JP6248697B2 - Microwave processing equipment - Google Patents

Microwave processing equipment Download PDF

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JP6248697B2
JP6248697B2 JP2014034991A JP2014034991A JP6248697B2 JP 6248697 B2 JP6248697 B2 JP 6248697B2 JP 2014034991 A JP2014034991 A JP 2014034991A JP 2014034991 A JP2014034991 A JP 2014034991A JP 6248697 B2 JP6248697 B2 JP 6248697B2
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periodic structure
heated
impedance
microwave
processing apparatus
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JP2015162273A (en
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大森　義治
義治 大森
吉野　浩二
浩二 吉野
宇野　博之
博之 宇野
上島　博幸
博幸 上島
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Panasonic Corp
Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/70—Feed lines
    • H05B6/707—Feed lines using waveguides
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/70—Feed lines

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  • Electromagnetism (AREA)
  • Constitution Of High-Frequency Heating (AREA)

Description

本発明は、周期構造体を用いた表面波伝送線路を備えたマイクロ波処理装置に関するものである。   The present invention relates to a microwave processing apparatus including a surface wave transmission line using a periodic structure.

従来、この種のマイクロ波処理装置は、リッジ部とスロット部を有する梯子回路導波管を設置したものがある（例えば、特許文献１参照）。そして、梯子回路による電界集中により焦げ目付けと給電口からの加熱調理をマイクロ波のみで行えるようにしている。   Conventionally, this type of microwave processing apparatus includes a ladder circuit waveguide having a ridge portion and a slot portion (see, for example, Patent Document 1). The electric field concentration by the ladder circuit enables scorching and heating cooking from the power feeding port only by the microwave.

周期構造体で構成された加熱プレートを有し、導波管よりアンテナを経由して励振したものがある（例えば、特許文献２参照）。そして、周期構造の溝の深さを可変して表面波加熱の強度を変えて、高さ方向への加熱分布を制御するとしている。   Some have a heating plate composed of a periodic structure and are excited from a waveguide via an antenna (see, for example, Patent Document 2). The depth of the groove of the periodic structure is varied to change the intensity of surface wave heating to control the heating distribution in the height direction.

特開昭４９−１６９４４号公報Japanese Patent Laid-Open No. 49-16944 特開平５−６６０１９号公報JP-A-5-66019

しかしながら、前記従来の給電方式における構成では、下記説明のように、加熱室内に収納されたさまざまな形状・種類・量の異なる被加熱物を所望の状態に焦げ目付することは難しいという課題を有していた。   However, the configuration of the conventional power feeding method has a problem that it is difficult to burn the object to be heated in various shapes, types, and amounts stored in the heating chamber to a desired state as described below. Was.

梯子回路導波管などの周期構造体を設置して、表面波によりマイクロ波を集中することは可能だが、設置した被加熱物の影響により表面波線路の特性が変化するので、集中加熱性能を維持することができなくなってしまう。   Although it is possible to install periodic structures such as ladder circuit waveguides and concentrate microwaves by surface waves, the characteristics of surface wave lines change due to the influence of the object to be heated. It becomes impossible to maintain.

このように前記従来の給電方式は、被加熱物設置による影響を補正できないので、被加熱物の種類や量などにより表面波による集中加熱性能が変化し、意図した加熱が行えない。また、表面波加熱の強度を変える可変機構を有する方式は、被加熱物設置と関連付けた制御ではなく、焦げ目付と内部加熱を切替える手段のため被加熱物の影響を補正できない。   As described above, the conventional power feeding method cannot correct the influence of the object to be heated, so that the concentrated heating performance due to the surface wave changes depending on the type and amount of the object to be heated, and the intended heating cannot be performed. Further, the method having a variable mechanism for changing the intensity of surface wave heating is not a control associated with the installation of the object to be heated, and cannot correct the influence of the object to be heated because it is a means for switching between scorching and internal heating.

本発明は、前記従来の課題を解決するもので、被加熱物を設置することによる表面波線路の特性変化を補正して、表面波による集中加熱性能を維持できるマイクロ波発処理装置を提供することを目的とする。   The present invention solves the above-described conventional problems, and provides a microwave generation processing apparatus that corrects a change in characteristics of a surface wave line caused by installing an object to be heated and maintains concentrated heating performance due to surface waves. For the purpose.

前記従来の課題を解決するために、本発明のマイクロ波処理装置は、マイクロ波を発振する発振源と、前記マイクロ波を表面波モードで伝播する周期構造体と、前記周期構造体の近傍に被加熱物を設置するための設置台と、前記発振源の出力を制御する制御手段を有し、前記周期構造体のインピーダンスを変えるインピーダンス調整手段を備えている。そして、前記インピーダンス調整手段により、前記周期構造体の範囲のうち前記被加熱物を置いた一部分の範囲のインピーダンスを、前記被加熱物の影響による前記周期構造体の特性変化を補正するものである。
In order to solve the conventional problems, a microwave processing apparatus according to the present invention includes an oscillation source that oscillates a microwave, a periodic structure that propagates the microwave in a surface wave mode, and a vicinity of the periodic structure. An installation base for installing an object to be heated and a control unit for controlling the output of the oscillation source are provided, and an impedance adjusting unit for changing the impedance of the periodic structure is provided. Then, the by impedance-adjusting means, the impedance of the range of a portion placed the object to be heated within the scope of the periodic structure, shall be correcting the characteristic change of said periodic structure due to the influence of the object to be heated It is.

これによって、被加熱物を設置することによる表面波線路の特性変化を補正して、表面
波による集中加熱性能を維持することができる。 Thereby, the characteristic change of the surface wave line due to the installation of the object to be heated can be corrected, and the concentrated heating performance by the surface wave can be maintained.

本発明のマイクロ波処理装置は、さまざまな形状・種類・量の異なる被加熱物に対して、表面波線路の特性を確保し、所望の状態に焦げ目付ができる。   The microwave processing apparatus of the present invention can ensure the characteristics of a surface wave line for a heated object having various shapes, types, and amounts, and can be burnt in a desired state.

本発明の実施の形態１におけるマイクロ波処理装置の構成図Configuration diagram of microwave processing apparatus according to Embodiment 1 of the present invention 本発明の実施の形態１におけるマイクロ波処理装置の導波管内斜視図1 is a perspective view inside a waveguide of a microwave processing apparatus according to Embodiment 1 of the present invention. 本発明の実施の形態１におけるマイクロ波処理装置の構成図Configuration diagram of microwave processing apparatus according to Embodiment 1 of the present invention 本発明の実施の形態２におけるマイクロ波処理装置の構成図The block diagram of the microwave processing apparatus in Embodiment 2 of this invention 本発明の実施の形態２におけるマイクロ波処理装置の導波管内斜視図The waveguide internal perspective view of the microwave processing apparatus in Embodiment 2 of this invention 本発明の実施の形態３におけるマイクロ波処理装置の構成図The block diagram of the microwave processing apparatus in Embodiment 3 of this invention

第１の発明は、マイクロ波を発振する発振源と、前記マイクロ波を表面波モードで伝播する周期構造体と、前記周期構造体の近傍に被加熱物を設置するための設置台と、前記発振源の出力を制御する制御手段を有し、前記周期構造体のインピーダンスを変えるインピーダンス調整手段を備え、前記インピーダンス調整手段により、前記周期構造体の範囲のうち前記被加熱物を置いた一部分の範囲のインピーダンスを変動させ、前記被加熱物の影響による前記周期構造体の特性変化を補正するものである。これによって、被加熱物の影響を補正し、さまざまな形状・種類・量の異なる被加熱物に対して、表面波線路の特性を確保し、所望の状態に焦げ目付ができる。
The first invention includes an oscillation source that oscillates a microwave, a periodic structure that propagates the microwave in a surface wave mode, an installation base for installing an object to be heated in the vicinity of the periodic structure, Control means for controlling the output of the oscillation source, and comprising impedance adjusting means for changing the impedance of the periodic structure, and by the impedance adjusting means, a portion of the range of the periodic structure where the object to be heated is placed. varying the impedance of the range, the a shall be corrected characteristic change of said periodic structure due to the influence of the heated object. As a result, the influence of the object to be heated can be corrected, the characteristics of the surface wave line can be secured for the object to be heated of various shapes, types, and quantities, and the desired state can be burnt.

第２の発明は、特に第１の発明のマイクロ波処理装置を、前記インピーダンス調整手段による、前記周期構造体の意図する範囲のインピーダンス変動量は、近傍に置かれた前記被加熱物により決めるとしたとしたものであり、被加熱物の影響補正を精度よく行うことができ、さまざまな形状・種類・量の異なる被加熱物に対して、表面波線路の特性を確保し、所望の状態に焦げ目付ができる。   According to a second aspect of the invention, in particular, in the microwave processing apparatus according to the first aspect of the invention, the impedance fluctuation amount in the intended range of the periodic structure by the impedance adjusting unit is determined by the object to be heated placed nearby. It is possible to accurately correct the influence of the object to be heated, ensuring the characteristics of the surface wave line for the object to be heated of various shapes, types and quantities, and achieving the desired state. Can be burnt.

第３の発明は、特に第１の発明のマイクロ波処理装置を、前記インピーダンス調整手段による、前記周期構造体の意図する範囲のインピーダンス変動量は、近傍に置かれた前記被加熱物の加熱による変化に合わせて、調整するとしたものであり、被加熱物の影響補正を加熱の進捗による変化に対しても精度よく行うことができ、さまざまな形状・種類・量の異なる被加熱物に対して、表面波線路の特性を確保し、所望の状態に焦げ目付ができる。   According to a third aspect of the present invention, in the microwave processing apparatus of the first aspect of the invention, the impedance fluctuation amount in the range intended by the periodic structure is determined by the heating of the object to be heated placed in the vicinity. It is intended to adjust according to the change, and it can accurately correct the influence of the object to be heated even with the change due to the progress of heating, and for objects to be heated of various shapes, types and amounts The characteristics of the surface wave line can be ensured, and the desired state can be burnt.

第４の発明は、特に第１の発明のマイクロ波処理装置を、前記周期構造体は、金属製板を周期的に配置した構成とし、前記インピーダンス調整手段は、前記金属製板の突出高さを変動する構成としたものであり、被加熱物の影響を補正し、さまざまな形状・種類・量の異なる被加熱物に対して、表面波線路の特性を確保し、所望の状態に焦げ目付ができる。   According to a fourth aspect of the invention, in particular, the microwave processing apparatus according to the first aspect of the invention is configured such that the periodic structure has a structure in which metal plates are periodically arranged, and the impedance adjusting means has a protruding height of the metal plate. This is a configuration that varies the temperature of the object, corrects the influence of the object to be heated, ensures the characteristics of the surface wave line for the object to be heated of various shapes, types, and quantities, and burns to the desired state. Can do.

第５の発明は、特に第１の発明のマイクロ波処理装置を、前記周期構造体は、金属製板を周期的に配置した構成とし、前記インピーダンス調整手段は、前記金属製板間に誘電体を挿入する構成とし、前記インピーダンス調整手段は、前記周期構造体の前記被加熱物が設置された範囲の前記金属製板間に移動して挿入し補正するものであり、被加熱物の影響を補正し、さまざまな形状・種類・量の異なる被加熱物に対して、表面波線路の特性を確保し、所望の状態に焦げ目付ができる。
According to a fifth aspect of the present invention, in particular, the microwave processing apparatus according to the first aspect of the invention is configured such that the periodic structure has a structure in which metal plates are periodically arranged, and the impedance adjusting means is a dielectric between the metal plates. The impedance adjusting means moves and inserts between the metal plates in the range where the heated object of the periodic structure is installed , and corrects the influence of the heated object. It corrects and secures the characteristics of the surface wave line to the object to be heated with various shapes, types, and quantities, and can be burnt in a desired state.

第６の発明は、特に第１の発明のマイクロ波処理装置を、前記周期構造体は、櫛状金属を対向させた形状にスリットを設けた交差指構造とし、前記インピーダンス調整手段は、前記交差指構造のスリットに誘電体を挿入する構成とし、前記インピーダンス調整手段は、前記周期構造体の近傍に設置された前記被加熱物の影響を受ける前記交差指構造のスリットの所定部分に移動して挿入することで補正するものであり、被加熱物の影響を補正し、さまざまな形状・種類・量の異なる被加熱物に対して、表面波線路の特性を確保し、所望の状態に焦げ目付ができる。 According to a sixth aspect of the invention, in particular, the microwave processing apparatus according to the first aspect of the invention is characterized in that the periodic structure has a cross finger structure in which a slit is provided in a shape facing a comb-like metal, and the impedance adjusting means The dielectric structure is inserted into the slit of the finger structure , and the impedance adjusting means moves to a predetermined portion of the slit of the interdigitated structure that is affected by the heated object installed in the vicinity of the periodic structure. Insertion is corrected to correct the effect of the object to be heated, ensuring the characteristics of the surface wave line for the object to be heated of various shapes, types, and quantities, and scorching the desired state Can do.

以下、本発明の実施の形態について、図面を参照しながら説明する。なお、この実施の形態によって本発明が限定されるものではない。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments.

（実施の形態１）
図１は、本発明の第１の実施の形態におけるマイクロ波処理装置の構成図、図２は、本発明の第１の実施の形態におけるマイクロ波処理装置の導波管内斜視図である。 (Embodiment 1)
FIG. 1 is a configuration diagram of the microwave processing apparatus according to the first embodiment of the present invention, and FIG. 2 is a perspective view inside the waveguide of the microwave processing apparatus according to the first embodiment of the present invention.

図１および図２において、マイクロ波は発振源のマグネトロン１により発振し、導波管６により伝播される。導波管６内には、金属製板３が一定間隔で周期的に配置され、周期構造体２を構成している。金属製板３の突出長さは、インピーダンス調整手段５の位置により決まる。   In FIG. 1 and FIG. 2, the microwave is oscillated by the magnetron 1 as an oscillation source and propagated by the waveguide 6. In the waveguide 6, metal plates 3 are periodically arranged at regular intervals to constitute a periodic structure 2. The protruding length of the metal plate 3 is determined by the position of the impedance adjusting means 5.

マイクロ波は、導波管６から金属製板３上側を伝播して行く。金属製板３の突出長さや間隔などを最適にすることで、周期構造体２の範囲では、マイクロ波は遅波となり表面波モードで伝播する。   The microwave propagates from the waveguide 6 to the upper side of the metal plate 3. By optimizing the protruding length and interval of the metal plate 3, the microwave is delayed in the range of the periodic structure 2 and propagates in the surface wave mode.

被加熱物は設置台４により周期構造体２の近傍に配置される。導波管６の設置台４側は開放になっているので、表面波により、被加熱物の周期構造体２の近傍が強く加熱され、焦げ目付が行える。   The object to be heated is arranged in the vicinity of the periodic structure 2 by the installation table 4. Since the installation base 4 side of the waveguide 6 is open, the vicinity of the periodic structure 2 of the object to be heated is strongly heated by the surface wave and can be burnt.

以上のように構成されたマイクロ波処理装置について、以下その動作、作用を説明する。   About the microwave processing apparatus comprised as mentioned above, the operation | movement and an effect | action are demonstrated below.

図３は被加熱物を配置した本発明の第１の実施の形態におけるマイクロ波処理装置の構成図である。被加熱物７は周期構造体２の近傍に置かれるため、金属製板３先端近傍を伝播するマイクロ波に影響を及ぼし、表面波モードでの伝播を乱す。周期構造体の一部分２ａ（意図する範囲）のインピーダンス調整手段５の位置を変動し、被加熱物７の影響による表面波線路の特性変化を補正することで、表面波モードでの伝播を維持することができる。   FIG. 3 is a configuration diagram of the microwave processing apparatus according to the first embodiment of the present invention in which an object to be heated is arranged. Since the object to be heated 7 is placed in the vicinity of the periodic structure 2, it influences the microwave propagating in the vicinity of the tip of the metal plate 3 and disturbs the propagation in the surface wave mode. Propagation in the surface wave mode is maintained by changing the position of the impedance adjusting means 5 in the part 2a (intended range) of the periodic structure and correcting the change in the characteristics of the surface wave line due to the influence of the object 7 to be heated. be able to.

被加熱物７の種類や量などによって、周期構造体２を伝播する表面波モードへの影響が異なるので、補正量は被加熱物７に合わせて行う必要がある。また、加熱により被加熱物７の温度や形状が変わるため、調理の進行によりさらに補正する必要もある。   Since the influence on the surface wave mode propagating through the periodic structure 2 varies depending on the type and amount of the object 7 to be heated, the correction amount needs to be adjusted according to the object 7 to be heated. Moreover, since the temperature and shape of the article 7 to be heated change due to heating, it is necessary to further correct the cooking progress.

以上のように、被加熱物７の設置による影響で、周期構造体２上の表面波モードの乱れを補正できるため、さまざまな形状・種類・量の異なる被加熱物に対して、表面波線路の特性を確保し、所望の状態に焦げ目付ができる。   As described above, since the disturbance of the surface wave mode on the periodic structure 2 can be corrected by the influence of the installation of the heated object 7, the surface wave line can be applied to the heated objects having various shapes, types and amounts. The characteristic can be secured, and the desired state can be burnt.

（実施の形態２）
図４は被加熱物を配置した本発明の第２の実施の形態におけるマイクロ波処理装置の構成図、図５は本発明の第２の実施の形態におけるマイクロ波処理装置の導波管内斜視図である。 (Embodiment 2)
FIG. 4 is a configuration diagram of a microwave processing apparatus according to the second embodiment of the present invention in which an object to be heated is arranged, and FIG. 5 is a perspective view inside the waveguide of the microwave processing apparatus according to the second embodiment of the present invention. It is.

前述のように、マイクロ波は発振源のマグネトロン１により発振し、導波管６により伝播される。導波管６内には、金属製板３が一定間隔で周期的に配置され、周期構造体２を構成している。金属製板３の突出長さは、インピーダンス調整手段５の位置により決まる
。 As described above, the microwave is oscillated by the magnetron 1 as an oscillation source and propagated by the waveguide 6. In the waveguide 6, metal plates 3 are periodically arranged at regular intervals to constitute a periodic structure 2. The protruding length of the metal plate 3 is determined by the position of the impedance adjusting means 5.

マイクロ波は、導波管６から金属製板３上側を伝播して行く。金属製板３の突出長さや間隔などを最適にすることで、周期構造体２の範囲では、マイクロ波は遅波となり表面波モードで伝播する。   The microwave propagates from the waveguide 6 to the upper side of the metal plate 3. By optimizing the protruding length and interval of the metal plate 3, the microwave is delayed in the range of the periodic structure 2 and propagates in the surface wave mode.

そして、インピーダンス調整手段５は樹脂などの誘電体で構成され、被加熱物７を設置する範囲の金属製板３間に移動して挿入し、周期構造体の一部分２ｂでの補正を行う。   The impedance adjusting means 5 is made of a dielectric material such as a resin, and is moved and inserted between the metal plates 3 in the range where the object 7 to be heated is installed, thereby correcting the part 2b of the periodic structure.

以上のように、被加熱物７の設置による影響で、周期構造体２上の表面波モードの乱れを補正できるため、さまざまな形状・種類・量の異なる被加熱物に対して、表面波線路の特性を確保し、所望の状態に焦げ目付ができる。   As described above, since the disturbance of the surface wave mode on the periodic structure 2 can be corrected by the influence of the installation of the heated object 7, the surface wave line can be applied to the heated objects having various shapes, types and amounts. The characteristic can be secured, and the desired state can be burnt.

（実施の形態３）
図６は本発明の第３の実施の形態におけるマイクロ波処理装置の構成図である。導波管上には、櫛状金属を対向させた形状にスリット８ａを開けた交差指構造８が設けられる。 (Embodiment 3)
FIG. 6 is a block diagram of a microwave processing apparatus according to the third embodiment of the present invention. On the waveguide, there is provided an interdigitated structure 8 in which slits 8a are formed in a shape facing a comb-like metal.

前述のように、マイクロ波は発振源のマグネトロン１により発振し、導波管６により伝播される。導波管６内には、金属製板３が一定間隔で周期的に配置され、周期構造体２を構成している。金属製板３の突出長さは、インピーダンス調整手段５の位置により決まる。   As described above, the microwave is oscillated by the magnetron 1 as an oscillation source and propagated by the waveguide 6. In the waveguide 6, metal plates 3 are periodically arranged at regular intervals to constitute a periodic structure 2. The protruding length of the metal plate 3 is determined by the position of the impedance adjusting means 5.

マイクロ波は、導波管６から金属製板３上側を伝播して行く。金属製板３の突出長さや間隔などを最適にすることで、周期構造体２の範囲では、マイクロ波は遅波となり表面波モードで伝播する。   The microwave propagates from the waveguide 6 to the upper side of the metal plate 3. By optimizing the protruding length and interval of the metal plate 3, the microwave is delayed in the range of the periodic structure 2 and propagates in the surface wave mode.

そして、交差指構造８のスリット８ａの幅や間隔や長さなどを最適にすることで、交差指構造８をマイクロ波は遅波となり表面波モードで伝播する。このような、交差指構造８においても近傍に設置した被加熱物７の影響を受けるため、樹脂などの誘電体で構成されたインピーダンス調整手段５を交差指構造８のスリット８ａの必要部分に移動して挿入することで補正を行う。   Then, by optimizing the width, interval, length, and the like of the slits 8a of the cross finger structure 8, the microwaves propagate through the cross finger structure 8 in a surface wave mode. Since the cross finger structure 8 is also affected by the object 7 to be heated in the vicinity, the impedance adjusting means 5 made of a dielectric material such as resin is moved to a necessary portion of the slit 8 a of the cross finger structure 8. To correct it.

以上のように、被加熱物７の設置による影響で、周期構造体２上の表面波モードの乱れを補正できるため、さまざまな形状・種類・量の異なる被加熱物に対して、表面波線路の特性を確保し、所望の状態に焦げ目付ができる。   As described above, since the disturbance of the surface wave mode on the periodic structure 2 can be corrected by the influence of the installation of the heated object 7, the surface wave line can be applied to the heated objects having various shapes, types and amounts. The characteristic can be secured, and the desired state can be burnt.

また、この技術を使用して、空間へのマイクロ波放射を防止することで、加熱室の側壁および天面壁面のない電子レンジを製造できる可能性がある。   In addition, by using this technique to prevent microwave radiation to the space, there is a possibility that a microwave oven without the side wall and the top wall of the heating chamber can be manufactured.

以上のように、本発明にかかるマイクロ波処理装置は、種々の被加熱物を意図した加熱を行える装置を提供できるので、電子レンジで代表されるような誘電加熱を利用した加熱装置や生ゴミ処理機にも適用できる。   As described above, the microwave processing apparatus according to the present invention can provide an apparatus capable of heating various objects to be heated. Therefore, a heating apparatus or garbage using dielectric heating as typified by a microwave oven. It can also be applied to processing machines.

１ マグネトロン（発振源）
２ 周期構造体
３ 金属製板
４ 設置台
５ インピーダンス調整手段
６ 導波管
７ 被加熱物
８ 交差指構造
８ａ スリット 1 Magnetron (oscillation source)
2 Periodic Structure 3 Metal Plate 4 Installation Table 5 Impedance Adjusting Means 6 Waveguide 7 Heated Object 8 Crossed Finger Structure 8a Slit

Claims (6)

マイクロ波を発振する発振源と、前記マイクロ波を表面波モードで伝播する周期構造体と、前記周期構造体の近傍に被加熱物を設置するための設置台と、前記発振源の出力を制御する制御手段を有し、前記周期構造体のインピーダンスを変えるインピーダンス調整手段を備え、
前記インピーダンス調整手段により、前記周期構造体の範囲のうち前記被加熱物を置いた一部分の範囲のインピーダンスを変動させ、前記被加熱物の影響による前記周期構造体の特性変化を補正することを特徴とするマイクロ波処理装置。 An oscillation source that oscillates a microwave, a periodic structure that propagates the microwave in a surface wave mode, an installation base for installing an object to be heated in the vicinity of the periodic structure, and an output of the oscillation source are controlled Control means, comprising impedance adjusting means for changing the impedance of the periodic structure,
By the impedance-adjusting means, said out of range of the periodic structure varies the impedance of the range of a portion placing the object to be heated, Rukoto to correcting the characteristic change of said periodic structure due to the influence of the object to be heated A microwave processing apparatus. 前記インピーダンス調整手段による、前記周期構造体の意図する範囲のインピーダンスの変動量は、近傍に置かれた前記被加熱物により決めることを特徴とした請求項１に記載のマイクロ波処理装置。 The microwave processing apparatus according to claim 1, wherein the amount of impedance fluctuation in the range intended by the periodic structure by the impedance adjusting unit is determined by the object to be heated placed in the vicinity. 前記インピーダンス調整手段による、前記周期構造体の意図する範囲のインピーダンスの変動量は、近傍に置かれた前記被加熱物の加熱による変化に合わせて、調整することを特徴とした請求項１に記載のマイクロ波処理装置。 The amount of fluctuation of the impedance in the intended range of the periodic structure by the impedance adjusting means is adjusted according to a change due to heating of the heated object placed in the vicinity. Microwave processing equipment. 前記周期構造体は、金属製板を周期的に配置した構成とし、前記インピーダンス調整手段は、前記金属製板の突出高さを変動する構成とした請求項１に記載のマイクロ波処理装置。 The microwave processing apparatus according to claim 1, wherein the periodic structure has a configuration in which metal plates are periodically arranged, and the impedance adjusting unit has a configuration in which a protruding height of the metal plate is varied. 前記周期構造体は、金属製板を周期的に配置した構成とし、前記インピーダンス調整手段は、前記金属製板間に誘電体を挿入する構成とし、
前記インピーダンス調整手段は、前記周期構造体の前記被加熱物が設置された範囲の前記金属製板間に移動して挿入し補正する請求項１に記載のマイクロ波処理装置。 The periodic structure has a configuration in which metal plates are periodically arranged, and the impedance adjusting means has a configuration in which a dielectric is inserted between the metal plates ,
The microwave processing apparatus according to claim 1, wherein the impedance adjusting unit moves between the metal plates in a range where the object to be heated of the periodic structure is installed, and corrects by inserting the metal plate . 前記周期構造体は、櫛状金属を対向させた形状にスリットを設けた交差指構造とし、前記インピーダンス調整手段は、前記交差指構造のスリットに誘電体を挿入する構成とし、
前記インピーダンス調整手段は、前記周期構造体の近傍に設置された前記被加熱物の影響を受ける前記交差指構造のスリットの所定部分に移動して挿入することで補正する請求項
１に記載のマイクロ波処理装置。
The periodic structure has a crossed finger structure in which a slit is provided in a shape facing a comb-shaped metal, and the impedance adjusting means is configured to insert a dielectric into the slit of the crossed finger structure ,
2. The micro of claim 1, wherein the impedance adjusting unit corrects the impedance by moving and inserting the slit into a predetermined portion of the slit of the interdigitated structure that is affected by the heated object installed in the vicinity of the periodic structure. Wave processing device.
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