JP6284184B2 - π-conjugated compound, adhesive using π-conjugated compound, method of using adhesive, method of peeling joint, and method of producing π-conjugated compound - Google Patents
π-conjugated compound, adhesive using π-conjugated compound, method of using adhesive, method of peeling joint, and method of producing π-conjugated compound Download PDFInfo
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- 150000001875 compounds Chemical class 0.000 title claims description 135
- 239000000853 adhesive Substances 0.000 title claims description 78
- 230000001070 adhesive effect Effects 0.000 title claims description 73
- 238000000034 method Methods 0.000 title claims description 33
- 239000004973 liquid crystal related substance Substances 0.000 claims description 40
- -1 2-butenedioic acid diester Chemical class 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 21
- 235000011087 fumaric acid Nutrition 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 125000004432 carbon atom Chemical group C* 0.000 claims description 17
- 125000000217 alkyl group Chemical group 0.000 claims description 15
- 239000007787 solid Substances 0.000 claims description 15
- 238000001816 cooling Methods 0.000 claims description 8
- 230000001678 irradiating effect Effects 0.000 claims description 7
- 238000005304 joining Methods 0.000 claims description 6
- 125000003545 alkoxy group Chemical group 0.000 claims description 5
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 42
- 238000006243 chemical reaction Methods 0.000 description 35
- 239000000243 solution Substances 0.000 description 18
- SFHYNDMGZXWXBU-LIMNOBDPSA-N 6-amino-2-[[(e)-(3-formylphenyl)methylideneamino]carbamoylamino]-1,3-dioxobenzo[de]isoquinoline-5,8-disulfonic acid Chemical compound O=C1C(C2=3)=CC(S(O)(=O)=O)=CC=3C(N)=C(S(O)(=O)=O)C=C2C(=O)N1NC(=O)N\N=C\C1=CC=CC(C=O)=C1 SFHYNDMGZXWXBU-LIMNOBDPSA-N 0.000 description 11
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- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical group C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 6
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- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 5
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 5
- 0 *Cc1cc(*)c(*)c(*)c1 Chemical compound *Cc1cc(*)c(*)c(*)c1 0.000 description 4
- WADSJYLPJPTMLN-UHFFFAOYSA-N 3-(cycloundecen-1-yl)-1,2-diazacycloundec-2-ene Chemical compound C1CCCCCCCCC=C1C1=NNCCCCCCCC1 WADSJYLPJPTMLN-UHFFFAOYSA-N 0.000 description 4
- FKHYSFNJCLUIMN-BNEIJSFPSA-N C(\C=C\C(=O)OCC1=CC(=C(C=C1)OCCCCCCCCCCCC)OCCCCCCCCCCCC)(=O)OCC1=CC(=C(C=C1)OCCCCCCCCCCCC)OCCCCCCCCCCCC Chemical compound C(\C=C\C(=O)OCC1=CC(=C(C=C1)OCCCCCCCCCCCC)OCCCCCCCCCCCC)(=O)OCC1=CC(=C(C=C1)OCCCCCCCCCCCC)OCCCCCCCCCCCC FKHYSFNJCLUIMN-BNEIJSFPSA-N 0.000 description 4
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 4
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 4
- KDUIUFJBNGTBMD-DLMDZQPMSA-N [8]annulene Chemical group C/1=C/C=C\C=C/C=C\1 KDUIUFJBNGTBMD-DLMDZQPMSA-N 0.000 description 4
- 238000000113 differential scanning calorimetry Methods 0.000 description 4
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- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Natural products OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
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- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229940125904 compound 1 Drugs 0.000 description 2
- 229940126214 compound 3 Drugs 0.000 description 2
- 125000004185 ester group Chemical group 0.000 description 2
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- 238000013213 extrapolation Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
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- 238000004128 high performance liquid chromatography Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000005340 laminated glass Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000011976 maleic acid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
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- 238000001542 size-exclusion chromatography Methods 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
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- 238000005809 transesterification reaction Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- YWWDBCBWQNCYNR-UHFFFAOYSA-N trimethylphosphine Chemical compound CP(C)C YWWDBCBWQNCYNR-UHFFFAOYSA-N 0.000 description 2
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- 229920003026 Acene Polymers 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- QJXOPBIUEOTGRF-UHFFFAOYSA-N C(CCCCCCCCCCC)OC=1C=C(CBr)C=CC1OCCCCCCCCCCCC Chemical compound C(CCCCCCCCCCC)OC=1C=C(CBr)C=CC1OCCCCCCCCCCCC QJXOPBIUEOTGRF-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- KEAYESYHFKHZAL-UHFFFAOYSA-N Sodium Chemical compound [Na] KEAYESYHFKHZAL-UHFFFAOYSA-N 0.000 description 1
- 239000003849 aromatic solvent Substances 0.000 description 1
- DMLAVOWQYNRWNQ-UHFFFAOYSA-N azobenzene Chemical group C1=CC=CC=C1N=NC1=CC=CC=C1 DMLAVOWQYNRWNQ-UHFFFAOYSA-N 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- FJDQFPXHSGXQBY-UHFFFAOYSA-L caesium carbonate Chemical compound [Cs+].[Cs+].[O-]C([O-])=O FJDQFPXHSGXQBY-UHFFFAOYSA-L 0.000 description 1
- 229910000024 caesium carbonate Inorganic materials 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- MMFVFNVXXDFELX-UHFFFAOYSA-N chloroform;n,n-diethylethanamine Chemical compound ClC(Cl)Cl.CCN(CC)CC MMFVFNVXXDFELX-UHFFFAOYSA-N 0.000 description 1
- 238000004440 column chromatography Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- SPWVRYZQLGQKGK-UHFFFAOYSA-N dichloromethane;hexane Chemical compound ClCCl.CCCCCC SPWVRYZQLGQKGK-UHFFFAOYSA-N 0.000 description 1
- JUJPMEAAXFYJOI-UHFFFAOYSA-N dichloromethane;n,n-diethylethanamine;hexane Chemical compound ClCCl.CCCCCC.CCN(CC)CC JUJPMEAAXFYJOI-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000011907 photodimerization Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- LPNYRYFBWFDTMA-UHFFFAOYSA-N potassium tert-butoxide Chemical compound [K+].CC(C)(C)[O-] LPNYRYFBWFDTMA-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 229910000104 sodium hydride Inorganic materials 0.000 description 1
- 239000012312 sodium hydride Substances 0.000 description 1
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical class O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 150000005846 sugar alcohols Chemical group 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- RXJKFRMDXUJTEX-UHFFFAOYSA-N triethylphosphine Chemical compound CCP(CC)CC RXJKFRMDXUJTEX-UHFFFAOYSA-N 0.000 description 1
- KCTAHLRCZMOTKM-UHFFFAOYSA-N tripropylphosphane Chemical compound CCCP(CCC)CCC KCTAHLRCZMOTKM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Adhesives Or Adhesive Processes (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Description
本発明は、π共役化合物及びその製造方法に関する。また本発明は、π共役化合物を用いた接着剤及びその使用方法に関する。また、本発明は、接着剤を用いて接合された接合部を備える構造体、及び、接着剤を用いて接合された接合部の剥離方法に関する。 The present invention relates to a π-conjugated compound and a method for producing the same. The present invention also relates to an adhesive using a π-conjugated compound and a method for using the same. Moreover, this invention relates to the peeling method of the structure provided with the junction part joined using the adhesive agent, and the junction part joined using the adhesive agent.
近年、ナノインプリント、フォトレジスト、光学部品の加工、半導体実装部品の加工等をはじめとする種々の広い分野で解体性接着剤が使用されている。また、被着材リサイクルの観点からも解体性接着剤が注目されている。 In recent years, decomposable adhesives have been used in various wide fields including nanoimprint, photoresist, processing of optical components, processing of semiconductor mounting components, and the like. In addition, decomposable adhesives have attracted attention from the viewpoint of adherend recycling.
一方、光照射により可逆的に流動化−非流動化させることのできる材料が知られている。この性質を利用した解体性接着剤として、糖アルコール骨格と複数のアゾベンゼン基を組み合わせた液晶性化合物が提案されている(特許文献1)。 On the other hand, materials that can be reversibly fluidized and non-fluidized by light irradiation are known. A liquid crystalline compound combining a sugar alcohol skeleton and a plurality of azobenzene groups has been proposed as a disassembling adhesive utilizing this property (Patent Document 1).
しかし、特許文献1に記載の接着剤では、室温で光照射されることで流動性が変化し、脱着を起こすため、半導体製造プロセスにおけるリソグラフ工程のように紫外線が照射される環境下で使用すると、意図しない被着体の剥離等が生じるおそれがある。 However, in the adhesive described in Patent Document 1, the fluidity is changed by light irradiation at room temperature, and desorption occurs. Therefore, when used in an environment irradiated with ultraviolet rays as in a lithographic process in a semiconductor manufacturing process. There is a risk that unintended adherend peeling or the like may occur.
本発明は、室温のような比較的低温の温度領域下では光照射を受けても接着力が維持される一方、所定の高温領域下で光照射することで流動化させて被着体を剥離させることが可能な解体性接着剤、及びそのような解体性接着剤を実現可能な化合物を提供することを目的の一つとするものである。 In the present invention, the adhesive strength is maintained even under light irradiation in a relatively low temperature region such as room temperature, while the adherend is peeled off by fluidizing by light irradiation under a predetermined high temperature region. It is an object of the present invention to provide a disintegrable adhesive that can be used and a compound that can realize such a dismantleable adhesive.
また、本発明は、上記化合物の製造方法、上記接着剤の使用方法、上記接着剤を用いて接合された接合部を備える構造体、及び、上記接着剤を用いて接合された接合部の剥離方法を提供することを目的の一つとするものである。 In addition, the present invention provides a method for producing the above compound, a method for using the above adhesive, a structure including a joint joined by using the adhesive, and peeling of the joint joined by using the adhesive. One of the purposes is to provide a method.
本発明者らは、上記目的を達成すべく、平面性が高く剛直なπ共役骨格と、分子骨格の動きに伴い分子物性を変換できる柔軟なπ共役骨格との両方の特長を併せ持つ特殊なπ共役化合物を設計し、液晶のような凝集状態で上記柔軟なπ共役骨格を動かすことができれば、外部刺激に応答して物性を可逆的に制御することができると着想して、鋭意検討を行った。その結果、剛直なアセン骨格と柔軟なシクロオクタテトラエン骨格とを有する特定のπ共役化合物が、液晶状態を示す温度域での光照射により流動性を制御できることを見出した。 In order to achieve the above object, the present inventors have developed a special π having both the features of a π-conjugated skeleton having a high flatness and a flexible π-conjugated skeleton capable of converting molecular properties as the molecular skeleton moves. If we can design a conjugated compound and move the flexible π-conjugated skeleton in an agglomerated state like a liquid crystal, we will devote ourselves to the idea that the physical properties can be reversibly controlled in response to external stimuli. It was. As a result, it was found that a specific π-conjugated compound having a rigid acene skeleton and a flexible cyclooctatetraene skeleton can control fluidity by light irradiation in a temperature range showing a liquid crystal state.
本発明の一態様は、下記式(1)で表されるπ共役化合物に関するものである。
[式中、R1は炭素原子数3〜20のアルキル基を少なくとも一つ有する基を示し、nは1〜3の整数を示す。複数のR1は互いに同一であっても異なっていてもよく、複数のnは互いに同一であっても異なっていても良い。]
One embodiment of the present invention relates to a π-conjugated compound represented by the following formula (1).
[Wherein, R 1 represents a group having at least one alkyl group having 3 to 20 carbon atoms, and n represents an integer of 1 to 3. A plurality of R 1 may be the same or different from each other, and a plurality of n may be the same or different from each other. ]
上記π共役化合物は、固体状態を示す温度域と液晶状態を示す温度域と液体状態を示す温度域とを有しており、液体状態を示す温度域まで加熱して部材間に介在させた後、固体状態まで冷却することで、部材間を接着することができる。また、上記π共役化合物は、固体状態で光照射しても物性にほとんど変化が生じないが、液晶状態で光照射すると一部の分子構造に変化が生じて流動性の液体状態に転移する。このため、上記π共役化合物によれば、室温のような比較的低温の温度領域下では光照射を受けても接着力が維持されるにも関わらず、所定の高温領域下で光照射することで流動化して被着体が剥離可能となる解体性接着剤を、容易に実現することができる。 The π-conjugated compound has a temperature range indicating a solid state, a temperature range indicating a liquid crystal state, and a temperature range indicating a liquid state, and after heating to a temperature range indicating a liquid state and interposing between members The members can be bonded by cooling to a solid state. The π-conjugated compound hardly changes in physical properties even when irradiated with light in a solid state, but changes in a part of molecular structure and shifts to a fluid liquid state when irradiated with light in a liquid crystal state. For this reason, according to the above-mentioned π-conjugated compound, light irradiation is performed under a predetermined high temperature region even though the adhesive force is maintained even under light irradiation under a relatively low temperature region such as room temperature. It is possible to easily realize a dismantling adhesive that can be fluidized and the adherend can be peeled off.
また、液晶状態における光照射後は、例えば150℃を超える温度に加熱した後冷却することで、上記π共役化合物の分子構造を初期の状態に戻すことができる。すなわち、上記π共役化合物によれば、所定の温度域下で光照射して流動化させて被着体を剥離させた後、加熱処理を経ることで再利用可能となる、解体性接着剤を実現することができる。 In addition, after light irradiation in the liquid crystal state, the molecular structure of the π-conjugated compound can be returned to the initial state by heating to a temperature exceeding 150 ° C. and then cooling. That is, according to the above π-conjugated compound, the disassembling adhesive that can be reused through heat treatment after light irradiation and fluidization under a predetermined temperature range to peel off the adherend. Can be realized.
上記態様において、上記R1は、下記式(2)で表される基であってよい。
[式中、R2は炭素原子数3〜20のアルキル基又は炭素原子数3〜20のアルコキシ基を示し、pは1〜5の整数を示す。pが2以上のとき、複数のR2は互いに同一であっても異なっていてもよい。]
In the above aspect, R 1 may be a group represented by the following formula (2).
Wherein, R 2 represents an alkoxy group of the alkyl group or 3 to 20 carbon atoms having 3 to 20 carbon atoms, p is an integer of 1-5. When p is 2 or more, the plurality of R 2 may be the same as or different from each other. ]
R1が上記式(2)で表される基であるπ共役化合物は、製造が容易であり、またR2及びpを変更することで液晶状態を示す温度域を適宜調整することができる。 The π-conjugated compound in which R 1 is a group represented by the above formula (2) is easy to produce, and the temperature range showing the liquid crystal state can be appropriately adjusted by changing R 2 and p.
上記態様において、上記π共役化合物は、35〜150℃の少なくとも一部の温度域で液晶状態を示すものであってよい。このようなπ共役化合物によれば、35〜150℃の半導体製造プロセスに悪影響を及ぼしにくい温度域下で、接合部の剥離が可能となるため、実用上有用である。 In the above aspect, the π-conjugated compound may exhibit a liquid crystal state in at least a part of the temperature range of 35 to 150 ° C. Such a π-conjugated compound is practically useful because it can be peeled off at a temperature range that does not adversely affect the semiconductor manufacturing process at 35 to 150 ° C.
本発明の他の態様は、上記π共役化合物を含む、接着剤に関するものである。このような接着剤は上記π共役化合物を含むため、室温のような比較的低温の温度領域下では光照射を受けても接着力が維持される一方、所定の高温領域下で光照射することで流動化させて被着体を剥離させることが可能であり、解体性接着剤として好適に用いることができる。 Another embodiment of the present invention relates to an adhesive containing the above π-conjugated compound. Since such an adhesive contains the above-mentioned π-conjugated compound, the adhesive strength is maintained even when irradiated with light under a relatively low temperature range such as room temperature, while light irradiation is performed under a predetermined high temperature range. The adherend can be peeled off by fluidizing, and can be suitably used as a decomposable adhesive.
本発明の他の態様は、上記接着剤を用いて接合された接合部を備える、構造体に関するものである。このような構造体は、接合部が上記接着剤を用いて接合されているため、低温下で光照射されても接合部の剥離が生じにくいが、所定の高温領域下で光照射することで接合部を容易に剥離させて解体することができる。 The other aspect of this invention is related with a structure provided with the junction part joined using the said adhesive agent. In such a structure, since the bonded portion is bonded using the above-described adhesive, peeling of the bonded portion hardly occurs even when irradiated with light at a low temperature. The joint can be easily peeled and disassembled.
本発明の他の態様は、上記接着剤の使用方法に関するものである。当該使用方法は、2部材間に、上記π共役化合物が液体状態をなす温度に加熱された上記接着剤を介在させる工程と、上記2部材間に介在させた上記接着剤を、上記π共役化合物が固体状態をなす温度に冷却して、上記2部材を接合する工程と、を含む。 Another aspect of the present invention relates to a method of using the above adhesive. The method of use includes the step of interposing the adhesive heated to a temperature at which the π-conjugated compound is in a liquid state between two members, and the adhesive interposed between the two members, Cooling to a temperature at which a solid state is formed, and joining the two members.
上記態様において、上記使用方法は、上記2部材を接合する上記接着剤に、上記π共役化合物が液晶状態を示す温度域下で、300nm〜400nmの波長の紫外線を照射するとともに、上記2部材を剥離させる工程をさらに含むものであってよい。このような工程によれば、2部材を容易に剥離させることができる。 In the above aspect, the method of use includes irradiating the adhesive that joins the two members with ultraviolet rays having a wavelength of 300 nm to 400 nm in a temperature range in which the π-conjugated compound exhibits a liquid crystal state. It may further include a step of peeling. According to such a process, two members can be easily peeled off.
上記態様において、上記紫外線は、例えば0.5〜200J/cm2の積算光量となるように照射することができる。 In the above aspect, the ultraviolet rays can be irradiated so as to have an integrated light amount of, for example, 0.5 to 200 J / cm 2 .
本発明の他の態様は、上記接着剤を用いて接合された接合部を剥離する、剥離方法に関するものである。当該剥離方法は、上記接合部に、上記π共役化合物が液晶状態を示す温度域下で、300nm〜400nmの波長の紫外線を照射する工程を含む。 Another aspect of the present invention relates to a peeling method for peeling a bonded portion bonded using the adhesive. The peeling method includes a step of irradiating the junction with ultraviolet rays having a wavelength of 300 nm to 400 nm in a temperature range where the π-conjugated compound exhibits a liquid crystal state.
本発明の他の態様は、上記π共役化合物の製造方法に関するものである。当該製造方法は、下記式(3)で表されるテトラホルミル化合物と2−ブテン二酸ジエステルとを反応させる工程を含む。
[式中、nは1〜3の整数を示す。]
Another embodiment of the present invention relates to a method for producing the π-conjugated compound. The manufacturing method includes a step of reacting a tetraformyl compound represented by the following formula (3) with 2-butenedioic acid diester.
[In formula, n shows the integer of 1-3. ]
このようなテトラホルミル化合物と2−ブテン二酸ジエステルとの反応によれば、アセン骨格を伸張することができるとともに、両末端のベンゼン環にそれぞれ2つのエステル基を設けることができる。上記態様において、2−ブテン二酸ジエステルを適宜選択することで、上記反応による生成物として上記π共役化合物を得ることができる。また、上記π共役化合物は、テトラホルミル化合物と2−ブテン二酸ジエステルとの反応で生成したテトラエステル化合物のエステル交換反応等を経て、得ることもできる。 According to the reaction of such a tetraformyl compound and 2-butenedioic acid diester, the acene skeleton can be extended and two ester groups can be provided on the benzene rings at both ends. In the said aspect, the said (pi) conjugated compound can be obtained as a product by the said reaction by selecting 2-butenedioic acid diester suitably. The π-conjugated compound can also be obtained through a transesterification reaction of a tetraester compound produced by a reaction between a tetraformyl compound and 2-butenedioic acid diester.
上記態様において、上記2−ブテン二酸ジエステルは、下記式(4−1)又は(4−2)で表される化合物であってもよい。このような2−ブテン二酸ジエステルを用いることで、上記テトラホルミル化合物と2−ブテン二酸ジエステルとの反応によって直接上記π共役化合物を合成することができる。
[式中、R1は炭素原子数3〜20のアルキル基を少なくとも一つ有する基を示す。]
In the above aspect, the 2-butenedioic acid diester may be a compound represented by the following formula (4-1) or (4-2). By using such a 2-butenedioic acid diester, the π-conjugated compound can be directly synthesized by a reaction between the tetraformyl compound and the 2-butenedioic acid diester.
[Wherein R 1 represents a group having at least one alkyl group having 3 to 20 carbon atoms. ]
本発明によれば、室温のような比較的低温の温度領域下では光照射を受けても接着力が維持される一方、所定の高温領域下で光照射することで流動化させて被着体を剥離させることが可能な解体性接着剤、及びそのような解体性接着剤を実現可能な化合物を提供することができる。 According to the present invention, the adhesive strength is maintained even under light irradiation in a relatively low temperature region such as room temperature, while the adherend is fluidized by light irradiation under a predetermined high temperature region. Can be peeled off, and a compound capable of realizing such a dismountable adhesive can be provided.
本発明の好適な実施形態について以下に説明する。 A preferred embodiment of the present invention will be described below.
(π共役化合物)
本実施形態に係るπ共役化合物は、下記式(1)で表される化合物である。
(Π-conjugated compound)
The π-conjugated compound according to this embodiment is a compound represented by the following formula (1).
式中、R1は炭素原子数3〜20のアルキル基を少なくとも一つ有する基を示し、nは1〜3の整数を示す。複数のR1は互いに同一であっても異なっていてもよく、複数のnは互いに同一であっても異なっていても良い。 In the formula, R 1 represents a group having at least one alkyl group having 3 to 20 carbon atoms, and n represents an integer of 1 to 3. A plurality of R 1 may be the same or different from each other, and a plurality of n may be the same or different from each other.
上記π共役化合物は、固体状態を示す温度域と液晶状態を示す温度域と液体状態を示す温度域とを有しており、液体状態を示す温度域まで加熱して部材間に介在させた後、固体状態まで冷却することで、部材間を接着することができる。また、上記π共役化合物は、固体状態で光照射しても物性にほとんど変化が生じないが、液晶状態で光照射すると一部の分子構造に変化が生じて流動性の液体状態に転移する。このため、上記π共役化合物によれば、室温のような比較的低温の温度領域下では光照射を受けても接着力が維持されるにも関わらず、所定の高温領域下で光照射することで流動化して被着体が剥離可能となる解体性接着剤を、容易に実現することができる。 The π-conjugated compound has a temperature range indicating a solid state, a temperature range indicating a liquid crystal state, and a temperature range indicating a liquid state, and after heating to a temperature range indicating a liquid state and interposing between members The members can be bonded by cooling to a solid state. The π-conjugated compound hardly changes in physical properties even when irradiated with light in a solid state, but changes in a part of molecular structure and shifts to a fluid liquid state when irradiated with light in a liquid crystal state. For this reason, according to the above-mentioned π-conjugated compound, light irradiation is performed under a predetermined high temperature region even though the adhesive force is maintained even under light irradiation under a relatively low temperature region such as room temperature. It is possible to easily realize a dismantling adhesive that can be fluidized and the adherend can be peeled off.
また、液晶状態における光照射後は、例えば上記π共役化合物が液体状態を示す温度(例えば150℃を超える温度)に加熱した後冷却することで、上記π共役化合物の分子構造を初期の状態に戻すことができる。すなわち、上記π共役化合物によれば、所定の温度域下で光照射して流動化させて被着体を剥離させた後、加熱処理を経ることで再利用可能となる、解体性接着剤を実現することができる。 In addition, after light irradiation in a liquid crystal state, for example, the π-conjugated compound is heated to a temperature at which the π-conjugated compound exhibits a liquid state (for example, a temperature exceeding 150 ° C.) and then cooled, so that the molecular structure of the π-conjugated compound is brought into an initial state. Can be returned. That is, according to the above π-conjugated compound, the disassembling adhesive that can be reused through heat treatment after light irradiation and fluidization under a predetermined temperature range to peel off the adherend. Can be realized.
より詳細には、上記π共役化合物は、シクロオクタテトラエン骨格で折れ曲がったV字型の分子骨格を有すると考えられ、ある特定の温度領域においてこのV字型の分子骨格が積み重なった集積構造を取ることで液晶状態を示すと考えられる。 More specifically, the π-conjugated compound is considered to have a V-shaped molecular skeleton bent by a cyclooctatetraene skeleton, and an integrated structure in which the V-shaped molecular skeleton is stacked in a specific temperature range. It is thought that the liquid crystal state is shown by taking.
下記式(1−a)は、式(1)のR1が炭素原子数12のアルキル基を有する基であり、nが2であるπ共役化合物の一つを例に取り、V字型の分子骨格を説明する式である。これ以外のπ共役化合物も同様のV字型の分子骨格を有する。
上記π共役化合物は、液晶状態で光照射を受けると、アセン骨格又はシクロオクタテトラエン骨格の光二量化反応により二量体を形成すると考えられる。そして、液晶状態のπ共役化合物の一部が二量化することで、上述の集積構造が崩れ、液晶状態が液体状態へと変化して、流動性が発現すると考えられる。また、この二量化反応は、液晶状態での光照射により生じるもので、固体状態での光照射によっては生じないため、固体状態を示す温度域下で光を照射しても流動化が生じない。 When the π-conjugated compound is irradiated with light in a liquid crystal state, it is considered that a dimer is formed by a photodimerization reaction of an acene skeleton or a cyclooctatetraene skeleton. And it is thought that a part of (pi) conjugated compound of a liquid crystal state dimerizes, the said integrated structure collapses, a liquid crystal state changes to a liquid state, and fluidity | liquidity will express. In addition, this dimerization reaction is caused by light irradiation in a liquid crystal state, and is not caused by light irradiation in a solid state. Therefore, fluidization does not occur even when light is irradiated in a temperature range indicating a solid state. .
また、上記π共役化合物では、例えばπ共役化合物が液体状態を示す温度にまで加熱することで上記二量化反応の逆反応が生じて、二量体から単量体が生じると考えられる。このため、上記π共役化合物は、液晶状態における光照射によって二量体が混在して液晶状態を示さなくなった場合でも、加熱して二量化反応の逆反応を生じさせることによって、再度、液晶状態を示すようになる。 In addition, in the π-conjugated compound, for example, the reverse reaction of the dimerization reaction occurs when the π-conjugated compound is heated to a temperature at which the π-conjugated compound exhibits a liquid state, and a monomer is considered to be generated from the dimer. For this reason, even when the dimer is mixed and no longer shows a liquid crystal state due to light irradiation in the liquid crystal state, the π-conjugated compound is heated again to cause a reverse reaction of the dimerization reaction, thereby again in the liquid crystal state. Will come to show.
光照射は、液晶状態のπ共役化合物が二量体を形成し得るものであればよい。例えば、光照射は、300〜400nmの波長の紫外線の照射であってよい。このような紫外線によれば、液晶状態のπ共役化合物を容易に流動化させることができる。 The light irradiation may be performed so long as the π-conjugated compound in a liquid crystal state can form a dimer. For example, the light irradiation may be irradiation of ultraviolet rays having a wavelength of 300 to 400 nm. According to such ultraviolet rays, a π-conjugated compound in a liquid crystal state can be easily fluidized.
また、式(1)中のnが1のとき、照射される光は254nmの波長の光を含むことが好ましく、式(1)中のnが2のとき、照射される光は365nmの波長の紫外線を含むことが好ましい。これにより、効率良くπ共役化合物の流動化を生じさせることができる。 Further, when n in the formula (1) is 1, the irradiated light preferably includes light having a wavelength of 254 nm. When n in the formula (1) is 2, the irradiated light has a wavelength of 365 nm. It is preferable that ultraviolet rays are included. Thereby, fluidization of the π-conjugated compound can be efficiently generated.
式(1)中、R1は、炭素原子数3〜20のアルキル基を少なくとも一つ有する基を示す。R1がこのような基であることで、剛直なアセン骨格と柔軟なシクロオクタテトラエン骨格とを有しながら、所定の温度域で液晶状態を示すπ共役化合物が実現される。また、このようなπ共役化合物では、R1が有するアルキル基の炭素原子数を変更することで、容易に液晶状態を示す温度域を調整することができる。 In formula (1), R 1 represents a group having at least one alkyl group having 3 to 20 carbon atoms. When R 1 is such a group, a π-conjugated compound that exhibits a liquid crystal state in a predetermined temperature range while having a rigid acene skeleton and a flexible cyclooctatetraene skeleton is realized. In such a π-conjugated compound, the temperature range in which the liquid crystal state is exhibited can be easily adjusted by changing the number of carbon atoms of the alkyl group of R 1 .
R1が有するアルキル基は、分岐状であっても直鎖状であってもよいが、直鎖状であることが好ましい。また、アルキル基の炭素原子数は、好ましくは4〜20であり、より好ましくは6〜20である。複数のR1は互いに同一であっても異なっていてもよいが、同一であることが好ましい。複数のR1が互いに同一なπ共役化合物は、製造が容易という利点がある。 The alkyl group possessed by R 1 may be branched or linear, but is preferably linear. Moreover, the carbon atom number of an alkyl group becomes like this. Preferably it is 4-20, More preferably, it is 6-20. Several R < 1 > may mutually be same or different, However, It is preferable that it is the same. A plurality of π-conjugated compounds having the same R 1 are advantageous in that they are easy to produce.
式(1)中、nは、1〜3の整数を示す。nは互いに同一であっても異なっていてもよいが、同一であることが好ましい。複数のnが互いに同一なπ共役化合物は、製造が容易という利点がある。 In formula (1), n shows the integer of 1-3. n may be the same or different from each other, but is preferably the same. A plurality of n-conjugated compounds having the same n are advantageous in that they are easy to produce.
R1としては、下記式(2)で表される基が好適である。このようなR1を有するπ共役化合物は、後述の製造方法によって容易に製造することができる。また、このようなπ共役化合物は、R2及びpを変更することで容易に液晶状態を示す温度域を調整することができる。 R 1 is preferably a group represented by the following formula (2). Such a π-conjugated compound having R 1 can be easily produced by the production method described later. In addition, such a π-conjugated compound can easily adjust the temperature range showing the liquid crystal state by changing R2 and p.
式中、R2は炭素原子数3〜20のアルキル基又は炭素原子数3〜20のアルコキシ基を示し、pは1〜5の整数を示す。pが2以上のとき、複数のR2は互いに同一であっても異なっていてもよい。 In the formula, R 2 represents an alkyl group having 3 to 20 carbon atoms or an alkoxy group having 3 to 20 carbon atoms, and p represents an integer of 1 to 5. When p is 2 or more, the plurality of R 2 may be the same as or different from each other.
R2のアルキル基は、分岐状であっても直鎖状であってもよいが、直鎖状であることが好ましい。また、アルキル基の炭素原子数は、4〜20であることが好ましく、6〜20であることがより好ましい。 The alkyl group for R 2 may be branched or linear, but is preferably linear. Moreover, it is preferable that it is 4-20, and, as for the carbon atom number of an alkyl group, it is more preferable that it is 6-20.
R2のアルコキシ基は、分岐状であっても直鎖状であってもよいが、直鎖状であることが好ましい。また、アルコキシ基の炭素原子数は、4〜20であることが好ましく、6〜20であることがより好ましい。 The alkoxy group for R 2 may be branched or linear, but is preferably linear. The number of carbon atoms in the alkoxy group is preferably 4-20, and more preferably 6-20.
pは、好ましくは1〜3であり、より好ましくは1又は2である。 p is preferably 1 to 3, more preferably 1 or 2.
式(2)で表される基のうち、R1としては下記式(2−1)、(2−2)、(2−3)又は(2−4)で表される基が特に好適である。 Among the groups represented by the formula (2), R 1 is particularly preferably a group represented by the following formula (2-1), (2-2), (2-3) or (2-4). is there.
R1は、上記の基に限定されず、炭素原子数3〜20のアルキル基を少なくとも一つ有する基であればよい。R1は、π共役化合物に液晶性を付与する基であってよく、またR1は、π共役化合物が所定の温度域で液晶状態を示すように選択された基であってよい。また、R1は、例えば、Chemical Review,2009,vol 109,6275−6540に記載されたような、液晶性を付与するために導入される置換基全般から選択することもできる。 R 1 is not limited to the above group, and may be any group having at least one alkyl group having 3 to 20 carbon atoms. R 1 may be a group that imparts liquid crystal properties to the π-conjugated compound, and R 1 may be a group selected so that the π-conjugated compound exhibits a liquid crystal state in a predetermined temperature range. R 1 can also be selected from all substituents introduced for imparting liquid crystallinity as described in Chemical Review, 2009, vol 109, 6275-6540, for example.
上記π共役化合物は、35〜150℃(より好ましくは40〜140℃、さらに好ましくは70〜100℃)の少なくとも一部の温度域で液晶状態を示すことが好ましい。このようなπ共役化合物は、接着剤として使用したとき、半導体製造プロセスに悪影響を及ぼし難い温度域下で接合部の剥離が可能となるため、実用上有用である。 The π-conjugated compound preferably exhibits a liquid crystal state in at least a part of the temperature range of 35 to 150 ° C. (more preferably 40 to 140 ° C., still more preferably 70 to 100 ° C.). Such a π-conjugated compound is practically useful because, when used as an adhesive, it can be peeled off at a temperature range that hardly adversely affects the semiconductor manufacturing process.
また、上記π共役化合物は、液晶状態を示す温度域が、35℃以上にあることが好ましく、40℃以上にあることがより好ましく、65℃以上にあることがさらに好ましい。液晶状態を示す温度域が35℃以上であると、プロセス中の予期しない光照射による流動化が生じ難くなり、解体性接着剤としてより好適に用いることができる。 The π-conjugated compound preferably has a temperature range showing a liquid crystal state of 35 ° C. or higher, more preferably 40 ° C. or higher, and further preferably 65 ° C. or higher. When the temperature range indicating the liquid crystal state is 35 ° C. or higher, fluidization due to unexpected light irradiation during the process is less likely to occur, and it can be more suitably used as a disassembling adhesive.
また、上記π共役化合物は、液晶状態を示す温度域が、150℃以下にあることが好ましく、145℃以下にあることがより好ましい。このようなπ共役化合物では、比較的容易にπ共役化合物を液体状態にすることができるため、解体性接着剤として用いたとき、部材間の接続を容易に行うことができる。 The π-conjugated compound preferably has a temperature range showing a liquid crystal state of 150 ° C. or lower, more preferably 145 ° C. or lower. In such a π-conjugated compound, since the π-conjugated compound can be made into a liquid state relatively easily, connection between members can be easily performed when used as a disassembling adhesive.
(π共役化合物の製造方法)
上記π共役化合物の製造方法の一態様について以下に説明する。本実施形態に係る製造方法は、下記式(3)で表されるテトラホルミル化合物と2−ブテン二酸ジエステルとを反応させる工程を含む。なお、式中、nは1〜3の整数を示す。
(Method for producing π-conjugated compound)
One embodiment of the method for producing the π-conjugated compound will be described below. The manufacturing method according to the present embodiment includes a step of reacting a tetraformyl compound represented by the following formula (3) with 2-butenedioic acid diester. In the formula, n represents an integer of 1 to 3.
このようなテトラホルミル化合物と2−ブテン二酸ジエステルとの反応によれば、アセン骨格を伸張することができるとともに、両末端のベンゼン環にそれぞれ2つのエステル基を設けることができる。すなわち、上記反応によれば、下記式(5)で表される化合物を得ることができる。式中、R3は2−ブテン二酸ジエステルのエステル部分に由来する基を示す。 According to the reaction of such a tetraformyl compound and 2-butenedioic acid diester, the acene skeleton can be extended and two ester groups can be provided on the benzene rings at both ends. That is, according to the above reaction, a compound represented by the following formula (5) can be obtained. In the formula, R 3 represents a group derived from the ester portion of 2-butenedioic acid diester.
式(5)で表される化合物は、R3が炭素原子数3〜20のアルキル基を少なくとも一つ有する基であるとき、式(1)で表される化合物に相当する。すなわち、2−ブテン二酸ジエステルとして、エステル部分に式(1)のR1に相当する基を有する2−ブテン二酸ジエステルを用いると、上記反応によって上記π共役化合物を得ることができる。なお、2−ブテン二酸ジエステルとしては、フマル酸ジエステルを用いることも、マレイン酸ジエステルを用いることもできる。 The compound represented by the formula (5) corresponds to the compound represented by the formula (1) when R 3 is a group having at least one alkyl group having 3 to 20 carbon atoms. That is, when 2-butenedioic acid diester having a group corresponding to R 1 in formula (1) is used as the 2-butenedioic acid diester, the above π-conjugated compound can be obtained by the above reaction. In addition, as 2-butenedioic acid diester, a fumaric acid diester can also be used and a maleic acid diester can also be used.
ここで、エステル部分に式(1)のR1に相当する基を有する2−ブテン二酸ジエステルは、下記式(4−1)又は(4−2)で表すことができる。式中、R1は式(1)のR1と同義である。 Here, the 2-butenedioic acid diester having a group corresponding to R 1 of the formula (1) in the ester moiety can be represented by the following formula (4-1) or (4-2). Wherein, R 1 has the same meaning as R 1 in formula (1).
また、式(5)で表される化合物において、R3は、式(1)のR1に相当する基でなくてもよい。この場合、式(5)で表される化合物のエステル交換反応を行って、R3を式(1)のR1に相当する基に変換することによって、上記π共役化合物を得ることができる。 In the compound represented by formula (5), R 3 may not be a group corresponding to R 1 in formula (1). In this case, the π-conjugated compound can be obtained by performing transesterification of the compound represented by the formula (5) to convert R 3 into a group corresponding to R 1 in the formula (1).
なお、式(3)で表されるテトラホルミル化合物は、公知の方法で製造することができ、例えばJ.Am.Chem.Soc.,2013,135,8842(Yuan,C.;Saito,S.;Camacho,C.;Irle,S.;Hisaki,I.;Yamaguchi,S.)の記載等を参考に製造することができる。 The tetraformyl compound represented by the formula (3) can be produced by a known method. Am. Chem. Soc. , 2013, 135, 8842 (Yuan, C .; Saito, S .; Camacho, C .; Irle, S .; Hisaki, I .; Yamaguchi, S.) and the like.
上記テトラホルミル化合物と2−ブテン二酸ジエステルとの反応の反応条件は、例えば、C.Lin etal,Chem.Commun.2009,45,803や、Y.Lin etal,Org.Biomol.Chem.2011,9,4507に記載のアセン類の伸張反応の記載を参考に、適宜設定することができる。 The reaction conditions for the reaction between the tetraformyl compound and 2-butenedioic acid diester are, for example, C.I. Lin et al, Chem. Commun. 2009, 45, 803, Y.I. Lin et al, Org. Biomol. Chem. It can be set as appropriate with reference to the description of the elongation reaction of acenes described in 2011, 9, 4507.
例えば、上記反応は、窒素雰囲気下、塩化メチレン溶媒中で、トリブチルホスフィン及びジアザビシクロウンデセンの存在下にテトラホルミル化合物と2−ブテン二酸ジエステルとを反応させることにより実施することができる。また、当該反応により得られた化合物は、例えばカラムクロマトグラフィー(シリカゲルカラムクロマトグラフィー及び/又は高速液体クロマトグラフィー)により精製することができる。 For example, the above reaction can be carried out by reacting a tetraformyl compound and 2-butenedioic acid diester in the presence of tributylphosphine and diazabicycloundecene in a methylene chloride solvent under a nitrogen atmosphere. In addition, the compound obtained by the reaction can be purified by, for example, column chromatography (silica gel column chromatography and / or high performance liquid chromatography).
上記反応に用いる反応溶媒としては、上述の塩化メチレン以外に、例えば、1,2−ジクロロエタンなどのハロゲン系溶媒、トルエンなどの芳香族系溶媒等を用いることができる。 As the reaction solvent used in the above reaction, in addition to the above methylene chloride, for example, a halogen solvent such as 1,2-dichloroethane, an aromatic solvent such as toluene, and the like can be used.
上記反応では、上述のトリブチルホスフィンに代えて、例えばトリメチルホスフィン、トリエチルホスフィン、トリプロピルホスフィン等のトリアルキルホスフィンを用いることもできる。また、上記反応では、上述のジアザビシクロウンデセンの塩基を用いることもできる。具体的には、例えばカリウムtert−ブトキシド、水素化ナトリウムなどの強塩基を好適に用いることができる。 In the above reaction, a trialkylphosphine such as trimethylphosphine, triethylphosphine, or tripropylphosphine can be used instead of the above-mentioned tributylphosphine. In the above reaction, the above-mentioned diazabicycloundecene base can also be used. Specifically, strong bases such as potassium tert-butoxide and sodium hydride can be preferably used.
上記反応の反応温度は、例えば25℃以上とすることができ、使用した溶媒の沸点まで昇温してもよい。 The reaction temperature of the above reaction may be, for example, 25 ° C. or higher, and may be raised to the boiling point of the solvent used.
(接着剤)
上記π共役化合物を用いた解体性接着剤について以下に説明する。本実施形態に係る接着剤は、上記π共役化合物を含むものである。このような接着剤は上記π共役化合物を含むため、室温のような比較的低温の温度領域下では光照射を受けても接着力が維持される一方、所定の高温領域下で光照射することで流動化させて被着体を剥離させることが可能であり、解体性接着剤として好適に用いることができる。
(adhesive)
A decomposable adhesive using the π-conjugated compound will be described below. The adhesive according to this embodiment contains the π-conjugated compound. Since such an adhesive contains the above-mentioned π-conjugated compound, the adhesive strength is maintained even when irradiated with light under a relatively low temperature range such as room temperature, while light irradiation is performed under a predetermined high temperature range. The adherend can be peeled off by fluidizing, and can be suitably used as a decomposable adhesive.
本実施形態では、上記π共役化合物が液体状態を示す温度域に加熱された上記接着剤を部材間に介在させた後、冷却することで、部材間を接着することができる。 In the present embodiment, the members can be bonded together by interposing the adhesive heated in the temperature range in which the π-conjugated compound exhibits a liquid state between the members and then cooling.
本実施形態では、部材間の接合部は、室温のような比較的低温の温度領域下では光照射を受けても接着力が維持される。また、上記π共役化合物が液晶状態を示す温度域にまで加熱した後、上記接合部に光照射することで、上記接着剤が流動し、接合部の剥離が可能となる。 In the present embodiment, the bonding force between the members maintains the adhesive force even under light irradiation in a relatively low temperature region such as room temperature. In addition, after the π-conjugated compound is heated to a temperature range showing a liquid crystal state, the adhesive is flowed by irradiating the joint with light, and the joint can be peeled off.
接合部への光照射は、300〜400nmの波長の紫外線の照射であることが好ましい。また、接合部へ照射される光は、積算光量が0.5〜200J/cm2であることが好ましい。光照射における積算光量は、より好ましくは1.0〜150J/cm2であり、さらに好ましくは3.0〜180J/cm2である。 The light irradiation to the joint is preferably irradiation with ultraviolet rays having a wavelength of 300 to 400 nm. Moreover, it is preferable that the light irradiated to a junction part is 0.5-200 J / cm < 2 > of integrated light quantity. The integrated light quantity in light irradiation is more preferably 1.0 to 150 J / cm 2 , and further preferably 3.0 to 180 J / cm 2 .
上記接着剤は、上述の解体性接着剤としての機能が維持される範囲において、上記π共役化合物以外の成分を含有していてもよい。このような成分としては、例えば、ポリ(メタ)アクリル酸エステル、ポリシロキサン、ポリイミド、ポリアミドイミド、ポリエステル、ポリアミド、スチレン系ポリマー等の熱可塑性高分子;(メタ)アクリル酸エステル、エポキシ系化合物等の硬化性モノマー成分;光開始剤等が挙げられる。 The adhesive may contain components other than the π-conjugated compound as long as the function as the above-described disassembling adhesive is maintained. Examples of such components include thermoplastic polymers such as poly (meth) acrylic acid ester, polysiloxane, polyimide, polyamideimide, polyester, polyamide, and styrene polymer; (meth) acrylic acid ester, epoxy compound, and the like. And a photoinitiator.
(構造体)
本実施形態に係る構造体は、上記接着剤を用いて接合された接合部を備える。本実施形態に係る構造体は、接合部が上記接着剤を用いて接合されているため、低温下で光照射されても接合部の剥離が生じにくいが、所定の高温領域下で光照射することで接合部を容易に剥離させて解体することができる。
(Structure)
The structure according to the present embodiment includes a bonded portion bonded using the adhesive. In the structure according to the present embodiment, since the bonded portion is bonded using the above adhesive, the bonded portion hardly peels off even when irradiated with light at a low temperature, but is irradiated under a predetermined high temperature region. Thus, the joint can be easily peeled and disassembled.
構造体は、上記接着剤を用いて接合された接合部を備えるものであればよく、その他の構成要素は特に制限されない。 A structure should just be provided with the junction part joined using the said adhesive agent, and another component is not restrict | limited in particular.
構造体の一例としては、光学部品を備える構造体、半導体実装部品を備える構造体等が挙げられる。これらの構造体は、例えば、光学部品製造プロセス又は半導体製造プロセスにおいて、一時的に製造され、所定の工程を経た後、上記接合部を剥離して解体されるものであってよい。 Examples of the structure include a structure including an optical component and a structure including a semiconductor mounting component. These structures may be temporarily manufactured in, for example, an optical component manufacturing process or a semiconductor manufacturing process, and may be disassembled by peeling off the joint after passing through a predetermined process.
(接着剤の使用方法)
上記接着剤の使用方法の一形態について、以下に説明する。本実施形態に係る接着剤の使用方法は、2部材間に、上記π共役化合物が液体状態をなす温度に加熱された上記接着剤を介在させる工程と、上記2部材間に介在させた上記接着剤を、上記π共役化合物が固体状態をなす温度に冷却して、上記2部材を接合する工程(以下、場合により「接合工程」という。)と、を含む。
(How to use adhesive)
One mode of using the adhesive will be described below. The method of using the adhesive according to the present embodiment includes a step of interposing the adhesive heated to a temperature at which the π-conjugated compound is in a liquid state between two members, and the adhesion interposed between the two members. And a step of cooling the agent to a temperature at which the π-conjugated compound is in a solid state and joining the two members (hereinafter, sometimes referred to as “joining step”).
上記使用方法は、上記2部材を接合する上記接着剤に、上記π共役化合物が液晶状態を示す温度域下で、300nm〜400nmの波長の紫外線を照射するとともに、上記2部材を剥離させる工程(以下、場合により「剥離工程」という。)をさらに含むものであってよい。このような工程によれば、2部材を容易に剥離させることができる。 In the use method, the adhesive for joining the two members is irradiated with ultraviolet rays having a wavelength of 300 nm to 400 nm in a temperature range where the π-conjugated compound exhibits a liquid crystal state, and the two members are separated ( Hereinafter, it may further include a “peeling step” in some cases. According to such a process, two members can be easily peeled off.
上記紫外線は、例えば0.5〜200J/cm2の積算光量となるように照射することができる。また、紫外線の積算光量は、好ましくは1.0〜150J/cm2であり、より好ましくは3.0〜180J/cm2である。 The said ultraviolet-ray can be irradiated so that it may become the integrated light quantity of 0.5-200 J / cm < 2 >, for example. Further, the integrated quantity of ultraviolet light is preferably 1.0~150J / cm 2, more preferably 3.0~180J / cm 2.
また、使用方法は、接合工程の後、例えば半導体製造プロセスにおけるリソグラフィ工程のような種々の工程を経た後、剥離工程に供することができる。 Moreover, the usage method can be used for a peeling process, after passing through various processes like the lithography process in a semiconductor manufacturing process, for example after a joining process.
以上、本発明の好適な実施形態について説明したが、本発明は上記実施形態に限定されるものではない。 The preferred embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment.
以下、実施例により本発明をより具体的に説明するが、本発明は実施例に限定されるものではない。 EXAMPLES Hereinafter, although an Example demonstrates this invention more concretely, this invention is not limited to an Example.
(製造例1:フマル酸ジエステルの合成)
マレイン酸(81.7mg,0.70mmol)と炭酸セシウム(688.2mg,2.10mmol)を無水ジメチルホルムアミド(3mL)に溶かし、室温、窒素雰囲気下で50分間撹拌した。反応溶液に3,4−ビス(ドデシルオキシ)ベンジルブロミド(1.91g,3.50mmol)を滴下し、60℃で3日間撹拌した。室温に戻した後、反応溶液に水を加えて反応をクエンチし、塩化メチレンで抽出した。有機層を飽和食塩水で洗浄した後、無水硫酸ナトリウムで脱水し、溶媒を留去した。残留物をヘキサン−塩化メチレン混合溶媒(混合比1:2,Rf=0.35)を用いてシリカゲルカラムクロマトグラフィーにより分離精製することで,白色固体としてビス(3,4−ビス(ドデシルオキシ)ベンジル)フマレート(305.3mg,0.29mmol,収率42%)を得た。
(Production Example 1: Synthesis of fumaric acid diester)
Maleic acid (81.7 mg, 0.70 mmol) and cesium carbonate (688.2 mg, 2.10 mmol) were dissolved in anhydrous dimethylformamide (3 mL), and the mixture was stirred at room temperature under a nitrogen atmosphere for 50 minutes. 3,4-Bis (dodecyloxy) benzyl bromide (1.91 g, 3.50 mmol) was added dropwise to the reaction solution, and the mixture was stirred at 60 ° C. for 3 days. After returning to room temperature, the reaction solution was quenched with water and extracted with methylene chloride. The organic layer was washed with saturated brine, dried over anhydrous sodium sulfate, and the solvent was distilled off. The residue was separated and purified by silica gel column chromatography using a mixed solvent of hexane-methylene chloride (mixing ratio 1: 2, R f = 0.35) to give bis (3,4-bis (dodecyloxy) as a white solid. ) Benzyl) fumarate (305.3 mg, 0.29 mmol, 42% yield) was obtained.
なお、ビス(3,4−ビス(ドデシルオキシ)ベンジル)フマレートのスペクトルデータは以下のとおりであった。
1H NMR(400MHz,CDCl3):δ 6.83−6.92(m,8H),5.13(s,4H),3.98(t,J=6.6Hz,8H),1.77−1.84(m,8H),1.26−1.45(m,72H),0.86−0.89(m,12H);
13CNMR(100MHz,CDCl3):δ 164.9,149.7,149.4,133.9,127.9,121.7,114.7,113.9,69.6,69.5,67.4,32.1,29.9,29.8,29.8,29.6,29.6,29.5,29.5,29.4,26.2,26.2,22.8,14.2;
HRMS(APCI,positive):[M+]calcd. for C66H112O8,1032.8352;found 1032.8379.
The spectrum data of bis (3,4-bis (dodecyloxy) benzyl) fumarate was as follows.
1 H NMR (400 MHz, CDCl 3 ): δ 6.83-6.92 (m, 8H), 5.13 (s, 4H), 3.98 (t, J = 6.6 Hz, 8H), 1. 77-1.84 (m, 8H), 1.26-1.45 (m, 72H), 0.86-0.89 (m, 12H);
13 C NMR (100 MHz, CDCl 3 ): δ 164.9, 149.7, 149.4, 133.9, 127.9, 121.7, 114.7, 113.9, 69.6, 69.5 67.4, 32.1, 29.9, 29.8, 29.8, 29.6, 29.6, 29.5, 29.5, 29.4, 26.2, 26.2, 22. 8, 14.2;
HRMS (APCI, positive): [M + ] calcd. for C 66 H 112 O 8 , 1032.8352; found 1032.8379.
(実施例1)
下記式で表される反応により、π共役化合物A1を製造した。
A π-conjugated compound A1 was produced by a reaction represented by the following formula.
具体的には、ビス(3,4−ビス(ドデシルオキシ)ベンジル)フマレート(1.25g,1.20mmol)の塩化メチレン溶液(30mL)にトリブチルホスフィン(325μL,1.30mmol)を窒素雰囲気下0℃で滴下し、反応溶液を室温で40分間撹拌した。その後、反応溶液を、窒素雰囲気下0℃に冷やしたテトラホルミル化合物1(208.6mg,0.50mmol)(上記式中の化合物1)の塩化メチレン溶液(60mL)に滴下し、さらに塩基であるジアザビシクロウンデセン(5μL,0.05mmol)を滴下した。50℃で2日間撹拌した後、反応溶液に水を加えて反応をクエンチし、塩化メチレンで3回抽出した。抽出後の有機層を無水硫酸ナトリウムで脱水した後、溶媒を留去した。残留物をヘキサン−塩化メチレン−トリエチルアミン混合溶媒(混合比2:48:1)(Rf=0.80)を用いてシリカゲルカラムクロマトグラフィーにより分離することで粗生成物を得た。さらに、クロロホルム−トリエチルアミン混合溶媒(混合比50:1)を溶媒として高速液体クロマトグラフィーにより精製することで黄色固体としてπ共役化合物A1(343.6mg,0.14 mmol,収率28%)(上記式中の化合物A1)を得た。 Specifically, tributylphosphine (325 μL, 1.30 mmol) was added to a methylene chloride solution (30 mL) of bis (3,4-bis (dodecyloxy) benzyl) fumarate (1.25 g, 1.20 mmol) in a nitrogen atmosphere. The reaction solution was stirred at room temperature for 40 minutes. Thereafter, the reaction solution was added dropwise to a methylene chloride solution (60 mL) of tetraformyl compound 1 (208.6 mg, 0.50 mmol) (compound 1 in the above formula) cooled to 0 ° C. in a nitrogen atmosphere, and further a base. Diazabicycloundecene (5 μL, 0.05 mmol) was added dropwise. After stirring at 50 ° C. for 2 days, the reaction solution was quenched with water and extracted three times with methylene chloride. The organic layer after extraction was dehydrated with anhydrous sodium sulfate, and then the solvent was distilled off. The residue was separated by silica gel column chromatography using a hexane-methylene chloride-triethylamine mixed solvent (mixing ratio 2: 48: 1) (R f = 0.80) to obtain a crude product. Furthermore, the π-conjugated compound A1 (343.6 mg, 0.14 mmol, yield 28%) as a yellow solid was purified by high performance liquid chromatography using a mixed solvent of chloroform-triethylamine (mixing ratio 50: 1) as a solvent (above 28%) Compound A1) in the formula was obtained.
π共役化合物A1は、後述する示査走査熱量(DSC)の結果、並びに、偏光顕微鏡観察及びX線回折測定の結果から、68〜143℃において液晶性を示すことが確認された。また、π共役化合物A1のスペクトルデータは以下に示すとおりであった。
1H NMR(400MHz,CDCl3):δ 8.32(s,8H),7.81(s,4H),7.16(s,4H),6.82−6.95(m,12H),5.17(s,8H),3.95−4.00(q,J=6.6Hz,16H),1.76−1.83(m,16H),1.23−1.45(m,144H),0.87−0.92(m,24H);
13C NMR(100MHz,CDCl3):δ 167.9,149.9,149.7,136.2,133.6,132.3,131.8,131.1,128.7,128.6,128.3,128.0,122.0,115.0,114.1,69.8,68.0,32.4,30.2,30.1,29.9,29.9,29.8,29.8,26.6,26.5,23.2,14.6;
MALDI−TOFMS(positive)[(M+Na)+]calcd. for C160H236NaO16,2436.754;found 2437.034.
The π-conjugated compound A1 was confirmed to exhibit liquid crystallinity at 68 to 143 ° C. from the results of inspection scanning calorific value (DSC) described later and the results of observation with a polarizing microscope and X-ray diffraction measurement. Further, spectrum data of the π-conjugated compound A1 are as shown below.
1 H NMR (400 MHz, CDCl 3 ): δ 8.32 (s, 8H), 7.81 (s, 4H), 7.16 (s, 4H), 6.82-6.95 (m, 12H) 5.17 (s, 8H), 3.95-4.00 (q, J = 6.6 Hz, 16H), 1.76-1.83 (m, 16H), 1.23-1.45 ( m, 144H), 0.87-0.92 (m, 24H);
13 C NMR (100 MHz, CDCl 3 ): δ 167.9, 149.9, 149.7, 136.2, 133.6, 132.3, 131.8, 131.1, 128.7, 128.6 , 128.3, 128.0, 122.0, 115.0, 114.1, 69.8, 68.0, 32.4, 30.2, 30.1, 29.9, 29.9, 29 .8, 29.8, 26.6, 26.5, 23.2, 14.6;
MALDI-TOFMS (positive) [(M + Na) + ] calcd. for C 160 H 236 NaO 16 , 2436.754; found 2437.034.
[示査走査熱量計による測定]
セイコーインスツル社製示査走査熱量計(型式:Exstar 6000 DSC 6200)にて、π共役化合物A1を窒素雰囲気下、2℃/分の速度で液体状態を示す200℃まで加熱した。200℃で10分間保持した後、2℃/分の速度で冷却したところ、補外開始点142.7℃で、液体から液晶への相転移に伴う18.3mJ/mgの発熱ピークが観察された。さらに補外開始点67.3℃で、液晶から結晶への相転移に伴う14.8mJ/mgの発熱ピークが観察された。
[Measurement by inspection scanning calorimeter]
The π-conjugated compound A1 was heated to 200 ° C. showing a liquid state at a rate of 2 ° C./min in a nitrogen atmosphere with a Seiko Instruments Inc. scanning scanning calorimeter (model: Exstar 6000 DSC 6200). After holding at 200 ° C. for 10 minutes and cooling at a rate of 2 ° C./minute, an exothermic peak of 18.3 mJ / mg accompanying a phase transition from liquid to liquid crystal was observed at the extrapolation start point of 142.7 ° C. It was. Furthermore, an exothermic peak of 14.8 mJ / mg accompanying a phase transition from liquid crystal to crystal was observed at an extrapolation starting point of 67.3 ° C.
(実施例2)
下記式で表される反応により、π共役化合物A2を製造した。
A π-conjugated compound A2 was produced by a reaction represented by the following formula.
具体的には、ビス(3,4−ビス(ドデシルオキシ)ベンジル)フマレート(495.5mg,0.48mmol)の塩化メチレン溶液(4mL)にトリブチルホスフィン(130μL,0.52mmol)を窒素雰囲気下0℃で滴下し、反応溶液を室温で40分間撹拌した。その後、反応溶液を、窒素雰囲気下0℃に冷やしたテトラホルミル化合物3(52.6mg,0.16mmol)(上記式中の化合物3)の塩化メチレン溶液(8mL)に滴下し、さらに塩基であるジアザビシクロウンデセン(2μL,0.02mmol)を滴下した。室温で16時間撹拌した後、反応溶液に水を加えて反応をクエンチし、塩化メチレンで3回抽出した。抽出後の有機層を無水硫酸ナトリウムで脱水した後、溶媒を留去した。残留物を塩化メチレン(Rf=0.75)を用いてシリカゲルカラムクロマトグラフィーにより分離することで粗生成物を得た。さらに、クロロホルムを溶媒としてサイズ排除クロマトグラフィーにより精製することで白色固体としてπ共役化合物A2(131.1mg,0.056mmol,35%)(上記式中の化合物A2)を得た。 Specifically, tributylphosphine (130 μL, 0.52 mmol) was added to a methylene chloride solution (4 mL) of bis (3,4-bis (dodecyloxy) benzyl) fumarate (495.5 mg, 0.48 mmol) in a nitrogen atmosphere. The reaction solution was stirred at room temperature for 40 minutes. Thereafter, the reaction solution was added dropwise to a methylene chloride solution (8 mL) of tetraformyl compound 3 (52.6 mg, 0.16 mmol) (compound 3 in the above formula) cooled to 0 ° C. under a nitrogen atmosphere, and further a base. Diazabicycloundecene (2 μL, 0.02 mmol) was added dropwise. After stirring at room temperature for 16 hours, the reaction solution was quenched with water and extracted three times with methylene chloride. The organic layer after extraction was dehydrated with anhydrous sodium sulfate, and then the solvent was distilled off. The residue was separated by silica gel column chromatography using methylene chloride (R f = 0.75) to obtain a crude product. Furthermore, π-conjugated compound A2 (131.1 mg, 0.056 mmol, 35%) (compound A2 in the above formula) was obtained as a white solid by purification by size exclusion chromatography using chloroform as a solvent.
π共役化合物A2は、示差走査熱量測定(DSC)、偏光顕微鏡観察及びX線回折測定の結果から、35〜103℃において液晶性を示すことが確認された。また、π共役化合物A2のスペクトルデータは以下に示すとおりであった。
1H NMR(400MHz,CDCl3):δ 8.07(s,4H),7.62(s,4H),7.04(s,4H),6.80−6.90(m,12H),5.13(s,8H),3.94−3.98(m,16H),1.75−1.80(m,16H),1.25−1.44(m,144H),0.86−0.89(m,24H);
13CNMR(100MHz,CDCl3):δ 167.5,149.5,149.4,137.4,133.4,132.3,130.1,128.9,128.3,121.5,114.7,113.9,69.5,67.7,32.1,29.8,29.6,29.6,29.5,29.5,29.2,26.2,26.2,22.8,14.2;
MALDI−TOFMS(positive)[(M+Na)+]calcd. for C152H232NaO16,2338.453;found 2338.585.
From the results of differential scanning calorimetry (DSC), polarization microscope observation, and X-ray diffraction measurement, the π-conjugated compound A2 was confirmed to exhibit liquid crystallinity at 35 to 103 ° C. Further, spectrum data of the π-conjugated compound A2 were as shown below.
1 H NMR (400 MHz, CDCl 3 ): δ 8.07 (s, 4H), 7.62 (s, 4H), 7.04 (s, 4H), 6.80-6.90 (m, 12H) , 5.13 (s, 8H), 3.94-3.98 (m, 16H), 1.75-1.80 (m, 16H), 1.25-1.44 (m, 144H), 0 .86-0.89 (m, 24H);
13 C NMR (100 MHz, CDCl 3 ): δ 167.5, 149.5, 149.4, 137.4, 133.4, 132.3, 130.1, 128.9, 128.3, 121.5, 114.7, 113.9, 69.5, 67.7, 32.1, 29.8, 29.6, 29.6, 29.5, 29.5, 29.2, 26.2, 26. 2, 22.8, 14.2;
MALDI-TOFMS (positive) [(M + Na) + ] calcd. for C 152 H 232 NaO 16 , 2338.453; found 2338.585.
(比較例1)
下記式で表される反応により、π共役化合物B1を製造した。
A π-conjugated compound B1 was produced by a reaction represented by the following formula.
具体的には、ビス(3,4−ビス(ドデシルオキシ)ベンジル)フマレート(252.7mg,0.24mmol)の塩化メチレン溶液(10mL)にトリブチルホスフィン(65μL,0.26mmol)を窒素雰囲気下0℃で滴下し、反応溶液を室温で40分間撹拌した。その後、反応溶液を、窒素雰囲気下0℃に冷やしたジホルミル化合物4(38.0mg,0.20mmol)(上記式中の化合物4)の塩化メチレン溶液(3mL)に滴下し、塩基であるジアザビシクロウンデセン(2μL,0.02mmol)を反応溶液に滴下した。室温で2日間撹拌した後、反応溶液に水を加えて反応をクエンチし、塩化メチレンで3回抽出した。抽出後の有機層を無水硫酸ナトリウムで脱水した後、溶媒を留去した。残留物を塩化メチレン(Rf=0.50)を用いてシリカゲルカラムクロマトグラフィーにより分離することで粗生成物を得た。さらに、クロロホルムを溶媒としてサイズ排除クロマトグラフィーにより精製することで黄色固体としてπ共役化合物B1(148.2mg,0.125mmol,収率62%)(上記式中の化合物B1)を得た。 Specifically, tributylphosphine (65 μL, 0.26 mmol) was added to a methylene chloride solution (10 mL) of bis (3,4-bis (dodecyloxy) benzyl) fumarate (252.7 mg, 0.24 mmol) in a nitrogen atmosphere. The reaction solution was stirred at room temperature for 40 minutes. Thereafter, the reaction solution was added dropwise to a methylene chloride solution (3 mL) of diformyl compound 4 (38.0 mg, 0.20 mmol) (compound 4 in the above formula) cooled to 0 ° C. in a nitrogen atmosphere, and diaza which was a base. Bicycloundecene (2 μL, 0.02 mmol) was added dropwise to the reaction solution. After stirring at room temperature for 2 days, the reaction solution was quenched with water and extracted three times with methylene chloride. The organic layer after extraction was dehydrated with anhydrous sodium sulfate, and then the solvent was distilled off. The residue was separated by silica gel column chromatography using methylene chloride (R f = 0.50) to obtain a crude product. Further, π-conjugated compound B1 (148.2 mg, 0.125 mmol, yield 62%) (compound B1 in the above formula) was obtained as a yellow solid by purification by size exclusion chromatography using chloroform as a solvent.
π共役化合物B1は、示差走査熱量測定(DSC)、偏光顕微鏡観察及びX線回折測定の結果から、23〜34℃において液晶性を示すことが確認された。また、π共役化合物B1のスペクトルデータは以下に示すとおりであった。
1H NMR(400MHz,CDCl3):δ 8.48(s,2H),8.42(s,2H),8.01−8.04(m,2H),7.54−7.56(m,2H),6.84−6.97(m,6H),5.21(s,4H),3.96−4.02(m,8H),1.76−1.84(m,8H),1.24−1.51(m,72H),0.85−0.88(m,12H);
13CNMR(100MHz,CDCl3):δ 167.4,149.2,149.1,132.9,131.2,130.3,128.2,128.1,127.6,126.6,121.3,114.4,113.6,69.2,67.4,31.7,29.5,29.5,29.3,29.3,29.2,29.2,25.9,25.9,22.5,13.9;
HRMS(APCI,positive):[M+]calcd. for C44H36O8,692.2405;found 692.2399.
From the results of differential scanning calorimetry (DSC), polarization microscope observation, and X-ray diffraction measurement, the π-conjugated compound B1 was confirmed to exhibit liquid crystallinity at 23 to 34 ° C. Further, spectrum data of the π-conjugated compound B1 were as shown below.
1 H NMR (400 MHz, CDCl 3 ): δ 8.48 (s, 2H), 8.42 (s, 2H), 8.01-8.04 (m, 2H), 7.54-7.56 ( m, 2H), 6.84-6.97 (m, 6H), 5.21 (s, 4H), 3.96-4.02 (m, 8H), 1.76-1.84 (m, 8H), 1.24-1.51 (m, 72H), 0.85-0.88 (m, 12H);
13 C NMR (100 MHz, CDCl 3 ): δ 167.4, 149.2, 149.1, 132.9, 131.2, 130.3, 128.2, 128.1, 127.6, 126.6, 121.3, 114.4, 113.6, 69.2, 67.4, 31.7, 29.5, 29.5, 29.3, 29.3, 29.2, 29.2, 25. 9, 25.9, 22.5, 13.9;
HRMS (APCI, positive): [M + ] calcd. for C 44 H 36 O 8, 692.2405; found 692.2399.
(実施例3:π共役化合物A1の接着剤としての使用1)
ガラス板に6mmΦの円形に打ち抜いたシリコーンテープ(中興化成工業社製、チューコーフローAGF−100、厚み0.13mm、幅13mm)を貼り、円形部に実施例1で得られたπ共役化合物A1の粉末を置いた。当該ガラス板をホットプレート上に載せ、170℃で30分加熱し、π共役化合物A1を液化させた。その後、液化したπ共役化合物A1に重なるようにガラス板を載せ、500gの分銅を載せて荷重をかけ、25℃まで冷却しガラス積層体を作製した。作製したガラス板積層体の片側をクランプで固定し、別のガラス板側の穴にプッシュプルゲージ(株式会社シロ産業、WPARX−10)の先端を引っかけた。プッシュプルゲージにてガラス積層体が剥離するまでの引張せん断接着強さを測定した。この測定を5回繰り返し、接着強さを算術平均した結果、1.84MPaであった。
(Example 3: Use 1 of π-conjugated compound A1 as an adhesive)
A silicone tape punched into a 6 mmφ circle (Chukoko Chemical Industries, Chuko Flow AGF-100, thickness 0.13 mm, width 13 mm) was pasted on a glass plate, and the π-conjugated compound A1 obtained in Example 1 was applied to the circular portion. The powder was placed. The glass plate was placed on a hot plate and heated at 170 ° C. for 30 minutes to liquefy the π-conjugated compound A1. Thereafter, a glass plate was placed so as to overlap with the liquefied π-conjugated compound A1, a 500 g weight was placed thereon, a load was applied, and the resultant was cooled to 25 ° C. to produce a glass laminate. One side of the produced glass plate laminate was fixed with a clamp, and the tip of a push-pull gauge (Shiro Sangyo Co., Ltd., WPARX-10) was hooked into the hole on the other glass plate side. The tensile shear bond strength until the glass laminate was peeled off was measured with a push-pull gauge. This measurement was repeated 5 times, and the result of arithmetically averaging the bond strength was 1.84 MPa.
(実施例4:π共役化合物A1の接着剤としての使用2)
実施例1と同様にガラス板積層体を作製後、当該ガラス板積層体の片側をクランプで固定し、接着部が100℃になるまでドライヤーで加熱した。接着部を100℃に保持した状態で、実施例1と同様にプッシュプルゲージを用いて引張せん断接着強さを測定した結果、1.55MPaであった。
(Example 4: Use of π-conjugated compound A1 as an adhesive 2)
After producing a glass plate laminate in the same manner as in Example 1, one side of the glass plate laminate was fixed with a clamp, and heated with a drier until the adhesion portion reached 100 ° C. The tensile shear bond strength was measured using a push-pull gauge in the same manner as in Example 1 while the bonded portion was held at 100 ° C. As a result, it was 1.55 MPa.
(実施例5:π共役化合物A1の接着剤としての使用3)
実施例1と同様にガラス板積層体を作製後、当該ガラス板積層体の片側をクランプで固定し、接着部が100℃になるまでドライヤーで加熱し、100℃に保持した状態で365nmの波長の紫外線(照度2.6W/cm2)を10秒間、接着部に照射した。紫外線照射直後に実施例1と同様にプッシュプルゲージを用いて引張せん断接着強さを測定した結果、ガラスの自重で接着部が剥がれ、強度を示さなかった。
(Example 5: Use 3 of π-conjugated compound A1 as an adhesive)
After producing a glass plate laminate in the same manner as in Example 1, one side of the glass plate laminate was fixed with a clamp, heated with a drier until the bonded portion reached 100 ° C., and a wavelength of 365 nm maintained at 100 ° C. UV light (illuminance 2.6 W / cm 2 ) was irradiated to the bonded portion for 10 seconds. Immediately after the ultraviolet irradiation, the tensile shear bond strength was measured using a push-pull gauge in the same manner as in Example 1. As a result, the bonded part peeled off due to the weight of the glass and showed no strength.
(実施例6:π共役化合物A2の接着剤としての使用1)
π共役化合物A1をπ共役化合物A2に変更し、加熱温度を170℃から120℃に変更したこと以外は、実施例3と同様の方法で引張せん断接着強さを測定した。測定の結果、引張せん断接着強さは1.45MPaであった。
(Example 6: Use 1 of π-conjugated compound A2 as an adhesive)
The tensile shear bond strength was measured in the same manner as in Example 3 except that the π-conjugated compound A1 was changed to the π-conjugated compound A2 and the heating temperature was changed from 170 ° C. to 120 ° C. As a result of the measurement, the tensile shear bond strength was 1.45 MPa.
(実施例7:π共役化合物A2の接着剤としての使用2)
π共役化合物A1をπ共役化合物A2に変更し、保持温度を100℃から70℃に変更したこと以外は、実施例4と同様の方法で引張りせん断接着強さを測定した。測定の結果、引張せん断接着強さは1.33MPaであった。
(Example 7: Use 2 of π-conjugated compound A2 as an adhesive)
The tensile shear bond strength was measured in the same manner as in Example 4 except that the π-conjugated compound A1 was changed to the π-conjugated compound A2 and the holding temperature was changed from 100 ° C. to 70 ° C. As a result of the measurement, the tensile shear bond strength was 1.33 MPa.
(実施例8:π共役化合物A2の接着剤としての使用3)
π共役化合物A1をπ共役化合物A2に変更し、保持温度を100℃から70℃に変更したこと以外は、実施例5と同様にプッシュプルゲージを用いて引張せん断接着強さを測定したところ、ガラスの自重で接着部が剥がれ、強度を示さなかった。
(Example 8: Use 3 of π-conjugated compound A2 as an adhesive)
The tensile shear bond strength was measured using a push-pull gauge in the same manner as in Example 5 except that the π-conjugated compound A1 was changed to the π-conjugated compound A2 and the holding temperature was changed from 100 ° C. to 70 ° C. The adhesive part peeled off due to the weight of the glass and showed no strength.
(比較例2:π共役化合物B1の接着剤としての使用1)
π共役化合物A1をπ共役化合物B1に変更し、加熱温度を170℃から95℃に変更したこと以外は、実施例3と同様の方法で引張りせん断接着強さを測定した。測定の結果、引張せん断接着強さは0.65MPaであった。
(Comparative Example 2: Use 1 of π-conjugated compound B1 as an adhesive)
The tensile shear bond strength was measured in the same manner as in Example 3 except that the π-conjugated compound A1 was changed to the π-conjugated compound B1 and the heating temperature was changed from 170 ° C. to 95 ° C. As a result of the measurement, the tensile shear bond strength was 0.65 MPa.
(比較例3:π共役化合物B1の接着剤としての使用2)
π共役化合物A1をπ共役化合物B1に変更し、保持温度を100℃から28℃に変更したこと以外は、実施例5と同様にプッシュプルゲージを用いて引張せん断接着強さを測定した。紫外線照射前の引張せん断接着強さは0.71MPaであり、紫外線照射後の引張せん断接着強さは0.65MPaであり、紫外線照射の前後で強度の差異は観られなかった。
(Comparative Example 3: Use 2 of π-conjugated compound B1 as an adhesive)
The tensile shear bond strength was measured using a push-pull gauge in the same manner as in Example 5 except that the π-conjugated compound A1 was changed to the π-conjugated compound B1 and the holding temperature was changed from 100 ° C. to 28 ° C. The tensile shear bond strength before UV irradiation was 0.71 MPa, the tensile shear bond strength after UV irradiation was 0.65 MPa, and no difference in strength was observed before and after UV irradiation.
本発明のπ共役化合物は、光照射と温度の制御により、可逆的に流動化−非流動化させることができるので、ナノインプリント等のように、プラスチック等の各種基材上へ微細構造を形成する材料等への応用が期待できる。また接着剤の分野をはじめとする種々の広い分野での応用が期待できる。特に、本発明の接着剤は、温度をかけた状態で光照射することにより、はじめて脱着できるため、半導体製造プロセスにおける仮固定用接着剤として好適である。本接着剤で接合された部材は、π共役化合物の液晶領域未満の温度に雰囲気温度を設定することで、紫外線が照射されても脱着されることがなく、リソグラフィ工程等のプロセスに曝すことが可能である。一方、部材を脱着する際は、液晶領域の温度に雰囲気温度を設定して紫外線照射することで行うことができる。また半導体製造プロセスにおける仮固定用接着剤の他にも、様々な用途に適用可能な解体性接着剤としても有益である。 Since the π-conjugated compound of the present invention can be reversibly fluidized and non-fluidized by light irradiation and temperature control, a fine structure is formed on various substrates such as plastics such as nanoimprint. Application to materials etc. can be expected. In addition, it can be expected to be applied in various fields including adhesives. In particular, the adhesive of the present invention is suitable as a temporary fixing adhesive in a semiconductor manufacturing process because it can be detached for the first time by irradiating light with a temperature applied. By setting the ambient temperature to a temperature lower than the liquid crystal region of the π-conjugated compound, the member bonded with the adhesive can be exposed to a process such as a lithography process without being detached even when irradiated with ultraviolet rays. Is possible. On the other hand, when detaching the member, it can be performed by setting the ambient temperature to the temperature of the liquid crystal region and irradiating with ultraviolet rays. In addition to the temporary fixing adhesive in the semiconductor manufacturing process, it is also useful as a disassembling adhesive applicable to various uses.
Claims (10)
[式中、R1は下記式(2)で表される基を示し、nは1〜3の整数を示す。複数のR1は互いに同一であっても異なっていてもよく、複数のnは互いに同一であっても異なっていても良い。]
[式中、R 2 は炭素原子数3〜20のアルキル基又は炭素原子数3〜20のアルコキシ基を示し、pは1〜5の整数を示す。pが2以上のとき、複数のR 2 は互いに同一であっても異なっていてもよい。] A π-conjugated compound represented by the following formula (1).
[Wherein, R 1 represents a group represented by the following formula (2), and n represents an integer of 1 to 3. A plurality of R 1 may be the same or different from each other, and a plurality of n may be the same or different from each other. ]
Wherein, R 2 represents an alkoxy group of the alkyl group or 3 to 20 carbon atoms having 3 to 20 carbon atoms, p is an integer of 1-5. When p is 2 or more, the plurality of R 2 may be the same as or different from each other. ]
2部材間に、前記π共役化合物が液体状態をなす温度に加熱された前記接着剤を介在させる工程と、
前記2部材間に介在させた前記接着剤を、前記π共役化合物が固体状態をなす温度に冷却して、前記2部材を接合する工程と、
を含む、使用方法。 A method of using the adhesive according to claim 3 ,
Interposing the adhesive heated to a temperature at which the π-conjugated compound is in a liquid state between two members;
Cooling the adhesive interposed between the two members to a temperature at which the π-conjugated compound is in a solid state, and joining the two members;
Including usage.
前記接合部に、前記π共役化合物が液晶状態を示す温度域下で、300nm〜400nmの波長の紫外線を照射する工程を含む、剥離方法。 It is a method of peeling the joined part joined using the adhesive according to claim 3 ,
A peeling method including a step of irradiating the junction with ultraviolet rays having a wavelength of 300 nm to 400 nm under a temperature range in which the π-conjugated compound exhibits a liquid crystal state.
下記式(3)で表されるテトラホルミル化合物と2−ブテン二酸ジエステルとを反応させる工程を含む、製造方法。
[式中、nは1〜3の整数を示す。] A method for producing a π-conjugated compound according to claim 1 or 2 ,
The manufacturing method including the process of making the tetraformyl compound and 2-butenedioic acid diester represented by following formula (3) react.
[In formula, n shows the integer of 1-3. ]
[式中、R1は前記式(2)で表される基を示す。]
The production method according to claim 9 , wherein the 2-butenedioic acid diester is a compound represented by the following formula (4).
[ Wherein R 1 represents a group represented by the formula (2) . ]
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