is generated. A missing part 108D can be confirmed in the contraction / expansion image 108.

  In step S30, the CPU of the image processing unit 37 extracts the missing part 108D from the contracted / expanded image 108 generated by the difference process and the contracted / expanded process in step S29, and performs labeling (numbering) as a defect candidate.

  In step S31, the CPU of the image processing unit 37 calculates the coordinates and area (number of pixels) of the defect candidate labeled in the process of step S30, and determines whether the calculated area is larger than a predetermined threshold.

  In step S32, if the CPU of the image processing unit 37 determines that at least one is NG (defect) in the processes of step S28 and step S31, the captured image 101 input in the process of step S21 is defective. The determination result is output to the main processing PC 41 via the sequencer 40. That is, it is determined as OK (non-defective product) only when it is determined as OK in both the processing of step S28 and step S31.

  As for the defect having a small size by the above-described pass / fail determination process of the inspection stage 1, the white area expansion process and the contraction process in the captured image are performed to perform the difference process between the original image and the contracted image, and the large size defect With respect to the above, by performing the difference process between the captured image and the reference image, it is possible to extract the contamination on the product surface material portion, the chipping defect on the material portion, and the like with high accuracy.

(Inspection stage 2 pass / fail judgment processing)
FIG. 7 is a flowchart for explaining quality determination processing in the inspection stage 2. In the description of FIG. 7, the specific processing contents will also be described with reference to FIG.

In steps S41 and S42, the CPU (not shown) of the image processing unit 38 inputs an image captured by the line sensor camera 27 and inputs a reference image determined to be non-defective in advance.
Thereby, for example, a captured image 111 and a reference image 112 as shown in FIG. 8 are input. In the captured image 111, a chip 111A, a drop 111B, a drop 111C, and protrusions 111D and 111E can be confirmed.

In step S43, the CPU of the image processing unit 38 extracts, for example, a bright part extraction process (plated part surface extraction) using a binarization process in order to extract a product part from the captured image 111 input in the process of step S41. Process).
Thereby, for example, as illustrated in FIG. 8, a bright portion extraction image 113 is generated. In the bright part extracted image 113, a chipped 113A, a missing 113C, and a protrusion 113E can be confirmed.

In step S44, the CPU of the image processing unit 38 performs a process of expanding the white region in the bright part extracted image 113 generated by the bright part extraction process of step S43.
For the expansion process, for example, an expansion filter of 3 pixels × 3 pixels is used.
As a result, for example, as shown in FIG. 8, an expanded image 114 is generated from which the stain on the plated portion and the missing portion on the plated portion are removed. Although the missing image 114C and the protrusion 114E can be confirmed in the expanded image 114, the chipped portion 113A confirmed in the bright portion extracted image 1113 has disappeared.

In step S45, the CPU of the image processing unit 38 performs a process of contracting the white area in the expanded image 114 generated by the white area expansion process in step S44.
For the contraction process, for example, a contraction filter of 3 pixels × 3 pixels having the same size as the expansion filter is used.
Thereby, for example, as shown in FIG. 8, a contracted image 115 is generated. In the contracted image 115, a dropout 115C and a protrusion 115E can be confirmed.

In step S46, the CPU of the image processing unit 38 performs a difference process between the bright part extracted image 113 generated by the bright part extraction process of step S43 and the contracted image 115 generated by the white area contraction process of step S45. .
Thereby, for example, as shown in FIG. 8, a difference image 116 is generated. In the difference image 116, it is possible to confirm a chipped portion 116A removed by the white region expansion process.

  In step S47, the CPU of the image processing unit 38 extracts the defect 116A from the difference image 116 generated by the difference process in step S46, and performs labeling (numbering) as a defect candidate.

  In step S48, the CPU of the image processing unit 38 calculates the coordinates and area (number of pixels) of the defect candidate labeled in the process of step S47, and determines whether the calculated area is larger than a predetermined threshold.

In step S49, the CPU of the image processing unit 38 performs a difference process between the captured image 111 input in the process of step S41 and the reference image 112 input in the process of step S42.
Thereby, for example, as shown in FIG. 8, a difference image 117 is generated. In the difference image 117, it is possible to confirm a missing portion 117C and product contour portions 117F and 117G.

As described above, when there is a minute deformation due to the etching process like the electronic component 1, the product contour portions 117F and 117G remain after the difference process. Therefore, the image processing unit 38 further performs contraction / expansion processing for removing the product contour portions 117F and 117G in the difference image 117 and extracting only the defect.
Thereby, for example, as shown in FIG. 8, a contraction / expansion image 118 is generated. A missing portion 118 </ b> C can be confirmed in the contraction / expansion image 118.

  In step S50, the CPU of the image processing unit 38 extracts the missing portion 118C from the contracted / expanded image 118 generated by the difference processing and contraction / expansion processing in step S49, and performs labeling (numbering) as defect candidates.

  In step S51, the CPU of the image processing unit 38 calculates the coordinates and area (number of pixels) of the defect candidate labeled in the process of step S50, and determines whether the calculated area is larger than a predetermined threshold.

  In step S52, if the CPU of the image processing unit 38 determines that at least one is NG (defect) in the processing of step S48 and step S51, the captured image 111 input in the processing of step S41 is defective. The determination result is output to the main processing PC 41 via the sequencer 40. That is, it is determined as OK (non-defective product) only when it is determined as OK in both the processing of step S48 and step S51.

  With the above-described pass / fail determination process of the inspection stage 2, for a small defect, a white area expansion process and a contraction process are performed on the captured image to perform a difference process between the original image and the contracted image, and a large defect With respect to the above, by performing the difference process between the captured image and the reference image, it is possible to extract the stains on the silver plating, defective plating defects, and the like with high accuracy.

(Inspection stage 3 pass / fail judgment processing)
FIG. 9 is a flowchart for explaining quality determination processing in the inspection stage 3. In the description of FIG. 9, the specific processing contents will also be described with reference to FIG.

In steps S61 and S62, a CPU (not shown) of the image processing unit 39 inputs an image captured by the line sensor camera 28 and inputs a reference image determined to be non-defective in advance.
Thereby, for example, a captured image 121 and a reference image 122 as shown in FIG. 10 are input. In the captured image 121, it is possible to confirm the lacks 121A and 121B, the dropout 121C, and the protrusions 121D and 121E.

In step S63, the CPU of the image processing unit 39 performs a dark part extraction process (back surface material part back surface extraction process) in order to extract the product part from the captured image 121 input in the process of step S61.
Thereby, for example, as illustrated in FIG. 10, a dark portion extraction image 123 is generated. In the dark part extracted image 123, it is possible to confirm a chipped 123B, a missing part 123C, and protrusions 123D and 123E.

In step S64, the CPU of the image processing unit 39 performs a process of expanding the white region in the dark part extraction image 123 generated by the dark part extraction process in step S63.
For the expansion process, for example, an expansion filter of 3 pixels × 3 pixels is used.
Thereby, for example, as shown in FIG. 10, the expanded image 124 from which the material portion is removed is generated. Although the missing image 124C and the protrusions 124D and 124E can be confirmed in the expanded image 124, the chipped portion 123B confirmed in the dark portion extraction image 123 has disappeared.

In step S65, the CPU of the image processing unit 39 performs a process of contracting the white area in the expanded image 124 generated by the white area expansion process of step S64.
For the contraction process, for example, a contraction filter of 3 pixels × 3 pixels having the same size as the expansion filter is used.
Thereby, for example, as shown in FIG. 10, a contracted image 125 is generated. In the contracted image 125, it is possible to confirm a drop 125C and protrusions 125D and 125E.

In step S66, the CPU of the image processing unit 39 performs a difference process between the dark part extracted image 123 generated in the dark part extraction process in step S63 and the contracted image 125 generated in the white area contraction process in step S65.
Thereby, for example, as shown in FIG. 10, a difference image 126 is generated. In the difference image 126, the chipped portion 126B removed by the white region expansion process can be confirmed.

  In step S67, the CPU of the image processing unit 39 extracts the defect 126B from the difference image 126 generated by the difference process in step S66, and performs labeling (numbering) as a defect candidate.

  In step S68, the CPU of the image processing unit 39 calculates the coordinates and area (number of pixels) of the defect candidate labeled in the process of step S67, and determines whether the calculated area is larger than a predetermined threshold.

In step S69, the CPU of the image processing unit 39 performs a bright part extraction process (etching part surface extraction process) in order to extract a product part from the captured image 121 input in the process of step S61.
Thereby, for example, as shown in FIG. 10, a bright portion extraction image 127 is generated. In the bright portion extracted image 127, a chip 127B and protrusions 127D and 127E can be confirmed.

In step S70, the CPU of the image processing unit 39 performs a process of expanding the white area in the bright part extracted image 127 generated by the bright part extraction process of step S69.
For the expansion process, for example, an expansion filter of 3 pixels × 3 pixels is used.
Thereby, for example, as shown in FIG. 10, an expanded image 128 from which the protrusions of the plating part and the material part are removed is generated. In the dilated image 128, the missing portion 128B can be confirmed, but the protrusions 127D and 127E confirmed in the bright portion extraction image 127 are lost.

In step S71, the CPU of the image processing unit 39 performs a process of contracting the white area in the expanded image 128 generated by the white area expansion process of step S70.
For the contraction process, for example, a contraction filter of 3 pixels × 3 pixels having the same size as the expansion filter is used.
Thereby, for example, as shown in FIG. 10, a contracted image 129 is generated. In the contracted image 129, a chipped portion 129B can be confirmed.

In step S72, the CPU of the image processing unit 39 performs difference processing between the bright part extracted image 127 generated by the bright part extraction process of step S69 and the contracted image 129 generated by the white area contraction process of step S71. .
Thereby, for example, as shown in FIG. 10, a difference image 130 is generated. In the difference image 130, it is possible to confirm the chips 130D and 130E removed by the white region expansion processing.

  In step S73, the CPU of the image processing unit 39 extracts the missing portions 130D and 130E from the difference image 130 generated by the difference processing in step S72, and performs labeling (numbering) as defect candidates.

  In step S74, the CPU of the image processing unit 39 calculates the coordinates and area (number of pixels) of the defect candidate labeled in the process of step S73, and determines whether the calculated area is larger than a predetermined threshold.

In step S75, the CPU of the image processing unit 39 performs a difference process between the captured image 121 input in the process of step S61 and the reference image 122 input in the process of step S62.
Thereby, for example, as shown in FIG. 10, a difference image 131 is generated. In the difference image 131, a chip 131B, a drop 131C, a protrusion 131E, and product contour portions 131F and 131G can be confirmed.
That is, when there is a minute deformation due to the etching process like the electronic component 1, the product contour portions 131E and 131F remain after the difference processing. Therefore, the image processing unit 39 further performs contraction / expansion processing for removing the product contour portions 131F and 131G in the difference image 131 and extracting only defects.
Thereby, for example, as shown in FIG. 10, a contraction / expansion image 132 is generated. In the contracted / expanded image 132, a missing portion 132C can be confirmed.

  In step S76, the CPU of the image processing unit 39 extracts the missing portion 132C from the contracted / expanded image 132 generated by the difference processing and contraction / expansion processing in step S75, and performs labeling (numbering) as a defect candidate.

  In step S77, the CPU of the image processing unit 39 calculates the coordinates and area (number of pixels) of the defect candidate labeled in the process of step S76, and determines whether the calculated area is larger than a predetermined threshold.

  In step S78, if the CPU of the image processing unit 39 determines that at least one is NG (defect) in the processing of step S68, step S74, and step S77, the captured image 121 input in the processing of step S61. Outputs the determination result that is a defect to the main processing PC 41 via the sequencer 40. That is, it is determined as OK (non-defective product) only when it is determined as OK in the processes of step S68, step S74, and step S77.

  As for the defect having a small size by the above-described pass / fail determination process of the inspection stage 3, the difference process between the original image and the contracted image is performed by performing the expansion process and the contraction process of the white area in the captured image, and the large defect With respect to the above, by performing the difference processing between the captured image and the reference image, it is possible to extract the contamination on the back surface of the product, chipping of the material, plating, defective protrusions on the material, and the like with high accuracy.

(Comprehensive pass / fail judgment process of main processing PC)
FIG. 11 is a flowchart for explaining the overall quality determination process in the main process PC 41.

  In step S91, the CPU (not shown) of the main processing PC 41 determines the determination result output from the image processing unit 37 of the inspection stage 1, the determination result output from the image processing unit 38 of the inspection stage 2, and the image of the inspection stage 3. The determination result output by the processing unit 39 is input.

  In step S92, the CPU of the main processing PC 41 determines whether or not the determination results input in the processing of step S91 are all non-defective products (OK products). If it is determined that all are non-defective products, the process proceeds to step S93.

  In step S <b> 93, the CPU of the main processing PC 41 controls the carry-out unit 32 to cause the suction unit (not shown) to pick up the electronic component 1 to be inspected and carry it out to the OK product carry-out magazine 33.

  In step S92, if the CPU of the main processing PC 41 determines that the determination results input in the processing of step S91 are not all non-defective products, that is, a defective product (NG product), the process proceeds to step S94.

  In step S <b> 94, the CPU of the main processing PC 41 controls the carry-out unit 32 to cause the suction unit (not shown) to pick up the electronic component 1 to be inspected and carry it out to the NG product carry-out magazine 34.

  If even one is determined to be NG by the above comprehensive quality determination process, it is possible to inspect with higher accuracy by using a defective product.

[Effects of the embodiment of the present invention]
As described above, according to the present embodiment, it is possible to detect the stains and chips on the product front and back surface material parts and the stains, chips and protrusions on the product silver plating with high accuracy.
In addition, by performing differential processing between the captured image and the image subjected to the expansion / contraction process, it is possible to detect small chips or protrusions existing in the product contour portion with high accuracy.
Furthermore, a defect having a relatively large size can be detected by performing a difference process between the captured image and the reference image.

  The preferred embodiments of the appearance inspection apparatus and the like according to the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be apparent to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea disclosed in the present application, and these naturally belong to the technical scope of the present invention. Understood.

DESCRIPTION OF SYMBOLS 1 ......... Electronic component 11 ......... Appearance inspection apparatus 26-28 ......... Line sensor camera 29-31 ......... Lighting unit 37-39 ......... Image processing unit

Claims (8)

An appearance inspection apparatus for inspecting the appearance of an electronic component,
First irradiation means for irradiating the surface of the electronic component with blue LED dome illumination and blue LED coaxial incident illumination;
A second irradiation means for irradiating the surface of the electronic component with white LED dome illumination and white LED coaxial incident illumination;
First imaging means for imaging the electronic component irradiated by the first irradiation means and obtaining a first inspection target image;
A second imaging unit that images the electronic component irradiated by the second irradiation unit and obtains a second inspection target image;
The bright part of the first inspection object image obtained by the first imaging means is extracted, the bright part of the extracted first bright part extraction image is expanded, the expanded image is contracted, and the first part is extracted. First expansion / contraction means for obtaining an expansion / contraction image;
The bright part of the second inspection object image obtained by the second imaging means is extracted, the bright part of the extracted second bright part extraction image is expanded, the expanded image is contracted, and the second part is extracted. A second expansion / contraction means for obtaining an expansion / contraction image;
A first difference means for calculating a difference between the first bright portion extraction image and the first expansion / contraction image and obtaining a first difference image;
A second difference means for calculating a difference between the second bright portion extraction image and the second expansion / contraction image and obtaining a third difference image;
First determination means for determining pass / fail based on the first difference image obtained by the first difference means;
Second determination means for determining pass / fail based on the third difference image obtained by the second difference means;
An appearance inspection apparatus comprising: An appearance inspection apparatus for inspecting the appearance of an electronic component,
First irradiation means for irradiating the surface of the electronic component with blue LED dome illumination and blue LED coaxial incident illumination;
A third irradiation means for irradiating the back surface of the electronic component with white LED dome illumination, white LED coaxial incident illumination, and transmission illumination;
First imaging means for imaging the electronic component irradiated by the first irradiation means and obtaining a first inspection target image;
A third imaging unit that images the electronic component irradiated by the third irradiation unit and obtains a third inspection target image;
The bright part of the first inspection object image obtained by the first imaging means is extracted, the bright part of the extracted first bright part extraction image is expanded, the expanded image is contracted, and the first part is extracted. First expansion / contraction means for obtaining an expansion / contraction image;
A bright part of the third inspection object image obtained by the third imaging means is extracted, a bright part of the extracted third bright part extraction image is expanded, and the expanded image is contracted to form a third A third expansion unit obtains an expansion / contraction image, extracts a dark part of the third inspection target image, expands a bright part of the extracted dark part extraction image, and contracts the expanded image to obtain a fourth expansion / contraction image. Expansion and contraction means;
A first difference means for calculating a difference between the first bright portion extraction image and the first expansion / contraction image and obtaining a first difference image;
The difference between the third bright portion extraction image and the third expansion / contraction image is calculated to obtain a fifth difference image, and the difference between the dark portion extraction image and the fourth expansion / contraction image is calculated. Third difference means for obtaining a sixth difference image;
First determination means for determining pass / fail based on the first difference image obtained by the first difference means;
Third determination means for determining pass / fail based on the fifth difference image and the sixth difference image obtained by the third difference means;
An appearance inspection apparatus comprising: The second difference means calculates a difference between the second inspection target image and a second reference image serving as a reference for a non-defective product, and further obtains a fourth difference image,
The appearance inspection apparatus according to claim 1 , wherein the second determination unit further determines pass / fail based on the fourth difference image obtained by the second difference unit. The third difference means calculates a difference between the third inspection target image and a third reference image serving as a reference for a non-defective product, and further obtains a seventh difference image,
The appearance inspection apparatus according to claim 2 , wherein the third determination unit further determines pass / fail based on the seventh difference image obtained by the third difference unit. First irradiation means for irradiating the surface of the electronic component with blue LED dome illumination and blue LED coaxial incident illumination;
A second irradiation means for irradiating the surface of the electronic component with white LED dome illumination and white LED coaxial incident illumination;
First imaging means for imaging the electronic component irradiated by the first irradiation means and obtaining a first inspection target image;
An external inspection method for an external appearance inspection apparatus for inspecting an external appearance of an electronic component , comprising: a second imaging unit that images the electronic component irradiated by the second irradiation unit and obtains a second inspection target image. There,
The bright part of the first inspection object image obtained by the first imaging means is extracted, the bright part of the extracted first bright part extraction image is expanded, the expanded image is contracted, and the first part is extracted. A first expansion / contraction step for obtaining an expansion / contraction image;
The bright part of the second inspection object image obtained by the second imaging means is extracted, the bright part of the extracted second bright part extraction image is expanded, the expanded image is contracted, and the second part is extracted. A second expansion / contraction step for obtaining an expansion / contraction image;
A first difference step of calculating a difference between the first bright portion extraction image and the first expansion / contraction image to obtain a first difference image;
A second difference step of calculating a difference between the second bright portion extraction image and the second expansion / contraction image to obtain a third difference image;
A first determination step for determining pass / fail based on the first difference image obtained by the first difference step;
A second determination step for determining pass / fail based on the third difference image obtained by the second difference step;
An appearance inspection method comprising: First irradiation means for irradiating the surface of the electronic component with blue LED dome illumination and blue LED coaxial incident illumination;
A third irradiation means for irradiating the back surface of the electronic component with white LED dome illumination, white LED coaxial incident illumination, and transmission illumination;
First imaging means for imaging the electronic component irradiated by the first irradiation means and obtaining a first inspection target image;
A third imaging unit that images the electronic component irradiated by the third irradiation unit and obtains a third inspection target image; and an appearance inspection method in an appearance inspection apparatus that inspects the appearance of the electronic component. There,
The bright part of the first inspection object image obtained by the first imaging means is extracted, the bright part of the extracted first bright part extraction image is expanded, the expanded image is contracted, and the first part is extracted. A first expansion / contraction step for obtaining an expansion / contraction image;
A bright part of the third inspection object image obtained by the third imaging means is extracted, a bright part of the extracted third bright part extraction image is expanded, and the expanded image is contracted to form a third A third expansion unit obtains an expansion / contraction image, extracts a dark part of the third inspection target image, expands a bright part of the extracted dark part extraction image, and contracts the expanded image to obtain a fourth expansion / contraction image. Expansion and contraction steps;
A first difference step of calculating a difference between the first bright portion extraction image and the first expansion / contraction image to obtain a first difference image;
The difference between the third bright portion extraction image and the third expansion / contraction image is calculated to obtain a fifth difference image, and the difference between the dark portion extraction image and the fourth expansion / contraction image is calculated. A third difference step for obtaining a sixth difference image;
A first determination step for determining pass / fail based on the first difference image obtained by the first difference step;
A third determination step for determining pass / fail based on the fifth difference image and the sixth difference image obtained by the third difference step;
An appearance inspection method comprising: First irradiation means for irradiating the surface of the electronic component with blue LED dome illumination and blue LED coaxial incident illumination;
A second irradiation means for irradiating the surface of the electronic component with white LED dome illumination and white LED coaxial incident illumination;
First imaging means for imaging the electronic component irradiated by the first irradiation means and obtaining a first inspection target image;
A second imaging unit that images the electronic component irradiated by the second irradiation unit and obtains a second inspection target image;
A program for an appearance inspection apparatus for inspecting the appearance of an electronic component, comprising:
Computer
The bright part of the first inspection object image obtained by the first imaging means is extracted, the bright part of the extracted first bright part extraction image is expanded, the expanded image is contracted, and the first part is extracted. A first expansion / contraction means for obtaining an expansion / contraction image;
The bright part of the second inspection object image obtained by the second imaging means is extracted, the bright part of the extracted second bright part extraction image is expanded, the expanded image is contracted, and the second part is extracted. A second expansion / contraction means for obtaining an expansion / contraction image;
A first difference unit that calculates a difference between the first bright portion extraction image and the first expansion / contraction image and obtains a first difference image;
Second difference means for calculating a difference between the second bright portion extraction image and the second expansion / contraction image and obtaining a third difference image;
First determination means for determining pass / fail based on the first difference image obtained by the first difference means;
Second determination means for determining pass / fail based on the third difference image obtained by the second difference means;
Program to function as. First irradiation means for irradiating the surface of the electronic component with blue LED dome illumination and blue LED coaxial incident illumination;
A third irradiation means for irradiating the back surface of the electronic component with white LED dome illumination, white LED coaxial incident illumination, and transmission illumination;
First imaging means for imaging the electronic component irradiated by the first irradiation means and obtaining a first inspection target image;
A third imaging unit that images the electronic component irradiated by the third irradiation unit and obtains a third inspection target image;
A program for an appearance inspection apparatus for inspecting the appearance of an electronic component, comprising:
Computer
The bright part of the first inspection object image obtained by the first imaging means is extracted, the bright part of the extracted first bright part extraction image is expanded, the expanded image is contracted, and the first part is extracted. A first expansion / contraction means for obtaining an expansion / contraction image;
A bright part of the third inspection object image obtained by the third imaging means is extracted, a bright part of the extracted third bright part extraction image is expanded, and the expanded image is contracted to form a third A third expansion unit obtains an expansion / contraction image, extracts a dark part of the third inspection target image, expands a bright part of the extracted dark part extraction image, and contracts the expanded image to obtain a fourth expansion / contraction image. Expansion and contraction means,
A first difference unit that calculates a difference between the first bright portion extraction image and the first expansion / contraction image and obtains a first difference image;
The difference between the third bright portion extraction image and the third expansion / contraction image is calculated to obtain a fifth difference image, and the difference between the dark portion extraction image and the fourth expansion / contraction image is calculated. , Third difference means for obtaining a sixth difference image,
First determination means for determining pass / fail based on the first difference image obtained by the first difference means;
Third determination means for determining pass / fail based on the fifth difference image and the sixth difference image obtained by the third difference means;
Program to function as.

Images