JP6260046B2 - Defect inspection system and marking method - Google Patents

Description

  The present invention relates to a defect inspection system including a marking device and a marking method.

  2. Description of the Related Art A defect inspection system is known that includes a defect inspection apparatus that detects a defective portion using a continuous sheet-like material made of synthetic resin or the like as an inspection target, and a marking device that performs marking on the detected defective portion. For example, Patent Document 1 discloses such a defect inspection system.

JP2013-92395A

FIG. 7 is a diagram showing a configuration of a marking device 90 used in the defect inspection system. FIG. 8 is a diagram showing markings applied by the defect inspection system.
The marking device 90 includes an AC servo motor 91, a drive disk 92, and a drive link 93.
When the AC servomotor 91 receives a drive start signal for instructing marking on a defective portion from a defect inspection apparatus (not shown), the AC servomotor 91 starts the rotation operation of its own rotation shaft 91a. The drive disk 92 is fixed to the rotary shaft 91a of the AC servo motor 91, and rotates around the rotary shaft 91a. Further, the drive link 93 converts the rotational movement of the drive disk 92 into a vertical movement in a direction perpendicular to the inspection object 3 (continuous sheet-like object).

  The drive link 93 is fixed to a holding member 93b that holds the marking means 93a by a connecting member 93c at one end, and fixed to the outer peripheral portion of the drive disk 92 by a connecting member 92a at the other end. The drive link 93 brings the tip of the marking means 93a into contact with the inspection object 3 when the center point in the vertical direction of the connecting member 93c comes to the position of the bottom dead center BDC (Bottom Dead Centre).

  Then, the marking device 90 performs marking indicating the defect by bringing the marking means 93a into contact with the position of the defect on the inspection object 3 perpendicularly. As shown in FIG. 7, the bottom dead center BDC is drawn perpendicularly to the inspection object 3 from the rotation shaft 91a and a circle C92 having a radius R92 from the center of the rotation shaft 91a to the center of the connecting member 92a. Among the intersections with the straight line L90, this corresponds to the intersection closer to the inspection object 3.

  As described above, in the conventional marking device, when the pen point (contact portion) of the marking means 93a contacts the inspection object 3, the operation of the marking means 93a moves in the vertical direction. Will be in contact with the inspection object for a certain period of time. Therefore, as the conveyance speed of the inspection object 3 increases, the marking means 93a cannot follow the progress of the inspection object, and the marking that the defect inspection apparatus applies to the defective portion of the inspection object 3 is the conventional in FIG. As shown in the technology, it becomes a linear marking.

That is, the conventional marking device has a problem that the length of the marking changes depending on the traveling speed of the inspection object.
The present invention has been made in view of the above problems, and it is an object of the present invention to provide a defect inspection system capable of shortening the marking length regardless of the traveling speed of the inspection object.

In order to solve the above problems, a defect inspection system according to the present invention is a defect inspection system that detects and marks a defect existing in an inspection object while conveying the inspection object, and rotates from a standby position. Rotating member and marking means that rotate in the forward direction around the axis, and the speed of the tip of the marking means and the speed of the test object in the advancing direction when the tip of the marking means abuts on the object to be inspected When the marking means comes into contact with the object to be inspected , a control unit that performs rotation control of the rotating shaft so that the marking means is equal to the circle movement of the marking means is added to the linear movement along the linear guide, and marking is performed. And a cam mechanism configured by a pen up / down motion cam follower for moving the means in a direction perpendicular to the object to be inspected, and a fixed cam follower .

Moreover, in order to solve the above-mentioned problem, the marking method of the present invention is a marking method of a defect inspection system that detects and marks a defect existing in an inspection object while conveying the inspection object, Rotation step of rotating in the forward direction around the rotation axis from the standby position by the rotating member and the marking means , and the speed of the leading end of the marking means when the tip of the marking means abuts the inspection object by the control unit The marking means is applied to the inspection object by a control process for controlling the rotation of the rotary shaft so that the speed of the inspection object is equal to the speed of the inspection object , and a cam mechanism including a pen follower cam follower and a fixed cam follower. At the time of contact, the marking means is added to the circular movement of the marking means along the linear guide, and the marking means is moved against the object to be inspected. It characterized by having a a moving step of moving the linear direction.

  According to the present invention, marking is performed while moving the marking means along the conveyance direction of the inspection object. As a result, the length of the marking in the conveyance direction of the inspection object can be shortened, and the marking shape can be made close to a dot-shaped marking instead of a linear marking. Marking that is easy to identify can be applied.

It is a schematic structure figure of defect inspection system 1 concerning this embodiment. It is a figure for demonstrating the structure of the marking apparatus 20 in the defect inspection system 1. FIG. It is a figure for demonstrating operation | movement of the marking apparatus 20 in the defect inspection system 1. FIG. It is a figure for demonstrating the structure of the marking apparatus 20a in the defect inspection system 1. FIG. It is a figure for demonstrating operation | movement of the marking apparatus 20a in the defect inspection system 1. FIG. It is a figure which shows the marking given by a defect inspection system. It is a figure for demonstrating the marking apparatus 90 in a defect inspection system. It is a figure which shows the marking given by a defect inspection system.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic configuration diagram of a defect inspection system 1 according to the present embodiment.
A part of the defect inspection system 1 is provided in the control room 2a, and the remaining part is provided in the clean room 2b.
The defect inspection system 1 includes an image processing device 13, an input device 26, and a control unit 25 in the control room 2a. Further, the defect inspection system 1 includes a lighting device 11, a line sensor 12, and a marking device 20 in a clean room 2b.
An inspection line for inspecting defects existing on the surface of the continuous sheet-like inspection object 3 includes a supply roll 4 around which the inspection object 3 is wound, a conveyance roll 5a, and a conveyance in the clean room 2b. A take-up roll 6 that winds up the inspection object 3 via the roll 5b is provided.

  The inspection object 3 is a continuous sheet-like metal plate, film, cloth, non-woven fabric, resin plate, etc., which is pulled out from the supply roll 4 on the inspection line and moved by being transported by the transport roll 5a and the transport roll 5b. To do.

  The defect inspection apparatus 10 receives an illumination device 11 that irradiates light onto the surface of the inspection object 3 that moves between the conveyance roll 5a and the conveyance roll 5b, and reflected light from the inspection object 3, and receives the image. A line sensor 12 for obtaining a signal and an image processing device 13 for processing the image signal are provided.

The illuminating device 11 is a line-shaped illuminating device arranged so that the longitudinal direction of the light irradiation range on the inspection object 3 is orthogonal to the moving direction of the inspection object 3, for example, a fluorescent lamp, rod illumination, Examples include optical fiber illumination and LED (Light Emitting Diode) illumination.

The line sensor 12 is a line-shaped optical sensor arranged so that the longitudinal direction of the imaging range is orthogonal to the moving direction of the inspection object 3, receives reflected light from the inspection object 3, and receives the inspection object 3. An image signal corresponding to the light intensity distribution on the surface is output. An example of the line sensor 12 is a CCD (Chrage Coupled Device) camera.
In the illustrated example, the line sensor 12 is arranged on the surface side of the inspection object 3 in the same manner as the illumination device 11. It is good also as a structure which arrange | positions the illuminating device 11 to the back side of the test target object 3 opposite to the line sensor 12, irradiates light from the back surface of the test target object 3, and the line sensor 12 receives transmitted light.

  The image processing apparatus 13 processes the image signal output from the line sensor 12 according to a predetermined program under the control of the control unit 25. Further, when the image processing apparatus 13 detects a defect present on the inspection object 3, the image processing apparatus 13 detects the defect, and defect position information indicating the position in the width direction and the position in the movement direction of the inspection object 3. Is output to the control unit 25.

  The marking device 20 includes an AC servo motor 21 and a rotating member 23. When the rotation start signal Start instructing the rotation is input from the input device 26 via the control unit 25, the AC servo motor 21 detects the detected defect according to the defect detection signal Detect input from the image processing device 13. The test object 3 is moved in the width direction so as to coincide with the position of, and the rotation operation of its own rotation shaft 21a is started. In FIG. 1, the counterclockwise rotation (rotation in the direction corresponding to the conveyance direction A of the inspection object 3; the order of directions B, C, and D shown in FIG. 1) is forward rotation, clockwise rotation (inspection). The rotation of the object 3 in the direction facing the conveyance direction A) is reversed.

One end of the rotating member 23 is fixed to the rotating shaft 21 a of the AC servomotor 21, and rotates around the rotating shaft 21 a according to the rotation of the AC servomotor 21. The rotating member 23 holds the marking means 24 at the other end. The rotating member 23 is also a holding member (details will be described later).
The rotating member 23 and the marking means 24 held by the rotating member 23 are on the surface perpendicular to the inspection object 3 with the rotation shaft 21a of the AC servomotor 21 as the center, and the inspection object 3 Rotational motion is performed on a plane parallel to the transport direction.

  Examples of the marking means 24 include a marking pen whose tip is a pen tip and the pen tip is integrated with a pen shaft for storing ink. As the pen tip constituting the tip portion, a relatively soft material, for example, a felt bundle is used in that there is no possibility of damaging the inspection object 3.

The input device 26 manually inputs into the input device 26 a signal for starting defect inspection from an operator in the control room 2a. When a defect to be marked is detected during the inspection, the input device 26 outputs a rotation start signal Start to the control unit 25.
While the rotation start signal Start is being input, the control unit 25 outputs the rotation control signal Rot to the AC servomotor 21 in response to the defect detection signal Detect input from the image processing device 13, and the AC servomotor. The rotation shaft 21a of 21 is rotated in the forward rotation direction. Thereby, the rotating member 23 and the marking means 24 rotate in the normal rotation direction (from the D direction to the B direction in FIG. 1) from the position indicated by the broken line in FIG. By doing so, the tip end portion (contact portion) of the marking means 24 contacts the inspection object 3.

  At this time, the control unit 25 determines that the moving speed in the rotational direction of the tip of the marking means 24 is at least when the tip is in contact with the test object 3 (in FIG. The rotation of the rotary shaft 21a is controlled so as to be substantially equal to the speed in the direction from the roll 5a toward the transport roll 5b; the transport direction A). Here, it is desirable that the speed of the tip portion of the marking means coincides with the moving speed of the inspection object 3. Note that the control unit 25 may control the rotation of the rotating shaft 21 a so that the speed of the marking unit 24 is equal to the speed of the inspection object 3 even when not in contact with the inspection object 3. Alternatively, the speed of the tip portion of the marking means 24 during the period from the start of rotation to the contact with the inspection object 3 or the period after the contact with the inspection object 3 and the return to the retracted position shown in FIG. Rotation of the rotating shaft 21a may be controlled so that is faster than the speed of the inspection object 3. Here, the control unit 25 can recognize the signal indicating the conveyance speed of the inspection object 3 by obtaining the signal from the conveyance device that conveys the inspection object 3.

  The distance between the tip of the marking means 24 and the rotating shaft 21a (here, “disl”) depends on the distance between the rotating shaft 21a and the inspection object 3 (here, “dis2”). It is set before the marking device 20 is operated manually. For example, dis1 is set larger than dis2. This set value can be finely adjusted by using a manual slide lifting device and using a micrometer, a feed screw, and the like. This is to take into consideration the expected degree of wear of the tip of the marking means 24. When the degree of wear is expected to be small, dis1 is set to be approximately equal to dis2.

  On the other hand, when the degree of wear of the tip portion is expected to be large and it is frequently determined that the adjustment of the marking means 24 to the rotating member 23 is necessary, the expected degree of wear and the frequency of the attachment adjustment are considered. Thus, dis1 is set larger than dis2. If dis1 is set to be larger than dis2, the marking shape tends to be linear at the beginning of attachment. However, the degree of ease of linearity is also considered when setting dis1 to be larger than dis2. Is done.

  As described above, the defect inspection system 1 is a defect inspection system that detects and marks a defective portion present in the moving inspection object 3, and includes an AC servo motor 21, a marking unit 24, a control unit 25, Have In the marking unit 24, the distance dis1 from the rotating shaft 21a of the AC servomotor 21 to the contact portion with the inspection object 3 is set according to the distance from the rotating shaft 21a to the inspection object 3. The control unit 25 matches the moving speed in the rotational direction in which the marking unit 24 rotates when the contact portion of the marking unit 24 contacts the inspection target 3 with the speed in the traveling direction of the inspection target 3. In addition, the rotary shaft 21a of the AC servomotor 21 is rotated in the forward rotation direction.

  As described above, according to the defect inspection system 1 of the present embodiment, the speed at which the abutting portion of the marking unit 24 abuts on the inspection object 3 is matched with the speed of the inspection object 3 in the traveling direction. . As a result, as shown in FIG. 6 according to the present embodiment, the marking shape can be reduced in length in the moving direction of the inspection object 3 (see FIG. 8), and can be close to a dot-shaped marking. Therefore, marking that accurately reflects the position of the defective portion can be performed.

Hereinafter, a specific configuration and operation of the marking device 20 will be described in detail.
FIG. 2 is a diagram for explaining the configuration of the marking device 20 in the defect inspection system 1. 2, the same parts as those of the marking device 20 shown in FIG. 1 are denoted by the same reference numerals, and the description thereof is omitted as appropriate.
The marking device 20 has a cam mechanism described in detail below.
2 (a) and 2 (b) show the state immediately before the cam mechanism functions, and FIGS. 2 (c) and 2 (d) show the function of the cam mechanism. The state immediately after is shown.

The rotating member 23 includes a holding member 23a, a mounting member 23b, a connecting member 23c, a pen follower cam follower 23d, a sliding block 23e, a guide rail 23f, a spring holding member 23g, a stopper 23h, a spring 23i, and a spring shown in FIG. A holding member 23j, a base member 23k, and a stopper mounting member 23l are included.
Of these members constituting the rotating member 23, the base member 23 k is attached to the rotating shaft 21 a of the AC servomotor 21.
An attachment member 21 b is attached to the AC servomotor 21. The attachment member 21b is plate-shaped, and is attached to the AC servomotor 21 so that one main surface does not contact the rotating shaft 21a, and is fixed to one end of the other main surface on the inspection object 3 side. It has a side cam follower 21c. For example, when the attachment member 21b is attached to the AC servomotor 21, if the attachment member 21b and the rotation shaft 21a interfere with each other, a notch or an opening is formed at a position on the attachment member 21b corresponding to the rotation shaft 21a. By providing, it is made not to contact the rotating shaft 21a.

Of the above members constituting the rotating member 23, a guide rail 23f, a spring holding member 23j, and a stopper mounting member 23l are mounted on the base member 23k.
One end of a spring 23i is attached to the spring holding member 23j. A part of the stopper mounting member 23l extends in the horizontal direction, and a stopper 23h is attached to the end of the stopper mounting member 23l so that the mounting member 23b is not separated from the inspection object 3 by a certain distance or more.

Of the members constituting the rotating member 23, the mounting member 23b is provided with a holding member 23a, a connecting member 23c, a spring holding member 23g, and a sliding block 23e.
The sliding block 23e and the guide rail 23f constitute the linear guide of this embodiment.
The guide rail 23f is attached to the base member 23k along the longitudinal direction of the base member 23k (the direction perpendicular to the inspection object 3).
A sliding block 23e is attached to one main surface of the mounting member 23b, and the mounting member 23b is perpendicular to the inspection object 3 by moving the sliding block 23e along the guide rail 23f. It is possible to move in the direction.
Of the other main surface of the attachment member 23b, the other end of each of the spring 23i and the spring 23i is connected to the end portion close to the spring holding member 23j via the spring holding member 23g.

  A holding member 23a is attached to the other main surface of the attachment member 23b. The marking means 24 is held by the holding member 23a and moves in the vertical direction with respect to the inspection object 3 by moving the sliding block 23e, the mounting member 23b, and the holding member 23a along the guide rail 23f. Marking is performed when the object 3 comes into contact.

  One end side of the connecting member 23c is attached to an end portion close to the inspection object 3 in one main surface of the attachment member 23b, and a pen follow-up operation cam follower 23d is attached to the other end side. This pen up / down motion cam follower 23d, together with the fixed cam follower 21c, constitutes the cam mechanism of the present embodiment.

Here, the distance between the center of the rotating shaft 21a and the portion (part of the circumferential surface) closest to the rotating shaft 21a side of the pen follower operation cam follower 23d is dis3 shown in FIG. The distance between the center of 21a and the portion (part of the circumferential surface) farthest from the rotating shaft 21a side of the fixed cam follower 21c is represented by dis4 shown in FIG.
Of the rotating members 23, each member attached to the attaching member 23b is circularly moving around the rotating shaft 21a, and the lowest point of the circular movement (the pen tip is closest to the inspection object 3). If dis3 <dis4, the pen up / down motion cam follower 23d comes into contact with the fixed cam follower 21c, so that each member moves from circular motion to linear motion along the linear guide. change.

  Further, the other end of the spring 23i is attached to the spring holding member 23g as described above. When each member attached to the attachment member 23b of the rotating member 23 reaches the lowest point of the circular motion, the spring 23i moves along the direction of the linear guide, that is, away from the rotating shaft 21a. The member functions to return each member to the rotating shaft 21a side. At this time, the stopper 23h functions to prevent each member from returning to the rotating shaft 21a side from the position where the stopper 23h is provided.

The configuration of the marking device 20 in the defect inspection system 1 has been described above. Next, the operation of the marking device 20 having the above configuration will be described. FIG. 3 is a diagram for explaining the operation of the marking device 20 in the defect inspection system 1.
FIG. 3 shows the holding member 23a, the marking means 24, the pen up / down motion cam follower 23d, and the fixed cam follower 21c in FIG.
In FIG. 3, the “rotation center position” indicates the center of the rotation shaft 21 a of the AC servomotor 21. In FIG. 3, “rotational miracle C3 of the vertical cam follower” indicates a locus of the portion closest to the rotation shaft 21a of the pen vertical movement cam follower 23d. In FIG. 3, “Δd” represents the above (dis4-dis3).
The broken line P1 indicates a state where the marking means 24 and the pen up / down motion cam follower 23d are in the retracted position.

An operator in the control room 2a manually inputs a signal for starting a defect inspection into the input device 26. When a defect to be marked is detected during the inspection, the input device 26 outputs a rotation start signal Start to the control unit 25.
When the defect detection signal Detect input from the image processing device 13 is input while the rotation start signal Start is input, the control unit 25 outputs the rotation control signal Rot to the AC servo motor 21. The rotating shaft 21a of the AC servo motor 21 is rotated in the forward direction.

Thereby, the rotating member 23 and the marking unit 24 rotate in the normal rotation direction around the rotation shaft 21a from the retracted position indicated by the broken line P1, and the tip portion (contact portion) of the marking unit 24 is the inspection object 3. Abut. At this time, the control unit 25 determines that the speed of the tip of the marking means 24 is at least when the marking unit 24 is in contact with the inspection object 3 in the traveling direction of the inspection object 3 (from the conveyance roll 5a side to the conveyance roll 5b side in FIG. 3). The rotation of the rotary shaft 21a is controlled so as to be equal to the speed in the direction A).
Further, the cam mechanism composed of the pen up / down motion cam follower 23d and the fixed side cam follower 21c allows the marking means 24 to move in a straight line along the linear guide when the marking means 24 comes into contact with the inspection object 3. Add motion to motion (change the circular motion to a linear motion perpendicular to the test object) and move the marking means 24 in the vertical direction (direction approaching the test object 3) with respect to the test object 3 The tip of the marking means 24 is pushed into the inspection object 3.
Further, when the circular motion proceeds and the pen up / down motion cam follower 23d reaches a position where it does not come into contact with the stationary cam follower 21c, the rotating member 23 is pulled back to the rotating shaft 21a side by the spring 23i, and moved to the position of the stopper 23h and stopped. To do. At this time, the abutting portion of the marking means 24 moves in a direction away from the inspection object 3 by a circular motion (direction C shown in FIG. 1), and the marking means 24 moves in the direction of the rotating shaft 21a together with the rotating member 23 by the spring 23i. By being pulled back, the object 3 is separated from the inspection object 3.

  Thus, in the marking device 20, by providing the cam mechanism with respect to the marking device 20, it is possible to perform an operation of pressing the marking means 24 against the inspection object 3, which cannot be obtained only by the rotation operation. As described with reference to FIG. 3, the marking means 24 is retracted without causing the marking means 24 to perform marking again by causing the contact portion of the marking means 24 to make a circular motion for one round in the same rotational direction. It is possible to return to the position P1. Further, even if the pen tip of the marking means 24 is easy to dry in a short time, it is possible to make the pen tip difficult to dry by moving the ink to the pen tip by centrifugal force by rotational movement.

Next, FIG. 4 is a diagram for explaining the configuration of the marking device 20a in the defect inspection system 1. 4, the same parts as those of the marking device 20 shown in FIG. 2 are denoted by the same reference numerals, and the description thereof is omitted as appropriate.
The marking device 20a has a marking function similar to the marking device 20 shown in FIG. 2, but the marking device 20a itself does not rotate, and marking is performed by reciprocating the marking means 24. The marking device 20a further has a hinge mechanism that will be described in detail below.

4 (a) and 4 (b) show the state in which the hinge mechanism acts immediately before marking, and FIGS. 4 (c) and 4 (d) show the cam immediately after marking. The state in which the mechanism operates is shown.
Similar to the marking device 20, the rotating member 23 includes a holding member 23a, a mounting member 23b, a connecting member 23c, a pen follower cam follower 23d, a sliding block 23e, a guide rail 23f, a spring holding member 23g, as shown in FIG. It includes a stopper 23h, a spring 23i, a spring holding member 23j, a base member 23k, and a stopper mounting member 23l.

As shown in FIG. 4A and FIG. 4C, a rotation member 21d constituting a hinge mechanism is attached to the attachment member 21b attached to the AC servomotor 21 instead of the fixed cam follower 21c. ing.
As shown in FIGS. 4 (a) and 4 (c), the rotating member 21d is formed in a recess formed by cutting out a part of one end side of the mounting member 21b facing the inspection object 3. It is attached to a corresponding region with respect to a rotating shaft fixed in a direction perpendicular to one main surface of the attachment member 21b.
One end of the connecting member 21e is attached to a part of the circumferential portion of the rotating member 21d, and the traveling direction (downstream) of the inspection object 3 starts from the rotating shaft to which the rotating member 21d is attached. Side) or the opposite direction (upstream side).

The movable cam follower 21f is fixedly attached to the connecting member 21e by the member 21i. The movable cam follower 21f constitutes a cam mechanism together with the pen up / down motion cam follower 23d. That is, the movable cam follower 21f corresponds to the function of the above-described fixed-side cam follower 21c, but a part of the circumferential surface is attached to the other end of the connecting member 21e. As a center, it can reciprocate with respect to the downstream side or the upstream side of the inspection object 3. As a result, as shown in FIG. 4A, the movable cam follower 21f moves the connecting member 21e against the stopper 21h when the pen up / down motion cam follower 23d moves from the upstream side to the downstream side of the inspection object 3. Since it is in the contact position (fixed position), the cam mechanism is configured together with the pen up / down operation cam follower 23d, and the function as the above-described cam mechanism is activated.
In this way, when the cam function is activated, the pen up / down motion cam follower 23d makes a linear motion in addition to the circular motion while being in contact with the movable cam follower 21f, thereby pressing the marking means 24 toward the inspection object 3 for marking. When the circular motion further proceeds and the pen up / down motion cam follower 23d reaches a position beyond the closest point to the inspection object 3 of the movable cam follower 21f, the marking means 24 is pulled back to the rotating shaft 21a side by the spring 23i.

  On the other hand, as shown in FIG. 4 (c), the movable cam follower 21f has an upstream side together with the pen vertical movement cam follower 23d when the pen vertical movement cam follower 23d moves from the downstream side to the upstream side of the inspection object 3. It is possible to prevent the cam mechanism described above from functioning.

  Thus, since the cam function is activated when the pen follower cam follower 23d moves from the upstream side, and the cam function is not activated when the pen follower moves from the downstream side, the connecting member 21e includes a spring. One end of 21g is attached. The other end of the spring 21g is attached to the attachment member 21b on the downstream side of the position where one end of the spring 21g is attached by a spring attachment post 21j. As shown in FIG. 4C, the spring 21g moves to the upstream side of the inspection object 3 when the connecting member 21e and the movable cam follower 21f move to the upstream side of the inspection object 3 together with the pen vertical movement cam follower 23d. extend. The spring 21g pulls the connecting member 21e and the movable cam follower 21f back to the downstream side of the inspection target 3 after the connecting member 21e and the movable cam follower 21f are separated from the pen up / down motion cam follower 23d.

  At this time, the stopper 21h is attached to the attachment member 21b so that the connecting member 21e and the movable cam follower 21f do not return to the downstream side of the inspection object 3 too much. The stopper 21h functions to prevent the connection member 21e and the movable cam follower 21f from moving to the downstream side of the inspection object 3. As shown in FIG. 4A, the stopper 21h moves the connection member 21e and the movable cam follower 21f. Stop. As a result, the movable cam follower 21f performs the above-described cam function in the same manner as the fixed-side cam follower 21c.

  Thus, in the marking device 20a, the rotation mechanism 21d, the connecting member 21e, the movable cam follower 21f, the spring 21g, and the stopper 21h constitute a hinge mechanism. By this hinge function, in the marking device 20a, when the movable cam follower 21f rotates from the upstream side to the downstream side of the inspection object 3, the function of the cam function described in the marking device 20 is exhibited, while the movable cam follower 21f is inspected. When the object 3 rotates from the downstream side to the upstream side, the cam function can be prevented from being exhibited.

The configuration of the marking device 20a in the defect inspection system 1 has been described above. Next, the operation of the marking device 20a having the above configuration will be described. FIG. 5 is a diagram for explaining the operation of the marking device 20a in the defect inspection system 1.
FIG. 5 shows the marking means 24, pen up / down movement cam follower 23d, and hinge mechanism (rotating member 21d, connecting member 21e, movable cam follower 21f, spring 21g, stopper 21h) in FIG.
In FIG. 5, “rotation center position” indicates the center of the rotation shaft 21 a of the AC servomotor 21 as in FIG. 3. In FIG. 5, “Δd” represents the above (dis4-dis3).
A broken line P2 indicates a state where the marking means 24 and the pen up / down motion cam follower 23d are in the retracted position. A broken line P3 indicates a position farthest from the retracted position in a range in which the marking unit 24 and the pen up / down motion cam follower 23d are movable. That is, the marking means 24 and the pen up / down cam follower 23d move along the marking direction (the conveyance direction of the inspection object 3) from P2 to P3 shown in FIG. 5, and then from P3 to P2 in the non-marking direction. It moves along (the direction opposite to the conveyance direction of the inspection object 3).

  First, an operator in the control room 2a manually inputs a signal for starting a defect inspection into the input device 26. When a defect to be marked is detected during the inspection, the input device 26 outputs a rotation start signal Start to the control unit 25. When the defect detection signal Detect input from the image processing device 13 is input while the rotation start signal Start is input, the control unit 25 outputs the rotation control signal Rot to the AC servo motor 21. The marking means 24 is rotated on the rotating shaft 21a of the AC servomotor 21.

  As a result, the hinge mechanism and the marking unit 24 rotate from the retracted position indicated by the broken line P2 around the rotation shaft 21a in the marking direction, so that the tip (contact portion) of the marking unit 24 contacts the inspection object 3. Touch. At this time, the control unit 25 makes the speed of the tip of the marking means 24 equal to the speed in the traveling direction of the inspection object 3 (leftward in FIG. 5) at least when contacting the inspection object 3. The rotation of the rotary shaft 21a is controlled.

  At this time, since the movable cam follower 21f is in a fixed position by the stopper 21h constituting the hinge mechanism, the cam mechanism constituted by the movable cam follower 21f and the pen vertical movement cam follower 23d is directed to the inspection object 3 of the marking means 24. At the time of contact, the movement of the marking means 24 is changed to a linear movement along the linear guide, and the tip of the marking means 24 is pushed into the inspection object 3.

Next, the marking means 24 is pulled back to the rotating shaft 21a side by the action of the linear guide and the spring 23i, returns to the circular motion with the radius at the start, and rotates to the position P3 by the rotation control of the control unit 25. . When the marking unit rotates to the position P3, the control unit 25 reversely rotates the rotating shaft 21a and moves the marking unit 24 in the non-marking direction. At this time, the marking means 24 approaches a position perpendicular to the inspection object 3.
At this time, however, the movable cam follower 21f constituting the hinge mechanism moves together with the pen up / down motion cam follower 23d, so that the pen up / down motion cam follower 23d and the marking means 24 are not pushed down toward the inspection object 3. . That is, the pen up / down motion cam follower 23d moves to the retracted position P3 with the same radius without the contact portion of the marking means 24 contacting the inspection object 3 or being pushed in. When the spring 21g in the hinge mechanism works, the movable cam follower 21f returns to a fixed position where it is stopped by the stopper, and prepares for the next marking operation.

  Thus, in the marking device 20a, as with the marking device 20, by providing the cam mechanism for the marking device 20, an operation for pressing the marking means 24 against the inspection object 3 that cannot be obtained only by the rotation operation is performed. It becomes possible. As described with reference to FIG. 5, the reason for the circular movement between the P2 state and the P3 state without the circular movement of the contact portion of the marking means 24 for one round is that the marking means 24 is This is to promptly return to the retreat position P2. That is, since the moving distance of the contact portion of the marking means 24 can be shortened, even if a defect arrives while the contact portion of the marking means 24 goes around, the marking process is performed on each defect. Can do.

  As described above, the embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to the above, and various design changes and the like can be made without departing from the scope of the present invention. It is possible to For example, when a plurality of defects are detected in the width direction, a plurality of marking devices 20 (or marking devices 20a) are arranged in the width direction of the inspection object 3, and a plurality of marks parallel to each other are marked on the inspection object 3. It is good also as composition to do. Moreover, it is good also as a structure which moves on the test object 3 to a two-dimensional direction, and marks.

  DESCRIPTION OF SYMBOLS 1 ... Defect inspection system, 2a ... Control room, 2b ... Clean room, 3 ... Inspection object, 4 ... Supply roll, 5a, 5b ... Conveyance roll, 6 ... Take-up roll, 10 ... Defect inspection apparatus, 11 ... Illumination device, DESCRIPTION OF SYMBOLS 12 ... Line sensor, 13 ... Image processing device, 20, 20a, 90 ... Marking device, 21, 91 ... AC servo motor, 21a, 91a ... Rotating shaft, 21c ... Fixed side cam follower, 21f ... Movable cam follower, 23 ... Rotating member , 23a, 93b ... holding member, 23d ... pen follow-up cam follower, 23e ... sliding block, 23f ... guide rail, 24, 93a ... marking means, 25 ... control unit, 26 ... input device, 92 ... drive disk, 92a , 93c ... connecting member, 93 ... drive link

Claims (2)

A defect inspection system for detecting and marking defects existing in an inspection object while conveying the inspection object,
A rotating member that rotates in a normal rotation direction around the rotation axis from the standby position, and marking means;
When the tip of the marking means abuts on the inspection object, a control unit that performs rotation control of the rotation shaft so that the speed of the tip of the marking means is equal to the speed of the inspection object in the traveling direction ;
When the marking means comes into contact with the inspection object, a pen up-and-down operation is performed by adding an operation to the linear movement along the linear guide to the circular movement of the marking means and moving the marking means in a direction perpendicular to the inspection object. A cam mechanism composed of a cam follower and a fixed cam follower;
A defect inspection system comprising: A defect inspection system marking method for detecting and marking defects existing in an inspection object while conveying the inspection object,
A rotating step of rotating in a normal rotation direction around a rotation axis from a standby position by a rotating member and marking means ;
A control step of controlling the rotation of the rotary shaft so that the speed of the tip of the marking means is equal to the speed of the test object in the advancing direction when the tip of the marking means contacts the inspection object by the control unit ;
When the marking means is brought into contact with the object to be inspected by a cam mechanism constituted by a pen follower cam follower and a fixed cam follower, an operation for linear movement along the linear guide is added to the circular movement of the marking means, A moving step of moving the marking means in a direction perpendicular to the inspection object;
A marking method comprising:

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