JP6239367B2 - Workpiece processing apparatus and work cutting method - Google Patents

Description

  The present invention relates to a workpiece processing apparatus and a workpiece cutting method.

  Currently, a machining method called drive last is often used in the base processing and deburring of workpieces. Drive last is a processing method for performing surface treatment of a workpiece by injecting powder for grinding onto the workpiece using the force of compressed air.

  In the drive last, processing proceeds by accumulation of minute impacts acting on the workpiece from the grinding powder, so that problems such as cracks and chipping are less likely to occur in processing of hard and brittle materials such as glass and ceramics. Therefore, recently, drive last has been put into practical use for cutting or grooving hard and brittle materials such as glass and ceramics.

  However, when drive last is performed on a workpiece made of a dielectric material such as glass, static electricity is generated due to friction between the workpiece and the powder for grinding. Therefore, for example, if a glass substrate for a touch panel including a circuit such as a touch panel sensor is to be cut by drive last, the circuit may be damaged by generated static electricity.

  By the way, a processing method called liquid honing is often used in workpiece ground processing and deburring. Liquid honing is a processing method for performing surface treatment of a workpiece by injecting a liquid containing powder for grinding onto the workpiece using the force of compressed air (see, for example, Patent Document 1).

  Even in liquid honing, processing proceeds due to accumulation of minute impacts acting on the workpiece from the grinding powder, so that problems such as cracking and chipping are unlikely to occur in processing of brittle materials such as glass and ceramics. In addition, the liquid honing has an advantage that the generation of static electricity during processing is prevented because the grinding powder is sprayed onto the workpiece together with the liquid.

  However, liquid honing has a lower processing force than drive last, and it is difficult to process the workpiece deeply in the thickness direction. Therefore, liquid honing has not been put to practical use in applications where a workpiece is cut or grooved.

JP 2011-115889 A

  The present inventors diligently studied the development of a workpiece processing apparatus capable of effectively cutting or grooving a workpiece by injecting a liquid containing powder for grinding onto the workpiece using the force of compressed air. As a result, the liquid containing the grinding powder is ejected from the ejection nozzle of the ejection nozzle, and the workpiece is moved relative to the ejection nozzle so as to pass the position facing the ejection port, and the grinding powder thus ejected is ejected. It has been found that the work can be cut or grooved effectively by concentrating and continuously colliding the liquid containing the liquid onto the linear area facing the injection port on the work.

  In response to such knowledge, a configuration in which a plurality of known cylindrical nozzles (inner diameter: 8 mm to 10 mm) are arranged at intervals in parallel to the moving direction of the workpiece is also conceivable. In order to dispose the cylindrical nozzle, it is necessary to secure a wide area, the moving distance of the workpiece becomes long, and there is a disadvantage that the space efficiency is deteriorated.

  The present invention has been created based on the above findings. An object of the present invention is a work processing apparatus that is space-saving and can effectively cut or grooving a work by injecting a liquid containing powder for grinding onto the work using the force of compressed air and It is to provide a work cutting method.

  The present invention includes a flat nozzle body that defines an internal space that opens at a jet port extending in a longitudinal direction, a powder-containing liquid introduction portion for grinding that is connected so as to communicate with the internal space of the flat nozzle body, An air jet forming nozzle that defines an air jet generating space that opens in the internal space of the flat nozzle main body, an air introducing portion connected to communicate with the air jet generating space of the air jet forming nozzle, and the air introducing The control device that controls the air introduction amount of the part, the flat nozzle main body and the work, the direction parallel to the longitudinal direction of the injection port or the injection so that the work passes through the position facing the injection port And a moving device that relatively moves in a direction inclined by a predetermined acute angle with respect to the longitudinal direction of the mouth. It is an engineering equipment.

  According to the present invention, the liquid containing the grinding powder is introduced into the internal space of the flat nozzle body from the grinding powder-containing liquid introduction section, and the air introduction section introduces the liquid into the air jet generation space of the air jet forming nozzle. By introducing the air, the liquid containing the introduced grinding powder is ejected in a strip shape from the ejection port of the flat nozzle body using the pressure of the air. Then, the flat nozzle main body and the workpiece are moved relative to each other in a direction parallel to the longitudinal direction of the ejection port or in a direction inclined by a predetermined acute angle with respect to the longitudinal direction of the ejection port, whereby grinding is performed from the ejection port. The liquid containing the powder concentrates and collides continuously in a linear region facing the injection port on the workpiece. As a result, the workpiece can be deeply cut in the thickness direction even when the processing pressure is low when the liquid containing the powder for grinding is jetted onto the workpiece using the force of compressed air. Can be cut or grooved. For example, when the workpiece is made of a hard and brittle material such as glass or ceramics, it is possible to prevent the occurrence of problems such as cracking and chipping by proceeding with the accumulation of minute impacts acting on the workpiece from the powder for grinding. . In addition, since the grinding powder is sprayed onto the workpiece together with the liquid, generation of static electricity during processing can be prevented. In addition, according to the present invention, since the liquid containing the powder for grinding is ejected in a strip shape from the ejection port extending in the longitudinal direction, it is not necessary to dispose a plurality of ejection nozzles at intervals from each other, thereby saving space.

  Preferably, the air jet generation space of the air jet forming nozzle includes two partial spaces divided in a longitudinal direction of the injection port by a dividing member, and the air introduction part is individually provided in each partial space. It has two unit air introduction parts connected so that it may communicate with, and the control device controls each unit air introduction part individually, respectively. According to such an aspect, the injection pressure of the liquid containing the powder for grinding injected from the injection port can be individually controlled according to the position in the longitudinal direction of the injection port.

  Alternatively, the air jet generation space of the air jet forming nozzle includes three or more partial spaces divided in the longitudinal direction of the injection port by a dividing member, and the air introduction part is in each partial space. It has three or more unit air introduction parts connected so that it may communicate individually, and the control device may control each unit air introduction part individually. Also according to such an aspect, the injection pressure of the liquid containing the powder for grinding injected from the injection port can be individually controlled according to the position in the longitudinal direction of the injection port.

  In these cases, more preferably, the control device sets the air introduction pressure to the partial space when the work is not opposed to the region corresponding to each partial space of the injection port, The pressure is lower than the air introduction pressure into the partial space when facing each other. According to such an aspect, the overall air consumption can be reduced while the workpiece machining efficiency is maintained. Further, it is possible to prevent the liquid containing the grinding powder sprayed to the outside of the workpiece from colliding with other constituent members of the apparatus and damaging the other constituent members.

  Preferably, the air jet generation space of the air jet forming nozzle includes a plurality of positions including a position corresponding to an end portion of the partition member on the injection port side with an interval in the longitudinal direction of the injection port. The opening at a position corresponding to the end of the sorting member on the injection port side is communicated with both of the two adjacent partial spaces via the sorting member. According to such an aspect, since the air jet generation space is opened at a plurality of positions at intervals in the longitudinal direction of the injection port, the air jet generation space is uniform in the longitudinal direction from the air jet generation space to the internal space of the flat nozzle body. Air can be introduced at a flow rate. Moreover, since the opening part in the position corresponding to the edge part by the side of the injection port of a division member is connected to both of two adjacent partial spaces via the said division member, it injects in the area | region where the said two partial spaces switch It is possible to prevent the turbulent liquid from being disturbed.

  Specifically, for example, the length of the injection port in the longitudinal direction is 35 mm to 90 mm, and the length in the width direction perpendicular to the longitudinal direction is 0.8 mm to 2.4 mm.

  Further, specifically, for example, when the work faces a region corresponding to each partial space in the ejection port, the air introduction pressure from the unit air introduction portion communicating with the partial space to the partial space is 0.2 MPa to 0.5 MPa.

  Further, the present invention provides a flat nozzle main body that defines an internal space that opens at a jet port that extends in the longitudinal direction and the workpiece, and the longitudinal direction of the jet port so that the workpiece passes through a position facing the jet port. A relative movement in a direction parallel to the longitudinal direction or a direction inclined by a predetermined acute angle with respect to the longitudinal direction of the injection port, and introducing a liquid containing powder for grinding into the internal space of the flat nozzle body, Introducing air into the air jet generation space of an air jet forming nozzle that defines an air jet generation space that opens in the internal space of the flat nozzle body, and the grinding powder from the injection port toward the workpiece And a step of cutting the workpiece in a direction parallel to the longitudinal direction of the injection port. It is a work cutting method to.

  According to the present invention, the liquid containing the powder for grinding is introduced into the internal space of the flat nozzle body, and the air is introduced into the air jet generation space of the air jet forming nozzle, thereby introducing the introduced grinding material. The liquid containing the powder is ejected in a band shape from the ejection port of the flat nozzle body using the pressure of air. Then, the flat nozzle main body and the workpiece are moved relative to each other in a direction parallel to the longitudinal direction of the ejection port or in a direction inclined by a predetermined acute angle with respect to the longitudinal direction of the ejection port, whereby grinding is performed from the ejection port. The liquid containing the powder concentrates and collides continuously in a linear region facing the injection port on the workpiece. As a result, the workpiece can be deeply cut in the thickness direction even when the processing pressure is low when the liquid containing the powder for grinding is jetted onto the workpiece using the force of compressed air. Can be cut. For example, when the workpiece is made of a hard and brittle material such as glass or ceramics, it is possible to prevent the occurrence of problems such as cracking and chipping by proceeding with the accumulation of minute impacts acting on the workpiece from the powder for grinding. . In addition, since the grinding powder is sprayed onto the workpiece together with the liquid, generation of static electricity during processing can be prevented. In addition, according to the present invention, since the liquid containing the powder for grinding is ejected in a strip shape from the ejection port extending in the longitudinal direction, it is not necessary to dispose a plurality of ejection nozzles at intervals from each other, thereby saving space.

  Preferably, the air jet generation space of the air jet forming nozzle includes two partial spaces divided in a longitudinal direction of the injection port by a dividing member, and in the cutting step, air to each partial space is formed. The introduction pressure of each is controlled individually. According to such an aspect, the injection pressure of the liquid containing the powder for grinding injected from the injection port can be individually controlled according to the position in the longitudinal direction of the injection port.

  Alternatively, the air jet generation space of the air jet forming nozzle includes three or more partial spaces divided in the longitudinal direction of the injection port by a dividing member, and in the cutting step, The air introduction pressure may be individually controlled. Also according to such an aspect, the injection pressure of the liquid containing the powder for grinding injected from the injection port can be individually controlled according to the position in the longitudinal direction of the injection port.

  In these cases, more preferably, in the cutting step, the work introduces the air introduction pressure into the partial space when the work does not face the region corresponding to each partial space in the injection port. Lower than the pressure of air introduced into the partial space when facing. According to such an aspect, the overall air consumption can be reduced while the workpiece machining efficiency is maintained. Further, it is possible to prevent the liquid containing the grinding powder sprayed to the outside of the workpiece from colliding with other constituent members of the apparatus and damaging the other constituent members.

  Preferably, the air jet generation space of the air jet forming nozzle includes a plurality of positions including a position corresponding to an end portion of the partition member on the injection port side with an interval in the longitudinal direction of the injection port. The opening at a position corresponding to the end of the sorting member on the injection port side is communicated with both of the two adjacent partial spaces via the sorting member. According to such an aspect, since the air jet generation space is opened at a plurality of positions at intervals in the longitudinal direction of the injection port, the air jet generation space is uniform in the longitudinal direction from the air jet generation space to the internal space of the flat nozzle body. Air can be introduced at a flow rate. Moreover, since the opening part in the position corresponding to the edge part by the side of the injection port of a division member is connected to both of two adjacent partial spaces via the said division member, it injects in the area | region where the said two partial spaces switch It is possible to prevent the turbulent liquid from being disturbed.

  Specifically, for example, the length of the injection port in the longitudinal direction is 35 mm to 90 mm, and the length in the width direction perpendicular to the longitudinal direction is 0.8 mm to 2.4 mm.

  Specifically, for example, when the work faces a region corresponding to each partial space in the injection port, air is introduced into the partial space with an introduction pressure of 0.2 MPa to 0.5 MPa.

  According to the present invention, the liquid containing the grinding powder is introduced into the internal space of the flat nozzle body from the grinding powder-containing liquid introduction section, and the air introduction section introduces the liquid into the air jet generation space of the air jet forming nozzle. By introducing the air, the liquid containing the introduced grinding powder is ejected in a strip shape from the ejection port of the flat nozzle body using the pressure of the air. Then, the flat nozzle main body and the workpiece are moved relative to each other in a direction parallel to the longitudinal direction of the ejection port or in a direction inclined by a predetermined acute angle with respect to the longitudinal direction of the ejection port, whereby grinding is performed from the ejection port. The liquid containing the powder concentrates and collides continuously in a linear region facing the injection port on the workpiece. As a result, the workpiece can be deeply cut in the thickness direction even when the processing pressure is low when the liquid containing the powder for grinding is jetted onto the workpiece using the force of compressed air. Can be cut or grooved. For example, when the workpiece is made of a hard and brittle material such as glass or ceramics, it is possible to prevent the occurrence of problems such as cracking and chipping by proceeding with the accumulation of minute impacts acting on the workpiece from the powder for grinding. . In addition, since the grinding powder is sprayed onto the workpiece together with the liquid, generation of static electricity during processing can be prevented. In addition, according to the present invention, since the liquid containing the powder for grinding is ejected in a strip shape from the ejection port extending in the longitudinal direction, it is not necessary to dispose a plurality of ejection nozzles at intervals from each other, thereby saving space.

FIG. 1 is a schematic perspective view showing a workpiece machining apparatus according to a first embodiment of the present invention. FIG. 2 is a schematic front view showing the workpiece machining apparatus of FIG. 3 is an enlarged schematic front view showing the flat nozzle body and the air jet forming nozzle in the workpiece machining apparatus of FIG. 4 is a cross-sectional view taken along line AA of the flat nozzle body and the air jet forming nozzle of FIG. FIG. 5A to FIG. 5E are diagrams for explaining a process of cutting a workpiece using the workpiece machining apparatus of FIG. FIG. 6 is a schematic front view showing a workpiece machining apparatus according to the second embodiment of the present invention. FIG. 7 is an enlarged schematic front view showing the flat nozzle body and the air jet forming nozzle in the workpiece machining apparatus of FIG. FIG. 8 is an enlarged schematic view showing a portion surrounded by a one-dot chain line denoted by B in the air jet forming nozzle of FIG. FIG. 9A to FIG. 9E are views for explaining a process of cutting a workpiece using the workpiece machining apparatus of FIG. FIG. 10 is an enlarged schematic front view showing the flat nozzle body and the air jet forming nozzle in the workpiece machining apparatus according to the fourth embodiment of the present invention.

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
FIG. 1 is a schematic perspective view showing a workpiece machining apparatus according to a first embodiment of the present invention. FIG. 2 is a schematic front view showing the workpiece machining apparatus of FIG.

  As shown in FIGS. 1 and 2, the workpiece machining apparatus 10 according to the present embodiment includes a flat nozzle body 12 that defines an internal space 32 that opens at an ejection port 11 that extends in the longitudinal direction, and an internal space of the flat nozzle body 12. A powder-containing liquid introducing portion for grinding 14 connected so as to communicate with the air nozzle 32, an air jet forming nozzle 13 for defining an air jet generating space 33 opened in the internal space 32 of the flat nozzle body 12, and an air jet forming nozzle The air introduction part 15 connected so as to communicate with the 13 air jet generation spaces 33, the control device 16 for controlling the air introduction amount of the air introduction part 15, the flat nozzle main body 12 and the work 20 are connected to the work 20 Is moved in a direction parallel to the longitudinal direction of the injection port 11 so that the nozzle passes through the position facing the injection port 11. And 18, and a.

  FIG. 3 is an enlarged schematic front view showing the flat nozzle body 12 and the air jet forming nozzle 13 of the present embodiment. 4 is a cross-sectional view taken along line AA of the flat nozzle body 12 and the air jet forming nozzle 13 of FIG.

  As shown in FIGS. 3 and 4, the flat nozzle main body 12 has a main body 12a that defines an internal space that opens at both ends in the left-right direction in FIG. 3 and that also opens at the upper and lower ends, and the main body 12a. A cylindrical portion 12b having a rectangular shape in plan view that defines a slit-like internal space that is communicated with the internal space of the main body portion 12a. In the present embodiment, the internal space 32 of the flat nozzle body 12 includes the internal space of the main body portion 12a and the internal space of the cylindrical portion 12b. A seal member 41 is disposed in a gap between the inner peripheral surface of the lower end portion of the main body portion 12a and the outer peripheral surface of the upper end portion of the cylindrical portion 12b so as to seal the gap.

  In the present embodiment, the injection port 11 of the flat nozzle body 12 is formed from the opening at the lower end of the cylindrical portion 12b. The length of the ejection port 11 in the longitudinal direction is, for example, 35 mm to 90 mm, and the length in the width direction perpendicular to the longitudinal direction is, for example, 0.8 mm to 2.4 mm.

  On the other hand, as shown in FIGS. 3 and 4, the air jet forming nozzle 13 is formed integrally with a nozzle portion 13 a that defines a slit-like inner space and an upper end portion of the nozzle portion 13 a, and the inner space of the nozzle portion 13 a. And a flange portion 13b that defines an internal space that opens at both ends in the left-right direction in FIG. In the present embodiment, the air jet generation space 33 of the air jet forming nozzle 13 includes an internal space of the nozzle portion 13a and an internal space of the flange portion 13b.

  In the present embodiment, as shown in FIGS. 3 and 4, a plurality of openings 35 are formed at the lower end portion of the nozzle portion 13 a at intervals in the longitudinal direction of the injection port 11. In other words, the air jet generation space 33 of the air jet forming nozzle 13 is opened at a plurality of positions at intervals in the longitudinal direction of the injection port 11.

  As shown in FIGS. 3 and 4, the nozzle portion 13 a of the air jet forming nozzle 13 is inserted into the opening of the upper end portion of the main body portion 12 a of the flat nozzle main body 12, and the air jet generation space of the air jet forming nozzle 13. 33 is communicated with the internal space 32 of the flat nozzle body 12 through a plurality of openings 35 formed at the lower end of the nozzle portion 13a. A seal member 42 is disposed in a gap between the upper surface of the main body portion 12a of the flat nozzle main body 12 and the lower surface of the flange portion 13b of the air jet forming nozzle 13 so as to seal the gap.

  In this Embodiment, as shown in FIG.3 and FIG.4, the front-end | tip of the lower end part of the nozzle part 13a is extended to the inner side of opening of the upper end part of the cylindrical part 12b. Thereby, each of the plurality of openings 35 at the lower end of the nozzle portion 13a faces the injection port 11 at the lower end of the cylindrical portion 12b via the internal space of the cylindrical portion 12b.

  As shown in FIG. 2, the powder-containing liquid introducing portion 14 for grinding according to the present embodiment is connected to the liquid containing portion 14a for containing the liquid containing the powder for grinding, and the liquid containing portion 14a. A liquid feed pump 14b for feeding the liquid in the section 14a at a predetermined pressure.

  As the liquid stored in the liquid storage portion 14a, for example, water is used, and the powder for grinding contained in the liquid is, for example, particle size # 120 (particle diameter 120 μm to 200 μm) to # 600 (particle diameter 50 μm). ˜80 μm) alumina particles are used. Note that a rust inhibitor may be added to the liquid.

  In the present embodiment, as shown in FIG. 2, the liquid feed pump 14 b is connected to the openings at both ends in the left-right direction of the main body 12 a of the flat nozzle main body 12, and the inside of the flat nozzle main body 12 from each opening A liquid is introduced into the space 32 at a predetermined pressure. The pressure for introducing the liquid from the liquid feed pump 14b to the internal space 32 of the flat nozzle body 12 may be about atmospheric pressure, for example, 0.1 MPa.

  As shown in FIG. 2, the air introduction unit 15 of the present embodiment includes a compressor 154 that compresses air, a regulator 15 a that is connected to the compressor 154 and adjusts the air compressed by the compressor 154 to a predetermined pressure, An electromagnetic valve 15b that is connected to the regulator 15a and switches between opening and closing of the air flow path whose pressure is adjusted by the regulator 15a. The electromagnetic valve 15b is shown in FIG. 2 of the flange portion 13b of the air jet forming nozzle 13. Are connected to openings at both ends in the left-right direction. The pressure of the air output from the regulator 15a is sufficiently larger than the atmospheric pressure so that an air jet is formed in each opening 35 of the air jet forming nozzle 13, and is, for example, 0.2 MPa to 0.5 MPa. .

  The control device 16 is connected to the electromagnetic valve 15b of the air introduction unit 15, and switches between opening and closing of the electromagnetic valve 15b. The control device 16 is configured by, for example, a computer system including a storage unit that stores a control program and the like.

  The control device 16 according to the present embodiment uses the air introduction pressure to the air jet generation space 33 when the work 20 does not face the injection port 11 of the flat nozzle body 12, and the work 20 when the work 20 faces the injection port 11. The pressure is lower than the air introduction pressure into the air jet generation space 33. More specifically, the control device 16 opens the electromagnetic valve 15b of the air introduction unit 15 when the workpiece 20 faces the injection port 11 and opens the electromagnetic valve 15b of the air introduction unit 15 when the workpiece 20 does not face the injection port 11. The electromagnetic valve 15b is closed. In the present embodiment, “when the workpiece 20 faces the ejection port 11” means when at least a part of the workpiece 20 faces at least a part of the ejection port 11. “When not facing the mouth 11” means when there is no portion facing each other between the workpiece 20 and the ejection port 11.

  As shown in FIG. 2, the air introduction unit 15 of the present embodiment includes a backflow prevention air introduction unit that prevents liquid from flowing from the internal space 32 of the flat nozzle body 12 into the air jet generation space 33 of the air jet forming nozzle 13. 153 is provided.

  Specifically, the backflow prevention air introduction unit 153 is connected to the compressor 154, for example, a regulator 153a that adjusts the air compressed by the compressor 154 to a predetermined pressure, the regulator 153a, and the regulator 153a. An electromagnetic valve 153b for switching the opening and closing of the flow path of the air whose pressure is adjusted. The electromagnetic valve 153b is an opening at both end portions in the left-right direction in FIG. 2 of the flange portion 13b of the air jet forming nozzle 13. It is connected to the. The pressure of the air output from the regulator 15a is smaller than the pressure of air introduced from the air introduction part 15 into the air jet generation space 33, and the internal space 32 of the flat nozzle body 12 from the powder-containing liquid introduction part 14 for grinding. The pressure is larger than the liquid introduction pressure, for example, 0.15 MPa.

  As shown in FIGS. 1 and 2, the moving device 18 of the present embodiment is spaced apart in a direction parallel to the longitudinal direction of the injection port 11 in the same horizontal plane facing the injection port 11 of the flat nozzle body 12. And a plurality of rotating rollers 18a and a rotation driving mechanism (for example, a motor) that rotates and rotates each rotating roller 18a. The central axis of each rotating roller 18 a is oriented parallel to the width direction perpendicular to the longitudinal direction of the injection port 11.

  On the rotating roller 18 a of the moving device 18, a chuck device 21 that holds the workpiece 20 is horizontally arranged and supported. As the chuck device 21, for example, a publicly known vacuum chuck is used.

  The respective rotation rollers 18a are driven to rotate clockwise, for example, in FIG. 2 by the rotation drive mechanism of the moving device 18, so that the chuck device 21 supported on the rotation roller 18a is moved in the right direction in FIG. Therefore, it is linearly moved in a direction parallel to the longitudinal direction of the injection port 11.

  In the present embodiment, the control device 16 calculates the movement amount of the workpiece 20 held by the chuck device 21 from the rotation amount of the rotating roller 18a.

Next, the operation of the present embodiment having such a configuration will be described.
As shown in FIGS. 1 and 2, first, the workpiece 20 is placed and held on the upper surface of the chuck device 21. The workpiece 20 is, for example, a glass substrate having a square shape in plan view. The thickness of the work 20 is, for example, 0.8 mm, and the length of one side of the work 20 is, for example, 80 mm. In the state where the workpiece 20 is held on the upper surface of the chuck device 21, the distance in the height direction between the surface of the workpiece 20 and the ejection port 11 is, for example, 20 mm.

  When each rotary roller 18a is rotationally driven by the rotational drive mechanism of the moving device 18, the chuck device 21 supported on the rotary roller 18a is brought together with the workpiece 20 held by the chuck device 21 together with the injection port. 11 is linearly moved in a direction parallel to the longitudinal direction. The moving speed of the chuck device 21 by the moving device 18 is, for example, 20 mm / sec to 200 mm / sec. The control device 16 calculates the amount of movement of the workpiece 20 held by the chuck device 21 from the amount of rotation of the rotating roller 18a.

  The liquid containing the grinding powder is introduced into the internal space 32 of the flat nozzle main body 12 from the grinding powder-containing liquid introduction part 14 at a pressure of, for example, 0.1 MPa, and the solenoid valve of the backflow prevention air introduction part 153 is introduced. 153b is opened, and air is introduced from the backflow prevention air introduction portion 153 into the air jet generation space 33 of the air jet forming nozzle 13 at a pressure of, for example, 0.15 MPa.

  The air introduced into the air jet generation space 33 flows into the internal space 32 of the flat nozzle main body 12 from each opening 35 of the air jet forming nozzle 13. The liquid containing the powder for grinding introduced into the internal space 32 of the flat nozzle main body 12 is 0.15 MPa from the injection port 11 using the pressure of the air flowing from each opening 35 of the air jet forming nozzle 13. It flows out in a strip shape with a moderate pressure (see FIG. 5A).

  Next, as shown in FIG. 5B to FIG. 5D, when the workpiece 20 is opposed to the injection port 11 during the movement of the workpiece 20 by the moving device 18, the air introduction section 15 is controlled by the control device 16. The electromagnetic valve 15b is opened, and air is introduced from the air introduction unit 15 into the air jet generation space 33 at a pressure of 0.2 MPa to 0.5 MPa, for example.

  The air introduced into the air jet generation space 33 is ejected from the openings 35 of the air jet forming nozzle 13 into the internal space 32 of the flat nozzle body 12. In the present embodiment, since each opening 35 is opened at a plurality of positions at intervals in the longitudinal direction of the injection port 11, the longitudinal direction from each air jet generation space 33 to the internal space 32 of the flat nozzle body 12. The air is ejected at a uniform flow rate.

  The liquid containing the powder for grinding introduced into the internal space 32 of the flat nozzle main body 12 is 0.2 MPa from the injection port 11 using the pressure of the air discharged from each opening 35 of the air jet forming nozzle 13. It is sprayed in a strip shape toward the workpiece 20 with a strong pressure of about 0.5 MPa.

  During the movement of the workpiece 20 by the moving device 18, the liquid ejected from the ejection port 11 concentrates continuously on a linear region facing the ejection port 11 on the workpiece 20 and collides continuously. The work 20 can be deeply cut in the thickness direction due to accumulation of impact from the grinding powder in the liquid, and as a result, the work 20 can be cut.

  Next, as shown in FIG. 6 (e), when the workpiece 20 does not face the injection port 11 during the movement of the workpiece 20 by the moving device 18, the control device 16 causes the electromagnetic valve 15 b of the air introduction unit 15 to be moved. In the closed state, the introduction of air from the air introduction part 15 to the air jet generation space 33 is stopped. Thereby, the ejection of the liquid from the ejection port 11 is stopped. At this time, since air is introduced into the air jet generation space 33 from the backflow prevention air introduction portion 153, the backflow of liquid from the internal space 32 of the flat nozzle body 12 to the air jet generation space 33 is prevented.

  As described above, according to the present embodiment, the liquid containing the grinding powder is introduced from the grinding powder-containing liquid introduction part 14 into the internal space 32 of the flat nozzle body 12 and the air introduction part 15. Since air is introduced into the air jet generation space 33 of the air jet forming nozzle 13 from the air, the liquid containing the introduced powder for grinding is strip-shaped from the injection port 11 of the flat nozzle body 12 using the pressure of the air. Is injected into. Then, the flat nozzle body 12 and the workpiece 20 are relatively moved in a direction parallel to the longitudinal direction of the ejection port 11, so that the liquid containing the grinding powder ejected from the ejection port 11 is transferred onto the workpiece 20. Concentrating on a linear region facing the injection port 11 continuously. Thereby, even if it is the comparatively low processing pressure at the time of injecting the liquid containing the powder for grinding to the workpiece | work 20 using the force of compressed air, the workpiece | work 20 can be deeply shaved in the thickness direction, and a result Can be cut or grooved automatically. Even if the workpiece 20 is a glass substrate made of a hard and brittle material, it is possible to prevent problems such as cracking and chipping by proceeding with the accumulation of minute impacts acting on the workpiece 20 from the powder for grinding. In addition, since the grinding powder is sprayed onto the workpiece 20 together with the liquid, generation of static electricity during processing can be prevented.

  In addition, according to the present embodiment, since the liquid containing the powder for grinding is ejected in a strip shape from the ejection port 11 extending in the longitudinal direction, it is not necessary to arrange a plurality of ejection nozzles at intervals, saving space. It is.

Next, a second embodiment of the present invention will be described with reference to FIGS.
FIG. 6 is a schematic front view showing a workpiece machining apparatus according to the second embodiment of the present invention. FIG. 7 is an enlarged schematic front view showing the flat nozzle body and the air jet forming nozzle in the workpiece machining apparatus of FIG.

  As shown in FIGS. 6 and 7, in the workpiece machining apparatus 10 ′ according to the second embodiment, the air jet generating space 33 ′ of the air jet forming nozzle 13 ′ is formed in the longitudinal direction of the injection port 11 by the dividing member 17. It includes two divided partial spaces (hereinafter referred to as a first partial space 331 and a second partial space 332), and is connected so that the air introduction part 15 ′ communicates with each of the partial spaces 331 and 332 individually. The control unit 16 ′ has two unit air introduction units 151 and 152 (hereinafter referred to as a first unit air introduction unit 151 and a second unit air introduction unit 152). It is designed to be controlled individually.

  More specifically, as shown in FIG. 7, the partition member 17 is provided so as to extend in the vertical direction inside the air jet forming nozzle 13 ′, and the upper end portion of the partition member 17 is connected to the flange portion 13 b. It is firmly fixed to the upper end.

  FIG. 8 is an enlarged schematic view showing a portion surrounded by a one-dot chain line denoted by B in the air jet forming nozzle of FIG. As shown in FIG. 8, the air jet generation space 33 is also open at a position corresponding to the end portion (that is, the lower end portion) on the injection port 11 side of the sorting member 17, and the injection member 11 side of the sorting member 17. The opening 35 at a position corresponding to the end of the first and second partial spaces 331 and 332 communicates with each other via the partition member 17. For example, when the pressure in the first partial space 331 and the pressure in the second partial space 332 are different, the pressure in the first partial space 331 from the opening 35 at the position corresponding to the end of the sorting member 17 on the injection port 11 side. Air is ejected at a pressure between the first partial space 331 and the second partial space 332, and thereby the liquid ejected from the ejection port 11 in the region where the first partial space 331 and the second partial space 332 are switched. Disturbance can be prevented from occurring.

  As shown in FIG. 6, each of the unit air introduction sections 151 and 152 is connected to a compressor 154, and regulators 151a and 152a for adjusting the air compressed by the compressor 154 to a predetermined pressure and regulators 151a and 152a. And electromagnetic valves 151b and 152b that are connected and switch between opening and closing of the air flow path whose pressure is adjusted by the regulators 151a and 152a. In the present embodiment, the solenoid valve 151b of the first unit air introduction part 151 is connected to the opening at the left end in FIG. 6 of the flange part 13b of the air jet forming nozzle 13, and the second unit air introduction part 152 The electromagnetic valve 152b is connected to the opening at the right end in FIG. The pressure of the air output from each regulator 151a, 152a is sufficiently larger than the atmospheric pressure so that an air jet is formed in each opening 35 of the air jet forming nozzle 13, for example, 0.2 MPa to 0.2 MPa. 5 MPa.

  As shown in FIG. 6, the control device 16 ′ is individually connected to the electromagnetic valves 151 b and 152 b of the unit air introduction portions 151 and 152, respectively, so that the opening and closing of the electromagnetic valves 151 b and 152 b are individually switched. It has become.

  The control device 16 ′ of the present embodiment supplies the work 20 to the partial spaces 331 and 332 when the work 20 does not face the regions 111 and 112 corresponding to the partial spaces 331 and 332 in the injection nozzle 11 of the flat nozzle body 12. The air introduction pressure is made lower than the air introduction pressure to the air jet generation space 33 when the workpiece 20 faces the regions 111 and 112. More specifically, the control device 16 ′ communicates with the first partial space 331 when the work 20 faces an area corresponding to the first partial space 331 (hereinafter, referred to as the first area 111) in the injection port 11. The electromagnetic valve 151b of the first unit air introduction part 151 is opened, and the electromagnetic valve 151b of the first unit air introduction part 151 is closed when the workpiece 20 does not face the first region 111 of the injection port 11. It has become. In addition, the control device 16 ′ is a second unit that communicates with the second partial space 332 when the workpiece 20 faces an area corresponding to the second partial space 332 (hereinafter, referred to as the second area 112) in the ejection port 11. When the electromagnetic valve 152b of the air introduction part 152 is opened and the workpiece 20 does not face the second region 112 of the injection port 11, the electromagnetic valve 152b of the second unit air introduction part 152 is closed. . In the present embodiment, “when the workpiece 20 faces the first region 111 (second region 112)” means that at least a part of the workpiece 20 is at least one of the first region 111 (second region 112). Means “when the workpiece 20 does not face the first region 111 (second region 112)”, and means “when the workpiece 20 does not face the first region 111 (second region 112)”. It means when there is no part to do.

  Other configurations are substantially the same as those of the first embodiment shown in FIGS. 6 to 9, the same parts as those of the first embodiment shown in FIGS. 1 to 5 are denoted by the same reference numerals, and detailed description thereof is omitted.

Next, the operation of the present embodiment having such a configuration will be described.
As shown in FIG. 6, first, the workpiece 20 is placed and held on the upper surface of the chuck device 21. The workpiece 20 is, for example, a glass substrate having a square shape in plan view. The thickness of the work 20 is, for example, 0.8 mm, and the length of one side of the work 20 is, for example, 80 mm. In the state where the workpiece 20 is held on the upper surface of the chuck device 21, the distance in the height direction between the surface of the workpiece 20 and the ejection port 11 is, for example, 20 mm.

  When each rotary roller 18a is rotationally driven by the rotational drive mechanism of the moving device 18, the chuck device 21 supported on the rotary roller 18a is brought together with the workpiece 20 held by the chuck device 21 together with the injection port. 11 is linearly moved in a direction parallel to the longitudinal direction. The moving speed of the chuck device 21 by the moving device 18 is, for example, 20 mm / sec to 200 mm / sec. The control device 16 ′ calculates the movement amount of the workpiece 20 held by the chuck device 21 from the rotation amount of the rotating roller 18 a.

  The liquid containing the grinding powder is introduced into the internal space 32 of the flat nozzle main body 12 from the grinding powder-containing liquid introduction part 14 at a pressure of, for example, 0.1 MPa, and the solenoid valve of the backflow prevention air introduction part 153 is introduced. 153b is opened, and air is introduced into the partial spaces 331 and 332 of the air jet forming nozzle 13 from the backflow prevention air introduction portion 153 at a pressure of, for example, 0.15 MPa.

  The air introduced into the partial spaces 331 and 332 flows into the internal space 32 of the flat nozzle main body 12 from the openings 35 of the air jet forming nozzle 13. The liquid containing the powder for grinding introduced into the internal space 32 of the flat nozzle main body 12 is 0.15 MPa from the injection port 11 using the pressure of the air flowing from each opening 35 of the air jet forming nozzle 13. It flows out in a band shape with a moderate pressure (see FIG. 9A).

  Next, as shown in FIG. 9B, when the workpiece 20 is opposed to the first region 111 of the ejection port 11 during the movement of the workpiece 20 by the moving device 18, the first unit air is controlled by the control device 16 ′. The electromagnetic valve 151b of the introduction part 151 is opened, and air is introduced from the first unit air introduction part 151 into the first partial space 331 at a pressure of 0.2 MPa to 0.5 MPa, for example.

  The air introduced into the first partial space 331 is ejected into the internal space 32 of the flat nozzle body 12 from each opening 35 communicating with the first partial space 331. The liquid containing the powder for grinding introduced into the internal space 32 of the flat nozzle body 12 uses the pressure of the air ejected from each opening 35 communicating with the first partial space 331, and the first of the ejection ports 11. It is ejected in a band shape toward the workpiece 20 from one region 111 with a strong pressure of about 0.2 MPa to 0.5 MPa.

  Next, as shown in FIG. 9C, when the work 20 is moved by the moving device 18, the second unit air is introduced by the control device 16 ′ when the work 20 faces the second region of the injection port 11. The electromagnetic valve 152b of the part 152 is opened, and air is introduced from the second unit air introduction part 152 into the second partial space 332, for example, at a pressure of 0.2 MPa to 0.5 MPa.

  The air introduced into the second partial space 332 is ejected into the internal space 32 of the flat nozzle body 12 from each opening 35 communicating with the second partial space 332. The liquid containing the powder for grinding introduced into the internal space 32 of the flat nozzle main body 12 uses the pressure of air ejected from each opening 35 communicating with the second partial space 332, and the first of the injection ports 11 is used. Injected in a strip shape toward the workpiece 20 with a strong pressure of about 0.2 MPa to 0.5 MPa from the two regions 112.

  During the movement of the workpiece 20 by the moving device 18, the liquid ejected from the ejection port 11 concentrates continuously on the linear area facing the ejection port 11 on the workpiece 20, and thus continuously collides. The work 20 can be deeply cut in the thickness direction due to accumulation of impact from the powder for use, and as a result, the work 20 can be cut.

  Next, as shown in FIG. 9 (d), when the workpiece 20 does not face the first region 111 of the ejection port 11 during the movement of the workpiece 20 by the moving device 18, the first unit is controlled by the control device 16 ′. The electromagnetic valve 151b of the air introduction part 151 is closed, and the introduction of air from the first unit air introduction part 151 to the first partial space 331 is stopped. Thereby, the ejection of the liquid from the first region 111 of the ejection port 11 is stopped. At this time, since air is introduced into the first partial space 331 from the backflow preventing air introducing portion 153, the backflow of liquid from the internal space 32 of the flat nozzle body 12 to the first partial space 331 is prevented.

  Next, as shown in FIG. 9 (e), when the workpiece 20 does not face the second region 112 of the ejection port 11 during the movement of the workpiece 20 by the moving device 18, the second unit is controlled by the control device 16 ′. The electromagnetic valve 152b of the air introduction part 152 is closed, and the introduction of air from the second unit air introduction part 152 to the second partial space 332 is stopped. Thereby, the ejection of the liquid from the second region 112 of the ejection port 11 is stopped. At this time, since air is introduced into the second partial space 332 from the backflow preventing air introduction portion 153, the backflow of liquid from the internal space 32 of the flat nozzle body 12 to the second partial space 332 is prevented.

Next, a specific example verified using the first embodiment and the second embodiment will be described.
As the flat nozzle main body 12, the length of the ejection port 11 in the longitudinal direction was 90 mm and the length in the width direction was 1.6 mm, and the workpiece 20 was one having a side length of 80 mm. The workpiece 20 was moved by the moving device 18 at a moving speed of 25 mm / sec.

  In the first embodiment, when the workpiece 20 is not opposed to the injection port 11, air is introduced from the air introduction unit 15 into the air jet generation space 33 at a pressure of 0.1 MPa, and the consumption of the air is 18 L. / Sec. Moreover, when the workpiece | work 20 was facing the injection port 11, air was introduce | transduced into the air jet production | generation space 33 from the air introduction part 15 with the pressure of 0.3 MPa, and the consumption of the said air was 46 L / sec.

  The time during which the workpiece 20 was opposed to the ejection port 11 was (length of the workpiece 20 + length of the ejection port 11) / moving speed = 6.8 seconds. Therefore, the total amount of air consumed during the time when the workpiece 20 is facing the ejection port 11 was 46 × 6.8 = 312.8 L.

  On the other hand, in the second embodiment, when the workpiece 20 is not opposed to the first region 111 of the injection port 11, air is supplied from the first unit air introduction part 151 to the first partial space 331 with a pressure of 0.1 MPa. The air consumption was 9 L / sec. Further, when the workpiece 20 is opposed to the first region 111 of the injection port 11, air is introduced from the first unit air introduction part 151 into the first partial space 331 with a pressure of 0.3 MPa, and the amount of consumption of the air Was 23 L / sec. Further, when the workpiece 20 is not opposed to the second region 112 of the ejection port 11, air is introduced from the second unit air introduction part 151 into the second partial space 332 with a pressure of 0.1 MPa, and the amount of consumption of the air Was 9 L / sec. Further, when the workpiece 20 is opposed to the second region 112 of the ejection port 11, air is introduced from the second unit air introduction part 152 to the second partial space 332 with a pressure of 0.3 MPa, and the consumption amount of the air Was 23 L / sec.

  As shown in FIG. 9B, the time when the workpiece 20 faces the first area 111 but does not face the second area 112 is the length / movement speed of the first area = 1.8 seconds. Yes, the air consumption here was (23 + 9) × 1.8 = 57.6L. Further, as shown in FIG. 9C, the time during which the workpiece 20 faces both the first region 111 and the second region 112 is the length / moving speed of the workpiece = 3.2 seconds, where The consumption of air was (23 + 23) × 3.2 = 147.2L. Also, as shown in FIG. 9D, the time when the workpiece 20 is opposed to the second region 112 but not the first region 111 is the length / movement speed of the second region = 1. It was 8 seconds, and the air consumption amount here was (23 + 9) × 1.8 = 57.6 L. Therefore, the total amount of air consumed during the time when the workpiece 20 is opposed to the injection port 11 (that is, the steps shown in FIG. 9B to FIG. 9D) was 262.4L.

  From the above verification results, the amount of air consumed during the time when the workpiece 20 is facing the ejection port 11 is 262.4 / 3122.8 in the second embodiment as compared to the first embodiment. It was confirmed that x100 was reduced to about 83%.

  That is, according to the second embodiment as described above, the same operational effects as the first embodiment can be obtained, and the overall air consumption can be reduced while maintaining the machining efficiency of the workpiece 20. Can be reduced. In addition, the liquid containing the powder for grinding sprayed to the outside of the workpiece 20 collides with another component member of the workpiece processing apparatus 10 ′ (for example, the rotating roller 18a of the moving device 18), and the other component member. Can be prevented from being damaged.

  In the second embodiment as described above, as shown in FIGS. 6 and 7, the air jet generation space 33 ′ of the air jet forming nozzle 13 ′ is formed in the longitudinal direction of the injection port 11 by the dividing member 17. It includes two divided partial spaces 331 and 332, and the air introduction portion 15 ′ has two unit air introduction portions 151 and 152 connected to the partial spaces 331 and 332, respectively, so as to be individually communicated with each other. However, the control device 16 ′ individually controls the unit air introduction portions 151 and 152. However, the present invention is not limited to this, and as shown in FIG. The air jet generation space includes three or more partial spaces 331, 332, and 333 that are partitioned by the partition members 171 and 172 in the longitudinal direction of the injection port 11. '' Has three or more unit air introduction portions 151, 152, 152 ′ connected to individually communicate with the partial spaces 331, 332, 333, respectively. Each unit air introduction part 151,152,152 'may be controlled separately, respectively (3rd Embodiment). In this case as well, the same operational effects as in the first embodiment can be obtained, and the overall air consumption can be further reduced as compared with the second embodiment.

  In the first to third embodiments as described above, the moving device 18 is configured to move the workpiece 20 in a direction parallel to the longitudinal direction of the ejection port 11, but is not limited thereto. Instead, the workpiece 20 may be configured to move in a direction inclined by a predetermined acute angle with respect to the longitudinal direction of the ejection port 11. As the inclination angle of the movement direction of the workpiece 20 with respect to the longitudinal direction of the ejection port 11 increases, the collision position of the liquid ejected from the ejection port 11 is dispersed, so the processing speed in the thickness direction of the workpiece 20 decreases. For this reason, the inclination angle of the moving direction of the workpiece 20 with respect to the longitudinal direction of the ejection port 11 is preferably small, and practically preferably 15 ° or less.

  Further, in the first to third embodiments as described above, the plurality of rotating rollers 18a and the rotation driving mechanism that rotationally drives the rotating rollers 18a are used as the moving device 18. However, the present invention is not limited to this. For example, a ball screw feeding device may be used as the moving device 18. In this case, the control device 16 may calculate the movement amount of the workpiece 20 from the rotation amount of the ball screw shaft.

  In the first to third embodiments as described above, the moving device 18 is configured to linearly move the workpiece 20 with respect to the flat nozzle body 12 in a stationary state. However, the present invention is not limited to this. Instead, the flat nozzle body 12 may be configured to linearly move with respect to the workpiece 20 in a stationary state.

DESCRIPTION OF SYMBOLS 10 Work processing apparatus 10 'Work processing apparatus 11 Injection hole 111 1st area | region 112 2nd area | region 12 Flat nozzle main body 12a Main body part 12b Cylindrical part 13 Air jet formation nozzle 13' Air jet formation nozzle 13a Nozzle part 13b Flange part 14 Grinding Powder-containing liquid introduction part 14a Liquid storage part 14b Liquid feed pump 15 Air introduction part 15 'Air introduction part 15''Air introduction part 151 Unit air introduction part 152 Unit air introduction part 152' Unit air introduction part 153 Backflow prevention air Introduction part 16 Control device 16 ′ Control device 16 ″ Control device 17 Segment member 171 Segment member 172 Segment member 18 Moving device 18a Rotating roller 20 Work 21 Chuck device 32 Internal space 33 Air jet generation space 33 ′ Air jet generation space 33 ′ '' Air jet generation space 331 Partial space 332 Partial space 3 3 subspace 35 opening 41 seal member 42 sealing member

Claims (12)

A flat nozzle body that defines an internal space that opens at an injection port extending in the longitudinal direction; and a powder-containing liquid introduction portion for grinding connected to communicate with the internal space of the flat nozzle body;
An air jet forming nozzle that defines an air jet generation space that opens in the internal space of the flat nozzle body;
An air introduction portion connected to communicate with the air jet generation space of the air jet forming nozzle;
A control device for controlling the air introduction amount of the air introduction unit;
Inclining the flat nozzle body and the workpiece by a predetermined acute angle with respect to the direction parallel to the longitudinal direction of the ejection port or the longitudinal direction of the ejection port so that the workpiece passes through a position facing the ejection port. A moving device for relative movement in the specified direction;
Equipped with a,
The air jet generation space of the air jet forming nozzle includes two partial spaces that are partitioned by a partition member in the longitudinal direction of the injection port,
The air introduction part has two unit air introduction parts connected to communicate with each partial space individually,
The workpiece processing apparatus , wherein the control device individually controls each unit air introduction section . A flat nozzle body that defines an internal space that opens at a jet port extending in the longitudinal direction;
A powder-containing liquid introduction part for grinding connected so as to communicate with the internal space of the flat nozzle body;
An air jet forming nozzle that defines an air jet generation space that opens in the internal space of the flat nozzle body;
An air introduction portion connected to communicate with the air jet generation space of the air jet forming nozzle;
A control device for controlling the air introduction amount of the air introduction unit;
Inclining the flat nozzle body and the workpiece by a predetermined acute angle with respect to the direction parallel to the longitudinal direction of the ejection port or the longitudinal direction of the ejection port so that the workpiece passes through a position facing the ejection port. A moving device for relative movement in the specified direction;
With
The air jet generation space of the air jet forming nozzle includes three or more partial spaces partitioned by a partition member in the longitudinal direction of the injection port,
The air introduction part has three or more unit air introduction parts connected to individually communicate with each partial space,
The control device is configured to individually control each unit air introduction portion, and a workpiece machining device. The control device applies an air introduction pressure to the partial space when the work does not face a region corresponding to each partial space of the ejection port to the partial space when the work faces the region. The workpiece machining apparatus according to claim 1 , wherein the workpiece machining apparatus is configured to be lower than an air introduction pressure. The air jet generation space of the air jet forming nozzle is opened at a plurality of positions including a position corresponding to an end portion on the injection port side of the partition member, with an interval in the longitudinal direction of the injection port. ,
The opening part in the position corresponding to the edge part by the side of the said injection port of the said division member is connected to both of two adjacent partial spaces through the said division member, The Claim 1 thru | or 3 characterized by the above-mentioned. The workpiece processing apparatus according to any one of the above. Longitudinal length of the injection port is 35Mm～90mm, the length of the perpendicular transverse direction to the longitudinal direction, claims 1 to 4, characterized in that a 0.8mm~2.4mm The workpiece processing apparatus according to any one of the above. When the workpiece faces a region corresponding to each partial space in the injection port, the air introduction pressure from the unit air introduction portion communicating with the partial space to the partial space is 0.2 MPa to 0.5 MPa. The workpiece machining apparatus according to claim 1 , wherein the workpiece machining apparatus is provided. A flat nozzle main body that defines an internal space that opens at a jet port that extends in the longitudinal direction and the workpiece, a direction parallel to the longitudinal direction of the jet port or the workpiece so that the workpiece passes through a position facing the jet port. Relative movement in a direction inclined by a predetermined acute angle with respect to the longitudinal direction of the injection port;
The air jet generation space of the air jet forming nozzle that introduces a liquid containing powder for grinding into the internal space of the flat nozzle body and defines an air jet generation space that opens in the internal space of the flat nozzle body Introducing air into the
Injecting the liquid containing the powder for grinding from the injection port toward the workpiece together with air, and cutting the workpiece in a direction substantially parallel to the longitudinal direction of the injection port;
With
The air jet generation space of the air jet forming nozzle includes two partial spaces that are partitioned by a partition member in the longitudinal direction of the injection port,
The work cutting method, wherein, in the cutting step, an air introduction pressure to each partial space is individually controlled . A flat nozzle main body that defines an internal space that opens at a jet port that extends in the longitudinal direction and the workpiece, a direction parallel to the longitudinal direction of the jet port or the workpiece so that the workpiece passes through a position facing the jet port. Relative movement in a direction inclined by a predetermined acute angle with respect to the longitudinal direction of the injection port;
The air jet generation space of the air jet forming nozzle that introduces a liquid containing powder for grinding into the internal space of the flat nozzle body and defines an air jet generation space that opens in the internal space of the flat nozzle body Introducing air into the
Injecting the liquid containing the powder for grinding from the injection port toward the workpiece together with air, and cutting the workpiece in a direction substantially parallel to the longitudinal direction of the injection port;
With
The air jet generation space of the air jet forming nozzle includes three or more partial spaces partitioned by a partition member in the longitudinal direction of the injection port,
In the cutting step, a work cutting method characterized by individually controlling the pressure of air introduced into each partial space. In the cutting step, the partial pressure when the work is opposed to the area is the air introduction pressure to the partial space when the work is not opposed to the area corresponding to each partial space of the injection port. The work cutting method according to claim 7 or 8 , wherein the pressure is lower than an air introduction pressure. The air jet generation space of the air jet forming nozzle is opened at a plurality of positions including a position corresponding to an end portion on the injection port side of the partition member, with an interval in the longitudinal direction of the injection port. ,
Opening at a position corresponding to an end portion of the injection port side of said section member, according to claim 7 to 9, characterized in that it communicates with both of the two subspaces adjacent via the partition member The workpiece cutting method according to any one of the above. Longitudinal length of the injection port is 35Mm～90mm, the length of the perpendicular transverse direction to the longitudinal direction, claims 7 to 10, characterized in that a 0.8mm~2.4mm The workpiece cutting method according to any one of the above. When the workpiece is opposed to a region corresponding to each subspace of the injection port, to the subspace, claims 7 to 11 and introducing the air in the introduction pressure of 0.2MPa~0.5MPa The workpiece cutting method according to any one of the above.

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